JP6702419B2 - Interferometric spectrophotometer - Google Patents
Interferometric spectrophotometer Download PDFInfo
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- JP6702419B2 JP6702419B2 JP2018529408A JP2018529408A JP6702419B2 JP 6702419 B2 JP6702419 B2 JP 6702419B2 JP 2018529408 A JP2018529408 A JP 2018529408A JP 2018529408 A JP2018529408 A JP 2018529408A JP 6702419 B2 JP6702419 B2 JP 6702419B2
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- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 18
- 230000004907 flux Effects 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/035—DC motors; Unipolar motors
- H02K41/0352—Unipolar motors
- H02K41/0354—Lorentz force motors, e.g. voice coil motors
- H02K41/0356—Lorentz force motors, e.g. voice coil motors moving along a straight path
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/34—Reciprocating, oscillating or vibrating parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/062—Scanning arrangements arrangements for order-selection motor-driven
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
- G01J2003/064—Use of other elements for scan, e.g. mirror, fixed grating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Spectrometry And Color Measurement (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Description
本発明は、ボイスコイルモータ（以下、「ＶＣＭ」と略す）を用いたフーリエ変換赤外分光光度計（以下、「ＦＴＩＲ」と略す）等の干渉分光光度計に関する。 The present invention relates to an interference spectrophotometer such as a Fourier transform infrared spectrophotometer (hereinafter abbreviated as “FTIR”) using a voice coil motor (hereinafter abbreviated as “VCM”).
ＦＴＩＲに利用されるマイケルソン二光束干渉計では、赤外光源から発した赤外光をビームスプリッタで固定鏡と移動鏡との２方向に分割し、固定鏡で反射して戻ってきた光と移動鏡で反射して戻ってきた光とをビームスプリッタで合成して１つの光路へ送るという構成を有している。このとき、移動鏡を入射光軸方向（前後方向）で前後に移動させると、分割された二光束の光路長の差が変化するから、合成された光は移動鏡の位置に応じて光の強度が変化する干渉光（インターフェログラム）となる。 In the Michelson two-beam interferometer used for FTIR, the infrared light emitted from an infrared light source is split by a beam splitter into two directions, a fixed mirror and a moving mirror, and the reflected light is reflected by the fixed mirror and returned. It has a configuration in which the light reflected by the movable mirror and returned is combined by a beam splitter and sent to one optical path. At this time, if the movable mirror is moved back and forth in the incident optical axis direction (front-back direction), the difference in the optical path lengths of the two split light fluxes changes, so that the combined light is converted into a light beam according to the position of the movable mirror. It becomes an interference light (interferogram) whose intensity changes.
図６は、従来のＦＴＩＲの要部の構成を示す図であり、図７は、図６に示す移動鏡ユニットの水平断面図である。なお、地面に水平な一方向をＸ方向とし、地面に水平でＸ方向と垂直な方向をＹ方向とし、Ｘ方向とＹ方向とに垂直な方向をＺ方向とする。
ＦＴＩＲ１０１は、主干渉計主要部１４０と、赤外光を出射する光源部１０と、インターフェログラムを検出する光検出部２０と、コンピュータ（制御部）１３０とを備える。
FIG. 6 is a diagram showing a configuration of a main part of a conventional FTIR, and FIG. 7 is a horizontal sectional view of the movable mirror unit shown in FIG. Note that one direction horizontal to the ground is the X direction, a direction horizontal to the ground and perpendicular to the X direction is the Y direction, and a direction perpendicular to the X and Y directions is the Z direction.
The FTIR 101 includes a main interferometer main section 140, a light source section 10 that emits infrared light, a photodetection section 20 that detects an interferogram, and a computer (control section) 130.
光源部１０は、赤外光を出射する赤外光源と、集光鏡と、コリメータ鏡とを備える。これにより、赤外光源から出射された赤外光は、集光鏡、コリメータ鏡を介して主干渉計主要部１４０のビームスプリッタ４２に照射されるようになっている。
光検出部２０は、楕円面鏡と、インターフェログラムを検出する光検出器とを備える。これにより、試料Ｓに照射された光は、試料Ｓを透過（又は反射）して、楕円面鏡により光検出器へ集光されるようになっている。
The light source unit 10 includes an infrared light source that emits infrared light, a condenser mirror, and a collimator mirror. As a result, the infrared light emitted from the infrared light source is applied to the beam splitter 42 of the main interferometer main section 140 via the condenser mirror and the collimator mirror.
The photodetection unit 20 includes an ellipsoidal mirror and a photodetector that detects an interferogram. As a result, the light applied to the sample S is transmitted (or reflected) through the sample S and is focused on the photodetector by the ellipsoidal mirror.
主干渉計主要部１４０は、筐体４１と、ビームスプリッタ４２と、移動鏡５３を備えた移動鏡ユニット１５０と、固定鏡６１とアライメント機構６２とを備えた固定鏡ユニット６０とを備える。
移動鏡ユニット１５０は、前後方向（Ｘ方向）に中心軸を有する円筒形状の中空パイプ５１と、中空パイプ５１内で前後方向に往復移動が可能となるように配置された円柱形状のピストン５２と、ピストン５２の前部に固定された移動鏡５３と、ＶＣＭ１７０とを備える（例えば特許文献１参照）。
The main interferometer main section 140 includes a housing 41, a beam splitter 42, a moving mirror unit 150 including a moving mirror 53, and a fixed mirror unit 60 including a fixed mirror 61 and an alignment mechanism 62.
The movable mirror unit 150 includes a cylindrical hollow pipe 51 having a center axis in the front-rear direction (X direction), and a cylindrical piston 52 arranged so as to reciprocate in the front-rear direction within the hollow pipe 51. A moving mirror 53 fixed to the front part of the piston 52 and a VCM 170 are provided (see, for example, Patent Document 1).
ＶＣＭ１７０は、固定部１７１と移動部１７２とを備える。
固定部１７１は、前後方向に中心軸を有する円筒形状の筒状部１７３ａと円板形状の後側壁７３ｂとを有する鉄製（磁性材料製）のヨーク１７３と、前後方向に中心軸を有する円柱形状の２個のマグネット７４（７４ａ、７４ｂ）と、前後方向に中心軸を有する円柱形状のポールピース７５とを備える。第一マグネット７４ａとポールピース７５と第二マグネット７４ｂとは、この順でヨーク１７３の後側壁７３ｂの前面中心部に固定されることで、ヨーク１７３の筒状部１７３ａ内に設置されている。そして、筒状部１７３ａの前部は、筐体４１（中空パイプ５１）の後部に取り付けられている。また、ヨーク１７３の筒状部１７３ａの右側壁には、前後方向に伸びた長孔形状のスリット１７３ｃが形成されている。
The VCM 170 includes a fixed unit 171 and a moving unit 172.
The fixed portion 171 is made of iron (made of magnetic material) and has a cylindrical tubular portion 173a having a center axis in the front-rear direction and a disc-shaped rear side wall 73b, and a columnar shape having a center axis in the front-rear direction. 2 magnets 74 (74a, 74b) and a columnar pole piece 75 having a central axis in the front-rear direction. The first magnet 74a, the pole piece 75, and the second magnet 74b are installed in the cylindrical portion 173a of the yoke 173 by being fixed to the front center portion of the rear side wall 73b of the yoke 173 in this order. The front portion of the tubular portion 173a is attached to the rear portion of the housing 41 (hollow pipe 51). Further, on the right side wall of the cylindrical portion 173a of the yoke 173, an elongated hole-shaped slit 173c extending in the front-rear direction is formed.
移動部１７２は、前後方向に中心軸を有する円筒形状のボビン７２ａと、ボビン７２ａ後部の外周面に巻かれた円環形状のコイル７２ｂとを備える。そして、ボビン７２ａ前部はピストン５２後部に取り付けられている。また、コイル７２ｂは、ヨーク１７３の筒状部１７３ａとポールピース７５との間に配置されて、スリット１７３ｃ内を上下方向（Ｙ方向）に貫通するように配置された電力供給端子（電力供給線）７２ｃを介して電源（図示略）と電気的に接続されている。 The moving portion 172 includes a cylindrical bobbin 72a having a center axis in the front-rear direction, and an annular coil 72b wound around the outer peripheral surface of the rear portion of the bobbin 72a. The front portion of the bobbin 72a is attached to the rear portion of the piston 52. The coil 72b is arranged between the cylindrical portion 173a of the yoke 173 and the pole piece 75, and is arranged so as to pass through the slit 173c in the vertical direction (Y direction) (power supply line). ) 72c, and is electrically connected to a power source (not shown).
したがって、コイル７２ｂに電力供給端子７２ｃを介して電流を流すと、コイル７２ｂがヨーク１７３とポールピース７５との間に形成される磁界により電磁力（ローレンツ力）を受けて前後方向に移動することによって、ピストン５２に固定された移動鏡５３も前後方向に移動するようになっている。 Therefore, when an electric current is applied to the coil 72b through the power supply terminal 72c, the coil 72b receives electromagnetic force (Lorentz force) due to the magnetic field formed between the yoke 173 and the pole piece 75 and moves in the front-back direction. Accordingly, the movable mirror 53 fixed to the piston 52 also moves in the front-rear direction.
このようなＦＴＩＲ１０１では、スループットを充分に確保してＳ／Ｎが高い試料Ｓの測定を行うためには、移動鏡５３と固定鏡６１との角度ずれを１秒以下に抑える必要がある。そのため、コンピュータ１３０は、移動鏡５３の角度ずれに対してアライメント機構６２を用いて固定鏡６１の角度をリアルタイムで制御している。 In such an FTIR 101, in order to ensure sufficient throughput and measure the sample S having a high S/N, it is necessary to suppress the angular deviation between the movable mirror 53 and the fixed mirror 61 to 1 second or less. Therefore, the computer 130 controls the angle of the fixed mirror 61 in real time using the alignment mechanism 62 with respect to the angular displacement of the movable mirror 53.
ところで、ＦＴＩＲ等の干渉分光光度計においては、測定モード（試料Ｓの測定の種類）により移動鏡５３の短ストローク高速駆動や長ストローク低速駆動が要求されてきている。
しかしながら、上述したようなＦＴＩＲ１０１では、短ストローク高速駆動時には折り返し時に大きな加速度がかかるため、コンピュータ１３０による固定鏡６１の角度制御が追従しないという課題があった（図５（ｂ）参照）。
By the way, in an interference spectrophotometer such as FTIR, a short stroke high speed drive and a long stroke low speed drive of the movable mirror 53 are required depending on the measurement mode (type of measurement of the sample S).
However, in the FTIR 101 as described above, there is a problem that the angle control of the fixed mirror 61 by the computer 130 does not follow because a large acceleration is applied at the time of turning back during short stroke high speed driving (see FIG. 5B).
本発明者らは、上記課題を解決するために、高速駆動時にも移動鏡５３と固定鏡６１との角度ずれを１秒以下に抑える方法について検討を行った。ここで、図４は、ヨーク１７３の筒状部１７３ａの右側壁（スリット１７３ｃあり）と、筒状部１７３ａの左側壁（スリット１７３ｃなし）とでの磁束密度の違いをシミュレーションした結果を示す表であって、「スリットあり」側では磁束が弱くなっていることがわかる。磁束密度は推力（ローレンツ力）に比例するので、磁束密度の差と同様の推力差が生じていることになる。 In order to solve the above problems, the present inventors have studied a method of suppressing the angular displacement between the movable mirror 53 and the fixed mirror 61 to 1 second or less even at high speed driving. Here, FIG. 4 is a table showing the results of simulating the difference in magnetic flux density between the right side wall (with the slit 173c) of the tubular portion 173a of the yoke 173 and the left side wall (without the slit 173c) of the tubular portion 173a. Therefore, it can be seen that the magnetic flux is weakened on the "with slit" side. Since the magnetic flux density is proportional to the thrust (Lorentz force), a thrust difference similar to the difference in magnetic flux density is generated.
そして、ボビン７２ａに巻かれたコイル７２ｂに電流が流れることにより、ボビン７２ａに固定されたピストン５２は、前方向（−Ｘ方向）の力や後方向（Ｘ方向）の力を受けてスライドする。このとき、スリット１７３ｃのある側は推力の発生が弱いため、ピストン５２が中空パイプ５１に保持された状態でも、移動鏡５３の面はあおられる方向に向くことがわかった。具体的には、コイル７２ｂが前方向に動くときにはＺ方向を回転軸として右への回転を伴うようなモーメントが、後方向に動くときには左への回転を伴うようなモーメントが可動部（ピストン５２等）に加わっている。 Then, when a current flows through the coil 72b wound around the bobbin 72a, the piston 52 fixed to the bobbin 72a slides by receiving a force in the front direction (-X direction) or a force in the rear direction (X direction). .. At this time, since the thrust is weakly generated on the side with the slit 173c, it was found that even when the piston 52 is held by the hollow pipe 51, the surface of the movable mirror 53 faces in the upward direction. Specifically, when the coil 72b moves in the forward direction, a moment that rotates to the right around the Z direction as a rotation axis, and when it moves in the backward direction, a moment that rotates to the left occurs in the movable portion (piston 52). Etc.).
そこで、ヨークの筒状部の軸対称側にもスリットを設けることにより、推力差を解消することを見出した。ここで、図５（ｂ）は、ヨークの筒状部の片側のみにスリットを設けた場合での角度ずれの評価結果（３．４秒ｐｐ）であり、図５（ａ）は、ヨークの筒状部の両側にスリットを設けた場合での角度ずれの評価結果（０．６秒ｐｐ）である。片側のみにスリットを設けた場合に対し、両側にスリットを設けた場合は角度ずれを約１／５（０．６秒ｐｐ）に低減することができた。 Therefore, it has been found that the thrust difference can be eliminated by providing a slit on the axially symmetrical side of the cylindrical portion of the yoke. Here, FIG. 5B is an evaluation result (3.4 seconds pp) of the angular deviation in the case where the slit is provided only on one side of the cylindrical portion of the yoke, and FIG. It is an evaluation result (0.6 second pp) of the angular deviation when slits are provided on both sides of the tubular portion. When the slits were provided on only one side, when the slits were provided on both sides, the angular deviation could be reduced to about 1/5 (0.6 second pp).
すなわち、本発明の干渉分光光度計は、光を出射する光源部と、固定鏡と、移動鏡および当該移動鏡を往復移動させるボイスコイルモータを備えた移動鏡ユニットと、前記光源部からの光を受けて、前記固定鏡と前記移動鏡とに向けて２分割するとともに、前記固定鏡で反射して戻ってきた光と前記移動鏡で反射して戻ってきた光とを受けて、干渉光に合成するビームスプリッタと、試料が配置され、当該試料を透過又は反射した干渉光を検出する光検出部と、を備えた干渉分光光度計であって、前記ボイスコイルモータは、筒状部を有するヨークと、当該筒状部内に設置されたマグネットとが固定された固定部と、前記ヨークの筒状部と前記マグネットとの間に配置される筒形状のコイルと、前記移動鏡とが固定された移動部と、前記コイルと電源とを接続する電力供給線とを備え、前記ヨークの筒状部には、前記電力供給線が通される第一のスリットが形成されており、前記ヨークの第一スリットとは筒状部の中心軸で対称となる位置に第二のスリットが形成され、前記コイルが前記電力供給線を介して給電されて前記マグネットにより形成される電磁力を受けることにより、前記移動部に固定された前記移動鏡が前記固定部に対して往復移動するように形成されている。 That is, the interferometric spectrophotometer of the present invention includes a light source unit that emits light, a fixed mirror, a moving mirror unit that includes a moving mirror and a voice coil motor that reciprocates the moving mirror, and light from the light source unit. In response, the light is split into two parts toward the fixed mirror and the movable mirror, and the light reflected by the fixed mirror and returned and the light reflected by the movable mirror and returned are received, and the interference light is received. An interference spectrophotometer comprising: a beam splitter for synthesizing a sample, and a photodetector for arranging a sample and detecting interference light transmitted or reflected by the sample, wherein the voice coil motor has a cylindrical part. A fixed portion to which the yoke and a magnet installed in the tubular portion are fixed , a tubular coil disposed between the tubular portion of the yoke and the magnet, and the movable mirror are fixed And a power supply line that connects the coil and a power source, and a first slit through which the power supply line is passed is formed in the tubular portion of the yoke. The second slit is formed at a position symmetrical to the first slit of the cylindrical portion with respect to the central axis of the cylindrical portion, and the coil is supplied with power through the power supply line and receives the electromagnetic force formed by the magnet. Thus, the movable mirror fixed to the moving portion is formed to reciprocate with respect to the fixed portion.
以上のように、本発明の干渉分光光度計によれば、ボイスコイルモータのスリットをヨークの中心軸の対称側にも設けることにより、推力の差が解消され、移動部での回転運動を起こすモーメントの発生をなくすことができる。これにより、高速駆動時の移動鏡と固定鏡との角度ずれを小さくすることができる。 As described above , according to the interferometric spectrophotometer of the present invention, by providing the slit of the voice coil motor also on the symmetrical side of the central axis of the yoke, the difference in thrust is eliminated and the rotary motion in the moving part is caused. Generation of moment can be eliminated. As a result, it is possible to reduce the angular deviation between the movable mirror and the fixed mirror during high speed driving.
上記発明において、前記電力供給線を介しての給電を制御することにより前記移動鏡の移動速度又は移動距離を制御する制御部を備えてもよい。In the above invention, a control unit may be provided that controls a moving speed or a moving distance of the movable mirror by controlling power supply via the power supply line.
上記発明において、前記第一のスリットには前記電力供給線に接続される電力供給端子が配置され、前記第二のスリットにはダミー電力供給端子が配置されていてもよい。In the above invention, a power supply terminal connected to the power supply line may be arranged in the first slit, and a dummy power supply terminal may be arranged in the second slit.
上記発明において、前記第一のスリットだけに前記電力供給線が通してあるようにしてもよい。In the above invention, the power supply line may pass through only the first slit.
以下、本発明の実施形態について図面を用いて説明する。なお、本発明は、以下に説明するような実施形態に限定されるものではなく、本発明の趣旨を逸脱しない範囲で種々の態様が含まれる。 Embodiments of the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiments described below, and various modes are included without departing from the gist of the present invention.
本発明に係る干渉分光光度計の構成例として、ＦＴＩＲを例にして図１にその要部の構成を示す。そして、図２は、図１に示す移動鏡ユニット５０の水平断面図である。また、図３は、図２に示すＶＣＭ７０の断面図であって、図３（ａ）は縦断面図であり、図３（ｂ）は水平断面図である。なお、上述したＦＴＩＲ１０１と同様のものについては、同じ符号を付すことにより説明を省略する。
ＦＴＩＲ１は、主干渉計主要部４０と、赤外光を出射する光源部１０と、インターフェログラムを検出する光検出部２０と、コンピュータ（制御部）３０とを備える。
As an example of the structure of the interference spectrophotometer according to the present invention, FTIR is taken as an example and FIG. 1 shows the structure of the main part thereof. 2 is a horizontal sectional view of the movable mirror unit 50 shown in FIG. 3 is a sectional view of the VCM 70 shown in FIG. 2, FIG. 3(a) is a vertical sectional view, and FIG. 3(b) is a horizontal sectional view. The same parts as those of the FTIR 101 described above are designated by the same reference numerals and the description thereof will be omitted.
The FTIR 1 includes a main interferometer main section 40, a light source section 10 that emits infrared light, a photodetection section 20 that detects an interferogram, and a computer (control section) 30.
主干渉計主要部４０は、筐体４１と、ビームスプリッタ４２と、移動鏡５３を備えた移動鏡ユニット５０と、固定鏡６１とアライメント機構６２とを備えた固定鏡ユニット６０とを備える。
移動鏡ユニット５０は、前後方向（Ｘ方向）に中心軸を有する円筒形状の中空パイプ５１と、中空パイプ５１内で前後方向に往復移動が可能となるように配置された円柱形状のピストン５２と、ピストン５２の前部に固定された移動鏡５３と、ＶＣＭ７０とを備える。
The main interferometer main section 40 includes a housing 41, a beam splitter 42, a moving mirror unit 50 including a moving mirror 53, and a fixed mirror unit 60 including a fixed mirror 61 and an alignment mechanism 62.
The movable mirror unit 50 includes a cylindrical hollow pipe 51 having a center axis in the front-rear direction (X direction), and a cylindrical piston 52 arranged so as to be capable of reciprocating in the front-rear direction within the hollow pipe 51. The moving mirror 53 fixed to the front part of the piston 52 and the VCM 70 are provided.
ＶＣＭ７０は、固定部７１と移動部７２とを備える。
固定部７１は、前後方向に中心軸を有する円筒形状の筒状部７３ａと円板形状の後側壁７３ｂとを有する鉄製（磁性材料製）のヨーク７３と、前後方向に中心軸を有する円柱形状の２個のマグネット７４（７４ａ、７４ｂ）と、前後方向に中心軸を有する円柱形状のポールピース７５とを備える。第一マグネット７４ａとポールピース７５と第二マグネット７４ｂとは、この順でヨーク７３の後側壁７３ｂの前面中心部に固定されることで、ヨーク７３の筒状部７３ａ内に設置されている。そして、筒状部７３ａの前部は、筐体４１（中空パイプ５１）の後部に取り付けられている。
The VCM 70 includes a fixed part 71 and a moving part 72.
The fixed portion 71 includes an iron (magnetic material) yoke 73 having a cylindrical tubular portion 73a having a center axis in the front-rear direction and a disc-shaped rear side wall 73b, and a columnar shape having a center axis in the front-rear direction. 2 magnets 74 (74a, 74b) and a columnar pole piece 75 having a central axis in the front-rear direction. The first magnet 74a, the pole piece 75, and the second magnet 74b are installed in the cylindrical portion 73a of the yoke 73 by being fixed to the front center portion of the rear side wall 73b of the yoke 73 in this order. The front portion of the tubular portion 73a is attached to the rear portion of the housing 41 (hollow pipe 51).
ヨーク７３の筒状部７３ａの右側壁には、前後方向に伸びた長孔形状の第一スリット７３ｃが形成されるとともに、ヨーク７３の筒状部７３ａの左側壁には、前後方向に伸びた長孔形状の第二スリット７３ｄが形成されている。すなわち、第一スリット７３ｃと第二スリット７３ｄとは、ヨーク７３の筒状部７３ａの中心軸（Ｘ方向）で点対称となる位置に形成されている。 A long hole-shaped first slit 73c extending in the front-rear direction is formed on the right side wall of the cylindrical portion 73a of the yoke 73, and a left-side wall of the cylindrical portion 73a of the yoke 73 extends in the front-rear direction. A long slit-shaped second slit 73d is formed. That is, the first slit 73c and the second slit 73d are formed at positions that are point-symmetric with respect to the central axis (X direction) of the cylindrical portion 73a of the yoke 73.
移動部７２は、前後方向に中心軸を有する円筒形状のボビン７２ａと、ボビン７２ａ後部の外周面に巻かれた円環形状のコイル７２ｂとを備える。そして、ボビン７２ａ前部はピストン５２後部に取り付けられている。また、コイル７２ｂは、ヨーク７３の筒状部７３ａとポールピース７５との間に配置されて、第一スリット７３ｃ内を上下方向（Ｙ方向）に貫通するように配置された電力供給端子（電力供給線）７２ｃを介して電源（図示略）と電気的に接続されている。さらに、移動部７２には、第二スリット７３ｄ内をＹ方向に貫通するように配置され、電力供給端子７２ｃと同形状のダミー電力供給端子７２ｄが形成されている。すなわち、電力供給端子７２ｃとダミー電力供給端子７２ｄとは、ヨーク７３の筒状部７３ａの中心軸（Ｘ方向）で点対称となる位置に形成されている。 The moving part 72 includes a cylindrical bobbin 72a having a center axis in the front-rear direction, and an annular coil 72b wound around the outer peripheral surface of the rear part of the bobbin 72a. The front portion of the bobbin 72a is attached to the rear portion of the piston 52. Further, the coil 72b is arranged between the cylindrical portion 73a of the yoke 73 and the pole piece 75, and is arranged so as to pass through the first slit 73c in the up-down direction (Y direction) (power supply terminal). It is electrically connected to a power source (not shown) via a supply line) 72c. Further, the moving portion 72 is provided with a dummy power supply terminal 72d which is arranged so as to penetrate through the second slit 73d in the Y direction and has the same shape as the power supply terminal 72c. That is, the power supply terminal 72c and the dummy power supply terminal 72d are formed at positions that are point-symmetric with respect to the central axis (X direction) of the cylindrical portion 73a of the yoke 73.
これにより、コイル７２ｂに電力供給端子７２ｃを介して電流を流すと、コイル７２ｂはヨーク７３とポールピース７５との間に形成される磁界によって電磁力（ローレンツ力）を受けて前後方向に移動することで、ピストン５２に固定された移動鏡５３も前後方向に移動するようになっている。このとき、ヨーク７３の筒状部７３ａの左右側壁のどちらにも、図４に示す「スリットあり」側の磁束密度が発生している。 As a result, when a current is applied to the coil 72b through the power supply terminal 72c, the coil 72b receives electromagnetic force (Lorentz force) by the magnetic field formed between the yoke 73 and the pole piece 75 and moves in the front-rear direction. As a result, the movable mirror 53 fixed to the piston 52 also moves in the front-rear direction. At this time, the magnetic flux density on the “with slit” side shown in FIG. 4 is generated on both the left and right side walls of the tubular portion 73a of the yoke 73.
コンピュータ３０は、ＣＰＵ３１や入力装置３２を備える。また、ＣＰＵ３１が処理する機能をブロック化して説明すると、光検出部２０からインターフェログラムを取得する光強度情報取得部３１ａと、試料Ｓの吸光度スペクトル等を算出する試料測定部３１ｂと、入力装置３２で入力された入力情報に基づいて移動鏡ユニット５０における移動鏡速度や移動距離を制御する移動鏡制御部３１ｃと、固定鏡ユニット６０におけるアライメント機構６２を制御する固定鏡制御部３１ｄとを有する。 The computer 30 includes a CPU 31 and an input device 32. In addition, when the function of the CPU 31 is described as a block, a light intensity information acquisition unit 31a that acquires an interferogram from the light detection unit 20, a sample measurement unit 31b that calculates the absorbance spectrum of the sample S, and an input device. It has a moving mirror control unit 31c that controls the moving mirror speed and moving distance in the moving mirror unit 50 based on the input information input at 32, and a fixed mirror control unit 31d that controls the alignment mechanism 62 in the fixed mirror unit 60. ..
以上のように、本発明のＦＴＩＲ１によれば、第一スリット７３ｃと第二スリット７３ｄとがヨーク７３の中心軸で対称となる位置に設けられているので、推力差が解消されて回転運動を起こすモーメントの発生がなくなり、高速駆動時の移動鏡５３と固定鏡６１との角度ずれを１秒以下に抑えることができる（図５（ａ）参照）。 As described above, according to the FTIR 1 of the present invention, since the first slit 73c and the second slit 73d are provided at positions symmetrical with respect to the central axis of the yoke 73, the thrust difference is eliminated and the rotational movement is prevented. The generation of the moment to be generated is eliminated, and the angular deviation between the movable mirror 53 and the fixed mirror 61 during high speed driving can be suppressed to 1 second or less (see FIG. 5A).
＜他の実施形態＞
（１）上述したＦＴＩＲ１では、ダミー電力供給端子７２ｄを設けた構成を示したが、コイルが電力供給端子を介して電源と電気的に接続されるとともにダミー電力供給端子を介して電源と電気的に接続されるような構成としてもよい。
<Other Embodiments>
(1) In the FTIR 1 described above, the configuration in which the dummy power supply terminal 72d is provided is shown. However, the coil is electrically connected to the power supply via the power supply terminal and electrically connected to the power supply via the dummy power supply terminal. It may be configured to be connected to.
（２）上述したＦＴＩＲ１では、ダミー電力供給端子７２ｄを設けた構成を示したが、ダミー電力供給端子を設けない構成としてもよい。 (2) Although the FTIR 1 described above has the configuration in which the dummy power supply terminal 72d is provided, the configuration may be such that the dummy power supply terminal is not provided.
本発明は、フーリエ変換赤外分光光度計等の干渉分光光度計に好適に利用することができる。 INDUSTRIAL APPLICABILITY The present invention can be suitably used for an interference spectrophotometer such as a Fourier transform infrared spectrophotometer.
１ ＦＴＩＲ（干渉分光光度計）
７０ ＶＣＭ（ボイスコイルモータ）
７１ 固定部
７２ 移動部
７２ｂ コイル
７２ｃ 電力供給端子（電力供給線）
７３ ヨーク
７３ａ 筒状部
７３ｃ、７３ｄ スリット
７４ マグネット
1 FTIR (Interference spectrophotometer)
70 VCM (voice coil motor)
71 fixed part 72 moving part 72b coil 72c power supply terminal (power supply line)
73 yoke 73a tubular portions 73c, 73d slit 74 magnet
Claims (4)
固定鏡と、
移動鏡および当該移動鏡を往復移動させるボイスコイルモータを備えた移動鏡ユニットと、
前記光源部からの光を受けて、前記固定鏡と前記移動鏡とに向けて２分割するとともに、前記固定鏡で反射して戻ってきた光と前記移動鏡で反射して戻ってきた光とを受けて、干渉光に合成するビームスプリッタと、
試料が配置され、当該試料を透過又は反射した干渉光を検出する光検出部と、を備えた干渉分光光度計であって、
前記ボイスコイルモータは、
筒状部を有するヨークと、当該筒状部内に設置されたマグネットとが固定された固定部と、
前記ヨークの筒状部と前記マグネットとの間に配置される筒形状のコイルと、前記移動鏡とが固定された移動部と、
前記コイルと電源とを接続する電力供給線とを備え、
前記ヨークの筒状部には、前記電力供給線が通される第一のスリットが形成されており、
前記ヨークの第一スリットとは筒状部の中心軸で対称となる位置に第二のスリットが形成され、
前記コイルが前記電力供給線を介して給電されて前記マグネットにより形成される電磁力を受けることにより、前記移動部に固定された前記移動鏡が前記固定部に対して往復移動するように形成されることを特徴とする干渉分光光度計。 A light source unit that emits light,
A fixed mirror,
A moving mirror unit including a moving mirror and a voice coil motor that reciprocates the moving mirror;
Upon receiving light from the light source unit, the light is divided into two parts toward the fixed mirror and the movable mirror, and light reflected by the fixed mirror and returned and light reflected by the movable mirror and returned. A beam splitter that receives the light and synthesizes it into interference light,
An interference spectrophotometer comprising a photodetector, in which a sample is arranged, and which detects an interference light transmitted or reflected through the sample,
The voice coil motor is
A yoke having a tubular portion, and a fixed portion to which a magnet installed in the tubular portion is fixed,
A tubular coil arranged between the tubular portion of the yoke and the magnet, and a moving portion to which the moving mirror is fixed,
A power supply line connecting the coil and a power source,
The cylindrical portion of the yoke is formed with a first slit through which the power supply line passes ,
A second slit is formed at a position symmetrical with the central axis of the tubular portion with the first slit of the yoke,
When the coil is fed through the power supply line and receives an electromagnetic force formed by the magnet, the movable mirror fixed to the moving portion is formed to reciprocate with respect to the fixed portion. An interferometric spectrophotometer characterized in that
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| JP2016145487 | 2016-07-25 | ||
| PCT/JP2017/021051 WO2018020847A1 (en) | 2016-07-25 | 2017-06-07 | Voice coil motor, and movable mirror unit and interference spectrophotometer equipped with same |
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| EP (1) | EP3490124A4 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4546277A (en) * | 1984-07-02 | 1985-10-08 | Carbonneau Industries, Inc. | Linear motor |
| JPS61203858A (en) * | 1985-03-05 | 1986-09-09 | Secoh Giken Inc | Voice coil type actuator |
| US5276545A (en) * | 1989-03-24 | 1994-01-04 | Nicolet Instrument Corporation | Mirror alignment and damping device |
| JPH0554523A (en) * | 1991-08-27 | 1993-03-05 | Hitachi Ltd | Method for damping vibration of disk device |
| US5896197A (en) * | 1992-01-08 | 1999-04-20 | Nicolet Instrument Corporation | Interferometer having glass graphite bearing |
| JP3907912B2 (en) * | 2000-03-30 | 2007-04-18 | 株式会社ソディック | Primary member for linear DC motor and linear DC motor |
| US6865282B2 (en) * | 2003-05-01 | 2005-03-08 | Richard L. Weisman | Loudspeaker suspension for achieving very long excursion |
| JP2006220776A (en) * | 2005-02-09 | 2006-08-24 | Shicoh Eng Co Ltd | Drive unit and lens drive unit |
| JP2008268404A (en) * | 2007-04-18 | 2008-11-06 | Tricore Corp | Voice coil type lens drive device |
| JP2010183677A (en) * | 2009-02-03 | 2010-08-19 | Yamatake Corp | Voice coil motor |
| JP5556449B2 (en) * | 2010-07-02 | 2014-07-23 | 株式会社島津製作所 | Spectrometer |
| JP5880816B2 (en) * | 2011-09-28 | 2016-03-09 | ミツミ電機株式会社 | Lens drive device |
| JP5274733B1 (en) * | 2011-10-13 | 2013-08-28 | オリンパスメディカルシステムズ株式会社 | Imaging unit and endoscope |
| CN104769500B (en) * | 2012-08-21 | 2018-07-31 | Asml荷兰有限公司 | Lithographic equipment and device making method |
| JP5761433B2 (en) * | 2014-06-27 | 2015-08-12 | 株式会社島津製作所 | Interference spectrophotometer |
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| CN109643944A (en) | 2019-04-16 |
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| EP3490124A4 (en) | 2020-02-26 |
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