JP6691676B2 - Liquid ejector - Google Patents

Description

  The present invention relates to a liquid ejection device that ejects liquid.

  The liquid ejecting apparatus includes a liquid container that ejects liquid due to a pressure change, an actuator that causes a pressure change in the liquid container based on a drive signal, and an actuator substrate provided with the actuator. A drive substrate that outputs the drive signal is connected to the actuator substrate.

  On one surface of the actuator substrate, a contact portion for inputting a drive signal and a contact portion for connecting to a ground potential are arranged in parallel. The contact portions are arranged side by side in one direction. On the drive substrate, a plurality of conducting wires connected to the contact portions of the actuator substrate are arranged in parallel in the one direction on the facing surface facing the actuator substrate. The contact portion of the actuator substrate and the conducting wire of the drive substrate are connected after positioning, but there is a case where a positional deviation occurs during the connection. As a measure against positional displacement, a liquid ejection device using an actuator substrate having a contact portion formed in a concave shape has been proposed (see, for example, Patent Documents 1 and 2).

JP, 6-316065, A JP, 2005-125521, A

  However, when the pitch in the arrangement of the conductor wires of the actuator substrate and the drive substrate becomes small, the positional deviation becomes remarkable. Here, as the pitch becomes smaller, the width of the contact portion in the one direction must be made smaller. However, when the width is made smaller, it becomes difficult to form the contact portion in a concave shape in which the conducting wire fits. On the other hand, it is difficult to shorten the width of the lead wire of the drive substrate in the one direction. Therefore, there is a problem that it becomes difficult to prevent the deviation as the pitch becomes smaller.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a liquid ejecting device that can easily prevent displacement of contact points and conducting wires when connecting an actuator substrate and a drive substrate. To provide a device.

A liquid ejecting apparatus according to the present invention has an actuator substrate provided with a plurality of actuators that cause a pressure change based on a drive signal in a liquid container that ejects liquid, and an opposing surface that faces one surface of the actuator substrate, A drive substrate that outputs the drive signal to the actuator, has a convex shape, is provided in parallel on the one surface, and a drive contact portion for transmitting a drive signal to the individual electrode of each actuator , and a drive contact portion from the drive contact portion. Also has a large width in the parallel installation direction, is provided next to the drive contact portion, and is provided in parallel with the ground contact portion, which connects the common electrode of the actuator to the ground potential, on the facing surface and faces the drive contact portion. a first conductor connected Te, provided on the opposing surface, and a second conductor connected to face the ground contact portion, the part of the second conductor is opposite the ground contact portion Characterized in that it comprises a recess provided in the.

According to the present invention, when the actuator substrate and the driving substrate are connected, the second conducting wire is locked in one direction by the recess, thereby preventing the driving contact portion and the first conducting wire from being displaced in the same direction. And reliable connection is possible. To form a recess wider ground contact portion than the moving contact portion, it is possible to even when alignment pitch of the moving contact portion and the first conductor is less forming a recess in easily. Therefore, when connecting the actuator substrate and the connection substrate, it is possible to easily prevent the contact portion and the conductive wire from being displaced.

A liquid ejecting apparatus according to the present invention has an actuator substrate provided with a plurality of actuators that cause a pressure change based on a drive signal in a liquid container that ejects liquid, and an opposing surface that faces one surface of the actuator substrate, Next to the drive contact portion, which has a convex shape with the drive substrate that outputs the drive signal to the actuator, is arranged in parallel on the one surface, and which transmits the drive signal to the individual electrode of each of the actuators, and the drive contact portion. And a ground contact portion for connecting the common electrode of the actuator to a ground potential, a first conductor wire provided in parallel with the facing surface and connected to face the drive contact portion, and provided on the facing surface. , and a second conductor that faces the ground contact portion, said ground contact portion, contact is formed by a plurality of convex partial body arranged in the arrangement direction of the moving contact portion A plurality of the second conductive wires are arranged in parallel in the same direction as the split body at different intervals, and at least one second conductive wire faces a concave portion between adjacent split bodies, and the remaining second conductive wire is provided. Is connected to the split body .

According to the present invention, the plurality of divided bodies forming the ground contact portion and the plurality of second conductive wires are arranged at different intervals, so that a part of the second conductive wires faces the concave portion between the divided bodies. and becomes, when connecting the actuator substrate and the driving substrate, a part of the second conductor is pushed into the recess engage, can prevent displacement in the same direction. Further, when the actuator substrate and the drive substrate are adhered with an adhesive, the recesses can secure a space for the adhesive to move from between the second conducting wire and the divided body at the time of adhering, and good adhesion can be achieved.

A liquid ejecting apparatus according to the present invention has an actuator substrate provided with a plurality of actuators that cause a pressure change based on a drive signal in a liquid container that ejects liquid, and an opposing surface that faces one surface of the actuator substrate, Next to the drive contact portion, which has a convex shape with the drive substrate that outputs the drive signal to the actuator, is arranged in parallel on the one surface, and which transmits the drive signal to the individual electrode of each of the actuators, and the drive contact portion. And a ground contact portion for connecting the common electrode of the actuator to a ground potential, a first conductor wire provided in parallel with the facing surface and connected to face the drive contact portion, and provided on the facing surface. , and a second conductor connected to face the ground contact portion, at predetermined intervals along the arrangement direction of the moving contact portion a plurality of said second conductor is arranged Cage, to the ground contact portion, characterized in that the recess in the opposing portion between each of the plurality of second conductors are provided.

According to the present invention, since the recess corresponding to each of the plurality of second conducting wires is provided in the ground contact portion , at least one second conducting wire engages with the recess when connecting the actuator substrate and the drive substrate. It can be prevented favorably positional deviation.

  The liquid ejecting apparatus according to the present invention is characterized by including a piezoelectric film disposed between the adjacent recesses.

  According to the present invention, the convex portion can be formed by the thickness of the piezoelectric film, and the concave portion can be formed in the region sandwiched by the convex portion, so that the concave portion can be easily formed. In addition, by using a piezoelectric film made of the same material as the piezoelectric film used for the actuator, the piezoelectric film related to the convex portion is arranged at the time of forming the actuator, and then the wide contact portion is provided to inevitably form the convex film. Portions and recesses can be formed. Therefore, it is not necessary to provide a step for forming the recess.

In the liquid ejection device according to the present invention, the drive contact portion and the ground contact portion cover a conductor connected to one of the one surface or the opposite surface, and cover the conductor to face the first conductor wire or the second conductor wire. And a conductive film laminated on the insulating film, and the width of the slit of the insulating film of the ground contact part is equal to the insulating film of the drive contact part. The width is wider than the width of the slit, and the recess is formed by the slit of the insulating film of the ground contact portion.

According to the present invention, since the width of the slit of the insulating film of the ground contact portion is wider than the width of the slit of the insulating film of the driving contact portion, the conductive film is dented on the slit side when connecting the actuator substrate and the driving substrate. It is easy to form the recess by the slit. Therefore, it becomes easy to form the concave portion.

  In the liquid ejection device according to the present invention, the dimension from one of the one surface or the opposing surface to the bottom of the recess is the same as the dimension from one of the one surface or the opposing surface to the protruding end of the drive contact portion. It is characterized by

  According to the present invention, the dimension from the one surface or the opposing surface provided with the drive contact portion to the bottom of the recess is the same as the dimension from the one surface or the opposing surface provided with the drive contact portion to the protruding end of the drive contact portion. Is. Therefore, the first conductive wire and the drive contact portion are connected well to the second conductive wire and the wide contact portion, respectively.

  In the liquid ejection device according to the present invention, the actuator substrate and the drive substrate are bonded by an adhesive containing a conductive filler, and the particle diameter of the conductive filler is larger than the depth dimension of the recess. Characterize.

  According to the present invention, at the time of connecting the actuator substrate and the driving substrate, the filler located in the recess can be crushed by the conductive wire. As a result, the electrical connection between the contact portion and the conducting wire becomes good.

  The liquid ejection device according to the present invention is characterized in that the width of the recess is wider than the width of the second conductive wire.

  According to the present invention, the second conductive wire is easily fitted in the recess.

The liquid ejecting apparatus according to the present invention is characterized in that the ground contact portion is provided outside the row at one end of the row of the drive contact portions.

  According to the present invention, the second wiring is locked at one end side of the row in which the drive contact portions are arranged side by side, so that the contact portions and the conducting wires can be easily aligned when connecting the actuator substrate and the drive substrate.

The liquid ejecting apparatus according to the present invention is characterized in that the ground contact portion is provided outside each row of the drive contact portions at both ends of the row.

  According to the present invention, positional displacement can be better prevented in connecting the actuator substrate and the connection substrate.

  The liquid ejection device according to the present invention is characterized in that the drive contact portion is provided with a locking hole for locking the first conducting wire.

According to the present invention, not only the ground contact portion but also the first conductive wire is locked by the locking hole of the drive contact portion, so that the displacement of the actuator substrate and the drive substrate can be further prevented.

  According to the present invention, it is possible to easily prevent the contact portion and the conductive wire from being displaced when connecting the actuator substrate and the drive substrate.

1 is a schematic diagram showing a configuration of a printer in Embodiment 1. FIG. FIG. 2 is a sectional view taken along line II-II of FIG. 1. It is a schematic diagram of a composition of an inkjet head. FIG. 3 is a plan view of the head unit according to the first embodiment. FIG. 5 is a sectional view taken along line VV of FIG. 4. FIG. 6 is a sectional view taken along line VI-VI in FIG. 5. It is sectional drawing which shows the structure of a drive contact part. FIG. 6 is a cross-sectional view showing a connection configuration of a COF and an actuator substrate of the head unit according to the second embodiment. FIG. 9 is a cross-sectional view showing a connection configuration of a COF and an actuator substrate of the head unit according to the third embodiment. FIG. 11 is a cross-sectional view showing a connection structure of a COF and an actuator substrate of the head unit according to the fourth embodiment. It is sectional drawing which shows the structure of a ground contact part .

Hereinafter, the present invention will be described in detail with reference to the drawings showing an embodiment thereof.
(Embodiment 1)
FIG. 1 is a schematic diagram showing the configuration of the printer according to the first embodiment. FIG. 2 is a sectional view taken along line II-II of FIG. In FIG. 1, reference numeral 100 denotes a printer. The printer 100 includes a housing 1, a platen 2 arranged in the housing 1, a plurality of ink jet heads 3, 3, ... Two rollers 4, 4 and a controller 5 are provided. The front-back, left-right, and up-down directions used in the following description are shown in each drawing.

  A recording paper 101 on which printing is performed by the printer 100 is placed on the platen 2 and conveyed in the front-rear direction. The rollers 4 and 4 are installed on the front side and the rear side of the platen 2, respectively, and the recording paper 101 is conveyed from the rear side to the front side by the rotation of the rollers 4 and 4.

  Each of the inkjet heads 3 has a rectangular plate shape whose outer shape is long in the left-right direction, is arranged to face the platen 2 in the vertical direction, and when the recording paper 101 is placed on the platen 2, the paper surface of the recording paper 101. To face. The inkjet heads 3, 3, ..., 3 are held by holding bodies 3a at both ends in the left-right direction so as to be separated from the platen 2 by a predetermined distance. The inkjet heads 3, 3, ..., 3 are arranged side by side in the front-rear direction between the two rollers 4, 4. Each of the inkjet heads 3, 3, ..., 3 corresponds to one color, for example, cyan, magenta, yellow, and black. The number of the inkjet heads 3, 3, ..., 3 is not limited to the illustrated number.

  The control device 5 includes a CPU (Central Processing Unit) or MPU (Microprocessor Unit), a storage device such as a ROM (Read-Only Memory) and a RAM (Random-Access Memory), and the like. The control device 5 is also capable of mutual communication with an external device such as a personal computer. The controller 5 controls the operations of the inkjet heads 3, 3, ..., 3 and the two rollers 4, 4 according to a program stored in the ROM according to an instruction from an external device or an operation unit (not shown) included in the printer 100. To do. Specifically, the control device 5 operates a motor (not shown) that drives the two rollers 4 and 4 to control the operation of the two rollers 4 and 4 to convey the recording paper 101. The control device 5 operates the inkjet heads 3, 3, ..., 3 while the recording paper 101 is being conveyed to eject ink onto the recording paper 101.

  FIG. 3 is a schematic diagram of the configuration of the inkjet head 3. In FIG. 3, the inkjet head 3 is viewed from below. As shown in FIG. 3, the inkjet head 3 has a rectangular plate-shaped holder 30 and a plurality of head units 31 (nine in the figure) held by the holder 30. The head unit 31 is arranged on the side of the inkjet heads 3, 3, ..., 3 that faces the platen 2. Further, the head units 31 are juxtaposed in the left-right direction so as to form a staggered shape that is divided into a front row and a rear row. In FIG. 3, four head units 31 are arranged in the left-right direction in the front row, and five head units 31 are arranged in the left-right direction in the rear row. The number of head units 31 is not limited to the number shown. Nozzles 332 for ejecting ink are provided on the surface of the head unit 31 facing the platen 2 as described later.

  As shown in FIGS. 1 and 2, the ink jet head 3 is provided with a reservoir 32 for accumulating ink above the holder 30. The reservoir 32 is connected to an ink cartridge (not shown), receives supply of ink from the ink cartridge, and stores a predetermined amount of the ink. The reservoir 32 is connected to each head unit 31 and supplies ink to the head unit 31. Note that the illustration of the reservoir 32 is omitted in FIG.

  FIG. 4 is a plan view of the head unit 31 according to the first embodiment, and FIG. 5 is a sectional view taken along line VV of FIG. As shown in FIGS. 4 and 5, the head unit 31 includes a rectangular actuator substrate 33 which is long in the left-right direction, an actuator 34 formed on the upper surface of the actuator substrate 33, and a cover on the upper surface so that a peripheral portion is left. And a COF (Chip On Film) 36 connected to one long side portion of the peripheral portion of the actuator substrate 33.

  As shown in FIG. 5, the actuator substrate 33 has a flow path substrate 33a, a vibration film 33b is overlaid on the upper surface of the flow path substrate 33a, and a nozzle plate 33c is overlaid on the lower surface of the flow path substrate 33a. ing. The flow path substrate 33a is provided with a plurality of rectangular through holes, and in the actuator substrate 33, the pressure chamber 330 is formed by sandwiching the holes of the flow path substrate 33a with the vibrating membrane 33b and the nozzle plate 33c. Has been done. Further, a small hole 331 smaller than the pressure chamber 330 is provided in a portion of the vibration film 33b where the pressure chamber 330 is formed. Further, a nozzle 332 smaller than the pressure chamber 330 is penetratingly provided in a portion of the nozzle plate 33c where the pressure chamber 330 is formed.

  The actuator 34 is formed above the pressure chamber 330 on the upper surface of the vibrating film 33b. The actuator 34 has a piezoelectric film 340, an individual electrode 341 is stacked on the upper surface of the piezoelectric film 340, and a common electrode 342 is stacked on the lower surface of the piezoelectric film 340. The common electrode 342 is arranged on the upper surface of the vibrating film 33b. As the piezoelectric film 340, for example, a PZT thin film containing lead zirconate titanate (PZT) as a main component is used. A voltage is applied to the piezoelectric film 340 due to the potential difference generated between the individual electrode 341 and the common electrode 342. As a result, an electric field parallel to the thickness direction, that is, the vertical direction, acts on the piezoelectric film 340 to extend in the thickness direction and contract in the plane direction. Due to the contraction of the piezoelectric film 340, the vibrating film 33b becomes convex toward the pressure chamber 330 side, and the ink filling the pressure chamber 330 is ejected from the nozzle 332. Further, a convex drive contact portion 37 is provided on the upper surface of the vibrating film 33b, that is, the one long side portion on the upper surface of the actuator substrate 33, and the individual electrode 341 and the drive contact portion 37 are connected to the individual wiring 375. Connected by.

  As shown in FIG. 4, the pressure chambers 330 are juxtaposed in the left-right direction so as to form a zigzag pattern that is divided into a front row and a rear row. The actuators 34 are juxtaposed corresponding to the pressure chambers 330. The drive contact portions 37 are provided corresponding to the respective pressure chambers 330, and are arranged side by side at equal intervals in the left-right direction on the one long side portion of the actuator substrate 33. At both ends of the row in which the drive contact portions 37 are arranged in parallel, ground contact portions 38 are provided outside the row. The lateral width of the ground contact portion 38 is wider than the lateral width of the drive contact portion 37. Each common electrode 342 of the actuator 34 is connected to one of the ground contact points 38 via a common electrode wiring 385. The ground contact portion 38 may be provided inside the row of the drive contact portions 37.

  The cover 35 has a rectangular plate shape, and two cover holes 350 extending in the left-right direction are provided at the front and rear of the lower surface, respectively. Each coating hole 350 covers the entire row of the actuators 34, and the individual wiring 375 is drawn out from between the cover 35 and the vibration film 33b. In the cover 35, an ink storage portion 351 that stores ink and is supplied from the reservoir 32 is provided above the covering hole 350. In addition, the cover 35 is provided with an ink supply passage 352 from the ink storage portion 351 to the lower surface of the cover 35 at a position corresponding to each pressure chamber 330 and not overlapping the covering hole 350. The ink storage portion 351 and the pressure chamber 330 communicate with each other through the ink supply passage 352 and the small hole 331 of the vibrating film 33b. When the ink is sufficiently supplied, the ink storage portion 351, the ink supply passage 352, and the pressure chamber 330 are filled with the ink.

  The COF 36 is arranged above the actuator substrate 33. On the lower surface of the COF 36, that is, the surface facing the actuator substrate 33, a driver IC 360 and a plurality of drive wirings 361 having one end connected to the driver IC 360 and the other end extending toward the actuator substrate 33 are provided. Note that the drive wiring 361 is not shown in FIG. 4, and only a single drive wiring 361 is shown in FIG. The other end of each drive wire 361 is connected to each drive contact portion 37 of the actuator substrate 33. The driver IC 360 receives a control signal from the control device 5 via a wire (not shown), and generates a drive signal for driving the actuator 34 based on the received control signal. Further, the driver IC 360 outputs the generated drive signal to the drive contact portion 37 of the actuator 34. The drive signal is input to the drive contact portion 37 and then to the individual electrode 341.

  FIG. 6 is a sectional view taken along line VI-VI of FIG. The drive wirings 361 are arranged so as to project from the lower surface of the COF 36, and are provided at equal intervals in the left-right direction at the connection portion with the actuator substrate 33. The distance L1 related to the drive wiring 361 is the dimension between the facing surfaces of the base end portions of the adjacent drive wirings 361. The drive wiring 361 is provided so that the width in the left-right direction at the protruding end portion is L2. Further, the drive contact portions 37 are provided at equal intervals with an interval L1 so that each drive contact portion 37 faces each drive wiring 361. Here, the distance L1 related to the drive contact portion 37 is a dimension between the facing surfaces of the drive contact portion 37. The drive contact portions 37 and the drive wirings 361 are connected such that the upper surface of the drive contact portion 37 is in contact with the lower surface of each drive wiring 361.

  The COF 36 is further provided with a plurality of ground wirings 362 (six in the figure) at equal intervals at both ends of the row in which the drive wirings 361 are juxtaposed, at intervals L1 outside the row. .. The distance L1 related to the ground wiring 362 is a dimension between the facing surfaces of the base end portions of the adjacent ground wirings 362. The ground wiring 362 is provided so that the width in the left-right direction at the protruding end portion is L3. The ground wiring 362 is connected to the ground potential. The COF 36 is connected to the actuator substrate 33 via the drive wiring 361 and the ground wiring 362, and the drive contact portion 37 and the ground contact portion 38 of the actuator substrate 33. In FIG. 6, the ground wiring 362 at one end is shown. The number of ground wirings 362 is not limited to the number shown.

The ground contact portion 38 of the actuator substrate 33 has a plurality of convex conductive portions 38a (seven in the figure) that are arranged in parallel in the left-right direction with a gap L4 narrower than the gap L1. Here, the distance L4 is a dimension between the facing surfaces of the adjacent conducting portions 38a, and is wider than the width L3 of the protruding end portion of the ground contact portion 362. In the ground contact portion 38, the upper surface of the actuator substrate 33 is exposed between the adjacent conducting portions 38a. Further, in the ground contact portion 38, a concave portion 38b is formed by the side surface of the conducting portion 38a and the upper surface of the actuator substrate 33. Here, in the ground contact portion 38, the conductive portion 38a and the recessed portion 38b are formed by forming an original wide contact member at the position where the ground contact portion 38 is formed, and then removing the portion to be the recessed portion 38b by etching. , And is formed by leaving the conducting portion 38a as a divided body . In FIG. 6, among the ground lines 362, four driving lines 361 side, is connected to the conductive portion 38a at the lower surface of the whole or part, the two of the most one end side, opposite to the bottom surface of the recess 38b ing. The ground contact portion 38 provided with the conducting portion 38a and the recessed portion 38b may be provided only on one end side. Further, the number of conducting portions 38a is not limited to the number shown in the figure, and may be appropriately determined based on the number of ground wirings 362, the width of the ground contact portion 38 in the left-right direction, and the like.

  The actuator substrate 33 and the COF 36 are adhered by an adhesive 39, and the lower surface of the drive wiring 361 and the upper surface of the drive contact portion 37 are adhered by the adhesive 39. In addition, in the connecting portion of the ground wiring 362 and the conducting portion 38a, the lower surface of the ground wiring 362 and the upper surface of the conducting portion 38a are bonded by the adhesive 39. The adhesion with the adhesive 39 is performed by, for example, an ACF (Anisotropic Conductive Film) method, an NCF (Non-Conductive Film) method, an ACP (Anisotropic Conductive Paste) method, or an NCP (Non-Conductive Paste) method.

  FIG. 7 is a cross-sectional view showing the structure of the drive contact portion 37. The drive contact portion 37 has a conductor 370 arranged on the upper surface of the actuator substrate 33, and an insulating film 371 covering the upper surface and side surfaces of the conductor 370. The insulating film 371 is provided with a slit 372 in a portion which covers an upper surface of the conductor 370, that is, a portion which faces the driving wiring 361. The width L5 of the slit 372 in the left-right direction at the conductor 370 side portion is smaller than the width L2 in the left-right direction at the protruding end portion of the drive wiring 361 as shown in FIG. Two conductive films 373 and 376 are laminated on the insulating film 371. Note that the number of conductive films is not limited to two. The slit 372 secures continuity between the drive wiring 361 of the COF 36 and the drive contact portion 37 of the actuator substrate 33.

  When the printer 100 configured as described above receives an operation instruction from the external device or the operation unit of the printer 100, the printer 100 executes the program stored in the ROM and performs the following operation. The controller 5 operates the two rollers 4 and 4 to convey the recording sheet 101 on the platen 2. Further, the control device 5 transmits a control signal to the driver IC 360 of the COF 36, and the driver IC 360 receives the control signal. The driver IC 360 inputs the drive signal generated based on the received control signal to the drive contact portion 37 of the actuator substrate 33 via the drive wiring 361. The drive signal input to the drive contact portion 37 is input to the individual electrode 341 via the individual wiring 375.

  The potential of the individual electrode 341 changes according to the supplied drive signal. On the other hand, the potential of the common electrode 342 is kept at the ground potential. Therefore, a potential difference is generated between the individual electrode 341 and the common electrode 342 according to the drive signal, and a voltage corresponding to the potential difference is applied to the piezoelectric film 340. As a result, the piezoelectric film 340 contracts in the surface direction, the vibrating film 33b bends so as to be convex toward the pressure chamber 330, and a pressure change occurs in the pressure chamber 330, and ink is ejected from the nozzle 332.

  The control device 5 causes a pressure change in each actuator 34 of each head unit 31 in each inkjet head 3 and ejects a predetermined amount of ink of each color to an appropriate place on the recording paper 101 to be conveyed. As a result, a desired image is printed on the recording paper 101. The recording paper 101 on which the image is printed is output to the outside of the housing 12 via an output unit (not shown).

  According to the above configuration, since the conducting portions 38a of the ground contact portion 38 are arranged with the gap L4 narrower than the gap L1 related to the parallel arrangement of the ground wirings 362, at least one ground wiring 362 is one conducting portion. In the arrangement connected to 38a, a part of the other ground wiring 362 faces the bottom of the recess 38b. Therefore, when the ground wiring 362 is slightly pushed into the concave portion 38b when the actuator substrate 33 and the COF 36 are connected, or due to variations in the manufacturing of the ground wiring 362, the ground wiring 362 enters the concave portion 38b and the conductive portion If the recess 38b is located slightly closer to the recess 38b than the upper surface of the recess 38a, the recess 38b may come into contact with the edge of the recess 38b. Accordingly, when the actuator substrate 33 and the COF 36 are displaced in the left-right direction when they are connected to each other, the ground wiring 362 is locked by the recess 38b, and the position shift in the left-right direction can be prevented. Further, since the recess 38b is formed in the ground contact 38 which is wider in the left-right direction than the drive contact 37, the recess is formed more easily than the drive contact 37 even when the pitch is small. be able to. Therefore, when connecting the actuator substrate 33 and the COF 36, it is possible to easily prevent displacement.

  Since the width of the ground wiring 362 in the left-right direction is wider than that of the drive contact portion 37, the resistance value in connecting the actuator 34 to the ground potential can be reduced.

  Since the ground wiring 362 is locked on the end side of the row in which the drive contact portions 37 are juxtaposed, the actuator substrate 33 and the COF 36 can be easily aligned with each other. Since the ground contact portions 38 are provided at both ends of the row in which the drive contact portions 37 are juxtaposed, the displacement of the actuator substrate 33 and the COF 36 can be better prevented. The ground contact portion 38 may be provided only on one end side of the row of the drive contact portions 37, and the recess 38b may be provided only on the ground contact portion 38 on the one end side.

  When the actuator substrate 33 and the COF 36 are bonded with an adhesive, the recess 38b can secure a space for the adhesive 39 to move from between the ground wiring 362 and the conducting portion 38a, and the bonding can be performed well. Further, since the width L4 of the recess 38b is wider than the width L2 of the ground wiring 362, the ground wiring 362 is easily fitted in the recess 38b.

(Embodiment 2)
The second embodiment relates to the shape of the drive contact portion 37. FIG. 8 is a sectional view showing a connection configuration of the COF 36 and the actuator substrate 33 of the head unit 31 according to the second embodiment. Regarding the configuration of the head unit 31 according to the second embodiment, the same components as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

  In the second embodiment, locking holes 37a for locking the drive wiring 361 in the left-right direction are provided on the upper surface of each drive contact portion 37 of the actuator substrate 33 by fitting the drive wiring 361 therein. Since the drive wiring 361 is locked not only in the ground contact portion 38 but also in the locking hole 37a of the drive contact portion 37, the displacement can be better prevented in the connection between the actuator substrate 33 and the COF 36.

(Embodiment 3)
The third embodiment relates to the shape of the ground contact portion 38. FIG. 9 is a sectional view showing a connection configuration of the COF 36 and the actuator substrate 33 of the head unit 31 according to the third embodiment. Regarding the configuration of the head unit 31 according to the third embodiment, the same components as those in the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted.

  In the third embodiment, unlike the first embodiment, the ground contact portion 38 does not have the conducting portion 38a, but extends in the left-right direction. A plurality of ground wirings 362 are connected to the ground contact portion 38. On the upper surface of the actuator substrate 33, the piezoelectric films 38e are arranged side by side in the left-right direction so as to be located between the portions facing the ground wiring 362. The bottom surface of the piezoelectric film 38e is in contact with the top surface of the actuator substrate 33. The piezoelectric film 38e is made of the same material as the piezoelectric film 340 of the actuator 34. The ground contact portion 38 is provided along the upper surface of the actuator substrate 33 and the upper surface of the piezoelectric film 38e. On the upper surface of the ground contact portion 38, a convex portion 38c that corresponds to the thickness of the piezoelectric film 38e is provided. A recess 38d is formed between the adjacent protrusions 38c. That is, the piezoelectric film 38e is arranged between the adjacent recesses 38d. The ground wiring 362 is connected to the recess 38d.

  The width L6 in the left-right direction of the bottom portion of the recess 38d is wider than the width L3 of the ground wiring 362. Further, the height dimension from the upper surface of the actuator substrate 33 to the bottom of the recess 38d and the height dimension from the upper surface of the actuator substrate 33 to the upper surface of the drive contact portion 37 are the same dimension H.

  The actuator substrate 33 and the COF 36 are adhered by an adhesive 39, and the lower surface of the drive wiring 361 and the upper surface of the drive contact portion 37 are adhered by the adhesive 39. In addition, at the connection portion of the ground wiring 362 and the ground contact portion 38, the lower surface of the ground wiring 362 and the bottom surface of the recess 38 d are bonded by the adhesive 39. The adhesion with the adhesive 39 is performed by, for example, the ACF method, the NCF method, the ACP method, and the NCP method.

  Further, the adhesive 39 for bonding the COF 36 and the actuator substrate 33 contains a conductive filler. The particle size of the conductive filler is larger than the depth of the recess 38d. Therefore, the conductive filler sandwiched between the ground contact portion 38 and the ground wiring 362 is crushed in the recess 38d.

  According to the above configuration, when the actuator substrate 33 and the COF 36 are connected to each other, the ground wiring 362 is fitted in the recess 38d, so that the ground wiring 362 is locked in the left-right direction by the recess 38d to prevent displacement in the same direction. it can. Further, since the recess 38d is formed in the ground contact 38 which is wider in the left-right direction than the drive contact 37, the recess is formed more easily than the drive contact 37 even when the pitch is small. be able to. Therefore, it is possible to easily prevent the actuator substrate 33 and the COF 36 from being displaced during connection.

  Since the concave portion 38d is provided for each ground wiring 362, it is possible to prevent the positional shift more favorably. By arranging the piezoelectric film 38e, the convex portion 38c can be formed by the thickness of the piezoelectric film 38e, and the concave portion 38d can be formed in the region sandwiched by the convex portion 38c. Therefore, the recess 38d can be formed only by disposing the piezoelectric film 38e on the upper surface of the actuator substrate 33, which facilitates the formation of the recess 38d. Further, since the piezoelectric film 38e is made of the same material as the piezoelectric film 340 of the actuator 34, the protrusion 38c is inevitably provided by disposing the piezoelectric film 38e when forming the actuator 34 and then providing the ground contact portion 38. And the recess 38 can be formed. Therefore, it is not necessary to provide a step for forming the recess 38d.

  Since the size of the height from the upper surface of the actuator substrate 33 to the bottom of the recess 38d and the size of the height from the upper surface of the actuator substrate 33 to the upper surface of the drive contact part 37 are the same, the drive wiring 361 and the drive contact part The connection between 37 and the ground wiring 362 and the ground contact portion 38 is performed well. Further, since the particle diameter of the conductive filler is larger than the size of the recess 38d, the ground filler 362 can crush the conductive filler located in the recess 38d when the actuator substrate 33 and the COF 36 are bonded. As a result, the electrical continuity between the ground contact portion 38 and the ground wiring 362 becomes good. Furthermore, since the width of the bottom of the recess 38d is wider than the width of the ground wiring 362, the ground wiring 362 easily fits in the recess 38d.

(Embodiment 4)
The fourth embodiment relates to the shape of the ground contact portion 38. FIG. 10 is a cross-sectional view showing the connection configuration of the COF 36 and the actuator substrate 33 of the head unit 31 according to the fourth embodiment. Regarding the configuration of the head unit 31 according to the fourth embodiment, the same components as those in the first and third embodiments are denoted by the same reference numerals and detailed description thereof will be omitted.

  In the fourth embodiment, similarly to the third embodiment, the convex portion 38c and the concave portion 38d are provided, and the ground wiring 362 is connected to the concave portion 38d. The width L6 in the left-right direction at the bottom of the recess 38d is wider than the width L3 of the ground wiring 362.

  FIG. 11 is a sectional view showing the structure of the ground contact portion 38. The ground contact portion 38 has a conductor 380 arranged on the upper surface of the actuator substrate 33, and an insulating film 381 that covers the upper surface and the side surfaces of the conductor 380. The insulating film 381 is provided with a slit 382 in a portion which covers an upper surface of the conductor 380, that is, a portion which faces the ground wiring 362. Here, the width L7 in the horizontal direction of the conductor 380 side portion of the slit 382 of the ground contact portion 38 is wider than the width L3 in the horizontal direction of the protruding end side portion of the ground wiring 362 as shown in FIG. Here, the width L3 of the ground wiring 362 is equal to the width L2 of the drive wiring 361. Therefore, the width L7 of the slit 382 of the ground contact portion 38 in the left-right direction is wider than the width L5 of the slit 372 of the drive contact portion 37 shown in FIG. 7 in the same direction. If the width L7 of the slit 382 of the ground contact portion 38 is wider than the width L5 of the slit 372 of the drive contact portion 37, the width L2 of the drive wiring 361 and the width L3 of the ground wiring 362 may not be equal. Two conductive films 383 and 386 are laminated on the insulating film 381. Note that the number of conductive films is not limited to two. The slit 382 secures continuity between the drive wiring 361 of the COF 36 and the ground contact portion 38 of the actuator substrate 33. The slit 382 is formed corresponding to the recess 38d of the ground contact portion 38.

  According to the above configuration, similarly to the third embodiment, it is possible to easily prevent the actuator substrate 33 and the COF 36 from being displaced during connection. Since the width L7 of the slit 382 of the insulating film 381 of the ground contact portion 38 is wider than the width L5 of the slit 372 of the insulating film 371 of the drive contact portion 37, the conductive films 383 and 386 are connected when the actuator substrate 33 and the COF 36 are connected. Is easily dented on the slit 382 side, and the recess 382 is formed by the slit 382. Therefore, it becomes easy to form the recess 38d.

  The embodiments disclosed this time are to be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above meaning but by the scope of the claims, and is intended to include meanings equivalent to the scope of the claims and all modifications within the scope. That is, an embodiment obtained by combining technical means appropriately modified within the scope of the claims is also included in the technical scope of the present invention.

31 head unit (liquid ejection device)
33 actuator substrate 34 actuator 330 pressure chamber (liquid container)
36 COF (driving board)
36 1 Drive wiring (first conducting wire)
36 2 Ground wiring (2nd conductor)
3 7 Drive contact part 37a Locking hole 3 8 Ground contact part 38a Conducting part (division)
38b, 38d concave part 38c convex part 38e piezoelectric film 370, 380 conductor 371, 381 insulating film 372, 382 slit 373, 376, 383, 386 conductive film

Claims (10)

An actuator substrate provided with a plurality of actuators that generate a pressure change based on a drive signal in a liquid container that ejects liquid,
A drive substrate that has a facing surface that faces one surface of the actuator substrate, and that outputs the drive signal to the actuator;
A drive contact portion that is convex and is provided in parallel on the one surface, and a drive signal is transmitted to the individual electrodes of the actuators,
A ground contact portion which is provided next to the drive contact portion and which connects the common electrode of the actuator to a ground potential;
A first conductor wire arranged in parallel on the facing surface and connected to face the drive contact portion;
A second conductor wire provided on the facing surface and facing the ground contact portion;
The ground contact portion is formed of a plurality of convex divisions arranged in the juxtaposed direction of the drive contact portion,
A plurality of the second conductive wires are arranged in parallel in the same direction as the split body at different intervals, at least one second conductive wire faces a recess between adjacent split bodies, and the remaining second conductive wire is A liquid ejecting apparatus, wherein the liquid ejecting apparatus is connected to the division body. An actuator substrate provided with a plurality of actuators that generate a pressure change based on a drive signal in a liquid container that ejects liquid,
A drive substrate that has a facing surface that faces one surface of the actuator substrate, and that outputs the drive signal to the actuator;
A drive contact portion that is convex and is provided in parallel on the one surface, and a drive signal is transmitted to the individual electrodes of the actuators,
A ground contact portion which is provided next to the drive contact portion and which connects the common electrode of the actuator to a ground potential;
A first conductor wire arranged in parallel on the facing surface and connected to face the drive contact portion;
A second conductor wire provided on the facing surface and connected to face the ground contact portion, and the plurality of second conductor wires are arranged in parallel at predetermined intervals along a direction in which the drive contact portion is arranged. Has been done,
The liquid ejecting apparatus is characterized in that the ground contact portion is provided with a concave portion at a portion facing each of the plurality of second conducting wires. The liquid ejecting apparatus according to claim 2 , further comprising a piezoelectric film disposed between the adjacent recesses. The drive contact portion and the ground contact portion are
A conductor connected to one of the one surface or the opposite surface,
An insulating film which covers the conductor and has a slit provided in a portion facing the first conductive wire or the second conductive wire;
And a conductive film laminated on the insulating film,
The width of the slit of the insulating film of the ground contact portion is wider than the width of the slit of the insulating film of the drive contact portion,
The recess, the liquid ejecting apparatus according to claim 2 or claim 3, characterized in that it is formed by a slit of the insulating layer of the ground contact portion. And dimensions from one of the one surface or opposite surfaces to the bottom of the recess, said a dimension from one of one side or the opposite surface to the protruding end of the moving contact portion, from claim 2, wherein the at least one The liquid ejection device according to claim 4 . The actuator substrate and the drive substrate are bonded by an adhesive containing a conductive filler,
The particle size of the conductive filler is a liquid ejecting apparatus according to any one of the preceding claims 2 and greater than the depth of the recess. The liquid ejection device according to claim 6 , wherein the width of the recess is wider than the width of the second conductive wire. The ground contact portion at one end of the column of the moving contact portion, a liquid ejecting apparatus according to any one of claims 1 to 7, characterized in that provided outside of said column .. The ground contact portion, at opposite ends respectively of the columns of the moving contact portion, the liquid discharge according to any one of claims 1 to 8, characterized in that provided outside of said column apparatus. Wherein the moving contact portion, a liquid ejecting apparatus according to any one of claims 1 to 9, characterized in that the locking holes for locking said first conductor is provided.

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