JP6788262B2 - Diaphragm and fluid control equipment using diaphragm - Google Patents

Description

The present invention relates to a diaphragm and a fluid control device using the diaphragm.

Patent Document 1 discloses a diaphragm provided with a hanging metal fitting having a locking piece that engages with a compressor.

Japanese Unexamined Patent Publication No. 2004-204977

Then, as an example of the work of engaging the diaphragm having the hanging metal fitting with the compressor, the locking piece of the hanging metal fitting is inserted into the mounting hole provided in the compressor, and the diaphragm is rotated.

By the way, if the insertion amount when inserting the locking piece into the mounting hole is small, the locking piece is not inserted to the position where it completely passes through the mounting hole and is located in the middle of the mounting hole. Therefore, the diaphragm must be rotated. Will not be possible.

If you try to rotate the diaphragm without noticing that it is in such a state, a strong force is applied to the joint between the hanging bracket and the diaphragm body, and peeling occurs at the joint between the hanging bracket and the diaphragm body. There is a problem.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a diaphragm that suppresses peeling between a hanging tool and a diaphragm body, and a fluid control device using the diaphragm.

The present invention is grasped by the following configuration in order to achieve the above object.
(1) The diaphragm of the present invention is a diaphragm provided with a diaphragm body and a hanger, and the diaphragm body has a substantially conical shape having a tip portion into which a part of the hanger is embedded, and the hanger is A fixed portion having a first end portion located on the back surface side of the tip portion of the diaphragm body and substantially embedded in the tip portion of the diaphragm body, and a fixing portion substantially embedded in the tip portion of the diaphragm body, and a fixing portion thereof in a direction away from the tip portion of the diaphragm body. A rod-shaped portion extending from the first end portion of the fixing portion and a connecting portion provided on a side of the rod-shaped portion away from the fixing portion are provided, and the fixing portion is located in the tip portion of the diaphragm body. A second end located on the opposite side of the first end is provided so that the second end engages with the tip of the diaphragm body to rotate the hanger. A streak engaging portion is formed to suppress.

(2) In the configuration of the above (1), the linear engaging portion is a linear groove that passes substantially in the center of the second end of the fixed portion and crosses the second end from end to end. It is formed.

(3) In the configuration of the above (1) or (2), the fixed portion has a substantially truncated cone shape in which the diameter on the first end side is larger than the diameter on the second end side.

(4) In the configuration of (3) above, the fixed portion is outside the first end portion when viewed from a cut surface including a straight line passing through the center of the first end portion and the second end portion. The outer peripheral portion connecting the position and the outer position of the second end portion bulges outward rather than connecting the outer position of the first end portion and the outer position of the second end portion with a straight line. It has a shape.

(5) The diaphragm of the present invention is a diaphragm provided with a diaphragm main body and a hanging tool, and the diaphragm main body has a substantially conical shape having a tip portion into which a part of the hanging tool is embedded. A fixed portion having a first end portion located on the back surface side of the tip portion of the diaphragm body and substantially embedded in the tip portion of the diaphragm body, and a fixing portion substantially embedded in the tip portion of the diaphragm body and a fixing portion substantially embedded in the tip portion of the diaphragm body in a direction away from the tip portion. A rod-shaped portion extending from the first end portion of the fixing portion and a connecting portion provided on a side of the rod-shaped portion away from the fixing portion are provided, and the fixing portion has a diameter of the first end portion side. It has a substantially truncated cone shape that is larger than the diameter of the second end side located on the opposite side of the first end.

(6) In any one of the above (3) to (5), the fixed portion is provided with a plurality of shallow outer peripheral grooves adjacent to the outer peripheral surface.

(7) In the fluid control device of the present invention, a diaphragm having any one of the above (1) to (6), a valve body having a body body on which the diaphragm is arranged, and the diaphragm are attached. It includes an actuator for driving the diaphragm, which is detachably fixed to the valve body.

According to the present invention, it is possible to provide a diaphragm that suppresses peeling between the hanger and the diaphragm body, and a fluid control device that uses the diaphragm.

It is a side view of the fluid control apparatus which used the diaphragm of the embodiment which concerns on this invention. It is an exploded perspective view of the fluid control equipment shown in FIG. It is sectional drawing of the diaphragm and the compressor of embodiment which concerns on this invention. It is a perspective view of the diaphragm of the embodiment which concerns on this invention, (a) is the view which looked at the back surface side, (b) is the figure which looked at the front surface side. It is a perspective view of the hanger of the embodiment which concerns on this invention, (a) is the view which looked at the 1st end side which is located on the back surface side of the diaphragm body of the hanger, and (b) is embedded in the diaphragm body. It is the figure which looked at the side which is. It is a figure for demonstrating the substantially conical shape of the embodiment which concerns on this invention. It is a perspective view which shows the modification of the streak engaging part of the embodiment which concerns on this invention.

Hereinafter, embodiments for carrying out the present invention (hereinafter, referred to as “embodiments”) will be described in detail with reference to the accompanying drawings.
The same elements are numbered the same throughout the description of the embodiment.

FIG. 1 is a side view of the fluid control device 1 in which the diaphragm 10 of the embodiment according to the present invention is used, and FIG. 2 is an exploded perspective view of the fluid control device 1 shown in FIG.
In FIG. 1, a part of the diaphragm 10 is shown as a cross-sectional view so that the part of the diaphragm 10 can be seen.
First, the fluid control device 1 using the diaphragm 10 of the present embodiment will be briefly described, and then the diaphragm 10 will be described in detail.

As shown in FIGS. 1 and 2, the fluid control device 1 has a valve body 20, a diaphragm 10 attached, an actuator 30 for driving the diaphragm 10, and a clamp member for detachably fixing the actuator 30 to the valve body 20. It has 40 and.

(Valve body)
As shown in FIG. 2, the valve body 20 includes a body body 21 in which the diaphragm 10 is arranged, and tubular flow paths 25a and 25b integrally provided in the body body 21 through which a pair of fluids flow. , Tubular channels 25a and 25b are connected to piping of equipment and the like.
The tubular flow path 25a and the tubular flow path 25b are symmetrically connected to the body main body 21 with the body main body 21 interposed therebetween, but when viewed as individual shapes, the tubular flow path 25a and the tubular flow path 25b are connected to each other. It has almost the same shape.

The body body 21 is connected to a circular flange portion 22 having an opening 22a serving as an insertion port for the diaphragm 10 on the center side, a bottom portion 23 located on the opposite side of the flange portion 22, and the flange portion 22 and the bottom portion 23. It is a bottomed shape portion including a side portion 24.

Then, the tubular flow paths 25a and 25b are connected so as to communicate with each other at the opposite positions of the side portions 24, and the bottom 23 side of the side portion 24 is directed from one tubular flow path 25a to the other tubular flow path 25b. (Refer to the Y-axis direction in FIG. 2), an inner surface in which a part of the inner surface of the tubular flow paths 25a and 25b is extended, that is, a curved surface having a radius of curvature close to the radius of curvature of the inner diameter of the tubular flow paths 25a and 25b. It has a shaped inner surface.

Further, the side portion 24 is an intermediate position from one tubular flow path 25a to the other tubular flow path 25b, and is substantially orthogonal to the direction from one tubular flow path 25 to the other tubular flow path 25. It is provided with an inwardly projecting protrusion 24a provided at a position (on the X-axis direction side in FIG. 2).
Although the opposite side of the protruding portion 24a is not visible in FIG. 2, the same protruding portion as the protruding portion 24a is provided on the opposite side as well.
That is, a pair of protruding portions 24a are provided at opposite positions.

The protruding portion 24a is formed so as to have a shape corresponding to the surface shape of the diaphragm 10, and when the actuator 30 is driven to stop the flow of the fluid, the linear seal portion 11c of the diaphragm 10 (described later) (See FIG. 4B) forms a contact portion.
In the present embodiment, a pair of tubular passages 25a and 25b having substantially the same shape are provided on the side portion 24, but the present embodiment is not particularly limited to the above-described embodiment.
For example, one tubular passage and the other tubular passage may be provided in an L-shaped or V-shaped positional relationship, and either one or the other tubular passage may be provided at the bottom 23. It may be provided so as to communicate with each other, and the position at which the tubular flow path is provided with respect to the body body 21 may be appropriately changed as necessary.
Further, the number of tubular flow paths communicating with the body main body 21 does not have to be limited to two. For example, three tubular flow paths are provided in a Y-shaped or T-shaped positional relationship with respect to the body main body 21. You may be.
As described above, the present invention can be carried out in various modified forms that can be performed by those skilled in the art.

(Clamp member)
The clamp member 40 is a member that sandwiches the flange portion 22 of the body body 21 of the valve body 20 described above and the flange portion 31 of the actuator 30 described later to integrate the valve body 20 and the actuator 30.

As shown in FIG. 2, the clamp member 40 includes a pair of semicircular holding members 41, 42 and a pair of fastening members 43 for fastening the holding members 41, 42 so as to have a substantially circular shape. ing.
The sandwiching member 41 is a semicircular holding portion main body 41a having a U-shaped groove 41aa that opens inward, and a pipe provided on the outside of both ends of the holding portion main body 41a on the semicircular open end side. It is provided with a shaped fastening portion 41b.

Further, the holding member 42 also has the same shape as the holding member 41, and has a semicircular shape of the holding portion main body 42a having a U-shaped groove 42aa that opens inward and a semicircular shape of the holding portion main body 42a. It is provided with pipe-shaped fastening portions 42b provided on the outside of both ends on the open end side.

On the other hand, the fastening member 43 is provided on the tip side of the bolt 43a provided so as to penetrate the fastening portion 41b of the sandwiching member 41 and the fastening portion 42b of the sandwiching member 42 and the bolt 43a provided so as to penetrate as described above. It is provided with a nut 43b to be screwed.

Therefore, the work of attaching the actuator 30 to the valve body 20 can be performed as follows.
First, after arranging the actuator 30 so that the flange portion 31 of the actuator 30 is located on the flange portion 22 of the body body 21 of the valve body 20, the flange portion 31 and the flange portion 22 form a U-shape of the holding member 41. The sandwiching member 41 and the sandwiching member 42 are mounted on the outer periphery of the flange portion 31 and the flange portion 22 so as to be located in the U-shaped groove 42aa of the groove 41aa and the sandwiching member 42.

After that, the fastening portion 41b of the sandwiching member 41 and the fastening portion 42b of the sandwiching member 42 are tightened by the bolt 43a and the nut 43b in a direction in which the fastening portion 41b and the sandwiching member 42 are fastened to each other, and a circular clamp member is fastened. In the state of 40, the flange portion 22 of the body body 21 of the valve body 20 and the flange portion 31 of the actuator 30 are sandwiched by the clamp member 40, and the fluid control device 1 is in the state as shown in FIG. 1, and the valve of the actuator 30 The attachment to the body 20 is completed.

As shown in FIG. 1, the outer peripheral edge 11a of the diaphragm body 11 of the diaphragm 10 described later is sandwiched between the flange portion 22 of the body body 21 of the valve body 20 and the flange portion 31 (see FIG. 2) of the actuator 30. Therefore, when the valve body 20 and the actuator 30 are integrated by the clamp member 40, they are sandwiched between the flange portion 31 and the flange portion 22.

Therefore, since the opening 22a of the valve body 20 is closed by the diaphragm body 11, the fluid in the valve body 20 does not leak from the opening 22a of the body body 21 in the fluid control device 1. There is.

(Actuator)
As shown in FIG. 1, the actuator 30 includes a compressor 32 that presses the diaphragm 10 on the tip side, which is the diaphragm 10 side.
The compressor 32 is moved to the valve body 20 side and the opposite side by the drive mechanism of the actuator 30.

The drive mechanism for driving the compressor 32 may be a general one, and in the present embodiment, the compressor 32 is moved to the valve body 20 side and the opposite side by the inflow and outflow of air from the air supply port 33. However, for example, it may be a mechanical drive mechanism that moves the compressor 32 by turning the handle clockwise or counterclockwise.

Then, when the compressor 32 moves to the valve body 20 side, a force pressed by the compressor 32 from the back surface 10b side to the front surface 10a side is applied to the diaphragm 10.

Then, the diaphragm 10 is deformed so that the surface 10a abuts on the inner surface of the side portion 24 and the bottom portion 23 of the body body 21 of the valve body 20 and blocks between the tubular flow path 25a and the tubular flow path 25b of the valve body 20. Then, the flow of fluid stops.

On the other hand, conversely, when the compressor 32 moves away from the valve body 20, the surface 10a side of the diaphragm 10 is separated from the side 24 of the body body 21 of the valve body 20 and the inner surface of the bottom 23, and the tubular of the valve body 20. The blockage between the flow path 25a and the tubular flow path 25b is released, and the fluid flows.

(Diaphragm)
FIG. 3 is a cross-sectional view of the diaphragm 10 and the compressor 32.
The cross-sectional view of FIG. 3 is a cross-sectional view taken along the flow direction of the fluid (Y-axis direction of FIG. 2) when the fluid control device 1 is in the state of FIG.
4A and 4B are perspective views of the diaphragm 10, FIG. 4A is a view of the back surface 10b side, and FIG. 4B is a view of the front surface 10a side.

As shown in FIG. 3, the diaphragm 10 includes a diaphragm main body 11, a hanging tool 12, and a backup unit 13, and will be described individually below.

(Diaphragm body)
The diaphragm body 11 is made of, for example, polytetrafluoroethylene (PTFE) and has a substantially conical shape having a rounded thick tip portion 11b in which a part of the hanger 12 is embedded, as shown in FIG. doing.

As shown in the schematic view of the shape shown in FIG. 6, the conical shape is a shape whose cross section (or side view) is shown in FIG. 6A, but the substantially conical shape in the present application has a cross section of FIG. The shapes shown in (b) to (d) are also included.
Specifically, the substantially conical shape shown in FIG. 6B is tapered toward the tip portion at a substantially constant inclination angle and the tip portion is rounded.
Further, the substantially conical shape shown in FIG. 6C is a shape in which the tip portion is rounded by tapering toward the tip portion while drawing an R gently dented inward.
Further, in the substantially conical shape shown in FIG. 6 (d), the middle portion is tapered at a substantially constant inclination angle and the tip portion is rounded, and the rear end portion side opposite to the tip portion gradually expands toward the end. It has a substantially conical shape like a bell cup.
As described above, the substantially conical shape in the present specification does not mean a perfect conical shape that tapers toward the tip side while maintaining a completely constant inclination angle, but a shape that tapers while drawing a gentle R. Is included.
However, FIG. 6 is merely an example, and the present invention is not limited to these.
It should be noted that the convex portion of each tip portion shown in the partially enlarged view of FIGS. 6 (b) to 6 (d) corresponds to the linear seal portion 11c described later.

More specifically, when the outer peripheral diameter of the circular outer peripheral edge 11a is D1 (mm) and the height of the cone is H1 (mm), the ratio of the height H1 divided by the outer peripheral diameter D1 (H1). / D1) is preferably in a substantially conical shape of 0.4 or more and 0.6 or less.

When such a substantially conical diaphragm body 11 is used, the tubular flow path 25a and the tubular flow path 25b are made into relatively large flow paths while keeping the outer diameter D1 of the diaphragm body 11 close to the outer diameter of the conventional diaphragm. It can be made to correspond to each other, and it is possible to prevent the fluid control device 1 from becoming large.
That is, in the present embodiment, by increasing the height H1 of the diaphragm body 11 without increasing the outer diameter D1 of the diaphragm body 11, even when the diameter of the flow path (pipeline) through which the fluid flows is large. It is a diaphragm 10 that can be used.

Further, when the height of the rounded tip portion 11b in which a part of the hanging tool 12 is embedded is H2 (mm), the ratio of the height H2 divided by the height H1 (H2 / H1). However, it is preferably 0.35 or more and 0.55 or less.

In this way, even in the diaphragm main body 11 having a high height H1 as in the present embodiment, the hanger 12 can be positioned at a position corresponding to the compressor of the conventional actuator. Actuator mechanism can be used.

Further, as shown in FIG. 4B, the diaphragm main body 11 has a streak seal portion 11c formed so as to project from the surface 10a so as to pass through the center of the tip portion 11b and cross the surface 10a. doing.

As described above, the linear seal portion 11c is formed on the side portion 24 of the body body 21 of the valve body 20 (see FIG. 2) when the actuator 30 is driven to stop the flow of the fluid. It is a portion that is pressed against the protruding portion 24a.

Then, since the linear seal portion 11c pressed against the protruding portion 24a is deformed so as not to form a gap with the protruding portion 24a, a high degree of sealing when stopping the flow of the fluid can be obtained.

(Backup section)
As shown in FIG. 3, the backup unit 13 is provided so as to be mounted on the back surface side of the diaphragm body 11 which is the back surface 10b side of the diaphragm 10, and is interposed between the front surface of the compressor 32 and the diaphragm body 11. Therefore, it is a member that plays a role of reinforcing the sealing performance of the diaphragm main body 11 and a cushioning member that suppresses deterioration of the diaphragm main body 11.

Therefore, a rubber-based material is preferably used for the backup unit 13, and for example, conventionally known natural rubber, nitrile rubber, styrene rubber, butadiene rubber, and isobutylene having excellent heat resistance, cold resistance, flexibility, and corrosiveness are used. Synthetic rubber, polychloroprene rubber, butyl rubber, fluororubber, silicon rubber, polyurethane rubber, ethylene propylene diene rubber (EPDM) and the like can be preferably used. ..
The backup unit 13 is not an indispensable requirement, but may be provided as needed.

(Hanging tool)
The hanger 12 is made of, for example, a metal material, and as shown in FIG. 3, the hanger 12 includes a fixing portion 12a substantially embedded in the tip end portion 11b of the diaphragm main body 11.
The fixing portion 12a has a first end portion 12aa located on the back surface side of the tip end portion 11b of the diaphragm main body 11 and substantially flush with the back surface of the diaphragm main body 11.
Further, the hanger 12 is connected to a rod-shaped portion 12b extending from the first end portion 12aa of the fixing portion 12a in a direction away from the tip end portion 11b of the diaphragm main body 11 and a connection provided on the side of the rod-shaped portion 12b away from the fixing portion 12a. A part 12c and the like are provided.

5A and 5B are perspective views of the hanging tool 12, FIG. 5A is a view of the first end portion 12aa side of the hanging tool 12 located on the back surface side of the diaphragm main body 11, and FIG. 5B is a view. It is the figure which looked at the side embedded in the diaphragm main body 11.

As shown in FIG. 5, the connecting portion 12c of the hanger 12 has a length in which a part of the connecting portion 12c protrudes outward from the substantially columnar rod-shaped portion 12b, and the corner portion opposite to the rod-shaped portion 12b is chamfered. It has a horizontally long rectangular shape.
Then, in the compressor 32 described above, a rectangular hole 32a (see FIG. 1) corresponding to the horizontally long rectangular shape of the connecting portion 12c is formed in the center.

Therefore, the connecting portion 12c of the hanging tool 12 is inserted into the rectangular hole 32a, and when the connecting portion 12c is located on the back surface side of the compressor 32 (see FIG. 1), the diaphragm 10 is rotated. The connecting portion 12c can be engaged with the compressor 32.
In this way, the diaphragm 10 is attached to the compressor 32 by engaging the connecting portion 12c.

By the way, when the diaphragm 10 is rotated while the connecting portion 12c does not completely pass through the hole 32a (see FIG. 1) of the compressor 32 (see FIG. 1), the connecting portion 12c becomes the hole 32a (see FIG. 1). Since it is caught, the force for rotating the diaphragm body 11 is applied to the interface between the fixing portion 12a (see FIG. 1) of the hanger 12.

Then, there arises a problem that the diaphragm main body 11 and the fixing portion 12a (see FIG. 1) of the hanging tool 12 are loosened from each other and are in a peeled state.
Therefore, in the present embodiment, the connecting portion 12c is caught in the hole 32a (see FIG. 1) by preventing the diaphragm main body 11 from easily rotating with respect to the fixing portion 12a (see FIG. 1) of the hanging tool 12. When trying to rotate the diaphragm 10 in this state, the operator can feel that the diaphragm 10 is not rotating well before the peeling occurs, and the configuration for that purpose will be described below.

As shown in FIG. 5 (b), the second end portion 12ab located on the opposite side of the first end portion 12aa of the fixing portion 12a passes through substantially the center of the second end portion 12ab, and the second end portion 12ab is passed through. A linear engaging portion 12ac formed as a linear groove crossing from end to end is provided.

As shown in FIG. 3, the second end portion 12ab is a portion embedded in the tip portion 11b of the diaphragm body 11, and when the fixing portion 12a and the tip portion 11b of the diaphragm body 11 are integrated. In addition, the linear engaging portion 12ac formed on the second end portion 12ab is in a state of being engaged with the tip end portion 11b of the diaphragm main body 11.

In particular, the linearly formed linear engaging portion 12ac can generate a large resistance in the rotation direction, so that the operator can disengage the engagement before applying a rotational force to the diaphragm body 11. Since the diaphragm 10 can be felt in a non-rotatable state, the work of inserting the connecting portion 12c into the hole 32a (see FIG. 1) of the compressor 32 (see FIG. 1) is redone before the above-mentioned peeling occurs. Therefore, it is possible to prevent the diaphragm 10 from being damaged.

It is preferable that the linear engaging portion 12ac and the linear sealing portion 11c provided on the surface of the diaphragm main body 11 shown in FIG. 4B are in an orthogonal relationship.
By doing so, the linear engaging portion 12ac does not affect the pressing force when the linear sealing portion 11c is pressed against the side portion 24 of the body body 21 of the valve body 20 (see FIG. 2). can do.

On the other hand, in the above, the case where the linear engaging portion 12ac is formed as a linear groove has been shown, but as shown in FIG. 7A, the linear engaging portion 12ac is formed as a linear protrusion. May be good.
Further, as shown in FIG. 7B, in the linear engaging portion 12ac, the linear groove does not have to cross the second end portion 12ab from end to end.
Further, as shown in FIG. 7C, the linear engaging portion 12ac may be provided with a plurality of linear grooves so as to be arranged in a straight line.
In addition, as shown in FIG. 7D, the linear engaging portions 12ac may be provided with a plurality of linear grooves so as to be arranged in parallel.
Even in these ways, a large resistance to the rotation direction can be generated, so that the operator can notice that the diaphragm 10 cannot rotate before the diaphragm 10 is damaged.

By the way, in the present embodiment, as shown in FIGS. 3 and 5, the fixed portion 12a has a substantially truncated cone shape in which the diameter on the first end portion 12aa side is larger than the diameter on the second end portion 12ab side.
In this way, a locally thickened portion is less likely to occur at the tip end portion 11b of the diaphragm main body 11, and sink marks or the like are less likely to occur when the fixed portion 12a and the diaphragm main body 11 are integrated.

Further, as shown in FIG. 3, the fixed portion 12a has a second view (a cross section shown in FIG. 3) including a straight line passing through the center of the first end portion 12aa and the second end portion 12ab. The outer peripheral portion 12ad connecting the outer position of the first end portion 12aa and the outer position of the second end portion 12ab is a straight line between the outer position of the first end portion 12aa and the outer position of the second end portion 12ab. Assuming that it has a shape that bulges outward rather than being connected by the dotted line L in FIG. 3, the surface area is increased while avoiding the problem of sinking due to the thickening, and the adhesion between the diaphragm main body 11 and the fixing portion 12a is increased. I am trying to increase my power.
Therefore, it is more difficult to rotate the diaphragm main body 11 so that the diaphragm main body 11 and the fixing portion 12a are separated from each other.

It is preferable that the truncated cone shape (shape when the dotted line L in FIG. 3 is the outer peripheral portion) that is the basis of the fixed portion 12a is not too tapered and not too close to the cylindrical shape.
Therefore, when the diameter of the first end portion 12aa is D2 (mm) and the diameter of the second end portion 12ab is D3 (mm), the ratio (D3 / D2) obtained by dividing the diameter D3 by the diameter D2 is 0. It is preferably .35 or more and 0.55 or less, and the distance between the first end portion 12aa and the second end portion 12ab, that is, the height of the truncated cone shape is 1/4 or more and D2 or less of the diameter D2. Is preferable.

Further, as shown in FIGS. 3 and 5, a plurality of shallow outer peripheral grooves 12ae are provided adjacent to each other on the outer peripheral surface of the fixing portion 12a. For example, the first end portion 12aa to the second end portion 12a are provided. It is preferably provided in a range of 1/4 or more of the range up to 12ab.
If such an outer peripheral groove 12ae is provided, it becomes difficult for the hanger 12 to come off from the diaphragm main body 11, and the contact product between the diaphragm main body 11 and the fixing portion 12a increases, so that the resistance in the rotation direction is further increased. Can be made to.

Although the present invention has been described above based on the embodiments, it is needless to say that the present invention is not limited to the embodiments and various modifications can be made without departing from the gist of the present invention.
Therefore, various modifications made without departing from such gist are also included in the technical scope of the present invention, which is clear to those skilled in the art from the description of the scope of claims. ..

1 Fluid control equipment 10 Diaphragm 10a Front surface 10b Back surface 11 Diaphragm body 11a Outer peripheral edge 11b Tip 11c Strand seal 12 Hanging tool 12a Fixing 12aa First end 12ab Second end 12ac Strand engaging 12ad Outer circumference 12ae Outer groove 12b Rod-shaped part 12c Connecting part 13 Backup part 20 Valve body 21 Body body 22 Flange part 22a Opening part 23 Bottom part 24 Side part 24a Protruding part 25a, 25b Tubular flow path 30 Actuator 31 Flange part 32 Compressor 32a Hole 33 Air supply port 40 Clamp members 41, 42 Holding members 41a, 42a Holding parts main bodies 41aa, 42aa U-shaped grooves 41b, 42b Fastening portion 43 Fastening member 43a Bolt 43b Nut

Claims (5)

A diaphragm equipped with a diaphragm body and hanging tools,
The diaphragm body has a substantially conical shape having a tip portion into which a part of the hanging tool is embedded.
The hanging tool
A fixing portion having a first end portion located on the back surface side of the tip portion of the diaphragm body and substantially embedded in the tip portion of the diaphragm body,
A rod-shaped portion extending from the first end portion of the fixing portion in a direction away from the tip portion of the diaphragm body,
A connecting portion provided on a side of the rod-shaped portion away from the fixed portion is provided.
The fixing unit is configured provided with the first end portion so as to be positioned within the distal end and a second end located opposite Rutotomoni, the diameter of the first end portion side the second end of the diaphragm body It has a substantially truncated cone shape that is larger than the diameter on the part side .
The diaphragm is characterized in that the second end portion is formed with a linear engaging portion that engages with the tip end portion of the diaphragm body and suppresses the rotation of the hanger. The claim is characterized in that the linear engaging portion is formed as a linear groove that passes substantially the center of the second end portion of the fixed portion and crosses the second end portion from end to end. The diaphragm according to 1. The fixed portion is a position outside the first end portion and a position outside the second end portion when viewed from a cut surface including a straight line passing through the center of the first end portion and the second end portion. The outer peripheral portion connecting the two ends has a shape bulging outward rather than connecting the outer position of the first end portion and the outer position of the second end portion with a straight line. The diaphragm according to claim 1 or 2 . Wherein the fixing portion, the diaphragm according to any one of claims 1 to 3, wherein a shallow peripheral groove depths on the outer peripheral surface provided with a plurality adjacently. The diaphragm according to any one of claims 1 to 4 ,
A valve body having a body body on which the diaphragm is arranged,
A fluid control device comprising: an actuator for driving the diaphragm to which the diaphragm is attached and detachably fixed to the valve body.

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