JP6675679B2 - Measuring system and measuring method - Google Patents

Description

  The present invention relates to a measurement system and a measurement method for measuring a predetermined physical quantity of a measurement target. The present invention also relates to a switching device and a measurement jig suitable for use in the measurement system and the measurement method. Further, the present invention relates to a computer program for operating a computer as a control device for the measurement system.

  One type of frequency response analyzer (FRA) widely used as an impedance measuring instrument in the electrochemical field is Model 1260 manufactured by Solartron. This frequency response analyzer has a specification capable of measuring impedance in a frequency range of 10 μHz to 32 MHz. However, the frequency range in which accurate measurement is possible depends not only on the specifications of the measuring instrument but also on the required accuracy and the configuration of the measuring system.

  Specifically, the present inventor uses a carefully designed measuring jig and reduces the impedance of a standard sample (for example, a chip resistor) in a measuring system in which the coaxial cable length from the measuring instrument to the measuring jig is shortened to the limit. As a result of the measurement, it was possible to measure with an accuracy of ± 5% at an impedance value and phase with respect to a chip resistor in a range of 200Ω to 2kΩ at a signal frequency of 10MHz, but it was possible to measure with an accuracy satisfying an accuracy of ± 5% at 32MHz. There was no impedance range.

JP-A-10-10170

It is not always easy to realize the measurement with the required accuracy over the entire range of the specification of the measuring instrument, not limited to the measurement of the impedance. In some cases, measurement in a range wider than the range of the specification of the measuring instrument is desired.
Therefore, an object of the present invention is to provide a measurement system and a measurement method that are advantageous for securing a wide measurement range.

Another object of the present invention is to provide a switching device and a measuring jig suitable for a measuring system capable of securing a wide measuring range.
Still another object of the present invention is to provide a control program for configuring a control device of the above-described measurement system by a computer.

The present invention has a first terminal group to be connected to a measurement object, a first measuring device for measuring a predetermined physical quantity (specifically, impedance) of the measurement object according to a first measurement method, and a connection to the measurement object. A second measuring device for measuring the predetermined physical quantity of the object to be measured according to a second measuring method different from the first measuring method, and a second measuring device connected to the first terminal group. (1) Measuring device side terminal group, second measuring device side terminal group connected to the second terminal group, measurement target side terminal group, the first measuring device side terminal group or the second measuring device side terminal group A switching device including a selective connection unit for selectively connecting the measurement target side terminal group, a measurement jig having a measurement head connected to the measurement target side terminal group, and connected to the measurement target, A switching device is controlled to measure the first measuring device side terminal group. A first measurement control for connecting to the target side terminal group, controlling the first measuring device to execute the measurement by the first measuring method, and acquiring a measurement result by the first measuring device; and the switching device. Controlling the second measuring instrument side terminal group to the measuring object side terminal group, controlling the second measuring instrument to execute the measurement by the second measuring method, and measuring by the second measuring instrument. And a control device for executing a second measurement control for obtaining a result.

  According to this configuration, the control device controls the switching device so that the first measuring device is connected to the measuring head via the switching device (first measurement control), and the second measuring device controls the switching device. (Second measurement control) can be established. On the other hand, the control device controls the first measuring device and the second measuring device collectively. Specifically, the control device causes the first measuring device to perform the measurement according to the first measuring method in a state where the first measuring device is connected to the measuring head, and performs the measurement in a state where the second measuring device is connected to the measuring head. The second measuring device is caused to execute the measurement by the second measuring method. The control device acquires a measurement result from the first measuring device and the second measuring device. Thus, the control device can obtain measurement results from both the first and second measuring devices by controlling the switching device, the first measuring device, and the second measuring device. Thereby, the measurement result of the measurement range suitable for the first measurement method can be obtained from the first measurement device, and the measurement result of the measurement range suitable for the second measurement method can be obtained from the second measurement device. As a result, highly accurate measurement results can be obtained in a wide measurement range.

In addition, since the switching between the first and second measuring devices is automatically achieved by the switching device controlled by the control device, no error occurs in the connection between the first or second measuring device and the measuring head. Thereby, measurement in a wide measurement range can be reliably achieved with less time and effort.
In the measurement system according to one embodiment of the present invention, the first measurement device outputs measurement result data in a first format, and the second measurement device outputs measurement result data in a second format different from the first format. The control device includes means for outputting both the first format measurement result data and the second format measurement result data in a third format.

With this configuration, the measurement result data of the first measuring device and the second measuring device can be output in the third format, which is a common format. This facilitates handling of the measurement result data of the first and second measuring devices, and facilitates measurement over a wide range.
The third format may be the same as the first format, may be the same as the second format, or may be a format different from any of the first and second formats.

In the measurement system according to one embodiment of the present invention, the control device includes a unit that generates a single output file in which measurement result data of the first measurement device and measurement result data of the second measurement device are integrated.
According to this configuration, since the measurement results of the first and second measuring devices are integrated into a single output file, individual measurement result data of the first and second measuring devices can be handled without distinction. . Thereby, measurement over a wide range becomes easier.

In the measurement system according to one embodiment of the present invention, the control device executes the first measurement control in a first measurement region (specifically, a first measurement frequency region) , and executes a first measurement control different from the first measurement region. The second measurement control is performed in two measurement regions (specifically, a second measurement frequency region) .
According to this configuration, in the first and second measurement areas different from each other, measurement according to the first measurement method by the first measurement device and measurement according to the second measurement method by the second measurement device are respectively performed. Thereby, a wide range of measurement is possible.

Preferably, the first and second measurement areas have overlapping areas that overlap each other. Thereby, measurement in a continuous measurement range becomes possible.
The measurement system according to one embodiment of the present invention further includes a measurement area input unit for a user to set the first measurement area and the second measurement area, and the control device sets the measurement area by the measurement area input unit. The first measurement area and the second measurement area are determined according to the following.

With this configuration, the user can set the first and second measurement areas, and the measurement by the first and second measurement devices is performed accordingly. This enables a wide range of measurement required by the user.
The measurement system according to an embodiment of the present invention further includes a measurement point interval setting unit that commonly sets an interval between measurement points (specifically, measurement frequencies) in the first measurement device and the second measurement device, The control device includes measurement point indicating means for indicating the plurality of measurement points at intervals set by the measurement point interval setting means to the first measuring device and the second measuring device.

  With this configuration, the interval between the measurement points of the first and second measuring devices can be set in common, and the measurement at the plurality of measurement points at the set interval is executed in the first and second measuring devices, respectively. You. Setting the measurement points at a common interval makes it easier to use the measurement results of the first and second measuring devices, and for example, facilitates integration of the respective measurement result data into a single file. This facilitates measurement over a wide range.

  In the measurement system according to an embodiment of the present invention, the predetermined physical quantity is impedance, the first measuring device sets a plurality of different frequencies as a plurality of measurement points, and sets the measurement target at the plurality of measurement points. , The second measuring device sets a plurality of different frequencies as a plurality of measurement points, and measures responses from the measurement target at the plurality of measurement points.

With this configuration, the impedance of the measurement target can be measured by measuring responses from the measurement target to a plurality of frequencies. By switching and using the first and second measuring devices, the frequency response in a wide frequency range can be measured, so that impedance measurement in a wide impedance range, a wide temperature range, and the like can be performed.
In the measurement system according to one embodiment of the present invention, the measurement target is a solid electrolyte.

In order to accurately measure the impedance of a solid electrolyte, measurement in a wide frequency range is required. Therefore, by switching and using the first and second measuring devices having different measurement methods, measurement in a wide frequency range that can be used for impedance measurement of the solid electrolyte can be performed.
In the measurement system according to one embodiment of the present invention, a plurality of first measuring device-side terminals constituting the first measuring device-side terminal group, and a plurality of second measuring device-side terminals constituting the second measuring device-side terminal group. , And a plurality of measurement target terminals constituting the group of measurement target terminals are arranged according to a common arrangement.

According to this configuration, since the first measuring device side terminal group, the second measuring device side terminal group, and the measurement target side terminal group have a common arrangement, the measurement target side terminal does not require a complicated configuration. The group can be reliably connected to the first or second measuring instrument side terminal group. This makes it possible to provide a measurement system that is advantageous for measurement over a wide range with a relatively simple configuration.
In the measurement system according to one embodiment of the present invention, the switching device includes a first measuring device side terminal support member that supports the plurality of first measuring device side terminals while maintaining their arrangement, and the plurality of second measuring devices. A second measuring-device-side terminal support member that supports the side terminals while maintaining their arrangement; and a measurement-side terminal support member that supports the plurality of measurement-side terminals while maintaining their arrangement, wherein the selective connection unit The first measuring device side terminal support member, the second measuring device side terminal support member and the measurement target side terminal support member are relatively moved, and the measurement target side terminal is the first measurement device side terminal or A relative moving unit selectively contacting the second measuring device side terminal.

  According to this configuration, the first and second measuring instrument side terminal groups and the measuring object side terminal group maintain a common arrangement, respectively, and are respectively provided on the first and second measuring instrument side terminal supporting members and the measuring object side terminal supporting member. Supported. Therefore, by moving these support members relative to each other, a plurality of first measuring instrument side terminals are respectively connected to the corresponding plurality of measurement target side terminals, and a plurality of second measuring instrument side terminals are associated with the corresponding plurality of measuring instrument side terminals. And the state of being connected to the terminals to be measured, respectively. In this way, a configuration that moves the support member relatively can provide a measurement system that is advantageous for measurement over a wide range.

In the measuring system according to one embodiment of the present invention, the first measuring device side terminal supporting member and the second measuring device side terminal supporting member are common supporting members.
With this configuration, the plurality of measurement target terminals can be selectively connected to the plurality of first or second measurement target terminals by a configuration in which the common support member and the measurement target terminal support member are relatively moved. Can be. Therefore, it is possible to provide a measurement system that is advantageous for measurement over a wide range with a simpler configuration.

  In the measurement system according to one embodiment of the present invention, each of the first measuring device side terminal, the second measuring device side terminal, and the measurement target side terminal includes a signal transmitting unit, and a shield unit surrounding the signal transmitting unit. Wherein the first measuring-apparatus-side terminal support member includes an insulating plate that supports the shield portions of the plurality of first measuring-apparatus-side terminals in a state where they are electrically insulated from each other; The measuring-device-side terminal support member includes an insulating plate that supports the shield portions of the plurality of second measuring-device-side terminals in a state where they are electrically insulated from each other, and the measurement target-side terminal support member includes the plurality of measurement targets. An insulating plate for supporting the shield portions of the side terminals in a state of being electrically insulated from each other is included.

  According to this configuration, the plurality of first measuring device-side terminals are insulated from each other on the first measuring device-side terminal support member, in addition to the signal transmission portion and the shield portion. Similarly, the plurality of second measuring instrument side terminals are insulated from each other on the second measuring instrument side terminal supporting member, not only the signal transmission section but also the shield section. Further, similarly, the plurality of measurement target side terminals are insulated from each other on the measurement target side terminal support member, not only the signal transmission unit but also the shield unit. As a result, interference between a plurality of signal paths can be reliably avoided, and highly accurate measurement can be performed in a wide measurement range.

  Of course, also between the first and second measuring instrument side terminals, on the first and second measuring instrument side terminal supporting members, not only the signal transmission section but also the shield section are insulated from each other. Not only the connection of the signal transmission unit but also the connection of the shield unit are switched between the first measuring device side and the second measuring device side. This can prevent the first measuring device and the second measuring device from interfering with each other. Further, since the plurality of first measuring instrument side terminals, the plurality of second measuring instrument side terminals, and the plurality of measurement target side terminals are insulated from each other as well as the signal transmission section as well as the shield section, The influence of the switching device on the signal path can be minimized. Thereby, measurement accuracy can be improved.

  When the first and second measuring-device-side terminal support members are formed of a common support member, it is preferable that the common support member be formed of an insulating plate. Thereby, not only the signal transmission portion but also the shield portion between the plurality of first measuring device side terminals, between the plurality of second measuring device side terminals, and between the first and second measuring device side terminals. Can also be insulated from each other. Therefore, even when a common support member is used, both interference between signal paths and interference between measuring devices can be avoided, and highly accurate measurement in a wide measurement range can be realized.

  In the measurement system of one embodiment of the present invention, the first measuring device side terminal and the second measuring device side terminal are push-on type first coaxial connectors, and the measurement target side terminal is the first coaxial connector. A push-on type second coaxial connector that can be fitted to a coaxial connector, wherein the relative movement unit includes the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement target side terminal. The support member is relatively moved along the fitting direction of the first and second coaxial connectors.

  According to this configuration, since the first measuring device side terminal, the second measuring device side terminal, and the measurement target side terminal are push-on type coaxial connectors, a relatively simple relative movement of the terminal support member, more specifically, The terminal group to be measured can be selectively connected to the first or second measuring instrument side terminal only by the translation. That is, a plurality of terminals to be measured are connected or connected to a plurality of first measuring device-side terminals or a plurality of second measuring device-side terminals at a stretch without necessarily requiring a rotational movement or the like of the terminal support member. Can be released. This makes it possible to provide a measurement system that can support a wide measurement range with a relatively simple configuration.

In the measurement system according to one embodiment of the present invention, at least one of the first coaxial connector and the second coaxial connector has a floating structure for absorbing a displacement.
According to this configuration, by the floating structure of the coaxial connector, the measurement target side terminal group can be selectively and reliably connected to the first or second measuring instrument side terminal group while allowing some displacement. This makes it possible to further simplify the configuration for relatively moving the terminal support member, so that it is easy to provide a measurement system that can support a wide measurement range.

  In the measurement system according to one embodiment of the present invention, the measurement head includes a first electrode lead and a second electrode lead that come into contact with a measurement target at different positions, and the measurement jig includes a first electrode lead of the first electrode lead. A first coaxial cable having a core wire connected to the connection position, a second coaxial cable having a core wire connected to a second connection position of the first electrode lead closer to the measurement target than the first connection position, and A third coaxial cable having a core wire connected to a third connection position of the electrode lead, and a fourth coaxial cable having a core wire connected to a fourth connection position farther from the object to be measured than the third connection position of the second electrode lead A first wire for directly connecting an end of the shielded wire of the first coaxial cable on the first electrode lead side and an end of the shielded wire of the second coaxial cable on the first electrode lead side; 1 coaxial cable A second wire for directly connecting the first electrode lead end of the shield wire to the second electrode lead end of the third coaxial cable shield wire, and a second shield wire of the second coaxial cable; A third wire for directly connecting the first electrode lead end to the second electrode lead end of the shield wire of the fourth coaxial cable; and the second electrode lead of the shield wire for the third coaxial cable. And a fourth wire that directly connects the side end and the second electrode lead side end of the shielded wire of the fourth coaxial cable.

  In this case, "direct connection" means that connection is made without passing through a shielded wire of another coaxial cable other than a pair of coaxial cables connected to each other. Therefore, for example, the case where the first wire is connected to the end of the shielded wire of the first coaxial cable on the first electrode lead side via the connection component is not excluded. The same applies to other connections. The “first electrode lead side end” means the end of the shielded wire of the coaxial cable on the side where the core wire is connected to the first electrode lead.

  In the measuring jig having the above configuration, the physical quantity of the measurement target is measured by bringing the first electrode lead and the second electrode lead into contact with the measurement target at different positions. A first coaxial cable and a second coaxial cable are connected to the first electrode lead. The connection position of the first coaxial cable is located farther from the measurement target than the connection position of the second coaxial cable. A third coaxial cable and a fourth coaxial cable are connected to the second electrode lead. The connection position of the fourth coaxial cable is located farther from the measurement target than the connection position of the third coaxial cable. The first to fourth wires directly connect the shield wires of the first to fourth coaxial cables at the first and second electrode lead-side ends. Specifically, the shielded wires of the first coaxial cable and the second coaxial cable are connected at the first electrode lead side ends by the first wires. Further, the end of the shielded wire of the first coaxial cable on the first electrode lead side and the end of the shielded wire of the third coaxial cable on the second electrode lead side are directly connected by the second wire. Further, an end of the shield line of the second coaxial cable on the first electrode lead side and an end of the shield line of the fourth coaxial cable on the second electrode lead side are directly connected by a third line. The ends of the shielded wires of the third coaxial cable and the fourth coaxial cable on the second electrode lead side are directly connected to each other by the fourth wire.

According to the experiments of the present inventor, this configuration significantly increases the measurement accuracy. In particular, when measuring impedance, the frequency range in which impedance measurement can be performed with high accuracy can be expanded. Accordingly, the range of the impedance and the range of the measurement temperature that can be measured with high accuracy can be expanded.
The measurement jig further includes a fifth wire that directly connects an end of the shielded wire of the second coaxial cable on the first electrode lead side and an end of the third coaxial cable on the second electrode lead side. You may go out.

  In addition, the measurement jig does not include a wiring for directly connecting an end of the shield wire of the second coaxial cable on the first electrode lead side and an end of the third coaxial cable on the second electrode lead side. You may. That is, the end of the shielded line of the second coaxial cable on the first electrode lead side and the end of the shielded line of the third coaxial cable on the second electrode lead need not be directly connected. With such a wiring, the shield line of the second coaxial cable and the shield line of the third coaxial cable are not connected at least in the vicinity of the measurement target. Thereby, the measurement accuracy is further improved, and the measurable range can be expanded. In particular, by using the measuring jig for measuring the impedance, the signal frequency range can be expanded, and accordingly, the range of the impedance and the range of the measurement temperature that can be measured with high accuracy can be further expanded. .

In the measurement system according to one embodiment of the present invention, a plurality of the second lines and a plurality of the third lines are provided, and the plurality of the second lines and the plurality of the third lines are arranged at the measurement target arrangement position. Are arranged to surround the.
According to this configuration, the second and third wires connecting between the first and second coaxial cables connected to the first electrode lead and the third and fourth coaxial cables connected to the second electrode lead. The line is arranged so as to surround the measurement target arrangement position. According to the experiment of the present inventor, the measurement object was measured by surrounding the measurement target with wiring that connects the electrode lead side ends of the shielded wires of the coaxial cable connected to the first and second electrode leads to each other so to speak. It has been discovered that accuracy can be improved. Thereby, the range that can be measured with the required accuracy can be expanded. In particular, in the measurement of impedance, the signal frequency range can be widened, and accordingly, the impedance range and temperature range in which high-precision measurement can be performed can be widened.

In the measurement system according to one embodiment of the present invention, the measurement jig is disposed so as to surround the target support portion and the target support portion having a support surface for supporting the measurement target, and extends in a direction intersecting the support surface. And a plurality of second lines and the plurality of third lines are routed through the plurality of through-holes.
According to this configuration, the measurement target is arranged on the support surface of the target support, and the second line and the third line are routed so as to pass through the plurality of through holes of the target support. The three lines are arranged so as to surround the object to be measured. As a result, the measurement range that can be measured with a certain degree of accuracy can be reliably increased.

The measurement system according to one embodiment of the present invention further includes a heater attached to the measurement target support member and configured to heat the measurement target.
With this configuration, the measurement can be performed in a state where the measurement target is heated by the heater. Therefore, measurement at various temperatures can be performed with high accuracy, and the measurement range can be expanded.

Preferably, the heater is disposed on the target support. Thereby, the object to be measured can be efficiently heated and its temperature can be accurately controlled.
In the measurement system according to one embodiment of the present invention, the measurement jig has an opening, a holding container that stores the object to be measured, a lid that closes the opening of the holding container, and is fixed to the lid. It further includes a first feed-through, a second feed-through, a third feed-through, and a fourth feed-through supporting the one coaxial cable, the second coaxial cable, the third coaxial cable, and the fourth coaxial cable, respectively.

With this configuration, the measurement target can be arranged in the holding container, and the measurement can be performed with the holding container closed with the lid. As a result, the measurement target can be placed in a stable environment, and the range that can be measured with a certain degree of accuracy can be expanded.
In the measurement system according to one embodiment of the present invention, the first to fourth feed-throughs are electrically insulated from the shield wires of the first to fourth coaxial cables and the lid. It is an insulated feedthrough that supports each coaxial cable.

With this configuration, the shield wire and the lid of the coaxial cable can be electrically insulated, so that the influence from the surrounding environment can be further eliminated. Thereby, the range that can be measured with a certain degree of accuracy can be expanded.
In the measurement system according to one embodiment of the present invention, the measurement jig is coupled to the lid, and a gas introduction pipe that introduces gas into the holding container, and coupled to the lid, and supplies gas in the holding container. An exhaust pipe for exhausting air.

With this configuration, the atmosphere around the measurement target can be controlled. As a result, the measurement target can be placed in a more stable environment, and the range in which measurement can be performed with a certain degree of accuracy can be expanded.
The present invention is further a switching device for selectively connecting a first measuring device and a second measuring device to an object to be measured, wherein a first measuring device side terminal group connected to the first measuring device; A second measuring instrument side terminal group connected to the second measuring instrument, a measuring object side terminal group connected to the measuring object, and the measuring object side terminal group, the first measuring instrument side terminal group or the (2) A switching device including: a selective connection unit selectively connected to a measuring device side terminal group.

  According to this configuration, the switching device takes a state in which the measurement target side terminal group is connected to the first measurement device side terminal group and a state in which the measurement target side terminal group is connected to the second measurement device side terminal group. Can be. Thereby, a state where the measurement target is connected to the first measurement device via the switching device and a state where the measurement target is connected to the second measurement device via the switching device can be realized. By using this switching device, the measurement target can be connected to the first measuring device or the second measuring device without error, so that the measurement using the first measuring device and the second measuring device can be performed smoothly. In addition, since the switching between the first and second measuring devices can be performed smoothly, the measurement in a wide measurement range can be performed smoothly.

In the switching device according to one embodiment of the present invention, a plurality of first measuring device side terminals constituting the first measuring device side terminal group and a plurality of second measuring device side terminals constituting the second measuring device side terminal group are provided. , And a plurality of measurement target terminals constituting the group of measurement target terminals are arranged according to a common arrangement.
The switching device according to an embodiment of the present invention includes a first measuring device side terminal supporting member that supports the plurality of first measuring device side terminals while maintaining their arrangement, and an arrangement of the plurality of second measuring device side terminals. A second measuring instrument side terminal supporting member that holds and supports the plurality of measuring object side terminals, and a measuring object side terminal supporting member that supports the plurality of measuring object side terminals while maintaining their arrangement. The measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement object side terminal supporting member are relatively moved, and the measurement object side terminal is the first measuring device side terminal or the second measuring device. A relative moving unit for selectively contacting the side terminal is included.

In the switching device according to one embodiment of the present invention, the first measuring device side terminal supporting member and the second measuring device side terminal supporting member are common supporting members.
In the switching device according to one embodiment of the present invention, each of the first measuring device side terminal, the second measuring device side terminal, and the measurement target side terminal includes a signal transmitting unit, and a shield unit surrounding the signal transmitting unit. Wherein the first measuring device side terminal supporting member includes an insulating plate for supporting the shield portions of the plurality of first measuring device side terminals in a state where they are electrically insulated from each other; The measuring-device-side terminal support member includes an insulating plate that supports the shield portions of the plurality of second measuring-device-side terminals in a state in which they are electrically insulated from each other, and the measurement target-side terminal support member includes the plurality of measurement targets. An insulating plate for supporting the shield portions of the side terminals in a state of being electrically insulated from each other is included.

  In the switching device according to one embodiment of the present invention, the first measuring device side terminal and the second measuring device side terminal are push-on type first coaxial connectors, and the measurement target side terminal is the first coaxial connector. A push-on type second coaxial connector that can be fitted to a coaxial connector, wherein the relative movement unit includes the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement target side terminal. The support member is relatively moved along the fitting direction of the first and second coaxial connectors.

In the switching device according to one embodiment of the present invention, at least one of the first coaxial connector and the second coaxial connector has a floating structure for absorbing displacement.
The present invention also provides a first electrode lead and a second electrode lead that are in contact with the measurement target at different positions, a first coaxial cable having a core wire connected to a first connection position of the first electrode lead, A second coaxial cable having a core wire connected to a second connection position closer to the measurement target than the first connection position of the electrode lead, and a third coaxial cable having a core wire connected to a third connection position of the second electrode lead A fourth coaxial cable having a core wire connected to a fourth connection position of the second electrode lead farther from the measurement target than the third connection position; and a first electrode lead side of a shield wire of the first coaxial cable. An end, a first line directly connecting the end of the shielded line of the second coaxial cable to the end of the first electrode lead, an end of the shielded line of the first coaxial cable on the side of the first electrode lead, The third coaxial cable A second wire that directly connects the end of the shield wire of the second electrode lead to the end of the shield wire of the second coaxial cable; A third wire directly connecting the second electrode lead side end, the second electrode lead side end of the shielded wire of the third coaxial cable, and the second electrode of a shielded wire of the fourth coaxial cable; And a fourth line directly connecting to the lead-side end.

  According to this configuration, the physical quantity of the measurement target is measured by bringing the first electrode lead and the second electrode lead into contact with the measurement target at different positions. A first coaxial cable and a second coaxial cable are connected to the first electrode lead. The connection position of the first coaxial cable is located farther from the measurement target than the connection position of the second coaxial cable. A third coaxial cable and a fourth coaxial cable are connected to the second electrode lead. The connection position of the fourth coaxial cable is located farther from the measurement target than the connection position of the third coaxial cable. The first to fourth wires directly connect the shield wires of the first to fourth coaxial cables at the first and second electrode lead-side ends. Specifically, the shielded wires of the first coaxial cable and the second coaxial cable are connected at the first electrode lead side ends by the first wires. Further, the end of the shielded wire of the first coaxial cable on the first electrode lead side and the end of the shielded wire of the third coaxial cable on the second electrode lead side are directly connected by the second wire. Further, an end of the shield line of the second coaxial cable on the first electrode lead side and an end of the shield line of the fourth coaxial cable on the second electrode lead side are directly connected by a third line. The ends of the shielded wires of the third coaxial cable and the fourth coaxial cable on the second electrode lead side are directly connected to each other by the fourth wire.

According to the experiments of the present inventor, this configuration significantly increases the measurement accuracy. In particular, when measuring impedance, the frequency range in which impedance measurement can be performed with high accuracy can be expanded. Accordingly, the range of the impedance and the range of the measurement temperature that can be measured with high accuracy can be expanded.
The measurement jig further includes a fifth wire that directly connects an end of the shielded wire of the second coaxial cable on the first electrode lead side and an end of the third coaxial cable on the second electrode lead side. You may go out.

  In addition, the measurement jig does not include a wiring for directly connecting an end of the shield wire of the second coaxial cable on the first electrode lead side and an end of the third coaxial cable on the second electrode lead side. You may. That is, the end of the shielded line of the second coaxial cable on the first electrode lead side and the end of the shielded line of the third coaxial cable on the second electrode lead need not be directly connected. With such a wiring, the shield line of the second coaxial cable and the shield line of the third coaxial cable are not connected at least in the vicinity of the measurement target. Thereby, the measurement accuracy is further improved, and the measurable range can be expanded. In particular, by using the measuring jig for measuring the impedance, the signal frequency range can be expanded, and accordingly, the range of the impedance and the range of the measurement temperature that can be measured with high accuracy can be further expanded. .

In the measuring jig according to one embodiment of the present invention, a plurality of the second lines and a plurality of the third lines are provided, and the plurality of the second lines and the plurality of the third lines are arranged in the measurement target. It is arranged to surround the position.
A measuring jig according to an embodiment of the present invention includes a target support having a support surface for supporting a measurement target, and a plurality of through holes arranged to surround the target support and extending in a direction intersecting the support surface. And the plurality of second lines and the plurality of third lines are routed through the plurality of through-holes.

The measurement jig of one embodiment of the present invention further includes a heater attached to the measurement target support member and configured to heat the measurement target.
Preferably, the heater is disposed on the target support. Thereby, the object to be measured can be efficiently heated and its temperature can be accurately controlled.
The measuring jig according to one embodiment of the present invention has an opening, a holding container that stores the object to be measured, a lid that closes the opening of the holding container, and is fixed to the lid, the first coaxial cable, It further includes a first feedthrough, a second feedthrough, a third feedthrough, and a fourth feedthrough that support the second coaxial cable, the third coaxial cable, and the fourth coaxial cable, respectively.

In the measuring jig according to one embodiment of the present invention, the first to fourth feed-throughs are electrically insulated from the shields and the lids of the first to fourth coaxial cables. It is an insulated feedthrough that supports each coaxial cable.
A measuring jig of one embodiment of the present invention is a gas introduction pipe coupled to the lid, for introducing gas into the holding container, and an exhaust pipe coupled to the lid, for exhausting gas in the holding container. Further included.

The present invention also includes a measurement jig having the features described above, a plurality of terminals connected respectively to said first to fourth coaxial cable, predetermined physical quantity of the measurement object (specifically And a measuring device for measuring the impedance) .
With this configuration, a measurement system capable of performing measurement over a wide measurement range with good accuracy can be provided.

In the measurement system according to one embodiment of the present invention, the predetermined physical quantity is impedance, and the measuring device measures responses from the measurement target to a plurality of different frequencies.
In the measurement system according to one embodiment of the present invention, the measurement target is a solid electrolyte.
The present invention also provides a control program for causing a computer for controlling a measurement system for measuring a physical quantity (specifically, impedance) of a measurement target to execute. The measurement system has a first terminal group to be connected to a measurement target, a first measuring device for measuring a predetermined physical quantity of the measurement target according to a first measurement method, and a second terminal group to be connected to the measurement target. A second measuring device for measuring the predetermined physical quantity of the measurement object according to a second measuring method different from the first measuring method, and a first measuring device side terminal group connected to the first terminal group A second measuring instrument side terminal group connected to the second terminal group, a measuring object side terminal group, and the first measuring instrument side terminal group or the second measuring instrument side terminal group. And a switching device including a selective connection unit for selectively connecting to the group. The control program controls the switching device to connect the first measuring device side terminal group to the measurement target side terminal group, and controls the first measuring device to perform the measurement by the first measurement method. Executing, and a first measurement control step of acquiring a measurement result by the first measurement device, controlling the switching device to connect the second measurement device side terminal group to the measurement target side terminal group, Controlling the second measuring device to execute the measurement by the second measuring method, and causing the computer to execute a second measurement control step of acquiring a measurement result by the second measuring device.

In one embodiment of the present invention, the first measuring device outputs measurement result data of a first format, the second measuring device outputs measurement result data of a second format different from the first format, The control program causes the computer to execute a step of outputting both the first format measurement result data and the second format measurement result data in a third format.
The third format may be the same as the first format, may be the same as the second format, or may be a format different from any of the first and second formats.

A control program according to an embodiment of the present invention causes the computer to execute a step of generating a single output file in which measurement result data of the first measurement device and measurement result data of the second measurement device are integrated.
A control program according to an embodiment of the present invention causes the computer to execute the first measurement control step in a first measurement area (specifically, a first measurement frequency area) , and executes a second measurement control step different from the first measurement area. And causing the computer to execute the second measurement control step in a measurement area (specifically, a second measurement frequency area) .

Preferably, the first and second measurement areas have overlapping areas that overlap each other.
A control program according to one embodiment of the present invention provides a measurement area input means for a user to set the first measurement area and the second measurement area, and receives an input from the measurement area input means. And determining the first measurement area and the second measurement area in accordance with the settings made by the measurement area input means.

A control program according to an embodiment of the present invention provides a measurement point interval setting means for commonly setting an interval between measurement points (specifically, measurement frequencies) in the first measurement device and the second measurement device, and Receiving the input from the measuring point interval setting means, and instructing the first measuring device and the second measuring device a plurality of measuring points at the intervals set by the measuring point interval setting means. To be executed further.

The present invention further includes a first measuring device having a first terminal group to be connected to a measurement target, and measuring a predetermined physical quantity (specifically, impedance) of the measurement target according to a first measurement method, A second measuring device that has a second terminal group to be connected to the second measuring device and measures the predetermined physical quantity of the measuring object according to a second measuring method different from the first measuring method; and a measuring head connected to the measuring object. A measurement jig having a measurement jig, wherein the measurement jig is connected to the first terminal group, and the first measurement device performs measurement by the first measurement method. And a second measuring step of connecting the measuring jig to the second terminal group and executing a measurement by the second measuring method using the second measuring method.

In the measuring method according to an embodiment of the present invention, the first measuring step includes a step of connecting the measuring jig to the first terminal group by a switching device, and the second measuring step is performed by the switching device by the switching device. Connecting a measuring jig to the second terminal group.
In one embodiment of the present invention, the first measuring device outputs measurement result data of a first format, the second measuring device outputs measurement result data of a second format different from the first format, The measurement method further includes the step of outputting both the first format measurement result data and the second format measurement result data in a third format.

The third format may be the same as the first format, may be the same as the second format, or may be a format different from any of the first and second formats.
The measurement method according to an embodiment of the present invention further includes a step of generating a single output file in which the measurement result data of the first measurement device and the measurement result data of the second measurement device are integrated.

In the measurement method according to an embodiment of the present invention, the first measurement step is performed in a first measurement area (specifically, a first measurement frequency area) , and the second measurement step is performed in the first measurement area. Is performed in a different second measurement region (specifically, a second measurement frequency region) .
Preferably, the first and second measurement areas have overlapping areas that overlap each other.
In the measurement method according to one embodiment of the present invention, the first measurement step and the second measurement step are respectively performed on a plurality of measurement points (specifically, measurement frequencies) set at a common interval.

  In the measurement method according to an embodiment of the present invention, the predetermined physical quantity is impedance, the first measuring device sets a plurality of different frequencies as a plurality of measurement points, and sets the measurement target at the plurality of measurement points. , The second measuring device sets a plurality of different frequencies as a plurality of measurement points, and measures responses from the measurement target at the plurality of measurement points.

  In one embodiment of the present invention, the object to be measured is a solid electrolyte.

FIG. 1 is a diagram schematically illustrating a configuration of a measurement system according to a first embodiment of the present invention. FIG. 2 is a block diagram for explaining an electrical configuration of the measurement system. FIG. 3 shows a measurement frequency range of the first and second measurement devices provided in the measurement system. FIG. 4A is a plan view for explaining a principle configuration of a switching device included in the measurement system. FIG. 4B is a left side view of the configuration of FIG. 4A. FIG. 4C is a front view of a measuring-device-side terminal support plate of the switching device. FIG. 4D is a front view of the measurement-target-side terminal support plate of the switching device. FIG. 5A is a diagram for explaining an operation example of the switching device. FIG. 5B is a diagram for explaining an operation example of the switching device. FIG. 5C is a diagram for explaining an operation example of the switching device. FIG. 5D is a diagram for explaining an operation example of the switching device. FIG. 5E is a diagram for explaining an operation example of the switching device. FIG. 6A is a plan view for explaining a configuration of a measurement jig provided in the measurement system. FIG. 6B is an illustrative sectional view of the measuring jig. FIG. 6C is an enlarged perspective view showing a specific configuration example near the measurement target. FIG. 7A is a diagram for explaining the configuration of the wiring in the vicinity of the measurement target, and shows a case where the measurement jig is connected to the first measurement device. FIG. 7B is a diagram for explaining the configuration of the wiring in the vicinity of the measurement target, and shows a case where the measurement jig is connected to the second measurement device. FIG. 8 is a diagram for explaining functions of a control program executed by the control device to control the first and second measuring devices and the switching device. FIG. 9 shows a display example on a display unit of the control device. FIG. 10 is a flowchart for explaining the outline of the operation of the control device. FIG. 11A is a Bode diagram (gain diagram) showing results (examples) of measuring impedance using chip resistors having various resistance values as samples. FIG. 11B is a Bode diagram (phase diagram) showing the results (examples) of measuring impedance using chip resistors having various resistance values as samples. FIG. 12 is a Nyquist diagram showing measurement results (examples) using a standard sample. FIG. 13A shows a measurement result (example) using a solid electrolyte (sample temperature: 25 ° C.). FIG. 13B shows measurement results (examples) using a solid electrolyte (various sample temperatures). FIG. 13C shows the low impedance region of FIG. 13B in an enlarged manner. FIG. 14 is a diagram for explaining the configuration of the measurement system according to the second embodiment of the present invention. FIG. 15A is a Bode diagram (gain diagram) showing the results (examples) of measuring impedance using chip resistors having various resistance values as samples. FIG. 15B is a Bode diagram (phase diagram) showing the results (examples) of measuring impedance using chip resistors having various resistance values as samples. FIG. 16A is a Bode diagram (gain diagram) showing a result of impedance measurement (comparative example) using chip resistors having various resistance values as samples using the measuring jig according to the comparative example. FIG. 16B is a Bode diagram (phase diagram) showing the result of impedance measurement (comparative example) using chip resistors of various resistance values as samples using the measuring jig according to the comparative example. FIG. 17 is a diagram for explaining the configuration of the measuring jig according to the comparative example. FIG. 18 is a Nyquist diagram showing measurement results (examples) using a standard sample. FIG. 19A shows a measurement result (example) using a solid electrolyte. FIG. 19B shows an enlarged view of the low impedance region of FIG. 19A. FIG. 19C is an enlarged view of the curve on the low value side of the measurement result when the sample temperature is 120 ° C. in FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a diagram schematically illustrating a configuration of a measurement system according to a first embodiment of the present invention. FIG. 2 is a block diagram for explaining an electrical configuration of the measurement system.
The measurement system 1 includes a first measurement device 11, a second measurement device 12, a switching device 13, a measurement jig 14, and a control device 10. In this embodiment, the measurement system 1 measures the impedance of the measurement target 20 held on the measurement jig 14.

  In this embodiment, the first measuring device 11 is a device for measuring the impedance of the measuring object 20 by the automatic balance bridge method (first measuring method). In this embodiment, the second measuring device 12 is a device (FRA: Frequency Response Analyzer) for measuring the impedance of the measurement target 20 by frequency response analysis (second measurement method). The first measuring device 11 may be, for example, Keysight's E4990A type or 4294A's type, and the input signal frequency range in the specification is 20 Hz to 120 MHz for the E4990A type and 40 Hz to 40 Hz for the 4294A type. 110 MHz. The second measuring device 12 has an input signal frequency range different from that of the first measuring device 11. Specifically, the second measuring device 12 may be, for example, a 1260 type measuring device manufactured by Solartron, and the input signal frequency range in the specification is 10 μHz to 32 MHz. As shown in FIG. 3, the measurement frequency range 11A (input signal frequency range) of the first measurement device 11 and the measurement frequency range 12A (input signal frequency range) of the second measurement device 12 are different from each other. Have overlapping areas.

All of the above instruments from Keysight and Solartron can be measured by the four-terminal-pair method, can sweep from high frequency to low frequency, and perform multiple measurements at each measurement point. Averaging is possible. Therefore, it is easy to set similar measurement conditions.
The first measuring device 11 includes a display unit 11a and a first terminal group T1. The first terminal group T1 includes a plurality of (four in this embodiment) first terminals T11 to T14. Specifically, the four first terminals T11 to T14 include two current terminals T11 (signal output terminals) and T14 (current measurement terminals), and two voltage terminals T12 (voltage measurement terminals) and T13 (control terminals). ). Each of these first terminals T11 to T14 is a coaxial terminal having a pin-shaped signal transmission portion at the center and having a cylindrical shield portion so as to surround it. In this embodiment, the four first terminals T11 to T14 are arranged at regular intervals so as to form a straight line along the horizontal direction when viewed from the front.

  The second measuring device 12 includes a display unit 12a and a second terminal group T2. The second terminal group T2 includes a plurality of (four in this embodiment) second terminals T21 to T24. Specifically, the four second terminals T21 to T24 include two current terminals T21 (signal output terminals) and T24 (current measurement terminals), and two voltage terminals T22 (high-side voltage measurement terminals) and T23 ( Low-side voltage measurement terminal). Each of these second terminals is a coaxial terminal having a pin-shaped signal transmission portion at the center and having a cylindrical shield portion surrounding the pin-shaped signal transmission portion. In this embodiment, the four second terminals T21 to T24 are arranged at positions corresponding to the four vertices of a rectangle when viewed from the front. That is, the second terminals T21 to T24 have a different arrangement from the first terminals T11 to T14.

In order to shorten the cable length from the second measuring device 12 to the measuring jig 14, the switching device 13 is arranged so as to face the second terminal group T <b> 2 of the second measuring device 12. Further, the first terminal group T1 of the first measuring device 11 is disposed almost directly above the second terminal group T2 of the second measuring device 12, and the cable length from the first terminal group T1 to the switching device 13 is possible. As long as it is shortened.
The switching device 13 is connected to the first terminal group T1 of the first measuring instrument 11 via a plurality of (for example, four) coaxial cables 3 and via a plurality of (for example, four) coaxial cables 4. The second measuring device 12 is connected to the second terminal group T2. The switching device 13 is connected to the measuring jig 14 via a plurality (for example, four) of coaxial cables 5. The switching device 13 connects the measuring jig 14 to the first terminal group T1 of the first measuring device 11 or the second terminal group T2 of the second measuring device 12. The operation of the switching device 13 is controlled by the switching device control unit 15.

The length of the coaxial cable 3 is, for example, about 15 cm, and the length of the coaxial cable 4 is, for example, about 5 cm.
The measurement jig 14 includes a holding container 21 that houses and holds the measurement target 20 therein, and a lid 22 that closes an upper opening 21 a of the holding container 21. The measurement target 20 is accommodated inside the holding container 21. In the holding container 21, a heater 23 for heating the measurement target 20 is arranged. Electric power is supplied to the heater 23 by a lead wire 24. The lead wire 24 is drawn into the measuring jig 14 through the lid 22 and is connected to the temperature controller 16 for controlling the heater 23. A thermocouple 25 for detecting the temperature of the measurement target 20 is introduced into the holding container 21 for controlling the heater 23 by the temperature controller 16. Since the temperature of the measurement target 20 can be regarded as equivalent to the surface temperature of the heater 23, the thermocouple 25 may be arranged so as to be in contact with the surface of the heater 23.

  The measuring jig 14 is cooled by a cooling device 19 as necessary. This allows measurements at temperatures below room temperature. In order to allow the measurement jig 14 to be cooled by the cooling device 19 and to perform measurement at a temperature lower than room temperature, the length of the coaxial cable 5 is preferably 30 cm or more. The cooling device 19 may be a stainless steel dewar containing a refrigerant such as liquid nitrogen. By controlling the energization of the heater 23 while cooling the measuring jig 14 with the cooling device 19, the temperature of the measurement target 20 can be accurately controlled.

  Control device 10 is, for example, a personal computer. A first measuring device 11, a second measuring device 12, a switching device control unit 15, and a temperature controller 16 are connected to the control device 10. By controlling these, the control device 10 controls the first measurement device 11 to measure the measurement target 20 and obtains measurement result data output from the first measurement device 11, and the second measurement device 12 And the second measurement control for acquiring the measurement result data output from the second measuring device 12 while measuring the measurement target 20. When performing the first measurement control, the control device 10 controls the switching device control unit 15 so that the switching device 13 connects the first terminal group T1 of the first measuring device 11 to the measurement jig 14. . When executing the second measurement control, the control device 10 controls the switching device control unit 15 so that the switching device 13 connects the second terminal group T2 of the second measuring device 12 to the measurement jig 14. .

  In order to control the atmosphere in the holding container 21 of the measurement jig 14, a gas introduction pipe 26 and an exhaust pipe 27 are attached to the lid 22. For example, the atmosphere in the holding container 21 can be controlled by connecting the exhaust pipe 27 to exhaust equipment 28 such as a vacuum pump and connecting the gas introduction pipe 26 to a gas supply source 29 such as an inert gas tank. In this embodiment, gas valves 30 and 31 are interposed in the gas introduction pipe 26 and the exhaust pipe 27, respectively.

  The control device 10, the first and second measuring devices 11 and 12, the switching device 13, the switching device control unit 15 and the temperature controller 16 are supported on the gantry 6. A plurality of columns 7 are erected on the top surface of the top plate 6a of the gantry 6, and the columns 7 support two levels of horizontal shelf plates 8,9. The temperature controller 16 is placed on the top plate 6a, the second measuring device 12 is placed on the lower shelf plate 8, and the first measuring device 11 and the switching device control unit are placed on the upper shelf plate 9. 15 are placed. The control device 10 is placed on the first measuring device 11. The measuring jig 14 is placed on a table 17.

FIG. 4A is a plan view for explaining the principle configuration of the switching device 13, and a part of the configuration is a cross section cut along a horizontal plane. FIG. 4B is a left side view of the configuration of FIG. 4A. The switching device 13 includes a measuring device side terminal support plate 71, a measurement target side terminal support plate 72, and a relative movement unit 73.
The measuring-device-side terminal support plate 71 includes an insulating plate 71a having a main surface extending in the vertical direction. As shown in a front view in FIG. 4C (a front view as viewed in the direction of arrow 18 in FIG. 4A), a plurality of (four in this embodiment) first measuring instruments 11 A plurality of (four in this embodiment) first measuring device side terminals T31 to T34 respectively connected to the one terminals T11 to T14, and a plurality of (four in this embodiment) second terminals of the second measuring device 12. A plurality of (four in this embodiment) second measuring device side terminals T41 to T44 respectively connected to T21 to T24 are held in a state of being separated in a predetermined arrangement. The first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 are each formed of a coaxial connector penetrating the insulating plate 71a. The plurality of first measuring device side terminals T31 to T34 are arranged on the insulating plate 71a in a predetermined arrangement, and the plurality of second measuring device side terminals T41 to T44 are arranged on the insulating plate 71a in the same arrangement. I have. However, the arrangement of the plurality of first measuring instrument side terminals T31 to T34 and the arrangement of the plurality of second measuring instrument side terminals T41 to T44 are different from each other along the Y direction which is the horizontal direction along the main surface of the insulating plate 71a. It is shifted by a predetermined distance. In this embodiment, the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 are alternately arranged along the Y direction. In the X direction which is the normal direction of the main surface of the insulating plate 71a, the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 are at the same position. In the Z direction, which is a vertical direction along the main surface of the insulating plate 71a, the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 corresponding to positions in the arrangement are at the same position (high). In). Since the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 are supported by the common insulating plate 71a, their relative arrangement is unchanged. The insulating plate 71a may be a glass epoxy plate.

  The plurality of first measuring instrument side terminals T31 to T34 and the plurality of second measuring instrument side terminals T41 to T44 are supported on the insulating plate 71a in a state of being separated from each other. Not only the part (core wire) but also the shield part surrounding it is insulated from each other. That is, on the measuring device side terminal support plate 71, any one pair of the plurality of first measuring device side terminals T31 to T34 and the plurality of second measuring device side terminals T41 to T44 is electrically connected. There are no conductive paths.

  The measurement-side terminal support plate 72 is arranged in parallel with the measurement-device-side terminal support plate 71 so as to face the measurement-device-side terminal support plate 71. That is, the measurement-target-side terminal support plate 72 includes an insulating plate 72a having a main surface arranged along the vertical direction so as to be parallel to the main surface of the measurement-device-side terminal support plate 71. As shown in FIG. 4D, a front view (a front view in the direction of arrow 18 in FIG. 4A) includes a plurality of (four in this embodiment) measurement target side terminals T51 to T54. Are held in a state of being separated by a predetermined arrangement. The arrangement of the plurality of measurement target terminals T51 to T54 is the same arrangement as the plurality of first measurement device terminals T31 to T34 (ie, the same arrangement as the plurality of second measurement device terminals T41 to T44). The plurality of measurement target terminals T51 to T54 correspond to the plurality of first measurement device terminals T31 to T34, respectively, and correspond to the plurality of second measurement device terminals T41 to T44, respectively. Each of the plurality of measurement target side terminals T51 to T54 is configured by a coaxial connector penetrating the insulating plate 72a. Since the plurality of measurement target terminals T51 to T54 are supported on the insulating plate 72a in a state of being separated upward, the coaxial connectors constituting them are not only a signal transmission unit (core wire) but also a shield unit surrounding the signal transmission unit (core wire). Are also insulated from each other. That is, there is no conductive path on the measurement target terminal support plate 72 that electrically connects any pair of the plurality of measurement target terminals T51 to T54. The insulating plate 72a may be, for example, a glass epoxy plate.

  The relative movement unit 73 relatively moves the measuring device side terminal support plate 71 and the measurement object side terminal support plate 72. Accordingly, the relative movement unit 73 includes a first state in which the plurality of measurement target terminals T51 to T54 are connected to the plurality of first measurement device terminals T31 to T34, and a plurality of measurement target terminals T51 to T54. And the second state respectively connected to the second measuring device side terminals T41 to T44.

  More specifically, in this embodiment, the measuring-apparatus-side terminal support plate 71 is attached and fixed to a plate-shaped fixing frame 67 fixed to the top plate 6a of the gantry 6 via the support posts 66. The measuring device side terminal support plate 71 is attached to the surface of the fixed frame 67 on the side opposite to the second measuring device 12. The fixed frame 67 has an opening 68 for exposing the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 supported by the measuring device side terminal support plate 71 to the second measuring device 12 side. Have. The second measuring device side terminals T41 to T44 face the second terminal group T2 of the second measuring device 12 via the opening 68.

  On the other hand, the measurement target side terminal support plate 72 is attached to a plate-shaped moving frame 69 which is moved in the X direction and the Y direction by the relative moving unit 73. More specifically, the relative movement unit 73 includes an XY stage unit 74 in this embodiment. The XY stage unit 74 includes an X-direction actuator 75 and a Y-direction actuator 76, and drives these to move the stage 77 in the X-direction and the Y-direction. A moving frame 69 is fixed to the stage 77, and the measuring object side terminal support plate 72 is supported by the moving frame 69. Therefore, by driving the XY stage unit 74, the measurement target side terminal support plate 72 can be moved in the X direction and the Y direction. A measurement target side terminal support plate 72 is attached to the surface of the movable frame 69 on the measurement jig 14 side. The moving frame 69 has an opening 70 for exposing the measurement target side terminals T51 to T54 toward the measuring instrument side terminal support plate 71.

The plurality of measurement target side terminals T51 to T54 and the plurality of first measurement device side terminals T31 to T34 are aligned at corresponding Z-direction positions (that is, height positions). Similarly, the plurality of measurement target side terminals T51 to T54 and the plurality of second measuring instrument side terminals T41 to T44 have corresponding Z-direction positions (that is, height positions) aligned with each other.
Therefore, by moving the measurement target side terminal support plate 72 in the Y direction by the XY stage unit 74, the plurality of measurement target side terminals T51 to T54 can be respectively opposed to the plurality of first measurement device side terminals T31 to T34, The plurality of measurement target terminals T51 to T54 can be opposed to the plurality of second measurement device terminals T41 to T44, respectively. In a state where the plurality of measurement target terminals T51 to T54 face the plurality of first measurement device terminals T31 to T34, the XY stage unit 74 moves the measurement target terminal support plate 72 in the X direction to perform measurement. The plurality of measurement target terminals T51 to T54 are simultaneously fitted to the plurality of first measurement device terminals T31 to T34, respectively, by approaching the device side terminal support plate 71, and the signal transmission portions and the shield portions thereof are connected to each other. Can be electrically connected to each other. From this state, the XY stage unit 74 moves the measurement target side terminal support plate 72 in the X direction and separates the measurement target side terminal support plate 71 from the measurement device side terminal support plate 71, so that the plurality of measurement target side terminals T51 to T54 and the first The connection with the measuring device side terminals T31 to T34 can be released at a stretch. Similarly, the XY stage unit 74 moves the measurement-target-side terminal support plate 72 in the X direction while the plurality of measurement-target-side terminals T51 to T54 face the plurality of second measurement-device-side terminals T41 to T44, respectively. Then, the plurality of measurement target terminals T51 to T54 are simultaneously fitted to the plurality of second measurement device terminals T41 to T44, respectively, by approaching the measuring device side terminal support plate 71, and the signal transmission portions thereof are connected to each other. The shield portions can be electrically connected to each other. From this state, the XY stage unit 74 moves the measurement-side terminal support plate 72 in the X direction and separates the measurement-side terminal support plate 71 from the measurement-device-side terminal support plate 71, so that the plurality of measurement target-side terminals T51 to T54 and the plurality of second The connection with the measuring device side terminals T41 to T44 can be released at a stretch.

  In order to achieve the connection / disconnection by such X-direction movement, the measurement target side terminals T51 to T54, the first measurement device side terminals T31 to T34, and the second measurement device side terminals T41 to T44 are each a push-on type. It is preferable to be constituted by the coaxial connector of the above. More specifically, the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 are push-on type first coaxial connectors, and the measurement target side terminals T51 to T54 are It is preferably a push-on type second coaxial connector that can be fitted to one coaxial connector. Also, in order to achieve a secure fitting even if there is some displacement, at least one of the measurement target terminals T51 to T54 and the first and second measuring device terminals T41 to T44 is It is preferable to have a floating structure for absorbing displacement.

5A to 5E are diagrams for explaining the operation of the switching device 13.
FIG. 5A shows the initial state. The measurement target side terminal support plate 72 is at the origin position. The origin position can be arbitrarily determined. In the example of FIG. 5A, when the measurement target side terminal support plate 72 is at the origin position, the respective measurement target side terminals T51 to T54 correspond to the first measurement device side terminals T31 to T34 and the second measurement device side terminals T41 to T41. It is located between T44.

  FIG. 5B shows a state in which the measurement target terminal support plate 72 is moved in the Y direction so that the plurality of measurement target terminals T51 to T54 face the plurality of first measurement device terminals T31 to T34, respectively. In this state, by bringing the measurement target side terminal support plate 72 closer to the measurement device side terminal support plate 71 along the X direction, as shown in FIG. The first measuring instrument side terminals T31 to T34 are fitted to each other, and the first state is established in which they are electrically connected to each other.

From the state shown in FIG. 5C, the measurement target side terminal support plate 72 is separated from the measurement device side terminal support plate 71 along the X direction, so that the measurement target side terminals T51 to T54 and the first measurement device side terminals T31 to T34. Is released, and the state returns to the state shown in FIG. 5B.
From this state, by moving the measurement target side terminal support plate 72 in the Y direction, as shown in FIG. 5D, the plurality of measurement target side terminals T51 to T54 are respectively connected to the plurality of second measurement device side terminals T41 to T44. Can be opposed. From this state, by bringing the measurement target side terminal support plate 72 closer to the measurement side terminal support plate along the X direction, as shown in FIG. 5E, the plurality of measurement target side terminals T51 to T54 are connected to the plurality of second The second terminals are fitted to the measuring device side terminals T41 to T44, respectively, so that they are electrically connected to each other.

From the state shown in FIG. 5E, the measurement target side terminal support plate 72 is separated from the measurement device side terminal support plate 71 along the X direction, so that the measurement target side terminals T51 to T54 and the second measurement device side terminals T41 to T44. Is released, and the state shown in FIG. 5D is obtained. After that, the measurement target side terminal support plate 72 may be moved in the X direction to return to the origin position.
In this way, by moving the measurement target side terminal support plate 72 in the X direction and the Y direction by the relative movement unit 73, the measurement target side terminals T51 to T54 are changed to the first measuring device side terminals T31 to T34 or the second. By selectively fitting to the measuring device side terminals T41 to T44, it is possible to electrically connect them. Thus, the first state in which the measuring jig 14 is connected to the first measuring device 11 via the switching device 13 and the second state in which the measuring jig 14 is connected to the second measuring device 12 via the switching device 13 And can be selected.

FIG. 6A is a plan view for explaining the configuration of the measurement jig 14. FIG. 6B is a schematic longitudinal sectional view thereof. FIG. 6C is an enlarged perspective view showing a specific configuration example near the measurement target. FIG. 6B shows a modified arrangement of some components in order to represent as many components as possible, and thus does not necessarily represent a strict structure.
The measurement jig 14 contacts the measurement target 20 at different positions with the holding container 21 that stores the measurement target 20, the lid 22 that closes the opening 21a of the holding container 21, the support assembly 32 that supports the measurement target 20, and the like. It includes a first electrode lead E1 and a second electrode lead E2.

  In this embodiment, the holding container 21 has a bottomed cylindrical shape, has an opening 21a at an upper portion, and an outward flange 21b is formed around the opening 21a. The lid 22 is attached to the holding container 21 such that the lower surface of the peripheral portion is aligned with the flange. An O-ring 33 as a sealing member is sandwiched between the lid 22 and the flange. The lid 22 and the flange 21 b are fixed by the clamp 34, whereby the lid 22 is fixed to the holding container 21. The holding container 21, the lid 22, and the clamp 34 are made of, for example, stainless steel. The O-ring 33 is made of fluororesin or fluororubber.

  The support assembly 32 is fixed to the lower surface of the lid 22, and is configured to be accommodated in the holding container 21 by attaching the lid 22 to the holding container 21. The support assembly 32 is fixed to the lid 22, and is fixed to a plurality of (for example, four) columns 35 extending linearly to the lower surface side of the lid 22 along the axial direction of the holding container 21, and fixed to an intermediate portion of the column 35. The lower support plate 37, the upper support plate 36 disposed vertically above the lower support plate 37 along the support 35, and each support 35 between the upper support plate 36 and the lower surface of the lid 22. It includes a wound coil spring 38 and a round nut 39 screwed to each column 35 between the lower support plate 37 and the upper support plate 36. The four columns 35 are arranged at equal angular intervals around the central axis of the container. A screw 35a is threaded on the outer periphery of the column 35, and a round nut 39 is screwed onto the screw 35a. The coil spring 38 urges the upper support plate 36 toward the round nut 39, that is, downward. The support 35, the coil spring 38, and the round nut are made of, for example, stainless steel. The upper support plate 36 and the lower support plate 37 are made of, for example, PTFE (polytetrafluoroethylene) or ceramics.

On the lower surface of the upper support plate 36, a first electrode lead E1 is fixed on the central axis of the holding container 21. The lower end of the first electrode lead E1 has a contact point E1a that contacts the measurement target 20 from above.
On the lower surface of the lower support plate 37, a second electrode lead E2 is fixed on the central axis of the holding container 21. The second electrode lead E2 has a contact E2a at the upper end, which contacts the measurement target 20 from below. At the center of the upper surface of the lower support plate 37, a recess 37a (a recess having a circular shape in plan view in this embodiment) is formed. The plate-like heater 23 is arranged in the recess 37a. The contact point E2a of the second electrode lead E2 penetrates through the lower support plate 37 at the center position of the recess 37a, and further projects through the center position of the heater 23 upward from the upper surface thereof. The measurement target 20 is arranged on the contact point E2a. The heater 23 is, for example, a silicon rubber heater or a ceramic heater. The lower support plate 37 is an example of a measurement target support member that supports the measurement target 20. Then, a measurement target arrangement position at which the measurement target 20 is arranged in the recess 37a is set. The recess 37 a is a target support portion that supports the measurement target 20, and the bottom surface (more precisely, the surface of the heater 23) is a support surface that supports the measurement target 20.

  With the lower surface of the measurement target 20 placed in contact with the contact E2a of the second electrode lead E2, the upper support plate 36 is lowered to bring the contact E1a of the first electrode lead E1 into contact with the upper surface of the measurement target 20. be able to. Specifically, when the round nut 39 is rotated and moved downward, the upper support plate 36 is pushed down by the spring force of the coil spring 38, and the contact point E1a of the first electrode lead E1 reaches the upper surface of the measurement target 20. Further, by rotating the round nut 39 and moving it downward, the contact force E1a of the first electrode lead E1 is pressed against the upper surface of the measurement target 20 by the spring force of the coil spring 38. It is pressed against the contact point E2a of the second electrode lead E2.

The measurement target 20 is, for example, formed in a plate shape, and electrodes 20a and 20b are formed on the upper and lower surfaces thereof in advance. These electrodes 20a and 20b contact the contact point E2a of the first electrode lead E1 and the second electrode lead E2.
The measurement jig 14 further includes a first coaxial cable 41, a second coaxial cable 42, a third coaxial cable 43, and a fourth coaxial cable 44. These coaxial cables 41 to 44 include core wires 41a to 44a, shield wires 41b to 44b surrounding the core wires 41a to 44a, and insulators 41c to 44c for insulating between the core wires 41a to 44a and the shield wires 41b to 44b. including. The core wires 41a to 44a are made of, for example, a copper stranded wire or a stainless steel wire. The shield wires 41b to 44b are made of, for example, copper stranded wires or stainless steel wires. The insulators 41c to 44c are made of, for example, PTFE, polyimide, or ceramic. For example, when the measurement jig 14 has a heat resistance of 250 ° C. or higher, the core wire and the shield wire may be made of stainless steel, and the insulator between them may be made of polyimide.

  One end of the core wire 41a of the first coaxial cable 41 is connected to the first electrode lead E1 at the first connection position P1. One end of the core wire 42a of the second coaxial cable 42 is connected to the first electrode lead E1 at a second connection position P2 closer to the contact point E1a (that is, closer to the measurement target 20) than the first connection position P1. One end of the core wire 43a of the third coaxial cable 43 is connected to the second electrode lead E2 at the third connection position P3. One end of the core wire 44a of the fourth coaxial cable 44 is connected to the second electrode lead E2 at a fourth connection position P4 farther from the contact point E2a than the third connection position P3 (that is, farther from the measurement target 20).

  The first coaxial cable 41 and the second coaxial cable 42 penetrate through through holes (not shown) formed in the upper support plate 36, and their upper ends have feedthrough coaxial cable connectors 46, which penetrate the lid 22, respectively. 47 are respectively connected and supported. The third coaxial cable 43 and the fourth coaxial cable 44 pass through through holes 371 and 372 (see FIG. 6C) formed in the lower support plate 37, and furthermore, a through hole (not shown) formed in the upper support plate 36. , And their upper ends are connected and supported by feedthrough coaxial cable connectors 48 and 49, respectively, which penetrate the lid 22. The feed-through coaxial cable connectors 46 to 49 are insulated, and are fixed to the lid 22 through the lid 22 in a state where not only the core part but also the shield part are insulated from the lid 22.

  As shown in FIG. 6C, first and second shield connection parts 51 and 52 are provided at the ends of the first coaxial cable 41 and the second coaxial cable 42 on the side of the first electrode lead E1 on the shield wires 41b and 42b, respectively. Each is joined. Similarly, third and fourth shield connecting parts 53 and 54 are respectively connected to the shield wires 43b and 44b of the third coaxial cable 43 and the fourth coaxial cable 44 at the end on the second electrode lead E2 side. I have. These shield connection parts 51 to 54 are connected to each other by wires 61 to 64 (in this embodiment, polyimide-coated stainless steel wires).

  More specifically, the first shield connection component 51 and the second shield connection component 52 are connected by a plurality of first wires 61, whereby the shield wire 41 b of the first coaxial cable 41 is connected to the second coaxial cable 41. The shield wire 42b of the cable 42 is directly connected. Further, the first shield connection component 51 and the third shield connection component 53 are connected by a plurality of second wires 62, whereby the shield wire 41 b of the first coaxial cable 41 and the shield wire of the third coaxial cable 43 are connected. The line 43b is directly connected. Further, the second shield connection component 52 and the fourth shield connection component 54 are connected by a plurality of third wires 63, whereby the shield wire 42 b of the second coaxial cable 42 and the shield wire of the fourth coaxial cable 44 are connected. The line 44b is directly connected. Further, the third shield connection component 53 and the fourth shield connection component 54 are connected by a plurality of fourth wires 64, whereby the shield wire 43 b of the third coaxial cable 43 and the shield wire of the fourth coaxial cable 44 are connected. The line 44b is directly connected. No wiring is provided to connect the second shield connection component 52 and the third shield connection component 53, and therefore, the measuring jig 14 is provided with a shield wire 42 b of the second coaxial cable 42 and a shield wire of the third coaxial cable 43. It does not include wiring for directly connecting to the line 43b.

  The second line 62 and the third line 63 are arranged across the lower support plate 37. In order to arrange the second line 62 and the third line 63 at predetermined positions, a plurality of (for example, 12) through holes are formed in the lower support plate 37 at equal angular intervals around the central axis of the holding container 21. 375 are formed. Each of the plurality of second lines 62 and third lines 63 is arranged through part or all of these through holes 375. Thereby, each of the plurality of second lines 62 and third lines 63 is arranged so as to form a basket shape surrounding the measurement target 20. In this embodiment, the second line 62 includes eleven wires routed through eleven of the twelve through holes 375, respectively. Similarly, the third line includes 11 wirings routed through 11 of the 12 through holes 375, respectively. In this embodiment, the through holes 371 and 372 through which the third and fourth coaxial cables 43 and 44 pass are common to the through hole 375 for arranging the second wire 62 and the third wire 63. Further, in this embodiment, none of the second wire 62, the third wire 63, and the third and fourth coaxial cables 43, 44 pass through one through hole 375. This through hole 375 may be used for taking in and out of the measurement target 20.

A gas introduction pipe 26 and an exhaust pipe 27 are connected to the lid 22. The gas introduction pipe 26 is provided with a gas valve 30 for opening and closing the flow path. The exhaust pipe 27 is provided with a gas valve 31 for opening and closing the flow path.
One end of the coaxial cable 5 is connected to the feedthrough coaxial cable connectors 46 to 49 outside the lid 22. The other ends of the coaxial cables 5 are connected to the measurement target terminals T51 to T54 of the switching device 13, respectively. Thereby, the first to fourth coaxial cables 41 to 44 are connected to the measurement target terminals T51 to T54 of the switching device 13, respectively.

A connector 56 for supplying power to the heater 23 penetrates the center of the lid 22. The lead wire 24 of the heater 23 is connected to a connector 56. The connector 56 is connected to the temperature controller 16 via a lead wire 57.
The thermocouple 25 is fixed to the upper support plate 36 and moves up and down together with the upper support plate 36. In this embodiment, the thermocouple 25 is in contact with the upper surface of the heater 23, and thereby measures the temperature of the measurement target 20 that can be regarded as being equal to the temperature of the heater 23. The thermocouple 25 is connected to a ferrule 59 penetrating the lid 22 by a wire 58, and further connected to the temperature controller 16 via a wire 60 connected to the ferrule 59.

7A and 7B are diagrams for explaining the configuration of the wiring in the vicinity of the measurement target 20. FIG. 7A shows the electrical configuration when the switching device 13 is connected to the first measuring device 11, and FIG. Shows an electrical configuration when the switching device 13 is connected to the second measuring device 12.
The core 41a of the first coaxial cable 41 connected to the first electrode lead E1 at a position relatively far from the measurement target 20 is a current terminal. The core wire 42a of the second coaxial cable 42 connected to a position relatively close to the measurement target 20 in the first electrode lead E1 is a voltage terminal. The core wire 43a of the third coaxial cable 43 connected to a position relatively close to the measurement target 20 in the second electrode lead E2 is a voltage terminal. The core wire 44a of the fourth coaxial cable 44 connected to a position relatively far from the measurement target 20 in the second electrode lead E2 is a current terminal.

  The end of the shielded wire 41b of the first coaxial cable 41 on the first electrode lead E1 side is directly connected to the end of the shielded wire 42b of the second coaxial cable 42 on the first electrode lead E1 side by a first wire 61. The third coaxial cable 43 is directly connected to the end of the shielded wire 43b of the third coaxial cable 43 on the second electrode lead E2 side by a wire 62. The end of the shield wire 42b of the second coaxial cable 42 on the first electrode lead E1 side is directly connected to the end of the shield wire 44b of the fourth coaxial cable 44 on the second electrode lead E2 side by a third wire 63. The end of the shield wire 43b of the third coaxial cable 43 on the second electrode lead E2 side is directly connected to the end of the shield wire 44b of the fourth coaxial cable 44 on the second electrode lead E2 side by a fourth wire 64. "Direct connection" means that the connection is performed without passing through the shield wire of another coaxial cable, and the connection using the connection member such as the shield connection components 51 to 54 as described above is not excluded.

  A line directly connecting between the first electrode lead E1 side end and the second electrode lead E2 side end of the shielded wires 41b, 44b of the first coaxial cable 41 (current terminal) and the fourth coaxial cable 44 (current terminal). There is no. In addition, a direct connection is made between the first electrode lead E1 side end and the second electrode lead E2 side end of the shielded wires 42b and 44b of the second coaxial cable 42 (voltage terminal) and the third coaxial cable 43 (voltage terminal). There is no line to do.

  When the switching device 13 connects the measuring jig 14 to the first measuring device 11, the first coaxial cable 41 connects the signal output of the first measuring device 11 via the switching device 13 as shown in FIG. Connected to terminal T11. Thereby, the measurement by the four-terminal pair method is performed. The second coaxial cable 42 is connected to the voltage measuring terminal T12 of the first measuring device 11 via the switching device 13. The third coaxial cable 43 is connected to the control terminal T13 of the first measuring device 11 via the switching device 13. The fourth coaxial cable 44 is connected to the current measuring terminal T14 of the first measuring device 11 via the switching device 13.

  The first measuring instrument 11 has an AC signal source 81 therein, and the AC signal source 81 outputs an AC signal to a signal output terminal T11. Thus, current is supplied from the core wire 41a (current terminal) of the first coaxial cable 41. This current passes through the first electrode lead E1, the measurement target 20, and the second electrode lead E2, flows into the core wire 44a (current measuring terminal) of the fourth coaxial cable 44, and flows to the ammeter 84 in the first measuring instrument 11. Is supplied. The current passing through the ammeter 84 passes through the shielded wire 44b of the fourth coaxial cable 44, further passes through the first wire 61 to the fourth wire 64, and is guided to the shielded wire 41b of the first coaxial cable 41. , And returns to the AC signal source 81 through the shield wire 41b. In this way, a current path is formed from the AC signal source 81, passing through the measurement target 20, and further returning to the AC signal source 81 through the ammeter 84.

The core wire 43 a (control terminal) of the third coaxial cable 43 is connected to the operational amplifier 83 inside the first measuring device 11. The operational amplifier 83 outputs a control signal corresponding to a potential difference between the core wire 43a and the shield wire 43b of the third coaxial cable 43. The current flowing through the above-described current path is controlled by this control signal.
A core wire 42 a (voltage measurement terminal) of the second coaxial cable 42 is connected to a voltmeter 82 inside the first measuring device 11. The voltmeter 82 measures a voltage between the core wire 42a and the shield wire 42b of the second coaxial cable 42, and thereby measures a voltage applied to both ends of the measurement target 20.

The first measuring device 11 calculates the impedance of the measurement target 20 based on the current measured by the ammeter 84 and the voltage measured by the voltmeter 82.
When the switching device 13 connects the measurement target 20 to the second measuring device 12, as shown in FIG. Connected to T21. Thereby, the measurement by the four-terminal pair method is performed. The second coaxial cable 42 is connected to the high-side voltage measurement terminal T22 of the second measuring device 12 via the switching device 13. The third coaxial cable 43 is connected to the low-side voltage measurement terminal T23 of the second measuring device 12 via the switching device 13. The fourth coaxial cable 44 is connected to the current measuring terminal T24 of the second measuring device 12 via the switching device 13.

  The second measuring device 12 has an AC signal source 90 therein, and the AC signal source 90 outputs an AC signal to a signal output terminal T21. Thus, current is supplied from the core wire 41a (current terminal) of the first coaxial cable 41. This current passes through the first electrode lead E1, the measurement target 20, and the second electrode lead E2, flows into the core wire 44a (current measuring terminal) of the fourth coaxial cable 44, and flows to the ammeter 93 in the second measuring device 12. Is supplied. The current passing through the ammeter 93 passes through the shielded wire 44b of the fourth coaxial cable 44, further passes through the first wire 61 to the fourth wire 64, and is guided to the shielded wire 41b of the first coaxial cable 41. , And returns to the AC signal source 91 through the shield wire 41b.

  A core wire 42a (high-side voltage measurement terminal) of the second coaxial cable 42 and a core wire 43a (low-side voltage measurement terminal) of the third coaxial cable 43 are connected to both ends of a voltmeter 92 inside the second measuring device 12, respectively. ing. The voltmeter 92 measures the voltage between the core wire 42a of the second coaxial cable 42 and the core wire 43a of the third coaxial cable 43, and thereby measures the voltage applied to both ends of the measurement target 20.

The second measuring device 12 calculates the impedance of the measurement target 20 based on the current measured by the ammeter 93 and the voltage measured by the voltmeter 92.
As described above, the second wire 62 connects between the end of the shield wire 41b of the first coaxial cable 41 on the first electrode lead E1 side and the end of the shield wire 43b of the third coaxial cable 43 on the second electrode lead E2 side. The third wire is connected directly between the end of the shield wire 42b of the second coaxial cable 42 on the first electrode lead E1 side and the end of the shield wire 44b of the fourth coaxial cable 44 on the second electrode lead E2 side. 63 are directly connected. According to the experiment performed by the present inventor, this configuration significantly increases the measurement accuracy of the second measuring device 12 that measures impedance by frequency response analysis, and in particular, shifts the frequency range in which high-precision impedance measurement is possible to the high-frequency side. Can be spread.

  Further, in this embodiment, a direct connection is made between the end of the shield wire 42b of the second coaxial cable 42 on the first electrode lead E1 side and the end of the shield wire 43b of the third coaxial cable 43 on the second electrode lead E2 side. It has not been. According to the experiment of the present inventor, this configuration further increases the measurement accuracy of the second measuring device 12 that measures impedance by frequency response analysis, and in particular, shifts the frequency range in which high-precision impedance measurement is possible to the high-frequency side. Can be further expanded.

  FIG. 8 is a diagram for explaining functions of a control program 95 (software) executed by the control device 10 to control the first and second measuring devices 11 and 12 and the switching device 13. The control device 10 executes the control program 95 to execute a first measuring device control function, a second measuring device control function, a switching device control function, a measurement frequency band setting reception function, a measurement point setting reception function, a measurement point calculation function. , A measurement data acquisition function, a measurement data output function, and the like.

  The control device 10 includes a central processing unit 96 (CPU), a memory 97, and an external storage device 94. The control program 95 is stored in, for example, the external storage device 94, loaded into the memory 97, and executed. The control device 10 further includes a display unit 98 and an input unit 99 that provide a man-machine interface. The input unit 99 includes a keyboard, a pointing device, and the like. The pointing device may be a mouse, a touch pad, a touch panel, or the like. By operating the input unit 99 while viewing the display unit 98, the user can execute a necessary input operation on the control device 10.

  The first measuring device control function is a function for controlling the first measuring device 11. More specifically, a measurement frequency band, that is, an upper limit measurement frequency and a lower limit measurement frequency are set for the first measuring device 11 and a plurality of measurement points (measurement frequencies) within the measurement frequency band are set. This is a function of setting and giving a command to execute impedance measurement at those measurement points. The control device 10 is connected to the first measuring device 11 by, for example, a GPIB (General Purpose Interface Bus), and controls the first measuring device 11 by a communication method conforming to IEEE488.2.

  The second measuring device control function is a function for controlling the second measuring device 12. More specifically, a measurement frequency band, that is, an upper limit measurement frequency and a lower limit measurement frequency are set for the second measuring device 12, and a plurality of measurement points (measurement frequencies) within the measurement frequency band are set. This is a function of setting and giving a command to execute impedance measurement at those measurement points. The control device 10 is connected to the second measuring device 12 by, for example, GPIB, and controls the second measuring device 12 by a communication method conforming to IEEE488.2.

  The switching device control function is a function for controlling the operation of the switching device 13. The control device 10 is connected to the switching device control unit 15 by, for example, GPIB, and gives a control command to the switching device control unit 15 by a communication method conforming to IEEE488.2. The switching device control unit 15 controls the relative movement unit 73 based on the control command. The switching device control function controls the switching device 13 to the first state in which the measuring jig 14 is connected to the first measuring device 11 when the first measuring device 11 measures the impedance. The switching device control function controls the switching device 13 to the second state in which the measuring jig 14 is connected to the second measuring device 12 when the second measuring device 12 measures the impedance.

  The measurement frequency band setting accepting function is a function of accepting a measurement frequency band input by the user by operating the input unit 99, and constitutes a measurement area input unit. For example, the measurement frequency band setting reception function causes the display unit 98 to display an interface for the user to input an upper limit measurement frequency and a lower limit measurement frequency in the first measuring device 11. The user operates the input unit 99 while visually confirming this display, whereby the upper limit measurement frequency and the lower limit measurement frequency of the first measuring device 11 are input, and the input results are received by the control device 10. Similarly, the measurement frequency band setting reception function causes the display unit 98 to display an interface for the user to input the upper limit measurement frequency and the lower limit measurement frequency in the second measuring device 12. The user operates the input unit 99 while visually confirming this display, whereby the upper limit measurement frequency and the lower limit measurement frequency of the second measuring device 12 are input, and the input results are received by the control device 10.

  The measurement point setting reception function is a function of receiving a measurement point (measurement frequency) input by the user by operating the input unit 99, and constitutes a measurement point interval setting unit for setting an interval between measurement points. For example, the measurement point setting reception function causes the display unit 98 to display an interface for inputting the number of measurement points per decade (steps). The user operates the input unit 99 while visually confirming this display, whereby the number of measurement points per digit is input and received by the control device 10.

  The measurement point calculation function calculates a plurality of measurement points (measurement frequencies) for causing the first measurement device 11 to execute a measurement operation, and a plurality of measurement points (measurement frequencies) for causing the second measurement device 12 to execute a measurement operation. This is a function to calculate the measurement frequency. The calculated plurality of measurement points are transmitted to the first measurement device 11 and the second measurement device 12, respectively, by the first measurement device control function and the second measurement device control function. More specifically, a command signal for executing a measurement operation at the plurality of measurement points is provided to first and second measuring devices 11 and 12. The plurality of measurement points of the first measurement device 11 are set between the upper limit measurement frequency and the lower limit measurement frequency set for the first measurement device 11, and the measurement interval (frequency interval) per digit of the frequency is measured. The single-digit frequency region is determined to be equally divided into the number of measurement points received by the point setting reception function. Similarly, a plurality of measurement points of the second measurement device 12 are set between the upper limit measurement frequency and the lower limit measurement frequency set for the second measurement device 12, and the measurement interval (frequency interval) per digit of frequency is The single-digit frequency region is determined to be equally divided into the number of measurement points received by the measurement point setting reception function. As a result, when the measurement frequency regions set for the first measurement device 11 and the second measurement device 12 respectively have overlapping frequency regions, the first measurement device 11 and the second measurement device At 12, the impedance measurement is performed at the same measurement point (frequency).

The measurement data acquisition function is a function of acquiring measurement result data from the first measurement device 11 and acquiring measurement result data from the second measurement device 12. The acquired measurement result data is stored in the external storage device 94.
The measurement data output function is a function of outputting the measurement result data of the first measurement device 11 and the measurement data result of the second measurement device 12 in a common format. Specifically, the measurement result data of the first measurement device 11 may be output as it is, and the measurement result data of the second measurement device 12 may be converted into the data format of the first measurement device 11 and output. . Conversely, the measurement result data of the first measurement device 11 may be converted into the data format of the second measurement device 12 and output, and the measurement result data of the second measurement device 12 may be output in the same format. Further, the measurement result data of the first measurement device 11 and the second measurement device 12 may be converted into measurement result data of a format different from those formats and output. The output measurement result data in the common format is stored in the external storage device 94 as a measurement result data file. The measurement data output function may store the measurement result data of the first and second measuring devices 11 and 12 in the external storage device 94 as two corresponding measurement result data files. Further, the measurement data output function may integrate the measurement result data of the first and second measuring devices 11 and 12 into one measurement result data file and store it in the external storage device 94.

FIG. 9 shows a display example on the display unit 98 of the control device 10. Control device 10 can cause display unit 98 to display setting window 100 and output window 120, for example.
The setting window 100 includes a first measurement frequency input unit 101 for setting and inputting a measurement frequency region of the first measurement device 11, and a second measurement frequency input unit 102 for setting and inputting a measurement frequency region of the second measurement device 12. , A measurement interval input unit 103 for inputting the number of measurement points (steps) per one digit (decade).

  The first measurement frequency input unit 101 is an interface provided by a measurement frequency band setting reception function, and includes an upper limit frequency setting unit 105 for setting an upper limit measurement frequency in the first measurement device 11, and an upper limit frequency setting unit 105 in the first measurement device 11. A lower limit frequency setting unit 106 for setting a lower limit measurement frequency. Upper limit frequency setting section 105 and lower limit frequency setting section 106 include numerical value input sections 105a and 106a for inputting numerical values of frequency, and unit input sections 105b and 106b for inputting frequency units. The user can set the upper limit measurement frequency and the lower limit measurement frequency by setting appropriate numerical values and units for the numerical value input units 105a and 106a and the unit input units 105b and 106b, respectively.

  The second measurement frequency input unit 102 is an interface provided by the measurement frequency band setting reception function, and includes an upper limit frequency setting unit 107 for setting an upper limit measurement frequency in the second measurement device 12 and an upper limit frequency setting unit 107 in the second measurement device 12. A lower limit frequency setting unit 108 for setting a lower limit measurement frequency. Upper limit frequency setting section 107 and lower limit frequency setting section 108 each include numerical value input sections 107a and 108a for inputting numerical values of frequency, and unit input sections 107b and 108b for inputting frequency units. The user can set the upper limit measurement frequency and the lower limit measurement frequency by setting appropriate numerical values and units for the numerical value input units 107a and 108a and the unit input units 107b and 108b, respectively.

Also, the user can input the number of measurement points per digit (Steps) by setting an appropriate numerical value in the measurement interval input section 103, thereby setting the measurement interval per digit (decade). it can.
The setting window 100 further includes a start button 109 for instructing the start of the measurement, an interrupt button 110 for instructing to interrupt the measurement and return the switching device 13 to the origin, and an instruction for saving the measurement data. , A forced termination button 112 for forcibly terminating the measurement, and the like, which can be operated by the input unit 99. The setting window 100 includes a switching device status display unit 113 for displaying the status of the switching device 13, and the status of the first and second measuring devices 11 and 12 (measurement standby, first measuring device measurement, second measurement And a measuring device status display section 114 for displaying the status of the measuring device.

The output window 120 is configured to graphically display the measurement result data sent from the first and second measuring devices 11 and 12. Output window 120 includes, for example, a Bode diagram display unit 121 and a Nyquist diagram display unit 122. The Bode diagram display unit 121 includes a gain diagram display unit 121a and a phase diagram display unit 121b.
For example, when measurement result data is sent from the first and second measuring devices 11 and 12, a plot corresponding to the measurement result data is displayed in a gain diagram display section 121a, a phase diagram display section 121b, and a Nyquist diagram display. The images may be drawn in the units 122 in real time. Further, at the time of drawing, the measurement result data of the first measurement device 11 and the measurement result data of the second measurement device 12 may be displayed in a distinguishable manner. Examples of the display in a distinguishable mode include color display of different colors, display by lines of different patterns (line types), display by dots of different shapes, and the like.

  FIG. 10 is a flowchart for explaining an outline of the operation of the control device 10. When the start button is operated (Step S1), the control device 10 issues an origin return command to the switching device control unit 15 (Step S2). In response to this, the switching device control unit 15 controls the relative movement unit 73 (XY stage unit 74) to move the measurement target side terminal support plate 72 in the X direction and the Y direction and to the origin. When the switching device 13 returns to the origin, a signal indicating this is sent from the switching device control unit 15 to the control device 10. In response to this, the control device 10 transmits a first measuring device connection command to the switching device control unit 15 (step S3). In response to this, the switching device control unit 15 controls the relative movement unit 73 to move the measurement target side terminal support plate 72 in the Y direction, and to change the measurement target side terminals T51 to T54 to the first measuring device side terminals. It faces T31-T34. After that, the switching device control unit 15 moves the measurement target side terminal support plate 72 in the X direction to approach the measurement device side terminal support plate 71, and connects the measurement target side terminals T51 to T54 to the first measurement device side terminals T31 to T31. Connect to T34. Thereby, the measurement jig 14 is in the first state in which the measurement jig 14 is connected to the first measurement device 11. The establishment of the first state is notified from the switching device control unit 15 to the control device 10.

In response to this notification (step S4: YES), the control device 10 instructs the first measuring device 11 to perform a measuring operation by instructing a measuring point (step S5: measuring point indicating means). Then, the control device 10 stores the measurement result data sent from the first measuring device 11 in the external storage device 94 (Step S6).
When the measurement by the first measuring device 11 is completed, the control device 10 transmits a second measuring device connection command to the switching device control unit 15 (step S7). In response to this, the switching device control unit 15 controls the relative movement unit 73 to move the measurement target side terminal support plate 72 in the X direction and separate it from the measurement device side terminal support plate 71. Thereby, the measuring object side terminals T51 to T54 are pulled out from the first measuring instrument side terminals T31 to T34. Next, the switching device control unit 15 controls the relative movement unit 73 to move the measurement target side terminal support plate 72 in the Y direction, and to change the measurement target side terminals T51 to T54 to the second measurement device side terminals T41 to T44. Make them face each other. Thereafter, the switching device control unit 15 moves the measurement target side terminal support plate 72 in the X direction to approach the measurement device side terminal support plate 71, and connects the measurement target side terminals T51 to T54 to the second measurement device side terminals T41 to T41. Connect to T44. Thereby, the measuring jig 14 is in the second state in which the measuring jig 14 is connected to the second measuring device 12. The establishment of the second state is notified from the switching device control unit 15 to the control device 10.

In response to this notification (step S8: YES), the control device 10 instructs the second measuring device 12 to perform a measuring operation by instructing a measuring point (step S9: measuring point indicating means). Then, the control device 10 stores the measurement result data sent from the second measuring device 12 in the external storage device 94 (Step S10).
When the measurement by the second measuring device 12 is completed in this way, the control device 10 transmits an origin return command to the switching device control unit 15 (step S11). In response to this, the switching device control unit 15 controls the relative movement unit 73 to move the measurement target side terminal support plate 72 in the X direction and separate it from the measurement device side terminal support plate 71. Thereby, the measuring object side terminals T51 to T54 are pulled out from the second measuring instrument side terminals T41 to T44. Next, the switching device control unit 15 controls the relative movement unit 73 to move the measurement-side terminal support plate 72 in the X direction and the Y direction, and to return to the origin.

  When the user operates the save button (step S12), the control device 10 stores the measurement result data of the first measurement device 11 and the measurement result data of the second measurement device 12 in the external storage device 94 (step S13). . At this time, the measurement result data of the first and second measuring devices 11 and 12 may be stored in different files, or may be stored in one file. The control device 10 stores the measurement result data of the first measurement device 11 and the measurement result data of the second measurement device 12 as a file of the common format data. If the user does not operate the save button (step S12: NO), for example, operates the forced end button 112, the process ends without saving the measurement result data.

  The control device 10 may have a function of creating and storing one integrated file in which the stored measurement result data of the first and second measuring devices 11 and 12 is further integrated (step S14). More specifically, it may have a function of integrating data of common measurement points in overlapping measurement frequency regions into one piece of data. This integration may be a process of selecting any data of the first measuring device 11 or the second measuring device 12 as representative data, or an average value of the data of the first measuring device 11 and the second measuring device 12 May be obtained, or a process of obtaining an average value by weighting the data of the first measuring device 11 and the second measuring device 12 may be performed. The control device 10 stores the integrated file including the integrated data in the external storage device 94.

11A and 11B are Bode diagrams showing the results (examples) of measuring impedance using chip resistors having various resistance values of 1608 size as a sample (measurement target 20), FIG. 11A is a gain diagram, FIG. 11B is a phase diagram.
The first measuring instrument 11 used was Keysight 4294A, and the second measuring instrument 12 was Solartron 1260. The lower limit measuring frequency of the first measuring device 11 is set to 100 kHz, the upper limit measuring frequency of the first measuring device 11 is set to 100 MHz, the lower measuring frequency of the second measuring device 12 is set to 1 Hz, and the upper measuring frequency of the second measuring device 12 is set to 10 MHz. did. The AC voltage was set to 10 mV, and the number of measurement points per digit was set to 50 steps / decade. The temperature of the sample is room temperature. The measurement frequency ranges of the first and second measuring devices 11 and 12 overlap at 100 kHz to 10 MHz (overlap measurement frequency range). The measurement result data of the two measuring devices 11 and 12 were connected at 100 kHz to 10 MHz. That is, the measurement result data of the second measuring device 12 is used for the frequency range of 1 Hz to 100 kHz, and the measurement result data of the first measuring device 11 is used for the frequency range of 10 MHz to 100 MHz. For ()), the measurement result data of the first and second measuring devices 11 and 12 were integrated and used.

From the measurement results of FIG. 11A and FIG. 11B, it was confirmed that the impedance range in which measurement with accuracy of ± 5% is possible is as follows.
10Ω to 1kΩ at 100MHz
2Ω to 5.1kΩ at 10MHz
2Ω to 20kΩ at 1MHz
The range of impedance that can be measured with an accuracy of ± 5% when the second measuring device 12 (Model Solartron 1260) is used alone is as follows.

20Ω to 1kΩ at 10MHz
1Ω to 10kΩ at 1MHz
As described above, by switching between the first and second measuring devices 11 and 12, the range in which highly accurate impedance measurement can be performed is widened.
FIG. 12 is a Nyquist diagram showing a measurement result (example) using a standard sample as the measurement target 20. The RC circuit shown in FIG. 12 was used as a standard sample. Specifically, an RC circuit in which a 1608 size first chip resistor (100Ω), a 1608 size second chip resistor (6.8 kΩ), and a 1608 size chip capacitor (68 pF) are connected in series and parallel Was prepared. This RC circuit constitutes an equivalent circuit simulating an actual solid electrolyte.

  The first measuring instrument 11 used was Keysight 4294A, and the second measuring instrument 12 was Solartron 1260. The lower limit measuring frequency of the first measuring instrument 11 is set to 100 kHz, the upper measuring frequency of the first measuring instrument 11 is set to 100 MHz, the lower measuring frequency of the second measuring instrument 12 is set to 10 Hz, and the upper measuring frequency of the second measuring instrument 12 is set to 10 MHz. did. Therefore, the measurement frequency ranges of the first and second measuring devices 11 and 12 overlap at 100 kHz to 10 MHz (overlap measurement frequency range). The AC voltage was set to 10 mV, and the number of measurement points per digit was set to 50 steps / decade. The temperature of the sample is room temperature.

  In FIG. 12, the measurement result by the first measuring device 11 is represented by a symbol “□”, and the measurement result by the second measuring device 12 is represented by a solid line. The measurement results of the two measuring devices 11 and 12 are almost the same in the overlapping measurement frequency range, and it can be seen that highly reliable measurement can be realized. The lower value end (left end) of the arc drawn by the measurement result (symbol “□”) of the first measuring device 11 is almost in contact with the horizontal axis (real axis), and the measurement result of the second measuring device 12 (solid line) The high-side end (right end) of the arc drawn by is almost in contact with the horizontal axis (real axis), and the measurement results of the two measuring devices 11 and 12 form a substantially complete semi-arc. Thereby, accurate measurement of impedance is possible.

  13A, 13B, and 13C show measurement results (examples) using a solid electrolyte as a sample of the measurement target 20. The sample was formed by forming gold electrodes 20a and 20b (diameter 6 mm) on both surfaces of a solid electrolyte processed into a plate shape having a diameter of 19 mm and a thickness of 0.26 mm. In addition to room temperature (25 ° C.), the impedance was measured by controlling the sample temperature to a plurality of temperatures set at −50 ° C. to 300 ° C. at 50 ° C. intervals. Other conditions are the same as those of the measurement of the standard sample in FIG. FIG. 13A shows the measurement results when the sample temperature is 25 ° C., and FIGS. 13B and 13C collectively show the measurement results at various sample temperatures. FIG. 13C clearly shows the measurement results when the low impedance region is enlarged and the sample temperature is set to a high temperature.

From this measurement result, it can be seen that a clear arc shape appears in the Nyquist diagram even in the solid electrolyte, and thus accurate measurement of impedance is possible.
From the measurement results of FIGS. 13A to 13C, it can be seen that the impedance value is small at a sample temperature of 200 ° C. or higher, and measurement is difficult. However, measurement can be performed on a sample whose impedance value is increased by increasing the thickness, so that the characteristics of the solid electrolyte can be examined by appropriately setting the thickness of the sample.

FIG. 14 is a diagram for explaining the configuration of the measurement system according to the second embodiment of the present invention. In FIG. 14, the same reference numerals are given to the corresponding portions of the respective portions shown in FIG.
The measuring system 2 is configured by connecting a measuring jig 14 to one measuring instrument 12 via a coaxial cable. The measuring device 12 is, for example, a measuring device of the FRA system, and corresponds to the second measuring device in the first embodiment. The switching device 13 and the switching device control unit 15 are not provided. 14 are arranged.

Data output from the measuring device 12 is input to the control device 10. The control device 10 may have a function of controlling the measuring device 12, but may have only a function of taking in and outputting data output from the measuring device 12. Of course, the control device 10 does not need to have a function of controlling the switching device 13 and a function of controlling a plurality of measuring devices.
FIGS. 15A and 15B are Bode diagrams showing the results (examples) of measuring impedance using chip resistors having various resistance values of 1608 size as a sample (measurement target 20), FIG. 15A is a gain diagram, FIG. 15B is a phase diagram.

Solartron Model 1260 was used as the measuring instrument 12. The measurement frequency range was set to 100 Hz to 10 MHz, the AC voltage was set to 10 mV, and the number of measurement points per digit was set to 40 steps / decade. The temperature of the sample is room temperature.
From the measurement results of FIGS. 15A and 15B, it was confirmed that the impedance range in which measurement with accuracy of ± 5% is possible is as follows.

20Ω to 1kΩ at 10MHz
1Ω to 10kΩ at 1MHz
FIG. 16A and FIG. 16B are Bode diagrams showing the results of measuring the impedance using different measurement jigs (comparative examples) and chip resistors having various resistance values of 1608 size as a sample (measurement target 20). FIG. 16A is a gain diagram, and FIG. 16B is a phase diagram.

  As shown schematically in FIG. 17, the measuring jig 141 of the comparative example is configured such that the shielded wire 41b of the first coaxial cable 41 and the shielded wire 42b of the second coaxial cable 42 are connected to the first electrode lead E1 side end. The first wire 161 directly connected to the first coaxial cable 42, the end of the shield wire 42b of the second coaxial cable 42 on the first electrode lead E1 side, and the end of the shield wire 43b of the third coaxial cable 43 on the second electrode lead E2 side are directly connected. A second wire 162 to be connected and a third wire 163 that directly connects the shielded wire 32b of the third coaxial cable 43 and the shielded wire 43b of the fourth coaxial cable 44 at the end on the second electrode lead E2 side are included. Therefore, the shielded wires 42b and 43b of the second coaxial cable 42 and the third coaxial cable 43 are directly connected to each other at the end on the measurement target 20 side, and the shielded wires 41b of the first coaxial cable 41 and the third coaxial cable 43 are connected. , 43b are not directly connected at the end on the measurement target 20 side, and the shield wires 42b, 44b of the second coaxial cable 42 and the fourth coaxial cable 44 are directly connected at the end on the measurement target 20 side. This is different from the above-described measuring jig 14 (embodiment) in that the measuring jig 14 is not provided. Further, the second wire 162 that directly connects the shielded wires 42b and 43b of the second coaxial cable 42 and the third coaxial cable 43 at the end on the measurement target 20 side is not arranged to surround the measurement target 20. .

  FIGS. 16A and 16B show the maximum performance obtained by reducing the length of the coaxial cable from the measuring instrument 12 to the measuring jig 14 to 10 cm. However, when the cable length is 10 cm, the measurement jig 14 cannot be put into the cooling device 19, so that measurement cannot be performed at a sample temperature lower than room temperature, which poses a practical problem. As can be seen from FIGS. 16A and 16B, the accuracy of ± 5% is obtained at 200 MHz to 2 kΩ at 10 MHz. At 32 MHz, which is the highest frequency in the specification of the measuring instrument 12, there was no measurable resistance value range with an accuracy satisfying the accuracy of ± 5%. FIG. 16A (gain diagram) shows measurement result data when the first and second electrode leads E1 and E2 are short-circuited, and an inclined straight line due to the inductance of the measurement jig 14 appears. ing.

By comparing FIGS. 15A and 15B (Example) with FIGS. 16A and 16B (Comparative Example), accurate measurement can be performed by devising a wiring for interconnecting the shielded wires of the coaxial cable of the measuring jig 14. It can be seen that the impedance range is widened.
FIG. 18 is a Nyquist diagram showing a measurement result (example) using a standard sample as the measurement target 20. The RC circuit shown in FIG. 18 was used as a standard sample. Specifically, a 1608 size first chip resistor (100Ω), a 1608 size second chip resistor (6.8 kΩ), and a 1608 size chip capacitor (68 pF) are connected in series and RC A standard sample constituting a circuit was prepared. This RC circuit constitutes an equivalent circuit simulating an actual solid electrolyte.

The measurement was carried out in a measurement frequency range of 100 Hz to 10 MHz using a Solartron 1260 model as the measuring device 12 and connecting the measuring jig 14. The AC voltage was set to 10 mV, and the number of measurement points per digit was set to 40 steps / decade. The temperature of the sample is room temperature.
The high value side end (right end) of the arc drawn by the solid line representing the measurement result almost touches the horizontal axis (real axis), and the low value side end (left end) of the arc also reaches a position close to the horizontal axis. It has a semicircular shape. This indicates that accurate measurement of the impedance is possible.

  19A, 19B, and 19C show measurement results (examples) using a solid electrolyte as a sample of the measurement target 20. The sample is formed by forming gold electrodes 20a and 20b (4 mm in diameter) on both sides of a solid electrolyte processed into a plate having a diameter of 5.5 mm and a thickness of 0.26 mm. The measurement was carried out in a measurement frequency range of 1 Hz to 10 MHz with a measuring jig 14 connected using a Solartron Model 1260 as the measuring device 12. The AC voltage was set to 10 mV, and the number of measurement points per digit was set to 40 steps / decade. In addition to room temperature (25 ° C.), the impedance was measured by controlling the sample temperature to a plurality of temperatures set at 0 ° C. to 120 ° C. at 10 ° C. intervals. 19A and 19B collectively show measurement results at various sample temperatures. FIG. 19B clearly shows the measurement results when the low impedance region is enlarged and the sample temperature is set to a high temperature.

From this measurement result, it can be seen that a clear arc shape appears in the Nyquist diagram even in the solid electrolyte, and therefore, the impedance can be measured.
FIG. 19C shows an enlarged curve on the low value side of the measurement result at 120 ° C. The left half of the semi-elliptical arc has not appeared, and the impedance has not been accurately measured. To compensate for this, it is preferable to use another measuring device having a different measurement frequency range as in the first embodiment. Also, for the impedance measurement under higher temperature conditions, it is preferable to use another measuring device having a different measurement frequency range as in the first embodiment.

Although the embodiments of the present invention have been specifically described above, the present invention can be embodied in other forms as exemplified below.
(1) In the first embodiment, the two measuring devices 11 and 12 are switched and used, but three or more measuring devices may be switched and used.
(2) In the first embodiment, an example in which the measurement by the first measuring device 11 is performed first and the measuring device by the second measuring device 12 is performed next is described. The measurement may be performed first, and the measurement by the first measuring device 11 may be performed later. However, since the measurement on the high frequency side requires less time, it is more reasonable to perform the measurement by the first measuring device 11 for measuring in the high frequency region first.

(3) In the first embodiment, the measuring device side terminal support plate 71 of the switching device 13 supports both the first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44. The first measuring device side terminals T31 to T34 and the second measuring device side terminals T41 to T44 may be supported by two individually provided support plates.
(4) In the first embodiment, the switching device 13 is configured to move the measurement target side terminal support plate 72 in the X direction and the Y direction while fixing the measurement device side terminal support plate 71. ing. However, the measurement target side terminal support plate 72 may be fixed and the measurement device side terminal support plate 71 may be moved, or both the measurement target side terminal support plate 71 and the measurement target side terminal support plate 72 may be moved. Thus, their relative movement may be achieved. For example, the relative movement in the Y direction may be performed by moving only one of the terminal support plates 71 and 72, and the relative movement in the X direction may be performed by moving only the other of them. Furthermore, the relative movement between the measuring device side terminal support plate 71 and the measurement target side terminal support plate 72 is not limited to the combination of the relative movement in the X direction and the Y direction, but the combination of the relative movement in the X direction and the Z direction. A combination of relative movement in the Y direction and the Z direction, a combination of relative movement in the X direction, the Y direction, and the Z direction may be applied. Further, the relative movement between the measuring-device-side terminal support plate 71 and the measurement-target-side terminal support plate 72 may include rotational movement, and may include at least one directional component among the X, Y, and Z directions. Translation and rotation may be included.

  (5) In the first embodiment, the relative movement unit 73 of the switching device 13 has an X-direction actuator 75 and a Y-direction actuator 76 in front of the measuring devices 11 and 12. However, such an arrangement is an example, and a space for accommodating the X-direction actuator 75 and the Y-direction actuator 76 may be secured below the measuring device 12, for example. Thus, the measurement jig 14 can be brought closer to the measurement target side terminal support plate 72, so that the cable length of the coaxial cable 5 connecting them can be shortened. Thereby, the measurement accuracy can be further improved.

  (6) In the first embodiment, the switching device 13 includes the first measuring device side terminals T31 to T34, the second measuring device side terminals T41 to T44, and the measurement target side terminals T51 to T34 each configured by a push-on type coaxial connector. T54 is provided, and switching is achieved by inserting and removing them. However, this configuration is an example. For example, the switching device is formed by a combination of a coaxial metal pattern formed on an insulating plate and a plurality of spring probes (contact probes) pressed against the coaxial metal pattern. Can also be configured. More specifically, a plurality of coaxial metals are provided on the surface of the measuring device side terminal support plate 71 facing the measurement target side terminal support plate 72 so as to correspond to the measuring device side terminals T31 to T34 and T41 to T44, respectively. A pattern is formed in advance. Each coaxial metal pattern includes a signal transmission section and a shield section surrounding the signal transmission section. The shield part may be a metal pattern that is continuous on a circumference centered on the signal transmission part, or may be a plurality of metal patterns that are discretely arranged on the circumference. On the other hand, a plurality of coaxial spring probe assemblies are provided on the measurement target terminal support plate 72 so as to correspond to each of the measurement target terminals T51 to T54. Each coaxial spring probe assembly includes one spring probe for signal transmission and a plurality of shield spring probes surrounding the probe. Each spring probe includes a body implanted in the measurement-target-side terminal support plate 72, a contact rod that protrudes and retracts from the body, and a spring that biases the contact rod toward the measurement-device-side terminal support plate 71. And With this configuration, the coaxial spring probe assembly is moved relative to the measuring-device-side terminal support plate 71 and the measurement-target-side terminal support plate 72, thereby connecting the coaxial metal pattern or the second It can be selectively connected to the coaxial metal pattern constituting the measuring device side terminal. In this case, the relative movement in the X direction can be omitted if the spring probe slides on the surface of the measuring-device-side terminal support plate 71 without any problem. Needless to say, the measurement target side terminals T51 to T54 may be formed of a coaxial metal pattern, and the measurement device side terminals T31 to T34 and T41 to T44 may be formed of a coaxial spring probe assembly.

  (7) In addition to the above-described first to fourth wires 61 to 64, the measuring jig 4 further includes an end of the shield wire 42b of the second coaxial cable 42 on the first electrode lead E1 side and a shield of the third coaxial cable 43. A fifth line that directly connects the line 43b to the end on the second electrode lead E2 side may be provided. It is preferable to provide a plurality of such fifth lines. However, if too many fifth wires are provided, the measurement accuracy may be deteriorated due to the influence of the inductance component.

(8) In the above embodiment, measurement of impedance was mainly described, but the present invention can also be applied to measurement of physical quantities other than impedance, and can contribute to expansion of the measurement range.
In addition, various design changes can be made within the scope of the matters described in the claims.

1 Measurement system (first embodiment)
2 Measurement system (second embodiment)
3, 4, 5 Coaxial cable 10 Control device 11 First measuring device 12 Second measuring device 13 Switching device 14 Measurement jig 15 Switching device control unit 16 Temperature controller 19 Cooling device 20 Measurement target 21 Holding container 22 Lid 23 Heater 25 Thermocouple T1 First terminal group T11 Signal output terminal (first terminal)
T12 Voltage measurement terminal (first terminal)
T13 control terminal (first terminal)
T14 Current measurement terminal (first terminal)
T2 second terminal group T21 signal output terminal (second terminal)
T22 High side voltage measurement terminal (second terminal)
T23 Low side voltage measurement terminal (second terminal)
T24 Current measurement terminal (second terminal)
T31 to T34 First measuring instrument side terminal T41 to T44 Second measuring instrument side terminal T51 to T54 Measurement target terminal 26 Gas introduction pipe 27 Exhaust pipe 32 Support assembly E1 First electrode lead E2 Second electrode lead P1 First connection position P2 Second connection position P3 Third connection position P4 Fourth connection position 37 Lower support plate 37a Recess 375 Through hole 41 First coaxial cable 41a Core wire 41b Shield wire 41c Insulator 42 Second coaxial cable 42a Core wire 42b Shield wire 42c Insulation Body 43 Third coaxial cable 43a Core wire 43b Shield wire 43c Insulator 44 Fourth coaxial cable 44a Core wire 44b Shield wire 44c Insulator 46-49 Feed-through coaxial cable connector 51-55 Shield connection part 61 First wire 62 Second wire 63 3rd line 64 4th line 67 Constant frame 69 Moving frame 71 Measuring device side terminal support plate 71a Insulating plate 72 Measurement target side terminal supporting plate 72a Insulating plate 73 Relative moving unit 74 XY stage unit 75 X direction actuator 76 Y direction actuator 77 Stage 94 External storage device 95 Control program Reference numeral 96 Central processing unit 97 Memory 98 Display unit 99 Input unit 100 Setting window 101 First measurement frequency input unit 102 Second measurement frequency input unit 103 Measurement interval input unit 105 Upper limit frequency setting unit 106 Lower limit frequency setting unit 107 Upper limit frequency setting unit 108 Lower limit frequency setting unit 109 Start button 110 Suspend button 111 Save button 112 Forced end button 113 Switching device status display unit 114 Measuring device status display unit 120 Output window 121 Bode diagram display 121a gain diagram display unit 121b phase diagram display unit 122 Nyqusit diagram display unit 141 measurement jig (Comparative Example)

Claims (48)

A first measuring device having a first terminal group to be connected to the measurement target, and measuring the impedance of the measurement target according to a first measurement method;
A second measuring device having a second terminal group to be connected to the measurement target, and measuring the impedance of the measurement target according to a second measurement method different from the first measurement method;
A first measuring device side terminal group connected to the first terminal group, a second measuring device side terminal group connected to the second terminal group, a measuring object side terminal group, and the first measuring device side terminal A switching device including a group or a selective connection unit that selectively connects the second measuring device side terminal group to the measurement target side terminal group,
A measuring jig having a measuring head connected to the measuring object side terminal group and connected to the measuring object,
Controlling the switching device to connect the first measuring device side terminal group to the measurement target side terminal group, control the first measuring device to execute the measurement by the first measurement method, and A first measurement control for acquiring a measurement result by a measurement device, and controlling the switching device to connect the second measurement device side terminal group to the measurement target side terminal group, controlling the second measurement device, to execute the measurement by the second measurement method, and saw including a controller for executing a second measurement control to acquire the measurement result of the second measuring device,
The first measuring device sets a plurality of different frequencies as a plurality of measurement points, measures a response from the measurement target at the plurality of measurement points,
A measurement system, wherein the second measuring device sets a plurality of different frequencies as a plurality of measurement points and measures responses from the measurement target at the plurality of measurement points . The first measuring device outputs measurement result data of a first format, the second measuring device outputs measurement result data of a second format different from the first format,
The measurement system according to claim 1, wherein the control device includes a unit that outputs both the first format measurement result data and the second format measurement result data in a third format.   The measurement system according to claim 1, wherein the control device includes a unit configured to generate a single output file in which measurement result data of the first measurement device and measurement result data of the second measurement device are integrated.   4. The control device according to claim 1, wherein the control device performs the first measurement control in a first measurement frequency region, and performs the second measurement control in a second measurement frequency region different from the first measurement frequency region. 5. The measurement system according to claim 1. The apparatus further includes a measurement frequency domain input unit for a user to set the first measurement frequency domain and the second measurement frequency domain,
The measurement system according to claim 4, wherein the control device determines the first measurement frequency region and the second measurement frequency region according to a setting by the measurement frequency region input unit. Further comprising a measurement point interval setting means for setting an interval between the measuring points is measured frequency in the first instrument and the second measuring device in common,
Wherein the control device comprises a measurement point instruction means for instructing a plurality of said measurement points set interval by the measuring point interval setting unit to the first instrument and the second measuring device, of claims 1 to 5 The measurement system according to claim 1. The measurement object is a solid electrolyte, the measurement system according to any one of claims 1-6. A plurality of first measuring device side terminals forming the first measuring device side terminal group, a plurality of second measuring device side terminals forming the second measuring device side terminal group, and the measurement object side terminal group are formed. measurement system in which a plurality of measurement object-side terminals are arranged according to a common arrangement, according to any one of claims 1-7. A switching device configured to support the plurality of first measuring device-side terminals while maintaining the arrangement of the first measuring device-side terminals, and to support the plurality of second measuring device-side terminals while maintaining the arrangement thereof; 2 further includes a measuring device side terminal support member, and a measurement object side terminal support member that supports the plurality of measurement object side terminals while maintaining their arrangement,
The selective connection unit relatively moves the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement object side terminal supporting member, and moves the measurement object side terminal to the first measurement. The measurement system according to claim 8 , further comprising a relative movement unit configured to selectively contact the device side terminal or the second measuring device side terminal. The measurement system according to claim 9 , wherein the first measuring device side terminal supporting member and the second measuring device side terminal supporting member are a common supporting member. Each of the first measuring device side terminal, the second measuring device side terminal, and the measurement target side terminal is a coaxial terminal including a signal transmission unit and a shield unit surrounding the signal transmission unit,
The first measuring device side terminal support member includes an insulating plate that supports the shield portions of the plurality of first measuring device side terminals in a state where they are electrically insulated from each other,
The second measuring device side terminal support member includes an insulating plate that supports the shield portions of the plurality of second measuring device side terminals in a state where they are electrically insulated from each other,
The measurement target side terminal support member includes an insulating plate that supports the shield portions of the plurality of measurement target side terminals in a state where they are electrically insulated from each other.
Measurement system according to claim 9 or 10. The first measuring instrument side terminal and the second measuring instrument side terminal are push-on type first coaxial connectors, and the measurement target side terminal is a push-on type coaxial connector that can be fitted to the first coaxial connector. A second coaxial connector,
The relative movement unit moves the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement target side terminal supporting member along a fitting direction of the first and second coaxial connectors. The measurement system according to any one of claims 9 to 11 , wherein the measurement system relatively moves the measurement system. 13. The measurement system according to claim 12 , wherein at least one of the first coaxial connector and the second coaxial connector has a floating structure for absorbing a displacement. The measurement head includes a first electrode lead and a second electrode lead that come into contact with a measurement target at different positions,
The measuring jig is
A first coaxial cable having a core wire connected to a first connection position of the first electrode lead;
A second coaxial cable having a core wire connected to a second connection position of the first electrode lead closer to the measurement target than the first connection position;
A third coaxial cable having a core wire connected to a third connection position of the second electrode lead;
A fourth coaxial cable having a core wire connected to a fourth connection position of the second electrode lead farther from the measurement target than the third connection position;
A first wire that directly connects the first electrode lead-side end of the shielded wire of the first coaxial cable to the first electrode lead-side end of the shielded wire of the second coaxial cable;
A second wire that directly connects the first electrode lead-side end of the shielded wire of the first coaxial cable to the second electrode lead-side end of the shielded wire of the third coaxial cable;
A third wire that directly connects an end of the shielded wire of the second coaxial cable on the first electrode lead side and an end of the shielded wire of the fourth coaxial cable on the second electrode lead side;
The fourth coaxial cable includes a fourth wire that directly connects an end of the shield wire of the third coaxial cable on the second electrode lead side and an end of the shield wire of the fourth coaxial cable on the second electrode lead side. The measurement system according to any one of claims 1 to 13 . The said 2nd line and the said 3rd line are provided with two or more, respectively, and the several 2nd line and the several 3rd line are arrange | positioned so that the measurement object arrangement | positioning position may be surrounded. 15. The measurement system according to 14 . The measurement jig has an object support portion having a support surface for supporting the object to be measured, and a measurement object support having a plurality of through holes arranged to surround the object support portion and extending in a direction intersecting the support surface. Further comprising a member,
The measurement system according to claim 15 , wherein the plurality of second lines and the plurality of third lines are routed through the plurality of through holes. 17. The measurement system according to claim 16 , further comprising a heater attached to the measurement target support member and configured to heat the measurement target. The measuring jig is
A holding container having an opening and containing the measurement target,
A lid for closing an opening of the holding container,
A first feedthrough, a second feedthrough, a third feedthrough, and a fourth feedthrough fixed to the lid and supporting the first coaxial cable, the second coaxial cable, the third coaxial cable, and the fourth coaxial cable, respectively. The measurement system according to any one of claims 14 to 17 , further comprising a feedthrough. The first to fourth feedthroughs are insulated feedthroughs that respectively support the first to fourth coaxial cables in a state where the shield wires of the first to fourth coaxial cables and the lid are electrically insulated. 19. The measurement system according to claim 18 , wherein: The measuring jig is
A gas introduction pipe coupled to the lid and introducing gas into the holding container;
Coupled to said lid further comprises, measuring system according to claim 18 or 19 and an exhaust pipe for exhausting the gas in the holding container. A switching device for selectively connecting a first measuring device and a second measuring device to a measurement target,
A first measuring device side terminal group connected to the first measuring device;
A second measuring device side terminal group connected to the second measuring device;
A measurement-side terminal group connected to the measurement target,
A selective connection unit that selectively connects the measurement target side terminal group to the first measurement device side terminal group or the second measurement device side terminal group,
A first measuring device side terminal support member that supports the plurality of first measuring device side terminals constituting the first measuring device side terminal group while maintaining their arrangement;
A second measuring device side terminal support member for supporting the plurality of second measuring device side terminals constituting the second measuring device side terminal group while maintaining their arrangement,
A measurement target terminal supporting member that supports the plurality of measurement target terminals constituting the measurement target terminal group while maintaining their arrangement,
The plurality of first measuring instrument side terminals, the plurality of second measuring instrument side terminals, and the plurality of measurement target side terminals are arranged according to a common arrangement,
The selective connection unit relatively moves the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement object side terminal supporting member, and moves the measurement object side terminal to the first measurement. A switching device including a relative movement unit for selectively making contact with a device side terminal or the second measuring device side terminal. 22. The switching device according to claim 21 , wherein the first measuring device side terminal supporting member and the second measuring device side terminal supporting member are a common supporting member. Each of the first measuring device side terminal, the second measuring device side terminal, and the measurement target side terminal is a coaxial terminal including a signal transmission unit and a shield unit surrounding the signal transmission unit,
The first measuring device side terminal support member includes an insulating plate that supports the shield portions of the plurality of first measuring device side terminals in a state where they are electrically insulated from each other,
The second measuring device side terminal support member includes an insulating plate that supports the shield portions of the plurality of second measuring device side terminals in a state where they are electrically insulated from each other,
The measurement target side terminal support member includes an insulating plate that supports the shield portions of the plurality of measurement target side terminals in a state where they are electrically insulated from each other.
Switching device according to claim 21 or 22. The first measuring instrument side terminal and the second measuring instrument side terminal are push-on type first coaxial connectors, and the measurement target side terminal is a push-on type coaxial connector that can be fitted to the first coaxial connector. A second coaxial connector,
The relative movement unit moves the first measuring device side terminal supporting member, the second measuring device side terminal supporting member, and the measurement target side terminal supporting member along a fitting direction of the first and second coaxial connectors. The switching device according to any one of claims 21 to 23 , wherein the switching device relatively moves the switching device. 25. The switching device according to claim 24 , wherein at least one of the first coaxial connector and the second coaxial connector has a floating structure for absorbing a displacement. A first electrode lead and a second electrode lead that contact the measurement target at different positions,
A first coaxial cable having a core wire connected to a first connection position of the first electrode lead;
A second coaxial cable having a core wire connected to a second connection position of the first electrode lead closer to the measurement target than the first connection position;
A third coaxial cable having a core wire connected to a third connection position of the second electrode lead;
A fourth coaxial cable having a core wire connected to a fourth connection position of the second electrode lead farther from the measurement target than the third connection position;
A first wire that directly connects the first electrode lead-side end of the shielded wire of the first coaxial cable to the first electrode lead-side end of the shielded wire of the second coaxial cable;
A second wire that directly connects the first electrode lead-side end of the shielded wire of the first coaxial cable to the second electrode lead-side end of the shielded wire of the third coaxial cable;
A third wire that directly connects an end of the shielded wire of the second coaxial cable on the first electrode lead side and an end of the shielded wire of the fourth coaxial cable on the second electrode lead side;
A measurement jig including a fourth wire that directly connects an end of the shielded wire of the third coaxial cable on the second electrode lead side and an end of the shielded wire of the fourth coaxial cable on the second electrode lead side; Utensils. The said 2nd line and the said 3rd line are provided with two or more, respectively, and the several 2nd line and the several 3rd line are arrange | positioned so that the measurement object arrangement | positioning position may be surrounded. 28. The measuring jig according to 26 . A target support portion having a support surface that supports the measurement target, and a measurement target support member having a plurality of through holes that are arranged to surround the target support portion and extend in a direction intersecting the support surface,
The measuring jig according to claim 27 , wherein the plurality of second lines and the plurality of third lines are routed through the plurality of through holes. 29. The measurement jig according to claim 28 , further comprising a heater attached to the measurement target support member and configured to heat the measurement target. A holding container having an opening and containing the measurement target,
A lid for closing an opening of the holding container,
A first feedthrough, a second feedthrough, a third feedthrough, and a fourth feedthrough fixed to the lid and supporting the first coaxial cable, the second coaxial cable, the third coaxial cable, and the fourth coaxial cable, respectively. The measuring jig according to any one of claims 26 to 29 , further comprising a feedthrough. The first to fourth feedthroughs are insulating feedthroughs that respectively support the first to fourth coaxial cables in a state where the shields of the first to fourth coaxial cables and the lid are electrically insulated. The measuring jig according to claim 30 . A gas introduction pipe coupled to the lid and introducing gas into the holding container;
Coupled to said lid, further comprising an exhaust pipe for exhausting the gas in the holding container, measuring jig according to claim 30 or 31. A measurement jig according to any one of claims 26 to 32 ,
A measuring device having a plurality of terminals respectively connected to the first to fourth coaxial cables, and a measuring device for measuring the impedance of the measurement object. The measurement system according to claim 33 , wherein the measurement device measures responses from the measurement target to a plurality of different frequencies. The measurement object is a solid electrolyte, the measurement system according to claim 33 or 34. A control program to be executed by a computer for controlling a measurement system for measuring the impedance of a measurement target,
The measurement system comprises:
A first measuring device having a first terminal group to be connected to the measurement target, and measuring the impedance of the measurement target according to a first measurement method;
A second measuring device having a second terminal group to be connected to the measurement target, and measuring the impedance of the measurement target according to a second measurement method different from the first measurement method;
A first measuring device side terminal group connected to the first terminal group, a second measuring device side terminal group connected to the second terminal group, a measuring object side terminal group, and the first measuring device side terminal A switching unit that selectively connects a group or the second measuring device side terminal group to the measurement target side terminal group
The switching device is controlled to connect the first measuring device side terminal group to the measurement target side terminal group, and the first measuring device is controlled to control the first measuring device from the measurement target at a plurality of measurement points at a plurality of different frequencies. the response was measure I by the first measurement method, and the a first measurement control step of acquiring a measurement result by the first measuring device, the controlling of the switching device second meter terminal connect the group to the measurement object-side terminal group, measuring I'm a response from the measurement object at a plurality of measuring points are a plurality of different frequencies by controlling the second measuring device to the second measurement method constant And a second measurement control step of causing the computer to execute a second measurement control step of acquiring a measurement result by the second measurement device. The first measuring device outputs measurement result data of a first format, the second measuring device outputs measurement result data of a second format different from the first format,
The control program according to claim 36 , wherein the control program causes the computer to execute a step of outputting both the first format measurement result data and the second format measurement result data in a third format. To execute the steps of generating a single output file with integrated measurement data of the measurement result data and the second measuring device of the first measuring device to the computer, the control program according to claim 36 or 37. The first measurement control step causes the computer to perform the first measurement frequency range, to execute the second measurement control step at a different second measurement frequency range from said first measurement frequency range in said computer, according to claim 36 control program according to any one of to 38. Providing measurement frequency domain input means for a user to set the first measurement frequency domain and the second measurement frequency domain, and receiving input from the measurement frequency domain input means,
The computer-readable storage medium according to claim 39 , further comprising the step of: causing the computer to further execute the step of determining the first measurement frequency domain and the second measurement frequency domain in accordance with settings made by the measurement frequency domain input means. A step of accepting an input from the first instrument and the spacing of the measuring points is measured frequency of the second measuring device provides a measuring point interval setting means for setting a common, and the measurement point interval setting means,
Wherein the step of the plurality of the measurement point of the measurement point interval set interval by setting means for instructing the first instrument and the second measuring device is further executed by the computer, one of the claims 36-40 The control program according to claim 1. A first terminal that has a first terminal group to be connected to a measurement target, and a first measuring device that measures the impedance of the measurement target according to a first measurement method; and a second terminal group that is to be connected to the measurement target. A measurement method in a measurement system including a second measurement device that measures the impedance of the measurement target according to a second measurement method different from the measurement method, and a measurement jig having a measurement head connected to the measurement target,
A first measurement step of connecting the measurement jig to the first terminal group, and performing measurement by the first measurement device using the first measurement method;
The measurement jig connected to the second terminal group, saw including a second measurement step of performing a measurement by the second measurement method by the second measuring device,
The first measuring device sets a plurality of different frequencies as a plurality of measurement points, measures a response from the measurement target at the plurality of measurement points,
A measurement method, wherein the second measurement device sets a plurality of different frequencies as a plurality of measurement points and measures responses from the measurement target at the plurality of measurement points . The first measuring step includes a step of connecting the measuring jig to the first terminal group by a switching device,
43. The measuring method according to claim 42 , wherein the second measuring step includes a step of connecting the measuring jig to the second terminal group by the switching device. The first measuring device outputs measurement result data of a first format, the second measuring device outputs measurement result data of a second format different from the first format,
The measurement method according to claim 42 or 43 , wherein the measurement method further includes a step of outputting both the first format measurement result data and the second format measurement result data in a third format. The measurement method according to any one of claims 42 to 44 , further comprising: generating a single output file in which measurement result data of the first measurement device and measurement result data of the second measurement device are integrated. . Wherein the first measuring step, executed at the first measurement frequency range, said second measuring step is performed in a different second measurement frequency range from said first measurement frequency range, one of the claims 42-45 one The measurement method described in the section. Wherein the first measuring step and said second measuring step is performed respectively for a plurality of the measuring points are a plurality of measurement frequencies which are set at a common spacing, according to any one of claims 42-46 Measuring method. The measurement method according to any one of claims 42 to 47 , wherein the measurement target is a solid electrolyte.

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