JP6559868B2 - Measuring apparatus and measuring method - Google Patents

Description

  The present invention relates to a measuring apparatus and a measuring method for measuring an interface resistance value of an interface between constituents in a laminate in which a plurality of constituents having different physical properties are laminated.

  A lithium ion battery is known as a structure using a laminate in which a plurality of plate-like or film-like constituents having different physical properties are laminated. This lithium ion battery is manufactured by stacking a plurality of electrodes (laminates obtained by laminating two film-like components) composed of an active material layer formed by applying an active material on one or both surfaces of a metal foil. Is done. In this case, as one of the determination items for determining the quality of each electrode constituting the lithium ion battery, there is a quality of the adhesion state between the metal foil and the active material layer. As a test method for determining the quality of the adhesion state, a peel test (peel test) and a cross-cut test are known. In the peel test, the extent to which the active material layer is peeled off from the metal foil when the pressure-sensitive adhesive tape affixed to the surface of the active material layer is pulled up is observed, and the quality of the adhesion state is determined from the observation result. In the cross cut test, for example, a plurality of needles arranged at a pitch of about 0.5 mm are linearly moved along the surface while applying a predetermined load to the surface of the active material layer in the electrode and pressing the active material layer. Then, the electrode is rotated 90 °, and the active material layer is scratched with each needle in the same manner. Subsequently, the degree of peeling of the active material layer caused by scratching is observed, and the quality of the adhesion state is determined from the observation result.

  However, in the above peel test and cross cut test, the pass / fail judgment is performed by the tester, so there is room for the tester's subjectivity to be included in the judgment result, and as a result, the adhesion between the metal foil and the active material layer There is a problem that it is difficult to accurately determine whether the state is good or bad. Further, in the peel test and the cross cut test, the test procedure is complicated and requires time, so that there is a problem that test efficiency is poor. As a result of examining the technology for solving these problems, the inventors measured the resistance at the interface between the metal foil and the active material layer, and determined whether the adhesion state between the metal foil and the active material layer was good or bad from the measured value. It has been found that it is possible to determine, and if the resistance of the interface can be accurately and easily performed, it has been found that the above problem can be solved. In this case, as a technique for measuring the resistance of a plate-like body such as an electrode, it is disclosed in a measurement method (for example, Japanese Patent No. 2833623) that measures resistance (surface resistance or volume resistivity) by a four-probe method. Measurement method) is known, and a method of measuring the interface resistance by this method is conceivable.

Japanese Patent No. 2833623 (page 3-22, Fig. 1)

  However, with the conventionally known four-probe method, it is difficult to accurately measure the resistance at the interface between the metal foil constituting the electrode and the active material layer. That is, the four-probe method is premised on measuring the resistance of a measuring object formed of a single material on the measurement principle. For this reason, when measuring the volume resistivity of a measurement target in which a plurality of structures having different physical properties are stacked, the measured value is the average volume resistivity value of the entire measurement target or close to the surface It is difficult to specify whether the value is the value of the volume resistivity of the part. Therefore, it is difficult to accurately measure the resistance at the interface between the metal foil and the active material layer by the four-probe method. In this way, the resistance of the interface between the metal foil and the active material layer, which is indispensable for accurately and easily determining the quality of the adhesion state between the metal foil and the active material layer, is measured by the conventional four-point probe method. However, it is difficult to develop an alternative technology.

  The present invention has been made in view of such problems, and a measurement apparatus and a measurement that can accurately and easily determine the quality of the close contact state of each component in a laminate in which a plurality of components having different physical properties are laminated. The main purpose is to provide a method.

In order to achieve the above object, the measuring apparatus according to claim 1 is an object to be measured on the surface in a state in which an electric signal is supplied to the surface of the laminate in which a plurality of plate-like or film-like constituents having different physical properties are laminated. A measurement unit for performing a potential measurement process for measuring a potential of the part; and a predetermined calculation process using the measured value of the potential measured by the potential measurement process, and the respective components in the laminate A processing unit that obtains an interface resistance value of an interface between the plurality of components, the processing unit specifies a measurement potential vector that is a vector amount based on the measurement values in the plurality of measurement target portions, and the plurality of configurations Each initial conductivity set as the initial value of each conductivity and the previous value in a mathematical formula including, as parameters, each conductivity that is a reciprocal of each resistivity of the body and a reciprocal of the interface resistance value By substituting an initial value vector, which is a vector quantity based on the initial interface conductance set as the initial value of the interface conductance, the calculated value of each potential at each measurement target site is calculated, and each calculated value is A calculated value vector that is a vector quantity is calculated, a corrected value vector for correcting the initial value vector is calculated based on the measured potential vector, the calculated value vector, and the initial value vector, and the corrected value vector To calculate a corrected vector obtained by correcting the initial value vector, obtain the conductivity and the interface conductance as elements constituting the corrected vector, calculate the resistivity from the conductivity, and calculate the resistivity from the interface conductance. The process for calculating the interface resistance value is executed as the calculation process .

Further, in the measurement method according to claim 2, in the state where an electric signal is supplied to the surface of the laminated body in which a plurality of plate-like or film-like structural bodies having different physical properties are laminated, the potential of the measurement target portion on the surface is set. A potential measurement process to be measured is performed, a predetermined calculation process is performed using the measured value of the potential measured by the potential measurement process, and an interface resistance value of an interface between the constituents in the laminate is determined. When obtaining, specify a measurement potential vector that is a vector quantity based on each measurement value in a plurality of measurement target parts, each conductivity and the interface resistance that is the reciprocal of each resistivity of the plurality of constituents An initial conductance set as an initial value of each interfacial conductance and an initial value of the interfacial conductance. Substituting an initial value vector, which is a vector quantity based on conductance, to calculate a calculated value of each potential at each measurement target part and specify a calculated value vector, which is a vector quantity based on each calculated value A modified vector obtained by calculating a correction value vector for correcting the initial value vector based on the measured potential vector, the calculated value vector, and the initial value vector, and correcting the initial value vector with the corrected value vector. Calculating the conductivity and the interface conductance as the elements constituting the corrected vector, calculating the resistivity from the conductivity, and calculating the interface resistance value from the interface conductance. Run as a process .

In the measurement apparatus according to claim 1 and the measurement method according to claim 2, a potential measurement process is performed to measure a potential of a measurement target portion on a surface of a laminate in which a plurality of constituents having different physical properties are laminated, A predetermined calculation process is executed using the measured value of the potential measured by the potential measurement process, and the interface resistance value of the interface between the components in the laminate is obtained. For this reason, according to this measuring apparatus and measuring method, unlike the peeling test and the cross-cut test with complicated work, the quality of the adhesion state between the constituents is reliably determined based on the measured interface resistance value. And it can be determined easily. Moreover, according to this measuring apparatus and measuring method, by measuring resistance on a completely different measurement principle from the four-probe method on the premise of measuring the resistance of a measuring object formed of a single material, It is possible to accurately measure the interface resistance in a laminate in which a plurality of constituents having different physical properties are laminated. Therefore, according to this measuring apparatus and measuring method, for example, whether or not the adhesion state between the metal foil and the active material layer in the electrode of a lithium ion battery configured by laminating metal foils and active material layers having different physical properties is determined. It can be determined accurately and easily. Further, according to this measuring apparatus and measuring method, the interface resistance value is calculated from the corrected vector calculated by performing the process of correcting the initial value vector based on the initially set initial conductivity and initial interface conductance only once. Compared with the configuration and method in which the comparison result of comparing the calculated value and the measured value is repeatedly executed until the comparison result satisfies the specified condition to obtain the interface resistance value, the interface resistance value is shortened. It can be calculated in time.

1 is a configuration diagram showing a configuration of a measuring device 1. FIG. 2 is a configuration diagram showing a cross-sectional configuration of a lithium ion battery 200. FIG. It is explanatory drawing explaining a measuring method. It is an equivalent circuit diagram which shows the electric potential of each site | part in the positive electrode 100a. 5 is a flowchart of an interface resistance measurement process 50. It is a 1st explanatory view explaining an initial value calculation method. It is the 2nd explanatory view explaining an initial value calculation method. It is the 3rd explanatory view explaining an initial value calculation method. 5 is a flowchart of an interface resistance measurement process 60.

  Hereinafter, embodiments of a measurement apparatus and a measurement method will be described with reference to the accompanying drawings.

  First, the configuration of the measurement apparatus 1 shown in FIG. 1 as an example of the measurement apparatus will be described. The measuring apparatus 1 includes, for example, an interface resistance value between interfaces constituting the positive electrode 100a and the negative electrode 100b (both corresponding to “stacked body”) of the lithium ion battery 200 shown in FIG. The resistivity can be measured.

  Here, as shown in FIG. 2, the lithium ion battery 200 includes, as an example, a positive electrode 100 a and a negative electrode 100 b (hereinafter also referred to as “electrode 100” when the positive electrode 100 a and the negative electrode 100 b are not distinguished). And the separator 110 with the separator 110 interposed therebetween. In the drawing, the configuration of the lithium ion battery 200 is schematically illustrated, and therefore, the illustration of the casing and the like in which each electrode 100 and each separator 110 are accommodated is omitted.

  The positive electrode 100a and the negative electrode 100b are configured by laminating a plurality of plate-like or film-like structures having different physical properties. Specifically, as shown in FIG. 2, the positive electrode 100a includes, as an example, a metal foil 101a as a structure formed of aluminum in a film shape, and one or both surfaces (in this example, one surface) of the metal foil 101a. And an active material layer 102a as a structure formed by applying lithium cobaltate as an active material. In this case, it is known that the metal foil 101a and the active material layer 102a have higher functions as they are in close contact with each other. Further, it is clear from the research results of the inventors that the lower the interface resistance value Rs of the interface 103a between the metal foil 101a and the active material layer 102a, the better the adhesion state (the adhesion is high).

  As shown in FIG. 2, the negative electrode 100b includes, as an example, a metal foil 101b as a structure formed of copper as a film (hereinafter, when the metal foil 101a and the metal foil 101b of the positive electrode 100a are not distinguished from each other, “ Metal foil 101 ") and an active material layer 102b (hereinafter referred to as a structure) formed into a film by applying carbon as an active material to one or both surfaces (in this example, one surface) of the metal foil 101b. The active material layer 102a and the active material layer 102b of the positive electrode 100a are also provided with “active material layer 102” when not distinguished from each other. Similarly to the positive electrode 100a, the negative electrode 100b has a higher function as the metal foil 101b and the active material layer 102b are in close contact with each other. The interface 103b between the metal foil 101b and the active material layer 102b (hereinafter referred to as the positive electrode 100a). It is clear from the research results of the inventors that the lower the interface resistance value Rs of the active material layer 102a and the interface 103b, the better the adhesion state (the adhesion is higher). It has become.

  The separator 110 is a member that has a function of isolating the positive electrode 100a and the negative electrode 100b to prevent a short circuit and holding an electrolytic solution in the pores to form a lithium ion passage between the electrodes 100. It is composed of a porous film (film) formed of a polyolefin resin such as polyethylene.

  On the other hand, as shown in FIG. 1, the measuring apparatus 1 includes a measuring unit 11, a processing unit 12, a probe unit 13, a storage unit 14, and a display unit 15.

  The measurement unit 11 includes a power supply unit and a voltage detection unit that are not shown in the figure, and is connected to signal input sites Ps1 and Ps2 (see FIG. 3) on the surface S of the electrode 100 (active material layer 102) via the probe unit 13. In a state where an electrical signal for measurement (DC constant current as an example) is supplied, N measurement sites Pv1 to Pv3 on the surface S (3 sites in this example) (see FIG. A potential measurement process is performed to measure the potential (also referred to as “measurement target site Pv”) (potential difference from the ground potential G shown in the figure). Here, the number N of measurement target sites Pv is expressed as “N ≧ when the number of interface resistances or resistivity (that is, the number of unknown values) to be measured using the measuring apparatus 1 is n. n ”. In this case, in this example, three values of the interface resistance value Rs of the interface 103, the resistivity ρ1 of the metal foil 101, and the resistivity ρ2 of the active material layer 102 are to be measured using the measuring device 1 (n = 3). N = n (that is, N is 3) as an example of N ≧ n. In the figure, the surface S of the electrode 100 (active material layer 102) is connected to the ground potential G via a cable (not shown). It can also be connected to the ground potential G via the probe 31 excluding the probe 31 used for measuring the potential of the site Pv. In this case, the part on the surface S that is in contact with the probe 31 for connection to the ground potential G is not counted in the number N described above.

  The processing unit 12 controls the measurement unit 11 to execute a potential measurement process. Further, the processing unit 12 controls the storage unit 14 to store the measured value Vm measured by the measuring unit 11. Further, the processing unit 12 executes an interface resistance measurement process 50 (see FIG. 5) described later, and the metal foil 101 and the active material layer 102 in the electrode 100 based on the measured value Vm of the potential measured by the measuring unit 11. The interface resistance value Rs of the interface 103, the resistivity ρ1 of the metal foil 101, and the resistivity ρ2 of the active material layer 102 are measured. Further, the processing unit 12 causes the display unit 15 to display the measured resistivity ρ1, ρ2 and the interface resistance value Rs.

  The probe unit 13 includes a plurality of probes 31 and a support portion 32 that supports the probes 31. In this case, as an example, the probe unit 13 includes a total of five probes 31 including two probes 31 that are brought into contact with the signal input parts Ps1 and Ps2 and three probes 31 that are brought into contact with the measurement target parts Pv1 to Pv3. It has.

  The storage unit 14 stores the measurement value Vm measured by the measurement unit 11 and the resistivity ρ1 and ρ2 and the interface resistance value Rs measured by the processing unit 12 according to the control of the processing unit 12. In addition, the storage unit 14 stores a threshold value ε (a predetermined value defined in advance) used in the interface resistance measurement process 50 executed by the processing unit 12. In this case, the threshold value ε is compared with an evaluation function J (ρ1, Rs, ρ2), which will be described later, calculated in the interface resistance measurement process 50, and whether or not the evaluation function J (ρ1, Rs, ρ2) is toward convergence. This means that the higher the threshold ε is closer to “0”, the more highly accurate measurement of the interface resistance value Rs is required. The display unit 15 displays the resistivity ρ1, ρ2 and the interface resistance value Rs measured by the processing unit 12 according to the control of the processing unit 12.

  Next, using the measuring device 1, the resistivity ρ1 of the metal foil 101, the resistivity ρ2 of the active material layer 102, and the metal foil 101 as the constituents of each electrode 100 of the lithium ion battery 200 shown in FIG. A measurement method for measuring the interface resistance value Rs of the interface 103 between the active material layer 102 and the active material layer 102 will be described.

  First, when the positive electrode 100a is to be measured, the positive electrode 100a with the active material layer 102a facing upward is placed on the mounting table 300 as shown in FIG. Next, the probe unit 13 with the tip of each probe 31 facing downward is placed on the active material layer 102a in the positive electrode 100a. At this time, as shown in the figure, the tips of the probes 31 are in contact with the signal input portions Ps1 and Ps2 and the measurement target portions Pv1 to Pv3 on the surface S of the active material layer 102a.

  Subsequently, the start of measurement is instructed by operating the operation unit (not shown). In response to this, the processing unit 12 executes an interface resistance measurement process 50 shown in FIG. In the interface resistance measurement process 50, the processing unit 12 instructs the measurement unit 11 to execute a potential measurement process (step 51).

  In this potential measurement process, the measurement unit 11 outputs an electric signal for measurement (DC constant current as an example) from a power supply unit (not shown). At this time, an electrical signal is supplied between the signal input portions Ps1 and Ps2 on the surface S of the positive electrode 100a (active material layer 102a) via the probe 31 of the probe unit 13. Next, the measuring unit 11 sets the potential of each measurement target site Pv1 to Pv3 on the surface S (the potential difference between the ground potential G and each measurement target site Pv when the ground potential G shown in FIG. 3 is 0 V). Detection is performed by the detection unit, and the measurement value Vm (data indicating the measurement value Vm) is output to the processing unit 12. Subsequently, the processing unit 12 stores the measurement value Vm in the storage unit 14.

  Next, the processing unit 12 calculates a calculated value Vt of the potential at each measurement target site Pv of the positive electrode 100a. Specifically, the processing unit 12 is configured with model resistors Rm arranged in a matrix form according to a predetermined algorithm and conceptually shows a potential of each part in the positive electrode 100a as shown in FIG. Perform modeling to create an equivalent circuit. In addition, the processing unit 12 is a mathematical formula that calculates the calculated value Vt of the potential in the measurement target parts Pv1 to Pv3 from the created equivalent circuit (the mathematical expression including the interface resistance value Rs and the resistivity ρ1, ρ2 as parameters (variables)). Hereinafter, this mathematical expression is expressed as “Vt (ρ1, Rs, ρ2)” (step 52). It is to be noted that an equivalent circuit or mathematical expression is stored in the storage unit 14 in advance, and the processing unit 12 reads the equivalent circuit from the storage unit 14 to create a mathematical formula or reads the mathematical formula from the storage unit 14. You can also.

  Next, the processing unit 12 substitutes the resistivity ρ1 for the resistivity ρ1, the substitution resistivity ρp2 for the resistivity ρ2, and the substitution resistance value Rp for the interface resistance value Rs, which is substituted into the above formula Vt (ρ1, Rs, ρ2). Each initial value is set (step 53). In this case, the values of the substitution resistance value Rp and substitution resistivity ρp1, ρp2 set as initial values can be set to arbitrary values. As an example, general values assumed from the materials of the metal foil 101a and the active material layer 102a can be employed.

  Subsequently, the processing unit 12 substitutes the substitution resistance value Rp and substitution resistivity ρp1, ρp2 into the mathematical formula Vt (ρ1, Rs, ρ2), and calculates each calculated value Vt in each measurement target region Pv1 to Pv3 ( Step 54).

Next, the processing unit 12 calculates a difference value between the measured value Vm of the potential measured by the measuring unit 11 (stored in the storage unit 14) and the calculated calculated value Vt for each measurement target site Pv. In this case, the process for calculating the difference value corresponds to the comparison process, and the calculated difference value corresponds to the comparison result. In addition, the processing unit 12 calculates a square sum of the calculated difference values, and further calculates an average value of the calculated square sums (a value obtained by dividing the square sum by the number of measurement target parts Pv). Here, the value calculated in this way (the value calculated by the least square method as an example of the statistical method using the difference value) is a function that varies depending on the substitution resistance value Rp and substitution resistivity ρp1, ρp2. Hereinafter, this function is expressed as an evaluation function J (ρ1, Rs, ρ2) or simply as an evaluation function J (step 55). The relationship of the square sum of the difference value between the evaluation function J (ρ1, Rs, ρ2) and the measured value Vm calculated for each measurement target site Pv and the calculated value Vt is expressed by the following equation (1).
J (ρ1, R2, ρ2) = Σ [i∈Surface] {Vmi−Vti (ρ1, R2, ρ2)} ² / N (1)
In this case, in the formula (1), “i” means a number (1 to 3 in the above example) sequentially assigned to each measurement target site Pv, and “Σ [i∈Surface] "Means adding {Vmi-Vti (ρ1, R2, ρ2)} ² for all the measurement target parts Pv set on the surface S of the electrode 100 (active material layer 102). “N” means the number of measurement target sites Pv set on the surface S as described above.

  Subsequently, the processing unit 12 reads the threshold value ε from the storage unit 14, compares the calculated evaluation function J with the threshold value ε, and determines whether or not the evaluation function J is less than the threshold value ε (the comparison result is defined in advance). It is determined whether or not the condition is satisfied (step 56). In this case, when determining that the evaluation function J is equal to or greater than the threshold value ε (the evaluation function J is not less than the threshold value ε), the processing unit 12 changes the substitution resistance value Rp and substitution resistivity ρp1, ρp2 (step 57). The above-described steps 54 to 56 are executed. Hereinafter, when it is determined in step 56 that the evaluation function J is greater than or equal to the threshold ε, the processing unit 12 repeatedly executes step 54 to step 56.

  On the other hand, when the processing unit 12 determines in step 56 that the evaluation function J is less than the threshold value ε (the comparison result satisfies a prescribed condition defined in advance), the formula Vt (ρ1, Rs, The substitution resistivity ρp1 substituted for ρ2) is set as the resistivity ρ1, the substitution resistivity ρp2 is set as the resistivity ρ2, and the substitution resistance value Rp is determined as the interface resistance value Rs (step 58). Next, the processing unit 12 displays the determined resistivity ρ1, ρ2 and the interface resistance value Rs (that is, the measurement result) on the display unit 15 (step 59), and ends the interface resistance measurement processing 50. Steps 52 to 58 described above correspond to a predetermined calculation process.

  Next, when the negative electrode 100b is a measurement target, the negative electrode 100b with the active material layer 102b facing upward is placed on the mounting table 300. Subsequently, the probe unit 13 is placed on the negative electrode 100b in the same manner as the measurement procedure described above with the positive electrode 100a as a measurement target, and then an operation unit (not shown) is operated to instruct the start of measurement. In response to this, the processing unit 12 executes the interface resistance measurement process 50 described above. At this time, the processing unit 12 determines the resistivity ρ1, ρ2 and the interface resistance value Rs by executing the above-described processing (each step), and causes the display unit 15 to display the result.

  As described above, in the measurement apparatus 1 and the measurement method, the potential measurement process is performed to measure the potential of the measurement target site Pv on the surface S of the electrode 100 in which the metal foil 101 and the active material layer 102 having different physical properties are laminated. Then, a predetermined calculation process is executed using the measured value Vm of the potential measured by the potential measurement process to obtain the interface resistance value Rs of the interface 103 between the metal foil 101 and the active material layer 102 in the electrode 100. For this reason, according to this measuring apparatus 1 and the measuring method, unlike the peeling test and the cross-cut test involving complicated work, whether the adhesion state between the metal foil 101 and the active material layer 102 is good or not is measured. The determination can be made reliably and easily based on the value Rs. Further, according to the measuring apparatus 1 and the measuring method, the resistance is measured on a completely different measurement principle from the four-probe method based on the premise that the resistance of the measuring object formed of a single material is measured. In addition, it is possible to accurately measure the resistance of the interface in a laminate in which a plurality of constituents having different physical properties are laminated. Therefore, according to this measuring apparatus 1 and the measuring method, whether or not the metal foil 101 and the active material layer 102 in the electrode 100 formed by laminating the metal foil 101 and the active material layer 102 having different physical properties is determined as good or bad. It can be determined accurately and easily.

  Further, in the measuring apparatus 1 and the measuring method, a comparison process for comparing the calculated value Vt calculated by substituting the substituted resistance value Rp into the mathematical formula including the interface resistance value Rs as a parameter and the measured value Vm is performed. The substitution resistance value Rp when the comparison result in the comparison process satisfies the prescribed condition defined in advance is set as the interface resistance value Rs. Therefore, according to the measuring apparatus 1 and the measuring method, according to the purpose of obtaining the interface resistance value Rs, the regulation condition is strictly defined to improve the accuracy of the interface resistance value Rs, or the interface resistance value Rs In order to shorten the processing time in preference to the improvement in accuracy, it is possible to arbitrarily adjust the specified conditions.

  Further, in the measurement apparatus 1 and the measurement method, a comparison is made by comparing the calculated value Vt and the measured value Vm of the potential at each measurement target part Pv calculated by substituting the substituted resistance value Rp and the substituted resistivity ρp1, ρp2 into the mathematical formula. The process is executed while changing the substitution resistance value Rp and substitution resistivity ρp1, ρp2, and the substitution resistance value Rp when the comparison result in the comparison process satisfies the prescribed condition is set as the interface resistance value Rs, and the comparison result is prescribed. The substitutional resistivity ρp1, ρp2 when the condition is satisfied is defined as the resistivity ρ1, ρ2. For this reason, in this measuring apparatus 1 and the measuring method, when the resistivity ρ1 and the active material layer 102 resistivity ρ2 of the metal foil 101 are unknown, the resistivity ρ1 and ρ2 can be measured together with the interface resistance value Rs. Therefore, according to the measurement apparatus 1 and the measurement method, in addition to being able to accurately and easily determine whether the metal foil 101 and the active material layer 102 in the electrode 100 are in close contact with each other, for example, the metal foil 101 or As a result of being able to accurately and easily determine whether or not the active material layer 102 has prescribed physical properties, the quality of the electrode 100 can be determined in detail.

  In the measurement apparatus 1 and the measurement method, it is assumed that the specified condition is satisfied when the value calculated by the statistical method using the difference value between the measured value Vm and the calculated value Vt is less than the threshold value ε (specified value). Therefore, according to the measurement apparatus 1 and the measurement method, for example, when the number N of the measurement target portions Pv is 2 or more, the least square method is used as a statistical method, so that the interface resistance value Rs or the resistivity ρ1. , Ρ2 can be sufficiently improved, and as a result, it is possible to more accurately determine whether the metal foil 101 and the active material layer 102 in the electrode 100 are in close contact with each other, and the metal foil 101 and the active material layer. It is possible to more accurately determine whether 102 has the specified physical properties.

  Note that the measurement device, the measurement method, and the measurement target are not limited to the above-described configuration, method, and measurement target. For example, in the above example, the measurement object is the electrode 100 having the metal foil 101 formed in a film shape as an example of a film shape or a plate shape, but instead of the film metal foil 101, a plate-like metal is used. An electrode using a plate can also be a measurement target. Further, in the above example, the electrode 100 having the active material layer 102 formed in a film shape as an example of a film shape or a plate shape is the object of measurement, but instead of the film-like active material layer 102, a plate shape It is also possible to use an electrode having an active material layer as a measurement target. In addition to the electrode 100 of the lithium ion battery 200 described above, various laminates in which a plurality of plate-like or film-like constituents having different physical properties are laminated can be measured. Moreover, it is not limited to the laminated body (electrode 100) which laminated | stacked two structure bodies (the metal foil 101 and the active material layer 102) (that is, two or more interfaces have laminated | stacked three or more structure bodies). An existing laminate) can also be a measurement target. In this case, by performing the interface resistance measurement process 50 using a mathematical formula including the interface resistance value Rs of each of two or more interfaces as a parameter (variable), three different physical properties are obtained as in the above example. It is possible to accurately measure the interface resistance value Rs of each interface in the stacked body in which the above-described structures are stacked.

  Further, when a difference value between the measured value Vm and the calculated value Vt is calculated as a comparison process, and the value calculated by the least square method as a statistical method using the difference value satisfies a prescribed condition that it is less than the threshold ε Although the example in which the substitution resistance value Rp is set to the interface resistance value Rs has been described above, this method is merely an example, and other methods can be used. For example, the case where the value (evaluation function J) calculated by the least square method is equal to or less than (not less than) the threshold ε can be regarded as satisfying the specified condition. In addition, a value obtained by simply averaging the difference value between the measured value Vm and the calculated value Vt at each measurement target site Pv (a value calculated by a statistical method) satisfies a specified condition that it is less than a specified value (or less than a specified value). It is also possible to adopt a method in which the substitution resistance value Rp at that time is the interface resistance value Rs. Further, a process of calculating a ratio between the measured value Vm and the calculated value Vt as a comparison result is executed as a comparison process, and the substitution resistance value Rp when the ratio satisfies a specified condition that the ratio is equal to or less than the specified value is used as the interface resistance value Rs. It is also possible to adopt the method.

  Further, the resistivity ρ1, by substituting the substitution resistance value Rp and substitution resistivity ρp1, ρp2 into the equation Vt (ρ1, Rs, ρ2) including the three parameters (variables) of the resistivity ρ1, ρ2 and the interface resistance value Rs. The example of measuring ρ2 and the interface resistance value Rs has been described above. However, when the resistivity ρ1 and the resistivity ρ2 are known, these are constants and the resistance value substituted into the equation Vt (Rs) using only the interface resistance value Rs as a parameter. The interface resistance value Rs can also be measured by substituting Rp. In this case, since only the interface resistance value (only one unknown value n) is to be measured using the measuring apparatus 1, the number N of measurement target sites Pv is set to 1 (that is, N = n). Can be specified.

  In the above example, the number N of the measurement target sites Pv when the interface resistance value or the number of resistivity to be measured (the number of unknown values) is n is N = n (N = in the above example). Although defined in 3), the number N of the measurement target sites Pv can be defined as an arbitrary number of n + 1 or more (4 or more). In addition, although an example using a DC constant current as an electrical signal for measurement has been described above, when a configuration and method that includes a current measurement unit and can measure a current value are used, a DC current is used instead of the DC constant current. You can also. Moreover, it can replace with a direct current and the structure and method using an alternating current (an alternating current constant current as an example) can also be employ | adopted.

  In the above example, the initial values of the substitution resistivity ρp1, the substitution resistivity ρp2, and the substitution resistance value Rp to be substituted into the formula Vt (ρ1, Rs, ρ2) are set to arbitrary values. Depending on the initial value, in the above-described interface resistance measurement process 50, the evaluation function J and the threshold value ε are significantly different from each other, and until the evaluation function J becomes less than the threshold value ε, the calculation value Vt is calculated, It is necessary to repeat each process (steps 54 to 57 described above) for determining whether or not the evaluation function J is less than the threshold value ε, and the time required for measuring the interface resistance value Rs may become long. In this case, by using each initial value calculated by the following method (hereinafter also referred to as “initial value calculation method”), it is possible to shorten the time required for measuring the interface resistance value Rs.

  In this initial value calculation method, as shown in FIGS. 6 and 7, signal input portions Ps11 and Ps12 for supplying an electric signal for measurement are each of the components (metal foil 101a and active material) constituting the positive electrode 100a as a laminate. The material layer 102a) is set on the surface S of the active material layer 102a, which is a component having a higher resistivity. Further, as shown in FIG. 7, three (a plurality of examples) measurement target parts Pv11 to Pv13 (hereinafter also referred to as “measurement target part Pv” when not distinguished) connect the signal input parts Ps11 and Ps12. It is set in a partitioned region T1 on the surface S partitioned by two straight lines Ls1 and Ls2 that are orthogonal to La and pass through the signal input parts Ps11 and Ps12, respectively. Specifically, each of the measurement target parts Pv11 to Pv13 is a part in the partition region T1, and is a signal input part Ps11 (one of the signal input parts Ps11 and Ps12 on the source side (positive electrode side)). Separation distances (linear distances) Da1 to Da3 (hereinafter also referred to as “separation distance Da” when not distinguished from each other) are set to different parts. The measurement target part Pv11 corresponds to the reference part (measurement target part Pv having the shortest separation distance from the signal input part Ps11), the measurement target part Pv12 corresponds to the first measurement target part, and the measurement target part. Pv13 corresponds to the second measurement target part.

  In this case, as shown in FIG. 7, the measurement target parts Pv11 to Pv13 are set on the above-described line segment La as an example. Further, in this initial value calculation method, the measurement target parts Pv11 to Pv13 are set so that the intervals Db1 and Db2 between the adjacent measurement target parts Pv (hereinafter also referred to as “interval Db” when not distinguished) are equal to each other. ing.

  In this initial value calculation method, the measurement target part Pv11 is defined in the vicinity of the signal input part Ps11. In this example, the measurement target part Pv13 is set at the center of the line segment La.

  Further, in this initial value calculation method, the measurement unit 11 supplies electric potentials for measurement to the signal input parts Ps11 and Ps12 in the potential measurement process described above, and the potentials V11 to V11 in the measurement target parts Pv11 to Pv13. V13 is measured. Further, the processing unit 12 performs each initial of the substitution resistivity ρp2 and the substitution resistance value Rp among the substitution resistivity ρp1, the substitution resistivity ρp2, and the substitution resistance value Rp based on the potentials V11 to V13 measured by the measurement unit 11. Calculate the value.

Specifically, the processing unit 12 calculates initial values of the substitution resistivity ρp2 and the substitution resistance value Rp from the following equations (2) and (3).
2 (R2 + Rp) I = 2 ・ M2 (2)
R2 / Rp = α (M1 / M2) (3)

  In equations (2) and (3), M1 is the difference value (V11) between the potential V11 (measured value Vm) at the measurement target site Pv11 as the reference site and the potential V12 (measured value Vm) at the measurement target site Pv12. −V12) (see FIG. 8), and M2 represents a difference value (V11−V13) between the potential V11 and the potential V13 (measured value Vm) at the measurement target site Pv13 (see FIG. 8). I indicates the current value of the electrical signal for measurement flowing between the signal input parts Ps11 and Ps12.

In the equations (2) and (3), R2 is a resistance value of a prescribed region T2 (see FIG. 7) defined in advance with the signal input part Ps11 in the active material layer 102a as the center. Defined in (4).
R2 ＝ ρp2 (d2 / S2) ・ ・ ・ Formula (4)
In Expression (4), d2 represents the thickness of the active material layer 102a, and S2 represents the area of the above-described defined region T2. In this case, as shown in FIG. 7, for example, the defined region T2 is defined as a square area whose length of one side is ½ of the line segment La with the signal input part Ps11 as the center. .

  In Expression (3), α is a coefficient for matching the order (number of digits) of the value of “R2 / Rp” with the order of the value of “M1 / M2”, and is arbitrary (for example, 0 Positive value of about 5 to 1).

Here, said Formula (2), (3) is demonstrated with reference to FIG. As shown in the figure, the electrical signal for measurement supplied from the signal input site Ps11 flows through the metal foil 101a through the active material layer 102a and the interface 103a in the vicinity of the signal input site Ps11, and the signal input site Ps12. Flows to the signal input site Ps12 through the interface 103a and the active material layer 102a in the vicinity. In this case, if the current value of the electric signal for measurement flowing between the signal input parts Ps11 and Ps12 is I, the measurement target part Pv11 in the vicinity of the signal input part Ps11 and the part Pv14 in the vicinity of the signal input part Ps12 (same as above) A potential difference M0 between the active material layer 102a and the interface 103a in the vicinity of the signal input site Ps12 is expressed by the following equation (5), where R2 and Rp are respectively R2 and Rp.
M0 = 2 (R2 + Rp) I (5)
The potential difference M0 is twice the above-described M2, that is, expressed by the following formula (6).
M0 = 2 ・ M2 ... Formula (6)
From these equations (5) and (6), the above equation (2) is derived.

  On the other hand, for example, when the interface resistance value Rs of the interface 103a is large, an electric signal hardly flows from the active material layer 102a to the metal foil 101a, and an electric signal easily flows to the active material layer 102a having a large resistance value. In a state where the ratio of the change in the potential V to the change in the separation distance Da from Ps11 does not change greatly (the change in the potential V is small), the potential V gradually decreases as the separation distance Da increases. On the other hand, when the interface resistance value Rs of the interface 103a is small, an electric signal easily flows from the active material layer 102a to the metal foil 101a via the interface 103a. Therefore, in the vicinity of the signal input site Ps11, the separation distance Da is The potential V changes greatly with respect to the change (the change in the potential V is large), and in the vicinity of the measurement target site Pv13, the change in the potential V with respect to the change in the separation distance Da is small.

  From this, the ratio of the difference value M1 to the difference value M2 decreases as the interface resistance value Rs of the interface 103a increases (the change in potential V is small), and the difference value M1 relative to the difference value M2 decreases as the interface resistance value Rs decreases. It will be understood that the ratio increases (the change in potential V is large). In this case, the ratio of the resistance value R2 of the active material layer 102a to the interface resistance value Rs decreases as the interface resistance value Rs increases, and the resistance value R2 of the active material layer 102a relative to the interface resistance value Rs decreases as the interface resistance value Rs decreases. The ratio increases. Accordingly, the smaller the ratio of the resistance value R2 of the active material layer 102a to the substitution resistance value Rp of the interface resistance value Rs (that is, R2 / Rp), the smaller the ratio of the difference value M1 to the difference value M2 (that is, M1 / M2). The smaller the ratio (R2 / Rp) of the resistance value R2 of the active material layer 102a to the substitution resistance value Rp of the interface resistance value Rs, the larger the ratio (M1 / M2) of the difference value M1 to the difference value M2. That is, it is understood that (R2 / Rp) and (M1 / M2) are in a proportional relationship, and from this, the above equation (3) is derived. And as above-mentioned, said Formula (3) is ratio (1st ratio) of difference value M1, M2 of each electric potential V in two sets of measurement object site | part Pv11, Pv13 and measurement object site | part Pv11, Pv12. It is understood that this is a relational expression that defines the relationship between the resistance value R2 specified from the resistivity ρ2 and the ratio (second ratio) of the interface resistance value Rs.

When ρp2 and Rp are solved using the above equations (2), (3), (4), the following equations (7), (8) are derived.
ρp2 ＝ M2 ・ S2 / (I (1 + ((2 ・ M2) / (α ・ M1))) d2) (7)
Rp = M2 / (I (1+ (α · M1) / (2 · M2))) (8)

  By substituting the difference values M1 and M2 calculated from the potentials V11 to V13 into the equations (7) and (8), the initial values of the substitution resistivity ρp2 and the substitution resistance value Rp are calculated. Since the metal foil 101a is made of aluminum, the known resistivity ρ1 for aluminum can be used as the initial value of the substitution resistivity ρp1.

  In the interface resistance measurement process 50, by using the initial values of the substitution resistance value Rp and substitution resistivity ρp2 calculated by the above-described initial value calculation method, the evaluation function J, the threshold value ε, Can be brought to a state close to a certain extent. For this reason, according to this configuration and method, compared with the configuration and method in which the initial values of the substitution resistance value Rp and the substitution resistivity ρp2 are arbitrarily defined, the calculated value until the evaluation function J becomes less than the threshold value ε. The number of executions of each process of calculating Vt, calculating the evaluation function J, and determining whether or not the evaluation function J is less than the threshold ε can be reduced. Therefore, according to this configuration and method, the time required for measuring the interface resistance value Rs can be sufficiently shortened.

  Further, in this configuration and method, when measuring the interface resistance value in the electrode 100 in which two stacked bodies are stacked, the three measurement target parts Pv11 to Pv13 having different separation distances from the signal input part Ps11 are used. The potential V is measured, and the initial values of the substitution resistance value Rp and the substitution resistivity ρp2 are calculated based on a relational expression that defines the relationship between the first ratio and the second ratio for the two sets. For this reason, in this configuration and method, the potential V at three or more measurement target sites Pv is measured, and a relational expression that defines the relationship between the first ratio and the second ratio for each of the three or more sets is obtained. Compared with the configuration and method for calculating the initial values of the substitution resistance value Rp and substitution resistivity ρp2 on the basis of this, the calculation of each initial value is facilitated, and therefore the time required for measuring the interface resistance value Rs is further reduced. Can do.

  Further, in this configuration and method, the initial value is calculated using the measurement target part Pv11 having the shortest separation distance from one signal input part Ps11 as the reference part and the reference part as one of the pair of measurement target parts Pv in the two sets. To do. Therefore, according to this configuration and method, for example, the difference between each set is compared with the configuration and method in which each initial value is calculated using the difference value M obtained as a set of adjacent measurement target sites Pv. Since the values M are clearly different, the initial values of the substitution resistance value Rp and the substitution resistivity ρp2 calculated by substituting these difference values M into the relational expression can be made more appropriate values.

  Further, in this configuration and method, the measurement target part Pv12 and the reference part having a short separation distance Da between the measurement target part Pv11 as the reference part are set as the first set, and the separation distance between the reference part and the measurement target part Pv11. The measurement target part Pv13 and the reference part having a long Da are set as the second set, the ratio of the difference value M for the first set to the difference value M for the second set is set as the first ratio, and the interface resistance is set. An initial value is calculated based on a relational expression in which the ratio of the resistance value R2 of the active material layer 102 to the value Rs is a second ratio. Therefore, according to this configuration and method, the relational expression between the first ratio and the second ratio is created by defining and standardizing the measurement target parts Pv constituting each group in this way. In this case, it is possible to standardize an appropriate coefficient that relates the first ratio and the second ratio, thereby facilitating the creation of a relational expression. As a result, the initial values of the substitution resistance value Rp and the substitution resistance ratio ρp2 Can be calculated more easily.

  Further, according to this configuration and method, by setting each measurement target part Pv11 to Pv13 on the line segment La connecting each signal input part Ps11, Ps12, for example, each measurement target part Pv is on one straight line. Compared with the configuration and method that are not located, the change in the potential V according to the separation distance Da from the signal input site Ps1 clearly appears. Therefore, according to this configuration and method, the difference values M1 and M2 derived from the respective potentials V are substituted into the relational expression (the above expression (3)) that defines the relation between the first ratio and the second ratio. Thus, the initial values of the substitution resistance value Rp and the substitution resistivity ρp2 calculated as described above can be set to more appropriate values.

  In this configuration and method, the measurement target part Pv13 as the second measurement target part is set at the center of the line segment La. In this case, the potential V of each part on the line segment La generally has the same magnitude with the polarity reversed around the center of the line segment La. For this reason, according to this configuration and method, only the difference value M of the potential V of the measurement target part Pv set between one signal input part Ps11 and the measurement target part Pv13 (the central portion of the line segment La) is used. Since the ratio of 1 can be defined, the relational expression defining the relationship between the first ratio and the second ratio (the above expression (3)) can be simplified. As a result, the substitution resistance value Rp and The initial value of the substitution resistivity ρp2 can be calculated more easily.

  Further, in this configuration and method, since each measurement target part Pv is set so that the distances Db between the adjacent measurement target parts Pv are equal to each other, the interval Db between the adjacent measurement target parts Pv is different from each other. Compared with the method, the relational expression (the above formula (3)) defining the relation between the first ratio and the second ratio can be further simplified, so that the substitution resistance value Rp and the substitution resistivity ρp2 The initial value can be calculated more easily.

  In the above-described initial value calculation method, three measurement target parts Pv11 to Pv13 are set to obtain the first ratio for the two sets of difference values M, but four or more measurement target parts Pv are obtained. It is also possible to adopt a configuration and a method for obtaining the first ratio of the difference values M of three or more sets.

  In addition, the example in which the measurement target part Pv11 having the shortest separation distance from one signal input part Ps11 is defined as the reference part has been described above, but the measurement target part Pv other than the measurement target part Pv11 is defined as the reference part. And methods can also be employed. Further, the measurement target part Pv12 and the reference part having a short separation distance Da between the reference part and the reference part are set as the first set, and the measurement target part Pv13 and the reference part having a long separation distance Da between the reference part and the reference part are provided. Although the example of the second group has been described above, the combination of the measurement target site Pv that is the first group and the second group can be arbitrarily changed.

  In addition, the example in which each measurement target part Pv is set on the line segment La connecting the signal input parts Ps1, Ps2 has been described above, but the configuration and method for setting each measurement target part Pv on a straight line other than the line segment La, A configuration and a method for setting each measurement target part Pv at an arbitrary part in the partitioned region T1 can also be adopted. Moreover, although it described above about the example which set measurement object part Pv13 to the center part of line segment La, the structure which sets measurement object part Pv13 in parts other than the center part on line segment La, or parts other than line segment La, and The method can also be adopted. Further, the example in which each measurement target part Pv is set so that the interval Db between adjacent measurement target parts Pv is equal to each other has been described above. However, a configuration and method for setting each measurement target part Pv so that the distance Db is different from each other. It can also be adopted.

  Further, the example in which the measurement target part Pv11 is defined in the vicinity of the signal input part Ps11 has been described above. However, the measurement target part Pv11 and the signal input part Ps11 are the same part (separation between the measurement target part Pv11 and the signal input part Ps11). A configuration and a method that define the distance Da to be “0”) can also be adopted. Further, when adopting this configuration and method, the probe 31 that contacts the signal input part Ps11 and supplies an electric signal for measurement is used as the probe 31 for measuring the potential of the measurement target part Pv11 (both probes 31 are used). It is also possible to adopt a configuration and a method that are also used.

  Further, the processing unit 12 executes the interface resistance measurement process 60 shown in FIG. 9 in place of the above-described interface resistance measurement process 50, whereby the resistivity ρ1 is based on the measured value Vm of the potential measured by the measurement unit 11. , Ρ2 and the interface resistance value Rs may be employed. Hereinafter, an example in which the interface resistance measurement process 60 is executed to determine the resistivity ρ1, ρ2 and the interface resistance value Rs will be described. In the following description, the same description as the interface resistance measurement process 50 is omitted.

  In the interface resistance measurement process 60, the processing unit 12 instructs the measurement unit 11 to execute a potential measurement process (step 61). In response to this, the measurement unit 11 measures the potentials of the measurement target portions Pv1 to Pv3 (see FIG. 3) on the surface S of the electrode 100 and outputs the measurement values Vm1 to Vm3 to the processing unit 12. Next, the processing unit 12 treats the measurement values Vm1 to Vm3 as one set, and thus a vector quantity based on the measurement values Vm1 to Vm3 (hereinafter, this vector quantity is also referred to as “measurement potential vector Vm ↑”). ) Is specified (step 62), and the measured potential vector Vm ↑ is stored in the storage unit 14.

  Subsequently, the processing unit 12 performs modeling for creating an equivalent circuit (see FIG. 4) indicating the potential of each part in the electrode 100 configured by the model resistors Rm arranged in a matrix, and also creates the created equivalent circuit. Formulas for calculating the calculated potential values Vt1 to Vt3 of the potentials at the measurement target sites Pv1 to Pv3 are created (step 63). In this case, the processing unit 12 uses, as this formula, the conductivity σ1 of the metal foil 101 (reciprocal of resistivity ρ1, that is, σ1 = 1 / ρ1), the conductivity σ2 of the active material layer 102 (reciprocal of resistivity ρ2, That is, σ2 = 1 / ρ2) and the equation Vt (σ1,1) including as parameters the interface conductance Gs between the metal foil 101 and the active material layer 102 (the reciprocal of the interface resistance value Rs, that is, Gs = 1 / Rs). Gs, σ2) is created. Note that the equivalent circuit and the mathematical expression Vt (σ1, Gs, σ2) may be stored in the storage unit 14 in advance.

  Subsequently, the processing unit 12 generates a vector quantity based on the initial conductivities σp1, σp2 and the initial interfacial conductance Gp, which are set to arbitrary values for the conductivities σ1, σ2 and the interface conductance Gs (hereinafter, this vector quantity is expressed as “ (Also referred to as initial value vector σp ↑) ”(step 64).

  Next, the processing unit 12 substitutes the initial value vector σp ↑ into the above-described mathematical formula Vt (σ1, Gs, σ2), and calculates the potential values Vt1 to Vt3 at the measurement target portions Pv1 to Pv3 of the equivalent circuit. And a vector quantity based on the calculated values Vt1 to Vt3 (hereinafter, this vector quantity is also referred to as “calculated value vector Vt ↑”) is specified (step 65).

  Next, the processing unit 12 determines the measured potential vector Vm ↑, the calculated value vector Vt ↑, the initial value vector σp ↑ and each physical quantity (potential, current, conductance, etc.) in the equivalent circuit described above (for example, Based on the conductance matrix), a correction value vector Δσ ↑ for correcting the initial value vector σp ↑ is calculated (step 66).

Next, the processing unit 12 corrects the initial value vector σp ↑ with the calculated correction value vector Δσ ↑, and calculates a corrected vector σ ↑ (σ ↑ = σp ↑ + Δσ ↑) (step 67). Next, the processing unit 12 obtains the conductivity σ1 and σ2 and the interface conductance Gs as elements constituting the corrected vector σ ↑. Subsequently, processing unit 12 (the reciprocal of the conductivity .sigma.1, ie, ρ1 = 1 / σ1) from the conductivity .sigma.1 resistivity .rho.1 calculates the, resistance ratio of the active material layer 102 from the electrical conductivity .sigma. @ 2 [rho] 2 (conductive The reciprocal of the rate σ2, ie, ρ2 = 1 / σ2) is calculated. Further, the processing unit 12 calculates an interface resistance value Rs between the metal foil 101 and the active material layer 102 (reciprocal of the interface conductance Gs, that is, Rs = 1 / Gs) from the interface conductance Gs (step 68). Next, the processing unit 12 displays the calculated resistivity ρ1, ρ2 and interface resistance value Rs (that is, measurement result) on the display unit 15 (step 69), and ends the interface resistance measurement processing 60. Steps 62 to 68 described above correspond to predetermined calculation processing.

  Also in the configuration and method for executing the interface resistance measurement process 60, the metal foil 101 and the active material layer 102 having different physical properties are laminated without performing complicated operations in the same manner as the measurement apparatus 1 and the measurement method described above. Thus, it is possible to accurately and easily determine whether or not the metal foil 101 and the active material layer 102 in the electrode 100 configured as described above are in close contact. Further, according to this configuration and method, the corrected vector σ calculated by performing the process of correcting the initial value vector σp ↑ based on the initially set initial conductivity σp1, σp2 and the initial interface conductance Gp only once. Since the interface resistance value Rs can be obtained from ↑, the comparison process for comparing the calculated value Vt and the measured value Vm is repeatedly executed until the comparison result satisfies the specified condition to obtain the interface resistance value Rs. As compared with the above, the interface resistance value Rs can be obtained in a short time.

DESCRIPTION OF SYMBOLS 1 Measuring apparatus 11 Measuring part 12 Processing part 50,60 Interface resistance measurement process 100a, 100b Positive electrode 101a, 101b Metal foil 102a, 102b Active material layer 103a, 103b Interface 200 Lithium ion battery Da1-Da3 Separation distance Db1, Db2 Interval La line Minute Ls1, Ls2 Straight line M1, M2 Difference value Pv1-Pv3, Pv11-Pv13 Measurement target part Ps1, Ps2, Ps11, Ps12 Signal input part Rp Substitution resistance value Rs Interface resistance value S Surface Vm, Vm1-Vm3 Measurement value T1 Partition area T2 defined region V11 to V13 potential ε threshold ρ1, ρ2 resistivity ρp1, ρp2 substitution resistivity

Claims (2)

A measurement unit that performs a potential measurement process for measuring a potential of a measurement target portion on the surface in a state in which an electric signal is supplied to the surface of the laminate in which a plurality of plate-like or film-like constituents having different physical properties are laminated ,
A predetermined calculation process is performed using the measured value of the potential measured by the potential measurement process, and a processing unit that obtains an interface resistance value of an interface between the components in the stacked body ,
The processing unit specifies a measurement potential vector that is a vector quantity based on each measurement value in a plurality of measurement target parts, and each conductivity and the interface that are reciprocals of each resistivity of the plurality of constituents Based on the initial conductivity set as the initial value of the interface conductance and the initial interface conductance set as the initial value of the interface conductance, based on an equation including the interface conductance that is the reciprocal of the resistance value as a parameter. Substituting an initial value vector, which is a vector quantity, to calculate a calculated value of each potential at each measurement target site, and to specify a calculated value vector, which is a vector quantity based on each calculated value, Calculating a correction value vector for correcting the initial value vector based on the calculated value vector and the initial value vector, and the correction value A modified vector obtained by correcting the initial value vector by a computer is calculated, the conductivity and the interface conductance as the elements constituting the modified vector are obtained, the resistivity is calculated from the conductivity, and the interface conductance is calculated. A measurement device that executes a process of calculating the interface resistance value from the calculation process . In a state where an electric signal is supplied to the surface of the laminate in which a plurality of plate-like or film-like constituents having different physical properties are laminated, an electric potential measurement process is performed to measure the electric potential of the measurement target site on the surface,
When performing a predetermined calculation process using the measured value of the potential measured by the potential measurement process, to determine the interface resistance value of the interface between the constituents in the laminate ,
A measurement potential vector that is a vector quantity based on each measurement value in a plurality of measurement target parts is specified, and each conductivity that is the reciprocal of each resistivity of the plurality of constituents and the reciprocal of the interface resistance value An initial value which is a vector quantity based on each initial conductivity set as an initial value of each conductivity and an initial interface conductance set as an initial value of the interface conductance in a mathematical formula including a certain interface conductance as a parameter Substituting a value vector to calculate a calculated value of each potential at each measurement target part and specifying a calculated value vector that is a vector quantity based on each calculated value, the measured potential vector, the calculated value vector And a correction value vector for correcting the initial value vector is calculated based on the initial value vector, and the correction value vector is used to calculate the correction value vector. A corrected vector obtained by correcting the initial value vector is calculated, the conductivity and the interface conductance as elements constituting the corrected vector are obtained, the resistivity is calculated from the conductivity, and the interface is calculated from the interface conductance. A measurement method for executing a process of calculating a resistance value as the calculation process.

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