JP6645654B2 - Metal foil sheet processing equipment and processing method - Google Patents

Description

  The present invention relates to a metal foil sheet processing apparatus and method for correcting distortion of a metal foil sheet.

  Conventionally, the present invention relates to a metal foil sheet mainly used for a current collector for a secondary battery, and manufactures a metal foil sheet having a continuous etching pattern in which through holes of a predetermined shape are regularly arranged at regular intervals and have a seamless etching pattern. Method (for example, Patent Document 1), or unwinding a long metal foil wound in a coil shape, sandwiching the long metal foil between a forming roll and a receiving roll, and forming a large number of fine through holes in the metal foil. Then, there is a roll forming method of a porous metal foil in which the long metal foil after the fine through-hole formation is wound again into a coil shape (for example, Patent Document 2).

  In the above manufacturing method and forming method, no consideration has been given to the correction of the distortion generated in the sheet after forming the through hole.

  On the other hand, there are devices (for example, Patent Document 3 and Patent Document 4) for correcting a thin metal plate with a roller leveler or a tension leveler.

JP 2013-163866 A JP 2014-100784 A JP 2001-259736 A JP-A-2002-144051

  The above-mentioned roller leveler is a process for straightening a metal sheet by equalizing internal strain by continuously applying bending deformation by alternate rollers engaged with the strain remaining on the metal sheet, and correcting the metal sheet and the roller. There is a problem that it is difficult to apply to a metal foil or the like, such as a problem that the friction between the surface and the surface becomes large, the friction hinders the correction, and the pressing pressure decreases due to insufficient rigidity of the small-diameter roller.

  That is, when the diameter of the roller is reduced in accordance with the thickness of the metal foil, the amount of engagement in the width direction of the work due to the deflection of the roller becomes non-uniform, and the stability of work feeding is deteriorated due to an increase in rotational resistance.

  More specifically, in a roller leveler, the roller is determined according to the thickness of the thin metal sheet, and although it is not publicly known, a thinner metal foil requires a smaller roller. However, reducing the diameter of the rollers increases the frictional resistance of the feed and at the same time reduces the rigidity of the rollers, and requires measures such as supporting backup rollers, which complicates the mechanism and reduces the variation in rotational resistance between the rollers. There are problems such as becoming apparent.

Therefore, the present invention provides a processing apparatus and a processing method for a metal foil sheet capable of reducing a frictional force applied to the metal foil sheet and removing distortion of the metal foil sheet in a process of repairing distortion caused by formation of a through hole. The purpose is to.

In order to achieve the above object, the invention according to claim 1 is a processing apparatus for a metal foil sheet provided with a plurality of through holes, wherein the through hole forming apparatus for forming the through hole in the metal foil sheet; A distortion correcting device that corrects the distortion of the metal foil sheet provided with the plurality of through holes by a hole forming device, and a transport unit that transports the metal foil sheet along a transport path of the distortion correcting device, distortion correction device comprises a first side fixes body provided with grooves between the protrusions plurality of protrusions with rather place the spacing in the conveying direction of the conveying path provided in the conveying path, a plurality of the conveying path and the other side fixes body provided with grooves between the protrusions with a protrusion spaced in the conveying direction of the conveying path is disposed across the conveying path, the projecting portion of the one side and the other side fixes body the double of the tip is formed in a curved shape, the one side fixes body A position between the protrusions, as well as placing the protrusions of the other side fixes body, the position of the tip of the protrusion of the one side and the other side fixes body superimposed in the cross direction of the conveying path, The tips of the protrusions of the other-side correction body are arranged in a plurality of grooves of the one-side correction body in a non-contact state with the protrusions of the one-side correction body, and at least one of the one-side and the other-side correction body And an ultrasonic generator that applies ultrasonic vibration to the plurality of protrusions on at least one of the one-side and other-side correction bodies .

The invention according to claim 2 is characterized in that a tension applying means for applying tension to the metal foil sheet in a transport path of the distortion correcting device is provided.

The invention according to claim 3 is a method of processing a metal foil sheet provided with a plurality of through holes, a through hole forming step of forming the through holes in the metal foil sheet, and a metal foil formed with the plurality of through holes. A distortion correcting step of correcting the distortion of the metal foil sheet by a distortion correcting device while the sheet is being transported along the transport path, wherein the distortion correcting apparatus includes a plurality of protrusions provided on the transport path side of the transport path. and one side fixes body a groove provided between the projections with location rather apart in the conveying direction, between the projections with spaced apart a plurality of protrusions in the conveying direction of the conveying path in the conveying path The other-side correction body provided with the groove portion is disposed with the conveyance path interposed therebetween, and the tip of the protrusion of the one-side and the other-side correction body is formed in a curved shape, and the plurality of protrusions of the one-side correction body are formed. The projection of the other-side correction body is arranged at a position between The position of the tip of the protrusion on one side and the other side fixes body superimposed in the cross direction of the conveying path, the tip of the protrusion of the other side fixes body into a plurality of groove portions of the one side fixes body the one It is arranged in a non-contact state with the projecting portion of the side modified body, the metal foil sheet the one side and said to impart ultrasonic vibration to at least one of the other side fixes body one side and the other side fixes body during transportation of the Ultrasonic vibration is applied to at least one of the plurality of protrusions .

According to the configuration of the first aspect , the through hole is formed, and at that time, the metal foil sheet is distorted. By passing the distorted metal foil sheet between the tips of the protrusions of the one side and the other side correction body where the positions are overlapped, the metal foil sheet is repeatedly bent and deformed, and the internal distortion of the metal foil sheet is caused. Can be made uniform. At this time, by applying ultrasonic vibration to at least one of the protrusions, an effect of reducing friction between the metal foil sheet and the tip of the protrusion can be obtained.

According to the configuration of the first aspect , the friction between the metal foil sheet and the protrusion can be reduced.

According to the configuration of the first aspect , by providing the plurality of protrusions, the metal foil sheet can be repeatedly and efficiently bent.

According to the configuration of claim 2, the metal foil sheet can be corrected by applying tension.

According to the configuration of claim 3 , the metal foil sheet can be repeatedly bent and deformed, and the internal strain of the metal foil sheet can be made uniform. At this time, by applying ultrasonic vibration to at least one of the protrusions, In addition, an effect of reducing friction between the metal foil sheet and the tip of the protrusion can be obtained.

FIG. 1 is an overall schematic explanatory view showing a first embodiment of the present invention. It is a perspective view of a distortion repair apparatus same as the above. FIG. 3 is an explanatory perspective view of the processing device in which the repair body is enlarged. It is sectional drawing of a protrusion same as the above. It is explanatory drawing of another tip part same as the above. FIG. 6A is a plan view of the metal foil sheet, and FIG. 6A shows a state before the distortion correcting step, and FIG. 6B shows a state after the distortion correcting step. FIG. 7A is a plan view of the metal foil sheet, and FIG. 7A shows a state before the distortion correcting step, and FIG. 7B shows a state after the distortion correcting step using another tip. It is a figure which shows the measurement result by a non-contact three-dimensional measuring device same as the above, FIG. 8: (A) shows before a distortion correction process, FIG. 8: (B) shows after a distortion correction process. FIG. 2 is a perspective view of a processing apparatus provided with a tension urging unit. FIG. 3 is a glass diagram showing the relationship between the applied voltage of the powder clutch and the tension generated on the metal foil sheet. It is a side view of a same side and another side correction body same as the above. It is a side view of a metal foil sheet in a conveyance path same as the above. FIGS. 13A and 13B are enlarged views (micrographs) of the metal foil sheet on the laser incident side, with no suction, and FIGS. 13C and 13D with suction. FIGS. 14A and 14B are enlarged views of the metal foil sheet on the laser emission side, with no suction, and FIGS. 13C and 13D with suction. FIG. 3 is an enlarged view of a metal foil sheet having a superimposed dimension of 0.5 mm without suction. FIG. 3 is an enlarged view of a metal foil sheet having an overlapping dimension of 0.75 mm without suction, as in the above. FIG. 4 is an enlarged view of a metal foil sheet having an overlap size of 1.0 mm without suction. FIG. 3 is an enlarged view of a metal foil sheet having a suction size of 0.5 mm with suction as in the above. FIG. 4 is an enlarged view of a metal foil sheet having a suction size of 0.75 mm with suction as in the above. FIG. 3 is an enlarged view of a metal foil sheet having a suction size of 1.0 mm with suction as in the above.

  Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below do not limit the contents of the present invention described in the claims. In addition, all of the configurations described below are not necessarily indispensable requirements of the present invention. In each embodiment, by adopting a metal foil sheet processing apparatus and processing method different from the conventional one, an unprecedented metal foil sheet processing apparatus and processing method can be obtained, and the metal foil sheet processing apparatus and processing method can be obtained. Is described.

  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, a metal foil sheet processing apparatus 2 includes a through hole forming apparatus 4 that forms a plurality of through holes 3 in the metal foil sheet 1, and a plurality of through holes 3 by the through hole forming apparatus 4. The metal foil sheet 1 is pulled out from the roll 1R around which the metal foil sheet 1 is wound by correcting the distortion of the perforated metal foil sheet 1 and the metal foil sheet 1 is wound. A conveying path 4H of the through-hole forming device 4, a conveying means 6 for continuously conveying along the conveying path 5H of the distortion correcting device 5, and an ultrasonic generator for applying ultrasonic vibration to the members of the distortion correcting device 5 7 is provided. Further, an inspection device 9 for inspecting the metal foil sheet 1 that has passed through the distortion correction device 5 is provided. As the inspection device 9, a device that detects the state by image processing or the like in a non-contact state with the metal foil sheet 1 can be used.

  The present invention relates to a processing apparatus and a processing method for correcting distortion and deflection of the metal foil sheet 1 caused by processing such as laser processing, punching, and etching on the metal foil sheet 1. In addition to the laser processing shown in the following examples, a method in which a plurality of through holes 3 are formed at substantially equal intervals in the transport direction and the width direction by punching, edging, or the like can be used.

  As the metal foil sheet 1, for example, a sheet having a thickness of 100 μm or less is used, and the width can be adjusted by the width of the processing apparatus 2.

  The through-hole forming apparatus 4 has a plurality of laser processing sections 4K, 4K,..., And irradiates a laser beam to the metal foil sheet 1 conveyed on the conveying path 4H to form a plurality of through-holes 3 in the conveying direction. It is formed at intervals. The plurality of laser processing portions 4K, 4K,... Form through holes 3 at predetermined intervals in the width direction of the metal foil sheet 1.

  The distortion correcting device 5 includes a pair of upper and lower drive rollers 12 and 12A on the carry-out side and a pair of upper and lower driven rollers 13 and 13A on the carry-in side as the correcting device-side transfer means 11, and the driven rollers 12 and 12A are driven by the drive rollers 12 and 12A. The transport path 5H is provided between the rollers 13 and 13A, and includes a driving unit 14 that rotationally drives the driving rollers 12 and 12A.

  In addition, the correction device-side transfer means 11 includes a powder clutch 15 which is a tension applying means for applying tension to the metal foil sheet 1 being conveyed, and the powder clutch 15 is attached to a lower portion which is one of the driven rollers 13 and 13A. Of the driven roller 13A. The powder clutch 15 is configured such that by increasing the applied voltage, the clutch is connected to increase the rotational resistance, whereby the tension of the metal foil sheet 1 sent by the driving rollers 12, 12A can be adjusted. it can.

  Further, the distortion correcting device 5 arranges the one-side correcting body 21 on one of the upper and lower sides of the transport path 5H, and arranges the other-side correcting body 22 on the other upper and lower sides. The body 21 is arranged above the transport path 5H, and the other-side correction body 22 is arranged below the transport path 5H. Note that the one-side and other-side correction bodies 21 and 22 are made of metal.

Each of the main bodies 21A and 22A of the one-side correction body 21 and the other-side correction body 22 is provided with a projection 23 on the side of the conveyance path 5H. In this example, a plurality of projections 23, 23. They are arranged at a predetermined interval K in the length direction of 5H. In addition, the protrusion 23 of the lower one-side correction body 21 is upward, the protrusion 23 of the upper other-side correction body 22 is downward, and the one-side correction body 21 and the other-side correction body 22 are arranged to face each other. Is done .

  The plurality of projections 23, 23... Of the other-side correction body 22 are arranged at positions between the plurality of projections 23, 23. The positions of the tips of the protrusions 23, 23 of the side correction bodies 21, 22 are overlapped in the direction of intersection of the transport path 5H (the direction of intersection of the interval K), and the tips are engaged with each other. The overlapping dimension R was 3 mm or less, 0.5 mm, 0.75 mm, 1 mm, 1.5 mm, and 2 mm in an experimental example described later. The projections 23 of the one-side and the other-side correction bodies 21 and 22 are provided at an interval in a non-contact state.

  The protrusion 23 is provided substantially orthogonal to the transport path 5H, and the cross section shown in FIG. 4 is formed continuously in the width direction of the transport path 5H. The protruding portion 23 has a base end portion 24 formed to have a substantially constant thickness, and a tapered portion 25 that becomes thinner toward the front end side in FIG. At the tip of 25, a tip 26 curved in an arc shape is provided. The curvature of the distal end portion 26 is considered to be superior to a roller leveler having the same diameter at a small diameter of about 5 mm or less, and 0.4 mm, 1 mm, 1.5 mm, and 2 mm were used in an experimental example described later. A groove 27 is provided between the adjacent projections 23, 23. The groove 27 has a width that allows the tip end of the projection 23 to be inserted. In this example, the width of the groove 27 is It is wider than the thickness of the base end portion 24 which is the maximum width dimension of the portion 23.

  The smaller the distance K is, the more the correction effect can be obtained. However, in consideration of the labor and mounting accuracy for mounting so that the tip portions 26, 26 on one side and the other side do not come into contact with the overlapping dimension R, the tip end is reduced. It is preferable that the interval K is equal to or larger than a dimension obtained by adding the thickness of the portion 26 and the width of the groove 27.

  As a modified example of the distal end portion 26, as shown in FIG. 5, an arc-shaped concave portion 28 having a diameter of 1.5 mm is formed at the center of a semicircular distal end portion having a radius of 2 mm by a ball end mill. The tip portions 26A, 26A can also be constituted by the portions formed on both sides of the head.

  The processing device 2 includes the ultrasonic generator 7 that applies ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22. In this example, the ultrasonic generator 7 is disposed on the upper side. Ultrasonic vibration is applied to the one-side correction body 21 in a substantially vertical direction (intersecting with the transport path 5H).

  Next, a processing method by the processing device 2 will be described. First, while the metal foil sheet 1 pulled out from the roll 1R by the conveying means 6 is conveyed through the conveying path 4H of the through-hole forming device 4, a plurality of through holes 3 are formed by the laser processing portions 4K, 4K. Formed (through-hole forming step).

  In the next distortion correcting step, the metal foil sheet 1 in which the through-holes 3 are formed is transported along the transport path 5H of the distortion correcting device 5, and the powder clutch 15 is moved between the driving rollers 12, 12A and the driven rollers 13, 13A. Thus, the metal foil sheet 1 is conveyed while maintaining a predetermined tension, and the distortion can be corrected by applying the tension to the metal foil sheet 1 in this manner.

  Further, in the distortion correcting step, the metal foil sheet 1 passes between the protrusions 23 of the one-side correcting body 21 and the projection 23 of the other-side correcting body 22, and the ultrasonic wave generator 7 applies ultrasonic waves to the other-side correcting body 22. Vibration is applied, and distortion and wrinkles of the metal foil sheet 1 are corrected while passing through the protrusions 23, 23. In this case, the protruding portions 23 of the one-side correcting body 21 and the other-side correcting body 22 have a comb-shaped cross-sectional shape, and the tip positions of the protruding portions 23, 23 are overlapped with each other. By repeatedly bending the sheet 1, the internal strain of the metal foil sheet 1 can be made uniform. In addition, when passing between the projections 23, 23, by applying ultrasonic vibration to one of the projections 23, an effect of reducing friction between the metal foil sheet 1 and the front end 26 is obtained. That is, by applying the ultrasonic vibration, the metal foil sheet 1 does not adhere to the distal end portion 26, and when the metal foil sheet 1 passes through the distal end portion 26, the metal foil sheet 1 is attached to or separated from the distal end portion 26 by the ultrasonic vibration. Vibrates, reducing friction.

  Hereinafter, experimental examples will be described. One-side and other-side correction bodies 21 and 22 having a tip portion 26 with a radius of 2 mm were prototyped, and a basic correction experiment using the processing apparatus 2 was performed. FIG. 2 shows the test situation. The one-side correction body 21 is connected to the ultrasonic transducer, which is the ultrasonic generator 7, the other-side correction body 22 is fixed, and the position of the other-side correction body 22 is adjusted. It was set.

[Experimental example 1]
In this experimental example 1, the radius of the tip 26 is 2 mm, the width of the projection 23 is 150 mm, the overlapping dimension R is 3 mm, the ultrasonic frequency is 19.5 kHz, the ultrasonic output is 1 and the horn tip (tip). 26) The vibration speed was 0.38 m / s, the laser processing area was 80 mm in width and 200 mm in length, and the feeding speed of the metal foil sheet 1 was 1.76 m / min. As shown in FIG. 3, the upper one-side correction body 21 includes four protrusions 23, and the lower other-side correction body 22 includes three protrusions 23. Further, the thickness of the copper metal foil sheet 1 was 10 μm, a plurality of through holes 3 having a diameter of 100 μm were formed by laser processing, and the aperture ratio of the through holes 3 was set to 10%.

  The results of Experimental Example 1 are shown in FIG. As shown in FIG. 6A before the distortion correcting step, the metal foil sheet 1 in which the through holes 3 are formed is wrinkled or distorted due to the influence of thermal deformation due to laser processing. As shown in FIG. 6B, it was confirmed that the unevenness of the metal foil sheet 1 was reduced by the distortion correcting step. In FIG. 6B, it is considered that the strain uniformity due to the bending strain in the strain correction process is insufficient for the thermal strain of the laser processing, and it is considered that reducing the radius of the tip portion 26 is effective for this. . Further, the effect of correcting the state of the ear wave was small at the wrinkles around the through-hole 3. It is considered necessary to correct the tension.

[Experimental example 2]
Based on Experimental Example 1 described above, Experimental Example 2 was performed using the above-described distal end portion 26A shown in FIG. 5 in order to reduce the diameter of the distal end portion 26. The shape of the metal foil sheet 1 before and after the distortion correcting step was measured by a non-contact three-dimensional measuring machine. The difference between Experimental Example 2 and Experimental Example 1 lies in the shape of the distal end portion 26. FIGS. 7A and 7B show the appearance of the metal foil sheet 1 before and after the distortion correcting step, respectively. Since the entire metal foil sheet 1 is bent or undulated and the reference height cannot be determined, the absolute height value of the wrinkle cannot be evaluated. However, as shown in FIG. It can be seen that the wrinkles generated in the area provided with) and the irregularities of the ear wave observed outside the processing area are improved as shown in the contour (contour lines) diagrams of FIGS. That is, from the lower side, purple → blue → green → yellow → orange → red. It can be seen that this corresponds well to the state of the photograph before the distortion processing step in FIG. On the other hand, in the state after the distortion processing step shown in FIG. 8B, the color of the contour changes gradually inside and outside the processing area, and wrinkles and ear waves seen before processing are removed. You can check. In Experimental Example 2, wrinkles and ear waves caused by laser processing were removed from the metal foil sheet 1.

From the above experimental examples and the like, another processing condition considered to contribute to the flattening of the metal foil sheet 1 is the application of tension. Therefore, in Experimental Example 3 described below, the powder clutch 15 was provided on the rotation shaft of the lower driven roller 13A as described above. The device is shown in FIG. The clearance and applied voltage adjustment to the powder clutch 15 between those driven low la 13, 13A by adjusting the rotation resistance of the driven row La 13, 13A, were tension adjustment.

In order to confirm the function of adjusting the tension of the work (metal foil sheet) by the applied voltage by the powder clutch 15, an electrolytic copper foil sheet having a width of 60 mm and a thickness of 9 μm was used as a dummy work. Tension was measured by a two-gauge method with a strain gauge attached. In this case the clearance between rows La was -1.0 mm (minus pushing the driven roller 13,13A amount). FIG. 10 shows the applied voltage (V) of the powder clutch 15 and the tension (N) measured by a strain gauge. Tension of by row La between the clearance (-1.0) by rotational resistance of the driven roller 13,13A is 54.3N, the applied voltage adjusting powder clutch 15, can be added to a maximum of about 74.1N. Then, it is possible to perform tension adjustment in a wider range by between low la clearance adjustment.

  Experimental Example 2 confirmed that the flattening effect in the distortion correction step was increased by reducing the radius of the tip portion 26. Therefore, based on this result, the one-side correction body 21 and the other-side correction body 22 in which the radius of the distal end portion 26 was 0.4 mm were designed and manufactured. FIG. 11 shows an appearance photograph of the one-side correction body 21 and the other-side correction body 22 in an assembled state.

  Further, in the through hole forming step, the through holes 3 were formed by laser processing. In laser processing, nanosecond lasers are faster and more advantageous than picosecond lasers.However, compared to picosecond lasers, hole processing using nanosecond lasers has a large one-shot beam energy. There is a concern that processing burrs will increase and that fumes will re-adhere to the work (metal foil sheet 1). As shown in FIG. 1, in order to prevent fume reattachment, a dust suction device 8 is installed in the laser processing unit 4K being developed, and the suction nozzle 8A of the suction device 8 is placed on the laser incident side of the work. Arrange and suction from the entrance side. In order to compare the effect of suction by the suction device 8, the laser-processed surface with and without suction was observed. In addition, the surface state including the burr around the through hole 3 of the work after the distortion correction step was microscopically evaluated by SEM observation.

In Experimental Example 3, as shown in FIG. 11, the upper one-side correction body 21 has eight protrusions 23, and the lower other-side correction body 22 has nine protrusions 23 more than the upper one. . The radius of the tip 26 was 0.4 mm, and the overlapping dimension R was 0.5 mm, 0.75 mm, and 1.0 mm. The ultrasonic vibration level was set to output 2 when the overlap size R was 0.5 mm and 0.75 mm. However, when the overlap size R was 1 mm, the metal foil sheet 1 was broken, and the output 3 was set to further reduce the frictional resistance. And processed. The laser processing area was 20 mm in width and 120 mm in length, and the feeding speed of the metal foil sheet 1 was 1 m / min. The ultrasonic vibration level at the output 1 is the horn tip vibration speed of 0.38 m / s, the output 2 is the horn tip vibration speed of 0.59 m / s, and the output 3 is the horn tip vibration speed of 0.80 m / s. FIG. 12 shows the metal foil sheet 1 in the transport path 5H.

  FIG. 13 shows a SEM photograph on the laser incident side surface with / without suction during laser processing, and FIG. 14 shows a photograph on the same exit side.

  At a low magnification (x50) in FIG. 13A, a region that looks white around the through-hole 3 is formed, which is considered to be oxidation during processing. No difference is seen with or without suction. 13B, it can be seen that burrs are spread around the through hole 3 by laser processing.

  In FIG. 14, as in the case of the laser incident side, no difference due to suction is seen on the emission side. Further, on the exit side, oxidation around the through hole 3 as seen on the entrance side is not observed. Processing burrs were found on the exit side, although very small compared to the entrance side.

  In the distortion repairing process, (1) when the superimposition dimension R is 0.5 mm and the output of the ultrasonic wave is 2 (FIGS. 15 and 18), (2) When the superimposition dimension R is 0.75 mm and the output of the ultrasonic wave is 2 (3) An SEM photograph of the surface of the metal foil sheet 1 under each processing condition in the case where the overlapping dimension R is 1.0 mm and the ultrasonic output is 3 (FIGS. 17 and 20) is shown in FIG. These are shown in FIGS. 15 to 17 show the case without suction by the suction device 8, and FIGS. 18 to 20 show the case with suction by the suction device 8.

  Under any of the conditions (1) to (3), burrs on the emission side were removed. The burr on the incident side is not removed, and a flat portion 31 as if crushed is formed. This is considered to be due to friction with the tip 26. Also, when the overlapping dimension R is increased, a contrast 32 is seen on the incident surface as if rubbed against an oxidized white portion, and a striped pattern which is considered to be a distortion of the surface in the workpiece feeding direction is seen on the exit surface. Was done.

Thus, in this embodiment, in the processing apparatus of the metal foil sheet 1 provided with the distortion correction device 5 for correcting the distortion of the gold Shokuhaku sheet 1, strain correction device 5, the interval K a plurality of projections 23 and 23 And the other-side correction body 22 having the projection 23 on the side of the one-side correction body 21, between the plurality of protrusions 23 of the one-side correction body 21. Is arranged at the position of the other side correction body 22, and the positions of the tips of the protrusions 23, 23 of the one side and the other side correction bodies 21, 22 are overlapped with each other in the cross direction of the interval K, and metal Since the ultrasonic generator 7 for applying ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22 in contact with the foil sheet 1 is provided, the one-side and the other-side correction bodies 21 and 22 whose positions are overlapped with each other are provided. Between the tips of the projections 23, 23 of the metal foil sheet 1 Bending given deformation, it is possible to equalize the internal strain of the metal foil sheet 1. At this time, by applying ultrasonic vibration to at least one of the protrusions 23, an effect of reducing friction can be obtained.

As described above, according to the present embodiment, in the processing apparatus for the metal foil sheet 1 provided with the plurality of through holes 3, the through hole forming apparatus 4 for forming the through holes 3 in the metal foil sheet 1 corresponds to claim 1. A distortion correcting device 5 for correcting a distortion of the metal foil sheet 1 provided with a plurality of through holes 3 by the through hole forming device 4, and a conveying means for conveying the metal foil sheet 1 along a conveying path 5H of the distortion correcting device 5. 6, includes a distortion correction device 5, a groove 27 between the projections 23 and 23 apart with location rather in the conveying direction of the conveying path 5H a plurality of protrusions 23 and 23 provided in the conveyance path 5H side The one-side correction body 21 provided and the other-side correction body 22 provided with a plurality of protrusions 23 on the side of the transfer path 5H in the transfer direction and having a groove 27 between the protrusions 23 are transferred. The road 5H is interposed therebetween, and the protrusions 23 of the one-side and the other-side correction bodies 21 and 22 are The tip is formed in a curved shape, and the projection 23 of the other-side correction body 22 is arranged at a position between the plurality of projections 23 of the one-side correction body 21. The positions of the tips of the projections 23, 23 are overlapped in the crossing direction of the transport path 5H, and the tips of the projections 23 of the other side correction body 22 are corrected to the plurality of grooves 27, 27 of the one side correction body 21 by one side. A plurality of at least one of the one-side and the other-side correction bodies 21 and 22 is arranged by disposing the ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22 while being arranged in a non-contact state with the projection 23 of the body 21. Is provided with the ultrasonic generator 7 for applying ultrasonic vibration to the projections 23, 23, so that the through holes 3 are efficiently formed by laser processing. At this time, the metal foil sheet 1 is distorted. The resulting metal foil sheet 1 is placed on one side where By passing between the tip of the projection portions 23, 23 of the side modification 21, 22, give repeated bending deformation to the metal foil sheet 1, it is possible to equalize the internal strain of the metal foil sheet 1. At this time, by applying ultrasonic vibration to at least one of the protrusions 23, an effect of reducing friction can be obtained.

Thus, in this embodiment, corresponding to claim 1, since the formation of the tip of the projection portion 23 in a curved shape, it is possible to reduce the friction of the metal foil sheet 1 and the projection 23.

Thus, in this embodiment, corresponding to claim 1, because provided with a plurality of projections 23 on the other side fixes body 22, by providing a plurality of protrusions 23, effectively repeating the metal foil sheet 1 bending deformation Can be given.

Thus, in this embodiment, corresponding to claim 2, because provided with tensioning means serving powder clutch 15 applying tension in the conveying path 5H distortion correction device 5 in the metal foil sheet 1, applying a tension Thereby, the metal foil sheet 1 can be corrected.

Thus, in this embodiment, in the processing method of the metal foil sheet with a strain correction step of correcting the distortion correction device 5 strain of gold Shokuhaku sheet distortion correction device 5, a plurality of projections 23 and 23 A plurality of projections 23 of the one-sided correction body 21 are provided with a one-sided correction body 21 provided with an interval K and a second-sided correction body 22 provided with a projection 23 on the one-sided correction body 21 side. The protrusion 23 of the other-side correction body 22 is arranged at a position between them, and the positions of the tips of the protrusions 23, 23 of the one-side and the other-side correction bodies 21 and 22 are overlapped in the cross direction of the interval K. Since ultrasonic vibration is applied to at least one of the one-side and other-side correction bodies 21 and 22 in contact with the metal foil sheet 1, the metal foil sheet 1 is repeatedly bent and deformed, and the internal distortion of the metal foil sheet 1 is increased. Can be made uniform, and at least one By applying ultrasonic vibration to the protrusion 23, the low-friction effect.

Thus, in this embodiment, in accordance with claim 3 , in the method for processing the metal foil sheet 1 provided with the plurality of through holes 3, a through hole forming step of forming the through holes 3 in the metal foil sheet 1; A distortion correcting step of correcting the distortion of the metal foil sheet 1 by the distortion correcting device 5 while the metal foil sheet 1 in which the plurality of through holes 3 are formed is being transported in the transport path 5H. a plurality of protrusions 23 and 23 on one side fixes body 21 provided with a groove 27 between the projections 23 and 23 apart with location rather in the conveying direction of the conveying path 5H a provided on the road 5H side, the transport path 5H side A plurality of projections 23 , 23 are spaced apart in the transport direction, and another correction body 22 having a groove 27 provided between the projections 23 , 23 is disposed with the transport path 5H interposed therebetween, and one side and the other side. The tips of the protrusions 23 of the correction bodies 21 and 22 are formed in a curved shape, and The projections 23 of the other-side correction body 22 are arranged at positions between the projections 23, 23, and the positions of the tips of the projections 23, 23 of the one-side and the other-side correction bodies 21 and 22 are determined on the transport path. 5H, the tips of the protrusions 23 of the other-side correction body 22 are arranged in the plurality of grooves 27, 27 of the one-side correction body 21 in a non-contact state with the protrusions 23 of the one-side correction body 21; While the metal foil sheet 1 is being conveyed, ultrasonic vibration is applied to at least one of the one-side and other-side correction bodies 21 and 22 to form a plurality of protrusions 23 on at least one of the one-side and other-side correction bodies 21 and 22. Since the ultrasonic vibration is applied to the metal foil sheet 1, the metal foil sheet 1 can be repeatedly bent and deformed, and the internal strain of the metal foil sheet 1 can be made uniform. At this time, the ultrasonic vibration is applied to at least one of the protrusions 23. By doing so, a low friction effect can be obtained.

  As an effect on the embodiment, since the powder clutch 15 is provided as tension applying means for applying tension to the metal foil sheet 1 being conveyed, it is possible to correct distortion by applying tension to the metal foil sheet 1 being conveyed. it can. Further, the projection 23 has a tapered portion 25 which is a portion that becomes narrower from the base end 24 toward the distal end, and the distal end 26 is provided at the distal end of the tapered portion 25. Therefore, the radius of the distal end 26 is reduced. Also, since the base end 24 can be made thicker, the strength of the projection 23 can be ensured. Further, since the through-hole forming device 4 forms the through-hole 3 by laser processing, the processing speed of the through-hole 3 can be increased as compared with punching or edging, and the through-hole 3 can be formed efficiently. In particular, by using a nanosecond laser, the processing of the through hole 3 can be performed quickly. Also, in this experiment, a copper metal foil sheet 1 having a thickness of about 10 μm has an overlapping dimension R of 0.5 to 3.0 mm and a radius of the tip portion 26 of 0.4 to 2.0 mm. Although the correction effect was confirmed, the conditions of the overlapping dimension R and the radius dimension of the tip portion 26 were set, and the feed speed of the metal foil sheet 1, the applied tension, the output of the ultrasonic wave, and the like were appropriately set. Accordingly, it is needless to say that the method can be applied to the processing of a metal foil sheet having a thickness of less than 10 μm and more than 10 μm.

  The present invention is not limited to the above embodiment, and various modifications can be made. For example, the number of protrusions on the one side and the other side correction body may be larger. Further, in the embodiment, all the protrusions have the same configuration. However, the sizes of the protrusions and the tip portions of the one side and the other side correction body may be changed and appropriately combined. In the embodiment, the metal foil sheet is transported in the horizontal direction. However, the distortion correction step may be performed while the metal foil sheet is transported in the vertical direction. In this case, the protrusions may be arranged in the horizontal direction. Further, the through-hole forming apparatus and the through-hole forming step may be those of a conventional example. For example, the through-hole forming apparatus may be formed by punching (Patent Document 2) or edging other than the laser processing shown in the embodiment. A device that forms a through hole according to (Patent Document 1) or the like may be used. In particular, it is preferable to use an apparatus that can continuously form a through hole while transporting a metal foil sheet. Further, although the embodiment has been described with reference to the metal foil made of copper as an example, the present invention is also applicable to other metal foils. Further, the present invention is suitable for a rolled copper metal foil sheet, but is also applicable to an electrolytic copper foil sheet as shown in the experimental examples. Further, in the embodiment, the metal foil sheet is configured to correct the distortion by the distortion correcting device while being continuously conveyed, but may be intermittently conveyed, or the metal foil sheet is set in the distortion processing device, After correcting the distortion, a batch process of removing the metal foil sheet from the distortion processing device may be performed.

REFERENCE SIGNS LIST 1 metal foil sheet 2 processing device 3 through hole 4 through hole forming device 4K laser processing unit 5 distortion correcting device 5H transport path 6 transport means 7 ultrasonic generator 15 powder clutch (tension applying means)
21 One-side correction body 22 Other-side correction body 23 Projection 26 Tip
27 Groove K Spacing R Overlap dimension

Claims (3)

In a metal foil sheet processing apparatus provided with a plurality of through holes,
A through-hole forming apparatus for forming the through-hole in the metal foil sheet,
A distortion correcting device that corrects the distortion of the metal foil sheet provided with a plurality of the through holes by the through hole forming device,
Transport means for transporting the metal foil sheet along a transport path of the distortion correction device,
With
The distortion correction device comprises a first side fixes body provided with grooves between the protrusions apart with location rather in the conveying direction of the plurality of the conveying path a protrusion provided on the conveying path, a plurality in the conveying path The protrusions are spaced in the conveyance direction of the conveyance path and the other-side correction body provided with a groove between the protrusions is disposed with the conveyance path interposed therebetween,
The tip of the protrusion of the one side and the other side correction body is formed in a curved shape,
At the position between the plurality of protrusions of the one-side correction body, the protrusion of the other-side correction body is arranged, and the position of the tip of the protrusion of the one-side and the other-side correction body is transferred to the position. Superimposed in the direction of intersection of the road, the tip of the protrusion of the other-side correction body is disposed in a plurality of grooves of the one-side correction body in a non-contact state with the protrusion of the one-side correction body,
An ultrasonic generator that applies ultrasonic vibration to at least one of the one-side and the other-side correction body and applies ultrasonic vibration to at least one of the plurality of protrusions of the one-side and the other-side correction body is provided. A metal foil sheet processing apparatus characterized by the above-mentioned. Machining apparatus of the metal foil sheets according to claim 1 Symbol mounting, characterized in that it comprises a tensioning means for imparting tension to the metal foil sheet. In a method for processing a metal foil sheet provided with a plurality of through holes,
A through-hole forming step of forming the through-hole in the metal foil sheet,
A distortion correction step of correcting the distortion of the metal foil sheet by a distortion correction device while the metal foil sheet in which the plurality of through holes are formed is transported on the transport path,
With
The distortion correction device comprises a first side fixes body provided with grooves between the protrusions apart with location rather in the conveying direction of the plurality of the conveying path a protrusion provided on the conveying path, a plurality in the conveying path The protrusions of the one-side and the other-side correction bodies are arranged so that the protrusions of the one-side and the other-side correction bodies are spaced from each other in the conveyance direction of the conveyance path, and the other-side correction body provided with a groove between the protrusions with the conveyance path interposed therebetween. The tip of the portion is formed in a curved shape, and at the position between the plurality of protrusions of the one-side correction body, the protrusion of the other-side correction body is arranged, and the one-side and the other-side correction body The position of the tip of the protrusion is overlapped in the cross direction of the transport path, and the tips of the protrusions of the other-side correction body are aligned with the protrusions of the one-side correction body in a plurality of grooves of the one-side correction body. Placed in a non-contact state,
Applying ultrasonic vibration to at least one of the one side and the other side correction body during the transfer of the metal foil sheet and applying ultrasonic vibration to at least one of the plurality of protrusions of the one side and the other side correction body. A method for processing a metal foil sheet.