JP6847074B2 - Gasket and flow path joint structure - Google Patents

Description

The present invention relates to a gasket and a flow path joint structure.

Pumps, valves, accumulators for fluid piping paths such as chemicals, high-purity liquids, ultra-pure water, or cleaning liquids handled in manufacturing processes in various technical fields such as semiconductor manufacturing, medical / pharmaceutical manufacturing, and food processing / chemical industry. , A flow path joint structure provided with a gasket to prevent fluid leakage is adopted as a connection structure for connecting the flow path holes formed in two fluid devices such as a filter, a flow meter, a pressure sensor, and a piping block. ing.
The gasket of this flow path joint structure is provided with a pair of cylindrical press-fitting portions on both sides in the axial direction thereof. These press-fitting portions function as seals to prevent fluid leakage by being press-fitting into the cylindrical seal grooves formed at the connecting ends of the flow path holes of both fluid devices (FIG 14B of Patent Document 1). reference).

International Publication No. 2017/176815

The flow path joint structure may be disassembled by removing the gasket from both fluid devices, for example, during maintenance work. In this case, one fluid device is pulled outward in the axial direction to be removed from one press-fitting portion of the gasket, and then the one press-fitting portion is gripped with a jig and pulled outward in the axial direction to press-fit the other of the gasket. The section can be removed from the other fluid device. However, when gripping the other press-fitting portion with a jig, there is a risk of damaging the peripheral surface of the seal formed on the outer peripheral surface of the press-fitting portion.

The present invention has been made in view of such circumstances, and an object of the present invention is to enable the gasket to be removed from the fluid device without damaging the sealing peripheral surface of the gasket.

(1) The gasket of the present invention has a tubular shape formed on the end faces of both fluid devices in the radial direction outward from the flow path holes in order to connect the flow path holes formed in the two fluid devices. A pair of tubular press-fitting portions to be press-fitted into each of the seal grooves are provided on both sides in the axial direction, and on the outer peripheral surface of each press-fitting portion, a seal peripheral surface that adheres to the outer peripheral surface of the seal groove and exerts a sealing function is provided. A gasket formed, in which one of the pair of press-fitting portions is press-fitted into the seal groove of the fluid device, and is at least axially outward from the end face of the fluid device. A groove portion that partially opens is formed on the outer peripheral surface.

According to this gasket, in a state where one of the press-fitting portions of the pair of press-fitting portions is press-fitted into the seal groove of the fluid device, a jig is hooked on the groove portion formed on the outer peripheral surface of the gasket to the outside in the axial direction. The one press-fit portion of the gasket can be removed from the seal groove of the fluid device by pulling to. At that time, since the seal peripheral surface on the outer peripheral surface of the other press-fitting portion is not gripped by the jig, it is possible to prevent the seal peripheral surface from being damaged.

(2) It is preferable that the groove width in the axial direction of the groove portion is set within the axial length range between the seal peripheral surfaces in the pair of press-fitting portions.
In this case, since the groove portion is not formed on the seal peripheral surface of each press-fitted portion, even if the groove portion is formed on the outer peripheral surface of the gasket, the sealing performance of each press-fitted portion is not deteriorated.

(3) The radial groove depth of the groove is preferably set so that the radial thickness of the gasket on the bottom surface of the groove is equal to or greater than the radial thickness of the press-fitting portion.
In this case, since the thickness of the gasket in the radial direction at the position where the groove is formed can be secured, it is possible to prevent the sealing performance from being deteriorated due to the deformation of the gasket at the thickness portion.

(4) The groove portion is formed so that the pair of press-fitting portions are all press-fitted into the seal grooves of the two fluid devices so that the entire ends are opened between the end faces of the two fluid devices. preferable.
In this case, regardless of whether one press-fitting portion of the gasket is press-fitted into any of the sealing grooves of both fluid devices, the entire groove portion opens on the outer peripheral surface of the gasket, so that the jig is formed in the groove portion formed on the outer peripheral surface of the gasket. Can be reliably hooked. Therefore, even if one press-fitting portion of the gasket is press-fitted into any of the seal grooves of both fluid devices, the press-fitting portion of the gasket can be reliably removed from the seal groove.

(5) The flow path joint structure of the present invention comprises the gasket according to any one of (1) to (4) above for connecting the flow path holes formed in the two fluid devices, and the flow path joint structure of both fluid devices. Each includes a pair of tubular seal grooves formed at the connecting ends of the flow path holes and into which the corresponding press-fitted portions of the gasket are press-fitted.

According to this flow path joint structure, the jig is placed in the groove formed on the outer peripheral surface of the gasket while one of the press-fitted portions of the pair of press-fitted portions of the gasket is press-fitted into the seal groove of the fluid device. By hooking and pulling outward in the axial direction, the one press-fitting portion of the gasket can be removed from the seal groove of the fluid device. At that time, since the seal peripheral surface on the outer peripheral surface of the other press-fitting portion is not gripped by the jig, it is possible to prevent the seal peripheral surface from being damaged.

According to the present invention, the gasket can be removed from the fluid device without damaging the sealing peripheral surface of the gasket.

It is sectional drawing which shows an example of the flow path joint structure which concerns on one Embodiment of this invention. It is an enlarged sectional view of the flow path joint structure. It is an exploded enlarged sectional view of the flow path joint structure. It is an enlarged cross-sectional view which shows the state in the process of disassembling the flow path joint structure. It is an enlarged cross-sectional view which shows the state in the process of disassembling the flow path joint structure. It is an enlarged sectional view of the flow path joint structure which shows the deformation example of a groove part. It is an enlarged sectional view of the flow path joint structure which shows the other modified example of a groove part.

Next, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.
[Flow path joint structure]
FIG. 1 is a cross-sectional perspective view showing an example of a flow path joint structure according to an embodiment of the present invention. In FIG. 1, the flow path joint structure 1 of the present embodiment is formed, for example, in two piping blocks (fluid devices) 11 and 12 that are overlapped with each other in a piping path through which a chemical solution used in a semiconductor manufacturing apparatus flows. It is used as a connection structure for connecting the flow path holes 13 and 14 to each other.

In the example of FIG. 1, a plurality of small second piping blocks 12 and 12 connected to a flow meter, a pressure sensor, and the like are superposed on a large first piping block 11 made of a base block to form the piping path. The circular flow path holes 13 opened at two locations on the upper surface of the first piping block 11 and the circular flow path holes 14 and 14 opened at the lower surfaces of the second piping blocks 12 and 12, respectively. It is connected using the road joint structure 1. In the present embodiment, the flow path holes 13 of the first piping block 11 and the flow path holes 14 and 14 of the second piping blocks 12 and 12 are all formed to have the same diameter.

The flow path joint structure 1 of the present embodiment is used as a connection structure for connecting the flow path holes 13 and 14 of the piping blocks 11 and 12, but other fluids such as a pump, a valve, an accumulator, and a filter. It can also be applied to a connection structure for connecting the flow path holes of the device.

FIG. 2 is an enlarged cross-sectional view of the flow path joint structure 1. FIG. 3 is an exploded enlarged cross-sectional view of the flow path joint structure 1. In FIGS. 2 and 3, for convenience of explanation, the piping blocks 11 and 12 are arranged sideways (the same applies to FIGS. 4 to 7).
In FIGS. 2 and 3, the flow path joint structure 1 includes a gasket 2 for connecting the flow path holes 13 and 14 of the two piping blocks 11 and 12 and a flow path hole 13 of both piping blocks 11 and 12. The inner diameter seal groove 3 formed at each of the connection ends of 14 and the end faces 11a and 12a of both piping blocks 11 and 12 on the connection end side are formed radially outward of the flow path holes 13 and 14, respectively. It is provided with a diameter outer seal groove (seal groove) 4.

[Inner diameter seal groove and outer diameter seal groove]
In FIG. 3, the inner diameter seal groove 3 of the first piping block 11 is notched on the peripheral surface of the connection end of the flow path hole 13 so as to gradually increase in diameter from the inner side in the axial direction to the outer end in the axial direction. It is said to be a tapered groove. Similarly, the inner diameter seal groove 3 of the second piping block 12 is cut out on the peripheral surface of the connection end of the flow path hole 14 so as to gradually increase in diameter from the inner side in the axial direction to the outer end in the axial direction. It is said to be a tapered groove.

The outer diameter outer seal grooves 4 of the first piping block 11 and the second piping block 12 are each formed in a cylindrical shape. The inner peripheral surface 41 of each outer diameter seal groove 4 has a circumferential surface 41a extending straight in the axial direction and a tapered guide peripheral surface 41b formed axially outward from the circumferential surface 41a in a cross-sectional view. have.

The axial inner end of the guide peripheral surface 41b is connected to the axial outer end of the circumferential surface 41a. The guide peripheral surface 41b is formed so as to gradually reduce in diameter from the inner end in the axial direction to the outer end in the axial direction (from the circumferential surface 41a in FIG. 3 to the gasket 2 side described later). As a result, the guide peripheral surface 41b guides the press-fitting of the outer-diameter press-fitting portion 23 of the gasket 2 into the outer-diameter sealing groove 4.

The entire outer peripheral surface 42 of each outer diameter seal groove 4 is a circumferential surface that extends straight in the axial direction in a cross-sectional view. The flow path joint structure 1 may include at least a pair of outer diameter seal grooves 4 out of a pair of inner diameter seal grooves 3 and a pair of outer diameter outer seal grooves 4.

[gasket]
In FIGS. 2 and 3, the gasket 2 has a pair of diameters that are press-fitted into the main body portion 21 (the portion indicated by cross-hatching in the drawing) and the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively. It includes an inner press-fitting portion 22 and a pair of outer-diameter press-fitting portions (press-fitting portions) 23 that are press-fitted into the outer-diameter seal grooves 4 of the first and second piping blocks 11 and 12, respectively. The gasket 2 may include at least a pair of outer diameter press-fitting portions 23 out of a pair of inner diameter press fitting portions 22 and a pair of outer diameter outer press fitting portions 23.

The main body portion 21 is formed in an annular shape at the central portion in the axial direction of the gasket 2, and is a thick portion in which the thickness of the gasket 2 in the radial direction (vertical direction in the drawing) is increased. In the state shown in FIG. 2, the main body 21 is arranged between the end faces 11a and 12a of both piping blocks 11 and 12, and a gap S is provided on the radial outer side of the main body 21 between both end faces 11a and 12a. It is formed.

The pair of inner diameter press-fitting portions 22 are triangular portions in a cross-sectional view formed in an annular shape so as to project from the inner diameter of each of both ends in the axial direction of the main body portion 21 to the outer diameter in the axial direction.
The inner peripheral surface of each diameter inner press-fitting portion 22 is formed to have substantially the same diameter as the inner peripheral surface of the main body portion 21, and is formed to have substantially the same diameter as the flow path holes 13 and 14.

Therefore, the inner peripheral surface of the main body portion 21, the inner peripheral surface of the pair of inner diameter press-fitting portions 22, and the peripheral surfaces of the flow path holes 13 and 14 are formed substantially flush with each other in cross-sectional view. As a result, inside the main body 21 and the pair of inner diameter press-fitting portions 22, the flow path holes 13 and 14 are connected to each other, and a connection flow path 24 having a circular shape when viewed from the axial direction is formed. .. As described above, since a step is not formed between the flow path holes 13 and 14 and the inner peripheral surface of the gasket 2, it is possible to prevent the fluid flowing in the flow path holes 13 and 14 from staying.

The outer peripheral surface of each diameter inner press-fitting portion 22 is a tapered peripheral surface 221 whose diameter gradually increases from the axial outer end to the axial inner end. The tapered peripheral surface 221 of the pair of inner diameter press-fitting portions 22 is a seal peripheral surface that closely adheres to the peripheral surfaces of the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively, to exert a sealing function. .. As a result, the pair of inner diameter press-fitting portions 22 of the gasket 2 are press-fitted into the inner diameter seal grooves 3 of the first and second piping blocks 11 and 12, respectively, so that the seal closest to the flow path holes 13 and 14 ( It functions as a primary seal) and prevents the fluid in the flow path holes 13 and 14 from leaking to the outside.

The pair of outer diameter press-fitting portions 23 are formed in a cylindrical shape so as to protrude outward in the axial direction from the outer diameter of each of both ends in the axial direction of the main body portion 21. The outer peripheral surface of each diameter outer press-fitting portion 23 is formed to have substantially the same diameter as the outer peripheral surface of the main body portion 21, and is formed substantially flush with the outer peripheral surface of the main body portion 21. As a result, in the present embodiment, the outer peripheral surface of the pair of outer diameter press-fitting portions 23 and the outer peripheral surface of the main body portion 21 are the outer peripheral surfaces of the gasket 2. The axial length of each diameter outer press-fitting portion 23 is formed to be slightly shorter than the axial length (groove depth) of the corresponding diameter outer seal groove 4.

A part of the inner peripheral surface 231 of each outer diameter press-fitting portion 23 (the portion axially outer than the virtual line shown by the alternate long and short dash line in the figure) is in close contact with the circumferential surface 41a of the corresponding outer diameter seal groove 4. It is said that the peripheral surface of the seal is 231a, which exerts a sealing function. The other portion of the inner peripheral surface 231 of each outer diameter outer press-fitting portion 23 (the portion axially inner side of the virtual line indicated by the alternate long and short dash line in the figure) is relative to the guide peripheral surface 41b of the corresponding outer diameter outer seal groove 4. It is a non-seal peripheral surface 231b that faces each other with a predetermined gap and hardly exerts a sealing function. The virtual line indicated by the two-dot chain line is a virtual line extending in the radial direction of the gasket 2 so as to pass through the boundary between the circumferential surface 41a and the guide peripheral surface 41b on the inner peripheral surface 41 of each diameter outer seal groove 4. It is a line (see FIG. 2).

A part of the outer peripheral surface 232 of each outer diameter press-fitting portion 23 (the portion axially outer than the virtual line shown by the alternate long and short dash line in the figure) is in close contact with the outer peripheral surface 42 of the corresponding outer diameter seal groove 4 and seals. The peripheral surface of the seal is 232a, which exerts its function. The other portion of the outer peripheral surface 232 of each diameter outer press-fitting portion 23 (the portion on the inner side in the axial direction from the virtual line shown by the alternate long and short dash line in the figure) is a non-seal peripheral surface 232b that hardly exerts a sealing function. As a result, the pair of outer diameter outer press-fitting portions 23 of the gasket 2 are press-fitted into the outer diameter outer seal grooves 4 of the first and second piping blocks 11 and 12, respectively, so that the fluid in the flow path holes 13 and 14 is externally pressed. Functions as a secondary seal to prevent leakage to.

Although the outer diameter press-fitting portion 23 of the present embodiment is formed in a cylindrical shape, it may be formed in a polygonal tubular shape. In this case, the outer diameter seal groove 4 may also be formed in the shape of a polygonal cylinder according to the shape of the outer diameter press-fitting portion 23.

[Procedure for disassembling the flow path joint structure]
The flow path joint structure 1 of the present embodiment is disassembled as shown in FIG. 3 by removing the gaskets 2 for both piping blocks 11 and 12 from the state shown in FIG. 2, for example, during maintenance work. The following two methods can be considered as the disassembly procedure of the flow path joint structure 1.

In the first disassembly procedure, from the state shown in FIG. 2, the first piping block 11 is pulled outward in the axial direction to be removed from the press-fitting portions 22 and 23 on one side (left side in the drawing) of the gasket 2, and is shown in FIG. Make it a state. Then, from the state shown in FIG. 4, by pulling one of the press-fitting portions 22 and 23 outward in the axial direction (left side in the drawing), the press-fitting portions 22 and 23 on the other side (right side in the drawing) of the gasket 2 are changed to the second. 2 Remove from the piping block 12.

In the second disassembly procedure, from the state shown in FIG. 2, the second piping block 12 was pulled outward in the axial direction and removed from the press-fitting portions 22 and 23 on one side (right side in the drawing) of the gasket 2, as shown in FIG. It shall be in the state shown. Then, from the state shown in FIG. 5, by pulling one of the press-fitting portions 22 and 23 outward in the axial direction (right side in the drawing), the press-fitting portion 22 and 23 on the other side (left side in the drawing) of the gasket 2 can be moved to the second position. 1 Remove from the piping block 11.

[Groove]
In the state of disassembling the flow path joint structure 1 shown in FIG. 4 or 5, an annular groove portion 5 for hooking a jig on the gasket 2 is formed on the outer peripheral surface of the gasket 2.
The groove portion 5 of the present embodiment is formed with a concave cross section on the outer peripheral surface of the main body portion 21 of the gasket 2. Further, in the groove portion 5 of the present embodiment, the state shown in FIG. 2, that is, the pair of diameter inner press-fitting portions 22 and the pair of diameter outer press-fitting portions 23 of the gasket 2 are the inner diameter seal grooves 3 and the diameters of both piping blocks 11 and 12. In a state where they are press-fitted into the outer seal grooves 4, all of the gaps S between the end faces 11a and 12a of the piping blocks 11 and 12 are formed so as to open outward in the radial direction.

As a result, in the present embodiment, only one of the press-fitting portions 22 and 23 of the gasket 2 (one side in the axial direction) is press-fitted into the seal grooves 3 and 4 of the second piping block 12 (see FIG. 4). Regardless of the state in which only the press-fitting portions 22 and 23 on the other side (the other side in the axial direction) of the gasket 2 are press-fitted into the seal grooves 3 and 4 of the first piping block 11 (see FIG. 5), the groove portion Since all of 5 are open outward in the radial direction, the jig can be reliably hooked on the groove 5.

In one of the states shown in FIGS. 4 and 5, at least a part of the groove portion 5 opens outward in the axial direction from the end surface of the piping block into which the press-fitting portions 22 and 23 of the gasket 2 are press-fitted. It suffices if it is formed as follows.

In FIG. 3, the axial groove width W of the groove portion 5 is the axial length between the seal peripheral surfaces 232a of the pair of outer diameter press-fitting portions 23 (between the two virtual lines indicated by the two-dot chain line in the drawing). It suffices if it is set within the range of L. Therefore, if the groove width W is set as described above, the groove portion 5 has not only the outer peripheral surface of the main body portion 21 but also the outer peripheral surface of the outer diameter press-fitting portion 23 in the axial direction, as in the modified example shown in FIG. It may also be formed on a surface, and may be formed longer outward in the axial direction than the end faces 11a, 12a of the piping blocks 11 and 12.

Further, in FIG. 3, as in the present embodiment, the inner diameter seal groove 3 and the outer diameter seal groove 4 are formed in the main body portion 21 of the gasket 2, so that the thickness of the main body portion 21 in the radial direction is thickened. If so, the radial groove depth H of the groove 5 is set so that the radial thickness t1 of the main body 21 on the bottom surface of the groove 5 is equal to or greater than the radial thickness t2 of the outer diameter press-fitting portion 23. It should be done. Therefore, as long as the groove depth H is set as described above, the groove portion 5 may be formed deeper in the radial direction than in FIG. 3, as in the modified example shown in FIG. 7.

The groove portion 5 may be formed in another cross-sectional shape as long as a jig can be hooked, such as an arc-shaped cross section, in addition to the concave cross section. Further, although the groove portion 5 of the present embodiment is formed in an annular shape, it may be formed at one or a plurality of locations in the circumferential direction. Further, the groove portions 5 may be formed at a plurality of positions in the axial direction on the outer peripheral surface of the gasket 2.

[effect]
As described above, according to the flow path joint structure 1 of the present embodiment, one of the press-fitting portions 22 and 23 of the gasket 2 is press-fitted into the seal grooves 3 and 4 of the one piping block 11 (12). By hooking a jig on the groove 5 formed on the outer peripheral surface of the gasket 2 and pulling it outward in the axial direction, the one press-fitting portion of the gasket 2 from the seal grooves 3 and 4 of the one piping block 11 (12). 22, 23 can be removed. At that time, since the seal peripheral surface 232a on the outer peripheral surfaces of the other press-fitting portions 22 and 23 is not gripped by the jig, it is possible to prevent the seal peripheral surface 232a from being damaged.

Further, since the groove width W in the axial direction of the groove portion 5 is set within the range of the axial length L between the seal peripheral surfaces 232a of the pair of outer diameter outer press-fitting portions 23, the groove portion 5 is press-fitted outside each diameter. It is not formed on the seal peripheral surface 232a of the portion 23. As a result, even if the groove portion 5 is formed on the outer peripheral surface of the gasket 2, the sealing performance of the outer diameter press-fitting portion 23 does not deteriorate.

The radial groove depth H of the groove portion 5 is set so that the radial thickness t1 of the gasket 2 (main body portion 21) on the bottom surface of the groove portion 5 is equal to or greater than the radial thickness t2 of the press-fitting portion. ing. As a result, it is possible to secure the radial thickness t1 of the gasket 2 at the position where the groove portion 5 is formed, so that it is possible to prevent the sealing performance from being deteriorated due to the deformation of the gasket 2 at the thickness t1 portion. Can be done.

Further, in the groove portion 5, both the inner diameter press-fitting portion 22 and the pair of the outer diameter outer press-fitting portions 23 are press-fitted into the inner diameter seal groove 3 and the outer diameter seal groove 4 of both piping blocks 11 and 12, respectively. It is formed so that all of the end faces 11a and 12a of the piping blocks 11 and 12 are open. As a result, even if one of the press-fitting portions 22 and 23 of the gasket 2 is press-fitted into any of the sealing grooves 3 and 4 of both piping blocks 11 and 12, all of the groove portions 5 are radially outward on the outer peripheral surface of the gasket 2. Since the opening is opened, the jig can be reliably hooked on the groove 5 of the gasket 2. Therefore, even if one of the press-fitting portions 22 and 23 of the gasket 2 is press-fitted into any of the seal grooves 3 and 4 of both piping blocks 11 and 12, the press-fitting portions 22 and 23 of the gasket 2 are pressed from the seal grooves 3 and 4. It can be reliably removed.

The embodiments disclosed this time should be considered to be exemplary in all respects and not restrictive. The scope of the present invention is indicated by the scope of claims, not the above-mentioned meaning, and is intended to include the meaning equivalent to the scope of claims and all modifications within the scope.
For example, in the above embodiment, the flow path joint structure 1 used in the semiconductor field has been described as an example, but the field is not limited to this, and the field is not limited to this, and is related to the liquid crystal / organic EL field, the medical / pharmaceutical field, or the automobile-related field. It can also be used in the field.

1 Flow path joint structure 2 Gasket 4 Diameter outer seal groove (seal groove)
5 Groove 11 1st piping block (fluid device)
11a End face 12 Second piping block (fluid device)
12a End face 13 Flow path hole 14 Flow path hole 23 diameter Outer press-fitting part (press-fitting part)
232 Diameter outer peripheral surface of the outer press-fitting part 232a Seal peripheral surface H Groove depth t1 Gasket radial thickness t2 Diameter outer press-fitting part radial thickness W Groove width

Claims (4)

In order to connect the flow path holes formed in the two fluid devices to each other, they are press-fitted into a tubular seal groove formed radially outside the flow path holes at each of the end faces of the two fluid devices. A pair of tubular press-fitting portions and an annular main body portion in which the pair of press-fitting portions are formed on both sides in the axial direction are provided, and the outer peripheral surfaces of the respective press-fitting portions are in close contact with the outer peripheral surface of the seal groove. A gasket on which the peripheral surface of the seal that exerts the sealing function is formed.
In a state where the pair of press-fitting portions are press-fitted into the seal grooves of both fluid devices, the main body portion is formed from inside the seal groove on the outer peripheral surface of each press-fitting portion in the axial direction inside the seal peripheral surface. A non-seal peripheral surface that does not exert a sealing function is formed.
In a state where the pair of press-fit portion is press-fitted respectively in the seal groove of the two fluidic device, one of the non-sealing periphery of the seal groove, the outer peripheral surface of the main body portion, and the other of said seal groove wherein in an axial direction range including the non-sealing periphery, a groove portion which is open to hook the jig is made form the gasket. The gasket according to claim 1, wherein the groove width in the axial direction of the groove portion is set within the axial length range between the seal peripheral surfaces in the pair of press-fitting portions. The radial groove depth of the groove portion is set according to claim 1 or 2, wherein the radial thickness of the gasket on the bottom surface of the groove portion is set to be equal to or larger than the radial thickness of the press-fitting portion. gasket. The gasket according to any one of claims 1 to 3 , for connecting the flow path holes formed in the two fluid devices to each other.
A flow path joint structure including a pair of tubular seal grooves formed on each of the end faces of both fluid devices on the radial side of the flow path hole and into which each press-fitted portion of the gasket is press-fitted .

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