JP6504497B2 - Touch panel and transparent conductive substrate - Google Patents

Description

  The present invention relates to a touch panel and a transparent conductive substrate. More specifically, the present invention relates to a touch panel and a transparent conductive substrate capable of solving the problems related to the visibility caused by the presence of the electrode portions arranged apart on one surface.

  The touch panel is a component of an input device that allows an operator to touch a transparent surface on a display screen with a finger or a pen to detect a position where data is touched and to input data, and is more direct than key input. Enables intuitive input. For this reason, in recent years, in addition to televisions and computers, they are widely used in operation units of various electronic devices such as mobile phones, portable information terminals represented by smartphones and tablets, car navigation systems, and the like.

The touch panel can be used as an input device by bonding on a display screen of a flat panel display device such as a liquid crystal panel. For example, as shown in FIG. 15, the touch panel is disposed on a liquid crystal panel or the like, and is operated by touching the operation surface 111a.
There are various detection methods of such a touch panel, such as a resistance type, a capacitance type, an ultrasonic type, an optical type, etc., and their structures become diverse.
Capacitive touch panels can be roughly classified into surface-type and projection-type. In the surface mold, it is difficult to simultaneously detect two or more contact points. Since the projection type can simultaneously detect two or more touch points, it is noted in the field where multi-touch specification is required.

  In the display area in the projection type of the capacitive touch panel, electrode portions in the form of a matrix in the X and Y directions are formed on a transparent substrate using a material such as a transparent conductive film. As an example of composition of such an electrode part, a rice field electrode and a rhombus electrode are mentioned, for example. In the case of the field electrode, the upper and lower wires are orthogonally arranged to arrange the electrodes in a field shape, and are used in the mutual capacitance method. On the other hand, the rhombus electrodes are formed by connecting rhombus-shaped electrodes in the X direction and the Y direction and arranging them in a lattice, and are used in a self-capacitance system (Patent Document 1).

FIG. 14 is a schematic view showing an example of the configuration of a Tagata electrode, and (a) a plan view showing an example of a touch panel provided with a display area (also referred to as an effective touch area) in which the electrode portion is arranged; It is an enlarged plan view of an electrode part in a specific region σ in the figure, (c) an enlarged sectional view of an electrode portion in a specific region σ.
In the display area (also referred to as an effective touch area) 116 of the touch panel 110 shown in FIG. 14, the first electrode layer (RX) 112, the insulating layer 113, and the second electrode layer (TX) 114 are sequentially stacked on the transparent substrate 111. ing. Each of the first electrode layer (RX) 112 and the second electrode layer (TX) 114 is made of a transparent conductive film such as ITO, and forms a plurality of electrode portions arranged in parallel with a predetermined distance apart. There is.

As the transparent substrate 111, for example, a transparent substrate such as glass or a heat-resistant transparent plastic such as PET is used. The first electrode layer (RX) 112 and the second electrode layer (TX) 114 are formed of a material having both conductivity and transparency, for example, a transparent conductive material such as ITO (Indium Oxide: Indium Tin Oxide).
Further, around the display area 116, as shown in FIG. 10, each of a plurality of X electrode portions consisting of a first electrode layer (RX) 112 and a plurality of Y electrodes consisting of a second electrode layer (TX) 114 A plurality of wirings 117 which lead the wirings from each part to the peripheral parts in the vertical and horizontal directions and reach the terminal part (not shown) are arranged.

In the field electrode, the longitudinal direction of the lower electrode consisting of the first electrode layer (RX) 112 and the longitudinal direction of the upper electrode consisting of the second electrode layer (TX) 114 are arranged to be orthogonal to each other. In this configuration, there are the following two problems.
(A) In the crossing portion K [hatched area in FIG. 14 (b)], the thickness obtained by overlapping three layers [first electrode layer (RX) 112, insulating layer 113, and second electrode layer (TX) 114] On the other hand, in the separated portion of the lower electrode, the thickness is reduced by the loss of the first electrode layer (RX) 112 [FIG. 14 (c)]. Therefore, the upper electrode loses its flatness and becomes unstable in conductivity.
(B) When viewed from the transparent substrate 21 side, the laminated pattern of the film is different between the region with the lower electrode (crossing point K) and the region without the lower electrode (separate portion), so the electrode pattern can be easily seen And the visibility decreases ("the bone appearance phenomenon" in Patent Document 1).

  Conventionally, as a solution of the above (b), a method of providing an index matching layer (IM layer) as an optical adjustment layer between the transparent substrate 21 and the first electrode layer (RX) 112 is adopted. (Patent Document 2). The IM layer functions to make the ITO electrode pattern after the etching process inconspicuous, but the presence thereof causes the reduction of the transparency throughout the display area 116.

JP, 2013-140229, A JP, 2014-67236, A

  The present invention has been made in view of the above circumstances, and the electrode portion is made of a transparent conductive film having high transmittance, and the transparent conductive film has a flat film surface, thereby stabilizing the function as the conductive film. And by providing the structure which does not require IM layer, it aims at providing the touch panel which has the outstanding visibility.

The touch panel according to a first aspect of the present invention is a touch panel including a transparent substrate and a plurality of electrode portions made of a transparent conductive film provided in a display area of the transparent substrate, wherein the transparent conductive film is flat. It has a film surface and is composed of a low resistance part and a high resistance part localized in the film surface, and the electrode part consists of the low resistance part of the transparent conductive film, and the electrode part and the high resistance portion is arranged in what is between, before Symbol display region has a structure of the transparent conductive film, a first transparent conductive film, the second transparent conductive film, and a third transparent conductive film And one electrode portion comprising a low resistance portion of the first transparent conductive film, and a low resistance of the third transparent conductive film, viewed from the direction in which the display region is viewed in a plan view. And the other electrode part comprising the part have a crossing part, Conductive film, a region overlapping with at least the intersection, characterized in that it is composed of a high-resistance portion.
The touch panel according to claim 2 of the present invention, in claim 1, together with the display area, even in a peripheral region surrounding the display region has a structure of the transparent conductive film, a first transparent conductive film, the second A transparent conductive film and a third transparent conductive film are sequentially stacked from the transparent substrate side, and one of the electrode parts comprising the low resistance portion of the third transparent conductive film as viewed from the direction in which the outer peripheral region is viewed in cross section And the other electrode portion are respectively disposed in a range constituting different sides of the outer peripheral area, and are electrically connected to the configuration in the display area of claim 1. Do.

The touch panel according to a third aspect of the present invention is the touch panel according to the first aspect, wherein the fourth transparent conductive film, the fifth transparent conductive film, and the sixth transparent conductive film have the configuration of the transparent conductive film in the display area. Are sequentially stacked from the transparent substrate side, and when viewed from the direction in which the display region is viewed in plan, one electrode portion formed of the low resistance portion of the fourth transparent conductive film and the other electrode portion have an intersection portion. And sandwiching the high resistance portion of the fifth transparent conductive film so that every other one of the electrode portions is electrically connected to the crossing portion across the other electrode portion. And a conductive portion including a low resistance portion of the fifth transparent conductive film and a low resistance portion of the sixth transparent conductive film.

The touch panel according to a fourth aspect of the present invention is the touch panel according to the first aspect, wherein the seventh transparent conductive film, the eighth transparent conductive film, and the ninth transparent conductive film have the configuration of the transparent conductive film in the display region. And the tenth transparent conductive film are sequentially stacked from the transparent substrate side, and one of the electrode portions consisting of the low resistance portion of the tenth transparent conductive film and the other electrode portion have the seventh to ninth different layers. It is characterized in that it is arranged to be electrically connected to any conductive film selected from the transparent conductive films.
According to a fifth aspect of the present invention, in the touch panel according to the fourth aspect of the present invention, when viewed from a direction in which the display area is viewed in cross section, one electrode portion and the other electrode portion consisting of low resistance portions of the tenth transparent conductive film. Are respectively electrically connected to the low resistance portion of the seventh transparent conductive film and the low resistance portion of the eighth transparent conductive film in different layers, and the display area is viewed in a plan view as viewed from above. A direction in which the low resistance portion of the seventh transparent conductive film is extended is parallel to a direction in which the low resistance portion of the eighth transparent conductive film is extended. .
According to a sixth aspect of the present invention, in the touch panel according to the fourth aspect of the present invention, when viewed from a direction in which the display area is viewed in cross section, one electrode portion and the other electrode portion consisting of low resistance portions of the tenth transparent conductive film. Are respectively electrically connected to the low resistance portion of the seventh transparent conductive film and the low resistance portion of the ninth transparent conductive film in different layers, and the display area is viewed in a plan view as viewed from above. The direction in which the low resistance portion of the seventh transparent conductive film is extended and the direction in which the low resistance portion of the ninth transparent conductive film is extended are configured to be orthogonal to each other. .

The touch panel according to a seventh aspect of the present invention is the seventh transparent conductive film according to the fifth or sixth aspect , having the configuration of the transparent conductive film in the display area and also in an outer peripheral area surrounding the display area. An eighth transparent conductive film, a ninth transparent conductive film, and a tenth transparent conductive film are sequentially stacked from the transparent substrate side, and the lower of the tenth transparent conductive film is viewed from the direction in which the outer peripheral region is viewed in cross section. One electrode portion comprising the resistance portion and the other electrode portion are respectively disposed in a range constituting different sides of the outer peripheral region, and the configuration and electricity in the display region according to claim 5 or 6 It is characterized in that it is connected.
According to an eighth aspect of the present invention, in the touch panel according to any one of the first to seventh aspects, between the transparent substrate and the transparent conductive film and / or on the transparent conductive film, An antireflective layer is disposed.

The transparent conductive film forming the plurality of electrode portions in the touch panel of the present invention is not a structure in which a portion is removed and the remaining portion forms the electrode portion as in the prior art, but low resistance portions and high resistance portions localized in the film surface It is configured. And the electrode part in the touch panel of this invention is comprised from the said low resistance part among this transparent conductive film, and the said high resistance part is distribute | arranged between these electrode parts.
That is, since the film is continuous on the surface of the transparent conductive film in the touch panel of the present invention, the difference in level between the portion from which the film is removed and the portion (electrode portion) from which the film is left It is possible to solve the problem resulting from it, that is, the problem that the electrode pattern is easily seen and the visibility is reduced.
Therefore, this invention contributes to provision of the touch panel which has the outstanding visibility by having a structure in which an electrode part consists of a transparent conductive film with a high transmittance | permeability, and does not require IM layer.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows one Embodiment of the touch panel which concerns on this invention, (a) is a whole top view, (b) is an enlarged plan view which shows one part (alpha) of a display area, (c) is an expansion corresponding to (b) Cross section. BRIEF DESCRIPTION OF THE DRAWINGS The schematic cross section which shows an example of a display apparatus provided with the touch panel which concerns on this invention. The schematic block diagram which shows an example of the manufacturing apparatus which forms an oxide film and a transparent conductive film. The schematic cross section which shows the method to replace the low resistance part of a transparent conductive film to high resistance value. FIG. 5 is a graph showing the results of changes in resistance using the method of FIG. 4; It is a figure showing other embodiments of a touch panel concerning the present invention, and (a) is a model top view, (b) is an enlarged plan view showing a part beta 1 of a display field, (c) corresponds to (b) An expanded sectional view. It is a figure which shows the other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows part beta 2 around a display area, (c) is in (b) The corresponding two enlarged sectional views. It is a figure which shows other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows a part (gamma) of a display area, (c) respond | corresponds to (b) An expanded sectional view. It is a figure which shows other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows partial (delta) 1 of a display area, (c) respond | corresponds to (b) An expanded sectional view. It is a figure which shows other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows partial (delta) 2 of a display area, (c) respond | corresponds to (b) An expanded sectional view. It is a figure which shows other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows partial (delta) 3 of a display area, (c) respond | corresponds to (b) An expanded sectional view. It is a figure which shows the other embodiment of the touch panel which concerns on this invention, (a) is a model top view, (b) is an enlarged plan view which shows one part (epsilon) around a display area, (c) is in (b) The corresponding enlarged sectional view. It is a figure which shows other embodiment of the touch panel which concerns on this invention, and is a schematic cross section which shows the structural example which provided the reflection preventing layer. It is a figure which shows the conventional touch panel, (a) is a model top view, (b) is an enlarged plan view which shows one part (sigma) of a display area, (c) is an expanded sectional view corresponding to (b). The schematic cross section which shows an example of the display apparatus provided with the conventional touch panel.

Hereinafter, an embodiment of a touch panel according to the present invention will be described based on the drawings.
First Embodiment
FIG. 1 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part α of the display area, and (c) is an enlarged view corresponding to (b) FIG. FIG. 2: is a schematic cross section which shows an example of a display apparatus provided with a touch panel.

The touch panel 10 in the present embodiment is, as shown in FIG. 1 and FIG. 2, a capacitive touch panel that is disposed on the display panel 2 such as liquid crystal or organic EL, and is operated by touching the operation surface 11 a.
Such a touch panel 10 is, as shown in FIG. 1, a plurality of transparent substrates 11 and a plurality of transparent conductive films 12 provided in the display area 16 on the back surface 11 b side of the operation surface 11 a of the transparent substrate 11. And the electrode portion 12L (12La, 12Lb).

  The transparent conductive film 12 is composed of a low resistance portion 12L and a high resistance portion 12H localized in the film surface by a method described later, and as described above, the electrode portions 12L (12La, 12Lb) The transparent conductive film 12 is composed of a low resistance portion. The high resistance portion 12H is disposed between the electrode portions 12L (12La, 12Lb).

  Further, as shown in FIG. 1, in the periphery 16os of the display area 16, the wires from the plurality of electrode portions 12L (12La, 12Lb) made of the transparent conductive film 12 are led to the peripheral portions in the A plurality of wires 17 leading to the unshown) are arranged.

  According to the above configuration, the transparent conductive film 12 in the touch panel 10 of the present invention is composed of the low resistance portion 12L and the high resistance portion 12H in which the film surface is localized. Has a profile that As a result, the problem caused by the difference in level between the “portion where the film is left (electrode portion)” and the “portion where the film is removed (separation portion)” as in the prior art is the touch panel 10 of the present invention. In principle, the transparent conductive film 12 does not occur. Therefore, in the touch panel 10 of the present invention, “the problem that the electrode pattern is easy to see and the visibility is reduced” is solved.

  Conventionally, in order to obtain an electrode part, it is necessary to form a separation part by an etching process etc., and the etching easiness was calculated | required by the transparent conductive film. Therefore, satisfying etchability is a priority, and it is not possible to select a transparent conductive film with high transmittance, and the visibility is sacrificed. On the other hand, since the present invention does not require the ease of etching which is essential for obtaining the conventional electrode part, it has become possible to select a transparent conductive film having a high transmittance.

In addition, as described above, the conventional touch panel is required to include the IM layer in order to reduce the influence of the inherent step. On the other hand, since the transparent conductive film 12 which comprises the touch panel 10 of this invention does not have a level | step difference like before, the touch panel 10 of this invention does not need to provide IM layer. Therefore, the touch panel 10 of the present invention can also eliminate optical disadvantages such as a decrease in transmittance due to the provision of the IM layer.
Therefore, this invention contributes to provision of the touch panel which has the outstanding visibility by having a structure in which an electrode part consists of a transparent conductive film with a high transmittance | permeability, and does not require IM layer.

Furthermore, in the touch panel 10 of the present invention, by adopting the transparent conductive film 12 having the above configuration, the interface between the transparent substrate 11 and the transparent conductive film 12 and the surface of the transparent conductive film are both continuous films. The shape, i.e. a flat membrane surface is maintained.
Therefore, according to the present invention, the flatness of the insulating film and the upper electrode layer stacked on the transparent conductive film 12 can be secured, and the stability of the function of the film such as conductivity can be secured. .
Furthermore, a configuration in which an anti-reflection layer (AR layer) is additionally disposed between the transparent substrate 11 and the transparent conductive film 12 or on the surface of the transparent conductive film 12 (configuration shown in FIG. 13) By adopting this, it is possible to construct a touch panel that also has an extremely stable reflection preventing ability.

<Production method>
Below, the manufacturing method of the transparent conductive film 12 which comprises the touch panel 10 of this invention mentioned above is demonstrated. The transparent conductive film 12 is composed of a low resistance part 12L and a high resistance part 12H localized in the film plane, and the electrode part 12L (12La, 12Lb) is composed of the low resistance part of the transparent conductive film 12 The high resistance portion 12H is disposed between the electrode portions 12L (12La, 12Lb).

  The following manufacturing method will be described on the premise of a layer configuration in which an oxide film is provided as a base layer before forming a transparent conductive film. This oxide film functions as a structure that suppresses the gas released from the substrate when a heat-resistant transparent plastic substrate such as PET is used as the transparent substrate, but the oxide film is necessarily provided when the substrate is glass or the like. There is no need.

(1) Preparation of Oxide Film and Transparent Conductive Film As a manufacturing apparatus for forming an oxide film and a transparent conductive film on a transparent substrate, for example, an interback type sputtering apparatus as shown in FIG. 3 is used.
In the manufacturing apparatus 50 of FIG. 3, the substrate 58 (corresponding to the transparent substrate 11) is a loading / unloading chamber (L / UL) 51, a heating chamber (H) 52, a first film forming chamber S1) 53, the inside of the second film forming chamber (S2) 54 is movable.
Exhaust means 51P, 52P, 53P, 54P for individually reducing the pressure in the internal space are disposed in the respective chambers 51, 52, 53, 54 described above.

  First, the substrate 58 is introduced from the manufacturing apparatus from the outside (atmospheric atmosphere) into the loading and unloading chamber 51 which is at atmospheric pressure. Thereafter, the loading and unloading chamber 51 is brought into a reduced pressure atmosphere using the exhaust means 51P. Next, the substrate 58 is transferred from the loading / unloading chamber 51 in a reduced pressure atmosphere to the heating chamber 52, and a desired heat treatment is performed by the heating unit 59.

Next, the substrate 58 after the heat treatment is conveyed from the heating chamber 52 to the first film forming chamber 53, and passes in front of the target 62 made of silicon oxide disposed on the inner surface 53b side of the first film forming chamber 53. Thus, an oxide film (SiO ₂ ) is formed on the substrate 58. At that time, the substrate 58 is brought to a desired temperature by the temperature control means 61 provided on the side of the inner surface 53 a facing the inner surface 53 b of the first film forming chamber 53. The target 62 is mounted on a backing plate 63, and at the time of sputtering, a desired process gas is introduced from a gas supply source 65, and the backing plate 63 is supplied with desired power from a power supply 64.

  Thereafter, the substrate 58 on which the oxide film is formed is transferred from the first film forming chamber 53 to the second film forming chamber 54 and passes in front of the target 72 made of ITO to form a transparent conductive film (on the oxide film). Form ITO). At that time, the substrate 58 is brought to a desired temperature by the temperature control means 71. The target 72 is mounted on a backing plate 73. During sputtering, a desired process gas is introduced from a gas supply source 75, and the backing plate 73 is supplied with desired power from a power supply 74.

Then, the substrate 58 on which the oxide film and the transparent conductive film are formed is transported from the second film forming chamber 54 to the loading and unloading chamber 51, and is taken out from the manufacturing apparatus to the outside (atmospheric atmosphere).
Next, post-processing (air atmosphere, 135 ° C., annealing for 60 minutes) is performed on the substrate 58 on which the oxide film and the transparent conductive film are formed. By performing such post-treatment, a transparent conductive film having a resistivity of about 150 Ω / □ can be obtained.

Table 1 shows typical preparation conditions of the oxide film and the transparent conductive film described above.
(2) Preparation of Low Resistance Portion and High Resistance Portion for Transparent Conductive Film The transparent conductive film of the substrate 58 obtained in the step (1) is subjected to oxygen plasma treatment using a reactive ion etching apparatus.
FIG. 4 is an image view showing a state in which the transparent conductive film is subjected to plasma processing.
As shown in FIG. 4, low resistance in the transparent conductive film is achieved by irradiating the transparent conductive film with oxygen plasma (indicated as “O in small circle”) across the mask having the opening. We make part and high resistance part separately.
That is, in the transparent conductive film, the region shielded from the plasma due to the presence of the mask has no change in the amount of carriers contained in the film, and the low specific resistance (about 150 Ω / □) state is maintained. It becomes resistance part L.
On the other hand, in the transparent conductive film, the area irradiated with the plasma through the opening of the mask changes to a high specific resistance (about 740 Ω / □) state due to a decrease in the amount of carriers contained in the film. And the high resistance portion H.
The resistivity of the transparent conductive film before and after the above-mentioned plasma treatment is shown in the graph of FIG.

Therefore, low resistance in the transparent conductive film can be achieved simply by performing plasma treatment on the surface of the transparent conductive film through a mask having an opening that is matched to the region to be changed from the low resistance portion to the high resistance portion. It has been found that the portion and the high resistance portion can form a localized state in a desired pattern.
Table 2 shows manufacturing conditions for forming the high resistance portion from the low resistance portion by the above-described plasma treatment.

  Since oxygen plasma treatment causes etching by oxygen plasma in the region irradiated with plasma through the opening of the mask, a slight decrease in film thickness occurs with respect to the untreated portion. However, the surface of the transparent conductive film in which the low resistance portion and the high resistance portion are localized in a desired pattern is flat compared to the configuration in which the electrode film itself is deficient as shown in FIG. 14C. It is possible to secure the flatness of the upper electrode formed in the upper layer.

The method of changing from the low resistance portion to the high resistance portion of the transparent conductive film is not limited to the above-described plasma treatment, and for example, the same action and effect can be obtained even by using the ion doping method. it can.
Moreover, the manufacturing method which makes a low resistance part and a high resistance part separately in a transparent conductive film is not limited to said method. That is, first, the transparent conductive film of the high resistance portion is formed by sputtering, and then, for example, by annealing treatment such as laser irradiation or lamp heating, a specific region of the high resistance portion is changed to a low resistance portion by oxidation reduction. You may adopt the method of making it.

Second Embodiment
FIG. 6 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part β1 of the display area, (c) is a line shown in (b) It is an expanded sectional view corresponding to B-B.
The present embodiment is a case where the electrode structure forms a square electrode, and all the layers 22, 23, 24 are formed of a transparent conductive film. That is,
In the touch panel 20 according to the present embodiment, any of the first transparent conductive film 22, the second transparent conductive film 23, and the third transparent conductive film 24 stacked in order from the transparent substrate 21 side in the display region 26 is used. The configuration of the transparent conductive film described above (a configuration in which the low resistance portion and the high resistance portion are localized in the transparent conductive film described in the first embodiment) is provided.

When viewed from the direction in which the display area 26 is viewed in plan, one electrode portion RX formed of the low resistance portion L of the first transparent conductive film 22 and the other electrode portion formed of the low resistance portion L of the third transparent conductive film 24 TX has a crossing portion K [hatched area in FIG. 6 (b)].
Then, in the second transparent conductive film 23, at least a region overlapping with the intersection portion K is configured by the high resistance portion H.

  Further, as shown in FIG. 6, around the display area 26, each of a plurality of X electrode portions including the first electrode layer (RX) 22 and a plurality of Y electrodes including the second electrode layer (TX) 24. A plurality of wirings 27 which lead wirings from each of the parts to peripheral parts in the vertical and horizontal directions and reach a terminal part (not shown) are arranged.

The low resistance portion L and the high resistance portion H in the first transparent conductive film 22, the second transparent conductive film 23, and the third transparent conductive film 24 are manufactured by the method described in the first embodiment.
Thereby, the touch panel 20 can obtain the actions and effects described below.
(2a) The first transparent conductive film 22 disposed on the transparent substrate 21 is a continuous film having a macroscopically flat surface. The low resistance portion L forming the electrode portion and the high resistance portion H located between the electrode portions differ only in their electrical characteristics and have the same film thickness. Therefore, since there is no difference in film thickness between the two, it is difficult to see the electrode pattern, and good visibility is ensured.

(2b) The electrode structure (tag electrode) in this embodiment is a continuous film having a macroscopically flat surface, three films (a first transparent conductive film 22, a second transparent conductive film 23, a third transparent The conductive film 24) is stacked. Therefore, the outermost surface in which three films (the first transparent conductive film 22, the second transparent conductive film 23, and the third transparent conductive film 24) are stacked on the transparent substrate, that is, the surface of the third transparent conductive film 24 is Since all three films are continuous films, they naturally have a macroscopically flat surface profile. Therefore, in spite of the existence of the intersection K, no level difference occurs at the boundary between the intersection K and the other. Therefore, in the touch panel according to the present embodiment, “the problem that a level difference is caused due to the intersection, the flatness of the upper electrode is impaired, and the conductivity becomes unstable” is eliminated over the entire display region 26 .

Third Embodiment
FIG. 7 is a view showing the touch panel in the present embodiment, (a) is a whole plan view, (b) is an enlarged plan view showing a part β2 including a display area and an outer peripheral area, (c) is (b) (D) is an expanded sectional view corresponding to line segment B3-B3 shown to (b) corresponding to line segment B2-B2 shown to.

The present embodiment (third embodiment) is a derivative of the above-described second embodiment (when the electrode structure is a square electrode), and all the layers 22, 23, 24 are formed of a transparent conductive film. That is,
The touch panel 20 according to the present embodiment has the configuration of the transparent conductive film in the display area 26 and also in the outer peripheral area 26os surrounding the display area 26. That is, the first transparent conductive film 22, the second transparent conductive film 23, and the third transparent conductive film 24 stacked in this order from the transparent substrate 21 side all have the above-described configuration of the transparent conductive film (first The configuration in which the low resistance portion and the high resistance portion are localized in the transparent conductive film described in the second embodiment is provided.

  In addition, when viewed from the direction in which the outer peripheral region 26os is viewed in cross section, one electrode portion 24 (RX) and the other electrode portion 24 (TX), which are low resistance portions of the third transparent conductive film 24, respectively Among the regions, a range forming different sides [in FIG. 7B, one electrode portion 24 (RX) is on the upper side, the other electrode portion 24 (TX) is on the right side], and It is electrically connected to the configuration in the display area 26 in the second embodiment (when the electrode structure forms a square electrode).

  Here, the configuration in the display area 26 in the second embodiment (when the electrode structure forms a square electrode) refers to “the low resistance portion of the first transparent conductive film 22 when viewed from the direction in which the It means that “one electrode portion RX formed of L and the other electrode portion TX formed of the low resistance portion L of the third transparent conductive film 24 have a crossing portion K [hatched region in FIG. 6C]”. .

The low resistance portion L and the high resistance portion H in the first transparent conductive film 22, the second transparent conductive film 23, and the third transparent conductive film 24 are manufactured by the method described in the first and second embodiments.
Thereby, in addition to the effect and effect (2a) of the second embodiment and the effect (2b) of the touch panel 20 described above, the following effect and effect can be obtained.
(2c) Also in the outer peripheral area 26os surrounding the display area 26, the transparent conductive film has the same layered structure as the display area 26. Therefore, in the touch panel 20 of the third embodiment, the display area 26 and the outer peripheral area 26os surrounding the display area 26 can have a completely flat shape. Therefore, according to the third embodiment, the electrode pattern is difficult to see not only in the display area 26 but also in the outer peripheral area 26os surrounding the display area 26, and good visibility is ensured.

Fourth Embodiment
FIG. 8 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part γ of a display area, (c) is a line shown in (b) It is an expanded sectional view corresponding to C-C.
In the present embodiment, the electrode structure is a rhombus electrode, and all the layers 32, 33, 34 are formed of a transparent conductive film. That is,
In the touch panel 30 according to the present embodiment, any of the fourth transparent conductive film 32, the fifth transparent conductive film 33, and the sixth transparent conductive film 34 stacked in order from the transparent substrate 31 side in the display region 36 is stacked. The configuration of the transparent conductive film described above (a configuration in which the low resistance portion and the high resistance portion are localized in the transparent conductive film described in the first embodiment) is provided.

When viewed from the direction in which the display area 36 is viewed in plan, one electrode portion TX formed of the low resistance portion L of the fourth transparent conductive film 32 and the other electrode portion RX have “intersection portions”.
In FIG. 8B, one electrode portion TX is formed of a rhombus region 32Yb and a connection region 32Ya connecting the rhombus regions 32Yb, and is electrically connected in the Y-axis direction. Similarly, the other electrode portion RX is formed of a rhombus region 32Xb and a connection region 32Xa connecting the rhombus regions 32Xb, and is electrically connected in the X-axis direction.
That is, the “intersection portion” in the present embodiment means a portion where the connection region 32Ya and the connection region 32Xa intersect.

Then, the fifth transparent conductive material is connected to the “crossing portion” such that one electrode portion TX is electrically connected across the connection region 32Xa connecting the rhombus regions 32Xb forming the other electrode portion RX. A conductive portion J including a low resistance portion L of the fifth transparent conductive film 33 and a low resistance portion L of the sixth transparent conductive film 34 is provided with the high resistance portion H of the film 33 interposed therebetween.
That is, this "conductive part J" functions as a jumper part, and plays a role of "connection area 32Ya" which connects the rhombus areas 32Yb which constitute one electrode part TX.

The low resistance portion L and the high resistance portion H in the fourth transparent conductive film 32, the fifth transparent conductive film 33, and the sixth transparent conductive film 34 are manufactured by the method described in the first embodiment.
Thereby, the touch panel 30 can obtain the actions and effects described below.
(3a) Each of the fourth transparent conductive film 32, the fifth transparent conductive film 33, and the sixth transparent conductive film 34 sequentially stacked on the transparent substrate 31 is a continuous film having a macroscopically flat surface. The low resistance portion L forming the electrode portion (RX, TX) and the high resistance portion H located between the electrode portions (RX, TX) differ only in their electrical characteristics and have the same film thickness. . Therefore, since there is no difference in film thickness between the two, the electrode pattern is difficult to see despite the existence of the intersection, and good visibility is secured.

(3b) The electrode structure (diamond electrode) in the present embodiment is a continuous film having a macroscopically flat surface, three films (a fourth transparent conductive film 32, a fifth transparent conductive film 33, a sixth transparent The conductive film 34) is stacked. Therefore, three films (the fourth transparent conductive film 32, the fifth transparent conductive film 33, and the sixth transparent conductive film 34) are stacked on the transparent substrate, and the outermost surface, that is, the sixth transparent conductive film 34. Since the surface of the film is a film in which all three films are continuous, it naturally becomes a macroscopically flat surface profile. Therefore, although there is a "conductive portion J" functioning as a jumper portion at the intersection, no step is generated at the boundary between the intersection and the other. Therefore, in the touch panel according to the present embodiment, “the problem that a level difference is caused due to the intersection, the flatness of the upper electrode is impaired, and the conductivity becomes unstable” is eliminated over the entire display region 36 .

Fifth Embodiment
FIG. 9 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) an enlarged plan view showing a part δ of the display area, (c) a line shown in (b) It is an expanded sectional view corresponding to minute D1-D1.
In the present embodiment, the electrode structure is a three-dimensional electrode, and all the layers 42, 43, 44, 45 are formed of a transparent conductive film. That is,
The touch panel 40 according to the present embodiment includes the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 42 stacked in order from the transparent substrate 41 side in the display region 46. Each of the transparent conductive films 45 has the configuration of the above-described transparent conductive film (a configuration in which the low resistance portion and the high resistance portion are localized in the transparent conductive film described in the first embodiment).

When viewed from a direction in which the display area 46 is viewed in cross section, one electrode portion TX consisting of the low resistance portion L of the tenth transparent conductive film 45 and the other electrode portion RX The low resistance portion L and the high resistance portion H of the eighth transparent conductive film 43 and the ninth transparent conductive film 44 are electrically connected to the low resistance portion L of the resistance portion L and the eighth transparent conductive film 43, respectively. Are arranged.
In other words, one electrode portion L (X) and the other electrode portion L (Y) consisting of the low resistance portion of the tenth transparent conductive film 45 are selected from the seventh to ninth transparent conductive films different in hierarchy. Are arranged to be electrically connected to any of the conductive films.
Thereby, when one electrode portion TX is electrically connected in the Y-axis direction and the other electrode portion RX is electrically connected in the X-axis direction, the electric connection in the Y-axis direction The electrical connections in the X-axis direction are provided in different layers.

The low resistance portion L and the high resistance portion H of the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 45 are manufactured by the method described in the first embodiment. .
Thereby, the touch panel 40 can obtain the actions and effects described below.
(4a) The seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 45, which are sequentially stacked on the transparent substrate 41, have macroscopically flat surfaces. It is a continuous film having. The low resistance portion L forming the electrode portion (RX, TX) in the tenth transparent conductive film 45 and the high resistance portion H located between the electrode portions (RX, TX) have different electrical characteristics. And have the same film thickness. Therefore, since there is no difference in film thickness between the two, it is difficult to see the electrode pattern, and good visibility is ensured.

(4b) The electrode structure (three-dimensional electrode) in the present embodiment is a continuous film having a macroscopically flat surface, four films (the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth The transparent conductive film 44 and the tenth transparent conductive film 45) are stacked. Therefore, the outermost surface in which four films (the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 45) are stacked on the transparent substrate, that is, the tenth transparent Since the surface of the conductive film 45 is a film in which all four films are continuous, it naturally becomes a macroscopically flat surface profile.

  Therefore, by connecting the low resistance portion L inherent to the three films (the seventh transparent conductive film 42, the eighth transparent conductive film 43, and the ninth transparent conductive film 44) located in the lower layer of the tenth transparent conductive film 45 Even if the wiring portions extending from the electrode portions (RX, TX) of the tenth transparent conductive film 45 adopt a layout in which the wiring portions cross each other, no step is generated at the boundary between the wiring portion and the other. Therefore, in the touch panel according to the present embodiment, “the problem that a level difference is caused due to the intersection, the flatness of the upper electrode is impaired, and the conductivity becomes unstable” is eliminated over the entire display region 46 .

(4c) All the lines extending from each electrode (the tenth transparent conductive film 45) in the display area are three films (the seventh transparent conductive film 42, the eighth transparent conductive film) located under the tenth transparent conductive film 45 43, the ninth transparent conductive film 44) is configured by connecting the low resistance portion L inherent therein. Therefore, the shape of each electrode portion in the display area formed of the tenth transparent conductive film 45 can have extremely high freedom. Although FIG. 9 (b) shows an example in which each electrode portion has a circular shape, it is not limited to a circular shape, and may be a triangular shape, a rectangular shape, a rectangular shape, an elliptical shape, or an irregular shape. I don't care. Moreover, the size (area) can also be adjusted. Thus, for example, the in-plane sensitivity is locally controlled by arranging the respective electrode portions in such a manner that the central portion can be detected in high density and the peripheral portion is low in density in the display area. It also becomes possible to provide a touch panel.

Sixth Embodiment
FIG. 10 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part δ of the display area, and (c) is a line shown in (b) It is an expanded sectional view corresponding to minute D2-D2.

The present embodiment (sixth embodiment) is an example of a derivative of the fifth embodiment. Specifically, as shown in FIG. 10C, when viewed from the direction in which the display region 46 is viewed in cross section, one electrode portion L (X) and the other electrode which are formed of the low resistance portion of the tenth transparent conductive film 45 The portion L (Y) is electrically connected to the low resistance portion of the seventh transparent conductive film 42 and the low resistance portion of the eighth transparent conductive film 43 in different layers. In addition to this, the direction in which the low resistance portion of the seventh transparent conductive film 42 is extended (the X direction in FIG. 10) when viewed from the direction in which the display region 46 is viewed in plan, and the low The direction in which the resistor portion extends (the X direction in FIG. 10) is configured to be parallel.
That is, as shown in FIG. 10B, the present embodiment is a configuration example in which one electrode portion L (X) and the other electrode portion L (Y) are arranged in a grid.

  According to the configuration of this embodiment, a specific side (for example, the upper side in FIG. 10A) or two sides (for example, the opposite side) of the outer peripheral area 46os surrounding the display area 46 in the touch panel 40 In FIG. 10 (a), one electrode portion L (X) and the other electrode portion L (Y) consisting of the low resistance portion of the tenth transparent conductive film 45 are electrically connected to the upper side and the lower side respectively. To build the wiring.

Seventh Embodiment
FIG. 11 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part δ of the display area, and (c) is a line shown in (b) It is an expanded sectional view corresponding to D3-D3.

The present embodiment (seventh embodiment) is an example of a derivative of the fifth embodiment. Specifically, as shown in FIG. 11C, when viewed from the direction in which the display region 46 is viewed in cross section, one electrode portion L (X) and the other electrode formed of the low resistance portion of the tenth transparent conductive film 45 The portion L (Y) is electrically connected to the low resistance portion of the seventh transparent conductive film 42 and the low resistance portion of the ninth transparent conductive film 44 in different layers. In addition to this, the direction in which the low resistance portion of the seventh transparent conductive film 42 is extended (the X direction in FIG. 11) when viewed from the direction in which the display region 46 is viewed in plan, The direction in which the resistance portion is extended (Y direction in FIG. 11) is configured to be orthogonal.
That is, as shown in FIG. 11B, the present embodiment is a configuration example in which one electrode portion L (X) and the other electrode portion L (Y) are arranged in a staggered manner.

  According to the configuration of the present embodiment, the tenth transparent conductive film 45 is formed on two close sides (for example, the upper side and the right side in FIG. 10A) of the outer peripheral area 46os surrounding the display area 46 in the touch panel 40. Wiring can be constructed such that one electrode portion L (X) and the other electrode portion L (Y) formed of the low resistance portions are electrically connected to each other.

Eighth Embodiment
FIG. 12 is a view showing the touch panel in the present embodiment, where (a) is a whole plan view, (b) is an enlarged plan view showing a part ε including a display area and an outer peripheral area, (c) is (b) (D) is an expanded sectional view corresponding to line segment D5-D5 shown to (b) corresponding to line segment D4-D4 shown to.

The present embodiment (eighth embodiment) is a modification of the fifth embodiment described above, and all the layers 42, 43, 44, 45 are formed of a transparent conductive film. That is,
The touch panel 40 according to the present embodiment has the configuration of the transparent conductive film in the display area 46 and also in the outer peripheral area 46os surrounding the display area 46. That is, the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 45, which are stacked in order from the transparent substrate 41 side, are all the transparent conductive films described above (The configuration in which the low resistance portion and the high resistance portion are localized in the transparent conductive film described in the fifth to seventh embodiments).

  In addition, when the outer peripheral region 46os is viewed in a cross-sectional view, one electrode portion L (X) and the other electrode portion L (Y) formed of the low resistance portion of the tenth transparent conductive film 45 are each of the outer peripheral region 46os. Among them, they are disposed in a range constituting different sides, and are electrically connected to the configuration in the display area 46 of the sixth embodiment or the seventh embodiment described above.

  Here, the configuration in the display area 46 in the sixth embodiment or the seventh embodiment described above refers to “the seventh transparent conductive film 42 and the eighth transparent conductive film 43 when viewed from the direction in which the display region 46 is viewed in cross section. The low resistance portions L (X) and L (Y) in the ninth transparent conductive film 44 and the tenth transparent conductive film 45 are electrically connected as shown in FIGS. 12 (c) and 12 (d). Means the configuration.

The low resistance portions L (X), L (Y) and the high resistance portion H in the seventh transparent conductive film 42, the eighth transparent conductive film 43, the ninth transparent conductive film 44, and the tenth transparent conductive film 45 It manufactures by the method demonstrated in the 1st and 2nd embodiment.
Thereby, in addition to the effect and effect (4a)-(4c) of 5th embodiment mentioned above, the touch panel 40 can acquire the following effect and effect.
(4d) Also in the outer peripheral area 46os surrounding the display area 46, the configuration of the transparent conductive film maintains the same laminated structure as the display area 46. Therefore, in the touch panel 40 of the eighth embodiment, the display area 46 and the outer peripheral area 46os surrounding the display area 46 can have a completely flat shape. Therefore, according to the eighth embodiment, the electrode pattern is difficult to see not only in the display area 46 but also in the outer peripheral area 46os surrounding the display area 46, and good visibility is ensured.

<Ninth embodiment>
FIG. 13 is a view showing the touch panel in the present embodiment, and is a configuration example in which an anti reflection layer (Anti Reflection Layer: AR layer) is provided. FIG. 13 (a) shows the case where the antireflective layer is disposed between the transparent substrate and the transparent conductive film, and FIG. 13 (b) shows the case where the antireflective layer is disposed on the transparent conductive film. There is. That is, FIG. 13 shows two configuration examples in which an anti-reflection layer ARL is added in the display device (FIG. 2) provided with the touch panel according to the present invention. Furthermore, an anti-reflection layer is arranged between the transparent substrate and the transparent conductive film and on the transparent conductive film so as to sandwich the transparent conductive film, that is, in FIGS. 13 (a) and 13 (b). An arrangement in which the configurations are superimposed is also possible.

As described in the first to eighth embodiments, any of the transparent conductive films functioning as the electrode portion in the present invention is a continuous film having a macroscopically flat surface. Therefore, even in the case of a laminated structure in which two or more layers are stacked, the interface and the outermost surface maintain the continuous film profile. Therefore, as shown in FIG. 13A and FIG. 13B, the antireflection layer is macroscopically flat by itself in either configuration example, regardless of the lamination position where the antireflection layer is disposed. It becomes a continuous film having a surface.
Therefore, it becomes possible to provide the touch panel which has the still more outstanding visibility by adopting the composition which added the antireflection layer.

Tenth Embodiment
In the first to ninth embodiments, the basic structure shown in FIG. 1 (transparent substrate / transparent conductive film, transparent conductive film is composed of a low resistance portion and a high resistance portion localized in the film surface) The case where the high resistance portion is disposed between the low resistance portions) is applied to a touch panel in detail.

  However, a transparent conductive substrate having the basic structure of FIG. 1, that is, “a transparent substrate and a transparent conductive film disposed on the transparent substrate, the film surface of the transparent conductive film is flat, and The transparent conductive substrate having the low resistance portion and the high resistance portion localized in the film surface, and the high resistance portion being disposed between the low resistance portions is used for applications other than the touch panel. Can also be used enough. For example, use in a wide variety of applications, such as wiring boards for mounting various devices, wiring boards with multilayer wiring structures, interposers disposed between various devices, window glasses provided with thermoelectric circuits, lenses, mirrors, etc. Can.

  In any application, the transparent conductive film is “a continuous film having a macroscopically flat surface, and is composed of a low resistance portion and a high resistance portion localized in the film surface, and the low resistance portion The basic configuration in which the high resistance portion is disposed between the two functions extremely effectively. That is, since the top surface of the transparent conductive film is ensured to be flat, in wiring board and interposer applications, it is excellent in stability when mounting the device, and freely according to the pin arrangement of the device. It becomes possible to set the conductive part. In window glass, lens and mirror applications, it becomes possible to freely set the conductive part without affecting the respective optical design.

  Also in such a transparent conductive substrate, as shown in FIG. 13, it is effective to provide an anti-reflection function. That is, by disposing the antireflective film between the transparent substrate and the transparent conductive film and / or on the transparent conductive film, a transparent conductive substrate having optically superior properties can be obtained. Be

  The present invention is widely applicable to touch panels and transparent conductive substrates. Such a touch panel and a transparent conductive substrate are suitably used, for example, for a high quality display screen or the like which requires excellent visibility.

  α part of display area, 10 touch panel, 11 transparent substrate, 11a operation surface, 11b back surface, 12 transparent conductive film, 12L (12La, 12Lb) low resistance part (electrode part), 12H high resistance part, 16 display area, 16os 17 wires around the display area.

Claims (8)

A touch panel including: a transparent substrate; and a plurality of electrode portions made of a transparent conductive film provided in a display area of the transparent substrate.
The transparent conductive film has a flat film surface, and is composed of a low resistance portion and a high resistance portion localized in the film surface,
The electrode portion is the low resistance portion of the transparent conductive film, and the high resistance portion is disposed between the electrode portions.
In the display area, a first transparent conductive film, a second transparent conductive film, and a third transparent conductive film having the configuration of the transparent conductive film are sequentially stacked from the transparent substrate side,
When viewed from a direction in which the display area is viewed in plan, one electrode portion consisting of the low resistance portion of the first transparent conductive film and the other electrode portion consisting of the low resistance portion of the third transparent conductive film cross each other And have
The touch panel, wherein at least a region of the two transparent conductive films overlapping with the intersection portion is configured of a high resistance portion. The first transparent conductive film, the second transparent conductive film, and the third transparent conductive film having the configuration of the transparent conductive film in the display region and also in the outer peripheral region surrounding the display region, from the transparent substrate side Prepare in order,
When viewed from a direction in which the outer peripheral region is viewed in cross section, one electrode portion formed of the low resistance portion of the third transparent conductive film and the other electrode portion are disposed in the different outer peripheral region in a different side. The touch panel according to claim 1, wherein the touch panel is electrically connected to the configuration in the display area according to claim 1. In the display area, a fourth transparent conductive film, a fifth transparent conductive film, and a sixth transparent conductive film having the configuration of the transparent conductive film are sequentially stacked from the transparent substrate side,
When viewed from the direction in which the display area is viewed in plan, one electrode portion formed of the low resistance portion of the fourth transparent conductive film and the other electrode portion have crossing portions,
In the crossing portion, the high resistance portion of the fifth transparent conductive film is sandwiched between the other electrode portion so that every other one of the electrode portions is electrically connected. The touch panel according to claim 1, further comprising: a conductive portion including a low resistance portion of five transparent conductive films and a low resistance portion of the sixth transparent conductive film. The seventh transparent conductive film, the eighth transparent conductive film, the ninth transparent conductive film, and the tenth transparent conductive film having the configuration of the transparent conductive film are sequentially stacked from the transparent substrate side in the display region. ,
One of the electrode parts comprising the low resistance part of the tenth transparent conductive film and the other electrode part are electrically selected from any one of the seventh to ninth transparent conductive films different in hierarchy, respectively. The touch panel according to claim 1, wherein the touch panel is arranged to be connected. As viewed from the direction in which the display area is viewed in cross section, one electrode portion consisting of the low resistance portion of the tenth transparent conductive film and the other electrode portion are the low resistance portion of the seventh transparent conductive film and the above different layers. Each is electrically connected to the low resistance portion of the eighth transparent conductive film,
The direction in which the low resistance portion of the seventh transparent conductive film extends is parallel to the direction in which the low resistance portion of the eighth transparent conductive film extends, when viewed from the direction in which the display area is viewed in plan view. The touch panel according to claim 4, wherein the touch panel is configured to As viewed from the direction in which the display area is viewed in cross section, one electrode portion consisting of the low resistance portion of the tenth transparent conductive film and the other electrode portion are the low resistance portion of the seventh transparent conductive film and the above different layers. Each is electrically connected to the low resistance portion of the ninth transparent conductive film,
The direction in which the low resistance portion of the seventh transparent conductive film is extended and the direction in which the low resistance portion of the ninth transparent conductive film is extended are orthogonal to each other when viewed from the direction in which the display area is viewed in plan The touch panel according to claim 4, wherein the touch panel is configured to A seventh transparent conductive film, an eighth transparent conductive film, a ninth transparent conductive film, and a tenth transparent conductive film having the configuration of the transparent conductive film in the display region and also in the outer peripheral region surrounding the display region , Provided in order from the transparent substrate side,
When viewed from the direction in which the outer peripheral region is viewed in cross section, one electrode portion formed of the low resistance portion of the tenth transparent conductive film and the other electrode portion are disposed in ranges that form different sides of the outer peripheral region. The touch panel according to claim 5 or 6, which is electrically connected to the configuration in the display area according to claim 5 or 6.   The anti-reflection layer is disposed between the transparent substrate and the transparent conductive film, and / or on the transparent conductive film, according to any one of claims 1 to 7. Touch panel described.

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