JP6664727B1 - Method of measuring straightness of mount, method of measuring flatness, method of adjusting height, and program - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of measuring straightness of a gantry used for coating equipment and the like. SOLUTION: This is a method of measuring the straightness of a predetermined range (row 12) of a gantry 1 arranged on an quake-absorbing equipment (seismic pedestal 41), wherein Of the first reference device 51 and the second reference device 52 arranged at a measurement position within a predetermined range simultaneously measure the inclination S2 of the second reference device 52 by the reference device 51 of FIG. An inclination measuring step of comparing S1 and the inclination S2 to obtain the inclination Sx of the measurement position with the inclination S1 as a reference, and moving the second reference unit 52 a plurality of times within the predetermined range to set the predetermined range. And a straightness measuring step of calculating the straightness within the predetermined range by integrating the inclinations Sx acquired a plurality of times. [Selection] Fig. 3

Description

  The present invention relates to a gantry straightness measuring method and a flatness measuring method. The present invention also relates to a method for adjusting the height of a gantry based on the measured straightness and flatness. The present invention also relates to programs corresponding to these.

  As thin displays, such as liquid crystal displays and organic EL displays, have become larger, substrates used for these displays have also become larger. In recent years, the size which can cope with the eighth generation in which one side exceeds 2 m, and the size is further increased such as the tenth generation.

  In order to accurately measure the straightness of the movement trajectory of the coating nozzle even when the size of the substrate becomes large, the straightness measuring device of Patent Document 1 includes a laser spectral interferometer and a mirror. This mirror is arranged at a position facing a laser spectral interferometer provided in the coating head, with its reflection surface being parallel to the main scanning direction guide. The surface of this mirror has a high flatness. At this time, the distance between the reflection surface of the mirror and the laser spectral interferometer is 1 mm or less. The mirror is disposed over the entire coating area of the coating liquid by the nozzle as the coating head moves in the main scanning direction.

JP 2013-174522 A

  The size of glass substrates has been increasing, and in recent years, the eighth generation (about 2.4 m × about 2.2 m) and the like have been put to practical use. As the straightness of the movement locus of the coating nozzle is measured in the cited document 1, when the size is increased, coating unevenness or the like may occur in a manufacturing process of a display or the like. However, it is difficult to identify the cause of the coating unevenness or the like.

  In the cited document 1, when measuring the coating area of the coating liquid, when the size of the glass substrate becomes large, the size of the substrate exceeds the limit of the irradiation distance of the laser beam, and the measurement becomes impossible. Measurement problems have been pointed out, such as the problem that straightness cannot be measured by moving the coating head at high speed because noise is generated due to fluctuations in the coating.

  When coating a substrate or the like, for example, a pair of parallel linear guides is arranged on both ends of a table placed in the center, and a coating solution that moves along this guide is used to apply the coating liquid to the substrate. Work. A platform for mounting the guide, coater, and platform is provided at the bottom, and the platform is placed on a seismic isolation platform to suppress the effects of shaking and the like. In order to suppress coating unevenness of the coating liquid, it is required to specify which of these factors is the cause of the coating unevenness.

  An object of the present invention is to provide a method for measuring the straightness of a gantry used in such a coating facility.

  The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, have found that the following inventions meet the above objects, and have accomplished the present invention. That is, the present invention relates to the following inventions.

<1> A straightness measurement method for a predetermined range of a gantry arranged on a seismic isolation device,
The inclination of the first reference device S1 by the first reference device disposed at the reference position of the gantry, and the inclination S2 of the second reference device by the second reference device disposed at the measurement position in the predetermined range. And measuring the inclination S1 and the inclination S2 at the same time, and calculating the inclination Sx of the measurement position with reference to the inclination S1.
A straightness measuring step of moving the second reference device a plurality of times in the predetermined range and integrating the inclination Sx acquired a plurality of times in the predetermined range to obtain a straightness in the predetermined range. Method.
<2> height adjustment of each part of the predetermined range of the gantry, based on the straightness obtained in the straightness measuring step, in order to make the straightness in the predetermined range an allowable range of straightness; The measurement method according to <1>, further comprising a first calculation step of calculating the amount.
<3> A height adjustment method for adjusting the height of the gantry by arranging an adjustment piece in accordance with the height adjustment amount calculated by the measurement method described in <2>.
<4> The predetermined range is a range including the first and second parallel portions provided on the gantry, and the straight portion of the first and second portions is straight. Obtain a distribution chart that measures the degree,
Within the predetermined range, a rectangular virtual plane having three ends selected from four ends of both ends of the first strip and both ends of the second strip as vertices is provided,
The difference in height between the other end not used for the virtual plane and the vertex of the virtual plane, and the distribution map of the first and second lines and the sides of the virtual plane The measurement method according to <1>, further comprising a flatness measurement step of comparing a difference in height and evaluating a flatness Px between the first and second ridges.
<5> Based on the flatness Px obtained in the flatness measuring step, in a plane having the first and second ridges in the predetermined range as sides, the allowable range is defined as the side. The measurement method according to <4>, further including a second calculation step of calculating a height adjustment amount of the gantry for obtaining a flatness side.
<6> The height of the gantry is adjusted by arranging an adjustment piece and / or an adjustment plate in accordance with the height adjustment amount calculated in the second calculation step of the measurement method according to <5>. Height adjustment method.

<7> A program for causing a computer to measure the straightness of a predetermined range of a gantry arranged on a seismic isolation facility,
The slope S1 of the first reference device measured by the first reference device disposed at the reference position of the gantry, and the second measurement value measured by the second reference device disposed at the measurement position within the predetermined range. A slope measuring step of calculating the slope Sx of the measurement position based on the slope S1 by comparing the slope S1 with the slope S2 based on the slope S2 of the reference device;
The inclination Sx of each position is obtained from the inclination S1 and the inclination S2 obtained by moving the second reference device a plurality of times in the predetermined range, and the inclination Sx is integrated to obtain the predetermined range. A straightness measuring step for determining the straightness of the object.
<8> For the straightness obtained in the straightness measurement step, the height of each part of the predetermined range of the gantry in order to make the straightness in the predetermined range an allowable range of straightness. The program according to <7>, further including a first calculation step of calculating an adjustment amount.
<9> The predetermined range is a range including the parallel first and second strips provided on the gantry, and the straight section of the first and second strips is straight. Using the distribution map that measures the degree,
Within the predetermined range, a rectangular virtual plane having three ends selected from four ends of both ends of the first strip and both ends of the second strip as vertices is provided. ,
The difference between the other end not used for the virtual plane and the vertex of the virtual plane, and the height of the distribution map of the first stripe and the second stripe and the height of the side of the virtual plane The program according to <7>, further comprising a flatness measuring step of comparing a difference with the flatness and evaluating a flatness Px between the first and second ridges.
<10> Based on the flatness Px obtained in the flatness measuring step, in a plane having the first and second ridges in the predetermined range as sides, the allowable range is defined as the side. The program according to <9>, further including a second calculation step of calculating a height adjustment amount of the gantry for obtaining a side having flatness.

  ADVANTAGE OF THE INVENTION According to this invention, the straightness of the gantry used for coating equipment etc. can be measured.

It is a top view for explaining the outline of the composition of coating equipment. It is a front view for explaining the outline of the composition of coating equipment. It is a top view for explaining straightness measurement of the gantry concerning the present invention. It is a front view for explaining straightness measurement of the gantry concerning the present invention. It is a partial enlarged view in front view for explaining straightness measurement of the gantry according to the present invention. It is a flowchart of the straightness measuring method of the gantry concerning this invention. It is a front view for explaining an example of the height adjustment method of the gantry concerning the present invention. It is a schematic diagram for explaining a virtual plane for performing flatness measurement of the present invention. It is a schematic diagram for explaining an example of the height adjustment method based on flatness measurement using a virtual plane of the present invention. It is a flowchart of the flatness measurement method of the gantry concerning this invention. It is a flowchart which shows an example of the straightness measurement of the gantry concerning this invention. It is a flow chart which shows an example of flatness measurement of a gantry concerning the present invention. It is a graph which shows the measurement result of the height of the gantry measured by the straightness measuring method of the present invention. It is a graph which shows the measurement result of the height of the gantry measured by the straightness measuring method of the present invention.

  Hereinafter, embodiments of the present invention will be described in detail. However, the description of constituent elements described below is an example (representative example) of an embodiment of the present invention, and the present invention is described below unless the gist is changed. It is not limited to the content of. In this specification, the expression “to” is used as an expression including numerical values before and after the expression.

[Straightness measuring method of the present invention]
The straightness measuring method of the present invention is a straightness measuring method for a predetermined range of a gantry disposed on a seismic isolation facility, wherein the first standard is disposed at a reference position of the gantry. The slope S1 of the reference device and the slope S2 of the second reference device are simultaneously measured by the second reference device arranged at the measurement position in the predetermined range, and the slope S1 and the slope S2 are compared. An inclination measuring step of obtaining an inclination Sx of the measurement position based on the inclination S1;
A straightness measuring step of moving the second reference device a plurality of times in the predetermined range and integrating the slopes Sx acquired a plurality of times in the predetermined range to obtain a straightness in the predetermined range.

  According to the straightness measuring method of the present invention, by providing the first reference position on a gantry mounted on a seismic isolation device such as a spring, the first reference position is not affected by swaying by a spring or the like. And the inclination of the second reference device is compared, and the inclination of the measurement position where the second reference device is placed is measured with reference to the inclination of the first reference device. Then, by forming a distribution obtained by integrating the inclination, three-dimensional information including height information such as straightness and flatness can be obtained.

[Coating equipment 10]
FIGS. 1 and 2 are schematic diagrams for explaining a coating equipment which is a typical example to which the method for measuring the straightness of a gantry according to the present invention is applied. FIG. 1 is a plan view of the coating equipment 10. FIG. 2 is a front view of the coating equipment 10. In addition, in the plan view shown in FIG. 1, the X direction is from left to right, and the Y direction is from above to below. FIG. FIG. 2 is a front view of the facility 10, and a description will be given with the upward direction from the bottom in FIG.

  The coating facility 10 is a facility for performing coating using the gantry 1. The gantry 1 has a rectangular substrate 11 when viewed in a plan view, a ridge 12 provided on the upper side of the substrate 11 in the width direction (X direction) on the near side in the Y direction, and a width on the upper side of the substrate 11 on the far side in the Y direction. And a ridge 13 provided in the direction (X direction). The ridges 12 and the ridges 13 are arranged in parallel, and both are linear. A linear guide 21 and the like are provided on the strips 12 and 13, respectively. The coating equipment 10 is movable along a linear guide 21 or the like, and has a coater 2 attached to a gantry attached so as to bridge the strip 12 and the strip 13. The coating equipment 10 is provided with two coaters 2. A coating table 3 is provided at the center of the gantry 1, and a coating object such as a glass substrate is appropriately disposed on the coating table 3. The coater 2 is moved in the width direction (X direction) by a gantry that moves along a linear guide attached to the strips 12 and 13, and moves on the coating target placed on the coating table 3. Form a coating. The gantry 1 is arranged on a seismic isolation table 41 in order to reduce the influence of shaking or the like during coating.

[Shape of base 1 on seismic isolation equipment]
An extremely thin thin film is provided on a glass substrate or the like placed on the coating table 3 in the coating equipment 10. This thin film is appropriately laminated. The thickness of the thin film and the like are set under extremely strict conditions in order to achieve optical design such as color and brightness when used as a display or the like. The thickness unevenness allowed for the coating film or the like of the display depends on the product or the like, but may be tens of μm or less or several μm or less. In order to achieve such thickness unevenness, the height, moving speed, inclination, and the like of each device constituting the coating equipment 10 are strictly controlled. Further, in order to suppress coating unevenness of the coating liquid, it is required to specify which of these devices is the cause of the coating unevenness.

  As the coating equipment 10, the eighth generation (about 2.4m x about 2.2m) and the like have been put into practical use, and a gantry 1 having a size corresponding to this, a coater 2, a coating table 3, a seismic isolation table, and the like. 41, a base stand 42 and the like are used. Each of these devices can weigh from several tons to tens of tons. Further, the coater 2 is moved on the gantry 1 by a gantry or the like that moves along linear guides provided on the strips 12 and 13, but the gantry and the coater 2 are also very heavy. It is also used while eliminating the influence of weight.

  The gantry 1 as a basic structure of the coating equipment 10 is also manufactured so as to satisfy strict design standards. The gantry 1 may also weigh several tons to several tens of tons by itself, and is manufactured while being placed on the floor at a dedicated manufacturing site, and in that state, the shapes of the strips 12 and the strips 13 are evaluated. ing. When the gantry 1 is used as the coating facility 10, the gantry 1 is used while being placed on the seismic isolation table 41.

  Since the gantry 1 is very thick and is made of steel or the like, it is generally used because it is considered that dimensional accuracy and the like at the time of manufacture are maintained. However, the present inventors have examined the accuracy and the like of the coating equipment 10 in detail, and as a result, have paid attention to the possibility that an accuracy problem due to the gantry 1 has occurred. As a result, it has been found that even when the gantry 1 achieves excellent dimensional accuracy at the time of producing the gantry 1 alone, a very slight distortion may occur when the coating equipment 10 is used.

  The distortion of the gantry 1 is not detected at the time of manufacturing, and is considered to be a distortion that occurs only when the pedestal 1 is taken out to the use environment and placed on the seismic isolation table 41 or the like. Conventionally, this distortion has not been recognized. There are various possible reasons for this being difficult to recognize, but the following are possible. (1) The distortion of the gantry 1 is only a few μm to several tens μm / m and is very small. (2) The gantry 1 used in the coating equipment 10 must be large enough to exceed the upper limit of the detection range in a general straightness measuring device or the like. (3) Since the gantry 1 is mounted on the seismic isolation table 41, deviation due to disturbance is likely to occur during measurement. (4) The gantry 1 has achieved excellent dimensional accuracy in the environment at the time of manufacture. (5) Since the gantry 1 is made of hard steel or the like, it is not recognized that the gantry 1 is distorted in the use environment. (6) When the gantry 1 is lowered from the seismic isolation table 41 and measured independently on a stable floor, it is confirmed again that there is no distortion, and the distortion is eliminated.

  As described above, regarding the gantry 1 in the use environment of the coating equipment 10, the distortion is hardly recognized, and the distortion itself has a slight height difference, which is difficult to detect. In addition, as a countermeasure against the influence of the seismic isolation table 41, a means for measuring the height of the gantry 1 is required. Furthermore, there may be a slight difference in inclination between the parallel strips 12 and 13. The straightness measuring method and the like of the present invention have been performed under such circumstances.

[First embodiment of the present invention]
FIG. 3 is a schematic plan view of the gantry 1 and the like for explaining a straightness measuring method according to the first embodiment of the present invention, as viewed in plan. FIG. 4 is a schematic diagram of the gantry 1 and the like as viewed from the front. FIG. 5 is a schematic diagram of the gantry 1 and the like partially enlarged in a front view. In order to explain the measurement of the height of the gantry 1 alone before the linear guide 21 or the like is provided and the coater 2 moved by the gantry is installed, FIGS. 3 to 5 show the measurement without the coater 2 and the like. Will be described as an example. Here, the straightness including the influence of the strain of the gantry 1 generated on the seismic isolation base 41 provided on the base gantry 42 is measured. The coating table 3 may be integrated with the gantry 1, and is usually not a target to be moved on the gantry 1 when performing the coating process by the coater 2. The gantry 1 will be described as an example.

[Stand 1]
The gantry 1 is a stand that is arranged and used on seismic isolation equipment such as a seismic isolation table 41. The gantry 1 is not limited as long as it can measure straightness. In particular, the gantry 1 is for mounting a glass substrate of about the sixth generation (1500 mm × 1850 mm) to the eighth generation (2200 mm × 2500 mm). It is preferable to target the gantry. For this reason, the size of the gantry 1 can be, for example, a width (X direction) or a length (Y direction) of about 2 m to 6 m. If it is smaller than this, the size of the gantry 1 itself is also small and distortion due to its own weight is unlikely to occur, and the necessity of measurement by the straightness measuring method of the present invention is reduced.

  Since the upper surfaces of the strips 12 and 13 of the gantry 1 are portions where the linear guides 21 for installing the coater 2 are provided, the straightness and flatness of the upper surface are low, and if there is a deviation in the height, the upper surface is overlaid. The height of the coater 2 moving along the placed linear guide 21 also goes up and down. For this reason, if there is unevenness in the height, the upper surfaces of the strips 12 and 13 are portions where adjustment of the unevenness is required. Taking the straightness measurement of the gantry as an example, the straightness measurement of the gantry will be described.

  A first reference device 51 is arranged on the gantry 1 with an arbitrary position of the coating table 3 on the gantry 1 as a reference position. Then, in order to measure the inclination of the ridge portion 12 and obtain the straightness of the ridge portion 12, the second reference device 52 is disposed at the measurement position. As shown in FIGS. 3 and 4, the second reference device 52 is a second reference device 52 ′ that measures the inclination of the end of the measurement position set near the left end and then sequentially moves in the X direction. It is arranged and detects the inclination of the second reference device 52 (52 ') at each position.

  As shown in FIG. 3, the inclination detection system for performing the straightness measurement method and the like of the present invention includes an inclination detection unit 61, a height analysis unit 62, a height adjustment amount calculation unit 63, a memory 7, It has a monitor 8.

  The first reference device 51 and the second reference device 52 can perform wireless communication with each other, and can perform wireless communication with the tilt detection unit 61.

  Referring to FIG. 5 as an example, the first reference device 51 has an arrangement portion 511 and an arrangement portion 512 arranged at a distance L1 at the bottom. The first reference device 51 can measure the inclination S1 of the first reference device 51 between the placement unit 511 and the placement unit 512.

  Similarly, the second reference device 52 has an arrangement portion 521 and an arrangement portion 522 that are arranged at the same distance from each other as the distance L1 of the first reference device 51. The second reference device 52 can measure the inclination S2 of the second reference device 52 between the placement unit 521 and the placement unit 522.

In FIG. 5, while the first reference device 51 is still disposed at the reference position on the coating table 3, the second reference device 52 performs measurement while sequentially moving on the strip 12 which is a measurement range. . That is, first, the arrangement unit 521 is set on the measurement position A11, and the arrangement unit 522 is set on the measurement position A12, and the inclination between A11 and A12 is measured. When this is completed, the first arrangement part 521 is moved to A12 and the second arrangement part 522 is moved to A13, and the inclination of the next measurement position is detected. This is measured while being moved to the measurement positions A _x and A _{x + 1} as needed.

  In order to suppress the influence of correction or the like when obtaining the straightness, the direction of the line connecting the arrangement portions 511 and 512 of the first reference device 51 and the arrangement portion 521 of the second reference device 52 are arranged. It is preferable that the direction of the line connecting the portion 522 and the direction in the X direction-Y direction is parallel. When the line connecting the arrangement units 511 and 512 is arranged in the X direction, the line connecting the arrangement units 521 and 522 is also ± 1 degrees in the X direction, preferably ± 0.5 degrees or ± 0.1 degrees. It is preferable to arrange them so as to be in the same order.

  In addition, regarding the inclination, when the displacement of the gantry 1 is displayed as an angle, the displacement may have a very small value. Therefore, the inclination may be indicated by displaying the height. For example, the inclination may be indicated by indicating which one of the arrangement unit 511 and the arrangement unit 512 is higher and which is the difference. At this time, the detection sensitivity of the inclination represented by the height difference between the first reference device 51 and the second reference device 52 is preferably at least 0.02 mm / m or more, more preferably at least 0.01 mm / m or more, and at least 0 0.005 mm / m or more is more preferable, and at least 0.001 mm / m or more is particularly preferable. When the sensitivity is 0.001 mm / m or more, a displacement of 1 μm (0.001 mm) per 1 m can be detected.

  Further, the distance L1 between the placement unit 511 (521) and the placement unit 512 (52) of the first reference device 51 (second reference device 52) corresponds to the detection frequency of the inclination. The distance L1 is appropriately set in consideration of the specifications of the reference device to be used, the number of measurements for the size of the predetermined range, the degree of straightness to be managed, and the like. For example, the distance L1 can be set to about 5 cm to 50 cm, and is preferably set to 10 cm to 30 cm or 15 cm to 25 cm. If the distance L1 is too short, the measurement frequency may be too large, the size of the gantry 1 may be too large, the number of times of measurement may be too large, or the displacement of the inclination may be too small to be detected. If the distance L1 is too long, it may not be possible to sufficiently detect the undulation of the inclination occurring during the distance, and it may not be possible to obtain straightness useful for setting coating conditions and the like.

  The inclination detecting means 61 communicates with the first reference device 51 and the second reference device 52 to detect information transmitted as the inclination S1 of the first reference device 51 and the inclination S2 of the second reference device. can do. Both the inclination S1 and the inclination S2 are inclinations in the height direction (Z direction). These inclinations may be measured as displacements in the height direction (Z direction). These communications are preferably wireless communications. In the case of wireless communication, measurement can be performed without the influence of the inclination due to wiring, and more reliable measurement can be performed.

  Then, the inclination S1 of the first reference device 51 and the inclination S2 of the second reference device 52 are compared, and the inclination Sx at the place where the second reference device 52 is placed based on the inclination S1 is obtained. The inclination of the gantry 1 may fluctuate during measurement due to slight vibration or the like. However, the influence of these fluctuations has been eliminated by obtaining the inclination S1 of the first reference device 51 and using this as a reference. The slope Sx can be obtained.

  The slope Sx is obtained by using the value of “slope S1−slope S2” as it is, or by performing a correction using this value as a variable. At this time, the inclination of the first reference device 51 and the second reference device 52 and the distance and direction of each other in the horizontal plane may also be detected.

  The height analysis unit 62 performs analysis such as integrating the detected inclinations and creating a distribution map. The result of this analysis can also be obtained as corresponding to a height distribution map. The height adjustment amount calculating means 63 calculates an adjustment amount for eliminating the distortion of the ridge portion 12 of the gantry 1 based on the height distribution map.

  The memory 7 appropriately stores information such as a slope detected at a predetermined position, a distribution map of the slope and height obtained by analyzing them, and a height adjustment amount calculated based on the distribution map. Further, based on the information stored in the memory 7, analysis and calculation are performed by each means. The monitor 8 displays such information as appropriate. These means, memory, and monitor can be configured by combining a personal computer, a tablet terminal, a smartphone, a display, or the like having a program or application software for functioning as these.

  FIG. 5 is a partially enlarged view for explaining the operation of the straightness measuring method of the present invention with respect to the strip 12 in more detail. The first reference device 51 is disposed above the coating table 3. The inclination S1 of the first reference device 51 is used as a reference.

  The upper surface of the ridge portion 12 is slightly curved in a concave shape protruding downward. It is arranged so that it may extend over the measurement position A11 and the measurement position A12 of the ridge 12, and the inclination S2 of the ridge 12 between the measurement position A11 and the measurement position A12 is measured by measuring the inclination of the second reference device 52. . This measurement position is moved on the gantry 12 with the straightness evaluation range as a predetermined range, and the inclination Sx of these measurement positions is acquired on the gantry 12. From this inclination Sx, a distribution map of the inclination and height on the gantry 12 can be created. Here, by obtaining the inclination Sx based on the inclination S1 at which the first reference device 51 is disposed, even if the seismic isolation table 41 eliminates shaking and the like, displacement occurs in the height from the floor surface. , Relative inclination can be accurately measured.

  FIG. 6 is a flowchart of the method of measuring the gantry straightness according to the present invention. First, the first reference device is arranged at the reference position of the gantry (step S11). Next, the second reference device is arranged at the measurement position of the gantry (step S21).

  Next, the inclination S1 of the first reference device is measured (step S31). Next, the inclination S2 of the second reference device is measured (step S32). Next, the slope S1 and the slope S2 are compared to determine the slope Sx of the field where the second reference device is arranged (step S33).

  Next, it is determined whether a predetermined range to be measured as the measurement position of the gantry has been measured (step S34). When the measurement of the predetermined range has not been completed, the second reference device is moved to the next measurement position (step S35). Then, at the moved position, the inclination S1 of the first reference device and the inclination S2 of the second reference device are measured, and these are compared to measure the inclination Sx at the spot (steps S31 to S33). ). This is repeated until a predetermined range is measured.

  When the measurement in the predetermined range is completed, a distribution map is created in which the obtained slope Sx is associated with the measurement position (step S41). The distribution map of the slope Sx may be treated as a height distribution map. The distribution map of the slope Sx can be a value for determining straightness.

  Next, the height S at the respective measurement positions is calculated by comparing the distribution map of the inclination Sx with the height used as a management reference when the linear guide or the like is provided on the ridge 12 (the ridge 13) ( Step S51). The distribution map of these heights and the calculation result of the height adjustment amount are appropriately displayed on a display (step S61). By confirming the displayed information, the user can recognize the distribution map of the inclination and the height and the amount of height adjustment, and thus the basic flow of the straightness measuring method is ended by this display.

[Adjustment of height]
FIG. 7 is a partially enlarged front view for explaining a state in which the height adjustment amount is calculated according to the first embodiment shown in FIGS. 3 to 5 and the height is adjusted in accordance with the calculation result. is there. The measurement positions B1 to B13 are set for the measurement range 12a of the strip 12 of the gantry 1, the height S1 of the first reference device and the height S2 of the second reference device are measured, and these are compared. By measuring the slope S2 and integrating them, a distribution map of the slope can be obtained. It is also possible to determine the presence or absence of the entire inclination of the distribution map of the inclination and handle the distribution as a height distribution map.

  When the gantry 1 is placed on the seismic isolation table 41 or the like, a curved distortion in which the vicinity of the center is depressed may occur. When the height control standard of the gantry 1 is a high straightness such as the height hx, when the measurement range 12a on the upper surface of the actual strip 12 is concave, the difference from the height hx is determined. Need to be adjusted. The height hx can be adjusted by sandwiching a thin plate having a thickness corresponding to the difference between the height hx and the height at the measurement positions (B1 to B13).

  A calculation step of calculating a height adjustment amount such as the number and thickness of the thin plates used for adjusting the height is performed. FIG. 7 shows a state in which the adjustment piece 141 is arranged according to the adjustment amount and the difference from the reference height hx is minimized. Since the thickness of a thin plate may be manufactured as having a predetermined thickness for each thin plate, such as 5 μm or 10 μm per sheet, the thickness is a reference according to the thickness of the type of thin plate that can be used. The one that sets the number of thin plates to be sandwiched or the like so that the difference from the height hx is minimized is also included in the one adopted as height adjustment. By providing the linear guide with the thin plate sandwiched therebetween, even if the coater moves along the linear guide, it is possible to perform coating that is not easily affected by the height of the linear guide or the gantry.

  FIG. 8 is a schematic diagram for explaining a virtual plane for performing flatness measurement according to the present invention. In creating the virtual plane, first, a distribution map 12a of the inclination of the strip 12 of the gantry 1 is obtained. Further, a distribution map 13a of the inclination of the ridge portion 13 is obtained. When measuring both the distribution chart 12a and the distribution chart 13a, the position of the first reference unit 51 is assumed to be the same, so that both distribution maps are based on the slope S1 of the first reference unit 51. And use it with high reliability.

  From the four ends of the end 121 and end 122 of the distribution chart 12a and the end 131 and end 132 of the distribution chart 13a, any three ends are selected, and a virtual plane having these as vertices is selected. Is provided. In FIG. 8, a virtual plane Pv having the ends 121, 122, and 131 as vertices is assumed. This virtual plane Pv is provided as a parallelogram having a side connecting the end 121 and the end 122 and a side connecting the end 121 and the end 131.

  When the distribution chart 12a and the distribution chart 13a are compared with the virtual plane Pv, each distribution chart is located at a position lower than the virtual plane Pv, and the end 132 is also lower at a height 13b than the virtual plane Pv. . When the strips 12 and 13 in such a state are used, the coater 2 attached to a gantry or the like over which the strips 12 and 13 move also under the influence of these inclinations, so that the coating thickness is also affected. It will be.

  FIG. 9 is a schematic diagram for explaining an example of a height adjustment method based on flatness measurement using a virtual plane. Here, the virtual plane Pv provided by FIG. 8 is compared with the distribution chart 12a and the distribution chart 13a, and the vertices of the virtual plane Pv are set to Pv1, Pv2, Pv3, and Pv4, and the end parts 121, 122, 131, 132 correspond to each other. Here, the vertex Pv1 is the position of the end 121, the vertex Pv2 is the position of the end 122, and the vertex Pv3 is the position of the end 131. The vertex Pv4 is a point in the virtual plane having the vertices Pv1 to Pv3, and is located immediately above the end 132. Then, the adjusting pieces 141 are arranged so as to fill the difference between the distribution diagram 12a and the sides formed by the vertices Pv1 and Pv2. Next, adjustment is performed to fill the difference between the distribution diagram 13a and the side formed by the vertices Pv3 and Pv4.

  At this time, a difference in height 13b occurs between the vertex Pv4 and the end 132, and an inclination as a whole with respect to the virtual plane Pv also occurs from the end 131 to the end 132. Therefore, in combination with the adjusting piece 141, the height can be adjusted using the adjusting plate 142 whose thickness corresponding to the entire inclination gradually decreases from the end 132 toward the end 131. Thereby, it is possible to perform advanced height adjustment by adjusting the inclination and the height at the individual measurement positions and adjusting the inclination and the height between the ridges 12 and 13. Note that, instead of the adjustment plate 142, the height may be adjusted with an adjustment piece 141 having a thickness corresponding to the difference in height between the vertex Pv4 and the end 132 interposed therebetween.

  When performing height adjustment based on straightness or flatness as shown in FIGS. 7 and 9, it is better to adjust the height by sandwiching an adjustment piece or an adjustment plate by shaving a portion having a higher height. Since it is easier to make adjustments at the site of use than to perform, the difference between the straightness and the flatness is determined, and the reference height of straightness (for example, the height hx in FIG. 7) and the virtual plane ( For example, it is preferable to set the conditions for the data processing so that the side of the ridge and the end of the ridge are lower or almost equal to the virtual plane Pv) in FIG.

  FIG. 10 is a flowchart of the flatness measuring method of the gantry according to the present invention. The program for measuring the straightness of the gantry according to the present invention may be a program for causing a computer to execute the processing according to this flowchart. First, the steps shown in the flowchart of FIG. 10 and the like are applied mutatis mutandis, and for example, the slope distribution diagram is created using the strip 12 as the first strip (step S71). Next, similarly to step S71, a slope distribution diagram is created with the strip 13 and the like as the second strip (step S72).

  Next, a virtual plane is created based on the inclination distribution diagram of the first and second ridges (step S73). Next, the difference between the virtual plane and the vertices of the first and second ridges is measured. This difference is a difference from the other end not used for creating the virtual plane (step S74). Next, the difference between the first ridge and the second ridge and the corresponding side of the virtual plane is measured (step S75). Next, a height adjustment amount is calculated from the difference from these virtual planes (step S76). The height adjustment amount may be appropriately adjusted by an adjustment piece having a short length at an individual measurement position or by an adjustment plate having a long length with respect to a side portion on which a tilt is generated as a whole. It may be calculated in combination. These adjustment amounts are appropriately displayed on a monitor or the like (step S77).

  FIG. 11 is a flowchart illustrating an example of the straightness measurement of the gantry according to the present invention. For example, the range in which the gantry of the strip 12 (the strip 13) is used and the like is defined as a predetermined range for obtaining straightness, and the first reference device 51 is fixed on the coating table 3 and the strip is used. The second reference device 52 is arranged at 12 (the strip 13), a measurement position is set for each distance L1 of the second reference device 52, and data obtained by measuring the inclination S1 and the inclination S2 is obtained. The flowchart of FIG. 11 can be performed by a program that performs processing using this data.

  The data of the inclination S1 and the inclination S2 is obtained from the data storage to which the data of the inclination S1 and the inclination S2 of the measurement position obtained for the predetermined range set in the stripe 12 (the stripe 13) is input (step S81). ). Next, a slope Sx, which is a value obtained by comparing the slope S1 and the slope S2 at each measurement position, is calculated (step S82).

  Next, a gradient distribution map is created by sequentially integrating the gradient Sx from the starting point of the predetermined range for each measurement position (step S83). Next, straightness is calculated from the gradient distribution map (step S84). Next, based on the inclination distribution map, a height adjustment amount for achieving a predetermined straightness is calculated based on the size, thickness, etc. of the usable adjustment pieces (step S85). A distribution map of these inclinations, a straightness, and a height adjustment amount using an adjustment piece or the like for setting the straightness within a predetermined range are displayed on the display unit (step S86), and the process ends. The data processed in each of these steps can be sequentially stored in a memory or the like. By performing such processing, the user can grasp information for determining straightness and a height adjustment amount based on the measured values of the slopes S1 and S2.

  FIG. 12 is a flowchart showing an example of the measurement of the flatness of the gantry according to the present invention. When the coating is performed using the gantry 1, the coating is performed by the coater 2 attached to the gantry that bridges the strip 12 and the strip 13. For this reason, the ridges 12 and the ridges 13 are required to have high parallelism. In evaluating the parallelism, it is effective to refer to a pseudo flatness in which the ridges 12 and 13 are parallel sides. With respect to the ridges 12 and 13, the coating table 3 and the like are used as portions for disposing the first reference device 51, and the respective ridges (12 and 13) are set as predetermined ranges in which the tilt is measured. Data obtained by measuring Sx is obtained. The flowchart of FIG. 12 can be performed by a program that causes a computer to execute processing using the data of the slope Sx.

  With the ridges 12 as the first ridges and the ridges 13 as the second ridges, distribution maps of the respective slopes Sx are obtained (step S91). For this, for example, data that can be created in steps S81 to S83 shown in FIG. 11 described above can be used. Next, three ends are selected from both ends of the first strip and both ends of the second strip, and a virtual plane having these as vertices is created (step S92). With respect to this virtual plane, the difference from the virtual plane is calculated by comparing the distribution of the inclination Sx of the end, the first stripe, and the second stripe that are not used for creating the virtual plane ( Step S93). Next, the flatness of a virtual plane having the first and second ridges as sides is calculated (step S94). Next, a height adjustment amount to be adjusted by using an adjustment piece or an adjustment plate is calculated based on a difference between a side or an apex of the first stripe and the second stripe with respect to the virtual plane (step S95). The virtual plane, the difference from the virtual plane, the flatness, and the height calculation amount are displayed on a display unit or the like (step S96), and the process ends. The data processed in each of these steps can be sequentially stored in a memory or the like. By performing such processing, the user can calculate the virtual plane based on the distribution map of the inclination Sx of the first and second stripes, the difference between the virtual plane, the flatness, and the height calculation. We can let you know quantity.

  Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited to the following examples unless the gist is changed.

  The distribution of the inclination of the strips provided at both ends of the base (approximately 6 m wide x approximately 4 m deep) used for the coating equipment according to Fig. 1 etc. corresponding to the 8th generation (approximately 2.4m x approximately 2.2m) Was measured. This gantry achieves high straightness when placed directly on the floor, and the unevenness in the height of the strip is about 10 μm or less. The height was measured while the gantry was placed on a seismic isolation table (spring) when used as a coating facility.

  An ultra-precision electronic level radio system manufactured by WILER was used as a standard for measuring the tilt. This reference device uses two detectors (first reference device and second reference device), and measures the inclination of both of them, so that it shakes around when placed on the seismic isolation table. Occurs, the inclination of the measurement position where the second reference device is placed can be measured from the difference between the inclinations of the two reference devices with reference to the inclination of one reference device.

  One of the detectors was disposed as a first reference device at substantially the center of the gantry, and a distribution map of the slope Sx was created for each of the ridges on the front side and the ridges on the back side when viewed from the front.

  From the left end to the right end of each strip, measurement positions are set at 200 mm intervals, detectors used as second reference devices are arranged at each measurement position, and the inclination measured at each position is simultaneously arranged. And comparing the measured value of the inclination of the first reference device with the measured value of the inclination of the first reference device, the difference between the inclination (S1) of the first reference device and the inclination (S2) of the second reference device is defined as the inclination Sx, and the inclination Sx is integrated. FIG. 13 and FIG. 14 show distribution charts obtained by the calculation.

  Also, assuming that a SUS shim (thickness: 10 μm) is used as the thin plate used for height adjustment, an adjustment amount corresponding to the height of each measurement position is obtained, and the height at the time of the adjustment is displayed together. I do.

  As shown in FIG. 13, as a result of measuring the inclination of the upper surface of the front side streak and forming a distribution diagram, it was confirmed that the upper surface had a concave strain that protruded downward toward the center. The height difference is about 55 μm at the maximum. In addition, based on the measurement result of the straightness, the height for adjusting the height with a thin plate having a thickness of 10 μm and the height when the adjustment is performed may be such that the height difference is suppressed to about 10 μm or less. did it.

  As shown in FIG. 14, the upper surface of the far side strip has a strain that is convex downward and left and right across the center as a result of measuring the inclination and forming a distribution diagram. Was confirmed. The height difference occurs at a maximum of about 18 μm. Further, based on the results of the measurement of the straightness, the height for adjusting the height with a thin plate having a thickness of 10 μm and the height when the height was adjusted were such that the height difference was suppressed to about 10 μm or less.

As described above, it was confirmed that when the gantry was placed on the seismic isolation table, a distortion was not generated when the gantry was placed on the floor, and the height was uneven. In addition, although it is necessary to measure the height unevenness on the seismic isolation table, it was confirmed that the height unevenness can be measured by the straightness measuring method of the present invention. In addition, it was confirmed that a height adjustment amount based on the straightness measurement result was calculated and adjusted by using a thin plate, whereby height unevenness could be suppressed.
In addition, by using the mount after adjusting the height unevenness to assemble and coat the coating equipment, coating unevenness due to the distortion of the mount was suppressed.

  INDUSTRIAL APPLICABILITY The present invention can be used for height adjustment and the like by measuring the straightness of a gantry used for coating equipment and the like, and is industrially useful.

REFERENCE SIGNS LIST 1 base 10 coating equipment 11 substrate 12, 13 strip 141 adjustment piece 142 adjustment plate 2 coater 21 linear guide 3 coating base 41 seismic isolation table 42 base mount 51 first reference device 52 second reference device 61 height Detecting means 62 Height analyzing means 63 Adjustment amount calculating means 7 Memory 8 Monitor

Claims (8)

A straightness measurement method for a predetermined range of a gantry arranged on a seismic isolation device,
The inclination of the first reference device S1 by the first reference device disposed at the reference position of the gantry, and the inclination S2 of the second reference device by the second reference device disposed at the measurement position in the predetermined range. And measuring the inclination S1 and the inclination S2 at the same time, and calculating the inclination Sx of the measurement position with reference to the inclination S1.
Moving the second reference device a plurality of times in the predetermined range, a straightness measurement step of calculating the straightness of the predetermined range by integrating the inclination Sx obtained a plurality of times in the predetermined range ,
Based on the straightness obtained in the straightness measuring step, a height adjustment amount of each part of the predetermined range of the gantry is calculated in order to make the straightness of the predetermined range a straightness of an allowable range. A measuring method having a first calculating step . A height adjustment method for adjusting the height of the gantry by arranging an adjustment piece in accordance with the height adjustment amount calculated by the measurement method according to claim 1 . A straightness measurement method for a predetermined range of a gantry arranged on a seismic isolation device,
The inclination of the first reference device S1 by the first reference device disposed at the reference position of the gantry, and the inclination S2 of the second reference device by the second reference device disposed at the measurement position in the predetermined range. And measuring the inclination S1 and the inclination S2 at the same time, and calculating the inclination Sx of the measurement position with reference to the inclination S1.
A straightness measuring step of moving the second reference device a plurality of times in the predetermined range and integrating the inclination Sx acquired a plurality of times in the predetermined range to obtain a straightness in the predetermined range. And
The predetermined range is a range including the first and second parallel portions provided on the gantry, and the straightness of the first and second portions is measured. Obtained distribution map
Within the predetermined range, a rectangular virtual plane having three ends selected from four ends of both ends of the first strip and both ends of the second strip as vertices is provided,
The difference in height between the other end not used for the virtual plane and the vertex of the virtual plane, and the distribution map of the first and second lines and the sides of the virtual plane comparing the difference in height, the first ridges and the second ridges and the measurement how having a flatness measurement step of evaluating the flatness Px of. Based on the flatness Px obtained in the flatness measuring step, on a plane having the first ridge and the second ridge in the predetermined range as a side, the flatness in an allowable range of the side. The measuring method according to claim 3, further comprising a second calculating step of calculating a height adjustment amount of the gantry for setting the side as a side. A height for adjusting the height of the gantry by arranging an adjustment piece and / or an adjustment plate in accordance with the height adjustment amount calculated in the second calculation step of the measurement method according to claim 4. Adjustment method. A program for causing a computer to measure the straightness of a predetermined range of a gantry arranged on a seismic isolation device,
The slope S1 of the first reference device measured by the first reference device disposed at the reference position of the gantry, and the second measurement value measured by the second reference device disposed at the measurement position within the predetermined range. A slope measuring step of calculating the slope Sx of the measurement position based on the slope S1 by comparing the slope S1 with the slope S2 based on the slope S2 of the reference device;
The inclination Sx of each position is obtained from the inclination S1 and the inclination S2 obtained by moving the second reference device a plurality of times in the predetermined range, and the inclination Sx is integrated to obtain the predetermined range. Measuring the straightness of the straightness ,
For the straightness obtained in the straightness measuring step, in order to set the straightness of the predetermined range to the allowable range of straightness, the height adjustment amount of each part of the predetermined range of the gantry is adjusted. A program having a first calculating step of calculating . A program for causing a computer to measure the straightness of a predetermined range of a gantry arranged on a seismic isolation device,
The slope S1 of the first reference device measured by the first reference device disposed at the reference position of the gantry, and the second measurement value measured by the second reference device disposed at the measurement position within the predetermined range. A slope measuring step of calculating the slope Sx of the measurement position based on the slope S1 by comparing the slope S1 with the slope S2 based on the slope S2 of the reference device;
The inclination Sx of each position is obtained from the inclination S1 and the inclination S2 obtained by moving the second reference device a plurality of times in the predetermined range, and the inclination Sx is integrated to obtain the predetermined range. Measuring the straightness of the straightness, and
The predetermined range is a range including the first and second parallel portions provided on the gantry, and the straightness of the first and second portions is measured. Using the distribution map
Within the predetermined range, a rectangular virtual plane having three ends selected from four ends of both ends of the first strip and both ends of the second strip as vertices is provided. ,
The difference between the other end not used for the virtual plane and the vertex of the virtual plane, and the height of the distribution map of the first stripe and the second stripe and the height of the side of the virtual plane comparing the difference, pulp programs that have a flatness measurement step of evaluating the flatness Px and the second ridges and the first ridges. Based on the flatness Px obtained in the flatness measuring step, on a plane having the first ridge and the second ridge in the predetermined range as a side, the flatness in an allowable range of the side. The program according to claim 7, further comprising a second calculation step of calculating a height adjustment amount of the gantry for setting a side of the frame.