JP6661190B2 - Variable reactance circuit - Google Patents

Description

  The present invention relates to a variable reactance circuit that can control a reactance value to an arbitrary value with respect to high frequency and large power.

  Generally, in a circuit in which the line length of the circuit is not negligible with respect to the wavelength of the signal, power reflection occurs due to impedance mismatch between two circuits connected to each other (for example, a power supply and a load). In such a case, it is possible to reduce power reflection by inserting an impedance matching circuit between the power supply and the load.

  However, when the impedance of one or both of the connected circuits fluctuates, an automatic impedance matching circuit is required to always reduce the power reflection. The automatic impedance matching circuit includes a variable reactance circuit such as a variable capacitor or a varactor diode, and reduces the power reflection by changing the reactance value of the variable reactance circuit (for example, see Patent Document 1 and Non-Patent Document 1). ). The range of impedance that can be matched depends on the range of reactance values that can be taken by the variable reactance circuit.

  On the other hand, wireless power transmission to a running electric vehicle described in Non-Patent Document 2 is high frequency and large power, and the impedance of a load changes at a high speed depending on a running condition. It is desired that the variable reactance circuit of the automatic impedance matching circuit used for this purpose can withstand large power, have a very wide range of variable reactance values, and be capable of high-speed control.

JP 2009-93990 A

Shoichi Sato et al., "Real-time load tracking impedance automatic matching circuit," IEICE (C), vol. J97-C, no. 12, pp. 549-553, Dec. 2014. Takashi Ohira, “Electrified Road Electric Vehicle,” Automotive Technology Special Issue: Evolving Road-Related Technology, vol. 67, no. 10, pp. 47-50, Oct. 2013.

  Conventional variable reactance circuits include a variable capacitor and a varactor diode. The variable capacitor has a drawback that the range of the variable reactance value is narrow and cannot be controlled at high speed. Further, the varactor diode has a drawback that a variable reactance value range is narrow and cannot be used with high power. Thus, there is no variable reactance circuit that simultaneously satisfies the three points of high power, high speed control, and a wide range of reactance values.

  The present invention has been made to solve the above-described problems, and a variable reactance circuit according to the present invention is a circuit that simultaneously satisfies three points of high power, high-speed control, and a wide range of reactance values.

A first variable reactance circuit according to the present invention is a variable reactance circuit for controlling a reactance value over a wide range with respect to high frequency and large power,
A two-port harmonic reflection means having a sine wave input port, and switching means connected to the high frequency reflection means at two terminals on the opposite side of the sine wave input port,
The high-frequency reflection means includes an inductor and a capacitor,
The switching means includes a switch that switches at a frequency that is an integral multiple of the frequency of the sine wave input signal input to the sine wave input port.

The second variable reactance circuit according to the present invention is the first variable reactance circuit,
The switching unit includes a control unit that outputs a control signal of the switch, and by changing a phase difference between the control signal of the switch and the sine wave input signal controlled by the control unit, a sine wave It is characterized by changing the reactance value as viewed from the input side.

The third variable reactance circuit according to the present invention is the second variable reactance circuit,
The switching means includes a switch driving power supply, and the control unit controls a frequency of the switch driving power supply.

A fourth variable reactance circuit according to the present invention is any one of the first to third variable reactance circuits,
In the harmonic reflection means, at least one first capacitor is connected in series to an arbitrary one of two wires connected to the two ports, and at least one first inductor is connected to at least one first inductor. A set of LC wirings formed by one second capacitor is provided between a side of the wiring to which the first capacitor is connected and the side on which the switching means is arranged and the remaining wiring. Connected
The frequency of the switch by the switching means is one time as high as the frequency of the sine wave input signal.

A fifth variable reactance circuit according to the present invention is the fourth variable reactance circuit,
The harmonic reflection means further includes at least one second inductor directly connected to the sine wave input port side of the wiring to which the first capacitor is connected, the second inductor being connected to the sine wave input port. Third and fourth capacitors are connected between both sides of the second inductor and the other wiring, respectively.

A sixth variable reactance circuit according to the present invention is any one of the first to third variable reactance circuits,
The harmonic reflection means is configured to connect at least one inductor to any one of two wires connected to the two ports, and to connect at least one capacitor to two wires connected to the two ports. Connected between
The frequency of the switch by the switching means is twice the frequency of the sine wave input signal.

A seventh variable reactance circuit according to the present invention is any one of the first to third variable reactance circuits,
The harmonic reflection means is configured to connect at least one inductor to an arbitrary one of two wires connected to the two ports, and to connect a plurality of capacitors between the two wires connected to the two ports. Are connected in parallel to
The frequency of the switch by the switching means is twice the frequency of the sine wave input signal.

An eighth variable reactance circuit according to the present invention is any one of the first to third variable reactance circuits,
The harmonic reflection means includes a plurality of inductors connected in series to an arbitrary one of two wires connected to the two ports, and at least one capacitor connected to the two ports. Connected between
The frequency of the switch by the switching means is twice as high as the frequency of the sine wave input signal.

A ninth variable reactance circuit according to the present invention is any one of the first to third variable reactance circuits,
The harmonic reflection means includes a plurality of inductors connected in series to an arbitrary one of two wires connected to the two ports, and a plurality of capacitors connected to two wires connected to the two ports. Connected in parallel between
The frequency of the switch by the switching means is twice the frequency of the sine wave input signal.

A tenth variable reactance circuit according to the present invention is any one of the sixth to ninth variable reactance circuits,
A capacitor is connected in series or / and in parallel to a part or all of the inductor.

An eleventh variable reactance circuit according to the present invention is any one of the sixth to tenth variable reactance circuits,
An inductor is further connected in series to part or all of the capacitor.

A twelfth variable reactance circuit according to the present invention is any one of the sixth to eleventh variable reactance circuits,
The switch has a first terminal connected in series to at least one of the inductors, and a second terminal connected so that at least one of the capacitors is interposed between the switch and the second terminal. It is characterized by having been done.

  The variable reactance circuit according to the present invention is an element having high power durability and capable of high-speed switching, in which a sine wave input port, a two-port harmonic reflection circuit including an inductor and a capacitor, and a switch (for example, an FET) are cascaded. The switch can be turned ON / OFF at a frequency that is an integral multiple of the frequency of the sine wave input.

  Further, by controlling the phase difference between the sine wave input voltage and the switch control signal, the reactance value viewed from the sine wave input side can be controlled. When the phase difference between the sine wave input voltage and the control signal of the switch is controlled from 0 ° to 360 °, the variable reactance value can be in the entire range from −j∞Ω to j∞Ω.

Configuration diagram of the variable reactance circuit according to the present invention Principle explanatory diagram of the variable reactance circuit according to the present invention Operation waveform of the variable reactance circuit according to the present invention CLCL Variable reactance circuit composed of ladder type harmonic reflection circuit Simulation result of variable reactance circuit composed of CLCL ladder type harmonic reflection circuit A variable reactance circuit constituted by a CLCL ladder-type harmonic reflection circuit in which the value of the inductor of the harmonic reflection circuit of Example 1 is 0.5 times and the value of the capacitor is 2 times. Simulation results of a variable reactance circuit composed of a CLCL ladder-type harmonic reflection circuit in which the value of the inductor of the harmonic reflection circuit of Example 1 was 0.5 times and the value of the capacitor was 2 times. A CLCL ladder-type harmonic reflection circuit in which the frequency of the power supply is doubled, the switching frequency is doubled, the value of the inductor of the harmonic reflection circuit is 0.5 times, and the value of the capacitor is 0.5 times in the first embodiment. Variable reactance circuit A CLCL ladder-type harmonic reflection circuit in which the frequency of the power supply is doubled, the switching frequency is doubled, the value of the inductor of the harmonic reflection circuit is 0.5 times, and the value of the capacitor is 0.5 times in the first embodiment. Simulation results of a modified variable reactance circuit LCLC Variable reactance circuit composed of ladder type harmonic reflection circuit Simulation result of variable reactance circuit composed of LCLC ladder type harmonic reflection circuit LCLL Variable reactance circuit composed of ladder type harmonic reflection circuit Simulation result of variable reactance circuit composed of LCLL ladder type harmonic reflection circuit Variable reactance circuit composed of LCLL bridge T-type harmonic reflection circuit Simulation result of variable reactance circuit composed of LCLL bridge T-type harmonic reflection circuit Variable reactance circuit composed of LCLC bridge type harmonic reflection circuit Simulation results of variable reactance circuit composed of LCLC bridge type harmonic reflection circuit Variable reactance circuit composed of third-order short-circuit filter type harmonic reflection circuit Simulation result of variable reactance circuit composed of third-order short-circuit filter type harmonic reflection circuit Variable reactance circuit composed of 3rd order open filter type harmonic reflection circuit Simulation results of a variable reactance circuit composed of a third-order open filter type harmonic reflection circuit Variable reactance circuit composed of LCL-T type harmonic reflection circuit Simulation result of variable reactance circuit composed of LCL-T type harmonic reflection circuit Variable reactance circuit composed of CLC-π-type harmonic reflection circuit Simulation results of variable reactance circuit composed of CLC-π-type harmonic reflection circuit A basic circuit of a variable reactance circuit according to embodiment 21 in which the switching frequency and the power supply frequency are equal. Simulation result of the variable reactance circuit according to Example 21 in which the switching frequency and the power supply frequency were equal. A basic circuit of a variable reactance circuit constituted by a CLC-π-type harmonic reflection circuit according to embodiment 22 in which the switching frequency and the power supply frequency are equal. Simulation result of the variable reactance circuit constituted by the CLC-π-type harmonic reflection circuit according to Example 22 in which the switching frequency and the frequency of the power supply were equal.

  An embodiment for carrying out the present invention will be described below with reference to the drawings.

  FIG. 1 shows a configuration diagram of the variable reactance circuit according to the present invention. The configuration of the variable reactance circuit is a configuration in which a sine wave input port, a two-port harmonic reflection circuit, and a switch (for example, an FET) are cascaded. The harmonic reflection circuit is composed of an arbitrary number of inductors and capacitors.

FIG. 2 is a diagram illustrating the principle of the variable reactance circuit according to the present invention. Consider the case where the variable reactance circuit is connected to a high frequency power supply of the internal impedance Z _0.

The voltage outputted from the high frequency power source to V _S. V _S is the amplitude _{| V} S |, when a sine wave of frequency _{f 0} (period _{T 0 = 1 / f 0)} , when a is t _time, V _S = | V _S | and sin (2πf ₀ t) Become.

FIG. 3 shows operation waveforms of the variable reactance circuit according to the present invention. (A) of FIG. 3 is a waveform of _{V S.} FIG. 3B shows a waveform of the switch control voltage V _CON . The frequency of V _CON is 2f ₀ , and switching is performed at twice the frequency f ₀ of the power supply. That is, the relationship between the switching frequency f _SW and the power supply frequency f ₀ is f _SW = 2f ₀ . When V _CON is 0 (when the interval in the _{(b) T 0/4 ≦} t ≦ T 0/2 and _{3T 0/4 ≦ t ≦ T} 0 3), the switch is turned off. When the waveforms of V _S and V _CON have the relationship shown in FIG. 3A and FIG. 3B, the phase difference φ is defined as 0. FIG. 3C is a V _CON waveform obtained by advancing the waveform of FIG. 3B by the phase ψ. That is, when there is a relationship between FIG. 3A and FIG. 3C, the phase difference φ is φ = ψ.

  By continuously controlling the phase difference φ from 0 ° to 360 °, the reactance value of the variable reactance circuit can be controlled continuously.

In order to perform switching, the voltage and current applied to the switch include harmonics. Signal of the frequency f ₀ of the voltage outputted from the high frequency power supply for switching at twice the frequency (hereinafter, sometimes referred to the fundamental wave.), Even harmonics are not generated, occurs only odd harmonics I do.

  When the range of the variable reactance value is the entire range from −j∞Ω to j∞Ω, the reflection coefficient に お け る in the fundamental wave when the reactance is viewed from the power supply side is the magnitude of the reflection coefficient | Γ | | = 1, and the phase ∠Γ of the reflection coefficient is 0 ° ≦ ∠Γ ≦ 360 °. When the magnitude of the reflection coefficient | Γ | is | Γ | <1, the smaller the | Γ |, the greater the loss.

For a fundamental wave, harmonics become losses. The harmonic reflection circuit has a role of reflecting a harmonic component generated by the switch and returning the same to the switch in the entire range where the phase difference φ is 0 ° to 360 °. The harmonic reflection circuit eliminates the harmonic components that appear on the power supply side, and a variable reactance circuit that theoretically has no loss can be realized.

  FIG. 4 is an example of a variable reactance circuit using a harmonic reflection circuit composed of four elements. In the harmonic reflection circuit used in this variable reactance circuit, a capacitor C1 is connected in parallel with a switch-side port, an inductance L1 is connected to one end of the capacitor C1, and a terminal L1 on the side not connected to the switch is connected to L1. The capacitor C2 is connected between the terminals of the switch on the side not connected, the inductance L2 is connected to the terminal to which L1 and C2 are connected, and the terminal of L2 to which L1 and C2 are not connected is connected to L1. This is a circuit that uses the terminal of the switch that is not used as an input port. This harmonic reflection circuit is called a CLCL ladder-type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the CLCL ladder-type harmonic reflection circuit has L1 = 5.627 μH, L2 = 34 μH, C1 = 2.251 nF, and C2 = 8.5 nF. Set the value.

FIG. 5 shows f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 5.627 μH, L2 = 34 μH, C1 = 2.251 nF, C2 = 8.5 nF, internal impedance Z _{0 of} power supply = reference impedance = 50Ω, phase difference FIG. 9 is a diagram in which a reflection coefficient と き when φ is changed from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 5), | Γ | = 0.980 and ∠Γ = −89.8 °. When φ is 45 ° (point b in FIG. 5), | Γ | = 0.983 and ∠Γ = -44.9 °. When φ is 90 ° (point c in FIG. 5), | Γ | = 0.984 and ∠Γ = −0.1 °. When φ is 135 ° (point d in FIG. 5), | Γ | = 0.983 and ∠Γ = 44.7 °. When φ is 180 ° (point e in FIG. 5), | Γ | = 0.980 and ∠Γ = 89.7 °. When φ is 225 ° (point f in FIG. 5), | Γ | = 0.978 and ∠Γ = 134.8 °. When φ is 270 ° (point g in FIG. 5), | Γ | = 0.076 and ∠Γ = 180.0 °. When φ is 315 ° (point h in FIG. 5), | Γ | = 0.977 and ∠Γ = -134.8 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

  Assuming that an arbitrary positive real number is N, the harmonic reflection circuit can be realized even if the value of the inductor is N times and the value of the capacitor is 1 / N times. As a second embodiment, FIG. 6 shows a variable reactance circuit when the value of the inductor of the harmonic reflection circuit of the first embodiment is 0.5 times and the value of the capacitor is 2 times.

FIG. 7 shows f ₀ = 1 MHz, f _SW = 2 MHz, L 1 = 2.8135 μH, L 2 = 17 μH, C 1 = 4.502 nF, C 2 = 17 nF, the internal impedance of the power supply Z ₀ = reference impedance = 50Ω, and the phase difference φ. FIG. 11 is a diagram in which a reflection coefficient の when changing from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 7), | Γ | = 0.967 and ∠Γ = −90.4 °. When φ is 45 ° (point b in FIG. 7), | Γ | = 0.963 and ∠Γ = −45.0 °. When φ is 90 ° (point c in FIG. 7), | Γ | = 0.966 and ∠Γ = −0.3 °. When φ is 135 ° (point d in FIG. 7), | Γ | = 0.971 and ∠Γ = 45.5 °. When φ is 180 ° (point e in FIG. 7), | Γ | = 0.977 and ∠Γ = 90.3 °. When φ is 225 ° (point f in FIG. 7), | Γ | = 0.980 and ∠Γ = 135.1 °. When φ is 270 ° (point g in FIG. 7), | Γ | = 0.986 and ∠Γ = 178.3 °. When φ is 315 ° (point h in FIG. 7), | Γ | = 0.973 and ∠Γ = −135.5 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

Assuming that an arbitrary positive real number is M, when the power supply frequency is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , the harmonic reflection circuit is 1 / M times the value of the inductor and 1 / M the value of the capacitor. It also holds as double. As a third embodiment, FIG. 8 shows a variable reactance circuit when the frequency of the power supply of the first embodiment is f ₀ = 2 MHz.

FIG. 9 shows f ₀ = 2 MHz, f _SW = 4 MHz, L1 = 5.627 μH, L2 = 34 μH, C1 = 2.251 nF, C2 = 8.5 nF, power supply internal impedance Z ₀ = reference impedance = 50Ω, phase difference FIG. 9 is a diagram in which a reflection coefficient と き when φ is changed from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 9), | Γ | = 0.981 and ∠Γ = −89.8 °. When φ is 45 ° (point b in FIG. 9), | Γ | = 0.983 and ∠Γ = -44.8 °. When φ is 90 ° (point c in FIG. 9), | Γ | = 0.984 and ∠Γ = −0.0 °. When φ is 135 ° (point d in FIG. 9), | Γ | = 0.983 and ∠Γ = 44.9 °. When φ is 180 ° (point e in FIG. 9), | Γ | = 0.981 and ∠Γ = 89.8 °. When φ is 225 ° (point f in FIG. 9), | Γ | = 0.977 and ∠Γ = 134.8 °. When φ is 270 ° (point g in FIG. 9), | Γ | = 0.975 and ∠Γ = 180.0 °. When φ is 315 ° (point h in FIG. 9), | Γ | = 0.076 and ∠Γ = -134.9 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

To summarize the second and third embodiments, assuming that any positive real numbers are N and M, when the power supply frequency is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , and the harmonic reflection circuit is the inductor value. Is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 10 is an example of a variable reactance circuit using a harmonic reflection circuit composed of four elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L1 connected in series with a switch-side port, and a terminal L1 on the side where the switch is not connected and a terminal of the switch on the side not connected to L1. A capacitor C1 is connected between the terminals, an inductance L2 is connected to a terminal to which C1 and L1 are connected, and a terminal of L2 which is not connected to C1 and L1 is connected to a terminal of a switch which is not connected to L1. This is a circuit in which a capacitor C2 is connected in parallel, and both ends of C2 are input ports. This harmonic reflection circuit is called an LCLC ladder-type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the LCLC ladder-type harmonic reflection circuit sets values such that L1 = 5.627 μH, L2 = 22 μH, C1 = 2.251 nF, and C2 = 7 nF. Set.

FIG. 11 shows that f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 5.627 μH, L2 = 22 μH, C1 = 2.251 nF, C2 = 7 nF, internal impedance Z ₀ = reference impedance = 50Ω, and phase difference φ is 0 °. FIG. 11 is a diagram obtained by simulating a reflection coefficient 変 化 when changed from 45 ° to 360 ° in steps of 45 °, and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 11), | Γ | = 0.940 and ∠Γ = -90.0 °. When φ is 45 ° (point b in FIG. 11), | Γ | = 0.948 and ∠Γ = -43.8 °. When φ is 90 ° (point c in FIG. 11), | Γ | = 0.969 and ∠Γ = 1.8 °. When φ is 135 ° (point d in FIG. 11), | Γ | = 0.990 and ∠Γ = 46.3 °. When φ is 180 ° (point e in FIG. 11), | Γ | = 0.999 and ∠Γ = 90.0 °. When φ is 225 ° (point f in FIG. 11), | Γ | = 0.991 and ∠Γ = 133.8 °. When φ is 270 ° (point g in FIG. 11), | Γ | = 0.971 and ∠Γ = 178.3 °. When φ is 315 ° (point h in FIG. 11), | Γ | = 0.949 and ∠Γ = -136.3 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth embodiment, also in the circuit of the fifth embodiment, assuming that any positive real numbers are N and M, when the frequency of the power supply is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , and the harmonic reflection circuit is provided. Holds when the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 12 is an example of a variable reactance circuit using a harmonic reflection circuit composed of four elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L1 connected in series with a switch-side port, and is connected between a terminal L1 on a side where no switch is connected and a terminal of a switch not connected with L1. Is connected to a terminal connected to C1 and L1, an inductance L2 is connected in series, and a terminal of L2 on the side where C1 and L1 are not connected is connected to a terminal of a switch not connected to L1. This is a circuit in which an inductor L3 is connected in parallel, and both ends of L3 are input ports. This harmonic reflection circuit is called an LCLL ladder-type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the LCLL ladder-type harmonic reflection circuit has L1 = 7.96 μH, L2 = 9.2 μH, L3 = 0.73 μH, and C1 = 3.18 nF. Set the value as follows.

FIG. 13 shows that f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 7.96 μH, L2 = 9.2 μH, L3 = 0.73 μH, C1 = 3.18 nF, the internal impedance of the power supply Z ₀ = reference impedance = 50Ω, FIG. 9 is a diagram in which a reflection coefficient と き when a phase difference φ is changed from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 13), | Γ | = 0.988 and ∠Γ = -90.1 °. When φ is 45 ° (point b in FIG. 13), | Γ | = 0.986 and ∠Γ = −45.2 °. When φ is 90 ° (point c in FIG. 13), | Γ | = 0.984 and ∠Γ = 0.2 °. When φ is 135 ° (point d in FIG. 13), | Γ | = 0.81 and ∠Γ = 44.9 °. When φ is 180 ° (point e in FIG. 13), | Γ | = 0.980 and ∠Γ = 90.1 °. When φ is 225 ° (point f in FIG. 13), | Γ | = 0.982 and ∠Γ = 135.2 °. When φ is 270 ° (point g in FIG. 13), | Γ | = 0.885 and ∠Γ = -179.8 °. When φ is 315 ° (point h in FIG. 13), | Γ | = 0.987 and ∠Γ = −134.9 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in Embodiments 4 and 6, in the circuit of Embodiment 7, assuming that arbitrary positive real numbers are N and M, when the frequency of the power supply is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , and the harmonics are The reflection circuit also holds when the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 14 is an example of a variable reactance circuit using a harmonic reflection circuit composed of four elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L1 connected in series to a switch-side port, and is connected between a terminal L1 on the side where the switch is not connected and a terminal of the switch not connected with L1. , A capacitor C1 is connected, and an inductance L2 is connected in series to a terminal to which C1 and L1 are connected, and a terminal of L2 which is not connected to C1 and L1 is connected to a terminal of a switch connecting L1. This is a circuit in which an inductor L3 is connected therebetween, and a terminal connecting L2 and L3 and a terminal connecting C1 and a switch are input ports. This harmonic reflection circuit is called an LCLL bridge T-type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the LCLL ladder-type harmonic reflection circuit sets values such that L1 = 0.69 μH, L2 = 30 μH, L3 = 30 μH, and C1 = 10.2 nF. Set.

FIG. 15 shows f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 0.69 μH, L2 = 30 μH, L3 = 30 μH, C1 = 10.2 nF, internal impedance Z _{0 of} power supply = reference impedance = 50Ω, and phase difference φ FIG. 11 is a diagram in which a reflection coefficient の when changing from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 15), | Γ | = 0.981 and ∠Γ = −91.1 °. When φ is 45 ° (point b in FIG. 15), | Γ | = 0.968 and ∠Γ = -45.9 °. When φ is 90 ° (point c in FIG. 15), | Γ | = 0.961 and ∠Γ = −0.2 °. When φ is 135 ° (point d in FIG. 15), | Γ | = 0.964 and ∠Γ = 45.6 °. When φ is 180 ° (point e in FIG. 15), | Γ | = 0.975 and ∠Γ = 91.0 °. When φ is 225 ° (point f in FIG. 15), | Γ | = 0.988 and ∠Γ = 135.8 °. When φ is 270 ° (point g in FIG. 15), | Γ | = 0.996 and ∠Γ = −180.0 °. When φ is 315 ° (point h in FIG. 15), | Γ | = 0.993 and ∠Γ = −135.6 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, and eighth embodiments, in the circuit of the ninth embodiment, assuming that any positive real numbers are N and M, when the frequency of the power supply is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , The harmonic reflection circuit also holds when the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 16 is an example of a variable reactance circuit using a harmonic reflection circuit composed of four elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L1 and a capacitor C1 connected to one terminal of a switch-side port, an inductance L2 and a capacitor C2 connected to the other terminal of the switch, and L1 and L2 Are connected to terminals that are not connected to switches C1 and C2, terminals that are not connected to switches C1 and C2 are connected to each other, and a connection point between L1 and L2 and a connection point between C1 and C2 are input ports. . This harmonic reflection circuit is called an LCLC bridge type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the LCLL ladder-type harmonic reflection circuit sets values such that L1 = 600 μH, L2 = 745 μH, C1 = 0.1 nF, and C2 = 11.7 pF. Set.

FIG. 17 shows that f ₀ = 1 MHz, f _SW = 2 MHz, L 1 = 600 μH, L 2 = 745 μH, C 1 = 0.1 nF, C 2 = 11.7 pF, the internal impedance of the power supply Z ₀ = reference impedance = 50Ω, and the phase difference φ FIG. 11 is a diagram in which a reflection coefficient の when changing from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 17), | Γ | = 0.975 and ∠Γ = -90.3 °. When φ is 45 ° (point b in FIG. 17), | Γ | = 0.974 and ∠Γ = -45.1 °. When φ is 90 ° (point c in FIG. 17), | Γ | = 0.974 and ∠Γ = 0.2 °. When φ is 135 ° (point d in FIG. 17), | Γ | = 0.978 and ∠Γ = 45.4 °. When φ is 180 ° (point e in FIG. 17), | Γ | = 0.983 and ∠Γ = 90.3 °. When φ is 225 ° (point f in FIG. 17), | Γ | = 0.885 and ∠Γ = 135.4 °. When φ is 270 ° (point g in FIG. 17), | Γ | = 0.885 and ∠Γ = 179.8 °. When φ is 315 ° (point h in FIG. 17), | Γ | = 0.980 and ∠Γ = -135.4 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, eighth, and tenth embodiments, in the circuit of the eleventh embodiment, assuming that any positive real numbers are N and M, the switching frequency is f _SW = 2Mf when the frequency of the power supply is Mf _{0. 0} , the harmonic reflection circuit also holds when the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  The variable reactance circuits shown in the first to twelfth embodiments use a harmonic reflection circuit in which the number of elements is limited to four. However, if the number of elements is not limited to four, a harmonic reflection circuit is used. There are other circuits to gain.

  FIG. 18 is an example of a variable reactance circuit using a harmonic reflection circuit composed of five elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L2 connected to a series connection of an inductance L1 and a capacitor C1 in parallel with a switch-side port, and an inductance L3 connected to one terminal of the switch. This is a circuit in which C2 is connected between the terminal of L3 on the side not connected and the terminal of the switch on the side not connected to L3, and two connection points of C2 are used as input ports. This harmonic reflection circuit is called a third-order short-circuit filter type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the third-order short-circuit filter type harmonic reflection circuit has L1 = 2.653 μH, L2 = 21.22 μH, L3 = 0.3 μH, and C1 = 1.061 nF. , C2 = 41 nF.

FIG. 19 shows f ₀ = 1 MHz, f _SW = 2 MHz, L 1 = 2.653 μH, L 2 = 21.22 μH, L 3 = 0.3 μH, C 1 = 1.061 nF, C 2 = 41 nF, and the internal impedance of the power supply Z ₀ = reference FIG. 11 is a diagram in which a reflection coefficient と き when impedance is 50Ω and a phase difference φ is changed from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 19), | Γ | = 0.975 and ∠Γ = −89.2 °. When φ is 45 ° (point b in FIG. 19), | Γ | = 0.977 and ∠Γ = -44.3 °. When φ is 90 ° (point c in FIG. 19), | Γ | = 0.986 and ∠Γ = 0.2 °. When φ is 135 ° (point d in FIG. 19), | Γ | = 0.980 and ∠Γ = 44.5 °. When φ is 180 ° (point e in FIG. 19), | Γ | = 0.076 and ∠Γ = 89.5 °. When φ is 225 ° (point f in FIG. 19), | Γ | = 0.969 and ∠Γ = 134.5 °. When φ is 270 ° (point g in FIG. 19), | Γ | = 0.965 and ∠Γ = 180.0 °. When φ is 315 ° (point h in FIG. 19), | Γ | = 0.967 and ∠Γ = −134.6 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, eighth, tenth, and twelfth embodiments, in the circuit of the thirteenth embodiment, assuming that any positive real numbers are N and M, the switching frequency is f _SW when the frequency of the power supply is Mf _0. = 2Mf ₀ , and the harmonic reflection circuit also holds when the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 20 shows an example of a variable reactance circuit using a harmonic reflection circuit composed of five elements. In the harmonic reflection circuit used in this variable reactance circuit, a circuit in which an inductance L1 and a capacitor C1 are connected in parallel with a switch-side port is connected, a capacitor C2 is connected in series, and L1 and C1 are connected. C3 is connected between the terminal of C2 on the non-existing side and the terminal of the switch on the side where L1 and C1 are not connected, L2 is connected to the connection point between C2 and C3, and the side where C2 and C3 are not connected This circuit uses the terminal of L2 and the terminal of the switch on the side where L1 and C1 are not connected as input ports. This harmonic reflection circuit is called a third-order open filter type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the third-order short-circuit filter type harmonic reflection circuit has L1 = 2.653 μH, L2 = 84 μH, C1 = 1.061 nF, C2 = 8.487 nF, and C3. The value is set so that = 0.15 nF.

FIG. 21 shows f ₀ = 1 MHz, f _SW = 2 MHz, L 1 = 2.653 μH, L 2 = 84 μH, C 1 = 1.061 nF, C 2 = 8.487 nF, C 3 = 0.15 nF, and the internal impedance of the power supply Z ₀ = reference FIG. 11 is a diagram in which a reflection coefficient と き when impedance is 50Ω and a phase difference φ is changed from 0 ° to 360 ° in steps of 45 ° is obtained by simulation and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 21), | Γ | = 0.974 and ∠Γ = -91.2 °. When φ is 45 ° (point b in FIG. 21), | Γ | = 0.960 and ∠Γ = -45.7 °. When φ is 90 ° (point c in FIG. 21), | Γ | = 0.956 and ∠Γ = 0.1 °. When φ is 135 ° (point d in FIG. 21), | Γ | = 0.963 and ∠Γ = 45.9 °. When φ is 180 ° (point e in FIG. 21), | Γ | = 0.076 and ∠Γ = 91.1 °. When φ is 225 ° (point f in FIG. 21), | Γ | = 0.990 and ∠Γ = 135.9 °. When φ is 270 ° (point g in FIG. 21), | Γ | = 0.994 and ∠Γ = 179.9 °. When φ is 315 ° (point h in FIG. 21), | Γ | = 0.987 and ∠Γ = −135.9 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, eighth, tenth, twelfth, and twelfth embodiments, in the circuit of the fifteenth embodiment, assuming that any positive real numbers are N and M, when the frequency of the power supply is Mf ₀ , the switching frequency is f _SW = 2Mf ₀ , and the harmonic reflection circuit can be realized even if the value of the inductor is N / M times and the value of the capacitor is 1 / (NM) times.

  FIG. 22 is an example of a variable reactance circuit using a harmonic reflection circuit composed of three elements. The harmonic reflection circuit used in this variable reactance circuit has an inductance L1 connected in series with a switch-side port, and a terminal L1 on the side where the switch is not connected and a terminal of the switch on the side not connected to L1. A capacitor C1 is connected between the terminals, an inductance L2 is connected to a terminal to which C1 and L1 are connected, and a terminal of L2 which is not connected to C1 and L1, and a terminal to which a switch and C1 are connected. This is a circuit that serves as an input port. This harmonic reflection circuit is called an LCL-T type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the LCL-T type harmonic reflection circuit sets the values so that L1 = 10.54 μH, L2 = 74.20 μH, and C1 = 894.2 pF. I do.

FIG. 23 shows that f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 10.54 μH, L2 = 74.20 μH, C1 = 894.2 pF, the internal impedance Z _{0 of the} power supply = reference impedance = 50Ω, and the phase difference φ is 0 °. FIG. 11 is a diagram obtained by simulating a reflection coefficient 変 化 when changed from 45 ° to 360 ° in steps of 45 °, and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 23), | Γ | = 0.885 and ∠Γ = -90.2 °. When φ is 45 ° (point b in FIG. 23), | Γ | = 0.981 and ∠Γ = −45.2 °. When φ is 90 ° (point c in FIG. 23), | Γ | = 0.980 and ∠Γ = 0.1 °. When φ is 135 ° (point d in FIG. 23), | Γ | = 0.980 and ∠Γ = 45.1 °. When φ is 180 ° (point e in FIG. 23), | Γ | = 0.983 and ∠Γ = 90.2 °. When φ is 225 ° (point f in FIG. 23), | Γ | = 0.986 and ∠Γ = 135.2 °. When φ is 270 ° (point g in FIG. 23), | Γ | = 0.988 and ∠Γ = −180.0 °. When φ is 315 ° (point h in FIG. 23), | Γ | = 0.987 and ∠Γ = −135.1 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, eighth, tenth, twelfth, twelfth, and sixteenth embodiments, in the circuit of the seventeenth embodiment, when arbitrary positive real numbers are N and M, when the frequency of the power supply is Mf ₀ , the switching is performed. The frequency is f _SW = 2Mf ₀ , and the harmonic reflection circuit can be realized by setting the value of the inductor to N / M times and the value of the capacitor to 1 / (NM) times.

  FIG. 24 shows an example of a variable reactance circuit using a harmonic reflection circuit composed of three elements. In the harmonic reflection circuit used in this variable reactance circuit, a capacitor C1 is connected in parallel with a switch-side port, an inductance L1 is connected to one end of the capacitor C1, and a terminal L1 on the side not connected to the switch is connected to L1. This is a circuit in which a capacitor C2 is connected between the terminal of the switch on the other side, and both ends of C2 as input ports. This harmonic reflection circuit is called a CLC-π type harmonic reflection circuit.

When the power supply frequency f ₀ is a signal of f ₀ = 1 MHz, the CLC-π-type harmonic reflection circuit sets values such that L1 = 12.25 μH, C1 = 601.7 pF, and C2 = 12.80 nF. I do.

FIG. 25 shows that f ₀ = 1 MHz, f _SW = 2 MHz, L1 = 12.25 μH, C1 = 601.7 pF, C2 = 12.80 nF, the internal impedance Z _{0 of the} power supply = reference impedance = 50Ω, and the phase difference φ is 0 °. FIG. 11 is a diagram obtained by simulating a reflection coefficient 変 化 when changed from 45 ° to 360 ° in steps of 45 °, and plotted on a Smith chart.

  When φ is 0 ° (point a in FIG. 25), | Γ | = 0.967 and ∠Γ = −89.4 °. When φ is 45 ° (point b in FIG. 25), | Γ | = 0.975 and ∠Γ = -44.4 °. When φ is 90 ° (point c in FIG. 25), | Γ | = 0.982 and ∠Γ = 0.3 °. When φ is 135 ° (point d in FIG. 25), | Γ | = 0.984 and ∠Γ = 44.8 °. When φ is 180 ° (point e in FIG. 25), | Γ | = 0.978 and ∠Γ = 89.4 °. When φ is 225 ° (point f in FIG. 25), | Γ | = 0.970 and ∠Γ = 134.4 °. When φ is 270 ° (point g in FIG. 25), | Γ | = 0.963 and ∠Γ = 179.7 °. When φ is 315 ° (point h in FIG. 25), | Γ | = 0.961 and ∠Γ = −134.8 °.

  The magnitude of the reflection coefficient is | Γ | ≒ 1 at any φ, and the phase of the reflection coefficient is ∠Γ ≒ (φ−90 °), and the variable reactance value ranges from -j∞Ω to j∞Ω. This shows that the variable reactance circuit is a range.

As in the fourth, sixth, eighth, tenth, twelfth, twelfth, twelfth, twelfth, and thirteenth embodiments, assuming that any positive real numbers are N and M, the frequency of the power supply is Mf ₀ , The switching frequency is f _SW = 2Mf ₀ , and the harmonic reflection circuit can be realized by setting the value of the inductor to N / M times and the value of the capacitor to 1 / (NM) times.

  As described above, the basic principle of the variable reactance circuit according to the present invention is that switching is performed at twice the frequency (fundamental wave) of a signal input from a power supply. Switching may be performed at the same frequency (1 time) as the fundamental wave. An example is described below.

FIG. 26 is a circuit diagram of a basic circuit of the variable reactance circuit according to the present example. A switch in which L1 and C1 are connected in series is connected in parallel to the switch, and C2 is connected in series between the switch and the power supply.
The basic circuit performs switching at the same frequency as the fundamental wave. By controlling the phase difference between the input signal and the switching from 0 to π, the phase of the reflection coefficient viewed from the power supply side can be controlled from 0 to 2π.
The simulation of the basic circuit was performed using ADS. The element value was optimized by optimization, and two Goals were provided. One is "increase the radius of the circle of the locus drawn by the reflection coefficient", and the other is "the center of the circle of the locus drawn by the reflection coefficient is at the center of the circle of the Smith chart". As a result of optimization with the two Goals, L1 = 3.05 μH, C1 = 2.25 nF, and C2 = 7.24 μF.
FIG. 27 shows the locus of the reflection coefficient when the phase difference is changed from 0 to π in steps of π / 8. When the phase difference is 0, the phase of the reflection coefficient becomes π, and it can be seen that a circle is drawn counterclockwise. The average of the magnitude of the reflection coefficient was 0.71, and the efficiency was 50%.

FIG. 28 shows a configuration in which a CLC-π type harmonic reflection circuit is added to the basic circuit described in Example 21.
Further, a simulation of the basic circuit according to Example 21 to which a CLC-π type harmonic reflection circuit was added was performed using ADS. The element value was optimized by optimization, and Goal was set to "increase the radius of the circle of the locus drawn by the reflection coefficient". As a result of optimization with Goal, L1 = 20.9 μH, L2 = 25.3 μH, C1 = 527 pF, C2 = 15.4 μF, C3 = 44.9 pF, and C4 = 4.13 nF.
FIG. 29 shows the locus of the reflection coefficient when the phase difference is changed from 0 to π in increments of π / 8. When the phase difference is 0, the phase of the reflection coefficient becomes π, and it can be seen that a circle is drawn counterclockwise. The average of the magnitude of the reflection coefficient was 0.98, and the efficiency was 96%.

Claims (12)

A variable reactance circuit for controlling a reactance value over a wide range for high frequency and large power,
Harmonics reflecting means 2 port for a sinusoidal input port, and a switching means connected in the two terminals in the harmonic reflecting means on the opposite side of the sine wave input port,
The harmonic reflecting means, wherein the two arbitrary one of the wires connected to two ports, the first and second inductors are connected in series, the wiring these two inductors are connected First and second capacitors are connected between the inductor and a side on which the switching means is arranged and the remaining wirings,
The first inductor is 5.627 μH, the second inductor is 34 μH, the first capacitor is 2.251 nF, the second capacitor is 8.5 nF,
It said switching means, with respect to the frequency of the sine wave input signal input to the sinusoidal input port, variable reactance circuit, characterized in that comprises a switch which is switched at twice the frequency. The harmonic reflection means removes the second capacitor,
The variable reactance circuit according to claim 1, wherein the first inductor is 10.54 µH, the second inductor is 74.20 µH, and the first capacitor is 894.2 pF . A variable reactance circuit for controlling a reactance value over a wide range for high frequency and large power,
A two-port harmonic reflection means having a sine wave input port, and switching means connected to the harmonic reflection means at two terminals on the opposite side of the sine wave input port,
The harmonic reflection means includes a first and a second inductor connected in series to an arbitrary one of two wires connected to the two ports, and a second wire connected to the two inductors. First and second capacitors are connected between the sine wave input port side of the inductor and the remaining wiring,
The first inductor is 5.627 μH, the second inductor is 22 μH, the first capacitor is 2.251 nF, the second capacitor is 7 nF,
The switching means includes a switch that is switched at twice the frequency of the sine wave input signal input to the sine wave input port.
And a variable reactance circuit. The harmonic reflection means is connected to a third inductor instead of the second capacitor,
4. The variable reactance circuit according to claim 3 , wherein the first inductor is 7.96 μH, the second inductor is 9.2 μH, the third inductor is 0.73 μH, and the first capacitor is 3.18 nF . The harmonic reflection means removes the second capacitor, and a third inductor is connected in parallel to the first and second inductors.
4. The variable reactance circuit according to claim 3 , wherein the first inductor is 0.69 μH, the second inductor is 30 μH, the third inductor is 30 μH, and the first capacitor is 10.2 nF . The harmonic reflection means removes the second inductor,
The variable reactance circuit according to claim 3, wherein the first inductor is 12.25 µH, the first capacitor is 601.7 pF, and the second capacitor is 12.80 nF . A variable reactance circuit for controlling a reactance value over a wide range for high frequency and large power,
A two-port harmonic reflection means having a sine wave input port, and switching means connected to the harmonic reflection means at two terminals on the opposite side of the sine wave input port,
The harmonic reflection means includes: a first LC circuit in which a first inductor and a first capacitor are connected in series; a second LC circuit in which a second inductor and a second capacitor are connected in series; Are connected in parallel, are connected between the two ports, one of the two terminals of the switching means is connected between the first inductor and the first capacitor, and the other terminal is the second terminal. Is connected between the inductor and the second capacitor,
The first inductor is 600 μH, the second inductor is 745 μH, the first capacitor is 0.1 nF, the second capacitor is 11.7 pF,
The switching means includes a switch that is switched at twice the frequency of the sine wave input signal input to the sine wave input port.
And a variable reactance circuit. A variable reactance circuit for controlling a reactance value over a wide range for high frequency and large power,
A two-port harmonic reflection means having a sine wave input port, and switching means connected to the harmonic reflection means at two terminals on the opposite side of the sine wave input port,
The harmonic reflection means is configured such that a first inductor and a first capacitor are connected in series to an arbitrary one of two wires connected to the two ports, and a second inductor is provided between the first inductor and the first capacitor. A third LC circuit in which an inductance and a second capacitor are connected in parallel is connected in series, and a third capacitor is provided between the middle of the first inductor and the third LC circuit and the remaining wiring. Connected
The first inductor is 84 μH, the second inductor is 2.653 μH, the first capacitor is 1.061 nF, the second capacitor is 8.487 nF, the third capacitor is 0.15 nF,
The switching means includes a switch that is switched at twice the frequency of the sine wave input signal input to the sine wave input port.
And a variable reactance circuit. A variable reactance circuit for controlling a reactance value over a wide range for high frequency and large power,
A two-port harmonic reflection means having a sine wave input port, and switching means connected to the harmonic reflection means at two terminals on the opposite side of the sine wave input port,
The harmonic reflection means connects a fourth LC circuit formed by connecting a first inductance and a first capacitor in series between two wires connected to the two ports, and A second capacitor is connected in series to the opposite side of the switching means from the connection point of the wiring to which the inductor is connected,
The first inductor is 3.05 μH, the first capacitor is 2.25 nF, the second capacitor is 7.24 nF,
The switching means includes a switch that is switched at a frequency that is one time higher than the frequency of the sine wave input signal input to the sine wave input port.
And a variable reactance circuit. The harmonic reflection means further connects a second inductor in series on the opposite side of the switching means with respect to the second capacitor, and a third and a third connection between both sides of the inductor and another wiring. 4 capacitors,
The first inductor is 20.9 μH, the second inductor is 25.3 μH, the first capacitor is 527 pF, the second capacitor is 15.4 nF, the third capacitor is 44.9 pF, and the fourth capacitor is 4. The variable reactance circuit according to claim 9 , which is 13 nF . The harmonic reflection means removes the second capacitor and connects a third inductor in place of the third capacitor,
The first inductor is 2.653 μH, the second inductor is 0.3 μH, the third inductor is 21.22 μH, the first capacitor is 1.061 nF, the fourth capacitor is 41 nF,
11. The variable reactance circuit according to claim 10 , wherein the switching means includes a switch that is switched at a frequency twice as high as the frequency of the sine wave input signal input to the sine wave input port . When the value of each inductor and each capacitor is N times the value of all inductors, the value of all capacitors is 1 / N times (N is a positive real number). When the frequency of the input sine wave input signal is M times, the switching frequency by the switch is M times (M is a positive real number), and the value of each inductor and each capacitor is The variable reactance circuit according to any one of claims 1 to 10, wherein values of all capacitors are 1 / M times (M is a positive real number) .

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