JP6645654B2 - Metal foil sheet processing equipment and processing method - Google Patents
Metal foil sheet processing equipment and processing method Download PDFInfo
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- JP6645654B2 JP6645654B2 JP2016160676A JP2016160676A JP6645654B2 JP 6645654 B2 JP6645654 B2 JP 6645654B2 JP 2016160676 A JP2016160676 A JP 2016160676A JP 2016160676 A JP2016160676 A JP 2016160676A JP 6645654 B2 JP6645654 B2 JP 6645654B2
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- 239000002184 metal Substances 0.000 title claims description 155
- 229910052751 metal Inorganic materials 0.000 title claims description 155
- 239000011888 foil Substances 0.000 title claims description 149
- 238000012545 processing Methods 0.000 title claims description 62
- 238000003672 processing method Methods 0.000 title description 8
- 238000012937 correction Methods 0.000 claims description 119
- 238000000034 method Methods 0.000 claims description 17
- 238000012546 transfer Methods 0.000 claims description 5
- 238000003754 machining Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 26
- 230000000694 effects Effects 0.000 description 13
- 239000000843 powder Substances 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 238000005452 bending Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000037303 wrinkles Effects 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000004080 punching Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000007688 edging Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000003517 fume Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 240000006829 Ficus sundaica Species 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Cell Electrode Carriers And Collectors (AREA)
Description
本発明は、金属箔シートの歪を修正する金属箔シートの加工装置と加工方法に関する。 The present invention relates to a metal foil sheet processing apparatus and method for correcting distortion of a metal foil sheet.
従来、二次電池用集電体に主に使用される金属箔シートに係り、所定形状の貫通孔が一定間隔で規則的に配列され、継ぎ目のない連続するエッチング絵柄を有する金属箔シートの製造方法(例えば特許文献1)や、コイル状に巻いた長尺金属箔を巻き戻して、該長尺金属箔を成形ロールと受けロールの間に挟み込んで金属箔に多数の微細抜き貫通孔を成形し、該微細抜き貫通孔成形後の長尺金属箔を再度コイル状に巻き取る多孔金属箔のロール成形方法(例えば特許文献2)がある。 Conventionally, the present invention relates to a metal foil sheet mainly used for a current collector for a secondary battery, and manufactures a metal foil sheet having a continuous etching pattern in which through holes of a predetermined shape are regularly arranged at regular intervals and have a seamless etching pattern. Method (for example, Patent Document 1), or unwinding a long metal foil wound in a coil shape, sandwiching the long metal foil between a forming roll and a receiving roll, and forming a large number of fine through holes in the metal foil. Then, there is a roll forming method of a porous metal foil in which the long metal foil after the fine through-hole formation is wound again into a coil shape (for example, Patent Document 2).
上記製造方法及び成形方法では、貫通孔の成形後、シートに生ずる歪の矯正について考慮されていなかった。 In the above manufacturing method and forming method, no consideration has been given to the correction of the distortion generated in the sheet after forming the through hole.
これに対して、金属薄板をローラレベラーやテンションレベラーにより矯正する装置(例えば特許文献3及び特許文献4)がある。 On the other hand, there are devices (for example, Patent Document 3 and Patent Document 4) for correcting a thin metal plate with a roller leveler or a tension leveler.
上記ローラレベラーは、金属薄板に残留するひずみに対して噛み合わせた互い違いのローラにより曲げ変形を連続して加えることによって、内部ひずみを均一化して金属薄板を矯正する加工であり、金属薄板とローラの表面との間の摩擦が大きくなるため、その摩擦が矯正の妨げになったり、小径ローラの剛性不足による押付圧の低下の問題など、金属箔などに適用することは難しいという問題がある。 The above-mentioned roller leveler is a process for straightening a metal sheet by equalizing internal strain by continuously applying bending deformation by alternate rollers engaged with the strain remaining on the metal sheet, and correcting the metal sheet and the roller. There is a problem that it is difficult to apply to a metal foil or the like, such as a problem that the friction between the surface and the surface becomes large, the friction hinders the correction, and the pressing pressure decreases due to insufficient rigidity of the small-diameter roller.
即ち、金属箔の厚みに合わせてローラを小径化すると、ローラのたわみによるワーク幅方向の噛み込み量の不均一化、回転抵抗の増大によるワーク送りの安定性の悪化が生じる。 That is, when the diameter of the roller is reduced in accordance with the thickness of the metal foil, the amount of engagement in the width direction of the work due to the deflection of the roller becomes non-uniform, and the stability of work feeding is deteriorated due to an increase in rotational resistance.
さらに具体的には、ローラレベラーにおいて、ローラは金属薄板の板厚に応じて決められ、公知ではないが、薄い金属箔に対しては、より小径のローラが必要となる。しかし、ローラの小径化は、送りの摩擦抵抗が大きくなると同時にローラの剛性が低下し、バックアップローラの支持などの対策が必要となるため、機構が複雑化し、各ローラ間の回転抵抗のばらつきが顕在化するなどの問題がある。 More specifically, in a roller leveler, the roller is determined according to the thickness of the thin metal sheet, and although it is not publicly known, a thinner metal foil requires a smaller roller. However, reducing the diameter of the rollers increases the frictional resistance of the feed and at the same time reduces the rigidity of the rollers, and requires measures such as supporting backup rollers, which complicates the mechanism and reduces the variation in rotational resistance between the rollers. There are problems such as becoming apparent.
そこで、本発明は、貫通孔形成により生じる歪の補修工程において、金属箔シートに加
わる摩擦力を軽減し、金属箔シートの歪を取ることができる金属箔シートの加工装置と加工方法を提供することを目的とする。
Therefore, the present invention provides a processing apparatus and a processing method for a metal foil sheet capable of reducing a frictional force applied to the metal foil sheet and removing distortion of the metal foil sheet in a process of repairing distortion caused by formation of a through hole. The purpose is to.
上記目的を達成するために、請求項1に係る発明は、貫通孔が複数設けられた金属箔シートの加工装置において、前記金属箔シートに前記貫通孔を形成する貫通孔形成装置と、前記貫通孔形成装置により前記貫通孔が複数設けられた金属箔シートの歪を修正する歪修正装置と、前記歪修正装置の搬送路に沿って前記金属箔シートを搬送する搬送手段と、を備え、前記歪修正装置は、前記搬送路側に設けた複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた一側修正体と、前記搬送路側に複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた他側修正体とを前記搬送路を挟んで配置し、前記一側及び他側修正体の突起部の先端を湾曲状に形成し、前記一側修正体の前記複数の突起部の間の位置に、前記他側修正体の前記突起部を配置すると共に、前記一側及び他側修正体の前記突起部の先端の位置を前記搬送路の交差方向において重ね合わせ、前記一側修正体の複数の溝部に前記他側修正体の前記突起部の先端が前記一側修正体の前記突起部と非接触状態で配置され、前記一側及び他側修正体の少なくとも一方に超音波振動を付与して前記一側及び他側修正体の少なくとも一方の前記複数の突起部に超音波振動を付与する超音波発生装置を備えることを特徴とする。 In order to achieve the above object, the invention according to claim 1 is a processing apparatus for a metal foil sheet provided with a plurality of through holes, wherein the through hole forming apparatus for forming the through hole in the metal foil sheet; A distortion correcting device that corrects the distortion of the metal foil sheet provided with the plurality of through holes by a hole forming device, and a transport unit that transports the metal foil sheet along a transport path of the distortion correcting device, distortion correction device comprises a first side fixes body provided with grooves between the protrusions plurality of protrusions with rather place the spacing in the conveying direction of the conveying path provided in the conveying path, a plurality of the conveying path and the other side fixes body provided with grooves between the protrusions with a protrusion spaced in the conveying direction of the conveying path is disposed across the conveying path, the projecting portion of the one side and the other side fixes body the double of the tip is formed in a curved shape, the one side fixes body A position between the protrusions, as well as placing the protrusions of the other side fixes body, the position of the tip of the protrusion of the one side and the other side fixes body superimposed in the cross direction of the conveying path, The tips of the protrusions of the other-side correction body are arranged in a plurality of grooves of the one-side correction body in a non-contact state with the protrusions of the one-side correction body, and at least one of the one-side and the other-side correction body And an ultrasonic generator that applies ultrasonic vibration to the plurality of protrusions on at least one of the one-side and other-side correction bodies .
請求項2に係る発明は、前記歪修正装置の搬送路において前記金属箔シートに張力を付与する張力付与手段を備えることを特徴とする。 The invention according to claim 2 is characterized in that a tension applying means for applying tension to the metal foil sheet in a transport path of the distortion correcting device is provided.
請求項3に係る発明は、貫通孔が複数設けられた金属箔シートの加工方法において、前記金属箔シートに前記貫通孔を形成する貫通孔形成工程と、前記貫通孔が複数形成された金属箔シートが搬送路を搬送中に該金属箔シートの歪を歪修正装置により修正する歪修正工程と、を備え、前記歪修正装置は、前記搬送路側に設けた複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた一側修正体と、前記搬送路側に複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた他側修正体とを前記搬送路を挟んで配置し、前記一側及び他側修正体の突起部の先端を湾曲状に形成し、前記一側修正体の前記複数の突起部の間の位置に、前記他側修正体の前記突起部を配置すると共に、前記一側及び他側修正体の前記突起部の先端の位置を前記搬送路の交差方向において重ね合わせ、前記一側修正体の複数の溝部に前記他側修正体の前記突起部の先端が前記一側修正体の前記突起部と非接触状態で配置され、前記金属箔シートの搬送中に前記一側及び他側修正体の少なくとも一方に超音波振動を付与して前記一側及び他側修正体の少なくとも一方の前記複数の突起部に超音波振動を付与することを特徴とする。 The invention according to claim 3 is a method of processing a metal foil sheet provided with a plurality of through holes, a through hole forming step of forming the through holes in the metal foil sheet, and a metal foil formed with the plurality of through holes. A distortion correcting step of correcting the distortion of the metal foil sheet by a distortion correcting device while the sheet is being transported along the transport path, wherein the distortion correcting apparatus includes a plurality of protrusions provided on the transport path side of the transport path. and one side fixes body a groove provided between the projections with location rather apart in the conveying direction, between the projections with spaced apart a plurality of protrusions in the conveying direction of the conveying path in the conveying path The other-side correction body provided with the groove portion is disposed with the conveyance path interposed therebetween, and the tip of the protrusion of the one-side and the other-side correction body is formed in a curved shape, and the plurality of protrusions of the one-side correction body are formed. The projection of the other-side correction body is arranged at a position between The position of the tip of the protrusion on one side and the other side fixes body superimposed in the cross direction of the conveying path, the tip of the protrusion of the other side fixes body into a plurality of groove portions of the one side fixes body the one It is arranged in a non-contact state with the projecting portion of the side modified body, the metal foil sheet the one side and said to impart ultrasonic vibration to at least one of the other side fixes body one side and the other side fixes body during transportation of the Ultrasonic vibration is applied to at least one of the plurality of protrusions .
請求項1の構成によれば、貫通孔を形成し、その際、金属箔シートに歪が生じる。この歪が生じた金属箔シートを、位置を重ね合わせた一側及び他側修正体の突起部の先端間を通過させることにより、金属箔シートに繰り返し曲げ変形を与え、金属箔シートの内部歪を均一化することができる。この際、少なくとも一方の突起部に超音波振動を付与することにより、金属箔シートと突起部の先端との間の低摩擦化効果が得られる。 According to the configuration of the first aspect , the through hole is formed, and at that time, the metal foil sheet is distorted. By passing the distorted metal foil sheet between the tips of the protrusions of the one side and the other side correction body where the positions are overlapped, the metal foil sheet is repeatedly bent and deformed, and the internal distortion of the metal foil sheet is caused. Can be made uniform. At this time, by applying ultrasonic vibration to at least one of the protrusions, an effect of reducing friction between the metal foil sheet and the tip of the protrusion can be obtained.
請求項1の構成によれば、金属箔シートと突起部の摩擦を軽減できる。 According to the configuration of the first aspect , the friction between the metal foil sheet and the protrusion can be reduced.
請求項1の構成によれば、複数の突起部を備えることにより、効率よく金属箔シートに繰り返し曲げ変形を与えることができる。 According to the configuration of the first aspect , by providing the plurality of protrusions, the metal foil sheet can be repeatedly and efficiently bent.
請求項2の構成によれば、テンションを付与することにより金属箔シートを矯正することができる。 According to the configuration of claim 2, the metal foil sheet can be corrected by applying tension.
請求項3の構成によれば、金属箔シートに繰り返し曲げ変形を与え、金属箔シートの内部歪を均一化することができ、この際、少なくとも一方の突起部に超音波振動を付与することにより、金属箔シートと突起部の先端との間の低摩擦化効果が得られる。 According to the configuration of claim 3 , the metal foil sheet can be repeatedly bent and deformed, and the internal strain of the metal foil sheet can be made uniform. At this time, by applying ultrasonic vibration to at least one of the protrusions, In addition, an effect of reducing friction between the metal foil sheet and the tip of the protrusion can be obtained.
本発明における好適な実施の形態について、添付図面を参照しながら詳細に説明する。尚、以下に説明する実施の形態は、特許請求の範囲に記載された本発明の内容を限定するものではない。また、以下に説明される構成の全てが、本発明の必須要件であるとは限らない。各実施例では、従来とは異なる金属箔シートの加工装置と加工方法を採用することにより、従来にない金属箔シートの加工装置と加工方法が得られ、その金属箔シートの加工装置と加工方法について記述する。 Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments described below do not limit the contents of the present invention described in the claims. In addition, all of the configurations described below are not necessarily indispensable requirements of the present invention. In each embodiment, by adopting a metal foil sheet processing apparatus and processing method different from the conventional one, an unprecedented metal foil sheet processing apparatus and processing method can be obtained, and the metal foil sheet processing apparatus and processing method can be obtained. Is described.
以下、本発明の実施例1について、図1〜図20を参照して説明する。同図に示すように、金属箔シート1の加工装置2は、金属箔シート1に複数の貫通孔3を形成する貫通孔形成装置4と、この貫通孔形成装置4により複数の貫通孔3が穿設された金属箔シート1の歪を矯正して修正する歪修正装置5と、金属箔シート1を巻いたロール1Rから、該金属箔シート1を引出し、この引き出した金属箔シート1を前記貫通孔形成装置4の搬送路4Hと、歪修正装置5の搬送路5Hに沿って連続して搬送する搬送手段6と、前記歪修正装置5の部材に超音波振動を付与する超音波発生装置7を備える。また、歪修正装置5を通過した金属箔シート1を検査する検査装置9を備える。この検査装置9は金属箔シート1に非接触状態で画像処理などにより状態を検出するものなどを用いることができる。 Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. As shown in FIG. 1, a metal foil sheet processing apparatus 2 includes a through hole forming apparatus 4 that forms a plurality of through holes 3 in the metal foil sheet 1, and a plurality of through holes 3 by the through hole forming apparatus 4. The metal foil sheet 1 is pulled out from the roll 1R around which the metal foil sheet 1 is wound by correcting the distortion of the perforated metal foil sheet 1 and the metal foil sheet 1 is wound. A conveying path 4H of the through-hole forming device 4, a conveying means 6 for continuously conveying along the conveying path 5H of the distortion correcting device 5, and an ultrasonic generator for applying ultrasonic vibration to the members of the distortion correcting device 5 7 is provided. Further, an inspection device 9 for inspecting the metal foil sheet 1 that has passed through the distortion correction device 5 is provided. As the inspection device 9, a device that detects the state by image processing or the like in a non-contact state with the metal foil sheet 1 can be used.
尚、本発明は、金属箔シート1にレーザー加工、パンチング、エッチングなどの加工により生じる金属箔シート1の歪、たわみを修正する加工装置と加工方法に係るものであり、前記貫通孔形成装置4は、以下の実施例に示すレーザー加工以外でも、パンチングやエッジングなどにより、搬送方向及び幅方向にそれぞれ略等間隔で複数の貫通孔3を形成するものを用いることができる。 The present invention relates to a processing apparatus and a processing method for correcting distortion and deflection of the metal foil sheet 1 caused by processing such as laser processing, punching, and etching on the metal foil sheet 1. In addition to the laser processing shown in the following examples, a method in which a plurality of through holes 3 are formed at substantially equal intervals in the transport direction and the width direction by punching, edging, or the like can be used.
前記金属箔シート1は、一例として、厚さが100μm以下のものが用いられ、幅は加工装置2の幅により対応可能である。 As the metal foil sheet 1, for example, a sheet having a thickness of 100 μm or less is used, and the width can be adjusted by the width of the processing apparatus 2.
前記貫通孔形成装置4は、複数のレーザー加工部4K,4K・・・を有し、搬送路4Hを搬送される金属箔シート1にレーザー光線を照射して複数の貫通孔3を搬送方向に所定間隔で形成するものである。また、複数のレーザー加工部4K,4K・・・は金属箔シート1の幅方向に所定の間隔を置いて貫通孔3を形成する。 The through-hole forming apparatus 4 has a plurality of laser processing sections 4K, 4K,..., And irradiates a laser beam to the metal foil sheet 1 conveyed on the conveying path 4H to form a plurality of through-holes 3 in the conveying direction. It is formed at intervals. The plurality of laser processing portions 4K, 4K,... Form through holes 3 at predetermined intervals in the width direction of the metal foil sheet 1.
前記歪修正装置5は、修正装置側搬送手段11として、搬出側に上下一対の駆動ローラ12,12Aと、搬入側に上下一対の従動ローラ13,13Aを備え、これら駆動ローラ12,12Aと従動ローラ13,13Aの間に前記搬送路5Hが設けられ、前記駆動ローラ12,12Aを回転駆動する駆動手段14を備える。 The distortion correcting device 5 includes a pair of upper and lower drive rollers 12 and 12A on the carry-out side and a pair of upper and lower driven rollers 13 and 13A on the carry-in side as the correcting device-side transfer means 11, and the driven rollers 12 and 12A are driven by the drive rollers 12 and 12A. The transport path 5H is provided between the rollers 13 and 13A, and includes a driving unit 14 that rotationally drives the driving rollers 12 and 12A.
また、前記修正装置側搬送手段11には、搬送中の金属箔シート1に張力を付与する張力付与手段たるパウダークラッチ15を備え、このパウダークラッチ15を前記従動ローラ13,13Aの一方である下の従動ローラ13Aの回転軸に設けている。前記パウダークラッチ15は、加電圧を上げることにより、クラッチが繋がって回転抵抗が増加するように構成されており、これにより駆動ローラ12,12Aにより送られる金属箔シート1の張力を調整することができる。 In addition, the correction device-side transfer means 11 includes a powder clutch 15 which is a tension applying means for applying tension to the metal foil sheet 1 being conveyed, and the powder clutch 15 is attached to a lower portion which is one of the driven rollers 13 and 13A. Of the driven roller 13A. The powder clutch 15 is configured such that by increasing the applied voltage, the clutch is connected to increase the rotational resistance, whereby the tension of the metal foil sheet 1 sent by the driving rollers 12, 12A can be adjusted. it can.
また、前記歪修正装置5は、前記搬送路5Hの上下の一方に一側修正体21を配置すると共に、上下の他方に他側修正体22を配置しており、この例では、一側修正体21を搬送路5Hの上側に配置すると共に、他側修正体22を搬送路5Hの下側に配置している。尚、一側及び他側修正体21,22は金属製である。 Further, the distortion correcting device 5 arranges the one-side correcting body 21 on one of the upper and lower sides of the transport path 5H, and arranges the other-side correcting body 22 on the other upper and lower sides. The body 21 is arranged above the transport path 5H, and the other-side correction body 22 is arranged below the transport path 5H. Note that the one-side and other-side correction bodies 21 and 22 are made of metal.
前記一側修正体21及び他側修正体22の本体21A,22Aには、それぞれ前記搬送路5H側に突起部23を設け、この例では、複数の突起部23,23・・・を搬送路5Hの長さ方向に所定の間隔Kを置いて配置している。また、下側の一側修正体21の突起部23は上向きで、上側の他側修正体22の突起部23は下向きであり、一側修正体21と他側修正体22は対向して配置される。 Each of the main bodies 21A and 22A of the one-side correction body 21 and the other-side correction body 22 is provided with a projection 23 on the side of the conveyance path 5H. In this example, a plurality of projections 23, 23. They are arranged at a predetermined interval K in the length direction of 5H. In addition, the protrusion 23 of the lower one-side correction body 21 is upward, the protrusion 23 of the upper other-side correction body 22 is downward, and the one-side correction body 21 and the other-side correction body 22 are arranged to face each other. Is done .
そして、前記一側修正体21の複数の突起部23,23・・・の間の位置に、他側修正体22の複数の突起部23,23・・・を配置すると共に、一側及び他側修正体21,22の突起部23,23の先端の位置を搬送路5Hの交差方向(前記間隔Kの交差方向)において重ね合わせ、先端同士を噛み合わせている。前記重ね合わせ寸法Rは、後述する実験例では、3mm以下、0.5mm、0.75mm、1mm、1.5mm、2mmとした。尚、一側及び他側修正体21,22の突起部23,23同士は、非接触状態で、間隔を置いて設けられる。 The plurality of projections 23, 23... Of the other-side correction body 22 are arranged at positions between the plurality of projections 23, 23. The positions of the tips of the protrusions 23, 23 of the side correction bodies 21, 22 are overlapped in the direction of intersection of the transport path 5H (the direction of intersection of the interval K), and the tips are engaged with each other. The overlapping dimension R was 3 mm or less, 0.5 mm, 0.75 mm, 1 mm, 1.5 mm, and 2 mm in an experimental example described later. The projections 23 of the one-side and the other-side correction bodies 21 and 22 are provided at an interval in a non-contact state.
前記突起部23は前記搬送路5Hに対して略直交して設けられ、図4に示す断面が搬送路5Hの幅方向に連続して形成されている。前記突起部23は、基端部24が略一定厚さに形成され、この基端部24の先端側に、図5のものでは、先端側向かって細くなるテーパー部25を設け、このテーパー部25の先端に、円弧状に湾曲した先端部26が設けられている。この先端部26の曲率は、半径5mm程度以下の小径においては、同径のローラレベラーよりも優位と考えられ、後述する実験例では、0.4mm、1mm、1.5mm、2mmを用いた。また、隣り合う突起部23,23の間には、溝部27が設けられ、この溝部27は、前記突起部23の先端側が挿入可能な幅を有し、この例では溝部27の幅は、突起部23の最大幅寸法である基端部24の厚さよりも広い。 The protrusion 23 is provided substantially orthogonal to the transport path 5H, and the cross section shown in FIG. 4 is formed continuously in the width direction of the transport path 5H. The protruding portion 23 has a base end portion 24 formed to have a substantially constant thickness, and a tapered portion 25 that becomes thinner toward the front end side in FIG. At the tip of 25, a tip 26 curved in an arc shape is provided. The curvature of the distal end portion 26 is considered to be superior to a roller leveler having the same diameter at a small diameter of about 5 mm or less, and 0.4 mm, 1 mm, 1.5 mm, and 2 mm were used in an experimental example described later. A groove 27 is provided between the adjacent projections 23, 23. The groove 27 has a width that allows the tip end of the projection 23 to be inserted. In this example, the width of the groove 27 is It is wider than the thickness of the base end portion 24 which is the maximum width dimension of the portion 23.
前記間隔Kが狭い程、矯正効果が得られるが、一側と他側の先端部26,26が重ね合わせ寸法Rを持って接触しないように取り付けための手間及び取付精度等を考慮すると、先端部26の厚さと溝部27の幅を加えた寸法以上に前記間隔Kをすることが好ましい。 The smaller the distance K is, the more the correction effect can be obtained. However, in consideration of the labor and mounting accuracy for mounting so that the tip portions 26, 26 on one side and the other side do not come into contact with the overlapping dimension R, the tip end is reduced. It is preferable that the interval K is equal to or larger than a dimension obtained by adding the thickness of the portion 26 and the width of the groove 27.
また、先端部26の変形例としては、図5に示すように、半径2mmの半円状先端部の中心に、ボールエンドミルにより直径1.5mmの円弧状の凹部28を形成し、この凹部28の両側にそれぞれ形成された部分により先端部26A,26Aを構成することもできる。 As a modified example of the distal end portion 26, as shown in FIG. 5, an arc-shaped concave portion 28 having a diameter of 1.5 mm is formed at the center of a semicircular distal end portion having a radius of 2 mm by a ball end mill. The tip portions 26A, 26A can also be constituted by the portions formed on both sides of the head.
前記加工装置2は、前記一側及び他側修正体21,22の少なくとも一方に超音波振動を付与する前記超音波発生装置7を備え、この例では、超音波発生装置7は上側に配置する一側修正体21に略上下方向(搬送路5Hと交差方向)の超音波振動を付与する。 The processing device 2 includes the ultrasonic generator 7 that applies ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22. In this example, the ultrasonic generator 7 is disposed on the upper side. Ultrasonic vibration is applied to the one-side correction body 21 in a substantially vertical direction (intersecting with the transport path 5H).
次に、前記加工装置2による加工方法について説明する。まず、搬送手段6によりロール1Rから引き出された金属箔シート1は、貫通孔形成装置4の搬送路4Hを搬送される間に、レーザー加工部4K,4K・・・により複数の貫通孔3が形成される(貫通孔形成工程)。 Next, a processing method by the processing device 2 will be described. First, while the metal foil sheet 1 pulled out from the roll 1R by the conveying means 6 is conveyed through the conveying path 4H of the through-hole forming device 4, a plurality of through holes 3 are formed by the laser processing portions 4K, 4K. Formed (through-hole forming step).
次の歪修正工程において、貫通孔3が形成された金属箔シート1は、歪修正装置5の搬送路5Hを搬送され、駆動ローラ12,12Aと従動ローラ13,13Aの間で、パウダークラッチ15により所定の張力を保った状態で搬送され、このように金属箔シート1に張力を付与することにより歪を矯正することができる。 In the next distortion correcting step, the metal foil sheet 1 in which the through-holes 3 are formed is transported along the transport path 5H of the distortion correcting device 5, and the powder clutch 15 is moved between the driving rollers 12, 12A and the driven rollers 13, 13A. Thus, the metal foil sheet 1 is conveyed while maintaining a predetermined tension, and the distortion can be corrected by applying the tension to the metal foil sheet 1 in this manner.
また、歪修正工程において、金属箔シート1は一側修正体21と他側修正体22の突起部23,23の間を通過し、他側修正体22には超音波発生装置7により超音波振動が付与されており、突起部23,23を通過する間に金属箔シート1の歪や皺が矯正される。この場合、一側修正体21と他側修正体22の突起部23,23は、櫛形断面形状をなし、突起部23,23の先端位置が重ね合されており、ローララベラーのように金属箔シート1に繰り返し曲げ変形を与えることにより、金属箔シート1の内部歪を均一化することができる。また、突起部23,23間を通過する際、一方の突起部23に超音波振動を付与することにより、金属箔シート1と先端部26とにおける低摩擦化効果が得られる。即ち、超音波振動を付与することにより、金属箔シート1が先端部26に密着せず、金属箔シート1が先端部26を通る際に、超音波振動により、先端部26に付いたり離れたりするように振動し、摩擦が低減する。 Further, in the distortion correcting step, the metal foil sheet 1 passes between the protrusions 23 of the one-side correcting body 21 and the projection 23 of the other-side correcting body 22, and the ultrasonic wave generator 7 applies ultrasonic waves to the other-side correcting body 22. Vibration is applied, and distortion and wrinkles of the metal foil sheet 1 are corrected while passing through the protrusions 23, 23. In this case, the protruding portions 23 of the one-side correcting body 21 and the other-side correcting body 22 have a comb-shaped cross-sectional shape, and the tip positions of the protruding portions 23, 23 are overlapped with each other. By repeatedly bending the sheet 1, the internal strain of the metal foil sheet 1 can be made uniform. In addition, when passing between the projections 23, 23, by applying ultrasonic vibration to one of the projections 23, an effect of reducing friction between the metal foil sheet 1 and the front end 26 is obtained. That is, by applying the ultrasonic vibration, the metal foil sheet 1 does not adhere to the distal end portion 26, and when the metal foil sheet 1 passes through the distal end portion 26, the metal foil sheet 1 is attached to or separated from the distal end portion 26 by the ultrasonic vibration. Vibrates, reducing friction.
以下、実験例について説明する。先端部26の半径が2mmの一側及び他側修正体21,22を試作し、加工装置2による矯正基礎実験を行った。図2に試験状況を示す。超音波発生装置7である超音波振動子に一側修正体21を接続し、他側修正体22は固定した状態とし、他側修正体22に位置を調整することにより、前記重ね合わせ寸法Rを設定した。 Hereinafter, experimental examples will be described. One-side and other-side correction bodies 21 and 22 having a tip portion 26 with a radius of 2 mm were prototyped, and a basic correction experiment using the processing apparatus 2 was performed. FIG. 2 shows the test situation. The one-side correction body 21 is connected to the ultrasonic transducer, which is the ultrasonic generator 7, the other-side correction body 22 is fixed, and the position of the other-side correction body 22 is adjusted. It was set.
[実験例1]
この実験例1では、先端部26の半径が2mmで、突起部23の幅が150mm、重ね合わせ寸法Rが3mm、超音波周波数が19.5kHz、超音波出力が出力1でホーン先端(先端部26)振動速度0.38m/s、レーザー加工エリアは、幅80mm、長さ200mmで、金属箔シート1の送り速度を1.76m/minとした。また、図3に示すように、上の一側修正体21は4箇所の突起部23を備え、下の他側修正体22は3箇所の突起部23を備える。また、銅の金属箔シート1の厚さは10μmで、レーザー加工により直径100μmの貫通孔3を複数形成し、貫通孔3の開口率を10%とした。
[Experimental example 1]
In this experimental example 1, the radius of the tip 26 is 2 mm, the width of the projection 23 is 150 mm, the overlapping dimension R is 3 mm, the ultrasonic frequency is 19.5 kHz, the ultrasonic output is 1 and the horn tip (tip). 26) The vibration speed was 0.38 m / s, the laser processing area was 80 mm in width and 200 mm in length, and the feeding speed of the metal foil sheet 1 was 1.76 m / min. As shown in FIG. 3, the upper one-side correction body 21 includes four protrusions 23, and the lower other-side correction body 22 includes three protrusions 23. Further, the thickness of the copper metal foil sheet 1 was 10 μm, a plurality of through holes 3 having a diameter of 100 μm were formed by laser processing, and the aperture ratio of the through holes 3 was set to 10%.
実験例1の結果を図6に示す。歪修正工程前の図6(A)に示すように、貫通孔3を形成した金属箔シート1は、レーザー加工による熱変形の影響でシワやひずみが発生し、一方、被髄修正工程後の図6(B)に示すように、歪修正工程により金属箔シート1の凹凸が低減させることが確認できた。図6(B)では、レーザー加工の熱ひずみに対して歪修正工程による曲げひずみによるひずみ均一化が不十分と考えられ、これには先端部26の半径の小径化が有効ではないかと考えられる。また、貫通孔3を加工した周囲のシワ部において耳波の状態の矯正効果は小さかった。これにはテンションによる矯正が必要と考えられる。 The results of Experimental Example 1 are shown in FIG. As shown in FIG. 6A before the distortion correcting step, the metal foil sheet 1 in which the through holes 3 are formed is wrinkled or distorted due to the influence of thermal deformation due to laser processing. As shown in FIG. 6B, it was confirmed that the unevenness of the metal foil sheet 1 was reduced by the distortion correcting step. In FIG. 6B, it is considered that the strain uniformity due to the bending strain in the strain correction process is insufficient for the thermal strain of the laser processing, and it is considered that reducing the radius of the tip portion 26 is effective for this. . Further, the effect of correcting the state of the ear wave was small at the wrinkles around the through-hole 3. It is considered necessary to correct the tension.
[実験例2]
上記実験例1を踏まえて、先端部26を小径化するため、上述した図5に示した先端部26Aを用いて実験例2を行った。非接触三次元測定機により、歪修正工程の前後の金属箔シート1の形状測定を行った。尚、実験例2が実験例1と相違するのは、先端部26の形状である。図7(A)(B)に歪修正工程の前後の金属箔シート1の外観をそれぞれ示す。金属箔シート1の全体の曲り、うねりがあり、基準高さを決められないため、しわの絶対高さ値を評価することはできないが図8(A)に示すように加工エリア(貫通孔3を設けたエリア)内に生じたシワ、加工エリア外に見られる耳波の凹凸は図8(A)(B)のコンター(等高線)図に示すように改善していることが見てとれる。すなわち低い方から紫→青→緑→黄→橙→赤である。これは図7(A)の歪処理工程前の写真の状態と良く対応していることが分かる。一方、図8(B)に示す歪処理工程後の状態では、加工エリアの内、外ともにコンターの色の変化がなだらかとなり、加工前に見られたシワ、耳波が除去されているのが確認できる。この実験例2では、レーザー加工によるシワ、耳波が金属箔シート1から除去された。
[Experimental example 2]
Based on Experimental Example 1 described above, Experimental Example 2 was performed using the above-described distal end portion 26A shown in FIG. 5 in order to reduce the diameter of the distal end portion 26. The shape of the metal foil sheet 1 before and after the distortion correcting step was measured by a non-contact three-dimensional measuring machine. The difference between Experimental Example 2 and Experimental Example 1 lies in the shape of the distal end portion 26. FIGS. 7A and 7B show the appearance of the metal foil sheet 1 before and after the distortion correcting step, respectively. Since the entire metal foil sheet 1 is bent or undulated and the reference height cannot be determined, the absolute height value of the wrinkle cannot be evaluated. However, as shown in FIG. It can be seen that the wrinkles generated in the area provided with) and the irregularities of the ear wave observed outside the processing area are improved as shown in the contour (contour lines) diagrams of FIGS. That is, from the lower side, purple → blue → green → yellow → orange → red. It can be seen that this corresponds well to the state of the photograph before the distortion processing step in FIG. On the other hand, in the state after the distortion processing step shown in FIG. 8B, the color of the contour changes gradually inside and outside the processing area, and wrinkles and ear waves seen before processing are removed. You can check. In Experimental Example 2, wrinkles and ear waves caused by laser processing were removed from the metal foil sheet 1.
上記の実験例等から、金属箔シート1の平坦化に寄与すると考えられるもう一つの加工条件としてテンションの付与が挙げられる。そこで、以下に説明する実験例3では、上述したように下の従動ローラ13Aの回転軸に前記パウダークラッチ15を設けた。その装置を図9に示す。それら従動ローラ13,13A間のクリアランスおよびパウダークラッチ15への加電圧調整により従動ローラ13,13Aの回転抵抗を調整することで、テンション調整を行った。 From the above experimental examples and the like, another processing condition considered to contribute to the flattening of the metal foil sheet 1 is the application of tension. Therefore, in Experimental Example 3 described below, the powder clutch 15 was provided on the rotation shaft of the lower driven roller 13A as described above. The device is shown in FIG. The clearance and applied voltage adjustment to the powder clutch 15 between those driven low la 13, 13A by adjusting the rotation resistance of the driven row La 13, 13A, were tension adjustment.
前記パウダークラッチ15による加電圧によるワーク(金属箔シート)のテンション調整の機能を確認するため、ダミーのワークとして幅60mm、厚さ9μmの電解銅箔シートを用い、曲げひずみを除去するため表裏にひずみゲージを張り付けた2ゲージ法によるテンション測定を行った。このときローラ間のクリアランスは−1.0mmとした(マイナスは従動ローラ13,13Aの押し込み量)。図10にパウダークラッチ15の加電圧(V)とひずみゲージにより測定したテンション(N)を示す。ローラ間クリアランス(−1.0)による従動ローラ13,13Aの回転抵抗により生じるテンションは54.3Nであり、パウダークラッチ15の加電圧調整により、最大74.1N程度まで付加することができる。そして、ローラ間クリアランス調整によりさらに広い範囲でテンション調整を行うことができる。 In order to confirm the function of adjusting the tension of the work (metal foil sheet) by the applied voltage by the powder clutch 15, an electrolytic copper foil sheet having a width of 60 mm and a thickness of 9 μm was used as a dummy work. Tension was measured by a two-gauge method with a strain gauge attached. In this case the clearance between rows La was -1.0 mm (minus pushing the driven roller 13,13A amount). FIG. 10 shows the applied voltage (V) of the powder clutch 15 and the tension (N) measured by a strain gauge. Tension of by row La between the clearance (-1.0) by rotational resistance of the driven roller 13,13A is 54.3N, the applied voltage adjusting powder clutch 15, can be added to a maximum of about 74.1N. Then, it is possible to perform tension adjustment in a wider range by between low la clearance adjustment.
歪修正工程における平坦化効果は先端部26の半径を小さくすることにより大きくなることを実験例2で確認した。そこで、この結果を踏まえ、先端部26の半径を0.4mmにした一側修正体21と他側修正体22を設計、製作した。図11に組み立て状態の一側修正体21と他側修正体22の外観写真を示す。 Experimental Example 2 confirmed that the flattening effect in the distortion correction step was increased by reducing the radius of the tip portion 26. Therefore, based on this result, the one-side correction body 21 and the other-side correction body 22 in which the radius of the distal end portion 26 was 0.4 mm were designed and manufactured. FIG. 11 shows an appearance photograph of the one-side correction body 21 and the other-side correction body 22 in an assembled state.
さらに、貫通孔形成工程において、レーザー加工により貫通孔3を形成した。レーザー加工においては、ナノ秒レーザーがピコ秒レーザーに比べ、加工速度が速くて有利であるが、ピコ秒レーザーに比べ、ナノ秒レーザーを用いた孔加工では、ワンショットのビームエネルギーが大きいため、加工バリが大きくなることやワーク(金属箔シート1)にヒュームが再付着することが懸念される。ヒュームの再付着を防ぐため、図1に示したように、開発しているレーザー加工部4Kにはダストの吸引装置8が設置され、この吸引装置8の吸引ノズル8Aをワークのレーザー入射側に配置し、入射側からの吸引を行う。この吸引装置8による吸引の効果を比較するため、吸引の有無におけるレーザー加工表面を観察した。また、歪修正工程後のワークの貫通孔3周りのバリをはじめ、表面状態をSEM観察により微視的に評価した。 Further, in the through hole forming step, the through holes 3 were formed by laser processing. In laser processing, nanosecond lasers are faster and more advantageous than picosecond lasers.However, compared to picosecond lasers, hole processing using nanosecond lasers has a large one-shot beam energy. There is a concern that processing burrs will increase and that fumes will re-adhere to the work (metal foil sheet 1). As shown in FIG. 1, in order to prevent fume reattachment, a dust suction device 8 is installed in the laser processing unit 4K being developed, and the suction nozzle 8A of the suction device 8 is placed on the laser incident side of the work. Arrange and suction from the entrance side. In order to compare the effect of suction by the suction device 8, the laser-processed surface with and without suction was observed. In addition, the surface state including the burr around the through hole 3 of the work after the distortion correction step was microscopically evaluated by SEM observation.
この実験例3では、図11に示すように、上の一側修正体21は8箇所の突起部23を備え、下の他側修正体22は上よりも多い9箇所の突起部23を備える。また、先端部26の半径は0.4mmで、重ね合わせ寸法Rを0.5mm、0.75mm、1.0mmとした。超音波振動レベルは重ね合わせ寸法Rが0.5mm、0.75mmの場合に出力2としたが、重ね合わせ寸法Rが1mmでは金属箔シート1が破断したため、摩擦抵抗をより低減させるため出力3に上げて加工した。尚、レーザー加工エリアは、幅20mm、長
さ120mmで、金属箔シート1の送り速度を1m/minとした。尚、超音波振動レベルは出力1ではホーン先端振動速度0.38m/s、出力2ではホーン先端振動速度0.59m/s、出力3ではホーン先端振動速度0.80m/sである。また、搬送路5Hにおける金属箔シート1を図12に示す。
In Experimental Example 3, as shown in FIG. 11, the upper one-side correction body 21 has eight protrusions 23, and the lower other-side correction body 22 has nine protrusions 23 more than the upper one. . The radius of the tip 26 was 0.4 mm, and the overlapping dimension R was 0.5 mm, 0.75 mm, and 1.0 mm. The ultrasonic vibration level was set to output 2 when the overlap size R was 0.5 mm and 0.75 mm. However, when the overlap size R was 1 mm, the metal foil sheet 1 was broken, and the output 3 was set to further reduce the frictional resistance. And processed. The laser processing area was 20 mm in width and 120 mm in length, and the feeding speed of the metal foil sheet 1 was 1 m / min. The ultrasonic vibration level at the output 1 is the horn tip vibration speed of 0.38 m / s, the output 2 is the horn tip vibration speed of 0.59 m / s, and the output 3 is the horn tip vibration speed of 0.80 m / s. FIG. 12 shows the metal foil sheet 1 in the transport path 5H.
レーザー加工時の吸引有り/無しの場合のレーザー入射側表面SEM写真を図13に示し、同出射側の写真を図14に示す。 FIG. 13 shows a SEM photograph on the laser incident side surface with / without suction during laser processing, and FIG. 14 shows a photograph on the same exit side.
図13(A)の低倍率(x50)では、貫通孔3の周辺に白く見える領域が出来ており加工時の酸化と思われる。吸引の有無で違いは見られない。また、図13(B)の1500倍の観察では、貫通孔3の周辺にレーザー加工によりバリが広がっているのが見てとれる。 At a low magnification (x50) in FIG. 13A, a region that looks white around the through-hole 3 is formed, which is considered to be oxidation during processing. No difference is seen with or without suction. 13B, it can be seen that burrs are spread around the through hole 3 by laser processing.
図14でもレーザー入射側と同様、出射側においても吸引による違いは見られない。また、出射側では入射側に見られたような貫通孔3の周辺の酸化は見られない。入射側と比較すると非常に小さいが、出射側には加工バリが見られた。 In FIG. 14, as in the case of the laser incident side, no difference due to suction is seen on the emission side. Further, on the exit side, oxidation around the through hole 3 as seen on the entrance side is not observed. Processing burrs were found on the exit side, although very small compared to the entrance side.
歪補修工程で、(1)重ね合わせ寸法Rが0.5mm、超音波の出力2の場合(図15及び図18)、(2)重ね合わせ寸法Rが0.75mm、超音波の出力2の場合(図16及び図19)、(3)重ね合わせ寸法Rが1.0mm、超音波の出力3の場合(図17及び図20)の各加工条件における金属箔シート1の表面のSEM写真を図15〜図20に示す。但し、図15〜図17は吸引装置8による吸引無しの場合、図18〜図20は吸引装置8による吸引有りの場合である。 In the distortion repairing process, (1) when the superimposition dimension R is 0.5 mm and the output of the ultrasonic wave is 2 (FIGS. 15 and 18), (2) When the superimposition dimension R is 0.75 mm and the output of the ultrasonic wave is 2 (3) An SEM photograph of the surface of the metal foil sheet 1 under each processing condition in the case where the overlapping dimension R is 1.0 mm and the ultrasonic output is 3 (FIGS. 17 and 20) is shown in FIG. These are shown in FIGS. 15 to 17 show the case without suction by the suction device 8, and FIGS. 18 to 20 show the case with suction by the suction device 8.
上記(1)〜(3)のいずれの条件においても、出射側のバリは除去された。入射側のバリは除去されず、潰れたような平坦な部分31ができている。これは先端部26との摩擦によるものと考えられる。また、重ね合わせ寸法Rが大きくなると、入射面においては酸化した白い部分に擦れたようなコントラスト32が見られ、出射面では、ワークの送り方向に表面のひずみと思われる縞状のパターンが見られた。 Under any of the conditions (1) to (3), burrs on the emission side were removed. The burr on the incident side is not removed, and a flat portion 31 as if crushed is formed. This is considered to be due to friction with the tip 26. Also, when the overlapping dimension R is increased, a contrast 32 is seen on the incident surface as if rubbed against an oxidized white portion, and a striped pattern which is considered to be a distortion of the surface in the workpiece feeding direction is seen on the exit surface. Was done.
このように本実施例では、金属箔シート1の歪を修正する歪修正装置5を備えた金属箔シート1の加工装置において、歪修正装置5は、複数の突起部23,23を間隔Kを置いて設けた一側修正体21と、この一側修正体21側に突起部23を設けた他側修正体22とを備え、一側修正体21の複数の突起部23,23の間の位置に、他側修正体22の突起部23を配置すると共に、前記一側及び他側修正体21,22の突起部23,23の先端の位置を間隔Kの交差方向において重ね合わせ、金属箔シート1に接した一側及び他側修正体21,22の少なくとも一方に超音波振動を付与する超音波発生装置7を備えるから、位置を重ね合わせた一側及び他側修正体21,22の突起部23,23の先端間において、金属箔シート1に繰り返し曲げ変形を与え、金属箔シート1の内部歪を均一化することができる。この際、少なくとも一方の突起部23に超音波振動を付与することにより、低摩擦化効果が得られる。 Thus, in this embodiment, in the processing apparatus of the metal foil sheet 1 provided with the distortion correction device 5 for correcting the distortion of the gold Shokuhaku sheet 1, strain correction device 5, the interval K a plurality of projections 23 and 23 And the other-side correction body 22 having the projection 23 on the side of the one-side correction body 21, between the plurality of protrusions 23 of the one-side correction body 21. Is arranged at the position of the other side correction body 22, and the positions of the tips of the protrusions 23, 23 of the one side and the other side correction bodies 21, 22 are overlapped with each other in the cross direction of the interval K, and metal Since the ultrasonic generator 7 for applying ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22 in contact with the foil sheet 1 is provided, the one-side and the other-side correction bodies 21 and 22 whose positions are overlapped with each other are provided. Between the tips of the projections 23, 23 of the metal foil sheet 1 Bending given deformation, it is possible to equalize the internal strain of the metal foil sheet 1. At this time, by applying ultrasonic vibration to at least one of the protrusions 23, an effect of reducing friction can be obtained.
このように本実施例では、請求項1に対応して、貫通孔3が複数設けられた金属箔シート1の加工装置において、金属箔シート1に貫通孔3を形成する貫通孔形成装置4と、貫通孔形成装置4により貫通孔3が複数設けられた金属箔シート1の歪を修正する歪修正装置5と、歪修正装置5の搬送路5Hに沿って金属箔シート1を搬送する搬送手段6と、を備え、歪修正装置5は、搬送路5H側に設けた複数の突起部23,23を搬送路5Hの搬送方向に間隔を置くと共に突起部23,23の間に溝部27を設けた一側修正体21と、搬送路5H側に複数の突起部23,23を搬送方向に間隔を置くと共に突起部23,23の間に溝部27を設けた他側修正体22とを搬送路5Hを挟んで配置し、一側及び他側修正体21,22の突起部23の先端を湾曲状に形成し、一側修正体21の複数の突起部23,23の間の位置に、他側修正体22の突起部23を配置すると共に、一側及び他側修正体21,22の突起部23,23の先端の位置を搬送路5Hの交差方向において重ね合わせ、一側修正体21の複数の溝部27,27に他側修正体22の突起部23の先端が一側修正体21の突起部23と非接触状態で配置され、一側及び他側修正体21,22の少なくとも一方に超音波振動を付与して一側及び他側修正体21,22の少なくとも一方の複数の突起部23,23に超音波振動を付与する超音波発生装置7を備えるから、レーザー加工により効率よく貫通孔3を形成し、その際、金属箔シート1に歪が生じるが、この歪が生じた金属箔シート1を、位置を重ね合わせた一側及び他側修正体21,22の突起部23,23の先端間を通過させることにより、金属箔シート1に繰り返し曲げ変形を与え、金属箔シート1の内部歪を均一化することができる。この際、少なくとも一方の突起部23に超音波振動を付与することにより、低摩擦化効果が得られる。 As described above, according to the present embodiment, in the processing apparatus for the metal foil sheet 1 provided with the plurality of through holes 3, the through hole forming apparatus 4 for forming the through holes 3 in the metal foil sheet 1 corresponds to claim 1. A distortion correcting device 5 for correcting a distortion of the metal foil sheet 1 provided with a plurality of through holes 3 by the through hole forming device 4, and a conveying means for conveying the metal foil sheet 1 along a conveying path 5H of the distortion correcting device 5. 6, includes a distortion correction device 5, a groove 27 between the projections 23 and 23 apart with location rather in the conveying direction of the conveying path 5H a plurality of protrusions 23 and 23 provided in the conveyance path 5H side The one-side correction body 21 provided and the other-side correction body 22 provided with a plurality of protrusions 23 on the side of the transfer path 5H in the transfer direction and having a groove 27 between the protrusions 23 are transferred. The road 5H is interposed therebetween, and the protrusions 23 of the one-side and the other-side correction bodies 21 and 22 are The tip is formed in a curved shape, and the projection 23 of the other-side correction body 22 is arranged at a position between the plurality of projections 23 of the one-side correction body 21. The positions of the tips of the projections 23, 23 are overlapped in the crossing direction of the transport path 5H, and the tips of the projections 23 of the other side correction body 22 are corrected to the plurality of grooves 27, 27 of the one side correction body 21 by one side. A plurality of at least one of the one-side and the other-side correction bodies 21 and 22 is arranged by disposing the ultrasonic vibration to at least one of the one-side and the other-side correction bodies 21 and 22 while being arranged in a non-contact state with the projection 23 of the body 21. Is provided with the ultrasonic generator 7 for applying ultrasonic vibration to the projections 23, 23, so that the through holes 3 are efficiently formed by laser processing. At this time, the metal foil sheet 1 is distorted. The resulting metal foil sheet 1 is placed on one side where By passing between the tip of the projection portions 23, 23 of the side modification 21, 22, give repeated bending deformation to the metal foil sheet 1, it is possible to equalize the internal strain of the metal foil sheet 1. At this time, by applying ultrasonic vibration to at least one of the protrusions 23, an effect of reducing friction can be obtained.
このように本実施例では、請求項1に対応して、突起部23の先端を湾曲状に形成したから、金属箔シート1と突起部23の摩擦を軽減できる。 Thus, in this embodiment, corresponding to claim 1, since the formation of the tip of the projection portion 23 in a curved shape, it is possible to reduce the friction of the metal foil sheet 1 and the projection 23.
このように本実施例では、請求項1に対応して、他側修正体22に突起部23を複数設けたから、複数の突起部23を備えることにより、効率よく金属箔シート1に繰り返し曲げ変形を与えることができる。 Thus, in this embodiment, corresponding to claim 1, because provided with a plurality of projections 23 on the other side fixes body 22, by providing a plurality of protrusions 23, effectively repeating the metal foil sheet 1 bending deformation Can be given.
このように本実施例では、請求項2に対応して、歪修正装置5の搬送路5Hにおいて金属箔シート1に張力を付与する張力付与手段たるパウダークラッチ15を備えるから、テンションを付与することにより金属箔シート1を矯正することができる。 Thus, in this embodiment, corresponding to claim 2, because provided with tensioning means serving powder clutch 15 applying tension in the conveying path 5H distortion correction device 5 in the metal foil sheet 1, applying a tension Thereby, the metal foil sheet 1 can be corrected.
このように本実施例では、金属箔シートの歪を歪修正装置5により修正する歪修正工程を備えた金属箔シートの加工方法において、歪修正装置5は、複数の突起部23,23を間隔Kを置いて設けた一側修正体21と、この一側修正体21側に突起部23を設けた他側修正体22とを備え、一側修正体21の複数の突起部23,23の間の位置に、他側修正体22の突起部23を配置すると共に、前記一側及び他側修正体21,22の突起部23,23の先端の位置を間隔Kの交差方向において重ね合わせ、前記金属箔シート1に接した前記一側及び他側修正体21,22の少なくとも一方に超音波振動を付与するから、金属箔シート1に繰り返し曲げ変形を与え、金属箔シート1の内部歪を均一化することができ、この際、少なくとも一方の突起部23に超音波振動を付与することにより、低摩擦化効果が得られる。 Thus, in this embodiment, in the processing method of the metal foil sheet with a strain correction step of correcting the distortion correction device 5 strain of gold Shokuhaku sheet distortion correction device 5, a plurality of projections 23 and 23 A plurality of projections 23 of the one-sided correction body 21 are provided with a one-sided correction body 21 provided with an interval K and a second-sided correction body 22 provided with a projection 23 on the one-sided correction body 21 side. The protrusion 23 of the other-side correction body 22 is arranged at a position between them, and the positions of the tips of the protrusions 23, 23 of the one-side and the other-side correction bodies 21 and 22 are overlapped in the cross direction of the interval K. Since ultrasonic vibration is applied to at least one of the one-side and other-side correction bodies 21 and 22 in contact with the metal foil sheet 1, the metal foil sheet 1 is repeatedly bent and deformed, and the internal distortion of the metal foil sheet 1 is increased. Can be made uniform, and at least one By applying ultrasonic vibration to the protrusion 23, the low-friction effect.
このように本実施例では、請求項3に対応して、貫通孔3が複数設けられた金属箔シート1の加工方法において、金属箔シート1に貫通孔3を形成する貫通孔形成工程と、貫通孔3が複数形成された金属箔シート1が搬送路5Hを搬送中に該金属箔シート1の歪を歪修正装置5により修正する歪修正工程と、を備え、歪修正装置5は、搬送路5H側に設けた複数の突起部23,23を搬送路5Hの搬送方向に間隔を置くと共に突起部23,23の間に溝部27を設けた一側修正体21と、搬送路5H側に複数の突起部23,23を搬送方向に間隔を置くと共に突起部23,23の間に溝部27を設けた他側修正体22とを搬送路5Hを挟んで配置し、一側及び他側修正体21,22の突起部23の先端を湾曲状に形成し、一側修正体21の複数の突起部23,23の間の位置に、他側修正体22の突起部23を配置すると共に、一側及び他側修正体21,22の突起部23,23の先端の位置を搬送路5Hの交差方向において重ね合わせ、一側修正体21の複数の溝部27,27に他側修正体22の突起部23の先端が一側修正体21の突起部23と非接触状態で配置され、金属箔シート1の搬送中に一側及び他側修正体21,22の少なくとも一方に超音波振動を付与して一側及び他側修正体21,22の少なくとも一方の複数の突起部23,23に超音波振動を付与するから、金属箔シート1に繰り返し曲げ変形を与え、金属箔シート1の内部歪を均一化することができ、この際、少なくとも一方の突起部23に超音波振動を付与することにより、低摩擦化効果が得られる。 Thus, in this embodiment, in accordance with claim 3 , in the method for processing the metal foil sheet 1 provided with the plurality of through holes 3, a through hole forming step of forming the through holes 3 in the metal foil sheet 1; A distortion correcting step of correcting the distortion of the metal foil sheet 1 by the distortion correcting device 5 while the metal foil sheet 1 in which the plurality of through holes 3 are formed is being transported in the transport path 5H. a plurality of protrusions 23 and 23 on one side fixes body 21 provided with a groove 27 between the projections 23 and 23 apart with location rather in the conveying direction of the conveying path 5H a provided on the road 5H side, the transport path 5H side A plurality of projections 23 , 23 are spaced apart in the transport direction, and another correction body 22 having a groove 27 provided between the projections 23 , 23 is disposed with the transport path 5H interposed therebetween, and one side and the other side. The tips of the protrusions 23 of the correction bodies 21 and 22 are formed in a curved shape, and The projections 23 of the other-side correction body 22 are arranged at positions between the projections 23, 23, and the positions of the tips of the projections 23, 23 of the one-side and the other-side correction bodies 21 and 22 are determined on the transport path. 5H, the tips of the protrusions 23 of the other-side correction body 22 are arranged in the plurality of grooves 27, 27 of the one-side correction body 21 in a non-contact state with the protrusions 23 of the one-side correction body 21; While the metal foil sheet 1 is being conveyed, ultrasonic vibration is applied to at least one of the one-side and other-side correction bodies 21 and 22 to form a plurality of protrusions 23 on at least one of the one-side and other-side correction bodies 21 and 22. Since the ultrasonic vibration is applied to the metal foil sheet 1, the metal foil sheet 1 can be repeatedly bent and deformed, and the internal strain of the metal foil sheet 1 can be made uniform. At this time, the ultrasonic vibration is applied to at least one of the protrusions 23. By doing so, a low friction effect can be obtained.
実施例上の効果として、搬送中の金属箔シート1に張力を付与する張力付与手段たるパウダークラッチ15を備えるから、搬送中の金属箔シート1に張力を付与することにより歪を矯正することができる。また、突起部23は、基端部24から先端側向かって細くなる部分であるテーパー部25を設け、このテーパー部25の先端に先端部26を設けたから、先端部26の半径を小さくしても、基端部24を厚くできるから、突起部23の強度を確保することができる。さらに、貫通孔形成装置4はレーザー加工により貫通孔3を形成するものであるから、パンチングやエッジングなどに比べて、貫通孔3の加工速度を上げることでき、効率よく貫通孔3を形成することができ、特にナノ秒レーザーを使用することにより、貫通孔3の加工を速く行うことができる。また、今回の実験では、厚さが約10μmの銅製金属箔シート1に対して、重ね合わせ寸法Rが0.5〜3.0mm、先端部26の半径が0.4〜2.0mmのもので、矯正効果が確認されたが、重ね合わせ寸法Rと先端部26の半径寸法の条件を設定すると共に、金属箔シート1の送り速度、付与する張力、超音波の出力などを適宜設定することにより、10μm未満及び10μmを超える厚さの金属箔シートの加工に適用できることは言うまでもない。 As an effect on the embodiment, since the powder clutch 15 is provided as tension applying means for applying tension to the metal foil sheet 1 being conveyed, it is possible to correct distortion by applying tension to the metal foil sheet 1 being conveyed. it can. Further, the projection 23 has a tapered portion 25 which is a portion that becomes narrower from the base end 24 toward the distal end, and the distal end 26 is provided at the distal end of the tapered portion 25. Therefore, the radius of the distal end 26 is reduced. Also, since the base end 24 can be made thicker, the strength of the projection 23 can be ensured. Further, since the through-hole forming device 4 forms the through-hole 3 by laser processing, the processing speed of the through-hole 3 can be increased as compared with punching or edging, and the through-hole 3 can be formed efficiently. In particular, by using a nanosecond laser, the processing of the through hole 3 can be performed quickly. Also, in this experiment, a copper metal foil sheet 1 having a thickness of about 10 μm has an overlapping dimension R of 0.5 to 3.0 mm and a radius of the tip portion 26 of 0.4 to 2.0 mm. Although the correction effect was confirmed, the conditions of the overlapping dimension R and the radius dimension of the tip portion 26 were set, and the feed speed of the metal foil sheet 1, the applied tension, the output of the ultrasonic wave, and the like were appropriately set. Accordingly, it is needless to say that the method can be applied to the processing of a metal foil sheet having a thickness of less than 10 μm and more than 10 μm.
尚、本発明は、前記実施例に限定されるものではなく、種々の変形実施が可能である。例えば、一側と他側修正体の突起部の数はどちらが多くてもよい。また、実施例では、突起部を全て同じ構成としたが、一側と他側修正体で突起部や先端部の大きさを変え、適宜組み合わせてもよい。また、実施例では、金属箔シートを横方向に搬送したが、金属箔シートを上下方向に搬送しながら歪修正工程を行ってもよく、この場合は、突起部を横向きに配置すればよい。さらに、貫通孔形成装置及び貫通孔形成工程を従来例のものを用いてもよく、例えば、貫通孔形成装置は、実施例で示したレーザー加工によるもの以外でも、パンチング(特許文献2)やエッジング(特許文献1)などにより貫通孔を形成するものを用いてもよく、特に、金属箔シートを搬送しながら貫通孔を連続して形成できる装置を用いることが好ましい。また、実施例では、銅製の金属箔を例に説明したが、他の金属製のものにも適用可能である。さらに、本発明は、圧延銅の金属箔シートに好適であるが、実験例で示したように、電解銅箔シートにも適用可能である。また、実施例では、金属箔シートを連続搬送しながら歪修正装置により歪を修正するように構成したが、断続的に搬送しても良いし、或いは歪処理装置に金属箔シートをセットし、歪を修正した後、金属箔シートを歪処理装置から取り外すといったバッチ処理を行ってもよい。 The present invention is not limited to the above embodiment, and various modifications can be made. For example, the number of protrusions on the one side and the other side correction body may be larger. Further, in the embodiment, all the protrusions have the same configuration. However, the sizes of the protrusions and the tip portions of the one side and the other side correction body may be changed and appropriately combined. In the embodiment, the metal foil sheet is transported in the horizontal direction. However, the distortion correction step may be performed while the metal foil sheet is transported in the vertical direction. In this case, the protrusions may be arranged in the horizontal direction. Further, the through-hole forming apparatus and the through-hole forming step may be those of a conventional example. For example, the through-hole forming apparatus may be formed by punching (Patent Document 2) or edging other than the laser processing shown in the embodiment. A device that forms a through hole according to (Patent Document 1) or the like may be used. In particular, it is preferable to use an apparatus that can continuously form a through hole while transporting a metal foil sheet. Further, although the embodiment has been described with reference to the metal foil made of copper as an example, the present invention is also applicable to other metal foils. Further, the present invention is suitable for a rolled copper metal foil sheet, but is also applicable to an electrolytic copper foil sheet as shown in the experimental examples. Further, in the embodiment, the metal foil sheet is configured to correct the distortion by the distortion correcting device while being continuously conveyed, but may be intermittently conveyed, or the metal foil sheet is set in the distortion processing device, After correcting the distortion, a batch process of removing the metal foil sheet from the distortion processing device may be performed.
1 金属箔シート
2 加工装置
3 貫通孔
4 貫通孔成形装置
4K レーザー加工部
5 歪修正装置
5H 搬送路
6 搬送手段
7 超音波発生装置
15 パウダークラッチ(張力付与手段)
21 一側修正体
22 他側修正体
23 突起部
26 先端部
27 溝部
K 間隔
R 重ね合わせ寸法
REFERENCE SIGNS LIST 1 metal foil sheet 2 processing device 3 through hole 4 through hole forming device 4K laser processing unit 5 distortion correcting device 5H transport path 6 transport means 7 ultrasonic generator 15 powder clutch (tension applying means)
21 One-side correction body 22 Other-side correction body 23 Projection 26 Tip
27 Groove K Spacing R Overlap dimension
Claims (3)
前記金属箔シートに前記貫通孔を形成する貫通孔形成装置と、
前記貫通孔形成装置により前記貫通孔が複数設けられた金属箔シートの歪を修正する歪修正装置と、
前記歪修正装置の搬送路に沿って前記金属箔シートを搬送する搬送手段と、
を備え、
前記歪修正装置は、前記搬送路側に設けた複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた一側修正体と、前記搬送路側に複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた他側修正体とを前記搬送路を挟んで配置し、
前記一側及び他側修正体の突起部の先端を湾曲状に形成し、
前記一側修正体の前記複数の突起部の間の位置に、前記他側修正体の前記突起部を配置すると共に、前記一側及び他側修正体の前記突起部の先端の位置を前記搬送路の交差方向において重ね合わせ、前記一側修正体の複数の溝部に前記他側修正体の前記突起部の先端が前記一側修正体の前記突起部と非接触状態で配置され、
前記一側及び他側修正体の少なくとも一方に超音波振動を付与して前記一側及び他側修正体の少なくとも一方の前記複数の突起部に超音波振動を付与する超音波発生装置を備えることを特徴とする金属箔シートの加工装置。 In a metal foil sheet processing apparatus provided with a plurality of through holes,
A through-hole forming apparatus for forming the through-hole in the metal foil sheet,
A distortion correcting device that corrects the distortion of the metal foil sheet provided with a plurality of the through holes by the through hole forming device,
Transport means for transporting the metal foil sheet along a transport path of the distortion correction device,
With
The distortion correction device comprises a first side fixes body provided with grooves between the protrusions apart with location rather in the conveying direction of the plurality of the conveying path a protrusion provided on the conveying path, a plurality in the conveying path The protrusions are spaced in the conveyance direction of the conveyance path and the other-side correction body provided with a groove between the protrusions is disposed with the conveyance path interposed therebetween,
The tip of the protrusion of the one side and the other side correction body is formed in a curved shape,
At the position between the plurality of protrusions of the one-side correction body, the protrusion of the other-side correction body is arranged, and the position of the tip of the protrusion of the one-side and the other-side correction body is transferred to the position. Superimposed in the direction of intersection of the road, the tip of the protrusion of the other-side correction body is disposed in a plurality of grooves of the one-side correction body in a non-contact state with the protrusion of the one-side correction body,
An ultrasonic generator that applies ultrasonic vibration to at least one of the one-side and the other-side correction body and applies ultrasonic vibration to at least one of the plurality of protrusions of the one-side and the other-side correction body is provided. A metal foil sheet processing apparatus characterized by the above-mentioned.
前記金属箔シートに前記貫通孔を形成する貫通孔形成工程と、
前記貫通孔が複数形成された金属箔シートが搬送路を搬送中に該金属箔シートの歪を歪修正装置により修正する歪修正工程と、
を備え、
前記歪修正装置は、前記搬送路側に設けた複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた一側修正体と、前記搬送路側に複数の突起部を前記搬送路の搬送方向に間隔を置くと共に前記突起部の間に溝部を設けた他側修正体とを前記搬送路を挟んで配置し、前記一側及び他側修正体の突起部の先端を湾曲状に形成し、前記一側修正体の前記複数の突起部の間の位置に、前記他側修正体の前記突起部を配置すると共に、前記一側及び他側修正体の前記突起部の先端の位置を前記搬送路の交差方向において重ね合わせ、前記一側修正体の複数の溝部に前記他側修正体の前記突起部の先端が前記一側修正体の前記突起部と非接触状態で配置され、
前記金属箔シートの搬送中に前記一側及び他側修正体の少なくとも一方に超音波振動を付与して前記一側及び他側修正体の少なくとも一方の前記複数の突起部に超音波振動を付与することを特徴とする金属箔シートの加工方法。 In a method for processing a metal foil sheet provided with a plurality of through holes,
A through-hole forming step of forming the through-hole in the metal foil sheet,
A distortion correction step of correcting the distortion of the metal foil sheet by a distortion correction device while the metal foil sheet in which the plurality of through holes are formed is transported on the transport path,
With
The distortion correction device comprises a first side fixes body provided with grooves between the protrusions apart with location rather in the conveying direction of the plurality of the conveying path a protrusion provided on the conveying path, a plurality in the conveying path The protrusions of the one-side and the other-side correction bodies are arranged so that the protrusions of the one-side and the other-side correction bodies are spaced from each other in the conveyance direction of the conveyance path, and the other-side correction body provided with a groove between the protrusions with the conveyance path interposed therebetween. The tip of the portion is formed in a curved shape, and at the position between the plurality of protrusions of the one-side correction body, the protrusion of the other-side correction body is arranged, and the one-side and the other-side correction body The position of the tip of the protrusion is overlapped in the cross direction of the transport path, and the tips of the protrusions of the other-side correction body are aligned with the protrusions of the one-side correction body in a plurality of grooves of the one-side correction body. Placed in a non-contact state,
Applying ultrasonic vibration to at least one of the one side and the other side correction body during the transfer of the metal foil sheet and applying ultrasonic vibration to at least one of the plurality of protrusions of the one side and the other side correction body. A method for processing a metal foil sheet.
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