JP6569424B2 - Method for manufacturing liquid ejection device, and liquid ejection device - Google Patents

Description

  The present invention relates to a method for manufacturing a liquid ejection device, and a liquid ejection device.

  Patent Document 1 discloses an ink jet head that ejects ink from a nozzle as a liquid ejecting apparatus. This inkjet head has a nozzle plate made of synthetic resin in which nozzles are formed, a metal channel forming plate in which an ink channel communicating with the nozzles is formed, and a piezoelectric element provided on the channel forming plate. . The ink-jet head causes the ink to be ejected from the nozzles by applying pressure to the ink in the ink flow path of the flow path forming plate by the piezoelectric element.

  In the ink jet head disclosed in Patent Document 1, an ink repellent film for preventing ink droplets from adhering to the periphery of the ejection port is formed on the ink ejection surface of the nozzle plate where the ejection port of the nozzle is disposed. Has been. In addition, on the ink ejection surface of the nozzle plate, two long convex portions (ridges) that are arranged so as to sandwich the nozzle row and extend in the nozzle row direction are formed. This projection prevents the recording paper from colliding with the nozzle outlet even when the recording paper is lifted due to paper jam or the like, and damages the ink-repellent film around the edge of the outlet or the outlet. Is prevented.

  Said nozzle plate is manufactured in the following processes. First, a synthetic resin film such as polyimide is prepared as a synthetic resin substrate to be a nozzle plate. An ink repellent film is formed by applying an ink repellent material to one surface of the synthetic resin film and drying it by heating. Next, a nozzle is formed by laser processing on the synthetic resin film on which the ink repellent film is formed. Next, the synthetic resin film (nozzle plate) on which the nozzles are formed is joined to the flow path forming plate in which the flow path holes are formed. After joining, a mold is applied to the ink ejection surface of the nozzle plate on which the ink-repellent film is formed, and a hot press is performed to form convex portions on the ink ejection surface.

JP 2006-256165 A

  In Patent Document 1, a convex portion is formed on a nozzle plate made of synthetic resin by hot pressing, and the material of the convex portion is also synthetic resin. The convex part made of synthetic resin has low strength and inferior durability. Therefore, when the recording paper repeatedly hits the convex portion, the convex portion may be gradually scraped away. Further, when the recording paper collides with the convex portion with a large force, the convex portion may be lost.

  Therefore, the inventors of the present application have proposed a technique for forming a convex portion including a metal portion for the purpose of improving the strength and durability of the convex portion (for example, disclosed in Japanese Patent Application No. 2014-169458). First, a concave portion is formed in a metal plate by half etching, and this metal plate is laminated on a synthetic resin plate serving as a nozzle plate. Next, the laminated body is deformed by pressing the portion of the laminated body where the concave portions are formed, thereby forming convex portions.

  However, further investigations by the inventors of the present application have revealed that there is room for improvement in this method for forming a convex portion. In the above convex portion forming method, a concave portion is formed in advance by half-etching on a portion of the metal plate to be pressed. However, in the processing of the recess by half etching, the depth of the recess tends to vary due to factors such as variations in the etching rate. The variation in the depth of the recesses is a major factor that causes the height of the projections to vary when a punch is applied to the recesses, and there is a possibility that the projections with a sufficient height may not be formed.

  An object of the present invention is to suppress the height variation of the convex portion formed by pressing even when the concave portion to which the press processing is performed is formed by half etching and the concave portion has a variation in depth. .

  According to a first aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus, comprising: masking a partial region of a surface opposite to the first plate of a metal second plate laminated with a first plate on which a plurality of nozzles are formed. The first etching step of forming the concave portion and the first convex portion protruding from the bottom surface of the concave portion on the opposite side to the first plate by performing etching after applying By pressing the first convex portion of the second plate with a punch from the opposite side to the first plate, the discharge of the plurality of nozzles is applied to the stacked body of the first plate and the second plate. And a pressing step for forming a second protrusion protruding from the liquid discharge surface on which the outlet is disposed.

  In the present invention, a recess is formed by etching in a second metal plate that is laminated with the first plate in which the nozzle is formed. During this etching, not only the recesses but also the first protrusions protruding from the bottom surface of the recesses are simultaneously formed on the second plate. Next, a punch is applied to the first convex portion to perform pressing, thereby deforming the stacked body of the first plate and the second plate in the region where the concave portion is formed, and projecting from the liquid ejection surface. A 2nd convex part is formed.

  Here, in the pressing step, the punch is applied to the tip surface of the first convex portion, not the bottom surface of the concave portion. Therefore, the shape of the 2nd convex part formed in a laminated body is decided by the 1st convex part which a punch contact | abuts, and is not related to the depth of a recessed part. Therefore, even when the depth of the concave portion formed by etching varies, the height of the second convex portion can be suppressed.

  Even if the position where the punch is pressed is slightly shifted, the position of the top of the second protrusion protruding from the liquid discharge surface is determined by the position of the first protrusion as long as the punch hits the first protrusion. Here, in the first etching step, a mask is previously formed in a partial region of the second plate, and then the etching is performed to remove the periphery of the first convex portion. That is, the position of the first convex portion in the plate surface direction is determined by the mask, and the position of the first convex portion is not likely to vary greatly depending on the mask formation accuracy. Therefore, variation in the position of the top of the second convex portion can also be suppressed.

  In the method for manufacturing a liquid ejection device according to a second aspect of the present invention, in the first aspect of the invention, the area of the tip surface of the first convex portion is larger than the area of the contact surface of the punch with the first convex portion. It is characterized by being small.

  Since the area of the tip surface of the first convex portion is smaller than the area of the punch contact surface with the first convex portion, even if the position where the punch is pressed is slightly shifted, the punch hits the first convex portion. Touch. Therefore, the positional deviation of the top part of the second convex part accompanying the deviation of the pressing position of the punch can be more reliably suppressed.

  According to a third aspect of the present invention, there is provided the method for manufacturing a liquid ejection device according to the first or second aspect, wherein the second plate has a damper portion for attenuating the pressure fluctuation of the liquid after the pressing step. A lamination step of laminating the plate so that the damper portion overlaps the concave portion, and in the pressing step, the tip portion of the first convex portion is crushed by pressing with the punch, and the protruding length of the first convex portion It is characterized by reducing.

  In the present invention, a third plate having a damper portion is laminated on the second plate so that the damper portion overlaps the recess. That is, the space in the concave portion of the second plate is a space that allows deformation of the damper portion of the third plate. Here, in order to ensure the damping function of the pressure fluctuation of the damper portion, it is required that the first convex portion in the concave portion does not hinder the deformation of the damper portion. In this regard, in the present invention, in the pressing step for forming the second convex portion, the tip end portion of the first convex portion is crushed to reduce the protruding length (height). Thereby, a deformation | transformation of a damper part becomes difficult to be inhibited by the 1st convex part.

  According to a fourth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to the third aspect, wherein the diameter of the tip surface of the first convex portion is 100 μm or less.

  When the diameter of the first convex portion is 100 μm or less, the tip portion of the first convex portion is easily crushed during press working.

  According to a fifth aspect of the present invention, there is provided the method for manufacturing a liquid ejection apparatus according to the third or fourth aspect, wherein the first convex portion after press working is formed by crushing a tip portion of the first convex portion in the pressing step. The protrusion length is made 95% or less of the protrusion length before press working.

  By crushing the tip of the first convex portion by pressing and reducing the protruding length by 5% or more compared to before the pressing, deformation of the damper portion is not easily inhibited by the first convex portion.

  According to a sixth aspect of the present invention, there is provided the method for manufacturing a liquid ejection device according to any one of the first to fifth aspects, wherein the second plate is formed with a flow path hole penetrating the second plate by etching. After the etching step and the second etching step, a nozzle forming step for forming the plurality of nozzles communicating with the flow path holes in the first plate is provided.

  In the present invention, the second etching process is performed on the second plate to form flow passage holes that penetrate the plate. After that, the nozzle is formed on the first plate. Since the channel hole is formed on the second plate, the nozzle can be formed on the second plate by laser processing or the like using the channel hole. it can.

  According to a seventh aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus according to the sixth aspect, wherein the pressing step is performed after the nozzle forming step.

  In the present invention, after forming a plurality of nozzles on the first plate, the laminate is pressed to form the convex portions. That is, in order to form a plurality of nozzles on the flat first plate before pressing, each nozzle is formed so that the axis direction of the nozzles forms a desired angle with respect to the first plate. Can do.

  According to an eighth aspect of the present invention, in the sixth aspect of the invention, the nozzle forming step is performed after the pressing step.

  In the present invention, after pressing the laminated body, the nozzle is formed on the first plate. That is, since the plurality of nozzles are not yet formed on the first plate at the time of pressing, the shape and pitch of the nozzles do not change due to the expansion and contraction of the laminated body at the time of pressing. In addition, since the nozzle is not formed on the first plate at the time of pressing, there is no problem that even if the die is applied to the first plate, the nozzle-formed portion is pushed and the nozzle is deformed.

  According to a ninth aspect of the present invention, there is provided a method for manufacturing a liquid ejection apparatus, comprising: etching a metal plate on which a plurality of nozzles are formed, after masking a partial region on a surface opposite to the nozzle ejection port. Forming a concave portion and a third convex portion protruding from the bottom surface of the concave portion to the opposite side of the discharge port, and performing a pressing process by applying a punch to the third convex portion of the metal plate, And a pressing step of forming a fourth protrusion protruding from a liquid discharge surface on which the discharge ports of the plurality of nozzles are disposed on the metal plate.

  In the present invention, the plate on which the nozzle is formed is a metal plate, and is different from the first invention in that a concave portion and a third convex portion are formed on the metal plate. Thereafter, the third convex portion of the metal plate is punched and pressed to form the fourth convex portion protruding from the liquid discharge surface, which is the same as in the first invention. Therefore, also in the present invention, even when the depth variation of the concave portion occurs, the height variation of the fourth convex portion can be suppressed. Moreover, the dispersion | variation in the position of the top part of a 4th convex part can also be suppressed.

  According to a tenth aspect of the present invention, there is provided a liquid ejection apparatus having a laminate including a first plate on which a plurality of nozzles are formed and a metal second plate, and the second plate has a side opposite to the first plate. A plurality of nozzles are formed in a portion that overlaps with the concave portion of the multilayer body, and a concave portion formed on the surface of the laminated body and a first convex portion that protrudes from the bottom surface of the concave portion to the opposite side of the first plate. A second convex portion that protrudes from the liquid discharge surface on which is disposed is formed.

  In this invention, the recessed part and the 1st convex part are formed in the metal 2nd plate laminated | stacked with the 1st plate in which the some nozzle was formed. By pressing the first convex portion with a punch, it is possible to suppress variations in height and positional variations in the plate surface direction of the second convex portion formed in the laminate.

1 is a diagram illustrating a schematic configuration of an inkjet printer according to a first embodiment. It is a top view of an inkjet head. It is the A section enlarged view of FIG. FIG. 4 is a sectional view taken along line IV-IV in FIG. 3. It is a bottom view of an inkjet head. It is a figure which shows the etching process and laminated body formation process of the manufacturing process of an inkjet head. It is a figure which shows the process after laminated body formation of the manufacturing process of an inkjet head. It is a bottom view of the inkjet head of the modification of 1st Embodiment. It is a bottom view of the inkjet head of another modification. It is a figure which shows a press process and a nozzle formation process among the manufacturing processes of the inkjet head of another modification. It is sectional drawing of the inkjet head of 2nd Embodiment. It is a figure which shows the manufacturing process of the inkjet head of 2nd Embodiment.

[First Embodiment]
Next, a first embodiment of the present invention will be described. The present embodiment is an example in which the present invention is applied to an inkjet head as a liquid ejection apparatus. First, a schematic configuration of an ink jet printer provided with an ink jet head will be described. FIG. 1 is a schematic plan view of the ink jet printer of the present embodiment. In the following, the front side in FIG. 1 is defined as the upper side, and the other side of the page is defined as the lower side, and the explanation will be made using direction words “up” and “down” as appropriate. As shown in FIG. 1, the ink jet printer 1 includes a platen 2, a carriage 3, an ink jet head 4, a transport mechanism 5, a maintenance mechanism 6, and the like.

  On the upper surface of the platen 2, a recording sheet 100 as a recording medium is placed. The carriage 3 can reciprocate in the scanning direction along the two guide rails 10 and 11 in a region facing the platen 2. An endless belt 14 is connected to the carriage 3, and the endless belt 14 is driven by a carriage drive motor 15, whereby the carriage 3 moves in the scanning direction.

  The inkjet head 4 is attached to the carriage 3 and moves in the scanning direction together with the carriage 3. A plurality of nozzles 44 are formed on the lower surface of the inkjet head 4 that is the surface on the opposite side of the paper surface of FIG. As shown in FIG. 1, a holder 9 is provided in the housing 7 of the printer 1. The holder 9 is loaded with four ink cartridges 17 each storing four color inks (black, yellow, cyan, magenta). The inkjet head 4 mounted on the carriage 3 and the holder 9 are connected by a tube (not shown). The four colors of ink stored in the four ink cartridges 17 are supplied to the inkjet head 4 through the tubes. The inkjet head 4 ejects four colors of ink onto the recording paper 100 placed on the platen 2 from a plurality of nozzles 44 on the lower surface while moving in the scanning direction together with the carriage 3.

  The transport mechanism 5 includes two transport rollers 18 and 19 disposed so as to sandwich the platen 2 in the transport direction. The transport mechanism 5 transports the recording paper 100 placed on the platen 2 in the transport direction by two transport rollers 18 and 19.

  The operation of ejecting ink from the plurality of nozzles 44 while the inkjet head 4 moves in the scanning direction and the operation of the two transport rollers 18 and 19 transporting the recording paper 100 by a predetermined amount in the transport direction are alternately repeated. As a result, images, characters, and the like are recorded on the recording paper 100.

  The maintenance mechanism 6 is disposed at a position on the right side of the platen 2 in the movement range of the carriage 3 in the scanning direction. The maintenance mechanism 6 includes a cap 20, a suction pump 21 connected to the cap 20, a wiper 22 and the like.

  The cap 20 is movable in the vertical direction (the direction perpendicular to the paper surface of FIG. 1). The cap 20 moves upward when the carriage 3 is located at a position facing the cap 20, thereby closely contacting the lower surface of the inkjet head 4 and covering the plurality of nozzles 44. In this state, the inside of the cap 20 is depressurized by the suction pump 21, thereby performing a suction purge that forcibly discharges ink from the plurality of nozzles 44. At this time, the dust and bubbles in the ink jet head 4 or the ink thickened by drying is discharged from the plurality of nozzles 44, so that the ejection failure of the nozzles 44 due to the dust and bubbles and the like is eliminated.

  The wiper 22 is a thin plate member made of an elastic material such as a rubber material, and is erected at a position adjacent to the cap 20 in the scanning direction. In the state after the above-described suction purge is performed, ink adheres to the lower surface of the inkjet head 4. Therefore, after the suction purge, the carriage 3 is moved in the scanning direction while the cap 20 is separated from the lower surface of the inkjet head 4. At this time, the wiper 22 moves relative to the inkjet head 4 in a state where the wiper 22 is in contact with the lower surface of the inkjet head 4, and wipes ink adhering to the lower surface of the inkjet head 4.

  Next, the inkjet head 4 will be described. FIG. 2 is a top view of the inkjet head 4. FIG. 3 is an enlarged view of a portion A in FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. FIG. 5 is a bottom view of the inkjet head 4. As shown in FIGS. 2 to 4, the inkjet head 4 includes a flow path unit 23 and a piezoelectric actuator 24. FIG. 4 shows a state where the ink flow path formed in the flow path unit 23 is filled with ink (indicated by symbol I).

(Flow path unit)
As shown in FIG. 4, the flow path unit 23 has a structure in which a plurality of plates 31 to 39 are stacked. The plurality of plates 31 to 39 are joined to each other by an adhesive in a stacked state. Of the plurality of plates 31 to 39, the lowermost plate 39 is a nozzle plate in which a plurality of nozzles 44 are formed. The nozzle plate 39 is a plate made of a synthetic resin such as polyimide. The nozzle plate 39 is formed with a plurality of tapered taper nozzles 44 penetrating the plate 39 in the thickness direction. In the following description, the lower surface of the nozzle plate 39 in which the ejection ports 44a of the plurality of nozzles 44 are formed may be particularly referred to as an ink ejection surface 39a.

  The plurality of nozzles 44 are arranged in the transport direction and constitute four nozzle rows 48 arranged in the scanning direction. The four nozzle rows 48 eject inks of four colors (black, yellow, cyan, magenta), respectively. In the following description, among the components of the inkjet head, those corresponding to the black (K), yellow (Y), cyan (C), and magenta (M) inks are indicated by the reference numerals indicating the components. After that, in order to identify which ink corresponds to, any symbol of “k” indicating black, “y” indicating yellow, “c” indicating cyan, and “m” indicating magenta is appropriately attached. . For example, the nozzle row 48k indicates the nozzle row 48 that discharges black ink.

  The ink discharge surface 39a of the nozzle plate 39 is covered with a liquid repellent film 40 formed of a fluorine resin such as PTFE. The liquid repellent film 40 covers the area around the ejection port 44a of the nozzle 44 on the ink ejection surface 39a, thereby preventing ink ejected from the nozzle 44 from remaining around the ejection port 44a. In FIG. 4, the liquid repellent film 40 is formed over the entire lower surface of the nozzle plate 39, but the liquid repellent film 40 is formed so as to cover only the area around the ejection port 44 a of the ink ejection surface 39 a. May be.

  The plates 31 to 38 other than the nozzle plate 39 constituting the flow path unit 23 are plates made of a metal material such as stainless steel. In these metal plates 31 to 38, ink flow paths including a manifold 46 and a pressure chamber 47 described below that communicate with the plurality of nozzles 44 are formed. Hereinafter, details of the plurality of metal plates 31 to 38 and the ink flow paths formed in these metal plates 31 to 38 will be described below.

  As shown in FIG. 2, four ink supply holes 45 are formed side by side in the scanning direction in the uppermost plate 31 constituting the upper surface of the flow path unit 23. The four ink supply holes 45 (45k, 45y, 45c, 45m) are supplied with four colors (black, yellow, cyan, magenta) of ink from the four ink cartridges 17 (see FIG. 1) of the holder 9, respectively. . Also, four manifolds 46 (46k, 46y, 46c, 46m) extending in the transport direction are formed on the fourth to seventh plates 34 to 37 from the top. One manifold 46 is formed over four plates 34 to 37 that are stacked one above the other. The four ink supply holes 45 and the four manifolds 46 are connected by communication holes (not shown) formed in the plates 32 and 33, respectively.

  As shown in FIG. 4, of the four plates 34 to 37 forming the manifold 46, a portion of the lowermost plate 37 that covers the manifold 46 from the lower side is subjected to 4 by half etching. Four recesses 37 a extending along the manifold 46 are formed. Thereby, the thickness of the bottom wall part of the recessed part 37a is thin compared with the other part. Hereinafter, the bottom wall part of the recessed part 37a which became thin is called the "damper part 37b."

  A recess 38a is formed by half-etching in a region facing the damper portion 37b on the upper surface of the plate 38 located immediately below the plate 37. That is, a space 41 exists between the damper portion 37b formed on the plate 37 and the bottom surface of the concave portion 38a of the plate 38 below it. With this configuration, the damper portion 37b can be easily deformed according to the pressure fluctuation in the manifold 46. When the pressure in the manifold 46 fluctuates, the pressure fluctuation in the manifold 46 due to the deformation of the damper portion 37b. Is attenuated.

  As shown in FIG. 4, the portion of the plate 38 in which the concave portion 38 a is formed is deformed so as to protrude downward, and constitutes a part of a second convex portion 50 described later. Further, in the concave portion 38a of the plate 38, there is a first convex portion 38b protruding upward from the bottom surface of the concave portion 38a. As will be described later, the recess 38a is for forming the second protrusion 50 by press working.

  In addition, depending on the height of the 1st convex part 38b, when the damper part 37b deform | transforms, there exists a possibility that the function which attenuates the pressure fluctuation of the damper part 37b may contact the 1st convex part 38b. Therefore, it is preferable that a gap larger than the maximum displacement amount of the damper portion 37b exists between the first convex portion 38b and the damper portion 37b. For example, when the displacement amount of the damper portion 37b is 2 to 3 μm, it is preferable that a gap of 3 μm or more is secured between the tip of the first convex portion 38b and the damper portion 37b.

  A plurality of pressure chambers 47 respectively corresponding to the plurality of nozzles 44 are formed in the uppermost plate 31. The plurality of pressure chambers 47 are arranged in four rows corresponding to the four manifolds 46, similarly to the plurality of nozzles 44. The plurality of pressure chambers 47 are covered with the diaphragm 60 of the piezoelectric actuator 24. As shown in FIGS. 3 and 4, each pressure chamber 47 has a shape that is long in the scanning direction. The pressure chamber 47 is arranged so that one end portion thereof overlaps with the corresponding nozzle 44 and the other end portion thereof overlaps with the manifold 46 when viewed from above. As shown in FIG. 2, among the four pressure chambers 47, the pressure chamber 47 corresponding to the black ink is arranged on the right side with respect to the corresponding manifold 46k. The row of pressure chambers 47 corresponding to the three colors of ink is arranged on the left side with respect to the manifold 46.

  As shown in FIGS. 3 and 4, the plate 32 positioned second from the top is formed with a plurality of throttle channels 49 that connect the manifold 46 and the plurality of pressure chambers 47. In addition, a total of seven plates 32 to 38 positioned between the uppermost plate 31 and the nozzle plate 39 have a flow path hole 32 c that constitutes a communication flow path 43 that connects the pressure chamber 47 and the nozzle 44. To 38c are formed.

  The flow path unit 23 is configured by joining the plates 31 to 39 described above in a stacked state. In the flow path unit 23, a plurality of individual flow paths that branch from one manifold 46 and reach the nozzle 44 through the throttle flow path 49, the pressure chamber 47, and the communication flow path 43 are formed. .

  By the way, when the recording paper 100 is jammed or when the recording paper 100 is conveyed in a bent state, the recording paper 100 may come into contact with the ink ejection surface 39a of the inkjet head 4. . At this time, the edge of the ejection port 44a and the peripheral region of the ejection port 44a of the ink ejection surface 39a may be damaged, resulting in problems such as ejection bending. In particular, in the configuration in which the ink discharge surface 39a is covered with the liquid repellent film 40 as in the present embodiment, the liquid repellent film 40 around the discharge port 44a is scratched and the water repellency is lowered, thereby causing the discharge. Ink tends to remain around the outlet 44a, and ejection failure may occur. Therefore, as shown in FIGS. 3 to 5, a plurality of second convex portions for preventing the recording paper 100 from coming into contact with the periphery of the ejection port 44 a are disposed on the ink ejection surface 39 a of the flow path unit 23. 50 is formed.

  As shown in FIG. 3 to FIG. 5, a plurality of second convex portions 50 are arranged along the transport direction in the region where each of the four manifolds 46 overlaps the ink ejection surface 39 a, and four rows of convex portions are arranged. A column 51 is configured. As described above, the nozzle plate 39 includes four nozzle rows 48 (48k, 48y, 48c, and 48m) that respectively eject black, yellow, cyan, and magenta inks in the scanning direction. Has been placed. In addition, as shown in FIG. 5, the four convex portion rows 51 (51 a to 51 d) are arranged side by side with the four nozzle rows 48 in the scanning direction.

  Two convex rows 51a and 51d are respectively arranged on both outer sides of the four nozzle rows 48 in the scanning direction so as to sandwich the four nozzle rows 48 in the scanning direction. Further, a convex column 51b is arranged between the yellow nozzle column 48y and the cyan nozzle column 48c. Further, the convex row 51c is also arranged between the cyan nozzle row 48c and the magenta nozzle row 48m. Thus, the black nozzle row 48k and the yellow nozzle row 48y are sandwiched between the two convex portion rows 51a and 51b in the scanning direction. The cyan nozzle row 48c is sandwiched between the two convex portion rows 51b and 51c. Further, the magenta nozzle row 48m is also sandwiched between the two convex rows 51c and 51d.

  As described above, the plurality of second convex portions 50 are arranged side by side with the plurality of nozzles 44 in the scanning direction along the arrangement direction (conveyance direction) of the nozzles 44. Furthermore, each nozzle row 48 is sandwiched between two rows of convex portions 51 that are respectively arranged at close positions in the scanning direction. For this reason, it is difficult for the recording paper 100 to contact the area around each nozzle 44 regardless of whether the carriage 3 moves leftward or rightward. Accordingly, the peripheral portion of the ink discharge surface 39a around the discharge port 44a of each nozzle 44 is surely protected by the second convex portion 50 located in the vicinity thereof, and the liquid repellent film 40 is prevented from being damaged. The

  Details of the configuration of the second convex portion 50 will be described. As shown in FIGS. 3 and 5, each second protrusion 50 has a circular planar shape. Moreover, as shown in FIG. 4, the top part of the 2nd convex part 50 is formed in the rounded shape. Therefore, even if the recording paper 100 collides with the second convex portion 50, the recording paper 100 is hardly damaged. Further, when wiping the ink adhering to the ink ejection surface 39a with the wiper 22, the wiper 22 is not easily caught on the second convex portion 50, and the wiper 22 can easily get over the second convex portion 50.

  As can be seen from FIG. 4, each second convex portion 50 is formed by deforming the laminated body 52 so as to protrude downward in a state where the nozzle plate 39 and the plate 38 thereon are laminated. Has been. Further, as will be described in detail later, each of the second protrusions 50 is performed by pressing the laminated body 52 from the plate 38 side. In addition, the second convex portion 50 is formed by subjecting the portion a of the plate 38 where the concave portion 38a is formed to press working.

  In order to reliably prevent the recording paper 100 from coming into contact with the area around the nozzle 44 on the ink ejection surface 39a, the height h of the second convex portion 50, that is, the amount of protrusion from the ink ejection surface 39a is It is preferable that it is large to some extent. For example, the height h of the second convex portion 50 is preferably about 10 to 30 μm.

  As described above, since the second convex portion 50 is formed by integrally deforming the nozzle plate 39 made of synthetic resin and the metal plate 38, the second convex portion 50 includes the metal portion 50a, The resin portion 50b covers the metal portion 50a. Since the metal part 50a exists in the inside of the 2nd convex part 50, the intensity | strength of the 2nd convex part 50 becomes high and it is excellent also in durability. For this reason, even if the recording paper 100 collides with the second convex portion 50, the second convex portion 50 is unlikely to be removed or chipped.

(Piezoelectric actuator)
As shown in FIGS. 2 to 4, the piezoelectric actuator 24 includes a diaphragm 60, piezoelectric layers 64 and 65, a plurality of individual electrodes 62, and a common electrode 66. The diaphragm 60 is joined to the upper surface of the flow path unit 23 in a state of covering the plurality of pressure chambers 47. The two piezoelectric layers 64 and 65 are laminated on the upper surface of the vibration plate 60. The plurality of individual electrodes 62 are arranged on the upper surface of the upper piezoelectric layer 65 so as to face the plurality of pressure chambers 47, respectively. The common electrode 66 is disposed across the plurality of pressure chambers 47 between the two piezoelectric layers 64 and 65.

  The plurality of individual electrodes 62 are respectively connected to a driver IC 67 that drives the piezoelectric actuator 24. On the other hand, the common electrode 66 is always held at the ground potential. The portions of the upper piezoelectric layer 65 sandwiched between the individual electrode 62 and the common electrode 66 are each polarized in the thickness direction.

  The operation of the piezoelectric actuator 24 when ejecting ink from the nozzle 44 is as follows. When a drive signal is applied to a certain individual electrode 62 from the driver IC 67, a potential difference is generated between the individual electrode 62 and the common electrode 66 held at the ground potential. As a result, an electric field in the thickness direction is generated in a portion of the piezoelectric layer 65 sandwiched between the individual electrode 62 and the common electrode 66. Further, since the polarization direction of the piezoelectric layer 65 and the direction of the electric field coincide with each other, the piezoelectric layer 65 extends in the thickness direction that is the polarization direction and contracts in the surface direction. As the piezoelectric layer 65 contracts and deforms, the portion of the diaphragm 60 facing the pressure chamber 47 is bent so as to protrude toward the pressure chamber 47. At this time, the volume of the pressure chamber 47 is reduced, pressure is applied to the ink inside the pressure chamber 47, and ink droplets are ejected from the nozzle 44 communicating with the pressure chamber 47.

  Next, the manufacturing method of the inkjet head 4 described above will be described focusing on the manufacturing process of the flow path unit 23. FIG. 6 is a diagram showing an etching process and a laminate forming process in the manufacturing process of the inkjet head. FIG. 7 is a diagram showing a process after forming the laminate in the manufacturing process of the inkjet head.

(Etching process)
(1) Formation of flow path hole by full etching First, a plurality of metal plates 31 to 38 constituting the flow path unit 23 shown in FIG. Each of the channel holes 32c to 38c constituting the channel 43 is formed as a part of the ink channel. Specifically, a predetermined mask pattern is formed on the surfaces of the plates 31 to 38, and then full etching is performed to form through-flow passage holes in the plates 31 to 38. In particular, as shown in FIG. 6A, the plate 38 is formed with a flow path hole 38 c that penetrates the plate 38.

(2) Formation of recesses by half etching Next, recesses 37 a are formed on the upper surface of the plate 37 by half etching. Further, a recess 38a is also formed on the upper surface of the plate 38 by half etching. Specifically, as shown in FIG. 6B, a mask pattern 68 having an opening 68 a is formed on the upper surface of the plate 38. The mask pattern 68 has an island portion 68b that is independent from the surroundings at the center of the opening 68a. After the mask pattern 68 is formed, half etching is performed from the upper surface side of the plate 38 to form a recess 38 a in a region exposed from the opening 68 a of the mask pattern 68. At this time, as shown in FIG. 6C, the region covered by the island 68b in the opening 68a of the mask pattern 68 is not etched, and this portion protrudes upward from the bottom surface of the recess 38a. One convex portion 38b is formed.

  In FIG. 6, the flow path hole 38 c is formed by full etching on the plate 38 and then the recess 38 a is formed by half etching. The order of formation of 38a may be reversed.

(Laminate formation process)
On the other hand, the liquid-repellent film 40 is formed on one surface of the synthetic resin plate 70 to be the nozzle plate 39. After the formation of the liquid repellent film 40, as shown in FIG. 6D, the synthetic resin plate 70 and the metal plate 38 in which the flow path holes 38c and the recesses 38a are formed are laminated, and both are bonded with an adhesive. .

(Protective film application process)
Next, as shown in FIG. 7A, a protective film 71 made of a synthetic resin film is attached to the surface of the synthetic resin plate 70 on which the liquid repellent film 40 is formed. The protective film 71 is bonded to the synthetic resin plate 70 using, for example, a UV peelable adhesive.

(Nozzle formation process)
Next, as shown in FIG. 7B, laser processing is performed on the synthetic resin plate 70 of the laminate 52 to form a plurality of nozzles 44. More specifically, a laser beam is irradiated from a laser irradiation device (not shown) to the layered body 52 on a portion where the flow path hole 38c of the plate 38 is formed. The irradiated laser light passes through the passage hole 38 c and penetrates the synthetic resin plate 70. As a result, the nozzle 44 is formed in a portion overlapping the flow path hole 38 c of the synthetic resin plate 70. Note that the lower surface of the synthetic resin plate 70 that becomes the ink ejection surface 39a is covered with the protective film 71, so that soot generated when the nozzles 44 are formed may adhere to the liquid repellent film 40 on the ink ejection surface 39a. Is prevented.

(Pressing process)
Next, as shown in FIG.7 (c), the laminated body 52 is pressed and the several 2nd convex part 50 is formed. First, the laminated body 52 covered with the protective film 71 is placed on the die 72 having a plurality of holes 72a. Here, the laminated body 52 is installed so that the concave portions 38 a of the metal plate 38 overlap with the plurality of holes 72 a of the die 72.

  Next, pressing is performed by pressing the punch 73 against the laminated body 52 from the plate 38 side. The punch 73 has a cylindrical shape, and the tip end surface thereof is a flat surface. With the surface 73a of the flat punch 73 in contact with the tip surface of the first convex portion 38b formed on the plate 38, the punch 73 is pushed downward. When the first convex portion 38b is pushed out by the punch 73, plastic deformation occurs at the bottom of the concave portion 38a, and a plurality of second convex portions 50 that protrude from the ink discharge surface 39a of the nozzle plate 39 are formed in the stacked body 52. Is done. During the press working, the ink discharge surface 39a of the nozzle plate 39 is covered with the protective film 71 and is not in contact with the die 72, so that the liquid repellent film 40 formed on the nozzle plate 39 is damaged. Is prevented.

  In the present embodiment, the concave portion 38a is formed on the upper surface of the metal plate 38, and then the second convex portion 50 is formed by pressing the region where the concave portion 38a is formed. In this case, first, since the bottom of the recess 38a is a thin portion, it is easily deformed during press working. Further, the deformation that occurs in the press work is likely to be contained in a thin region in the recess 38a. That is, the range in which the deformation spreads is limited, and it is difficult to spread to the flow path hole 38c in the thick area outside the recess 38a, so that the influence on the flow path hole 38c can be reduced.

  The plate recess 38a also has a purpose of forming a gap 41 with the plate 37 forming the damper portion 37b of the manifold 46 so that the damper portion 37b can be deformed. That is, in this embodiment, the concave portion 38a is formed in the plate 38 for the two purposes of forming the second convex portion 50 by press working and securing the space for making the damper portion 37b of the manifold 46 deformable. Is formed.

  In the present embodiment, the punch 73 is not applied to the bottom surface of the recess 38a but to the tip surface of the first protrusion 38b. Therefore, the shape of the second convex portion 50 is determined by the first convex portion 38b with which the punch 73 abuts, and is not related to the depth of the concave portion 38a. Therefore, even when the depth of the concave portion formed by etching varies, the height of the second convex portion 50 can be suppressed. In particular, as shown in FIG. 7C, when the area of the tip surface of the first convex portion 38b is smaller than the area of the contact surface 73a of the punch 73 with the first convex portion 38b, Even if the position where 73 is pressed is slightly shifted, the punch 73 contacts the first convex portion 38b. Therefore, the position shift of the top part of the 2nd convex part 50 accompanying the shift of the pressing position of punch 73 is controlled more certainly.

  Even if the position to which the punch 73 is pressed is slightly shifted, as long as the punch 73 is in contact with the first protrusion 38b, the position of the top of the second protrusion 50 protruding from the ink discharge surface 39a is the first protrusion 38b. Determined by the position of Here, as described above, the mask pattern 68 is formed on the plate 38 and then half etching is performed to remove the periphery of the first convex portion 38b. That is, the formation position of the first protrusions 38b in the plate surface direction is determined by the mask pattern 68, and the position of the first protrusions is not likely to vary greatly depending on the formation accuracy of the mask pattern 68. Therefore, variation in the position of the top of the second convex portion 50 is also suppressed.

  In the subsequent laminating step, another plate 37 is laminated on the upper surface of the plate 38 so that the damper portion 37b overlaps the concave portion 38a. That is, the space in the recess 38 a of the plate 38 is a space that allows deformation of the damper portion 37 b of the plate 37. Here, after the press working, the position of the first convex portion 38b itself changes downward, so that the damper portion 37b and the tip of the first convex portion 38b are difficult to come into contact with each other, but the displacement amount of the damper portion 37b Depending on the case, contact may occur.

  Therefore, from the viewpoint of ensuring the damping function of the pressure variation of the damper portion 37b, it is preferable to crush the tip portion of the first convex portion 38b in the pressing process to reduce the protruding length, that is, the convex portion height. . Thereby, the deformation of the damper portion 37b is not easily inhibited by the first convex portion 38b.

  The extent to which the tip of the first convex portion 38b is crushed depends on how much the damper portion 37b is displaced up and down, but the protrusion length h2 of the first convex portion 38b after the press working is determined before the press working. It is good to make it 95% or less of the protrusion length h1. For example, when the thickness of the plate 38 is 100 μm, the case where the recess 38 a having a depth of 70 μm is formed in the etching process of FIGS. 6B and 6C will be considered. That is, the protrusion length h1 of the first convex portion 38b from the bottom surface of the concave portion 38a is 70 μm. At this time, if the tip of the first convex portion 38b is crushed by 5% by pressing, the protruding length of the first convex portion 38b is reduced by 3.5 μm, and the protruding length h2 of the first convex portion 38b is 66.5 μm. Become. When the amount of displacement of the damper part 37b is 2 to 3 μm, the damper part 37b does not come into contact with the first convex part 38b, and deformation of the damper part 37b is more reliably prevented.

  Further, in order to facilitate the crushing of the front end portion of the first convex portion 38b during pressing, it is preferable to reduce the area of the front end surface of the first convex portion 38b. For example, the diameter of the tip surface of the columnar first convex portion 38b is preferably 100 μm or less.

  In the present embodiment, the plurality of nozzles 44 are formed on the plate, and then the laminated body 52 is pressed to form the second convex portion 50. Here, when the laminated body 52 is pressed, the laminated body 52 may be warped. When the nozzle 44 is formed in a state where the synthetic resin plate 70 is warped, the axial direction of the nozzle 44 is inclined with respect to a predetermined direction that should be originally, for example, a direction orthogonal to the surface direction of the plate 39. As a result, the ink discharged from the nozzles 44 is discharged in a direction slightly inclined with respect to the original discharge direction, which causes discharge bending. In this regard, when the nozzles 44 are formed prior to the pressing process as in the present embodiment, the plurality of nozzles 44 are formed on the flat plate 70 before the pressing process. However, each nozzle 44 can be formed so as to form a desired angle with respect to the surface direction of the plate 70.

  Note that the laminated body 52 may be warped by press working after the nozzle 44 is formed. However, when the laminate 52 is joined to the other plates 31 to 37 in the subsequent joining step (see FIG. 7E), the heater plate 75 is pressed to warp the laminate 52. Is corrected. Therefore, finally, the inclination of the nozzle 44 in the axial direction due to the warp of the stacked body 52 does not occur.

(Protective film removal process)
After the second convex portion 50 is formed on the laminate by pressing, the protective film 71 is peeled from the synthetic resin plate 70 (nozzle plate 39) as shown in FIG. 7D. In addition, when the protective film 71 is bonded to the nozzle plate 39 with a UV peelable adhesive, the protective film 71 can be easily peeled off by irradiating UV. In addition, depending on the type of the protective film 71, the protective film 71 can be dissolved and removed with an appropriate solvent.

(Lamination process)
Next, the laminated body 52 in which the plurality of second convex portions 50 and the plurality of nozzles 44 are formed, the other plates 31 to 37 constituting the flow path unit 23, and the diaphragm 60 of the piezoelectric actuator 24 are laminated. And join.

  Specifically, as shown in FIG. 7E, the thermosetting adhesive is applied to each bonding surface of the laminate 52, the metal plates 31 to 37, and the vibration plate 60 and then laminated. Here, with respect to the plate 37, the damper portion 37b is overlaid on the plate 38 so as to cover the concave portion 38a. And each adhesion | attachment is performed by pressing while heating from the upper and lower sides by the heater plates 74 and 75. As shown in FIG. 7 (e), the lower heater plate 75 has a concave or concave shape to prevent the second convex portion 50 of the laminated body 52 and the nozzle 44 of the nozzle plate 39 from being crushed. Hole-shaped escape portions 75a and 75b are formed. After the laminating step, the piezoelectric layers 64 and 65 manufactured in a separate step are pasted on the vibration plate 60 to form the piezoelectric actuator 24.

  In the first embodiment described above, the inkjet head 4 corresponds to the “liquid ejecting apparatus” of the invention. The ink discharge surface 39a on the lower surface of the nozzle plate 39 corresponds to the “liquid discharge surface” of the present invention. The synthetic resin plate 70 serving as the nozzle plate 39 corresponds to the “first plate” of the present invention. The metal plate 38 corresponds to the “second plate” of the present invention. The plate 37 on which the damper portion 37b is formed corresponds to the “third plate” of the present invention. The etching process for forming the recesses 38a and the first protrusions 38b in FIGS. 6B and 6C corresponds to the “first etching process” of the present invention. The etching process for forming the flow path hole 38c in FIG. 6A corresponds to the “second etching process” of the present invention.

  Next, modified embodiments in which various modifications are made to the first embodiment will be described. However, components having the same configuration as in the above embodiment are given the same reference numerals and description thereof is omitted as appropriate.

1] The shape of the second convex portion 50 is not limited to the configuration of the above-described embodiment, and various shapes of the second convex portion 50 can be formed by changing the tip portion of the punch 73 or the shape of the die 72. Is possible. For example, as shown in FIG. 8, the planar shape of the second protrusion 50A may be an ellipse that is long in the transport direction. Moreover, as shown in FIG. 9, the 2nd convex part 50B may extend long in a conveyance direction.

  Further, the arrangement direction or the extending direction of the second protrusions is not limited to the scanning direction. For example, a plurality of second convex portions may be arranged side by side in the scanning direction. Alternatively, the second convex portion may extend long in the scanning direction.

2] In the above-described embodiment, a plurality of nozzles 44 are formed by laser processing on the synthetic resin plate 70, and then a plurality of second convex portions 50 are formed by pressing the laminate 52 (FIG. 7 ( b) and (c)). On the other hand, the order of the nozzle forming step and the pressing step is reversed, and the second protrusion 50 is formed on the laminate 52 by the pressing step as shown in FIG. 10A, and then as shown in FIG. Alternatively, a plurality of nozzles 44 may be formed on the synthetic resin plate 70.

  In this case, since the nozzles 44 are not yet formed on the plate 70 at the time of the pressing process of FIG. 10A, the shape and pitch of the nozzles 44 change due to the expansion and contraction of the laminate 52 that occurs at the time of the pressing process. There is nothing. Further, since the nozzles 44 are not formed on the plate 70 at the time of pressing, there is no problem that the nozzles 44 are deformed even if the die 72 is applied to the plate 70.

3] In the above embodiment, the plate 37 having the damper portion 37b is laminated on the upper surface of the plate 38 in which the concave portion 38a is formed. However, the configuration is not limited thereto. That is, the plate joined to the upper surface of the plate 38 may not have a deformed portion such as a damper portion.

4] The inkjet head 4 of the above embodiment is a so-called serial type head that ejects ink while moving with respect to the recording paper 100 together with the carriage 3, but the application target of the present invention is the serial type as described above. It is not limited to the head. For example, the present invention can also be applied to a so-called line-type head that is fixedly installed in the printer body and has a plurality of nozzles arranged in the width direction of the recording paper 100.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. FIG. 11 is a cross-sectional view of the inkjet head 104 of the second embodiment. In the first embodiment, the nozzle plate 39 and the metal plate 38 are laminated, and the recess 38 a is formed in the metal plate 38. On the other hand, the inkjet head 104 of the second embodiment differs from the first embodiment in that the nozzle plate 139 itself is made of metal and a recess 139a is formed on the upper surface of the nozzle plate 139. In the following description, components having the same configurations as those of the first embodiment are denoted by the same reference numerals as those of the first embodiment, and description thereof is omitted as appropriate.

  The flow path unit 123 of the inkjet head 104 according to the second embodiment has a structure in which a metal nozzle plate 139 and metal plates 31 to 37 positioned above the nozzle plate 139 are stacked. A concave portion 139a is formed in a portion of the upper surface of the nozzle plate 139 that overlaps the manifold 46 in the vertical direction. Further, a damper portion 37b is formed on the plate 37 on the nozzle plate 139. The plate 37 is laminated on the nozzle plate 139 so that the damper portion 37b covers the recess 139a.

  The portion of the nozzle plate 139 where the concave portion 139a is formed is deformed so as to protrude downward by press working, and a fourth convex portion 150 protruding from the ink discharge surface 139c is formed. Similar to the first embodiment, for the above press work, a third convex portion 139b protruding upward from the bottom surface of the concave portion 139a is provided in the concave portion 139a.

  Next, the manufacturing process of the inkjet head 104 of 2nd Embodiment is demonstrated with reference to FIG. First, holes and the like to be the pressure chambers 47 and the manifold 46 are formed by etching in the metal plates 31 to 37 of the flow path unit 123 shown in FIG. Further, as shown in FIG. 12A, a mask pattern is formed in a partial region of the upper surface of the metal plate 110 that becomes the nozzle plate 139, and then a recess 139a is formed by half etching. Further, when forming the concave portion 139a, the third convex portion 139b is formed so as to leave a part of the concave portion 139a.

  Next, as shown in FIG. 12B, a plurality of nozzles 144 are formed on the metal plate 110. Examples of the method for forming the nozzle 144 on the metal plate 110 include drilling by a press, laser processing, and the like. FIG.12 (b) has shown the case of the drilling by a press. First, the metal plate 110 is placed on the die 111 having a plurality of punched holes 111a. Next, a plurality of nozzles 144 are formed by pressing the punch 112 against the portion of the upper surface of the metal plate 110 that covers the punched hole 111 a and penetrating the metal plate 110. When the nozzles 144 are formed by pressing, burrs are generated around the discharge ports 144a on the ink discharge surface 139c on the lower surface of the nozzle plate 139. In order to remove the burrs, the lower surface of the nozzle plate 139 is removed. Polishing.

  Next, as shown in FIG. 12C, a liquid repellent film 140 is formed on the ink discharge surface 139c of the nozzle plate 139 in which the discharge ports 144a of the plurality of nozzles 144 are formed. Further, as shown in FIG. 12D, a protective film 113 made of a synthetic resin film for protecting the liquid repellent film 140 is attached to the ink ejection surface 139c of the nozzle plate 139.

  Next, as shown in FIG. 12E, a nozzle plate 139 whose lower surface is covered with a protective film 113 is placed on a die 114 having a plurality of holes 114a. Then, the punch 115 is pressed against the third convex portion 139b in the concave portion 139a of the nozzle plate 139, and the fourth convex portion 150 is formed on the nozzle plate 139. As described above, by performing the pressing by applying the punch 115 to the third convex portion 139b, variation in the height and position of the fourth convex portion 150 can be suppressed as in the first embodiment.

  When the fourth convex portion 150 is formed by press working, the protective film 113 is peeled from the nozzle plate 39 as shown in FIG. Thereafter, as shown in FIG. 12G, the nozzle plate 139, the other plates 31 to 38, and the vibration plate 60 of the piezoelectric actuator 24 are stacked, and thermosetting while heating using the heater plates 115 and 116. Join with adhesive.

  In the embodiment described above, the present invention is applied to an ink jet head that prints an image or the like by ejecting ink onto a recording sheet. However, the liquid ejecting apparatus is used for various purposes other than printing an image or the like. The present invention can also be applied. For example, the present invention can also be applied to a liquid ejection apparatus that ejects a conductive liquid onto a substrate to form a conductive pattern on the surface of the substrate.

DESCRIPTION OF SYMBOLS 1 Inkjet printer 4 Inkjet head 37 Plate 37b Damper part 38 Plate 38a Concave part 38b 1st convex part 38c Channel hole 39 Nozzle plate 39a Ink discharge surface 44 Nozzle 44a Discharge port 50, 50A, 50B 2nd convex part 52 Laminate 68 Mask Pattern 70 Synthetic resin plate 73 Punch 104 Inkjet head 110 Metal plate 112 Punch 139c Ink ejection surface 139 Nozzle plate 139a Concavity 139b Third convex portion 144 Nozzle 144a Ink ejection port 150 Fourth convex portion

Claims (10)

The second plate made of metal laminated with the first plate on which a plurality of nozzles are formed is masked on a partial region on the surface opposite to the first plate, and then etched, whereby the second Forming a concave portion on the plate and a first convex portion projecting from the bottom surface of the concave portion to the opposite side of the first plate; and
The plurality of nozzles are formed on the stack of the first plate and the second plate by pressing the first convex portion of the second plate with a punch from the opposite side of the first plate. Forming a second protrusion protruding from the liquid discharge surface where the discharge port is disposed;
A method for manufacturing a liquid ejection apparatus, comprising:   2. The method of manufacturing a liquid ejection apparatus according to claim 1, wherein an area of a front end surface of the first convex portion is smaller than an area of a contact surface of the punch with the first convex portion. After the pressing step, the second plate comprises a laminating step of laminating a third plate having a damper portion for attenuating liquid pressure fluctuations so that the damper portion overlaps the recess,
3. The liquid ejecting apparatus according to claim 1, wherein, in the pressing step, a tip end portion of the first convex portion is crushed by press processing using the punch, and a protruding length of the first convex portion is reduced. 4. Production method.   The method of manufacturing a liquid ejection device according to claim 3, wherein a diameter of a tip surface of the first convex portion is 100 μm or less.   In the pressing step, the protrusion length of the first protrusion after pressing is reduced to 95% or less of the protrusion length before pressing by crushing the tip of the first protrusion. The manufacturing method of the liquid discharge apparatus of Claim 3 or 4. Forming a flow path hole penetrating through the second plate by etching in the second plate; and
The nozzle forming step of forming the plurality of nozzles communicating with the flow path hole in the first plate after the second etching step is provided. A method of manufacturing a liquid ejection device.   The method for manufacturing a liquid ejection device according to claim 6, wherein the pressing step is performed after the nozzle forming step.   The method of manufacturing a liquid ejection device according to claim 6, wherein the nozzle forming step is performed after the pressing step. A metal plate on which a plurality of nozzles is formed is subjected to etching after masking a partial region on the surface opposite to the discharge port of the nozzle, thereby forming a recess and the discharge port from the bottom surface of the recess. An etching step for forming a third protrusion protruding to the opposite side;
Pressing the third convex portion of the metal plate with a punch to perform press working, and forming a fourth convex portion protruding from the liquid ejection surface on which the ejection ports of the plurality of nozzles are disposed on the metal plate. Process,
A method for manufacturing a liquid ejection apparatus, comprising: Having a laminate including a first plate formed with a plurality of nozzles and a second plate made of metal;
The second plate is formed with a concave portion formed on the surface opposite to the first plate, and a first convex portion protruding from the bottom surface of the concave portion to the opposite side of the first plate,
The liquid ejecting apparatus according to claim 1, wherein a second convex portion that protrudes from a liquid ejection surface on which the ejection ports of the plurality of nozzles are arranged is formed in a portion of the stacked body that overlaps the concave portion.

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