JP6815440B2 - Measurement probe - Google Patents

Description

The present invention relates to a measurement probe, and more particularly to a measurement probe that can be miniaturized and can detect the displacement amount of a moving member that makes the contact portion of the stylus movable in the axial direction with high resolution regardless of the stylus difference. ..

As a measuring device that comes into contact with the surface of the object to be measured and measures the shape of the surface of the object to be measured, for example, a three-dimensional measuring machine is known. In a three-dimensional measuring machine, a measuring probe for contacting an object to be measured and detecting its surface shape is used (Patent Document 1). The measurement probe shown in Patent Document 1 has a stylus having a contact portion in contact with (the surface of) the object to be measured, and the contact portion can be moved in the direction of the central axis of the measurement probe (also referred to as Z direction and axial direction O). It is provided with an axial motion mechanism including a moving member, and a swivel motion mechanism including a swivel member capable of moving the contact portion along a surface formed at right angles to the Z direction by swivel motion. In Patent Document 1, the axial motion mechanism and the swing motion mechanism are connected in series so that the movable directions of the contact portions of the stylus are different from each other.

Japanese Patent No. 4417114

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The present invention has been made to solve the above-mentioned problems , and it is possible to reduce the size and to move the contact portion of the stylus in the axial direction with high resolution regardless of the stylus difference. An object of the present invention is to provide a detectable measurement probe.

The invention according to claim 1 of the present application comprises a removable stylus having a contact portion in contact with an object to be measured, an axial movement mechanism including a moving member that makes the contact portion movable in the axial direction, and a swivel motion. A measuring probe comprising a swivel mechanism comprising a swivel member that allows the contact portion to move along a surface perpendicular to the axial direction, the shaft housing member supporting the axial motion mechanism, and the stylus. A balance weight according to the mass and a counter balance mechanism that is supported by the shaft housing member and balances between the stylus and the balance weight are provided, and the shaft movement mechanism makes the moving member displaceable. A plurality of first diaphragm structures are provided, and in the axial direction, the counterbalance mechanism is one of the plurality of first diaphragm structures closest to the contact portion, and the first diaphragm structure and the contact portion. The second diaphragm structure is provided between the first diaphragm structures, and the second diaphragm structure is provided between the first diaphragm structures in the axial direction and the swivel motion mechanism is provided so as to displace the swivel member. The problem was solved because the body was arranged .

In the invention according to claim 2 of the present application, the swivel motion mechanism supports the shaft housing member, the counter balance mechanism is connected to the stylus, and the stylus is detachable together with the stylus .

The invention according to claim 3 of the present application includes a swivel housing member that supports the swivel motion mechanism and is supported by the axial motion mechanism, and the counter balance mechanism is connected to the swivel housing member .

The invention according to claim 4 of the present application makes the swivel housing member detachable together with the counter balance mechanism.

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According to the present invention, it is possible to reduce the size and detect the displacement amount of the moving member that makes the contact portion of the stylus movable in the axial direction with high resolution regardless of the difference in the stylus .

Schematic diagram showing an example of a measurement system using the measurement probe according to the present invention. Schematic diagram showing a cross section of the measurement probe according to the first embodiment of the present invention. Block diagram showing the configuration of the measurement probe and its peripheral parts Schematic diagram showing an example of the diaphragm structure used in the measurement probe (the first diaphragm structure used in the axial motion mechanism (A), the second diaphragm structure used in the swivel motion mechanism (B), swivel). Functional diagram of the second diaphragm structure used in the motion mechanism (C)) Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the second embodiment, diagram (B) of the third embodiment). Schematic diagram showing a cross section of a measurement probe according to a fourth embodiment of the present invention. Schematic diagram showing the interference optical system according to the fourth embodiment of the present invention (arrangement diagram (A) of components, diagram (B) showing how interference light is projected onto the displacement detector, detected by the displacement detector. Figure (C) showing the phase and frequency of the interfering light Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the fifth embodiment, diagram (B) of the sixth embodiment). A perspective view showing a part of the measurement probe of FIG. 8 (B) (a diagram (A) in which a stylus is connected to a swivel module, a diagram (B) of a counter balance mechanism, and a diagram (C) of the stylus). Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 7th embodiment, FIG. (B) of the 8th embodiment). Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 9th embodiment, FIG. (B) of the 10th embodiment). Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 11th embodiment, FIG. (B) of the 12th embodiment). Schematic diagram showing a stylus and a counter balance mechanism according to a twelfth embodiment of the present invention (strabismus (A), top view (B), cross-sectional view (C)). Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 13th embodiment, FIG. (B) of the 14th embodiment). Schematic diagram showing a cross section of the measurement probe according to the fifteenth embodiment of the present invention. Schematic diagram showing a cross section of the measurement probe according to the 16th embodiment of the present invention (a diagram (A) deviated from the central axis O, a diagram (B) passing through the central axis O). Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 17th embodiment, FIG. (B) of the 18th embodiment). Schematic diagram showing a cross section of the measurement probe according to the 19th embodiment of the present invention. Schematic diagram showing a cross section of the measurement probe according to the present invention (FIG. (A) of the 20th embodiment, FIG. (B) of the 21st embodiment). Schematic diagram showing a cross section of the measurement probe according to the 22nd embodiment of the present invention.

Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings.

The first embodiment according to the present invention will be described with reference to FIGS. 1 to 4.

First, the overall configuration of the measurement system 100 will be described.

As shown in FIG. 1, the measurement system 100 includes a three-dimensional measuring machine 200 for moving the measuring probe 300, an operation unit 110 having a joystick 111 for manual operation, and a motion controller 500 for controlling the operation of the three-dimensional measuring machine 200. , Equipped with. Further, the measurement system 100 operates the coordinate measuring machine 200 via the motion controller 500 and processes the measurement data acquired by the coordinate measuring machine 200 to obtain the dimensions and shape of the object W to be measured. An input means 120 for inputting measurement conditions and the like, and an output means 130 for outputting a measurement result are provided.

Next, each component will be described.

As shown in FIG. 1, the coordinate measuring machine 200 includes a measuring probe 300, a surface plate 210, a drive mechanism 220 that is erected on the surface plate 210 and moves the measurement probe 300 three-dimensionally, and a drive mechanism 220. It is provided with a drive sensor 230 that detects the drive amount of the above.

As shown in FIG. 2, the measuring probe 300 includes a stylus 306, an axial motion mechanism 310, and a swivel motion mechanism 334. The contact portion 348 of the stylus 306 is configured to be freely displaced in three directions according to its shape when it comes into contact with the surface S of the object to be measured W by the axial motion mechanism 310 and the swivel motion mechanism 334.

Further, the outline of the configuration of the measurement probe 300 will be described with reference to FIG. For the following explanation, the Z direction is taken in the vertical direction of the paper surface, the X direction is taken in the horizontal direction of the paper surface, and the Y direction is taken in the vertical direction of the paper surface. Therefore, the direction of the central axis O (axial direction O) of the measurement probe 300 is the same as the Z direction.

As shown in FIG. 2, the measurement probe 300 includes a stylus 306 having a contact portion 348 in contact with the object W to be measured, an axial movement mechanism 310 including a moving member 312 that makes the contact portion 348 movable in the axial direction O, and the like. A swivel motion mechanism 334 including a swivel member RP that enables the contact portion 348 to move along a surface perpendicular to the axial direction O by the swivel motion. Here, the shaft motion mechanism 310 is supported by the main body housing (shaft housing member) 308, and the swivel motion mechanism 334 is supported by the module housing (swivel housing member) 330. The axial movement mechanism 310 supports the module housing 330, and the swivel member RP directly supports the stylus 306. The measurement probe 300 is supported by the main body housing 308 and includes a displacement detector 328 that detects the displacement of the moving member 312.

Further, as shown in FIG. 2, the measurement probe 300 supports the stylus 306 with the probe main body 302. That is, the measurement probe 300 includes two modules, a probe main body 302 and a swivel module 304, and the probe main body 302 has a swivel module 304 built-in. The attitude detector 322 (described later) is built in the probe main body 302 including the main body housing (housing member) 308 that supports both the moving member 312 and the swivel member RP (in other words, the attitude detector 322 is It is housed in the main body housing 308). The "built-in" means that each housing member (if the "built-in" target member is "built-in" in the probe main body 302, the main body housing 308 and the "built-in" target member are "built-in" in the swivel module 304. If so, a portion that is supported radially inside the module housing 330) and whose "built-in" target member enters only the inside of another module or other housing member that is located outside each housing member. It shall mean that it does not have it.

Hereinafter, the measurement probe 300 will be described in detail.

As shown in FIG. 2, the probe main body 302 includes a main body housing 308, an axial motion mechanism 310, a swivel module 304, an attitude detector 322, a displacement detector 328, a signal processing circuit 329 (FIG. 3), and the like. To be equipped.

As shown in FIG. 2, the main body housing 308 has a cylindrical shape with a lid having a stepped portion 308A on the inner side surface. The main body housing 308 supports the axial movement mechanism 310 on the inner side in the radial direction on the upper side of the step portion 308A in the Z direction. Further, in the Z direction, the main body housing 308 houses the swivel module 304 inside in the radial direction of the thin-walled extending portion 308B provided below the step portion 308A.

As shown in FIG. 2, the axial movement mechanism 310 includes a moving member 312 and a pair of first diaphragm structures 314 and 315 that allow the moving member 312 to be displaced with respect to the main body housing 308.

As shown in FIG. 2, the moving member 312 has a substantially cylindrical shape with a hollow portion 312B as the axis. The moving member 312 is provided with a recess 312C below the position supported by the first diaphragm structure 314 in the Z direction. The support member 319 extends from the inner side surface of the main body housing 308 without contacting the recess 312C. The attitude detector 322 and the beam splitter 320 are supported by the support member 319. A swivel module 304 including a swivel motion mechanism 334 is supported at the lower end of the moving member 312. That is, the attitude detector 322 is arranged between the swivel motion mechanism 334 and the pair of first diaphragm structures 314 and 315.

As shown in FIG. 4A, the first diaphragm structure 314 and 315 are members having a substantially disk shape that can be elastically deformed. The material is phosphor bronze or the like (other materials may be used). The first diaphragm structure 315 is the same as the first diaphragm structure 314 (not limited to this, the shapes may be different from each other). Therefore, only the first diaphragm structure 314 will be described with reference to FIG. 4 (A).

As shown in FIG. 4A, the first diaphragm structure 314 is provided with three cutout portions 314D having a phase shift of 120 degrees in the circumferential direction. The cutout portion 314D provides an outer peripheral portion 314A, a rim portion 314B, and a central portion 314C from the radial outer side to the inner side of the first diaphragm structure 314. The outer peripheral portion 314A is located on the outermost circumference of the first diaphragm structure 314 and is a portion fixed to the main body housing 308. The rim portion 314B is formed into a band shape in the circumferential direction by two adjacent cutout portions 314D, and is arranged inside the outer peripheral portion 314A. Both ends of the rim portion 314B are connected to the outer peripheral portion 314A and the central portion 314C, respectively. The central portion 314C is a portion that supports the moving member 312, and is arranged further inside the rim portion 314B. The first diaphragm structure 314 has a structure in which the central portion 314C moves up and down and the rim portion 314B elastically deforms due to the displacement of the moving member 312 with respect to the main body housing 308. The structure of the first diaphragm structure is not limited to the shape shown in the present embodiment (the same applies to the second diaphragm structure).

As shown in FIG. 2, the swivel module 304 includes a flange portion 332, a module housing 330, and a swivel motion mechanism 334.

As shown in FIG. 2, the flange portion 332 is connected to the moving member 312 and has a flange shape having an opening 332A in the center.

As shown in FIG. 2, the module housing 330 is a substantially cylindrical member having an opening 330A at the lower end. Then, the module housing 330 supports the turning motion mechanism 334 in the radial direction.

As shown in FIG. 2, the swivel motion mechanism 334 is housed inside the module housing 330 except for the flange member 342. The flange member 342 is connected to the stylus 306 without getting inside the stylus 306. Then, as shown in FIG. 2, the swivel motion mechanism 334 includes a swivel member RP and a second diaphragm structure 340 that allows the swivel member RP to be displaced with respect to the module housing 330.

As shown in FIG. 2, the swivel member RP is a member supported by the second diaphragm structure 340, and includes a balance member 338, an upper member 336, and a flange member 342.

As shown in FIG. 2, the balance member 338 is arranged on the upper part of the second diaphragm structure 340 and has a weight corresponding to the stylus 306 (that is, the swivel member RP is located at the swivel center RC of the swivel motion mechanism 334. On the other hand, the balance member 338 is provided on the anti-stylus side). By appropriately setting the balance member 338 (or adjusting the distance between the turning center RC and the balance member 338 as described later), the position of the center of gravity of the member supported by the turning member RP including the stylus 306 Can be matched to the turning center RC. Therefore, for example, even if the measurement probe 300 is turned sideways, it is possible to prevent the central axis of the stylus 306 from being significantly tilted from the axial direction O. That is, even if the attitude of the measurement probe 300 is changed, the stylus 306 can stay in the center of the measurement range of the attitude detector 322 (described later), and the attitude detector 322 is simpler, smaller, and has higher resolution. It becomes possible to adopt things. A reference member 316 is provided at the upper end of the balance member 338 (the end on the anti-stylus side of the swivel member RP). The distance between the side surface 338B of the balance member 338 and the inner side surface 330B of the module housing 330 regulates the inclination (displacement) of the balance member 338 so that the second diaphragm structure 340 is within the range of elastic deformation. It has been decided. That is, it can be said that the swivel module 304 includes a module housing 330 and a balance member 338, which are second limiting members that limit the amount of deformation of the second diaphragm structure 340 within the range of elastic deformation.

As shown in FIG. 2, the upper member 336 is configured to engage with the second diaphragm structure 340 to support the balance member 338. A male screw is provided on the convex portion 336A of the upper member 336. A female screw is provided in the concave portion 338A of the balance member 338 corresponding to the convex portion 336A. Therefore, the distance between the turning center RC and the balance member 338 can be adjusted by changing the screwed state of the balance member 338 to the upper member 336. That is, by changing the distance of the balance member 338 from the turning center RC, the center of gravity of the turning member RP (member supported by the second diaphragm structure 340) is centered even if the stylus 306 has a different weight or length. It is possible to match the position with the turning center RC.

As shown in FIG. 4B, the second diaphragm structure 340 is also a substantially disk-shaped member that can be elastically deformed. The material is phosphor bronze or the like (other materials may be used). The second diaphragm structure 340 is provided with two arc-shaped cutout portions 340E having a phase difference of 180 degrees in the circumferential direction, and two hinge portions 340C are formed. Inside the cutout portion 340E in the radial direction, two arc-shaped cutout portions 340F having a phase difference of 180 degrees in the circumferential direction are further provided, and two hinge portions 340D are formed. The cutout portions 340E and 340F provide an outer peripheral portion 340A, a rim portion 340G, and a central portion 340B from the radial outer side to the inner side of the second diaphragm structure 340.

As shown in FIG. 4B, the outer peripheral portion 340A is located on the outermost circumference of the second diaphragm structure 340 and is a portion fixed to the module housing 330. The rim portion 340G is formed into a band shape in the circumferential direction by cutout portions 340E and 340F provided on both sides in the radial direction. The rim portion 340G is arranged inside the outer peripheral portion 340A, and is connected to the outer peripheral portion 340A by the hinge portion 340C and to the central portion 340B by the hinge portion 340D. The central portion 340B is a portion that supports the upper member 336, and is arranged further inside the rim portion 340G. The cutout portion 340E and the cutout portion 340F are 90 degrees out of phase. Therefore, the central portion 340B has a structure that can be tilted (swivelable) in two directions orthogonal to each other with the center (swivel center RC) of the second diaphragm structure 340 as an axis.

Note that FIG. 4C is a schematic view showing the function of the second diaphragm structure 340, and reference numeral k indicates a restoring force per unit displacement amount (angle) when the central portion 340B is displaced (turned). Shown.

As shown in FIG. 2, the flange member 342 is supported by the upper member 336 in a form of sandwiching the second diaphragm structure 340 with the upper member 336. Three pairs of rollers 342A are provided on the outer periphery of the lower end of the flange member 342 every 120 degrees in the circumferential direction. A permanent magnet 342B is provided on the central axis O. The axial direction of the pair of rollers 342A is the same as the substantially radial direction toward the center of the flange member 342.

The distance between the lower end portion 308AB of the step portion 308A and the upper end portion 332B of the flange portion 332 is set so as to be within the range of elastic deformation of the pair of first diaphragm structures 314 and 315. That is, the probe main body 302 is a main body housing 308, a moving member 312, a support member 319, and a module housing, which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 314 and 315 within the range of elastic deformation. It can be said that it has 330. The extending portion 308B can simultaneously prevent an external force directly from the XY direction on the swivel module 304. Of course, when an excessive load is applied to the stylus 306, the stylus 306 is configured to fall off before the first limiting member acts in order to protect the first diaphragm structures 314 and 315. ..

On the other hand, as shown in FIG. 2, a scale bracket 324 is arranged on the upper end portion 312A of the moving member 312. A reference member 326 is arranged on the scale bracket 324. A displacement detector 328 that detects the reflected light from the reference member 326 is arranged so as to face the reference member 326. The displacement detector 328 has a built-in light source that irradiates the reference member 326 with light. Incremental patterns having different reflectances of light from the light source are provided at regular intervals in the Z direction on the surface of the reference member 326 on the displacement detector 328 side. That is, the reference member 326 is a reflective scale. The reference member 326 and the displacement detector 328 constitute a photoelectric incremental linear encoder that outputs a two-phase sine wave signal. That is, the displacement detector 328 is supported by the main body housing 308 and detects the displacement of the moving member 312. Then, the displacement detector 328 outputs a periodic signal repeated at a predetermined cycle of the incremental pattern corresponding to the displacement of the moving member 312 (that is, the displacement detector 328 detects the relative position of the moving member 312. It is configured to output a relative position detection signal that enables This periodic signal is waveform-shaped by the signal processing circuit 329. Then, a Z2-phase sine wave for obtaining the displacement of the reference member 326 in the Z direction is output from the signal processing circuit 329.

Further, as shown in FIG. 2, another light source (light source unit) 318 is provided on the inner side surface of the main body housing 308 so as to face the beam splitter 320. The beam splitter 320 directs the light emitted from the light source 318 in the Z direction. The light directed in the Z direction (light passing through the optical axis OA) is reflected by the reference member 316 (which is a reflector that reflects light) provided at the anti-styrus side end of the swivel member RP (light). That is, the probe main body 302 is provided with a light source 318 that causes light to enter the reference member 316 along the optical axis OA). The reflected light passes through the beam splitter 320, and the attitude detector 322 detects the light reflected from the reference member 316. Therefore, since the position of the reflected light detected by the attitude detector 322 changes due to the displacement (tilt) of the reference member 316, the attitude detector 322 displaces the reflected light reflected from the reference member 316 from the optical axis OA. Can be detected. That is, the posture detector 322 can detect the displacement (tilt) of the reference member 316 corresponding to the turning motion of the stylus 306. The optical axis OA is provided so as to pass through the turning center RC of the swirling motion mechanism 334 (that is, the central axis O and the optical axis OA coincide with each other).

As shown in FIG. 2, the reference member 316 has a concave surface, and the size of the attitude detector 322 is reduced by reducing the amount of displacement of the reflected light detected by the attitude detector 322 from the optical axis OA. We are trying to reduce the size of the. The output of the attitude detector 322 is also input to the signal processing circuit 329. Then, the output of the attitude detector 322 is waveform-shaped by the signal processing circuit 329. Then, the signal processing circuit 329 outputs a displacement voltage (XY displacement voltage) based on the displacement of the reflected light from the optical axis OA caused by the posture change of the reference member 316 in the XY direction.

As shown in FIG. 2, the stylus 306 includes a flange portion 344, a rod portion 346, and a contact portion 348.

As shown in FIG. 2, the flange portion 344 is a member corresponding to the flange member 342. That is, three balls 344A are arranged every 120 degrees in the circumferential direction of the flange portion 344 so as to be in contact with both of the pair of rollers 342A. A magnetic member (permanent magnet may be used) 344B that faces the permanent magnet 342B and attracts the permanent magnet 342B is arranged on the flange portion 344.

Here, the three spheres 344A come into contact with each of the surfaces of the corresponding pair of rollers 342A, as shown in FIG. Therefore, when the permanent magnet 342B and the magnetic member 344B are attracted to each other by a predetermined force, the flange portion 344 is seated (contacted) at 6 points on the flange member 342. That is, the flange member 342 and the flange portion 344 can be connected while achieving high positioning accuracy. That is, the flange portion 344 and the flange member 342 are in a state of forming a kinematic joint (also referred to as a kinematic coupling; the same applies hereinafter) which is a detachable connecting mechanism. With this kinematic joint, it is possible to realize high positioning reproducibility even if the stylus 306 and the flange member 342 are repeatedly attached and detached. The kinematic joint may be a combination of a V-groove and a sphere as well as a combination of a roller and a sphere. Further, the order may be reversed depending on the combination of the roller and the sphere. That is, the structure is not limited to the combination of the roller and the ball as long as it can seat at 6 points. When a large force is applied to the stylus 306 from the lateral direction (direction orthogonal to the axial direction O), the stylus 306 falls off from the flange member 342 (only when the ball 344A does not contact all the rollers 342A). It is possible to prevent the probe main body 302 from being damaged by performing the ball 344A in a state where the ball 344A does not come into contact with the roller 342A only in a part thereof (the same applies hereinafter) (for this reason, with the permanent magnet 342B). The predetermined force attracted to the magnetic member 344B is a force corresponding to the large force described above. The same shall apply hereinafter).

As shown in FIG. 2, the base end of the rod portion 346 is attached to the flange portion 344. A spherical contact portion 348 is provided at the tip of the rod portion 346. The direction of the central axis of the stylus 306 is the Z direction (axial direction O) when the stylus 306 is not displaced in the XY direction.

Next, the probe signal processing unit 530 will be described with reference to FIG.

As shown in FIG. 3, the probe signal processing unit 530 includes an A / D circuit 532, an FPGA 534, and a counter circuit 536. The A / D circuit 532 AD-converts the Z2-phase sine wave and the XY displacement voltage, which are the input analog signals, and converts each into a digital signal. That is, the larger the number of AD conversion bits at this time, the higher the dynamic range and the higher sensitivity for the displacement of the stylus 306 can be realized. The FPGA 534 converts the XY displacement voltage of the digital signal into a displacement signal and outputs it to the position calculation unit 550, and converts the Z2-phase sine wave of the digital signal into a Z2-phase square wave and outputs it to the counter circuit 536. Then, the counter circuit 536 measures the Z2 phase square wave, obtains the displacement in the Z direction, and outputs the displacement to the position calculation unit 550.

In the present embodiment, in order to realize the displacement of the stylus 306 in the XYZ direction, the axial motion mechanism 310 basically moves in the Z direction, and the swivel motion mechanism 334 moves in the XY direction. There is. Therefore, since the displacement of the stylus 306 can be separated in each of the Z direction and the XY direction, it is easy to detect the displacement in the Z direction and the XY direction independently, and it is possible to realize the simplification of the position calculation. Is. At the same time, the detection sensitivities in each of the Z direction and the XY direction can be set independently. Moreover, the axial movement mechanism 310 supports the module housing 330, and the swivel member RP directly supports the stylus 306. Therefore, it is possible to improve the detection sensitivity by the turning motion mechanism 334, which is closer to the stylus 306.

Further, the present embodiment includes a displacement detector 328 that is supported by the main body housing 308 and detects the displacement of the moving member 312. That is, the displacement detector 328 supported by the main body housing 308 detects the displacement of the moving member 312, which is also supported by the main body housing 308 (moves in the Z direction without moving in the XY direction in principle). .. Therefore, the displacement detector 328 can purely detect the displacement of the moving member 312 with respect to the main body housing 308 in one direction without using an expensive detector. That is, the displacement detector 328 can detect the displacement of the moving member 312 with high resolution, and it is easy to correct the displacement of the moving member 312. At the same time, it is easy to use a linear encoder or the like, and the moving member 312 (that is, the stylus 306) can have a long stroke.

Further, in the present embodiment, the displacement detector 328 outputs a relative position detection signal (periodic signal repeated at a predetermined cycle) that enables detection of the relative position of the moving member 312. Therefore, by configuring the photoelectric incremental linear encoder with the displacement detector 328, it is possible to avoid the phenomenon that the detection sensitivity differs depending on the moving position of the moving member 312 while ensuring an extremely long detection range (dynamic range). Is possible. At the same time, by performing AD conversion of this relative position detection signal with a high number of bits, it is possible to detect the displacement in the Z direction with higher resolution. Not limited to this, the displacement detector may be configured to detect an absolute pattern instead of detecting an incremental pattern. That is, the displacement detector may be configured to output an absolute position detection signal that enables detection of the absolute position of the moving member.

Further, in the present embodiment, the axial movement mechanism 310 is supported by a pair of the same first diaphragm structures 314 and 315. Therefore, the displacement of the axial motion mechanism 310 in a direction other than the Z direction can be reduced, and high movement accuracy in the Z direction can be ensured. At the same time, faster responsiveness can be realized as compared with the case where an air bearing or the like is used together with the guide of the moving member. Not limited to this, a pair of the same first diaphragm structures may not be used, and one or three or more first diaphragm structures may be used. Alternatively, the first diaphragm structures may have different shapes from each other.

Further, in the present embodiment, the distance between the turning center RC and the balance member 338 is adjustable. Therefore, even if the same balance member 338 is adopted, the position of the center of gravity of the swivel member RP to which each stylus 306 is connected coincides with the swivel center RC for a plurality of styluses 306 by adjusting the position of the balance member 338. It is possible to make it. That is, since the types of the balance member 338 can be reduced, the cost related to the manufacture and management of the balance member 338 can be reduced. Not limited to this, the position of the balance member may not be adjustable.

Further, in the present embodiment, the reference member 316 is provided at the end of the swivel member RP on the anti-stylus side, and the posture detector 322 is housed in the main body housing 308. That is, since the posture detector 322 is not provided in the swivel module 304, the swivel module 304 itself can be miniaturized and the cost can be reduced. The reference member 316 is built in the swivel module 304. That is, the distance from the reference member 316 to the position of the contact portion 348 can be shortened as compared with the configuration in which the reference member protrudes from the swivel module and extends. That is, the calculation error of the displacement of the contact portion 348 calculated from the displacement of the reference member 316 can be reduced, and the position of the contact portion 348 can be obtained with high accuracy.

Further, in the present embodiment, the posture detector 322 is arranged between the swivel motion mechanism 334 and the pair of first diaphragm structures 314 and 315. Therefore, even if the displacement of the swivel member RP is large, the distance between the reference member 316 and the posture detector 322 can be shortened, so that the posture detector 322 can be made small. That is, the probe main body 302 can be made smaller. Further, in the present embodiment, a light source 318 for injecting light along the optical axis OA to the reflector which is the reference member 316 is provided, and the attitude detector 322 is provided from the optical axis OA of the reflected light reflected from the reflector. Detects the displacement of. That is, since the detection by the attitude detector 322 is a non-contact type, the displacement of the swivel member RP can be detected with high sensitivity without hindering the swivel motion of the swivel member RP provided with the reference member 316. At the same time, the cost of the measuring probe 300 can be reduced because the configuration for detecting the displacement of the swivel member RP is simple and optical. The posture detector is not limited to this, and the posture detector may be a contact type, a non-contact type, or a type using magnetism or the like.

Further, in the present embodiment, the optical axis OA is provided so as to pass through the turning center RC. Therefore, since the change in the reflected light caused by the swirling operation of the swirling member RP does not include the displacement component in the Z direction, it is possible to detect the displacement of the swirling member RP with higher sensitivity. Not limited to this, the optical axis OA may not pass through the turning center RC.

Further, in the present embodiment, the probe main body 302 comprises a main body housing 308, a moving member 312, a support member 319, and a module housing 330 that limit the amount of deformation of the pair of first diaphragm structures 314 and 315 within the range of elastic deformation. Be prepared. At the same time, the swivel module 304 includes a module housing 330, a balance member 338, and a flange member 342 that limit the amount of deformation of the second diaphragm structure 340 within the range of elastic deformation. Therefore, for example, even when an excessive impact is applied to the stylus 306 in a direction in which the kinematic joint does not function, the first diaphragm structure 314, 315 and the second diaphragm structure 340 are plastically deformed, damaged or broken. Can be prevented. Not limited to this, the measuring probe may not be provided with a member that limits the amount of deformation of the first and second diaphragm structures within the range of elastic deformation.

That is, in the present embodiment, high measurement accuracy can be ensured while maintaining low cost.

Although the present invention has been described with reference to the above embodiments, the present invention is not limited to the above embodiments. That is, it goes without saying that improvements and design changes can be made without departing from the gist of the present invention.

For example, in the above embodiment, the swivel module 304 is built in the probe main body 302, but the present invention is not limited to this. For example, it may be as in the second embodiment shown in FIG. 5 (A). In the second embodiment, since the connection state between the probe main body and the swivel module is mainly different from that in the first embodiment, the upper two digits of the code are basically used except for the configuration related to the connection between the probe main body and the swivel module. The description is omitted because it is only changed.

In the second embodiment, as shown in FIG. 5A, the swivel module 354 is not built in the probe main body 352. The swivel module 354 is detachably connected to the probe body 352 by a kinematic joint composed of a roller 362E and a ball 382B (engagement portion). Hereinafter, the swivel module 354 that can be separated from the probe main body 352 will also be referred to as a probe module.

A plurality of styluses 356 (the material, position, mass, etc. of the contact portion 398 are different) are prepared. Then, corresponding to the stylus 356, a plurality of swivel modules 354 (not necessarily the same as the number of stylus 356) can be prepared for one probe main body 352.

As shown in FIG. 5A, a flange portion 362D is provided at the lower end portion of the axial movement mechanism 360. The axial movement mechanism 360 is housed inside the main body housing 358 except for the flange portion 362D. The flange portion 362D is connected to the swivel module 354 without getting inside the swivel module 354.

As shown in FIG. 5A, three pairs of rollers 362E are provided on the outer periphery of the lower end of the flange portion 362D at every 120 degrees in the circumferential direction. Three permanent magnets 362F are provided in a state of being 60 degrees out of phase with the roller 362E in the circumferential direction. The axial direction of the pair of rollers 362E is the same as the substantially radial direction toward the center of the flange portion 362D.

As shown in FIG. 5A, the swivel module 354 includes a module cover 382, a module housing 380, and a swivel motion mechanism 384. In this embodiment, the swivel housing member is composed of the module cover 382 and the module housing 380.

As shown in FIG. 5A, the module cover 382 has a flange shape having an opening 382A in the center. The module cover 382 is a member corresponding to the flange portion 362D. The module cover 382 is connected to the flange portion 362D by a removable kinematic joint in a state where the permanent magnet 362F and the magnetic member 382C are attracted to each other by a predetermined force. With this kinematic joint, it is possible to realize high positioning reproducibility even if the swivel module 354 and the flange portion 362D are repeatedly attached and detached. When a large force is applied to the swivel module 354 from the lateral direction (direction orthogonal to the Z direction), the swivel module 354 falls off from the flange portion 362D, and it is possible to prevent the probe main body 352 from being damaged.

As described above, in the present embodiment, the axial motion mechanism 360 is built in the probe main body 352, and the swivel motion mechanism 384 is built only in the swivel module 354. Therefore, for example, when the stylus 356 is changed, it may be better to change only the turning motion mechanism 384 in terms of performance. At this time, by simply replacing the swivel module 354 without changing the probe body 352, for example, the force applied to the object W to be measured from the contact portion 398 can be set as a desired measuring force, and as a result, the measuring probe 350 It is possible to realize a corresponding detection sensitivity and restoring force (force to restore the displacement of the stylus 356). On the contrary, it is possible to easily replace the probe main body 352 with respect to the same swivel module 354. Further, when only the swivel motion mechanism 384 is damaged or the performance deteriorates, the function of the measurement probe 350 can be maintained only by replacing the swivel module 354.

Further, by making the positions of the spheres 382B of the plurality of swivel modules 354 common, the plurality of swivel modules 354 can be easily attached to and detached from the probe main body 352, and high position reproducibility can be realized.

Further, in the present embodiment, a plurality of swivel modules 354 are prepared for one of the probe main bodies 352, and the restoring force per unit displacement amount when the swivel member RP is displaced is different for each swivel module 354. Can be done. Therefore, it is possible to set the restoring force individually corresponding to the stylus 356 and the object W to be measured, and it is possible to detect the displacement in the XY direction with high sensitivity and easily expand the detection range. .. At the same time, it is possible to reduce damage caused by the contact portion 398 with the object to be measured W. Not limited to this, the restoring force per unit displacement amount when the swivel member RP is displaced does not have to be changed for each probe module.

Further, in the present embodiment, the distance between the turning center RC and the balance member 388 is adjustable. If a plurality of swivel modules 354 are prepared for one of the probe main bodies 352, a plurality of swivel modules 354 having different balances can be configured by the swivel member RP of the same member, so that the cost of the swivel module 354 can be reduced. .. Not limited to this, the position of the balance member may not be adjustable.

Further, in the present embodiment, a plurality of swivel modules 354 can be prepared for one of the probe main bodies 352 so that the mass of the balance member 388 is different for each swivel module 354. Therefore, by using the swivel module 354 provided with the corresponding balance member 388 for each stylus 356, it is possible to match the position of the center of gravity of the swivel member RP with each stylus 356 connected to the swivel center RC. Is. If the position of the balance member 388 can be further adjusted, it is possible to provide a swivel module 354 that can be accurately handled by a larger number of styluses 356 in one probe main body 352.

In the second embodiment, the posture detector 372 is arranged between the swivel motion mechanism 384 and the pair of first diaphragm structures 364 and 365, but the present invention is not limited to this. For example, it may be as in the third embodiment shown in FIG. 5 (B). In the third embodiment, since the position of the posture detector is mainly different from that of the second embodiment, the description is omitted because the upper two digits of the code are basically changed except for the configuration related to the position of the posture detector. To do.

In the third embodiment, as shown in FIG. 5B, the moving member 412 has a substantially cylindrical shape with a hollow portion 412B as the axis. More specifically, the moving member 412 is configured such that the thick portion 412C, the thin portion 412D, and the flange portion 412E are integrated from the upper side to the lower side in the Z direction. A pair of first diaphragm structures 414 and 415 are connected to the thick portion 412C. The thin portion 412D is formed below the thick portion 412C. The opening diameter of the opening 408A of the main body housing 408 is smaller than the outer diameter of the thick portion 412C. The outer diameter of the flange portion 412E is larger than the opening diameter of the opening portion 408A. Here, the distance between the lower end 412CA of the thick portion 412C and the upper end 408AA of the opening 408A and the distance between the upper end 412EA of the flange 412E and the lower end 408AB of the opening 408A are in the Z direction of the moving member 412. The displacement of is regulated so that the pair of first diaphragm structures 414 and 415 are within the range of elastic deformation. That is, it can be said that the probe main body 402 includes a main body housing 408 and a moving member 412, which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 414 and 415 within the range of elastic deformation.

As shown in FIG. 5B, the posture detector 422 is located above the moving member 412 and on the inner upper surface of the main body housing 408. A light source (light source unit) 418 is provided on the inner side surface of the main body housing 408. A beam splitter 420 that directs the light emitted from the light source 418 in the Z direction is supported by the support member 419 (note that the support member 419 is also fixed inside the main body housing 408). The light directed in the Z direction passes through the hollow portion 412B of the moving member 412 and is reflected by the reference member 416. The optical axis OA of the light directed in the Z direction is provided so as to pass through the turning center RC of the turning motion mechanism 434. Therefore, in the present embodiment, the posture detector 422 can be easily arranged, and the probe main body 402 can be easily manufactured.

In the above embodiment, the displacement detector is used to configure the photoelectric incremental linear encoder, but the present invention is not limited to this. For example, it may be as in the fourth embodiment shown in FIG. In the fourth embodiment, since the configuration around the displacement detector is mainly different from that in the second embodiment, the explanation is based on the assumption that the upper two digits of the code are basically changed except for the configuration around the displacement detector. Omit.

In the fourth embodiment, as shown in FIGS. 6 and 7 (A), the probe main body 452 includes a light source (interference light source unit) 478, a reference mirror 475 that reflects light from the light source 478, and a moving member 462. Interference that includes a reference member (target mirror) 474 that is arranged and reflects light from the light source 478, and can generate a plurality of interference fringes IL by interfering with the reference mirror 475 and the reflected light from the reference member 474. An optical system IF is provided. The light source 478 and the reference mirror 475 are fixed to the inside of the main body housing 458. The light source 478 and the reference member 474 arranged at the upper end portion 462A of the moving member 462 are arranged in the Z direction, and the beam splitter 477 is arranged between them. The beam splitter 477 is also fixed inside the main body housing 458, and a Michelson-type interference optical system IF is configured as a whole.

As shown in FIGS. 6 and 7A, the beam splitter 477 splits the light from the light source 478 in the direction of the reference mirror 475. Further, the beam splitter 477 guides the reflected light reflected by the reference member 474 to the displacement detector 476 facing the reference mirror 475 and facing the beam splitter 477. At the same time, the displacement detector 476 is configured to receive light reflected by the reference mirror 475 and passed through the beam splitter 477. Therefore, as shown in FIG. 7B, the displacement detector 476 can detect the phase change PS of the plurality of interference fringes IL generated by the interference optical system IF.

Note that FIG. 7C shows the light intensity I of the plurality of interference fringes IL detected by the displacement detector 476. Here, the phase change PS reflects the amount of movement of the reference member 474 in the Z direction. Therefore, by obtaining this phase change PS, the amount of displacement of the moving member 462 in the Z direction can be obtained. At this time, since the plurality of interference fringes IL are composed of interference light and are periodic, the phase change PS can be obtained with high accuracy (also in this embodiment, the displacement detector 476 is a relative of the moving member 462. It can be said that it is configured to output a relative position detection signal that enables position detection).

That is, in the present embodiment, it is possible to obtain the displacement of the moving member 462 in the Z direction more accurately than in the above embodiment. At the same time, the period 1 / F of the light intensity I of the plurality of interference fringes IL reflects the inclination of the reference member 474. Therefore, by obtaining the change in the period 1 / F, it is possible to obtain a slight inclination of the moving member 462 in the XY direction. That is, in the present embodiment, since it is possible to obtain a slight inclination of the moving member 462 in the XY direction due to the displacement of the moving member 462 in the Z direction from the output of the displacement detector 476, the inclination of the moving member 462 in the XY direction can be obtained. It is possible to obtain the displacement of with higher accuracy. It should be noted that not only the interference optical system IF of the present embodiment is required to incline the moving member 462 in the XY direction, and in principle, even the displacement detector shown in the other embodiment can be tilted in the XY direction. The inclination can be calculated. Further, in the present embodiment, it is assumed that only one wavelength is used, but when two or more wavelengths are used, the displacement detector enables the detection of the absolute position of the moving member. It is possible to output a detection signal.

In the above embodiment, when the stylus is changed, the moving member is allowed to be displaced in the axial direction O according to the mass of the stylus, but the present invention is not limited to this. For example, it may be as in the fifth embodiment shown in FIG. 8 (A). In the fifth embodiment, since the connection state between the probe main body and the swivel module is mainly different from that in the second embodiment, the upper two digits of the code are basically used except for the configuration around the probe main body and the swivel module. The description is omitted because it is only changed.

In the fifth embodiment, as shown in FIG. 8A, the swivel module 704 includes a balance weight 731C corresponding to the mass of the stylus 706 and a counter balance mechanism 731. The counter balance mechanism 731 is supported by the main body housing (shaft housing member) 708, and is configured to balance the stylus 706 and the balance weight 731C in the Z direction via the module housing (swing housing member) 730. .. The counter balance mechanism 731 is removable together with the module housing 730.

Specifically, as shown in FIG. 8A, the main body housing 708 includes a cylindrical extending portion 708A extending downward in the Z direction so as to cover up to the lower end of the outer circumference of the swivel module 704. .. Permanent magnets 708B are provided at three or more locations inside the extending portion 708A at equal intervals in the circumferential direction.

On the other hand, as shown in FIG. 8A, the counter balance mechanism 731 is provided at three or more locations in the module housing 730, corresponding to the position and number of the permanent magnets 708B. The counter balance mechanism 731 includes a support member 731A, a support shaft 731B, and a connecting shaft 731D. On the upper surface of the support member 731A, a magnetic member (which may be a magnet) 731AA that can be attracted to the permanent magnet 708B is provided. The support shaft 731B is fixed to the support member 731A, and the balance weight 731C is connected in a state where the center of gravity is displaced from the support shaft 731B. The balance weight 731C is provided with a connecting shaft 731D in a direction orthogonal to the Z direction, and the tip thereof is connected to the module housing 730.

Thereby, in the present embodiment, a plurality of swivel modules 704 can be prepared for one of the probe main bodies 702, and the mass of the balance weight 731C can be made different for each swivel module 704. That is, when the stylus 706 is replaced, the increase / decrease in the mass of the stylus 706 can be directly received by the main body housing 708 by using the swivel module 704 provided with the balance weight 731C corresponding to the mass of the stylus 706. .. That is, it is possible to prevent the initial position of the moving member 712 from fluctuating in the Z direction due to the difference in the stylus 706. That is, in the present embodiment, the movable range of the moving member 712 can be narrowed as compared with the above embodiment, and the probe main body 702 can be further miniaturized. At the same time, since the detection range (dynamic range) can be narrowed, it is possible to detect the displacement amount of the moving member 712 with higher resolution.

Note that FIG. 8B shows a sixth embodiment, which is a variation of the fifth embodiment. Here, the main body housing is not integrally provided with a cylindrical extending portion, but the support member 781A of the counter balance mechanism 781 is formed into an annular shape and can be separated from the probe main body 752 as a part of the swivel module 754. It has a good structure.

As shown in FIG. 8B, three pairs of rollers 758B (engagement portions) are provided on the outer periphery of the opening 758A of the main body housing 758 at every 120 degrees in the circumferential direction. An annular permanent magnet 762E is provided on the flange portion 762D of the moving member 762 located inside the roller 758B in the radial direction. Then, as shown in FIGS. 8 (B) and 9 (A), a sphere 781F corresponding to the roller 758B is provided on the flange portion 781E of the support member 781A (the flange portion 781E supports the support shaft 781B). doing). Further, as shown in FIGS. 8 (B), 9 (A), and (B), a magnetic member 780A corresponding to the permanent magnet 762E is provided in the module housing 780.

That is, in the present embodiment, unlike the fifth embodiment, the pair of rollers is removed from the flange portion 762D and the housing cover is eliminated, and the ball 781F corresponding to the roller 758B is attached to the support member 781A outside the module housing 780. It is provided. Therefore, in the present embodiment, it is possible to reduce the weight of the axial movement mechanism 760 and the turning movement mechanism 784. As shown in FIG. 9C, the magnetic member (which may be a permanent magnet) 794B corresponding to the permanent magnet 792B of the flange member 792 has a ring shape, and the ball 794A of the flange portion 794 is arranged from the radial position. It is located inside.

In the first embodiment, the axial movement mechanism 310 supports the module housing (swivel housing member) 330, and the swivel member RP directly supports the stylus 306. Not limited. For example, it may be as in the seventh embodiment shown in FIG. 10 (A). In the seventh embodiment, the arrangement of the axial movement mechanism and the turning movement mechanism is mainly reversed from that of the above embodiment, and only the types of displacement detectors are different. Therefore, the arrangement and displacement detection of the axial movement mechanism and the turning movement mechanism are mainly performed. Except for the configuration related to the device, the description is omitted because basically only the upper two digits of the code are changed.

In the seventh embodiment, as shown in FIG. 10A, the swivel motion mechanism 834 supports the module housing (shaft housing member) 830, and the moving member 812 directly supports the stylus 806. .. Here, the module provided with the axial movement mechanism 810 is referred to as a linear motion module 804. That is, the measurement probe 800 includes two modules, a probe main body 802 and a linear motion module 804, and the probe main body 802 includes the linear motion module 804.

As shown in FIG. 10A, the swivel motion mechanism 834 includes a swivel member 842 and a second diaphragm structure 840 that allows the swivel member 842 to be displaced with respect to the main body housing 808.

As shown in FIG. 10A, the swivel member 842 has a substantially annular shape with a hollow portion 842B as the axis. The flange portion 842E provided at the lower end of the swivel member 842 is connected to the cylindrical module housing 830 and constitutes the linear motion module 804.

As shown in FIG. 10 (A), the axial movement mechanism 810 is supported inside the module housing 830 in the radial direction, and is housed inside the module housing 830 except for the flange portion 812E of the moving member 812. The flange portion 812E is connected to the stylus 806 without getting inside the stylus 806. Then, as shown in FIG. 10A, the axial movement mechanism 810 includes a moving member 812 and a pair of first diaphragm structures 814 and 815 that allow the moving member 812 to be displaced with respect to the module housing 830. ..

As shown in FIG. 10A, a reference member 816 as a reflector is arranged at the upper end portion 812A of the moving member 812, and the light passing through the hollow portion 842B of the swivel member 842 is the reference member 816. It is configured to reflect with. Further, a displacement detector 826 for detecting the displacement of the moving member 812 facing the moving member 812 is arranged inside the module housing 830 (that is, the displacement detector 826 is built in the linear motion module 804). ). Here, the displacement detector 826 constitutes a differential transformer. Specifically, the reference member 824 provided on the outer circumference of the moving member 812 is a cylindrical metal member. The displacement detector 826 has a cylindrical shape and faces the outer circumference of the reference member 824 in close proximity to each other. The displacement detector 826 is composed of an exciting coil that oscillates at a high frequency (for example, a sinusoidal voltage of 1 kHz or more is used) and a set of differentially coupled receiving coils arranged so as to sandwich it from both sides. Will be done. In the receiving coil, the displacement (absolute position) of the reference member 824 with respect to the module housing 830 in one direction can be detected. That is, the displacement detector 826 is configured to output an absolute position detection signal that enables detection of the absolute position of the moving member 812.

As described above, in the present embodiment, the swivel motion mechanism 834 supports the module housing 830, and the moving member 812 directly supports the stylus 806. Therefore, it is possible to improve the detection sensitivity by the axial movement mechanism 810, which is closer to the stylus 806. At the same time, since the axial movement mechanism 810 can be made lighter, the responsiveness of the axial movement mechanism 810 can be increased. Further, since the differential transformer is used to detect the displacement (absolute position) in one direction with respect to the module housing 830, it is possible to easily calculate the absolute position of the contact portion 848 in the axial direction O.

Note that FIG. 10B shows an eighth embodiment which is a variation of the seventh embodiment. Here, the reference member 874 constituting the differential transformer is provided on the upper end portion 862A of the moving member 862, and the displacement detector 876 is provided on the inner side surface of the hollow portion 892B of the swivel member 892. The reference member 866 is arranged at the upper end portion 892A of the swivel member 892. Since the other elements are the same as those in the seventh embodiment, the description thereof will be omitted.

In the seventh and eighth embodiments, the linear motion module is built in the probe body, but the present invention is not limited to this. For example, it may be as in the ninth embodiment shown in FIG. 11 (A). In the ninth embodiment, the connection state between the probe main body and the linear motion module is mainly different from that in the seventh embodiment. Moreover, the connected state is substantially the same as that of the third embodiment. Therefore, except for the configuration different from the third and seventh embodiments, the description will be omitted assuming that the upper two digits of the code are basically changed.

In the ninth embodiment, as shown in FIG. 11A, the linear motion module 904 is not built in the probe main body 902. The linear motion module 904 is detachably connected to the probe main body 902 by a roller 942F that can be positioned with each other and a ball 932B (engagement portion). Hereinafter, the linear motion module 904 separable from the probe main body 902 will also be referred to as a probe module. The displacement detector 928 is supported by a module housing 930 that supports the moving member 912, and together with a reference member 926 provided on the side surface of the moving member 912, the photoelectric incremental linear encoder (photoelectric) shown in the second embodiment. An absolute linear encoder such as a type, a magnetic type, or an electromagnetic induction type may be used).

A plurality of styluses 906 (the material, position, mass, etc. of the contact portion 948 are different) are prepared. Then, corresponding to the stylus 906, a plurality of linear motion modules 904 (not necessarily the same as the number of the stylus 906) can be prepared for one probe main body 902.

As shown in FIG. 11A, the probe main body 902 includes a main body housing 908, a posture detector 922, and a swivel motion mechanism 934. The swivel motion mechanism 934 is supported radially inside the main body housing 908. The swivel motion mechanism 934 is housed inside the main body housing 908 except for the flange portion 942E of the swivel member 942. The swivel motion mechanism 934 includes a swivel member 942 and a second diaphragm structure 940 that allows the swivel member 942 to be displaced with respect to the main body housing 908.

As shown in FIG. 11A, the swivel member 942 has a substantially cylindrical shape with a hollow portion 942B as the axis. More specifically, the swivel member 942 is configured such that the thick portion 942C, the thin portion 942D, and the flange portion 942E are integrated from the upper side to the lower side in the Z direction. A second diaphragm structure 940 is connected to the thick portion 942C. The thin portion 942D is formed below the thick portion 942C. The opening diameter of the opening 908A of the main body housing 908 is smaller than the outer diameter of the thick portion 942C. The outer diameter of the flange portion 942E is larger than the opening diameter of the opening 908A. Here, the displacement of the swivel member 942 is regulated by the distance between the lower end 942CA of the thick portion 942C and the upper end 908AA of the opening 908A and the distance between the upper end 942EA of the flange 942E and the lower end 908AB of the opening 908A. Then, the second diaphragm structure 940 may be determined to be within the range of elastic deformation. Further, the displacement of the swivel member 942 may be regulated by the distance between the outer surface of the thin portion 942D and the inner end surface of the opening 908A so that the second diaphragm structure 940 is within the range of elastic deformation. (In this case, it can be said that the probe main body 902 includes a main body housing 908 and a swivel member 942 which are second limiting members that limit the amount of deformation of the second diaphragm structure 940 within the range of elastic deformation). The flange portion 942E is connected to the linear motion module 904 without entering the inside of the linear motion module 904.

As shown in FIG. 11A, three pairs of rollers 942F are provided on the outer periphery of the lower end of the flange portion 942E at every 120 degrees in the circumferential direction. Three permanent magnets 942G are provided in a state of being 60 degrees out of phase with the roller 942F in the circumferential direction. The axial direction of the pair of rollers 942F is the same as the substantially radial direction toward the center of the flange portion 942E.

As shown in FIG. 11A, the linear motion module 904 includes a module cover 932, a module housing 930, and an axial motion mechanism 910. In this embodiment, the shaft housing member is composed of the module cover 932 and the module housing 930.

As shown in FIG. 11A, the module cover 932 has a flange shape having an opening 932A in the center. The module cover 932 is a member corresponding to the flange portion 942E. That is, three balls 932B are arranged every 120 degrees in the circumferential direction of the module cover 932 so as to be in contact with both of the pair of rollers 942F. Then, corresponding to the permanent magnet 942G, a magnetic member (may be a permanent magnet) 932C that attracts the permanent magnet 942G is arranged in a state of being 60 degrees out of phase with the sphere 932B.

That is, the module cover 932 and the flange portion 942E are connected by a removable kinematic joint. As described above, in the present embodiment, the turning motion mechanism 934 is built in the probe main body 902, and the axial motion mechanism 910 is built only in the linear motion module 904. Therefore, for example, when the stylus 906 is changed, it may be better to change only the axial movement mechanism 910 in terms of performance. At this time, by simply replacing the linear motion module 904 without changing the probe body 902, for example, by further increasing the distance between the pair of first diaphragm structures 914 and 915, the moving member 912 of the axial motion mechanism 910 travels straight. It is possible to improve the property (that is, it is possible to reduce the occurrence of displacement of the moving member 912 with respect to the module housing 930 in one direction). On the contrary, it is possible to easily replace the probe main body 902 with respect to the same linear motion module 904. Further, when only the axial movement mechanism 910 is damaged or the performance deteriorates, the function of the measurement probe 900 can be maintained only by replacing the linear motion module 904.

Further, in the present embodiment, the probe main body 902 and the linear motion module 904 are detachably connected to each other by a roller 942F and a ball 932B that can be positioned with each other. Therefore, even if the linear motion module 904 is repeatedly attached and detached, the connection position can be reproduced with high accuracy. Further, by making the positions of the spheres 932B of the plurality of linear motion modules 904 common, the plurality of linear motion modules 904 can be easily attached to and detached from the probe main body 902, and high position reproducibility can be realized.

Further, in the present embodiment, a plurality of linear motion modules 904 are prepared for one of the probe main bodies 902, and the restoring force per unit displacement amount when the axial motion mechanism 910 is displaced is different for each linear motion module 904. Can be. Therefore, the restoring force corresponding to the stylus 906 and the object W to be measured can be set individually, and the displacement in one direction with respect to the module housing 930 can be detected with high sensitivity, and the detection range can be easily expanded. It is feasible. At the same time, it is possible to reduce damage to the object to be measured W.

In the ninth embodiment, the posture detector 922 is housed in the main body housing 908 that supports both the moving member 912 and the swivel member 942, but the present invention is not limited to this. For example, it may be as in the tenth embodiment shown in FIG. 11 (B). The tenth embodiment is such that the probe main body 902 of the ninth embodiment can be split between the beam splitter 920 and the swivel member 942 in the axial direction O. That is, since the position of the posture detector is mainly different from that of the ninth embodiment, the description will be omitted assuming that the upper two digits of the code are basically changed except for the configuration mainly related to the position of the posture detector.

In the tenth embodiment, as shown in FIG. 11B, the main body housing 958 that supports both the moving member 962 and the swivel member 992 is detachably connected by a positionable roller 951BB and a ball 957B (engaging portion). It is equipped with a front-stage module 951 that supports and supports it. The attitude detector 972 is built in the front-stage module 951.

Specifically, as shown in FIG. 11B, the front-stage module 951 includes a front-stage housing (front-stage housing member) 951A, a light source 968, a beam splitter 970, and an attitude detector 972. The front housing 951A supports the light source 968, the beam splitter 970, and the attitude detector 972 in the radial direction, and has a lower cover 951B at the lower end. The lower cover 951B has a flange shape having an opening 951BA in the center. As shown in FIG. 11B, three pairs of rollers 951BB are provided on the outer periphery of the lower end of the lower cover 951B at every 120 degrees in the circumferential direction. Three permanent magnets 951BC are provided in a state of being 60 degrees out of phase with the roller 951BB in the circumferential direction. That is, the front housing 951A detachably connects and supports the main body housing 958 with a positionable roller 951BB and a ball 957B. The front housing 951A has a configuration in which the posture detector 972 is housed.

As shown in FIG. 11B, the probe main body 952 includes an upper cover 957, a main body housing 958, and a swivel motion mechanism 984. As shown in FIG. 11B, the upper cover 957 has a flange shape having an opening 957A in the center. The upper cover 957 is a member corresponding to the lower cover 951B (for this reason, the opening 957A secures an optical path for the incident light to the reference member 966 and the reflected light from the reference member 966). Further, three balls 957B are arranged every 120 degrees in the circumferential direction of the upper cover 957 so as to be in contact with both of the pair of rollers 951BB. Then, a magnetic member (may be a permanent magnet) 957C is arranged corresponding to the permanent magnet 951BC. That is, the lower cover 951B and the upper cover 957 are connected by a removable kinematic joint.

As described above, in the present embodiment, only the swirling motion mechanism 984 is built in the probe main body 952, and the light source 968, the beam splitter 970, and the attitude detector 972 are built in the front-stage module 951. Therefore, it is easy to change only the turning motion mechanism 984, and it is also easy to change the front-stage module 951. That is, the performance of the turning motion mechanism 984 and the posture detector 972 can be changed or replaced separately, and the cost can be reduced. Further, for example, without mounting the probe main body 952, the linear motion module 954 is directly mounted on the front-stage module 951, and the straightness of the linear motion module 954 is inspected by using the output of the attitude detector 972. Etc. are also possible. In the present embodiment, the linear motion module 954 supports the stylus 956, but as in the third embodiment, the pre-stage module may be provided when the swivel module supports the stylus.

In the seventh embodiment, the distance between the inner side surface of the extending portion 808A and the outer side surface of the module housing 830 regulates the displacement of the swivel member 842, and the second diaphragm structure 840 is within the range of elastic deformation. It was set to be. That is, it can be said that the probe main body 802 includes a main body housing 808 and a module housing 830 which are second limiting members that limit the amount of deformation of the second diaphragm structure 840 within the range of elastic deformation. On the other hand, for example, it may be as in the eleventh embodiment shown in FIG. 12 (A). In the eleventh embodiment, since the shape of the main body housing and the shape of the module housing are mainly different from those of the seventh embodiment, other than the relationship between the main body housing and the swivel member and the relationship between the moving member and the module housing. Is basically changed only in the upper two digits of the code, and the description thereof will be omitted. In FIG. 12A, a displacement detector (not shown) is arranged (fixed) inside the module housing 1030 in the radial direction in the same manner as in the seventh embodiment in a state where the inner wall portion 1030A is avoided.

In the eleventh embodiment, as shown in FIG. 12A, a ring portion 1008B is provided in the main body housing 1008 so as to face the upper end portion of the flange portion 1042E of the swivel member 1042. That is, it can be said that the ring portion 1008B is a second wall member that is arranged integrally with the main body housing 1008. Then, at least a part of the gap between the ring portion 1008B (lower end portion) and the flange portion 1042E (upper end portion) is filled with a second viscous material SV such as grease oil. It is assumed that the "filling" here is satisfied by arranging the second viscous material SV between the ring portion 1008B and the swivel member 1042 without a gap at at least one place in the XY direction (not necessarily axially symmetric). Does not need to be filled). As a result, at least the second viscous material SV can dampen the displacement of the swivel member 1042 with respect to the ring portion 1008B, and the vibration in the XY direction caused by the movement of the measurement probe 1000 can be reduced, resulting in higher sensitivity of the measurement probe 1000. It is possible to prevent the accompanying increase in noise.

At the same time, as shown in FIG. 12A, the module housing 1030 is provided with an inner wall portion 1030A so as to face the outer side surface of the moving member 1012. That is, it can be said that the inner wall portion 1030A is a first wall member that is arranged integrally with the module housing 1030 and is arranged so as to face the moving member 1012. Then, at least a part of the gap between the inner wall portion 1030A (inner side surface) and the moving member 1012 (outer side surface) is filled with the first viscous material FV such as grease oil. It is assumed that the "filling" here is satisfied by arranging the first viscous material FV between the inner wall portion 1030A and the moving member 1012 without a gap at at least one place in the Z direction (not necessarily axially symmetric). Does not need to be filled). As a result, at least the first viscous material FV can dampen the displacement of the moving member 1012 with respect to the inner wall portion 1030A, and the vibration in the Z direction caused by the movement of the measuring probe 1000 can be reduced, resulting in higher sensitivity of the measuring probe 1000. It is possible to prevent the accompanying increase in noise. That is, the first viscous material FV and the second viscous material SV make it possible to suppress an increase in noise even when the measurement probe 1000 is moved at high speed.

In addition, in the present embodiment, since the damping structures in the Z direction and the damping structure in the XY directions are separately provided, the first viscous material FV and the second viscous material SV can be individually changed. Therefore, the damping characteristics can be individually optimized in the Z direction and the XY directions.

Note that, unlike the seventh embodiment, for example, the twelfth embodiment shown in FIG. 12B may be used. In the twelfth embodiment, since the balance member and the counter balance mechanism shown in the fifth and sixth embodiments are mainly added to the seventh embodiment, except for the configuration of the balance member and the counter balance mechanism. Basically, the description is omitted assuming that only the upper two digits of the code are changed.

In the twelfth embodiment, as shown in FIG. 12B, the swivel member 1092 is provided with a ring-shaped balance member 1088 on the anti-stylus side with respect to the swivel center RC of the swivel motion mechanism 1084. The balance member 1088 is supported by a support portion 1087 provided at the upper end portion of the swivel member 1092. The balance member 1088 can be moved in a state of being engaged with the support portion 1087, and the distance between the turning center RC and the balance member 1088 can be adjusted by the support portion 1087. Therefore, by changing the distance of the balance member 1088 from the turning center RC, the position of the center of gravity of the turning member 1092 (member supported by the second diaphragm structure 1090) in a state where different styluses 1056 are connected is set to the turning center RC. Can be matched to. Therefore, in the present embodiment, it is possible to further increase the sensitivity of the measurement probe 1050 as compared with the above embodiment. The position-adjustable balance member may be applied to a structure in which the axial movement mechanism shown in the eleventh embodiment or the like supports the turning movement mechanism.

Further, as shown in FIG. 12B, a support portion 1080C is provided below the first diaphragm structure 1064 supported by the module housing 1080 at every 120 degrees in the circumferential direction. A permanent magnet 1080CA is arranged at the tip of the support portion 1080C.

As shown in FIG. 12B, the stylus 1056 supported by the flange portion 1062E of the moving member 1062 includes a balance weight 1081C corresponding to the mass of the stylus 1056 and a counter balance mechanism 1081. The counter balance mechanism 1081 is supported by the module housing (shaft housing member) 1080 (via the support portion 1080C) and in the Z direction between the stylus 1056 and the balance weight 1081C, as in the fifth and sixth embodiments. It is designed to be balanced. The counter balance mechanism 1081 is removable together with the stylus 1056.

As shown in FIGS. 13 (A) to 13 (C), the counter balance mechanism 1081 is provided at three or more locations on the stylus 1056, corresponding to the position and number of the permanent magnets 1080CA. The counter balance mechanism 1081 includes a support member 1081A, a support shaft 1081B, and a connecting shaft 1081D. A magnetic member (which may be a magnet) 1081AA that can be attracted to the permanent magnet 1080CA is provided on the upper surface of the support member 1081A. The support shaft 1081B is fixed to the support member 1081A, and the balance weight 1081C is connected in a state where the center of gravity is displaced from the support shaft 1081B. The balance weight 1081C is provided with a connecting shaft 1081D in a direction orthogonal to the Z direction, and the tip thereof is connected to the flange portion 1094 of the stylus 1056.

As a result, when the stylus 1056 is replaced with one of the probe main bodies 1052, the balance weight 1081C corresponding to the mass of the stylus 1056 is inevitably used. Therefore, the increase / decrease in the mass of the stylus 1056 can be directly received by the module housing 1080. That is, it is possible to prevent the movement member 1062 from fluctuating in the initial position in the Z direction due to the difference in the stylus 1056. That is, in the present embodiment, the movable range of the moving member 1062 can be narrowed as compared with the seventh embodiment, and the linear motion module 1054 can be further miniaturized. At the same time, since the detection range can be narrowed, the displacement amount of the moving member 1062 can be detected with higher resolution.

Further, in the present embodiment, a convex portion 1080B is further provided on the outer side surface of the module housing 1080. That is, the distance between the inner side surface 1058AA of the extending portion 1058A and the convex portion 1080B of the module housing 1080 regulates the displacement of the swivel member 1092 so that the second diaphragm structure 1090 is within the range of elastic deformation. Has been done. That is, it can be said that the probe main body 1052 includes a main body housing 1058 and a module housing 1080 which are second limiting members that limit the amount of deformation of the second diaphragm structure 1090 within the range of elastic deformation.

At the same time, in the present embodiment, the recess 1080A is provided on the inner side surface of the module housing 1080. A rod-shaped restraining member 1063 is fixed to the moving member 1062, and the restraining member 1063 is arranged inside the recess 1080A in a non-contact manner. That is, the distance between the upper end 1080AA of the recess 1080A and the upper end 1063A of the restraining member 1063 and the distance between the lower end 1080AB of the recess 1080A and the lower end 1063B of the restraining member 1063 regulate the displacement of the moving member 1062. The pair of first diaphragm structures 1064 and 1065 are defined to be within the range of elastic deformation. That is, it can be said that the linear motion module 1054 includes a module housing 1080 and a restraining member 1063 which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 1064 and 1065 within the range of elastic deformation.

In the above embodiment, the pair of the first diaphragm structure and the second diaphragm structure are arranged in order in the axial direction O, but the present invention is not limited to this. For example, it may be as in the thirteenth embodiment shown in FIG. 14 (A). In the thirteenth embodiment, since the arrangement state of the pair of the first diaphragm structure and the second diaphragm structure is mainly different from that of the above embodiment, the pair of first diaphragm structure and the second diaphragm structure are mainly different. Except for the configuration of the arrangement with, the description is omitted because basically only the upper two digits of the code are changed.

In the thirteenth embodiment, as shown in FIG. 14A, the second diaphragm structure 1140 is arranged between the pair of first diaphragm structures 1114 and 1115 in the axial direction O. In the probe body 1102, the swivel movement mechanism 1134 supports the swivel member (shaft housing member) 1136, and the moving member 1112 directly supports the stylus 1106.

As shown in FIG. 14A, the swivel member 1136 of the swivel motion mechanism 1134 is a member supported by the second diaphragm structure 1140, and the second diaphragm structure 1140 is axially O except for the support portion 1136AA. The shape is symmetrical with respect to the drum. In the swivel member 1136, two ring portions 1136A, two connection portions 1136B, two cylindrical portions 1136C, and two joint portions 1136D are integrally formed. The ring portion 1136A has a ring shape, and the outer peripheral portions of the first diaphragm structures 1114 and 1115 are fixed to the ring portions 1136A, respectively. Each of the connecting portions 1136B extends radially inward of the ring portion 1136A and faces the first diaphragm structures 1114 and 1115. The cylindrical portion 1136C has a hollow axial center, and is integrally provided with the connecting portion 1136B. The two joints 1136D have a shape in which the second diaphragm structure 1140 is sandwiched and connected to each other. That is, in the axial direction O, the pair of first diaphragm structures 1114 and 1115 are arranged at a symmetrical distance with respect to the second diaphragm structure 1140 (those that require a completely symmetrical distance). However, design and manufacturing errors shall be tolerated). That is, the turning center of the moving member 1112 that can be generated by the pair of first diaphragm structures 1114 and 1115 can be aligned with the turning center RC of the turning motion mechanism 1134. The support portion 1136AA extends outward from a part of the ring portion 1136A in the axial direction O, and supports the displacement detector 1126.

As shown in FIG. 14A, the reference numeral Lh indicates the distance between the first diaphragm structures 1114 and 1115 by the swivel member 1136. Further, reference numeral Lw indicates the diameter of the inner peripheral surface of the ring portion 1136A for fixing the first diaphragm structure 1114 and 1115. In this embodiment, the distance Lh is made larger than the double diameter Lw (Lh> 2 * Lw). Therefore, in the displacement amount of the moving member 1112 by the first diaphragm structure 1114 and 1115, the ratio of the moving component on the central axis of the swivel member 1136 can be made larger than that of the swirling component with respect to the central axis of the swivel member 1136. It has become. That is, in the present embodiment, it is possible to increase the displacement accuracy of the moving member 1112 in one direction (ensure high straight-line accuracy) (not limited to this, even if the distance Lh is twice the diameter Lw or less. Good). It should be noted that such a relationship is applicable in all embodiments.

As shown in FIG. 14A, the distance between the outer side surface of the ring portion 1136A and the inner side surface of the main body housing (swivel housing member) 1108 regulates the inclination (displacement) of the swivel member 1136 and determines the second diaphragm. The structure 1140 is defined to be within the range of elastic deformation. That is, it can be said that the probe main body 1102 includes a main body housing 1108 and a swivel member 1136 which are second limiting members that limit the amount of deformation of the second diaphragm structure 1140 within the range of elastic deformation.

As shown in FIG. 14A, the axial movement mechanism 1110 is supported on the inside of the swivel member 1136 in the radial direction. That is, the linear motion module 1104 is composed of the swivel member 1136 and the axial motion mechanism 1110.

As shown in FIG. 14A, the moving member 1112 of the axial movement mechanism 1110 is integrated with the connecting portion 1112A, the rod portion 1112B, the member arranging portion 1112C, and the balance member 1138 from the lower side to the upper side in the Z direction. It is configured. The balance member 1138 has a mass corresponding to the mass of the specific stylus 1106. That is, when the specific stylus 1106 is supported by the swivel member 1136 via the moving member 1112 by the balance member 1138, the center of gravity of the member supported by the swivel center RC of the swivel motion mechanism 1134 by the second diaphragm structure 1140. Is configured to match. In the present embodiment, the specific stylus 1106 is a stylus that is assumed to be most mounted on the measurement probe 1100 of the present embodiment.

As shown in FIG. 14A, a reference member 1116 is provided at the upper end of the balance member 1138 (the combination of the reference member 1116 and the posture detector 1122 is the same as that of the seventh embodiment, and thus the description thereof will be omitted. ). The member arranging portion 1112C is formed below the balance member 1138, and the reference member 1124 is arranged on the side surface thereof. The rod portion 1112B is formed below the member arranging portion 1112C, and is configured to be between the pair of first diaphragm structures 1114 and 1115. The rod portion 1112B is housed in the swivel member 1136. The connecting portion 1112A is formed below the rod portion 1112B. A flange member 1142 is attached to the lower end of the connecting portion 1112A.

As shown in FIG. 14A, the opening diameter of the opening 1108A of the main body housing 1108 is smaller than the outer diameter of the flange member 1142. The distance between the upper end 1142C of the flange member 1142 and the lower end 1108AB of the opening 1108A regulates the upward displacement of the flange member 1142 in the Z direction, and the pair of first diaphragm structures 1114 and 1115 are elastic. It is designed to be within the range of deformation. That is, it can be said that the probe main body 1102 includes a main body housing 1108 and a flange member 1142 which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 1114 and 1115 within the range of elastic deformation.

As shown in FIG. 14A, the displacement detector 1126 arranged in the support portion 1136AA faces the reference member 1124 arranged in the member arrangement portion 1112C, and detects the reflected light from the reference member 1124. To do. Incremental patterns having different reflectances of light from a light source (not shown) are provided in the axial direction O at regular intervals on the surface of the reference member 1124 on the displacement detector 1126 side. The reference member 1124, the displacement detector 1126, and the light source constitute a photoelectric incremental linear encoder (a photoelectric absolute linear encoder may be used) that outputs a two-phase sine wave signal.

In the present embodiment, the second diaphragm structure 1140 is arranged between the pair of first diaphragm structures 1114 and 1115 in the axial direction O. Therefore, in the axial direction O, even though the axial motion mechanism 1110 and the swivel motion mechanism 1134 are connected in series, the axial motion O lengths of the axial motion mechanism 1110 and the swivel motion mechanism 1134 are simply added. Also, it is possible to shorten the axial O length of the suspension mechanism composed of the axial movement mechanism 1110 and the turning movement mechanism 1134. Not limited to this, the first diaphragm structure does not form a pair, but may simply be a plurality.

Then, in the present embodiment, when the specific stylus 1106 is supported by the swivel member 1136, the center of gravity of the member supported by the second diaphragm structure 1140 coincides with the swivel center RC of the swivel motion mechanism 1134. ing. Therefore, for example, even if the measurement probe 1100 is turned sideways, it is possible to prevent the central axis of the stylus 1106 from being tilted from the axial direction O. That is, even if a posture change such as an inclination of the measurement probe 1100 itself occurs, the straight-line accuracy of the stylus 1106 (moving member 1112) is not affected, so that it is possible to prevent the measurement accuracy from changing.

Further, in the present embodiment, the pair of first diaphragm structures 1114 and 1115 are arranged at a symmetrical distance with respect to the second diaphragm structure 1140 (that is, the pair of first diaphragm structures 1114 and 1115). The turning center RC coincides with the intermediate position between them). Therefore, the suspension mechanism can be configured in a well-balanced manner, unintended deformation of the suspension mechanism can be prevented, and the accuracy of the measurement probe 1100 can be improved. At the same time, for example, even if the central axis of the stylus 1106 is tilted with respect to the axial direction O, the straight-line accuracy of the stylus 1106 (moving member 1112) is not affected, so that the measurement accuracy is prevented from changing. can do. Not limited to this, the pair of first diaphragm structures may not be arranged at a symmetrical distance with respect to the second diaphragm structure. Further, the first diaphragm structure is not two but an even number such as 4, 6, ..., And each of the first diaphragm structures is arranged at a position symmetrical with respect to the second diaphragm structure. May be good.
Further, in the present embodiment, the swivel movement mechanism 1134 supports the swivel member 1136 (supporting the axial movement mechanism 1110), so that the moving member 1112 directly supports the stylus 1106. Therefore, the mass of the member supported by the moving member 1112 can be reduced as compared with the case where the axial movement mechanism supports the moving member (supporting the turning movement mechanism), and the pair of first diaphragm structures 1114 and 1115 can be restored. It becomes easy to optimize the force. As a result, the displacement of the stylus 1106 in the axial direction by the axial motion mechanism 1110 can be detected with high sensitivity. At the same time, the responsiveness of the axial movement mechanism 1110 can be improved. That is, in the present embodiment, it is possible to shorten the axial O length and reduce the weight, reduce the shape error, and improve the measurement accuracy.

Note that FIG. 14B shows a 14th embodiment which is a variation of the present embodiment. Here, the displacement of the moving member 1162 is detected using the differential transformer of the seventh embodiment. Specifically, the reference member 1174 provided in the moving member 1162 is a cylindrical metal member in which an eddy current is generated. The displacement detector 1176 has a cylindrical shape and faces the reference member 1174 in close proximity to the reference member 1174. The displacement detector 1176 is composed of an exciting coil that oscillates at a high frequency and a pair of differentially coupled receiving coils arranged so as to sandwich the exciting coil from both sides. The support portion 1186AA has a cylindrical shape and supports the displacement detector 1176 inside in the radial direction. Since the other elements are the same as those in the thirteenth embodiment, the description thereof will be omitted.

In the thirteenth and fourteenth embodiments, the swivel motion mechanism supports the swivel member (which supports the axial motion mechanism) so that the moving member directly supports the stylus. Is not limited to this. For example, it may be as in the fifteenth embodiment shown in FIG. In the fifteenth embodiment, the support relationship between the turning motion mechanism and the axial motion mechanism is mainly different from that of the thirteenth embodiment, and the configuration is the same as that of the third embodiment. Is basically changed only by changing the upper two digits of the code, and the description thereof will be omitted.

In the fifteenth embodiment, as shown in FIG. 15, the axial motion mechanism 1210 supports the moving member (swivel housing member) 1212 (which supports the swivel motion mechanism 1234), so that the swivel member RP directly supports the stylus 1206. It is said to be a supportive configuration. That is, the main body housing (shaft housing member) 1208 supports the shaft movement mechanism 1210. Therefore, the displacement detector 1228 is supported on the inner side surface of the main body housing 1208. The moving member 1212 has a cylindrical shape that is symmetrical with respect to the second diaphragm structure 1240 in the axial direction O.

Specifically, as shown in FIG. 15, in the moving member 1212, two cylindrical portions 1212C and two joint portions 1212D are integrally formed. The central portions of the first diaphragm structures 1214 and 1215 are fixed in the vicinity of the outer end portions of the two cylindrical portions 1212C, respectively. The inner diameters of the two joints 1212D are each larger than the inner diameter of the hollow portion 1212B of the cylindrical portion 1212C. The two joints 1212D are connected by sandwiching the second diaphragm structure 1240. That is, this embodiment also has a configuration in which the pair of first diaphragm structures 1214 and 1215 are arranged at a symmetrical distance with respect to the second diaphragm structure 1240 in the axial direction O. A reference member 1226 is provided on the upper end portion 1212A of the moving member 1212 so as to face the displacement detector 1228.

As shown in FIG. 15, the swivel motion mechanism 1234 is supported in the radial direction of the moving member 1212. That is, the swivel module 1204 is composed of the moving member 1212 and the swivel motion mechanism 1234. The swivel member RP is composed of an upper member 1236, a balance member 1238, and a flange member 1242. The upper end of the balance member 1238 protrudes from the upper end 1212A of the moving member 1212, and the reference member 1216 is provided there. That is, in the present embodiment, the reference member 1216 is provided at the anti-stylus side end portion of the swivel member RP.

In the present embodiment, the mass of the member supported by the swivel member RP can be reduced as compared with the case where the swivel motion mechanism supports the axial motion mechanism, and the displacement of the stylus 1206 by the swivel motion mechanism 1234 in the XY direction is made highly sensitive. Can be detected.

Further, in the present embodiment, as shown in FIG. 15, the opening diameter of the opening 1208A of the main body housing 1208 is made smaller than the outer diameter of the flange member 1242. The distance between the upper end portion 1242C of the flange member 1242 and the lower end portion 1208AB of the opening 1208A regulates the upward displacement of the flange member 1242 in the Z direction, and the pair of first diaphragm structures 1214 and 1215 are elastic. It is designed to be within the range of deformation. That is, it can be said that the probe main body 1202 includes a main body housing 1208 and a flange member 1242 which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 1214 and 1215 within the range of elastic deformation.

In the fifteenth embodiment, the displacement detector 1228 constitutes a photoelectric incremental linear encoder, but the present invention is not limited to this. For example, it may be as in the 16th embodiment shown in FIGS. 16A and 16B. In the 16th embodiment, unlike the configuration around the displacement detector in the 15th embodiment, the interference optical system IF shown in the 4th embodiment is used. Therefore, except for the configuration different from the fourth and fifteenth embodiments, the description will be omitted assuming that the upper two digits of the code are basically changed.

In the 16th embodiment, as shown in FIGS. 16A and 16B, the posture detector 1272 is arranged on the central axis O on the inner upper surface of the main body housing 1258. Therefore, the reference member 1274, the reference mirror 1275, the beam splitter 1277, the light source 1278, and the displacement detector 1276 constituting the interference optical system IF are located at positions deviated from the central axis O shown in FIG. 16 (B) in the X direction. The optical path of is provided. With this configuration, it is possible to improve the measurement accuracy in the XYZ directions as in the fourth embodiment. In this embodiment, the flange member 1292 is provided with a V-groove instead of a roller for positioning with the stylus 1256.

Note that, unlike the thirteenth embodiment, for example, the seventeenth embodiment shown in FIG. 17 (A) may be used. In the 17th embodiment, since the stylus to which the counter balance mechanism shown in the 12th embodiment is added is mainly used for the 13th embodiment, the explanation is basically based on the fact that only the upper two digits of the code are changed. Omit.

Also in the 17th embodiment, when the stylus 1306 is replaced with one of the probe main bodies 1302, the balance weight 1331C corresponding to the mass of the stylus 1306 is inevitably used. Therefore, the increase / decrease in the mass of the stylus 1306 can be directly received by the swivel member (shaft housing member) 1336. That is, it is possible to prevent the movement member 1312 from fluctuating in the initial position in the Z direction due to the difference in the stylus 1306. That is, in the present embodiment, the movable range of the moving member 1312 can be narrowed as compared with the thirteenth embodiment, and the linear motion module 1304 can be further miniaturized. At the same time, since the detection range can be narrowed, it is possible to detect the displacement amount of the moving member 1312 with higher resolution.

Note that FIG. 17B shows an 18th embodiment which is a variation of the present embodiment. Here, as in the twelfth embodiment, the balance member 1388 is supported by the support portion 1387 so that the position can be adjusted. In the 18th embodiment, since the balance member shown in the 12th embodiment is mainly added to the 17th embodiment, the description will be omitted assuming that the upper two digits of the code are basically changed. The displacement detector is supported as in the 13th and 14th embodiments.

The counter balance mechanism can also be applied to the measurement probe 1200 shown in the fifteenth embodiment. For example, it may be as in the 19th embodiment shown in FIG. In the 19th embodiment, since the counter balance mechanism different from that of the 17th embodiment is only added to the 15th embodiment, basically only the upper two digits of the code are changed except for the configuration different from the 15th embodiment. The description is omitted.

In the nineteenth embodiment, as shown in FIG. 18, the probe main body 1402 includes a balance weight 1431CD corresponding to the mass of the stylus 1406 and a counter balance mechanism 1431. Unlike the twelfth embodiment, the three counter balance mechanisms 1431 are separated from the stylus 1406, supported by the main body housing (shaft housing member) 1408, and in the Z direction between the stylus 1406 and the balance weight 1431CD. It is designed to be balanced. Specifically, the counter balance mechanism 1431 includes a support member 1431A, a support shaft 1431B, a connecting portion 1431CA, a permanent magnet 1431CB, and a connecting shaft 1431D. The support member 1431A is arranged every 120 degrees in the circumferential direction of the lower end portion of the main body housing 1408. The support shaft 1431B is fixed to the support member 1431A and supports the connecting portion 1431CA. A connecting shaft 1431D is provided at the O-side end of the central shaft O of the connecting portion 1431CA with respect to the support shaft 1431B in a direction orthogonal to the Z direction. On the other hand, a connecting portion 1412E is provided at the lower end of the moving member 1412, and the tip of the connecting shaft 1431D is connected to the connecting portion 1412E. A permanent magnet 1431CB is arranged at the end on the opposite side of the connecting portion 1431CA with respect to the supporting shaft 1431B.

As shown in FIG. 18, the balance weight 1431CD has a ring shape (may be divided according to the number of counter balance mechanisms 1431), and a magnetic member (magnet) capable of being attracted to the permanent magnet 1431CB is on the upper surface thereof. (May be) 1431CC is provided. The inner diameter of the balance weight 1431CD is larger than the outer diameter of the flange member 1442 and the flange portion 1444. Therefore, the balance weight 1431CD can be attached and detached even after the stylus 1406 is connected.

As a result, when the stylus 1406 is replaced with one of the probe main bodies 1402, the balance weight 1431CD corresponding to the mass of the stylus 1406 can be freely attached to the counter balance mechanism 1431 to increase or decrease the mass of the stylus 1406. Minutes can be received directly by the main body housing 1408. That is, it is possible to prevent fluctuations in the initial position of the moving member 1412 in the Z direction due to the difference in the stylus 1406. That is, in the present embodiment, the movable range of the moving member 1412 can be narrowed as compared with the fifteenth embodiment, and the probe main body 1402 can be further miniaturized. At the same time, since the detection range can be narrowed, it is possible to detect the displacement amount of the moving member 1412 with higher resolution.

In the fifteenth embodiment, the distance between the lower end portion 1208AB of the opening 1208A and the upper end portion 1242C of the flange member 1242 regulates the displacement of the moving member 1212, and the pair of first diaphragm structures 1214 and 1215 are elastic. It was set to be within the range of deformation. That is, it can be said that the probe main body 1202 includes a main body housing 1208 and a flange member 1242 which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 1214 and 1215 within the range of elastic deformation. On the other hand, for example, it may be as in the twentieth embodiment shown in FIG. 19 (A). In the twentieth embodiment, the relationship between the main body housing and the moving member and the relationship between the swivel member and the moving member are different from those of the fifteenth embodiment, so that the relationship between the main body housing and the moving member and the swivel are mainly different. Except for the relationship between the member and the moving member, the description is omitted because basically only the upper two digits of the code are changed.

In the twentieth embodiment, as shown in FIG. 19A, a ring portion 1462C is provided at the lower end portion of the moving member (swivel housing member) 1462 so as to face the upper end portion of the connecting portion 1486A of the swivel member RP. There is. That is, it can be said that the ring portion 1462C is a second wall member that is arranged integrally with the moving member 1462. Then, at least a part of the gap between the ring portion 1462C (lower end portion) and the connecting portion 1486A (upper end portion) is filled with a second viscous material SV such as grease oil. As a result, at least the second viscous material SV can dampen the displacement of the swivel member RP with respect to the ring portion 1462C, and the vibration in the XY direction caused by the movement of the measurement probe 1450 can be reduced, resulting in higher sensitivity of the measurement probe 1450. It is possible to prevent the accompanying increase in noise.

At the same time, as shown in FIG. 19A, an inner wall portion 1458B is provided on the main body housing (shaft housing member) 1458 so as to face the outer side surface of the moving member 1462. That is, it can be said that the inner wall portion 1458B is a first wall member that is arranged integrally with the main body housing 1458 and is arranged so as to face the moving member 1462. Then, at least a part of the gap between the inner wall portion 1458B (inner side surface) and the moving member 1462 (outer side surface) is filled with the first viscous material FV such as grease oil. As a result, at least the first viscous material FV can dampen the displacement of the moving member 1462 with respect to the inner wall portion 1458B, and the vibration in the Z direction caused by the movement of the measuring probe 1450 can be reduced, resulting in higher sensitivity of the measuring probe 1450. It is possible to prevent the accompanying increase in noise.

In addition, also in this embodiment, since the damping structures in the Z direction and the damping structure in the XY directions are separately provided, the first viscous material FV and the second viscous material SV can be individually changed. Therefore, since the damping characteristics can be individually optimized in the Z direction and the XY directions, the sensitivity of the measurement probe 1450 can be further increased.

As shown in FIG. 19A, the main body housing 1458 is provided with a recess 1458C for accommodating the flange member 1492 and restricting excessive displacement of the flange member 1492. Further, in the Z direction, an inner wall portion 1458B is provided in the vicinity of the joint portion 1462D of the moving member 1462. Therefore, the distance between the upper end 1458BA of the inner wall portion 1458B and the lower end 1462DA of the joint portion 1462D of the moving member 1462 and the distance between the upper end 1458CA of the recess 1458C and the upper end 1492B of the flange member 1492 is the distance of the moving member 1462. Displacement is regulated so that the pair of first diaphragm structures 1464, 1465 is within the range of elastic deformation. That is, the probe main body 1452 includes a main body housing 1458, a moving member 1462, and a flange member 1492, which are first limiting members that limit the amount of deformation of the pair of first diaphragm structures 1464 and 1465 within the range of elastic deformation. It can be said that there is.

Further, as shown in FIG. 19A, the distance between the side surface 1458CB of the recess 1458C and the side surface 1492A of the flange member 1492 regulates the displacement of the swivel member RP, and the second diaphragm structure 1490 is within the range of elastic deformation. It is stipulated to be. That is, it can be said that the probe main body 1452 includes a main body housing 1458 and a flange member 1492 which are second limiting members that limit the amount of deformation of the second diaphragm structure 1490 within the range of elastic deformation.

Note that FIG. 19B shows a 21st embodiment which is a variation of the first viscous material FV and the second viscous material SV of the present embodiment. Here, as in the thirteenth embodiment and the like, the swivel motion mechanism supports the swivel member serving as the shaft housing member, and the moving member directly supports the stylus. In the 21st embodiment, since the configuration for retaining the first viscous material FV and the second viscous material SV is mainly different from that of the thirteenth embodiment and the like, the first viscous material FV and the second viscous material SV are used. Except for the related configurations, the description is omitted because basically only the upper two digits of the code are changed. The displacement detector is supported as in the thirteenth embodiment and the like. Further, as shown in FIG. 19B, the stylus 1506 is directly fixed to the moving member 1512 by a flange portion 1544 without using a kinematic joint.

In the 21st embodiment, as shown in FIG. 19B, the inner side surface of the cylindrical portion 1536C of the swivel member (shaft housing member) 1536 is arranged so as to face the outer side surface of the moving member 1512. That is, it can be said that the swivel member 1536 is a first wall member arranged so as to face the moving member 1512. Then, the gap between the cylindrical portion 1536C (inner side surface) and the moving member 1512 (outer side surface) is filled with a first viscous material FV such as grease oil. As a result, at least the first viscous material FV can dampen the displacement of the moving member 1512 with respect to the swirling member 1536, reduce the vibration in the Z direction caused by the movement of the measuring probe 1500, and increase the sensitivity of the measuring probe 1500. It is possible to prevent an increase in noise due to the above.

At the same time, as shown in FIG. 19B, a viscous material reservoir 1531 is provided so as to cover the second diaphragm structure 1540 from both sides. The viscous material reservoir 1531 is fixed to the main body housing (swivel housing member) 1508 with the members in which the facing portion 1531A and the expansion portion 1531B are integrated facing each other. The facing portion 1531A is a portion facing the second diaphragm structure 1540. The expansion portion 1531B is a portion that covers the joint portion 1536D of the moving member 1512 in a non-contact manner, and includes an opening portion 1531C through which the cylindrical portion 1536C can penetrate. That is, it can be said that the viscous material reservoir 1531 is a second wall member that is integrally arranged with the main body housing 1508. Then, the gap between the viscous material reservoir 1531 (inner side surface) and the second diaphragm structure 1540 is filled with the second viscous material SV such as grease oil. As a result, at least the second viscous material SV can dampen the displacement of the second diaphragm structure 1540 with respect to the viscous material reservoir 1531, and the vibration in the XY direction caused by the movement of the measurement probe 1500 can be reduced. It is possible to prevent an increase in noise due to high sensitivity.

In addition, also in this embodiment, since the damping structures in the Z direction and the damping structure in the XY directions are separately provided, the first viscous material FV and the second viscous material SV can be individually changed. Therefore, since the damping characteristics can be individually optimized in the Z direction and the XY directions, the sensitivity of the measurement probe 1500 can be further increased.

In the thirteenth to twenty-first embodiments, the posture detector is built in the probe body, but the present invention is not limited to this. For example, it may be as in the 22nd embodiment shown in FIG. The 22nd embodiment is such that the probe main body of the 13th and 14th embodiments can be split between the beam splitter and the reference member in the axial direction O. That is, the position of the posture detector is mainly different from that of the thirteenth and fourteenth embodiments, and the configuration of the front-stage module in the separated configuration is substantially the same as that of the tenth embodiment. Therefore, the description will be omitted assuming that the upper two digits of the code are basically changed.

In the 22nd embodiment, as shown in FIG. 20, the probe main body 1552 has an axial motion mechanism 1560, a swivel motion mechanism 1584, and a displacement detector 1576 built-in, and the pre-stage module 1551 has a posture detector 1572 or the like built-in. is there. Therefore, it is easy to change the probe main body 1552, and it is also easy to change the front-stage module 1551. That is, the performance of the set of the axial motion mechanism 1560, the swivel motion mechanism 1584, the displacement detector 1576, and the posture detector 1572 can be changed or replaced separately, and the cost can be reduced. Further, since the attitude detector 1572 can be separated from the probe main body 1552, the probe main body 1552 can be miniaturized and the cost can be reduced. In the present embodiment, the moving member 1562 directly supports the stylus 1556, but the pre-stage module is provided when the swivel member RP directly supports the stylus as in the twentieth embodiment. You may.

In the 13th to 22nd embodiments, the position of the center of gravity of the member supported by the second diaphragm structure including the stylus is basically the same as that of the turning center RC. Not limited to. For example, the position of the center of gravity of the member supported by the second diaphragm structure including the stylus may be intentionally placed on the stylus side from the turning center RC. In that case, the mass and volume of the member supported by the second diaphragm structure on the anti-stylus side with respect to the turning center RC can be minimized. Therefore, the natural frequency of the measurement probe can be increased, and a measurement probe having sensitivity to a higher frequency than the measurement probes of the 13th to 22nd embodiments (such as capable of high-speed response operation) can be realized.

In the above embodiment, the measurement probe is used as a copy probe, but the present invention is not limited to this, and may be used as a touch probe, for example.

The present invention can be widely applied to a measuring probe used for measuring the three-dimensional shape of an object to be measured.

100 ... Measurement system 110 ... Operation unit 111 ... Joystick 120 ... Input means 130 ... Output means 200 ... Three-dimensional measuring machine 210 ... Plate 220 ... Drive mechanism 221 ... Beam support 222 ... Beam 223 ... Column 224 ... Spindle 230 ... Drive Sensors 300, 350, 400, 450, 700, 750 to 1500, 1550 ... Measuring probes 302, 352, 402, 452, 702, 725 to 1502, 1552 ... Probe body 304, 354, 404, 454, 704, 754, 1204 , 1254, 1404, 1454 ... Swivel module 306, 356, 406, 456, 706, 756 to 1506, 1556 ... Stylus 308, 358, 408, 458, 708, 758 to 1508, 1558 ... Main body housing 308A ... Step 308AB, 330AA, 408AB, 412CA, 908AB, 942CA, 1063B, 1080AB, 1108AB, 1208AB, 1462DA ... Lower end 308B, 708A, 808A, 858A, 10008A, 1058A, 1308A, 1358A ... Extension 308BB, 330B, 1058AA ... Inner side surface 310 360, 410, 460, 710, 760 to 1510, 1560 ... Axial motion mechanism 312, 362, 412, 462, 712, 762 to 1512, 1562 ... Moving members 312A, 312D, 319A, 332B, 342C, 362A, 408AA, 412A, 412EA, 462A, 812A, 862A, 892A, 908AA, 912A, 942EA, 1063A, 1080AA, 1142C, 1212A, 1242C, 1262A, 1412A, 1458BA, 1458CA, 1462A, 1492B ... Upper end 312B, 362B, 412B, 892B, 942B, 992B, 1042B, 1092B, 1212B, 1412B ... Hollow parts 312C, 338A, 362C, 462C, 712C, 1080A, 1458C ... Recesses 314, 315, 364, 365, 414, 415, 464, 465, 714, 715 ~ 1564, 1565 ... 1st diaphragm structure 314A, 340A ... outer peripheral part 314B, 340G ... rim part 314C, 340B ... central part 314D, 340E, 340F ... cutout part 316, 326, 366, 376, 416, 426, 466, 474, 716, 726, 816 , 824, 866, 874, 916, 926, 966, 976, 1016, 1066, 1074, 1116, 1124, 1166, 1174, 1216, 1226, 1266, 1274, 1316, 1324, 1416, 1426, 1466, 1476 ... Criteria Members 318, 368, 418, 468, 478, 718, 818, 868, 918, 968, 1018, 1068, 1118, 1168, 1218, 1268, 1278, 1318, 1418, 1468 ... Light sources 319, 369, 419, 719, 731A, 781A, 819, 869, 919, 969, 1019, 1069, 1081A, 1331A, 1381A, 1431A ... Support members 320, 370, 420, 470, 477, 720, 820, 870, 920, 970, 1020, 1070, 1120, 1170, 1220, 1270, 1277, 1320, 1420, 1470 ... Beam splitter (BS)
322, 372, 422, 472, 722, 822, 872, 922, 972, 1022, 1072, 1122, 1172, 1222, 1272, 1322, 1422, 1472, 1572 ... Attitude detectors 324, 374, 424, 724, 1224 , 1424, 1474 ... Scale bracket 328, 378, 428, 476, 728, 826, 876, 928, 978, 1076, 1126, 1176, 1228, 1276, 1326, 1428, 1478, 1576 ... Displacement detector 329 ... Signal processing Circuits 330, 380, 430, 480, 730, 780, 830, 880, 930, 980, 1030, 1080 ... Module housing 330A, 332A, 362G, 382A, 408A, 758A, 908A, 932A, 951BA, 957A, 1108A, 1208A , 1388A, 1531C, 1551BA, 1557A, 1558A ... Opening 330C ... Outer side surface 332, 344, 362D, 394, 421E, 444, 462D, 494, 712D, 744, 762D, 781E, 794, 812E, 842E, 844, 862E , 892E, 894, 912E, 942E, 944, 1042E, 1062E, 1092E, 1094, 1144, 1194, 1244, 1294, 1344, 1394, 1444, 1494, 1544, 1594 ... Flange portions 334, 384, 434, 484, 734. , 784 to 1534, 1584 ... Swirling motion mechanism 336, 386, 436, 486, 736, 786, 1236, 1286, 1436, 1486 ... Upper member 336A, 1080B ... Convex 338, 388, 438, 488, 738, 788, 1088, 1138, 1188, 1238, 1288, 1338, 1388, 1438, 1488, 1538, 1588 ... Balance member 338B, 1458CB, 1492A ... Side 340, 390, 440, 490, 740, 790 to 1540, 1590 ... Second diaphragm Structures 340C, 340D ... Hinge parts 342, 392, 442, 492, 742, 792, 1142, 1192, 1242, 1292, 1342, 1442, 1492, 1592 ... Flange members 342A, 362E, 758B, 792A, 942F, 591BB, 1142A, 1342A, 1442A ... Rollers 342B, 362F, 708B, 762E, 792B, 942G, 951BC, 1080CA, 1142B, 1342B, 1336AC, 1386AC, 1442B, 1431CB, 1551BC, 1592B ... Permanent magnets 344A, 382B, 781F, 794A, 932B, 957B, 1094A, 1144A, 1344A, 1444A, 1557B, 1594A , 382C, 731AA, 780A, 781AA, 794B, 932C, 957C, 1081AA, 1094B, 1144B, 1331AA, 1344B, 1381AA, 1431CC, 1444B, 1557C, 1594B ... Magnetic members 346, 396, 446, 494, 746, 996, , 896, 946, 1096, 1112B, 1146, 1162B, 1196, 1246, 1296, 1312B, 1346, 1396, 1446, 1496, 1546, 1596 ... Rod parts 348, 398, 448, 948, 748, 798, 848, 898 , 948, 998, 1098, 1148, 1198, 1248, 1298, 1348, 1398, 1448, 1498, 1548, 1598 ... Contact parts 382, 432, 482, 732, 932, 982 ... Module covers 412C, 842C, 892C, 942C ... Thick part 412D, 842D, 892D, 942D ... Thin part 475, 1275 ... Reference mirror 500 ... Motion controller 530 ... Probe signal processing unit 532 ... A / D circuit 534 ... FPGA
536 ... Counter circuit 550 ... Position calculation unit 600 ... Host computer 731, 781, 1081, 1331, 1381, 1431 ... Counter balance mechanism 731B, 781B, 1081B, 1331B, 1381B, 1431B ... Support shaft 731C, 781C, 1081C, 1331C, 1381C, 1431CD ... Balance weights 731D, 781D, 1081D, 1331D, 1381D, 1431D ... Connecting shafts 804, 854, 904, 954, 1004, 1054, 1104, 1154, 1304, 1354, 1504, 1554 ... Linear modules 951, 1551 ... Front module 951A, 1551A ... Front housing 951B, 1551B ... Lower cover 957, 1557 ... Upper cover 1008B, 1136A, 1462C, 1536A ... Ring part 1030A, 1458B ... Inner wall part 1063 ... Suppressing member 1080C, 1087, 1136AA, 1186AA, 1336AA , 1336AB, 1386AB, 1387 ... Support parts 1112A, 1162A, 1236A, 1286A, 1312A, 1362A, 1431CA, 1436A, 1486A ... Connecting parts 1112C, 1162C, 1312C ... Member arrangement parts 1136B, 1412E, 1536B ... Connecting parts 1136C, 1212C, 1412C, 1462B, 1536C ... Cylindrical part 1136D, 1212D, 1412D, 1462D, 1536D ... Joint part 1531 ... Viscous material reservoir 1531A ... Opposing part 1531B ... Expansion part 1551BB, 1592A ... V groove F ... Frequency FV ... First viscous material I ... Light quantity IF ... Interference optical system IL ... Interference fringe k ... Restoring force per angle O ... Axial direction OA ... Optical axis PS ... Phase change RC ... Turning center RP, 842, 892, 942, 992, 1042, 1092, 1136, 1186 , 1336, 1386, 1536, 1586 ... Swivel member S ... Surface SV ... Second viscous material W ... Object to be measured

Claims (4)

A detachable stylus having a contact portion in contact with an object to be measured, an axial movement mechanism including a moving member that enables the contact portion to move in the axial direction, and a plane formed at right angles to the axial direction by swirling motion. A measurement probe including a swivel motion mechanism including a swivel member that makes the contact portion movable.
A shaft housing member that supports the shaft movement mechanism and
The balance weight according to the mass of the stylus and
A counter-balancing mechanism that is supported by the shaft housing member and balances the stylus and the balance weight is provided.
The axial movement mechanism includes a plurality of first diaphragm structures that allow the moving member to be displaced.
In the axial direction, the counterbalance mechanism is arranged between the first diaphragm structure and the contact portion, which is the closest to the contact portion among the plurality of first diaphragm structures .
The swivel motion mechanism includes a second diaphragm structure that allows the swivel member to be displaced.
A measurement probe characterized in that the second diaphragm structure is arranged between the plurality of first diaphragm structures in the axial direction . In claim 1,
The swivel mechanism supports the shaft housing member and
A measurement probe characterized in that the counter balance mechanism is connected to the stylus and is detachable together with the stylus. In claim 1,
A swivel housing member that supports the swivel motion mechanism and is supported by the axial motion mechanism is provided.
A measurement probe characterized in that the counter balance mechanism is connected to the swivel housing member. In claim 3,
A measurement probe in which the swivel housing member is detachable together with the counter balance mechanism.