JP6585011B2 - Soft magnetic materials, rotating electrical machines, motors and generators - Google Patents

Description

  Embodiments described herein relate generally to a soft magnetic material, a rotating electrical machine, a motor, and a generator.

  Currently, soft magnetic materials are very important materials applied to various systems and device parts such as rotating electrical machines (eg, motors, generators, etc.), transformers, inductors, transformers, magnetic inks, antenna devices, etc. It is. In these components, the magnetic permeability real part (relative magnetic permeability real part) μ ′ of the soft magnetic material is used. Therefore, when actually used, μ ′ must be controlled in accordance with the use frequency band. . In order to realize a highly efficient system, it is necessary to use a material with as low a loss as possible. That is, it is necessary to make the imaginary part of permeability (imaginary part of relative permeability) μ ″ (corresponding to loss) as small as possible. Regarding loss, the loss coefficient tan δ (= μ ″ / μ ′ × 100 (%)) As a guideline, the smaller the μ ″ with respect to μ ′, the smaller the loss coefficient tan δ, which is preferable. For this purpose, it is necessary to reduce the iron loss under actual operating conditions, that is, eddy current loss, Hysteresis loss, ferromagnetic resonance loss, and residual loss (other losses) must be reduced as much as possible, in order to reduce eddy current loss, increase the electrical resistance, reduce the size of the metal part, It is effective to subdivide the structure, etc. To reduce hysteresis loss, it is effective to reduce the coercive force or increase the saturation magnetization. In order to achieve this, it is effective to increase the ferromagnetic resonance frequency by increasing the anisotropic magnetic field of the material, and in recent years, the demand for handling high-power electric power has been increasing. The loss is required to be small under operating conditions (high current, high voltage, etc.) with a large effective magnetic field applied to the soft magnetic material so that the saturation magnetization of the soft magnetic material is as large as possible without causing magnetic saturation. Furthermore, in recent years, the use frequency band of the system and device equipment has been increased (the equipment can be downsized by high frequency), and has high permeability and low loss at high frequency, There is an urgent need to develop magnetic materials with excellent characteristics.

  In recent years, there has been a strong demand to increase the efficiency of the system as much as possible due to the growing awareness of energy-saving issues and environmental issues. In particular, since the motor system is responsible for much of the world's power consumption, it is very important to improve the efficiency of the motor. Among them, the core and the like constituting the motor are made of a soft magnetic material, and it is required to increase the permeability and saturation magnetization of the soft magnetic material as much as possible and to reduce the loss as much as possible. Further, it is required to reduce the loss as much as possible in the magnetic wedge (magnetic wedge) used in a part of the motor. The same thing is required in a system using a transformer. In motors and transformers, there is a great demand for high efficiency and miniaturization. In order to achieve miniaturization, it is important to increase the permeability and saturation magnetization of the soft magnetic material as much as possible. In order to prevent magnetic saturation, it is important to increase the saturation magnetization as much as possible. Furthermore, there is a great demand for increasing the operating frequency of the system, and there is a strong demand for the development of a low-loss material in the high-frequency band.

In addition, soft magnetic materials having high magnetic permeability and low loss are used for inductance elements and antenna devices. Among them, attention has recently been focused on application to power inductance elements used in power semiconductors. In recent years, the importance of energy saving and environmental protection has been advocated, and it has become indispensable to reduce CO ₂ emission and dependency on fossil fuels. As a result, the development of electric vehicles and hybrid vehicles to replace gasoline vehicles has been energetically advanced. In addition, natural energy utilization technologies such as solar power generation and wind power generation are said to be key technologies for an energy-saving society, and advanced countries are actively promoting the development of natural energy utilization technologies. Furthermore, as an environmentally friendly power-saving system, HEMS (Home Energy Management System) and BEMS (BEMS) that control the power generated by solar power generation, wind power generation, etc. with a smart grid and supply and supply at high efficiency to homes, offices and factories. The importance of building and building energy management systems has been actively proposed. Power semiconductors play an important role in this trend of energy saving. Power semiconductors are semiconductors that control high power and energy with high efficiency. In addition to power individual semiconductors such as IGBTs (insulated gate bipolar transistors), MOSFETs, power bipolar transistors, and power diodes, linear regulators and switching A power supply circuit such as a regulator and a power management logic LSI for controlling them are included. Power semiconductors are widely used in various devices such as home appliances, computers, automobiles, and railways. The spread of these applied devices can be expected, and the mounting ratio of power semiconductors to these devices can be expected. Big market growth is expected. For example, power semiconductors are used in almost all inverters installed in many home appliances, which enables significant energy savings. Currently, Si is the main power semiconductor, but it is considered that the use of SiC and GaN is effective for further increasing the efficiency and miniaturization of equipment. SiC and GaN have a larger band gap and dielectric breakdown field than Si, and can increase the breakdown voltage, so that the device can be made thinner. As a result, the on-resistance of the semiconductor can be reduced, which is effective for reducing loss and increasing efficiency. Further, since SiC and GaN have high carrier mobility, it is possible to increase the switching frequency, which is effective for miniaturization of the element. Furthermore, in particular, SiC has a higher thermal conductivity than Si, and thus has a high heat dissipation capability and can operate at a high temperature, simplifying the cooling mechanism and being effective for miniaturization. From the above viewpoint, SiC and GaN power semiconductors have been vigorously developed. However, in order to realize this, it is indispensable to develop a power inductor element used together with a power semiconductor, that is, development of a high magnetic permeability soft magnetic material (high magnetic permeability and low loss). At this time, as characteristics required for the magnetic material, not only high magnetic permeability and low magnetic loss in the driving frequency band, but also high saturation magnetization capable of handling a large current is required. When the saturation magnetization is high, magnetic saturation is unlikely to occur even when a high magnetic field is applied, and an effective decrease in inductance value can be suppressed. This improves the DC superposition characteristics of the device and improves the efficiency of the system.

  In addition, magnetic materials having high magnetic permeability and low loss at high frequencies are expected to be applied to devices of high-frequency communication equipment such as antenna devices. As a method for reducing the size and power consumption of antennas, an insulating substrate with high magnetic permeability (high magnetic permeability and low loss) is used as an antenna substrate, and electronic components that involve radio waves that reach the electronic components in the communication equipment and the substrate from the antennas are involved. There is a method for transmitting and receiving without transmitting radio waves to the board. As a result, it is possible to reduce the size and power consumption of the antenna, but at the same time, it is possible to widen the resonance frequency of the antenna, which is preferable.

  Other characteristics required when incorporated in each of the above systems and devices include high thermal stability, high oxidation resistance, high strength, high toughness, and the like. Moreover, in order to apply to a complicated shape, the compact is preferable to the shape of a plate or ribbon. However, in general, it is known that when a compact is used, characteristics are deteriorated in terms of saturation magnetization, magnetic permeability, loss, strength, toughness, etc., and improvement of characteristics is strongly demanded.

  Next, the types and problems of existing soft magnetic materials will be described.

  An existing soft magnetic material for a system of 10 kHz or less includes a silicon steel plate (FeSi). Silicon steel sheets have a long history and are used in most of the core materials of rotating electrical machines (for example, motors and generators) that handle high power and transformers. High performance has been achieved from non-oriented silicon steel sheets to directional silicon steel sheets, which have evolved compared to the initial discovery, but in recent years, the improvement in characteristics has reached a peak. As characteristics, it is particularly important to satisfy high saturation magnetization, high magnetic permeability, and low loss at the same time. In the world, research on materials exceeding silicon steel sheets has been actively conducted centering on amorphous and nanocrystal-based compositions, but no material composition exceeding silicon steel sheets has been found yet. In addition, research on a compact that can be applied to a complicated shape has been conducted, but the compact has a defect that the characteristics are poor compared to a plate or a ribbon.

  Existing soft magnetic materials for 10 kHz to 100 kHz systems include Sendust (Fe-Si-Al), nanocrystal-based finemet (Fe-Si-B-Cu-Nb), Fe-based or Co-based amorphous glass. Examples include ribbons and green compacts, or MnZn-based ferrite materials. However, none of them are insufficient because they do not completely satisfy high permeability, low loss, high saturation magnetization, high thermal stability, high oxidation resistance, high strength, and high toughness.

  Examples of existing soft magnetic materials of 100 kHz or higher (MHz band or higher) include NiZn-based ferrite and hexagonal ferrite, but their magnetic properties at high frequencies are insufficient.

  From the above, to compaction that can be applied to complex shapes while satisfying high saturation magnetization, high magnetic permeability, low loss, high thermal stability, high oxidation resistance, high strength, high toughness It is essential to develop soft magnetic materials that can meet these requirements.

JP 2013-65844 A

  The present invention has been made in view of the above circumstances, and the object thereof is a soft magnetic material having excellent characteristics such as high magnetic permeability and low loss, as well as a rotating electrical machine, a motor, and It is to provide a generator.

  The soft magnetic material of the present embodiment is a flat magnetic metal particle that contains at least one magnetic metal selected from Fe, Co, and Ni, has a thickness of 10 nm to 100 μm, and an aspect ratio of 5 to 10,000. In the following, flat magnetic metal particles having a lattice strain of 0.01% or more and 10% or less, oriented flat magnetic metal particles, and having magnetic anisotropy in one direction in the oriented flat plane, and flat magnetic metal And an intervening phase that exists between the particles and includes at least one of oxygen (O), carbon (C), nitrogen (N), and fluorine (F).

It is a conceptual diagram of the soft-magnetic material of 1st Embodiment. It is a figure explaining the orientation of a flat magnetic metal particle. It is a schematic diagram of the soft magnetic material of 2nd Embodiment. It is a schematic diagram of the soft-magnetic material of 3rd Embodiment which has a eutectic particle. It is a schematic diagram of the soft-magnetic material of 3rd Embodiment which has intermediate intervening particles. It is a conceptual diagram of the soft-magnetic material of 4th Embodiment which has a laminated structure. It is an example of a key map of a motor system of a 5th embodiment. It is an example of a key map of a motor of a 5th embodiment. It is an example of a key map of a motor core of a 5th embodiment. It is an example of a key map of a transformer and a transformer of a 5th embodiment. It is an example of a key map of an inductor of a 5th embodiment. It is an example of a key map of the generator of a 5th embodiment. It is a conceptual diagram which shows the relationship between the direction of magnetic flux, and the arrangement | positioning direction of a soft-magnetic material.

  Hereinafter, embodiments will be described with reference to the drawings. In the drawings, the same or similar parts are denoted by the same or similar reference numerals.

(First embodiment)
The soft magnetic material of the present embodiment is a flat magnetic metal particle that contains at least one magnetic metal selected from Fe, Co, and Ni, has a thickness of 10 nm to 100 μm, and an aspect ratio of 5 to 10,000. In the following, flat magnetic metal particles having a lattice strain of 0.01% or more and 10% or less, oriented flat magnetic metal particles, and having magnetic anisotropy in one direction in the oriented flat plane, and flat magnetic metal And an intervening phase that exists between the particles and includes at least one of oxygen (O), carbon (C), nitrogen (N), and fluorine (F).

  That is, the soft magnetic material 100 of the present embodiment is a powder body composed of the flat magnetic metal particles 10 and the intervening phase. At this time, the flat magnetic metal particles 10 are oriented in such a manner that the flat surfaces 10a are arranged side by side as much as possible, and have magnetic anisotropy in one direction on the flat surfaces 10a of the flat magnetic metal particles 10. Here, the flat magnetic metal particle 10 is a flat particle (flaky particle, flattened particle) having a flat shape (flaky shape, flattened shape).

  The magnitude of the uniaxial magnetic anisotropy in the flat surface 10a is preferably 0.1 Oe or more and 10 kOe or less, more preferably 1 Oe or more and 1 kOe or less, and further preferably 1 Oe or more and 100 Oe or less. Note that whether or not the magnetic anisotropy is present and how much the magnetic anisotropy is present can be easily evaluated by changing the direction using, for example, VSM. Since the inside of the flat surface 10a is magnetically isotropic in a compact using normal flat particles, it is fundamentally different from the present embodiment. By having magnetic anisotropy in the flat surface 10a, the magnetic characteristics are greatly improved.

  First, when the magnetic domain structure of the flat magnetic metal particle 10 is a multi-domain structure, the magnetization proceeds by domain wall movement, but the coercive force is smaller in the easy axis direction in the flat surface 10a than in the hard axis direction, and the loss is lost. (Hysteresis loss) decreases. Further, the permeability in the easy axis direction is larger than that in the difficult axis direction. Compared to the case of isotropic flat magnetic metal particles, the case of flat magnetic metal particles having magnetic anisotropy is preferable because the coercive force is reduced particularly in the easy axis direction, thereby reducing loss. . Moreover, the magnetic permeability is increased, which is preferable. That is, by having magnetic anisotropy in the inward direction of the flat surface 10a, the magnetic characteristics are improved as compared with isotropic materials. In particular, the easy axis direction in the flat surface 10a has better magnetic characteristics than the difficult axis direction.

  Next, when the magnetic domain structure of the flat magnetic metal particle 10 is a single magnetic domain structure, the magnetization proceeds by rotational magnetization. In this case, the coercive force in the hard axis direction in the flat surface 10a is higher than that in the easy axis direction. Becomes smaller and the loss becomes smaller. When the magnetization proceeds completely with rotational magnetization, the coercive force becomes zero, which is preferable because the hysteresis loss becomes zero.

  Whether magnetization proceeds by domain wall motion (domain wall motion type) or rotational magnetization (rotational magnetization type) is determined by whether the domain structure is a multi-domain structure or a single domain structure. . At this time, whether the structure is a multi-domain structure or a single-domain structure is determined by the size (thickness and aspect ratio) of the flat magnetic metal particles 10, the composition, the state of interaction between the particles, and the like. For example, the smaller the thickness of the flat magnetic metal particle 10, the easier it becomes to have a single domain structure. When the thickness is 10 nm or more and 1 μm or less, particularly when the thickness is 10 nm or more and 100 nm or less, the single magnetic domain structure tends to become. As a composition, it is easy to maintain a single domain structure even when the thickness is large in a composition having a large magnetocrystalline anisotropy, and a single domain structure is maintained unless the thickness is small in a composition having a small magnetocrystalline anisotropy. It tends to be difficult. That is, the thickness of the boundary between the single-domain structure and the multi-domain structure varies depending on the composition. In addition, the single magnetic domain structure is more likely when the flat magnetic metal particles 10 are magnetically coupled to stabilize the magnetic domain structure.

  A basic conceptual diagram of the above embodiment is shown in FIG. FIG. 1A is a conceptual diagram of the soft magnetic material of the present embodiment. FIG.1 (b) is a conceptual diagram of the flat magnetic metal particle 10 of this Embodiment. FIG. 1C shows the behavior of the magnetization curve (BH curve) for both the case where the magnetization proceeds by domain wall motion and the case where the magnetization proceeds by rotational magnetization. Whether the magnetization behavior is the domain wall motion type or the rotational magnetization type can be easily determined as follows. First, in the plane of the soft magnetic material 100 (a plane parallel to the flat plane of the flat magnetic metal particles), the magnetization measurement is performed by changing the direction in which the magnetic field is applied, and the two directions in which the difference in the magnetization curve is the largest (at this time) The two directions are found to be inclined 90 degrees from each other). Next, by comparing the curves in the two directions with FIG. 1C, it is possible to determine whether the domain wall motion type or the rotational magnetization type.

  About the orientation of the flat magnetic metal particle 10, the conceptual diagram is shown in FIG. In the present specification, it is defined that the closer the angle formed between the plane parallel to the flat plane 10a of the flat magnetic metal particle 10 and the plane of the soft magnetic material 100 is closer to 0 degrees, the more oriented it is. Specifically, the above-mentioned angle is obtained with respect to a large number of the flat magnetic metal particles 10 of 10 or more, and the average value thereof is preferably 0 degree or more and 45 degrees or less, more preferably 0 degree or more and 30 degrees or less, further preferably 0. It is desirable that the angle is not less than 10 degrees and not more than 10 degrees.

  Although the flat magnetic metal particles 10 have a flat shape, the flat shape of the magnetic metal particles is more preferable than the spherical shape. In other words, the aspect ratio is preferably 5 or more and 10,000 or less, which increases the magnetic permeability. Further, since the ferromagnetic resonance frequency can be increased, the ferromagnetic resonance loss can be reduced, which is preferable. The thickness t is preferably 10 nm to 100 μm, more preferably 10 nm to 1 μm, and still more preferably 10 nm to 100 nm. This is preferable because the eddy current loss can be sufficiently reduced when a magnetic field is applied in a direction parallel to the flat surface 10a. Further, it is preferable that the thickness t is smaller and the aspect ratio is larger because the magnetic moment is confined in the direction parallel to the flat surface 10a and rotational magnetization is likely to proceed.

  The aspect ratio is the ratio of the dimension of the structure (long dimension) in the direction in which the length of the flat magnetic metal particle 10 is the longest to the dimension of the structure (short dimension) in the direction in which the length is the shortest, that is, “long dimension / “Short dimension”. Therefore, the aspect ratio is always 1 or more. In the case of a perfect sphere, the aspect ratio is 1 because both the long dimension and the short dimension are equal to the diameter of the sphere. The aspect ratio of the flat magnetic metal particle 10 that is flat is the diameter (long dimension) / thickness (short dimension) of the flat plane 10a. In the flat magnetic metal particle 10 shown in FIG. 1B, the minimum length in the flat surface 10a is b, the maximum length is a, the thickness is t, and the aspect ratio is (((a + b) / 2 ) / T). Here, (a + b) / 2 is an average of the minimum length b and the maximum length a in the flat surface 6. The aspect ratio and the thickness t can be easily evaluated by observation with a transmission electron microscope (TEM) or scanning electron microscope (SEM).

  The lattice strain of the flat magnetic metal particles 10 is preferably 0.01% or more and 10% or less, more preferably 0.01% or more and 5% or less, still more preferably 0.01% or more and 1% or less, and still more preferably 0. It is preferable to set it to 0.01% or more and 0.5% or less. This is preferable because magnetic anisotropy is easily imparted to a reasonably large value and the above-described magnetic characteristics are improved.

  The lattice distortion can be calculated by analyzing in detail the line width obtained by the X-ray diffraction method (XRD: X-ray Diffraction). That is, by performing the Halder-Wagner plot and the Hall-Williamson plot, it is possible to separate the contribution of the broadening of the line width into the crystal grain size and the lattice strain. Thereby, the lattice distortion can be calculated. The Halder-Wagner plot is preferred from the viewpoint of reliability. For the Halder-Wagner plot, see for example N.W. C. Halder, C.D. N. J. et al. Wagner, Acta Cryst. 20 (1966) 312-313. See etc. Here, the Halder-Wagner plot is expressed by the following equation.

That is, plotting is performed with β ² / tan ² θ on the vertical axis and β / tan θ sin θ on the horizontal axis, and the crystal grain size D is calculated from the slope of the approximate straight line, and the lattice strain ε is calculated from the vertical axis intercept. The lattice strain (lattice strain (root mean square)) by the Halder-Wagner plot of the above formula is 0.01% or more and 10% or less, more preferably 0.01% or more and 5% or less, and further preferably 0.01% or more and 1 % Or less, more preferably 0.01% or more and 0.5% or less, since magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic properties are improved.

The above lattice distortion analysis is an effective technique when a plurality of XRD peaks can be detected. On the other hand, when the XRD peak intensity is weak and the number of detectable peaks is small (for example, when only one is detected), the analysis is performed. Is difficult. In such a case, it is preferable to calculate the lattice distortion by the following procedure. First, the composition is obtained by inductively coupled plasma (ICP) emission spectroscopic analysis, energy dispersive X-ray spectroscopy (EDX), and the like, and three compositions of magnetic metal elements Fe, Co, and Ni are obtained. The ratio is calculated (two composition ratios when there are only two magnetic metal elements; one composition ratio (= 100%) when there is only one magnetic metal element). Next, an ideal lattice spacing d ₀ is calculated from the composition of Fe—Co—Ni (see literature values and the like. In some cases, an alloy having the composition is prepared, and the lattice spacing is calculated by measurement). . Thereafter, the amount of distortion can be determined by determining the difference between the measured lattice peak distance d of the sample and the ideal lattice distance d ₀ . That is, in this case, the distortion amount is calculated as (d−d ₀ ) / d ₀ × 100 (%). As described above, the analysis of the lattice distortion is preferably performed by using the above-described two methods depending on the state of the peak intensity, and sometimes using both in combination.

The lattice spacing in the flat surface 10a of the flat magnetic metal particles has a difference depending on the direction, and the ratio of the difference between the maximum lattice spacing d _max and the minimum lattice spacing d _min (= (d _max −d _min ) / d _min × 100 (%)) is preferably 0.01% to 10%, more preferably 0.01% to 5%, still more preferably 0.01% to 1%, and still more preferably 0.00. It is preferable to set it to 01% or more and 0.5% or less. This is preferable because magnetic anisotropy is easily imparted to a reasonably large value and the above-described magnetic characteristics are improved. Note that the lattice spacing can be easily obtained by XRD measurement. By performing this XRD measurement on the soft magnetic material 100 while changing the orientation in the plane, the difference in lattice constant depending on the direction can be obtained.

  The crystallites of the flat magnetic metal particles 10 are either connected in a row in the flat plane 10a, or the crystallites are rod-shaped and oriented in one direction in the flat plane 10a. Things are preferable. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved.

  The flat magnetic metal particle 10 contains two magnetic metals, Fe and Co, and Co is preferably contained in an amount of 10 atom% to 60 atom%, more preferably 10 atoms, based on the total amount of Fe and Co. % Or more and 40 atom% or less is preferable. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved. In addition, the Fe—Co system is preferable because high saturation magnetization is easily realized. Furthermore, when the composition range of Fe and Co falls within the above range, higher saturation magnetization can be realized, which is preferable.

The flat magnetic metal particles 10 are Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, Ba, Sr, Cr, Mo, Ag, Ga, Sc, V, Y, Nb, Pb, Cu, It is preferable to include at least one nonmagnetic metal selected from the group consisting of In, Sn, and rare earth elements. Thereby, the thermal stability and oxidation resistance of the flat magnetic metal particles 10 can be improved. Among these, Al and Si are particularly preferable because they are easily dissolved with Fe, Co, and Ni, which are the main components of the flat magnetic metal particles 10, and contribute to improvement in thermal stability and oxidation resistance.

  In order to induce the magnetic anisotropy, there is a method in which the crystallinity of the flat magnetic metal particle 10 is made as amorphous as possible and the magnetic anisotropy is induced in one in-plane direction by a magnetic field or strain. For this purpose, it is desirable to make the composition of the flat magnetic metal particles 10 as easy as possible to make it amorphous. In such a viewpoint, the magnetic metal contained in the flat magnetic metal particles 10 is composed of B, Si, C, Ti, Zr, Hf, Nb, Ta, Mo, Cr, Cu, W, P, N, and Ga. It is preferable that at least one selected additive metal is contained in an amount of 0.001 atomic% to 25 atomic% with respect to the total amount of the magnetic metal, the nonmagnetic metal, and the additive metal.

  It is preferable that the flat surface 10a of the flat magnetic metal particle 10 is crystallographically oriented. The orientation direction is preferably (110) plane orientation or (111) plane orientation, more preferably (110) plane orientation. When the crystal structure of the flat magnetic metal particle 10 is a body-centered cubic structure (bcc), the (110) plane orientation is preferable, and when the crystal structure of the flat magnetic metal particle 10 is a face-centered cubic structure (fcc), the (111) plane is preferred. Orientation is preferred. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved.

  Further, as preferred orientation directions, the (110) [111] direction and the (111) [110] direction are preferred, but the (110) [111] direction is more preferred. When the crystal structure of the flat magnetic metal particle 10 is a body-centered cubic structure (bcc), orientation in the (110) [111] direction is preferable, and when the crystal structure of the flat magnetic metal particle 10 is a face-centered cubic structure (fcc) Is preferably oriented in the (111) [110] direction. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved. In this specification, the “(110) [111] direction” means that the slip plane is the (110) plane or a crystallographically equivalent plane, that is, the {110} plane, and the slip direction is the [111] direction or The crystallographically equivalent direction, that is, the <111> direction. The same applies to the (111) [110] direction. That is, the slip plane is the (111) plane or a crystallographically equivalent plane, that is, the {111} plane, and the slip direction is the [110] direction or the crystallographically equivalent direction, that is, the <110> plane.

  The crystal structure of the flat magnetic metal particle 10 is preferably a body-centered cubic structure, but more preferably, the crystal structure of the face-centered cubic structure and the face-centered cubic structure are partially included. It is preferable that the crystal structure has a mixed phase. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved.

  The intervening phase 20 includes at least one of oxygen (O), carbon (C), nitrogen (N), and fluorine (F). This is because the resistance can be increased. The intervening phase 20 is preferably higher than the electrical resistivity of the flat magnetic metal particles 10. This is because eddy current loss of the flat magnetic metal particles 10 can be reduced. Since the intervening phase 20 surrounds the flat magnetic metal particles 10, it can improve the oxidation resistance and thermal stability of the flat magnetic metal particles 10, which is preferable. Among these, those containing oxygen are more preferable from the viewpoints of high oxidation resistance and high thermal stability. Since the intervening phase 20 also plays a role of mechanically bonding the flat magnetic metal particles 10 to each other, it is preferable from the viewpoint of high strength.

  Further, the intervening phase 20 includes an amount of 0.01 wt% or more and 80 wt% or less, more preferably 0.1 wt% or more and 60 wt% or less, further preferably 0.1 wt% or more and 40 wt% or less with respect to the entire soft magnetic material. Is preferred. If the ratio of the intervening phase 20 is too large, the ratio of the flat magnetic metal particles 10 that are responsible for magnetism is decreased, which is not preferable because the saturation magnetization and magnetic permeability of the soft magnetic material 100 are decreased. On the contrary, if the ratio of the intervening phase 20 is too small, the bonding between the flat magnetic metal particles 10 and the intervening phase 20 becomes weak, which is not preferable from the viewpoint of mechanical properties such as thermal stability, strength and toughness. The optimum ratio of the intervening phase 20 from the viewpoint of magnetic properties such as saturation magnetization and magnetic permeability, thermal stability, and mechanical properties is 0.01 wt% or more and 80 wt% or less, more preferably, based on the entire soft magnetic material. It is 0.1 wt% or more and 60 wt% or less, More preferably, it is 0.1 wt% or more and 40 wt% or less.

  The lattice mismatch ratio between the intervening phase 20 and the flat magnetic metal particles 10 is preferably 0.1% or more and 50% or less. This is preferable because the magnetic anisotropy is easily imparted to a moderately large value and the above-described magnetic characteristics are improved. In order to set the lattice mismatch within the above range, it can be realized by selecting a combination of the composition of the intervening phase and the composition of the flat magnetic metal particles 10. For example, Ni of fcc structure has a lattice constant of 3.52Å, MgO of NaCl type structure has a lattice constant of 4.21Å, and the lattice mismatch between them is (4.21−3.52) /3.52×100. = 20%. That is, the lattice mismatch can be set to 20% by setting the main composition of the flat magnetic metal particle 10 to Ni having an fcc structure and the intervening phase 20 to MgO. Thus, by selecting a combination of the main composition of the flat magnetic metal particles 10 and the main composition of the intervening phase 20, the lattice mismatch can be set in the above range.

  Next, the manufacturing method of the soft magnetic material 100 of 1st Embodiment is demonstrated. In addition, it does not specifically limit regarding a manufacturing method, It demonstrates as an example to the last.

  First, a ribbon or a thin film is produced using a film forming apparatus such as a single roll quenching apparatus or a sputtering apparatus. At this time, in the film formation method, it is desirable to form a film having uniaxial anisotropy in the film surface by film formation in a magnetic field or rotation film formation. When a film forming apparatus is used, the thickness can be reduced, the structure is easily refined, and rotation magnetization is likely to occur. Therefore, a film formation method is used when making a rotation magnetization type. Is desirable.

  Next, the ribbon or thin film is cut into an appropriate size using a mixer device or the like. Thereafter, the cut pieces are collected and pulverized and rolled by a pulverizer such as a planetary mill. The pulverizer is preferably an apparatus that can apply a strong gravitational acceleration, but the type is not particularly limited. Examples include planetary mills, bead mills, rotating ball mills, vibrating ball mills, stirring ball mills (attritors), jet mills, centrifuges, or a combination of mills and centrifuges. For example, gravitational acceleration of several tens of grams can be applied. A high power planetary mill device or the like is preferable. In the case of a high-power planetary mill device, a tilted planetary mill device is more preferable in which the direction of rotational gravity acceleration and the direction of revolutional gravity acceleration are not collinear and have an angled direction. In a normal planetary mill device, the direction of the rotational gravity acceleration and the direction of the revolutional gravity acceleration are on the same straight line.However, since the inclined planetary mill device performs a rotational motion with the container tilted, The direction and the direction of the revolving gravity acceleration are not on the same straight line but in an angled direction. This is preferable because power is efficiently transmitted to the sample, and pulverization and rolling proceed efficiently. In consideration of mass productivity, a bead mill apparatus that can easily perform mass processing is preferable. In order to efficiently proceed pulverization, it is more preferable to perform pulverization at low temperature using liquid nitrogen or the like.

  It is desirable to repeat the above-described cutting, pulverization and rolling so that the flat magnetic metal particles 10 have a predetermined thickness and aspect ratio. At this time, if the pulverization / rolling is performed so that the thickness is 10 nm to 100 μm, more preferably 10 nm to 1 μm, and still more preferably 10 nm to 100 nm, the particles are likely to cause rotational magnetization. Further, it is desirable that the obtained flat magnetic metal particles 10 appropriately remove lattice distortion by heat treatment. At this time, it is more desirable to perform heat treatment in a magnetic field. Next, the obtained flat magnetic metal particles 10 are mixed and molded together with the material constituting the intervening phase. At the time of molding, the molding is performed in a magnetic field to orient the flat particles. Finally, by performing a heat treatment while applying a magnetic field in one direction in the flat surface 10a, the lattice strain is 0.01% or more and 10% or less (more preferably 0.01% or more and 5% or less, more preferably 0). 0.01% or more and 1% or less, more preferably 0.01% or more and 0.5% or less), and the ratio of the difference between the maximum value and the minimum value of the lattice spacing in the plane is 0.01% or more and 10% or less ( More preferably 0.01% to 5%, still more preferably 0.01% to 1%, and still more preferably 0.01% to 0.5%. The soft magnetic material 100 obtained in this way has the flat magnetic metal particles 10 oriented and has magnetic anisotropy in one direction within the flat surface 10a.

The larger the magnetic field applied in the process, the better. However, it is preferable to apply 1 kOe or more, more preferably 10 kOe or more. In the heat treatment performed in the process, the temperature is preferably 50 ° C. or higher and 800 ° C. or lower, more preferably 200 ° C. or higher and 600 ° C. or lower. By setting this temperature range, the lattice strain can be released moderately. The heat treatment is preferably performed in a low oxygen concentration atmosphere or a vacuum atmosphere, but more preferably in a reducing atmosphere such as H ₂ , CO, or CH ₄ . Even if the flat magnetic metal particles 10 are oxidized, the oxidized metal can be reduced and returned to the metal by performing heat treatment in a reducing atmosphere. Thereby, the flat magnetic metal particles 10 that have been oxidized and the saturation magnetization is reduced can be reduced to recover the saturation magnetization (the magnetic permeability can also be improved). On the other hand, in order to reduce process costs, an atmosphere of low oxygen concentration such as Ar or N ₂ or a vacuum atmosphere is preferable. In addition, if the crystallization of the flat magnetic metal particles 10 is remarkably progressed by the heat treatment, the characteristics are deteriorated (coercive force is increased and magnetic permeability is decreased). Therefore, the condition is set so as to suppress excessive crystallization. It is preferable to select.

  In the flat magnetic metal particles 10 that have been pulverized and rolled, when the thickness is 10 nm to 100 μm, more preferably 10 nm to 1 μm, and even more preferably 10 nm to 100 nm, 10 kOe or more, preferably 20 kOe or more. When heat treatment is performed at a temperature of 200 ° C. or higher and 600 ° C. or lower in a magnetic field, the crystallites are connected in one direction in the direction of the magnetic field applied to the crystallites, and the crystallization progresses in a rod shape when the crystallization progresses. This is preferable because the rod-like crystallites are easily oriented in the magnetic field direction.

  As described above, according to the soft magnetic material of the present embodiment, it is possible to realize a soft magnetic material having excellent characteristics such as high magnetic permeability and low loss.

(Second Embodiment)
In the soft magnetic material 120 of the present embodiment, at least a part of the surface of the flat magnetic metal particle has a thickness of 0.1 nm to 1 μm, and oxygen (O), carbon (C), nitrogen (N), and fluorine ( It differs from the first embodiment in that it is covered with a coating layer containing at least one of F). Here, the description overlapping the first embodiment is omitted.

  FIG. 3 is a schematic diagram of the flat magnetic metal particle 10 of the present embodiment.

  The coating layer 14 is made of Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, Ba, Sr, Cr, Mo, Ag, Ga, Sc, V, Y, Nb, Pb, Cu, In, Sn. More preferably, it contains at least one nonmagnetic metal selected from the group consisting of rare earth elements and contains at least one of oxygen (O), carbon (C), nitrogen (N) and fluorine (F). The nonmagnetic metal is particularly preferably Al or Si from the viewpoint of thermal stability. The flat magnetic metal particles 10 are Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, Ba, Sr, Cr, Mo, Ag, Ga, Sc, V, Y, Nb, Pb, Cu, In, When at least one nonmagnetic metal selected from the group consisting of Sn and rare earth elements is included, the coating layer 14 includes at least the same nonmagnetic metal as the nonmagnetic metal that is one of the constituent components of the flat magnetic metal particles 10. More preferably, one is included. Among oxygen (O), carbon (C), nitrogen (N) and fluorine (F), oxygen (O) is preferably contained, and oxides and composite oxides are preferred. The above is from the viewpoint of easy formation of the coating layer 14, oxidation resistance, and thermal stability. By the above, the adhesiveness of the flat magnetic metal particle 10 and the coating layer 14 can be improved, and the thermal stability and oxidation resistance of the soft magnetic material can be improved. The coating layer 14 can improve not only the thermal stability and oxidation resistance of the flat magnetic metal particles 10 but also the electrical resistance of the flat magnetic metal particles 10. By increasing the electrical resistance, it is possible to suppress eddy current loss and improve the frequency characteristics of the magnetic permeability. For this reason, it is preferable that the coating layer 14 is electrically high resistance, for example, it is preferable to have a resistance value of 1 mΩ · cm or more.

  The presence of the coating layer 14 is also preferable from a magnetic point of view. The flat magnetic metal particles 10 can be considered as a pseudo thin film because the thickness of the flat magnetic metal particles 10 is smaller than the size of the flat surface 10a. At this time, the integrated structure in which the coating layer 14 is formed on the surface of the flat magnetic metal particle 10 can be regarded as a pseudo laminated thin film structure, and the magnetic domain structure is stabilized in terms of energy. This makes it possible to reduce the coercive force (which reduces hysteresis loss), which is preferable. At this time, the magnetic permeability increases, which is preferable. From such a viewpoint, it is more preferable that the coating layer 14 is nonmagnetic (the magnetic domain structure is easily stabilized).

  The thickness of the coating layer 14 is preferably as thick as possible from the viewpoint of thermal stability, oxidation resistance, and electrical resistance. However, if the thickness of the coating layer is too large, the saturation magnetization becomes small and the magnetic permeability becomes small. Also, from the magnetic point of view, if the thickness is too thick, the “effect of stabilizing the magnetic domain structure and reducing the coercive force, reducing the loss, and increasing the magnetic permeability” is reduced. Considering the above, a preferable thickness of the coating layer is 0.1 nm or more and 1 μm or less, more preferably 0.1 nm or more and 100 m or less.

  As described above, according to the soft magnetic material of the present embodiment, it is possible to realize a soft magnetic material having excellent characteristics such as high magnetic permeability and low loss.

(Third embodiment)
In the soft magnetic material of the present embodiment, the intervening phase 20 includes an oxide having a eutectic system, a resin, or at least one magnetic metal selected from Fe, Co, and Ni. It differs from the first or second embodiment in having at least one of the three. Here, description of contents overlapping with those of the first or second embodiment is omitted.

  First, the case where the intervening phase 20 is an oxide having a eutectic system will be described. In this case, the intervening phase 20 includes B (boron), Si (silicon), Cr (chromium), Mo (molybdenum), Nb (niobium), Li (lithium), Ba (barium), Zn (zinc), La ( Lanthanum), P (phosphorus), Al (aluminum), Ge (germanium), W (tungsten), Na (sodium), Ti (titanium), As (arsenic), V (vanadium), Ca (calcium), Bi ( It includes an oxide having a eutectic system containing at least two second elements from the group consisting of bismuth), Pb (lead), Te (tellurium), and Sn (tin). In particular, it is preferable to include a eutectic system including at least two elements of B, Bi, Si, Zn, and Pb. As a result, the adhesion between the flat magnetic metal particles and the intervening phase 20 is strengthened (bonding strength is increased), and mechanical properties such as thermal stability, strength, and toughness are easily improved.

  The oxide having the eutectic system preferably has a softening point of 200 ° C. or higher and 600 ° C. or lower, more preferably 400 ° C. or higher and 500 ° C. or lower. More preferably, it is an oxide having a eutectic system containing at least two elements of B, Bi, Si, Zn, and Pb, and has a softening point of 400 ° C. or higher and 500 ° C. or lower. As a result, the bonding between the flat magnetic metal particles 10 and the oxide having the eutectic system is strengthened, and mechanical properties such as thermal stability, strength, and toughness are easily improved. When integrating the flat magnetic metal particles 10 with the oxide having the eutectic system, heat treatment is performed at a temperature near the softening point of the oxide having the eutectic system, preferably at a temperature slightly higher than the softening point. By integrating, the adhesion between the flat magnetic metal particles 10 and the oxide having the eutectic system can be improved, and the mechanical characteristics can be improved. In general, the higher the temperature of the heat treatment, the better the adhesion between the flat magnetic metal particles 10 and the oxide having the eutectic system and the mechanical properties. However, if the temperature of the heat treatment becomes too high, the coefficient of thermal expansion becomes large, so that the adhesion between the flat magnetic metal particles 10 and the oxide having the eutectic system may be reduced (flat magnetic metal). If the difference between the thermal expansion coefficient of the particle 10 and the thermal expansion coefficient of the oxide having the eutectic system is increased, the adhesion may be further lowered). Moreover, when the crystallinity of the flat magnetic metal particles 10 is amorphous or amorphous, if the temperature of the heat treatment is high, crystallization proceeds and the coercive force increases, which is not preferable. Therefore, in order to achieve both mechanical properties and coercive force properties, the softening point of the oxide having the eutectic system is set to 200 ° C. or higher and 600 ° C. or lower, more preferably 400 ° C. or higher and 500 ° C. or lower. It is preferable that the oxides having the eutectic system be integrated with heat treatment at a temperature near the softening point, preferably slightly higher than the softening point. Moreover, it is preferable to use the integrated material at a temperature lower than the softening point when it is actually used in a device or system.

The oxide having the eutectic system preferably has a glass transition point. Furthermore, the oxide having the eutectic system preferably has a thermal expansion coefficient of 0.5 × 10 ⁻⁶ / ° C. or higher and 40 × 10 ⁻⁶ / ° C. or lower. As a result, the bonding between the flat magnetic metal particles 10 and the oxide having the eutectic system is strengthened, and mechanical properties such as thermal stability, strength, and toughness are easily improved.

  It is more preferable that at least one eutectic particle 22 having a particle size of 10 nm or more and 10 μm or less (preferably spherical) is included. The eutectic particles 22 include the same material as the oxide having the eutectic system other than the particulate form. There may be some voids in the soft magnetic material, and it is easy to observe that some of the oxides having the eutectic system are in the form of particles, preferably spherical. I can do it. Even when there are no voids, the particulate or spherical interface can be easily identified. The particle diameter of the eutectic particles 22 is more preferably 10 nm to 1 μm, and still more preferably 10 nm to 100 nm. As a result, the strain applied to the flat magnetic metal particles can be reduced and the coercive force can be reduced by moderately relaxing the stress while maintaining the adhesion between the flat magnetic metal particles during the heat treatment. . Thereby, the hysteresis loss is also reduced and the magnetic permeability is improved. The particle size of the eutectic particles 22 can be measured by TEM or SEM observation. FIG. 4 is a schematic diagram of the soft magnetic material 110 at this time. In FIG. 4, the intervening phase 20 fills the space without a gap, but in reality, the gap may partially exist.

  The intervening phase 20 has a softening point higher than that of the oxide having the eutectic system, more preferably higher than 600 ° C., and O (oxygen), C (carbon), N It is preferable to further include intermediate intervening particles 24 containing at least one element of the group consisting of (nitrogen) and F (fluorine). The presence of the intermediate intervening particles 24 between the flat magnetic metal particles 10 prevents the flat magnetic metal particles 10 from being thermally fused and deteriorated when the soft magnetic material 150 is exposed to a high temperature. I can do it. That is, it is desirable for the intermediate intervening particles 24 to exist mainly for thermal stability. Note that the softening point of the intermediate intervening particles 24 is higher than the softening point of the oxide having the eutectic system, and more preferably, the softening point is 600 ° C. or higher, thereby further improving the thermal stability. I can do it.

The intermediate intervening particles 24 are Mg, Al, Si, Ca, Zr, Ti, Hf, Zn, Mn, Ba, Sr, Cr, Mo, Ag, Ga, Sc, V, Y, Nb, Pb, Cu, In, Sn, containing at least one nonmagnetic metal selected from the group consisting of rare earth elements, and at least one element selected from the group consisting of O (oxygen), C (carbon), N (nitrogen) and F (fluorine) It is preferable to contain. More preferably, from the viewpoint of high oxidation resistance and high thermal stability, an oxide or composite oxide containing oxygen is more preferable. In particular, oxides such as aluminum oxide (Al ₂ O ₃ ), silicon dioxide (SiO ₂ ), titanium oxide (TiO ₂ ), and zirconium oxide ( ZrO ₂ ), and complex oxides such as Al—Si—O are high. It is preferable from the viewpoint of oxidation resistance and high thermal stability.

  FIG. 5 is a schematic diagram of the soft magnetic material 120 and the soft magnetic material 130 including the intermediate intervening particles 24. In FIG. 5, the case where the intervening phase 20 does not include the eutectic particles 22 (FIG. 5A) and the case where it includes (FIG. 5B) are shown. In the figure, the intervening phase 20 fills the space without a gap, but the gap may partially exist.

Examples of a method for producing the soft magnetic material 120 and the soft magnetic material 130 including the intermediate intervening particles 24 include flat magnetic metal particles and intermediate intervening particles (aluminum oxide (Al ₂ O ₃ ) particles, silicon dioxide (SiO ₂ ) particles). , Titanium oxide (TiO ₂ ) particles, zirconium oxide ( ZrO ₂ ) particles, etc.) are mixed by a ball mill or the like to form a dispersed state, and then integrated by press molding or the like. The method of dispersing is not particularly limited as long as it can be appropriately dispersed.

  Next, the second “in the case where the intervening phase 20 contains a resin” will be described. In this case, the resin is not particularly limited, but polyester resin, polyethylene resin, polystyrene resin, polyvinyl chloride resin, polyvinyl butyral resin, polyvinyl alcohol resin, polybutadiene resin, polytetrafluoroethylene ("Teflon" ( Registered trademark)) resin, polyurethane resin, cellulose resin, ABS resin, nitrile-butadiene rubber, styrene-butadiene rubber, silicone resin, other synthetic rubber, natural rubber, epoxy resin, phenol resin, allyl resin, poly A benzimidazole resin, an amide resin, a polyimide resin, a polyamideimide resin, or a copolymer thereof is used. In particular, it is preferable to include a silicone resin and a polyimide resin having high heat resistance. As a result, the bonding between the flat magnetic metal particles and the intervening phase becomes strong, and mechanical properties such as thermal stability, strength, and toughness are easily improved.

  Next, the third “case where the intervening phase 20 contains at least one magnetic metal selected from Fe, Co, and Ni and has magnetism” will be described. In this case, it is preferable that the intervening phase has magnetism because the flat magnetic metal particles 10 are easily magnetically coupled to each other and the magnetic permeability is improved. Moreover, since the magnetic domain structure is stabilized, the frequency characteristic of the magnetic permeability is also improved, which is preferable. In addition, the magnetism said here shows things, such as ferromagnetism, ferrimagnetism, weak magnetism, and antiferromagnetism. In particular, ferromagnetism and ferrimagnetism are preferred because the magnetic coupling force is increased. The point in which the intervening phase 20 has magnetism can be evaluated using a VSM (Vibrating Sample Magnetometer) or the like. The point that the intervening phase 20 contains at least one magnetic metal selected from Fe, Co, and Ni and has magnetism can be easily examined using EDX or the like.

  As mentioned above, although the three forms of the intervening phase 20 were demonstrated, it is preferable to satisfy | fill at least one among these three, However, You may satisfy | fill two or more and also all three.

  As described above, according to the soft magnetic material of the present embodiment, it is possible to realize a soft magnetic material having particularly excellent characteristics such as thermal stability and mechanical characteristics.

(Fourth embodiment)
The soft magnetic material 160 of the present embodiment has a laminated structure composed of a magnetic layer 30 containing flat magnetic metal particles 10 and an intermediate layer 40 containing any of O, C, and N. Thus, it is different from the soft magnetic material of the first to third embodiments. Here, the description overlapping with the first to third embodiments is omitted.

  That is, the soft magnetic material 160 is a flat magnetic metal particle, contains at least one magnetic metal selected from Fe, Co, and Ni, has a thickness of 10 nm to 100 μm, and an aspect ratio of 5 to 10,000. The flat magnetic metal particles having a lattice strain of 0.01% or more and 10% or less, oriented in the flat magnetic metal particles, and having magnetic anisotropy in one direction in the oriented flat plane, and the flat magnetism A magnetic layer that is present between the metal particles and includes at least one of oxygen (O), carbon (C), nitrogen (N), and fluorine (F), and a magnetic layer provided in contact with the magnetic layer And an intermediate layer containing any one of oxygen (O), carbon (C), nitrogen (N) and fluorine (F). At this time, it is preferable to make the magnetic permeability of the intermediate layer 40 smaller than the magnetic permeability of the magnetic layer 30. These treatments are preferable because a pseudo thin film laminated structure can be realized and the magnetic permeability in the layer direction can be increased. In addition, such a structure is preferable because the ferromagnetic resonance frequency can be increased, so that the ferromagnetic resonance loss can be reduced. Furthermore, such a laminated structure is preferable because the magnetic domain structure is stabilized and low magnetic loss can be realized. In order to further enhance these effects, it is more preferable to make the magnetic permeability of the intermediate layer 40 smaller than the magnetic permeability of the intervening phase 20. This is preferable because the pseudo-thin film laminated structure can further increase the magnetic permeability in the layer direction. Further, since the ferromagnetic resonance frequency can be further increased, the ferromagnetic resonance loss can be reduced, which is preferable. FIG. 6 is a schematic diagram of the soft magnetic material of the present embodiment.

  As described above, according to the soft magnetic material 160 of the present embodiment, it is possible to realize a soft magnetic material having excellent characteristics such as high magnetic permeability and low loss.

(Fifth embodiment)
The system and device apparatus of this embodiment have the soft magnetic material of the first to fourth embodiments. Therefore, the description overlapping with the first to fourth embodiments is omitted. The components of soft magnetic materials included in this system and device device include, for example, rotating electric machines such as various motors and generators (for example, motors and generators), cores such as transformers, inductors, transformers, choke coils, and filters. And a magnetic wedge (magnetic wedge) for a rotating electrical machine. FIG. 7 shows a conceptual diagram of a motor system 1000 as an example of a rotating electrical machine system. The motor system is a system including a control system that controls the rotation speed and electric power (output power) of the motor. As a method for controlling the rotational speed of the motor, there are control methods such as control by a bridge servo circuit, proportional current control, voltage comparison control, frequency synchronization control, PLL (Phase Locked Loop) control, and the like. As an example, a control method using a PLL is shown in FIG. A motor system 1000 that controls the number of rotations of a motor using a PLL includes a motor, a rotary encoder that detects the number of rotations of the motor by converting a mechanical displacement amount of the rotation of the motor into an electric signal, and a motor given by a command A phase comparator that compares the rotational speed of the motor and the rotational speed of the motor detected by the rotary encoder and outputs a difference between the rotational speeds, and a controller that controls the motor to reduce the rotational speed difference. On the other hand, methods for controlling the motor power include PWM (Pulse Width Modulation) control, PAM (Pulse Amplitude Modulation) control, vector control, pulse control, bipolar drive, pedestal control, resistance There are control methods such as control. Other control methods include control methods such as microstep drive control, multiphase drive control, inverter control, and switching control. As an example, an inverter control method is shown in FIG. A motor system 1000 that controls electric power of a motor by an inverter is controlled by an AC power source, a rectifier that converts an output of the AC power source into a DC current, an inverter circuit that converts the DC current into an AC at an arbitrary frequency, and the AC A motor to be provided.

  FIG. 8 shows a conceptual diagram of a motor 200 as an example of a rotating electrical machine. In the motor 200, a first stator (stator) 210 and a second rotor (rotor) 220 are disposed. In the figure, an inner rotor type in which the rotor is arranged inside the stator is shown, but an outer rotor type in which the rotor is arranged outside the stator may be used.

  FIG. 9 shows a conceptual diagram of the motor core. As the motor core, a stator core and a rotor core are applicable. This point will be described below with reference to FIG. FIG. 9A is a conceptual cross-sectional view of the first stator 210. The first stator 210 has a core and a winding. The winding is wound around a part of the protrusion provided on the inner side of the core. The soft magnetic material of the first to third embodiments can be arranged in this core. FIG. 9B is a conceptual cross-sectional view of the first rotor 220. The first rotor 220 has a core and a winding. The winding is wound around a part of the protrusion provided on the outer side of the core. The soft magnetic material of the first to third embodiments can be arranged in this core.

  8 and 9 merely show an example of the motor, and the application destination of the soft magnetic material is not limited to this. It can be applied to all types of motors as a core to make it easier to guide magnetic flux.

  FIG. 10 shows a transformer / transformer 300, and FIG. 11 shows a conceptual diagram of an inductor. These are shown only as examples. As with motor cores, soft magnetic materials can be applied to all types of transformers, transformers, and inductors in order to make it easier to guide magnetic flux or to use high magnetic permeability. .

  FIG. 12 shows a conceptual diagram of a generator 500 as an example of a rotating electrical machine. The generator 500 includes a second stator (stator) 530 using the soft magnetic material of the first to third embodiments, and a second rotor using the soft magnetic material of the first to third embodiments. One (or both) of (rotor) 540 is provided. In the figure, the second rotor (rotor) 540 is disposed inside the second stator 530, but may be disposed outside. The second rotor 540 is connected to a turbine 510 provided at one end of the generator 500 via a shaft 520. The turbine 510 is rotated by, for example, a fluid supplied from outside (not shown). Note that the shaft 520 can be rotated by transmitting dynamic rotation such as regenerative energy of an automobile in place of the turbine 510 rotated by a fluid. Various known configurations can be employed for the second stator 530 and the second rotor 540.

  The shaft 520 is in contact with a commutator (not shown) disposed on the side opposite to the turbine 510 with respect to the second rotor 540. The electromotive force generated by the rotation of the second rotor 540 is boosted to the system voltage and transmitted as electric power of the generator 500 via a phase separation bus (not shown) and a main transformer (not shown). The second rotor 540 is charged by static electricity from the turbine 510 or an axial current accompanying power generation. For this reason, the generator 500 includes a brush 550 for discharging the charge of the second rotor 540.

  FIG. 13 shows a preferable example of the relationship between the direction of magnetic flux and the arrangement direction of the soft magnetic material. First, in both the domain wall motion type and the rotary magnetization type, it is preferable that the flat surfaces 10a of the flat magnetic metal particles 10 included in the soft magnetic material are arranged in a direction that is as parallel as possible with respect to the direction of the magnetic flux. This is because eddy current loss can be reduced by making the cross-sectional area of the flat magnetic metal particles 10 penetrating the magnetic flux as small as possible. In addition, in the domain wall motion type, it is preferable to arrange the easy magnetization axis (arrow direction) in the flat surface 10a of the flat magnetic metal particle 10 in parallel with the magnetic flux direction. As a result, it can be used in a direction in which the coercive force is further reduced, which is preferable because hysteresis loss can be reduced. Moreover, the magnetic permeability can be increased, which is preferable. On the contrary, in the rotary magnetization type, it is preferable to arrange the easy magnetization axis (arrow direction) in the flat surface 10a of the flat magnetic metal particle 10 perpendicularly to the direction of the magnetic flux. As a result, it can be used in a direction in which the coercive force is further reduced, which is preferable because hysteresis loss can be reduced. That is, it is preferable to arrange as shown in FIG. 13 after grasping the magnetization characteristics of the soft magnetic material and determining whether it is a domain wall motion type or a rotary magnetization type (the determination method is as described above). If the direction of the magnetic flux is complicated, it may be difficult to completely arrange as shown in FIG. 13, but it is preferable to arrange as shown in FIG. 13 as much as possible. The arrangement method described above includes all the systems and device devices of the present embodiment (for example, rotating electric machines such as various motors and generators (for example, motors and generators)), transformers, inductors, transformers, choke coils, and filters. It is desirable to be applied to a core such as a magnetic wedge or a wedge for a rotating electrical machine.

  In order to apply to this system and device apparatus, the soft magnetic material allows various processing. For example, in the case of a sintered body, machining such as polishing or cutting is performed, and in the case of powder, mixing with an epoxy resin or a resin such as polybutadiene is performed. Further surface treatment is performed if necessary. Further, a winding process is performed as necessary.

  According to the system and device device of the present embodiment, a motor system, motor, transformer, transformer, inductor, and generator having excellent characteristics (high efficiency, low loss) can be realized.

(Example)
Hereinafter, Examples 1 to 13 of the present invention will be described in more detail while comparing with Comparative Examples 1 to 7. Table 1 shows the thickness / aspect ratio, magnetization behavior, lattice distortion, lattice strain difference ratio, crystal structure, and composition of the flat magnetic metal particle 10 for the soft magnetic material 100 obtained by the following examples and comparative examples. Show. In addition, the measurement of the thickness and aspect ratio of the flat magnetic metal particle 10 is calculated by the average value of many particles based on TEM observation / SEM observation. The composition is comprehensively determined using EDX and ICP. The difference between the lattice distortion and the lattice spacing is determined by XRD analysis.

Example 1
First, a ribbon of Fe—Co—Si—B (Fe: Co = 70: 30 at%) is prepared using a single roll quenching apparatus. Next, the ribbon is cut into an appropriate size using a mixer device. Thereafter, the cut ribbon piece is collected and pulverized and rolled at 1000 rpm in an Ar atmosphere by a planetary mill using a ZrO ₂ ball and a ZrO ₂ container. The above-described cutting, pulverization and rolling are repeated, and processing is performed to obtain flat magnetic metal particles 10 having a thickness of 10 nm and an aspect ratio of 1000. The surface of the obtained flat magnetic metal particles 10 was coated with a nonmagnetic SiO ₂ layer with a thickness of 20 nm by a sol-gel method, and then an inorganic oxide (corresponding to the intervening phase 20; B ₂ O ₃ —Bi _2. O ₃ —ZnO: softening point 425 ° C.). Thereafter, the soft magnetic material 100 is obtained by molding in a magnetic field (orienting the flat magnetic metal particles 10) and performing heat treatment. The heat treatment is performed at a temperature slightly higher than the softening point. Finally, by performing heat treatment while applying a magnetic field in one direction in the flat surface 10a, the lattice distortion is about 0.1%, and the ratio of the difference between the maximum value and the minimum value of the lattice plane spacing within the plane is 0. Adjust to about 1%. The obtained soft magnetic material 100 is such that the flat magnetic metal particles 10 are oriented and has magnetic anisotropy in one direction within the flat surface 10a.

(Example 2)
Except that the thickness of the flat magnetic metal particle 10 is 100 μm and the aspect ratio is 5, it is almost the same as the first embodiment.

Example 3
Except for setting the aspect ratio of the flat magnetic metal particle 10 to 5, it is almost the same as the first embodiment.

Example 4
Except for setting the aspect ratio of the flat magnetic metal particle 10 to 100, it is almost the same as the first embodiment.

(Example 5)
Except for setting the aspect ratio of the flat magnetic metal particle 10 to 10,000, it is almost the same as the first embodiment. At this time, the magnetization behavior changes from the domain wall motion type to the rotational magnetization type.

(Example 6)
Except that the lattice strain of the flat magnetic metal particles 10 is about 0.01% and the difference ratio of the lattice spacing is about 0.01%, it is almost the same as the first embodiment.

(Example 7)
Except that the lattice strain of the flat magnetic metal particles 10 is about 0.5% and the difference ratio of the lattice spacing is about 0.5%, it is almost the same as the first embodiment.

(Example 8)
Except for setting the Fe: Co composition ratio of the flat magnetic metal particle 10 to 10:90, it is almost the same as the first embodiment. At this time, the crystal structure becomes an fcc structure (Example 1 is a bcc structure).

Example 9
Except that the composition of the flat magnetic metal particles 10 is Fe—Ni—Si—B (Fe: Ni = 50: 50 at%), it is almost the same as that of Example 1. At this time, the crystal structure becomes an fcc structure.

(Example 10)
Except for setting the Fe: Co composition ratio of the flat magnetic metal particle 10 to 28:72, it is almost the same as the first embodiment. At this time, the crystal structure is a mixed phase of the bcc structure and the fcc structure.

(Example 11)
Example: Except that the flat magnetic metal particles 10 are heat-treated at 500 ° C. under a magnetic field of 20 kOe, so that the crystallites of the flat magnetic metal particles 10 are connected in a rod-like manner and oriented in one direction in the flat surface 10a. It is almost the same as 1.

Example 12
Example 1 is substantially the same as Example 1 except that the flat magnetic metal particles 10 are (110) [111] oriented.

(Example 13)
Example 1 is substantially the same as Example 1 except that the lattice mismatch between the flat magnetic metal particle 10 and the intervening phase 20 is 10%.

(Example 14)
Example 1 is substantially the same as Example 1 except that the thickness at the time of molding is set to about 100 μm and a laminated structure with a nonmagnetic layer (intermediate layer 40) of SiO ₂ is formed.

(Comparative Example 1)
Using the atomization method, spherical particles of Fe—Co—Si—B (Fe: Co = 70: 30 at%, composition is the same as in Example 1) are prepared. The obtained spherical particles are mixed and molded together with an inorganic substance (corresponding to the intervening phase 20). Finally, heat treatment is performed so that the lattice strain and the difference ratio between the lattice planes are both adjusted to approximately 0%.

(Comparative Example 2)
Except that the thickness of the flat magnetic metal particle 10 is 8 nm, it is almost the same as the first embodiment.

(Comparative Example 3)
Except that the thickness of the flat magnetic metal particle 10 is 120 μm and the aspect ratio is 5, it is almost the same as the first embodiment.

(Comparative Example 4)
Except for setting the aspect ratio of the flat magnetic metal particle 10 to 4, it is almost the same as the first embodiment.

(Comparative Example 5)
Except for setting the aspect ratio of the flat magnetic metal particle 10 to 12000, it is almost the same as the first embodiment.

(Comparative Example 6)
Except that the lattice strain of the flat magnetic metal particle 10 is about 0.007% and the difference ratio of the lattice spacing is about 0.006%, it is almost the same as the first embodiment.

(Comparative Example 7)
The flat magnetic metal particles 10 are substantially the same as those in Example 1 except that the lattice strain of the flat magnetic metal particles 10 is about 10.1% and the difference between the lattice spacings is about 10.2%.

  Next, with respect to the evaluation materials of Examples 1 to 13 and Comparative Examples 1 to 7, saturation magnetization, magnetic permeability real part (μ ′), magnetic permeability loss (tan δ), and magnetic permeability after 100 hours are as follows. The change with time of the real part (μ ′), iron loss, and strength ratio are evaluated. The evaluation results are shown in Table 2.

  (1) Saturation magnetization: Saturation magnetization at room temperature is measured by using a vibrating sample magnetometer (VSM: Vibrating Sample Magnetometer).

  (2) Permeability real part μ ′, permeability loss (tan δ = μ ″ / μ ′ × 100 (%)): The permeability of the ring-shaped sample is measured using an impedance analyzer at a frequency of 1 kHz. The real part μ ′ and the imaginary part μ ″ are measured. Further, the permeability loss tan δ is calculated by μ ″ / μ ′ × 100 (%).

  (3) Temporal change in permeability real part μ ′ after 100 hours: The sample for evaluation was heated in the atmosphere at 60 ° C. for 100 hours, and then measured again for real part μ ′. Permeability real part μ ′ after standing / permeability real part μ ′ before standing) is obtained.

  (4) Iron loss: Measure iron loss under operating conditions of 1 kHz and 1 T using a BH analyzer.

  (5) Strength ratio: The bending strength of the evaluation sample was measured, and the ratio to the bending strength of the comparative sample (= the bending strength of the evaluation sample / the bending strength of the comparative sample) was indicated. In addition, Example and Comparative Examples 2-7 were shown by the ratio with Comparative Example 1.

  As is clear from Table 1, the soft magnetic material 100 according to Examples 1 to 14 has a thickness of 10 nm to 100 μm and an aspect ratio of 5 to 10,000. This is a soft magnetic material 100. In any case, the flat magnetic metal particles 10 are oriented and have magnetic anisotropy in one direction within the oriented flat surface 10a. In Example 5, magnetization proceeds by rotational magnetization, and in other examples, magnetization proceeds by domain wall motion. Further, the lattice strain of the flat magnetic metal particles 10 is 0.01% or more and 10% or less. Further, the lattice plane spacing in the flat plane 10a of the flat magnetic metal particles has a difference depending on the direction, and the ratio of the difference between the maximum lattice plane spacing and the minimum lattice plane spacing is 0.01% or more and 10% or less. In Example 11, the flat surface 10a of the flat magnetic metal particle 10 is oriented in the (110) [111] direction. Examples 8 and 9 have an fcc crystal structure, Example 10 has a mixed phase crystal structure of fcc and bcc, and other examples have a bcc crystal structure. In Example 13, the lattice mismatch between the flat magnetic metal particle 10 and the intervening phase 20 is 10%. Example 14 has a laminated structure with a nonmagnetic layer.

  On the other hand, Comparative Example 1 is a compact of spherical isotropic particles by atomization, which is an existing technology. Comparative Examples 2 to 7 are out of the scope of the claims as compared to Example 1.

  As is clear from Table 2, the soft magnetic material 100 according to Examples 1 to 14 has a real permeability part, a permeability loss, an iron loss, and a temporal change rate of permeability compared with the existing material of Comparative Example 1. It can be seen that the strength ratio is excellent. Further, it can be seen that, compared with Comparative Examples 2 to 7, it is particularly excellent in the real part of magnetic permeability, the iron loss, the rate of change with time of the magnetic permeability, and the strength ratio. Since the saturation magnetization is determined by the composition, as long as the composition is the same, there is no significant difference compared to the comparative example.

  As described above, the soft magnetic material 100 according to Examples 1 to 14 is applied to a complicated shape while satisfying high saturation magnetization, high magnetic permeability, low loss, high thermal stability, high oxidation resistance, and high strength. It can be seen that this is a soft magnetic powder material.

(Example 15):
Except for the point that the thickness is 100 nm, it is almost the same as Example 2.

(Example 16)
It is almost the same as Example 2 except that the thickness is 1 μm.

(Example 17)
Except for the point that the thickness is 10 μm, it is almost the same as Example 2.

(Example 18)
The flat magnetic metal particles 10 are substantially the same as those in Example 1 except that the lattice strain of the flat magnetic metal particle 10 is about 0.9% and the difference ratio of the lattice spacing is about 0.92%.

(Example 19)
Except that the lattice strain of the flat magnetic metal particles 10 is about 4.8% and the difference ratio of the lattice spacing is about 4.9%, it is almost the same as the first embodiment.

(Example 20)
Except that the lattice strain of the flat magnetic metal particle 10 is about 9.7% and the difference ratio of the lattice spacing is about 9.9%, it is almost the same as the first embodiment.

(Example 21)
Example 1 is substantially the same as Example 1 except that the surface of the flat magnetic metal particle 10 having a thickness of 10 nm and an aspect ratio of 1000 is coated with a nonmagnetic SiO ₂ layer with a thickness of 1 nm by a sol-gel method.

(Example 22)
Example 1 is substantially the same as Example 1 except that the surface of the flat magnetic metal particle 10 having a thickness of 100 nm and an aspect ratio of 100 is coated with a nonmagnetic SiO ₂ layer with a thickness of 10 nm by a sol-gel method.

(Example 23)
Example 1 is substantially the same as Example 1 except that the surface of the flat magnetic metal particle 10 having a thickness of 1 μm and an aspect ratio of 100 is coated with a nonmagnetic SiO ₂ layer with a thickness of 100 nm by a sol-gel method.

(Example 24)
Example 1 is substantially the same as Example 1 except that the surface of the flat magnetic metal particle 10 having a thickness of 10 μm and an aspect ratio of 10 is coated with a nonmagnetic SiO ₂ layer at a thickness of 900 nm by a sol-gel method.

(Example 25)
The soft magnetic material of this example is substantially the same as Example 1 except that it has a eutectic system with a softening point of 200 ° C. The eutectic composition is PV-Ag-O.

(Example 26)
The soft magnetic material of this example is almost the same as that of Example 1 except that it has a eutectic system with a softening point of 300 ° C. The eutectic composition is Pb—B—O.

(Example 27)
The soft magnetic material of this example is substantially the same as Example 1 except that it has a eutectic system with a softening point of 400 ° C. The eutectic composition is Bi-B-O.

(Example 28)
The soft magnetic material of this example is substantially the same as Example 1 except that it has a eutectic system with a softening point of 500 ° C. The eutectic composition is B-Bi-Zn-O.

(Example 29)
The soft magnetic material of this example is almost the same as that of Example 1 except that it has a eutectic system with a softening point of 600 ° C. The eutectic composition is B-Bi-Si-O.

(Example 30)
The soft magnetic material of the present example was subjected to heat treatment after molding in a magnetic field except that the eutectic particles having a spherical shape and a particle size of 50 nm were formed on the surface of the flat magnetic metal particles by doubling the heat treatment time. It is almost the same as Example 1. The composition of the eutectic particles is B-Bi-Zn-O.

(Comparative Example 8)
Example 1 is substantially the same as Example 1 except that the surface of flat magnetic metal particles having a thickness of 10 nm and an aspect ratio of 1000 is not coated with a nonmagnetic SiO ₂ layer.

(Comparative Example 9)
Example 1 is substantially the same as Example 1 except that the surface of the flat magnetic metal particle 10 having a thickness of 10 μm and an aspect ratio of 10 is coated with a nonmagnetic SiO ₂ layer with a thickness of 2 μm by a sol-gel method.

(Comparative Example 10)
Except for having an intervening phase with a softening point of 100 ° C., it is almost the same as Example 1. An organic epoxy resin was used as the intervening phase.

(Comparative Example 11)
Except for having a eutectic system with a softening point of 700 ° C., it is almost the same as Example 1. The eutectic composition is Si—B—Al—O.

  As is apparent from Table 3, the soft magnetic materials according to Examples 15 to 30 are soft magnetic materials composed of flat magnetic metal particles having a thickness of 10 nm to 100 μm and an aspect ratio of 5 to 10,000, and an oxide intervening phase. Material. In any case, the flat magnetic metal particles are oriented and have magnetic anisotropy in one direction within the oriented flat plane, and magnetization proceeds by domain wall motion. The lattice strain of the flat magnetic metal particles is 0.01% or more and 10% or less. Further, the lattice plane spacing in the flat plane of the flat magnetic metal particles has a difference depending on the direction, and the ratio of the difference between the maximum lattice plane spacing and the minimum lattice plane spacing is 0.01% or more and 10% or less. The surfaces of the flat magnetic metal particles are covered with a nonmagnetic oxide layer having a thickness of 0.1 nm to 1 μm. The softening point of the intervening phase is 200 ° C. or higher and 600 ° C. or lower.

  On the other hand, Comparative Example 8 has no coating layer, and Comparative Example 9 has a coating layer thickness as large as 2 μm. In Comparative Example 10, the softening point of the intervening phase is 100 ° C., and in Comparative Example 11, the softening point of the intervening phase is 700 ° C.

  As is clear from Table 4, the soft magnetic materials according to Examples 15 to 30 are compared with the existing material of Comparative Example 1 in terms of the real part of magnetic permeability, the magnetic permeability loss, the iron loss, and the temporal change rate of the magnetic permeability, It can be seen that the strength ratio is excellent. Further, it can be seen that, compared with Comparative Examples 2 to 11, it is particularly excellent in the magnetic permeability real part, the iron loss, the magnetic permeability change rate with time, and the strength ratio.

  As described above, the soft magnetic materials according to Examples 15 to 30 have high saturation magnetization, high magnetic permeability, low loss, high thermal stability, high oxidation resistance, high strength, and have a complicated shape. It can be seen that this is a soft magnetic powder material that can be applied.

  Although several embodiments and examples of the present invention have been described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 Flat magnetic metal particle 10a Flat surface 14 Covering layer 20 Intervening phase 22 Eutectic particle 24 Intermediate intervening particle 30 Magnetic layer 40 Intermediate layer 100 Soft magnetic material 110 Soft magnetic material 120 Soft magnetic material 130 Soft magnetic material 160 Soft magnetic material 200 Motor 210 First stator 220 First rotor 300 Transformer / transformer 400 Inductor 500 Generator 510 Turbine 520 Shaft 530 Second stator 540 Second rotor 1000 Motor system

Claims (20)

A flat magnetic metal particle containing at least one magnetic metal selected from Fe, Co, and Ni, having a thickness of 10 nm to 100 μm, an aspect ratio of 5 to 10,000, and a lattice strain of 0.01% 10% or less, the flat magnetic metal particles are oriented, and the flat magnetic metal particles have magnetic anisotropy in one direction within the oriented flat plane;
An intervening phase present between the flat magnetic metal particles and containing at least one of oxygen (O), carbon (C), nitrogen (N) and fluorine (F);
Soft magnetic material comprising   The soft magnetic material according to claim 1, wherein the magnetization behavior of the flat magnetic metal particles proceeds by domain wall motion.   The soft magnetic material according to claim 1, wherein the magnetization behavior of the flat magnetic metal particles proceeds by rotational magnetization. The lattice plane spacing in the flat plane of the flat magnetic metal particles has a difference depending on the direction, and the ratio of the difference between the maximum lattice spacing and the minimum lattice spacing is 0.01% or more and 10% or less. The soft magnetic material according to claim 3. The flat crystallite of the magnetic metal particles has become strung in one direction in said flat surface, or the crystallites is rod-shaped and the claims 1 are oriented in one direction in the flat plane claims 4. The soft magnetic material according to any one of 4 above. The flat magnetic metal particles Fe, comprises two magnetic metal Co, the preceding claims 1 Co is contained 10 atomic% to 60 atomic% or less based on the total amount of Fe and Co to one of claims 5 The soft magnetic material described. The soft magnetic material according to any one of claims 1 to 6, wherein a flat plane of the flat magnetic metal particles is (110) -oriented or (111) -oriented. The soft magnetic material according to any one of claims 1 to 7, wherein the flat magnetic metal particles have a body-centered cubic crystal structure. The soft magnetic material according to any one of claims 1 to 8, wherein the flat magnetic metal particles have a mixed phase crystal structure of a body-centered cubic structure and a face-centered cubic structure. A coating layer in which at least a part of the surface of the flat magnetic metal particle has a thickness of 0.1 nm to 1 μm and contains at least one of oxygen (O), carbon (C), nitrogen (N), and fluorine (F). The soft magnetic material according to any one of claims 1 to 9, which is covered with a soft magnetic material. The soft magnetic material according to any one of claims 1 to 10, wherein a lattice mismatch ratio between the intervening phase and the flat magnetic metal particles is 0.1% or more and 50% or less. The intervening phase is composed of B, Si, Cr, Mo, Nb, Li, Ba, Zn, La, P, Al, Ge, W, Na, Ti, As, V, Ca, Bi, Pb, Te, and Sn. Having a eutectic system including at least two second elements of the group, having a softening point of 200 ° C. or higher and 600 ° C. or lower, and having a thermal expansion coefficient of 0.5 × 10 −6 / ° C. or higher and 40 × The soft magnetic material according to any one of claims 1 to 11, comprising an oxide having a temperature of 10-6 / ° C or lower.   The soft magnetic material according to claim 12, wherein the eutectic system has eutectic particles having a particle size of 10 nm to 10 μm.   The intervening phase includes intermediate intervening particles having a softening point higher than that of the eutectic system and containing at least one element of the group consisting of O (oxygen), C (carbon), N (nitrogen), and F (fluorine). The soft magnetic material according to claim 12 or 13, further comprising: The soft magnetic material according to any one of claims 1 to 11, wherein the intervening phase includes a resin. The soft magnetic material according to any one of claims 1 to 11, wherein the intervening phase contains at least one magnetic metal selected from Fe, Co, and Ni. A flat magnetic metal particle containing at least one magnetic metal selected from Fe, Co, and Ni, having a thickness of 10 nm to 100 μm, an aspect ratio of 5 to 10,000, and a lattice strain of 0.01% 10% or less, the flat magnetic metal particles are oriented, and the flat magnetic metal particles have magnetic anisotropy in one direction within the oriented flat plane;
An intervening phase present between the flat magnetic metal particles and containing at least one of oxygen (O), carbon (C), nitrogen (N) and fluorine (F);
A magnetic layer containing
An intermediate layer provided in contact with the magnetic layer, containing any of oxygen (O), carbon (C), nitrogen (N), and fluorine (F), and having a magnetic permeability smaller than that of the magnetic layer; ,
Soft magnetic material comprising Rotating electric machine having a soft magnetic material according to any one of claims 1 to claim 17. Motor having a soft magnetic material according to any one of claims 1 to claim 17. Generator having a soft magnetic material according to any one of claims 1 to claim 17.