JP6833755B2

JP6833755B2 - Manufacturing method of welding equipment and joining members

Info

Publication number: JP6833755B2
Application number: JP2018071057A
Authority: JP
Inventors: 浩司入谷; 聡史曽根; 隆一外川; 智彦山田; 勝之添田
Original assignee: Toshiba Corp
Current assignee: Toshiba Corp
Priority date: 2018-04-02
Filing date: 2018-04-02
Publication date: 2021-02-24
Anticipated expiration: 2038-04-02
Also published as: JP2019181476A

Description

本発明の実施形態は、溶接装置及び接合部材の製造方法に関する。
An embodiment of the present invention relates to a welding apparatus and a method for manufacturing a joining member.

レーザ光を照射し、部品同士を溶接する溶接装置がある。この溶接装置では、溶接部分の酸化を抑制するために、ノズルから溶接部分へ不活性ガスが吹き付けられる。
レーザ光を照射し、部品が溶融すると、その材料の一部が気化する。気化した材料が冷えると、その材料が凝固し、細かい粒子（ヒューム）となる。ヒュームがノズルの先端に付着すると、不活性ガスの流量が低下し、溶接部分が酸化する可能性がある。また、ノズルに付着したヒュームが溶接部分に落下すると、部品同士が十分に溶接されない可能性がある。 There is a welding device that irradiates laser light and welds parts to each other. In this welding device, an inert gas is blown from the nozzle to the welded portion in order to suppress oxidation of the welded portion.
When a part is melted by irradiating with a laser beam, a part of the material is vaporized. When the vaporized material cools, the material solidifies into fine particles (fume). If the fume adheres to the tip of the nozzle, the flow rate of the inert gas will decrease and the weld may oxidize. Further, if the fume adhering to the nozzle falls on the welded portion, the parts may not be sufficiently welded to each other.

特開平１１−２８５８８３号公報Japanese Unexamined Patent Publication No. 11-285883

本発明が解決しようとする課題は、ノズルへのヒュームの付着を抑制できる溶接装置及び接合部材の製造方法を提供することである。
An object to be solved by the present invention is to provide a welding apparatus and a method for manufacturing a joining member capable of suppressing adhesion of fume to a nozzle.

実施形態に係る溶接装置は、処理室と、ホルダと、照射部と、ノズルと、第１排気口と、制御部と、を備える。前記ホルダは、前記処理室内に設けられ、溶接対象を保持する。前記照射部は、前記溶接対象に向けてレーザ光を照射する。前記ノズルは、前記レーザ光に対して傾斜した角度から、前記溶接対象に向けて不活性ガスを噴射する。前記第１排気口は、前記処理室の第１側面に設けられ、前記処理室内の気体を排出する。前記制御部は、前記溶接対象である第１溶接部分を間において、前記第１排気口側と対向するように前記ノズルを位置させ、前記ノズルから前記第１溶接部分へ前記不活性ガスを噴射させつつ、前記第１溶接部分へ前記照射部から前記レーザ光を照射し且つ前記第１排気口から前記気体を排出する、第１動作を行う。
The welding apparatus according to the embodiment includes a processing chamber, a holder, an irradiation unit, a nozzle, a first exhaust port, and a control unit. The holder is provided in the processing chamber and holds a welding target. The irradiation unit irradiates the laser beam toward the welding target. The nozzle injects an inert gas toward the welding target from an angle inclined with respect to the laser beam. The first exhaust port is provided on the first side surface of the processing chamber and discharges the gas in the processing chamber. Wherein, between the first welding portion which is the welded, the said nozzle is positioned so as to face the first exhaust port side, injecting said inert gas from said nozzle to said first welding part while, it discharges the gas to the laser light irradiation and the first outlet from the said irradiation unit to the first weld portion, performs the first operation.

第１実施形態に係る溶接装置を模式的に表す斜視図である。It is a perspective view which shows typically the welding apparatus which concerns on 1st Embodiment. 第１実施形態に係る溶接装置の動作を表す模式図である。It is a schematic diagram which shows the operation of the welding apparatus which concerns on 1st Embodiment. 第１実施形態に係る溶接装置の一部を表す斜視図である。It is a perspective view which shows a part of the welding apparatus which concerns on 1st Embodiment. 第１実施形態に係る溶接装置の動作を表すフローチャートである。It is a flowchart which shows the operation of the welding apparatus which concerns on 1st Embodiment. 第１実施形態の変形例に係る溶接装置の動作を例示する模式図である。It is a schematic diagram which illustrates the operation of the welding apparatus which concerns on the modification of 1st Embodiment. 第２実施形態に係る溶接装置の動作を表す模式図である。It is a schematic diagram which shows the operation of the welding apparatus which concerns on 2nd Embodiment.

以下に、本発明の各実施形態について図面を参照しつつ説明する。
なお、図面は模式的または概念的なものであり、各部分の厚みと幅との関係、部分間の大きさの比率などは、必ずしも現実のものと同一とは限らない。また、同じ部分を表す場合であっても、図面により互いの寸法や比率が異なって表される場合もある。
また、本願明細書と各図において、既に説明したものと同様の要素には同一の符号を付して詳細な説明は適宜省略する。 Hereinafter, each embodiment of the present invention will be described with reference to the drawings.
The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the ratio of the sizes between the parts, and the like are not necessarily the same as the actual ones. Further, even when the same parts are represented, the dimensions and ratios may be different from each other depending on the drawings.
Further, in the present specification and each figure, the same elements as those already described are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate.

図１は、第１実施形態に係る溶接装置を模式的に表す斜視図である。
図２は、第１実施形態に係る溶接装置の動作を表す模式図である。
図３は、第１実施形態に係る溶接装置の一部を表す斜視図である。 FIG. 1 is a perspective view schematically showing a welding apparatus according to the first embodiment.
FIG. 2 is a schematic view showing the operation of the welding apparatus according to the first embodiment.
FIG. 3 is a perspective view showing a part of the welding apparatus according to the first embodiment.

図１に表したように、第１実施形態に係る溶接装置１００は、処理室１、ホルダ３、照射部５、ノズル７、第１排気口１１、ヘッド２０、及び制御部３０を備える。 As shown in FIG. 1, the welding apparatus 100 according to the first embodiment includes a processing chamber 1, a holder 3, an irradiation unit 5, a nozzle 7, a first exhaust port 11, a head 20, and a control unit 30.

処理室１は、部材の溶接処理を行うための処理空間を形成している。ホルダ３、照射部５、及びノズル７は、処理室１内に設けられている。ホルダ３は、溶接対象である部材４０を保持する。ホルダ３は、例えば、機械式チャック、真空チャック、又は静電チャックなどにより部材４０を固定する。 The processing chamber 1 forms a processing space for performing welding processing of members. The holder 3, the irradiation unit 5, and the nozzle 7 are provided in the processing chamber 1. The holder 3 holds the member 40 to be welded. The holder 3 fixes the member 40 with, for example, a mechanical chuck, a vacuum chuck, an electrostatic chuck, or the like.

照射部５は、部材４０に向けてレーザ光Ｌを照射する。例えば、不図示の発振器によりレーザ光が発生され、光ファイバー又はミラーなどを用いて照射部５にレーザ光が導かれる。照射部５は、そのレーザ光を部材４０の溶接部分に集光させるための光学系を有する。 The irradiation unit 5 irradiates the member 40 with the laser beam L. For example, a laser beam is generated by an oscillator (not shown), and the laser beam is guided to the irradiation unit 5 by using an optical fiber or a mirror. The irradiation unit 5 has an optical system for condensing the laser beam on the welded portion of the member 40.

例えば、部材４０は、部品４０ａ及び部品４０ｂから構成される。部材４０にレーザ光Ｌが照射されることで、部品４０ａの一部及び部品４０ｂの一部が溶融する。溶融した部分同士が混ざり合い、凝固することで、部品４０ａと４０ｂが接合され、部材４０が作製される。 For example, the member 40 is composed of a part 40a and a part 40b. When the member 40 is irradiated with the laser beam L, a part of the part 40a and a part of the part 40b are melted. The melted portions are mixed and solidified, so that the parts 40a and 40b are joined to form the member 40.

ノズル７は、レーザ光Ｌに対して傾斜した角度から、部材４０の溶接部分に向けて不活性ガスを噴射する。当該角度は、３０度以上６０度以下が好ましい。当該角度は、例えば４５度に設定される。不活性ガスとしては、窒素、ヘリウム、又はアルゴンなどを用いることができる。 The nozzle 7 injects the inert gas toward the welded portion of the member 40 from an angle inclined with respect to the laser beam L. The angle is preferably 30 degrees or more and 60 degrees or less. The angle is set to, for example, 45 degrees. As the inert gas, nitrogen, helium, argon or the like can be used.

図２に表したように、処理室１は、第１側面Ｓ１〜第４側面Ｓ４を有する。第１側面Ｓ１は、第３側面Ｓ３と対向している。第２側面Ｓ２は、第４側面Ｓ４と対向している。第１排気口１１は、第１側面Ｓ１に設けられている。 As shown in FIG. 2, the processing chamber 1 has a first side surface S1 to a fourth side surface S4. The first side surface S1 faces the third side surface S3. The second side surface S2 faces the fourth side surface S4. The first exhaust port 11 is provided on the first side surface S1.

図１及び図２に表した例では、第２側面Ｓ２〜第４側面Ｓ４にそれぞれ第２排気口１２〜第４排気口１４がさらに設けられている。第１排気口１１〜第４排気口１４は、処理室１内の気体を排出する。 In the examples shown in FIGS. 1 and 2, the second exhaust port 12 to the fourth exhaust port 14 are further provided on the second side surface S2 to the fourth side surface S4, respectively. The first exhaust ports 11 to 4 exhaust ports 14 discharge the gas in the processing chamber 1.

例えば、第１排気口１１〜第４排気口１４は、それぞれ、バルブ１１ｖ〜１４ｖを介して排気部１５に接続されている。排気部１５は、例えば、ブロア又はファンである。バルブ１１ｖ〜１４ｖを開いた状態で排気部１５が動作することで、第１排気口１１〜第４排気口１４を通して処理室１内を排気できる。 For example, the first exhaust ports 11 to 4 fourth exhaust ports 14 are connected to the exhaust unit 15 via valves 11v to 14v, respectively. The exhaust unit 15 is, for example, a blower or a fan. By operating the exhaust unit 15 with the valves 11v to 14v open, the inside of the processing chamber 1 can be exhausted through the first exhaust ports 11 to 4th exhaust ports 14.

制御部３０は、溶接装置１００の各構成要素の動作を制御する。例えば、制御部３０は、照射部５及びノズル７の位置を制御し、部材４０の溶接される箇所を調整する。また、制御部３０は、バルブ１１ｖ〜１４ｖ及び排気部１５を制御する。例えば、バルブ１１ｖ〜１４ｖの１つのみを開いて排気部１５を動作させることで、第１排気口１１〜第４排気口１４の１つのみを通して排気できる。 The control unit 30 controls the operation of each component of the welding device 100. For example, the control unit 30 controls the positions of the irradiation unit 5 and the nozzle 7 to adjust the welded portion of the member 40. Further, the control unit 30 controls the valves 11v to 14v and the exhaust unit 15. For example, by opening only one of the valves 11v to 14v and operating the exhaust unit 15, exhaust can be performed through only one of the first exhaust ports 11 to 4 exhaust ports 14.

例えば、ヘッド２０は、照射部５及びノズル７を有し、制御部３０は、ヘッド２０のＸ方向における位置、Ｙ方向における位置、及び回転角度θを制御する。これにより、照射部５及びノズル７の位置が調整される。なお、ここでは、ホルダ３の表面に平行であり、相互に直交する２方向をＸ方向及びＹ方向としている。Ｘ方向及びＹ方向に垂直なＺ方向を回転軸としてヘッド２０を回転させた場合の回転角度をθとしている。 For example, the head 20 has an irradiation unit 5 and a nozzle 7, and the control unit 30 controls the position of the head 20 in the X direction, the position in the Y direction, and the rotation angle θ. As a result, the positions of the irradiation unit 5 and the nozzle 7 are adjusted. Here, the two directions parallel to the surface of the holder 3 and orthogonal to each other are the X direction and the Y direction. The rotation angle when the head 20 is rotated about the Z direction perpendicular to the X direction and the Y direction as the rotation axis is θ.

一例として、溶接装置１００は、図２に表したように、部材４０の第１溶接部分４１〜第４溶接部分４４を溶接する。この例では、第１溶接部分４１及び第３溶接部分４３は、Ｙ方向に延びる線状である。第２溶接部分４２及び第４溶接部分４４は、Ｘ方向に延びる線状である。 As an example, the welding apparatus 100 welds the first welded portions 41 to 4 welded portions 44 of the member 40 as shown in FIG. In this example, the first welded portion 41 and the third welded portion 43 are linear extending in the Y direction. The second welded portion 42 and the fourth welded portion 44 are linear extending in the X direction.

制御部３０は、まず、第１動作ＯＰ１を行う。第１動作ＯＰ１では、第１溶接部分４１へノズル７から不活性ガス７ａを噴射させつつ、第１溶接部分４１へ照射部５からレーザ光Ｌを照射する。このとき、制御部３０は、図２及び図３に表したように、ノズル７を、第１溶接部分４１の第１排気口１１側とは反対側に位置させる。換言すると、第１動作において、第１溶接部分４１（レーザ光Ｌが照射された部分）のＸ方向における位置は、ノズル７先端のＸ方向における位置と、第１排気口１１のＸ方向における位置と、の間にある。制御部３０は、この位置関係を保ったまま、矢印Ａ１の方向に沿ってヘッド２０を移動させ、第１溶接部分４１の全体を溶接していく。 The control unit 30 first performs the first operation OP1. In the first operation OP1, while injecting the inert gas 7a from the nozzle 7 onto the first welded portion 41, the laser beam L is irradiated from the irradiation portion 5 to the first welded portion 41. At this time, as shown in FIGS. 2 and 3, the control unit 30 positions the nozzle 7 on the side opposite to the first exhaust port 11 side of the first welded portion 41. In other words, in the first operation, the positions of the first welded portion 41 (the portion irradiated with the laser beam L) in the X direction are the position of the tip of the nozzle 7 in the X direction and the position of the first exhaust port 11 in the X direction. And between. The control unit 30 moves the head 20 along the direction of the arrow A1 while maintaining this positional relationship, and welds the entire first welded portion 41.

続いて、制御部３０は、第２動作ＯＰ２を行う。第２動作ＯＰ２では、第２溶接部分４２へノズル７から不活性ガス７ａを噴射させつつ、第２溶接部分４２へ照射部５からレーザ光Ｌを照射する。第２動作ＯＰ２において、制御部３０は、ノズル７を、第２溶接部分４２の第２排気口１２側とは反対側に位置させる。換言すると、第２動作において、第２溶接部分４２（レーザ光Ｌが照射された部分）のＹ方向における位置は、ノズル７先端のＹ方向における位置と、第２排気口１２のＹ方向における位置と、の間にある。制御部３０は、この位置関係を保ったまま、矢印Ａ２の方向に沿ってヘッド２０を移動させ、第２溶接部分４２の全体を溶接していく。 Subsequently, the control unit 30 performs the second operation OP2. In the second operation OP2, the second welded portion 42 is irradiated with the laser beam L from the irradiation portion 5 while the inert gas 7a is injected from the nozzle 7 to the second welded portion 42. In the second operation OP2, the control unit 30 positions the nozzle 7 on the side of the second welded portion 42 opposite to the second exhaust port 12 side. In other words, in the second operation, the positions of the second welded portion 42 (the portion irradiated with the laser beam L) in the Y direction are the position of the tip of the nozzle 7 in the Y direction and the position of the second exhaust port 12 in the Y direction. And between. The control unit 30 moves the head 20 along the direction of the arrow A2 while maintaining this positional relationship, and welds the entire second welded portion 42.

その後、第３動作ＯＰ３及び第４動作ＯＰ４を順次行う。制御部３０は、第３動作ＯＰ３及び第４動作ＯＰ４において、それぞれ、第１動作ＯＰ１及び第２動作ＯＰ２と実質的に同じ動作を行う。 After that, the third operation OP3 and the fourth operation OP4 are sequentially performed. In the third operation OP3 and the fourth operation OP4, the control unit 30 performs substantially the same operation as the first operation OP1 and the second operation OP2, respectively.

すなわち、第３動作ＯＰ３において、制御部３０は、ヘッド２０を矢印Ａ３の方向へ移動させながら、第３溶接部分４３へ、不活性ガス７ａの噴射及びレーザ光Ｌの照射を行う。第３動作ＯＰ３において、制御部３０は、ノズル７を、第３溶接部分４３の第３排気口１３側とは反対側に位置させる。
第４動作ＯＰ４において、制御部３０は、ヘッド２０を矢印Ａ４の方向へ移動させながら、第４溶接部分４４へ、不活性ガス７ａの噴射及びレーザ光Ｌの照射を行う。制御部３０は、ノズル７を、第４溶接部分４４の第４排気口１４側とは反対側に位置させる。 That is, in the third operation OP3, the control unit 30 injects the inert gas 7a and irradiates the laser beam L to the third welded portion 43 while moving the head 20 in the direction of the arrow A3. In the third operation OP3, the control unit 30 positions the nozzle 7 on the side of the third welded portion 43 opposite to the third exhaust port 13 side.
In the fourth operation OP4, the control unit 30 injects the inert gas 7a and irradiates the laser beam L to the fourth welded portion 44 while moving the head 20 in the direction of the arrow A4. The control unit 30 positions the nozzle 7 on the side of the fourth welded portion 44 opposite to the fourth exhaust port 14 side.

以上の動作により、部材４０の第１溶接部分４１〜第４溶接部分４４が順次溶接される。なお、ここでは、部材４０の４つの部分を溶接する場合を例示したが、溶接装置１００において、溶接される部分の数及び溶接される部分の形状は任意である。 By the above operation, the first welded portions 41 to 4 welded portions 44 of the member 40 are sequentially welded. Although the case where the four parts of the member 40 are welded is illustrated here, the number of parts to be welded and the shape of the parts to be welded are arbitrary in the welding device 100.

例えば、溶接装置１００により、部材４０の第１溶接部分４１のみが溶接されても良い。この場合、制御部３０は、第１動作のみを行う。この場合、溶接装置１００に、第２排気口１２〜第４排気口１４が設けられていなくても良い。
溶接装置１００により、部材４０の第１溶接部分４１及び第２溶接部分４２のみが溶接されても良い。この場合、制御部３０は、第１動作及び第２動作のみを行う。この場合、溶接装置１００に、第３排気口１３及び第４排気口１４が設けられていなくても良い。 For example, only the first welded portion 41 of the member 40 may be welded by the welding device 100. In this case, the control unit 30 performs only the first operation. In this case, the welding device 100 may not be provided with the second exhaust port 12 to the fourth exhaust port 14.
Only the first welded portion 41 and the second welded portion 42 of the member 40 may be welded by the welding apparatus 100. In this case, the control unit 30 performs only the first operation and the second operation. In this case, the welding device 100 may not be provided with the third exhaust port 13 and the fourth exhaust port 14.

第１実施形態の効果を説明する。
第１実施形態に係る溶接装置１００では、部材４０の第１溶接部分４１が溶接される際、制御部３０は、ノズル７を、第１溶接部分４１の第１排気口１１側とは反対側に位置させる。この位置関係によれば、ノズル７から噴射された不活性ガス７ａは、第１溶接部分４１へ当たった後、第１排気口１１に向けて流れる。部材４０が蒸発して生じた気体及びヒュームは、不活性ガスの流れによって第１排気口１１へ流れていく。このため、第１実施形態に係る溶接装置１００によれば、ノズル７へのヒュームの付着を抑制できる。 The effect of the first embodiment will be described.
In the welding device 100 according to the first embodiment, when the first welded portion 41 of the member 40 is welded, the control unit 30 sets the nozzle 7 on the side opposite to the first exhaust port 11 side of the first welded portion 41. To be located in. According to this positional relationship, the inert gas 7a injected from the nozzle 7 hits the first welded portion 41 and then flows toward the first exhaust port 11. The gas and fume generated by the evaporation of the member 40 flow to the first exhaust port 11 by the flow of the inert gas. Therefore, according to the welding apparatus 100 according to the first embodiment, adhesion of the fume to the nozzle 7 can be suppressed.

特に、溶接装置１００では、処理室１の側面に設けられた排気口により、処理室１内の気体を排出する。このため、排気口がホルダ３やヘッド２０などに設けられている場合に比べて、排気口の開口面積を大きくできる。この結果、ヒュームがより第１排気口１１に向けて流れ易くなり、ノズル７へのヒュームの付着を効果的に抑制できる。 In particular, in the welding device 100, the gas in the processing chamber 1 is discharged by the exhaust port provided on the side surface of the processing chamber 1. Therefore, the opening area of the exhaust port can be increased as compared with the case where the exhaust port is provided in the holder 3 or the head 20 or the like. As a result, the fume becomes easier to flow toward the first exhaust port 11, and the adhesion of the fume to the nozzle 7 can be effectively suppressed.

また、溶接装置１００では、第１排気口１１に加えて、第２側面Ｓ２に第２排気口１２が設けられている。第２溶接部分４２と第２側面Ｓ２との間の距離は、第１溶接部分４１の少なくとも一部と第２側面Ｓ２との間の距離よりも短い。第２溶接部分４２を溶接する際、制御部３０は、ノズル７を、第２溶接部分４２の第２排気口１２側とは反対側に位置させる。これにより、第２溶接部分４２にレーザ光Ｌを照射した際に発生するヒュームを、より効率的に処理室１内から排出できる。 Further, in the welding device 100, in addition to the first exhaust port 11, a second exhaust port 12 is provided on the second side surface S2. The distance between the second welded portion 42 and the second side surface S2 is shorter than the distance between at least a part of the first welded portion 41 and the second side surface S2. When welding the second welded portion 42, the control unit 30 positions the nozzle 7 on the side opposite to the second exhaust port 12 side of the second welded portion 42. As a result, the fume generated when the second welded portion 42 is irradiated with the laser beam L can be more efficiently discharged from the processing chamber 1.

すなわち、第１動作ＯＰ１の少なくとも一部において、ノズル７と第１側面Ｓ１との間のＸ方向における距離は、ノズル７と第２側面Ｓ２との間のＹ方向における距離よりも短い。第２動作ＯＰ２の少なくとも一部において、ノズル７と第２側面Ｓ２との間のＹ方向における距離は、ノズル７と第１側面Ｓ１との間のＸ方向における距離よりも短い。これにより、発生したヒュームをより効率的に処理室１内から排出できる。
より望ましくは、第１動作ＯＰ１の全体において、ノズル７と第１側面Ｓ１との間のＸ方向における距離は、ノズル７と第２側面Ｓ２との間のＹ方向における距離よりも短い。第２動作ＯＰ２の全体において、ノズル７と第２側面Ｓ２との間のＹ方向における距離は、ノズル７と第１側面Ｓ１との間のＸ方向における距離よりも短い。 That is, in at least a part of the first operation OP1, the distance between the nozzle 7 and the first side surface S1 in the X direction is shorter than the distance between the nozzle 7 and the second side surface S2 in the Y direction. In at least a part of the second operation OP2, the distance in the Y direction between the nozzle 7 and the second side surface S2 is shorter than the distance in the X direction between the nozzle 7 and the first side surface S1. As a result, the generated fume can be discharged from the processing chamber 1 more efficiently.
More preferably, in the entire first operation OP1, the distance in the X direction between the nozzle 7 and the first side surface S1 is shorter than the distance in the Y direction between the nozzle 7 and the second side surface S2. In the entire second operation OP2, the distance in the Y direction between the nozzle 7 and the second side surface S2 is shorter than the distance in the X direction between the nozzle 7 and the first side surface S1.

同様に、第３溶接部分４３及び第４溶接部分４４を溶接する際、それぞれ、ノズル７から第３排気口１３及び第４排気口１４に向けて不活性ガスが噴射されることで、ヒュームを効率的に処理室１内から排出できる。 Similarly, when the third welded portion 43 and the fourth welded portion 44 are welded, the Fume is generated by injecting the inert gas from the nozzle 7 toward the third exhaust port 13 and the fourth exhaust port 14, respectively. It can be efficiently discharged from the processing chamber 1.

ヒュームをより効率的に排出するために、制御部３０は、第１排気口１１〜第４排気口１４のそれぞれの圧力を調整しても良い。例えば、制御部３０は、第１動作ＯＰ１において、バルブ１１ｖを開き、バルブ１２ｖ〜１４ｖをバルブ１１ｖよりも閉じた状態で排気部１５を動作させる。望ましくは、制御部３０は、バルブ１２ｖ〜１４ｖを完全に閉じる。これにより、第１排気口１１における圧力を、第２排気口における圧力よりも低下させることができる。この結果、第１溶接部分４１へ向けて噴射された不活性ガス７ａが、より第１排気口１１に向けて流れ易くなる。 In order to discharge the fume more efficiently, the control unit 30 may adjust the pressure of each of the first exhaust port 11 to the fourth exhaust port 14. For example, the control unit 30 operates the exhaust unit 15 in the first operation OP1 with the valves 11v opened and the valves 12v to 14v closed more than the valves 11v. Desirably, the control unit 30 completely closes the valves 12v-14v. As a result, the pressure at the first exhaust port 11 can be made lower than the pressure at the second exhaust port. As a result, the inert gas 7a injected toward the first welded portion 41 becomes easier to flow toward the first exhaust port 11.

同様に、制御部３０は、第２動作ＯＰ２において、バルブ１２ｖを開き、バルブ１１ｖ、１３ｖ、及び１４ｖをバルブ１２ｖよりも閉じた状態で排気部１５を動作させる。これにより、第２溶接部分４２へ向けて噴射された不活性ガス７ａが、より第２排気口１２に向けて流れ易くなる。第３動作ＯＰ３及び第４動作ＯＰ４においても同様である。 Similarly, in the second operation OP2, the control unit 30 operates the exhaust unit 15 in a state where the valve 12v is opened and the valves 11v, 13v, and 14v are closed more than the valve 12v. As a result, the inert gas 7a injected toward the second welded portion 42 becomes easier to flow toward the second exhaust port 12. The same applies to the third operation OP3 and the fourth operation OP4.

なお、第１排気口１１〜第４排気口１４の一部における圧力を選択的に低下させることができれば、溶接装置１００における排気系の構成は適宜変更可能である。例えば、バルブ１１ｖ〜１４ｖに代えて、流路切替弁が設けられていても良い。制御部３０は、流路切替弁を制御し、排気部１５と接続される排気口を切り替えることで、第１排気口１１〜第４排気口１４の一部における圧力を選択的に低下させる。 If the pressure at a part of the first exhaust port 11 to the fourth exhaust port 14 can be selectively reduced, the configuration of the exhaust system in the welding apparatus 100 can be changed as appropriate. For example, flow path switching valves may be provided in place of the valves 11v-14v. The control unit 30 controls the flow path switching valve and switches the exhaust port connected to the exhaust unit 15 to selectively reduce the pressure in a part of the first exhaust port 11 to the fourth exhaust port 14.

また、第１側面Ｓ１〜第４側面Ｓ４のそれぞれに設けられる排気口の数も適宜変更可能である。例えば、第１側面Ｓ１に、第１排気口１１と、別の排気口と、が設けられていても良い。制御部３０は、第１排気口１１と、別の排気口と、の一方における圧力を、他方の圧力よりも低下させても良い。１つの側面に複数の排気口が設けられ、その一部の圧力を選択的に低下させることで、排気部１５の排気性能が低い場合でも、排気口における圧力をより低減できる。 Further, the number of exhaust ports provided on each of the first side surface S1 to the fourth side surface S4 can be changed as appropriate. For example, the first side surface S1 may be provided with a first exhaust port 11 and another exhaust port. The control unit 30 may make the pressure at one of the first exhaust port 11 and the other exhaust port lower than the pressure of the other. By providing a plurality of exhaust ports on one side surface and selectively reducing the pressure of some of them, the pressure at the exhaust ports can be further reduced even when the exhaust performance of the exhaust unit 15 is low.

図３に表したように、例えば、ヘッド２０は、レーザ光Ｌが透過する領域２０ａを有する。ヘッド２０は、領域２０ａの周りに設けられた環状の流路２１を有する。具体的には、ヘッド２０は、部材２５（第１部材）及び部材２６（第２部材）を有する。部材２５には、不活性ガスが流れる配管２８が接続されている。部材２６は、部材２５の上に重ね合わされている。流路２１は、部材２５と部材２６の隙間により構成されている。流路２１には、配管２８及び穴２９（第２穴）を通して不図示の供給源より不活性ガスが供給される。 As shown in FIG. 3, for example, the head 20 has a region 20a through which the laser beam L is transmitted. The head 20 has an annular flow path 21 provided around the region 20a. Specifically, the head 20 has a member 25 (first member) and a member 26 (second member). A pipe 28 through which the inert gas flows is connected to the member 25. The member 26 is superposed on the member 25. The flow path 21 is composed of a gap between the member 25 and the member 26. The flow path 21 is supplied with an inert gas from a source (not shown) through the pipe 28 and the hole 29 (second hole).

また、図３に表したように、第１排気口１１の開口部には、例えばメッシュ１１ａが設けられる。メッシュ１１ａが設けられることで、第１排気口１１の開口全体からより均一に処理室１内の気体を排出できる。同様に、第２排気口１２の開口部には不図示のメッシュが設けられることが望ましい。第３排気口１３の開口部及び第４排気口１４の開口部には、それぞれ、メッシュ１３ａ及びメッシュ１４ａが設けられることが望ましい。 Further, as shown in FIG. 3, for example, a mesh 11a is provided at the opening of the first exhaust port 11. By providing the mesh 11a, the gas in the processing chamber 1 can be discharged more uniformly from the entire opening of the first exhaust port 11. Similarly, it is desirable that a mesh (not shown) is provided in the opening of the second exhaust port 12. It is desirable that the mesh 13a and the mesh 14a are provided in the opening of the third exhaust port 13 and the opening of the fourth exhaust port 14, respectively.

流路２１の一部には穴２２（第１穴）が設けられている。穴２２は、部材２５に設けられている。ノズル７は、穴２２を通して流路２１と連通している。流路２１に供給された不活性ガスは、穴２２を通してノズル７へ流れ、ノズル７の先端から噴射される。部材２５と部材２６との間には、Ｏリング２７が設けられ、穴２２及び穴２９以外において、流路２１は外部空間と分離されている。 A hole 22 (first hole) is provided in a part of the flow path 21. The hole 22 is provided in the member 25. The nozzle 7 communicates with the flow path 21 through the hole 22. The inert gas supplied to the flow path 21 flows to the nozzle 7 through the hole 22 and is injected from the tip of the nozzle 7. An O-ring 27 is provided between the member 25 and the member 26, and the flow path 21 is separated from the external space except for the holes 22 and 29.

例えば、部材２５は、部材２６に対して回転可能である。部材２５は、Ｚ方向を軸として回転する。部材２５が回転することで、ノズル７も、レーザ光Ｌの周りを回転する。一方で、配管２８の位置は、部材２６が回転しても変化しない。従って、この構成によれば、不活性ガスが噴射される位置や方向を変化させるためにノズル７を回転させても、配管２８が他の部材と干渉することは無い。配管２８の位置や構成に拘わらず、ノズル７を自由に回転させることができる。 For example, the member 25 is rotatable with respect to the member 26. The member 25 rotates about the Z direction. As the member 25 rotates, the nozzle 7 also rotates around the laser beam L. On the other hand, the position of the pipe 28 does not change even if the member 26 rotates. Therefore, according to this configuration, the pipe 28 does not interfere with other members even if the nozzle 7 is rotated to change the position and direction in which the inert gas is injected. The nozzle 7 can be freely rotated regardless of the position and configuration of the pipe 28.

また、図３に表したように、ノズル７の先端の高さ（Ｚ方向における位置）は、第１排気口１１の一部の高さと同じであることが望ましい。ホルダ３の上面の高さは、第１排気口１１の一部の高さと同じであることが望ましい。この構成によれば、部材４０に向けて噴射された不活性ガス７ａが、より第１排気口１１へ流れやすくなる。この結果、ノズル７へのヒュームの付着をさらに抑制できる。 Further, as shown in FIG. 3, it is desirable that the height of the tip of the nozzle 7 (position in the Z direction) is the same as the height of a part of the first exhaust port 11. It is desirable that the height of the upper surface of the holder 3 is the same as the height of a part of the first exhaust port 11. According to this configuration, the inert gas 7a injected toward the member 40 is more likely to flow to the first exhaust port 11. As a result, the adhesion of the fume to the nozzle 7 can be further suppressed.

図４は、第１実施形態に係る溶接装置の動作を表すフローチャートである。
図４は、部材４０の第１溶接部分４１及び第２溶接部分４２のみを溶接する場合の溶接装置１００の動作を例示している。溶接装置１００により、第３溶接部分４３及び第４溶接部分４４が溶接される場合は、以下のステップＳｔ１〜Ｓｔ６と実質的に同じ動作が、第３溶接部分４３及び第４溶接部分４４に対して行われる。 FIG. 4 is a flowchart showing the operation of the welding apparatus according to the first embodiment.
FIG. 4 illustrates the operation of the welding device 100 when only the first welded portion 41 and the second welded portion 42 of the member 40 are welded. When the third welded portion 43 and the fourth welded portion 44 are welded by the welding apparatus 100, substantially the same operation as in steps St1 to St6 below is performed on the third welded portion 43 and the fourth welded portion 44. Will be done.

制御部３０は、ノズル７を、第１溶接部分４１の第１排気口１１側とは反対側に位置させる（ステップＳｔ１）。制御部３０は、ノズル７から第１溶接部分４１へ不活性ガス７ａを噴射する（ステップＳｔ２）。制御部３０は、照射部５から第１溶接部分４１へレーザ光Ｌを照射する（ステップＳｔ３）。ステップＳｔ１〜Ｓｔ３の順序は適宜変更可能であるが、第１溶接部分４１の酸化を防ぐためには、ステップＳｔ３の前にステップＳｔ２を行うことが望ましい。また、ノズル７へのヒュームの付着を効果的に抑制するためには、ステップＳｔ３の前にステップＳｔ１を行うことが望ましい。 The control unit 30 positions the nozzle 7 on the side of the first welded portion 41 opposite to the first exhaust port 11 side (step St1). The control unit 30 injects the inert gas 7a from the nozzle 7 to the first welded portion 41 (step St2). The control unit 30 irradiates the first welded portion 41 with the laser beam L from the irradiation unit 5 (step St3). Although the order of steps St1 to St3 can be changed as appropriate, it is desirable to perform step St2 before step St3 in order to prevent oxidation of the first welded portion 41. Further, in order to effectively suppress the adhesion of the fume to the nozzle 7, it is desirable to perform step St1 before step St3.

次に、制御部３０は、ノズル７を、第２溶接部分４２の第２排気口１２側とは反対側に位置させる（ステップＳｔ４）。制御部３０は、ノズル７から第２溶接部分４２へ不活性ガス７ａを噴射する（ステップＳｔ５）。制御部３０は、照射部５から第２溶接部分４２へレーザ光Ｌを照射する（ステップＳｔ６）。ステップＳｔ４〜Ｓｔ６の順序は適宜変更可能であるが、上述した通り、ステップＳｔ４及びＳ５は、ステップＳｔ６の前に行われることが望ましい。 Next, the control unit 30 positions the nozzle 7 on the side of the second welded portion 42 opposite to the second exhaust port 12 side (step St4). The control unit 30 injects the inert gas 7a from the nozzle 7 to the second welded portion 42 (step St5). The control unit 30 irradiates the second welded portion 42 with the laser beam L from the irradiation unit 5 (step St6). The order of steps St4 to St6 can be changed as appropriate, but as described above, it is desirable that steps St4 and S5 be performed before step St6.

（変形例）
図５は、第１実施形態の変形例に係る溶接装置の動作を例示する模式図である。
変形例に係る溶接装置１１０は、第１排気口１１を備え、第２排気口１２〜第４排気口１４を備えていない。溶接装置１１０において、不図示の制御部は、例えば図５に表したように、第１溶接部分４１〜第４溶接部分４４をそれぞれ溶接する第１動作ＯＰ１〜第４動作ＯＰ４を行う。 (Modification example)
FIG. 5 is a schematic view illustrating the operation of the welding apparatus according to the modified example of the first embodiment.
The welding device 110 according to the modified example includes a first exhaust port 11 and does not include a second exhaust port 12 to a fourth exhaust port 14. In the welding device 110, the control unit (not shown) performs the first operation OP1 to the fourth operation OP4 for welding the first welded portions 41 to the fourth welded portions 44, respectively, as shown in FIG. 5, for example.

溶接装置１１０における第１動作ＯＰ１は、溶接装置１００における第１動作ＯＰ１と同じである。溶接装置１１０における第２動作ＯＰ２において、制御部は、ノズル７を、レーザ光Ｌが照射された部分の第１排気口１１側とは反対側に位置させる。換言すると、第２動作ＯＰ２において、レーザ光Ｌが照射された部分のＸ方向における位置は、ノズル７先端のＸ方向における位置と、第１排気口１１のＸ方向における位置と、の間にある。 The first operation OP1 in the welding device 110 is the same as the first operation OP1 in the welding device 100. In the second operation OP2 of the welding device 110, the control unit positions the nozzle 7 on the side opposite to the first exhaust port 11 side of the portion irradiated with the laser beam L. In other words, in the second operation OP2, the position of the portion irradiated with the laser beam L in the X direction is between the position of the tip of the nozzle 7 in the X direction and the position of the first exhaust port 11 in the X direction. ..

第３動作ＯＰ３において、制御部は、ノズル７を、レーザ光Ｌが照射された部分の第１排気口１１側とは反対側に位置させる。第４動作ＯＰ４において、制御部は、ノズル７を、レーザ光Ｌが照射された部分の第１排気口１１側とは反対側に位置させる。制御部は、第１動作ＯＰ１〜第４動作ＯＰ４において、照射部５及びノズル７を、それぞれ矢印Ａ１〜Ａ４の方向に沿って移動させる。これにより、第１溶接部分４１〜第４溶接部分４４の全体が溶接される。 In the third operation OP3, the control unit positions the nozzle 7 on the side opposite to the first exhaust port 11 side of the portion irradiated with the laser beam L. In the fourth operation OP4, the control unit positions the nozzle 7 on the side opposite to the first exhaust port 11 side of the portion irradiated with the laser beam L. In the first operation OP1 to the fourth operation OP4, the control unit moves the irradiation unit 5 and the nozzle 7 along the directions of arrows A1 to A4, respectively. As a result, the entire first welded portion 41 to the fourth welded portion 44 are welded.

この溶接装置１１０によれば、溶接装置１００と同様に、ヒュームが第１排気口１１に向けて流れ易くなり、ノズル７へのヒュームの付着を効果的に抑制できる。また、処理室１に第２排気口１２〜第４排気口１４を設ける必要が無いため、装置を小型化できる。 According to the welding device 110, similarly to the welding device 100, the fume can easily flow toward the first exhaust port 11, and the adhesion of the fume to the nozzle 7 can be effectively suppressed. Further, since it is not necessary to provide the second exhaust port 12 to the fourth exhaust port 14 in the processing chamber 1, the device can be miniaturized.

一方で、サイズが大きい部材４０に対しては、図１〜図３に表した溶接装置１００を用いることが望ましい。これは、以下の理由による。
部材４０のサイズが大きい場合、第２溶接部分４２の一部、第３溶接部分、及び第４溶接部分４４の一部を溶接する際に、これらの部分と第１排気口１１との距離が長くなり過ぎる。これにより、ノズル７から第１排気口１１に向かう不活性ガスの流量及び流速が低下し、ヒュームが十分に排出されない可能性がある。また、ヒュームが部材４０の別の場所に付着し、部材４０の品質が低下する可能性がある。 On the other hand, it is desirable to use the welding apparatus 100 shown in FIGS. 1 to 3 for the member 40 having a large size. This is due to the following reasons.
When the size of the member 40 is large, when a part of the second welded portion 42, the third welded portion, and a part of the fourth welded portion 44 are welded, the distance between these portions and the first exhaust port 11 is large. It gets too long. As a result, the flow rate and flow velocity of the inert gas from the nozzle 7 to the first exhaust port 11 may decrease, and the fumes may not be sufficiently discharged. In addition, the fume may adhere to another place on the member 40, and the quality of the member 40 may deteriorate.

（第２実施形態）
図６は、第２実施形態に係る溶接装置の動作を表す模式図である。
図６に表したように、第２実施形態に係る溶接装置２００では、ノズル７の先端と第１排気口１１が対向して設けられる。不図示の制御部は、ホルダ３を制御する。制御部は、ホルダのＸ方向における位置、Ｙ方向における位置、及び回転角度θを制御することで、部材４０のレーザ光Ｌが照射される場所を調整する。 (Second Embodiment)
FIG. 6 is a schematic view showing the operation of the welding apparatus according to the second embodiment.
As shown in FIG. 6, in the welding apparatus 200 according to the second embodiment, the tip of the nozzle 7 and the first exhaust port 11 are provided so as to face each other. A control unit (not shown) controls the holder 3. The control unit adjusts the position where the laser beam L of the member 40 is irradiated by controlling the position of the holder in the X direction, the position in the Y direction, and the rotation angle θ.

制御部は、例えば図６（ａ）〜図６（ｄ）に表した第１動作ＯＰ１〜第４動作ＯＰ４を行う。第１動作ＯＰ１〜第４動作ＯＰ４では、それぞれ、第１溶接部分４１〜第４溶接部分４４が溶接される。 The control unit performs the first operation OP1 to the fourth operation OP4 shown in FIGS. 6 (a) to 6 (d), for example. In the first operation OP1 to the fourth operation OP4, the first welded portion 41 to the fourth welded portion 44 are welded, respectively.

第１動作ＯＰ１において、制御部は、ホルダ３を制御し、図６（ａ）に表したように、第１溶接部分４１の一部にレーザ光Ｌを照射させる。この状態から、矢印Ａ１の方向に沿ってホルダ３を移動させることで、第１溶接部分４１の全体を溶接する。 In the first operation OP1, the control unit controls the holder 3 and irradiates a part of the first welded portion 41 with the laser beam L as shown in FIG. 6A. From this state, the entire first welded portion 41 is welded by moving the holder 3 along the direction of the arrow A1.

第２動作ＯＰ２において、制御部は、ホルダ３を回転させ、図６（ｂ）に表したように、第２溶接部分４２の一部にレーザ光Ｌを照射させる。この状態から、矢印Ａ２の方向に沿ってホルダ３を移動させることで、第２溶接部分４２の全体を溶接する。 In the second operation OP2, the control unit rotates the holder 3 and irradiates a part of the second welded portion 42 with the laser beam L as shown in FIG. 6B. From this state, the entire second welded portion 42 is welded by moving the holder 3 along the direction of the arrow A2.

第３動作ＯＰ３及び第４動作ＯＰ４も、それぞれ、図６（ｃ）及び図６（ｄ）に表したように行われる。すなわち、制御部がホルダ３を制御することで、第３溶接部分４３の一部又は第４溶接部分４４の一部にレーザ光Ｌを照射させ、矢印Ａ３又は矢印Ａ４の方向に沿ってホルダ３を移動させる。 The third operation OP3 and the fourth operation OP4 are also performed as shown in FIGS. 6 (c) and 6 (d), respectively. That is, by controlling the holder 3, the control unit irradiates a part of the third welded portion 43 or a part of the fourth welded portion 44 with the laser beam L, and the holder 3 is along the direction of the arrow A3 or the arrow A4. To move.

ノズル７と第１排気口１１が対向して設けられることで、ノズル７から噴射された不活性ガス７ａが第１排気口１１に向けて流れ易くなる。このため、第２実施形態に係る溶接装置２００によれば、第１実施形態と同様、ノズル７へのヒュームの付着を抑制できる。 By providing the nozzle 7 and the first exhaust port 11 so as to face each other, the inert gas 7a injected from the nozzle 7 can easily flow toward the first exhaust port 11. Therefore, according to the welding apparatus 200 according to the second embodiment, adhesion of the fume to the nozzle 7 can be suppressed as in the first embodiment.

なお、第２実施形態に係る溶接装置２００では、ホルダ３を移動させる必要がある。ホルダ３を移動させる場合、処理室１を大型化する必要がある。このため、第２実施形態によれば、第１実施形態に比べて、溶接装置が大型化する可能性がある。溶接装置の小型化の観点からは、第２実施形態よりも第１実施形態の方が好ましい。 In the welding apparatus 200 according to the second embodiment, it is necessary to move the holder 3. When moving the holder 3, it is necessary to increase the size of the processing chamber 1. Therefore, according to the second embodiment, the welding apparatus may be larger than that of the first embodiment. From the viewpoint of miniaturization of the welding apparatus, the first embodiment is preferable to the second embodiment.

以上、本発明のいくつかの実施形態を例示したが、これらの実施形態は、例として提示したものであり、発明の範囲を限定することは意図していない。これら新規な実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更などを行うことができる。これら実施形態やその変形例は、発明の範囲や要旨に含まれるとともに、特許請求の範囲に記載された発明とその均等の範囲に含まれる。また、前述の各実施形態は、相互に組み合わせて実施することができる。 Although some embodiments of the present invention have been illustrated above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, changes, etc. can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof. In addition, the above-described embodiments can be implemented in combination with each other.

１処理室、３ホルダ、５照射部、７ノズル、７ａ不活性ガス、１１第１排気口、１１ｖ〜１４ｖバルブ、１２第２排気口、１５排気部、２０ヘッド、２０ａ領域、２１流路、２２穴、２５部材、２６部材、２７Ｏリング、３０制御部、４０部材、４０ａ、４０ｂ部品、４１第１溶接部分、４２第２溶接部分、１００、１１０、２００溶接装置、Ｌレーザ光、ＯＰ１第１動作、ＯＰ２第２動作、Ｓ１第１側面、Ｓ２第２側面 1 processing chamber, 3 holder, 5 irradiation part, 7 nozzle, 7a inert gas, 11 1st exhaust port, 11v-14v valve, 12 2nd exhaust port, 15 exhaust part, 20 head, 20a area, 21 flow path, 22 holes, 25 members, 26 members, 27 O-rings, 30 control units, 40 members, 40a, 40b parts, 41 1st welding part, 42 2nd welding part, 100, 110, 200 welding equipment, L laser beam, OP1 1st operation, OP2 2nd operation, S1 1st side surface, S2 2nd side surface

Claims

With the processing room
A holder provided in the processing chamber and holding a welding target,
An irradiation unit that irradiates a laser beam toward the welding target,
A nozzle that injects an inert gas toward the welding target from an angle inclined with respect to the laser beam.
A first exhaust port provided on the first side surface of the processing chamber and discharging gas in the processing chamber,
Between the first welding portion which is the welded, the nozzle is positioned so as to face the first exhaust port side,
While injecting the inert gas from the nozzle to the first welded portion, the first welded portion is irradiated with the laser beam from the irradiation portion and the gas is discharged from the first exhaust port .
The control unit that performs the first operation and
Welding apparatus example Bei the.

A second exhaust port provided on the second side surface of the processing chamber and discharging the gas in the processing chamber is further provided.
After the first operation, the control unit
Between the second weld portion is the welded, the nozzle is positioned to face the second exhaust port side,
While injecting the inert gas from the nozzle, the second welded portion is irradiated with the laser beam from the irradiation portion and the gas is discharged from the second exhaust port .
It intends rows second operation claim 1 Welding device according.

In at least a part of the first operation, the distance between the nozzle and the first side surface is shorter than the distance between the nozzle and the second side surface.
The welding apparatus according to claim 2, wherein in at least a part of the second operation, the distance between the nozzle and the second side surface is shorter than the distance between the nozzle and the first side surface.

During the first operation, the control unit lowers the pressure in the first exhaust port to be lower than the pressure in the second exhaust port, and during the second operation, the pressure in the second exhaust port is reduced. The welding apparatus according to claim 2 or 3, wherein the pressure is lowered below the pressure in the first exhaust port.

Further provided with a head for holding the irradiation unit and the nozzle,
The head has an annular flow path provided around a region through which the laser beam is transmitted.
The inert gas is supplied to the flow path, and the inert gas is supplied.
The welding apparatus according to any one of claims 1 to 4, wherein the nozzle communicates with the flow path through a first hole provided in a part of the flow path.

Further provided with a pipe connected to the head and through which the inert gas flows.
The head
A first member to which the nozzle is fixed and the first hole is provided,
The second member, which is superposed on the first member and to which the pipe is connected,
Have,
The flow path is composed of a gap between the first member and the second member.
The inert gas is supplied from the pipe to the flow path through the second hole provided in the second member.
The welding apparatus according to claim 5, wherein the first member is rotatable with respect to the second member.

The welding apparatus according to any one of claims 1 to 6, wherein in the first operation, the tip of the nozzle is located at the same height as a part of the first exhaust port.

The welding apparatus according to any one of claims 1 to 7, wherein the upper surface of the holder is located at the same height as a part of the first exhaust port.

With the processing room
A holder provided in the processing chamber and holding a welding target,
An irradiation unit that irradiates a laser beam toward the welding target,
A nozzle that injects an inert gas toward the welding target from an angle inclined with respect to the laser beam.
A first exhaust port provided on the first side surface of the processing chamber and discharging gas in the processing chamber,
A second exhaust port provided on the second side surface of the processing chamber and discharging the gas in the processing chamber,
The first operation of irradiating the first welded portion with the laser beam from the irradiated portion while injecting the inert gas from the nozzle to the first welded portion to be welded.
After the first operation, the second operation of irradiating the second welded portion with the laser beam from the irradiation portion while injecting the inert gas from the nozzle to the second welded portion to be welded
And the control unit that performs
With
In the first operation, the control unit positions the nozzle so as to face the first exhaust port side with the first welded portion in between, and applies the pressure in the first exhaust port to the second exhaust. Lower than the pressure in the mouth,
In the second operation, the control unit positions the nozzle so as to face the second exhaust port side with the second welded portion in between, and applies the pressure in the second exhaust port to the first exhaust. A welding device that lowers the pressure in the mouth.

With the processing room
A holder provided in the processing chamber and holding a welding target,
An irradiation unit that irradiates a laser beam toward the welding target,
A nozzle that injects an inert gas toward the welding target from an angle inclined with respect to the laser beam.
A first exhaust port provided on the first side surface of the processing chamber and discharging gas in the processing chamber,
A control unit that performs the first operation of irradiating the first welded portion with the laser beam while injecting the inert gas from the nozzle into the first welded portion to be welded.
A head that holds the irradiation unit and the nozzle,
With
In the first operation, the control unit positions the nozzle at a position facing the first exhaust port side with the first welded portion in between.
The head has an annular flow path provided around a region through which the laser beam is transmitted.
The inert gas is supplied to the flow path, and the inert gas is supplied.
The nozzle is a welding device that communicates with the flow path through a first hole provided in a part of the flow path.

A holder provided in the processing chamber holds the object to be welded,
A laser beam is irradiated toward the welding target,
The inert gas is injected from the nozzle toward the welding target from an angle inclined with respect to the laser beam.
A method for manufacturing a joining member, which discharges a gas in the processing chamber from a first exhaust port provided on the first side surface of the processing chamber.
The nozzle is positioned so as to face the first exhaust port side between the first welded portions to be welded.
While injecting the inert gas from the nozzle to the first welded portion, the laser beam is irradiated to the first welded portion and the gas is discharged from the first exhaust port.
A method for manufacturing a joint member including the first operation.

Including a second operation performed after the first operation
In the second operation,
The nozzle is positioned so as to face the second exhaust port provided on the second side surface of the processing chamber between the second welded portions to be welded.
While injecting the inert gas from the nozzle, the laser beam is irradiated to the second welded portion and the gas is discharged from the second exhaust port.
The method for manufacturing a joining member according to claim 11.

In at least a part of the first operation, the distance between the nozzle and the first side surface is set shorter than the distance between the nozzle and the second side surface.
12. Manufacture of the joining member according to claim 12, wherein the distance between the nozzle and the second side surface is set shorter than the distance between the nozzle and the first side surface in at least a part of the second operation. Method.

During the first operation, the pressure in the first exhaust port is lowered to be lower than the pressure in the second exhaust port, and during the second operation, the pressure in the second exhaust port is reduced to the pressure in the first exhaust port. The method for manufacturing a joining member according to claim 12 or 13, wherein the pressure is lowered below the pressure.