JP6741133B2 - Physical quantity sensor and electronic device - Google Patents

Description

The present invention relates to a physical quantity sensor and an electronic device using the same.

In recent years, an angular velocity sensor that detects an angular velocity has been widely used as a camera shake correction of an imaging device such as a digital camera and a posture control of a mobile navigation system such as a vehicle using a GPS signal. Further, as an angular velocity sensor, there is also known a sensor that can detect the angular velocity around each of three axes orthogonal to each other with one sensor (for example, refer to Patent Document 1).

The sensor described in Patent Document 1 has an annular driving mass, an anchor arranged in the center thereof, an elastic anchor element connecting the driving mass and the anchor, and a substrate 2 to which the anchor is fixed. The angular velocity about each axis is detected while the driving mass is rotationally oscillated.
However, in such a configuration, the vibration of the driving mass is transmitted to the substrate 2 via the elastic anchor element and the anchor, and the vibration leakage occurs. When such vibration leakage occurs, the Q value of the vibration of the sensor decreases (that is, energy loss occurs). When the Q value of the vibration decreases, the desired vibration amplitude cannot be obtained, and the detection sensitivity of the sensor deteriorates. Further, a driving device having a high driving ability is required to obtain the required amplitude, which leads to an increase in size of the sensor.

JP, 2007-271611, A

An object of the present invention is to provide a small physical quantity sensor having a high Q value and high detection sensitivity, and an electronic device using the same.

Such an object is achieved by the present invention described below.
In the physical quantity sensor of the present invention, when two axes orthogonal to each other are a first axis and a second axis,
A ring part that can vibrate in a circular ring,
Four support portions that support the ring portion,
Four beams that connect each of the support portions and a portion of the ring portion that serves as a node of the ring vibration,
A pair of first mass parts that have a movable part and are arranged to face each other in a direction parallel to the first axis via the ring part;
A pair of second mass parts that have a movable part and are arranged to face each other in the direction parallel to the second axis via the ring part;
A pair of first springs connecting each of the first mass parts and the ring part so that each of the first mass parts can vibrate with respect to the ring part in a direction parallel to the first axis. Department,
A pair of second springs that connect each of the second mass parts and the ring part so that each of the second mass parts can vibrate with respect to the ring part in a direction parallel to the second axis. Department,
Vibration for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a plane direction including the first axis and the second axis so as to have mutually opposite phases at a first frequency. Means and
At least one transducer for converting a displacement amount of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electric signal,
The ring portion may vibrate in a ring shape in a direction parallel to the first axis and a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.

The physical quantity sensor of the present invention has two axes orthogonal to each other as a first axis and a second axis,
A ring part that can vibrate in a ring,
Four support portions that support the ring portion,
Four beams connecting each of the support parts and four fixing points that are nodes of the ring vibration of the ring part;
It has a first movable part that is displaceable around an axis parallel to the second axis and a second movable part that is displaceable in a direction parallel to the second axis, and is parallel to the first axis via the ring part. A pair of first mass parts arranged to face each other in different directions,
It has a third movable part that is displaceable around an axis parallel to the first axis and a fourth movable part that is displaceable in a direction parallel to the first axis, and is parallel to the second axis via the ring part. A pair of second mass portions arranged to face each other in different directions,
A pair of first spring parts that connect each of the first mass parts and the ring so that each of the first mass parts can vibrate with respect to the ring part in a direction parallel to the first axis. When,
A pair of second spring parts connecting each of the second mass parts and the ring so that each of the second mass parts can vibrate with respect to the ring in a direction parallel to the second axis. ,
Vibration for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a plane direction including the first axis and the second axis so as to have mutually opposite phases at a first frequency. Means and
A transducer for converting the amount of displacement of the first movable part of each of the first mass parts and the third movable part of each of the second mass parts into an electrical acquisition signal;
A transducer for converting the amount of displacement of the second movable part of each of the first mass parts and the fourth movable part of each of the second mass parts into an electric signal.
The ring portion may vibrate in a ring shape in a direction parallel to the first axis and a direction parallel to the second axis according to the first frequency.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.

The physical quantity sensor of the present invention has a substrate that supports the ring portion,
The substrate is preferably composed of a semiconductor substrate, an insulating substrate, or a composite substrate in which a semiconductor layer and an insulating layer are laminated.
This simplifies the device configuration.
In the physical quantity sensor of the present invention, it is preferable that the ring portion has an outer diameter and an inner diameter, a gap is formed inside the inner diameter, and the ring portion is elastically deformable.
This makes it possible to vibrate the ring portion more efficiently.

In the physical quantity sensor of the present invention, the first spring portion is not deformed in a direction parallel to the second axis and deformed in a direction parallel to an axis orthogonal to the first axis and the second axis, respectively. Regulated,
It is preferable that each of the second spring portions is restricted from being deformed in a direction parallel to the first axis and in a direction parallel to an axis orthogonal to the first axis and the second axis. ..
Thereby, the first mass portion can be stably vibrated in the direction parallel to the first axis, and the second mass portion can be stably vibrated in the direction parallel to the second axis.

In the physical quantity sensor of the present invention, the four support parts are located inside the pair of first mass parts and the pair of second mass parts and outside the ring part, and intersect the center of the ring part. It is preferably provided at a position mirror-symmetrical to the first axis and the second axis.
This makes it possible to reduce the size of the device. Moreover, the ring portion can be stably supported.

In the physical quantity sensor of the present invention, it is preferable that displacement of each of the beams in the radial direction from the center of the ring is restricted.
Thereby, vibration leakage can be prevented or suppressed more effectively.
In the physical quantity sensor of the present invention, it is preferable that the vibrating means is either electrostatically driven or piezoelectrically driven.
Thereby, the 1st mass part and the 2nd mass part can be vibrated efficiently.

In the physical quantity sensor of the present invention, it is preferable that the transducer has an electrostatic type, a piezoelectric type, or a piezoresistive type detection capability.
As a result, the physical quantity sensor has excellent detection ability.
In the physical quantity sensor of the present invention, the transducer provides an angular velocity about the first axis, an angular velocity about the second axis, and an angular velocity about a third axis orthogonal to both the first axis and the second axis. It is preferable to detect.
Thereby, it can be used as an angular velocity sensor.

In the physical quantity sensor of the present invention, it is preferable that the transducer is paired with another transducer to electrically cancel linear acceleration in a predetermined direction.
This improves the detection accuracy of the angular velocity.
In the physical quantity sensor of the present invention, it is preferable that each of the transducers also has a unique resonance frequency.
As a result, the driving can be performed in the resonance mode, so that the angular velocity detection accuracy is further improved.

In the physical quantity sensor of the present invention, the ring vibration of the ring portion contracts in a direction parallel to the first axis and expands in a direction parallel to the second axis, and is parallel to the first axis. It is preferable that the vibration is a state in which the state of expanding in the direction and contracting in the direction parallel to the second axis is repeated.
In the physical quantity sensor of the present invention, each of the first spring portion and each of the second spring portions are connected to a portion of the ring portion that is inclined by 45 degrees from both the first axis and the second axis. Is preferred.
Thereby, it is possible to effectively prevent or suppress the circular vibration of the ring portion from leaking to the outside.

The physical quantity sensor of the present invention is characterized in that a projected outer shape of an assembly of the pair of first mass parts and the pair of second mass parts is substantially circular.
This makes it possible to reduce the size of the device.
The physical quantity sensor of the present invention is characterized in that a projected outer shape of an assembly of the pair of first mass parts and the pair of second mass parts is substantially rectangular.
This makes it possible to reduce the size of the device.

In the physical quantity sensor of the present invention, it is preferable that the vibrating means is connected to the inside of each of the first mass part and each of the second mass parts.
This makes it possible to reduce the size of the device.
In the physical quantity sensor of the present invention, it is preferable that the transducer is connected inside each of the first mass part and each of the second mass parts.
This makes it possible to reduce the size of the device.

The physical quantity sensor of the present invention has two axes orthogonal to each other as a first axis and a second axis,
With an expandable joint part,
Four support portions that are provided at positions inclined by a predetermined angle from both the first shaft and the second shaft that intersect the center of the connecting portion of the connecting portion, and that support the connecting portion;
Four beams connecting each of the supporting parts and the connecting part,
A pair of first mass parts that have a movable part and are arranged to face each other in a direction parallel to the first axis via the ring part;
A pair of second mass parts that have a movable part and are arranged to face each other in the direction parallel to the second axis via the ring part;
A pair of first springs connecting each of the first mass parts and the ring part so that each of the first mass parts can vibrate with respect to the ring part in a direction parallel to the first axis. Department,
A pair of second springs that connect each of the second mass parts and the ring part so that each of the second mass parts can vibrate with respect to the ring part in a direction parallel to the second axis. Department,
Vibration for vibrating at least one of the pair of first mass parts and the pair of second mass parts in a plane direction including the first axis and the second axis so as to have mutually opposite phases at a first frequency. Means and
At least one transducer for converting the displacement of the movable part of each of the first mass parts and the movable part of each of the second mass parts into an electric signal,
When the connecting portion expands and contracts according to the first frequency, the connecting portion between the beam and the connecting portion serves as a node.
This makes it possible to provide a small physical quantity sensor having a high Q value and high detection sensitivity.
The electronic device of the present invention is characterized by using the physical quantity sensor of the present invention.
This makes it possible to provide a highly reliable electronic device.

It is a schematic plan view showing a first embodiment of a physical quantity sensor of the present invention. It is a detailed top view of the physical quantity sensor shown in FIG. FIG. 3 is a plan view for explaining vibration of a ring portion included in the physical quantity sensor shown in FIG. 2. FIG. 3 is a plan view for explaining the configuration of detection means included in the physical quantity sensor shown in FIG. 2. It is a figure for explaining drive of a physical quantity sensor. It is a figure for explaining drive of a physical quantity sensor. It is a figure for explaining drive of a physical quantity sensor. It is a top view which shows 2nd Embodiment of the physical quantity sensor of this invention. It is a top view which shows 3rd Embodiment of the physical quantity sensor of this invention. It is a top view which shows 4th Embodiment of the physical quantity sensor of this invention. It is a top view which shows 5th Embodiment of the physical quantity sensor of this invention. It is a top view which shows 6th Embodiment of the physical quantity sensor of this invention. It is a top view showing a 7th embodiment of a physical quantity sensor of the present invention. It is a top view which shows 8th Embodiment of the physical quantity sensor of this invention. It is an electronic device (notebook type personal computer) provided with the physical quantity sensor of the present invention. It is an electronic device (mobile phone) provided with the physical quantity sensor of the present invention. The electronic device (digital still camera) includes the physical quantity sensor of the present invention.

Hereinafter, a physical quantity sensor of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
<First Embodiment>
1 is a schematic plan view showing a first embodiment of a physical quantity sensor of the present invention, FIG. 2 is a detailed plan view of the physical quantity sensor shown in FIG. 1, and FIG. 3 is a ring included in the physical quantity sensor shown in FIG. 4 is a plan view for explaining the vibration of the part, FIG. 4 is a plan view for explaining the configuration of the detection means included in the physical quantity sensor shown in FIG. 2, and FIGS. 5, 6, and 7 are respectively for the physical quantity sensor. It is a figure for demonstrating drive. In addition, in each figure, for convenience of description, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the X axis (first axis) is the “X axis direction”, the direction parallel to the Y axis (second axis) is the Y axis direction, and the direction parallel to the Z axis (third axis). Is referred to as “Z-axis direction”.

1. Physical quantity sensor The physical quantity sensor 1 of the present embodiment is an angular velocity sensor capable of detecting an angular velocity about the X axis, an angular velocity about the Y axis, and an angular velocity about the Z axis. According to such an angular velocity sensor, since one sensor can independently detect the angular velocities around the three axes, excellent convenience can be exhibited.

As shown in FIG. 1, the physical quantity sensor 1 includes a ring part 31 capable of ring-shaped vibration, four substrate fixing parts (supporting parts) 61, 62, 63, 64 for supporting the ring part 31, and a substrate fixing part 61. , 62, 63, 64 and four beams 71, 72, 73, 74 connecting the portions of the ring portion 31 that serve as nodes of the ring vibration and the movable portion in the X-axis direction through the ring portion 31. A pair of first vibrating parts (first mass parts) 51 and 52 arranged opposite to each other, and a pair of second vibrating parts (second mass parts) having a movable part and opposed to each other in the Y-axis direction via the ring part 31. Part) 53, 54 and the first vibrating portions 51, 52 that couple the first vibrating portions 51, 52 with the ring portion 31 so that the first vibrating portions 51, 52 can vibrate in the X-axis direction with respect to the ring portion 31. The inner spring portions (first spring portions) 81, 82 and the second vibrating portions 53, 54 are arranged so that the second vibrating portions 53, 54 can vibrate in the direction parallel to the Y axis with respect to the ring portion 31. It has a pair of second inner side spring parts (second spring parts) 83 and 84 that connect to the ring part 31. Further, the vibrating means 4 that vibrates the first vibrating portions 51 and 52 in the X-axis direction at the first frequency so as to have mutually opposite phases, and the movable portion and the second vibrating portion included in the first vibrating portions 51 and 52. 53, 54 and a transducer (detection means 9) for converting the amount of displacement of the movable part contained therein into an electric signal.
The ring portion 31 circularly vibrates in the X-axis direction and the Y-axis direction according to the first frequency. According to such a physical quantity sensor 1, since the vibration of the ring portion 31 does not leak to the substrate, it is possible to increase the Q value of the vibration while reducing the size of the device. Therefore, a small physical quantity sensor having excellent detection accuracy can be provided.

Hereinafter, the physical quantity sensor 1 will be described in detail.
As shown in FIG. 2, the physical quantity sensor 1 includes a vibration system structure 3 provided in the XY plane, a substrate 2 that supports the vibration system structure 3, and a vibrating unit 4 that vibrates the vibration system structure 3. , And a detection means 9 for detecting the angular velocity applied to the physical quantity sensor 1.
-Vibration system structure-
As shown in FIG. 2, the vibration system structure 3 includes a ring portion (coupling portion) 31 and a pair of first vibrating portions (first mass portions) 51 arranged to face each other in the X-axis direction via the ring portion 31. , 52, first inner spring portions (first spring portions) 81, 82 that connect the first vibrating portions 51, 52 and the ring portion 31, and a pair that are arranged to face each other in the Y-axis direction via the ring portion 31. Second vibrating parts (second mass parts) 53, 54, second inner spring parts (second spring parts) 83, 84 connecting the second vibrating parts 53, 54 and the ring part 31, and the ring part 31. Inner fixing portions (supporting portions) 61, 62, 63, 64 provided around the periphery of the, and beams 71, 72, 73, 74 connecting the ring portion 31 and the inner fixing portions 61, 62, 63, 64, Outer fixed parts 651, 652, 661, 662, 671, 672, 681, 682 provided outside the vibrating parts 51, 52, 53, 54, and vibrating parts 51, 52, 53, 54 and outer fixed parts 651, The outer spring parts 851, 852, 861, 862, 871, 872, 881, 882 are connected to the outer spring parts 652, 661, 662, 671, 672, 681, 682.

The vibration system structure 3 of the present embodiment is made of silicon as a main material, and has a thin film forming technology (for example, a deposition technology such as an epitaxial growth technology and a chemical vapor deposition technology) on a silicon substrate (silicon wafer) and various types. The above-mentioned respective parts are integrally formed by processing into a desired outer shape by using a processing technique (for example, an etching technique such as dry etching or wet etching). Alternatively, after the silicon substrate and the glass substrate are bonded together, only the silicon substrate is processed into a desired outer shape, whereby the above-mentioned respective portions can be formed.

At least by using silicon as the main material of the vibration system structure 3, excellent vibration characteristics can be realized and excellent durability can be exhibited. Further, it becomes possible to apply a fine processing technique used for manufacturing a silicon semiconductor device, and the physical quantity sensor 1 can be miniaturized. Further, by using silicon as the main material of the vibration system structure 3, the physical quantity sensor 1 can be driven without forming electrodes on the vibration system structure 3 as will be described later. Can be made simpler. Even if a material other than silicon, for example, a material such as an insulator is used, it is possible to form the vibration system structure of the present invention by coating the outer periphery of the material with a metal film.

The main material of the substrate 2 is not limited to silicon, and may be, for example, crystal or various glasses.
In the vibration system structure 3 of the present embodiment, the projected outer shape of the assembly of the vibrating portions 51, 52, 53, 54 is substantially circular in a plan view with the Z axis direction as the normal line. As a result, the physical quantity sensor 1 can be downsized.

(Ring part)
The ring portion 31 has an annular shape in which the outer diameter and the inner diameter are concentric circles, and has no structure inside the inner diameter. In addition, below, the center of the ring part 31 is called "center O."
The ring portion 31 is arranged so that its axis is parallel to the Z axis. The ring portion 31 is elastically deformable, and as shown in FIG. 3, the first vibrating portions 51 and 52 vibrate by the vibrating means 4 so that the ring portion 31 contracts in the X-axis direction and expands in the Y-axis direction. And a second state of expanding in the X-axis direction and contracting in the Y-axis direction. In addition, below, the vibration which repeats a 1st state and a 2nd state is also called "annular vibration."

(First vibrating section)
The first vibrating portion 51 has a plate shape. Further, the first vibrating portion 51 includes a frame portion 511 forming an edge portion of the first vibrating portion 51 and a Z-axis direction displacement portion (first movable portion, which is connected to the frame portion 511 via shaft portions 513 and 514). (Movable part) 512, a comb-teeth-shaped drive electrode 515, and a Y-axis direction displacement part (second movable part, movable part) 516 connected to the frame via a spring part 517.

Similarly, the first vibrating portion 52 also has a plate shape. Further, the first vibrating portion 52 also includes a frame portion 521 that constitutes an edge portion of the first vibrating portion 52 and a Z-axis direction displacement portion (first movable portion, which is connected to the frame portion 521 via shaft portions 523 and 524). The movable portion 522, the comb-teeth-shaped drive electrode 525, and the Y-axis direction displacement portion (second movable portion, movable portion) 526 connected to the frame via the spring portion 527.

Hereinafter, the first vibrating portions 51 and 52 will be described in detail. However, since the first vibrating portions 51 and 52 have the same configuration, the first vibrating portion 51 will be described below as a representative and the first vibrating portion 51 will be described. The description of the vibrating section 52 is omitted.
The outer shape of the frame portion 511 has a fan shape of approximately 90 degrees in a plan view with the Z axis as a normal line. A pair of first openings 511a, a pair of second openings 511b, and a third opening 511c are formed in the frame portion 511.

A plurality of comb-teeth-shaped drive electrodes 515 are arranged in each of the first openings 511a. The drive electrodes 515 extend in the Y-axis direction and are spaced from each other in the X-axis direction. The drive electrode 515 constitutes a part of the vibrating means 4.
Inside each of the second openings 511b, a Y-axis direction displacement portion 516 is provided. The Y-axis direction displacement portion 516 includes a frame portion 516a and a plurality of detection electrodes 516b provided inside the frame portion 516a. The detection electrodes 516b extend in the X-axis direction and are spaced from each other in the Y-axis direction.

Each Y-axis direction displacement portion 516 is connected to the frame portion 511 by four spring portions 517. Each spring portion 517 has a shape extending in the Y-axis direction while reciprocating in the X-axis direction. By making each spring part 517 have such a shape, the spring part 517 can be smoothly expanded and contracted in the Y-axis direction, and at the same time, the spring part 517 can be in a direction other than the Y-axis direction (ie, the X-axis direction and the Z-axis direction). The deformation in the direction) can be effectively prevented or suppressed. Therefore, each Y-axis direction displacement portion 516 can be smoothly displaced in the Y-axis direction.

A Z-axis direction displacement portion 512 is provided inside the third opening 511c. The Z-axis direction displacement portion 512 is connected to the frame portion 511 by shaft portions 513 and 514. The shaft portions 513 and 514 extend in the Y-axis direction and are provided coaxially. Therefore, when the physical quantity sensor 1 receives a stress in the Z-axis direction, the Z-axis direction displacement section 512 rotates around the shaft sections 513 and 514 while twisting and deforming the shaft sections 513 and 514 around the axis.
The first vibrating section 51 has been described above. As described above, the first vibrating portion 52 has the same configuration as the first vibrating portion 51 and is symmetrical with respect to the Y axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as a normal line. Is provided for the purpose. However, the requirement of the present invention is a configuration that minimizes vibration leakage to the substrate 2, and the components need not be completely symmetrical with respect to the center O or Y axis.

(Second vibration part)
The second vibrating portion 53 has a plate shape. Further, the second vibrating portion 53 includes a frame portion 531 forming an edge portion of the second vibrating portion 53, and a Z-axis direction displacement portion (third movable portion, which is connected to the frame portion 531 via the shaft portions 533 and 534). The movable part) 532 and the X-axis direction displacement part (fourth movable part, movable part) 536 connected to the frame via the spring part 537.
Similarly, the second vibrating portion 54 also has a plate shape. In addition, the second vibrating portion 54 also includes a frame portion 541 that constitutes an edge portion of the second vibrating portion 54 and a Z-axis direction displacement portion (third movable portion, which is connected to the frame portion 541 via the shaft portions 543 and 544). The movable part) 542 and the X-axis direction displacement part (fourth movable part, movable part) 546 connected to the frame via the spring part 547.

Hereinafter, the second vibrating portions 53 and 54 will be described in detail. However, since the second vibrating portions 53 and 54 have the same configuration, the second vibrating portion 53 will be described below as a representative and the second vibrating portion 53 will be described. The description of the vibrating section 54 is omitted.
The outer shape of the frame portion 531 has a fan shape of approximately 90 degrees in a plan view with the Z axis as a normal line. The outer shape of the frame portion 531 is the same as the frame portions 511 and 521 of the first vibrating portions 51 and 52. A pair of second openings 531b and a third opening 531c are formed in the frame portion 531.

Inside each of the second openings 511b, an X-axis direction displacement portion 536 is provided. The X-axis direction displacement portion 536 includes a frame portion 536a and a plurality of detection electrodes 536b provided inside the frame portion 536a. The detection electrodes 536b extend in the Y-axis direction and are spaced from each other in the X-axis direction.
The X-axis direction displacement portion 536 as described above is connected to the frame portion 531 by four spring portions 537. Each spring portion 537 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. By making each spring part 537 have such a shape, the spring part 537 can be smoothly expanded and contracted in the X-axis direction, and the spring part 537 can be moved in a direction other than the X-axis direction (that is, the Y-axis direction and the Z-axis direction). The deformation in the direction) can be effectively prevented or suppressed. Therefore, the X-axis direction displacement portion 536 can be smoothly displaced in the X-axis direction.

A Z-axis direction displacement portion 532 is provided inside the third opening 531c. The Z-axis direction displacement portion 532 is connected to the frame portion 531 by the shaft portions 533 and 534. The shaft portions 533 and 534 extend in the X-axis direction and are provided coaxially. Therefore, when the physical quantity sensor 1 receives a stress in the Z-axis direction, the Z-axis direction displacement portion 532 rotates around the shaft portions 533 and 534 while twisting and deforming the shaft portions 533 and 534 around its axis.
The second vibrating portion 53 has been described above. As described above, the second vibrating portion 54 has the same configuration as the second vibrating portion 53, and is symmetrical with respect to the X axis intersecting the center O of the ring portion 31 in a plan view with the Z axis as a normal line. Is provided for the purpose. However, the second vibrating portions 53 and 54 do not have to be completely symmetrical with respect to the center O and the X axis as in the above.

(First inner spring part)
The first inner spring portion 81 connects the first vibrating portion 51 and the ring portion 31. Further, the first inner spring portion 82 connects the first vibrating portion 52 and the ring portion 31. Since the first inner spring portions 81 and 82 have the same configuration as each other, the first inner spring portion 81 will be described below as a representative, and the description of the first inner spring portion 82 will be omitted. To do.

The first inner spring portion 81 is composed of a pair of spring portions 811, 812, and each spring portion 811, 812 has a shape extending in the X-axis direction while reciprocating in the Y-axis direction. Further, the spring portions 811, 812 are provided symmetrically with respect to the X axis intersecting with the center O of the ring portion 31 in a plan view with the Z axis as a normal line. By making each spring portion 811, 812 have such a shape, the first inner spring portion 81 can be smoothly expanded and contracted in the X-axis direction while suppressing (restricting) the deformation in the Y-axis direction and the Z-axis direction. You can Therefore, as described later, it is possible to smoothly vibrate the first vibrating portion 51 in the X-axis direction while expanding and contracting the first inner spring portion 81 in the X-axis direction.

(Second inner spring part)
The second inner spring portion 83 connects the second vibrating portion 53 and the ring portion 31. In addition, the second inner spring portion 84 connects the second vibrating portion 54 and the ring portion 31. Since the second inner spring portions 83 and 84 have the same configuration as each other, the second inner spring portion 83 will be representatively described below, and the description of the first inner spring portion 84 will be omitted. To do.

The second inner spring portion 83 is composed of a pair of spring portions 831 and 832, and each spring portion 831 and 832 has a shape extending in the Y axis direction while reciprocating in the X axis direction. Further, the spring portions 831 and 832 are provided symmetrically with respect to the Y axis that intersects with the center O of the ring portion 31 in a plan view with the Z axis as a normal line. By configuring the second inner spring portion 83 with such a configuration, the second inner spring portion 83 can be smoothly expanded and contracted in the Y axis direction while suppressing (restricting) deformation in the X axis direction and the Z axis direction. You can Therefore, as described later, the second vibrating portion 53 can be smoothly vibrated in the Y-axis direction while the second inner spring portion 83 is expanded and contracted in the Y-axis direction.

(Inner fixed part)
The inner fixing portions 61, 62, 63, 64 have a function of supporting the ring portion 31. Such inner fixed portions 61, 62, 63, 64 are provided inside the four vibrating portions 51, 52, 53, 54, respectively. By arranging the inner fixing portions 61, 62, 63, 64 in this way, the space can be effectively used, and the physical quantity sensor 1 can be downsized. Further, since the length of the beams 71, 72, 73, 74 can be shortened, the ring portion 31 can be supported more stably. Furthermore, by arranging the inner fixing portions 61, 62, 63, 64 in this way, the first vibrating portions 51, 52 and the second vibrating portions 53, 54 can serve as stoppers.

The inner fixing portions 61, 62, 63, 64 are provided at intervals of 90 degrees around the outer circumference of the ring portion 31 in a plan view with the Z axis as a normal line. Specifically, in a plan view with the Z axis as a normal, a pair of axes intersecting the center O of the ring portion 31 and inclined by 45 degrees with respect to the X axis and the Y axis are designated as J1 and J2. At this time, the inner fixing portions 61 and 63 are located on the axis J1 and face each other with the ring portion 31 interposed therebetween. Further, the inner fixing portions 62 and 64 are located on the axis J2 and are arranged to face each other with the ring portion 31 interposed therebetween.
In other words, the four inner fixing portions 61, 62, 63, 64 are provided at positions that are mirror-symmetrical with respect to both the X axis and the Y axis. Thereby, the ring portion 31 can be stably supported.

(Beam)
The beams 71, 72, 73, 74 connect the ring portion 31 and the inner fixing portions 61, 62, 63, 64. The beam 71 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixed portion 61. Similarly, the beam 72 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixed portion 62. Further, the beam 73 extends linearly along the axis J1 and connects the ring portion 31 and the inner fixed portion 63. Further, the beam 74 extends linearly along the axis J2 and connects the ring portion 31 and the inner fixed portion 64.

Such beams 71, 72, 73, and 74 are each a portion inclined by 45 degrees with respect to the respective X-axis and Y-axis of the side surface of the ring portion 31 (fixed point, fixed point of the first group). It is connected to the. As shown in FIG. 3, each of these fixed points is a portion that serves as a node of the ring vibration of the ring portion 31 (that is, a portion where substantially no displacement/deformation occurs). By connecting the beams 71, 72, 73, 74 to such fixed points, the beams 71, 72, 73, 74 do not hinder the ring vibration of the ring portion 31 and cause the ring vibration. Vibration is prevented or suppressed from leaking to the outside of the vibration system structure 3 through the beams 71, 72, 73, 74 and the fixing portions 61, 62, 63, 64. As a result, the Q value of the vibration of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. Further, since the vibration system structure 3 can be efficiently vibrated, the output of the vibrating means 4 can be reduced, and as a result, the physical quantity sensor 1 can be downsized.
Further, the beams 71, 72, 73, 74 are restricted from moving (deforming) in the radial direction (extending direction) with respect to the center O of the ring portion 31. As a result, the ring-shaped portion 31 can be supported more stably by the inner fixing portions 61, 62, 63, 64, and vibration leakage can be more effectively prevented or suppressed.

(Outer fixed part)
The outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 are provided outside the four vibrating portions 51, 52, 53, 54, respectively. The outer fixing portions 651 and 652 are provided corresponding to the first vibrating portion 51 and are separated from each other in the Y-axis direction. Similarly, the outer fixing portions 661 and 662 are provided corresponding to the first vibrating portion 52 and are separated from each other in the Y-axis direction. The outer fixing portions 671 and 672 are provided corresponding to the second vibrating portion 53 and are separated from each other in the X-axis direction. The outer fixing portions 681 and 682 are provided corresponding to the second vibrating portion 54, and are provided apart from each other in the X-axis direction.

(Outer spring part)
The outer spring parts 851, 852, 861, 862, 871, 872, 881, 882 have outer fixing parts 651, 652, 661, 662, 671, 672, 681, 682 and vibrating parts 51, 52, 53, 54. It is connected. Specifically, the outer spring portions 851 and 852 connect the first vibrating portion 51 and the outer fixing portions 651 and 652, and the outer spring portions 861 and 862 connect the first vibrating portion 52 and the outer fixing portion 661. , 656, the outer spring portions 871 and 872 connect the second vibrating portion 53 and the outer fixing portions 671 and 672, and the outer spring portions 881 and 882 fix the second vibrating portion 54 and the outer fixing portion. The parts 681 and 682 are connected.

The outer spring portions 851 and 852 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The outer spring portions 851 and 852 are provided symmetrically with respect to the X axis that intersects with the center O of the ring portion 31.
Similarly, the outer spring portions 861 and 862 have a shape extending in the X-axis direction while reciprocating in the Y-axis direction. The outer spring portions 861 and 862 are provided symmetrically with respect to the X axis intersecting the center O of the ring portion 31.
The outer spring parts 871 and 872 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The outer spring portions 871 and 872 are provided symmetrically with respect to the Y axis that intersects with the center O of the ring portion 31.

Similarly, the outer spring portions 881 and 882 have a shape extending in the Y-axis direction while reciprocating in the X-axis direction. The outer spring portions 881 and 882 are provided symmetrically with respect to the Y axis that intersects with the center O of the ring portion 31. However, it is not essential for the present invention that the outer spring portions 851 and 852, 861 and 862, 871 and 872, 881 and 882 are completely symmetrical with respect to the center O, the X axis, or the Y axis.
The vibration system structure 3 as described above has a unique resonance frequency. Thereby, as will be described later, the vibration system structure 3 can be driven in the resonance mode, and the angular velocity detection accuracy can be improved.

-Substrate-
The substrate 2 supports the vibration system structure 3. As shown in FIG. 2, the substrate 2 has a plate shape and is provided in the XY plane. Then, the inner fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 of the vibration system structure 3 are joined to the upper surface of the substrate 2 to cause vibration. The system structure 3 is fixed and supported on the substrate 2.

The bonding method of the substrate 2 and the inner fixing portions 61, 62, 63, 64 and the outer fixing portions 651, 652, 661, 662, 671, 672, 681, 682 is not particularly limited, and various types such as direct bonding and anodic bonding are used. Depending on the constituent materials of the vibration system structure 3 and the substrate 2, which may be joined using a joining method, a joining member such as an adhesive may be used.
In addition, a concave portion is formed on the upper surface of the substrate 2 (the surface facing the vibration system structure 3), if necessary. The concave portion has a function of preventing contact between the substrate 2 and a portion of the vibration system structure 3 that actually vibrates (for example, the first vibrating portions 51 and 52 and the second vibrating portions 53 and 54).
As such a substrate 2, for example, a semiconductor substrate such as silicon, an insulating substrate such as glass or quartz, or a composite substrate formed by stacking a semiconductor layer and an insulating layer is processed into a desired outer shape by various processing techniques. It is formed by This simplifies the configuration of the physical quantity sensor 1.

-Vibration means-
The vibrating means 4 has a function of vibrating the first vibrating portions 51 and 52 in opposite phases to each other in the X-axis direction at a predetermined frequency (first frequency). That is, the vibrating unit 4 displaces the first vibrating portions 51 and 52 in a direction in which they approach each other (inner side) to the ring portion 31, and the vibrating means 4 separates the first vibrating portions 51 and 52 from each other in a direction (outer side). ) The first vibrating portions 51 and 52 are vibrated so as to repeat the state of displacing to ).

Such vibrating means 4 has a plurality of fixed electrodes 41 provided corresponding to the drive electrodes 515 of the first vibrating portion 51. Each fixed electrode 41 has a pair of comb-teeth-shaped electrode pieces 411 and 412 arranged to face each other in the X-axis direction with a drive electrode 515 interposed therebetween. Similarly, the vibrating means 4 has a plurality of fixed electrodes 42 provided corresponding to the respective drive electrodes 525 of the first vibrating portion 52. Each fixed electrode 42 has a pair of comb-teeth-shaped electrode pieces 421 and 422 arranged to face each other in the X-axis direction with a drive electrode 525 interposed therebetween.

Then, the vibrating means 4 applies an alternating voltage with a phase difference of 180 degrees to each of the electrode pieces 411 and 421 and each of the electrode pieces 412 and 422 by a power source (not shown), so that each drive electrode 515, 525 and each electrode Electrostatic force is generated between the strips 411 and 421 and between the drive electrodes 515 and 525 and the electrode strips 412 and 422, respectively, and the first inner spring portions 81 and 82 and the outer spring portions 851, 852 and 861 are generated. , 862 are expanded and contracted in the X-axis direction, and the first vibrating sections 51, 52 vibrate in the X-axis direction at mutually opposite phases and at a predetermined frequency.

The frequency of the alternating voltage is not particularly limited, but it is preferable that it is substantially equal to the resonance frequency of the vibration system structure 3. As a result, the vibration system structure 3 can be driven in the resonance mode, so that the angular velocity detection accuracy can be improved.
When the first vibrating portions 51 and 52 vibrate in opposite phases, the vibrations are transmitted to the ring portion 31 through the first inner spring portions 81 and 82. Then, when the first vibrating portions 51 and 52 are displaced inward, the ring portion 31 is deformed so as to contract in the X-axis direction and expand in the Y-axis direction, and the first vibrating portions 51 and 52 are When it is displaced outward, it deforms so as to expand in the X-axis direction and contract in the Y-axis direction. That is, the ring portion 31 vibrates in a circular ring in synchronization with the vibration of the first vibrating portions 51 and 52.

Further, when the ring portion 31 is deformed by the ring vibration so as to contract in the X-axis direction and expand in the Y-axis direction, the second displacement portions 53 and 54 are both displaced outward due to the deformation, and conversely, X When deformed so as to expand in the axial direction and contract in the Y-axis direction, both the second vibrating portions 53 and 54 are displaced inward. That is, in synchronization with the ring vibration of the ring portion 31, the second vibrating portions 53 and 54 vibrate in the Y-axis direction in mutually opposite phases.

That is, in the physical quantity sensor 1, by utilizing the ring vibration of the ring portion 31, the first vibrating portions 515 and 52 are displaced inward while the second vibrating portions 53 and 54 are displaced outward. It is possible to vibrate the vibrating portions 51, 52, 53, 54 so that the state in which the first vibrating portions 51, 52 are displaced outward and the second vibrating portions 53, 54 are displaced inward is repeated. it can.

The fixed point to which the beams 71, 72, 73, 74 of the ring portion 31 are connected is a portion that serves as a node of the ring vibration of the ring portion 31 (that is, a portion where substantially no displacement/deformation occurs). Therefore, the circular vibrations of the ring portion 31 are not hindered by the beams 71, 72, 73, 74, and the vibrations caused by the circular vibrations are generated by the beams 71, 72, 73, 74 and the fixed portions 61, 62, 63. , 64 to the outside of the vibration system structure 3 is prevented or suppressed. As a result, the Q value of the vibration of the vibration system structure 3 is increased, and the detection accuracy of the physical quantity sensor 1 is improved. Further, since the vibration system structure 3 can be efficiently vibrated, the output of the vibrating means 4 can be reduced, and as a result, the physical quantity sensor 1 can be downsized.
Further, according to the electrostatic drive as in the present embodiment, the above vibration can be generated more smoothly and reliably. Further, in the present embodiment, since the vibrating means 4 is connected to the inside of the vibrating portions 51, 52, 53, 54, space can be effectively used and the physical quantity sensor 1 can be miniaturized.

-Detection means 9-
As shown in FIG. 4, the detection means 9 has displacement transducers 91, 92, 93, 94 and rotation transducers 95, 96, 97, 98. Note that in FIG. 4, for convenience of description, some of the constituent elements of the physical quantity sensor 1 are omitted.
The displacement transducer 91 has a Y-axis direction displacement portion 516 provided in the first vibrating portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516b included in the Y-axis direction displacement portion 516. Each fixed electrode 911 includes a pair of electrode pieces 911a and 911b that are arranged to face each other with the detection electrode 516b interposed therebetween, and these electrode pieces 911a and 911b are provided to extend in the X-axis direction. ..

The displacement transducer 92 has a Y-axis direction displacement portion 526 provided on the first vibrating portion 52, and a fixed electrode 921 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 921 are provided corresponding to the detection electrodes 526b included in the Y-axis direction displacement portion 526. Each fixed electrode 921 has a pair of electrode pieces 921a and 921b that are arranged to face each other with the detection electrode 526b interposed therebetween, and these electrode pieces 921a and 921b are provided so as to extend in the X-axis direction. ..

The displacement transducer 93 has an X-axis direction displacement portion 536 provided in the second vibrating portion 53 and a fixed electrode 931 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 931 are provided corresponding to the detection electrodes 536b included in the X-axis direction displacement portion 536. Each fixed electrode 931 has a pair of electrode pieces 931a and 931b that are arranged to face each other with the detection electrode 536b interposed therebetween. These electrode pieces 931a and 931b are provided so as to extend in the Y-axis direction. ..

The displacement transducer 94 has an X-axis direction displacement portion 546 provided on the second vibrating portion 54, and a fixed electrode 941 fixed to the substrate 2 via an anchor. A plurality of fixed electrodes 941 are provided corresponding to the detection electrodes 546b included in the X-axis direction displacement portion 546. Each fixed electrode 941 has a pair of electrode pieces 941a and 941b that are arranged to face each other with the detection electrode 546b interposed therebetween. These electrode pieces 941a and 941b are provided so as to extend in the Y-axis direction. ..
In the present embodiment, these displacement transducers 91, 92, 93, 94 are connected inside the vibrating parts 51, 52, 53, 54, so that the space of the device can be effectively utilized and the physical quantity sensor 1 can be miniaturized. Can be planned.

The rotary transducer 95 is opposed to the Z-axis direction displacement portion 512 fixed to the substrate 2 by the Z-axis direction displacement portion 512 provided on the first vibrating portion 51 via the shafts 513 and 514 and separated in the Z-axis direction. The fixed electrode 951 is arranged.
The rotary transducer 96 is opposed to the Z-axis displacing section 522 provided on the first vibrating section 52 via the shafts 523 and 524, and the Z-axis displacing section 522 fixed to the substrate 2 while being separated in the Z-axis direction. The fixed electrode 961 is arranged.

The rotary transducer 97 is opposed to the Z-axis direction displacement portion 532 provided on the second vibrating portion 53 via the shafts 533 and 534, and the Z-axis direction displacement portion 532 fixed to the substrate 2 while being separated in the Z-axis direction. The fixed electrode 971 is arranged.
The rotary transducer 98 is opposed to the Z-axis direction displacement section 542 provided on the second vibrating section 54 via the shafts 543 and 544, and the Z-axis direction displacement section 542 fixed to the substrate 2 while being separated in the Z-axis direction. The fixed electrode 981 is arranged.
In the present embodiment, since these rotary transducers 95, 96, 97, 98 are connected inside the vibrating parts 51, 52, 53, 54, the space of the device can be effectively utilized and the physical quantity sensor 1 can be miniaturized. Can be planned.

Hereinafter, a method of detecting the angular velocity by the detecting means 9 will be briefly described with reference to FIGS. 5, 6 and 7. Note that in FIG. 5, FIG. 6, and FIG. 7, for convenience of explanation, a part of the configuration of the physical quantity sensor 1 is omitted.
-Detection of angular velocity around Z-axis-
As shown in FIG. 5, while vibrating the first vibrating portions 51 and 52 in the X-axis direction and the second vibrating portions 53 and 54 in the Y-axis direction by the vibrating means 4, the physical quantity sensor 1 is subjected to Z. When the angular velocity ω about the axis is applied, the Coriolis force in the Y-axis direction acts on the first vibrating portions 51 and 52 that vibrate in the X-axis direction, and the second vibrating portions 53 and 54 that vibrate in the Y-axis direction act in the X-axis direction. Coriolis force of.

When such a Coriolis force is applied, in the first vibrating portion 51, the Y-axis direction displacement portion 516 is displaced in the Y-axis direction with respect to the frame portion 511, which causes static electricity between the detection electrode 516b and the electrode piece 911a. The capacitance and the capacitance between the detection electrode 516b and the electrode piece 911b change, and a difference occurs between these capacitances. Similarly, also in the first vibrating portion 52, the Y-axis direction displacement portion 526 is displaced in the Y-axis direction with respect to the frame portion 521, whereby the capacitance between the detection electrode 526b and the electrode piece 921a and the detection electrode. The electrostatic capacitance between 516b and the electrode piece 921b changes, and a difference occurs in these electrostatic capacitances.

In addition, in the second vibrating portion 53, the X-axis direction displacement portion 536 is displaced in the X-axis direction with respect to the frame portion 531, whereby the capacitance between the detection electrode 536b and the electrode piece 931a and the detection electrode 536b. And the electrostatic capacitance between the electrode piece 931b change, and a difference occurs in these electrostatic capacitances. Similarly, also in the second vibrating portion 54, the X-axis direction displacement portion 546 is displaced in the X-axis direction with respect to the frame portion 541, whereby the capacitance between the detection electrode 546b and the electrode piece 941a and the detection electrode. The capacitance between 546b and the electrode piece 941b changes, and a difference occurs in these capacitances.
Then, the detecting means 9 detects such a change in the electrostatic capacitance that occurs in each of the vibrating portions 51, 52, 53, 54, and detects the angular velocity about the Z axis applied to the physical quantity sensor 1 from the detection result. You can

-Detection of angular velocity around X-axis-
As shown in the perspective view of FIG. 6, the vibrating means 4 vibrates the first vibrating portions 51 and 52 in the X-axis direction, while vibrating the second vibrating portions 53 and 54 in the Y-axis direction. When an angular velocity about the X axis is applied to the sensor 1, Coriolis force in the Z axis direction acts on the second vibrating portions 53 and 54 that vibrate in the Y axis direction.

When such a Coriolis force acts, in the second vibrating portion 53, the Z-axis direction displacement portion 532 rotates around the shaft portions 533 and 534, which causes static electricity between the Z-axis direction displacement portion 532 and the fixed electrode 971. The capacitance changes. Similarly, in the second vibrating portion 54, the Z-axis direction displacing portion 542 rotates around the shaft portions 543 and 544, whereby the electrostatic capacitance between the Z-axis direction displacing portion 542 and the fixed electrode 981 changes.
Then, the detection unit 9 can detect such a change in the electrostatic capacitance that occurs in the second vibrating units 53 and 54, and can detect the angular velocity about the X axis applied to the physical quantity sensor 1 from the detection result.

-Detection of angular velocity around Y-axis-
As shown in FIG. 7, the vibrating means 4 vibrates the first vibrating portions 51 and 52 in the X-axis direction, while vibrating the second vibrating portions 53 and 54 in the Y-axis direction. When the angular velocity about the axis is applied, the Coriolis force in the Z-axis direction acts on the first vibrating portions 51 and 52 that vibrate in the X-axis direction.

When such a Coriolis force acts, in the first vibrating portion 51, the Z-axis direction displacement portion 512 rotates around the shaft portions 513 and 514, which causes static electricity between the Z-axis direction displacement portion 512 and the fixed electrode 951. The capacitance changes. Similarly, in the first vibrating portion 52, the Z-axis direction displacement portion 522 rotates around the shaft portions 523 and 524, and thereby the electrostatic capacitance between the Z-axis direction displacement portion 522 and the fixed electrode 961 changes.

Then, the detection unit 9 can detect such a change in the electrostatic capacitance that occurs in the first vibrating units 51 and 52, and can detect the angular velocity about the X axis applied to the physical quantity sensor 1 from the detection result.
As described above, the physical quantity sensor 1 can detect angular velocities around all the X-axis, Y-axis, and Z-axis. Therefore, the physical quantity sensor 1 is small and has excellent convenience. Further, in the present embodiment, since the electrostatic detection unit 9 is used, it is possible to improve the detection accuracy while reducing the size of the device.

The physical quantity sensor 1 has a function of canceling the acceleration (linear acceleration) in the Y-axis direction applied to the physical quantity sensor 1 as a set of the displacement transducers 91 and 92. In addition, the displacement transducers 93 and 94, as a set, have a function of canceling acceleration in the X-axis direction applied to the physical quantity sensor 1. Further, the rotation transducers 95, 96, 97, 98 are combined to have a function of canceling acceleration in the Z-axis direction applied to the physical quantity sensor 1.

Specifically, for example, when acceleration is applied to the physical quantity sensor 1 in the Y-axis direction, the Y-axis direction displacement section 516 of the first vibrating section 51 and the Y-axis direction displacement section 526 of the first vibrating section 52 are both moved in the Y-axis direction. Displace in the same direction. The displacement of the Y-axis direction displacement portions 516 and 526 is different from the displacement when an angular velocity around the Z-axis is applied (that is, the displacement of the Y-axis direction displacement portions 516 and 526 to the opposite sides in the Y-axis direction). ing. Therefore, according to the physical quantity sensor 1, from the change in the electrostatic capacitance between the detection electrode 516b and each electrode piece 911a, 911b and the change in the electrostatic capacitance between the detection electrode 526b and each electrode piece 921a, 921b, The applied acceleration can be detected, and when the angular velocity is detected, the detected acceleration can be electrically canceled by a correction process or the like. As a result, the detection accuracy of the angular velocity of the physical quantity sensor 1 is further improved. The acceleration in the X-axis direction and the acceleration in the Z-axis direction can be similarly canceled.

<Second Embodiment>
FIG. 8 is a plan view showing a second embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibrating means is different. In FIG. 8, the same components as those in the first embodiment described above are designated by the same reference numerals.

In the physical quantity sensor 1 of this embodiment, the vibrating means 4 is also connected to the second vibrating sections 53 and 54. That is, the second vibrating portion 53 is provided with the plurality of drive electrodes 535 extending in the X-axis direction, and the second vibrating portion 54 is also provided with the plurality of drive electrodes 545 extending in the X-axis direction. There is.
Further, the vibrating means 4 has a plurality of fixed electrodes 43 provided corresponding to the drive electrodes 535 included in the second vibrating portion 53. Each fixed electrode 43 has a pair of comb-teeth-shaped electrode pieces 431 and 432 arranged to face each other in the Y-axis direction with a drive electrode 535 interposed therebetween. Similarly, the vibrating means 4 has a plurality of fixed electrodes 44 provided corresponding to the respective drive electrodes 545 of the second vibrating section 54. Each fixed electrode 44 has a pair of comb-teeth-shaped electrode pieces 441 and 442 that are arranged to face each other in the Y-axis direction with a drive electrode 545 interposed therebetween.

Then, the vibrating means 4 applies an alternating voltage with a phase shift of 180 degrees to the electrode pieces 411, 421, 432, 442 and the electrode pieces 412, 422, 431, 441 by a power source (not shown), thereby While vibrating the vibrating parts 51 and 52 in the X-axis direction in opposite phases to each other, the second vibrating parts 53 and 54 are vibrated in opposite phases to each other in the Y-axis direction opposite to the first vibrating parts 51 and 52.
According to such a second embodiment, the same effect as that of the above-described first embodiment can be exhibited.

<Third Embodiment>
FIG. 9 is a plan view showing a third embodiment of the physical quantity sensor of the present invention.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the projected shape of the vibration system structure is different. In FIG. 9, the same components as those in the first embodiment described above are designated by the same reference numerals.

In the physical quantity sensor 1 of the present embodiment, the outer shapes of the vibrating portions 51, 52, 53, 54 are trapezoidal in plan view with the Z axis as the normal line. Then, in a plan view with the Z axis direction as a normal line, the projected outer shape of the assembly of the vibrating portions 51, 52, 53, 54 is substantially rectangular. As a result, the physical quantity sensor 1 can be downsized. In addition, for example, when the physical quantity sensor 1 is mounted in a chip, the physical quantity sensor 1 corresponds to the shape of the chip, so that mounting on the chip becomes easy.
According to such a third embodiment, the same effect as that of the above-described first embodiment can be exhibited.

<Fourth Embodiment>
FIG. 10 is a plan view showing a fourth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the vibrating means is different. In FIG. 10, the same components as those in the first embodiment described above are designated by the same reference numerals.

The vibrating means 4 of the present embodiment is configured to vibrate the first vibrating portions 51 and 52 in the X-axis direction by piezoelectric driving. Hereinafter, the first vibrating section 51 will be described as a representative, and the description of the first vibrating section 52 will be omitted.
The first vibrating portion 51 is provided inside the first opening 511a and is fixed to the substrate 2, and is provided inside the first opening 511a. The fixing portion 518a is connected to the fixing portion 518a and the frame portion 511. It has a plurality of connecting portions 518b. Each of the connecting portions 518b is provided so as to extend in the Y-axis direction, and is also spaced from each other in the X-axis direction.
The vibrating means 4 has a pair of piezoelectric elements 45 and 46 provided on each connecting portion 518b. The piezoelectric elements 45 and 46 are provided so as to extend in the Y-axis direction and are spaced apart in the X-axis direction.

The piezoelectric elements 45 and 46 are composed of a pair of electrodes arranged to face each other in the Z-axis direction and a piezoelectric layer having piezoelectricity interposed between the pair of electrodes, and a voltage is applied between the pair of electrodes. By doing so, it expands or contracts in the Y-axis direction. Therefore, when each piezoelectric element 45 is expanded and each piezoelectric element 46 is contracted, each connecting portion 518b is bent and deformed, and the end portion on the side connected to the frame portion 511 is displaced toward the ring portion 31 side. As a result, the first vibrating portion 51 is displaced inward. On the contrary, when each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded, each connecting portion 518b is curved and deformed, and the end portion on the side connected to the frame portion 511 is opposite to the ring portion 31. It is displaced to the side, and as a result, the first vibrating portion 51 is displaced to the outside.

In the vibrating means 4 having the configuration, the state in which each piezoelectric element 45 is expanded and the respective piezoelectric element 46 is contracted, and the state in which each piezoelectric element 45 is contracted and each piezoelectric element 46 is expanded alternate. By repeatedly applying a voltage to each of the piezoelectric elements 45 and 46, the first vibrating portions 51 and 52 are vibrated in the X-axis direction in opposite phases to each other.
According to such a fourth embodiment, the same effect as that of the above-described first embodiment can be exhibited.

<Fifth Embodiment>
FIG. 11 is a plan view showing a fifth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 11, the same components as those in the first embodiment described above are designated by the same reference numerals. In addition, the configurations of the first vibrating portions 51 and 52 are similar to each other, and the configurations of the second vibrating portions 53 and 54 are similar to each other. Therefore, in the following, the first vibrating portion 51 and the second vibrating portion 53 are representative. The description of the first vibrating portion 52 and the second vibrating portion 54 will be omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and is a plate-shaped Y-axis direction displacing portion 519a, which is displaceable in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacing portion 519a, and a frame portion. 511 and a plurality of spring parts 519b which connect with 511. Each spring portion 519b is provided so as to extend in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b and is a plate-shaped X-axis direction displacing portion 539a, which is displaceable in the X-axis direction with respect to the frame portion 531, an X-axis direction displacing portion 539a, and a frame portion. 531 and a plurality of spring parts 539b which connect with 531. Each spring portion 539a is provided so as to extend in the Y-axis direction.

The detection means 9 has a pair of piezoelectric elements 991 and 992 provided on each spring portion 519b of the first vibrating portion 51. The piezoelectric elements 991 and 992 extend in the X-axis direction and are spaced from each other in the Y-axis direction. Further, the detection unit 9 has a pair of piezoelectric elements 993 and 994 provided on each spring portion 539b of the second vibrating portion 53. The piezoelectric elements 993 and 994 extend in the Y-axis direction and are spaced apart from each other in the X-axis direction.

Each of the piezoelectric elements 991, 992, 993, 994 is composed of a pair of electrodes arranged to face each other in the Z-axis direction and a piezoelectric layer having piezoelectricity interposed between the pair of electrodes. Such piezoelectric elements 991, 992, 993, 994 have the property of generating electric charges by deformation, and the larger the amount of deformation, the larger the amount of electric charges generated.
Therefore, when an angular velocity around the Z axis is applied to the physical quantity sensor 1 and the Y axis direction displacement portion of the first vibrating portion 51 displaces in the Y axis direction while bending and deforming the spring portion 519b in the Y axis direction, the piezoelectric element 991, When 992 generates an electric charge having a magnitude corresponding to the deformation amount of the spring portion 519b, and the X-axis direction displacement portion of the second vibrating portion 53 displaces the coupling portion 539b in the X-axis direction while bending and deforming the coupling portion 539b, The piezoelectric elements 993 and 994 generate electric charges having a size corresponding to the amount of deformation of the connecting portion 539b.
The detection means 9 detects the angular velocity around the Z axis by detecting the magnitude of the charges generated from the piezoelectric elements 991, 992, 993, 994.

<Sixth Embodiment>
FIG. 12 is a plan view showing a sixth embodiment of the physical quantity sensor of the invention.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.
The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 12, the same components as those in the above-described first embodiment are designated by the same reference numerals. In addition, the configurations of the first vibrating portions 51 and 52 are similar to each other, and the configurations of the second vibrating portions 53 and 54 are similar to each other. Therefore, in the following, the first vibrating portion 51 and the second vibrating portion 53 are representative. The description of the first vibrating portion 52 and the second vibrating portion 54 will be omitted.

The first vibrating portion 51 is provided inside the second opening 511b, and is a plate-shaped Y-axis direction displacing portion 519a, which is displaceable in the Y-axis direction with respect to the frame portion 511, a Y-axis direction displacing portion 519a, and a frame portion. 511 and a plurality of spring parts 519b which connect with 511. Each spring portion 519b is provided so as to extend in the X-axis direction.
The second vibrating portion 53 is provided inside the second opening 531b and is a plate-shaped X-axis direction displacing portion 539a, which is displaceable in the X-axis direction with respect to the frame portion 531, an X-axis direction displacing portion 539a, and a frame portion. 531 and a plurality of spring parts 539b which connect with 531. Each spring portion 539a is provided so as to extend in the Y-axis direction.

The detecting means 9 of the present embodiment has a piezoresistive portion 995 provided on each spring portion 519b of the first vibrating portion 51 and a piezoresistive portion 996 provided on each spring portion 539b of the second vibrating portion 53. doing. For example, when the vibration system structure 3 is formed by using an n-type silicon substrate, the piezoresistive portions 995 and 996 diffuse impurities such as boron to a high concentration and form a p-type silicon layer in the diffused portion. It can be formed by forming.

The piezoresistive portions 995 and 996 have the property that the resistance value changes due to deformation, and the larger the deformation amount, the larger the resistance value change amount. Therefore, when the angular velocity around the Z axis is applied to the physical quantity sensor 1 and the Y axis direction displacement portion of the first vibrating portion 51 displaces in the Y axis direction while bending and deforming the spring portion 519b in the Y axis direction, the piezoresistive portion 995 is generated. When the resistance value of the spring portion 519b changes to a value corresponding to the amount of deformation and the X-axis direction displacement portion of the second vibrating portion 53 displaces the connecting portion 539b in the X-axis direction while bending and deforming the coupling portion 539b, the piezo actuator moves. The resistance portion 996 changes to a resistance value having a magnitude corresponding to the deformation amount of the connecting portion 539b.
The detection means 9 detects the angular velocity around the Z axis by detecting the resistance value change of the piezoresistive portions 995 and 996.

<Seventh Embodiment>
FIG. 13 is a plan view showing a seventh embodiment of the physical quantity sensor of the present invention. Note that, in FIG. 13, for convenience of description, a part of the configuration of the physical quantity sensor is not shown.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 13, the same components as those in the first embodiment described above are designated by the same reference numerals. Further, since the configurations of the four vibrating portions are the same as each other except that the arrangement around the Z axis is different, the first vibrating portion 51 will be representatively described below, and the first vibrating portion 52 and the second vibrating portion will be described. The description of the parts 53 and 54 is omitted.

In the first vibrating portion 51, the Y-axis direction displacement portion 516 is provided outside the frame portion 511 and is connected to the frame portion 511 by a plurality of spring portions 517. Such a Y-axis direction displacement portion 516 includes a plate-shaped base portion 516c and a plurality of detection electrodes 516d protruding from the base portion 516c in the X-axis direction.
The displacement transducer 91 of the detection means 9 of this embodiment has a Y-axis direction displacement portion 516 provided on the first vibrating portion 51 and a fixed electrode 911 fixed to the substrate 2 via an anchor. .. A plurality of fixed electrodes 911 are provided corresponding to the detection electrodes 516d included in the Y-axis direction displacement portion 516. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b arranged to face each other with the detection electrode 516d interposed therebetween, and these electrode pieces 911a and 911b are provided so as to extend in the X-axis direction. ..

<Eighth Embodiment>
FIG. 14 is a plan view showing an eighth embodiment of the physical quantity sensor of the invention. Note that, in FIG. 13, for convenience of description, a part of the configuration of the physical quantity sensor is not shown.
The physical quantity sensor of this embodiment will be described with a focus on the differences from the above-described embodiment, and the description of the same matters will be omitted.

The physical quantity sensor 1 of the present embodiment is the same as the physical quantity sensor of the first embodiment described above, except that the configuration of the detection means is different. In FIG. 14, the same components as those in the first embodiment described above are designated by the same reference numerals. Further, since the configurations of the four vibrating portions are the same as each other except that the arrangement around the Z axis is different, the first vibrating portion 51 will be representatively described below, and the first vibrating portion 52 and the second vibrating portion will be described. The description of the parts 53 and 54 is omitted.

In the first vibrating portion 51, the Z-axis displacement portion 516A provided outside the frame portion 511 is connected to the frame portion 511 by a pair of connecting springs 517A. In addition, the pair of connecting springs 517A extend along the radial direction with respect to the center O of the ring portion 31, respectively. The Z-axis displacement portion 516A includes a plate-shaped base portion 516Aa and a plurality of fixed electrodes 516Ab protruding from the base portion 516Aa in the radial direction with respect to the center O of the ring portion 31.

In the first vibrating portion 51 as described above, the Z-axis displacing portion 516A causes the pair of connecting springs 517A to be curved and deformed by the Coriolis force in the Y-axis direction generated when an angular velocity around the Z-axis is applied, while the Z-axis displacing portion 517A is curved. Rotate around. According to such a configuration, the Coriolis force in the Y-axis direction can be changed into the stress around the Z-axis, so that the displacement amount of the Z-axis around displacement portion 516A can be increased.

The rotary transducer 91 of the detection means 9 of the present embodiment has a Z-axis displacement section 516A provided in the first vibrating section 51, and a fixed electrode 911 fixed to the substrate 2 via an anchor. .. A plurality of fixed electrodes 911 are provided corresponding to the fixed electrodes 516Ab included in the Z-axis displacement portion 516A. Each fixed electrode 911 has a pair of electrode pieces 911a and 911b that are arranged to face each other with the fixed electrode 516Ab in between.
The vibrating reed of each embodiment as described above can be applied to various electronic devices, and the obtained electronic device has high reliability.

Here, an electronic device including the resonator element according to the invention will be described in detail with reference to FIGS.
FIG. 15 is a perspective view showing the configuration of a mobile (or notebook) personal computer to which an electronic device including the physical quantity sensor of the present invention is applied.
In this figure, a personal computer 1100 is composed of a main body portion 1104 having a keyboard 1102 and a display unit 1106 having a display portion 100. The display unit 1106 is rotated relative to the main body portion 1104 via a hinge structure portion. It is movably supported.
Such a personal computer 1100 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

FIG. 16 is a perspective view showing the configuration of a mobile phone (including PHS) to which an electronic device including the physical quantity sensor of the present invention is applied.
In this figure, a mobile phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and the display unit 100 is arranged between the operation buttons 1202 and the earpiece 1204.
Such a mobile phone 1200 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

FIG. 17 is a perspective view showing the configuration of a digital still camera to which an electronic device including the physical quantity sensor of the present invention is applied. It should be noted that this figure also simply shows the connection with an external device.
Here, while a normal camera exposes a silver halide photographic film with a light image of a subject, a digital still camera 1300 photoelectrically converts a light image of the subject with an image pickup device such as a CCD (Charge Coupled Device). An image pickup signal (image signal) is generated.

A display unit is provided on the back surface of the case (body) 1302 of the digital still camera 1300, and is configured to display based on an image pickup signal from the CCD. The display unit serves as a finder that displays an electronic image of a subject. Function.
A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (back side in the figure) of the case 1302.

When the photographer confirms the subject image displayed on the display unit and presses the shutter button 1306, the image pickup signal of the CCD at that time is transferred and stored in the memory 1308.
Further, in this digital still camera 1300, a video signal output terminal 1312 and an input/output terminal 1314 for data communication are provided on the side surface of the case 1302. Then, as shown in the drawing, a television monitor 1430 is connected to the video signal output terminal 1312, and a personal computer 1440 is connected to the input/output terminal 1314 for data communication, if necessary. Further, the image pickup signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.
Such a digital still camera 1300 has a built-in physical quantity sensor 1 that functions as an angular velocity detecting means (gyro sensor).

In addition to the personal computer (mobile personal computer) shown in FIG. 15, the mobile phone shown in FIG. 16, the digital still camera shown in FIG. Inkjet printer), laptop personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game machine, word processor, workstation, TV Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish finder, various measuring devices, measuring instruments It can be applied to a class (for example, instruments of vehicles, aircrafts, ships), a flight simulator, and the like.

Although the physical quantity sensor of the present invention has been described above based on the illustrated embodiment, the present invention is not limited to this, and the configuration of each part may be replaced with an arbitrary configuration having the same function. You can
Moreover, other arbitrary components may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

1 Physical quantity sensor 2 Substrate 3 Vibration system structure 31 Ring part 4 Vibrating means 41 Fixed electrode 411, 412 Electrode piece 42 Fixed electrode 421, 422 Electrode piece 43, 44 ... fixed electrode 431, 432 ... electrode piece 441, 442 ... electrode piece 45, 46 ... piezoelectric element 51 ... first vibrating section 511 ... frame section 511a ... first opening 511b ... 2nd opening 511c... 3rd opening 512... Z-axis direction displacement part 513, 514... Shaft part 515... Drive electrode 516... Y-axis direction displacement part 516A... Displacement part 516Aa... Base part 516Ab... Fixed Electrode 516a: Frame portion 516b: Detection electrode 516c: Base portion 516d: Detection electrode 517... Spring portion 517A: Pair of connection springs 518a: Fixed portion 518b: Connection portion 519a: Y-axis direction displacement portion 519b Spring unit 52 First vibrating unit 521 Frame unit 522 Z-direction displacement unit 523, 524 Shaft unit 525 Drive electrode 526 Y-direction displacement unit 526b Detection electrode 527 Spring part 53 Second vibrating part 531 Frame part 531a First opening 531b Second opening 531c Third opening 532 Displacement part in the Z-axis direction 533, 534 Shaft part 535... Drive electrode 536... X-axis direction displacement part 536a... Frame part 536b... Detection electrode 537... Spring part 539a.. Spring part 539b.. Connection part 519a... X-axis direction displacement part 519b... Spring Part 54 Second vibration part 541 Frame part 542 Z axis direction displacement part 543, 544 Shaft part 545 Drive electrode 546 Detecting electrode 546b Y axis direction extending part 547 Spring part 61, 62, 63, 64... Inner fixing part 651, 652, 661, 662, 671, 672, 681, 682... Outer fixing part 71, 72, 73, 74... Beam 81. Spring portion 811, 812... Spring portion 82... First inner spring portion 83... Second inner spring portion 831, 832... Spring portion 84... Second inner spring portion 851, 852, 861, 862, 871, 872, 881, 882... Outer spring portion 9... Output means 91... Displacement transducer 911, 912... Fixed electrode 911a, 911b... Electrode piece 92... Displacement transducer 921, 922... Fixed electrode 921a, 921b... Electrode piece 93... Displacement transducer 931, 932 ... fixed electrodes 931a, 931b ... electrode pieces 94 ... displacement transducers 941, 942 ... fixed electrodes 941a, 941b ... electrode pieces 95 ... rotating transducer 951 ... fixed electrodes 96 ... rotating transducer 961 Fixed electrode 97 Rotation transducer 971 Fixed electrode 98 Rotation transducer 981 Fixed electrode 991, 992 Piezoelectric element 993, 994 Piezoelectric element 995, 996 Piezoresistive part 100 ... display unit 1100 ... personal computer 1102 ... keyboard 1104 ... main unit 1106 ... display unit 1200 ... mobile phone 1202 ... operation button 1204 ... earpiece 1206 ... mouthpiece 1300 ... digital still Camera 1302 Case 1304 Light receiving unit 1306 Shutter button 1308 Memory 1312 Video signal output terminal 1314 I/O terminal 1430 Television monitor 1440 Personal computer J1, J2 Axis

Claims (12)

When the three axes orthogonal to each other are the X axis, the Y axis, and the Z axis,
A substrate including a first surface and a second surface which are orthogonal to the Z axis and are in a front-back relationship with each other ;
A pair of first mass parts including a movable part and arranged side by side in the X-axis direction;
A pair of second mass parts including a movable part and arranged side by side in the Y-axis direction;
Between the pair of first mass parts, and between the pair of second mass parts, a connecting part,
A pair of first spring parts connecting each of the pair of first mass parts and the connecting part;
A pair of second spring parts connecting each of the pair of second mass parts and the connecting part;
A plurality of first fixing portions that fix each of the pair of first mass portions to the first surface of the substrate;
A plurality of second fixing parts that fix each of the pair of second mass parts to the first surface of the substrate;
A plurality of supporting portions supporting the connecting portion and attached to the first surface of the substrate;
A vibrating means for vibrating the pair of first mass parts along the X axis;
A transducer for converting the displacement of the movable part into an electric signal,
Including,
In a plan view from the Z-axis direction, the outer shape of the aggregate including the pair of first mass parts and the pair of second mass parts is a rectangular shape,
The first mass portion and the first fixing portion are connected via a third spring portion,
The physical quantity sensor, wherein the second mass portion and the second fixing portion are connected via a fourth spring portion . In claim 1,
The physical quantity sensor, wherein the plurality of first fixing portions are provided symmetrically with respect to the X axis . In claim 1 or 2,
The physical quantity sensor, wherein the plurality of second fixing portions are provided symmetrically with respect to the Y axis . In any one of Claim 1 thru|or 3,
The physical quantity sensor, wherein the plurality of supporting parts include a first supporting part, a second supporting part, a third supporting part, and a fourth supporting part . In claim 4,
The first support part and the second support part are symmetrical with respect to the X-axis,
The physical quantity sensor, wherein the third support part and the fourth support part are symmetrical with respect to the X axis . In Claim 4 or 5,
The first support part and the fourth support part are symmetrical with respect to the Y-axis,
The physical quantity sensor, wherein the second support part and the third support part are symmetrical with respect to the Y-axis . In any one of Claims 1 thru|or 6,
The physical quantity sensor, wherein the pair of first spring portions is restricted from being deformed along the Y axis and deformed along the Z axis . In any one of Claim 1 thru|or 7,
The physical quantity sensor, wherein the pair of second spring portions is restricted from being deformed along the X axis and deformed along the Z axis . In any one of Claim 1 thru|or 8,
The physical quantity sensor , wherein the vibrating means is provided in the first mass section . In any one of Claims 1 thru|or 9,
The physical quantity sensor, wherein the pair of first mass parts vibrate in opposite phases . In any one of Claim 1 thru|or 10,
The physical quantity sensor , wherein the transducer detects an angular velocity about the X axis, an angular velocity about the Y axis, and an angular velocity about the Z axis . An electronic device comprising the physical quantity sensor according to claim 1 .

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