JP6555819B2 - Temperature measuring device - Google Patents

Description

  The present invention relates to a temperature measuring device. More specifically, for example, the present invention relates to a temperature measuring device that measures the temperature inside a vacuum chamber.

As a conventional temperature measuring device, a thermocouple lead-out tube in which two types of metal wires of a thermocouple are enclosed in an insulating filler in a flange hole provided in a side wall of a vacuum chamber is used as a sealing member such as an O-ring. It is known that a thermocouple metal wire is drawn out of a vacuum chamber through a thermocouple outlet tube (hereinafter referred to as “ It is referred to as “prior art 1”.
In addition, an O-ring is disposed opposite to the joint surface of the vacuum side flange member and the atmospheric side flange member fixed to the connecting pipe communicated with the vacuum environment, and the vacuum side and the atmospheric side flange member are connected to each other. With the rings facing each other with the intermediate part of the thermocouple sandwiched between them, the O-rings are fastened by using a screw member and the O-rings are pressed against each other. A device that performs wiring between a vacuum environment and an atmospheric environment is known (hereinafter referred to as “Prior Art 2”, for example, see Patent Document 2).

  However, in Prior Art 1, in order to fix and vacuum seal the two types of metal wires of the thermocouple, it is necessary to separately prepare a thermocouple outlet tube filled with resin, adhesive, ceramics, etc. When a plurality of pairs are provided, it is necessary to provide as many thermocouple outlet tubes, tube bodies, and lid bodies as the number of thermocouples, and there is a possibility that the device configuration becomes complicated and expensive.

  Further, in the prior art 2, the intermediate portion of the thermocouple is connected from the vacuum environment to the external temperature detection unit so as to be orthogonal to the circumferentially extending O-ring groove on the joint surface of the vacuum side flange member and the atmosphere side flange member. It is necessary to provide a gap in the radial direction for deriving into a plurality of thermocouples, and when a plurality of thermocouples are provided, a plurality of thermocouples exist within a single connecting pipe, and the thermocouples There was a risk that accurate temperature measurement would not be possible due to contact.

Japanese Patent Laid-Open No. 2001-221692 JP 2004-45283 A

The present invention provides a temperature measuring device capable of protecting a thermocouple and protecting it from an external force while maintaining a sealing property between an internal space and an external space as a temperature measuring unit with a simple configuration. It is the purpose.
It is another object of the present invention to provide a temperature measuring device that can secure an extraction space in an extraction portion to the outside of a thermocouple without performing special processing.

In order to achieve the above object, a temperature measuring device of the present invention is firstly attached to a wall body that divides an internal space and an external space, and is provided with a dissimilar metal wire of a thermocouple for measuring the temperature of the internal space. A lead-out member having a lead-out hole for leading to the external space;
An elastic cylindrical member provided on the outer space side of the outlet hole and having a hollow cylindrical shape having elasticity;
An elastic sheet member that is provided so as to be in contact with an end surface of the elastic cylindrical member on the external space side and has a sheet shape;
And tightening and holding means for pressing the elastic sheet member against the elastic tubular member.
According to this feature, it is possible to achieve insulation of the thermocouple and protection from external force while maintaining the sealing property between the internal space and the external space as the temperature measurement unit with a simple configuration.
Further, when exchanging the thermocouple according to the temperature range to be measured or adding a thermocouple to increase the number of measurement points, the operation can be easily performed only by operating the tightening holding means.

The temperature measuring device of the present invention is secondly characterized in that, in the first feature, the elastic cylindrical member is provided to protrude from the end face on the outer space side of the lead-out member to the outer space side. .
According to this feature, the take-out space in the take-out portion to the outside of the thermocouple can be ensured without performing special processing.

Thirdly, in the temperature measurement device according to the first or second aspect of the present invention, in the first or second feature, a plurality of the outlet holes are provided, and each of the plurality of outlet holes is provided with the elastic cylindrical member. It is a feature.
According to this feature, contact between a plurality of thermocouples can be prevented, and insulation can be ensured.

The temperature measuring device of the present invention is fourthly characterized in that, in any one of the first to third features, the material of the elastic cylindrical member is made of rubber or resin.
According to this feature, it is possible to further insulate the thermocouple and protect it from external force while maintaining the sealing performance.

In the fifth aspect of the temperature measuring device according to the present invention, in any one of the first to fourth features, the elastic sheet member can be in contact with an end surface of the elastic cylindrical member on the outer space side. And a hole is provided at the center.
According to this feature, even when a plurality of elastic cylindrical members are provided, it is possible to ensure sealing between the elastic cylindrical members and the end surfaces on the outer space side with a simple configuration.

Further, in the temperature measuring device according to the sixth aspect of the present invention, according to any one of the first to fifth features, the tightening holding unit includes a metal washer capable of contacting the external space side of the elastic sheet member, The elastic sheet member and a bolt that penetrates the metal washer are included, and the bolt includes a male screw portion that can be screwed into a female screw portion provided in the lead-out member.
According to this feature, the elastic sheet member can be surely brought into contact with the end face of the elastic cylindrical member on the outer space side, and the sealing performance can be improved. Further, it is possible to provide a tightening holding means that can be easily tightened and released.

The present invention has the following excellent effects.
(1) A deriving member that is attached to a wall body that divides the internal space and the external space, and has a deriving hole for deriving a different metal wire of a thermocouple for measuring the temperature of the internal space to the external space; An elastic cylindrical member that is provided on the outer space side of the lead-out hole and has an elasticity and has a hollow cylindrical shape, and an elastic cylindrical member that is provided so as to abut on the end surface of the elastic cylindrical member on the outer space side, and has an elastic sheet By sealing the elastic sheet member and the tightening and holding means for pressing the elastic sheet member against the elastic cylindrical member, the internal space and the external space as the temperature measuring unit can be sealed with a simple configuration. It is possible to protect the thermocouple from insulation and external force while maintaining its properties. Further, when exchanging the thermocouple according to the temperature range to be measured or adding a thermocouple to increase the number of measurement points, the operation can be easily performed only by operating the tightening holding means.

(2) The elastic cylindrical member is provided so as to protrude from the end face on the external space side of the lead-out member to the external space side, thereby securing the extraction space in the extraction portion to the outside of the thermocouple without performing special processing. be able to.

(3) A plurality of lead-out holes are provided, and an elastic cylindrical member is provided in each of the plurality of lead-out holes, whereby contact between the plurality of thermocouples can be prevented and insulation can be ensured.

(4) Since the material of the elastic cylindrical member is rubber or resin, it is possible to further insulate the thermocouple and protect it from external force while maintaining the sealing performance.

(5) The elastic sheet member has a size capable of coming into contact with the end face on the outer space side of the elastic cylindrical member, and a hole is provided in the central portion, so that even when a plurality of elastic cylindrical members are provided. With a simple configuration, it is possible to ensure sealing between the elastic cylindrical members and the end surfaces on the outer space side.

(6) The tightening holding means includes a metal washer capable of contacting the outer space side of the elastic sheet member, and a bolt penetrating the elastic sheet member and the metal washer, and the bolt is a female screw portion provided on the lead-out member. By providing the male screw portion that can be screwed to the elastic member, the elastic sheet member can be reliably brought into contact with the end surface of the elastic cylindrical member on the outer space side, and the sealing performance can be improved. Further, it is possible to provide a tightening holding means that can be easily tightened and released.

It is sectional drawing which shows the assembly state of the temperature measuring apparatus which concerns on the Example of this invention. It is explanatory drawing which decomposes | disassembles and shows the element member which comprises the temperature measuring apparatus which concerns on the Example of this invention. It is an AA arrow line view of FIG.

  EMBODIMENT OF THE INVENTION With reference to drawings, the form for implementing this invention is demonstrated illustratively based on an Example below. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention only to those unless otherwise specified. .

  FIG. 1 is a cross-sectional view illustrating an assembled state of a temperature measuring device according to an embodiment of the present invention, in which a right side of a wall body 1 forming a vacuum chamber or the like is an internal space, and a left side is an external space.

   The temperature measuring device of the present invention connects two different metals, for example, different metals such as chromel / alumel or copper / constantan, between the temperature measuring contact and the reference contact, and is proportional to the temperature difference between the two contacts. The temperature sensor using the principle that a temperature difference can be detected by measuring an electromotive force generated by a voltmeter, that is, a thermocouple is used.

In FIG. 1, the temperature measuring contact 3 of the thermocouple 2 is disposed in the inner space on the right side of the wall body 1, and the reference contact 4 and the voltmeter 5 of the thermocouple 2 are disposed in the outer space on the left side of the wall body 1. ing.
The temperature measuring contact 3, the reference contact 4 and the voltmeter 5 are connected by a known wiring method, but between the temperature measuring contact 3 located in the internal space and the reference contact 4 and the voltmeter 5 located in the external space. The connection is performed, for example, by arranging a conducting wire 6 in which a measuring element wire is covered with an insulating resin so as to penetrate the wall body 1.
In the present invention, the conductive wire is not limited to a conductive wire covered with an insulating resin, but includes a thermocouple element itself or a compensating conductive wire.

Since the internal space and the external space are usually different in temperature and pressure, the portion of the conducting wire 6 that penetrates the wall 1 is required to be sealed.
Moreover, in order to maintain the insulated state of the conducting wire 6, it is necessary to prevent and protect the conducting wire 6 from being damaged by an external force.
Furthermore, since it is necessary to replace the thermocouple 2 according to the temperature range to be measured or to increase the thermocouple 2 in order to increase the number of measurement points, it is required that these operations can be easily performed. .
Further, when a plurality of thermocouples 2 are provided, it is necessary to prevent contact between the conductors 6.

  Therefore, in the present invention, as shown in FIG. 1, the temperature measuring device is attached to a wall body 1 that partitions an internal space and an external space, and is a dissimilar metal of a thermocouple 2 for measuring the temperature of the internal space. A lead-out member 10 having a lead-out hole 11 for leading the lead wire 6 whose wire is covered with an insulating resin to the external space, and an elastic cylinder having a hollow cylindrical shape provided on the external space side of the lead-out hole 11 The elastic member 12 is provided in contact with the outer space-side end surface of the elastic cylindrical member 12 and has an elastic sheet-like elastic sheet member 13, and the elastic sheet member 13 is attached to the elastic cylindrical member 12. Tightening and holding means 14 for pressing.

  The lead-out member 10 is attached to the wall body 1 and has a role of leading the lead wire 6 safely. The material and shape of the lead-out member 10 are not particularly limited, but those shown in FIG. It has a real cylindrical shape, and is provided with a lead-out hole 11 for leading the lead wire 6 inside, and is detachably fixed to the wall body 1 via a screw portion 10a.

  The elastic cylindrical member 12 is provided in the lead-out hole 11 of the lead-out member 10 such that a part of the elastic cylindrical member 12 protrudes from the end face 10b on the external space side of the lead-out member 10 to the external space side. Therefore, there is a gap α between the outer space side end surface 10 b of the lead-out member 10 and the inner space side surface 13 a of the elastic sheet member 13 that contacts the outer space side end surface 12 a of the elastic cylindrical member 12. It will be.

  The conducting wire 6 is led into the lead-out hole 11 of the lead-out member 10 from the inner space side, passes through the inside of the hollow cylindrical elastic tubular member 12, and the end face 12a on the outer space side of the elastic tubular member 12 and the elastic sheet member 13 is led from the inner diameter side to the outer diameter side so as to be sandwiched between the inner space side surface 13a and led to the outer space through the gap α.

  Since the elastic sheet member 13 is pressed against the elastic cylindrical member 12 by the tightening holding means 14, the sealing property between the elastic cylindrical member 12 and the elastic sheet member 13 is ensured, and both have elasticity. Therefore, even if the conductor 6 is sandwiched between the two, the sealing around the conductor 6 can be secured.

  Next, each member will be described in detail with reference to FIGS.

  The lead-out member 10 is formed of, for example, metal or resin, and has a cross-sectional shape that is substantially like a bolt. ing. Moreover, the part 10c which protrudes to the external space side is formed in the shape like the head of a volt | bolt, This part 10c is attached to the wall 1 by rotating with a tool.

In addition, a plurality of lead-out holes 11 are provided in the lead-out member 10 for leading the lead wire 6 in the axial direction. As shown in FIG. 3, the plurality of lead-out holes 11 are provided equally on a circle having a certain distance from the center, for example. Although four lead-out holes 11 are provided in FIG. 3, the number of lead-out holes 11 is not particularly limited, and one or more lead-out holes may be provided.
Further, in order to accommodate the elastic cylindrical member 12 on the outer space side of the outlet hole 11, an accommodating portion 11 a having a diameter larger than the diameter of the outlet hole 11 on the inner space side is provided. The elastic cylindrical member 12 is positioned by engaging with a step formed by the difference between the diameter of the outlet hole 11 on the inner space side and the diameter of the accommodating portion 11a. The axial length of the accommodating portion 11a is appropriately determined according to the length of the elastic cylindrical member 12.
Note that the inner space side end of the elastic cylindrical member 12 is disposed closer to the inner space side than the inner space side end of the accommodating portion 11a, whereby the thermocouple lead-out member 10 and the elastic cylindrical member 12 are connected to each other. Prevent pinching. That is, the location where the thermocouple 2 exits from the elastic cylindrical member 12 is disposed closer to the inner space than the contact position between the lead-out member 10 and the elastic cylindrical member 12, so that the thermocouple 2 is installed in a bent state. Even if it does, it can be made difficult to pinch between the derivation member 10 and the elastic cylindrical member 12.

  Further, a female screw hole 10 d that can be screwed with a bolt of the tightening holding means 14 described later is provided at the center of the lead-out member 10.

The elastic cylindrical member 12 is provided in the accommodating portion 11a of the lead-out hole 11, guides the conducting wire 6 into the internal hole 12b, and between the internal space and the external space between the end face 12a on the external space side and the elastic sheet member 13. It is necessary to have a function of sealing the sealant, and to have insulation, elasticity, mechanical strength, and the like. Therefore, as the material of the elastic cylindrical member 12, rubber or resin, for example, urethane rubber is suitable.
The shape of the elastic cylindrical member 12 may be hollow and cylindrical, and the cross-sectional shape is not particularly limited, such as a circle or a polygon.
Since the elastic cylindrical member 12 is provided in each lead-out hole 11 when a plurality of lead-out holes 11 are provided, the number of the lead-out holes 11 is prepared.

The elastic sheet member 13 abuts on the end surface 12a on the outer space side of the elastic cylindrical member 12, and has a function of sealing the inner space and the outer space with the conductor 6 sandwiched between the abutting portions. Insulation and elasticity are required. As a material of the elastic sheet member 13, for example, natural rubber, synthetic rubber, or resin such as polytetrafluoroethylene is preferable.
In addition, the elastic sheet member 13 needs to contact the end face 12a on the outer space side of all the elastic cylindrical members 12 even when a plurality of the outlet holes 11 and the elastic cylindrical members 12 are provided. The size which can cover the end surface 12a of the outer space side of the shaped member 12 is required.
In addition, a hole 13 b is provided at the center of the elastic sheet member 13.

The tightening holding member 14 includes a metal washer 15 that can come into contact with the outer space-side surface 13 c of the elastic sheet member 13, and a bolt 16 that penetrates the elastic sheet member 13 and the metal washer 15.
The metal washer 15 has substantially the same size as the elastic sheet member 13, and a hole 15a is provided in the center.
The bolt 16 includes a male screw portion 16 a that can be screwed into a female screw hole 10 d provided in the lead-out member 10.

When installing the thermocouple 2, the elastic cylindrical member 12 is placed in the housing portion 11 a of the lead-out hole 11 of the lead-out member 10, as shown in FIG. The lead member 10 is attached to the wall body 1 in a state where the lead wire 6 is electrically connected to the lead hole 11 and the inner hole 12 b of the elastic cylindrical member 12.
Next, the metal washer 15 is brought into contact with the elastic sheet member 13, and the bolt 16 is penetrated through the central portion thereof, and the surface 13 a on the inner space side of the elastic sheet member 13 is set to the outer space of the elastic cylindrical member 12. The male screw portion 16a of the bolt 16 is screwed into the female screw hole 10d of the lead-out member 10 so as to contact the end surface 12a on the side and sandwich the conductive wire 6 between the contact portions.
Depending on how the bolts 16 are tightened, the inner space-side surface 13a of the elastic sheet member 13 and the outer space-side end surface 12a of the elastic cylindrical member 12 are in pressure contact and sealed with the conductor 6 sandwiched therebetween. It becomes.

The temperature measuring apparatus of the above-described embodiment has the following excellent effects.
(1) A lead wire 6 that is attached to a wall body 1 that divides an internal space and an external space and covers a different metal wire of a thermocouple 2 for measuring the temperature of the internal space with an insulating resin is led out to the external space. A lead-out member 10 having a lead-out hole 11, an elastic cylindrical member 12 provided on the outer space side of the lead-out hole 11 and having a hollow cylindrical shape, and an outer space side of the elastic cylindrical member 12 By providing an elastic sheet-like elastic sheet member 13 provided so as to contact the end face, and a clamping holding means 14 for pressing the elastic sheet member 13 against the elastic cylindrical member 12 With a simple configuration, it is possible to protect the thermocouple from insulation and external force while maintaining the sealing property between the internal space and the external space, which are temperature measuring units.
In addition, when the thermocouple 2 is exchanged according to the temperature range to be measured, or when the thermocouple 2 is added to increase the number of measurement points, the operation is easily performed only by operating the tightening holding means 14. be able to.
(2) The elastic cylindrical member 12 is provided so as to protrude from the end face 10b on the outer space side of the lead-out member 10 to the outer space side, thereby providing a special take-out space in the take-out portion of the thermocouple 2 to the outside of the conducting wire 6 This can be ensured without processing.
(3) A plurality of lead-out holes 11 are provided, and the plurality of lead-out holes 11 are each provided with an elastic cylindrical member 12, thereby preventing contact between the plurality of conductors 6 and ensuring insulation. it can.
(4) Since the material of the elastic cylindrical member 12 is rubber or resin, it is possible to further insulate the thermocouple and protect it from external force while maintaining the sealing performance.
(5) The elastic sheet member 13 has a size capable of coming into contact with the end surface 12a on the outer space side of the elastic cylindrical member 12, and a plurality of elastic cylindrical members 12 are provided by providing a hole in the center. Even if it is provided, the airtightness between the elastic cylindrical member 12 and the end surface 12a on the outer space side can be ensured with a simple configuration.
(6) The tightening holding means 14 includes a metal washer 15 capable of contacting the external space side of the elastic sheet member 13, and a bolt 16 penetrating the elastic sheet member 13 and the metal washer 15. The bolt 16 is a lead member. 10 is provided with a male threaded portion 16a that can be screwed into the female threaded hole 10d, the elastic sheet member 13 can be reliably brought into contact with the end surface 12a on the outer space side of the elastic cylindrical member 12, Sealability can be improved. Further, it is possible to provide the tightening holding means 14 that can be easily tightened and released.

  Although the embodiments of the present invention have been described with reference to the drawings, the specific configuration is not limited to these embodiments, and modifications and additions within the scope of the present invention are included in the present invention. It is.

  In the said Example, the conducting wire 6 by which the connection between the temperature measuring contact 3 located in internal space, the reference contact 4 located in external space, and the voltmeter 5 was coat | covered with insulating resin penetrates the wall 1 However, the present invention is not limited to this case. For example, the present invention can be applied to a case where a metal wire of a thermocouple penetrates the wall body 1.

  In the above-described embodiment, the lead-out member 10 has a solid cylindrical shape with a substantially T-shaped cross section, and the lead-out hole 11 for leading the lead wire 6 is provided in the lead-out member 10 via the screw portion 10a at the outer peripheral portion. However, the present invention is not limited to this, and for example, a plurality of through holes may be provided in the axial direction of the solid cylindrical member. May be any member that can guide while protecting the linear member of the thermocouple.

DESCRIPTION OF SYMBOLS 1 Wall body 2 Thermocouple 3 Temperature measuring contact 4 Reference contact 5 Voltmeter 6 Conductor 10 Derivation member 10a Screw part 10b End surface on the external space side 10c Portion protruding to the external space side 10d Female screw hole 11 Derivation hole 11a Elastic cylindrical member Housing part 12 Elastic cylindrical member 12a End face on the outer space side 12b Internal hole 13 Elastic sheet member 13a Surface on the inner space side 13b Hole 13c Surface on the outer space side 14 Tightening holding member 15 Metal washer 15a Hole 16 Bolt 16a Male thread part

Claims (6)

A deriving member attached to a wall body that partitions the internal space and the external space, and having a deriving hole for deriving a dissimilar metal wire of a thermocouple for measuring the temperature of the internal space to the external space;
An elastic cylindrical member provided on the outer space side of the outlet hole and having a hollow cylindrical shape having elasticity;
An elastic sheet member that is provided so as to be in contact with an end surface of the elastic cylindrical member on the external space side and has a sheet shape;
A temperature measuring device comprising: a tightening holding means for pressing the elastic sheet member against the elastic cylindrical member.   The temperature measuring device according to claim 1, wherein the elastic cylindrical member is provided to protrude from the end surface on the outer space side of the lead-out member to the outer space side.   The temperature measuring device according to claim 1 or 2, wherein a plurality of the lead-out holes are provided, and the elastic cylindrical members are respectively provided in the plurality of lead-out holes.   The temperature measuring device according to any one of claims 1 to 3, wherein a material of the elastic cylindrical member is made of rubber or resin.   5. The elastic sheet member according to any one of claims 1 to 4, wherein the elastic sheet member has a size capable of contacting an end face of the elastic cylindrical member on the outer space side, and a hole is provided in a central portion. The temperature measuring device according to claim 1.   The tightening holding means is composed of a metal washer capable of coming into contact with the outer space side of the elastic sheet member, and a bolt penetrating the elastic sheet member and the metal washer, and the bolt is provided in the lead-out member. The temperature measuring device according to any one of claims 1 to 5, further comprising a male screw portion that can be screwed into the female screw portion.

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