JP6761735B2 - Fluid pressure cylinder - Google Patents

Description

The present invention relates to a fluid pressure cylinder that generates thrust by fluid supply.

Fluid cylinders such as hydraulic cylinders and pneumatic cylinders are widely used to realize various movements such as "pushing", "lifting", "grabbing", "carrying", and "scissors" that generate desired thrust by supplying fluid. Has been done.
For example, a hydraulic cylinder is often selected when a large thrust is obtained in a relatively small cylinder, but ancillary devices such as a hydraulic device that supplies pressurized oil are required, which is disadvantageous in terms of both cost and space. It was.
On the other hand, the pneumatic cylinder has a simple structure and is easy to handle, but it is not possible to obtain a large thrust due to the limit of the pressure of the supplied air and the compressibility.

Therefore, Patent Document 1 proposes an air-hydro cylinder capable of generating a thrust equivalent to that in the case of hydraulic pressure supply by air supply.
In this air-hydro cylinder, a large thrust is obtained from the hydraulic piston by changing the amount of movement of the pneumatic piston to the cross section of the hydraulic cylinder using the built-in oil.

However, in the technique described in Patent Document 1, since the pneumatic piston and the hydraulic piston are not directly connected in the operating direction, the amount of movement obtained for the hydraulic piston, which is the output target of thrust, is smaller than the amount of movement of the pneumatic piston. There was a problem. Although it depends on the selected value of each piston diameter, for example, the hydraulic piston can be moved only 2.5 mm with respect to the total stroke of the pneumatic piston of 15 mm.
For this reason, for example, when used as an actuator for grasping or pushing a work with a jig attached to the tip, the operating range of the jig is narrow, so it is necessary to move the entire actuator with respect to the work.

Japanese Patent No. 4895342

An object of the present invention is to provide a fluid pressure cylinder capable of obtaining a thrust larger than the thrust of the supplied fluid together with a large amount of movement by the supplied fluid.

(1) In the invention according to claim 1, the housing, the first fluid chamber, the second fluid chamber, and the third fluid chamber provided in the housing, the first fluid chamber, and the second fluid chamber are described. An internal fluid filled in the third fluid chamber, a first piston movably provided in a predetermined direction, and a first through hole formed in the center forming one wall surface of the first fluid chamber. A first plate shape that is provided so as to be movable in the predetermined direction, is arranged between the second fluid chamber and the third fluid chamber, and has a communication portion that connects the second fluid chamber and the third fluid chamber. A portion, a spring disposed between the first piston and the first plate-shaped portion, and the spring disposed in the first plate-shaped portion, penetrating the first through hole, and in the predetermined direction. An output rod extending to the outside of the housing on the first piston side and a second plate-shaped portion provided so as to be movable in the predetermined direction and forming one wall surface of the third fluid chamber are provided. In the first plate-shaped portion, the projected area of the surface in contact with the internal fluid on the plane perpendicular to the predetermined direction is larger than the projected area of the surface of the first piston in contact with the internal fluid on the plane perpendicular to the predetermined direction. Provided is a fluid pressure cylinder which is formed to be large and in which the first plate-shaped portion and the output rod are driven by applying the pressure of a supply fluid supplied from the outside to the first piston.
(2) The fluid pressure cylinder according to claim 1, wherein the fluid pressure cylinder according to claim 1 is provided with a rotation mechanism for rotating the output rod around a central axis when the output rod moves. provide.
(3) The invention according to claim 3, wherein the rotating mechanism is formed between a lid that closes an end portion of the housing and the output rod. A fluid pressure cylinder is provided.
(4) The invention according to claim 4 provides the fluid pressure cylinder according to claim 2, wherein the rotating mechanism is formed between the housing and the output rod.
(5) In the invention according to claim 5, the rotating mechanism is formed on the output rod, a protruding member formed on one side of the sliding surface facing the output rod, and the other side. The second, third, or third aspect of the present invention, wherein the output rod is rotated by a sliding mechanism of the groove portion that is fitted with the protruding member and twisted with respect to the moving direction of the output rod. The fluid pressure cylinder according to claim 4 is provided.
(6) The invention according to claim 6 includes a rotation prevention mechanism for preventing rotation of the output rod around the central axis when the output rod is moved, and the rotation prevention mechanism is the output rod. And, of the sliding surfaces facing the output rod, the protruding member formed on one side and the protruding member formed on the other side are fitted to each other and with respect to the moving direction of the output rod. The fluid pressure cylinder according to claim 1, further comprising a linear linear groove portion.
(7) In the invention according to claim 7, the pressure of the supply fluid provided in the housing and the fourth fluid chamber movably arranged in the predetermined direction and supplied from the outside. The output rod is provided with a third piston having a third through hole formed in the center, and the output rod is extended to the outside through the first through hole and the third through hole. The fluid pressure cylinder according to any one of claims 1 to 6, wherein the fluid pressure cylinder is provided.
( 8 ) In the invention according to claim 8 , the third piston is formed so that the projected area of the surface in contact with the supply fluid on the plane perpendicular to the predetermined direction is larger than the projected area of the first piston. The fluid pressure cylinder according to claim 7 , wherein the fluid pressure cylinder is provided.
(9) In the invention according to claim 9 , the first piston of the spring has one end in contact with the first plate-shaped portion and the other end in contact with the first piston. The fluid pressure cylinder according to any one of claims 1 to 8 , wherein the fluid pressure cylinder is disposed between the first plate-shaped portion and the first plate-shaped portion.
(10) In the invention according to claim 10 , one end of the spring is in contact with the first plate-shaped portion, and the other end is a boundary between the first fluid chamber and the second fluid chamber. The claim of any one of claims 1 to 8 , characterized in that the first piston and the first plate-shaped portion are disposed of by abutting against the portion. The described fluid pressure cylinder is provided.
(11) In the invention according to claim 11 , the second plate-shaped portion is provided with an urging member that urges the second plate-shaped portion toward the first plate-shaped portion. The fluid pressure cylinder according to any one of claims 1 to 10 , wherein the fluid pressure cylinder is provided.
(12) In the invention described in claim 12, wherein the first piston and comprises a limiting mechanism that limits the distance between the first plate portion below a predetermined distance, claims 1 to 11, characterized in that The fluid pressure cylinder according to any one of the above is provided.
(13) The invention according to claim 13 , wherein the communication portion is composed of a plurality of communication holes, according to any one of claims 1 to 12 . Provided is a fluid pressure cylinder.
(14) In the invention described in claim 14, at least a portion of the communication hole, the fluid of claim 13, the inner diameter adjustment member to change the inner diameter of the hole is arranged, characterized in that A pressure cylinder is provided.
(15) In the invention according to claim 15 , the second plate-shaped portion has a protrusion having a predetermined length inserted into the communication hole at a position corresponding to a part of the plurality of communication holes. The fluid pressure cylinder according to claim 13 or 14 , characterized in that it is formed.
(16) The fluid pressure cylinder according to any one of claims 1 to 15 , wherein in the invention according to claim 16 , the internal fluid is an incompressible fluid. I will provide a.
(17) In the invention according to claim 17 , the fluid pressure cylinder according to any one of claims 1 to 15 , characterized in that the internal fluid is a compressible fluid. provide.

According to the present invention, since the internal fluid moves in the communication part until the first plate-shaped portion and the second plate-shaped portion come into contact with each other, the output rod moves a large amount due to the pressure of the supply fluid supplied from the outside. It can be obtained, and after the contact, the communication portion is closed and the pressure of the internal fluid is received, so that a thrust larger than the thrust of the supplied fluid can be obtained.

It is sectional drawing which showed the whole structure of the air hydro type cylinder in 1st Embodiment. It is explanatory drawing which showed the moving state of each part with the movement of the pneumatic piston in 1st Embodiment. It is explanatory drawing which showed the moving state of each part with the movement of the pneumatic piston in 1st Embodiment. It is explanatory drawing which showed the mutual state of each part and the force acting on the output rod with the movement of a pneumatic piston in the output direction. It is sectional drawing which showed the whole structure of the air hydro type cylinder in 2nd Embodiment. It is sectional drawing which showed the whole structure of the air hydro type cylinder in 3rd Embodiment. 1 It is sectional drawing around the adjustment mechanism in 4th Embodiment.

Hereinafter, a preferred embodiment in which the fluid pressure cylinder of the present invention is applied to an air-hydro cylinder will be described in detail with reference to FIGS. 1 to 7.
(1) Outline of the Embodiment The air-hydro cylinder of the present embodiment includes a pneumatic piston 21 that receives air pressure from a pneumatic chamber, a first hydraulic piston 31 that is directly connected to the pneumatic piston 21, and a second hydraulic piston 41. ing. The second hydraulic piston 41 has a first plate-shaped portion 50 that partitions the hydraulic chamber into a second hydraulic chamber 42 and a third hydraulic chamber 43, and an output rod 52 that is integrally formed with the first plate-shaped portion 50. There is. A communication hole 51 is formed in the first plate-shaped portion 50 in the thickness direction thereof, and the oil OL moves through the communication hole 51 so that the first plate-shaped portion 50 moves left and right without receiving oil pressure. The second plate-shaped portion 60 functions as a closing means for closing the communication hole 51 by coming into contact with the first plate-shaped portion 50.

The first plate-shaped portion 50 is urged toward the third hydraulic chamber 43 by the coil spring 70, and synchronizes with the movement of the pneumatic piston 21 in the output direction via the coil spring 70 to the second plate-shaped portion 60. Move until it touches. During the movement synchronized with the pneumatic piston 21, the first plate-shaped portion 50 moves largely with a low propulsive force (pneumatic pressure) without receiving hydraulic pressure due to the movement of the oil OL through the communication hole 51.
When the contact with the second plate-shaped portion 60 is made, the communication hole 51 is closed, so that the first plate-shaped portion 50 constitutes the end surface of the second hydraulic chamber 42 and moves under hydraulic pressure. During this period, the first plate-shaped portion 50 and the second plate-shaped portion 60 move with a high propulsive force (hydraulic pressure) in a short stroke at the end.
When the pneumatic piston 21 that has moved the entire stroke returns to the retracting direction, the oil pressure in the second hydraulic chamber 42 drops, and the second plate-shaped portion 60 returns to the contact position by the urging force of the coil spring 64. After the contact position, the first plate-shaped portion 50 retracts and moves to the original movement start position in synchronization with the pneumatic piston 21.

According to this embodiment, the operating range of what is driven by the output rod 52 can be increased. Then, the large drive portion is driven by air pressure, and the short stroke near the end of the stroke can be driven by hydraulic pressure. As a result, the pneumatically driven portion can be fast-forwarded and the hydraulically driven portion can be minute-forwarded.
Since the first plate-shaped portion 50 and the output rod 52 move to the contact position via the coil spring 70, even if they collide with something during the operation, the impact can be absorbed by the deflection of the coil spring 70.

(2) Details of the Embodiment Hereinafter, the first embodiment in which the fluid pressure cylinder of the present invention is applied to the air-hydro cylinder will be described.
FIG. 1 is a cross-sectional view showing the overall configuration of the air hydro cylinder according to the present embodiment. In each of the following cross-sectional views, since it is difficult to distinguish the code from the leader line, the diagonal line representing the cross section of each part is omitted. However, in FIG. 1, which shows the overall configuration, in order to clarify the distinction of each part, the space where the supply air (air) AR and the oil OL in each cylinder exist is distinguished by halftone dots having different densities. There is.
As shown in FIG. 1, the air-hydro cylinder (fluid pressure cylinder) 1 includes a cylinder body (housing) 10 and lids 11 and 13 arranged at both ends of the cylinder body 10.

Inside the cylinder body 10, a pneumatic cylinder 20 having a central axis (predetermined direction) C and a central axis of the cylinder body 10 in common and having an inner surface of the cylinder, a first hydraulic cylinder 30, and a second hydraulic cylinder 40 are in series. Is formed in.
In the cylinder body 10 of the present embodiment, the inner diameter of the pneumatic cylinder 20 is 50 mm, the inner diameter of the first hydraulic cylinder 30 is 16 mm, and the inner diameter of the second hydraulic cylinder 40 is 60 mm.
The pneumatic cylinder 20 is formed by being opened to one end surface (left side in the drawing) of the cylinder body 10, and the opened portion is closed by a lid 11. The lid 11 is fixed to the cylinder body 10 by a mounting mechanism (for example, a screw) (not shown).
A second output hole 111 for extending the output rod 52 to the outside is formed in the central portion of the lid 11.
The first hydraulic cylinder 30 is formed so that one side is open to the pneumatic cylinder 20 and the other side is open to the second hydraulic cylinder 40. That is, the first hydraulic cylinder 30 communicates the pneumatic cylinder 20 with the second hydraulic cylinder 40.
The second hydraulic cylinder 40 is formed so that one side communicates with the first hydraulic cylinder 30 and the other side is open to the other end face of the cylinder body 10. The second hydraulic cylinder 40 is counterbored so that its inner diameter is two, that is, the inner diameter on the open portion side is larger than the inner diameter on the first hydraulic cylinder 30 side, so that both diameters are different. A step portion 44 is formed. The opening portion of the second hydraulic cylinder 40 is closed by fixing the lid 13 to the cylinder body 10 with a plurality of screws 14.

In the cylinder body 10, a substantially plate-shaped pneumatic piston (third piston) 21 is provided in the pneumatic cylinder 20 so as to be reciprocally movable along the central axis C direction, and a substantially plate-shaped first hydraulic piston (first piston) is provided. A second hydraulic piston (second piston) 41 having a first plate-shaped portion 50 and a second plate-shaped portion 60 having the same diameter arranged in parallel to each other in the first hydraulic cylinder 30 is a second hydraulic cylinder. Each is arranged in 40.
In the following specification, the direction from the first hydraulic piston 31 to the second hydraulic piston 41 in the central axis C direction is referred to as an "output direction", and the direction from the first hydraulic piston 31 to the pneumatic piston 21 is "retracted". "Direction".
More specifically, the clamper 530 that actually outputs is arranged in the retracting direction with respect to the pneumatic cylinder 20, but the clamper 530 pulls the work (object) toward the pneumatic cylinder 20 and presses it to grip it. Therefore, the direction of the second hydraulic piston 41 is the output direction.
The inner diameter of the pneumatic cylinder 20 is formed to be larger than the inner diameter of the first hydraulic cylinder 30. On the other hand, the inner diameter of the portion of the second hydraulic cylinder 40 where the oil OL is filled is formed to be larger than the inner diameter of the first hydraulic cylinder 30.
That is, the projected area of the pneumatic piston 21 on the plane in contact with the supply air AR in the working chamber 23A on the vertical plane with respect to the central axis C direction is Sa, and the projected area of the first hydraulic piston 31 on the plane in contact with oil is the same vertical plane. S1, the projected area of the surface where the first plate-shaped portion 50 is in contact with the oil OL in the second hydraulic chamber is S21, and the surface where the second plate-shaped portion 60 is in contact with the oil OL in the third hydraulic chamber is the same vertical. When the projected area on the surface is S22, each area is formed so as to have the following relationship.
Sa> S1
S1 <S21 <S22
Here, S21 <S22 means that the first plate-shaped portion 50 and the second plate-shaped portion 60 are housed in the second hydraulic cylinder 40 having the same diameter, but the first plate-shaped portion 50 communicates with each other. This is because it has a hole 51 and a gap exists between the second hydraulic cylinder 40 and the outer peripheral surface of the first plate-shaped portion 50.
In this embodiment, Sa> S22 is formed, but both projected areas may be Sa ≦ S22.

The first hydraulic piston 31 arranged in the first hydraulic cylinder 30 forms a first hydraulic chamber (first fluid chamber) 32 together with the first hydraulic cylinder 30. The inside of the first hydraulic chamber 32 is filled with oil (internal fluid) OL.
An oil supply hole 17 penetrating the cylinder body 10 is formed on the side surface of the first hydraulic cylinder 30. The oil supply hole 17 is for supplying oil OL that fills the first hydraulic pressure chamber 32, the second hydraulic pressure chamber 42, the third hydraulic pressure chamber 43, the communication hole 51 of the first plate-shaped portion 50, and the like. A sealing screw 18 is arranged in the oil supply hole 17 to prevent the oil OL from flowing out from the first hydraulic chamber 32.
A pressure sensor (not shown) for measuring the hydraulic pressure in each of the hydraulic chambers 32, 42, and 43 can also be arranged on the sealing screw 18. In this case, the sealing screw 18 is provided with a piping hole for taking out the piping of the pressure sensor to the outside.

In the present embodiment, the oil OL is used as the fluid to be filled in the hydraulic chambers 32, 42, 43 and the communication hole 51 from the oil supply hole 17, but the fluid to be filled is not limited to the oil OL. However, incompressible fluids are preferred. By using the oil of the incompressible fluid, it is possible to prevent a part of the thrust from being consumed for the compression of the fluid, so that a large thrust can be efficiently generated in the output rod 52.
However, not only the pneumatic cylinder 20 but also both cylinders 30 and 40 may be pneumatic cylinders. In this case, the output (thrust) of the entire pneumatic cylinder can be improved, so that the pneumatic cylinder can have a larger output than a general cylinder.

Further, in the present embodiment, the oil supply hole 17 is formed in the first hydraulic cylinder 30, but it can also be formed in the second hydraulic cylinder 40 and sealed by the sealing screw 18.
When the pressure sensor is arranged on the sealing screw 18, it is preferable to provide the pressure sensor in the first hydraulic chamber 32 or the second hydraulic chamber 42. As will be described later, when the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other, the volume of the third hydraulic chamber 43 may become substantially zero, and the hydraulic pressure cannot be detected. Because.

An annular seal member 35 is provided on the circumferential surface (outer peripheral surface portion) of the first hydraulic piston 31 to prevent the oil OL in the first hydraulic chamber 32 from flowing out to the pneumatic cylinder 20 side.
As the seal member 35, various known members such as a rubber ring formed in an annular shape, including other seal members described later, can be used and are not particularly limited.
The pressure of the supply fluid supplied from the outside is directly or indirectly applied to the surface of the first hydraulic piston 31 opposite to the side of the first hydraulic chamber 32. In the present embodiment, the pressure of the supply air AR supplied from the outside is indirectly applied to the first hydraulic piston 31 via the pneumatic piston 21 and the piston rod 26 described later.
The piston rod 26 is a member in which a first hydraulic piston 31 is formed on one end side and a pneumatic piston 21 is integrally formed on the other end side, and is a first member for coaxially inserting the output rod 52 on the central axis C. It has a hollow structure in which 1 output hole 27 is formed.
Here, the first hydraulic piston 31 side of the first output hole 27 functions as a first through hole, and the pneumatic piston 21 side of the first output hole 27 functions as a third through hole.
Therefore, the first hydraulic piston 31 functions as a first piston having a first through hole formed in the center, and the pneumatic piston 21 functions as a third piston having a third through hole formed in the center.
The first through hole and the third through hole (first output hole 27) have a function of penetrating the output rod 52 and extending it to the outside. One end of the output rod 52 protrudes to the outside in a direction opposite to the output operating direction of the air hydro mechanism. Then, as will be described later, a clamper 530 (claw) for gripping the work can be attached to the tip of the output rod 52 protruding to the outside.

A second hydraulic piston 41 is arranged in the second hydraulic cylinder 40, and the second hydraulic piston 41 includes a first plate-shaped portion 50 and a second plate-shaped portion 60 arranged so as to face each other in parallel.
The second hydraulic piston 41 forms a second hydraulic chamber (second fluid chamber) 42 by the second hydraulic cylinder 40 and the first plate-shaped portion 50, and the first plate-shaped portion 50 and the second plate-shaped portion 60. A third hydraulic chamber (third fluid chamber) 43 is formed by the two facing surfaces of the above and the second hydraulic cylinder 40.
The inside of the second hydraulic chamber 42 and the third hydraulic chamber 43 is filled with oil OL.

If an annular sealing member can be arranged around the first plate-shaped portion 50, it is arranged, and when the outer diameter of the first plate-shaped portion 50 is small and there is no suitable sealing member. Does not place this.
In the latter case, the outer diameter of the first plate-shaped portion 50 is made slightly smaller than the inner diameter of the second hydraulic chamber 42, and the outer peripheral surface of the first plate-shaped portion 50 and the inner peripheral surface of the second hydraulic chamber 42 A gap for sliding (to avoid friction between the first plate-shaped portion 50 and the second hydraulic cylinder 40) is provided between them. Since the oil OL flows between the second hydraulic chamber 42 and the third hydraulic chamber 43, the first plate-shaped portion 50 is intended to move independently of the second plate-shaped portion 60. Such a gap may be provided. In this embodiment, the seal member is not arranged.
The first plate-shaped portion 50 is formed with a communication hole 51 that connects the second hydraulic chamber 42 and the third hydraulic chamber 43 and allows oil OL to flow between the second hydraulic chamber 42 and the third hydraulic chamber 43. Has been done. The communication holes 51 of the present embodiment are formed at a plurality of locations (for example, four locations) on concentric circles, but at least one or more may be formed. Further, when forming a plurality of them, they do not necessarily have to be on concentric circles.
The communication hole 51 functions as a communication portion that connects the second fluid chamber 42 and the third fluid chamber 43.
When the oil OL is circulated in the gap provided on the outer peripheral surface of the first plate-shaped portion 50, the gap can be used as the communication portion and the communication hole 51 can be omitted.
In this case, the gap can be regarded as having the communication holes 51 continuously formed over the entire circumference of the outer peripheral portion of the first plate-shaped portion 50.
Further, the second plate-shaped portion 60 is provided with an annular seal member 65 on its circumferential surface.

At the center of the first plate-shaped portion 50, a cylindrical output rod 52 extending convexly toward the lid 11 side (retracting direction side) is arranged. The output rod 52 penetrates the first output hole 27 formed in the center of the piston rod 26 in a sliding state, and also penetrates the second output hole 111 formed in the center of the lid 11 to the outside of the lid 11. It has been postponed.
An annular sealing member 36 for preventing oil OL leakage is provided between the outer circumference of the output rod 52 and the inner circumference of the first output hole 27.
In addition to this, an annular seal member 112 is provided between the outer circumference of the output rod 52 and the inner circumference of the second output hole 111, and an annular seal member 112 is provided between the outer circumference of the lid 11 and the inner circumference of the cylinder body 10. A seal member 113 is provided.
Although the output rod 52 of the present embodiment is integrally formed with the first plate-shaped portion 50, it may be fixed to the first plate-shaped portion 50 by various methods such as screwing.

A plurality of coil springs (first urging members) 64 are arranged at equal intervals on the circumference centered on the central axis C between the second plate-shaped portion 60 and the lid 13. A recess for accommodating the end portion of the coil spring 64 is formed on both facing surfaces of the second plate-shaped portion 60 and the lid 13 according to the arrangement position of the coil spring 64.
The plurality of coil springs 64 are arranged in a compressed state. As a result, when the first plate-shaped portion 50 and the second plate-shaped portion 60 are in contact with each other, the second plate-shaped portion 60 is moved away from the lid 13 in the retracting direction (direction away from the lid 13). Be urged.
Further, a through hole 131 penetrating the lid 13 is formed on the central axis C of the lid 13. The through hole 131 functions as a ventilation hole.

The second plate-shaped portion 60 is formed with a flange 67 that functions as a locking means on the surface on the lid 13 side. The flange 67 is formed to be larger than the inner diameter of the small diameter portion (the lid 11 side of the step portion 44) of the second hydraulic cylinder 40 and smaller than the large diameter portion (open end side of the step portion 44), and the large diameter portion. To move.
The second plate-shaped portion 60 urged in the retracting direction by the coil spring 64 is locked when its flange 67 comes into contact with the stepped portion 44 of the second hydraulic cylinder 40.

Since the step portion 44 and the flange 67 are configured to realize a function of locking the second plate-shaped portion 60 urged by the coil spring 64 at a predetermined position, the function can be realized. If there is, other configurations are possible.
For example, instead of the step portion 44 and the flange 67, a recess (groove portion) along the center line C direction on the inner peripheral surface of the second hydraulic cylinder from the open end of the second hydraulic cylinder 40 to the position corresponding to the step portion 44. A plurality of radial protrusions to be fitted with the concave portion are formed on the outer peripheral surface of the second plate-shaped portion 60. As a result, in the second plate-shaped portion 60 urged by the coil spring 64, the convex portion of the second plate-shaped portion 60 slides in the concave portion (groove) of the second hydraulic cylinder 40 in the center line C direction. It is locked by contacting the end surface of the recess (groove) (the end surface functions as a step portion).

As described above, the output rod 52 is formed in the first plate-shaped portion 50, and the output rod 52 penetrates the first output hole 27 and the second output hole 111 and extends to the outside of the lid 11. There is.
A clamper 530 for holding the work is attached to the tip of the output rod 52 extending from the lid 11 by a mounting screw 521.
The clamper 530 is fixed so as to extend the claw portion in a direction perpendicular to the axis of the output rod 52.
Then, when the first plate-shaped portion 50 moves in the output direction, the tip of the claw portion pulls the work in the direction of entering the inside of the pneumatic cylinder 20 and fixes the work.

Further, a cam mechanism 80 is formed between the lid 11 and the output rod 52. When the work is attached / detached, the clamper 530 is swiveled around the central axis C by the cam mechanism 80, and the work is attached / detached. It is designed to prevent interference between the work and the clamper 530.
The cam mechanism 80 is formed between the outer circumference of the end portion of the output rod 52 on the retracting direction side and the second output hole 11 of the lid 11. The cam mechanism 80 has a spirally twisted groove 81 formed on the outer peripheral surface of the output rod 52 and functioning as a cam lead, and a tip protruding from the second output hole 111 of the lid 11, and the tip is fitted in the groove 81. It is composed of matching pins 83.
The pin 83 is inserted and fixed in the pin hole 82 formed from the outer periphery of the lid 11 to the second output hole 111.

The tip diameter of the pin 83 is set to a clearance fit that is appropriately smaller than the width of the groove 81. When the output rod 52 moves in the axial direction, the pin 83 fits the groove 81 and the output rod 52 becomes a groove. It rotates around the central axis C following the twist of 81.
Further, in order to smoothly rotate the output rod 52, a thrust bearing 71 is provided on the first hydraulic cylinder 30 side of the output rod 52, and a thrust bearing 522 is provided on the pneumatic chamber 22 side. These thrust bearing structures reduce the frictional force between the turning side and the non-turning side.

In order to show the shape of the groove 81 in an easy-to-understand manner, FIG. 1 is also added with a view of the groove 81 developed in a plane corresponding to the front view.
As shown in the front view, at the end portion (end portion on the retracting direction side) of the groove portion 81, the spiral structure is terminated and a straight groove portion 300 formed parallel to the central axis C is formed. When the tip of the pin hole 82 traces the straight groove portion 300, the output rod 52 moves without rotating, and after the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other, it moves with a large thrust by hydraulic pressure. To do.
The spiral portion of the cam mechanism 80 corresponds to the fast-forward operation of the output rod 52 by air pressure, and the linear groove portion 300 corresponds to the stroke by hydraulic pressure required for the clamp.
Therefore, in the air-hydro cylinder 1, the clamper 530 is swiveled at the fast-forward portion of the output rod 52, and in the stroke of gripping the work, the swivel of the clamper 530 is stopped to grip the work, and a sufficient gripping force is applied by hydraulic pressure. To demonstrate.

With the above configuration, the clamper 530 attached to the tip of the output rod 52 rotates around the central axis as the output rod 52 moves back and forth, so that this mechanism does not interfere with the work when the work is attached or detached. The clamper 530 can be retracted to the position.
Further, the air-hydro cylinder 1 can make only the stroke required for the clamp hydraulic.
A groove 81 may be formed on the inner peripheral surface of the second output hole 111, and a pin 83 may be provided on the output rod 52.

As described above, the cam mechanism 80 functions as a rotation mechanism that rotates the output rod around the central axis when the output rod moves, and the rotation mechanism operates the end portion of the housing (cylinder body 10). It is formed between the lid 11 to be closed and the output rod 52.
More specifically, the rotation mechanism is formed on the output rod 52, the pin 83 that functions as a protrusion member formed on one side of the sliding surface facing the output rod 52, and the other side. The output rod 52 is rotated by a sliding mechanism with the groove 81 twisted in the moving direction of the output rod 52 while being fitted with the protruding member.

In the first hydraulic chamber 32, a coil spring (second urging means) 70 having a coil inner diameter larger than the diameter of the output rod 52 is arranged on the outer circumference of the output rod 52 in a compressed state. As a result, one end of the coil spring 70 is in contact with the first hydraulic piston 31, and the other end is in contact with the first plate-shaped portion 50.
The coil spring 70 is formed so that its spring constant is smaller than the spring constant when the entire plurality of coil springs 64 are combined.

By the way, the inner diameter of the second output hole 111 is formed to be larger than the inner diameter of the first output hole 27, and correspondingly, the outer diameter of the output rod 52 is the first output on the second output hole 111 side. It is larger than the hole 27 side.
Then, the thrust bearing 522 described above is arranged on the stepped portion 53 having the outer diameter of the output rod 52.

Since the output rod 52 abuts on the end surface of the pneumatic piston 21 via the thrust bearing 522 at the step portion 53 in this way, the movement of the output rod 52 with respect to the piston rod 26 in the output direction is restricted.
On the other hand, the coil spring 70 is arranged in a compressed state between the first hydraulic piston 31 and the first plate-shaped portion 50.

As a result, the first plate-shaped portion 50 is urged by the coil spring 70 in the direction away from the first hydraulic piston 31.
As described above, in the coil spring 70, one end abuts on the first plate-shaped portion 50 and the other end abuts on the first hydraulic piston 31, thereby causing the first hydraulic piston 31 and the first plate-shaped portion 31. It is arranged between 50.

Then, when the first hydraulic piston 31 moves in the output direction, the first plate-shaped portion 50 and the output rod 52 are kept at the same distance until the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other. It moves integrally in the output direction. On the other hand, after the first plate-shaped portion 50 comes into contact with the second plate-shaped portion 60, the pneumatic piston 21 is separated from the stepped portion 53 with respect to the movement of the first hydraulic piston 31, and the output rod 52 is hydraulically output. Move in the direction.
That is, since hydraulic pressure does not act on the first plate-shaped portion 50 during the period when the first plate-shaped portion 50 does not contact the second plate-shaped portion 60, the pressure due to the pneumatic piston 21 is applied to the first plate by the urging force of the coil spring 70. During the period when the first plate-shaped portion 50 and the second plate-shaped portion 60 are in contact with each other, the hydraulic pressure acts on the second hydraulic piston 41. Therefore, the pressure generated by the pneumatic piston 21 is the output rod due to the hydraulic pressure. It is transmitted to 52.

The pneumatic cylinder 20 forms a pneumatic chamber (fourth fluid chamber) 22 together with the lid 11. The pneumatic chamber 22 is divided into two operating chambers (small chambers) 23A and 23B by a pneumatic piston 21 arranged in the pneumatic cylinder 20. The cylinder body 10 is formed with flow holes (openings) 24A and 24B that communicate with the outside with respect to the operating chambers 23A and 23B, respectively.
The supply air AR (supply fluid) AR pressurized to a predetermined pressure flows into the operating chambers 23A and 23B from the outside through the flow holes 24A and 24B, and the supply air AR flows out from the operating chambers 23A and 23B. It is configured to do.
The distribution holes 24A and 24B are provided with air piping stepages 16A and 16B, respectively.

The pneumatic piston 21 is connected to the first hydraulic piston 31 by the piston rod 26, and is configured to move in the central axis C direction together with the first hydraulic piston 31. That is, the pneumatic piston 21 reciprocates in the central axis C direction due to the supply air AR flowing in from the flow holes 24A and 24B, and the piston rod 26 and the first hydraulic piston 31 reciprocate integrally with the reciprocating movement of the pneumatic piston 21. To do.
An annular seal member 25 is provided on the circumferential surface of the pneumatic piston 21 to prevent air from flowing between the operating chambers 23A and 23B.

Next, the operation of the air-hydro cylinder 1 of the present embodiment configured as described above will be described.
In the following operation description, the position where the pneumatic piston 21 moves and the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other will be described as a “contact position”.
FIG. 2 shows the moving state of each part (output rod 52, etc.) accompanying the movement of the pneumatic piston 21 in the air-hydro cylinder 1, and shows the same pre-movement state (most retracted state) as in FIG. FIG. 3 shows a state in which the pneumatic piston 21 is most advanced.
Hereinafter, the position of each part in the state where the pneumatic piston 21 is most retracted (the state of FIGS. 1 and 2) is referred to as a start position.
FIG. 4 shows the states of the first plate-shaped portion 50 and the second plate-shaped portion 60, the stepped portion 44 and the flange 67, and the force acting on the output rod 52 as the pneumatic piston 21 moves in the output direction. Is.
FIG. 4A corresponds to FIG. 2, and FIG. 4C corresponds to FIG.

In the air-hydro cylinder 1 shown in FIG. 1, the output rod 52 is in the start position (the state in which the output rod 52 is moved to the lid 11 side most), and first, the operation when the second hydraulic piston 41 advances from this state will be described. ..
At the starting position where the output rod 52 is most retracted, as shown in FIGS. 1, 2, and 4 (a), the first plate-shaped portion 50 and the second plate-shaped portion 60 are separated from each other in the third hydraulic chamber. 43 is formed (volume ≠ 0), and the step portion 44 and the flange 67 are in contact with each other.

When the second hydraulic piston 41 is advanced in the output direction, first, the supply air AR is supplied from the flow hole 24A to the operating chamber 23A, and the supply air AR in the operating chamber 23B is discharged from the flow hole 24B to the outside.
When the supply air AR is supplied to the operating chamber 23A, the pneumatic piston 21 is pushed by the supply air AR pressure and moves in the output direction.
When the pneumatic piston 21 moves, the first hydraulic piston 31 connected by the piston rod 26 also moves integrally with the pneumatic piston 21 in the output direction.
As described above, in the present embodiment, the pressure of the supply fluid (supply air AR) supplied from the outside is applied to the first hydraulic piston 31 via the pneumatic piston 21 and the piston rod 26, and the pressure will be described later. The second hydraulic piston 41 is driven as described above.

When the first hydraulic piston 31 moves in the output direction, the first plate-shaped portion 50 and the output rod 52 also move in the output direction while being pushed by the coil spring 70.
More specifically, in the output rod 52, the stepped portion 53 of the output rod 52 remains in contact with the thrust bearing 522 due to the urging force of the coil spring 70, and the output rod 52 and the clamper 530 are centered by the cam mechanism 80. It moves in the output direction while rotating around C.
That is, the first plate-shaped portion 50, the output rod 52, and the thrust bearing 522 move in the output direction while rotating around the central axis C by the same distance as the moving distances of the first hydraulic piston 31 and the pneumatic piston 21. ..

Further, as the first hydraulic piston 31 moves in the output direction, the inside of the first hydraulic cylinder 30 and the second hydraulic cylinder 40 (the first hydraulic chamber 32, the second hydraulic chamber 42, the communication hole 51, and the third hydraulic pressure). The oil OL in the chamber 43) is pressurized by the first hydraulic piston 31. The pressure of the pressurized oil OL presses the second plate-shaped portion 60, and the second plate-shaped portion 60 moves in the output direction. As a result, the flange 67 of the second plate-shaped portion 60 is separated from the stepped portion 44.
The movement of the second plate-shaped portion 60 is due to hydraulic pressure, and since the projected area S1 of the first hydraulic piston 31 <projected area S22 of the second plate-shaped portion 60, the same amount as that of the first hydraulic piston 31. The moving distance of the second plate-shaped portion 60 is smaller than the moving distance of the moving first plate-shaped portion 50, which is S1 / S22 of the moving amount of the first hydraulic piston 31.
Therefore, the first plate-shaped portion 50 moves faster until the first plate-shaped portion 50 comes into contact with the second plate-shaped portion 60. Then, as the first plate-shaped portion 50 moves, the volume of the second hydraulic chamber 42 increases, and the volume of the third hydraulic chamber 43 decreases. Along with this volume change, the oil OL in the third hydraulic chamber 43 moves to the second hydraulic chamber 42 through the communication hole 51 of the first plate-shaped portion 50.

In this way, as shown in FIG. 4A2, the first plate-shaped portion 50 and the second plate-shaped portion 60 are separated from each other between the start of movement of the pneumatic piston 21 and the contact position. The step portion 44 and the flange 67 are separated from each other.
Here, the pneumatic piston 21 is assumed to move in the output direction at a speed Va, the moving speed of the first plate-shaped portion 50 in the output direction is V21, and the moving speed of the second plate-shaped portion 60 in the output direction is V22. Then, the step portion 44 and the flange 67 slowly separate from each other at a speed V22 = Va × (S1 / S22).
Further, since the moving speed of the first plate-shaped portion 50 to the contact position is V21 = Va, the first plate-shaped portion 50 approaches the second plate-shaped portion 60 at a speed (Va-V22).

Then, as shown in FIG. 4B, in a state where the pneumatic piston 21 moves and the first plate-shaped portion 50 and the second plate-shaped portion 60 are in contact with each other (contact position), the step portion 44 The flange 67 is in a separated state.
Since the first plate-shaped portion 50 and the second plate-shaped portion 60 are in contact with each other at the contact position, the volume of the third hydraulic chamber 43 is zero. Therefore, the second plate-shaped portion 60 receives the pressure of the second hydraulic chamber 42 via the first plate-shaped portion 50.

Next, as shown in FIG. 4B2, a case where the pneumatic piston 21 further moves from the contact position in the output direction will be described.
The pneumatic piston 21, the piston rod 26, the first hydraulic piston 31, and the output rod 52 always move integrally. Therefore, the output rod 52 and the clamper 530 move at the same speed Va as the pneumatic piston 21.
On the other hand, the speed V21 = Va × (S1 /) of the first plate-shaped portion 50, the second plate-shaped portion 60, and the output rod 52 after the contact is caused by the hydraulic pressure received by the first plate-shaped portion 50 in the second hydraulic chamber 42. Move in S21). Therefore, the stepped portion 53 of the output rod 52 is separated from the further movement of the pneumatic piston 21 (first hydraulic piston 31). At this time, the output rod 52 moves while being rotated around the central axis C by the cam mechanism 80 and sliding in the output direction.

Then, with respect to the further movement of the pneumatic piston 21, the first plate-shaped portion 50 and the second plate-shaped portion 60, the step portion 44 and the flange 67 remain in the state shown in FIG. 4 (b2) at the most advanced position (maximum position). Move to (see (c)).
During this time, the pneumatic piston 21, the piston rod 26, and the first hydraulic piston 31 move at a speed Va due to the air pressure of the supply air AR, and the first plate-shaped portion 50, the second plate-shaped portion 60, and the output rod 52 are second. It moves at a speed of V21 by the hydraulic pressure of the hydraulic chamber 42.
Until the clamper 530 comes into contact with the work and presses it down, the clamper 530 stops rotating around the central axis C due to the action of the linear groove portion 300, and pulls in and presses the work as it is.
More specifically, the clamper 530 rotates in the section from FIG. 4 (a) to (b2), and at the stage of FIG. 4 (c), the workpiece is pressed in the direction of the central axis C without rotating.

As described above, as the pneumatic piston 21 moves in the output direction, the output rod 52 quickly moves a large distance by the pneumatic pressure and the coil spring 70 halfway, and automatically switches to hydraulic pressure from the middle, and shortens the short distance to the end. Move slowly.
That is, until the first plate-shaped portion 50 comes into contact with the second plate-shaped portion 60, the output rod 52 moves quickly and greatly integrally with the first hydraulic piston 31 while being pushed by the coil spring 70.
On the other hand, after the first plate-shaped portion 50 comes into contact with the second plate-shaped portion 60, the first plate-shaped portion 50 and the output rod 52 are separated from the integral movement of the guide rod 33, and the second plate-shaped portion 50 is formed. It slowly moves a short distance (to the final output point) integrally with the unit 60.
As described above, according to the present embodiment, the stroke of the air hydro cylinder 1 (output rod 52) can be lengthened.

Next, the operation when the second hydraulic piston 41 and the output rod 52 are retracted will be described.
Regarding the contact / separation state of each part due to the retreat of the output rod 52 and the like, the state of FIG. 3 to FIG. 2 is changed as the pneumatic piston 21 moves in the retracting direction, and in FIG. 4, (c) to (a). Transition to the state of.
The pneumatic piston 21 is assumed to move (evacuate) in the evacuation direction at a constant evacuation speed va, the evacuation speed of the first plate-shaped portion 50 is v1, and the evacuation speed of the second plate-shaped portion 60 is v2.

First, a case where the air-hydro cylinder 1 is a double-acting cylinder will be described.
When the second hydraulic piston 41 is retracted from the state shown in FIG. 3, first, the supply air AR is supplied from the flow hole 24B to the operating chamber 23B, and the supply air AR in the operating chamber 23A is supplied from the flow hole 24A. To the outside.
When the supply air AR is supplied to the operating chamber 23B, the pneumatic piston 21 is pushed and moved in the retracting direction (leftward in FIG. 1) by the differential pressure of the supply air AR in the operating chambers 23A and 23B.
When the pneumatic piston 21 moves, the first hydraulic piston 31 connected by the piston rod 26 also moves integrally in the retracting direction.

When the first hydraulic piston 31 moves in the retracting direction, the volume of the first hydraulic chamber 32 increases at the same time. Oil OL flows into the first hydraulic chamber 32 from the second hydraulic chamber 42.
On the other hand, the volume of the second hydraulic chamber 42 is reduced due to the outflow of oil OL, and the second hydraulic piston 41 remains in contact with the first plate-shaped portion 50 and the second plate-shaped portion 60. Only S1 / S21 of the movement amount of the first hydraulic piston 31 is forcibly retracted in the retracting direction.
At this time, the urging force in the retracting direction by the coil spring 64 serves as an assist when the first plate-shaped portion 50 and the second plate-shaped portion 60 are retracted in the retracting direction.
The evacuation speed v1 = v2 = va × (S1 / S21) of the second hydraulic piston 41 is slower than the evacuation speed va of the first hydraulic piston 31 (guide rod 33).

Then, when the first plate-shaped portion 50 and the second plate-shaped portion 60 move to the contact position, the stepped portion 53 in the isolated state comes into contact with the thrust bearing 522, and the first plate-shaped portion 50 and the second plate-shaped portion 50 and the second plate-shaped portion 50. It is in a state immediately before being separated from the unit 60.
After that, the first plate-shaped portion 50 and the output rod 52 move while being pulled in the retracting direction.
Therefore, the first plate-shaped portion 50 and the output rod 52 slowly retract at v1 = v2 = va × (S1 / S21) before the contact position, whereas the pneumatic piston 21 retracts after the contact position. Evacuate at the same speed as the speed va.
Therefore, the first plate-shaped portion 50 is separated from the second plate-shaped portion 60, and the oil OL in the second hydraulic chamber 42 flows into the third hydraulic chamber 43 through the communication hole 51.

On the other hand, the second plate-shaped portion 60 continues to receive hydraulic pressure due to the oil OL before and after the contact position. That is, the evacuation speed is received while receiving the hydraulic pressure in the second hydraulic chamber 42 through the first plate-shaped portion 50 before the contact position, and directly receiving the hydraulic pressure in the third hydraulic chamber 43 after passing the contact position. Evacuate slowly with v2 = va × (S1 / S22).
Then, as shown in FIG. 1, when the pneumatic piston 21 retracts to the start position (the position in the most retracted state), the second plate-shaped portion 60 does not receive the hydraulic pressure in the third hydraulic chamber 43, and the flange 67 has the stepped portion 44. Contact with.

Next, a case where the air-hydro cylinder 1 is a single-acting cylinder will be described.
When the second hydraulic piston 41 is retracted from the state shown in FIG. 3, first, the supply of the supply air AR from the flow hole 24A into the operating chamber 23A is stopped, and the supply air AR pressure in the operating chamber 23A is stopped. To the outside. Then, as the air pressure in the operating chamber 23A decreases, the pressure of the oil OL in the first hydraulic chamber 32 and the second hydraulic chamber 42 decreases, and the force with which the oil OL is pushing the second hydraulic piston 41 also decreases.
When the force with which the oil OL pushes the second hydraulic piston 41 becomes smaller than the force with which the coil spring 64 pushes the second hydraulic piston 41, the second hydraulic piston 41 is pushed in the retracting direction by the coil spring 64, and the flange 67 is stepped. Retreat until it comes into contact with the portion 44.

Since the air pressure received from the pneumatic piston 21 of the first hydraulic piston 31 is smaller than the hydraulic pressure of the first hydraulic chamber 32, the hydraulic pressure of the first hydraulic chamber 32 and the pushing force of the coil spring 70 cause the first hydraulic piston 31 to retreat at the end shown in FIG. Retreat to the position.
In this process, the first plate-shaped portion 50 and the output rod 52 are retracted to the contact position via the second plate-shaped portion 60 by the coil spring 64. After passing the contact position, the first plate-shaped portion 50 separates from the second plate-shaped portion 60 and retracts to the final retracted position together with the first hydraulic piston 31 and the output rod 52.

In the case of the single-acting cylinder, since the air pressure from the operating chamber 23B does not act on the pneumatic piston 21, the evacuation speed is considerably slower than the evacuation speed va in the case of the double-acting cylinder.
Therefore, when a quick evacuation operation is required, it is preferable to use the above-mentioned double-acting cylinder or to arrange an evacuation coil spring in which a force in the evacuation direction acts on the first plate-shaped portion 50.
When a retracting coil spring is used, a tension spring is arranged between the surface of the first plate-shaped portion 50 forming the second hydraulic chamber 42 and the surface of the second hydraulic cylinder 40 facing this surface. .. Alternatively, recesses are formed on the opposing surfaces of the first plate-shaped portion 50 and the second plate-shaped portion 60, and when the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other, the recesses on both sides are formed. A compression spring that fits in may be arranged.

Further, one or a plurality of coil springs may be arranged in the operating chamber 23B in order to assist the backward operation.
In this case, the coil spring has a cylinder body in which one end surface of the working chamber 23b (in the direction of the center line C) is in contact with the pneumatic piston 21 in the length direction of the coil spring, and the other end surface is the cylinder body. The other end of the coil spring comes into contact with the end face formed by 10.
When there is one coil spring, a coil spring having a coil inner diameter larger than that of the piston rod 26 is used, and the piston rod 26 is arranged inside. When there are a plurality of coil springs, a coil spring having a coil outer diameter smaller than 1/2 of the outer diameter difference between the pneumatic piston 21 and the first hydraulic piston 31 is used, and the piston rods are concentrically centered on the center line C. Arrange so as to surround 26.

Next, the generation of thrust of the second hydraulic piston 41 in the air-hydro cylinder 1 will be described.
First, assuming that the pressure of the supply air AR supplied to the operating chamber 23A is Pa, this pressure Pa acts on the entire projected area Sa of the pneumatic piston 21, so that the thrust Fa received by the pneumatic piston 21 is the following equation. It is represented by (1).
Fa = Pa × Sa… (1)

On the other hand, since the pneumatic piston 21 and the first hydraulic piston 31 are connected by the piston rod 26, the same thrust Fa also acts on the first hydraulic piston 31.
The projected area S1 on the side of the first hydraulic piston 31 in contact with the oil OL and the hydraulic pressure P1 in the first hydraulic chamber 32 are represented by the following equation (2).
P1 = Fa / S1 ... (2)

Therefore, from the equations (1) and (2), the hydraulic pressure P1 in the first hydraulic chamber 32 is represented by the following equation (3).
P1 = Fa / S1 = Pa × Sa / S1 ... (3)
Here, the projected area Sa of the pneumatic piston 21 is larger than the projected area S1 of the first hydraulic piston 31, so Sa / S1> 1. Therefore, it is shown from the equation (3) that the hydraulic pressure P1 in the first hydraulic chamber 32 is higher than the pressure Pa of the supply air AR. That is, the pressure Pa of the supply air AR received by the pneumatic piston 21 can be amplified and transmitted to the oil OL in the first hydraulic chamber 32.

The hydraulic pressure P2 in the second hydraulic chamber 42 and the hydraulic pressure P3 in the third hydraulic chamber 43 are the same as the hydraulic pressure P1 in the first hydraulic chamber 32 according to Pascal's principle, and the following equation (4) is established. ..
P2 = P3 = P1 = Pa × Sa / S1 (= Fa / S1)… (4)

Up to the contact position, the force (thrust) F2 in the output direction of the first plate-shaped portion 50 and the output rod 52 pushed by the first hydraulic piston 31 via the coil spring 70 is the thrust Fa of the pneumatic piston 21. Is almost the same as. To be precise, the thrust F2 is the sum of the force of the coil spring 70 and the difference between the forces received from the second hydraulic chamber 42 and the third hydraulic chamber 43 (difference in projected area = cross-sectional area of the guide rod 33). However, these forces will be omitted here.
Further, before the first plate-shaped portion 50 comes into contact with the second plate-shaped portion 60, the directions of thrusts generated on the second hydraulic chamber side end surface and the third hydraulic chamber side end surface of the first plate-shaped portion 50 are opposite to each other. Therefore, the output of the first plate-shaped portion 50 is offset.

On the other hand, after the contact position, the hydraulic pressure P2 in the second hydraulic chamber 42 is received by the entire projected area S21 of the first plate-shaped portion 50, so that the force acting on the first plate-shaped portion 50 and the output rod 52 in the output direction. (Thrust) F2 is expressed by the following equation (5).
F2 = P2 x S21 ... (5)
Here, from the equations (4) and (5), the thrust F2 acting on the first plate-shaped portion 50 and the output rod 52 is represented by the following equation (6).
F2 = Fa × (S21 / S1) ... (6)

Since the projected area S21 of the first plate-shaped portion 50 that receives the hydraulic pressure of the second hydraulic chamber 42 is larger than the projected area S1 of the first hydraulic piston 31, S21 / S1> 1.
Therefore, from the equation (6), it is shown that the thrust F2 acting on the output rod 52 is S21 / S1 times larger after the contact position than with Fa before the contact position.

According to the above configuration, the thrust F2 of the output rod 52 is the thrust related to the supply air AR applied to the first hydraulic piston 31 before the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other. It is almost the same as Fa, but during this time, it can move together with the pneumatic piston 21 (via the coil spring 70) in a large and fast manner.
On the other hand, after the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other, the projected area S21 of the first plate-shaped portion 50 is formed larger than the projected area S1 of the first hydraulic piston 31. At the same time, since the first hydraulic chamber 32 and the second hydraulic chamber 42 are filled with oil OL, the supply air AR added to the first hydraulic piston 31 is applied to the first plate-shaped portion 50 and the output rod 52. A large thrust F2 (according to the equation (6)) can be generated by multiplying the force Fa related to the above by the projected area ratio (S21 / S1) of the first hydraulic piston 31 and the first plate-shaped portion 50.

For example, it is assumed that the total stroke of the pneumatic piston 21 is 15 mm, and when the piston 21 moves by 10 mm, the first plate-shaped portion 50 and the second plate-shaped portion 60 come into contact with each other.
In this case, when the pneumatic piston 21 moves 10 mm in the output direction to the contact position, the output rod 52 also moves integrally with the output rod 52 by 10 mm with the same stroke. During this time, the second plate-shaped portion 60 moves by 2 mm (air drive stroke).
On the other hand, while the pneumatic piston 21 further moves 5 mm to the foremost position after the contact, the output rod 52 is only 1 mm together with the first plate-shaped portion 50 and the second plate-shaped portion 60 due to the hydraulic pressure of the second hydraulic chamber 42. Move (hydraulic drive stroke). Although the amount of movement of the output rod 52 during this period is as small as 1 mm, a thrust F2 (S21 / S1 times) larger than that of Fa can be generated.

For comparison, when the air-hydro cylinder of Patent Document 1 is formed in the same size as this embodiment, even if the pneumatic piston 15 moves by 15 mm for the same total stroke as in the embodiment, the protruding portion 39 of the second hydraulic piston 39. (Corresponding to the output rod 52 of this embodiment) is a movement of 3 mm. Since the protrusion 39 moves hydraulically in the entire section, it moves with a strong thrust of F2.

In the present embodiment, the output rod is generated by the force Fa acting on the first hydraulic piston 31 by setting the distance L (air drive stroke) from the start position to the contact position of the first plate-shaped portion 50 to a desired value. The 52 can be quickly moved by a desired distance L.
On the other hand, by setting the ratio of the projected area S1 of the first hydraulic piston 31 to the projected area S21 of the first plate-shaped portion 50 to a predetermined value, the magnitude of the force Fa acting on the first hydraulic piston 31 can be increased. Regardless, the magnitude of the thrust F2 generated in the second hydraulic piston 41 can be set to a predetermined value.
Specifically, even when only air is supplied to the air-hydro cylinder 1, the output rod 52 is moved quickly and greatly to the contact position, and after the contact position, a large thrust (hydraulic pressure) is slowly applied to a short distance. It can move by generating thrust equivalent to that of a supply cylinder). That is, since it is driven only by the supply air AR, the output rod 52 can be moved with a large thrust after the first large movement and then (after the contact position) without the need for an auxiliary device such as a hydraulic device. Space can be reduced and installation costs can be reduced.

(3) Second Embodiment Next, the second embodiment will be described.
FIG. 5 is a cross-sectional view showing the overall configuration of the air hydro cylinder 1 in the second embodiment.
In the second embodiment, the cam mechanism 80a is provided between the first plate-shaped portion 50 and the second hydraulic cylinder 40. As described above, in the second embodiment, the rotation mechanism by the cam mechanism 80a is formed between the housing (cylinder body 10) and the output rod 52.
In FIG. 5, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted as appropriate, and different parts will be mainly described below.

A ring 84a, which is a cylindrical member whose outer diameter corresponds to the inner diameter of the second hydraulic cylinder 40, is inserted into and fixed to the second hydraulic cylinder 40.
One end of the ring 84a is in contact with the first hydraulic cylinder 30 side end of the second hydraulic cylinder 40, and the other end is the second plate-shaped portion 60 at a position where the flange 67 is in contact with the stepped portion 44. It touches the end of the cylinder.
In this case, since the end portion of the ring 84a and the second plate-shaped portion 60 come into contact with each other to restrict the movement of the second plate-shaped portion 60 toward the first plate-shaped portion 50, the flange 67 and the step portion 44 are separated from each other. Not necessarily necessary.

The first plate-shaped portion 50 is inserted into the inner peripheral portion of the ring 84a, and the inner peripheral surface 47a of the ring 84a functions as a piston cylinder (second hydraulic cylinder 40) of the first plate-shaped portion 50.
Therefore, the outer diameter of the first plate-shaped portion 50 has a size suitable for sliding on the inner circumference of the ring 84a, and the space surrounded by the inner peripheral surface 47a is the first plate-shaped portion 50. It is divided into a second hydraulic chamber 42 and a third hydraulic chamber 43.
Further, it is assumed that the relations such as Sa> S1 and S1 <S21 <S22 are satisfied as in the first embodiment.

A pin 83a is inserted into the first plate-shaped portion 50 in the radial direction of the first plate-shaped portion 50, and the tip thereof protrudes from the outer peripheral surface of the first plate-shaped portion 50.
On the other hand, a groove 81a twisted with respect to the sliding direction of the first plate-shaped portion 50 is formed on the inner peripheral surface of the ring 84a.
Then, the tip of the pin 83a is fitted into the groove 81a to form a cam mechanism 80a similar to the cam mechanism 80 of the first embodiment.

When the first plate-shaped portion 50 slides on the inner circumference of the ring 84a, the cam mechanism 80a generates a torque for rotating the output rod 52 around the central axis C.
Further, the outer circumference of the ring 84a is fixed by a set screw 85 inserted through a screw hole penetrating the cylinder body 10 so that the ring 84a does not rotate in the second hydraulic cylinder 40 due to the torque.
As described above, in the second embodiment, since the cam mechanism 80a is provided on the output direction side of the air hydro cylinder 1 without providing the cam mechanism 80 on the lid 11, the configuration near the tip of the output rod 52 for holding the work is simplified. It can be miniaturized and miniaturized.
A groove 81a may be formed in the first plate-shaped portion 50, and a pin 83a may be installed in the cylinder body 10.

(4) Third Embodiment In the air hydro cylinder 1 of the third embodiment, as shown in FIG. 6, the inner diameter of each cylinder formed in the cylinder body 10 is 16 mm for the pneumatic cylinder 20 and the first hydraulic cylinder. 30 is formed to be 6 mm, and the second hydraulic cylinder 40 is formed to be 14 mm.
In FIG. 6, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted as appropriate. Hereinafter, different parts will be mainly described.
As described above, in the third embodiment, since the overall diameter is slimmed down (thinner), male threads are formed on the outer circumferences of both ends of the cylinder body 10, and female threads 12a are formed on the lid 11a side. , The female screw 14a is formed on the lid 13a side and is screwed. In order to prevent the screwed portion from rotating due to vibration or the like, the screwed portion is fixed by set screws 12b and 14b from the circumferential direction.

In the first embodiment, the flow holes 24A and 24B are formed in the direction perpendicular to the central axis C so that the supply air AR is supplied to the pneumatic chamber 22 from the peripheral surface of the pneumatic cylinder 20.
On the other hand, in the third embodiment, the supply air AR is supplied from both ends of the pneumatic cylinder 20 in the central axis C direction. In addition, the flow hole 24A is formed in the lid 11a, and the flow hole 24B is formed outside the first hydraulic cylinder 30 in the cylinder body 10. Both the flow holes 24A and 24B are formed by a radial radial hole provided in the lid 11a and an axial hole in the central axis C direction continuous from the radial hole.
Air piping joints 16A and 16B are connected to the distribution holes 24A and 24B.

In the first embodiment, a plurality of compressed coil springs 64 arranged concentrically are arranged, whereas in the third embodiment, one coil spring 64a having an inner diameter larger than that of the output rod 52 is arranged. There is. Both ends of the coil spring 64a are in contact with the lid 13a and the second plate-shaped portion 60 in a compressed state, thereby urging the second plate-shaped portion 60 in the retracting direction.

On the other hand, in the coil spring 70a for urging the first plate-shaped portion 50 in the output direction, the output rod 52 is inserted inward as in the first embodiment. One end of the coil spring 70a on the retracting direction side is not the first hydraulic cylinder 30, but the end surface on the retracting direction side of the second hydraulic chamber 42, that is, the second hydraulic chamber 42 formed with an inner diameter larger than that of the first hydraulic chamber 32. Is in contact with the end surface (the boundary between the first hydraulic chamber 32 and the second hydraulic chamber 42) on the retracting direction side.
The other end of the coil spring 70a on the output direction side is in contact with the first plate-shaped portion 50 via the thrust bearing 71. The outer diameter of the coil spring 70a is formed to be substantially the same as that of the second hydraulic chamber 42, and is in direct contact with the first plate-shaped portion 50. Thus, one end of the coil spring 70a is the first plate-shaped portion (the first plate-shaped portion (first plate-shaped portion). The first plate-shaped portion 50) is in contact with the other end, and the other end is in contact with the boundary between the first fluid chamber (first hydraulic chamber 32) and the second fluid chamber (second hydraulic chamber 42). It is arranged between the piston (first hydraulic piston 31) and the first plate-shaped portion.
The thrust bearing 71 is provided to prevent friction with the coil spring 70a when the first plate-shaped portion 50 rotates around the central axis C.
The spring constant of the coil spring 70a is smaller than the spring constant of the coil spring 64a. As an example, a spring having a spring constant of 0.21 kgf / mm for the coil spring 70a and a spring constant of 0.9 kgf / mm for the coil spring 64a is used.

The inner diameter of the second hydraulic cylinder 40 forming the second hydraulic chamber 42 is the total movement of the first plate-shaped portion 50 from the inner diameter of the range in which substantially the entire coil spring 70a is located in the state where the pneumatic piston 21 is in the rearmost retracted position. The inner diameter in the range is formed larger.

In the first embodiment, the inner diameter of the second hydraulic cylinder 40 in the third hydraulic chamber 43 portion is formed smaller than the inner diameter of the pneumatic cylinder 20, but in the third embodiment, the latter is smaller than the former. It is formed.
A ring 84b, which is a cylindrical member whose outer diameter corresponds to the inner diameter of the second hydraulic cylinder 40, is inserted into and fixed to the second hydraulic cylinder 40.

In the second embodiment, the ring 84a is formed up to the end of the second plate-shaped portion 60, but in the third embodiment, the cylinder body 10 is thinned in order to slim down the air hydro cylinder 1. , The ring 84b extends to the outer peripheral portion of the second plate-shaped portion 60.
Further, a groove is formed on the outer peripheral surface of the ring 84b over the entire circumference, and a seal member 86b for preventing oil OL leakage is arranged between the groove and the inner peripheral surface of the cylinder body 10. There is.

A cam mechanism 80b composed of a groove portion 81b and a pin 83b is formed between the first plate-shaped portion 50 and the ring 84b. These functions are the same as those of the cam mechanism 80a of the second embodiment.
In the second embodiment, the cylinder body 10 is fixed by a set screw 85a penetrating in the radial direction. However, since the cylinder body 10 of the third embodiment has a thin wall thickness due to slimming, the set screw 85b is attached to the cylinder body 10. The rotation of the ring 84b is prevented by inserting it inside the cylinder body 10 in the longitudinal direction and fitting the tip end into the recess formed on the end surface of the ring 84b.
The cam mechanism 80b may be provided on the lid 11a side as in the cam mechanism 80 of the first embodiment.

The cylinder body 10 is provided with an oil supply hole 17 penetrating to the first hydraulic cylinder 30, and is sealed by a sealing screw 18. A pipe for measuring the pressure of the oil OL in the first hydraulic chamber 32 is pulled out from the sealing screw 18, and a pressure sensor is attached to the pipe.
Other points are the same as those of the second embodiment.

Next, the fourth embodiment will be described.
In the fourth embodiment, the movement amount (flow rate) of the oil OL moving between the second hydraulic chamber 42 and the third hydraulic chamber 43 while the pneumatic piston 21 moves from the current position to the contact position is adjusted. It is provided with an adjustment mechanism. By this adjustment mechanism, the moving speed of each part to the contact position is adjusted.

FIG. 7 is an enlarged cross-sectional view of the periphery of the adjustment mechanism according to the fourth embodiment.
FIG. 7 shows a case where the air-hydro cylinder 1 of the first embodiment is provided with an adjusting mechanism, but the adjusting mechanism of the present embodiment is similarly applied to the second embodiment and the third embodiment. It is possible. Since each part other than the adjustment mechanism is the same as that of the first embodiment, the same reference numerals are given and the description thereof will be omitted as appropriate.
As shown in FIG. 7, as an adjusting mechanism, the first plate-shaped portion 50 is provided with a flow rate adjusting plug 511, and the second plate-shaped portion 60 is provided with a speed switching pin 601. It is not necessary to provide both the flow rate adjusting plug 511 and the speed switching pin 601, and either one may be adopted.

The first plate-shaped portion 50 is provided with a plurality of communication holes 51 through which the oil OL moves as in the other embodiments, but in the present embodiment, the inner peripheral surface of some or all of the communication holes 51 is provided. A female screw is formed on the. Although this female screw is formed on the second hydraulic chamber 42 side of the communication hole 51, it may be formed over the entire length.
A male screw is formed on the outer peripheral surface of the flow rate adjusting plug 511 over the entire length, and can be screwed on and removed by screwing with the female screw of the communication hole 51.
The flow rate adjusting plug 511 is formed with a through hole 512 that functions as a flow rate adjusting orifice along its central axis.
A plurality of types having different diameters of the flow rate adjusting plug 511 and the through hole 512 are prepared. Therefore, by appropriately selecting and changing the number of flow rate adjusting plugs 511 to be used and the through holes 512, the total communication area (center axis) in which the oil OL can move between the second hydraulic chamber 42 and the third hydraulic chamber 43. The projected area on the plane perpendicular to the C direction) can be adjusted. Then, by adjusting the total communication area, the flow rate per unit time for moving between the second hydraulic chamber 42 and the third hydraulic chamber 43 changes, so the moving speed of the first plate-shaped portion 50 and the output rod 52 is selected. , Can be adjusted.
The moving speed of the first plate-shaped portion 50 and the output rod 52 is the moving speed V21 when the flow rate adjusting plug 511 is not attached, whereas the moving speed can be adjusted by lowering the speed by attaching the flow rate adjusting plug 511. .. Hereinafter, the moving speed adjusted by the flow rate adjusting plug 511 is referred to as an adjustment initial speed V21f. The adjustment initial speed V21f is a speed determined by the number of all communication holes 51 and their inner diameters, the number of arrangements of the flow rate adjusting plugs 511 and the inner diameters of the through holes 512.

The speed switching pin 601 is provided on the side of the second plate-shaped portion 60 facing the first plate-shaped portion 50 and at a position coaxial with the central axis of the communication hole 51. The outer diameter of the speed switching pin 601 is formed to be slidable in the communication hole 51. Therefore, since the speed switching pin 601 slides inside with the communication hole 51 closed, the oil OL moving in the communication hole 51 is almost zero.
The speed switching pin 601 of the present embodiment is fixed by press-fitting into a recess provided in the second plate-shaped portion 60, but may be fixed by screwing into the second plate-shaped portion 60. .. By fixing by screwing, the number of speed switching pins 601 attached can be changed, and the amount of change in the total communication area can be changed.
When the speed switching pin 601 projects by Y mm (for example, 2.5 mm) from the end surface of the second plate-shaped portion 60, the speed switching pin 601 closes the communication hole 51 in front of the contact position by Y mm.

A communication hole of the first plate-shaped portion 50 at a position where the surface of the first plate-shaped portion 50 on the third hydraulic chamber 43 side and the tip surface of the speed switching pin 601 on the third hydraulic chamber 43 side are on the same plane. 51 is closed by the speed switching pin 601. Hereinafter, this position is referred to as a flow rate change position. When the pneumatic piston 21 moved by 10 mm from the start position to reach the contact position as illustrated in the first embodiment, the moving distance of the first plate-shaped portion 50 from the start position to the flow rate change position is 7.5 mm.
The first plate-shaped portion 50 and the output rod 52 move at the adjustment initial speed V21f from the start position to the flow rate change position. The velocity Va of the pneumatic piston 21 is also Va = V21f.
Then, while moving from the flow rate change position to the contact position, the flow rate for the closed communication hole 51 is reduced, so that the moving speed of the first plate-shaped portion 50 and the output rod 52 is slowed down. Hereinafter, the moving speed from the speed switching pin 601 closing the communication hole 51 to the contact position is referred to as a buffer speed V21s.

When the speed switching pin 601 of the present embodiment is applied to the first to third embodiments provided with the cam mechanism 80, the protruding length Y mm of the speed switching pin 601 must satisfy the following conditions. is there.
Since the first plate-shaped portion 50 makes a linear motion after the rotational motion by the cam mechanism 80, the flow rate change position where the communication hole 51 is closed by the speed switching pin 601 shifts to the linear motion of the first plate-shaped portion 50. Must be in a later position.
Therefore, the protrusion length Y mm is equal to or less than the distance from the position where the movement of the pin 81 shifts from the spiral groove portion 81 to the straight groove portion 300 and the position where the first plate-shaped portion 50 starts the linear movement to the contact position. Is a condition.
However, when the fourth embodiment is applied to a modified example not provided with the cam mechanism 80 described later, the protrusion length Y mm of the speed switching pin 601 can be appropriately selected within the distance from the start position to the contact position. is there.

The first plate-shaped portion 50 and the output rod 52 move from the start position to the flow rate change position at the adjustment initial speed V21f, and move from the flow rate change position to the contact position at the buffer speed V21s (<V21f). After the contact position, as described in other embodiments, the first plate-shaped portion 50 and the output rod 52 are integrated with the second plate-shaped portion 60 and move at a moving speed V22 (<< V21s) driven by hydraulic pressure. ..

As described above, according to the fourth embodiment, the initial adjustment from the start position is performed by appropriately selecting the number of the flow rate adjusting plugs 511 and the inner diameter of the through hole 512 of the flow rate adjusting plugs 511 to be arranged. The speed V21f can be adjusted.
Further, by disposing the speed switching pin 601, the speed changes from the adjustment initial speed V21f to the buffer speed V21s and from the buffer speed V21s to the moving speed V22 after the contact position, so that the sudden change in the moving speed can be softened. The impact of speed changes can be quietly talked about. The buffer speed V21s can be adjusted by changing the number of speed switching pins 601 arranged. In order to facilitate this adjustment, it is preferable that the speed switching pin 601 is fixed by screwing.

The buffer speed V21s can be adjusted not only by the number of speed switching pins 601 arranged, but also by making the diameter of all or part of the speed switching pins 601 arranged smaller than the inner diameter of the communication hole 51. Good. By reducing the diameter of the speed switching pin 601, the passage area when passing through the communication hole 51 of the oil OL can be reduced without blocking the communication hole 51.
Further, by changing the length of the speed switching pin 601 (the length of the portion protruding from the end surface of the second plate-shaped portion 60), the flow rate change position at which the adjustment initial speed V21f is switched to the buffer speed V21s, that is, The moving distance at the buffer speed V21s can be adjusted.
Further, by attaching the speed switching pins 601 having different lengths to the second plate-shaped portion 60, the positions where the speed switching pins 601 start to close the corresponding communication holes 51 become different positions, so that the contact positions are different. It is possible to adjust the speed in multiple steps (the speed decreases in multiple steps).
Further, the speed switching pin 601 does not have to be cylindrical, and the whole or a part of the portion protruding from the second plate-shaped portion 60 has a conical shape or a truncated cone shape in which the diameter decreases toward the tip end. You may. While the conical portion moves in the communication hole 51, the communication area gradually decreases, so that the speed can be gradually changed instead of the stepwise change in speed.

According to each of the above-described embodiments, the stroke of the output rod 52 that outputs the thrust can be lengthened with respect to the total stroke of the pneumatic piston 21 that receives the supplied thrust. The stroke of the output rod 52 can be 50% or more of the stroke of the pneumatic piston 21.
As a result, the operating range of the operating portion attached to the output rod 52 can be increased, so that it is not necessary to bring the entire actuator closer or retracted depending on the target work, its processing, operation, and the like. ..

Further, the portion where the output rod 52 moves greatly can be driven by the pneumatic cylinder 20, and the short stroke near the end of all strokes can be driven by the hydraulic cylinder having a large thrust. As a result, the pneumatic cylinder portion can be fast-forwarded and the hydraulic cylinder portion can be made into a minute feed.
Since the output rod 52 moves via the coil spring 70 when the pneumatic cylinder is driven, even if the output rod 52 or the operating portion collides with something during the operation, the impact can be absorbed by the deflection of the coil spring 70.
Further, by adopting the adjustment mechanism, the moving speed of the output rod 52 can be adjusted and changed during the movement.

Further, according to each of the above-described embodiments and modifications (including those described later), the pushing direction (outward direction) without changing the arrangement or orientation of the cylinder body 10 with respect to the work or the like to which the air-hydro cylinder 1 applies a force. Instead, a force in the pulling direction (direction of pulling toward the cylinder body 10 side) can be generated.
That is, when the cylinder body 10 is used as a reference, the output direction (movement direction) of the pneumatic piston 21 and the output direction of the first hydraulic piston 31 are the same, and the output rod 52, which is the output shaft, also outputs (moves) in the same direction. To do.
Here, in the prior art, since the output rod 52 penetrates the lid 13 in the moving direction and extends from the cylinder body 10, the direction in which the hydraulic pressure acting on the output rod 52 is generated is the direction away from the cylinder body 10. (Outward direction).
On the other hand, in each of the described embodiments, the output rod 52 penetrates the inside of the pneumatic piston 21, the first hydraulic piston 31, and the lid 11 and extends to the outside on the side opposite to the moving direction. It is configured to be. Therefore, according to the air-hydro cylinder 1 of each embodiment, a force in the pulling direction toward the cylinder body 10 can be generated in the output rod 52.

Further, a cam mechanism 80 for turning the output rod 52 around the central axis C is provided.
As a result, it is possible to prevent the clamper 530 or the like arranged at the tip of the rod 52 from interfering with the work, the work moving device, or the like.

The technical scope of the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.
For example, in the first to third embodiments described, the case where the cam mechanism 80 is provided has been described, but it is also possible not to provide the cam mechanism 80. For example, if the interference between the clamper 530 attached to the output rod 52 and the work is not a problem, or if other measures are taken, the cam mechanism 80 may not be provided.

Further, in each of the described embodiments, the case where the cam mechanism 80 includes the spiral groove portion 81 in order to rotate the output rod 52 has been described.
On the other hand, the cam mechanism 80 may not include the spiral groove portion 81, and the entire moving range of the pin 83 may be the straight groove portion 300 (rotation prevention mechanism).
The cam mechanism 80 in this case functions as a guide for linear drive in the entire movement range of the output rod 52, that is, as a detent.
As a result, even when a rotational force acts on the rod 52 from the outside, the rod 52 can always be driven linearly.
In particular, in the fourth embodiment, when the speed switching pin 601 is provided in the second plate-shaped portion 60, it is prevented that the speed switching pin 601 and the communication hole 50 are out of phase due to rotation, and the speed is surely increased. The switching pin 601 can be guided to the communication hole 51.

Further, in the above embodiment, the present invention has been described by applying it to an air-hydro cylinder driven by supplying air, but the present invention is not limited to the air-hydro cylinder driven by air which is a compressible fluid. It can be applied to cylinders driven by various other fluids such as incompressible fluids.
In the case of a cylinder driven by an incompressible fluid, a larger thrust can be generated in the second hydraulic piston as compared with the case of being driven by a compressible fluid such as air.

Further, in the above embodiment, the pneumatic piston 21 and the first hydraulic piston 31 are connected by the piston rod 26, but the description is not limited to this configuration. For example, the pneumatic piston 21 and the first hydraulic piston 31 and the first hydraulic piston 31 are connected. 1 It can be applied to various other configurations such as one in which a hydraulic piston 31 is integrally formed.

In each of the described embodiments, the coil spring 70 in the compressed state at the start position is arranged, but it may be attached in a state of being connected to the first hydraulic piston 31 and the first plate-shaped portion 50 in a no-load state.
As a result, when the pneumatic piston 21 moves in the output direction, the coil spring 70 maintains the same distance by the urging force in a state where the distance between the first hydraulic piston 31 and the first plate-shaped portion 50 is slightly shortened. While pushing the first plate-shaped portion 50, it is moved in the output direction.
On the other hand, when the pneumatic piston 21 moves in the retracting direction, the first plate-shaped portion 50 to which the coil spring 70 is connected is pulled and moved in a state slightly longer than the no-load state at the start position.
In this way, by mounting the coil spring 70 in the no-load state at the start position, the coil spring 70 can push the first plate-shaped portion 50 in the output direction and pull the first plate-shaped portion 50 in the retracting direction.

1 Air hydro cylinder (fluid pressure cylinder)
10 Cylinder body (housing)
11, 13 Lid 17 Refueling hole 18 Sealing screw 20 Pneumatic cylinder 21 Pneumatic piston (3rd piston)
22 Pneumatic chamber (4th fluid chamber)
23A, 23B operating room (small room)
26 Piston rod 27 1st output hole 30 1st hydraulic cylinder 31 1st hydraulic piston (1st piston)
32 1st hydraulic chamber (1st fluid chamber)
40 Second hydraulic cylinder 41 Second hydraulic piston (second piston)
42 Second hydraulic chamber (second fluid chamber)
43 Third hydraulic chamber (third fluid chamber)
44 Stepped part 47 Inner peripheral surface 50 First plate-shaped part 51 Communication hole 511 Flow rate adjustment plug 512 Through hole (flow rate adjustment orifice)
52 Output rod 53 Step portion 60 Second plate-shaped portion 601 Speed switching pin 64 Coil spring (first urging member)
67 Flange 70 Coil spring (second urging member)
71 Thrust bearing 80 Cam mechanism 81 Groove 82 Pin hole 83 Pin 84 Ring 85 Set screw 86 Seal member 111 Second output hole 112 Seal member 113 Seal member 131 Through hole 300 Straight groove 521 Mounting screw 522 Thrust bearing 530 Clamper C Center axis Predetermined direction)
AR supply air AR (supply fluid)
OL oil (internal fluid)

Claims (17)

With the housing
A first fluid chamber, a second fluid chamber, and a third fluid chamber provided in the housing,
The internal fluid filled in the first fluid chamber, the second fluid chamber, and the third fluid chamber,
A first piston movably provided in a predetermined direction and having a first through hole formed in the center forming one wall surface of the first fluid chamber.
A first plate shape that is provided so as to be movable in the predetermined direction, is arranged between the second fluid chamber and the third fluid chamber, and has a communication portion that connects the second fluid chamber and the third fluid chamber. Department and
A spring disposed between the first piston and the first plate-shaped portion,
An output rod that is arranged in the first plate-shaped portion, penetrates the first through hole, and extends to the outside of the housing on the first piston side in the predetermined direction.
A second plate-shaped portion that is movably provided in the predetermined direction and forms one wall surface of the third fluid chamber is provided.
In the first plate-shaped portion, the projected area of the surface in contact with the internal fluid on the plane perpendicular to the predetermined direction is larger than the projected area of the first piston on the surface in contact with the internal fluid on the plane perpendicular to the predetermined direction. Formed large,
A fluid pressure cylinder in which the first plate-shaped portion and the output rod are driven by applying the pressure of a supply fluid supplied from the outside to the first piston. The fluid pressure cylinder according to claim 1, further comprising a rotation mechanism that rotates the output rod around a central axis when the output rod moves. The fluid pressure cylinder according to claim 2, wherein the rotating mechanism is formed between a lid that closes an end portion of the housing and the output rod. The fluid pressure cylinder according to claim 2, wherein the rotating mechanism is formed between the housing and the output rod. The rotation mechanism is fitted with the output rod, a protrusion member formed on one side of the sliding surface facing the output rod, and the protrusion member formed on the other side, and said. The fluid pressure cylinder according to claim 2, claim 3, or claim 4, wherein the output rod is rotated by a sliding mechanism of a groove portion twisted in a moving direction of the output rod. When the output rod is moved, the output rod is provided with a rotation prevention mechanism for preventing rotation of the output rod around the central axis.
The rotation prevention mechanism is
Of the output rod and the sliding surface facing the output rod, the protrusion member formed on one side and the protrusion member formed on the other side are fitted to each other and the moving direction of the output rod. With a straight groove,
The fluid pressure cylinder according to claim 1, wherein the fluid pressure cylinder is provided. A fourth fluid chamber provided in the housing and
A third piston having a third through hole formed in the center, which is arranged in the fourth fluid chamber so as to be movable in the predetermined direction and applies pressure of a supply fluid supplied from the outside to the first piston. Prepare,
The output rod penetrates the first through hole and the third through hole and extends to the outside.
The fluid pressure cylinder according to any one of claims 1 to 6, wherein the fluid pressure cylinder is characterized in that. The third piston is formed so that the projected area of the surface in contact with the supply fluid on the plane perpendicular to the predetermined direction is larger than the projected area of the first piston.
The fluid pressure cylinder according to claim 7 . The spring is arranged between the first piston and the first plate-shaped portion by having one end contact with the first plate-shaped portion and the other end contacting the first piston-shaped portion. Has been
The fluid pressure cylinder according to any one of claims 1 to 8 , wherein the fluid pressure cylinder is characterized in that. One end of the spring is in contact with the first plate-shaped portion, and the other end is in contact with the boundary between the first fluid chamber and the second fluid chamber, whereby the spring is in contact with the first piston. Arranged between the first plate-shaped portions,
The fluid pressure cylinder according to any one of claims 1 to 8 , wherein the fluid pressure cylinder is characterized in that. The second plate-shaped portion includes an urging member that urges the second plate-shaped portion toward the first plate-shaped portion.
The fluid pressure cylinder according to any one of claims 1 to 10 , wherein the fluid pressure cylinder is characterized in that. A limiting mechanism for limiting the distance between the first piston and the first plate-shaped portion to a predetermined distance or less is provided.
Fluid pressure cylinder according to any one of claims of claims 1 to 11, characterized in that. The communication portion is composed of a plurality of communication holes.
The fluid pressure cylinder according to any one of claims 1 to 12 , wherein the fluid pressure cylinder is characterized in that. At least one part of the communication hole is provided with an inner diameter adjusting member for changing the inner diameter of the hole.
The fluid pressure cylinder according to claim 13 . In the second plate-shaped portion, a protrusion having a predetermined length to be inserted into the communication hole is formed at a position corresponding to a part of the plurality of communication holes.
The fluid pressure cylinder according to claim 13 or 14 . The internal fluid is an incompressible fluid,
The fluid pressure cylinder according to claim 1, wherein the fluid pressure cylinder according to any one of claims 1 to 15 . The internal fluid is a compressible fluid,
The fluid pressure cylinder according to claim 1, wherein the fluid pressure cylinder according to any one of claims 1 to 15 .