JP6494380B2 - Liquid ejecting apparatus, imprint apparatus and component manufacturing method - Google Patents

Description

  The present invention relates to a liquid ejection apparatus including a liquid ejection head that ejects liquid, an imprint apparatus, and a component manufacturing method.

  2. Description of the Related Art A liquid discharge apparatus including a liquid discharge head (hereinafter simply referred to as “head”) having a discharge port (hereinafter referred to as “nozzle”) for discharging liquid is known. In recent years, such a liquid ejection apparatus has been used in various fields, for example, an inkjet recording apparatus.

  Generally, the inside of the head needs to be always maintained at a negative pressure (pressure lower than atmospheric pressure) so that liquid does not leak from the head (nozzle) to the outside.

  In Patent Document 1, as shown in FIG. 6, an ink tank (ink bag) 102 communicating with the head 101, a housing portion 103 for housing the ink tank 102, and a space between the ink tank 102 and the housing portion 103 are disclosed. A suction device 104 for sucking air is disclosed. A constant negative pressure is formed in the space between the ink tank 102 and the storage unit 103 by the suction operation of the suction device 104. The ink tank (ink bag) 102 is elastically deformed (expanded) by this negative pressure, and the inside of the ink tank 102 is maintained in a negative pressure state.

  On the other hand, in Patent Document 2, as shown in FIG. 7, in order to maintain the pressure in the subtank 202 communicating with the head 201 at a negative pressure, the flexible member 203 generates buoyancy between the ink chamber 204 and the inside of the subtank. A configuration for dividing the chamber 205 is disclosed. A floating bag 206 having a small specific gravity is connected to the flexible member 203 in the buoyancy generating chamber 205. Due to the buoyancy of the floating bag 206 in the buoyancy generation chamber 205, the inside of the head 201 communicated with the ink chamber 204 is maintained in a negative pressure state.

JP 2006-192785 A JP 2008-105360 A

  However, the fluid ejection device disclosed in Patent Document 1 has the following problems.

  That is, the air volume is likely to fluctuate with changes in ambient temperature or pressure. For this reason, the volume of air enclosed in the space between the ink tank 102 and the storage unit 103 is sensitively changed according to the environmental temperature or pressure as the temperature or pressure around the fluid ejection device changes. As a result, the pressure of the liquid in the ink tank 102 varies and the pressure in the head 101 is likely to change.

  In the invention of Patent Document 1, the ink tank 102 is filled with a liquid, and the space between the ink tank 102 and the storage portion 103 is filled with air. Since the difference between the density of the liquid and the density of the gas (air) is relatively large, the ink tank 102 may swing greatly when an impact is applied to the housing portion 103. Due to the oscillation of the ink tank 102, the pressure of the liquid in the ink tank 102 also fluctuates, and the pressure in the head 101 tends to change.

  On the other hand, in the ink jet recording apparatus disclosed in Patent Document 2, it is necessary to submerge the floating bag 206 filled with gas in the liquid in the buoyancy generating chamber 205. Even in such a configuration, since the difference between the density of the gas and the density of the liquid is relatively large, the floating bag 206 swings greatly when an impact is applied to the housing of the sub tank 202. Therefore, the pressure in the ink chamber 204 connected to the floating bag 206 or the head 201 communicating with the ink chamber 204 is likely to change.

  That is, in the liquid ejection device disclosed in Patent Document 1 or Patent Document 2, the pressure in the head cannot be stably maintained, and there is a possibility that ink leaks from the head.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a liquid ejection apparatus that can stably maintain the pressure in the head and can further prevent liquid leakage from the head.

  In order to achieve the above object, a liquid discharge apparatus according to the present invention includes a head having a discharge port surface on which a discharge port for discharging a liquid is formed, a first tank that stores liquid supplied to the head, and the first tank. An internal space of one tank is divided into a first chamber that stores the liquid and a second chamber that stores the working fluid, and a flexible portion having flexibility and the second chamber communicate with the second chamber. A second tank that contains the supplied hydraulic fluid, and the liquid level of the hydraulic fluid in the second tank is disposed below the discharge port surface, An adjusting means is provided for adjusting the position of the liquid level of the working fluid in the second tank to be within a predetermined range in a state where the second tank is opened to the atmosphere.

  According to the present invention, the pressure in the head can be stably maintained, and liquid leakage from the head can be further suppressed.

1 is a conceptual diagram of a liquid ejection apparatus according to a first embodiment of the present invention. The conceptual diagram which shows the state in which the ink in the 1st chamber of the 1st tank of 1st Example was partially consumed. The conceptual diagram which shows the state which replenishes hydraulic fluid from the 3rd tank of 1st Example to a 2nd tank. The flowchart which shows the control which replenishes hydraulic fluid to the 2nd tank of 1st Example. The conceptual diagram of the imprint apparatus which concerns on 2nd Example of this invention. Explanatory drawing of the fluid discharge apparatus of the prior art part 1. FIG. Explanatory drawing of the inkjet recording device of the prior art 2.

[First embodiment]
A first embodiment of the present invention will be described below with reference to FIGS. In this embodiment, an ink jet recording apparatus that discharges ink (hereinafter referred to as “ejection apparatus”) will be described as an example of the liquid ejection apparatus of the present invention. The “ink” used in the ejection device of the present embodiment is an example that constitutes the “liquid” used in the liquid ejection device of the present invention.

  FIG. 1 is a conceptual diagram of the ejection device (liquid ejection device) of the present embodiment.

  As shown in FIG. 1, in this embodiment, the ejection device 100 mainly includes a head 1 that ejects ink (liquid), a first tank 2 that accommodates ink, and a second tank 3 that accommodates hydraulic fluid. I have. Further, the ejection device 100 includes a transport unit 92 that transports the recording medium 91, a support unit 93 that supports the transport unit 92, and the like. Note that the recording medium 91 is sucked and held by the transport unit 92 by a suction unit (not shown).

  The first tank 2 includes a rectangular parallelepiped casing 20 that is substantially sealed, and the head 1 is attached to the bottom of the casing 20. The first tank 2 is not provided with an air communication port. The head 1 includes a discharge port surface 10 in which a discharge port (not shown) is formed on the bottom surface of the housing 20.

  A flexible film 8 (flexible portion) having flexibility is provided inside the housing 20, and the first tank 2 is moved into the first chamber 21 and the second chamber 22 by the flexible film 8. Partitioned. The first chamber 21 communicates with the inside of the head 1 provided at the bottom of the housing 20 and stores the ink supplied to the head 1. On the other hand, the second chamber 22 communicates with the second tank 3 through the flow path T <b> 1 and contains the working fluid supplied from the second tank 3.

  In the present embodiment, the first chamber 21 is filled with ink, and the second chamber 22 is filled with hydraulic fluid.

  Further, in this embodiment, as will be described later, in order to maintain the negative pressure in the head 1 more stably, the working fluid in the second chamber 22 has the same density as the ink in the first chamber 21. Adopts liquid. The hydraulic fluid is an incompressible substance, and for example, a liquid such as water or a gel substance can be used as the hydraulic fluid.

  One end (lower end) of the flow path T1 connected to the second tank 3 is disposed below the liquid level of the working fluid in the second tank 3. Further, the flow path T1 is configured to be filled with the hydraulic fluid.

  As shown in FIG. 1, an atmosphere communication port 31 is provided in the upper part of the second tank 3, and the second tank 3 is opened to the atmosphere. The position B of the hydraulic fluid level in the second tank 3 is the discharge port surface of the head 1 so that the negative pressure is always maintained in the head 1 with the second tank 3 opened to the atmosphere. 10 below the position A. That is, in the discharge device 100 of the present embodiment, the inside of the head 1 is caused by the difference in height (water head difference H) between the position B of the liquid surface in the second tank 3 containing the working fluid and the position A of the discharge port surface 10. The negative pressure state is maintained.

  FIG. 2 is a conceptual diagram showing a state where a part of the ink (liquid) in the first chamber 21 of the first tank 2 is consumed.

  As shown in FIG. 2, when the ink in the first tank 2 (first chamber 21) is consumed, the hydraulic fluid is supplied from the second tank 3 to the second chamber 22 by capillary force. Accordingly, the liquid level of the hydraulic fluid in the second tank 3 is lowered, and the water head difference H between the position A and the position B is changed.

  In this embodiment, the ejection device 100 is arranged so that the liquid level of the hydraulic fluid in the second tank 3 is within a predetermined range so that the negative pressure in the head 1 is maintained within the predetermined range. Adjustment means 4 for adjustment is provided.

  Specifically, the adjusting unit 4 includes a liquid level detecting unit 5 that detects the position of the liquid level in the second tank 3 and a replenishing unit 6 that replenishes the second tank 3 with the working fluid.

  The liquid level detection means 5 includes a lower limit position sensor 5A and an upper limit position sensor 5B in the second tank 3. The lower limit position sensor 5A and the upper limit position sensor 5B are disposed at positions where the pressure (negative pressure) in the head 1 is within a predetermined range. In the present embodiment, the lower limit position sensor 5A and the upper limit position sensor 5B are optical sensors.

  By maintaining the liquid level in the second tank 3 within a predetermined range (between the lower limit position Lo and the upper limit position Hi), the negative pressure in the head 1 can be kept within the predetermined range. In other words, if the liquid level in the second tank 3 does not drop below the lower limit position Lo, the negative pressure in the head 1 does not exceed the upper limit of the predetermined range, and the possibility of breaking the meniscus at the discharge port is low. On the other hand, if the liquid level does not rise above the upper limit position Hi, the negative pressure in the head 1 does not exceed the lower limit of the predetermined range, and there is little possibility of ink leaking from the head 1.

  The replenishing means 6 is disposed in the flow path 62 that connects the second tank 3 and the third tank 61, the third tank 61 that stores the working fluid, and operates from the third tank 61 to the second tank 3. And a pump 63 for supplying (feeding) the liquid. The third tank 61 is provided with an atmosphere communication port 611 as in the second tank 3 and is open to the atmosphere. Further, the pump 63 is stopped except for the replenishment operation for replenishing the second tank 3 with the working fluid, and the flow path 62 is also closed.

  FIG. 3 is a conceptual diagram showing a state where hydraulic fluid is replenished from the third tank to the second tank.

  As shown in FIG. 3, when it is detected by the lower limit position sensor 5A that the liquid level in the second tank 3 has decreased to the lower limit position Lo, the replenishing means 6 (pump 63) is operated, and the second tank 2 The tank is replenished with hydraulic fluid, and the liquid level in the second tank is restored to the lower limit position Lo or higher. When it is detected that the liquid level in the second tank 3 has reached the upper limit position Hi again, the pump 63 is stopped. Thereby, the negative pressure in the head 1 can be maintained within a predetermined range.

  FIG. 4 is a flowchart showing control for replenishing the hydraulic fluid from the third tank to the second tank.

  As shown in FIG. 4, when ink discharge from the head 1 is started (S1), hydraulic fluid replenishment control from the third tank to the second tank is started based on the detection result of the liquid level detecting means 5. That is, simultaneously with the start of the ejection operation of the head 1, detection (monitoring) of the liquid level in the second tank is started by the lower limit position sensor 5A installed in the second tank 3 (S2).

  In step S2, when it is detected by the lower limit position sensor 5A that the liquid level in the second tank 3 has decreased to the lower limit position Lo, the hydraulic fluid is transferred from the third tank 61 to the second tank 3 by driving the pump 63. (S3).

  In step S3, when the working fluid is supplied from the third tank 61 to the second tank 3, the liquid level in the second tank 3 rises. When the upper limit position sensor 5B detects that the liquid level in the second tank 3 has risen to the upper limit position Hi (S4), the pump 63 is stopped (S5), and the replenishment control ends.

  In step S4, when the upper limit position sensor 5B has not yet detected that the liquid level in the second tank 3 has risen to the upper limit position Hi, the process returns to step S3 and the liquid feeding operation by the pump 63 is continued.

  Thus, in this embodiment, the liquid level in the second tank 3 is disposed below the discharge port surface 10, and the liquid level in the second tank 3 is adjusted within a predetermined range by the adjusting means 4. Thus, the pressure in the head 1 can be stably controlled within a predetermined range (negative pressure). Therefore, ink leakage from the head 1 can be effectively suppressed. Further, ink can be stably ejected from the head 1.

  In particular, in this embodiment, since the inside of the first tank 2 (the first chamber 21 and the second chamber 22) is filled with ink and hydraulic fluid having close densities, vibration is effective even when the housing 20 is impacted. To be suppressed. Therefore, the influence of the vibration on the pressure in the head 1 is small, and the inside of the head 1 can be maintained in a stable negative pressure state.

  In the present embodiment, the hydraulic fluid filled in the second chamber 22 is less susceptible to changes in environmental temperature and pressure than gas. Therefore, even if the temperature or atmospheric pressure around the ejection device 100 changes, the volume of the hydraulic fluid hardly fluctuates, so that fluctuations in the pressure of the ink in the head 1 communicating with the first chamber 21 are reliably suppressed. .

  Hereinafter, the flexible film 8 (flexible part) of the discharge device 100 will be described in detail.

  As shown in FIG. 2, in this embodiment, the flexible membrane 8 is connected to the top surface, bottom surface, and two side surfaces of the housing, and is provided in the housing 20 along the vertical direction (longitudinal direction). ing. As a result, the first chamber 21 and the second chamber 22 are formed separately in the left and right in the housing 20.

  When the ink in the first chamber 21 of the first tank 2 is consumed, the flexible film 8 is deformed, the volume of the first chamber 21 is reduced, and the volume of the second chamber 22 is increased. Therefore, the hydraulic fluid having the same volume as the ink consumed in the first chamber 21 is supplied from the second tank 3 to the second chamber 22 through the flow path T1. At this time, the flexible membrane 8 moves from left to right along the horizontal direction as shown in FIG.

  In other words, the volume ratio of the ink and the working fluid stored in the first tank 2 changes depending on the consumption of the ink. However, since the working fluid and the ink have substantially the same density, the center of gravity in the first tank 2 is almost the same. It does not change. For this reason, a stable negative pressure is maintained in the head 1 located in the lower part of the housing 20.

  In particular, in this embodiment, by arranging the flexible film 8 along the vertical direction, even if a working fluid having a density different from that of the ink is employed, the ink in the first tank 2 (liquid) is consumed due to consumption of the ink. The center of gravity moves only in the horizontal direction and hardly moves in the height direction.

  On the other hand, when the flexible film 8 is arranged in the horizontal direction, the center of gravity of the first tank 2 moves in the height direction as the ink is consumed. When the flexible film 8 is arranged in the vertical direction, the negative pressure in the head 1 can be stably maintained as compared with the case where the flexible film 8 is arranged in the horizontal direction. Therefore, by disposing the flexible membrane 8 (flexible portion) in the vertical direction, there are effects that the choices of usable hydraulic fluid increase and the design becomes easy.

  In the present embodiment, the flexible film 8 is described as being formed by partitioning the housing into the first chamber 21 and the second chamber 22 by connecting to the upper surface, the lower surface, and the side surface of the housing. Other arrangements are possible. For example, the flexible film 8 may be attached to the housing 20 so that the first chamber 21 that stores ink is substantially surrounded by the second chamber 22 that stores hydraulic fluid. In other words, the flexible film 8 may be attached to the housing 20 so that the first chamber 21 (space) containing the ink is wrapped with the flexible film 8.

  For the flexible film 8 used in the present embodiment, it is preferable to select a member suitable for the characteristics of the ink (liquid stored in the first chamber) from the viewpoint of wettability and the like.

  In the present embodiment, the liquid ejecting apparatus has been described using an ink jet recording apparatus that ejects ink as an example. However, for example, the present invention is appropriately changed to a liquid ejecting apparatus that ejects liquid such as conductive liquid or UV curable liquid. And can be applied.

  In the present embodiment, the configuration in which the head 1 is attached to and integrated with the lower portion of the housing 20 of the first tank 2 has been described. However, the head 1 and the first tank 2 are configured separately, and the head 1 is formed using a connection tube. And the first tank 2 (first chamber 21) may be connected.

  In the present embodiment, the first tank (second chamber 22) is connected to the second tank 3 through the flow path T1, but the first tank 2 and the second tank 3 are provided with a joint portion in the flow path T1. May be configured to be separable (detachable).

  In this embodiment, the volume of the casing 20 is 500 ml, the initial amount of ink in the first chamber 21 is about 400 ml, and the initial amount of hydraulic fluid in the second chamber 22 is about 100 ml. May be.

  For example, the volume of the housing 20 may be 400 ml, the initial amount of ink (liquid) in the first chamber 21 may be about 400 ml, and the working fluid may be set to a minimum value close to 0 in the initial state. That is, when the air mixture can be ignored, the second chamber 22 may not be filled with the working fluid in the initial state.

  In this embodiment, the first tank 2 (head 1) is mounted on a carriage (not shown), and ink is ejected as the carriage moves to perform a recording operation. Even when the first tank 2 is moving, the internal space of the first tank 2 is filled with ink and hydraulic fluid, and the swinging of the flexible film 8 is suppressed. For this reason, pressure fluctuations in the head 1 hardly occur, and ink leakage from the head 1 is reduced.

  In the present embodiment, an optical sensor is used as the liquid level detection means 5. For example, the liquid level detection means 5 includes an electrode pair provided in the second tank 3, and the electrode is brought into contact with the liquid level by contact between the electrode and the liquid level. The structure which detects the electrical change in between may be sufficient.

  Further, the liquid level detection means 5 may be configured to detect the liquid level position in the second tank 3 using a capacitance type sensor. And the liquid level detection means 5 may be the structure which detects a liquid level by providing a float in the 2nd tank 3, and detecting the position of a float.

  In this embodiment, examples of the pump 63 include a syringe pump, a tube pump, a diaphragm pump, and a gear pump, but a pump suitable for the performance of the discharge device 100 can be selected. For example, when the third tank 61 is a sealed space, the inside of the third tank 61 may be pressurized to supply the working fluid to the second tank 3.

  In addition, when there is a difference in level between the second tank 3 and the third tank 61 and one end of the flow path 62 exists in the hydraulic fluid in the second tank 3, the supply of the hydraulic fluid is stopped. It is necessary to close the flow path 62 even during the time. In this case, a pump capable of shielding the flow path when stopped may be used, and the one end of the flow path 62 may be disposed at a position above the liquid level of the hydraulic fluid in the second tank 3. Or you may arrange | position the valve | bulb which can close the flow path 62 separately.

[Second Embodiment]
Hereinafter, a second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a conceptual diagram of the imprint apparatus according to the present embodiment.

  As shown in FIG. 5, the imprint apparatus 200 of the present invention mainly includes a liquid ejection apparatus 100 </ b> A and a pattern forming unit (pattern forming unit) 900.

  The liquid ejection device 100A has basically the same configuration as the ejection device 100 of the first embodiment. In this embodiment, a photocurable resist is accommodated in the first chamber 21 of the first tank 2, and a wafer substrate 91 </ b> A (substrate) described later from the head 1 communicating with the first chamber 21. Resist is discharged. On the other hand, the second chamber 22 is filled with a working fluid having a density close to that of the resist.

  In this embodiment, the resist is made of a photocurable resin, but may be made of another photocurable material (liquid). In this embodiment, an aluminum multilayer film having a thickness of 10 μm to 200 μm is used as the flexible film 8. A material such as an aluminum multilayer film is suitable as a flexible portion because it has stability with respect to a resist and has a characteristic that liquid and gas are not easily transmitted.

  The pattern forming unit 900 mainly includes a mold 94 and an exposure unit (light irradiation means) 95. Further, the pattern forming unit 900 is provided with a moving means 96 for moving the mold 94 up and down.

  The mold 94 is held by the first holding unit 97 via the moving unit 96, and the exposure unit 95 is held by the second holding unit 98. The mold 94 is made of a light-transmitting quartz material, and a groove-like fine pattern (uneven pattern) is formed on one surface (lower surface) side. The exposure unit 95 is disposed above the mold 94 and can be cured by irradiating a resist (pattern) on a wafer substrate 91 </ b> A described later across the mold 94.

  Hereinafter, a forming process for forming a pattern on the surface of the wafer substrate 91A using the imprint apparatus 200 of the present embodiment will be described.

  In this embodiment, the upper surface of the wafer substrate on which the resist is discharged (applied) by the liquid discharge device is brought into contact with the lower surface of the mold on which the concavo-convex pattern is formed. A pattern corresponding to the uneven pattern is formed.

  Specifically, a resist is ejected (applied) from the head 1 of the liquid ejecting apparatus 100A onto the upper surface of the wafer substrate 91A in a predetermined pattern (applying step).

  Thereafter, the wafer substrate 91 </ b> A to which a resist (pattern) is applied (formed) is conveyed below the mold 94 by the conveying means 92.

  The moving means 96 lowers the mold 94 downward, and presses the lower surface of the mold 94 against the resist (pattern) formed on the upper surface of the wafer substrate 91A. As a result, the resist is pushed into and filled in the groove-like fine pattern constituting the concave-convex pattern on the lower surface of the mold 94 (pattern formation step).

  In a state where the resist is filled in a fine pattern, the resist is irradiated with ultraviolet rays from the exposure unit 95 through the light-transmitting mold 94, thereby forming a pattern made of the resist on the surface of the wafer substrate 91A (processing step). ).

  After the pattern is formed, the mold 94 is raised by the moving means 96, and the pattern formed on the wafer substrate 91A and the mold 94 are separated. The pattern formation process on the wafer substrate 91A is completed.

  Similar to the first embodiment, in this embodiment, the liquid level in the second tank 3 is arranged below the discharge port surface 10, and the liquid level in the second tank is set within a predetermined range by the adjusting means 4. By adjusting to, the pressure in the head 1 can be stably controlled within a predetermined range (negative pressure). Therefore, resist (liquid) leakage from the head 1 can be effectively suppressed. Also, the resist can be stably discharged from the head 1.

  Further, in the present embodiment, since the space in the first tank 2 is filled with the resist and the working fluid that are close in density, vibration is effectively suppressed even if the housing 20 is impacted. Therefore, the influence of the vibration on the pressure in the head 1 is small, and the inside of the head 1 can be maintained in a stable negative pressure state.

  In the present embodiment, the hydraulic fluid filled in the second chamber 22 is less susceptible to changes in environmental temperature and pressure than gas. Therefore, even if the ambient temperature or atmospheric pressure around the imprint apparatus 200 changes, the volume of the hydraulic fluid hardly fluctuates, so that fluctuations in the pressure of the resist in the head 1 communicating with the first chamber 21 are reliably suppressed. Yes.

  The imprint apparatus of the present invention can be applied to, for example, a semiconductor manufacturing apparatus or a nanoimprint apparatus that manufactures devices such as semiconductor integrated circuit elements and liquid crystal display elements.

  Parts can be manufactured using the imprint apparatus of the present invention.

  The component manufacturing method may include a step (applying step) of discharging (applying) a resist to a substrate (wafer, glass plate, film-like substrate, etc.) using an imprint apparatus (head).

  In addition, there is a pattern forming process in which the surface of the substrate on which the resist is discharged (applied) and the surface of the mold on which the concavo-convex pattern is formed are brought into contact with each other to form a pattern corresponding to the concavo-convex pattern on the substrate. May be.

  Moreover, you may have a process process which processes the board | substrate with which the pattern was formed. In addition, you may have an etching process process which etches a board | substrate as a process process which processes a board | substrate.

  When manufacturing a device (part) such as a patterned medium (recording medium) or an optical element, a processing process other than the etching process is preferable.

  According to the component manufacturing method of the present invention, the performance, quality, and productivity of the component can be improved and the production cost can be reduced as compared with the conventional component manufacturing method.

DESCRIPTION OF SYMBOLS 1 Head 2 1st tank 3 2nd tank 4 Adjustment means 8 Flexible membrane (flexible part)
DESCRIPTION OF SYMBOLS 10 Discharge port surface 21 1st chamber 22 2nd chamber 100 Inkjet recording apparatus (liquid discharge apparatus)

Claims (7)

A head having a discharge port surface on which a discharge port for discharging liquid is formed;
A first tank for storing liquid to be supplied to the head;
A flexible portion that divides the internal space of the first tank into a first chamber that stores the liquid and a second chamber that stores the working fluid and has flexibility;
A second tank communicating with the second chamber and containing the hydraulic fluid supplied to the second chamber;
And the liquid level of the working fluid in the second tank is disposed below the discharge port surface,
A liquid ejecting apparatus comprising: an adjusting unit configured to adjust a position of a liquid level of the working liquid in the second tank within a predetermined range in a state where the second tank is opened to the atmosphere.   The liquid ejecting apparatus according to claim 1, wherein the adjusting unit includes a liquid level detecting unit that detects a position of a liquid level of the working liquid in the second tank.   The adjusting means includes a third tank that stores the hydraulic fluid, a flow path that connects the second tank and the third tank, and the operation from the third tank to the second tank that is disposed in the flow path. The liquid discharge apparatus according to claim 1, further comprising: a pump that supplies the liquid.   4. The liquid ejection apparatus according to claim 1, wherein the flexible portion is disposed in the first tank along a vertical direction. 5. A head having a discharge port surface on which a discharge port for discharging liquid is formed;
A first tank for storing liquid to be supplied to the head;
A flexible portion that divides the internal space of the first tank into a first chamber that stores the liquid and a second chamber that stores the working fluid and has flexibility;
A second tank that communicates with the second chamber and stores the hydraulic fluid supplied to the second chamber, and the level of the hydraulic fluid in the second tank is more than the discharge port surface. An imprint apparatus disposed below,
Adjusting means for adjusting the position of the liquid level of the working fluid in the second tank within a predetermined range in a state where the second tank is opened to the atmosphere;
The one surface of the substrate on which the liquid is discharged onto one surface by the head is brought into contact with the surface on which the concavo-convex pattern of the mold on which the concavo-convex pattern is formed, and the one surface of the substrate And forming means for forming a pattern corresponding to the concave-convex pattern of the mold. The liquid is a photocurable liquid,
The imprint apparatus according to claim 5, wherein the pattern forming unit includes a light irradiation unit configured to irradiate the pattern formed on the substrate with light to cure the pattern. A head having a discharge port surface on which a discharge port for discharging liquid is formed;
A first tank for storing liquid to be supplied to the head;
A flexible portion that divides the internal space of the first tank into a first chamber that stores the liquid and a second chamber that stores the working fluid and has flexibility;
A second tank communicating with the second chamber and containing the hydraulic fluid supplied to the second chamber;
Adjusting means for adjusting the position of the liquid level of the working fluid in the second tank to be within a predetermined range in a state where the second tank is opened to the atmosphere, Using the imprint apparatus in which the liquid level of the working fluid is disposed below the discharge port surface, a component manufacturing method for manufacturing a component including a substrate,
An applying step of applying a liquid to the surface of the substrate by the head;
A pattern forming step of bringing the surface of the substrate to which the liquid has been applied into contact with the surface of the mold on which the concavo-convex pattern is formed, and forming a pattern corresponding to the concavo-convex pattern of the mold on the surface of the substrate; ,
And a processing step of processing the substrate on which the pattern is formed.

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