JP6588307B2 - Rotating mechanism - Google Patents

Description

  The present invention relates to a rotation mechanism, and more particularly, to a rotation mechanism used for a cutting device that cuts a tape attached to the surface of a wafer.

  In a tape mounter that attaches a protective tape to the surface of a wafer, the protective tape attached to the wafer is cut along the outer periphery of the wafer. The wafer has, for example, a circular shape, and the protective tape is cut into a circle along the outer periphery of the wafer by bringing the cutter into contact with the protective tape on the outer periphery of the wafer and rotating the cutter 360 degrees around the center of the wafer. (See Patent Document 1 or Patent Document 2). In Patent Documents 1 and 2, a general pulse motor is used as a mechanism for rotating the cutter 360 degrees. The cutter is rotated around the rotation axis of the pulse motor.

Japanese Patent Laying-Open No. 2015-082642 JP 2004-025402 A

  By the way, when controlling a rotation angle with a pulse motor, a controller for controlling the motor is required separately from the motor. For this reason, as a result of the complexity of the configuration, the cost increases.

  The present invention has been made in view of the above points, and an object thereof is to provide a rotation mechanism that can rotate a motor at a predetermined angle with a simple configuration.

The rotation mechanism of the present invention detects a rotation shaft, a motor that rotates the rotation shaft, a rotation start position of the rotation shaft that is rotated by the motor, and a rotation completion position that the rotation shaft has rotated 360 degrees or more from the rotation start position. A rotation mechanism in which the rotation shaft rotates between a rotation start position and a rotation completion position, and the detection means includes an origin sensor that detects a rotation start position of the rotation shaft, and rotation of the rotation shaft. An end point sensor that detects the completion position, a dog that is connected to the rotating shaft and rotates around the rotating shaft by the rotation of the rotating shaft and reacts with the origin sensor and the end point sensor, and rotates around the rotating shaft by the rotation of the rotating shaft A helical guide that moves the dog to be moved in a vertical direction parallel to the axial direction of the rotation axis, and the origin sensor and the end point sensor are provided at different heights, and the rotation axis is rotated at least 360 degrees. Dog Reacting the origin sensor and the end point sensor.

  According to this configuration, the rotation shaft is rotated 360 degrees or more from the rotation start position to the rotation completion position with the position where the dog is detected by the sensor as the rotation start position. At this time, the dog moves spirally along the spiral guide. For this reason, even if it rotates 360 degrees or more after the sensor detects the rotation start position, the dog is not detected again. Therefore, it is not necessary to detect the rotation completion position with the same sensor, and the motor can be rotated at a predetermined angle with a simple configuration.

  According to the present invention, the motor can be rotated at a predetermined angle with a simple configuration.

It is a disassembled perspective view of the rotation mechanism which concerns on this Embodiment. It is operation | movement explanatory drawing of the rotation mechanism which concerns on this Embodiment.

  Hereinafter, the rotation mechanism according to the present embodiment will be described with reference to FIG. FIG. 1 is an exploded perspective view of the rotation mechanism according to the present embodiment. In the following, a configuration in which the rotation mechanism is applied to the cutting device will be described, but the configuration is not limited to this configuration. The rotating mechanism shown below may be applied to any apparatus, and for example, can be applied to other types of apparatuses such as a grinding apparatus, a cutting apparatus, and a tape mounter.

  Generally, a wafer has a circular shape, and a protective tape is attached to protect the surface when a predetermined process such as grinding or cutting is performed on the wafer. As shown in FIG. 1, the rotating mechanism 1 according to the present embodiment cuts the protective tape T (see FIG. 2) attached to the surface of the wafer W (see FIG. 2) along the shape of the wafer W. It is applied to a cutting device.

  The rotating mechanism 1 is configured by attaching a blade 3 such as a cutter to the lower end of a motor 2 having a rotating shaft 20 in the vertical direction. The cutting tool 3 is provided at a position that is eccentric with respect to the rotating shaft 20, the tip of the cutting tool 3 is brought into contact with the protective tape T, and the rotating tape 20 of the motor 2 is rotated 360 degrees to make the protective tape T circular. Disconnected.

  Specifically, the rotating mechanism 1 is configured by directing the rotating shaft 20 of the motor 2 configured by an induction motor downward and connecting the support shaft 4 to the lower end of the rotating shaft 20. The motor 2 can control the rotation and stop of the rotating shaft 20 only by turning on and off the energization. The support shaft 4 extends in the vertical direction, and the rotating shaft 20 and the support shaft 4 are coaxially connected by a coupling 5 (shaft coupling).

  As will be described in detail later, the support shaft 4 is provided with a guide rail 40 that guides the movement of the dog 72 up and down. The guide rail 40 extends along the extending direction (vertical direction) of the support shaft 4 on the outer surface of the support shaft 4. The guide rail 40 is provided with a C-shaped slider 73 in a top view so as to be slidable up and down along the guide rail 40.

  The cutting tool 3 is supported on the lower end of the support shaft 4 via a disk-shaped plate 6. The plate 6 is attached so that the center thereof coincides with the rotating shaft 20. As described above, the cutting tool 3 is provided at a position eccentric with respect to the rotary shaft 20 on the outer peripheral side of the plate 6. More specifically, the cutting tool 3 is attached such that the tip is provided outside the outer edge of the wafer W and the tip is directed downward. In addition, a heater (not shown) is connected to the blade 3 so that the temperature of the blade 3 can be adjusted by the heater.

  Further, the rotation mechanism 1 includes detection means 7 that detects the rotation angle of the motor 2. Specifically, the detection means 7 includes an origin sensor 70 that detects a rotation start position of the rotary shaft 20, an end point sensor 71 that detects a rotation completion position of the rotary shaft 20, and a dog 72 that causes the origin sensor 70 and the end point sensor 71 to react. It is comprised by.

  The origin sensor 70 and the end point sensor 71 are so-called optical sensors in which a light emitting unit and a light receiving unit (both not shown) are arranged to face each other and an object is detected from a change in the amount of light received from the light emitting unit to the light receiving unit. Specifically, the origin sensor 70 and the end point sensor 71 are formed in a U-shape in a side view in which a light emitting portion and a light receiving portion are vertically opposed to each other and an opening is formed between the light emitting portion and the light receiving portion. Although the details will be described later, the origin sensor 70 and the end point sensor 71 are provided at the same location in different top views in the top view, and the origin sensor 70 is disposed directly below the end point sensor 71.

  The dog 72 is formed of a plate-like body having a rectangular shape when viewed from above, and is fixed integrally with the slider 73 described above. The slider 73 is formed in a C-shape in a top view in which a part of a ring-shaped block is opened, and the dog 72 protrudes in a plate shape from the outer surface (arc surface) of the slider 73 in the horizontal direction. . At this time, the thickness direction of the dog 72 coincides with the vertical direction. The above-described support shaft 4 is inserted into the slider 73, and the opening portion of the slider 73 is fitted in a state where play is provided with respect to the guide rail 40. Accordingly, the slider 73 and the dog 72 are configured to be slidable up and down along the guide rail 40.

  The dog 72 enters between the light emitting unit and the light receiving unit, thereby blocking light from the light emitting unit. At this time, the origin sensor 70 and the end point sensor 71 react with changes in the amount of light received by the light receiving unit, and detect the rotation start position or the rotation completion position of the rotary shaft 20.

  Incidentally, in general, a pulse motor is used in a rotation mechanism that controls the rotation angle of the rotation shaft. The pulse motor rotates the rotation shaft by a predetermined angle by receiving a pulse necessary for rotating the rotation shaft by a predetermined angle (for example, 360 degrees). In this case, a dedicated controller is required to transmit a predetermined pulse to the pulse motor. For this reason, the control configuration for generating the pulse is complicated, and this increases the cost of the entire apparatus. In particular, in a cutting apparatus that cuts a protective tape attached to a minimal type wafer (for example, a wafer having an outer diameter of several tens of millimeters) along the outer periphery of the wafer, it is desired to simplify the configuration of the entire apparatus. .

  Further, in the case of a pulse motor, if there is a pulse accumulation due to a mechanical load, there is also a problem that the rotation shaft is insufficiently rotated. Therefore, it is conceivable to control the driving of the motor only by turning on / off the power to the motor using an induction motor instead of a pulse motor. As a method, first, a sensor for detecting the rotation start position and the rotation completion position of the rotation shaft is required.

  A rotation start position detection sensor alone cannot detect a rotation completion position, and therefore a rotation start position detection sensor and a rotation completion position detection sensor are separately required. In this case, even if an attempt is made to detect 360 degrees, the two sensors cannot be provided at the same location on the same plane. For this reason, two sensors must be provided adjacent to each other. As a result, strictly speaking, the motor drive is controlled at an angle larger than 360 degrees. Therefore, there is a problem that the tact time becomes long as a result of the rotation shaft rotating more than necessary.

  Therefore, in the present embodiment, the origin sensor 70 and the end point sensor 71 described above are provided at different heights at the same place in a top view, and the dog 72 is moved up and down in a spiral shape. Specifically, a spiral guide portion 8 that moves the dog 72 up and down is provided around the support shaft 4 having the guide rail 40. The spiral guide portion 8 is formed by bending a pipe in a spiral shape, and is provided so that the central axis of the spiral coincides with the rotation axis 20 of the motor 2.

  Although details will be described later, the slider 73 is provided inside the spiral guide portion 8 so that the lower surface of the dog 72 contacts the outer surface of the spiral guide portion 8. When the rotary shaft 20 is rotated, the dog 72 is spirally guided along the guide rail 40 and the spiral guide portion 8. The dog 72 reacts with the origin sensor 70 and the end point sensor 71 arranged above and below, so that the rotation angle of the rotary shaft 20 can be controlled at a predetermined angle (360 degrees).

  Thus, by moving the dog in a spiral shape and arranging the origin sensor 70 and the end point sensor 71 vertically, the origin sensor 70 and the end point sensor 71 can be arranged at the same position in top view, and the rotation axis It has become possible to control 20 rotation angles at just 360 degrees. In addition, the use of an induction motor eliminates the need for a complicated control configuration like a pulse motor. As described above, the motor 2 (rotary shaft 20) can be rotated at a predetermined angle with a simple configuration.

  Next, the operation of the rotating mechanism according to the present embodiment will be described with reference to FIG. FIG. 2 is an operation explanatory diagram of the rotation mechanism according to the present embodiment. 2A shows the case where the dog 72 is at the rotation start position, FIG. 2B shows the case where the dog is at an intermediate position between the rotation start position and the rotation completion position, and FIG. 2C shows the case where the dog is at the rotation completion position. ing. In addition, in FIG. 2, the operation | movement which cut | disconnects the protective tape affixed on the upper surface of the wafer circularly along the shape of a wafer is demonstrated. For convenience of explanation, FIG. 2 also shows a perspective view of the wafer and the protective tape, and the cut portions of the protective tape are indicated by bold lines.

  As shown in FIG. 2, a protective tape T is attached to the upper surface of the wafer W. Further, above the wafer W, the rotating mechanism 1 including the cutting tool 3 is positioned. The rotating mechanism 1 is positioned at a height at which the tip of the blade 3 slightly penetrates the protective tape T by lifting means (not shown). At this time, the tip of the blade 3 is positioned slightly outside the outer periphery of the wafer W. The blade 3 is heated by a heater (not shown), and the protective tape T is easily cut by the heat of the blade 3.

  First, before starting the cutting of the protective tape T, the cutting tool 3 is positioned at the origin position. That is, as shown in FIG. 2A, the motor 2 is rotated by a predetermined angle, and the dog 72 is positioned at a position (rotation start position) detected by the origin sensor 70. Cutting of the protective tape T is started from this rotation start position. At this time, the dog 72 is positioned below the spiral guide 8, and the lower surface of the dog 72 is in contact with the outer surface of the spiral guide 8.

  When the rotation start position is detected by the origin sensor 70, the motor 2 is energized and the rotary shaft 20 is driven to rotate. As a result, the support shaft 4, the plate 6, and the blade 3 that are connected to the rotary shaft 20 are also rotated together. Further, the dog 72 and the slider 73 connected to the rotary shaft 20 via the support shaft 4 and the like are also rotated together with the support shaft 4.

  As shown in FIG. 2B, the dog 72 and the slider 73 are guided to move spirally by the spiral guide portion 8, so that the dog 72 and the slider 73 are not only rotated together with the support shaft 4 but also upward along the guide rail 40. Moved. That is, the dog 72 and the slider 73 rotate integrally with the support shaft 4 in the rotation direction of the motor 2 and are moved upward with respect to the support shaft 4 in the axial direction (vertical direction) of the motor 2.

  As shown in FIG. 2C, when the rotary shaft 20 is rotated 360 degrees, the dog 72 enters the gap between the light emitting unit and the light receiving unit of the end point sensor 71, and the end point sensor 71 reacts. Thereby, the dog 72, that is, the rotation completion position is detected by the end point sensor 71. When the rotation completion position is detected, the energization of the motor 2 is turned off, and as a result, the rotation of the rotating shaft 20 is stopped. In this way, the rotation of the rotating shaft 20 is controlled at a predetermined angle (360 degrees).

  Even if the dog 72 is not detected by the end point sensor 71 at the rotation completion position and the dog 72 overruns the end point sensor 71, the upper surface of the slider 73 comes into contact with the lower surface of the coupling 5 and the rotary shaft 20. Is mechanically stopped. Thus, the coupling 5 functions as a mechanical stopper.

  As described above, when the rotary shaft 20 is rotated 360 degrees, the cutting tool 3 is also rotated 360 degrees. As a result, the protective tape T attached to the upper surface of the wafer W is cut into a circular shape along the outer periphery of the wafer W. After the protective tape T is cut, the rotary shaft 20 is driven in reverse to return to the position where the dog 72 is detected at the point position (rotation start position). That is, when the protective tape T is cut, the rotary shaft 20 is driven forward, and when the origin is returned after the protective tape T is cut, the rotary shaft 20 is driven reversely.

  Thus, the rotating shaft 20 is configured to be capable of reciprocating rotation between the rotation start position and the rotation completion position (360 degrees). In this case, the wiring of the heater that warms the blade 3 is pulled by rotating the blade 3 forward 360 degrees, but when the blade 3 (rotating shaft 20) is driven in reverse when returning to the origin, The pulled state is canceled. For this reason, it is possible to prevent the heater wiring from being wound and entangled.

  As described above, according to the present embodiment, the rotation shaft 20 rotates 360 degrees (or more) from the rotation start position to the rotation completion position with the position where the dog 72 is detected by the origin sensor 70 as the rotation start position. Is done. At this time, the dog 72 moves spirally along the spiral guide 8. That is, while rotating the dog 72 around the rotating shaft 20, the dog 72 is guided and lifted by the spiral guide portion 8. Therefore, even if the origin sensor 70 is rotated 360 degrees (or more) from the rotation start position detected by being shielded by the dog 72, the dog 72 is not detected again.

  In contrast, when the origin sensor 70 detects the rotation start position and the rotation completion position, the width of the dog 72 acts and 360 degrees cannot be detected. That is, the position where one side surface of the dog 72 shields the origin sensor 70 is set as the rotation start position, and the position where the other side surface of the dog 72 shields the origin sensor is the rotation completion position. Due to the width of 72, 360 degrees cannot be detected.

  As described above, in the present embodiment, the dog 72 is moved up and down by the spiral guide 8, so that the rotation completion position is not detected by the same origin sensor 70, and the motor 2 (rotating shaft) has a simple configuration. 20) can be rotated at a predetermined angle (360 degrees).

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the above-described embodiment, an induction motor is used as the motor 2, but the present invention is not limited to this configuration. The motor 2 may be composed of other types of motors.

  In the above-described embodiment, the detection unit 7 includes the origin sensor 70 and the end point sensor 71. However, the present invention is not limited to this configuration. The detection unit 7 may include only the origin sensor 70. In this case, it is preferable that the motor 2 is a pulse motor and that a controller that transmits a predetermined pulse to the motor 2 is provided.

  In the above-described embodiment, the origin sensor 70 is provided directly below the end point sensor 71. However, the present invention is not limited to this configuration. An end point sensor 71 may be provided directly below the origin sensor 70. In this case, it is preferable to reverse the winding direction of the spiral guide portion 8. Further, when the protective tape T is cut, that is, when the motor 2 is driven to rotate forward, the dog 72 is moved downward along the spiral guide portion 8 to return to the origin, that is, when the motor 2 is driven in reverse. In this case, it is preferable to move the dog 72 upward along the spiral guide portion 8.

  Further, in the above-described embodiment, the origin sensor 70 and the end point sensor 71 are provided at the same place in a top view, but the present invention is not limited to this configuration. The positions of the origin sensor 70 and the end point sensor 71 in the top view are not necessarily the same.

  In the embodiment described above, the rotation shaft 20 is rotated exactly 360 degrees between the rotation start position and the rotation completion position, that is, the position rotated 360 degrees from the rotation start position is set as the rotation completion position. However, it is not limited to this configuration. The angle of the rotation completion position may be smaller than 360 degrees from the rotation start position, and may be larger than 360 degrees from the rotation start position.

  In the above-described embodiment, the optical sensor is used as the origin sensor 70 and the end point sensor 71. However, the present invention is not limited to this configuration. The origin sensor 70 and the end point sensor 71 may be configured by other types of sensors such as a magnetic sensor, a contact sensor, and a proximity sensor.

  In the above-described embodiment, the spiral guide portion 8 is formed of a pipe. However, the present invention is not limited to this configuration. The spiral guide portion 8 may be formed in any manner as long as the dog 72 can be guided in a spiral shape.

  As described above, the present invention has an effect that the rotation angle of the motor can be detected with a simple configuration, and in particular, the rotation used in the cutting device for cutting the tape attached to the surface of the wafer. Useful for mechanism.

DESCRIPTION OF SYMBOLS 1 Rotation mechanism 2 Motor 20 Rotating shaft 7 Detection means 70 Origin sensor (sensor)
71 End point sensor 72 Dog 8 Spiral guide

Claims (1)

Rotation shaft, motor for rotating the rotation shaft, detection means for detecting the rotation start position of the rotation shaft rotated by the motor and the rotation completion position where the rotation shaft has rotated 360 degrees or more from the rotation start position And a rotation mechanism in which the rotation shaft rotates between the rotation start position and the rotation completion position,
The detection means includes
An origin sensor for detecting the rotation start position of the rotation shaft;
An end point sensor for detecting the rotation completion position of the rotation shaft;
And the dog reacting the origin sensor and said end point sensor pivots around the rotation axis by rotation of the connected to a rotary shaft the rotary shaft,
A helical guide that moves the dog rotating around the rotation shaft by the rotation of the rotation shaft in the vertical direction parallel to the axial direction of the rotation shaft ;
The origin sensor and the end point sensor are provided at different heights,
A rotation mechanism in which the dog reacts the origin sensor and the end point sensor by rotating the rotation shaft at least 360 degrees .

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