JP6622343B2 - Silicon carbide semiconductor device and manufacturing method thereof - Google Patents

Description

  Power semiconductor devices combine a high maximum current density with a high voltage blocking capability. A typical power semiconductor device has a vertical structure so that the load current flows between two opposing faces of the semiconductor die. For vertical devices, the maximum current rating of the power semiconductor device is proportional to its area, and the voltage blocking capability is positively correlated with the height of the drift region or the vertical extension in the semiconductor die. In power semiconductor switches such as IGFET (Insulated Gate Field Effect Transistor) and IGBT (Insulated Gate Bipolar Transistor), a gate electrode capacitively coupled to the body region by a gate dielectric controls the load current flowing through the body region. In the case of a semiconductor with a high intrinsic breakdown field strength, such as SiC, a high blocking voltage allows the dielectric strength of the gate dielectric to determine the voltage blocking capability of the power semiconductor device instead of the drift region characteristics. A strong electric field is generated near the gate dielectric.

  There is a need to further increase the voltage blocking capability and improve the avalanche durability of semiconductor devices without adversely affecting the current rating and on-state resistivity or only having a low adverse effect on the current rating and on-state resistivity.

  The present disclosure relates to a semiconductor device that includes a trench structure that extends from a first surface into a silicon carbide semiconductor body. The trench structure may include an auxiliary electrode under the trench structure and a gate electrode that may be disposed between the auxiliary electrode and the first surface. A shield region may be adjacent to the auxiliary electrode at the bottom of the trench structure and may form a first pn junction with the drift structure.

  The present disclosure further relates to a semiconductor device that includes a trench structure that extends from a first surface into a silicon carbide semiconductor body. The trench structure includes first and second segments. Each of the first and second segments extends from the first sidewall of the trench structure to the opposite second sidewall. The gate electrode in the first segment is dielectrically isolated from the semiconductor body at the bottom of the trench structure. An auxiliary electrode is formed in the second segment. A shield region is adjacent to the auxiliary electrode at the bottom of the trench structure and forms a first pn junction with the drift structure of the semiconductor body. A field dielectric separates the auxiliary electrode and the drift structure.

  The present disclosure also relates to a method of manufacturing a silicon carbide device. A trench is formed in the processing surface of the silicon carbide substrate that includes the body layer that forms the drift layer structure and the second pn junction, and the body layer exists between the processing surface and the drift layer structure. The trench exposes the drift layer structure. A dopant is implanted through the lower portion of the trench to form a shield region that forms the drift layer structure and the first pn junction. Dielectric spacers are formed on the sidewalls of the trench. A buried portion of the auxiliary electrode is formed in the lower section of the trench, and the buried portion is adjacent to the shield region.

  Further embodiments are described in the dependent claims. Those skilled in the art will recognize additional features and advantages upon reading the following detailed description and upon viewing the accompanying drawings.

  The accompanying drawings are included to provide a further understanding of the embodiments, are incorporated in and constitute a part of this specification. The drawings illustrate this embodiment and, together with the detailed description, serve to explain the principles of the embodiment. Further embodiments and intended advantages will be readily appreciated as they become more fully understood by reference to the following detailed description.

According to one embodiment, a trench structure with a first segment with a gate electrode formed in at least an upper section and a second segment with an auxiliary electrode extending between the first face and the shield region. 1 is a schematic vertical cross-sectional view of a portion of a semiconductor device that includes it. FIG. 2 is a schematic vertical cross-sectional view of a portion of a semiconductor device comprising a first segment formed in a first trench structure and a second segment formed in a second trench structure, according to an embodiment. FIG. 6 is a schematic perspective view of a portion of a semiconductor device in which a gate electrode pulls a buried portion of an auxiliary electrode away from a first surface of a semiconductor body in a first segment, according to a further embodiment. FIG. 6 is a schematic perspective view of a portion of a semiconductor device in which first and second segments alternate along the longitudinal axis of a trench structure, according to another embodiment. FIG. 6 is a schematic vertical cross-sectional view of a portion of a semiconductor device with a gate electrode separating a buried portion of an auxiliary electrode from a first surface in a first segment of a trench structure, according to a further embodiment. 1 is a schematic horizontal cross-sectional view of a portion of a semiconductor device with a stripe-shaped trench structure, according to an embodiment. FIG. 3B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 3A along line BB orthogonal to the longitudinal axis of the trench structure. FIG. FIG. 3B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 3A along line CC along the longitudinal axis of the trench structure. FIG. 2 is a schematic plan view of a portion of a semiconductor device according to an embodiment, relating to a gate conductor structure connecting separated gate electrode portions. FIG. 4B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 4A along line BB orthogonal to the longitudinal axis of the trench structure. FIG. 4B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 4A taken along line CC, perpendicular to the longitudinal axis of the trench structure. FIG. 4B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 4A along line DD along the longitudinal axis of the trench electrode structure. 4B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 4A taken along line EE along the longitudinal axis of the mesa portion. FIG. 1 is a schematic plan view of a portion of a semiconductor device according to an embodiment, relating to a trench structure with parallel sidewalls inclined relative to a normal. FIG. FIG. 5B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 5A along line BB orthogonal to the longitudinal axis of the trench structure. FIG. 2 is a schematic plan view of a portion of a semiconductor device according to an embodiment, with a trench structure having parallel vertical sidewalls and a longitudinal axis parallel to the <11-20> crystal axis. FIG. 6B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 6A taken along line BB perpendicular to the longitudinal axis of the trench structure. 1 is a schematic plan view of a portion of a semiconductor device according to an embodiment, with a trench structure having parallel vertical sidewalls and a longitudinal axis parallel to the <1-100> crystal axis. FIG. FIG. 7B is a schematic vertical cross-sectional view of the semiconductor device portion of FIG. 7A along line BB orthogonal to the longitudinal axis of the trench structure. 1 is a schematic horizontal and vertical cross-sectional view of a portion of a semiconductor device, according to an embodiment for a grid-shaped trench structure. FIG. 1 is a schematic horizontal and vertical cross-sectional view of a portion of a semiconductor device, according to an embodiment for a grid-shaped trench structure. FIG. FIG. 6 is a schematic horizontal and vertical cross-sectional view of a portion of a semiconductor device, according to a further embodiment relating to a grid-shaped trench structure. FIG. 6 is a schematic horizontal and vertical cross-sectional view of a portion of a semiconductor device, according to a further embodiment relating to a grid-shaped trench structure. FIG. 6 is a schematic horizontal cross-sectional view of a portion of a semiconductor device according to a further embodiment. FIG. 6 is a schematic horizontal cross-sectional view of a portion of a semiconductor device according to a further embodiment. 6 is a simplified flowchart of a method for manufacturing a semiconductor device with an auxiliary electrode adjacent to a buried shield region, according to an embodiment. It is a schematic vertical sectional view of a part of a semiconductor substrate for illustrating a method for manufacturing a semiconductor device having an auxiliary electrode adjacent to a shield region after trench formation. FIG. 12B is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12A after forming a shield region on the vertical protrusion of the trench. FIG. 12B is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12B during heat treatment. 12D is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12C after formation of the sacrificial oxide layer. FIG. 12D is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12D after dielectric spacer formation. FIG. 12D is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12E after selective oxidation of an auxiliary electrode formed in the lower portion of the trench. FIG. 12D is a schematic vertical cross-sectional view of the semiconductor substrate portion of FIG. 12F after formation of the gate electrode. FIG.

  In the following detailed description, references are made to the accompanying drawings that form a part hereof and are shown by way of illustration of specific embodiments. It is to be understood that other embodiments can be utilized and structural or logical changes can be made without departing from the scope of the present disclosure. For example, features illustrated or described with respect to certain embodiments can be used with respect to or in conjunction with other embodiments to yield still further embodiments. The present disclosure is intended to encompass such modifications and variations. The examples are described using a specific language that is not to be construed as limiting the scope of the appended claims. The drawings are not to scale and are for illustrative purposes only. Unless otherwise stated, corresponding elements in the different figures are denoted by the same reference signs.

  Terms such as “having”, “containing”, “including”, “comprising” and the like are non-limiting, and these terms include the described structure, Indicates the presence of an element or feature, but does not exclude additional elements or features. The articles “a”, “an” and “the” are intended to include the plural as well as the singular unless the context clearly indicates otherwise.

  The term “electrically connected” refers to permanent low ohmic connections between electrically connected elements (eg, through direct contact between the elements or through metal and / or heavily doped semiconductor material). Low ohmic connection). The term “electrically coupled” means that one or more intervening elements suitable for signal transmission are electrically coupled elements (eg, a low ohmic connection in a first state and a high ohmic electrical decoupling in a first state). Element that can be controlled to provide temporarily in two states).

  The figure shows the relative doping concentration by indicating "-" or "+" next to the doping type "n" or "p". For example, “n−” means a doping concentration lower than the doping concentration of the “n” doping region, and the “n +” doping region has a higher doping concentration than the “n” doping region. Doping regions with the same relative doping concentration do not necessarily have the same absolute doping concentration. For example, two different “n” doping regions may have the same or different absolute doping concentrations.

  FIG. 1 shows a semiconductor device 500 that includes a transistor cell TC. Semiconductor device 500 includes, by way of example, an IGFET (Insulated Gate Field Effect Transistor), for example, a MOSFET (Metal Oxide Semiconductor FET) in the normal sense for FETs with metal gates and FETs with gates derived from semiconductor materials, It may be or may include an IGBT (insulated gate bipolar transistor), or an MCD (MOS controlled diode).

  The semiconductor device 500 includes a semiconductor body 100 based on silicon carbide (SiC). The transistor cell TC is formed on the front surface defined by the first surface 101 of the semiconductor body 100. The drift structure 130 is formed between the transistor cell TC and the second surface 102 of the semiconductor body 100 on the back side, and the second surface 102 is parallel to the first surface 101. The direction parallel to the first and second surfaces 101 and 102 is the horizontal direction, and the direction orthogonal to the first surface 101 defines the vertical direction.

  The drift structure 130 is lightly doped between a heavily doped base portion 139 that may be directly adjacent to the second surface 102 and between the transistor cell TC and the lightly doped base portion 139. A drift zone 131 may be included. The drift structure 130 may further include a current spreading zone. The current spreading zone may be disposed between the body region 120 and the lightly doped drift zone 131. The current spreading zone has a higher doping concentration than the drift zone 131.

  The trench structure 150 extends from the first surface 101 into the semiconductor body 100 and into the drift structure 130. The mesa portion 190 of the semiconductor body 100 is directly adjacent to the trench structure 150 laterally and separates adjacent trench structures 150 from each other. The trench structure 150 may include at least one trench in the semiconductor body 100. Throughout this specification, the trench may be an electrode trench of the semiconductor device 500.

  The mesa portion 190 includes a body region 120 that forms a drift structure 130 and a second pn junction pn2 and forms a source zone 110 and a third pn junction pn3, the source zone 110 comprising the body region 120, Between the first surface 101.

  The trench structure 150 includes a first segment 151 and a second segment 152. The first and second segments 151, 152 extend laterally from the first sidewall of the trench structure 150 to the opposite second sidewall, the first and second sidewalls being inclined. (For example, perpendicular to the first surface 101). The first and second sidewalls form the long side of the trench structure 150 that extends perpendicular to the cross-sectional plane.

  The first segment 151 includes a gate electrode 155 formed in at least an upper section of the first segment 151, and the upper section faces the first surface 101. The gate electrode 155 may be formed only in the upper section so that the gate electrode 155 is spaced from the lower portion of the trench structure 150, for example by a buried portion of the auxiliary electrode 157. According to other embodiments, the gate electrode 155 extends from the top to the bottom of the first segment 151 and the dielectric structure (eg, the gate dielectric 153 or another dielectric portion) is a trench structure. Along the lower portion of 150, the gate electrode 155 is dielectrically insulated from the semiconductor body 100. The gate dielectric 153 can electrically isolate the gate electrode 155 from the semiconductor body 100. The gate electrode 155 may completely fill the upper portion of the first segment 151 between the two portions of the gate dielectric 153 on both long sides of the first segment 151.

  The second segment 152 includes an auxiliary electrode 157 that extends from a plane that is at least flush with the first surface 101 to the bottom of the trench structure 150. A field dielectric 159 may laterally separate the auxiliary electrode 157 from the semiconductor body 100 (eg, from the drift structure 130). The thickness of the field dielectric 159 may be greater than or equal to the thickness of the gate dielectric 153. The auxiliary electrode 157 may completely fill the lower portion of the trench structure 150 between the portions of the field dielectric 159 on both long sides of the trench structure 150.

  The gate electrode 155 may be electrically connected to the gate terminal G. The source zone 110 and the main body region 120 may be electrically connected to the first load terminal L1. The auxiliary electrode 157 may be electrically connected to the first load terminal L1, another terminal of the semiconductor device 500, or the output of the internal driver or voltage regulator circuit.

  At least the shield region 140 below the second segment 152 is in ohmic contact (specifically, low ohmic contact) with the auxiliary electrode 157, and forms the drift structure 130 and the first pn junction pn1. The shield region 140 may be formed at least on the vertical protrusion of the second segment 152 and may be directly adjacent to the auxiliary electrode 157. The vertical extension v0 of the shield region 140 may be at least 500 nm (eg, at least 1.5 μm or at least 2.0 μm). The semiconductor device 500 may include a plurality of separate shield regions 140. For example, multiple portions of the drift structure 130 may separate the shield regions 140 from one another. The plurality of shield regions 140 may form the drift structure 130 and a plurality of first pn junctions pn1.

  The transistor cell TC may be an n-channel type comprising a p-doped body region 120, an n-doped source zone 110 and an n-doped drift zone 131, or an n-doped body region 120, a p-doped source zone 110 and a p-doped drift zone. A p-channel transistor cell having 131 may be used. The following description relates to a semiconductor device 500 comprising an n-channel transistor cell TC. Similar considerations apply to semiconductor devices with p-channel transistor cells TC.

  A voltage at the gate terminal G exceeding the threshold voltage turns on the transistor cell TC. Due to the field effect, the accumulated minority charge carriers form an inversion channel in the body region 120 along the gate dielectric 153. The inversion channel connects the source zone 110 to the drift structure 130 so that the load current flows between the body region 120 and the first load terminal L1 and the second load terminal L2.

  When the voltage at the gate terminal G falls below the threshold voltage, the transistor cell TC is turned off. In the off state, the second pn junction pn2 remains reverse biased and the vertical extension of the drift zone 131 and the dopant of the drift zone 131 between the second pn junction pn2 and the base portion 139. The concentration determines the voltage blocking capability of the semiconductor device 500. A depletion layer extending laterally from the shield region 140 shields the gate dielectric 153 to some extent against the potential of the second load terminal L2, and clamps voltage breakdown at the first pn junction pn1. The buried auxiliary electrode 157 forms part of a direct low ohmic connection between the shield region 140 and, for example, the first load terminal L1.

  The auxiliary electrode 157 is derived from a material whose charge carrier mobility is significantly higher than that of highly doped single crystal silicon carbide. For example, the auxiliary electrode 157 may be composed of a metal-containing layer and / or heavily doped polycrystalline silicon, or may include a metal-containing layer and / or heavily doped polycrystalline silicon. Good. In the case of avalanche breakdown, the auxiliary electrode drains avalanche current to the first load terminal L1 along the low ohmic path and without the flow of vertical charge carriers through the mesa portion 190, It can be effective as a base current of a parasitic npn bipolar junction transistor formed by the source zone 110, the body region 120, and the drift zone 131. In this way, the auxiliary electrode 157 combined with the shield region 140 significantly improves the avalanche durability of the semiconductor device 500.

  More semiconductor material can be assigned to the functionality of the transistor as compared to the method using a shield region connection through the doped region of the mesa portion 190. The distance between adjacent trench structures 150 may be reduced, and in order to reduce the connection resistance between the inversion channel and the drift structure 130, the dopant concentration in the portion of the drift structure 130 immediately adjacent to the body region 120 is further increased. Can be increased.

  The first segment 151 and the second segment 152 are formed side by side so that the lateral extension of the depletion region along the first pn junction pn1 reduces the effective electric field strength in the gate dielectric 153. The

  2A and 2B show different embodiments of the first and second segments 151, 152, in FIG. 2A, the first and second segments 151, 152 are formed in different trench structures 150, in FIG. 2B. , First and second segments 151, 152 are formed in different sections of the same trench structure 150. In FIG. 2A, the first segment 151 is formed only in the first trench structure 1501, the second segment 152 is formed only in the second trench structure 1502, and the first and second trench structures 1501, 1502 are separated from each other by a mesa portion 190.

  The first and second trench structures 1501 and 1502 may have a stripe shape whose longitudinal axis is orthogonal to the cross-sectional plane, and the first and second trench structures 1501 and 1502 have the same width and the same vertical extension. You may do it. According to another embodiment, the first vertical extension v1 of the first trench structure 1501 may be smaller than the second vertical extension v2 of the second trench structure 1502. One, two, or more first trench structures 1501 may be disposed between a pair of adjacent second trench structures 1502.

  The gate electrode 155 extends from the first surface 101 to the lower portion of the first trench structure 1501. The auxiliary electrode 157 extends from the first surface 101 to the lower part of the second trench structure 1502. Gate electrode 155 and auxiliary electrode 157 may be obtained by a single single deposition process of heavily p-doped polycrystalline silicon. The gate dielectric 153 that separates the gate electrode 155 from the semiconductor body 100 may have a thickness that is less than or equal to the thickness of the field dielectric 159 that laterally separates the auxiliary electrode 157 from the drift structure 130.

  In FIG. 2B, the first segments 151 and the second segments 152 alternate along the horizontal longitudinal axis of the trench structure 150. The extension of the second segment 152 along the longitudinal axis of the trench structure 150 is the lower portion of the gate dielectric 153 directly adjacent to the drift structure 130 to the extent that avalanche breakdown is stopped at the first pn junction pn1. Is selected such that the electric field strength at is reduced. The isolation dielectric 156 electrically insulates the auxiliary electrode 157 from the gate electrode 155 in the same trench structure 150. The gate dielectric 153 may have the same thickness as the field dielectric 159 or the gate dielectric 153 may be thinner than the field dielectric 159.

  In FIG. 2C, the gate electrode 155 is such that the gate electrode 155 separates the buried portion 1571 of the auxiliary electrode 157 from a plane that is coplanar with the first surface 101 in the first segment 151 of the trench structure 150. Between the embedded portion 1571 of the auxiliary electrode 157 and the first surface 101, it is arranged along the vertical direction. A gate dielectric 153 having a first thickness th1 separates the gate electrode 155 at least laterally from the body region 120. A field dielectric 159 having a second thickness th2, which may be greater than the first thickness th1, separates the auxiliary electrode 157 at least laterally from the drift structure 130.

  Apart from the dielectric isolation between the gate electrode 155 and the semiconductor body 100, the gate electrode 155 may fill the entire upper section of the trench structure 150. The auxiliary electrode 157 may completely fill the trench structure 150 between the two portions of the field dielectric 159 on both long side walls of the trench structure 150 in the lower section of the trench structure 150.

  The shield region 140 in the vertical protrusion of the trench structure 150 may have a vertical extension v0 of at least 0.5 μm (eg, at least 1.5 μm).

  In a second segment in a plane parallel to the cross-sectional plane of FIG. 2D, the trench structure 150 electrically connects the auxiliary electrode 157 to the first load terminal L1, the auxiliary terminal, or an internal network node of the semiconductor device 500. Structures may be included. The connection structure may be in deep contact. According to one embodiment, the gate electrode 155 and the isolation dielectric 156 are not present in the second segment, and the connecting portion of the auxiliary electrode is embedded in a plane that is coplanar with the first surface 101. It extends between the recessed portion 1571.

  In FIG. 2D, the first segment 151 includes a buried portion 1571 of the auxiliary electrode in the lower section between the upper section that includes the gate electrode 155 and the lower portion of the trench structure 150. The shield region 140 forms a continuous stripe along the entire horizontal longitudinal extension of the trench structure 150. The second segment 152 further includes a connection portion 1572 of the auxiliary electrode 157. The isolation dielectric 156 includes a horizontal portion extending in parallel with the first surface 101 in the first segment 151.

  3A-3C illustrate a semiconductor device 500 that includes a semiconductor body 100 derived from a hexagonal lattice wide bandgap semiconductor material (eg, 2H—SiC (2H polytype SiC), 6H—SiC, or 15R—SiC). Indicates. According to an embodiment, the semiconductor material is 4H polytype silicon carbide (4H—SiC).

  The first surface 101 on the front surface of the semiconductor body 100 may coincide with the main crystal plane, and the first surface 101 is a flat surface. Alternatively, the orientation of the first surface 101 may be inclined with respect to the main crystal plane by an off-axis angle α (eg, about 4 °) whose absolute value may be at least 2 ° and at most 12 °. , The first surface 101 may be flat or displaced relative to each other and parallel to the first surface section inclined relative to the horizontal average plane by an off-axis angle α and the first surface section And a second surface section connecting the first surface sections such that the cross-sectional line of the first surface 101 approximates a serrated line.

  The horizontal direction is the direction parallel to the flat first surface 101 or the average plane of the sawtooth first surface 101. A normal 104 to the planar first surface 101 or to the average plane of the serrated first surface 101 defines a vertical direction.

  In the illustrated embodiment, the <0001> crystal axis is tilted relative to the normal 104 by an off-axis angle α (> 0), and the <11-20> crystal axis is by an off-axis angle α. It is inclined with respect to the horizontal plane, and the <1-100> crystal axis extends perpendicular to the cross-sectional plane of FIG. 3B.

  On the back side of the semiconductor body 100, the second surface 102 extends parallel to the first surface 101. The distance between the front first surface 101 and the back second surface 102 is positively correlated with the nominal blocking capability of the semiconductor device 500. The total thickness of the semiconductor body 100 between the first surface 101 and the second surface 102 may be in the range of several hundred nm to several hundred μm.

  The transistor cell TC is formed on the front surface along the first surface 101. The drift structure 130 separates the transistor cell TC from the second surface 102. The drift structure 130 includes a lightly doped base portion 139 immediately adjacent to the second face 102 and a lightly doped drift zone between the transistor cell TC and the lightly doped base portion 139. 131 may be included.

  The heavily doped base portion 139 may be a substrate portion obtained from a crystal ingot, or may include a substrate portion obtained from a crystal ingot, and a second directly adjacent to the second surface 102. An ohmic contact with the load electrode 320 is formed. The average dopant concentration in the base portion 139 is high enough to ensure ohmic contact with the second load electrode 320. When the semiconductor device 500 is an IGFET or includes an IGFET, the base portion 139 has the same conductivity type as the drift zone 131. When the semiconductor device 500 is an IGBT, the base portion 139 has the complementary conductivity type of the drift zone 131 or includes zones of both conductivity types.

The drift zone 131 may be formed in a layer grown by epitaxy on the base portion 139. The average pure dopant concentration in the drift zone 131 may be in the range of 1E15 cm ^{−3 to} 5E16 cm ⁻³ . The drift structure 130 may further include a doped region, for example, a field stop zone, a conductivity zone of the drift zone 131, or a counter-doped region. In the illustrated embodiment, the drift structure 130 includes a current spreading zone 132 that is immediately adjacent to the drift zone 131 opposite the base portion 139. The average dopant concentration in the current spreading zone 132 is at least 150% of the average dopant concentration in the drift zone 131 (eg, at least twice that in the drift zone 131).

The drift zone 131 may be directly adjacent to the base portion 139, or a buffer layer that forms a unipolar homojunction with the drift zone 131 may exist directly between the drift zone 131 and the base portion 139. As an example, the vertical extension of the buffer layer may be about 1 μm and the average dopant concentration of the buffer layer may be in the range of 3E17 cm ^{−3 to} 1E18 cm ⁻³ . The buffer layer can relieve the mechanical stress of the semiconductor body 100, reduce the defect density, and / or contribute to shaping the electric field in the drift structure 130.

  The transistor cell TC is formed along a trench structure 150 that extends from the first surface 101 into the semiconductor body 100 and into the drift structure 130. The mesa portion 190 of the semiconductor body 100 separates adjacent trench structures 150 from each other laterally.

  The longitudinally extending portion of the trench structure 150 along the first horizontal direction is larger than the width of the trench structure 150 along the second horizontal direction orthogonal to the first horizontal direction. The trench structure 150 may be a long stripe extending from one side of the transistor cell region to the other, and the length of the trench structure 150 may be up to several hundred micrometers or several millimeters. According to other embodiments, a plurality of isolated trench structures 150 may be formed along lines extending from one side of the transistor cell region to the opposite side. The lower portion of the trench structure 150 may be pointed or rounded.

  The trench structures 150 may be equally spaced, may have equal widths, and may form a regular pattern, and the pitch (distance between the centers) of the trench structures 150 may be 1 μm to 10 μm ( For example, it may be within a range of 2 μm to 5 μm. The vertically extending portion of the trench structure 150 may be within a range of 0.3 μm to 5 μm (for example, within a range of 0.5 μm to 2 μm).

  The sidewalls on the long sides of the trench structure 150 may be perpendicular to the first surface 101, oblique to the normal 104, or taper as the distance to the first surface 101 increases. Also good. For example, the taper angle of the trench structure 150 relative to the vertical direction may be equal to the off-axis angle α, or at least the first mesa sidewall 191 of the two opposed longitudinal mesa sidewalls has a high charge carrier mobility. The off-axis angle α may be deviated by ± 1 degree or less so as to be formed on a crystal plane (for example, {11-20} crystal plane).

  The second mesa side wall 192 opposite to the first mesa side wall 191 is twice the off-axis angle α, for example, 4 degrees or more (for example, about 8 degrees) with respect to the main crystal plane. It may be inclined. The first and second mesa side walls 191, 192 are on the longitudinal sides of the intermediate mesa portion 190 and directly adjacent to two adjacent trench structures 150.

  Each mesa portion 190 may include one source zone 110 with interconnected sections, or mesa contact structures 315 that are separated from each other within the mesa portion 190 but directly adjacent to the mesa portion 190. May include two or more source zones 110 that are electrically connected to each other by a low impedance path through. The source zone 110 may be at least directly adjacent to the first mesa sidewall 191 and directly adjacent to the second mesa sidewall 192, or may be spaced from the second mesa sidewall 192.

  The mesa portion 190 further includes a body region 120 that separates the source zone 110 from the drift structure 130, the body region 120 forms a second pn junction pn 2 with the drift structure 130, and the source zone 110 and the third region A pn junction pn3 is formed. The body region 120 may be directly adjacent to at least the first mesa sidewall 191 and directly adjacent to the second mesa sidewall 192, or may be spaced from the second mesa sidewall 192. The vertically extending portion of the main body region 120 corresponds to the channel length of the transistor cell TC and may be in the range of 0.2 μm to 1.5 μm. A passivation zone 129 that forms a monopolar junction with the body region 120 may be formed along the second mesa sidewall 192.

  The mesa contact structure 315 extends through the interlayer dielectric 210 and electrically connects the source zone 110 and the body region 120 to the front first load electrode 310. The mesa contact structure 315 may end on the first surface 101 and may be in direct contact with the source zone 110 and the body region 120 alternately along the horizontal longitudinal direction of the mesa portion 190. For example, the source zone 110 may be formed mainly or exclusively along the first segment 151, and the body region 120 may be formed mainly or exclusively along the second segment 152. It may be directly adjacent to the surface 101.

  The first load electrode 310 may form the first load terminal L1 that may be effective as the anode terminal of the MCD, as the source terminal of the IGFET, or as the emitter terminal of the IGBT, or may be connected to the first load terminal L1. It may be electrically connected or coupled.

  The second load electrode 320 is directly adjacent to the second surface 102 and the base portion 139 of the drift structure 130. The second load electrode 320 on the back surface may form a second load terminal L2 that can be effective as a cathode terminal of the MCD, a drain terminal of the IGFET, or a collector terminal of the IGBT, or a second load terminal L2 may be electrically connected or coupled.

The shield region 140 may be formed along the lower portion of the trench structure 150, and may be directly adjacent to the lower portion of the trench structure 150, for example. The shield region 140 forms a first pn junction pn1 with the drift structure 130 (eg, with the drift zone 131). The shield region 140 may be symmetric with respect to the vertical central axis of the trench structure 150. The shield region 140 may be completely within the vertical protrusion of the trench structure 150 or may be formed only at the central portion of the vertical protrusion of the trench structure 150. Mean dopant concentration in the shield region ^140, 1E17cm ^{-3 ~2E19cm} -3 ^(e.g., 8E17cm ^{-3 ~8E18cm} -3) may be in the range of.

  Trench structure 150 includes a conductive gate electrode 155 that may include or be composed of heavily doped (eg, p-doped) polycrystalline silicon and / or metal-containing layers. To do. The gate electrode 155 may be electrically connected to a gate metallization that forms a gate terminal or is electrically connected or coupled to the gate terminal.

  The gate dielectric 153 separates the gate electrode 155 from the semiconductor body 100 along at least the first mesa sidewall 191. The gate dielectric 153 includes a semiconductor dielectric (eg, thermally grown or deposited semiconductor oxide (eg, silicon oxide)), semiconductor nitride (eg, deposited or thermally grown silicon nitride), semiconductor oxynitride ( (E.g., silicon oxynitride), other deposited dielectric materials, or any combination thereof may be included or constructed. According to certain embodiments, the gate dielectric 153 is based on silicon oxide that has been densified and partially nitrided after deposition. The gate dielectric 153 may be formed for the threshold voltage of the transistor cell TC in the range of 1.0V to 8V.

  The trench structure 150 further includes an auxiliary electrode 157 that forms a low resistance interface with the shield region 140. For example, the auxiliary electrode 157 makes ohmic contact with the shield region 140 (specifically, low ohmic contact). According to some embodiments, the auxiliary electrode 157 may be directly adjacent to the shield region 140. The interface between the auxiliary electrode 157 and the shield region 140 at the bottom of the trench may be parallel to the first surface 101. The auxiliary electrode 157 may include or consist of heavily doped (eg, p-doped) polycrystalline silicon and / or a metal-containing layer.

  The auxiliary electrode 157 is electrically connected to a potential different from the potential of the gate terminal G and the potential of the second load terminal L2. According to an embodiment, the auxiliary electrode 157 is electrically connected to the first load terminal L1, the auxiliary terminal, or an internal network node.

  The isolation dielectric 156 separates the auxiliary electrode 157 from the gate electrode 155. The field dielectric 159 may laterally separate the auxiliary electrode 157 from the drift structure 130. The field dielectric 159 may be formed along the sidewall of the trench structure 150 and may have an opening at the bottom of the trench. In one example, the field dielectric 159 is formed only along the sidewalls of the trench structure 150, and the opening may have the size of the entire trench bottom. According to another embodiment, the field dielectric 159 may include a portion that extends along the trench bottom, with the remaining opening being smaller than the entire trench bottom.

  The thickness th2 of the field dielectric 159 may be larger than the thickness th1 of the gate dielectric 153. For example, the thickness th2 of the field dielectric 159 may be at least 120% (eg, at least 150%) of the thickness th1 of the gate dielectric 153.

  Isolation dielectric 156 and field dielectric 159 may have the same configuration and / or may include the same material, may have different configurations, and / or are different. Materials may be included. For example, isolation dielectric 156 and field dielectric 159 may include deposited silicon oxide, silicon nitride, silicon oxynitride, other deposited dielectric materials, or any combination thereof. Alternatively, or in addition to the deposited layer, field dielectric 159 may include thermally grown silicon oxide or silicon oxynitride. The dielectric breakdown voltage of field dielectric 159 is significantly higher than that of gate dielectric 153.

  In the first segment 151 of the trench structure 150, the gate electrode 155 is formed between the buried portion 1571 of the auxiliary electrode 157 and a plane that is on the same plane as the first surface 101. The gate electrode 155 pulls the buried portion 1571 away from the first surface 101, and the gate electrode 155 completely fills the upper section of the trench structure 150 in the first segment 151 and is parallel to the longitudinal direction of the trench structure 150. Extending from a portion of the gate dielectric 153 on the first trench sidewall to a portion of the gate dielectric 153 on the opposite trench sidewall. The buried portion 1571 of the auxiliary electrode 157 completely fills the lower portion of the trench structure 150 and from the portion of the field dielectric 159 on the first trench sidewall of the trench structure 150 to the field on the opposite trench sidewall. Extending to the dielectric 159 portion.

  In the second segment 152 of the trench structure 150, the gate electrode 155 is absent and the auxiliary electrode 157 is directly connected to the first load electrode by a vertical path.

  According to some embodiments, the connecting portion 1572 of the auxiliary electrode 157 may extend between the embedded portion 1571 and the first surface 101, and the auxiliary contact structure 317 connects the connecting portion 1572 to the first. The load electrode 310 is electrically connected. The connecting portion 1572 may completely fill the upper section of the second segment 152 and from the portion of the field dielectric 159 on the first trench sidewall of the trench structure 150 to the second opposite trench sidewall. It may extend into the upper field dielectric 159 portion.

  The second segments 152 may alternately exist with the first segments 151 along the horizontal longitudinal direction of the trench structure 150, and the horizontal longitudinal direction is parallel to the first surface 101. A length ratio of the first segment 151 with the gate electrode 155 to the second segment 152 without the gate electrode 155 along the horizontal longitudinal direction may be at least 5: 1 (eg, at least 10: 1). .

  In the on state, the passivation zone 129 is along the second mesa side wall 192 (along which the charge carrier mobility may be significantly lower than when along the first mesa side wall 191). Channel formation can be suppressed. In the on state, the load electrode flows only along the first mesa side wall 191.

  In the blocking mode, a depletion zone extending along the first pn junction pn1 extends laterally into the current spreading zone 132 and the electric field strength at the gate dielectric 153 exceeds 3.5 MV / cm. The gate dielectric 153 is shielded from the high voltage applied at the second load terminal L2 so that it is not present (eg, does not exceed 3 MV / cm). Electrical connection to the shield region 140 through the auxiliary electrode 157 at the bottom of the trench structure 150 is more efficient than the p-doped region in the mesa portion 190 of the comparative example, and in the case of avalanche breakdown, the first pn Charge carriers (eg, holes) flow out of the n-doped drift zone 131 that passes through the junction pn1. Accordingly, the distance between adjacent trench structures 150 can be reduced such that the effective transistor area increases.

  The voltage breakdown is stopped along the shield region 140 and the resulting breakdown current can be absorbed by a conductive material having a better conductivity than doped single crystal silicon carbide. In the case of an avalanche, the absence of any charge carrier flow through the mesa portion 190 turns on the parasitic npn bipolar junction transistor formed by the n-doped source zone 110, the p-doped body region 120, and the n-doped drift structure 130. To completely suppress it.

  By arranging the shield region 140 on the vertical protrusion of the trench structure 150, the shield region 140 can be easily formed by implantation through the lower portion of the opening trench. As a result, the deep shield region 140 can be formed with relatively low acceleration energy. A deep shield region 140 in combination with a more heavily doped current spreading zone 132 can provide a side compensation structure that facilitates further reduction of on-state resistance.

  Connection portion 1572 divides gate electrode 155 in trench structure 150 into separate gate portions that are insulated from connection portion 1572 by isolation dielectric 156. The isolated gate portions in the trench structure 150 may be electrically connected to each other in the metallization layer that includes the gate connection lines, and the intermediate dielectric that isolates the first load electrode 310 from the semiconductor body 100. It may be embedded in 210. According to some embodiments, the separated gate portions of the gate electrode 155 in the trench structure 150 may be electrically connected by a gate conductor structure 158 of the material of the gate electrode 155, the gate conductor structure 158 being a first conductor structure 158. Formed on a plane between the load electrode 310 and the first surface 101.

  4A-4E relate to embodiments with a gate conductor structure 158 that electrically connects the separated gate portions of the gate electrode 155. The gate conductor structure 158 may be disposed on the first surface 101 or above the first surface 101.

  FIG. 4A shows a vertical projection of the gate electrode 155 of the first segment 151, which is parallel to the second segment 152 in the vertical projection of the first connection portion 1581 and the mesa portion 190 between the adjacent second segments 152. A gate conductor structure 158 including a second connection portion 1582 extending in FIG. The first and second connection portions 1581 and 1582 may be adjacent to each other. In the illustrated embodiment, a third connection portion 1583 connects the first and second connection portions 1581, 1582 laterally. The first connection portion 1581 may be directly above and connected to the gate electrode 155 of the first segment 151. The second connection portion 158 may be above the mesa portion 190 and spaced from the mesa portion 190. The gate conductor structure 158 may form a grid with openings for isolated auxiliary contact structures 317 and mesa contact structures 315.

  As shown in FIG. 4B, the first connection portion 1581 of the gate conductor structure 158 is in the vertical protrusion of the gate electrode 155. A source contact plug 316 derived from a highly conductive material (eg, a metal-containing material) may be formed along the longitudinal central axis of the mesa portion 190 and may be directly adjacent to the mesa contact structure 315.

  The source contact plug 316 extends through the source zone 110 and into the body region 120. Even in the case of an avalanche, the source contact plug 316 may be adapted to provide a low ohmic connection to the source zone 110 since little charge carriers will flow out of the body region 120. For example, the source contact plug 316 may be formed without aluminum (Al). For example, a source contact plug 316 that includes a combination of a nickel (Ni) -derived or thin nickel silicide (NiSi) layer and a reinforcing portion of, for example, tungsten (W) provides low ohmic contact to the source zone 110 and floating of the body region 120. Provide a sufficiently high conductivity to prevent

  FIG. 4C shows that the second connection portion 1582 of the gate conductor structure 158 is within the vertical protrusion of the mesa portion 190. The source contact plug 316 may also be formed in the vertical protrusion of the second connection portion 1582.

  According to FIG. 4D, the auxiliary contact structure 317 electrically connects the connecting portion 1572 of the auxiliary electrode 157 of the second segment 152 to the first load electrode 310. The isolation dielectric 156 includes a vertical portion that laterally isolates the connection portion 1572 of the auxiliary electrode 157 from the gate electrode 155.

  FIG. 4E shows the entire longitudinal extension of the second connection portion 1582 of the gate conductor structure 158. The buried source contact plug 316 is formed continuously and without a gap along the length of the mesa portion 190.

  In the 4H—SiC semiconductor body 100 having a crystal orientation as illustrated in FIGS. 3A and 3B, the first mesa side wall 191 may exhibit charge carrier mobility that is significantly higher than the second mesa side wall 192. Good. The formation of inversion channels through the body region 120 along the second mesa sidewall 192 is suppressed to achieve a uniform threshold voltage when the trench direction is perpendicular to the off-orientation direction of the first surface 101. May be. For example, all source zones 110 are spaced from the second mesa sidewall 192, and the dopant concentration in the portion of the body region 120 that is directly adjacent to the second mesa sidewall 192 is reduced by the passivation zone 129 shown in FIG. 3B, for example. May be significantly increased, or the thickness of the gate dielectric 153 may be significantly greater along the second mesa side wall 192 than when along the first mesa side wall 191.

  In FIGS. 5A and 5B, the second mesa side wall 192 is parallel to the first mesa side wall 191 and both the mesa side walls 191 and 192 have a charge carrier mobility of the first and second mesa side walls 191. , 192 and the normal 104 by the off-axis angle α. For example, the trench structure 150 of FIGS. 5A and 5B may be formed using directed ion beam etching, where the directed ion beam is tilted with respect to the normal 104 by an off-axis angle α. Hit it.

  In FIGS. 6A and 6B, the semiconductor device 500 is an n-channel field effect transistor with a p-doped body region 120. The <0001> main crystal axis is inclined with respect to the normal 104 by an off-axis angle α in the direction of the (11-20) main crystal plane. The horizontal longitudinal axis of the trench structure 150 is in the vertical plane of the <11-20> crystal direction, and the vertical first and second mesa sidewalls 191, 192 are (−1100) and (1-100) ) Crystal plane. The mobility of charge carriers in both crystal planes is such that the use of both the first and second mesa sidewalls 191, 192 overcompensates for lower charge carrier mobility relative to the (11-20) crystal plane. Almost equal.

  7A and 7B, the semiconductor device 500 is another n-channel field effect transistor in which the <0001> main crystal axis is inclined by an off-axis angle α in the direction of the <1-100> crystal axis. The longitudinal axis of the trench structure 150 is parallel to the <1-100> crystal direction, and the vertical first and second mesa sidewalls 191, 192 have approximately the same charge carrier mobility (11− 20) and (-1-120) crystal plane.

  In FIG. 7B, the auxiliary electrode 157 includes an interface layer 1575. The interface layer 1575 forms part of a low resistance contact (eg, ohmic contact) with the shield region 140. For example, the interface layer 1575 may be directly adjacent to the shield region 140. Interface layer 1575 may have a thickness of at least 5 nm (eg, at least 10 nm) and may include at least one metal (eg, aluminum). According to certain embodiments, interface layer 1575 includes a layer of aluminum nitride or aluminum titanium. A further portion of the auxiliary electrode 157 may be made of, for example, heavily doped (eg, p-doped) polycrystalline silicon.

  In FIGS. 8A and 8B, cross sections along lines BB and B′-B ′ are shown in one or more details (eg, for lateral dimensions and for the presence or absence of portions of source zone 110). ) May be the same as or different from each other.

  The trench structure 150 extends from the first surface 101 of the front surface of the silicon carbide body 100 into the silicon carbide body 100. The trench structure 150 forms a grid that includes a first set of first stripe portions 161 that intersect a second set of second stripe portions 162. A set of stripe portions 161, 162 may extend parallel to each other, or a set may include non-parallel symmetric pairs of stripe portions, where the symmetric pairs of stripe portions are Symmetric to each other.

  The first stripe portion 161 may intersect the second stripe portion 162 at a certain distance. The stripe portions 161, 162 may be straight or serpentine, and the serpentine stripe portions 161, 162 may include a series of repeating bends.

  In the illustrated embodiment, the first stripe portions 161 are straight and parallel to each other, and intersect orthogonally with the straight second stripe portions 162 that extend parallel to each other.

  Although the trench structure 150 may include an auxiliary electrode 157 and a gate electrode 155, the gate electrode 155 is disposed along a vertical direction between the auxiliary electrode 157 and a plane in which the first surface 101 extends. May be. The shield region 140 may be directly adjacent to the auxiliary electrode 157 below the trench structure 150. The shield region 140 may form a low ohmic contact with the auxiliary electrode 157, and may form the first pn junction pn1 with the drift structure 130 of the silicon carbide body 100.

  The drift structure 130 may be formed between the trench structure 150 and the second surface 102 on the back surface of the silicon carbide body 100 and may include a lightly doped drift zone 131.

  A mesa portion 190 of the silicon carbide body 100 is formed between two adjacent first stripe-shaped portions 161 and two adjacent second stripe-shaped portions 162 of the trench structure 150. The horizontal cross section of the mesa portion 190 may be, for example, a rectangle (eg, a square), a diamond, a hexagon, or an octagon. The edges of the horizontal section may be sharp, beveled or rounded.

  In mesa portion 190, body region 120 may extend across the entire horizontal cross section of mesa portion 190. The body region 120 forms a drift structure 130 (eg, a lightly doped drift zone 131 or current spreading zone) and a second pn junction pn2. The body region 120 forms the source zone 110 and the third pn junction pn3.

  The source zone 110 may be formed between the main body region 120 and the first surface 101. The heavily doped contact portion 128 of the source zone 110 and the body region 120 may be striped and on the top surface 191 of the mesa portion 190 so that the mesa portion 190 can be formed with a small horizontal cross-sectional area. It may be formed side by side.

  According to another embodiment, the source zone 110 may extend along the entire outer periphery of the mesa portion 190 and may completely surround the contact portion 128 along the top surface 191 and formed in the body region 120. The inverted channel may be connected directly to the source zone 110 along the entire circumference of the mesa portion 190.

  Contact portion 128 may extend from first surface 101 to main portion 125 of body region 120, contact portion 128 may have a higher dopant concentration than main portion 125, and main portion 125. Separates the contact portion 128 from the trench structure 150, from the drift structure 130, or both. For example, the maximum dopant concentration in contact portion 128 may be at least twice the maximum dopant concentration in main portion 125.

  The gate dielectric 153 may be formed along the entire outer periphery of the upper section of the mesa portion 190, which includes the body region 120. The gate dielectric 153 may be formed from silicon oxide or may include silicon oxide and / or a dielectric material having a dielectric constant greater than 3.9.

  In the on state of the semiconductor device 500, inversion channels may occur on more than two surfaces of the mesa portion 190 (eg, on three surfaces) or along the entire outer periphery of the mesa portion 190 in area units. The effective total channel width per hit can be greater than that of the striped mesa portion. A larger overall channel width reduces the on-state resistance RDSon.

Field dielectric 159 may laterally separate auxiliary electrode 157 from drift structure 130. The field dielectric 159 may be formed to withstand the maximum electric field strength that occurs along the trench structure 150 and may be thicker than the gate dielectric 153 and / or from the material of the gate dielectric 153. May include materials with low dielectric constants (eg, less than 3.9). For example, the field dielectric 159 may include silicon nitride Si ₃ N ₄ or may be composed of silicon nitride Si ₃ N ₄ .

  The first load electrode 310 may be directly adjacent to the top surface 191 of the mesa portion 190. Since silicon carbide exhibits a higher bandgap than silicon, silicon carbide transistor cells are less prone to latch-up, and the lateral alignment of source zone 110 and contact portion 128 is less than that of silicon devices. It does not matter. The first load electrode 310 may form a planar ohmic contact with the source zone 110 and the body region 120, and complicated processing of the trench contact can be avoided.

  The auxiliary electrode 157 may be electrically connected to the first load electrode 310 at the end of the trench structure 150 outside the transistor cell array including the transistor cell TC and / or at a selected position in the transistor array. Good. For example, the auxiliary electrode 157 may include a connection portion extending from the upper part to the lower part of the trench structure 150. The connecting portion may locally interrupt the gate electrode 155 in one of the stripe portions 161 and 162. The connecting portion may be arranged such that a local interruption of the gate electrode 155 in one of the stripe portions 161, 162 is bypassed by a continuous portion of the gate electrode 155 in the adjacent stripe portion 161, 162.

  The backside second load electrode 320 may be in direct contact with the base portion 139 of the drift structure 130. Base portion 139 may form ohmic contact with second load electrode 320 and may be directly adjacent to drift zone 131.

  The shape of the shield region 140 is perforated by a counter-doped path with a relatively small on-state current, but the shield region 140 can shield the body region 120 with high efficiency against the potential of the second load electrode 320. It may be in the form of a flat horizontal layer with a relatively flat interface to the drift structure 130 in the remaining part.

  Compared to a shield structure with a large counter-doping path and / or a step at the interface with the drift structure 130, the shield region 140 can provide a more uniform distribution of the electric field. A uniform electric field improves the voltage blocking capability and radiation hardness of the semiconductor device 500.

  An efficient shield also reduces the effect of the depletion zone on the body region 120 so that the length of the vertical extension of the body region 120 and the inversion channel of the transistor cell can be reduced. In silicon carbide, an effective layered shield region 140 is used to significantly reduce the on-state resistance RDSon because the resistance of the inversion channel dominates the on-state resistance for semiconductor devices with a nominal blocking voltage of at least 1700V or less. can do. This effect increases the channel width increase by using more than two faces of mesa portion 190 for the inversion channel.

  A very effective shield region 140 may further allow higher doping in the region of the drift structure 130 along the second pn junction pn2. Higher doping can improve the lateral distribution of the on-state current flowing through the drift structure 130 and further reduce the on-state resistance RDSon. The shield region 140 further reduces drain induced barrier lowering (DIBL) so that the influence of the potential of the second load electrode 320 on the threshold voltage of the transistor cell TC remains low.

  Even in a short circuit condition, the shield region 140 effectively shields the body region 120 and reduces channel length reduction. Since the decrease in channel length results in an increase in drain current, the shield region effectively improves short circuit durability by avoiding a decrease in channel length.

  Since the shield region 140 is directly connected to the first load electrode 310 through a low impedance path outside the silicon carbide crystal, the shield region 140 can be used as an efficient body diode. The electrical resistance of the low impedance path attenuates oscillations that can be triggered by switching of the transistor cell TC.

  The voltage breakdown through the shield region 140 results in the generated holes reaching the first load electrode 310 along a low ohmic path through the auxiliary electrode 157. Gate dielectric 153 and field dielectric 159 remain unaffected by the creation of charge carriers in the portion of the silicon carbide crystal close to gate dielectric 153 and / or field dielectric 159.

  The shield region 140 can further reduce the reverse transfer capacity Crss, and the low Crss allows for faster switching cycles and / or lower switching losses. On the other hand, the shield region 140 forms part of a gate-source capacitor that provides a more stable behavior of the semiconductor device 500 in terms of fluctuations in the drain-source voltage VDS and noise.

  In FIGS. 9A and 9B, the gate electrode 155 extends to the bottom of the trench, and a portion of the field dielectric 159 separates the shield region 140 from the gate electrode 155. Field dielectric 159 may have a greater thickness than gate dielectric 153. The first mesa portion 191 may include the body region 120 and the source zone 110 of the transistor cell TC. The second mesa portion 192 may include a conductive type diode region 127 of the shield region 140. The diode region 127 may connect the shield region 140 to the first load electrode 310.

  The drift structure 130 may include a current spreading zone 132 immediately adjacent to the body region 120. The current spreading zone 132 has the conductivity type of the drift zone 131 and distributes the flow of on-state charge carriers horizontally. The current spreading zone 132 can reduce the junction field effect that occurs between adjacent portions of the shield region 140 or can be used to adjust the strength of the junction field effect.

  The trench structure 150 may have vertical sidewalls, sidewalls that are inclined with respect to the vertical direction, or raised sidewalls. The stripe portions 161 and 162 of the trench structure 150 may be tapered as the distance to the first surface 101 increases, and the junction field effect between adjacent portions of the shield region 140 can be reduced. Alternatively, the stripe portions 161 and 162 of the trench structure 150 may taper as the distance to the first surface 101 decreases, and the junction field effect between adjacent portions of the shield region 140 and the shield region 140 may be reduced. The shield efficiency can be further increased.

  FIG. 10A shows a mesa portion 190 whose diamond has a horizontal cross section. The trench structure 150 includes a parallel first stripe portion 161 and a parallel second stripe portion 162 that intersects the first stripe portion 161 at an inclination angle γ, the inclination angle γ being less than 90 ° and It may be at least 10 °. Both the first stripe portion 161 and the second stripe portion 162 are straight stripes.

  FIG. 10B shows a mesa portion 190 whose horizontal cross section is a regular hexagon. The trench structure 150 includes a parallel first stripe portion 161 and a second stripe portion 162 that intersects the first stripe portion 161. The set of second stripe portions 162 includes a symmetric pair of second stripe portions 162, and the second stripe portions 162 of the symmetric pair are symmetric with respect to the intermediate symmetry axis. The section of the first stripe portion 161 may overlap the section of the second stripe portion 162. The first stripe 161 and the second stripe 162 are meandering stripes.

  11 and 12A-12G illustrate an example embodiment of a method for manufacturing a silicon carbide device. Silicon carbide devices are specifically referred to herein as FIGS. 1, 2A, 2B, 2C, 2D, 3A, 3B, 3C, 4A, 4B, 4C, 4D, 4E, 5A, 5B, 6A, 6B, It may be a semiconductor device as described in connection with the 7A, 7B, 8A, 8B, 9A, 9B, 10A, and 10B embodiments. Conversely, the semiconductor devices described herein may be manufactured using the methods described in connection with the embodiments of FIGS. 11 and 12A-12G.

  According to FIG. 11, a method for manufacturing a silicon carbide device with a transistor cell TC including a trench gate electrode includes forming a trench in a processing surface of a silicon carbide substrate (912), wherein the semiconductor substrate is drifted. A body layer is formed that forms a second pn junction with the layer, and a trench extends through the body layer and exposes the drift layer structure. A dopant is implanted through the bottom of the trench to form a shield region (914), which forms a first pn junction with the drift layer structure. Dielectric spacers are formed on both long sides of the trench 750 (916). A conductive material is deposited to form a buried portion of the auxiliary electrode that forms a low resistance contact with the shield region (918). The method provides a relatively deep shield area with relatively little additional effort.

  12A-12G relate to a method of manufacturing a silicon carbide device based on a silicon carbide substrate 700. FIG. Silicon carbide substrate 700 may include a heavily doped base substrate 705 that may be made of 4H—SiC and, as an example, may be a silicon carbide slice obtained from a silicon ingot by sawing. Good. The base substrate 705 may be doped at a high concentration (for example, at a high concentration n doping), for example. The drift layer structure 730 that forms a monopolar junction with the base substrate 705 may be formed on the processing surface of the base substrate 705 by, for example, epitaxy. A body layer 720 of the opposite conductivity type to the drift layer structure 730 may be formed on the top surface of the drift layer structure 730, for example, by epitaxy or by implanting a dopant. A conductivity type source layer 710 of the drift layer structure 730 is formed on the body layer 720, for example, by implanting a donor into a previously grown portion of the body layer 720 or by deposition (eg, by epitaxy). May be. The source layer 710 may be formed at a later processing stage.

  According to some embodiments, the heavily doped contact portion of the conductivity type of the body layer 720 may be formed, for example, by ion implantation. The contact portion may extend from the processing surface 701 of the silicon carbide substrate 700 to the main body layer 720 or into the main body layer 720.

  The mask layer is deposited on the processing surface 701 of the source layer 710 or, if applicable, on the body layer 720. A trench mask 790 is formed from the mask layer by photolithography. A grid-like trench or a plurality of stripe-shaped trenches 750 are formed in the vertical protrusions of one or more openings in the trench mask 790, and the one or more trenches 750 pass through the body layer 720 and drift. It extends into the layer structure 730.

  FIG. 12A shows a silicon carbide substrate 700 with a body layer 720 that forms a drift layer structure 730 and a second pn junction pn2, and a source layer 710 and a third pn junction pn3. Trench 750 drills through body layer 720 and extends into the upper portion of drift layer structure 730. The shape and dimensions of the mesa section 796 of the silicon carbide substrate 700 between one or more trenches 750 and between the trenches 750 or between sections of one trench 750 have been described with reference to previous drawings. Reference is made to the shape and dimensions of the trench structure and mesa portion.

  A dopant of a conductivity type opposite to that of the drift layer structure 730 may be implanted through the bottom of one or more trenches 750, and a trench mask 790 may be used as the implantation mask.

  FIG. 12B shows one or more shield regions 140 formed by implantation at the vertical protrusions of one or more trenches 750. A relatively deep shield region 140 may be formed with relatively moderate acceleration energy. Auxiliary material 792 that can be selectively removed from the silicon carbide may be deposited, and the thermal treatment anneals the implant damage and / or activates the implanted dopant, thereby forming the crystal lattice of the silicon carbide substrate 700. It may be repaired.

  FIG. 12C shows an auxiliary material 792 that may partially or completely fill one or more trenches 750 and / or may cover one or more trenches 750. The auxiliary material 792 can stabilize the mesa section 796 during heat treatment. The auxiliary material 792 may be removed, and a sacrificial oxide layer 794 may be formed on the exposed portion of the silicon carbide substrate 700 by heat treatment in an oxidizing atmosphere.

  FIG. 12D shows a sacrificial oxide layer 794 that covers one or more trenches 750. The sacrificial oxide layer 794 can be removed. Formation and removal of the sacrificial oxide layer 794 can remove dopant atoms from the sidewalls of one or more trenches 750. Alternatively or additionally, the sacrificial oxide layer may be formed by oxidation and / or deposition prior to implantation, and the sacrificial oxide layer may be effective as a floating oxide for implantation.

  The dielectric spacer 759 may be formed in one or more trenches 750 by a spacer process that includes, for example, deposition of a uniform thickness conformal layer and selective removal of the horizontal portion of the deposited layer by anisotropic etching. It may be formed on the side wall.

  FIG. 12E shows a dielectric spacer 759 that covers the sidewalls of the one or more trenches 750 and leaves the bottom of the one or more trenches 750 exposed. An interface layer may be formed under one or more trenches 750, for example, by salicidation of nickel aluminum (NiAl). Additional conductive material may be deposited and recessed to form at least a buried portion 1571 of the auxiliary electrode 157 in the lower section of the trench 750. The recess processing may include chemical mechanical polishing (CMP). The isolation dielectric 156 may be selectively formed on the exposed surface of the material of the auxiliary electrode 157. For example, the formation of the auxiliary electrode 157 includes the deposition of heavily doped polycrystalline silicon, and the formation of the isolation dielectric 156 indicates that the growth rate for polycrystalline silicon is greater than the growth rate for single crystal silicon carbide. A significantly higher oxidation process may be included. Before and after the formation of the isolation dielectric 156, the buried portion 1571 is used as an etch mask for removing the exposed portion of the dielectric spacer 759, thereby removing the buried portion 1571 from the lower portion of the dielectric spacer 759. A field dielectric 159 that laterally separates from the drift layer structure 730 may be formed.

  FIG. 12F shows a buried portion 1571 that is covered with an isolation dielectric 156 and laterally separated from the drift layer structure 730 by a field dielectric 159.

  The trench mask 790 may be removed, for example, forming a gate dielectric layer 753 by depositing silicon oxide, densifying the deposited silicon oxide with a heat treatment, and introducing nitrogen into the deposited layer. May be. A conductive material (eg, highly doped polycrystalline silicon) may be deposited and recessed to fill the upper section of the one or more trenches 750. The recess processing may include CMP.

  FIG. 12G shows a gate electrode 155 formed from a heavily doped polycrystalline material in the upper section of one or more trenches 750. An interlayer dielectric may be deposited and partially recessed to expose the processing surface 701 of the silicon carbide substrate 700. The recess processing may include CMP.

  While specific embodiments have been illustrated and described herein, various alternatives and / or equivalent implementations may be substituted for the specific embodiments illustrated and described without departing from the scope of the invention. One skilled in the art will appreciate that the embodiments can be substituted. This application is intended to cover any modifications or variations of the specific embodiments described herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 100 Semiconductor body 101 1st surface 110 Source zone 120 Body region 128 Contact part 130 Drift structure 131 Lightly doped drift zone 132 Current diffusion zone 140 Shield region 150 Trench structure 151 First segment 152 Second segment 155 Gate electrode 156 Isolation dielectric 157 Auxiliary electrode 158 Gate conductor structure 159 Field dielectric 161, 162 Striped portion 190 Mesa portion 310 First load electrode 500 Semiconductor device 700 Silicon carbide substrate 701 Processing surface 720 Body layer 730 Drift layer structure 750 Trench 759 Dielectric spacer 792 Auxiliary material 1501 First trench structure 1502 Second trench structure 1571 Buried portion 1572 Connection portion 1575 Interface 1581 The first connecting portion 1582 second connecting portions 1583 third connection portion

Claims (23)

A trench structure extending from a first surface into the silicon carbide semiconductor body, the auxiliary electrode under the trench structure; and a gate electrode disposed between the auxiliary electrode and the first surface. Including a trench structure;
A shield region adjacent to the auxiliary electrode in the lower portion of the trench structure and forming a drift structure and a first pn junction;
Only containing the auxiliary electrode, to a low ohmic contact with the shield region, the semiconductor device. It said auxiliary electrode comprises a connection portion to the extending to the bottom of the trench structure from the first surface, the semiconductor device according to claim 1. The first segment of the trench structure including the gate electrode is alternately present with the second segment including the connection portion along the horizontal longitudinal direction of the trench structure, and the horizontal longitudinal direction is the first segment. The semiconductor device of claim 2 , wherein the semiconductor device is parallel to the plane. First further comprising a load electrode gate conductor structure between the first surface, said gate conductor structure connects the separate parts of the gate electrode of the trench structure of claim 1-3 The semiconductor device according to any one of the above. The gate conductor structure includes a first connection portion directly adjacent to the gate electrode; a second connection portion on a mesa portion of the silicon carbide semiconductor body between adjacent trench structures of the trench structure; 5. The semiconductor device according to claim 4 , further comprising a third connection portion that laterally connects adjacent connection portions of the first and second connection portions. The trench structure to form a grid, the semiconductor device according to any one of claims 1-3. The semiconductor device according to claim 6 , wherein a horizontal cross section of a mesa portion formed between stripe portions of the trench structure is one of a rectangle, a rhombus, and a hexagon. The shield region, the disposed under the auxiliary electrode of the bottom of the trench structure, a semiconductor device according to any one of claims 1-7. The trench structure comprises a separated dielectric separating said gate electrode and the auxiliary electrode, the semiconductor device according to any one of claims 1-8. Wherein forming a drift structure and the second pn junction, and further comprising a source zone and the body region that form a third pn junction formed between the first surface and the body region, wherein Item 10. The semiconductor device according to any one of Items 1 to 9 . The semiconductor device of claim 10 , wherein the source zone and the body region are directly adjacent to the first surface. The semiconductor device according to claim 10 or 11 , wherein the source zone horizontally surrounds a contact portion of the body region along the first surface. The drift structure, Dorifutozo down lightly doped, and includes a current spreading zone between the body region and the drift zone, the current spreading zone, adjacent to the shield regions in the horizontal direction and the shield region, adjacent to the drift zone semiconductor device according to any one of claims 10-12. It said auxiliary electrode comprises a metal interface layer adjacent to the shield region, the semiconductor device according to any one of claims 1 to 13. The trench comprising first and second segments extending from a first surface into a silicon carbide semiconductor body and extending from a first sidewall of the trench structure to an opposite second sidewall, respectively. Structure and
A gate electrode formed in the first segment and dielectrically insulated from the silicon carbide semiconductor body at the bottom of the trench structure;
An auxiliary electrode formed in the second segment;
A shield region adjacent to the lower auxiliary electrode of the trench structure and forming a first pn junction with the drift structure of the silicon carbide semiconductor body;
A field dielectric separating the auxiliary electrode and the drift structure;
Only containing the auxiliary electrode, to a low ohmic contact with the shield region, the semiconductor device. The semiconductor device of claim 15 , wherein the first segment is formed in a first trench structure and the second segment is formed in a second trench structure. Said first segment and said second segment are present alternately along the horizontal longitudinal direction of the trench structure, the horizontal longitudinal direction is parallel to the first surface, according to claim 16 Semiconductor device. A body region that forms a second pn junction with the drift structure and a third pn junction with the source zone, wherein the source zone is formed between the first surface and the body region; is the semiconductor device according to any one of claims 15-17. The drift structure comprises a current diffusion zone between the lightly doped drift zone, and between the body region and the drift zone, the current spreading zone, laterally adjacent to the shield region, and The semiconductor device of claim 18 , wherein the shield region is immediately adjacent to the doped drift zone. A method for manufacturing a silicon carbide device, comprising:
Forming a trench in a processing surface of a silicon carbide substrate including a drift layer structure and a body layer forming a second pn junction, wherein the body layer exists between the processing surface and the drift layer structure And the trenches expose the drift layer structure;
Forming a shield region that forms a first pn junction with the drift layer structure by implanting a dopant through a lower portion of the trench;
Forming a dielectric spacer on a sidewall of the trench;
Forming a buried portion of an auxiliary electrode in a lower section of the trench, the buried portion forming a buried portion in low ohmic contact with the shield region;
Including methods. 21. The method of claim 20 , wherein forming the buried portion comprises depositing heavily doped polycrystalline silicon. The method of claim 21 , further comprising forming an isolation dielectric on the exposed surface of the buried portion by selective oxide growth. Filling and / or covering the trench with auxiliary material and heating the silicon carbide substrate to activate the dopant implanted through the lower portion of the trench and / or to anneal implantation damage The method according to any one of claims 20 to 22 , further comprising:

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