JP6834480B2 - Manufacturing method of vibrating pieces, vibrating pieces, oscillators, electronic devices and mobile objects - Google Patents

Description

The present invention relates to a method for manufacturing a vibrating piece, a vibrating piece, an oscillator, an electronic device, and a moving body.

For example, Patent Document 1 discloses a tuning fork type (H type in which two tuning forks are combined) vibration element used as an inertial sensor element. Such an inertial sensor element has a base, a pair of drive vibrating arms extending from the base to one side, and a pair of detection vibrating arms extending from the base to the other side. Further, the detection vibrating arm is formed with a through hole that penetrates the detection vibrating arm in the thickness direction, and a pair of electrodes divided vertically (one side and the other side in the thickness direction) in the through hole. Is provided.

Japanese Unexamined Patent Publication No. 2006-208261

However, it is difficult to divide the electrodes vertically (one side and the other side in the thickness direction) in the through hole in manufacturing, and the lengths of the pair of electrodes in the vertical direction tend to vary. Therefore, the detection accuracy tends to vary among the individual inertial sensor elements.

An object of the present invention is to provide a method for manufacturing a vibrating piece, a vibrating piece, an oscillator, an electronic device, and a moving body, which are less likely to cause variations in the vertical lengths of a pair of electrodes and can reduce variations in detection accuracy. To do.

The present invention has been made to solve at least a part of the above-mentioned problems, and can be realized as the following application example.

The method for manufacturing a vibrating piece of the present application example includes a base portion and a vibrating arm extending from the base portion and having a through hole, and the vibrating arm has a cross section perpendicular to the extending direction of the vibrating arm. At a position including the center of the wall portion in the wall height direction, which is the penetration direction of the through hole, the wall thickness, which is the thickness in the direction orthogonal to the wall height direction, is at both ends in the wall height direction. A piezoelectric material having a convex portion thicker than any of the wall thicknesses, the convex portion being provided on at least one of an inner surface facing the through hole and an outer surface facing the inner surface and not facing the through hole. The process of preparation and
A step of forming a conductive film on at least one of the inner surface and the outer surface so as to spread on both sides of the convex portion and the convex portion in the wall height direction.
The step of forming a photoresist film on the conductive film and
A step of forming an opening by removing at least a part of a portion of the photoresist film located on the convex portion by exposure and development.
It is characterized by having a step of removing a portion of the conductive film exposed from the opening by etching to form an electrode divided into one side and the other side in the wall height direction on the convex portion. And.
As a result, it is possible to reduce the dimensional variation between the electrode on one side and the electrode on the other side in the wall height direction. Therefore, it is possible to manufacture a vibrating piece that can reduce the variation in detection accuracy.

In the method for manufacturing a vibrating piece of this application example, it is preferable that the convex portion is provided at least on the inner surface.
In general, the inner surface has a larger spatial constraint than the outer surface, and it is difficult to form electrodes (dimension variation is likely to occur). Therefore, by providing the convex portion on the inner surface side, it is possible to form an electrode having a small dimensional variation on the inner surface.

In the method for manufacturing a vibrating piece of this application example, the convex portion is
A step of forming a through hole that penetrates the vibrating arm in the wall height direction by dry etching, and
It is preferably formed by a step of removing a part of the vibrating arm from the surface side facing the through hole by wet etching.
Thereby, the through hole and the convex portion can be formed more easily.

In the method for manufacturing a vibrating piece of this application example, the vibrating arm is preferably a detected vibrating arm.
As a result, the detection signal can be extracted from one electrode and the other electrode in a well-balanced manner, so that the physical quantity can be detected more accurately.

In the method for manufacturing a vibrating piece of the present application example, it is preferable that a plurality of the through holes are formed so as to be separated from each other along the extending direction of the vibrating arm.
As a result, the total length of the through hole can be lengthened while suppressing the generation of unnecessary vibration modes of the vibrating arm.

In the method for manufacturing a vibrating piece of the present application example, the through hole is rectangular in a plan view seen from the wall height direction, and a protruding portion protruding from the four corners of the through hole into the through hole in a rectangular shape is formed. Have and
In the exposure, the other inner surface is exposed with an exposure light having a component parallel to the inner surface of one of the two orthogonal inner surfaces of the through hole, and the exposure light having a component parallel to the other inner surface is used. It is preferable to expose one of the inner surfaces.
Thereby, the resist film on the inner surface of the through hole can be exposed with higher accuracy.

The vibrating piece of the present invention has a base and
A vibrating arm that extends from the base and is provided with a through hole.
The wall of the vibrating arm
In the cross section perpendicular to the extending direction of the vibrating arm, the wall thickness, which is the thickness in the direction orthogonal to the wall height direction, is the wall at a position including the center in the wall height direction, which is the penetrating direction of the through hole. It has convex parts that are thicker than any of the wall thicknesses at both ends in the height direction.
The convex portion is provided on at least one of an inner surface facing the through hole and an outer surface facing the inner surface and not facing the through hole.
It is characterized by having an electrode provided on the wall portion and divided into one side and the other side in the wall height direction on the convex portion.
As a result, it is possible to reduce the dimensional variation between the electrode on one side and the electrode on the other side in the wall height direction. Therefore, it is possible to manufacture a vibrating piece that can reduce the variation in detection accuracy.

In the vibrating piece of the present invention, the vibrating arm is preferably a detection vibrating arm.
As a result, the detection signal can be extracted from one electrode and the other electrode in a well-balanced manner, so that the physical quantity can be detected more accurately.

In the vibrating piece of the present invention, it is preferable that a plurality of the through holes are provided so as to be separated from each other along the extending direction of the vibrating arm.
As a result, it is possible to increase the occupied area of the through hole while suppressing the generation of unnecessary vibration modes of the vibrating arm.

In the vibrating piece of the present invention, in a plan view seen from the wall height direction,
The through hole is rectangular and
It has protrusions that project from the four corners of the through hole into the through hole in a rectangular shape.
It is preferable to have an electrode provided on the inner surface of the through hole over the protruding portion and a portion other than the protruding portion.
As a result, the electrode can be formed on the inner surface of the through hole with higher accuracy.

The oscillator of the present invention is characterized by comprising the vibrating piece of the present invention.
As a result, the effect of the vibrating piece of the present invention can be enjoyed, and a highly reliable oscillator can be obtained.

The electronic device of the present invention is characterized by comprising the vibrating piece of the present invention.
As a result, the effect of the vibrating piece of the present invention can be enjoyed, and a highly reliable electronic device can be obtained.

The moving body of the present invention is characterized by comprising the vibrating piece of the present invention.
As a result, the effect of the vibrating piece of the present invention can be enjoyed, and a highly reliable moving body can be obtained.

It is a perspective view which shows the vibrating piece which concerns on 1st Embodiment of this invention. FIG. 5 is a cross-sectional view taken along the line AA in FIG. It is a perspective view which shows the through hole formed in the detection vibration arm. It is sectional drawing BB in FIG. It is sectional drawing which shows the modification of this embodiment. It is sectional drawing which shows the modification of this embodiment. It is a schematic diagram for demonstrating the operation of the vibrating piece shown in FIG. It is a schematic diagram for demonstrating the operation of the vibrating piece shown in FIG. It is a flowchart which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the vibration piece which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the vibration piece which concerns on 3rd Embodiment of this invention. It is sectional drawing which shows the vibration piece which concerns on the reference example of this invention. It is a top view which shows the through hole which a vibrating piece shown in FIG. 25 has. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is a top view which shows the vibrating piece which concerns on 4th Embodiment of this invention. It is a partially enlarged perspective view which shows the through hole which a vibrating piece shown in FIG. 32 has. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is sectional drawing which shows the manufacturing method of the vibrating piece shown in FIG. It is a top view of the oscillator which concerns on 5th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 6th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 7th Embodiment of this invention. It is a perspective view which shows the electronic device which concerns on 8th Embodiment of this invention. It is a perspective view which shows the moving body which concerns on 9th Embodiment of this invention.

Hereinafter, the method for manufacturing the vibrating piece, the vibrator, the electronic device, and the moving body of the present invention will be described in detail based on the embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a perspective view showing a vibrating piece according to the first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 is a perspective view showing a through hole formed in the detection vibrating arm. FIG. 4 is a cross-sectional view taken along the line BB in FIG. 5 and 6 are cross-sectional views showing a modified example of the present embodiment, respectively. 7 and 8 are schematic views for explaining the operation of the vibrating piece shown in FIG. 1, respectively. FIG. 9 is a flowchart showing a method for manufacturing the vibrating piece shown in FIG. 10 to 20 are cross-sectional views showing a method of manufacturing the vibrating piece shown in FIG. 1, respectively. In the following, for convenience of explanation, the upper side of FIGS. 1 to 6 and 10 to 20 is also referred to as "upper side", and the lower side is also referred to as "lower side". Further, as shown in FIGS. 1 to 8 and 10 to 20, the three axes orthogonal to each other are defined as the X axis, the Y axis, and the Z axis. Further, the direction along the X-axis is also referred to as "X-axis direction", the direction along the Y-axis is also referred to as "Y-axis direction", and the direction along the Z-axis is also referred to as "Z-axis direction". The arrow side of each axis is the + (plus) side, and the side opposite to the arrow is the- (minus) side. Further, in FIGS. 1 and 3, the electrode 3 is not shown for convenience of explanation.

The vibrating piece 1 shown in FIG. 1 is a gyro sensor capable of detecting the angular velocity ω around the Y axis. As shown in FIGS. 1 to 3, such a vibrating piece 1 has a vibrating body 2 and an electrode 3 provided on the vibrating body 2.

The vibrating body 2 is a piezoelectric body. That is, the vibrating body 2 is made of a piezoelectric material. In particular, in the present embodiment, the vibrating body 2 is made of quartz. As a result, the vibrating piece 1 having excellent frequency temperature characteristics as compared with other piezoelectric materials can be obtained. The piezoelectric material is not limited to crystal, for example, lithium niobate (LiNbO ₃ ), _{lithium niobate (LiTaO 3} ), lead zirconate titanate (PZT), lithium tetraboate (Li ₂ B ₄ O). ₇ ), Langasite (La ₃ Ga ₅ SiO ₁₄ ), potassium niobate (KNbO ₃ ), gallium _{niobate (GaPO 4} ), gallium arconate (GaAs), aluminum nitride (AlN), zinc oxide (ZnO, Zn ₂ O) _3), barium titanate (BaTiO _3), lead titanate (PbPO _3), potassium sodium niobate ((K, Na) _NbO 3), bismuth ferrite (BiFeO _3), sodium niobate (NaNbO _3), titanate It may be bismus (Bi ₄ Ti ₃ O ₁₂ ), sodium bismas sodium titanate (Na _0.5 Bi _0.5 thio ₃ ), or the like.

Further, as shown in FIG. 1, the vibrating body 2 has a spread in the XY plane defined by the Y axis (mechanical axis) and the X axis (electric axis), which are the crystal axes of the crystal substrate, and has a Z axis (light). It has a plate shape with thickness in the axis) direction. That is, the vibrating body 2 is composed of a Z-cut crystal plate. The Z-axis does not have to coincide with the thickness direction of the vibrating body 2. For example, the Z-axis may be slightly tilted with respect to the thickness direction from the viewpoint of reducing the change in frequency due to temperature in the vicinity of room temperature. Specifically, the Z-axis may be inclined (rotated) in the range of 0 to 10 degrees around at least one of the X-axis and the Y-axis with respect to the thickness direction of the vibrating body 2.

The thickness T (length in the Z-axis direction) of the vibrating body 2 is not particularly limited, but is preferably 50 μm or more and 150 μm or less, and more preferably 80 μm or more and 100 μm or less. By setting the thickness of the vibrating body 2 in such a numerical range, it is possible to reduce the size of the vibrating body 2 while maintaining the mechanical strength of the vibrating body 2. Further, the area of the electrode 3 arranged on the side surface of the vibrating body 2 can be sufficiently widened. Therefore, the CI value (crystal impedance), which is the equivalent series resistance of the vibrating body 2, can be lowered, and the vibrating piece 1 can be easily oscillated. Further, a larger output signal can be obtained from the vibrating piece 1.

Further, the vibrating body 2 includes a base portion 20, a pair of driving vibrating arms 21 and 21, a pair of detection vibrating arms 23 and 23, a pair of adjusting vibrating arms 25 and 25, a support portion 27, and a connecting portion 28. These are integrally formed. The shape of the vibrating body 2 is not limited to the shape of the present embodiment.

The pair of drive vibrating arms 21 and 21 extend from the base 20 in the −Y axis direction. Further, the pair of drive vibrating arms 21 and 21 are arranged side by side in the X-axis direction. Further, each drive vibrating arm 21 includes an arm portion 211 extending from the base portion 20 and a wide portion 212 provided on the tip end side of the arm portion 211 and having a width (length in the X-axis direction) wider than that of the arm portion 211. It has a groove portion 213 formed on the upper surface and the lower surface of the arm portion 211. The configuration of the drive vibrating arm 21 is not particularly limited, and for example, the wide portion 212 may be omitted or the groove portion 213 may be omitted.

The pair of detection vibrating arms 23, 23 extend from the base 20 in the + Y axis direction. Further, the pair of detection vibrating arms 23, 23 are arranged side by side in the X-axis direction. Further, each detection vibrating arm 23 is provided on the arm portion 231 extending from the base portion 20 and the tip end side of the arm portion 231, and is formed on the wide portion 232 and the arm portion 231 which are wider than the arm portion 231. It has a plurality of through holes 233.

Further, the plurality of through holes 233 are formed so as to be separated from each other along the extending direction (Y-axis direction) of the arm portion 231. Further, the plurality of through holes 233 have substantially the same shape and dimensions as each other. Further, the shape of each through hole 233 in a plan view when viewed from the Z-axis direction, that is, the opening shape is rectangular. In particular, in the present embodiment, it is a rectangle having a length in the Y-axis direction. The "rectangle" is not only a strict rectangle, but also, for example, one in which four corners are chamfered and rounded, one in which the angle formed by adjacent sides is slightly deviated from 90 °, and inevitable in manufacturing. It is a broad concept including those having a shape deviation (the same applies to other embodiments).

Further, as shown in FIG. 2, when viewed in a cross section including the through hole 233 (a cross section with the Y axis as the normal direction), the arm portion 231 is on one side (−X axis direction) with respect to the through hole 233. It has a wall portion 234 located on the side) and a wall portion 236 located on the other side (+ X-axis direction side).

Further, the wall portion 234 has a pair of side surfaces. Of these, one side surface is an inner surface 234a that faces the through hole 233 and constitutes the inner peripheral surface of the through hole 233, and the other side surface is an outer surface 234b that faces the outside of the vibrating body 2. Further, a convex portion 235 protruding from the inner surface 234a into the through hole 233 (+ X axis direction) is provided at the center of the wall portion 234 in the Z-axis direction (the wall height direction which is the penetration direction of the through hole 233). Has been done.

Similarly, the wall portion 236 has a pair of side surfaces. Of these, one side surface is an inner surface 236a that faces the through hole 233 and constitutes the inner peripheral surface of the through hole 233, and the other side surface is an outer surface 236b that faces the outside of the vibrating body 2. Further, in the central portion of the wall portion 236 in the Z-axis direction (the wall height direction which is the penetration direction of the through hole 233), a convex portion 237 protruding from the inner surface 236a into the through hole 233 (-X axis direction) is provided. It is provided.

Here, as shown in FIG. 3, an annular ridge 238 is formed in the through hole 233 along the circumferential direction thereof. Then, the convex portions 235 and 237 are formed by a part of the convex stripes 238. That is, the convex portions 235 and 237 are integrally formed from the convex strips 238. However, the convex portions 235 and 237 may be formed by being divided (separated).

In the present embodiment, the bisector L1 in the Z-axis direction (thickness direction) of the convex portion 235 coincides with the bisector L2 in the Z-axis direction (thickness direction) of the wall portion 234. However, if the convex portion 235 overlaps the bisector L2, that is, if the convex portion 235 is located at a position including the center of the wall portion 234 in the Z-axis direction, the bisector L1 May deviate from the bisector L2. The same applies to the convex portion 237.

The detection vibration arm 23 has been described in detail above. However, the configuration of the detection vibrating arm 23 is not particularly limited, and for example, the wide portion 232 may be omitted. Further, the number of through holes 233 may be one, two or four or more. Further, at least one through hole 233 of the plurality of through holes 233 may have a shape different from that of the other through holes 233.

The width (length in the X-axis direction) of the arm portion 231 is not particularly limited, but may be, for example, 50 μm or more and 80 μm or less. The width of the opening of the through hole 233 (the length in the X-axis direction) is not particularly limited, but is preferably ½ or more and 3/4 or less of the width of the arm portion 231. As a result, the thickness of the wall portions 234 and 236 can be sufficiently reduced while maintaining the mechanical strength of the arm portion 231. Therefore, the distance between the first and second detection signal electrodes 33 and 34 facing each other in the X-axis direction via the wall portions 234 and 236 is shortened, and the electric charge can be extracted more efficiently from between them.

The protruding length (length in the X-axis direction) of the convex portions 235 and 237 is not particularly limited, but may be, for example, 3 μm or more and 10 μm or less. As a result, while suppressing an increase in the width of the arm portion 231 and as described in the method of manufacturing the vibrating piece 1 described later, it is possible to sufficiently tolerate the deviation of the exposure when forming the electrode 3, and the convex shape. It is possible to suppress the dimensional deviation of the first and second detection signal electrodes 33 and 34 divided on the portions 235 and 237.

The separation distance between the opposing convex portions 235 and 237 (minimum gap of the through hole 233) is not particularly limited, but can be 20 μm or more and 40 μm or less. This makes it easier to irradiate the photoresist film 6 on the top surface 235a of the convex portion 235 with the exposure light L, as described in the method for manufacturing the vibrating piece 1 described later, while suppressing the increase in the width of the arm portion 231. Become. Therefore, the electrode 3 can be more easily divided on the convex portion 235, and the first and second detection signal electrodes 33 and 34 can be formed more reliably.

Further, as shown in FIG. 1, the pair of adjusting vibrating arms 25, 25 extend from the base 20 in the + Y axis direction. Further, the pair of adjusting vibration arms 25, 25 are arranged side by side in the X-axis direction so that the pair of detection vibration arms 23, 23 are located between them. Further, each adjusting vibration arm 25 has an arm portion 251 extending from the base portion 20 and a wide portion 252 provided on the tip end side of the arm portion 251 and wider than the arm portion 251. The configuration of the adjusting vibrating arm 25 is not particularly limited, and for example, the wide portion 252 may be omitted. Further, the adjusting vibration arm 25 itself may be omitted.

Further, as shown in FIG. 1, the support portion 27 supports the base portion 20 via the connecting portion 28. Further, the support portion 27 includes a portion 271 arranged on the −Y axis direction side with respect to the pair of drive vibrating arms 21 and 21 and extending in the X axis direction, and one end portion (−X axis direction side) of the portion 271. It has a portion 272 that extends from the end portion of the portion 271 toward the + Y-axis direction, and a portion 273 that extends from the other end portion (the end portion on the + X-axis direction side) of the portion 271 toward the + Y-axis direction side. The configuration of the support portion 27 is not particularly limited as long as the base portion 20 can be supported. Further, the support portion 27 may be omitted.

Further, as shown in FIG. 1, the connecting portion 28 is a first connecting portion 281 that connects one end portion (end portion on the −X axis direction side) of the base portion 20 and the portion 272 of the support portion 27, and the base portion 20. A second connecting portion 282 that connects the other end portion (the end portion on the + X axis direction side) and the portion 273 of the supporting portion 27, and a third connecting portion that connects both ends of the base portion 20 and the portion 271 of the supporting portion 27. It has 283 and. Further, the third connecting portion 283 is connected to the central portion of the portion 271 after the portion extending from one end portion and the portion extending from the other end portion of the base portion 20 merge. The configuration of the connecting portion 28 is not particularly limited as long as the base portion 20 and the supporting portion 27 can be connected. Further, for example, the connecting portion 28 may be omitted together with the supporting portion 27.

The configuration of the vibrating body 2 has been described above. Next, the electrode 3 and the terminal 4 provided on the vibrating body 2 will be described. As shown in FIGS. 2 and 4, the electrode 3 has a drive signal electrode 31, a drive ground electrode 32, a first detection signal electrode 33, a second detection signal electrode 34, and a detection ground electrode 35. ing. Further, as shown in FIG. 1, the terminal 4 has a drive signal terminal 41, a drive ground terminal 42, a first detection signal terminal 43, a second detection signal terminal 44, and a detection ground terminal 45. There is.

Further, as shown in FIG. 4, the drive signal electrode 31 is formed on the inner surface of each groove 213 of the arm portion 211 of one drive vibrating arm 21 (21A) and the arm portion 211 of the other drive vibrating arm 21 (21B). It is formed on both sides respectively. The drive signal electrode 31 is an electrode for exciting the drive vibrations of the drive vibration arms 21 and 21.

Further, as shown in FIG. 4, the drive ground electrode 32 is provided on both side surfaces of the arm portion 211 of one drive vibrating arm 21 (21A) and each groove portion 213 of the arm portion 211 of the other drive vibrating arm 21 (21B). It is formed on the inner surface of each. The drive ground electrode 32 is an electrode that serves as a ground with respect to the drive signal electrode 31.

Further, as shown in FIG. 2, the first detection signal electrode 33 is an upper portion of the inner surface 234a of the arm portion 231 of one of the detection vibrating arms 23 (23A), a lower portion of the outer surface 234b, and a lower portion of the inner surface 236a. And the upper part of the outer surface 236b, the lower part of the inner surface 234a of the arm part 231 of the other detection vibrating arm 23 (23B), the upper part of the outer surface 234b, the upper part of the inner surface 236a and the lower part of the outer surface 236b, respectively. It is provided. Further, the first detection signal electrode 33 is also provided on the upper right side portion, the lower surface right portion and the left side surface of the arm portion 251 of one of the adjusting vibration arms 25 (25B).

Further, as shown in FIG. 2, the second detection signal electrode 34 includes a lower portion of the inner surface 234a of the arm portion 231 of one of the detection vibrating arms 23 (23A), an upper portion of the outer surface 234b, and an upper portion of the inner surface 236a. The lower portion of the outer surface 236b, the upper portion of the inner surface 234a of the arm portion 231 of the other detection vibrating arm 23 (23B), the lower portion of the outer surface 234b, the lower portion of the inner surface 236a, and the upper portion of the outer surface 236b, respectively. It is provided. Further, the second detection signal electrode 34 is also provided on the upper left side portion, the lower surface left side portion and the right side surface of the arm portion 251 of the other adjusting vibration arm 25 (25A).

Here, the first detection signal electrode 33 and the second detection signal electrode 34 provided on the inner surface 234a are divided on the top surface 235a of the convex portion 235. Therefore, the first detection signal electrode 33 and the second detection signal electrode 34 are formed over the inner surface 234a and the convex portion 235, respectively. Similarly, the first detection signal electrode 33 and the second detection signal electrode 34 provided on the inner surface 236a are divided on the top surface 237a of the convex portion 237. Therefore, the first detection signal electrode 33 and the second detection signal electrode 34 are formed over the inner surface 236a and the convex portion 237, respectively.

The first detection signal electrode 33 and the second detection signal electrode 34 are electrodes for detecting the electric charge generated by the detection vibration when the detection vibration of the detection vibration arm 23 is excited.

As will be described in the method of manufacturing the vibrating piece 1 described later, the divided portions of the first and second detection signal electrodes 33 and 34 on the convex portion 235 are displaced due to the deviation of the irradiation position of the exposure light L. In some cases. Specifically, for example, as shown in FIG. 5, the divided portion may be located on the upper side surface 235b of the convex portion 235, and as shown in FIG. 6, the divided portion is located on the upper side of the convex portion 235. It may be located over the side surface 235b and the top surface 235a. The portion of the first and second detection signal electrodes 33 and 34 on the convex portion 235 is located at the center of the arm portion 251 in the Z-axis direction (thickness direction) and flexes and vibrates in the Z-axis direction. However, since it is a part that hardly displaces and the width (X-axis direction) of the wall part 234 including the convex part 235 is large, it does not substantially function as a part for extracting electric charges, so that the division position is Even if the deviation is as described above, the same detection characteristics as in the present embodiment can be exhibited.

Further, as shown in FIG. 2, the detection ground electrode 35 includes the upper right side portion, the lower right side portion and the left side surface of the arm portion 251 of the adjusting vibration arm 25A, and the upper left side portion and the lower surface of the arm portion 251 of the adjusting vibration arm 25B. It is formed on the left side portion and the right side surface, respectively. The detection ground electrode 35 is an electrode that serves as a ground with respect to the first detection signal electrode 33 and the second detection signal electrode 34.

Further, as shown in FIG. 1, the support portion 27 is provided with a drive signal terminal 41, a drive ground terminal 42, a first detection signal terminal 43, a second detection signal terminal 44, and a detection ground terminal 45. The drive signal terminal 41 is electrically connected to the drive signal electrode 31 via a drive signal wiring (not shown), and the drive ground terminal 42 is electrically connected to the drive ground electrode 32 via a drive ground wire (not shown). The first detection signal terminal 43 is electrically connected to the first detection signal electrode 33 via a first detection signal wiring (not shown), and the second detection signal terminal 44 is electrically connected to the first detection signal electrode 33 via a second detection signal wiring (not shown). The detection ground terminal 45 is electrically connected to the second detection signal electrode 34, and the detection ground terminal 45 is electrically connected to the detection ground electrode 35 via a detection ground wiring (not shown).

The configurations of the electrodes 3 and the terminals 4 as described above are not particularly limited as long as they have conductivity, but for example, a metallized layer (underlayer) such as Cr (chromium) or W (tungsten) can be used. It can be composed of a metal film in which electrode layers such as Ni (nickel), Au (gold), Ag (silver), and Cu (copper) are laminated. As a result, the electrodes 3 and terminals 4 have excellent adhesion to the vibrating body 2.

The configuration of the vibrating piece 1 has been described above. In such a vibrating piece 1, when a driving signal is input to the driving signal electrode 31 in a state where the angular velocity is not applied to the vibrating piece 1, the driving vibrating arms 21 and 21 are in the X-axis direction as shown by the arrow A in FIG. Bending vibration (driving vibration) is performed so that the directions are opposite to each other. Further, along with this drive vibration, the adjusting vibration arms 25, 25 also perform bending vibration (adjusting vibration) so as to be opposite to each other in the X-axis direction as shown by the arrow B.

When the angular velocity ω around the Y-axis is applied to the vibrating piece 1 in the state of performing this drive vibration, a Coriolis force acts on the drive vibration arms 21 and 21, and the Coriolis force causes the drive vibration arms 21 and 21 to be shown in the figure. As shown by the arrow C in 8, the bending vibration is performed so as to be opposite to each other in the Z-axis direction. Along with this, the detection vibration arms 23, 23 perform bending vibration (detection vibration) so as to be opposite to each other in the Z-axis direction as shown by the arrow D. By this detection vibration, the electric charge generated in the detection vibration arms 23, 23 is taken out as a detection signal from the first and second detection signal electrodes 33, 34, and the angular velocity ω is obtained based on this detection signal.

At this time, the adjusting vibrating arms 25 and 25 also bend and vibrate in the opposite directions in the Z-axis direction like the driving vibrating arms 21 and 21, but the electric charge due to the bending vibration is not output. That is, regardless of the presence or absence of the Coriolis force, the electric charges output from the adjusting vibration arms 25 and 25 are constant only due to the above-mentioned adjusting vibration. Therefore, for example, by processing (partially removing) the electrode 3 on the adjusting vibrating arms 25, 25 and adjusting the amount of electric charge output from the adjusting vibrating arms 25, 25, the manufacturing variation of the vibrating piece 1 can be achieved. The resulting leak output can be adjusted.

The vibrating piece 1 has been described above. As described above, such a vibrating piece 1 has a base portion 20, a through hole 233 extending from the base portion 20, and a convex portion 235, 237 protruding from the wall portion surrounding the through hole 233. The vibrating body 2 in which the thickness of the portion where the convex portions 235 and 237 of the wall portion are located is larger than that of other parts (the thickness of the wall portion near the end of the through hole 233) and the vibrating body 2 provided on the wall portion and are convex. It has an electrode 3 divided on the shape portions 235 and 237.

More specifically, the vibrating piece 1 includes a base 20 and a detection vibrating arm 23 as a vibrating arm extending from the base 20 and provided with a through hole 233. Further, the wall portions 234 and 236 of the detection vibrating arm 23 have a wall height direction (Z-axis direction) which is a penetrating direction of the through hole 233 in a cross section perpendicular to the extension direction (Y-axis direction) of the detection vibrating arm 23. The wall thickness, which is the thickness in the direction (X-axis direction) orthogonal to the wall height direction (Z-axis direction), is any of the wall thicknesses at both ends in the wall height direction (Z-axis direction) at the position including the center of the wall. It has thicker convex portions 235 and 237. Further, the convex portion 235 is provided on at least one of the inner surface 234a facing the through hole 233 and the outer surface 234b facing the inner surface 234a and not facing the through hole 233 (inner surface 234a in this embodiment). Similarly, the convex portion 237 is provided on at least one side (inner surface 236a in this embodiment) of the inner surface 236a facing the through hole 233 and the outer surface 236b facing the inner surface 236a and not facing the through hole 233. Further, the vibrating piece 1 is provided on the wall portion 234 and is divided into one side and the other side in the Z-axis direction (wall height direction) on the convex portion 235 (first and second detections). Signal electrodes 33, 34) and electrodes 3 (first, second) provided on the wall portion 236 and divided into one side and the other side in the Z-axis direction (wall height direction) on the convex portion 237. It has detection signal electrodes 33, 34). With such a configuration, it is possible to reduce the dimensional variation of the first and second detection signal electrodes 33 and 34 arranged in the Z-axis direction. Therefore, the vibration piece 1 is capable of exhibiting high detection accuracy and reducing variation in detection accuracy. The effect will be described in detail in the method for manufacturing the vibrating piece 1 described later.

Further, as described above, the detection vibrating arm 23 is formed with a through hole 233 and convex portions 235 and 237. That is, the vibrating arm having the through hole 233 and the convex portions 235 and 237 is the detection vibrating arm 23 for detecting the angular velocity ω. As a result, it is possible to reduce the dimensional variation of the first and second detection signal electrodes 33 and 34 which are arranged in the Z-axis direction and are divided in the Z-axis direction on the convex portions 235 and 237. Therefore, electric charges can be taken out in a well-balanced manner from between the first and second detection signal electrodes 33 and 34 of a plurality of sets (4 sets) facing each other in the X-axis direction via the wall portions 234 and 236. Therefore, the angular velocity ω can be detected more accurately.

Further, as described above, a plurality of through holes 233 are provided so as to be separated from each other along the extending direction (Y-axis direction) of the detection vibrating arm 23. According to such a configuration, each through hole 233 can be made small while forming the through hole 233 over the entire length of the arm portion 231. Therefore, the area of the first and second detection signal electrodes 33 and 34 can be kept large, and the decrease of the electric charge taken out from between the first and second detection signal electrodes 33 and 34 can be suppressed. Further, by forming a plurality of through holes 233, a beam portion 239 connecting the wall portions 234 and 236 is formed in the middle of the arm portion 231 (see FIG. 1), so that the mechanical strength of the arm portion 231 is excessive. The decrease can be suppressed. Further, since the wall portion 234 and 236 can be integrally deformed (as one elastic body) by the beam portion 239, the occurrence of an unnecessary vibration mode (spurious vibration mode) can be suppressed. Therefore, the detection vibrating arm 23 can be vibrated accurately and stably.

Next, a method of manufacturing the vibrating piece 1 will be described. As shown in FIG. 9, the method for manufacturing the vibrating piece 1 includes a preparation step, a conductive film forming step, a resist film forming step, a patterning step, and an etching step.

The preparatory step includes a base 20 and a detection vibrating arm 23 extending from the base 20 and serving as a vibrating arm provided with a through hole 233, and is perpendicular to the extension direction (Y-axis direction) of the detection vibrating arm 23. In the cross section, the wall portion 234 (236) of the detection vibrating arm 23 is located in the wall height direction (Z-axis direction) at a position including the center of the wall height direction (Z-axis direction) which is the penetration direction of the through hole 233. The wall thickness, which is the thickness in the orthogonal direction (X-axis direction), has a convex portion 235 (237) thicker than any of the wall thicknesses at both ends in the wall height direction (Z-axis direction), and the convex portion. A vibrating body as a piezoelectric body provided on at least one of an inner surface 234a (236a) in which 235 (237) faces the through hole 233 and an outer surface 234b (236b) facing the inner surface 234a (236a) and not facing the through hole 233. This is the process of preparing 2. Further, in the conductive film forming step, the inner surface 234a (236a) and the outer surface 234b (236b) are spread on both sides of the convex portion 235 (237) and the convex portion 235 (237) in the wall height direction (Z-axis direction). ) Is a step of forming the conductive film 5 on at least one of them. The resist film forming step is a step of forming the photoresist film 6 on the conductive film 5. The patterning step is a step of removing at least a part of the portion of the photoresist film 6 located on the convex portion 235 (237) by exposure and development to form the opening 61. Further, in the etching step, the portion exposed from the opening 61 of the conductive film 5 is removed by etching, and the portion is divided into one side and the other side in the wall height direction (Z-axis direction) on the convex portion 235 (237). This is a step of forming the electrode 3. Hereinafter, each of these steps will be described in detail in order. In the following, for convenience of explanation, the description will be made based on a diagram showing a cross section of the detection vibrating arm 23 (23A).

[Preparation process]
In this step, since the base portion 20 and the convex portions 235 and 237 protruding from the wall portion surrounding the through hole 233 are provided, the thickness of the portion where the convex portions 235 and 236 of the wall portion are located is set elsewhere (through hole). This is a step of preparing a vibrating body 2 having a detected vibrating arm 23 that is larger than the thickness of the wall portion near the end portion).

First, by patterning the crystal substrate by an etching method (dry etching method, wet etching method, etc.), the outer shape of the vibrating body 2 is obtained as shown in FIG. Next, as shown in FIG. 11, a through hole 233 that penetrates the detection vibrating arm 23 in the Z-axis direction (wall height direction) is formed by a dry etching method. A plurality of through holes 233 are formed so as to be separated from each other along the extending direction of the detection vibrating arm 23. As described above, by using the dry etching method for forming the through hole 233, it is possible to form the through hole 233 having a higher aspect ratio than, for example, when the wet etching method is used. Therefore, the formation of the through hole 233 becomes easy. However, the method for forming the through hole 233 is not limited to the dry etching method, and for example, when the thickness of the detection vibrating arm 23 is sufficiently thin (that is, when a high aspect ratio is not required), the wet etching method is used. It may be formed by.

Next, as shown in FIG. 12, a part of both end portions (upper portion and lower portion) excluding the central portion of the wall portions 234 and 236 is removed from the inner surfaces 234a and 236a by a wet etching method. As a result, a convex portion 235 protruding from the wall portion 234 into the through hole 233 and a convex portion 237 protruding from the wall portion 236 into the through hole 233 are formed. The step is not limited to the wet etching method, and a dry etching method may be used.

From the above description, the convex portions 235 and 237 are a step of forming a through hole 233 that penetrates the detection vibrating arm 23 in the Z-axis direction (wall height direction) by a dry etching method, and a part of the detection vibrating arm 23. Is formed by a step of removing the surface (inner surface 234a, 236a) facing the through hole 233 by a wet etching method. According to such a forming method, the through hole 233 and the convex portions 235 and 237 can be formed more easily. For convenience of explanation, in the figure, the convex portions 235 and 237 have a rectangular shape, but when the convex portions 235 and 237 are formed by wet etching, an etching residue portion is generated and the shape is deformed from the rectangular shape. In some cases. The method for forming the through hole 233 and the convex portion 235 and 237 is not particularly limited, and may be formed by a method other than the above-mentioned forming method. For example, the through hole 233 may be formed at the same time when the outer shape of the vibrating body 2 is obtained.

Next, although not shown, the groove portion 213 is formed in the drive vibrating arm 21 by, for example, a wet etching method. From the above, the vibrating body 2 is obtained. However, the groove portion 213 may be formed at any timing, for example, before the formation of the through hole 233, or at the same time as the formation of the convex portions 235 and 237, for example.

[Conducting film forming process]
This step is a step of forming the conductive film 5 in the region including the surface of the convex portions 235 and 237.

First, as shown in FIG. 13, the conductive film 5 is formed on the entire outer surface of the vibrating body 2. The conductive film 5 is a film that serves as an electrode 3 and a terminal 4. The film forming method of the conductive film 5 is not particularly limited, and for example, a sputtering method, a vapor deposition method, a CVD method, or the like can be used. That is, at this stage, the conductive film 5 is formed on the inner surface 234a so as to spread on both sides of the convex portion 235 and the convex portion 235 in the Z-axis direction, and the convex portion 237 and the convex portion 237 and the convex portion 237 in the Z-axis direction. A conductive film 5 is formed on the inner surface 236a so as to spread on both sides of the shaped portion 237.

[Resist film forming process]
Next, as shown in FIG. 14, a photoresist film 6 is formed (filmed) on the conductive film 5. In the present embodiment, the photoresist film 6 uses a positive photoresist film from which the exposed portion is removed by development.

[Patterning process]
Next, the photoresist film 6 is patterned using a photolithography technique so as to correspond to the shapes of the electrodes 3, the terminals 4, and the wiring (not shown). In particular, on the inner surface of the through hole 233, at least a part of the portion located on the convex portions 235 and 237 of the photoresist film 6 is removed to form the opening 61. Specifically, first, as shown in FIG. 15, the portion of the photoresist film 6 to be removed is exposed by irradiating an exposure light L which is substantially parallel light through a mask (not shown), and the exposed portion is developed. Remove with liquid. As a result, as shown in FIG. 16, a resist pattern in which the photoresist film 6 is formed is formed only in the portion corresponding to the electrode 3.

[Etching process]
This step is a step of removing the portion located on the convex portions 235 and 237 of the conductive film 5 by etching to divide the conductive film 5.

First, as shown in FIG. 17, the conductive film 5 is etched through the photoresist film 6 to remove a portion of the conductive film 5 exposed from the photoresist film 6. Next, as shown in FIG. 18, the photoresist film 6 is removed. As a result, the electrode 3 and the terminal 4 are formed. In particular, as shown in FIG. 18, on the inner surface 234a, the first and second detection signal electrodes 33 and 34 are divided into one side and the other side in the wall height direction (Z-axis direction) on the convex portion 235. Is formed, and on the inner surface 236a, the first and second detection signal electrodes 33 and 34 divided into one side and the other side in the wall height direction (Z-axis direction) are formed on the convex portion 237.

By the above steps, the above-mentioned vibration piece 1 is obtained. According to such a manufacturing method, the function of the convex portions 235 and 237 can reduce the dimensional variation of the first and second detection signal electrodes 33 and 34 arranged in the Z-axis direction. Therefore, the vibration piece 1 is capable of exhibiting high detection accuracy and reducing variation in detection accuracy. The effect will be described in detail below. Since the convex portions 235 and 237 exert the same functions as each other, the convex portion 235 will be described as a representative in the following for convenience of explanation, and the description of the convex portion 237 will be omitted.

In the patterning step described above, in order to expose the photoresist film 6 on the inner surface 234a, as shown in FIG. 15, it is necessary to irradiate the exposure light L from a direction inclined with respect to the Z axis (hereinafter, “obliquely”. Also called "exposure"). However, in oblique exposure, the irradiation position may shift due to the diffraction of the exposure light L when passing through the mask. The convex portion 235 has a function of allowing such a deviation of the irradiation position of the exposure light L.

Specifically, as shown in FIGS. 19 and 20, even if the irradiation position of the exposure light L is deviated in the Z-axis direction within the deviation allowable range Q, it is above the convex portion 235 of the inner surface 234a. The first detection signal electrode 33 can be formed over the entire portion, and the second detection signal electrode 34 can be formed over the entire portion below the convex portion 235 of the inner surface 234a. That is, within the deviation allowable range Q, the lengths of the first and second detection signal electrodes 33 and 34 in the Z-axis direction do not change, and the first and second detection signal electrodes 33 and 34 are on the Z-axis. It can be formed longer in the direction.

By having the convex portion 235 in this way, it is possible to allow the deviation of the irradiation position of the exposure light L, and reduce the dimensional variation of the first and second detection signal electrodes 33 and 34 arranged in the Z-axis direction. be able to. Further, by reducing the dimensional variation, the facing areas of the first and second detection signal electrodes 33 and 34 facing each other in the upper portion of the wall portion 234 and the facing areas of the first and second detection signal electrodes 33 and 34 in the lower portion are opposed to each other. The facing areas of 33 and 34 become larger and substantially equal to each other. Therefore, electric charges can be taken out in a well-balanced manner between the first and second detection signal electrodes 33 and 34 of each set facing each other in the X-axis direction via the wall portion 234. As a result, the vibration piece 1 can exhibit high detection accuracy and reduce variation in detection accuracy.

Here, the inclination of the exposure light L with respect to the Z axis is not particularly limited, but is preferably 15 degrees or more and 25 degrees or less, for example. The light beam width Lz1 of the exposure light L in the Z-axis direction is not particularly limited, but is shorter than the length Lz2 of the top surface 235a of the convex portion 235 (the top surface 237a of the convex portion 237) in the Z-axis direction. Is preferable. Specifically, for example, if Lz2 is about 30 μm, Lz1 is preferably about 20 μm. As a result, the exposure light L can be made sufficiently thin, and the permissible amount of deviation of the exposure light L increases accordingly.

In particular, in the present embodiment, as described above, the convex portion 235 is provided on at least the inner surface 234a of the inner surface 234a and the outer surface 234b. The inner surface 234a has a larger spatial constraint than the outer surface 234b, and the wall portion 236 interferes with it, making it difficult to irradiate the photoresist film 6 on the inner surface 234a with the exposure light L. Therefore, it is more difficult to form the electrode 3 on the inner surface 234a, and dimensional variation is likely to occur. Therefore, at least by providing the convex portion 235 on the inner surface 234a, the effect of the convex portion 235 described above is more exerted, and the dimensional variation of the first and second detection signal electrodes 33 and 34 is more effectively reduced. be able to.

Further, in the present embodiment, as described above, the detection vibrating arm 23 is formed with a through hole 233 and a convex portion 235 and 237. That is, the vibrating arm having the through hole 233 and the convex portions 235 and 237 is the detection vibrating arm 23 for detecting the angular velocity ω. As a result, the dimensional variation of the first and second detection signal electrodes 33 and 34 can be reduced, and the angular velocity ω can be detected more accurately.

Further, in the present embodiment, as described above, a plurality of through holes 233 are formed so as to be separated from each other along the extending direction (Y-axis direction) of the detection vibrating arm 23. As a result, each through hole 233 can be made smaller while increasing the overall length of the through hole 233. Therefore, the area of the first and second detection signal electrodes 33 and 34 can be kept large, and the decrease of the electric charge taken out from between the first and second detection signal electrodes 33 and 34 can be suppressed. Further, by forming a plurality of through holes 233, a beam portion 239 connecting the wall portions 234 and 236 is formed in the middle of the arm portion 231 to suppress an excessive decrease in the mechanical strength of the arm portion 231. be able to. Further, since the wall portion 234 and 236 can be integrally deformed (as one elastic body) by the beam portion 239, the occurrence of an unnecessary vibration mode (spurious vibration mode) can be suppressed. Therefore, the detection vibrating arm 23 can be vibrated accurately and stably.

<Second Embodiment>
FIG. 21 is a cross-sectional view showing a vibrating piece according to a second embodiment of the present invention. 22 and 23 are cross-sectional views showing a method of manufacturing the vibrating piece shown in FIG. 21, respectively. The cross section of FIG. 21 corresponds to the cross section of line AA in FIG.

The vibrating piece 1 according to the present embodiment is the same as the vibrating piece 1 of the first embodiment described above, except that the configuration of the detected vibrating arm 23 is mainly different.

In the following description, the vibration piece 1 of the second embodiment will be mainly described with respect to the differences from the first embodiment described above, and the same matters will be omitted. Further, in FIGS. 21 to 23, the same reference numerals are given to the same configurations as those in the above-described first embodiment.

As shown in FIG. 21, the convex portion 235 is provided at the center portion of the outer surface 234b in the Z-axis direction (position including the center in the Z-axis direction), and is directed toward the outside of the detection vibration arm 23 in the X-axis direction. It protrudes into. Similarly, the convex portion 237 is provided at the central portion (position including the center in the Z-axis direction) of the outer surface 236b in the Z-axis direction, and protrudes in the X-axis direction toward the outside of the detection vibrating arm 23. ..

Further, the first detection signal electrode 33 includes an upper portion of the outer surface 234b and a lower portion of the outer surface 236b of the arm portion 231 of one detection vibrating arm 23 (23A) and an arm portion of the other detection vibration arm 23 (23B). It is provided on the lower portion of the outer surface 234b of 231 and the upper portion of the outer surface 236b, respectively.

Further, the second detection signal electrode 34 includes a lower portion of the outer surface 234b and an upper portion of the outer surface 236b of the arm portion 231 of one detection vibrating arm 23 (23A) and an arm portion of the other detection vibration arm 23 (23B). The upper portion of the outer surface 234b of the 231 and the lower portion of the outer surface 236b are provided, respectively.

Here, the first detection signal electrode 33 and the second detection signal electrode 34 provided on the outer surface 234b are divided on the top surface 235a of the convex portion 235. Therefore, the first detection signal electrode 33 and the second detection signal electrode 34 are formed over the outer surface 234b and the convex portion 235, respectively. Similarly, the first detection signal electrode 33 and the second detection signal electrode 34 provided on the outer surface 236b are divided on the top surface 237a of the convex portion 237. Therefore, the first detection signal electrode 33 and the second detection signal electrode 34 are formed over the outer surface 236b and the convex portion 237, respectively.

Further, the detection ground electrode 35 is provided on the inner surfaces 234a and 236a of each detection vibrating arm 23 (23A, 23B) over almost the entire area in the Z-axis direction.

Even with such a configuration, the same effect as that of the first embodiment described above can be exhibited. That is, as shown in FIG. 22, in order to divide the conductive film 5 on the outer surface 234b, it is necessary to obliquely expose the photoresist film 6 on the outer surface 234b. This is because the adjusting vibration arm 25 is provided immediately next to the outer surface 234b. On the other hand, as shown in FIG. 23, in order to divide the conductive film 5 on the outer surface 236b, it is necessary to obliquely expose the photoresist film 6 on the outer surface 236b. This is because another detection vibrating arm 23 (23B) is provided immediately next to the outer surface 236b. Therefore, by providing the convex portion 235 on the outer surface 234b and providing the convex portion 237 on the outer surface 236b, it is possible to allow the deviation of the irradiation position of the exposure light L as described in the first embodiment described above. , It is possible to reduce the dimensional variation of the first and second detection signal electrodes 33 and 34 arranged in the Z-axis direction.

<Third Embodiment>
FIG. 24 is a cross-sectional view showing a vibrating piece according to a third embodiment of the present invention. The cross section of FIG. 24 corresponds to the cross section of the line AA in FIG.

The vibrating piece 1 according to the present embodiment is the same as the vibrating piece 1 of the first embodiment described above, except that the configuration of the detected vibrating arm 23 is mainly different.

In the following description, the vibration piece 1 of the third embodiment will be mainly described with respect to the differences from the first embodiment described above, and the description of the same matters will be omitted. Further, in FIG. 24, the same reference numerals are given to the same configurations as those in the first embodiment described above.

As shown in FIG. 24, in the detection vibrating arm 23 of the present embodiment, the convex portion 235 has the central portion of the inner surface 234a in the Z-axis direction (position including the center in the Z-axis direction) and the outer surface 234b in the Z-axis direction. It is provided at the center of the above (position including the center in the Z-axis direction). Similarly, the convex portion 237 is located at the central portion of the inner surface 236a in the Z-axis direction (position including the center in the Z-axis direction) and the central portion of the outer surface 236b in the Z-axis direction (position including the center in the Z-axis direction). It is provided.

Further, the first detection signal electrode 33 and the second detection signal electrode 34 provided on the inner surface 234a are divided on the top surface 235a of the convex portion 235 (235'), and the first detection signal provided on the outer surface 234b. The electrode 33 and the second detection signal electrode 34 are divided on the top surface 235a of the convex portion 235 (235 ″). Similarly, the first detection signal electrode 33 and the second detection signal provided on the inner surface 236a The electrode 34 is divided on the top surface 237a of the convex portion 237 (237'), and the first detection signal electrode 33 and the second detection signal electrode 34 provided on the outer surface 236b have the convex portion 237 (237 "). It is divided on the top surface 237a of the.

According to such a configuration, both the effect described in the first embodiment described above and the effect described in the second embodiment described above can be exhibited.

<Reference example>
FIG. 25 is a cross-sectional view showing a vibrating piece according to a reference example of the present invention. FIG. 26 is a plan view showing a through hole included in the vibrating piece shown in FIG. 25. 27 to 31 are cross-sectional views showing a method of manufacturing the vibrating piece shown in FIG. 25, respectively. The cross section of FIG. 25 corresponds to the cross section of line AA in FIG.

The vibrating piece 1 according to this reference example is the same as the vibrating piece 1 of the first embodiment described above, except that the configuration of the through hole 233 formed in the detection vibrating arm 23 is mainly different.

In the following description, the vibration piece 1 of this reference example will be mainly described with respect to the differences from the first embodiment described above, and the description thereof will be omitted for the same matters. Further, in FIGS. 25 to 31, the same reference numerals are given to the same configurations as those in the above-described first embodiment. Further, in this reference example, since the plurality of through holes 233 formed in the detection vibrating arm 23 have the same configuration as each other, one through hole 233 will be described below for convenience of explanation, and the other through holes will be described. The description of 233 will be omitted.

As shown in FIG. 25, in the vibration piece 1 of this reference example, the convex portions 235 and 237 are omitted from the detection vibration arm 23. Further, as shown in FIG. 26, the through hole 233 is a rectangle (particularly, a rectangle having a length in the Y-axis direction) in a plan view seen from the Z-axis direction (wall height direction). Further, the detection vibrating arm 23 has protrusions 230 (230A, 230B, 230C, 230D) that project from the four corners of the through hole 233 to the through hole 233 in a rectangular shape.

In other words, as shown in FIG. 26, the through hole 233 has a cross shape in a plan view seen from the Z-axis direction. Further, the inner surfaces of the through holes 233 are arranged side by side in the X-axis direction, and are arranged side by side in the Y-axis direction with a pair of inner surfaces 233a and 233b (inner surfaces 234a and 236a) configured on each other in the YZ plane, and XZ each other. A pair of inner surfaces 233c and 233d composed of an axial plane, an inner surface 233e composed of an XZ plane extending from the + Y-axis side end of the inner surface 233a in the -X-axis direction, and an -X-axis direction side of the inner surface 233e. An inner surface 233f composed of a YZ plane extending in the + Y-axis direction from the end of the inner surface 233c and connecting to the + X-axis side end of the inner surface 233c, and an XZ plane extending in the + X-axis direction from the + Y-axis side end of the inner surface 233b. 233g of the inner surface composed of, 233h of the inner surface composed of a YZ plane extending in the + Y-axis direction from the end of the inner surface 233g on the + X-axis direction, and connected to the end of the inner surface 233c on the -X-axis side, and 233a of the inner surface. An inner surface 233i composed of an XZ plane extending from the end on the −Y axis direction side in the −X axis direction, and an inner surface 233i extending in the −Y axis direction from the end on the −X axis direction side, and the + X axis of the inner surface 233d. An inner surface 233j composed of a YZ plane connected to a side end, an inner surface 233k composed of an XZ plane extending from the end on the −Y axis direction side of the inner surface 233b in the + X axis direction, and a + X axis direction of the inner surface 233k. It has an inner surface 233l formed of a YZ plane extending from the side end in the −Y axis direction and connected to the −X axis side end of the inner surface 233d. Then, the protrusions 230A are formed on the inner surfaces 233e and 233f, the protrusions 230B are formed on the inner surfaces 233g and 233h, the protrusions 230C are formed on the inner surfaces 233i and 233j, and the protrusions 230D are formed on the inner surfaces 233k and 233l. There is.

Further, as shown in FIG. 25, the first detection signal electrode 33 is an upper portion of the inner surface 234a of the arm portion 231 of one of the detection vibrating arms 23 (23A), a lower portion of the outer surface 234b, and a lower portion of the inner surface 236a. And the upper part of the outer surface 236b, the lower part of the inner surface 234a of the arm part 231 of the other detection vibrating arm 23 (23B), the upper part of the outer surface 234b, the upper part of the inner surface 236a and the lower part of the outer surface 236b, respectively. It is provided.

Further, the second detection signal electrode 34 includes a lower portion of the inner surface 234a of the arm portion 231 of one of the detection vibrating arms 23 (23A), an upper portion of the outer surface 234b, an upper portion of the inner surface 236a, and a lower portion of the outer surface 236b. , The upper portion of the inner surface 234a of the arm portion 231 of the other detection vibrating arm 23 (23B), the lower portion of the outer surface 234b, the lower portion of the inner surface 236a, and the upper portion of the outer surface 236b, respectively.

Further, the first and second detection signal electrodes 33 and 34 on the inner surface 234a are provided over the inner surface 234a and the protrusions 230B and 230D, respectively. Similarly, the first and second detection signal electrodes 33 and 34 on the inner surface 236a are provided over the inner surface 236a and the protrusions 230A and 230C, respectively. That is, on the inner surface of the through hole 233, the electrode 3 is provided over the protrusion 230 and the portion other than the protrusion 230.

As described above, in the present embodiment, the protrusion 230 is provided, and the first and second detection signal electrodes 33 and 34 are formed on the inner surface of the through hole 233 over the protrusion 230 and the portion other than the protrusion 230. ing. As a result, the first and second detection signal electrodes 33 and 34 can be more reliably separated on the inner surface of the through hole 233, and the first and second detection signal electrodes can be more accurately separated on the inner surface of the through hole 233. 33, 34 can be formed. The effect will be described in detail in the method for manufacturing the vibrating piece 1 described later.

Next, a method of manufacturing the vibrating piece 1 of the present embodiment will be described. The method for manufacturing the vibrating piece 1 of the present embodiment includes a preparation step, a conductive film forming step, a resist film forming step, a patterning step, and an etching step, as in the first embodiment described above. .. Of these, since the patterning step is the same as that of the first embodiment described above, the patterning step will be mainly described below, and the description of the other steps will be omitted.

In the patterning step, as a step of exposing the photoresist film 6 on the inner surface of the through hole 233, a first exposure step of diagonally exposing from the + X-axis side, a second exposure step of diagonally exposing from the −X-axis side, and a + Y-axis It has a third exposure step of oblique exposure from the side and a fourth exposure step of oblique exposure from the −Y axis side.

[First exposure step]
First, as shown in FIG. 27, the photoresist film 6 on the inner surface 233b is mainly irradiated with the exposure light L inclined with respect to the Z axis from the + X axis side (oblique exposure). The exposure light L is parallel light and is parallel to the X-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width WL that is longer than the width of the inner surface 233b (length in the Y-axis direction) and shorter than the length of the through hole 233 (length in the Y-axis direction). The photoresist film 6 on the inner surface 233b is exposed by such exposure light L. Further, a part of the inner surface 233h (about half of the inner surface 233b side) and a part of the inner surface 233l (about half of the inner surface 233b side) located side by side on both sides of the inner surface 233b are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233g and 233k located orthogonal to both sides of the inner surface 233b is also exposed at the same time.

Here, the inner surface 233h of the protruding portion 230B and the inner surface 233l of the protruding portion 230D each face the same direction as the inner surface 234a. Therefore, for example, as shown in FIG. 28, by widening the width WL of the exposure light L to make it substantially equal to the length of the through hole 233, the photoresist film 6 on the inner surface 233h and 233l is also formed on the inner surface in this step. It can be exposed together with the photoresist film 6 on 233b.

However, in this step, when the photoresist film 6 on the inner surface 233h and 233l is to be exposed, the exposure light L is blocked by the inner surface 233c and the inner surface 233h (particularly, the corner portion (inner corner) formed by the inner surface 233h and 233c). Part)) is difficult to irradiate, and similarly, the exposure light L is hindered by the inner surface 233d and is difficult to irradiate the inner surface 233l (particularly, the corner portion formed by the inner surface 233l and 233d). Therefore, exposure defects may occur in the photoresist film 6 on the inner surfaces 233h and 233l, and the first and second detection signal electrodes 33 and 34 may not be divided in the subsequent etching step. Further, the exposure light L reflected by the inner surfaces 233c and 233d is applied to the unintended portion of the photoresist film 6, and the unintended portion of the conductive film 5 is removed in the subsequent etching step, so that the first and second portions are removed. The dimensions of the detection signal electrodes 33 and 34 may be significantly deviated from the design force, or the first and second detection signal electrodes 33 and 34 may be disconnected.

Therefore, in this step, by exposing only a part of the photoresist film 6 on the inner surface 233h and 233l, the occurrence of the above-mentioned problem can be suppressed, and the first and first first and first on the inner surface of the through hole 233. The two detection signal electrodes 33 and 34 can be separated more reliably, and the first and second detection signal electrodes 33 and 34 can be formed more accurately. For this reason, the protrusions 230B and 230D make the width of the exposure light L smaller than the length of the through hole 233 (the length in the Y-axis direction), and irradiate the exposure light L with the inner surfaces 233h and 233l. It can be said that it has the function of not being hindered by. Here, the widths (lengths in the Y-axis direction) of the protrusions 230B and 230D are not particularly limited, but are preferably 0.1 μm or more and 5 μm or less, for example. As a result, the effect of the protrusion 230 described above can be more reliably exerted, and the protrusion 230 can be made sufficiently small. By making the protruding portion 230 smaller, the wall portions 234 and 236 can be secured for a longer period of time, so that the electric charge can be taken out more efficiently from the first and second detection signal electrodes 33 and 34.

The above effects are the same for the second exposure step, the third exposure step, and the fourth exposure step, which will be described later. Therefore, detailed description will be omitted in the second exposure step, the third exposure step, and the fourth exposure step.

[Second exposure step]
Next, as shown in FIG. 29, the photoresist film 6 on the inner surface 233a is mainly irradiated with the exposure light L inclined with respect to the Z axis from the −X axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the X-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233a (length in the Y-axis direction) and shorter than the length of the through hole 233 (length in the Y-axis direction). The photoresist film 6 on the inner surface 233a is exposed by such exposure light L. Further, a part of the inner surface 233f (about half of the inner surface 233a side) and a part of the inner surface 233j (about half of the inner surface 233a side) located side by side on both sides of the inner surface 233a are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233e and 233i located orthogonal to both sides of the inner surface 233a is also exposed at the same time.

[Third exposure step]
Next, as shown in FIG. 30, the photoresist film 6 on the inner surface 233c is mainly irradiated with the exposure light L inclined with respect to the Z axis from the −Y axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the Y-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233c (length in the X-axis direction) and shorter than the width of the through hole 233 (length in the X-axis direction). The photoresist film 6 on the inner surface 233c is exposed by such exposure light L. Further, a part of the inner surface 233e (about half of the inner surface 233c side) and a part of the inner surface 233g (about half of the inner surface 233c side) located side by side on both sides of the inner surface 233c are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233f and 233h located orthogonal to both sides of the inner surface 233c is also exposed at the same time.

[Fourth exposure process]
Next, as shown in FIG. 31, the photoresist film 6 on the inner surface 233d is mainly irradiated with the exposure light L inclined with respect to the Z axis from the + Y axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the Y-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233d (length in the X-axis direction) and shorter than the width of the through hole 233 (length in the X-axis direction). The photoresist film 6 on the inner surface 233d is exposed by such exposure light L. Further, a part of the inner surface 233i (about half of the inner surface 233d side) and a part of the inner surface 233k (about half of the inner surface 233d side) located side by side on both sides of the inner surface 233d are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233j and 233l located orthogonal to both sides of the inner surface 233d is also exposed at the same time.

As described above, the photoresist film 6 on the inner surface of the through hole 233 can be exposed. From the above description, the exposure of the photoresist film 6 on the inner surface of the through hole 233 is performed out of two orthogonal inner surfaces (an inner surface composed of an XZ plane and an inner surface composed of a YZ plane) of the inner surface of the through hole 233. The other inner surface (the surface composed of the YZ plane) is exposed with the exposure light L having a component parallel to one inner surface (the surface composed of the XZ plane), and the other inner surface (the surface composed of the YZ plane) is exposed. ) Is exposed to one inner surface (a surface composed of an XZ plane) with an exposure light L having a component parallel to the above. According to such a method, exposure can be performed more reliably and accurately. The order of the first exposure step, the second exposure step, the third exposure step, and the fourth exposure work is not particularly limited.

In the present embodiment, the inner surfaces 233a, 233b, 233f, 233h, 233j, and 233l are formed of the YZ plane, and the inner surfaces 233c, 233d, 233e, 233g, 233i, and 233k are formed of the XZ plane. For example, the inner surface of at least one of the inner surfaces 233a, 233b, 233f, 233h, 233j, and 233l is slightly tilted (for example, less than 5 degrees) around at least one of the Y-axis and the Z-axis with respect to the YZ plane. The inner surface of at least one of the inner surfaces 233c, 233d, 233e, 233g, 233i, and 233k may be slightly inclined around at least one of the X-axis and the Z-axis with respect to the XZ plane.

<Fourth Embodiment>
FIG. 32 is a plan view showing a vibrating piece according to a fourth embodiment of the present invention. FIG. 33 is a partially enlarged perspective view showing a through hole included in the vibrating piece shown in FIG. 32. 34 to 37 are cross-sectional views showing a method of manufacturing the vibrating piece shown in FIG. 32, respectively.

The vibrating piece 1 according to the present embodiment is the same as the vibrating piece 1 of the first embodiment described above, except that the configuration of the detected vibrating arm 23 is mainly different.

In the following description, the vibration piece 1 of the fourth embodiment will be mainly described with respect to the differences from the first embodiment described above, and the description of the same matters will be omitted. Further, in FIGS. 32 to 37, the same reference numerals are given to the same configurations as those in the above-described first embodiment. Further, in the present embodiment, since the plurality of through holes 233 formed in the detection vibrating arm 23 have the same configuration as each other, one through hole 233 will be described below for convenience of explanation, and the other through holes will be described. The description of 233 will be omitted.

The detection vibrating arm 23 of the present embodiment has a configuration in which the configuration of the first embodiment described above and the configuration of the third embodiment described above are combined. That is, as shown in FIGS. 32 and 33, the detection vibrating arm 23 has convex portions 235 and 237 (convex 238) protruding into the through hole 233. Further, the through hole 233 is rectangular in a plan view viewed from the Z-axis direction (wall height direction). Further, the detection vibrating arm 23 has protrusions 230 (230A, 230B, 230C, 230D) that project from the four corners of the through hole 233 to the through hole 233 in a rectangular shape. With such a configuration, the vibrating piece 1 of the present embodiment can exhibit both the effect described in the first embodiment described above and the effect described in the third embodiment described above. Therefore, the first and second detection signal electrodes 33 and 34 can be formed with higher accuracy.

Next, a method of manufacturing the vibrating piece 1 of the present embodiment will be described. The method for manufacturing the vibrating piece 1 of the present embodiment includes a preparation step, a conductive film forming step, a resist film forming step, a patterning step, and an etching step, as in the first embodiment described above. .. Of these, since the patterning step is the same as that of the first embodiment described above, the patterning step will be mainly described below, and the description of the other steps will be omitted.

In the patterning step, as a step of exposing the photoresist film 6 on the inner surface of the through hole 233, a first exposure step of diagonally exposing from the + X-axis side, a second exposure step of diagonally exposing from the −X-axis side, and a + Y-axis It has a third exposure step of oblique exposure from the side and a fourth exposure step of oblique exposure from the −Y axis side.

[First exposure step]
First, as shown in FIG. 34, the photoresist film 6 on the inner surface 233b is mainly irradiated with the exposure light L inclined with respect to the Z axis from the + X axis side (oblique exposure). The exposure light L is parallel light and is parallel to the X-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233b (length in the Y-axis direction) and shorter than the length of the through hole 233 (length in the Y-axis direction). The photoresist film 6 on the inner surface 233b is exposed by such exposure light L. Further, a part of the inner surface 233h (about half of the inner surface 233b side) and a part of the inner surface 233l (about half of the inner surface 233b side) located side by side on both sides of the inner surface 233b are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233g and 233k located orthogonal to both sides of the inner surface 233b is also exposed at the same time.

[Second exposure step]
Next, as shown in FIG. 35, the photoresist film 6 on the inner surface 233a is mainly irradiated with the exposure light L inclined with respect to the Z axis from the −X axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the X-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233a (length in the Y-axis direction) and shorter than the length of the through hole 233 (length in the Y-axis direction). The photoresist film 6 on the inner surface 233a is exposed by such exposure light L. Further, a part of the inner surface 233f (about half of the inner surface 233a side) and a part of the inner surface 233j (about half of the inner surface 233a side) located side by side on both sides of the inner surface 233a are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233e and 233i located orthogonal to both sides of the inner surface 233a is also exposed at the same time.

[Third exposure step]
Next, as shown in FIG. 36, the photoresist film 6 on the inner surface 233c is mainly irradiated with the exposure light L inclined with respect to the Z axis from the −Y axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the Y-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233c (length in the X-axis direction) and shorter than the width of the through hole 233 (length in the X-axis direction). The photoresist film 6 on the inner surface 233c is exposed by such exposure light L. Further, a part of the inner surface 233e (about half of the inner surface 233c side) and a part of the inner surface 233g (about half of the inner surface 233c side) located side by side on both sides of the inner surface 233c are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233f and 233h located orthogonal to both sides of the inner surface 233c is also exposed at the same time.

[Fourth exposure process]
Next, as shown in FIG. 37, the photoresist film 6 on the inner surface 233d is mainly irradiated with the exposure light L inclined with respect to the Z axis from the + Y axis direction side (oblique exposure). The exposure light L is parallel light and is parallel to the Y-axis in a plan view seen from the Z-axis direction. Further, the exposure light L has a width longer than the width of the inner surface 233d (length in the X-axis direction) and shorter than the width of the through hole 233 (length in the X-axis direction). The photoresist film 6 on the inner surface 233d is exposed by such exposure light L. Further, a part of the inner surface 233i (about half of the inner surface 233d side) and a part of the inner surface 233k (about half of the inner surface 233d side) located side by side on both sides of the inner surface 233d are also exposed at the same time. Further, the photoresist film 6 on the inner surfaces 233j and 233l located orthogonal to both sides of the inner surface 233d is also exposed at the same time.

As described above, the photoresist film 6 on the inner surface of the through hole 233 can be exposed. From the above description, in the exposure of the photoresist film 6 on the inner surface of the through hole 233, of the two orthogonal inner surfaces (the inner surface composed of the XZ plane and the inner surface composed of the YZ plane) of the inner surface of the through hole 233. The other inner surface (the surface composed of the YZ plane) is exposed with the exposure light L having a component parallel to one inner surface (the surface composed of the XZ plane), and the other inner surface (the surface composed of the YZ plane) is exposed. ) Is exposed to one inner surface (a surface composed of an XZ plane) with an exposure light L having a component parallel to the above. According to such a method, exposure can be performed more reliably and accurately. The order of the first exposure step, the second exposure step, the third exposure step, and the fourth exposure work is not particularly limited.

In the present embodiment, the inner surfaces 233a, 233b, 233f, 233h, 233j, and 233l are formed of the YZ plane, and the inner surfaces 233c, 233d, 233e, 233g, 233i, and 233k are formed of the XZ plane. For example, the inner surface of at least one of the inner surfaces 233a, 233b, 233f, 233h, 233j, and 233l is slightly tilted (for example, less than 5 degrees) around at least one of the Y-axis and the Z-axis with respect to the YZ plane. The inner surface of at least one of the inner surfaces 233c, 233d, 233e, 233g, 233i, and 233k may be slightly inclined around at least one of the X-axis and the Z-axis with respect to the XZ plane.

<Fifth Embodiment>
FIG. 38 is a plan view of the oscillator according to the fifth embodiment of the present invention.

The vibrator 10 shown in FIG. 38 has a vibrating piece 1 and a package 9 for accommodating the vibrating piece 1.

The package 9 has a box-shaped base 91 having a recess 911 that opens on the upper surface, and a plate-shaped lid 92 that is joined to the base 91 and closes the opening of the recess 911. The vibrating piece 1 is housed in the storage space S formed by closing the opening of the recess 911 with the lid 92. The vibrating piece 1 is fixed to the recess 911 via the conductive adhesive 96.

The atmosphere of the storage space S is not particularly limited, but is, for example, a vacuum state (decompression state of 10 Pa or less). As a result, the viscous resistance is reduced, and the vibrating piece 1 can be driven efficiently.

The constituent material of the base 91 is not particularly limited, but for example, various ceramics such as aluminum oxide can be used. In this case, the base 91 can be manufactured by firing the laminated body of the ceramic sheet (green sheet). Further, the constituent material of the lid 92 is not particularly limited, but a member having a linear expansion coefficient similar to that of the constituent material of the base 91 is preferable. For example, when the constituent material of the base 91 is ceramics as described above, it is preferable that the constituent material of the lid 92 is a metal material (for example, an alloy such as Kovar).

Further, the base 91 has a plurality of internal terminals 94 provided facing the recess 911, and an external terminal (not shown) provided on the bottom surface and electrically connected to the corresponding internal terminal 94. Further, each internal terminal 94 has one of the terminals 4 (drive signal terminal 41, drive ground terminal 42, first detection signal terminal 43, second detection signal terminal 44) of the vibrating piece 1 via the conductive adhesive 96. Alternatively, it is electrically connected to the detection ground terminal 45).

Such an oscillator 10 has a vibrating piece 1. Therefore, the effect of the vibrating piece 1 described above can be enjoyed, and excellent reliability can be exhibited.

In addition, such an oscillator may further have a circuit element housed in the package 9. This circuit element includes, for example, an interface unit that communicates with an external host device, and a drive / detection circuit that drives the vibrating piece 1 and detects the angular velocity ω applied to the vibrating piece 1.

<Sixth Embodiment>
FIG. 39 is a perspective view showing an electronic device according to a sixth embodiment of the present invention.

The mobile (or notebook) personal computer 1100 shown in FIG. 39 is an application of an electronic device including the vibrating piece of the present invention. In this figure, the personal computer 1100 is composed of a main body 1104 having a keyboard 1102 and a display unit 1106 having a display 1108, and the display unit 1106 rotates with respect to the main body 1104 via a hinge structure. It is movably supported. Such a personal computer 1100 has a built-in vibration piece 1 that functions as a gyro sensor.

Such a personal computer 1100 (electronic device) has a vibrating piece 1. Therefore, the effect of the vibrating piece 1 described above can be enjoyed, and high reliability can be exhibited.

<7th Embodiment>
FIG. 40 is a perspective view showing an electronic device according to a seventh embodiment of the present invention.

The mobile phone 1200 (including PHS) shown in FIG. 40 is an application of an electronic device including the vibrating piece of the present invention. In this figure, the mobile phone 1200 includes an antenna (not shown), a plurality of operation buttons 1202, an earpiece 1204 and a mouthpiece 1206, and a display unit 1208 is provided between the operation buttons 1202 and the earpiece 1204. Have been placed. Such a mobile phone 1200 has a built-in vibration piece 1 that functions as a gyro sensor.

Such a mobile phone 1200 (electronic device) has a vibrating piece 1. Therefore, the effect of the vibrating piece 1 described above can be enjoyed, and high reliability can be exhibited.

<8th Embodiment>
FIG. 41 is a perspective view showing an electronic device according to an eighth embodiment of the present invention.

The digital still camera 1300 shown in FIG. 41 is an application of an electronic device including the vibrating piece of the present invention. In this figure, a display unit 1310 is provided on the back surface of the case (body) 1302 to perform display based on an image pickup signal by a CCD, and the display unit 1310 serves as a finder for displaying a subject as an electronic image. Function. Further, on the front side (back side in the drawing) of the case 1302, a light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided. Then, when the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the image pickup signal of the CCD at that time is transferred and stored in the memory 1308. Such a digital steel camera 1300 has a built-in vibrating piece 1 that functions as a gyro sensor.

Such a digital still camera 1300 (electronic device) has a vibrating piece 1. Therefore, the effect of the vibrating piece 1 described above can be enjoyed, and high reliability can be exhibited.

In addition to the personal computer of the sixth embodiment, the mobile phone of the seventh embodiment, and the digital still camera of the present embodiment, the electronic device of the present invention includes, for example, a smartphone, a tablet terminal, and a clock (smart watch). (Including), inkjet ejection devices (for example, inkjet printers), laptop personal computers, televisions, wearable terminals such as HMDs (head mount displays), video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (communication) Electronic dictionaries, calculators, electronic game devices, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical devices (eg electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices) , Ultrasonic diagnostic equipment, electronic endoscope), fish finder, various measuring equipment, equipment for mobile terminal base stations, instruments (for example, instruments for vehicles, aircraft, ships), flight simulators, network servers, etc. Can be applied.

<9th embodiment>
FIG. 42 is a perspective view showing a moving body according to a ninth embodiment of the present invention.

The automobile 1500 shown in FIG. 42 is an automobile to which a moving body including the vibrating piece of the present invention is applied. In this figure, the automobile 1500 has a built-in vibrating piece 1 that functions as a gyro sensor, and the posture of the vehicle body 1501 can be detected by the vibrating piece 1. The detection signal of the vibration piece 1 is supplied to the vehicle body attitude control device 1502, and the vehicle body attitude control device 1502 detects the attitude of the vehicle body 1501 based on the signal and controls the hardness of the suspension according to the detection result. It is possible to control the brakes of individual wheels 1503.

Such an automobile 1500 (moving body) has a vibrating piece 1. Therefore, the effect of the vibrating piece 1 described above can be enjoyed, and high reliability can be exhibited.

In addition, the vibration piece 1 includes a car navigation system, a car air conditioner, an anti-lock braking system (ABS), an airbag, a tire pressure monitoring system (TPMS), an engine control, and a hybrid vehicle. It can be widely applied to electronic control units (ECUs) such as battery monitors for electric vehicles and electric vehicles.

Further, the moving body is not limited to the automobile 1500, and can be applied to, for example, an airplane, a ship, an AGV (automated guided vehicle), a bipedal walking robot, an unmanned aerial vehicle such as a drone, and the like.

Although the method for manufacturing the vibrating piece, the vibrating piece, the vibrator, the electronic device and the moving body of the present invention have been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part is not limited to this. , Can be replaced with any configuration having a similar function. Further, any other constituents may be added to the present invention. In addition, the present invention may be a combination of any two or more configurations (features) of each of the above embodiments. For example, a plurality of through holes arranged side by side on the detection vibrating arm may include configurations of different embodiments.

Further, in the above-described embodiment, the configuration in which the vibrating piece is an angular velocity sensor has been described, but the vibrating piece is not limited to the angular velocity sensor, and may be, for example, an oscillator that outputs a signal having a predetermined frequency. , A physical quantity sensor capable of detecting a physical quantity (acceleration, pressure) other than the angular velocity may be used.

Further, in the above-described embodiment, the configuration in which the through hole and the convex portion are formed in the detection vibrating arm has been described, but the present invention is not limited to this. For example, the through hole and the convex portion may be formed on the driving vibrating arm or the adjusting vibrating arm.

1 ... Vibration piece, 10 ... Electrode, 2 ... Vibrating body, 20 ... Base, 21, 21A, 21B ... Drive vibration arm, 211 ... Arm, 212 ... Wide part, 213 ... Groove, 23, 23A, 23B ... Detection Vibrating arm, 230, 230A, 230B, 230C, 230D ... Protruding part, 231 ... Arm part, 232 ... Wide part, 233 ... Through hole, 233a, 233b, 233c, 233d, 233e, 233f, 233g, 233h, 233i, 233j , 233k, 233l ... Inner surface, 234 ... Wall part, 234a ... Inner surface, 234b ... Outer surface, 235, 235', 235 "... Convex part, 235a ... Top surface, 235b ... Side surface, 236 ... Wall part, 236a ... Inner surface, 236b ... Outer surface, 237, 237', 237 "... Convex part, 237a ... Top surface, 238 ... Convex, 239 ... Beam part, 25, 25A, 25B ... Adjusting vibration arm, 251 ... Arm part, 252 ... Wide part , 27 ... support part, 271, 272, 273 ... part, 28 ... connecting part, 281 ... first connecting part, 282 ... second connecting part, 283 ... third connecting part, 3 ... electrode, 31 ... drive signal electrode, 32 ... Drive ground electrode, 33 ... 1st detection signal electrode, 34 ... 2nd detection signal electrode, 35 ... Detection ground electrode, 4 ... Terminal, 41 ... Drive signal terminal, 42 ... Drive ground terminal, 43 ... 1st detection signal Terminal, 44 ... 2nd detection signal terminal, 45 ... Detection ground terminal, 5 ... Conductive film, 6 ... Photoresist film, 61 ... Opening, 9 ... Package, 91 ... Base, 911 ... Recess, 92 ... Lid, 94 ... Internal Terminals, 96 ... Conductive adhesives, 1100 ... Personal computers, 1102 ... Keyboards, 1104 ... Main units, 1106 ... Display units, 1108 ... Display units, 1200 ... Mobile phones, 1202 ... Operation buttons, 1204 ... Earpieces, 1206 ... Mouthpiece, 1208 ... Display, 1300 ... Digital steel camera, 1302 ... Case, 1304 ... Light receiving unit, 1306 ... Shutter button, 1308 ... Memory, 1310 ... Display, 1500 ... Automobile, 1501 ... Body, 1502 ... Body posture Control device, 1503 ... Wheel, A, B, C, D ... Arrow, L ... Exposure light, L1, L2 ... Bisection line, Lz1 ... Ray width, Lz2 ... Length, Q ... Displacement tolerance, S ... Storage Space, WL ... width, ω ... angular velocity

Claims (12)

A base portion and a vibrating arm extending from the base portion and having a through hole are provided, and in a cross section perpendicular to the extending direction of the vibrating arm, the wall portion of the vibrating arm is in the penetrating direction of the through hole. At a position including the center in the wall height direction, a convex portion whose wall thickness, which is the thickness in the direction perpendicular to the wall height direction, is thicker than any of the wall thicknesses at both ends in the wall height direction. A step of preparing a piezoelectric body having the convex portion provided on at least one of an inner surface facing the through hole and an outer surface facing the inner surface and not facing the through hole.
A step of forming a conductive film on at least one of the inner surface and the outer surface so as to spread on both sides of the convex portion and the convex portion in the wall height direction.
The step of forming a photoresist film on the conductive film and
A step of forming an opening by removing at least a part of a portion of the photoresist film located on the convex portion by exposure and development.
It is characterized by having a step of removing a portion of the conductive film exposed from the opening by etching to form an electrode divided into one side and the other side in the wall height direction on the convex portion. Manufacturing method of the vibrating piece. The method for manufacturing a vibrating piece according to claim 1, wherein the convex portion is provided at least on the inner surface. The convex portion is
A step of forming a through hole that penetrates the vibrating arm in the wall height direction by dry etching, and
The method for manufacturing a vibrating piece according to claim 2, wherein a part of the vibrating arm is removed by wet etching from the surface side facing the through hole. The method for manufacturing a vibrating piece according to any one of claims 1 to 3, wherein the vibrating arm is a detected vibrating arm. The method for manufacturing a vibrating piece according to any one of claims 1 to 4, wherein a plurality of through holes are formed so as to be separated from each other along the extending direction of the vibrating arm. In a plan view seen from the wall height direction, the through hole is rectangular, and has protrusions protruding from the four corners of the through hole into the through hole in a rectangular shape.
In the exposure, the other inner surface is exposed with an exposure light having a component parallel to the inner surface of one of the two orthogonal inner surfaces of the through hole, and the exposure light having a component parallel to the other inner surface is used. The method for producing a vibrating piece according to any one of claims 1 to 5, which exposes one of the inner surfaces. At the base,
A vibrating arm that extends from the base and is provided with a through hole.
A plurality of the through holes are provided so as to be separated from each other along the extending direction of the vibrating arm.
The wall of the vibrating arm
In the cross section perpendicular to the extending direction of the vibrating arm, the wall thickness, which is the thickness in the direction orthogonal to the wall height direction, is the wall at a position including the center in the wall height direction, which is the penetrating direction of the through hole. It has convex parts that are thicker than any of the wall thicknesses at both ends in the height direction.
The convex portion is provided on at least one of an inner surface facing the through hole and an outer surface facing the inner surface and not facing the through hole.
A vibrating piece provided on the wall portion and having an electrode divided into one side and the other side in the wall height direction on the convex portion. At the base,
A vibrating arm that extends from the base and is provided with a through hole.
The wall of the vibrating arm
In the cross section perpendicular to the extending direction of the vibrating arm, the wall thickness, which is the thickness in the direction orthogonal to the wall height direction, is the wall at a position including the center in the wall height direction, which is the penetrating direction of the through hole. It has convex parts that are thicker than any of the wall thicknesses at both ends in the height direction.
The convex portion is provided on at least one of an inner surface facing the through hole and an outer surface facing the inner surface and not facing the through hole.
Provided on the wall portion, have a, an electrode is divided into a one side and the other side of the wall height direction on the convex portion,
In a plan view seen from the wall height direction,
The through hole is rectangular and
It has protrusions that project from the four corners of the through hole into the through hole in a rectangular shape.
A vibrating piece characterized in that the electrode is provided on the inner surface of the through hole over the protruding portion and a portion other than the protruding portion. The vibrating piece according to claim 7 or 8 , wherein the vibrating arm is a detected vibrating arm. An oscillator comprising the vibrating piece according to any one of claims 7 to 9. An electronic device comprising the vibrating piece according to any one of claims 7 to 9. A moving body including the vibrating piece according to any one of claims 7 to 9.

Images