JP6549718B2 - Optical arrangement for laser scanner system - Google Patents

Description

  A laser scanning microscope is essentially an optical microscope in which a sample is scanned by a focused laser beam. As an example, this scan may be performed by deflecting the laser beam horizontally and / or vertically by the scanner mirror before focusing the laser beam to an excitation point on or in the sample by the optical arrangement. By way of example, such illumination of the laser beam can then excite the fluorescence to be detected later in the sample. Such laser scanning microscopes (LSM) are common in microscopy and are established as tools for producing high resolution optical cross sections.

  Laser scanning microscopes are often implemented as attachments or add-ons to existing microscope systems that may include a stand. As an example, such a system uses the corrected intermediate image of the wide-field microscope as an optical interface. In such an arrangement, the aforementioned scanner mirror is placed in a plane conjugate to the exit pupil of the microscope objective used.

  In the case of a high-aperture microscope objective, this exit pupil is inside the objective. Thus, so-called tube lenses or tube lens arrangements and additional scanning objectives are used in applications for imaging the exit pupil of a microscope objective on a scanner mirror or other scanner device.

  FIG. 1 schematically shows the structure of such an optical device.

  Here, 10 indicates the position on the sample where the laser light is collected. Reference numeral 11 denotes a microscope objective, for example, a high aperture microscope objective, and 12 denotes an exit pupil of the microscope objective 11. 13 shows a so-called tube lens, 14 shows an intermediate image, and 15 shows a scanning objective lens. The tube lens 13 can in particular be arranged in the column of the microscope. The reference numeral 16 denotes the position of the scanner mirror in the conjugate plane with the exit pupil 12.

  As an example, the microscope objective 11 can be a 10 × objective and the diameter of the exit pupil 12 can be on the order of 10 mm. The field diameter of intermediate image 14 may be, for example, about twenty. As an example, the focal length of the tube lens 13 may be on the order of 165 mm, and the focal length of the scanning objective 15 may be on the order of 50 mm.

  Although in FIG. 1 the microscope objective 11, the tube lens 13 and the scanning objective 15 are each shown as individual lines, each of these elements may be one or more lenses or diffractive elements and / or Other optical elements such as mirrors may be included.

  In many configurations, the following boundary conditions apply to such a structure so that it can be used as an attachment for an existing microscope with a microscope objective 11.

i) In principle, between the exit pupil 12 and the tube lens 13 so that the upper beam boundary of the light beam extends at least approximately parallel to the axis, so that the inner diameter of the tube of the microscope can be minimized Is slightly smaller than the focal length of the tube lens.

ii) Since the microscope objective lens such as the microscope objective lens 11 is in principle corrected to form an image at infinity, the intermediate image 14 is disposed away from the tube lens 13 according to the focal length of the tube lens 13 Be done.

iii) The distance between the intermediate image 14 and the scanning objective 15 is equal to the focal length of the scanning objective, since the laser beam used for imaging in principle is generated in a collimated manner from the upstream optical unit It becomes almost equal. However, this boundary condition is not essential.

iv) Since the orientation of the pupil in the intermediate image 14 is substantially telecentric, the distance between the scanning objective 15 and the position of the scanner mirror 16 is likewise approximately equal to the focal length of the scanning objective.

v) The focal length of the scanning objective 15 is predetermined by the size of the scanner mirror used. In particular, the focal length ratio between the tube lens 13 and the scanning objective 15 forms an imaging scale for imaging the scanner mirror on the exit pupil 12 of the microscope objective 11. For compact construction, a small scanner mirror or other scanner device with a large tilt angle range is preferred, which reduces the focal length of the scanning objective 15.

  In applications where the laser scanner system is implemented as an attachment or add-on to an existing microscope stand, the focal length of the tube lens 13 is predetermined by the stand and is typically between 140 mm and 200 mm. The minimum mirror dimensions of the scanner mirror are typically between 2 mm and 4 mm. As a result of this, the overall length of the system between the exit pupil 12 and the scanner mirror is relatively large, typically between 300 mm and 500 mm.

  This is again revealed in FIG. 2 by the so-called Delano diagram. In the Delano diagram, the marginal ray height y of the light beam passing through the optical arrangement is the principal ray height y-of each refractive surface (e.g. lenses 11, 13, 15 represented in idealized form in FIG. 1). Yy--plotted for (overlined y, and so on). FIG. 2 shows a Delano diagram of the optical arrangement of FIG. Here, elements 12-15 of FIG. 1 are similarly designated 12-15 in FIG. This figure circulates in the clockwise direction. The change of direction is caused by the refractive element. The start point and the end point (exit pupil 12 and scanner mirror 16) are set according to the above-described boundary conditions.

  Line 20 in FIG. 2 corresponds to the beam path from the exit pupil (AP) 12 to the tube lens (TL) 13 and line 21 corresponds to the beam path from the tube lens 13 to the intermediate image (ZWB) 14 The line 22 corresponds to the beam path from the intermediate image 14 to the scanning optical unit (SO) 15 (the line 22 is an extension of the line 21 since the intermediate image is not a refractive element) and the line 23 is a scanning optical unit The beam path from 15 to the scanner mirror 16 corresponds.

The overall length of the system is directly proportional to the area under the curve obtained as a result, the area allocated to each beam, Ru is formed by connecting a point corresponding to each element in the coordinate origin. This is illustrated by lines 24 and 25 in FIG. Thus, in the example presented, the length from the exit pupil 12 to the tube lens 13 is 100 mm, the length from the tube lens 13 to the intermediate image 14 is 165 mm, and the length from the intermediate image 14 to the scanning objective 15 The length is 50 mm, and the length from the scanning optical unit 15 to the scanner mirror 16 is 55 mm. However, these figures should be understood to be exemplary.

  However, in addition to the above-mentioned laser scanner system implemented as an attachment for an existing stand, for example a wide-field microscope, a laser scanning microscope implemented as a stand-alone instrument independent of the existing stand is also possible. For such laser scanning microscopes, it is desirable to make the total length of the optical arrangement shorter than that described above in order to realize a more compact instrument.

  Accordingly, one of the objects of the present invention is to provide an optical device for a laser scanner system whose overall length is reduced.

  This object is achieved by the optical arrangement according to claim 1 or 9. The dependent claims define further embodiments and a laser scanner system comprising such an optical arrangement.

  According to a first aspect, there is provided a first lens group having a positive focal length, a second lens group having a positive focal length for receiving light from the scanner device, and the first lens group. And a third lens group having a negative focal length, disposed between the second lens group and the second lens group. An optical arrangement for a laser scanner system is provided.

  Here, within the scope of the present application, the term "lens group" generally denotes an arrangement of one or more associated lenses. Conversely, as used herein, the term "lens" (e.g., tube lens, negative lens) may be used simply for the sake of simplicity, and such lenses may also be used by groups of multiple individual lenses. It can be realized. In some embodiments, these lens groups may also include other imaging elements such as, for example, mirrors or diffractive elements in addition to, or as an alternative to, conventional lenses.

  Here, further shortening of the total length can be achieved by the insertion of a lens group having a negative focal length. Furthermore, in some embodiments, the approach of stopping the application for stand-alone systems may be utilized for some of the boundary conditions initially discussed, and as a result, a reduction in overall length may be achieved.

  The optical arrangement may be configured to generate an intermediate image between the second lens group and the third lens group.

Here, the intermediate image may be located approximately in the middle between the second lens group and the third lens group .

  The optical arrangement may further comprise a microscope objective, in which case the first lens group is arranged between the microscope objective and the third lens group.

  The optical arrangement may be arranged such that the scanner device is arranged in a conjugate plane with the exit pupil of the microscope objective.

  The microscope objective may comprise an exit pupil of between 3 mm and 20 mm, preferably, for example between 8 mm and 12 mm, for example about 10 mm.

  The focal length of the first lens group may be located between 25 and 200 mm, for example between 25 and 100 mm. The focal length of the second lens group may be located between 5 and 50 mm, for example between 5 and 200 mm. The focal length of the third lens group may be located between -15 mm and -200 mm, for example between -15 and -100 mm.

  The first lens group may be a tube lens. The second lens group may be a scanning objective.

According to a second aspect, an optical arrangement for a laser scanner system comprising a microscope objective, a first lens group having a focal length of less than 70 mm and a second lens group having a focal length of less than 20 mm. Is provided. The first lens group is disposed between the microscope objective and the second lens group, and the second lens group is configured to receive light from a scanner device. The scanner device is located in a conjugate plane with the exit pupil of the microscope objective.

  The total length of the optical arrangement may be less than 150 mm.

  In the first or second aspect, the optical arrangement may further include beam splitter elements for providing a first beam path and a second beam path. The first beam path comprises a beam path between the position of the object and the position of the scanner device, and the second beam path comprises a beam path between the position of the object and the camera device .

  As a result, it is possible to combine the inspection of the laser scanner with the wide field of view recording by the camera device. The optical arrangement according to the first or second aspect allows a small intermediate image to be generated, thus allowing a compact and thus cost-effective image sensor to be used in the camera device.

  Here, the optical arrangement may be embodied according to the first aspect. In general, there is sufficient space for a beam splitter element between the first lens group and the third lens group so that a beam splitter element can be provided there.

  The optical arrangement may further comprise a correction element for at least partially correcting optical aberrations due to the beam splitter element.

  The first beam path through the beam splitter element may be bent and the second beam path through the beam splitter element (100) may be straight. This is preferable to the case where higher imaging quality is required for laser scanning than recording with a camera device.

  Alternatively, the first beam path through the beam splitter element may be straight and the second beam path through the beam splitter element may be bent. This is preferable when high image quality is required for recording with a camera device, even with laser scanning.

  There is further provided a laser scanner system comprising a laser light source, a scanner device and the above described optical device provided between the scanner device and the position of the sample.

The invention will be explained in more detail below on the basis of an embodiment with reference to the attached drawings. In these figures,
FIG. 1 shows a schematic view of an optical arrangement according to the prior art; FIG. 2 shows a Delano diagram of the optical arrangement of FIG. FIG. 3 shows a block diagram of a laser scanner system according to an embodiment; FIG. 4 shows a schematic view of an optical arrangement for a laser scanner system according to an embodiment; FIG. 5 shows a Delano diagram of the optical arrangement of FIG. Fig. 6 shows a schematic view of an optical arrangement for a laser scanner system according to a further embodiment; 7 shows a Delano diagram of the optical arrangement of FIG. Fig. 8 shows a schematic view of an optical arrangement for a laser scanner system according to a further embodiment; FIG. 9 shows a schematic view of an optical arrangement for a laser scanner system according to a further embodiment; FIG. 10 shows a schematic view of an optical arrangement according to a further embodiment; FIG. 11 shows a schematic view of an optical arrangement according to a further embodiment.

  Hereinafter, various embodiments of the present invention will be described in detail. These embodiments are for illustrative purposes only and should not be construed as limiting. This applies in particular to the numerical values provided to explain the particular implementation and embodiment.

  FIG. 3 shows a laser scanner system according to one embodiment. The laser scanner system of FIG. 3 includes a laser light source 30 for generating a laser beam 36. The laser beam 36 is directed via a first optional optical arrangement 31 to a moveable scanner mirror 32 as indicated by the arrow 33. The first optical arrangement 31 may be omitted if the laser light source 30 has already generated a laser beam 36 whose characteristics with respect to collimation meet the requirements of the laser scanner system. The laser beam so bent by the scanner mirror 32 is then focused on the sample 35 by the second optical arrangement 34. Each of the first optical device 31 and the second optical device 34 may specifically include one or more lenses and / or other optical elements. In the embodiment according to the invention, the second optical arrangement 34 in particular has a reduced overall length as compared to the conventional arrangement. In the following, a specific embodiment of such an optical arrangement is described in more detail with reference to FIGS.

  Then, by moving the scanner mirror 32, for example, by tilting the scanner mirror 32 in two spatial directions, it is possible to scan the desired area of the sample 35 by the laser beam.

  In addition (not presented here), the laser scanner system of FIG. 3 is an element for detecting light from the sample, eg a camera or fluorescent light in response to illumination by the laser beam 36 May further include other devices for detecting Such detection devices may be implemented as in the case of conventional laser scanner systems.

  The optical arrangement for the laser scanner system, for example various mounting options for the second optical arrangement 34 of FIG. 3, will now be described with reference to FIGS. A first embodiment is shown in FIG.

  In the optical arrangement of FIG. 4, 40 indicates the position of the object (eg, sample 35 of FIG. 3) to be illuminated by the laser beam. 41 denotes a microscope objective, 42 denotes an exit pupil of the microscope objective 41, 43 denotes a first lens group in the form of a tube lens, 44 denotes an intermediate image, 45 denotes a shape of a scanning objective And 46 indicates the position of the scanner mirror or other scanner device. As an example, the microscope objective 41 can provide 10 × magnification. The diameter of the exit pupil 42 may be larger than 8 mm, for example on the order of 10 mm. In principle, the same optical components as in FIG. 1 are used in FIG. However, in particular, the focal lengths of the tube lens 43 and the scanning objective 45 are reduced with respect to the conventional arrangement of FIG. 1, as a result of which the overall length is likewise reduced. This can occur especially in the case of a stand-alone solution.

  Thus, for example, the focal length of the tube lens 43 is 70 mm, for example less than about 55 mm, for example 45-65 mm. Also, the focal length of the scanning objective 45 is less than 20 mm, for example about 16.5 mm, for example 15-20 mm. Therefore, the overall length may be about 111 mm, as compared to, for example, about 370 mm in the case of FIG.

  FIG. 5 shows a Delano diagram corresponding to the optical arrangement of FIG. Line 50 represents the light beam from exit pupil 42 to tube lens 43, line 51 corresponds to the light beam from tube lens 43 to intermediate image 44, and line 52 (extending line 51) represents the intermediate image The line 53 corresponds to the light beam from the scanning objective 45 to the position of the scanner mirror 46, corresponding to the light beam from 44 to the scanning objective 45. 54 and 55 are auxiliary lines for dividing the entire area. Thus, in the exemplary embodiment, the distance between the exit pupil 42 and the tube lens 43 is about 20 mm, the distance between the tube lens 43 and the intermediate image 44 is about 65 mm, and the intermediate image 44 and the scan The objective 45 is about 16.5 mm, and the distance between the scanning objective 45 and the scanner mirror 46 is about 19.5 mm. For the purpose of comparison, and thus to illustrate the reduction of the circulation area in line with the reduction of the overall length, FIG. 5 further comprises the lines 20, 21 and 22 and 23 and the points 13, 14 and 15 of FIG. Show again.

  In some applications and implementations, further shortening of the total length is desired. However, in the optical arrangement of FIG. 4, further reductions in overall length without the addition of further optical elements may have disadvantages. For example, in a typical objective, in particular an objective with a large exit pupil, which presents the distance between the tube lens 43 and the exit pupil 42, since the exit pupil is located inside the objective It is often impossible to shrink more than (for example, about 20 mm). Therefore, it is often not possible to bring the tube lens 43 closer to the objective lens 41 because of the spread of the objective lens 41.

  It is also difficult to further reduce the distance between the scanning objective 45 and the scanner mirror 46. Otherwise, the incident angle of the light beam incident on the scanner mirror may become too large, which may cause distortion in the image field. This is especially true for incident angles greater than 20 °.

  Thus, in a further embodiment of the invention, a negative lens, ie a lens or lens group having a negative focal length, is arranged between the tube lens and the scanning objective in order to further reduce the overall length.

  A further embodiment is schematically illustrated in FIG. In FIG. 6, 60 indicates the position of the subject, 61 indicates a microscope objective lens, for example, a 10 × objective lens, and 62 indicates an objective lens 61 (for example, having a diameter larger than 8 mm, for example, on the order of 10 mm) The exit pupil is shown, and 63 shows a tube lens (first lens group). As an example, in this case, the tube lens 63 may have a focal length of between 25 and 65 mm, for example about 32 mm. 64 is a negative lens (third lens group) and may have a focal length of between -15 and -75 mm, for example about -19 mm. 65 shows an intermediate image and 66 shows a scanning objective (second lens group) which may have a focal length which is between 5 and 15 mm in the case of FIG. 6, for example about 12 mm. 67 shows the position of the scanner mirror.

FIG. 7 shows a Delano diagram corresponding to the embodiment of FIG. 6 with the exemplary focal length described above. The lines shown in FIGS. 2 and 5 are also shown for comparison purposes. Line 70 corresponds to the light beam from the exit pupil 62 to the tube lens 63, line 71 corresponds to the light beam from the tube lens 63 to the negative lens 64, and line 72 to the intermediate image 65 from the negative lens 64. , Line 73 (the continuation of line 72) corresponds to the light beam from intermediate image 65 to scanning objective 66, and line 74 from scanning objective 66 to a scanner mirror or other scanner device 67. Corresponding to the light beam. 75 to 77 once again specify auxiliary lines for describing the individual full length components or surface components. In the illustrated example, the distance from the exit pupil 62 to the tube lens 63 is about 20 mm, the distance from the tube lens 63 to the negative lens 64 is about 28 mm, and the distance from the negative lens 64 to the intermediate image 65 is about 5 mm , and the distance from the intermediate image 65 to the scanning objective lens 66 is about 11.5 mm, the distance from the scanning objective lens 66 in the scan raw is about 19.5 mm. Therefore, the total length is reduced from 111 mm to 84 mm as compared to the example of FIG. It should be noted that in practical implementations, the thickness of the lens or lens group used may partially increase the length.

FIG. 8 shows a further embodiment of an optical arrangement which can be considered as an example of FIG. In FIG. 8, 80 shows the exit pupil of the microscope objective. 81 shows a tube lens consisting of three individual lenses in the example of FIG. 8 and having a focal length of 61 mm in the example presented. 82 shows a negative lens implemented as a lens group with two individual lenses in the case of FIG. As an example, the focal length of the negative lens 82 can be −75 mm. Reference numeral 83 denotes an intermediate image, and reference numeral 84 denotes a scanning objective, which is also implemented as a lens group having a plurality of lenses in the example of FIG. 85 shows a scanner mirror which may have a diameter of, for example, 2 mm. The incident light beam is redirected by the scanner mirror 85 towards the sample to scan the sample by the discussed optical elements.

  In the embodiment of FIG. 8, the travel distance between the exit pupil 80 and the scanner mirror 85 is 112 mm, which is the value specified above. The diameter of the beam on the scanner mirror is 2 mm. In the embodiment of FIG. 8, the tube lens 81 and the negative lens 82 are selected at a medium focal length rather than the smallest possible focal length with respect to scale to reduce optical aberrations.

  In order to be able to direct the laser beam 86 through the scanning objective 84 to the scanning mirror 85, it is useful here that the distance between the scanning objective 84 and the scanning mirror 85 is sufficiently large. is there.

  In some embodiments, the intermediate image (eg, 83 in FIG. 8) is approximately halfway between the scanning objective 84 and the negative lens 82, eg, within ± 10% of the midpoint or ± 5% Located in the area (± 10% in this case means that part of the distance between the negative lens and the scanning objective by the intermediate image is in the area between 60:40 and 40:60) . Thus, in some embodiments, harmful effects such as contaminants on the lens surface may be reduced. Also, this can facilitate the operation in the defocus state. For such embodiments, focusing can be performed within the sample by altering the collimation state of the incident beam (e.g., 86). This changes the position of the intermediate image. For that purpose, it is useful to select the distance between the intermediate image and the adjacent lenses 82 and 84 so as not to be too small.

  A further embodiment of an optical device according to the invention is shown in FIG. In FIG. 9, 90 indicates the exit pupil of the microscope objective, 91 indicates the tube lens implemented again as a group of lenses, and 92 indicates a negative lens implemented similarly as a group of individual lenses , 93 indicates an intermediate image, and 94 indicates a scanning objective, which is also implemented as a group of individual lenses. 95 indicates the position of the scanner mirror or other scanner device. Compared to the embodiment of FIG. 8, for example, the tube lens 91 and the scanning objective lens 94 now have more lenses. This reveals that there are various implementation options in this case. In the embodiment of FIG. 9, the focal length of the tube lens is about 39 mm, the focal length of the negative lens 92 is about -36 mm, and the focal length of the scanning objective is about 9 mm. In this embodiment, the total travel distance between the exit pupil 90 and the position of the scanner mirror 95 is only 89 mm.

  As is apparent from the above examples, numerous variants are possible, for example with regard to the focal length of the individual lens groups. Thus, the presented embodiments are not limiting and should be understood as illustrative only.

  The embodiments described above have described the optical arrangement for the laser scanner system and the corresponding laser scanner system. Such laser scanner systems can be combined with wide field recording, ie substantially conventional optical microscopy recording, using a camera. The corresponding embodiments will be described in more detail below with reference to FIGS. 10 and 11. Here, FIGS. 10 and 11 represent a development of the embodiment of FIG. 6, the elements already appearing in the embodiment of FIG. 6 being indicated by the same reference numerals and will not be described again in detail. The provision of a camera for wide-field recording is presented on the basis of a development of the embodiment of FIG. 6, but corresponding developments are possible for the other embodiments described above.

In the embodiment of FIG. 10, a beam splitter element 100, for example a partially transmitting mirror, is provided between the tube lens 63 and the negative lens 64 to direct light from the object at position 60 to the camera device 102. There is. Then, the camera device 102 enables wide-field recording (for example, overview recording) of an object at the position 60. Here, the type of wide-field recording is not particularly limited, and may vary depending on the provided illumination (not shown). Thus, for example, bright field recording, dark field recording, phase contrast recording, and / or fluorescence recording can be generated in response to the illumination. It should be noted that in the case of conventional outcoupling, a beam splitter element is arranged between the microscope objective 61 and the tube lens 63. In a configuration according to the invention, such an arrangement is often not possible in embodiments, as the tube lens 63 can be moved very close to the microscope objective 61. Accordingly, the beam splitter element 100 is disposed between the tube lens 63 and the negative lens 64 as shown in FIG.

  As can be understood from the cross-sectional view of FIG. 10, the beam splitter element 100 is tilted with respect to the optical axis of the system. Here, the angle of inclination may be about 45 ° as shown in FIG. However, other angles are also possible. Here, the transverse light, ie the light beam from the scanner mirror 67 to the position 60 of the object, is also influenced by the finite thickness of the beam splitter element 100. In order to at least partially compensate for such effects, a correction element 101 is provided which substantially corresponds to the beam splitter element 100 and which is likewise inclined but in a different plane. In the cross-sectional view of FIG. 10, the correction element 101 projects at an angle from the plane of the drawing or in the plane of the drawing. Providing such a correction element is known per se and therefore will not be described in further detail. In another embodiment, instead of the substantially planar beam splitter element 100 presented, a beam splitter cube may be used as a beam splitter element. In this case, the correction element 101 can be omitted.

  As already explained, the optical arrangement of FIG. 6 produces a relatively small intermediate image, which is also the case in the other embodiments. This facilitates the use of correspondingly smaller image sensors within the camera device 102 and reduces costs compared to larger image sensors. As an example, an image sensor similar to that used as a standard in a smartphone may be provided for the implementation of the camera device 102.

FIG. 11 provides a development of the embodiment of FIG. 10, where like elements are indicated with the same reference numerals. In the embodiment of FIG. 10, the beam path between the object position 60 and the scanner mirror 67 travels linearly through the components 100, 101 while the beam path to the camera device 102 is bent, Is the opposite case. In this case, the beam path to the camera device 102 passes linearly, and the beam path from the scanner mirror 67 is bent.

In general, the imaging quality is degraded as a result of passing through the beam splitter element 100 and the correction element 101. Therefore, it is advantageous to use an angled beam path for beam paths where better imaging quality is desired. Thus, the embodiment of FIG. 10 is preferred if better imaging quality is desired for wide field recording with the camera device 102, and the implementation of FIG. 11 if better imaging quality is desired for laser scanning. The form of is preferred.

  The embodiments of FIGS. 10 and 11 merely provide an example of an extension of the laser scanner system or optical arrangement of FIGS. 1 to 9; the laser scanner system or optical arrangement of FIGS. Can also be combined with the

Claims (13)

A first lens group (63, 81, 91) having a positive focal length,
A second lens group (66, 84, 94) having a positive focal length for receiving light from the scanner device (32, 85);
A third lens group (64, 82, 91) having a negative focal length disposed between the first lens group (63, 81, 91) and the second lens group (66, 84, 94) 92),
A beam splitter element (100) for providing a first beam path and a second beam path;
The beam splitter element is provided between the first lens group and the third lens group,
An intermediate image is generated between the second lens group and the third lens group,
The first lens group (63, 81, 91) is a tube lens,
The second lens group (66, 84, 94) is a scanning objective lens,
Optical arrangement for laser scanner system. The intermediate image (65,83,93) is located between in between the second lens group (66,84,94) and said third lens group (64,82,92),
An optical arrangement according to claim 1 . Further including a microscope objective (61)
The first lens group (63, 81, 91) is disposed between the microscope objective lens (61) and the third lens group (64, 82, 92).
An optical arrangement according to claim 1 or 2 . The optical arrangement is configured such that the scanner device (32, 85) is arranged in a conjugate plane with the exit pupil (62, 80, 90) of the microscope objective.
An optical arrangement according to claim 3 . The microscope objective comprises an exit pupil (62, 80, 90) with a diameter of between 3 mm and 20 mm.
5. An optical arrangement according to claim 3 or 4 . The focal length of the first lens group (63, 81, 91) is between 25 and 200 mm, and / or the focal length of the second lens group (66, 84, 94) is 5 to 50 mm. And / or the focal length of the third lens group (64, 82, 92) is between -15 mm and -200 mm,
Optical arrangement according to any one of claims 1 to 5. Wherein the first lens group have a focal length of less than 70 mm,
The second lens group has a focal length less than 20 mm,
An optical arrangement according to any one of the preceding claims . The total length of the optical arrangement is less than 150 mm,
An optical arrangement according to claim 7 . Before SL first beam path includes a beam path between the position of the object (60) and said scanner apparatus (67),
The second beam path comprises a beam path between the position of the object (60) and the camera arrangement (102).
Optical arrangement according to any one of claims 1 to 8. The optical arrangement further comprises a correction element (101) for at least partially correcting optical aberrations by the beam splitter element (100).
An optical arrangement according to any one of the preceding claims. Said first beam path through said beam splitter element (100) is bent;
The second beam path through the beam splitter element (100) is straight,
11. An optical arrangement according to any one of the preceding claims. The first beam path through the beam splitter element (100) is straight,
The second beam path through the beam splitter element (100) is bent,
11. An optical arrangement according to any one of the preceding claims. Laser light source (30),
A scanner device (32),
An optical arrangement according to any one of claims 1 to 12 provided between the position of the scanner device (32) and sample (35),
Laser scanner system.