JP6523039B2 - Printed wiring board and method of manufacturing the same - Google Patents

Printed wiring board and method of manufacturing the same Download PDF

Info

Publication number
JP6523039B2
JP6523039B2 JP2015098588A JP2015098588A JP6523039B2 JP 6523039 B2 JP6523039 B2 JP 6523039B2 JP 2015098588 A JP2015098588 A JP 2015098588A JP 2015098588 A JP2015098588 A JP 2015098588A JP 6523039 B2 JP6523039 B2 JP 6523039B2
Authority
JP
Japan
Prior art keywords
printed wiring
wiring board
recess
resin
mold resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015098588A
Other languages
Japanese (ja)
Other versions
JP2016213422A (en
Inventor
聡 小田
聡 小田
Original Assignee
株式会社伸光製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社伸光製作所 filed Critical 株式会社伸光製作所
Priority to JP2015098588A priority Critical patent/JP6523039B2/en
Publication of JP2016213422A publication Critical patent/JP2016213422A/en
Application granted granted Critical
Publication of JP6523039B2 publication Critical patent/JP6523039B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Structure Of Printed Boards (AREA)

Description

本発明は、プリント配線板及びその製造方法に関する。   The present invention relates to a printed wiring board and a method of manufacturing the same.

パッケージ基板やモジュール基板の多くは、半導体素子がプリント配線板に直接搭載されて半導体素子の電極とプリント配線板上のボンディングパッドが、ワイヤボンディングやフリップチップボンディングなどの実装方法により接続されている。さらに、その実装された半導体素子を覆うようにモールド樹脂で封止されている。
そのため、そのモールド樹脂とプリント配線板との密着性が低い場合には両者が剥離してしまい、また、剥離に到らない場合でも、両者の間で接合していない箇所等が生じると、外部回路への実装時にかかる熱等により、モールド樹脂にクラックが生じることもあり、内部でワイヤの破断を引き起こす等の弊害があり、半導体装置としての信頼性を低下させるという問題を抱えている。
In many package substrates and module substrates, semiconductor elements are directly mounted on a printed wiring board, and electrodes of the semiconductor elements and bonding pads on the printed wiring board are connected by a mounting method such as wire bonding or flip chip bonding. Furthermore, it is sealed with mold resin so that the mounted semiconductor element may be covered.
Therefore, when the adhesion between the mold resin and the printed wiring board is low, the two peel off, and even if the peeling does not occur, if there is a non-joining portion between them, the outside is generated. Due to the heat applied at the time of mounting on a circuit, a crack may be generated in the mold resin, which has an adverse effect such as causing breakage of a wire inside, and has a problem of reducing the reliability as a semiconductor device.

特許文献1には、モールド樹脂とプリント配線板との密着性を向上させるために、プリント配線板の表面のモールド樹脂で封止する領域に、微細な凹凸を多数形成することにより粗面化し、モールド樹脂との密着性を向上させる技術が記載されている。
この特許文献1に記載された技術では、プリント配線板のモールド樹脂が形成される領域に、エポキシやポリイミド等の樹脂層を形成し、その樹脂層に多数の凹凸を形成して樹脂層とモールド樹脂との密着性を向上させているが、樹脂層とプリント配線板との密着性は、従来のモールド樹脂とプリント配線板との密着性と同等であると考えられる。
In Patent Document 1, in order to improve the adhesion between the mold resin and the printed wiring board, the surface of the printed wiring board is roughened by forming a large number of fine irregularities in the area sealed with the mold resin, Techniques have been described to improve the adhesion with the mold resin.
In the technique described in this patent document 1, a resin layer such as epoxy or polyimide is formed in a region where a mold resin of a printed wiring board is formed, and a large number of irregularities are formed in the resin layer to form a resin layer and a mold. Although the adhesion with the resin is improved, the adhesion between the resin layer and the printed wiring board is considered to be equivalent to the adhesion between the conventional mold resin and the printed wiring board.

さらに、特許文献2には、モールド樹脂による封止領域に、モールド樹脂が充填される凹部をプリント配線板表面の電気回路の一部に形成する技術が開示されている。
この特許文献2では、レーザー加工によるビアホール形成工程において、モールド樹脂が形成される領域に凹部を同時に形成することで工程を増加させることなくモールド樹脂が充填される凹部を形成しているが、次工程のビアフィリング処理で、形成した凹部を銅めっき層により埋められ、その銅めっき層をエッチング加工により、一定量を除去して再び凹部を形成し、その凹部にモールド樹脂を充填し、密着性を向上させる技術である。
Further, Patent Document 2 discloses a technique of forming a concave portion filled with a mold resin in a part of an electric circuit on the surface of a printed wiring board in a sealing area with a mold resin.
In this patent document 2, in the via hole forming step by laser processing, the concave portion is simultaneously formed in the region where the mold resin is formed, thereby forming the concave portion to be filled with the mold resin without increasing the number of steps. In the via filling process of the process, the formed recess is filled with a copper plating layer, and the copper plating layer is etched to remove a certain amount to form a recess again, and the recess is filled with a mold resin to obtain adhesion. Technology to improve

しかしながら、この凹部は、配線を形成するエッチング処理時間で加工できる範囲の凹部の深さであり、レーザー加工により形成した深さを活用できていないばかりか、密着性の低い金属層が凹部底に形成されているために、モールド樹脂とプリント配線板との良好な密着性を得られない問題を抱えている。   However, this recess is the depth of the recess within the range that can be processed by the etching processing time to form the wiring, and not only the depth formed by laser processing can not be used, but also the metal layer with low adhesion Because of the formation, there is a problem that good adhesion between the mold resin and the printed wiring board can not be obtained.

特開平08−102583号公報Japanese Patent Application Publication No. 08-102583 特開2015−18934号公報JP, 2015-18934, A

本発明は、上述の点を鑑みて発明したものであり、モールド樹脂とプリント配線板の密着性を高め、モールド樹脂の剥離の発生を防止するプリント配線板、及びその製造方法を提供するものである。   The present invention has been invented in view of the above-mentioned points, and provides a printed wiring board which improves the adhesion between a mold resin and a printed wiring board and prevents the occurrence of peeling of the mold resin, and a method of manufacturing the same. is there.

本発明に係るプリント配線板は、絶縁基材表面に導体による配線と、その配線上に搭載される半導体素子を有し、それらが樹脂封止されたプリント配線板であって、そのプリント配線板の樹脂封止領域には、モールド樹脂が充填されている底部が絶縁基材に達する凹部を有し、その凹部は、内壁が表面の金属層を除いた側面及び底面が絶縁基材であるプリント配線板である。
さらに、その凹部は、導体による配線がエッチング加工により形成された後にレーザー加工により加工される製造方法であり、導体による配線の形成時に凹部を形成するための開口部を配線の一部に形成するプリント配線板の製造方法である。
A printed wiring board according to the present invention is a printed wiring board having a wiring by a conductor and a semiconductor element mounted on the wiring on the surface of an insulating base material, and these are resin-sealed, and the printed wiring board In the resin-sealed area of the case, there is a recess in which the bottom filled with the mold resin reaches the insulating substrate, and in the recess, the inner wall is a printed surface whose side and bottom excluding the metal layer are the insulating substrate It is a wiring board.
Furthermore, the recess is a manufacturing method in which the conductor wiring is formed by etching and then processed by laser processing, and an opening for forming the recess is formed in part of the wiring when the conductor wiring is formed. It is a manufacturing method of a printed wiring board.

本発明の第1の発明は、絶縁基材表面に、少なくとも導体の配線と、その配線上に搭載、固定された半導体素子を有し、配線及び半導体素子を封止するモールド樹脂を備えるプリント配線板であって、プリント配線板におけるモールド樹脂が設けられた領域である樹脂封止領域で、且つ前記配線の一部に、モールド樹脂を充填する凹部を絶縁基材内部に凹部底を有する深さで備え、前記凹部の表面における前記凹部の開口部の導体を除いた側面、及び凹部底面が、絶縁基材の裸面であることを特徴とするプリント配線板である。 A first invention of the present invention is a printed wiring having on a surface of an insulating base material at least a wiring of a conductor and a semiconductor element mounted and fixed on the wiring, and including a molding resin for sealing the wiring and the semiconductor element It is a board, It is a resin sealing area which is a field in which a mold resin was provided in a printed wiring board, and it is a depth which has a crevice which fills mold resin in a part of the above-mentioned wiring inside a insulating base material. The printed wiring board according to the present invention is characterized in that the side surface of the surface of the recess excluding the conductor in the opening of the recess and the bottom surface of the recess are bare surfaces of the insulating base.

本発明の第2の発明は、第1の発明における凹部の形成が、エッチング加工による導体の配線を設けた後に、行われることを特徴とするプリント配線板の製造方法である。 A second invention of the present invention is the method of manufacturing a printed wiring board, wherein the formation of the recess in the first invention is carried out after providing the conductor wiring by etching.

本発明の第3の発明は、第2の発明における凹部の形成が、レーザー加工により行われることを特徴とするプリント配線板の製造方法である。 A third invention of the present invention is the method of manufacturing a printed wiring board, wherein the formation of the recess in the second invention is performed by laser processing.

本発明の第4の発明は、第2及び第3の発明における凹部の凹部開口部を、エッチング加工による導体の配線を設けた後に、その配線の一部に形成することを特徴とするプリント配線板の製造方法である。 According to a fourth aspect of the present invention, there is provided a printed wiring according to the second and third aspects, wherein the recess opening of the recess is formed in a part of the wiring after providing the wiring of the conductor by etching. It is a manufacturing method of a board.

本発明により、モールド樹脂密着強化用孔として備えられた凹部は、その凹部が配線領域に設けられる場合には、その配線が形成する凹部側面の金属層を除いた凹部側面及び底面が絶縁基材の裸面から構成されていることから、樹脂封止に用いるモールド樹脂が凹部に充填されることでプリント基板との密着性が向上し、剥離等の発生を防止することができる。   According to the present invention, when the recess is provided in the wiring area, the recess provided as the mold resin adhesion reinforcing hole is the recess side surface and the bottom excluding the metal layer of the recess side surface formed by the wiring is the insulating base Since it is comprised from the bare surface, adhesiveness with a printed circuit board can be improved by filling with a mold resin used for resin sealing in a crevice, and generating of exfoliation etc. can be prevented.

本発明に係るモールド樹脂密着強化用孔を備えたプリント配線板の一例を説明する部分断面図である。It is a fragmentary sectional view explaining an example of a printed wired board provided with a mold resin adhesion strengthening hole concerning the present invention. 本発明のプリント配線板の製造工程を説明する図で、(a)はプリント配線板の材料として準備した絶縁基材(絶縁層)の表裏面に導体層を有するプリント配線板用基板の断面図、(b)はビアホール4を形成するために樹脂封止側の導体層2にビア開口部4aを形成したプリント配線板の断面図、(c)はレーザー加工によりビア開口部4aに沿ってビアホール4が形成されたプリント配線板の断面図で、(d)はレーザー加工によりビアホールを形成し、形成したビアホールに対しビアフィリング処理を行い、その内壁に金属層を形成して導体層2、3を電気的につながった状態としたプリント配線板の断面図で、(e)は導体層2、3を配線とするエッチング加工を行うと同時に凹部開口部5aを配線に設けたプリント配線板の断面図で、(f)はレーザー加工により底面が絶縁基材を有する凹部を形成したプリント配線板の断面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the manufacturing process of the printed wiring board of this invention, (a) is sectional drawing of the board | substrate for printed wiring boards which has a conductor layer on front and back of the insulation base material (insulation layer) prepared as a material of a printed wiring board. (B) is a cross-sectional view of a printed wiring board in which a via opening 4a is formed in the conductor layer 2 on the resin sealing side to form the via hole 4, (c) is a via hole along the via opening 4a by laser processing 4D is a cross-sectional view of the printed wiring board on which 4 is formed. (D) is to form a via hole by laser processing, perform via filling processing on the formed via hole, and form a metal layer on the inner wall thereof; (E) is a cross-sectional view of the printed wiring board in which the recess opening 5a is provided in the wiring at the same time when the conductor layer 2, 3 is used as the wiring. Figure , (F) is a sectional view of a printed wiring board bottom surface by laser machining to form a recess having an insulating substrate.

本発明は、絶縁性の絶縁基材の表裏面に導体層を備える両面基板に、モールド樹脂密着強化用孔の凹部を形成したプリント配線板及びその製造方法であるが、この両面基板に限らず多層積層板の最外層部に適用する事が可能である。   The present invention relates to a printed wiring board in which a recess for a mold resin adhesion reinforcing hole is formed on a double-sided board provided with conductor layers on the front and back surfaces of an insulating base material and a method for manufacturing the same. It is possible to apply to the outermost layer part of a multilayer laminate.

図1は本発明に係るモールド樹脂密着強化用孔を備えたプリント配線板の一例を説明する部分断面図である。
図1において、1は絶縁基材(絶縁層)、2は樹脂封止側の導体層(配線)で、以後表面側の導体層とも称す、3は他面側の導体層(配線)で、以後裏面側の導体層と称す、4はビアホール、5は凹部(モールド樹脂密着強化用孔)、6は半導体素子、7は半田、8はモールド樹脂、9は樹脂封止領域、20はプリント配線板である。
FIG. 1 is a partial cross-sectional view for explaining an example of a printed wiring board provided with a mold resin adhesion reinforcing hole according to the present invention.
In FIG. 1, 1 is an insulating base (insulation layer), 2 is a conductor layer (wiring) on the resin sealing side, and is hereinafter also referred to as a conductor layer on the surface side, and 3 is a conductor layer (wiring) on the other side Hereinafter, the conductor layer on the back side is referred to as 4 via holes, 5 concave portions (mold resin adhesion reinforcing holes) 6 semiconductor elements, 7 solder, 8 mold resin, 9 resin sealing area, 20 printed wiring It is a board.

図1に示すように、本発明のプリント配線板20は、プリント配線板用基板の樹脂封止の領域(樹脂封止領域9)に、底面が絶縁基材1に達する凹部5を備えることによって、樹脂封止に用いるモールド樹脂8とプリント配線板用基板との密着性を高めて信頼性を向上させたプリント配線板である。   As shown in FIG. 1, the printed wiring board 20 of the present invention is provided with a recess 5 whose bottom surface reaches the insulating base 1 in the resin-sealed area (resin-sealed area 9) of the printed wiring board substrate. The printed wiring board is improved in reliability by enhancing the adhesion between the mold resin 8 used for resin sealing and the printed wiring board.

モールド樹脂密着強化用孔である凹部5の開口形状(大きさを含む)、及び深さには、製造上の指定、制限は無いが、モールド樹脂との密着性は、金属の導体層より樹脂を主体とする絶縁基材の方が良いことから、その凹部5は貫通状態では無く、絶縁基材1に凹部底5bが到達して形成されていることが好ましい。
なお、凹部の開口形状、及び凹部の深さに関しては、モールド樹脂による樹脂封止時には圧力、熱が加わる為、封止時に破壊されない厚みが残厚として絶縁基材に必要であり、開口形状についても同様に外力、熱応力の付加により絶縁基材の欠損が生じない範囲で規定されるものである。
Although the opening shape (including the size) and depth of the recess 5 which is a mold resin adhesion reinforcing hole are not specified or limited in manufacturing, the adhesion to the mold resin is higher than that of the metal conductor layer. It is preferable that the concave portion 5 is not in a penetrating state, and the concave portion bottom 5b is formed so as to reach the insulating substrate 1 because the insulating base mainly composed of is preferable.
With regard to the opening shape of the recess and the depth of the recess, pressure and heat are applied during resin sealing with a mold resin, so a thickness not broken at the time of sealing is required for the insulating base material as a remaining thickness. Similarly, it is specified in the range where the loss of the insulating base does not occur by the application of external force or thermal stress.

また、絶縁基材1には、市販のコア材、プリプレグに加え、シート状、フィルム状、または半硬化の液状樹脂を用いる。
樹脂成分には指定は無く、エポキシ樹脂、フェノール樹脂、ポリイミド樹脂、フッ素含有樹脂、ポリエステル樹脂、ポリフェニレンオキサイド樹脂等を単体または複数樹脂の混合物で使用する。
さらに、各種添加剤や充填剤を調合したり、補強材としてガラス等の無機繊維、ポリエステル樹脂、ポリイミド樹脂、各種天然繊維等の有機繊維を使用しても良い。
In addition to a commercially available core material and a prepreg, a sheet-like, film-like or semi-hardened liquid resin is used as the insulating base 1.
The resin component is not specified, and an epoxy resin, a phenol resin, a polyimide resin, a fluorine-containing resin, a polyester resin, a polyphenylene oxide resin or the like is used as a single substance or a mixture of a plurality of resins.
Furthermore, various additives and fillers may be prepared, or inorganic fibers such as glass, organic fibers such as polyester resin, polyimide resin and various natural fibers may be used as a reinforcing material.

[プリント配線板の製造方法]
次に、図2を参照して、本発明に係るプリント配線板の製造方法を説明する。
絶縁基材1の表裏両面に導体層2及び3を備えたプリント配線板用基板10を用意する(図2(a)参照)。
[Method of manufacturing printed wiring board]
Next, with reference to FIG. 2, a method of manufacturing a printed wiring board according to the present invention will be described.
A printed wiring board substrate 10 provided with conductor layers 2 and 3 on both the front and back sides of the insulating base 1 is prepared (see FIG. 2A).

ビアホール(バイアホールとも称す)4を形成するためのビア開口部4aを設けるための所定のレジストマスクを導体層2上に形成した。
次に、エッチング加工によって導体層2にビア開口部4aの形成を行った(図2(b)参照)。
A predetermined resist mask for forming via openings 4 a for forming via holes (also referred to as via holes) 4 was formed on conductor layer 2.
Next, the via opening 4a was formed in the conductor layer 2 by etching (see FIG. 2 (b)).

次に、レジストマスクを剥離後、レーザー加工によってビアホール4を形成した(図2(c)参照)。
このレーザー加工には炭酸ガスレーザー、UVレーザー、エキシマレーザー等が使用出来るが、樹脂を除去出来る波長であれば特に指定は無い。また事例ではコンフォーマル法としているが、開口部にダイレクトにレーザー加工する事も可能である。
Next, after peeling off the resist mask, a via hole 4 was formed by laser processing (see FIG. 2C).
A carbon dioxide gas laser, a UV laser, an excimer laser or the like can be used for this laser processing, but there is no particular specification as long as the resin can be removed. In the example, the conformal method is used, but it is also possible to perform laser processing directly on the opening.

次に、形成したビアホール4の内面を銅めっきして表裏の導体層2、3が、電気的接続が可能となるようビアフィリング処理をした(図2(d)参照)。   Next, the inner surface of the formed via hole 4 is plated with copper, and via filling processing is performed so that the conductor layers 2 and 3 on the front and back can be electrically connected (see FIG. 2D).

次に、導体層2、3を必要な配線パターンに形成するために、導体層2、3上にレジストマスク(図示せず)を形成し、エッチング処理を行い、配線2、3を形成した。
このエッチング処理に使用する薬液には指定は無く、硫酸−過酸化水素、塩化第二鉄、塩化第二銅等の銅をエッチングする事が可能な薬液の中から選択すれば良い。
このエッチング処理時に、モールド樹脂による樹脂封止領域9に形成される配線2の一部に、ビアホールを形成する場合と同じく凹部開口部5aを有する配線として形成した(図2(e)参照)。
Next, in order to form the conductor layers 2 and 3 in the necessary wiring pattern, a resist mask (not shown) was formed on the conductor layers 2 and 3 and etching was performed to form the wirings 2 and 3.
The chemical solution used for this etching process is not specified, and may be selected from chemical solutions capable of etching copper such as sulfuric acid-hydrogen peroxide, ferric chloride, cupric chloride and the like.
At the time of this etching process, a part of the wiring 2 formed in the resin-sealed region 9 with the mold resin was formed as a wiring having the recess opening 5a as in the case of forming the via hole (see FIG. 2E).

次に、レジストマスクを剥離した後、レーザー加工によって絶縁基材1を掘り起し、所定の深さの非貫通(絶縁基材1内に底面(凹部底5b)を有する)のビアホールを形成することでモールド樹脂が充填される凹部5を形成した(図2(f)参照)。
その後、半導体素子の搭載、結線を経た後、樹脂封止領域をモールド樹脂により樹脂封止を行い、所望のプリント配線板20を作製する。
Next, after peeling off the resist mask, the insulating substrate 1 is dug up by laser processing to form a non-penetrating via hole (having a bottom surface (having a recess bottom 5b) in the insulating substrate 1) of a predetermined depth. Thus, the concave portion 5 filled with the mold resin was formed (see FIG. 2 (f)).
Thereafter, after the semiconductor element is mounted and connected, the resin-sealed region is resin-sealed with a mold resin, and a desired printed wiring board 20 is manufactured.

1 絶縁基材(絶縁層)
2 表面側の導体層(配線)
3 他面側の導体層(配線)
4 ビアホール
4a ビア開口部
5 凹部(モールド樹脂密着強化用孔)
5a 凹部開口部
5b 凹部底
6 半導体素子
7 半田
8 モールド樹脂
9 樹脂封止領域
10 プリント配線板用基板
20 プリント配線板
1 Insulating substrate (Insulating layer)
2 Conductor layer on the front side (wiring)
3 Conductor layer on the other side (wiring)
4 via hole 4 a via opening 5 recess (hole for adhesion to mold resin)
5a recessed portion opening 5b recessed portion bottom 6 semiconductor element 7 solder 8 mold resin 9 resin sealing region 10 printed wiring board substrate 20 printed wiring board

Claims (4)

絶縁基材表面に、少なくとも導体の配線と、前記配線上に搭載、固定された半導体素子を有し、前記配線及び半導体素子を封止したモールド樹脂を備えるプリント配線板であって、
前記プリント配線板における前記モールド樹脂が設けられた領域である樹脂封止領域で、且つ前記配線の一部に、前記モールド樹脂を充填する凹部を前記絶縁基材内部に凹部底を有する深さで備え、
前記凹部の表面における前記凹部の開口部の導体を除いた側面、及び凹部底面が、絶縁基材の裸面であることを特徴とするプリント配線板。
A printed wiring board comprising on a surface of an insulating base material at least a wiring of a conductor and a semiconductor element mounted and fixed on the wiring, wherein the printed wiring board comprises a mold resin sealing the wiring and the semiconductor element,
In the resin-sealed region which is the region where the mold resin is provided in the printed wiring board, and in a part of the wiring, a concave portion filled with the mold resin has a depth having a concave bottom inside the insulating base Equipped
A printed wiring board, wherein the side surface of the opening of the recess excluding the conductor and the bottom surface of the recess on the surface of the recess are bare surfaces of the insulating base.
前記凹部の形成が、エッチング加工による導体の配線を設けた後に、行われることを特徴とする請求項1に記載のプリント配線板の製造方法。   The method for manufacturing a printed wiring board according to claim 1, wherein the formation of the recess is performed after providing a conductor wiring by etching. 前記凹部の形成が、レーザー加工により行われることを特徴とする請求項2に記載のプリント配線板の製造方法。   The method for manufacturing a printed wiring board according to claim 2, wherein the formation of the concave portion is performed by laser processing. 前記凹部の凹部開口部を、エッチング加工による導体の配線を設けた後に、前記配線の一部に形成することを特徴とする請求項2又は3に記載のプリント配線板の製造方法。   The method for manufacturing a printed wiring board according to claim 2 or 3, wherein the recess opening portion of the recess is formed in a part of the wiring after providing a conductor wiring by etching.
JP2015098588A 2015-05-13 2015-05-13 Printed wiring board and method of manufacturing the same Expired - Fee Related JP6523039B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015098588A JP6523039B2 (en) 2015-05-13 2015-05-13 Printed wiring board and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015098588A JP6523039B2 (en) 2015-05-13 2015-05-13 Printed wiring board and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JP2016213422A JP2016213422A (en) 2016-12-15
JP6523039B2 true JP6523039B2 (en) 2019-05-29

Family

ID=57552063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015098588A Expired - Fee Related JP6523039B2 (en) 2015-05-13 2015-05-13 Printed wiring board and method of manufacturing the same

Country Status (1)

Country Link
JP (1) JP6523039B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111952198B (en) * 2020-08-25 2022-09-13 嘉兴启创科技咨询有限公司 Semiconductor package and preparation method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH031540U (en) * 1989-05-26 1991-01-09
JPH06112363A (en) * 1992-09-25 1994-04-22 Matsushita Electric Works Ltd Semiconductor package
KR100206894B1 (en) * 1996-03-11 1999-07-01 구본준 Bga package
JP2000040774A (en) * 1998-07-24 2000-02-08 Kyocera Corp Semiconductor device
JP5522225B2 (en) * 2012-10-02 2014-06-18 株式会社デンソー Manufacturing method of electronic device
JP6210533B2 (en) * 2013-07-11 2017-10-11 株式会社伸光製作所 Printed circuit board and manufacturing method thereof

Also Published As

Publication number Publication date
JP2016213422A (en) 2016-12-15

Similar Documents

Publication Publication Date Title
JP6427817B2 (en) Printed circuit board and manufacturing method thereof
TWI602270B (en) Chip-embedded printed circuit board and semiconductor package using the pcb, and manufacturing method of the pcb
US9775237B2 (en) Wiring substrate and method for manufacturing the same
US20100224397A1 (en) Wiring board and method for manufacturing the same
JP5140046B2 (en) Heat dissipation board and method for manufacturing the same
JP2008131039A (en) Manufacturing method of electronic element built-in type printed circuit board
US10674604B2 (en) Printed wiring board and method for manufacturing the same
KR102538908B1 (en) Printed circuit board and method for manufacturing the same
US9706663B2 (en) Printed wiring board, method for manufacturing the same and semiconductor device
JP2016063130A (en) Printed wiring board and semiconductor package
JP5555368B1 (en) Wiring board manufacturing method
US20150319842A1 (en) Circuit board and method for manufacturing the same
KR101874992B1 (en) A printed circuit board comprising embeded electronic component within and a method for manufacturing the same
US11222791B2 (en) Printed wiring board and method for manufacturing printed wiring board
US8525041B2 (en) Multilayer wiring board and method for manufacturing the same
JP2008124247A (en) Substrate with built-in component and its manufacturing method
KR20090096809A (en) Method of manufacturing semiconductor chip embedded printed circuit board
JP2018022824A (en) Electronic component built-in substrate, manufacturing method, and electronic component device
TW201444440A (en) Printed circuit board and fabricating method thereof
JP6523039B2 (en) Printed wiring board and method of manufacturing the same
KR100704911B1 (en) Electronic chip embedded pcb and method of the same
JP6210533B2 (en) Printed circuit board and manufacturing method thereof
JP2018006450A (en) Electronic component built-in substrate, manufacturing method thereof and electronic component device
JP2009267061A (en) Method of manufacturing wiring board
JP2007324232A (en) Bga-type multilayer wiring board and bga-type semiconductor package

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170830

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180416

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180423

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180619

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180622

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20181002

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20181129

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190402

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190425

R150 Certificate of patent or registration of utility model

Ref document number: 6523039

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees