JP6630365B2 - X-ray tube and X-ray analyzer - Google Patents

Description

  The present invention relates to an X-ray tube configured to irradiate a target placed in a vacuum vessel with an electron beam and to emit X-rays from the target, and an X-ray analyzer using the X-ray tube It is about.

  The X-ray tube 100A irradiates an electron beam E generated from a cathode 3A provided in a vacuum vessel 1A to a target thin film 51A serving as an anode as shown in FIG. It is configured to generate XR.

  More specifically, the X-ray tube 100A shown in FIG. 7 and Patent Document 1 is a vacuum vessel 1A whose inside is maintained at a predetermined degree of vacuum, and a diamond vessel provided to prevent an opening of the vacuum vessel 1A. An X-ray transmission plate 2A, a target thin film 51A deposited so as to be integral with an inner surface of the X-ray transmission plate 2A, and a cathode 3A for irradiating the target thin film 51A with an electron beam E; It has. The X-ray tube 100A is a so-called microfocus X-ray tube configured so that the electron beam EB forms a minute image on the target thin film 51A.

  For example, when an X-ray fluoroscopic image is imaged using the X-ray tube 100A configured as described above, it is better to bring the sample S to be imaged as close as possible to the target thin film 51A where X-rays are generated. Resolution and brightness can be improved. Therefore, the target thin film 51A is provided near the X-ray transmission window and arranged so as to reduce the distance from the sample.

  However, for example, when the sample S is placed at atmospheric pressure, there is a pressure difference between the inside and outside of the X-ray tube 100A, so that the X-ray transmission window plate 2A is recessed inside the vacuum vessel 1A. Bends. At this time, the target thin film 51A integrally formed with the X-ray transmission window plate 2A also bends so as to be depressed inward.

  Here, when the displacement amount of the target thin film 51A is large and plastic deformation occurs, the distance between the target thin film 51A and the sample S is maintained larger than the designed distance, and the X-ray transmission This causes the image resolution to always decrease.

  Further, even when the target thin film 51A is elastically deformed, the inside of the X-ray tube 100A is opened to the atmosphere for maintenance and the like, so that the target thin film 51A is subjected to repeated stress due to deformation and restoration. The target thin film 51A may be degraded or destroyed at an early stage.

JP 2002-42705 A

  The present invention has been made in view of the above-described problems, and can optimize a separation distance between a sample and a target, for example, can increase the resolution and luminance of a captured image based on X-rays. An object of the present invention is to provide an X-ray tube that can be used and an X-ray analyzer using the X-ray tube.

  That is, the X-ray tube according to the present invention is provided inside the vacuum vessel, and separates the target mechanism that receives the electron beam and emits X-rays from the target mechanism so as to partition the inside and outside of the vacuum vessel. An X-ray permeable film through which X-rays emitted from the target mechanism can be transmitted, wherein the X-ray permeable film is provided inside the vacuum vessel when the inside of the vacuum vessel has a predetermined degree of vacuum. It is characterized in that it is configured to bend and approach or contact the target mechanism.

  With such a structure, even if there is a pressure difference between the inside and outside of the vacuum vessel, a load based on the pressure difference can be mainly borne by the X-ray permeable film. Further, since the X-ray permeable film and the target mechanism are configured separately, deformation of the X-ray permeable film is hardly transmitted to the target mechanism. Therefore, it is possible to prevent the target mechanism from being deformed by hardly applying a load to the target mechanism.

  Further, since the X-ray transmitting film is configured to bend toward the inside of the vacuum vessel and approach or contact the target mechanism when the inside of the vacuum vessel is at a predetermined degree of vacuum, The distance between the sample to be analyzed disposed outside the membrane and the target mechanism can be reduced. In addition, since almost no deformation occurs in the target mechanism, the distance between the sample and the target mechanism can be substantially maintained at a designed value.

  Further, since little deformation occurs in the target mechanism, a repeated load due to repeated deformation and restoration is small, and the life of the target mechanism can be extended.

  In order to be able to shorten the distance between the sample and the target mechanism, which is the source of X-rays, for example, to improve the resolution and brightness of the X-ray image of the sample compared to the prior art, An outer surface of the X-ray transmitting film is a sample mounting surface on which a sample to be irradiated with X-rays is mounted, and an inner surface of the X-ray transmitting film is an opposing surface that is close to or in contact with the target mechanism. Should be fine.

  The distance between the sample and the place where the X-rays are actually generated in the target mechanism can be set to about the thickness of the X-ray transmitting film, and the resolution and brightness in the X-ray image of the sample can be further improved. In order to achieve this, the target mechanism comprises a target thin film made of metal, and a target that arranges the target thin film at a predetermined distance from the X-ray transmission film when there is no pressure difference between the inside and outside of the vacuum vessel. And a support.

In order to minimize the deformation of the target thin film due to the pressure difference between the inside and outside of the vacuum vessel and minimize the distance between the sample and the target thin film, there is no pressure difference between the inside and outside of the vacuum vessel. The distance between the X-ray permeable film and the target thin film is approximately the same as the amount of deformation of the X-ray permeable film on the target thin film side when the inside of the vacuum vessel has a predetermined degree of vacuum. It should just be set to.

  The traveling direction of the X-rays emitted from the target thin film is limited to a predetermined direction to prevent a large amount of primary X-rays generated in the target thin film from being incident on a detector, for example, secondary X-rays generated in a sample. In order to make it easier to detect only the X-ray transmission image of the sample while suppressing the deformation of the target thin film, the target mechanism includes a target thin film made of metal and a vacuum container. A target support for disposing the target thin film at a position separated from the X-ray permeable film by a predetermined distance when there is no pressure difference between the inside and the outside; and a target support provided between the X-ray permeable film and the target thin film; An intervening body that regulates the traveling direction of X-rays generated by the thin film in a predetermined direction, wherein the X-ray permeable film contacts the intervening body when the inside of the vacuum vessel has a predetermined degree of vacuum. What is necessary is just to be comprised so that.

  In order to prevent the target thin film from coming into direct contact with the sample and prevent the target thin film from deteriorating due to a chemical reaction with the sample, the X-ray permeable film must be made of an elastic material formed of polyimide. Any film may be used.

  In order for the X-ray permeable film to come into planar contact with the entire region where the X-rays are emitted from the target mechanism, the area of the X-ray permeable film that is deformed inward of the vacuum vessel is limited by the target mechanism. It is sufficient if the area is larger than the area on which the electron beam is incident.

  Even if the sample placed on the X-ray permeable film is minute, it is easy to place the sample at an appropriate position with respect to the X-ray emitted from the target mechanism, and clearer X-ray imaging In order to obtain an image or the like, the X-ray transmission film may be provided so as to be movable.

  An X-ray tube according to the present invention, an X-ray detector that detects X-rays generated from a sample, a signal processing unit that generates an X-ray spectrum based on an output of the detector, and the signal processing unit. Based on the generated X-ray spectrum, an analysis unit that performs qualitative analysis or quantitative analysis of the sample, if the X-ray analysis device equipped with the X-ray generation position in the target mechanism and the sample of the imaging target Are brought closer to each other, and an image with high resolution and high brightness can be obtained.

  In order to enable more detailed analysis at each position of the sample based on the X-ray, an optical microscope provided so as to capture the outer surface on the X-ray permeable membrane in a field of view, and an element at each position of the sample An imaging unit that generates image data to which the distribution is mapped may be further provided.

  As described above, according to the X-ray tube of the present invention, it is possible to optimize the separation distance between the sample and the target mechanism during X-ray irradiation. Brightness and the like can be improved.

FIG. 1 is a schematic diagram showing an X-ray tube and an X-ray analyzer according to a first embodiment of the present invention. FIG. 2 is an enlarged schematic cross-sectional view illustrating an enlarged front end portion of the X-ray tube according to the first embodiment. FIG. 2 is an enlarged schematic cross-sectional view showing the structure of an X-ray permeable film and a target mechanism when the X-ray tube according to the first embodiment is not evacuated. FIG. 2 is an enlarged schematic cross-sectional view showing the structure of an X-ray permeable film and a target mechanism when the X-ray tube according to the first embodiment is evacuated. FIG. 4 is an enlarged schematic cross-sectional view showing a structure of an X-ray tube according to a second embodiment of the present invention. FIG. 6 is a schematic perspective view showing a structure of a capillary plate of an X-ray tube according to a second embodiment. FIG. 9 is an enlarged schematic cross-sectional view illustrating a structure of an X-ray tube according to a modification of the second embodiment. FIG. 9 is a schematic cross-sectional view showing the structure of a conventional X-ray tube.

200 X-ray analyzer 100 X-ray tube 101 Detector system D2 Second X-ray detector 1 Vacuum container 2 X-ray permeable film 3 Electron Source 4 Beam optics 5 Target mechanism 51 Target thin film 52 Target support 53 Intermediate 81 Signal processing unit 82 Analysis unit 83・ Imaging unit MS ・ ・ ・ Optical microscope

  An X-ray tube 100 and an X-ray analyzer 200 according to a first embodiment of the present invention will be described with reference to FIGS. The X-ray tube 100 according to the first embodiment is a microfocus X-ray source configured so that the focal diameter of the primary X-ray XR1 is about several μm. The X-ray analyzer 200 according to the first embodiment includes the X-ray tube 100, a detector system 101, a control unit 7, a calculation mechanism 8, and a display 9, as shown in FIG. This is an inverted X-ray analyzer 200 in which the X-ray tube 100 emits a primary X-ray XR1 vertically upward. In this X-ray analyzer 200, a sample S to be subjected to X-ray analysis is directly mounted on an X-ray transmission window formed on the top surface of the X-ray tube 100, and a secondary X-ray XR2 generated in the sample S is generated. Is detected and the sample S is analyzed.

  More specifically, the X-ray tube 100 is provided so as to partition the inside and outside of the vacuum vessel 1 as shown in FIG. 1 and an X-ray permeable film 2 forming an X-ray transmission window, The apparatus includes at least an electron beam source 3, a beam optical system 4, and a target mechanism 5 including the target thin film 51 provided inside the vacuum vessel 1. In the X-ray tube 100 of the first embodiment, when the inside is maintained at a predetermined degree of vacuum and the primary X-ray XR1 is irradiated on the sample S, the sample S and the target are sandwiched by the X-ray transmission film 2 therebetween. The thin film 51 is adjacent to the thin film 51.

  The vacuum vessel 1 is connected to a vacuum pump 6, and the inside of the vacuum vessel 1 is kept at a predetermined degree of vacuum when the sample S is irradiated with the primary X-ray XR1. As shown in FIGS. 2 and 3, the vacuum vessel 1 has the X-ray permeable film 2 detachably provided on the top surface thereof.

  The X-ray permeable film 2 has a membrane structure as shown in the enlarged view of FIG. 3, and when the inside of the vacuum vessel 1 is not evacuated and the pressure is almost the same as the atmospheric pressure, It is provided separately from the target mechanism 5 so as not to contact the target mechanism 5. On the other hand, as shown in the enlarged view of FIG. 4, when the inside of the vacuum vessel 1 is evacuated and maintained at a predetermined degree of vacuum, the X-ray permeable film 2 moves toward the inside of the vacuum vessel 1. , So that the opposing surface, which is the inner surface thereof, comes into direct contact with the target mechanism 5. As shown in FIG. 4, for example, when the sample S is in the form of particles, the sample S can be arranged in the depression on the concave outer surface of the X-ray transmission film 2. In addition, the sample S is not limited to a particulate matter, and may be a solid or a liquid. The X-ray transmitting film 2 is formed of, for example, polyimide having a predetermined elasticity, and a film having no chemical reaction with the target sample S and having an X-ray transmitting property is selected.

  As shown in FIG. 1, the electron beam source 3 is configured so that a voltage is applied to the target thin film 51 so as to serve as an anode, and the electron beam EB is emitted to the target thin film 51.

  The beam optical system 4 includes, for example, a plurality of electromagnets as shown in FIG. 1, deflects an electron beam EB emitted from the electron beam source 3, and irradiates the electron beam EB with a diameter of about several μm on the target thin film 51. It is configured to collect light. The irradiation position of the electron beam EB on the target thin film 51 can be scanned by changing the magnetic field or electric field formed in the beam optical system 4.

  The target mechanism 5 receives the electron beam EB emitted from the electron beam source 3 and emits the primary X-ray XR1 in the direction of the X-ray transmitting film 2 as shown in FIGS. More specifically, in the first embodiment, the target mechanism 5 separates the target thin film 51 from the X-ray permeable film 2 by a predetermined distance when there is no pressure difference between the inside and outside of the vacuum vessel 1. And a target support 52 on which the target thin film 51 is disposed at a specified position.

  The target thin film 51 is a thin film made of a metal such as tungsten, for example, and receives the electron beam EB to generate X-rays XR. One surface of the thin film is supported from the inside of the vacuum vessel 1 by the target support 52 so as to face the inner surface of the X-ray permeable film 2. The target thin film 51 is also configured to be exchangeable when deteriorated. The target support 52 has a substantially circular opening at the center where the electron beam EB is incident and reaches the target thin film 51. This opening is formed coaxially in the vacuum vessel 1 smaller than the opening provided with the X-ray permeable film 2.

  The distance d between the target thin film 51 and the X-ray permeable film 2 shown in FIG. 3 when there is no pressure difference between the inside and outside of the vacuum vessel 1 will be described. As shown in FIG. 4, when the inside of the vacuum vessel 1 has a predetermined degree of vacuum, the X-ray permeable film 2 bends inwardly by an evenly distributed load due to a pressure difference between the inside and outside. The maximum displacement amount of the X-ray transmission film 2 on the target thin film 51 side and the separation distance d are set to be substantially the same value. That is, as shown in FIG. 4, even when the X-ray permeable film 2 is deformed due to a pressure difference, the X-ray permeable film 2 only comes into contact with the target thin film 51 and is pressed against the target thin film 51. So that almost no load is applied. Therefore, in any of the states shown in FIGS. 3 and 4, the target thin film 51 is maintained in substantially the same shape, and is configured so that deformation hardly occurs. In addition, as shown in FIG. 4, the flat portion on the inner surface of the X-ray transmitting film 2 after the deformation is made to substantially coincide with the opening of the target support 52. Therefore, regardless of which part of the target thin film 51 is irradiated with the electron beam EB, the primary X-ray XR1 is incident on the X-ray transmitting film 2 in substantially the same state.

  When the detector system 101 defines a direction perpendicular to the face plate portion of the target thin film 51 as an axial direction, a first X-ray detector D1 provided along this axial direction, A second X-ray detector D2 provided obliquely and obliquely, and an optical microscope provided so as to capture an outer surface of the X-ray transmission film 2 in a field of view. The second X-ray detector D2 is provided obliquely to the traveling direction of the main primary X-ray XR1 so that it can mainly detect fluorescent X-rays, which are secondary X-rays XR2 excited in the sample S. is there. It should be noted that even with the second X-ray detector D2 provided as described above, a part of the primary X-rays XR1 generated in the target thin film 51 that travels obliquely with respect to the axial direction is partially incident.

  In the present embodiment, the detector system 101 detects fluorescent X-rays excited by the sample S as the secondary X-rays XR2, but detects other types of secondary X-rays XR2. You may. For example, the secondary X-rays XR2 detected by the detector system 101 may be scattered X-rays in which the primary X-rays XR1 are scattered in the sample S, or transmitted X-rays in which the primary X-rays XR1 have passed through the sample S. .

  The control unit 7 controls operations of the X-ray tube 100, the vacuum pump 6, the detector system 101, and the arithmetic mechanism 8.

  The arithmetic mechanism 8 is a computer including, for example, a CPU, a memory, an A / D / D / A converter, input / output means, and the like, and executes an X-ray analyzer program stored in the memory. It is configured in. The arithmetic mechanism 8 functions as at least the signal processing unit 81, the analysis unit 82, and the imaging unit 83 by executing various programs and cooperating with each other by executing the program.

  The signal processing unit 81 generates a spectrum of the secondary X-ray XR2 generated from the sample S based on, for example, the output of the first X-ray detector D1 or the second X-ray detector D2.

  The analysis unit 82 performs qualitative analysis or quantitative analysis of the sample S based on the spectrum of the secondary X-ray XR2 generated in the signal processing unit. For example, the analysis unit 82 specifies the composition of the sample S from the wavelength of the fluorescent X-ray generated from the sample S, and specifies the ratio of the constituent substances from the intensity.

  The imaging unit 83 performs qualitative analysis of information on the position where the X-rays are irradiated on the sample S obtained by the optical microscope MS and qualitative analysis of the elements output by the analysis unit 82 with respect to the position where the X-rays are irradiated. Based on the result or the quantitative analysis result, image data in which the element distribution is mapped for each position of the sample S is generated and displayed on the display 9.

  According to the X-ray tube 100 and the X-ray analyzer 200 configured as described above, when the pressure in the vacuum vessel 1 is a predetermined pressure and the primary X-ray XR1 is applied to the sample S In this case, as shown in FIG. 4, the sample S can be placed close to the target thin film 51 without being separated only by the thickness of the X-ray transmission film 2. Therefore, the resolution and brightness of the X-ray transmission image of the sample S obtained based on the output from the detector system 101 can be set to the highest state in principle. Moreover, since the X-ray permeable film 2 and the target mechanism 5 are provided separately from each other, a load generated when there is a pressure difference between the inside and outside of the vacuum vessel 1 is borne only by the X-ray permeable film 2. The load can hardly be applied to the target thin film 51. For this reason, the target thin film 51 undergoes, for example, plastic deformation, and is recessed toward the electron beam source 3 to form a gap between the X-ray transmitting film 2 and the target thin film 51. Can be prevented from changing from the design value to the larger value. Even if the pressure in the vacuum chamber 1 repeatedly fluctuates between the atmospheric pressure and a predetermined degree of vacuum due to, for example, maintenance, the load on the target thin film 51 hardly fluctuates. It is unlikely to cause deterioration or destruction due to the above, and the life of the target thin film 51 can be improved as compared with the related art.

  As described above, according to the X-ray tube 100 and the X-ray analyzer 200 of the first embodiment, in the conventional X-ray tube, since the target thin film and the sample are brought as close as possible, the target is caused by the pressure difference between the inside and outside of the vacuum vessel. It is possible to solve a problem in which a large deformation occurs in the thin film and the resolution and luminance of a captured image based on, for example, X-rays are impaired due to the large deformation.

  In addition, since the target thin film 51 comes close to the sample S via the X-ray transmission film 2, the sample S does not directly contact the target thin film 51. Therefore, even when the sample S and the metal forming the target thin film 51 have high chemical activity, it is possible to prevent the target thin film 51 from deteriorating due to a chemical reaction.

  Next, an X-ray tube 100 according to a second embodiment will be described with reference to FIGS. The members corresponding to the members described in the first embodiment are denoted by the same reference numerals.

  The X-ray tube 100 according to the second embodiment differs from the X-ray tube 100 according to the first embodiment in the configuration of the X-ray permeable film 2 and the target mechanism 5.

  That is, the target mechanism 5 of the second embodiment includes a target thin film 51 made of metal and a target thin film 51 at a position separated from the X-ray transmission film 2 by a predetermined distance when there is no pressure difference between the inside and outside of the vacuum vessel 1. And an intervening body 53 provided between the X-ray transmitting film 2 and the target thin film 51 for regulating the traveling direction of the X-rays XR generated in the target thin film 51 in a predetermined direction. And

  The intervening body 53 will be described with reference to FIG. The intervening body 53 is a capillary plate in which a large number of capillaries C are formed so as to penetrate both face plate portions of the disk-shaped lead glass in the axial direction. The intervening body 53 is mounted on the target thin film 51 so that each capillary C is perpendicular to the face plate of the target thin film 51. Further, the intervening body 53 is not fixed to either the vacuum vessel 1 or the X-ray permeable film 2 by adhesion or the like, and is provided separately from each component.

  In the second embodiment, when the inside of the vacuum chamber 1 has a predetermined degree of vacuum, the X-ray transmission film 2 is so deformed that the deformation amount of the X-ray transmission film 2 is smaller than the deformation amount of the first embodiment. The dimensions and rigidity of the film 2 are set. The X-ray permeable film 2 is bent inward and deforms and comes into contact with the outer surface of the intervening body 53, and hardly generates a load on the intervening body 53 and the target thin film 51. is there.

  With the X-ray tube 100 of the second embodiment configured as described above, the traveling direction of the X-rays XR generated in the target thin film 51 by the intervening body 53 can be limited to only the axial direction in which the capillary extends. . Therefore, the primary X-ray XR1 traveling obliquely to the axial direction as shown in FIG. 4 is prevented from directly entering the second X-ray detector D2, and only the secondary X-ray XR2 derived from the sample S is detected. Imaging becomes possible. Therefore, in the second detector D2, the background noise increases due to the incidence of the primary X-ray XR1 and the output can be prevented from being easily saturated. For this reason, the detection range and resolution of the secondary X-ray XR2 can be further increased, and precise analysis can be performed.

  Also, the X-ray tube 100 of the second embodiment does not substantially generate a load on the target thin film 51 and does not deform even when there is a pressure difference between the inside and outside of the vacuum vessel 1 as in the first embodiment. can do. Therefore, substantially the same effects as in the first embodiment can be obtained.

  Next, a modification of the second embodiment will be described with reference to FIG. In the above-described second and second embodiments, the intervening body 53 having the same thickness as the separation distance between the X-ray transmitting film 2 and the target thin film 51 is provided. Good. In this case, as shown in FIG. 7, when the inside of the vacuum vessel 1 has a predetermined degree of vacuum, the X-ray permeable film 2 is bent inward so as to approach or come into contact with the upper surface of the interposition body 53. You may comprise.

  Other embodiments will be described.

  The X-ray transmitting film is not limited to polyimide, and may be a resin film having X-ray transmitting properties and having no chemical reactivity with the sample. For example, the X-ray transmission film may be a Mylar film or the like.

  The target thin film is not limited to tungsten, but may be copper, molybdenum, cobalt, chromium, iron, silver, or the like.

  The X-ray analyzer may be any device that irradiates the sample with X-rays and analyzes the sample based on scattered X-rays, fluorescent X-rays, transmitted X-rays, and the like obtained from the sample.

  The intervening body is not limited to a capillary plate, but may be silicon nitride (silicon nitride) or the like.

  The X-ray transmission film may be configured so that its position with respect to the target thin film can be changed. That is, the top surface portion of the vacuum container may be configured as a stage that can move in the direction of the face plate of the target thin film while supporting, for example, the X-ray transmission film. In this way, when the sample is very small and the X-ray emitted from the target thin film does not enter well, the position can be changed so that the X-ray is irradiated.

  The X-ray permeable film may be configured to be slightly separated from and close to the target mechanism when the inside of the vacuum container has a predetermined degree of vacuum. For example, the X-ray transmitting film may be separated from the target thin film when the inside of the vacuum vessel has a predetermined degree of vacuum, as long as the accuracy required for a microfocus X-ray tube can be realized. The distance between the X-ray transmitting film and the target thin film when the inside of the vacuum container has a predetermined degree of vacuum may be, for example, 1 mm or less. Alternatively, the distance between the target mechanism and the X-ray permeable film may be smaller than the thickness of the X-ray permeable film.

  In addition, modifications and combinations of various embodiments may be made without departing from the spirit of the present invention.

With the X-ray tube according to the present invention, the distance between the sample and the target mechanism can be optimized at the time of X-ray irradiation. It can be improved.

Claims (11)

A target mechanism provided inside the vacuum vessel and receiving an electron beam to emit X-rays;
An X-ray transmission film that is provided as a separate body from the target mechanism so as to partition the inside and outside of the vacuum vessel, and is a resin film capable of transmitting X-rays emitted from the target mechanism,
The X-ray permeable film is configured to bend toward the inside of the vacuum vessel and approach or contact the target mechanism at a separation distance of 1 mm or less when the inside of the vacuum vessel has a predetermined degree of vacuum. An X-ray tube characterized by the following. The outer surface of the X-ray transmission film is a sample mounting surface on which a sample to be irradiated is mounted,
The X-ray tube according to claim 1, wherein an inner surface of the X-ray transmission film is an opposing surface that comes close to or contacts the target mechanism. The target mechanism is
A target thin film made of metal,
A target support for arranging the target thin film at a position separated by a predetermined distance from the X-ray permeable film when there is no pressure difference between the inside and outside of the vacuum vessel,
2. The X-ray tube according to claim 1, wherein the X-ray transmitting film is configured to approach or contact the target thin film when the inside of the vacuum vessel has a predetermined degree of vacuum.   The separation distance between the X-ray permeable film and the target thin film when there is no pressure difference between the inside and the outside of the vacuum vessel, the X-ray permeable film generated when the inside of the vacuum vessel has a predetermined degree of vacuum. 4. The X-ray tube according to claim 3, wherein the X-ray tube is set to substantially the same value as the amount of deformation toward the target thin film. The target mechanism is
A target thin film made of metal,
A target support for arranging the target thin film at a position separated by a predetermined distance from the X-ray permeable film when there is no pressure difference between the inside and outside of the vacuum vessel,
An X-ray transmission film, and an intervening body provided between the target thin film and regulating a traveling direction of X-rays generated in the target thin film in a predetermined direction,
2. The X-ray tube according to claim 1, wherein the X-ray permeable film is configured to come into contact with or come into contact with the intervening body without contacting with the target mechanism when the inside of the vacuum vessel has a predetermined degree of vacuum. .   The X-ray tube according to claim 1, wherein the X-ray transmission film is an elastic film formed of polyimide.   2. The X-ray tube according to claim 1, wherein an area of the X-ray permeable film that is deformed inside the vacuum vessel is larger than an area where an electron beam is incident on the target mechanism. 3.   The X-ray tube according to claim 1, wherein the X-ray permeable film is movably provided. An X-ray tube according to claim 1,
An X-ray detector for detecting X-rays generated from the sample,
A signal processing unit that generates an X-ray spectrum based on the output of the detector;
An X-ray analysis apparatus comprising: an analysis unit that performs qualitative analysis or quantitative analysis of a sample based on an X-ray spectrum generated in the signal processing unit. An optical microscope provided so as to capture an outer surface on the X-ray transmitting film in a visual field;
The X-ray analyzer according to claim 9, further comprising: an imaging unit that generates image data in which an element distribution at each position of the sample is mapped. A target mechanism provided inside the vacuum vessel and receiving an electron beam to emit X-rays;
An X-ray transmission film that is provided as a separate body from the target mechanism so as to partition the inside and outside of the vacuum vessel, and is a resin film capable of transmitting X-rays emitted from the target mechanism,
The X-ray permeable film is configured to bend toward the inside of the vacuum vessel and approach or contact the target mechanism when the inside of the vacuum vessel has a predetermined degree of vacuum,
The separation distance between the X-ray permeable film and the target mechanism when there is no pressure difference between the inside and the outside of the vacuum vessel is generated in the X-ray permeable film when the inside of the vacuum vessel has a predetermined degree of vacuum. An X-ray tube characterized by being set to substantially the same value as the amount of deformation to the target thin film side.

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