JP6755580B2 - X-ray inspection equipment - Google Patents

Description

The present invention relates to an X-ray inspection apparatus.

Patent Document 1 describes an X-ray inspection apparatus that inspects an article by utilizing the transparency of X-rays. This device houses a belt conveyor that conveys articles in the inspection chamber of the housing. The inspection room is provided with a position detection unit that detects whether or not a belt conveyor that shields X-rays is housed in the mounting position.

Japanese Patent No. 4156572

In the apparatus described in Patent Document 1, since the position detection unit is provided in the inspection room, foreign matter may adhere to the position detection unit. In addition, the position detection unit may be damaged during the attachment / detachment work of the belt conveyor or the cleaning of the inspection room.

An object of the present invention is to provide an X-ray inspection apparatus capable of maintaining hygiene in an examination room and reducing the risk of damage to a position detection unit.

The X-ray inspection device according to the present invention is an X-ray inspection device in which an X-ray generating unit that irradiates an examination room with X-rays is arranged in a housing, and is an X-ray shield that can be attached to and detached from the examination room. It has a first detection unit and a second detection unit, and includes a position detection unit that detects a relative position between the first detection unit and the second detection unit, and the first detection unit is provided on an X-ray shield. , The second detection unit is provided in the housing.

In the X-ray inspection apparatus according to the present invention, the relative position between the first detection unit provided on the X-ray shield and the second detection unit provided on the housing is detected, so that the X-ray shield is placed in the inspection chamber. It is possible to non-contactly detect that it is in the mounting position of. Further, since the second detection unit of the position detection unit is provided inside the housing (that is, outside the examination room), it is possible to prevent foreign matter from adhering to the second detection unit, and the X-ray shield can be prevented. It is possible to prevent the second detection unit from being damaged during the attachment / detachment work or the cleaning work in the inspection room. Therefore, hygiene in the examination room can be maintained, and the risk of damage to the position detection unit can be reduced.

The X-ray shield may be a transport unit in which at least a part thereof is arranged in the inspection chamber and transports articles. Further, the X-ray shield may be a shielding curtain provided on the carry-in entrance side and the carry-out exit side of the inspection room, respectively.

The housing may be made of a non-magnetic material, the first detection unit may be a magnet, and the second detection unit may be a magnetic sensor. With this configuration, the position of the first detection unit can be detected without contact.

The X-ray inspection apparatus may include a cover member that protects the first detection unit. In this case, since it is possible to prevent foreign matter from directly adhering to the first detection unit, it is possible to maintain hygiene in the examination room and reduce the risk of damage to the first detection unit.

The X-ray inspection device is provided on a partition wall that separates the inside of the inspection room from the inside of the case among the walls constituting the housing, and further includes a support member that supports the shielding curtain in the inspection room, and the second detection unit is a partition wall. It may be fixed to the support member through the hole formed in. According to this, the second detection unit is accurately positioned with respect to the first detection unit provided on the shielding curtain. Therefore, it is possible to accurately detect whether or not the shielding curtain is housed in the mounting position in the inspection room. In addition, the positioning and fixing of the second detection unit can be easily performed.

The X-ray inspection apparatus may further include a fixing member for fixing the second detection unit and the support member to each other through a hole formed in the partition wall. According to this, the second detection unit and the support member can be easily fixed at a predetermined position on the partition wall.

The end of the support member on the partition wall side is provided with a tapered portion that becomes thicker as it approaches the partition wall, and the curtain holding member of the shielding curtain is formed with a notch that fits into the tapered portion. You may. According to this, the rattling of the shielding curtain is suppressed. Therefore, it is possible to prevent erroneous detection of whether or not the shielding curtain is housed in the mounting position in the inspection room.

The support member may be a rod-shaped member having a columnar shape. According to this, for example, when fixing the support member to the partition wall, the orientation of the support member in the circumferential direction can be ignored. Further, for example, when a bolt is used as the fixing member described above, a screw hole into which the bolt is screwed can be easily formed in the support member.

According to the present invention, it is possible to maintain hygiene in the examination room and reduce the risk of damage to the position detection unit.

It is a perspective view which shows the appearance of the X-ray inspection apparatus which concerns on embodiment. It is a perspective view which shows the structure in the shield box of the X-ray inspection apparatus which concerns on embodiment. It is a front view which omitted the door 3c of the X-ray inspection apparatus shown in FIG. It is sectional drawing along the IV-IV line shown in FIG. It is a perspective view which shows the holding structure of the 1st magnet of a shielding curtain. It is a perspective view which shows the holding structure of the 2nd magnet of a conveyor. It is a perspective view which shows the mounting structure of a shielding curtain and a position detection part. It is a perspective view which shows the mounting structure of a shielding curtain and a position detection part. It is sectional drawing which shows a part of the mounting structure of a shielding curtain and a position detection part.

As an embodiment, an X-ray inspection device, which is an example of an article inspection device, will be described. FIG. 1 is a perspective view showing the appearance of the X-ray inspection apparatus 1. FIG. 2 is a perspective view showing the configuration inside the shield box 3 of the X-ray inspection device 1. As shown in FIGS. 1 and 2, the X-ray inspection apparatus 1 includes a shield box 3, a shielding curtain (an example of an X-ray shielding object) 4, a conveyor (an example of an X-ray shielding object, a transport unit) 5, and an X-ray. It includes an irradiator (X-ray generator) 7, an X-ray line sensor 9, and a monitor 11. The X-ray inspection device 1 is installed on the production line of the article G such as food, and inspects the presence or absence of foreign substances contained in the article G.

The shield box 3 defines a space inside. A conveyor 5, an X-ray irradiator 7, and an X-ray line sensor 9 are housed inside the shield box 3. A pair of openings 3a are provided on both side surfaces of the shield box 3. A door 3c is provided in the lower part of the front surface of the shield box 3, and the inside of the shield box 3 can be accessed by opening the door 3c. The shield box 3 is made of, for example, stainless steel.

The shielding curtain 4 is provided in each of the pair of openings 3a. The shielding curtain 4 is made of rubber containing, for example, lead or tungsten. The shielding curtain 4 suppresses the leakage of X-rays to the outside of the shielding box 3 through each opening 3a.

The conveyor 5 is arranged in the shield box 3 so as to be hung between the pair of openings 3a. The conveyor 5 conveys the article G placed on the belt 5a by rotating the endless belt 5a by a conveyor motor (not shown). As a result, the article G is carried into the shield box 3 through one opening 3a and is carried out of the shield box 3 through the other opening 3a. That is, the pair of openings 3a serve as a carry-in entrance and a carry-out outlet for the article G. Further, by arranging the conveyor 5 so as to be hung between the pair of openings 3a, the leakage of X-rays to the outside of the shield box 3 is suppressed.

The X-ray irradiator 7 is arranged in the shield box 3 so as to be located above the belt 5a. The X-ray irradiator 7 irradiates X-rays so as to cross the belt 5a along the width direction of the belt 5a. As a result, the X-ray irradiator 7 irradiates the article G conveyed by the conveyor 5 with X-rays.

The X-ray line sensor 9 is arranged in the shield box 3 so as to be located below the belt 5a. The X-ray line sensor 9 has a plurality of pixel sensors 9a arranged in a row along the width direction of the belt 5a. As a result, the X-ray line sensor 9 detects the X-rays that have passed through the article G conveyed by the conveyor 5. In this way, the X-ray irradiator 7 and the X-ray line sensor 9 function as an X-ray inspection unit that inspects an article by utilizing the transparency of X-rays.

The monitor 11 is, for example, a liquid crystal display and displays various information such as processed images. The monitor 11 has a touch panel function and functions as an operation interface for receiving input of various conditions by an operator. For example, the monitor 11 displays an operation screen and receives operator instructions such as X-ray irradiation start, X-ray verification end, conveyor 5 drive start, conveyor 5 drive end, and inspection threshold setting.

Next, the arrangement and configuration of the shielding curtain 4 and the conveyor 5 will be described. FIG. 3 is a front view of the X-ray inspection device 1 with the door 3c omitted. FIG. 4 is a cross-sectional view taken along the line IV-IV shown in FIG. As shown in FIGS. 3 and 4, the shield box 3 includes an inspection room T1 inside.

The inspection room T1 is a box-shaped space defined below the inside of the shield box 3, and can be accessed by opening the door 3c shown in FIG. The inspection room T1 is defined by a door 3c, both side portions and a bottom portion 3d of the shield box 3, and partition walls (first partition wall 3e and second partition wall 3f) provided inside the shield box 3. .. The first partition wall 3e is a wall forming the back portion of the inspection chamber T1 and is erected on the bottom portion 3d of the shield box 3 facing the door 3c. The first partition wall 3e is provided so as to be separated from the back portion of the shield box 3. As a result, a gap is provided between the first partition wall 3e and the back of the shield box 3. The second partition wall 3f is a wall constituting the ceiling of the inspection room T1, and is connected to the upper end of the first partition wall 3e and both side portions of the shield box 3. The first partition wall 3e and the second partition wall 3f are made of a non-magnetic material, for example, of non-magnetic stainless steel. In addition, both side portions and the bottom portion 3d of the shield box 3 and the partition wall provided inside the shield box 3 may be integrally formed.

A substrate accommodating chamber T2 is defined inside the shield box 3 and outside the inspection chamber T1. That is, the portion defining the substrate accommodating chamber T2 is the housing. The substrate accommodating chamber T2 is a space including the above-mentioned gap. In the substrate accommodating chamber T2, a control substrate for controlling the components of the X-ray irradiator 7 and the X-ray inspection device 1 is arranged. In the control board, the control unit 20 is composed of, for example, a CPU (Central Processing Unit), a RAM (Random Access Memory), a ROM (Read Only Memory), and the like.

The shielding curtain 4 is arranged in the inspection room T1. The shielding curtain 4 is detachably provided on the second partition wall 3f on the opening 3a side. That is, the shielding curtain 4 is detachably provided with respect to the inspection room T1. The shielding curtain 4 is not limited to the fixing method as long as it is removable. For example, the shielding curtain 4 may be fixed to the second partition wall 3f by bolts and nuts, or is slidably connected to a guide member such as a rail provided on the second partition wall 3f and fixed at the mounting position. May be good. In addition, in FIG. 4, the mounting position of the shielding curtain 4 is shown.

A first magnet (first detection unit) 12a is provided at the end of the shielding curtain 4 on the back side of the X-ray inspection device 1. A first magnetic sensor 12b (second detection unit) that non-contactly detects the position of the first magnet 12a is provided in the substrate accommodating chamber T2 facing the mounting position of the shielding curtain 4. The first magnetic sensor 12b is provided on the first partition wall 3e. When the shielding curtain 4 is arranged at the mounting position, the magnetic field of the first magnet 12a passes through the first partition wall 3e, which is a non-magnetic material, and reaches the first magnetic sensor 12b. The first magnetic sensor 12b detects the position of the first magnet 12a by detecting this magnetic field. That is, the relative position of the first magnet 12a with respect to the fixed position of the first magnetic sensor 12b is detected. From this, the first magnetic sensor 12b can detect that the shielding curtain 4 is set in the mounting position. The first magnetic sensor 12b and the first magnet 12a described above function as the position detection unit 12 of the shielding curtain 4.

At least a part of the conveyor 5 is arranged in the inspection room T1. The conveyor 5 is detachably provided on a support member 6 erected on the bottom 3d of the shield box 3. That is, the conveyor 5 is detachably provided with respect to the inspection room T1. The conveyor 5 is not limited to the fixing method as long as it is removable. For example, the conveyor 5 may be fixed to the support member 6 by bolts and nuts, or may be slidably connected to a guide member such as a rail provided on the support member 6 and fixed at a predetermined position.

A second magnet (first detection unit) 13a is provided at the end of the conveyor 5 on the back side of the X-ray inspection device 1. A second magnetic sensor 13b (second detection unit) that non-contactly detects the position of the second magnet 13a is provided in the substrate accommodating chamber T2 facing the mounting position of the conveyor 5. The second magnetic sensor 13b is provided on the first partition wall 3e. When the conveyor 5 is arranged at the mounting position, the magnetic field of the second magnet 13a passes through the first partition wall 3e, which is a non-magnetic material, and reaches the second magnetic sensor 13b. The second magnetic sensor 13b detects the position of the second magnet 13a by detecting this magnetic field. That is, the relative position of the second magnet 13a with respect to the fixed position of the second magnetic sensor 13b is detected. From this, the second magnetic sensor 13b can detect that the conveyor 5 is set in the mounting position. The second magnetic sensor 13b and the second magnet 13a described above function as the position detection unit 13 of the conveyor 5.

The first magnet 12a and the second magnet 13a are made of a magnetized metal such as neodymium iron boron. As the first magnetic sensor 12b and the second magnetic sensor 13b, those using a Hall element or a coil can be adopted. The first magnetic sensor 12b and the second magnetic sensor 13b are connected to the control board described above by a harness or the like.

Next, the holding structure of the first detection unit will be described. First, the holding structure of the first magnet 12a of the shielding curtain 4 will be described. FIG. 5 is a perspective view showing a holding structure of the first magnet 12a of the shielding curtain 4.

As shown in FIG. 5, the shielding curtain 4 includes a first curtain 4a, a second curtain 4b, and a third curtain 4c in parallel, and the upper end portions thereof are fixed by a pair of curtain holding members 4d. .. The pair of curtain holding members 4d are provided at both ends of the shielding curtain 4 in the longitudinal direction (the front-rear direction of the X-ray inspection device 1). Of the pair of curtain holding members 4d, the curtain holding member 4d provided on the back side of the X-ray inspection device 1 is provided with a first cover portion (cover member) 4e for accommodating the first magnet 12a. The first cover portion 4e covers the lower surface of the first magnet 12a facing the belt 5a. Further, the first cover portion 4e covers the periphery other than the side surface of the first magnet 12a facing the first magnetic sensor 12b. By covering the periphery of the first magnet 12a with the first cover portion 4e, it is possible to prevent the first magnet 12a from being damaged during the attachment / detachment work or the cleaning of the inspection room. Further, since the back side of the X-ray inspection device 1 of the first cover portion 4e is open, it is possible to prevent foreign matter and liquid from accumulating inside the first cover portion 4e, so that hygiene can be maintained. ..

Next, the holding structure of the second magnet 13a of the conveyor 5 will be described. FIG. 6 is a perspective view showing a holding structure of the second magnet 13a of the conveyor 5.

As shown in FIG. 6, the conveyor 5 is provided with a handle portion 5b on the side portion on the front side of the X-ray inspection device 1, and a second cover portion 5c on the side portion on the back side of the X-ray inspection device 1. Has been done. The second cover portion 5c covers the side surface of the second magnet 13a facing the belt 5a. Further, the second cover portion 5c covers the periphery other than the side surface of the first magnet 12a facing the first magnetic sensor 12b. By covering the periphery of the second magnet 13a with the second cover portion 5c, it is possible to prevent the second magnet 13a from being damaged during the attachment / detachment work or the cleaning of the inspection room. Further, since the back side of the X-ray inspection device 1 of the second cover portion 5c is open, it is possible to prevent foreign matter and liquid from accumulating inside the second cover portion 5c, so that hygiene can be maintained. ..

As described above, in the X-ray inspection apparatus 1 according to the present embodiment, since the first magnetic sensor 12b and the second magnetic sensor 13b are provided in the housing (board accommodation chamber T2), the first magnetic sensor 12b It is possible to prevent foreign matter from adhering to the second magnetic sensor 13b, and at the time of attaching / detaching the shielding curtain 4 and the conveyor 5 which are X-ray shields or cleaning the inside of the inspection room T1, the first magnetometer is used. It is possible to prevent the sensor 12b and the second magnetic sensor 13b from being damaged. As described above, the first magnetic sensor 12b and the second magnetic sensor 13b are connected to a member such as a harness that transmits a detection signal, and foreign matter is likely to adhere to the first magnetic sensor 12b and the second magnetic sensor 13b. Therefore, it is effective to provide the first magnetic sensor 12b and the second magnetic sensor 13b outside the examination room T1 in order to maintain hygiene. In this way, the hygiene in the examination room T1 can be maintained, and the risk of damage to the first magnetic sensor 12b and the second magnetic sensor 13b can be reduced.

Further, since the X-ray inspection apparatus 1 according to the present embodiment includes the first cover portion 4e and the second cover portion 5c that protect the first magnet 12a and the second magnet 13a, the first magnet 12a and the second magnet 13a Since it is possible to prevent foreign matter from directly adhering to the surface, it is possible to maintain hygiene in the inspection room T1 and reduce the risk of damage to the first magnet 12a and the second magnet 13a.

Next, the mounting structure of the shielding curtain 4 and the position detection unit 120 will be described in more detail. 7 and 8 are perspective views showing the mounting structure of the shielding curtain 4 and the position detection unit 120. FIG. 9 is a cross-sectional view showing a part of the mounting structure of the shielding curtain 4 and the position detection unit 120. Note that in FIGS. 7 and 8, the first curtain 4a, the second curtain 4b, and the third curtain 4c are not shown.

As shown in FIGS. 7 and 8, a pair of support members 31 are arranged for one shielding curtain 4 in the inspection room T1. The pair of support members 31 are arranged side by side in the transport direction of the article G by the conveyor 5 (hereinafter, simply referred to as “transport direction”), and support one shielding curtain 4. Each support member 31 is provided on the first partition wall (partition wall) 3e, and is provided from the first partition wall 3e to the inspection chamber along the front-rear direction (horizontal direction perpendicular to the transport direction) of the X-ray inspection device 1. It extends within T1. As described above, the first partition wall 3e is a wall that separates the inside of the inspection chamber T1 and the inside of the substrate accommodating chamber T2 among the walls constituting the shield box (housing) 3, and the back of the inspection chamber T1. It is a constituent wall (see FIG. 4).

The support member 31 is a rod-shaped member having a columnar shape. A tapered portion 32 is provided at the end portion 31a of the support member 31 on the side of the first partition wall 3e. The tapered portion 32 has a shape (for example, a truncated cone shape) that becomes thicker as it approaches the first partition wall 3e. The end portion 32a on the first partition wall 31e side of the tapered portion 32 has a constant outer diameter.

In the inspection room T1, one holding member 33 is arranged for each pair of supporting members 31. Each holding member 33 is attached to a second partition wall 3f (see FIG. 4) constituting the ceiling of the inspection room T1. One holding member 33 holds an end portion 31b of each of the pair of supporting members 31 on the side opposite to the first partition wall 3e side. Each holding member 33 is formed with a pair of slits 33a that open on the front side of the X-ray inspection device 1 (that is, the side opposite to the side of the first partition wall 3e).

The shielding curtain 4 has a pair of curtain holding members 41 and 42, and a plurality of rod-shaped members 43. The curtain holding member 41 corresponds to the curtain holding member 4d (see FIG. 5) arranged on the back side of the X-ray inspection device 1 (that is, the side of the first partition wall 3e). Therefore, the curtain holding member 41 is attached with the first detection unit 121 configured by the first magnet 12a. The curtain holding member 41 is formed with a pair of notches 41a that open outward from each other. Each notch 41a fits into the end 32a of each tapered portion 32.

The curtain holding member 42 corresponds to the curtain holding member 4d (see FIG. 5) arranged on the front side of the X-ray inspection device 1. The curtain holding member 42 has a pair of ridges 42a that project outward from each other. Each ridge portion 42a is fitted into each slit 33a of the holding member 33 from the front side of the X-ray inspection device 1.

The plurality of rod-shaped members 43 are arranged side by side in the transport direction. Each rod-shaped member 43 extends along the front-rear direction of the X-ray inspection device 1 and is hung between a pair of curtain holding members 41 and 42. A first curtain 4a, a second curtain 4b, and a third curtain 4c (see FIG. 5) are hung on the plurality of rod-shaped members 43, respectively.

When the shielding curtain 4 is attached to the inspection chamber T1, the curtain holding member 41 is slid from the front side of the X-ray inspection device 1 along the pair of support members 31. Then, each notch 41a of the curtain holding member 41 is fitted into the end portion 32a of each tapered portion 32 from the front side of the X-ray inspection device 1, and each ridge portion 42a of the curtain holding member 42 is fitted on the front side of the X-ray inspection device 1. Fits into each slit 33a of the holding member 33. When the shielding curtain 4 is removed from the inspection chamber T1, the curtain holding member 41 may be slid along the pair of support members 31 toward the front surface of the X-ray inspection device 1.

As shown in FIGS. 8 and 9, a second detection unit 122 composed of the first magnetic sensor 12b and the bracket 12c is arranged at a position facing the first detection unit 121 in the substrate accommodation chamber T2. There is. The second detection unit 122 is unitized with the first magnetic sensor 12b attached to the bracket 12c. The bracket 12c has a pair of legs 12d. The pair of leg portions 12d are located on both sides of the first magnetic sensor 12b in the transport direction, and face each other of the pair of tapered portions 32 via the first partition wall 3e.

As shown in FIG. 9, a screw hole 31c is formed in the end portion 31a of the support member 31 into which the tapered portion 32 is fitted. An insertion hole (hole) 3g corresponding to the screw hole 31c is formed in the first partition wall 3e, and an insertion hole 12e corresponding to the screw hole 31c is formed in the leg portion 12d. The screw holes 31c, the insertion holes 3g, and the insertion holes 12e corresponding to each other are arranged on the same axis L extending along the front-rear direction of the X-ray inspection device 1.

The support member 31 and the leg portion 12d facing each other via the first partition wall 3e are fixed to each other by a bolt (fixing member) 36. The bolt 36 is inserted into the insertion hole 12e and the insertion hole 3g from the substrate accommodating chamber T2 side via the washer 35, and is screwed into the screw hole 31c. As described above, the second detection unit 122 and the support member 31 are fixed to each other by the bolt 36 via the insertion hole 3g formed in the first partition wall 3e.

With the mounting structure of the shielding curtain 4 and the position detecting unit 120 as described above, the second detecting unit 122 is accurately positioned with respect to the first detecting unit 121 provided on the shielding curtain 4. Therefore, it is possible to accurately detect whether or not the shielding curtain 4 is housed in the mounting position in the inspection room T1. Further, the positioning and fixing of the second detection unit 122 can be easily performed.

Further, the second detection unit 122 and the support member 31 are fixed to each other by the bolt 36 via the insertion hole 3g formed in the first partition wall 3e. As a result, the second detection unit 122 and the support member 131 can be easily fixed at a predetermined position of the first partition wall 3e.

Further, the end portion 31a of the support member 31 on the side of the first partition wall 3e is provided with a tapered portion 32 having a shape that becomes thicker as it approaches the first partition wall 3e, and the curtain holding member 41 of the shielding curtain 4 is provided with a tapered portion 32. A notch 41a that fits into the tapered portion 32 is formed. As a result, the rattling of the shielding curtain 4 is suppressed. Therefore, it is possible to prevent erroneous detection of whether or not the shielding curtain 4 is housed in the mounting position in the inspection room T1.

Further, the support member 31 is a rod-shaped member having a columnar shape. As a result, when the support member 31 is fixed to the first partition wall 3e, the orientation of the support member 31 in the circumferential direction can be ignored. Further, a screw hole 31c into which the bolt 36 is screwed can be easily formed in the support member 31.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment.

For example, the present invention uses an article inspection device that inspects an article using an image obtained by using near infrared rays or other electromagnetic waves, an article inspection device that inspects an article using an image captured by a camera, and a magnetic field. It can also be applied to metal detectors that are used for inspection.

Further, the present invention is not limited to the inspection for the presence or absence of foreign substances contained in the article G, and the package is sealed in an article in which the contents such as food are contained in the package such as a film packaging material and shipped. It may be inspected for the contents being caught in the stopper, the contents in the package being damaged, or foreign matter being mixed in the package.

Further, in the above-described embodiment, an example in which the first partition wall 3e and the second partition wall 3f are formed of a non-magnetic material is shown, but at least a part of the first partition wall 3e (the magnetic sensor and the magnet face each other). It is sufficient that the part to be used) is made of a non-magnetic material.

Further, in the above-described embodiment, the magnetic sensor that detects the position of the magnet by using a magnetic field as the position detection unit is shown as an example, but the position detection unit may be another sensor. For example, the position detection unit may be a sensor that detects the position using light or radio waves. In this case, a light or radio wave output device is used as the second detection unit, and at least a part of the first partition wall 3e (where the magnetic sensor and magnet face each other) is made of a material that is transparent to light or radio waves. A member that is formed and reflects light or radio waves may be adopted as the first detection unit.

Further, in the above-described embodiment, an example is shown in which the first cover portion 4e and the second cover portion 5c cover the periphery of the first magnet 12a and the second magnet 13a except for at least one side surface, but the present invention is not limited thereto. For example, it may be configured to cover all of the first magnet 12a and the second magnet 13a, or at least to cover only the surface facing the belt 5a, which is a transport path.

Further, in the above-described embodiment, the position of the shielding curtain 4 and the conveyor 5 is detected, but the position of only one of them may be detected.

Further, in the above-described embodiment, the example in which the magnetic sensor is provided in the substrate accommodating chamber T2 and the magnet is provided in the shielding curtain 4 and the conveyor 5 is shown, but the magnet is provided in the substrate accommodating chamber T2 and the magnetic sensor. May be provided on the shielding curtain 4 and the conveyor 5.

Further, the shielding curtain 4 does not need to be provided at each of the carry-in entrance and the carry-out port of the inspection room T1 so as to block each of the carry-in entrance and the carry-out port of the inspection room T1, and the inspection area in the inspection room T1. On the other hand, it may be provided on the carry-in entrance side and the carry-out exit side of the inspection room T1, respectively.

Further, the pair of support members 31 is not limited to supporting one shield curtain 4, and one or three or more support members 31 may support one shield curtain 4.

Further, the tapered portion 32 may be provided separately from the end portion 31a of the support member 31, or may be provided integrally with the end portion 31a of the support member 31.

1 ... X-ray inspection device, 3 ... Shield box (housing), 3e ... 1st partition wall (partition wall), 3g ... Insertion hole (hole), 4 ... Shielding curtain (X-ray shield), 4e ... 1st Cover part (cover member), 5 ... Conveyor (X-ray shield, transport part), 5c ... Second cover part (cover member), 7 ... X-ray irradiator (X-ray generator), 9 ... X-ray line sensor , 11 ... Monitor, 12a ... 1st magnet (1st detection unit), 12 ... Position detection unit, 12b ... 1st magnetic sensor (2nd detection unit), 13 ... Position detection unit, 13a ... 2nd magnet (1st) Detection unit), 13b ... Second magnetic sensor (second detection unit), 31 ... Support member, 32 ... Tapered part, 36 ... Bolt (fixing member), 41 ... Curtain holding member, 120 ... Position detection unit, 121 ... 1 detection unit, 122 ... second detection unit, G ... article, T1 ... inspection room.

Claims (9)

An X-ray inspection device in which an X-ray generator that irradiates the inspection room with X-rays is arranged in a housing.
An X-ray shield that can be attached to and detached from the examination room,
It has a first detection unit and a second detection unit, and includes a position detection unit that detects a relative position between the first detection unit and the second detection unit.
The wall constituting the housing includes a partition wall that separates the inspection room from the inside of the housing.
The first detection unit is provided on the X-ray shield so as to be located in the inspection chamber via the partition wall .
The second detection unit is an X-ray inspection device provided in the housing so as to be located outside the inspection room via the partition wall . The X-ray inspection apparatus according to claim 1, wherein at least a part of the X-ray shield is arranged in the inspection chamber and is a transport unit for transporting articles. The X-ray inspection apparatus according to claim 1, wherein the X-ray shield is a shielding curtain provided on the carry-in entrance side and the carry-out exit side of the inspection room, respectively. The housing is made of non-magnetic material
The first detection unit is a magnet.
The X-ray inspection apparatus according to any one of claims 1 to 3, wherein the second detection unit is a magnetic sensor. The X-ray inspection apparatus according to any one of claims 1 to 4, further comprising a cover member for protecting the first detection unit. Provided in front Kitsukamatsu Setsukabe, further comprising a support member for supporting the shielding curtain in the examination room,
The X-ray inspection apparatus according to claim 3, wherein the second detection unit is fixed to the support member through a hole formed in the partition wall. The X-ray inspection apparatus according to claim 6, further comprising a fixing member for fixing the second detection unit and the support member to each other through the hole formed in the partition wall. At the end of the support member on the partition wall side, a tapered portion having a shape that becomes thicker as it approaches the partition wall is provided.
The X-ray inspection apparatus according to claim 6 or 7, wherein the curtain holding member of the shielding curtain is formed with a notch that fits in the tapered portion. The X-ray inspection apparatus according to any one of claims 6 to 8, wherein the support member is a rod-shaped member exhibiting a columnar shape.

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