JP6626154B2 - Heat treatment furnace - Google Patents

Description

  The present invention relates to a heat treatment furnace in which a heat treatment chamber is disposed in a casing.

  As a furnace for cooling a work by forcibly circulating a cooling gas after heating a work contained in a heat treatment chamber, there is a single-chamber type heat treatment furnace. In such a heat treatment furnace, the heat treatment chamber has two openings provided at positions facing each other, and each of the openings can be opened and closed by a lid. At the time of heating, the opening is closed by moving the lid to the closed position, and the heat treatment of the work is performed in the heat treatment chamber. During cooling, the opening is opened by moving the lid to the open position, and forced circulation of the cooling gas to the heat treatment chamber is performed through the opening.

  For example, Patent Literature 1 and Patent Literature 2 disclose that an opening is opened and closed by moving a lid up and down using a cylinder mechanism having a cylinder that drives a lid. Patent Document 3 discloses that an opening is opened and closed by moving a lid in parallel with a side surface of a heat treatment chamber.

JP 2011-231969 A JP-A-2002-249819 JP-B-62-052009

  In Patent Literature 1 and Patent Literature 2, the lid in the open position is located at a position facing the opening and overlapping the opening, that is, on the cooling gas flow path. Since the flow of the cooling gas is obstructed by the lid on the flow path of the cooling gas, the flow path resistance around the opening increases. Further, in Patent Document 3 described above, in order to move the lid in parallel with the side surface of the heat treatment chamber, it is necessary to provide a housing for accommodating the moved lid in the casing, so that the casing size increases.

  Therefore, an object of the present invention is to provide a heat treatment furnace capable of reducing a flow path resistance around an opening and securing a sufficient flow rate without increasing a casing size.

In order to solve the above problems, a heat treatment furnace according to one embodiment of the present invention includes:
A casing,
A heat treatment chamber disposed in the casing,
Two openings provided at positions facing each other in the heat treatment chamber;
A heat treatment furnace comprising: a lid for closing the opening;
The heat treatment furnace,
A lid opening / closing mechanism that moves the lid to a closed position that closes the opening or an open position that opens the opening,
In the open position, or in a retracted position where the lid does not overlap with the opening when the opening is viewed from the front, a lid transport mechanism that transports the lid,
The lid transport mechanism has a lid guide unit that guides the lid, and a lid transport unit that transports the lid between the open position and the retracted position,
The lid guide portion extends in a circumferential direction in a gap formed between the casing and the heat treatment chamber.

  According to the present invention, the lid at the retracted position is located in the gap formed between the casing and the heat treatment chamber, thereby preventing an increase in casing size. At the same time, since the lid at the retracted position does not overlap with the opening, the flow resistance around the opening can be reduced and a sufficient flow rate can be secured.

FIG. 3 is a cross-sectional view illustrating a state in which a first lid and a second lid are in a closed position in the heat treatment furnace according to the first embodiment. FIG. 2 is a cross-sectional view showing a state in which a first lid and a second lid are at a retracted position in the heat treatment furnace of FIG. 1. FIG. 3 is a diagram illustrating a lid transport mechanism that transports a first lid in the heat treatment furnace according to the first embodiment. It is a top view explaining engagement and disengagement between a 1st hook part and a 1st hanger part. It is a side view explaining engagement and disengagement between the 1st hook part and the 1st hanger part. It is sectional drawing explaining engagement and disengagement between a 1st hook part and a 1st hanger part. It is a schematic diagram explaining the movement of the first support protrusion in the lid guide. It is sectional drawing explaining engagement and disengagement between a 2nd hook part and a 2nd hanger part. It is a figure explaining the lid conveyance mechanism which conveys a 1st lid in the heat treatment furnace concerning a 2nd embodiment. It is a figure explaining the lid conveyance mechanism which conveys a 1st lid in the heat treatment furnace concerning a 3rd embodiment.

  Hereinafter, embodiments of a heat treatment furnace according to the present invention will be described in detail with reference to the drawings.

[First Embodiment]
The heat treatment furnace 1 according to the first embodiment will be described in detail with reference to FIGS. FIG. 1 is a cross-sectional view showing a state in which the first lid and the second lid are in the closed position A in the heat treatment furnace 1. FIG. 2 is a cross-sectional view showing a state where the first lid 13 and the second lid 14 are at the retreat position E in the heat treatment furnace 1. FIG. 3 is a diagram illustrating a lid transport mechanism 20 that transports the first lid 13 in the heat treatment furnace 1. FIG. 4 is a plan view illustrating engagement and disengagement between the first hook portion 6a and the first hanger portion 15. FIG. 5 is a side view illustrating engagement and disengagement between the first hook portion 6a and the first hanger portion 15. FIG. 6 is a cross-sectional view for explaining engagement and disengagement between the first hook portion 6a and the first hanger portion 15. FIG. 7 is a schematic diagram illustrating the movement of the first support protrusion 17 in the lid guide 21. FIG. 8 is a cross-sectional view illustrating engagement and disengagement between the second hook portion 8a and the second hanger portion 16.

  In the drawings, the first lid 13 and the like may be described as, for example, 13 (A), 13 (B), and 13 (E), respectively. The lid 13, the first lid 13 at the open position, and the first lid 13 at the retreat position E are meant. That is, A indicates a closed position, B indicates an open position, C indicates an engagement position, D indicates a disengagement position, and E indicates a retreat position.

[Overall configuration of heat treatment furnace]
As shown in FIGS. 1 and 2, the heat treatment furnace 1 includes a casing 3 and a heat treatment chamber 5 arranged in the casing 3. The work W is accommodated in the heat treatment chamber 5. The heat treatment furnace 1 is, for example, a so-called single-chamber vacuum heat treatment furnace that performs a heat treatment on the work W under reduced pressure and performs a cooling treatment by flowing a cooling gas. For example, the casing 3 is a vacuum vessel having a cylindrical shape, and the heat treatment chamber 5 is a single heat insulating chamber having a rectangular parallelepiped shape.

  Openings are respectively provided on two opposite side surfaces in the heat treatment chamber 5. For example, a first opening (for example, upper opening) 11 is formed on the upper surface of the heat treatment chamber 5, and a second opening (for example, lower opening) 12 is formed on the lower surface of the heat treatment chamber 5. The first opening 11 and the second opening 12 are used for introducing a cooling gas into the heat treatment chamber 5 or for discharging a cooling gas from the heat treatment chamber 5. The first opening 11 is closed in a pressed state by a first lid (for example, upper lid) 13, and the second opening 12 is closed in a pressed state by a second lid (for example, lower lid) 14. The first lid 13 is moved by the lid opening / closing mechanism 10 to a closed position A for closing the first opening 11 or an open position B for opening the first opening 11. The lid opening / closing mechanism 10 that opens and closes the first lid 13 includes a first rod 6 extending in the vertical direction, and a first cylinder 7 that drives the first rod 6 in the vertical direction. The second lid 14 is moved by the lid opening / closing mechanism 10 to a closed position A for closing the second opening 12 or an open position B for opening the second opening 12. The lid opening / closing mechanism 10 that opens and closes the second lid 14 includes a second rod 8 that extends in the vertical direction, and a second cylinder 9 that drives the second rod 8 in the vertical direction.

  The first rod 6 has a first hook 6a at an end (ie, a lower end) located on the side of the first opening 11. The first hook portion 6a is a disc-shaped flange, and has a function of suspending and supporting the first lid 13 by engaging with the first hanger portion 15.

  The second rod 8 has a second hook portion 8a at an end located at the side of the second opening 12 (ie, the upper end). The second hook portion 8a is constituted by two hooks that are separated from each other in the longitudinal direction of the second rod 8. The hook closer to (ie, above) the second opening 12 is a disc-shaped flange and has a function of pulling down the second lid 14. The hook farther (that is, below) from the second opening 12 is a disc-shaped flange and has a function of engaging with the second hanger part 16 and supporting the second lid 14.

  The heat treatment furnace 1 includes a heater (not shown) for heating the work W and a vacuum pump (not shown) for reducing the pressure inside the heat treatment furnace 1 as a device for performing the heat treatment.

  The heat treatment furnace 1 is a device for performing a cooling process, and a gas supply device (not shown) for supplying a cooling gas (for example, an inert gas such as nitrogen or argon) into the heat treatment furnace 1 and heated. A gas cooling device (not shown) for cooling the cooling gas is provided. The gas cooling device has a blower, a heat exchanger, and a wind direction switching plate. The blower forcibly circulates the cooling gas in the heat treatment furnace 1. The heat exchanger cools the cooling gas heated by cooling the work W. The wind direction switching plate changes the circulation direction of the cooling gas in the heat treatment furnace 1 by closing and opening the proper position in the heat treatment furnace 1. Therefore, the heat treatment furnace 1 cools the workpiece W by forcibly circulating the cooling gas in the heat treatment furnace 1 with the first opening 11 and the second opening 12 opened.

  A gap 4 is formed between the casing 3 and the heat treatment chamber 5. A lid guide 21 for guiding and transporting the first lid 13 in the circumferential direction is provided in the upper gap 4 formed from the upper part of the heat treatment chamber 5 to the upper corner part. A lid guide 21 for guiding and transporting the second lid 14 in the circumferential direction is provided in the lower gap 4 formed from the lower part of the heat treatment chamber 5 to the lower corner. The lid guide portion 21 is configured so as not to come into contact with the inner peripheral surface of the casing 3 or the corner portion of the heat treatment chamber 5 when guiding and transporting the first lid 13 and the second lid 14 in the circumferential direction. ing.

[Configuration of lid and lid guide section]
The first lid 13 and the lid guide 21 will be described with reference to FIGS.

  As shown in FIGS. 3 to 6, the first lid 13 has a plate shape with a step, and has a first mounting surface 13a, a first closing surface 13b, two first supporting side surfaces 13c, and a first opening surface. It has a side surface 13d and a first evacuation side surface 13e. The first opening 11 is closed by the first closing surface 13b. The first mounting surface 13a is located on the opposite side of the first closing surface 13b, and the first hanger portion 15 is mounted on the first mounting surface 13a. The first support protrusion 17 is attached to each first support side surface 13c. The first support protrusion 17 is used for supporting and guiding the first lid 13 by the lid guide 21. The first open side surface 13 d is located on the side of the open position B of the first lid 13, and the first retreat side surface 13 e is located on the side of the retreat position E of the first lid 13.

  The first hanger portion 15 extends in the transport direction and has a U-shape in plan view. The first hanger portion 15 has a hook guide recess 15a and a hook entrance 15b. The hook guide recess 15a is a guide groove that is cut out in the transport direction and engages when the first hook 6a of the first rod 6 moves between the open position B and the disengagement position D. The hook entrance 15b is a hook engagement opening formed on the opposite side of the retreat position E to enable the first hook 6a of the first rod 6 to enter and exit. The first hook portion 6a is configured to engage with the first hanger portion 15 in a detachable manner through a hook entrance 15b serving as a hook engagement opening.

The first support protrusion 17 is located closer to the retreat position E than the hook entrance 15b. At the detachment position D, the first hook portion 6a engaged with the first hanger portion 15 starts to detach from the first hanger portion 15. The first lid 13 at the open position B is suspended and supported by the first hook 6a of the first rod 6. The first hook portion 6a at the open position B is located substantially at the center of gravity of the first lid 13 so that the first lid 13 is stably supported.

  The first lid 13 has a first support protrusion 17 protruding outward on each of the first support side surfaces 13c facing the lid guide portion 21. Each of the first support protrusions 17 on one side and the other side includes two columnar protrusions. The two protrusions are located apart from each other in the retracting direction T1 and the opening direction T2 with the first hook 6a of the first rod 6 at the closed position A interposed therebetween. The two projections are supported and guided by the facing lid guide 21. More specifically, the first and second support projections 17 are not supported by the lid guide 21 when in the closed position A and the open position B. When the first support projection 17 on one side and the other side is at the engagement position C, it engages with the projection guide recess 22 of the lid guide 21. Therefore, at the engagement position C, the first support projection 17 is engaged with the projection guide recess 22 of the lid guide 21. The first support projections 17 on one side and the other side are supported by the lid guide portion 21 when in the detached position D and the retracted position E.

In the closed position A, the open position B, and the engagement position C, the first hook portion 6a is engaged with the first hanger portion 15, and in the disengagement position D, the first hook portion 6a is disengaged from the first hanger portion 15. The hook guide recess 15a is dimensioned so as to be detached.

  The lid transport mechanism 20 includes a lid guide unit 21 and a lid transport unit 30. The lid guide 21 is a guide member extending in the circumferential direction to guide the first lid 13 in the gap 4. Two lid guide portions 21 corresponding to the first lid 13 are provided so as to face the first support projection 17. The cover guide 21 extending in the circumferential direction has an arc shape in which the curvature of the cover guide 21 is constant, a curved shape in which the curvature of the cover guide 21 changes like an ellipse, and a linear shape in which the cover guide 21 is linear. And a shape extending obliquely.

  The lid guide 21 has a protrusion guide recess 22, a protrusion opening 23, and a conveyance guide 24. The projection guide recess 22 is a groove-shaped recess that supports and guides the first support projection 17. The protrusion opening 23 cuts off a portion of the protrusion guide recess 22 opposite to the retreat position E and located on the side of the first opening 11 so that the first support protrusion 17 can enter and exit at the open position B. It is configured to allow. Since the first support projection 17 can enter and exit the projection guide recess 22 through the projection opening 23, the first lid 13 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30. The transport guide section 24 is a transport path in which the transport body 31 is accommodated and transported in the retreating direction T1 or the opening direction T2.

  The lid transport unit 30 is a transport unit that transports the first lid 13 along the lid guide unit 21 between the open position B and the retracted position E. The lid transport section 30 includes a transport body 31, a toothed body 35, and a drive motor 37. The transport body 31 is accommodated in the transport guide section 24 of the lid guide section 21 and is configured to be bendable so as to be movable along the lid guide section 21 extending in the circumferential direction. When the transport body 31 is transported in the retreating direction T1 or the opening direction T2, the transport body 31 is freely deformed along the transport guide section 24 of the lid guide section 21. Can be transmitted to the end. The carrier 31 is, for example, a chain or a flexible rack. The teeth 35 are configured to mesh with the carrier 31. The teeth 35 are, for example, sprockets for chains and pinions for flexible racks. The drive motor 37 is an electric motor that rotationally drives the teeth 35. When the toothed body 35 is driven to rotate by the drive motor 37, the first lid 13 is transported by the transport body 31 along the lid guide 21 in the retreating direction T1 or the opening direction T2.

  At an end of the transport body 31 on the side of the open position B, a projection engaging portion 32 is provided. The projection engaging portion 32 is configured to engage with the first support projection 17 of the first lid 13 in a detachable manner. That is, the projection engagement portion 32 with respect to the first support projection 17 has an inverted U-shape, and has the projection engagement opening 32 a on the first opening 11 side. The projection engagement opening 32a is configured so that the first support projection 17 can be inserted and removed in the up-down direction, for example.

  When the toothed body 35 is rotationally driven by the drive motor 37 in a state where the projection engagement portion 32 is engaged with the first support projection 17, the first lid 13 is moved along the lid guide portion 21 by the transport body 31. And is transported in the retracting direction T1 or the opening direction T2. Since the lid guide portion 21 serves both for accommodating and transporting the transport body 31 and for supporting and guiding the first support protrusion 17, members related to transport of the first lid 13 can be reduced.

  When the first lid 13 is transported in the evacuation direction T <b> 1 by the transport body 31, at the engagement position C, the first support projection 17 engages with the projection guide recess 22 of the lid guide 21. At the detached position D, the first hook 6a is detached from the first hanger 15. The first lid 13 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30 by engaging and disengaging the first hook 6a with respect to the first hanger 15. Then, the first lid 13 at the separation position D is transported to the retreat position E.

  Conversely, the first lid 13 at the retracted position E is transported to the detached position D in the opening direction T2. When the first lid 13 is transported in the opening direction T2 from the disengagement position D, the engagement between the first hook portion 6a and the first hanger portion 15 starts, and thereafter, the engagement continues to the opening position B. I do. When the first lid 13 is transported in the opening direction T2 from the engagement position C, the first support projections 17 are partially engaged with the projection guide recesses 22, and at the open position B, the first support projections 17 is disengaged from the projection guide recess 22.

  Therefore, as shown in FIG. 7, after the first support projection 17 of the first lid 13 is moved from the closed position A to the open position B by the lid opening and closing mechanism 10, the engagement position C and the disengagement position are moved by the lid transport mechanism 20. It moves in the order of D and the retreat position E.

  The second lid 14 is provided on the opposite side of the first lid 13 and has substantially the same configuration as the first lid 13. The second lid 14 and the lid guide 21 will be described with reference to FIG.

  The second lid 14 has a plate shape with a step, and has a second mounting surface 14a, a second closing surface 14b, and two second support side surfaces 14c. The second opening 12 is closed by the second closing surface 14b. The second mounting surface 14a is located on the opposite side of the second closing surface 14b, and the second hanger portion 16 is mounted on the second mounting surface 14a. A second support projection 18 is attached to each second support side surface 14c. The second support projection 18 is used for supporting and guiding the second lid 14 by the lid guide 21.

  The second hanger part 16 extends in the transport direction and has a U-shape in plan view. The second hanger part 16 has a hook guide recess 16a and a hook entrance 16b. The hook guide recess 16a is a guide groove that is cut out in the transport direction and engages when the second hook 8a of the second rod 8 moves between the open position B and the detached position D. The hook entrance 16b is a hook engagement opening formed on the opposite side of the retreat position E to allow the second hook 8a of the second rod 8 to enter and exit. The second hook portion 8a is configured to removably engage with the second hanger portion 16 through a hook entrance 16b serving as a hook engagement opening.

The second support projection 18 is located closer to the retreat position E than the hook entrance 16b. At the detachment position D, the second hook 8a engaged with the second hanger 16 starts to detach from the second hanger 16. The second lid 14 at the open position B is supported by the second hook 8a of the first rod 6. The second hook portion 8a at the open position B is located substantially at the center of gravity of the second lid 14 so that the second lid 14 is stably supported.

  The second lid 14 has a second support protrusion 18 protruding outward on each of the support side surfaces 14c facing the lid guide portion 21. Each of the second support projections 18 on one side and the other side includes two columnar projections. The two protrusions are arranged apart from each other in the retracting direction T1 and the opening direction T2 with the second hook 8a of the second rod 8 at the closed position A interposed therebetween. The two projections are supported and guided by the facing lid guide 21. Specifically, the first and second support projections 18 are not supported by the lid guide 21 when in the closed position A and the open position B. When the second support projection 18 on one side and the other side is at the engagement position C, it engages with the projection guide recess 22 of the lid guide 21. When the second support protrusion 18 on one side and the other side is between the detached position D and the retracted position E, the second support protrusion 18 is supported and guided by the protrusion guide recess 22 of the lid guide 21.

Further, at the closed position A, the open position B, and the engagement position C, the second hook portion 8a engages with the second hanger portion 16, and at the disengagement position D, the second hook portion 8a separates from the second hanger portion 16. The hook guide recess 16a is dimensioned so as to be detached.

  The lid transport mechanism 20 includes a lid guide unit 21 and a lid transport unit 30. The lid guide 21 is a guide member that extends in the circumferential direction to support and guide the second lid 14 in the gap 4. Two lid guide portions 21 corresponding to the second lid 14 are provided so as to face the second support projection 18.

  The lid guide 21 for the second lid 14 has a projection guide recess 22 and a projection opening 23, similarly to the lid guide 21 for the first lid 13. The projection guide recess 22 is a groove-shaped recess that supports and guides the second support projection 18. The projection opening 23 is an opening configured to be able to receive the second support projection 18 at the open position B by cutting out a portion of the projection guide recess 22 located on the side of the second opening 12. The second support projection 18 can enter and exit the projection guide recess 22 through the projection opening 23, so that the second lid 14 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30.

  The lid transport section 30 for the second lid 14 transports the second lid 14 along the lid guide section 21 between the open position B and the retreat position E, similarly to the lid transport section 30 for the first lid 13. For this purpose, a transport body 31, a toothed body 35, and a drive motor 37 are provided.

  At an end of the transport body 31 on the side of the open position B, a projection engaging portion 32 is provided. The projection engagement portion 32 is configured to engage with the second support projection 18 of the second lid 14 in a detachable manner. That is, the projection engagement portion 32 with respect to the second support projection 18 is U-shaped, and has a projection engagement opening on the side of the second opening 12. The projection engagement opening is configured such that the second support projection 18 can be moved in and out in the vertical direction.

  When the toothed body 35 is rotationally driven by the drive motor 37 in a state where the projection engagement portion 32 is engaged with the second support projection 18, the second lid 14 is moved along the lid guide portion 21 by the transport body 31. And is transported in the retracting direction T1 or the opening direction T2. Since the lid guide portion 21 serves both for accommodating and transporting the transport body 31 and for supporting and guiding the second support projections 18, members related to transport of the second lid 14 can be reduced.

  When the second lid 14 is transported by the transport body 31 in the evacuation direction T <b> 1, the second support projection 18 is engaged with the projection guide recess 22 of the lid guide 21 at the engagement position C. At the detached position D, the second hook 8a is detached from the second hanger 16. By engaging and disengaging the second hook portion 8a with respect to the second hanger portion 16, the second lid 14 can be easily transferred between the lid transport mechanism 20 and the lid transport portion 30. Then, the second lid 14 at the detached position D is transported to the retreat position E.

  Conversely, the second lid 14 at the retreat position E is transported in the opening direction T2 to the detachment position D. When the second lid 14 is transported in the opening direction T2 from the disengagement position D, the engagement between the second hook portion 8a and the second hanger portion 16 starts, and thereafter, the engagement continues to the opening position B. I do. When the second lid 14 is transported in the opening direction T2 from the engagement position C, the second support protrusion 18 is partially engaged with the protrusion guide recess 22. At the open position B, the second support protrusion 18 is disengaged from the projection guide recess 22.

  Similarly to the first lid 13, the second support projection 18 of the second lid 14 is moved from the closed position A to the open position B by the lid opening / closing mechanism 10, and then the engagement position C and the disengagement position D by the lid transport mechanism 20. , And the evacuation position E.

  The first embodiment is summarized as follows.

  After the first lid 13 and the second lid 14 are moved from the closed position A to the open position B by the lid opening / closing mechanism 10, the lid transport mechanism 20 causes the engagement position C, the disengagement position D, and the retreat position E in this order. Moving. When the first lid 13 and the second lid 14 are located at the retracted position E, the first lid 13 is prevented from overlapping the first opening 11 when the first opening 11 is viewed from the front, and The second lid 14 is prevented from overlapping the second opening 12 when the second opening 12 is viewed from the front. Therefore, since the first lid 13 at the retreat position E is located in the upper right gap 4 formed between the casing 3 and the heat treatment chamber 5, an increase in casing size is prevented and the retreat position E Since the first lid 13 does not overlap the first opening 11, the flow resistance around the first opening 11 can be reduced, and a sufficient flow rate can be secured. Similarly, since the second lid 14 at the retreat position E is located in the lower left gap 4 formed between the casing 3 and the heat treatment chamber 5, an increase in casing size is prevented, and the retreat position is reduced. Since the second lid 14 at E does not overlap with the second opening 12, the flow resistance around the second opening 12 can be reduced to ensure a sufficient flow rate.

[Second embodiment]
The heat treatment furnace 1 according to the second embodiment will be described in detail with reference to FIG. FIG. 9 is a diagram illustrating a lid transport mechanism 20 that transports the first lid 13 in the heat treatment furnace 1 according to the second embodiment. As shown in FIG. 9, the heat treatment furnace 1 according to the second embodiment has the same configuration as the heat treatment furnace 1 of the first embodiment except for the configuration of the third hook 6 g and the first hanger 15. I have.

  The first rod 6 has a third hook 6g at an end (i.e., a lower end) located on the side of the first opening 11. The third hook portion 6g extends in the transport direction and has a U-shape in a side view. The third hook portion 6g is constituted by two hooks that are separated from each other in the longitudinal direction of the first rod 6. The hook farther (that is, above) from the first opening 11 extends in the transport direction. The hook closer to the first opening 11 (i.e., below) extends in the transport direction and engages with the first hanger 15 and supports the first lid 13. The hook closer to the first opening 11 and the hook farther from the first opening 11 are connected via a curved portion. A hanger doorway 6h is formed on the opposite side of the curved portion, that is, on the opposite side of the retreat position E. The hanger doorway 6h is a hanger engagement opening that allows the hanger beam 15h of the first hanger part 15 to enter and exit. The third hook portion 6g is configured to engage with the first hanger portion 15 in a detachable manner through a hanger entrance 6h serving as a hanger engagement opening.

  The first hanger portion 15 has two hanger pillar portions 15g and one hanger beam portion 15h. The two hanger pillar portions 15g are arranged apart from each other in a direction orthogonal to the transport direction. The hanger beam 15h has a cylindrical shape, and extends in a direction orthogonal to the transport direction so as to connect the two hanger pillars 15g.

  The first lid 13 at the open position B is suspended and supported by the third hook portion 6g of the first rod 6. The first rod 6 supporting the third hook 6g at the open position B is formed by the first rod 6 while the hanger beam 15h is positioned substantially at the center of gravity of the first lid 13 so that the first lid 13 is stably supported. It is located approximately at the center of gravity of one lid 13.

  When the toothed body 35 is rotationally driven by the drive motor 37 in a state where the projection engagement portion 32 is engaged with the first support projection 17, the first lid 13 is moved along the lid guide portion 21 by the transport body 31. And is transported in the retracting direction T1 or the opening direction T2.

  When the first lid 13 is transported in the evacuation direction T <b> 1, at the engagement position C, the first support projection 17 engages with the projection guide recess 22 of the lid guide 21. At the disengagement position D, the third hook portion 6g disengages from the first hanger portion 15. The first lid 13 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30 by engaging and disengaging the first hook 6a with the hanger 15. Then, the first lid 13 at the separation position D is transported to the retreat position E. When the first lid 13 is located at the evacuation position E, the first lid 13 is prevented from overlapping the first opening 11 when the first opening 11 is viewed from the front. Therefore, since the first lid 13 at the retreat position E is located in the gap 4 formed between the casing 3 and the heat treatment chamber 5, an increase in the casing size is prevented, and the first lid 13 at the retreat position E is prevented. Since the one lid 13 does not overlap with the first opening 11, the flow resistance around the first opening 11 can be reduced to secure a sufficient flow rate.

  Conversely, when the first lid 13 is transported in the opening direction T2, the first lid 13 is transported from the retracted position E to the detached position D. When the first lid 13 is transported in the opening direction T2 from the disengagement position D, the engagement between the third hook portion 6g and the first hanger portion 15 starts, and thereafter, the engagement continues to the opening position B. I do. When the first lid 13 is transported in the opening direction T2 from the engagement position C, the first support projections 17 are partially engaged with the projection guide recesses 22, and at the open position B, the first support projections 17 is disengaged from the projection guide recess 22.

  The above-described configuration of the third hook portion 6g of the first rod 6 and the first hanger portion 15 of the first lid 13 is equivalent to the fourth hook portion (not shown) of the second rod 8 and the second hanger of the second lid 14. The same applies to the configuration with the unit 16. By using a common member for opening, closing, and transporting the first lid 13 and the second lid 14, it is possible to easily manage the members and reduce costs.

[Third embodiment]
The heat treatment furnace 1 according to the third embodiment will be described with reference to FIG. FIG. 10 is a diagram illustrating a lid transport mechanism 20 that transports the first lid 13 in the heat treatment furnace according to the third embodiment. As shown in FIG. 10, the heat treatment furnace 1 according to the third embodiment is different from the heat treatment furnace 1 according to the third embodiment, except that the transport body 31 is transported in a transport body guide section 41 provided separately from the lid guide section 21. It has the same configuration as the heat treatment furnace 1 of the above embodiment.

  Two lid guide portions 21 corresponding to the first lid 13 are provided so as to face the first support projection 17. Each of the lid guides 21 has a U-shaped cross section, and is configured such that only the first support protrusion 17 is supported and guided by the protrusion guide recess 22.

  The heat treatment furnace 1 further includes a carrier guide 41 provided separately from the lid guide 21. The carrier guide section 41 is disposed substantially at the middle of the two lid guide sections 21 and above or below the lid guide sections 21. The carrier guide 41 extends in the circumferential direction similarly to the lid guide 21, and is a guide member that guides the communication body 60 and the carrier 31. The carrier guide 41 includes a communication body guide recess 42 and a carrier guide 44. The communication body guide recess 42 is a groove-shaped recess for guiding the communication body 60. A transport guide section 44 is formed inside the transport body guide section 41. The transport guide section 44 is a transport path in which the transport body 31 is accommodated and transported in the retracting direction T1 or the opening direction T2.

  A connecting body 60 is provided at an end of the transport body 31 on the open position B side. The connecting body 60 has a connecting portion 61, a connecting leg portion 62, and a connecting engaging portion 63. The connecting portion 61 is attached to the end of the transport body 31 on the open position B side, and moves in the transport guide section 44 together with the transport body 31. The connecting leg 62 extends vertically and connects the connecting portion 61 and the connecting engaging portion 63. The connection engaging portion 63 has a U-shape in a side view and extends in the up-down direction. The lower part of the communication engagement part 63 is open.

  Two engaging legs 51 are attached to the first retreat side surface 13e located on the retreat position E side of the first lid 13 so as to be separated from each other in a direction orthogonal to the transport direction. An engagement arm 52 extends in a direction perpendicular to the transport direction so as to connect the two engagement legs 51. At the open position B, the communication engagement portion 63 is engaged with the engagement arm portion 52. That is, the engagement arm portion 52 is accommodated in the communication recess 64 of the communication engagement portion 63. When the first lid 13 is moved down to the closed position A by the lid opening / closing mechanism 10, the communication engagement portion 63 is disengaged from the engagement arm portion 52. Therefore, the communication engagement portion 63 of the communication body 60 is engaged with the engagement arm portion 52 so as to be disengageable.

  When the drive motor 37 is operated, the teeth 35 are driven to rotate and the carrier 31 moves. When the carrier 31 moves in a state in which the communication engagement portion 63 of the communication body 60 is engaged with the engagement arm 52, the engagement between the communication body 60 attached to the carrier 31 and the engagement arm 52 is performed. Thereby, the first lid 13 is transported along the lid guide 21 in the retreating direction T1 or the opening direction T2.

  When the first lid 13 is transported in the evacuation direction T <b> 1, at the engagement position C, the first support projection 17 engages with the projection guide recess 22 of the lid guide 21. At the detached position D, the first hook 6a is detached from the first hanger 15. The first lid 13 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30 by engaging and disengaging the first hook 6a with respect to the first hanger 15. Then, the first lid 13 at the separation position D is transported to the retreat position E. When the first lid 13 is located at the evacuation position E, the first lid 13 is prevented from overlapping the first opening 11 when the first opening 11 is viewed from the front. Therefore, since the first lid 13 at the retreat position E is located in the gap 4 formed between the casing 3 and the heat treatment chamber 5, an increase in the casing size is prevented, and the first lid 13 at the retreat position E is prevented. Since the one lid 13 does not overlap with the first opening 11, the flow resistance around the first opening 11 can be reduced to secure a sufficient flow rate.

  Conversely, when the first lid 13 is transported in the opening direction T2, the first lid 13 is transported from the retracted position E to the detached position D. When the first lid 13 is transported in the opening direction T2 from the disengagement position D, the engagement between the first hook portion 6a and the first hanger portion 15 starts, and thereafter, the engagement continues to the opening position B. I do. When the first lid 13 is transported in the opening direction T2 from the engagement position C, the first support projections 17 are partially engaged with the projection guide recesses 22, and at the open position B, the first support projections 17 is disengaged from the projection guide recess 22.

  The above-described engagement structure of the communication engagement portion 63 and the engagement arm portion 52 and the structure of the lid guide portion 21 relate to the first lid 13, but also apply to the second lid 14. By separating the carrier guide 41 for transport of the carrier 31 and the lid guide 21 for guiding the first lid 13 and the second lid 14, the size of the communication engaging portion 63 is restricted. This makes it less likely to be affected by the variation in the position of the engagement arm portion 52 to be engaged.

  Although specific embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and can be implemented with various modifications within the scope of the present invention.

  As the heat treatment furnace 1, a vacuum heat treatment furnace for performing a heat treatment under reduced pressure and a cooling treatment with a cooling gas has been exemplified, but the present invention can also be applied to other heat treatment furnaces in which the heat treatment chamber 5 is disposed in the casing 3. . Further, the present invention provides, for example, a hollow cylindrical heat treatment chamber 5 provided in a hollow cylindrical casing 3 in a double cylindrical shape, and a first opening 11 and a second opening 11 on a circumferential side surface of the heat treatment chamber 5. The present invention can also be applied to a heat treatment furnace in which the parts 12 are arranged to face each other.

  The first opening 11 and the second opening 12 are not only configured to be opposed in the vertical direction (vertical direction) as in the above-described embodiment, but are also arranged to be opposed in the horizontal direction (horizontal direction). A configuration or a configuration arranged so as to be opposed to a horizontal surface in an inclined state can be adopted.

  In the lid guide portion 21 shown in FIG. 7, the corner end of the guide wall adjacent to the projection opening 23 is shown as a right angle, but the corner end of the guide wall adjacent to the projection opening 23 is notched. It can be in a contoured shape. The cutout shape at the corner end of the guide wall can be, for example, tapered or curved. According to this configuration, the first support protrusion 17 and the second support protrusion 18 can be easily guided to the protrusion guide recess 22.

  At least one of the upper edge portion of the first hook portion 6a and the lower end portion of the first hanger portion 15 on the hook entrance 15b side can be cut out. The cutout shape at the portion where the first hook portion 6a and the first hanger portion 15 start to be engaged can be, for example, tapered or curved. The second hook portion 8a and the second hanger portion 16 can have the same cutout shape. According to this configuration, it is easy to guide the first hook portion 6a to the first hanger portion 15 and to guide the second hook portion 8a to the second hanger portion 16.

  The present invention and embodiments are summarized as follows.

A heat treatment furnace according to one embodiment of the present invention includes:
A casing 3,
A heat treatment chamber 5 disposed in the casing 3,
Two openings 11, 12 provided at positions facing each other in the heat treatment chamber 5,
In the heat treatment furnace 1 including the lids 13 and 14 for closing the openings 11 and 12,
The heat treatment furnace 1 comprises:
A lid opening and closing mechanism 10 for moving the lids 13 and 14 to a closed position A for closing the openings 11 and 12 or an open position B for opening the openings 11 and 12;
Lid transport that transports the lids 13 and 14 to the open position B or to a retracted position E where the lids 13 and 14 do not overlap with the openings 11 and 12 when the openings 11 and 12 are viewed from the front. A mechanism 20;
The cover transport mechanism 20 includes a cover guide unit 21 that guides the covers 13 and 14, and a cover transfer unit 30 that transfers the covers 13 and 14 between the open position B and the retreat position E. ,
The lid guide portion 21 extends in the circumferential direction in the gap 4 formed between the casing 3 and the heat treatment chamber 5.

  According to the above configuration, since the lids 13 and 14 at the retreat position E are located in the gaps 4 formed between the casing 3 and the heat treatment chamber 5, an increase in casing size is prevented. At the same time, since the lids 13 and 14 at the retreat position E do not overlap with the openings 11 and 12, the flow resistance around the openings 11 and 12 can be reduced and a sufficient flow rate can be secured.

Further, in the heat treatment furnace of one embodiment,
The lids 13, 14 are provided with hanger parts 15, 16 for supporting the lids 13, 14 on mounting surfaces 13 a, 14 a located on opposite sides of the closing surfaces 13 b, 14 b for closing the openings 11, 12. Have
The lid opening / closing mechanism 10 has hook portions 6a and 8a that engage with the hanger portions 15 and 16 at ends located on the sides of the openings 11 and 12,
The hangers 15, 16 have hook engaging openings 15b, 16b on the opposite side to the retracted position E, to allow the hooks 6a, 8a to enter and exit,
The hook portions 6a and 8a are detachably engaged with the hanger portions 15 and 16 through the hook engagement openings 15b and 16b.

  According to the above embodiment, the hooks 6a, 8a are disengaged from the hangers 15, 16, so that the lids 13, 14 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30.

Further, in the heat treatment furnace of one embodiment,
The lids 13, 14 are provided with hanger parts 15, 16 for supporting the lids 13, 14 on mounting surfaces 13 a, 14 a located on opposite sides of the closing surfaces 13 b, 14 b for closing the openings 11, 12. Have
The lid opening / closing mechanism 10 has a hook portion 6g that engages with the hanger portions 15, 16 at an end located on the side of the openings 11, 12.
The hook portions 6a, 8a have a hanger engaging opening 6h on the side opposite to the retreat position E, which allows the hanger portions 15, 16 to enter and exit,
The hook 6g is detachably engaged with the hangers 15, 16 through the hanger engagement opening 6h.

  According to the above embodiment, the hooks 6a, 8a are disengaged from the hangers 15, 16, so that the lids 13, 14 can be easily transferred between the lid transport mechanism 20 and the lid transport unit 30.

Further, in the heat treatment furnace of one embodiment,
The lids 13 and 14 have support protrusions 17 and 18 supported by the lid guide portion 21 on support side surfaces 13c and 14c facing the lid guide portion 21, respectively.
The lid guide 21 is
A projection guide recess 22 for guiding the support projections 17, 18,
By cutting out a portion of the protrusion guide recess 22 opposite to the retreat position E and on the side of the openings 11, 12, the support protrusions 17, 18 at the open position B can be moved in and out. And a protruding opening 23 to enable it.

  According to the above-described embodiment, the support projections 17 and 18 can enter and exit the projection guide recess 22 through the projection opening 23, so that the lids 13 and 14 can be easily moved between the lid transport mechanism 20 and the lid transport unit 30. Can be delivered to

Further, in the heat treatment furnace of one embodiment,
The lid transport section 30 of the lid transport mechanism 20 includes a bendable transport body 31 accommodated in the lid guide section 21, a tooth 35 that meshes with the transport body 31, and rotationally drives the tooth 35. And a drive motor 37 for
A projection engaging portion 32 is provided at an end of the transport body 31 on the side of the open position B,
The projection engaging portion 32 is detachably engaged with the support projections 17, 18 of the lids 13, 14.

  According to the above-described embodiment, the members related to the transport of the lids 13 and 14 can be reduced because the lid guide 21 serves both to accommodate and transport the transport body 31 and to support and guide the support protrusions 17 and 18.

Further, in the heat treatment furnace of one embodiment,
Further provided is a carrier guide unit 41 separate from the lid guide unit 21,
The lid transport section 30 of the lid transport mechanism 20 rotates the transportable body 31 accommodated in the transport body guide section 41, the teeth 35 meshing with the transport body 31, and rotates the teeth 35. A driving motor 37 for driving,
A connecting body 60 is provided at an end of the transport body 31 on the open position B side,
An engagement arm portion 52 is provided on a retreat side surface 13e located on the retreat position E side of the lids 13 and 14.
The communication engagement portion 63 of the communication body 60 is removably engaged with the engagement arm portion 52.

  According to the above-described embodiment, the size of the communication engagement portion 63 is less likely to be restricted, so that it is less likely to be affected by the position variation of the engagement arm portion 52 to be engaged.

Further, in the heat treatment furnace of one embodiment,
The carrier 31 and the teeth 35 are each an end chain and a sprocket, or a flexible rack and a pinion.

  According to the above-described embodiment, the transport body 31 is freely deformed along the transport guides 24 and 44, so that the transport driving force from the toothed body 35 can be transmitted to the end of the transport body 31 and the cover 13 , 14 in the retreating direction T1 and the opening direction T2 along the circumferential direction.

DESCRIPTION OF SYMBOLS 1 ... Heat treatment furnace 3 ... Casing 4 ... Gap part 5 ... Heat treatment chamber 6 ... 1st rod 6a ... 1st hook part (hook part)
6g: 3rd hook part (hook part)
6h: Hanger doorway (hanger engagement opening)
7 First cylinder 8 Second rod 8a Second hook (hook)
9: second cylinder 10: lid opening / closing mechanism 11: first opening (opening)
12 Second opening (opening)
13: First lid (lid)
13a: First mounting surface (mounting surface)
13b: first closing surface (closing surface)
13c: first supporting side surface (supporting side surface)
13d: first open side surface 13e: first retreat side surface (retreat side surface)
14 Second lid (lid)
14a: Second mounting surface (mounting surface)
14b: second closing surface (closing surface)
14c: second support side surface (support side surface)
15: 1st hanger part (hanger part)
15a: hook guide recess 15b: hook doorway (hook engagement opening)
15g: Hanger pillar 15h: Hanger beam 16: Second hanger (hanger)
16a: hook guide recess 16b: hook doorway (hook engagement opening)
17 1st support projection (support projection)
18. Second support protrusion (support protrusion)
DESCRIPTION OF SYMBOLS 20 ... Lid conveyance mechanism 21 ... Lid guide part 22 ... Protrusion guide concave part 23 ... Projection opening 24 ... Conveyance guide part 30 ... Lid conveyance part 31 ... Carrier 32 ... Projection engagement part 32a ... Projection engagement opening 35 ... Toothed body 37 ... Drive motor 41 ... Conveyor body guide part 42 ... Communication body guide concave part 44 ... Conveyance guide part 51 ... Engagement leg part 52 ... Engagement arm part 60 ... Communication body 62 ... Connection leg part 63 ... Connection engagement part 64 ... Connection Recess A A Closed position B Open position C Engagement position D Disengagement position E Retreat position T1 Retreat direction T2 Open direction W Work

Claims (6)

A casing,
A heat treatment chamber disposed in the casing,
Two openings provided at positions facing each other in the heat treatment chamber;
A heat treatment furnace comprising: a lid for closing the opening;
The heat treatment furnace,
A lid opening / closing mechanism that moves the lid to a closed position that closes the opening or an open position that opens the opening,
In the open position, or in a retracted position where the lid does not overlap with the opening when the opening is viewed from the front, a lid transport mechanism that transports the lid,
The lid transport mechanism has a lid guide unit that guides the lid, and a lid transport unit that transports the lid between the open position and the retracted position,
The heat treatment furnace, wherein the lid guide portion extends in a circumferential direction in a gap formed between the casing and the heat treatment chamber. The lid has a hanger portion for supporting the lid on a mounting surface located on a side opposite to a closing surface for closing the opening,
The lid opening and closing mechanism has a hook portion that engages with the hanger portion at an end located on the side of the opening,
The hanger portion has a hook engagement opening on the side opposite to the retracted position, which allows the hook portion to enter and exit,
The heat treatment furnace according to claim 1, wherein the hook part is detachably engaged with the hanger part through the hook engagement opening. The lid has a support protrusion supported by the lid guide on a support side surface facing the lid guide,
The lid guide section is
A projection guide recess for guiding the support projection,
A projection opening that allows the support projection to enter and exit at the open position by notching a portion of the projection guide recess opposite to the retreat position and located on the side of the opening; The heat treatment furnace according to claim 1 or 2, characterized in that: The lid transport unit of the lid transport mechanism includes a bendable transporter housed in the lid guide unit, a toothed body that meshes with the transporter, and a drive motor that rotationally drives the toothed body,
A protrusion engaging portion is provided at an end of the transport body on the open position side,
4. The heat treatment furnace according to claim 3, wherein the protrusion engaging portion is detachably engaged with the support protrusion of the lid. 5. The apparatus further includes a carrier guide unit separate from the lid guide unit,
The lid transport section of the lid transport mechanism includes a bendable transport body accommodated in the transport body guide section, a tooth meshing with the transport body, and a drive motor that rotationally drives the tooth body. ,
A communication body is provided at an end of the transport body on the open position side,
On an evacuation side surface located on the side of the evacuation position in the lid, an engagement arm portion is provided,
The heat treatment furnace according to any one of claims 1 to 3, wherein the communication engagement portion of the communication body is detachably engaged with the engagement arm portion.   The heat treatment furnace according to claim 4 or 5, wherein the carrier and the tooth-like body are each an end chain and a sprocket, or a flexible rack and a pinion.

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