JP6780843B2 - Actuator - Google Patents

Description

The present invention relates to an actuator that utilizes the stretching force of a shape memory alloy.

When the shape memory alloy is heated, it undergoes a phase transition from the martensite phase at room temperature to the austinite phase. In the austinite phase, the shape memory alloy cures in a predetermined shape. When the temperature drops, the phase transitions from the austinite phase to the martensite phase again. In the martensite phase, the shape memory alloy softens and is easily deformed by an external force.
Actuators that utilize the shape recovery force of such shape memory alloys have excellent features in various points such as miniaturization, light weight, and quietness of the device.

In Patent Documents 1 to 3, a wire (wire) is formed of a shape memory alloy, and the wire is expanded and contracted by controlling the energization of the wire. By using the contraction of the wire as power, an electrically driveable actuator is constructed. Hereinafter, the wire formed of such a shape memory alloy is referred to as "SMA (Shape Memory Alloy) wire".

Both ends of the SMA wire are generally fixed to the power supply terminals by screws. The power supply terminal is fixed to the stator which is the pedestal of the actuator. Since a voltage is applied to the SMA wire, the stator in contact with the SMA wire must have heat resistance, thermal conductivity (heat dissipation), and insulation. Under these circumstances, the stator is often made of aluminum and the surface thereof is anodized.

Japanese Unexamined Patent Publication No. 2014-88811 Japanese Patent No. 5878869 Japanese Patent No. 5836276

If the power supply terminal is press-fitted and fixed to the stator, the alumite on the surface layer may be scraped off and dielectric breakdown may occur. Therefore, at present, the power supply terminal and the stator are fixed with an adhesive. However, it is difficult to control the filling amount of the adhesive, and it is difficult to stabilize the product quality. It is also necessary to secure time for the adhesive to dry.

In addition, the screws may loosen due to long-term use. When the power supply terminal is small, screwing is not easy to work with. There is also a problem that the size of the actuator is limited by the size of the screw.

The present invention is an invention completed based on the above-mentioned problem recognition by the present inventors, and a main object thereof is to propose a technique for efficiently and stably fixing an SMA wire.

In an actuator according to an embodiment of the present invention, a wire rod formed of a shape memory alloy, a stator to which the wire rod is delivered and fixing an end portion of the wire rod, and a stator facing the stator with the wire rod sandwiched between the wire rods. It includes a mover that moves by expansion and contraction.
The stator has a through hole. The tubular member is inserted from one of the through holes, and the insertion member is inserted into the tubular member from the other of the through holes. The wire is fixed to one of the tubular member and the insertion member.

According to the present invention, it becomes easy to fix the SMA wire efficiently and stably.

It is an external perspective view of an actuator. It is a side view of the actuator. It is an external perspective view of a stator. It is an external perspective view of a mover. It is a front sectional view in line AA of FIG. It is an enlarged sectional view around the fixing member in FIG. It is external perspective view of the fixing member in 1st Embodiment. It is an exploded perspective view of the fixing member in 1st Embodiment (A type). It is external perspective view of the insertion member in 1st Embodiment (B type). It is external perspective view of the fixing member in 2nd Embodiment. It is an exploded perspective view of the fixing member in 2nd Embodiment (A type). It is external perspective view of the insertion member in 2nd Embodiment (B type). It is external perspective view of the fixing member in 3rd Embodiment. It is external perspective view of the fixing member in 3rd Embodiment. It is a 1st schematic diagram which shows the fixing method of the insertion member of 1st Embodiment (B type). It is a 2nd schematic diagram which shows the fixing method of the insertion member of 1st Embodiment (B type).

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, for convenience, the positional relationship of each structure may be expressed with reference to the illustrated state. Further, with respect to the following embodiments and modifications thereof, substantially the same components may be designated by the same reference numerals and the description thereof may be omitted as appropriate.

FIG. 1 is an external perspective view of the actuator 100. FIG. 2 is a side view of the actuator 100.
Hereinafter, the major axis direction of the actuator 100 is defined as the x-axis, the minor axis direction is defined as the y-axis, and the height direction of the actuator 100 is defined as the z-axis. Although the actuator 100 can be used in various situations, the actuator 100 in the present embodiment will be described as a device built into a mobile terminal such as a smartphone to create a tactile sensation. The actuator 100 is a small component having a size of about 20 mm in the x direction and about 5 mm in each of the y direction and the z direction.

The actuator 100 includes a stator 102 and a mover 104.
The stator 102 is fixed to the housing of the mobile terminal. Protrusions 112 and recesses 114 are alternately formed in the stator 102. Similarly, protrusions 116 and recesses 118 are alternately formed on the mover 104. The stator 104 is placed in the stator 102 with the protrusion 112 of the stator 102 fitted into the recess 118 of the mover 104 and the protrusion 116 of the stator 104 fitted into the recess 114 of the stator 102. To. The displacement of the stator 104 in the x direction is regulated by the engagement of the protrusion 112 of the stator 102 and the recess 118 of the mover 104, and the protrusion 116 of the stator 104 and the recess 114 of the stator 102.

The mover 104 can move about 50 to 100 μm in the z-axis direction. When the user touches the touch panel of the actuator 100 installed on the back side of the touch panel of the smartphone, the mover 104 slightly pushes up the touch panel from the back side. By such a method, the user is given a tactile sensation associated with the touch.

The actuator 100 includes a stator 102 and a mover 104, as well as an SMA wire 106, a fixing member 108 and a spring 110.
The spring 110 is delivered to both the stator 102 and the mover 104, and suppresses the mover 104 from shifting in the y direction and the z direction.

The SMA wire 106 is passed between the stator 102 and the mover 104 (details will be described later). Both ends of the SMA wire 106 are fixed to the stator 102 by two fixing members 108a and 108b (hereinafter, collectively referred to as "fixing member 108" when not particularly distinguished). The fixing member 108a functions as a current input terminal, and the fixing member 108b functions as a current output terminal. Therefore, the fixing member 108 must be a conductive member. The fixing member 108 in this embodiment is made of brass or copper.

A groove 130 is formed in the fixing member 108, and the SMA wire 106 is caulked and fixed in the groove 130. When an electric current is passed through the SMA wire 106 via the fixing member 108, the SMA wire 106 becomes hot, undergoes a phase transition to the austinite phase, and is cured and elongated. By curing and stretching the SMA wire 106, the mover 104 is pushed up in the positive z-axis direction. Details of the mechanism for converting the expansion and contraction of the SMA wire 106 into the z-direction movement of the mover 104 will be described later.

When a current is passed through the fixing member 108a, a current is also passed through the SMA wire 106, and the SMA wire 106 generates heat. Therefore, it is desirable that the stator 102 and the mover 104, which come into contact with most of the SMA wire 106, are made of a material having excellent heat resistance and thermal conductivity. Further, in order to prevent leakage of the current flowing through the SMA wire 106, it is desirable that the stator 102 and the mover 104 are insulating members. In the present embodiment, the stator 102 and the mover 104 are made of aluminum having excellent heat resistance and thermal conductivity. Since aluminum is a conductor, the surface of the mover 104 of the stator 102 is anodized to ensure insulation.
Alumite processing is a process of forming a thin aluminum oxide film (insulating film) on the surface of aluminum. The film thickness of the aluminum oxide film is about 20 to 40 μm.

An upper recess 120 is formed on the upper surface of the stator 102, and a lower recess 122 is also formed on the lower surface. In the upper recess 120 and the lower recess 122, a through hole (described in detail later) is formed in the stator 102, and the fixing member 108 is inserted into the through hole. A current is supplied from the lower part of one fixing member 108a, and a current is output from the lower part of the other fixing member 108b.

Screw holes 124 are formed at both ends of the stator 102, although not essential. The actuator 100 may be fixed to the housing by inserting a screw or the like into the screw hole 124. Further, the actuator 100 may be fixed to the housing by an adhesive. The method of fixing the actuator 100 may be an application of existing technology.

FIG. 3 is an external perspective view of the stator 102. FIG. 4 is an external perspective view of the mover 104.
At room temperature, the SMA wire 106 is passed over the stator 102 along the protrusions 112 and the indentations 114. A groove 126 is formed in the protrusion 112 of the stator 102 by the wall portions 128 on both sides. Similarly, a groove 132 is formed in the protrusion 116 of the mover 104 by the wall portions 134 on both sides. In the protrusion 112 of the stator 102 (the recess 118 of the mover 104), the SMA wire 106 passes over the groove 126 of the stator 102 and in the recess 114 of the stator 102 (the protrusion 116 of the mover 104). The SMA wire 106 passes under the groove 132 of the stator 104. By restricting the lateral displacement of the SMA wire 106 by the wall portion 128 of the stator 102 and the wall portion 134 of the mover 104, the SMA wire 106 is prevented from coming off from the actuator 100.

FIG. 5 is a regular cross-sectional view taken along the line AA of FIG.
A through hole 140 is formed in the fixing member 108, and the fixing member 108 is inserted into the through hole 140. The fixing member 108 includes an insertion member 136 and a tubular member 138. The SMA wire 106 is caulked and fixed in the groove 130 of the insertion member 136. When a current is supplied to the fixing member 108a (cylinder member 138) from the lower part of the stator 102, a current also flows through the SMA wire 106. When an electric current flows through the SMA wire 106, the SMA wire 106 undergoes a phase transition to the austinite phase, hardens, and tries to extend linearly. When the SMA wire 106 is extended, the mover 104 is pushed up in the upward direction (the z-axis positive direction). When the raised mover 104 presses the back surface of the touch panel, a tactile sensation is given to the user's finger on the front surface of the touch panel.

When the power supply is stopped, the SMA wire 106 becomes cold, undergoes a phase transition to the martensite phase and softens, so that the mover 104 moves downward (the z-axis negative direction). When the power supply is stopped, the heat of the SMA wire 106 is released to the stator 102 and the mover 104, and the SMA wire 106 promptly returns to room temperature.

More specifically, when the sensor detects a touch on the touch panel on the upper surface side of the actuator 100, a control circuit (not shown) supplies electric power to the fixing member 108 for a short time. At this time, since the SMA wire 106 undergoes a phase transition to the austinite phase and then to the martensite phase, the finger touching the touch panel feels a temporary physical repulsive force. With such a control method, even a touch panel can realize a touch feeling similar to that of a keyboard.

FIG. 6 is an enlarged cross-sectional view of the periphery of the fixing member 108 in FIG.
First, the tubular member 138 is inserted from the lower part of the through hole 140 in the stator 102. The tubular member 138 is a cylindrical member (detailed in relation to FIG. 8 and the like). After inserting the tubular member 138, the insertion member 136 is inserted from the upper part of the through hole 140. The insertion member 136 includes a head portion 142 that fits into the upper recess 120, and a leg portion 144 that is press-fitted into the tubular member 138 (detailed in relation to FIG. 8 and the like). With the SMA wire 106 inserted into the groove 130 formed in the head 142, the legs 144 are inserted into the tubular member 138, and when a strong force is applied from above the head 142, the head 142 becomes the tubular member 138. The legs 144 of the insertion member 136 are press-fitted into the tubular member 138 until they come into contact with each other. At this time, the groove 130 is also crushed and the SMA wire 106 is caulked and fixed to the insertion member 136. That is, after the tubular member 138 is inserted from below, the insertion member 136 in the state of holding the SMA wire 106 is press-fitted from above to fix the fixing member 108 to the stator 102 and the fixing member 108 of the SMA wire 106. It is fixed to at the same time.

A notch 146 may be formed on the inner surface of the tubular member 138. A protrusion may be formed on the outer surface of the leg portion 144, and the protrusion may be engaged with the notch 146. According to such a configuration, the connection between the insertion member 136 and the tubular member 138 can be further stabilized.

If the insertion member 136 and the tubular member 138 are not separated from each other and the fixing member 108 formed as a single component is press-fitted into the through hole 140, the fixing member 108 may damage the inner surface of the through hole 140 during press-fitting. There is. As described above, the surface of the stator 102 is coated with a thin aluminum oxide layer. If the inner surface of the through hole 140 is damaged, the aluminum oxide film is partially torn, and there is a risk that the fixing member 108 comes into direct contact with the inside (aluminum) of the stator 102. Since aluminum is conductive, if the aluminum oxide film is broken, the current flowing through the fixing member 108 leaks to the stator 102.

In the present embodiment, first, the inner surface of the through hole 140 is protected by inserting the tubular member 138. After that, since the insertion member 136 is press-fitted into the tubular member 138, the direct stress associated with the press-fitting is applied to the inner surface of the tubular member 138. Therefore, the risk of breaking the aluminum oxide film of the stator 102 can be greatly reduced.

When the insertion member 136 is press-fitted into the tubular member 138, the groove 130 is also crushed, so that the SMA wire 106 can be easily fixed to the insertion member 136. No additional steps are required to use screws or adhesives, facilitating fixing work. Moreover, since the work is simple, the manufacturing quality is unlikely to vary. Further, when the SMA wire 106 is thin and the fixing member 108 is small, fixing with a screw or an adhesive may be substantially impossible. The press-fit fixing in the present embodiment can be easily applied even when the fixing member 108 is small.

The head 142 of the insertion member 136 is fitted into the upper recess 120. The tubular member 138 is also fitted into the lower recess 122. Therefore, the movement of the fixing member 108 in the rotation direction about the z-axis can also be regulated. Since the pressure is applied to the tubular member 138 in the lateral direction by the insertion member 136 press-fitted into the tubular member 138, the fixing member 108 is strongly fixed to the through hole 140.

(First Embodiment)
FIG. 7 is an external perspective view of the fixing member 108 according to the first embodiment. FIG. 8 is an exploded perspective view of the fixing member 108 according to the first embodiment (A type).
The tubular member 138 has a tubular portion 148 and a base portion 150. The insertion member 136 has a head 142 and legs 144. The leg portion 144 of the insertion member 136 is inserted into the tubular portion 148 of the tubular member 138. The base 150 of the tubular member 138 is fitted into the lower recess 122 of the stator 102. The head 142 of the insertion member 136 is fitted into the upper recess 120 of the stator 102. As described above, when the leg portion 144 is press-fitted into the tubular portion 148, a large force is applied in the direction of expanding the tubular portion 148 in contact with the through hole 140 from the inside, so that the fixing member 108 is strongly fixed to the stator 102. To.

The SMA wire 106 is inserted into the groove 130 formed in the head 142, and the SMA wire 106 is caulked and fixed by the groove 130. In FIGS. 7 and 8, the groove 130 is formed on the side surface of the head 142, but the groove 130 may be formed on the upper surface of the head 142.

The tubular member 138 may be inserted from the upper part of the stator 102, and the insertion member 136 may be press-fitted from the lower part of the stator 102. In this case, a groove 130 may be formed in the base 150 of the tubular member 138, and the SMA wire 106 may be caulked and fixed therein.

FIG. 9 is an external perspective view of the insertion member 136 in the first embodiment (B type).
The B type insertion member 136 is different from the A type in that a notch (slit) 152 is formed in the leg portion 144. When the insertion member 136 is press-fitted, the branch legs 154 on both sides of the notch 152 are pushed inward. Therefore, the insertion member 136 can be easily press-fitted into the tubular member 138. Further, after press-fitting, the branch leg 154 tries to return to the original position, that is, to the outside, so this force is transmitted to the inner surface of the tubular member 138, and the fixing member 108 is strongly fixed to the through hole 140.

The notch 152 does not have to be one, and may be two or more. Further, if a part of the outer surface of the leg portion 144 is an inwardly inclined surface, the insertion member 136 can be more easily press-fitted into the tubular member 138. An example of the configuration of the inclined surface will be described in detail in relation to FIG.

(Second Embodiment)
FIG. 10 is an external perspective view of the fixing member 108 according to the second embodiment. FIG. 11 is an exploded perspective view of the fixing member 108 in the second embodiment (A type).
In the second embodiment, the SMA wire 106 is not fixed by caulking with the groove 130 formed in the head 142, but the SMA wire 106 is fixed by sandwiching the SMA wire 106 with the tubular member 138 and the insertion member 136. Fix to. The tubular member 138 in the second embodiment includes an upper edge portion 156 and a lower edge portion 158 at both ends of the tubular portion 148. The upper edge portion 156 and the lower edge portion 158 have an outer diameter larger than the outer diameter of the tubular portion 148. Therefore, the tubular member 138 comes into contact with the through hole 140 by the upper edge portion 156 and the lower edge portion 158.

First, the tubular member 138 is inserted into the through hole 140. Next, the leg portion 144 of the insertion member 136 is press-fitted into the tubular member 138 with the SMA wire 106 wound around. When the head 142 is pressed from above, the SMA wire 106 is sandwiched and fixed between the upper edge portion 156 and the head 142. It is not essential to wind the SMA wire 106 around the insertion member 136, but winding the SMA wire 106 more than once makes it easier to more reliably fix the SMA wire 106 to the fixing member 108.

FIG. 12 is an external perspective view of the insertion member 136 in the second embodiment (B type).
In the B-type insertion member 136, a notch 152 is formed in the leg portion 144 as in the first embodiment. When the insertion member 136 is press-fitted, the branch legs 154 on both sides of the notch 152 are pushed inward. Therefore, the insertion member 136 can be easily press-fitted into the tubular member 138. Further, after press-fitting, the branch leg 154 tries to return to the original position, that is, to the outside, so this force is transmitted to the inner surface of the tubular member 138, and the fixing member 108 is strongly fixed to the through hole 140. An inclined surface 160 is formed on a part of the branch leg 154. As shown in FIG. 12, since the inclined surface 160 is inclined inward, it serves as a guide when the insertion member 136 is press-fitted into the tubular member 138.

(Third Embodiment)
FIG. 13 is an external perspective view of the fixing member 108 according to the third embodiment. FIG. 14 is an external perspective view of the fixing member 108 according to the third embodiment.
In the third embodiment, a vertical groove 130 is formed on the upper surface of the insertion member 136. An inclined surface 162 whose diameter is reduced downward is formed in the lower portion of the insertion member 136 (FIG. 14). In the third embodiment, the tubular member 138 is inserted into the through hole 140 from the lower part of the stator 102, and the insertion member 136 is press-fitted into the tubular member 138 from the upper part of the stator 102. After that, the SMA wire 106 is passed through the groove 130, and the insertion member 136 is pressed from both side surfaces of the groove 130 to crimp the SMA wire 106 into the groove 130.

FIG. 15 is a first schematic view showing a method of fixing the insertion member of the first embodiment (B type). FIG. 16 is a second schematic view showing a method of fixing the insertion member of the first embodiment (B type).
In FIGS. 15 and 16, the method of fixing the SMA wire 106 is the same as the method shown in FIG. Here, an example of a method of fixing the insertion member 136 shown in FIG. 9 to the stator 102 is shown.

First, the tubular member 138 is inserted from below the stator 102. The outer diameter of the tubular member 138 is sufficiently smaller than the inner diameter of the through hole 140. Therefore, at the insertion stage, the tubular member 138 is not fixed to the stator 102. The tubular member 138 is inserted until the second expansion portion 164 at the lower portion of the tubular member 138 comes into contact with the lower surface of the stator 102.

Next, the insertion member 136 is inserted from above the stator 102. The outer diameter of the insertion member 136 (leg portion 144) is sufficiently smaller than the inner diameter of the tubular member 138. Therefore, at the insertion stage, the insertion member 136 is not fixed to the tubular member 138 or the stator 102. The first enlarged portion 166 is inserted until the first enlarged portion 166 on the upper portion of the insertion member 136 comes into contact with the upper surface of the stator 102.

After inserting the insertion member 136 and the tubular member 138 from above and below the stator 102, the tool 168 is inserted from below and the branch leg 154 of the insertion member 136 is pushed open (FIG. 16). The branch leg 154 is pressed against the notch 146. The expanded branch leg 154 is fitted into the notch 146 of the tubular member 138, whereby the insertion member 136 and the tubular member 138 are joined to each other.

In a state where the insertion member 136 and the tubular member 138 (fixing member 108) are mutually fixed, the second expanding portion 164 and the first expanding portion 166 sandwich the stator 102 from above and below to attach the fixing member 108 to the stator 102. Can be fixed.

The branch leg 154 of the insertion member 136 strongly pushes the inner surface of the tubular member 138. The tubular member 138 whose inner side surface is pressed from the branch leg 154 in the expanding direction may be pressed against the inner side surface of the stator 102. In this way, if the insertion member 136 presses the inner surface of the cylinder member 138 and the cylinder member 138 presses the inner surface of the stator 102, the insertion member 136 and the cylinder member 138 are more strongly fixed to the stator 102. ..

When the tubular member 138 and the stator 102 are strongly fixed by pressing the tubular member 138 against the stator 102, the fixing member 108 is fixed to the stator 102 even without the second enlarged portion 164 and the first enlarged portion 166. Can be fixed to.

Since the branch leg 154 is pushed into the notch 146, the branch leg 154 is restricted to the upper surface 180 of the notch 146. In other words, after the branch leg 154 is expanded, the upper surface 180 prevents the insertion member 136 from moving in the z direction (upward in FIG. 16). The notch 146 is not an essential configuration, but the notch 146 is more effective because it contributes to prevent the insertion member 136 from coming off. The lower protrusion 182 below the notch 146 may or may not be present.

In the above, the fixed structure of the actuator 100, particularly the SMA wire 106, has been mainly described based on the embodiment.
Since the tubular member 138 is inserted from below the stator 102 and the insertion member 136 is press-fitted from above the stator 102, the fixing member 108 can be efficiently and stably fixed to the stator 102. It is excellent in workability because it does not require processing such as cutting a screw groove on the inner surface of the through hole 140 and does not require an adhesive. In particular, it is an effective fixing method for a small actuator 100 of about several mm.

Further, in the case of the SMA wire 106, it is desirable that the stator 102 has heat resistance, thermal conductivity, and insulating properties. Aluminum has heat resistance and is excellent in thermal conductivity but is conductive. Therefore, the surface of the SMA wire 106 is anodized to achieve insulation. Since the aluminum oxide film formed by the alumite process is thin, a fixing method that may scrape the surface of the stator 102 is not desirable. In the present embodiment, since the inner surface of the through hole 140 is protected by the tubular member 138 and the insertion member 136 is press-fitted into the tubular member 138, the aluminum oxide film on the inner surface of the through hole 140 is burdened. It is a fixing method that does not take.

Although the preferred embodiment of the present invention has been described above, the present invention is not limited to the specific embodiment, and it goes without saying that various modifications can be made within the scope of the technical idea of the present invention. Nor. For example, some components may be combined in the above-described embodiment and modification, or some components may be deleted from each embodiment and modification.

Since the SMA wire 106 needs to be cooled promptly when the energization is stopped, it is desirable that the stator 102 and the mover 104 are formed of a substance having a large thermal conductivity. In the present embodiment, the stator 102 and the mover 104 have been described as being aluminum, but they may be formed of a substance having a thermal conductivity of a predetermined value or more, such as metal or carbon nanotubes. The present invention is particularly effective when the surface of such a substance is plated to ensure insulating properties.

In summary, the fixing member 108 (power supply terminal) for fixing the SMA wire 106 abuts on the stator 102 or the mover 104 having excellent thermal conductivity, and the fixing member 108 has conductivity. Alternatively, in a configuration in which the fixing member 108 and the stator 102 (or the mover 104) are in contact with each other via an insulator such as an aluminum oxide film or an insulating layer, the current leaks from the fixing member 108. There are situations where you do not want to damage the insulator (or insulation layer) to prevent it. The method of fixing the SMA wire 106 according to the present invention works particularly effectively in such a situation.

100 Actuator, 102 Stator, 104 Stator, 106 SMA Wire, 108 Fixing Member, 110 Spring, 112 Protrusion, 114 Indentation, 116 Protrusion, 118 Indentation, 120 Upper Recess, 122 Lower Recess, 124 Screw Hole, 126 Groove, 128 Wall part, 130 groove, 132 groove, 134 wall part, 136 insertion member, 138 cylinder member, 140 through hole, 142 head, 144 leg part, 146 notch, 148 cylinder part, 150 base part, 152 notch, 154 Branch legs, 156 upper edges, 158 lower edges, 160 slopes, 162 slopes.

Claims (7)

Wires made of shape memory alloy and
A stator to which the wire rod is delivered and fixing the end portion of the wire rod,
It is provided with a mover that faces the stator with the wire rod in between and moves by expanding and contracting the wire rod.
The stator has a through hole and
The tubular member is inserted from one of the through holes, the insertion member is inserted into the tubular member from the other of the through holes, and the tubular member is press-fitted or expanded to fix the tubular member to the stator. An actuator characterized in that it is fixed to one of the tubular member and the insertion member. The actuator according to claim 1, wherein the wire rod is caulked and fixed to one of the tubular member and the insertion member. The actuator according to claim 1, wherein the wire rod is sandwiched and fixed between the tubular member and the insertion member. The insertion member has a leg to be inserted into the tubular member.
The actuator according to any one of claims 1 to 3, wherein a notch is formed in the leg portion. The insertion member has a leg to be inserted into the tubular member.
The actuator according to any one of claims 1 to 3, wherein the outer surface of the leg is inclined inward at the tip of the leg. The insertion member has a head that abuts on the stator.
The stator has a recess, and the through hole is formed in the recess.
The actuator according to any one of claims 1 to 5, wherein the head is fitted in a recess of the stator. The actuator according to any one of claims 1 to 6, wherein the stator is a member formed of aluminum and whose surface is anodized.

Images