JP6631937B2 - Light irradiation device with microwave electrodeless lamp - Google Patents

Description

  The present invention relates to a light irradiation device equipped with a microwave electrodeless lamp.

  In recent years, a microwave electrodeless lamp has been developed as a discharge lamp that emits visible light or ultraviolet light. A lighting device using a microwave electrodeless lamp typically includes a system including a power supply unit, an irradiation unit incorporating the electrodeless lamp, and a cooling air supply mechanism (cooling blower) for cooling the electrodeless lamp. It is.

  The discharge tube is filled with a luminescent substance and a rare gas for starting. By appropriately selecting a light emitting substance, visible light or ultraviolet light having a desired wavelength can be obtained. Ultraviolet light having a wavelength of 254 nm is mainly used for sterilization, and ultraviolet light having a wavelength of 315 to 400 nm (UV-A region) is mainly used for curing paints, resins, and the like.

Actual Kaihei 03-013699 JP2009-032515 JP 2009-289527 JP2009-032879 JP 2009-070809

  In an electrodeless discharge lamp that generates ultraviolet rays in the UV-A region, conventionally, mercury has been used as a luminescent material. However, in recent years, mercury has been stopped as an environmentally hazardous substance.

  The problems arising from mercury-free electrodeless discharge lamps are that the startability of the lamp deteriorates, the lamp temperature rises hardly after the lamp starts, and the illuminance rises slowly.In rare cases, the discharge continues without increasing the illuminance. It is mentioned.

  In addition, it has been pointed out that a problem with the conventional electrodeless discharge lamp is that the lamp output fluctuates due to fluctuations in the primary voltage supplied to the power supply unit of the lighting device, and the output is not stable. Particularly, in the case of a lamp for curing a resin used in a manufacturing process of a semiconductor or a liquid crystal panel, the required accuracy of the lamp output is very strict. Therefore, development of a lighting device that stably emits ultraviolet light in the UV-A region is desired.

  The present invention provides a light irradiation device equipped with a microwave electrodeless lamp having good starting characteristics and capable of stably emitting ultraviolet rays in the UV-A region with a predetermined output accuracy without using mercury as a luminescent substance. It is intended to provide a device.

  A light irradiation device equipped with a microwave electrodeless lamp according to the present invention includes, on one side, a power supply unit, an irradiation unit having a mercury-free microwave electrodeless lamp, and a cooling air supply mechanism for cooling the microwave electrodeless lamp. A light irradiating device equipped with a microwave electrodeless lamp having: a starting aid unit using a xenon lamp, and when lit, the xenon lamp is attached to the microwave electrodeless lamp once every few seconds. In contrast, pulse irradiation is performed.

  Further, in the light irradiation device equipped with the microwave electrodeless lamp, during the lighting stage, there is provided a cooling air suppressing means for suppressing a flow rate of cooling air sent from the cooling air supply mechanism to the irradiation unit at a predetermined rate. May be.

  Further, in the light irradiation device equipped with the microwave electrodeless lamp, the cooling air suppressing means has a cooling blower, and the blower operates at 30% to 90% of the rated air flow during the air flow suppressing period of the operation period. May be performed.

  Further, in the light irradiation apparatus equipped with the microwave electrodeless lamp, further, a magnetron that supplies microwave energy to the electrodeless lamp, a unit that monitors an anode current of the magnetron, and a power supply to the magnetron. Means for controlling the power supply, wherein the means for controlling the power supply controls the power supply to the magnetron based on the anode current to control the output fluctuation of the microwave electrodeless lamp within a predetermined range. You may.

  Further, in the light irradiation apparatus equipped with the microwave electrodeless lamp, the means for controlling power supply to the magnetron calculates output power Pw from the anode current Ia of the magnetron by the following equation, and based on the calculated output power Pw The power supply to the magnetron may be controlled.

Pm (kW) = k · Ia (mA) -b
Here, k is a proportional constant and b is a constant.

  ADVANTAGE OF THE INVENTION According to this invention, without using mercury as a luminescent material, it has a good starting property and is equipped with a microwave electrodeless lamp capable of stably emitting ultraviolet rays in the UV-A region with a predetermined output accuracy. A light irradiation device can be provided.

FIG. 1A is a schematic perspective view showing an example of a light irradiation device equipped with a microwave electrodeless lamp according to the present embodiment. FIG. 1B is a diagram illustrating an irradiation unit of the light irradiation device equipped with the microwave electrodeless lamp shown in FIG. 1A. FIG. 2 is a functional block diagram of the light irradiation device equipped with the microwave electrodeless lamp shown in FIG. 1A. FIG. 3A is an operation flowchart of a lamp starting lighting stage in the operation of the light irradiation device equipped with the microwave electrodeless lamp shown in FIG. 1A. FIG. 3B is an operation flow chart of a steady stable lighting stage and a turning-off stage following the lamp starting lighting stage of FIG. 3A. FIG. 4 illustrates an operation time chart of each operation element of the light irradiation device equipped with the microwave electrodeless lamp and a corresponding air flow transition and lamp light transition corresponding to the operation flows shown in FIGS. 3A and 3B. FIG. FIG. 5 is a diagram showing an example of a spectral spectrum when a xenon lamp used as a starting auxiliary light source in the light irradiation device equipped with the microwave electrodeless lamp shown in FIG. 1A emits pulsed light at a lighting energy of 6.3 J. FIG. 6 is a graph showing the correlation between the anode current and the output power of the magnetron used in the light irradiation device equipped with the microwave electrodeless lamp shown in FIG. 1A.

  Hereinafter, embodiments of a light irradiation device equipped with a microwave electrodeless lamp according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same elements will be denoted by the same reference symbols, without redundant description.

[Light irradiation device with microwave electrodeless lamp]
(Configuration of light irradiation device)
FIG. 1A is a schematic perspective view showing an example of a light irradiation device equipped with a microwave electrodeless lamp according to the present embodiment. The light irradiation device 10 equipped with a microwave electrodeless lamp includes a power supply unit 2, an irradiation unit 4, and a cooling air supply mechanism (cooling blower for cooling heat generated by the irradiation unit. Here, only a blower air duct is shown. And 6).

  FIG. 1B is a diagram illustrating the irradiation unit 4 of the light irradiation device 10 equipped with the microwave electrodeless lamp shown in FIG. 1A. The irradiation unit 4 is provided with a microwave oscillator 4a (see the magnetron 4a shown in FIG. 2) inside the rear side of the rectangular casing 12. The irradiation unit 4 further includes an antenna 16 attached to the microwave oscillator, an electrodeless lamp 18 that emits light by receiving microwave energy from the antenna, and an illumination unit 4 arranged along the lamp axis so as to surround the back side of the electrodeless lamp. Reflecting mirror 20. The space surrounded by the reflector 20 forms a microwave cavity 22, in which the electrodeless lamp 18 is arranged.

  In the present embodiment, a magnetron 4a (see FIG. 2) is used as a microwave oscillator. The magnetron 4a is a type of vacuum tube for oscillation, and generates a strong non-coherent microwave. Magnetrons are commonly used in radar and microwave ovens. In the present embodiment, a magnetron used for a microwave oven, preferably a commercial microwave oven, can be used. Note that the microwave oven uses a frequency of 2.45 GHz, but this is not due to technical limitations but due to legal regulations.

  The microwave generated from the microwave oscillator (magnetron 4a) is radiated to the microwave cavity 22 via the antenna 16 to form a standing wave. The plasma is excited inside the electrodeless lamp 18 disposed in the microwave cavity 22 by the standing wave. Visible light or ultraviolet light emitted from the plasma is reflected by the reflecting mirror 20 or directly goes to the light emission port 23 as irradiation light.

  The light exit 23 is covered with a conductive mesh (not shown). The conductive mesh is opaque to microwaves, but is permeable to radiation from the microwave cavity, ie, visible light and ultraviolet light. Therefore, visible light or ultraviolet light emitted from the plasma passes through the conductive mesh of the light emission port 23 and is emitted toward the surface to be irradiated.

(Functional block of light irradiation device)
FIG. 2 is a functional block diagram of the light irradiation device 10 equipped with the microwave electrodeless lamp shown in FIG. 1A. The light irradiation device 10 equipped with a microwave electrodeless lamp includes a power supply unit 2, an irradiation unit 4 having an electrodeless lamp 18, and a cooling air supply mechanism (cooling blower) 6 for cooling the electrodeless lamp which becomes high in temperature. ing.

The power supply unit 2 includes a power supply unit 2 a for generating a secondary voltage used by the lighting device from a primary voltage (not shown), and a main control for controlling operations of respective components of the irradiation unit 4 and the cooling blower 6. 2b. The main control unit 2b typically includes a sequencer. However, it is not limited to this. For example, the main controller 2b may be configured using a microcomputer.
The power supply unit 2a includes a temperature sensor 2c, and monitors the temperature of the power supply unit.

  The irradiation unit 4 includes an electrodeless lamp 18, a magnetron 4 a for supplying microwave energy to the electrodeless lamp via the antenna 16, a starting auxiliary light source 4 c for improving the starting characteristics of the electrodeless lamp 18, And a starting auxiliary light source lighting circuit 4b for supplying energy 44. Further, the irradiation unit 4 detects a temperature sensor 46 for detecting the temperature of the magnetron 4a, a light amount sensor 48 for detecting a light amount of the electrodeless lamp 18, and a flow rate of cooling air sent from the cooling blower 6 to the irradiation unit 4. It has an air volume sensor 50 and an RF (high frequency) leak sensor 30 for detecting electromagnetic waves leaking from the irradiation unit 4 to the outside.

The light quantity sensor 48 is installed inside the irradiation unit 4 and outputs an analog voltage according to the detected light quantity. As the light amount sensor 48, for example, a Si photodiode model number S1133 manufactured by Hamamatsu Photonics KK can be used. The air volume sensor 50 is a low pressure switch that has two intake ports, a high pressure side and a low pressure side, and detects a pressure difference between the two. That is, the amount of cooling air is monitored by the pressure difference between the inside and outside of the housing of the irradiation unit 4. For example, MAMOCO Precision Switches ultra-low pressure switch model number MAM005-27 can be used. The temperature sensor 46 may be a general-purpose bimetal thermostat, and is attached to the surface of the magnetron 4a to monitor the temperature. When the temperature of the temperature sensor 46 reaches, for example, 100 ° C. or higher, the contacts are opened, and the abnormality detection signal 36 is issued to the main control unit 2b. The RF leak sensor 30 is a safety device of the system, and is installed near the housing of the irradiation unit 4 and detects a leak microwave having a certain threshold value (for example, 2.0 [mW / cm ² ]) or more. Is opened, and issues an abnormality detection signal 32 to the main control unit 2b.

  The temperature sensor 2c of the power supply unit 2 monitors the temperature of the power supply unit. The temperature sensor 2c may be a general-purpose bimetal thermostat. The contact is opened when the power supply unit 2a is overheated, and the temperature sensor 2c issues an abnormality detection signal 42 to the main control unit 2b.

    The cooling blower (cooling air supply mechanism) 6 sends cooling air to the irradiation unit 4 to cool various components.

(Operation of light irradiation device)
Next, the operation of the light irradiation device 10 equipped with the microwave electrodeless lamp shown in FIG. 1A will be described. 3A and 3B are operation flowcharts of the light irradiation device 10 equipped with the microwave electrodeless lamp. FIG. 3A is an operation flowchart of the lamp start lighting stage, and FIG. 3B is an operation flowchart of the subsequent stable lighting control stage and the extinguishing stage. The operation will be described with reference to the operation flow charts of 3A and 3B while confirming the configuration of the light irradiation device equipped with the microwave electrodeless lamp shown in FIG.

  In step S01, the power supply is turned on by operating a touch panel type operation panel (not shown) of the power supply unit 2. The power supply 24 from the power supply unit 2 to the irradiation unit 4 and the cooling blower 6 is started.

  In step S02, the touch panel operation panel is operated to enter the standby mode. Preheating of the magnetron 4a of the irradiation unit 4 is started, and the cooling fan of the cooling blower 6 is started.

  In step S03, after a lapse of a predetermined time from the start of the standby mode (for example, after Tsec), it is determined whether each of the sensors 2c, 30, 46, 48, and 50 is operating normally. If any of the sensors is malfunctioning, an error is displayed on the display panel (not shown) of the power supply unit, and the process returns to step S02. If all the sensors are operating normally, the process proceeds to step S04.

  In step S04, the touch panel type operation panel of the power supply unit 2 is operated to turn on the lamp. In response, the magnetron 4a starts oscillating at, for example, 2.45 GHz.

  In step S05, the lamp cooling air directed from the cooling blower 6 to the irradiation unit 4 is suppressed. That is, by suppressing the cooling air for a certain period at the time of starting the lamp, the temperature rise of the lamp is promoted, and the luminescent material in the lamp is evaporated. If this air volume control is not performed, the luminescent material in the lamp may not evaporate sufficiently, and the lamp may continue to be lit with insufficient light quantity. The airflow suppression level is suppressed to a level that does not cause a problem in cooling the device (for example, about 60% of the rated airflow). Except during start-up, the air volume is not suppressed during rated lighting. The cooling air suppressing means (step S05) solves the problem that the lamp temperature at the start due to mercury-free lamp hardly rises.

  In step S06, the starting auxiliary light source 4c is turned on. More specifically, a starting auxiliary light source (for example, a xenon lamp) 4c that has received the energy supply 44 from the starting auxiliary light source lighting circuit 4b irradiates the electrodeless lamp 18 with a flash at a predetermined lighting cycle, and discharges the lamp. Assists starting.

  The lighting condition of the xenon lamp is, for example, flash irradiation with a lighting cycle every 6 seconds (charge time 5 seconds, 300 μs irradiation). Repeat the flash exposure until the lamp starts. It was found that an energy supply 44 in the range of 0.7-6.3 J improved lamp starting. FIG. 5 is a diagram showing a spectrum of the xenon lamp 18 when the energy supply 44 is 6.3 J.

  In step S07, the light intensity sensor 48 determines whether the electrodeless lamp 18 has started. If the engine has not been started yet, it is determined in step S08 whether or not the number of times that the auxiliary light source has been turned on is equal to or more than a predetermined number (for example, 10 or more). . If the number of times is equal to or more than the predetermined number, an error is displayed on the display unit of the power supply unit, the cause is investigated, and a countermeasure is taken. If the engine has started, the process proceeds to step S09.

  The start assisting means (steps S06 to S08) solves the problem of deterioration of lamp startability at the time of start due to mercury-free lamp.

  In step S09, it is determined whether or not the electrodeless lamp 18 has started. Specifically, the light quantity sensor 48 sends the detected light quantity corresponding signal 34 to the main control unit 2b of the power supply unit 2. In the main controller 2b, when the detected light amount is equal to or more than a predetermined threshold value (for example, 80% of the rated light amount) by the sequence control (or the microcomputer control), it is determined that the lamp has started. If not, an error is displayed on the display panel of the power supply unit, and the process returns to step S02 to shift to the standby mode. If it has risen, the process proceeds to step S10.

  In step S10, the suppression of the amount of cooling air performed in step S05 is released. Up to this stage is the start lighting stage of the lamp.

Steps S11 to S13 shown in FIG. 3B are a stable lighting control stage.
In step S11, it is determined whether the output of the magnetron 4a is appropriate. That is, it is determined whether the output power of the magnetron 4a is appropriate using the anode current corresponding signal 52 corresponding to the anode current of the magnetron 4a. At present, the output power of the magnetron 4a fluctuates by about ± 15% due to the voltage fluctuation of the device primary power input to the power supply unit 2a. Therefore, the main control unit 2b constantly monitors the anode current corresponding signal 52, controls the power supply 24-1 to the magnetron 4a based on the output control table, and controls the output within a predetermined range.

  FIG. 6 is a diagram showing a correlation between the anode current Ia (mA) and the output power Pm (kW) of the magnetron 4a. As shown in the figure, the anode current Ia and the output power Pm are in a substantially proportional relationship, and the correlation can be represented by an approximate expression (1).

Pm (kW) = Ia (mA) × 0.0033-0.13 (1)
(However, Pm ≧ 0)
In consideration of the difference between the ratings of the magnetron and the like, this equation (1) can be rewritten as equation (2).
Pm (kW) = k · Ia (mA) -b (2)
(However, Pm ≧ 0)
Here, k is a proportional constant and b is a constant.

  Therefore, by monitoring the anode current Ia and controlling the power supply, the output power Pm can be calculated based on the output control table created from the approximate expression (1) or (2), so that the output power fluctuation Can be controlled within a predetermined range. The monitoring of the anode current Ia is performed at a predetermined cycle (for example, every one minute).

  If it is determined from the anode current corresponding signal 52 that the output is not within the predetermined range, the process proceeds to step S12. In step S12, the main control unit 2b sends the dimming signal 28 to the power supply unit 2a, controls the power supply 24-1 from the power supply unit to the magnetron 4a, and sets the output of the magnetron 4a within a predetermined range. When the anode current corresponding signal 52 is within the predetermined range, the process proceeds to step S13.

At step 13, it is determined whether to turn off the lamp. If not turned off, the process returns to step S11, and stable lighting control is continued.
By the stable lighting control means (steps S11 to S13), the output of the magnetron 4a can be controlled to, for example, ± 5% or less. Fluctuations within this range are at a level that does not pose any practical problems even for a resin curing lamp used in a semiconductor or liquid crystal panel manufacturing process.

  When the light is turned off, the process proceeds to step S14. After step 14, the light is turned off. In step S14, the lamp is switched to the standby mode by operating the touch panel type operation panel. At this time, the magnetron 4a is in a preheated state, and the cooling fan of the cooling blower 6 continues to operate.

  In step S15, the standby mode is turned off. By turning off the standby mode, the preheating of the magnetron 4a is stopped, and the cooling fan of the cooling blower 6 is stopped.

  In step S16, the power supply is turned off by operating the touch panel type operation panel of the power supply unit 2.

(Operation time chart of each operation element of the light irradiation device, transition of air flow and lamp light corresponding to this)
FIG. 4 is a diagram showing an operation time chart of each operation element of the light irradiation device equipped with the microwave electrodeless lamp corresponding to the above-described operation flow, and a corresponding air flow transition and lamp light transition.
An operation time chart of each operation element will be described for each row in the drawing. Regarding each operating element, the starting auxiliary light source 4c, the air volume sensor 50, and the temperature sensors 46 to 2c are shown as operating elements in the second column. The third column describes the control of these operating elements. The time chart is shown in the fourth column. The time chart is based on the power supply unit ON (S01), standby mode (S02), lamp ON (S04), lamp OFF (S13), standby mode (S15) and power supply unit OFF (S16) described in the operation flow. It will be described in series.

  The start-up auxiliary light source 4c is charged during the standby mode (S02) to the lamp ON (S04), and then repeats flash irradiation in S06 until the start of the lamp is confirmed in (S07). Thereafter, charging is performed again during a period from lamp OFF (S13) to standby mode OFF (S15).

  The air volume sensor 50 monitors the cooling air volume during a period from a lapse of a predetermined time (for example, after Tsec) from the start of the standby mode (S02) to a standby mode OFF (S15).

  The temperature sensor 46 monitors the temperature of the magnetron 4a during a period from the start of the standby mode (S02) to the OFF of the standby mode (S15).

  The RF leak sensor 30 monitors electromagnetic waves leaking from the irradiation unit 4 to the outside during a period from the start of the standby mode (S02) to the OFF of the standby mode (S15).

  The cooling blower 6 operates during the same period (S02 to S15). The air flow suppression period of the cooling blower 6 is a period from the lamp cooling air flow suppression (S05) to the suppression release (S10).

  Regarding the power supply unit 2a, the preheating of the magnetron 4a is a period from the start of the standby mode (S02) to the lamp ON (S04). The oscillation of the magnetron 4a continues during a period from lamp ON (S04) to lamp extinguishing (S13). The stable lighting control continues during the period from magnetron output determination (S11) to lamp extinguishing (S13).

  The temperature sensor 2c of the power supply unit 2 monitors the temperature of the power supply unit 2 during the period from the start of the standby mode (S02) to the OFF of the standby mode (S15).

The graph shown on the lower side of FIG. 4 shows the transition of the air flow and the transition of the lamp light amount corresponding to this.
During the air volume suppression period (S05 to S10) in the operation period (S02 to S15) of the cooling blower 6, the operation is performed at, for example, 60% of the rated air volume, and the others are operated at 100%. The transition of the air flow in the air flow suppression period (S05 to S10) is selected so that the lamp temperature easily rises according to the size of the lamp and the configuration of the luminescent substance in the lamp, and the operation is performed at 30% to 90% of the rated air flow. .

  The light amount of the electrodeless lamp 18 is monitored by the light amount sensor 48, but the light amount gradually increases when the lamp is turned on (S04), and it is determined that the lamp has risen at a time point equal to or higher than a predetermined threshold value (for example, 80% of the rating). (S09). Thereafter, the rated output is continued, and the lamp is turned off when the lamp is turned off (S13).

[Advantages and effects of the present embodiment]
(1) Start-up assisting means It has been pointed out that mercury-free lamps have caused problems such as deterioration of lamp startability. On the other hand, in the present embodiment, the starting characteristics are improved by employing pulse irradiation of a xenon lamp as the starting auxiliary light source.

(2) Cooling air suppression means It has been pointed out that lamp mercury has a problem that lamp temperature hardly rises and illuminance rises slowly. On the other hand, in the present embodiment, particularly in the starting stage, the lamp cooling air is suppressed at a predetermined ratio for a predetermined period so that the lamp temperature easily rises, the temperature rise of the lamp is promoted, and the inside of the lamp is accelerated. The luminescent material is evaporated.

(3) Stable lighting control means As a conventional problem, it has been pointed out that the lamp output fluctuates due to the voltage fluctuation of the primary side voltage of the power supply unit, and the output accuracy deteriorates. On the other hand, in the present embodiment, particularly in the stable lighting stage, the lamp is realized with a predetermined output accuracy and stable radiation by monitoring the anode current of the magnetron and controlling the supplied power.

  (4) The problems described in the section of the problem to be solved by the invention can be solved by these startability control, cooling air suppression, and stable lighting control, and a mercury-free lamp can be realized.

  (5) The pulse irradiation of the xenon lamp has conventionally been performed at a high frequency (for example, 19 Hz). In the present embodiment, the lamp could be easily started even by pulse irradiation (for example, once every 6 seconds). That is, conventionally, the pulse irradiation is performed once every several tens of milliseconds (for example, 53 msec.), But in the present embodiment, once every several seconds (for example, 6 sec.). Irradiation is enough. Since the number of irradiations could be greatly reduced, the life of the xenon lamp was prolonged and the oscillation circuit became inexpensive.

[Others]
As described above, the embodiments of the light irradiation device equipped with the microwave electrodeless lamp according to the present invention have been described, but the scope of the present invention is not limited by these embodiments. Additions, deletions, changes, improvements, and the like to the embodiments that can be easily made by those skilled in the art are within the scope of the present invention. The technical scope of the present invention is defined by the appended claims.
[Industrial applicability]
The light irradiation device equipped with a microwave electrodeless lamp according to the present invention efficiently irradiates ultraviolet light having a wavelength of 315 to 400 nm (UV-A region), and can be suitably used for, for example, curing treatment of paints, resins, and the like. it can.

  2: power supply unit, 2a: power supply unit, 2b: main control unit, 2c: temperature sensor, 4: irradiation unit, 4a: magnetron, microwave oscillator, 4b: starting auxiliary light source lighting circuit, 4c: starting auxiliary light source, auxiliary light source , Xenon lamp, 6: cooling blower, 10: light irradiation device, 12: housing, 16: antenna, 18: electrodeless lamp, 20: reflecting mirror, 22: microwave cavity, 23: light emitting port, 24: power supply , 28: dimming signal, 30: RF leakage sensor, 32: abnormality detection signal, 34: sensing light amount corresponding signal, 36: abnormality detection signal, 42: abnormality detection signal, 44: energy supply, 46: temperature sensor, 48: Light intensity sensor, 50: air flow sensor, 52: anode current corresponding signal, Ia: anode current, Pm: output power

Claims (5)

In a light irradiation device equipped with a microwave electrodeless lamp having a power supply unit, an irradiation unit having a mercury-free microwave electrodeless lamp, and a cooling air supply mechanism for cooling the microwave electrodeless lamp,
A light irradiator, comprising: a start-up assisting unit using a xenon lamp, wherein the xenon lamp irradiates the microwave electrodeless lamp with a pulse once every several seconds during lighting. The light irradiation device equipped with a microwave electrodeless lamp according to claim 1,
A light irradiation device comprising: a cooling air suppression unit that suppresses a flow rate of cooling air sent from the cooling air supply mechanism to the irradiation unit at a predetermined rate during a lighting stage. A light irradiation device equipped with a microwave electrodeless lamp according to claim 2,
The light irradiation device, wherein the cooling air suppression means has a cooling blower, and the cooling blower performs an operation of 30% to 90% of the rated airflow during the airflow suppression period of the operation period. The light irradiation device equipped with a microwave electrodeless lamp according to any one of claims 1 to 3, further comprising:
A magnetron for supplying microwave energy to the microwave electrodeless lamp,
Means for monitoring the anode current of the magnetron;
Means for controlling power supply to the magnetron,
The light irradiation device, wherein the means for controlling power supply controls power supply to the magnetron based on the anode current to control output fluctuations of the microwave electrodeless lamp within a predetermined range. A light irradiation device equipped with a microwave electrodeless lamp according to claim 4,
The light irradiation device, wherein the means for controlling power supply to the magnetron calculates output power Pm from the anode current Ia of the magnetron by the following equation, and controls power supply to the magnetron based on the calculated output power Pm .
Pm (kW) = k · Ia (mA) −b
Here, k is a proportional constant and b is a constant.

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