JP6790373B2 - Printing equipment, printing tools and printing methods - Google Patents

Description

The present invention relates to a printing apparatus, a printing tool and a printing method.

A technique for forming a conductive pattern by printing and coating a metal paste composed of metal particles and a solvent on a substrate and sintering it is known.
[Prior art literature]
[Patent Document]
[Patent Document 1] Japanese Patent Application Laid-Open No. 2008-923 [Patent Document 2] Japanese Patent Application Laid-Open No. 10-521507 [Patent Document 3] Japanese Patent Application Laid-Open No. 2000-189875 [Patent Document 4] Japanese Patent Application Laid-Open No. 2007-44892

Since the paste material containing the boiled metal is more expensive than ordinary solder, there is a demand to suppress the paste material applied to the screen mask other than the holes forming the conductive pattern as much as possible.

The printing apparatus according to the first aspect of the present invention has a discharge nozzle for discharging a paste material into a hole of a screen mask superimposed on the substrate, and the discharge nozzle is relatively moved on the surface of the screen mask to cause the substrate. It is a printing device that prints a conductive pattern on the surface of. The discharge nozzle may have a front member and a rear member. The front member may be located on the surface of the screen mask in front of the direction of movement. The rear member may be located on the rear side with respect to the moving direction. The tip forming the discharge opening of the front member may be located above the tip forming the discharge opening of the rear member in the direction away from the surface of the screen mask.

The discharge nozzle may have a gap of 0.1 mm or more and 1 mm or less from the surface of the screen mask when the rear member is brought into contact with the surface of the screen mask.

The discharge nozzle may have a side member between the front member and the rear member. The tip forming the discharge opening of the front member may be located above the tip forming the discharge opening of the side member in the direction away from the surface of the screen mask.

The width of the discharge opening, which is a length orthogonal to the moving direction, may be larger than the width of the hole corresponding to the line width of the conductive pattern. The discharge nozzle may be configured to have a drive mechanism that brings the front member closer to and further from the rear member.

The printing tool according to the second aspect of the present invention is a printing tool used in a printing apparatus that supplies a paste material and prints a conductive pattern on the surface of a substrate. The printing tool may include a screen mask and a discharge nozzle. The screen mask may be placed on top of the substrate and have holes corresponding to at least a portion of the conductive pattern. In the discharge nozzle, the tip forming the discharge opening of the rear member located rearward with respect to the moving direction moved so as to discharge the paste material into the hole on the surface of the screen mask is located forward with respect to the moving direction. It may protrude from the tip forming the discharge opening of the front member.

The printing method according to the third aspect of the present invention has a first member and a second member facing each other, and a discharge opening is provided by a tip of the first member and a tip of a second member protruding from the tip of the first member. This is a printing method in which a paste material is supplied and a conductive pattern is printed on the surface of a substrate by using a discharge nozzle in which the above is formed. The printing method may include a mounting step and a ejection step. In the mounting step, a screen mask having holes corresponding to at least a part of the conductive pattern may be mounted on the substrate. In the discharge step, the discharge nozzle is moved so that the tip of the first member is on the front side and the tip of the second member is on the rear side with respect to the moving direction on the surface of the screen mask, and the paste material is discharged into the hole. You can do it.

In the discharge step, the discharge nozzle may be installed so that the extension direction of the inner pipe of the discharge nozzle through which the paste material flows is inclined to the moving direction side.

In the discharge step, the tip of the first member may be separated from the surface of the screen mask within a range of 0.1 mm or more and 1 mm or less from the tip of the second member. In the discharge step, the paste material may be discharged so as to fill the width of the hole corresponding to the line width of the conductive pattern by one sweep.

The discharge nozzle may have a drive mechanism that brings the first member closer to and further from the second member. In the discharge step, the discharge amount of the paste material may be adjusted by driving the drive mechanism.

The outline of the above invention does not list all the necessary features of the present invention. Sub-combinations of these feature groups can also be inventions.

It is a schematic diagram which shows the structure of the printing apparatus which concerns on this embodiment. It is explanatory drawing for demonstrating the structure and function of a discharge nozzle. It is an exploded perspective view which shows the structure of a discharge head. It is a perspective view which shows the structure of the discharge head in another Example. It is a flow chart which shows the procedure of a printing method.

Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the inventions claimed in the claims. Also, not all combinations of features described in the embodiments are essential to the means of solving the invention.

FIG. 1 is a schematic view showing the configuration of the printing apparatus 100 according to the present embodiment. The printing apparatus 100 mainly includes a base 110, a stage 120, a support column 130, a propulsion guide 140, a holder 150, a chuck 160, a discharge nozzle 200, and a cylinder 300. The base 110 movably supports the stage 120. The stage 120 translates in the x-axis direction and the y-axis direction orthogonal to the z-axis, which is the vertical direction, and rotates around the z-axis.

The base 110 includes an actuator for moving the stage 120, and a guide mechanism for realizing the movement is provided between the base 110 and the stage 120. The support column 130 is arranged at a position that does not hinder the movement of the stage 120, and has a mechanism that supports the base 110 so as to be movable in the z-axis direction. The propulsion guide 140 is provided on the upper part of the support column 130, and includes an actuator and a moving mechanism for moving the holder 150 in the x-axis direction. In the following description, as shown in the figure, the vertical direction is the z-axis direction, the direction in which the holder 150 moves is the x-axis direction, and the directions orthogonal to the z-axis and the x-axis are the y-axis directions, which are indicated by arrows. The direction is defined as the positive direction. According to this definition, the coordinate system is shown in the following figures as needed.

The holder 150 fixes the mounted cylinder 300 along the z-axis direction. The cylinder 300 has a storage space inside for storing a paste material composed of metal particles and a solvent. The discharge nozzle 200 is detachably attached to one end side of the cylinder 300 facing the stage 120. The discharge nozzle 200 discharges the paste material stored in the cylinder 300 toward the stage 120 side.

The screen mask 510 has a pattern hole 511 corresponding to the conductive pattern transferred to the substrate 500. The screen mask 510 is placed so as to be aligned with the substrate 500, installed on the stage 120 in a state of being overlapped with the substrate 500, and fixed by the chuck 160. When the paste material is discharged from the discharge nozzle 200 in synchronization with the movement of the stage 120 and the holder 150, the paste is filled in the pattern holes 511 and a conductive pattern is formed on the substrate 500. The substrate 500 is then heated and the conductive pattern is stably fixed onto the substrate 500. The conductive pattern formed on the substrate 500 does not have to be formed by one screen mask 510 at a time, and may be formed in a plurality of times while exchanging the screen mask 510. At this time, the discharge nozzle 200 suitable for each screen mask 510 may be mounted on the cylinder 300.

A series of operations for forming the conductive pattern on the substrate 500 is executed by the control unit 700. The nozzle unit 710, the position sensor 720, the drive unit 730, and the acquisition unit 740 are mainly connected to the control unit 700.

The nozzle unit 710 is installed in the cylinder 300 and the discharge nozzle 200, and includes a switching mechanism for discharging / stopping the paste material, a capacity sensor for detecting the capacity of the paste material stored in the cylinder 300, and the like. The control unit 700 controls the timing of discharging the paste material from the discharge nozzle 200, for example, by sending a control signal to the nozzle unit 710.

The position sensor 720 is a sensor for detecting the relative positional relationship between the discharge opening of the stage 120 and the discharge nozzle 200. Specifically, the amount of movement of the stage 120 with respect to the base 110 and the amount of movement of the holder 150 with respect to the propulsion guide 140 are calculated from, for example, the output of a laser range finder or a rotary encoder. Alternatively, an image sensor including, for example, a CCD imaging sensor may be provided at the tip of the cylinder 300, and the relative position of the discharge opening of the discharge nozzle 200 with respect to the screen mask 510 may be calculated directly from the acquired image. These position information is transmitted to the control unit 700 in response to a request from the control unit 700.

The drive unit 730 includes the above-mentioned actuator and a drive circuit for driving the actuator, and is a unit for moving the discharge opening of the discharge nozzle 200 to a specific position of the screen mask 510. The drive unit 730 receives a control signal from the control unit 700 and drives and controls the actuator.

The acquisition unit 740 is an interface for acquiring the conductive pattern information corresponding to the pattern hole 511 provided in the screen mask 510 from an external device. For example, a CAD file of a conductive pattern is acquired from a CAD device. The control unit 700 controls the application of the paste material based on the conductive pattern information acquired by the acquisition unit 740.

The configuration of the printing device 100 is an example, and various other configurations can be adopted as long as it is a printing device that ejects a paste material from the ejection nozzle 200 to the screen mask 510 to form a conductive pattern. .. For example, the holder 150 may be provided with a mechanism for rotating the cylinder 300 so that the direction of the discharge opening of the discharge nozzle 200 can be changed. Further, if the holder 150 is configured so that it can be translated in the y direction, the moving mechanism of the stage 120 can be eliminated to form a fixed stage.

Next, the discharge nozzle 200 according to the present embodiment will be described in detail. FIG. 2 is an explanatory diagram for explaining the structure and function of the discharge nozzle 200. FIG. 2A is a side view of the discharge nozzle 200 observed from the negative side of the y-axis, in which a part of the internal structure is shown by a dotted line and a part of the screen mask 510 and the substrate 500 is shown in a cross section. FIG. 2B is a front view of the discharge nozzle 200 observed from the positive side of the x-axis. Similar to FIG. 2A, a part of the internal structure is shown by a dotted line, and the screen mask 510 and the substrate 500 are shown. A part is shown in cross section.

The discharge nozzle 200 is roughly classified into a connection bar 210 connected to the cylinder 300 and a discharge head 220 having a discharge opening. The connection bar 210 has a cylindrical shape, the discharge head 220 has a box shape, and the discharge nozzle 200 has a dustpan shape as a whole.

The connection bar 210 has a connection pipe 211 inside which the paste material supplied from the cylinder 300 is circulated to the discharge head 220. The connection bar 210 is fixed to the cylinder 300 by inserting the tip end portion on the side not connected to the discharge head 220 into the mounting port 301 provided in the cylinder 300 and tightening the connection bar 210 with the mounting screw 302. When the connection bar 210 is fixed to the cylinder 300, the connection pipe 211 is connected to the storage space of the cylinder 300.

The discharge head 220 has an inner pipe 221 inside the discharge head 220 for discharging the paste material supplied from the connection bar 210 toward the substrate 500. The inner pipe 221 is formed as a space surrounded by each member constituting the discharge head 220, which will be described in detail later. The discharge opening at which the paste material is discharged from the discharge head 220 to the outside has a substantially rectangular shape. The inner pipe 221 is formed as a space that gradually expands in the y-axis direction from the introduction portion connected to the connecting pipe 211 toward the discharge opening so that the paste material is uniformly discharged from the substantially rectangular discharge opening. ing.

The discharge head 220 is formed so as to be inclined with respect to the connection bar 210. Specifically, when the discharge nozzle 200 is mounted on the cylinder 300, the discharge head 220 is tilted so that the angle θ formed by the extension direction of the inner tube 221 and the surface of the screen mask 510 is 90 degrees or an acute angle. ing. Further, as will be described in detail later, in the present embodiment, the discharge nozzle 200 is controlled to discharge the paste material when it is moved in the positive direction of the x-axis, so that the discharge nozzle 200 is in this moving direction. The inner tube 221 is mounted on the cylinder 300 so that the extension direction is an acute angle.

The paste material discharged from the discharge opening is poured into the pattern hole 511 of the screen mask 510 to form a conductive pattern on the substrate 500 as the paste 400. The minimum line width of the conductive pattern is predetermined for each design rule. The hole width P of the pattern hole 511 corresponding to the minimum line width of the conductive pattern is determined according to the design rule depending on which design rule is adopted. Therefore, a plurality of discharge nozzles 200 having different discharge opening shapes are prepared so as to correspond to the respective hole widths P.

In the present embodiment, if the hole width of the pattern hole 511 is P, the discharge nozzle 200 having an opening width W larger than P is selected and mounted. That is, the opening width W of the discharge opening, which is a length orthogonal to the moving direction, is larger than the hole width P of the pattern hole 511 corresponding to the line width of the conductive pattern. By combining the screen mask 510 and the discharge nozzle 200 in this way, a line pattern having a constant width can be formed by a single sweep movement, so that it is possible to suppress poor bonding at the boundary surface of the paste.

FIG. 3 is an exploded perspective view showing the structure of the discharge head 220. The discharge head 220 is mainly composed of a front member 222, a rear member 223, and a frame member 224. The front member 222 is a substantially plate-shaped member located on the front side with respect to the moving direction. The rear member 223 is a substantially plate-shaped member located on the rear side with respect to the moving direction. As shown in the figure, each is formed so that the tip side gradually becomes thinner toward the discharge opening side.

The frame member 224 is mainly composed of a side plate 224a, a top plate 224b, and a partition plate 224c. The side plate 224a is in close contact with both side surfaces (planes parallel to the xz plane) of the front member 222 and the rear member 223. The top plate 224b is in close contact with the upper surfaces of the front member 222 and the rear member 223. The partition plate 224c is in close contact with a part of each facing surface so that the front member 222 and the rear member 223 face each other at a certain distance. In other words, the partition plate 224c is sandwiched between the front member 222 and the rear member 223.

When the front member 222 and the rear member 223 are incorporated into the frame member 224 and integrated, a space mainly surrounded by the front member 222, the rear member 223, the side plate 224a, and the partition plate 224c is formed inside. The space functions as the inner tube 221 described above. At this time, the tips of the front member 222, the rear member 223, and the side plate 224a each form a discharge opening.

The tip forming the discharge opening of the front member 222 is arranged so as to be located on the upper side (the z-axis positive side) in the direction away from the surface of the screen mask 510 with respect to the tip forming the discharge opening of the rear member 223. In other words, the discharge opening is formed by the tip of the front member 222 and the tip of the rear member 223 protruding from the tip of the front member 222 so that the front member 222 is on the front side and the rear member 223 is on the rear side. The control unit 700 moves the discharge nozzle 200 to execute control for discharging the paste material into the pattern hole 511 of the screen mask 510.

Here, the separation amount C (distance in the z-axis direction) between the tip of the front member 222 and the tip of the rear member 223 with respect to the surface of the screen mask 510 is preferably 0.1 mm or more and 1 mm or less. In other words, when the tip of the rear member 223 is brought into contact with the surface of the screen mask 510, it is preferable that the tip of the front member 222 has a gap of 0.1 mm or more and 1 mm or less from the surface of the screen mask. By setting the gap in this way, it is possible to prevent the paste material from wrapping around to the rear side of the discharge head 220 as compared with the case where the gap is not set, and as a result, the amount of the paste material to be discarded can be reduced. it can. In order to move the paste material closer to the front side, the tip of the front member 222 is located on the upper side (the z-axis positive side) in the direction away from the surface of the screen mask 510 with respect to the tip of the side plate 224a as the side member. It is preferable that they are arranged in such a manner.

As described above, in order to suppress waste of the paste material, in the present embodiment, when the discharge nozzle 200 discharges the paste material, the discharge nozzle 200 is moved so that the front member 222 is in front of the moving direction. Let me. Specifically, the control unit 700 discharges the paste material when the propulsion guide 140 moves the holder 150 in the positive direction on the x-axis or when the stage 120 moves in the negative direction on the x-axis.

Next, a modification of the discharge head 220 will be described. For example, if a hinge mechanism is provided between the front member 222 and the frame member 224 so that the tip end side of the front member 222 can be approached and separated from the rear member 223 direction, and a driving mechanism for giving a driving force is provided, the ejection is performed. The opening can be closed and the opening area can be changed and controlled. By closing the discharge opening, the discharge of the paste material can be stopped, and by changing the opening area, the discharge amount can be adjusted. As the drive mechanism, for example, a mechanism in which a piezoelectric element is attached and the front member 222 is displaced by its deformation can be adopted. As the drive mechanism, various other mechanisms such as forming the front member 222 with a shape memory alloy can be adopted.

FIG. 4 is a perspective view showing the structure of the discharge head 820 in another embodiment. The discharge head 820 is mainly composed of a front member 822, a rear member 823, and a frame member 824. It differs from the discharge head 220 described with reference to FIG. 3 in that the front member 822 is divided into three parts and each is driven. The front member 822 is divided into three flaps (first flap 822a, second flap 822b, third flap 822c) in the y-axis direction. Each tip side is configured to be able to approach and separate from the rear member 823 direction. By controlling the drive mechanism provided in each of the control units 700, the discharge opening can be partially closed and the discharge amount from the corresponding opening can be adjusted. FIG. 4 shows a state in which the second flap 822b is closed, but the first flap 822a and the third flap 822c are not closed. In this example as well, the inner pipe 211 may be common to the first flap 822a to the third flap 822c in the y-axis direction.

Next, the procedure of the printing method for printing the conductive pattern on the substrate 500 using the printing apparatus 100 will be described. FIG. 5 is a flow chart showing the procedure of the printing method.

In step S101, the user aligns and mounts the screen mask 510 on the substrate 500, maintains the state, places it on the stage 120 in step S102, and fixes it with the chuck 160.

In step S103, the user selects the optimum discharge nozzle 200 for the minimum line width of the pattern hole 511 of the screen mask 510 mounted on the stage 120, and mounts the discharge nozzle 200 on the cylinder 300 fixed to the holder 150. To do. When the user gives an instruction to start printing to the printing apparatus 100, the control unit 700 executes the steps from step S104.

In step S104, the control unit 700 acquires the conductive pattern data corresponding to the screen mask 510 via the acquisition unit 740. Then, a movement plan for the stage 120 and the holder 150 is formulated so that the pattern hole 511 can be filled by discharging the paste material when the discharge nozzle 200 moves in the positive direction of the x-axis.

After the movement plan has been formulated, the control unit 700 drives the stage 120 and the holder 150 in step S105 so that the discharge opening reaches the initial position on the screen mask 510. Then, the process proceeds to step S106, and control for forming the conductive pattern is executed while synchronizing the discharge of the paste material and the movement of the stage 120 and the holder 150 according to the movement plan. When the control according to the formulation plan by the control unit 700 is completed, the conductive pattern is printed on the substrate 500, and the series of procedures is completed.

As described above, as described above, the printing device 100 in this embodiment is mounted on the cylinder 300 to form the printing device as a whole. From another point of view, the detachable discharge nozzle 200 can be selected according to the hole width P of the screen mask 510, so that the combined discharge nozzle 200 and the screen mask 510 are used in the printing apparatus 100. It can be said that it is a printing tool.

Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that such modified or improved forms may also be included in the technical scope of the present invention.

The order of execution of operations, procedures, steps, steps, etc. in the devices, systems, programs, and methods shown in the claims, specification, and drawings is particularly "before" and "prior to". It should be noted that it can be realized in any order unless the output of the previous process is used in the subsequent process. Even if the scope of claims, the specification, and the operation flow in the drawings are explained using "first," "next," etc. for convenience, it means that it is essential to carry out in this order. It's not a thing.

100 printing equipment, 110 base, 120 stage, 130 columns, 140 propulsion guide, 150 holder, 160 chuck, 200 discharge nozzle, 210 connection bar, 211 connection pipe, 220 discharge head, 221 inner pipe, 222 front member, 223 rear Member, 224 frame member, 224a side plate, 224b top plate, 224c partition plate, 300 cylinder, 301 mounting port, 302 mounting screw, 400 paste, 500 board, 510 screen mask, 511 pattern hole, 700 control unit, 710 nozzle unit, 720 position sensor, 730 drive unit, 740 acquisition unit, 820 discharge head, 822 front member, 822a first flap, 822b second flap, 822c third flap, 823 rear member, 824 frame member

Claims (13)

Printing in which a discharge nozzle for discharging a paste material is provided in a hole of a screen mask superimposed on a substrate, and a conductive pattern is printed on the surface of the substrate by moving the discharge nozzle relatively on the surface of the screen mask. It ’s a device,
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
A rear member located on the rear side with respect to the moving direction,
It has a side member located between the front member and the rear member, and an inner pipe surrounded by the front member, the rear member, and the side member.
The tip of the front member forming the discharge opening is located above the tip of the rear member forming the discharge opening in a direction away from the surface of the screen mask.
The inner tube
It has an introduction portion into which the paste material is introduced
A printing device that gradually spreads from the introduction portion toward the ejection opening in a direction orthogonal to the moving direction on the surface of the screen mask. The printing apparatus according to claim 1 , wherein the ejection nozzle has a gap of 0.1 mm or more and 1 mm or less from the surface of the screen mask when the rear member is brought into contact with the surface of the screen mask. A discharge nozzle for discharging the paste material is provided in the hole of the screen mask overlapped on the substrate, and the paste material is discharged while the discharge nozzle is relatively moved on the surface of the screen mask to discharge the paste material on the surface of the substrate. A printing device that prints conductive patterns on a paste
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
A rear member located on the rear side with respect to the moving direction,
It has a side member and a side member between the front member and the rear member.
The tip of the front member forming the discharge opening is located above the tip of the rear member forming the discharge opening in a direction away from the surface of the screen mask.
A printing device located above the tip of the front member having the discharge opening, which is away from the surface of the screen mask, with respect to the tip of the side member having the discharge opening . A discharge nozzle for discharging the paste material is provided in the hole of the screen mask overlapped on the substrate, and the paste material is discharged while the discharge nozzle is relatively moved on the surface of the screen mask to discharge the paste material on the surface of the substrate. A printing device that prints conductive patterns on a paste
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
With the rear member located on the rear side with respect to the moving direction
Have,
The tip of the front member forming the discharge opening is located above the tip of the rear member forming the discharge opening in a direction away from the surface of the screen mask.
A printing apparatus in which the width of the ejection opening, which is a length orthogonal to the moving direction, is larger than the width of the hole corresponding to the line width of the conductive pattern . The printing apparatus according to any one of claims 1 to 4 , wherein the discharge nozzle has a drive mechanism for bringing the front member closer to and away from the rear member. A discharge nozzle for discharging the paste material is provided in the hole of the screen mask overlapped on the substrate, and the paste material is discharged while the discharge nozzle is relatively moved on the surface of the screen mask to discharge the paste material on the surface of the substrate. A printing device that prints conductive patterns on a paste
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
A rear member located on the rear side with respect to the moving direction,
With a drive mechanism that brings the front member closer to and away from the direction of the rear member
Have,
The tip of the front member forming the discharge opening is located above the tip of the rear member forming the discharge opening in a direction away from the surface of the screen mask.
The discharge nozzle is divided into a plurality of flaps on the surface of the screen mask in a direction orthogonal to the moving direction.
The plurality of flaps are printing devices each having the driving mechanism for bringing the plurality of flaps closer to and further from the rear member . A printing tool used in a printing device that supplies a paste material and prints a conductive pattern on the surface of a substrate.
A screen mask that is placed on the substrate and has holes corresponding to at least a part of the conductive pattern.
On the surface of the screen mask, the tip forming the discharge opening of the rear member located rearward with respect to the moving direction moved so as to discharge the paste material into the hole is located forward with respect to the moving direction. Including a discharge nozzle protruding from the tip of the front member forming the discharge opening.
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
A rear member located on the rear side with respect to the moving direction,
It has a side member located between the front member and the rear member, and an inner pipe surrounded by the front member, the rear member, and the side member.
The inner tube
It has an introduction portion into which the paste material is introduced
A printing tool that gradually spreads from the introduction portion toward the discharge opening in a direction orthogonal to the moving direction on the surface of the screen mask. A discharge nozzle having a first member and a second member facing each other and having a discharge opening formed by the tip of the first member and the tip of the second member protruding from the tip of the first member is used. This is a printing method in which a paste material is supplied and a conductive pattern is printed on the surface of a substrate.
A mounting step of mounting a screen mask having holes corresponding to at least a part of the conductive pattern on the substrate, and
The discharge nozzle is moved so that the tip of the first member is on the front side and the tip of the second member is on the rear side with respect to the moving direction on the surface of the screen mask, and the paste material is placed in the hole. It has a discharge process and discharge
The discharge nozzle
A front member located on the front side of the surface of the screen mask with respect to the moving direction,
A rear member located on the rear side with respect to the moving direction,
It has a side member located between the front member and the rear member, and an inner pipe surrounded by the front member, the rear member, and the side member.
The inner tube
It has an introduction portion into which the paste material is introduced
A printing method in which a printing method gradually spreads from the introduction portion toward the ejection opening in a direction orthogonal to the moving direction on the surface of the screen mask. A discharge nozzle having a first member and a second member facing each other and having a discharge opening formed by the tip of the first member and the tip of the second member protruding from the tip of the first member is used. This is a printing method in which a paste material is supplied while the discharge nozzle is relatively moved to print a conductive pattern on the surface of a substrate.
A mounting step of mounting a screen mask having holes corresponding to at least a part of the conductive pattern on the substrate, and
The discharge nozzle is moved so that the tip of the first member is on the front side and the tip of the second member is on the rear side with respect to the moving direction on the surface of the screen mask, and the paste material is placed in the hole. It has a discharge process and discharge
A printing method in which the discharge nozzle is installed so that the extension direction of the inner pipe of the discharge nozzle through which the paste material flows is inclined toward the moving direction, and the discharge step is performed . The eighth or ninth aspect of the present invention, wherein the ejection step is performed with the tip of the first member separated from the surface of the screen mask within a range of 0.1 mm or more and 1 mm or less from the tip of the second member. Printing method. A discharge nozzle having a first member and a second member facing each other and having a discharge opening formed by the tip of the first member and the tip of the second member protruding from the tip of the first member is used. This is a printing method in which a paste material is supplied while the discharge nozzle is relatively moved to print a conductive pattern on the surface of a substrate.
A mounting step of mounting a screen mask having holes corresponding to at least a part of the conductive pattern on the substrate, and
The discharge nozzle is moved so that the tip of the first member is on the front side and the tip of the second member is on the rear side with respect to the moving direction on the surface of the screen mask, and the paste material is placed in the hole. It has a discharge process and discharge
The ejection step is a printing method in which the paste material is ejected so as to fill the width of the hole corresponding to the line width of the conductive pattern by one sweep . The discharge nozzle has a drive mechanism for bringing the first member closer to and further from the direction of the second member.
The printing method according to any one of claims 8 to 11 , wherein the discharge step adjusts the discharge amount of the paste material by driving the drive mechanism. A discharge nozzle having a first member and a second member facing each other and having a discharge opening formed by the tip of the first member and the tip of the second member protruding from the tip of the first member is used. This is a printing method in which a paste material is supplied while the discharge nozzle is relatively moved to print a conductive pattern on the surface of a substrate.
A mounting step of mounting a screen mask having holes corresponding to at least a part of the conductive pattern on the substrate, and
The discharge nozzle is moved so that the tip of the first member is on the front side and the tip of the second member is on the rear side with respect to the moving direction on the surface of the screen mask, and the paste material is placed in the hole. It has a discharge process and discharge
The discharge nozzle has a drive mechanism for bringing the first member closer to and further from the direction of the second member.
In the discharge step, the discharge amount of the paste material is adjusted by driving the drive mechanism.
The first member is divided into a plurality of flaps in a direction orthogonal to the moving direction on the surface of the screen mask.
A printing method in which the plurality of flaps each have a drive mechanism for bringing the plurality of flaps closer to and further from the second member .

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