JP6491980B2 - Manufacturing method of optical module - Google Patents

Description

  The present invention relates to a method for manufacturing an optical module.

  Patent Document 1 discloses a PLC (Planar Lightwave Circuit) type demodulator that receives a polarization multiplexed coherent modulation signal formed by superimposing a coherently modulated X polarization component and a Y polarization component, and uses the same. An optical transmission system was disclosed.

International Publication No. 2011/027895

  When manufacturing an optical module incorporating an optical component such as a mirror or a beam splitter, it may be required to adjust the angle of the optical component with respect to the housing with extremely high accuracy depending on the application of the optical module. For example, in an optical module used for coherent optical communication as described in Patent Document 1, signal light and local oscillation light (local light) input from the outside via an optical input port are transmitted inside the optical module housing. It is required that the light 90 ° hybrid element fixed to be incident on the minute light input end of the hybrid element with high accuracy. Optical components such as mirrors and beam splitters are arranged on the optical path between the optical input port and the optical 90 ° hybrid element. However, signal light and local light are accurately incident on the optical input end of the optical 90 ° hybrid element. Therefore, it is required to accurately adjust the angles (optical axis direction) of these optical components with respect to the housing. On the other hand, in order to reduce the manufacturing cost, an optical component that does not require strict alignment needs to be easily adjusted.

  An object of the present invention is to provide an optical module manufacturing method capable of accurately and easily adjusting the angle of an optical component with respect to a housing.

  In order to solve the above-described problem, an optical module manufacturing method according to an embodiment of the present invention includes an optical component having at least one optical port of an optical input port and an optical output port, and an optical component in a housing. A method for manufacturing a module, comprising preparing a standard mirror that simulates one end surface of a housing to which at least one optical port is fixed, and aligning the optical axis direction of the autocollimator with the optical axis direction of the standard mirror; A step of replacing the standard mirror with a housing and adjusting the optical axis direction of the optical component using the optical axis of the autocollimator and a step of fixing the optical component to the housing are included.

  According to the method for manufacturing an optical module according to the present invention, the angle adjustment of the optical component with respect to the housing can be accurately and easily performed.

FIG. 1 is a plan view showing a configuration of an optical module according to an embodiment of the present invention. FIG. 2 is a perspective view of the optical module as viewed obliquely from above. FIG. 3 is a diagram for explaining a method of manufacturing an optical module, and shows a state in which a carrier is mounted on a base and fixed to each other. FIG. 4 is a diagram for explaining a method of manufacturing an optical module, and shows a state in which a plurality of die capacitors are mounted on two wiring boards. FIG. 5 is a view for explaining the method of manufacturing the optical module, and shows a state in which the base is mounted on the bottom surface of the package. 6A and 6B are diagrams for explaining a method of manufacturing an optical module, in which (a) a standard mirror having a light reflecting surface and a bottom surface perpendicular to each other is installed, and (b) the standard mirror is mounted on a base and a VOA. It shows how to replace the package with a carrier. FIG. 7 is a diagram for explaining a method of manufacturing the optical module, and shows a state in which the monitor PD is mounted on the VOA carrier. FIG. 8 is a diagram for explaining the method of manufacturing the optical module, and shows a state in which the test port is arranged on one end surface of the casing. FIG. 9A and FIG. 9B are block diagrams showing a configuration for preparing test light. FIG. 10 is a diagram for explaining a method of manufacturing the optical module, and shows a state in which the first mirror and the second mirror are mounted on the carrier. FIG. 11 is a diagram for explaining a method of manufacturing an optical module, and shows a state in which a condensing lens near an optical 90 ° hybrid element is mounted on a carrier. FIG. 12 is a diagram for explaining a method of manufacturing an optical module, and shows a state in which a condenser lens far from the optical 90 ° hybrid element is mounted on a carrier. FIG. 13 is a graph showing an example of a relationship between a lens position shift and a change in coupling efficiency with respect to a minute coupling target when two condenser lenses are arranged side by side in the optical axis direction. FIG. 14 is a diagram for explaining a method of manufacturing an optical module, and shows a state where a collimating lens is mounted on a VOA carrier. FIG. 15 is a diagram for explaining a method of manufacturing an optical module, and shows a state in which a variable optical attenuator is mounted on a VOA carrier. FIG. 16 is a view for explaining the method of manufacturing the optical module, and shows how the lid is attached to the package. FIG. 17 is a diagram for explaining a method of manufacturing the optical module, and shows a state in which the signal light input port and the local light input port are attached to the package.

  A specific example of an optical module manufacturing method according to an embodiment of the present invention will be described below with reference to the drawings. In addition, this invention is not limited to these illustrations, is shown by the claim, and intends that all the changes within the meaning and range equivalent to the claim are included. In the following description, the same reference numerals are given to the same elements in the description of the drawings, and redundant descriptions are omitted.

  FIG. 1 is a plan view showing a configuration of an optical module 1A according to an embodiment of the present invention. FIG. 2 is a perspective view of the optical module 1A as viewed obliquely from above. The optical module 1 </ b> A of this embodiment includes a substantially rectangular parallelepiped package (housing) 2, a signal light input port 11 and a local light input port 13 fixed to one end surface 2 b of the package 2. Hereinafter, in the description of the internal structure of the package 2, the one end surface 2b side may be referred to as a front side.

  The signal light input port 11 is connected to a single mode fiber (SMF) 10 and receives received signal light (SiGnal; hereinafter referred to as signal light) from the SMF 10. The local light input port 13 is connected to a polarization maintaining fiber (PMF) 12 and receives local oscillation light (Local; hereinafter referred to as local light) from the PMF 12. These signal light and local light are input into the package 2 via the signal light input port 11 and the local light input port 13, respectively.

  In addition, among the four side surfaces of the package 2, a plurality of terminals 3 are provided on the other side surface except the one end surface 2 b. The plurality of terminals 3 include a terminal for taking out an electrical reception signal generated from the signal light to the outside of the optical module 1A, a terminal for supplying a power supply voltage and a bias to an electronic circuit inside the package 2, and a ground Terminal etc. are included.

  The signal light input port 11 is formed by integrating a cylindrical sleeve that receives a ferrule attached to the tip of the SMF 10 and a lens holder that houses a condenser lens, and the lens holder is bonded to one end surface 2 b of the package 2. As a result, it is fixed to the package 2. The signal light propagated in the SMF 10 is collected by the condenser lens and enters the package 2.

  The local light input port 13 is formed by integrating a cylindrical sleeve that receives a ferrule attached to the tip of the PMF 12 and a lens holder that houses a collimating lens, and the lens holder is joined to one end surface 2 b of the package 2. Is fixed to the package 2. The local light propagating through the PMF 12 is collimated by the collimating lens and then enters the package 2.

  In addition to the above configuration, the optical module 1A according to the present embodiment optically couples the two optical 90 ° hybrid elements 32a and 32b and the input ports 11 and 13 and the optical 90 ° hybrid elements 32a and 32b. Various optical components are provided. Specifically, the optical module 1A includes a polarization beam splitter (Polarization Beam Splitter) as an optical component for optically coupling the signal light input ends of the two light 90 ° hybrid elements 32a and 32b and the signal light input port 11. : PBS) 26, skew adjustment element 27, first lens system 28, wavelength plate (λ / 2 plate) 29, first mirror 30, and second lens system 31. Further, a beam splitter (BS) 22, a variable optical attenuator (VOA) 23, and a collimator lens 25 are arranged on the optical path between the PBS 26 and the signal light input port 11. All of these optical components arranged on the optical path between the signal light input port 11 and the optical 90 ° hybrid elements 32 a and 32 b are accommodated in the package 2.

  The BS 22 separates the signal light input from the signal light input port 11. Part of the separated signal light is incident on a power monitoring photodiode (monitoring PD) 24 that is one of the photodetectors arranged in the package 2. The monitor PD 24 generates an electrical signal corresponding to the intensity of the signal light. Note that the intensity of the signal light separated in the BS 22 is less than 10% of the signal light intensity before entering the BS 22.

  The VOA 23 attenuates the signal light that has passed through the BS 22 as necessary. The degree of attenuation is controlled by an electrical signal from the outside of the optical module 1A. For example, when an over-input state is detected based on the electrical signal from the monitor PD 24 described above, the attenuation of the VOA 23 is increased and the intensity of the signal light directed to the light 90 ° hybrid elements 32a and 32b is decreased. To do.

  The collimator lens 25 collimates the signal light that has passed through the VOA 23. Note that the VOA 23 is preferably located at the beam waist formed between the condensing lens of the signal light input port 11 and the collimating lens 25. Thereby, it is possible to secure a sufficiently narrow beam diameter with respect to the opening of the VOA 23. Further, since the signal light becomes collimated light by the collimating lens 25, high coupling efficiency can be secured for the optical path to the signal light input ends of the light 90 ° hybrid elements 32a and 32b.

  BS 22, VOA 23 and monitor PD 24 are fixed on VOA carrier 20 mounted on bottom surface 2 a of package 2. The VOA carrier 20 mounts these optical components on two upper and lower surfaces forming a step. Specifically, the BS 22 and the monitor PD 24 are mounted on one surface, and the VOA 23 is mounted on the other surface.

  The PBS 26 has a light incident surface that is optically coupled to the signal light input port 11 via the BS 22 and the VOA 23, and a part of the polarization component (eg, X polarization component) of the signal light and the remaining polarization component (eg, the polarization component). Y polarization component). At this time, the branching ratio is 50%. The skew adjustment element 27 and the first lens system 28 are disposed on the optical path between one light output surface of the PBS 26 and the signal light input end of the light 90 ° hybrid element 32b. The signal light that travels straight through the PBS 26 passes through the skew adjustment element 27. The skew adjustment element 27 compensates for the delay time between the other signal light branched by the PBS 26. Thereafter, the signal light is collected by the first lens system 28 and reaches the light 90 ° hybrid element 32b. Note that the first lens system 28 includes two condenser lenses 28a and 28b arranged in the optical axis direction.

  The λ / 2 plate 29, the first mirror 30, and the second lens system 31 are disposed on the optical path between the other light output surface of the PBS 26 and the signal light input end of the light 90 ° hybrid element 32b. Yes. The signal light bent (branched) in the PBS 26 passes through the λ / 2 plate 29. The λ / 2 plate 29 rotates the polarization direction of the signal light by 90 °. Therefore, the polarization direction of the signal light that has passed through the λ / 2 plate 29 coincides with the polarization direction of the signal light that has traveled straight through the PBS 26. Thereafter, the traveling direction of the signal light is bent by 90 ° by the first mirror 30, and then condensed by the second lens system 31 to reach the light 90 ° hybrid element 32a. Note that the second lens system 31 includes two condenser lenses 31a and 31b arranged in the optical axis direction. Further, the first mirror 30 is constituted by, for example, a cubic mirror (a rectangular parallelepiped or a cubic mirror having a reflecting surface extending in a diagonal direction between a pair of opposed surfaces).

  The optical module 1A includes a BS 34, a skew adjustment element 35, a third lens system 36, as optical components for optically coupling the local light input terminals of the two light 90 ° hybrid elements 32a and 32b and the local light input port 13. A second mirror 37 and a fourth lens system 38 are further provided. Further, a polarizer 33 is disposed on the optical path between the BS 34 and the local light input port 13. All of these optical components arranged on the optical path between the local light input port 13 and the optical 90 ° hybrid elements 32 a and 32 b are accommodated in the package 2.

  The polarizer 33 determines the polarization direction of the local light input from the local light input port 13. Thereby, even if the polarization direction maintained in the PMF 12 is shifted when the package 2 is assembled, only the polarization component having the polarization direction of 0 ° or 90 ° can be extracted as the local light.

  The BS 34 has a light incident surface that is optically coupled to the local light input port 13 via the polarizer 33, and branches the local light that has passed through the polarizer 33 into two. At this time, the branching ratio is 50%. The skew adjustment element 35 and the third lens system 36 are disposed on the optical path between one light output surface of the BS 34 and the local light emission input end of the light 90 ° hybrid element 32a. The local light that travels straight through the BS 34 passes through the skew adjustment element 35. The skew adjustment element 35 compensates for the delay time from the other local light branched by the BS 34. Thereafter, the local light reaches the light 90 ° hybrid element 32 a while being collected by the third lens system 36. Note that the third lens system 36 includes two condenser lenses 36a and 36b arranged in the optical axis direction.

  The second mirror 37 and the fourth lens system 38 are disposed on the optical path between the other light output surface of the BS 34 and the local light input end of the light 90 ° hybrid element 32b. The local light that has been bent (branched) in the BS 34 is converged by the fourth lens system 38 after its traveling direction is bent by 90 ° by the second mirror 37, and reaches the light 90 ° hybrid element 32b. The fourth lens system 38 is constituted by two condenser lenses 38a and 38b arranged in the optical axis direction. Moreover, the 2nd mirror 37 is comprised by the cubic mirror, for example.

  As described above, the signal light and local light input into the package 2 are distributed to the two light 90 ° hybrid elements 32a and 32b. The optical 90 ° hybrid elements 32a and 32b are, for example, photodiode (PD) integrated multimode hybrids using a semiconductor substrate made of indium phosphide (InP), and the PD integrated in the optical 90 ° hybrid elements 32a and 32b. The photocurrent generated in is converted into a voltage signal by amplifiers 39a and 39b provided in the package 2, and is output from any of the plurality of terminals 3. The PD integrated in the optical 90 ° hybrid elements 32a and 32b is an example of the light detection element in the present embodiment.

  A method for manufacturing the optical module 1A of the present embodiment having the above configuration will be described. 3-17 is a figure for demonstrating the manufacturing method of 1 A of optical modules.

First, as shown in FIG. 3 (perspective view), the carrier 40 is mounted on the base 21 and fixed to each other outside the package 2. The base 21 is a rectangular plate-shaped member made of, for example, copper tungsten (CuW). The carrier 40 is a rectangular plate member made of alumina (Al ₂ O ₃ ), for example. For fixing the carrier 40 and the base 21, for example, AuSn eutectic solder can be used. On the base 21, a groove 21 a that partitions the carrier 40 mounting region and the optical 90 ° hybrid elements 32 a and 32 b is formed in advance. The relative position of the base 21 and the carrier 40 in the front-rear direction of the package 2 is determined by visually aligning the rear end of the carrier 40 with the front edge of the groove 21a. Instead of this, an alignment in which the front edge of the base 21 and the front edge of the carrier 40 are matched may be performed.

  Note that when the base 21 is disposed in the package 2 in a later process, the width of the base 21 substantially matches the interval between the inner walls of the package 2, and thus a pair of constrictions 21 b formed on the side surface of the base 21. It is good to hold. The alignment of the carrier 40 in the direction orthogonal to the front-rear direction of the package 2 may be performed using a pair of constrictions 21 b formed on the base 21. That is, since the space | interval of the center part of the base 21 is narrowed by the constriction 21b, it is good to make the both ends position of the narrow part and the both ends position of the carrier 40 correspond.

  Next, the optical 90 ° hybrid element 32a is mounted on the MMI carrier 41 and fixed (die-bonded) to each other. Similarly, the optical 90 ° hybrid element 32b is mounted on another MMI carrier 41 and fixed to each other. The MMI carrier 41 is a rectangular parallelepiped member and is made of ceramic such as AlN or alumina, for example. For fixing the optical 90 ° hybrid elements 32a and 32b and the MMI carrier 41, for example, AuSn eutectic solder is used. For this fixing, a technique similar to a known method of mounting a normal semiconductor device on an insulating substrate can be used. Thereafter, the two MMI carriers 41 on which the optical 90 ° hybrid elements 32a and 32b are mounted are fixed to a region located on the rear end side of the carrier 40 in the base 21. A groove 21c is previously formed on the base 21 so as to surround a fixed region of the MMI carrier 41, and the MMI carrier 41 is arranged by visual alignment with the groove 21c as a reference.

  A groove 41 a that separates the front side and the rear side of the MMI carrier 41 is formed on the MMI carrier 41. The front side of the MMI carrier 41 corresponds to an optical waveguide portion built in the optical 90 ° hybrid elements 32a and 32b. The rear side of the MMI carrier 41 corresponds to a PD portion built in the optical 90 ° hybrid elements 32a and 32b. The back electrodes of the optical 90 ° hybrid elements 32a and 32b are also separated into the front side and the rear side, and as a result, it is possible to contribute to the reduction of the leakage current of the built-in PD.

  A plurality of die capacitors (parallel plate capacitors) are mounted on the two wiring boards 43 shown in the perspective view of FIG. 4 in parallel with the fixing of the MMI carrier 41 and the optical 90 ° hybrid elements 32a and 32b. The wiring substrate 43 is made of, for example, aluminum nitride (AlN). For mounting a plurality of die capacitors, for example, AuSn pellets can be used, and a known soldering process may be employed. Thereafter, one of the two wiring boards 43 on which a plurality of die capacitors are mounted is arranged around the optical 90 ° hybrid element 32a and fixed to the base 21, and the other is arranged around the optical 90 ° hybrid element 32b. And fixed to the base 21.

  Subsequently, the base 21 is mounted on the bottom surface 2 a of the package 2 as shown in the perspective view in which a part of the side wall in FIG. At this time, for example, after the front end of the base 21 is abutted against the inner surface of the side wall constituting the one end surface 2b of the package 2 and the base 21 and the package 2 are aligned, the base 21 is separated from the side wall by a predetermined dimension. In this state, the base 21 may be disposed on the bottom surface 2a of the package 2. Here, the inner surface of each side wall of the package 2 is configured in two stages as shown in FIG. 1, the upper stage is made of metal, and the lower stage is made of ceramic in order to insulate a plurality of terminals 3 from each other. Although the inner dimension (distance between walls) of the lower stage is almost the same as the width of the base 21, the inner dimension of the upper stage is wider than the width of the base 21. Therefore, the base 21 can be abutted against the inner surface of the upper side wall, and thereby the alignment between the package 2 and the base 21 (and each component already mounted on the base 21) can be within ± 0.5 °. It is possible to realize. The base 21 is fixed to the bottom surface 2a using, for example, solder.

  In this step, the VOA carrier 20 is mounted on the bottom surface 2 a of the package 2 together with the base 21. At this time, for example, after the front end of the VOA carrier 20 is abutted against the inner surface of the side wall constituting the one end surface 2b of the package 2 and the VOA carrier 20 and the package 2 are aligned, the VOA carrier 20 is attached to the side wall by a predetermined dimension. In this state, the VOA carrier 20 may be disposed on the bottom surface 2a of the package 2. Thereby, the front end of the carrier 40 and the rear end of the VOA carrier 20 are parallel to each other. The VOA carrier 20 is fixed to the bottom surface 2a using, for example, solder.

  After the base 21 is fixed to the bottom surface 2a, the amplifiers 39a and 39b (see FIGS. 1 and 2) are mounted on the wiring board 43. The amplifiers 39a and 39b are mounted by a known mounting method using a conductive resin such as silver paste. After mounting the amplifiers 39a and 39b, the temperature of the entire package 2 is raised (up to 180 ° C.), thereby evaporating the solvent contained in the conductive resin. Thereafter, wiring for electrically connecting the electrode pads on the upper surfaces of the amplifiers 39a and 39b and the terminals 3 on the rear side of the package 2 (see FIGS. 1 and 2) is performed. By this wiring, the active alignment of the optical component in the subsequent process, that is, the test light is input to the optical 90 ° hybrid elements 32a and 32b, and the output signal of the PD built in the optical 90 ° hybrid elements 32a and 32b is obtained. Each optical component can be arranged at a position where the intensity is maximum.

  Subsequently, as shown in FIG. 6A, a standard mirror 104 having a light reflecting surface 104a and a bottom surface 104b perpendicular to each other is prepared. The light reflecting surface 104 a simulates one end surface 2 b of the package 2, and the bottom surface 104 b simulates the back surface of the package 2. The standard mirror 104 is configured by a rectangular parallelepiped glass block, for example. Then, this standard mirror 104 is set on an alignment table (stage) 103 fixed on the support table 101. At this time, the bottom surface 104b and the alignment table 103 are brought into contact with each other.

  Subsequently, the optical axis direction of the autocollimator 102 is aligned with the optical axis direction of the standard mirror 104. Specifically, the visible laser beam L1 is output from the autocollimator 102, and the laser beam L1 is applied to the light reflecting surface 104a. Then, the light intensity of the visible laser beam L1 reflected on the light reflecting surface 104a is detected on the autocollimator 102 side. When the visible laser light L1 before reflection and the visible laser light L1 after reflection overlap each other, the detected light intensity becomes maximum. By utilizing this, the optical axis direction of the autocollimator 102 is aligned with the normal direction of the light reflecting surface 104a, that is, the optical axis direction of the standard mirror 104. At this time, the optical axis direction of the standard mirror 104 may be aligned with the optical axis direction of the autocollimator 102 by adjusting the turning angle and the rotation angle of the stage 103 on which the standard mirror 104 is placed.

  Thereafter, the standard mirror 104 is removed from the alignment table 103 and replaced with the package 2 on which the base 21 and the VOA carrier 20 are mounted (FIG. 6B). At this time, the bottom surface of the package 2 is brought into contact with the alignment table 103. Since the optical axis of the autocollimator 102 passes through the space above the package 2, the visible laser light L 1 passes above the package 2 and is not introduced into the package 2.

  Subsequently, as shown in FIG. 7, the monitoring PD 24 is mounted on the VOA carrier 20. Further, the PBS 26, the skew adjusting element 27, the λ / 2 plate 29, the polarizer 33, the BS 34, and the skew adjusting element 35 are mounted at predetermined mounting positions on the carrier 40, respectively. These optical components are optical components that do not require alignment work, and are adjusted only in the optical axis direction and then fixed to the carrier 40 or the VOA carrier 20.

  In this step, the angle (optical axis direction) of the optical component is adjusted using the optical axis of the autocollimator 102 (see FIG. 6A). That is, one side surface of these optical components is used as a reflection surface for the visible laser light L1 of the autocollimator 102, and the visible laser light L1 before reflection and the visible laser light L1 after reflection overlap each other. Adjust the angle (optical axis direction). This operation is performed on the optical axis of the autocollimator 102, that is, in the space above the package 2. Then, while maintaining the orientation of the optical component (or rotating it by a predetermined angle as necessary), these optical components are placed on the adhesive resin provided at each mounting position on the carrier 40 (or on the VOA carrier 20). Are moved, and the adhesive resin is cured to fix them.

  Regarding the PBS 26, the skew adjustment element 27, the polarizer 33, and the skew adjustment element 35, since the light incident surface faces forward when mounted on the package 2, the normal direction of the light incident surface and the light of the autocollimator 102 These optical axis directions may be adjusted so that the axes coincide with each other and mounted on the base 21 while maintaining the direction. In addition, with respect to the λ / 2 plate 29 and the monitor PD 24, the light incident surface faces sideways when mounted on the package 2, so that the normal direction of the light incident surface coincides with the optical axis of the autocollimator 102. After adjusting the direction of the optical axis so as to be rotated, the optical axis direction may be rotated by 90 ° around the normal of the upper surface of the base 21 and then mounted on the base 21. The monitor PD 24 is further electrically connected to the predetermined terminal 3 by performing wire bonding with the predetermined terminal 3. With respect to the BS 34, the light incident surface faces sideways when mounted on the package 2, but the light emitting surface faces rearward, so that the normal direction of the light emitting surface or the surface opposite to the light emitting surface and auto After adjusting the optical axis direction so that it coincides with the optical axis of the collimator 102, it is preferable to mount the collimator 102 on the base 21 while maintaining the direction.

  Subsequently, the optical coupling tolerance for the optical components different from the above-described optical components, that is, the optical 90 ° hybrid elements 32a and 32b is the above-described optical components (monitoring PD 24, PBS 26, skew adjusting element 27, λ / 2 plate 29). The collimator lens 25, the first mirror 30, the first lens system 28, the second lens system 31, the third lens system 36, which require alignment because they are smaller than the polarizer 33, the BS 34, and the skew adjustment element 35). The second mirror 37 and the fourth lens system 38 are mounted on the carrier 40. In preparation, test ports (simulated connectors) 50a and 50b are arranged on one end surface 2b of the package 2 as shown in FIG. The test ports 50a and 50b simulate the signal light input port 11 and the local light input port 13, respectively. Test light used for alignment of the other optical components is emitted from the test ports 50a and 50b. Hereinafter, details of the process of preparing the test light will be described.

  FIG. 9A is a block diagram showing a configuration for preparing test light. In this configuration, a bias voltage is applied from the bias power source 111 to the light source 112 (for example, a semiconductor laser) to generate test light. This test light is introduced into the polarization control element 113 and its polarization plane is controlled. Thereafter, the test light passes through the optical coupler 114 and reaches the connector 116. One of the connectors 117 and 118 is selectively connected to the connector 116. A test port 50 a is optically coupled to the connector 117, and a power meter 119 is optically coupled to the connector 118. A power meter 115 is connected to the optical coupler 114. One power meter may be used in combination as the power meters 115 and 119. A configuration similar to the above is also prepared for the test port 50b.

  First, the connector 118 is connected to the connector 116. Then, the intensity of the test light output from the light source 112 is detected by the power meter 119, and the intensity of the test light is brought close to a predetermined intensity by adjusting the magnitude of the bias voltage. Next, the package 2 is removed from the alignment table 103 again and replaced with the standard mirror 104. Then, the connector 117 is connected to the connector 116, and the test ports 50a and 50b are arranged so as to face the light reflecting surface 104a of the standard mirror 104. When test light is output from the light source 112 in this state, the test light is emitted from the test ports 50a and 50b, then reflected by the light reflecting surface 104a, and is incident on the test ports 50a and 50b again. The intensity of the test light is detected by the power meter 115 via the optical coupler 114. The optical axis direction of the test port 50a (or 50b) can be aligned with the optical axis direction of the standard mirror 104 by adjusting the optical axis direction of the test ports 50a and 50b so that the light detection intensity becomes maximum.

  After adjusting the optical axis directions of the test ports 50a and 50b as described above, the standard mirror 104 is removed again from the aligning base 103 and replaced with the package 2 as shown in FIG. Then, in order to adjust the polarization plane of the test light entering the package 2 from the test port 50a, a test jig having a PBS and two monitor PDs is arranged at the rear stage of the test port 50a inside the package 2. The polarization control element 113 adjusts the polarization plane of the test light so that the intensities of the two test lights branched by the PBS are detected by each monitor PD and the intensities thereof are equal to each other.

  In the polarization adjustment described above, output signals from the two monitor PDs included in the test jig may be taken out from any terminal 3 of the package 2. In addition, when the test jig is provided with terminals for taking out output signals from the two monitor PDs, the polarization adjustment described above may be performed before the package 2 is placed on the alignment table 103. Good.

  Subsequently, the test ports 50a and 50b are aligned. First, the intensity of the test light entering the package 2 from the test port 50a is detected by the PD built in the light 90 ° hybrid element 32a. Then, while referring to the intensity of the detected test light, the test port 50a is moved in the direction in which the intensity increases, thereby performing alignment in a plane perpendicular to the optical axis of the test port 50a. Similarly, the intensity of the test light entering the package 2 from the test port 50b is detected by the PD built in the light 90 ° hybrid element 32b. Then, while referring to the intensity of the detected test light, the test port 50b is moved in the direction in which the intensity increases, thereby performing alignment in a plane perpendicular to the optical axis of the test port 50b. The mode field diameter of the test light is as large as 300 μm, for example, while the light input ends of the light 90 ° hybrid elements 32a and 32b are small, such as a width of several μm and a thickness of 1 μm or less. Therefore, although the intensity of the test light input to the optical 90 ° hybrid elements 32a and 32b is weak, it is possible to obtain a detection signal that determines the optical axis of the test light.

  The positions of the test ports 50a and 50b in the optical axis direction can be determined by bringing the end surfaces of the test ports 50a and 50b into contact with the one end surface 2b of the package 2.

  Subsequently, each optical component that requires alignment is placed on the optical path between the test port 50a or 50b and the optical 90 ° hybrid elements 32a and 32b, and the PD (or the PD) (or the optical 90 ° hybrid elements 32a and 32b) is built in. These optical components are aligned while referring to the intensity of the test light detected in the monitor PD 24). Further, these optical components are fixed on the carrier 40 of the package 2. In addition, the order of alignment and fixing of these optical components is not restricted to the following description, It can carry out in arbitrary orders.

  In this step, the VOA bias power source 120 and the voltage monitors 121 and 122 are connected to the package 2 as shown in FIG. The VOA bias power supply 120 applies a bias voltage to the VOA 23 when the VOA 23 described later is installed. The voltage monitors 121 and 122 monitor voltage signals from the amplifiers 39a and 39b, respectively.

  First, BS 22 (see FIGS. 1 and 2) is aligned and fixed. That is, the angle (optical axis direction) of the BS 22 is adjusted using the visible laser light of the autocollimator 102 passing through the space above the package 2 with the front surface of the BS 22 as a reflection surface. Then, the BS 22 is moved onto the VOA carrier 20 while maintaining the orientation of the BS 22. Then, while the BS 22 is moved in the front-rear direction on the VOA carrier 20, the mounting position where the light reception intensity at the monitor PD 24 is maximized is determined. After determining the mounting position, the BS 22 is fixed to the VOA carrier 20 using an adhesive resin.

  Next, as shown in FIG. 10, the first mirror 30 and the second mirror 37 are aligned and fixed. First, the angles of the mirrors 30 and 37 (optical axis direction) are adjusted using the visible laser light of the autocollimator 102 passing through the upper space of the package 2 with the front surfaces of these mirrors 30 and 37 as reflection surfaces. . Then, the mirrors 30 and 37 are moved onto the carrier 40 while maintaining the orientation of the mirrors 30 and 37. Test light from the test ports 50a and 50b is incident on the mirrors 30 and 37, and the test light reflected by the mirrors 30 and 37 is detected by the built-in PD of the light 90 ° hybrid elements 32a and 32b. Then, the angle at which the received light intensity at the built-in PD is maximized is determined while slightly changing the angles of the mirrors 30 and 37. After determining the angle, the mirrors 30 and 37 are fixed to the carrier 40 using an adhesive resin.

  Subsequently, the first lens system 28, the second lens system 31, the third lens system 36, and the fourth lens system 38 are aligned and fixed. First, as shown in FIG. 11, the focusing lenses 28a, 31a, 36a, and 38a (that is, the focusing lenses near the light 90 ° hybrid elements 32a and 32b) are aligned and fixed. First, these condensing lenses 28a, 31a, 36a, and 38a are arranged on the carrier 40, and test light from each test port 50a, 50b is incident, and passes through the condensing lenses 28a, 31a, 36a, and 38a. The test light thus detected is detected by the built-in PD of the light 90 ° hybrid elements 32a and 32b. Then, while slightly changing the positions and angles of the condenser lenses 28a, 31a, 36a, and 38a, the position and angle at which the received light intensity at the built-in PD is maximized are determined. After determining the position and angle, the condenser lenses 28a, 31a, 36a, and 38a are fixed to the carrier 40 using an adhesive resin. Subsequently, as shown in FIG. 12, the focusing lenses 28b, 31b, 36b, and 38b are aligned and fixed. These alignment and fixing methods are the same as the alignment and fixation methods of the condenser lenses 28a, 31a, 36a, and 38a described above.

  Here, the reason why the two condensing lenses are arranged in the optical axis direction in each of the lens systems 28, 31, 36, and 38 will be described. FIG. 13 shows a lens position shift and a minute coupling target (in this embodiment, light input ends of the 90 ° hybrid elements 32a and 32b) when two condenser lenses are arranged side by side in the optical axis direction. It is a graph which shows an example of the relationship with the change of the coupling efficiency with respect to). FIGS. 13A and 13B show the coupling efficiency due to the positional deviation of the condensing lens on the coupling target side ((a) is a deviation in the direction perpendicular to the optical axis, and (b) is the deviation in the optical axis direction). Shows changes. 13 (c) and 13 (d) show the positional deviation of the condenser lens on the side opposite to the object to be combined ((c) is the deviation in the direction perpendicular to the optical axis, and (d) is the optical axis direction. The change in coupling efficiency due to deviation) is shown. In FIGS. 13C and 13D, it is assumed that the condensing lens on the coupling target side is arranged in advance at the design position.

  First, the shift in the direction orthogonal to the optical axis is examined. As shown in FIG. 13A, in the condensing lens on the coupling target side, the coupling efficiency deteriorates even when the positional deviation is only a few μm, and the coupling efficiency degrades by 30% due to the positional deviation of about 1 μm. . On the other hand, as shown in FIG. 13C, in the condensing lens on the side opposite to the coupling target, the coupling efficiency is hardly deteriorated if the positional deviation is several μm. A positional deviation of several tens of μm is required. Further, considering the deviation in the optical axis direction, as shown in FIG. 13B, the coupling efficiency of the condenser lens on the coupling target side deteriorates even if the positional deviation is several tens of μm. As shown in d), the coupling efficiency of the condenser lens on the side opposite to the coupling target is hardly deteriorated if the positional deviation is several tens of μm.

  Each condensing lens of each lens system 28, 31, 36, and 38 is fixed to the carrier 40 by a resin such as an ultraviolet curable resin. Since the resin shrinks by several μm when solidified, the position of the condenser lens may shift by several μm as the resin solidifies. As described above, the coupling efficiency of the condenser lens on the coupling target side deteriorates even if the positional deviation is several μm.

  On the other hand, the condensing lens on the side opposite to the object to be combined has a very large likelihood compared to the condensing lens on the target side because the coupling efficiency is hardly deteriorated if the positional deviation is several μm. it can. In particular, even a positional deviation of several tens of μm in the optical axis direction is allowed, so that the alignment accuracy in the optical axis direction can be substantially ignored. Therefore, after aligning and fixing the condensing lens on the coupling target side (condensing lenses 28a, 31a, 36a, and 38a in this embodiment), the condensing lens on the opposite side to the coupling target (this embodiment) Then, by performing alignment and fixing of the condenser lenses 28b, 31b, 36b, and 38b), it is possible to sufficiently compensate for the deterioration in coupling efficiency that occurs in the condenser lens on the coupling target side.

  In the above method, after the four condensing lenses 28a, 31a, 36a, and 38a near the light 90 ° hybrid elements 32a and 32b are aligned and fixed, another four condensing lenses 28b and 31b are used. , 36b, and 38b are aligned and fixed. On the other hand, for example, when the set of light source 112 to connector 116 shown in FIG. 9B is commonly used for two test ports 50a and 50b, the test light from one test port is used. After aligning and fixing each condensing lens that performs alignment using, align and fix each condensing lens that performs alignment using test light from the other test port. Also good. For example, the condenser lenses 28a and 31a are first aligned and fixed, the condenser lenses 28b and 31b are aligned and fixed, and then the condenser lenses 36a and 38a are aligned and fixed to collect the light. The lenses 36b and 38b may be aligned and fixed. Thereby, the frequency | count of connection replacement of the light source 112 grade | etc., Can be reduced.

  Further, in the above method, the condensing lens on the coupling target side is fixed at a position where the coupling efficiency is maximized, but the coupling target side is moved away (offset) from the coupling target by a predetermined distance from the position. The condensing lens may be fixed, and the condensing lens on the side opposite to the object to be combined may be fixed at a position where the coupling efficiency is maximized. In the latter case, the position where the coupling efficiency is maximized with only the condenser lens on the coupling target side is different from the position of the condenser lens on the coupling target side when the coupling efficiency is maximized by the combination of the two condenser lenses. This is because it is farther from the object to be combined than the former.

  After aligning and fixing the lens systems 28, 31, 36, and 38 as described above, the collimating lens 25 is aligned and fixed as shown in FIG. As described above, the condensing lens is mounted on the signal light input port 11 shown in FIGS. 1 and 2, and the collimating lens so that the focal point of the condensing lens and the focal point of the collimating lens 25 coincide with each other. 25 optical axis direction positions are determined. By arranging the VOA 23 at the position of the beam waist formed between the condenser lens and the collimating lens 25, the signal light can be passed through the narrow opening of the VOA 23, and the extinction ratio in the VOA 23 is increased. be able to.

  For this reason, instead of the test port 50a, the collimating lens 25 is centered with another test port 50c on which a condensing lens having the same focal length as that mounted on the signal light input port 11 is mounted. Use it. Accordingly, in this step, the test port 50a is replaced with the test port 50c.

  Specifically, the standard mirror 104 is installed again on the alignment table 103 in place of the package 2, and the connector 116 shown in FIG. 9 is changed from the test port 50a to the test port 50c. Then, the test port 50 c is arranged so as to face the light reflecting surface 104 a of the standard mirror 104. In this state, test light is output from the test port 50c, and the test axis is adjusted in the optical axis direction of the standard mirror 104 by adjusting the optical axis direction of the test port 50c so that the light intensity detected by the power meter 115 is maximized. The optical axis direction of the port 50c is matched. Next, while detecting the intensity of the test light entering the package 2 from the test port 50c with the PD built in the light 90 ° hybrid element 32a, the test port 50c is moved in a direction in which the intensity increases. Alignment is performed in a plane perpendicular to the optical axis of the test port 50c. The position of the test port 50c in the optical axis direction can be determined by bringing the end surface of the test port 50c into contact with the one end surface 2b of the package 2.

  Next, the collimating lens 25 is moved onto the carrier 40, the test light from the test port 50c is made incident on the collimating lens 25, and the intensity of the test light that has passed is detected by the built-in PD of the light 90 ° hybrid element 32a. Then, while slightly changing the position of the collimating lens 25, the position (front-rear direction, left-right direction, and up-down direction) at which the received light intensity at the built-in PD becomes maximum is determined. After the determination, the collimating lens 25 is fixed to the carrier 40 using an adhesive resin.

  Subsequently, as shown in FIG. 15, the VOA 23 is fixed to the VOA carrier 20 through a conductive adhesive. At this time, the VOA 23 is mounted so as to be inclined at a predetermined angle (for example, 7 ° or less) with respect to the optical axis connecting the condensing lens and the collimating lens 25 in the test port 50c. This is to prevent the reflected light from returning to the signal light input port 11. Further, in order to obtain the maximum extinction ratio with respect to the applied voltage, the test light is input from the test port 50c while applying the control voltage to the VOA 23 from the VOA bias power source 120 shown in FIG. The intensity of the test light that has passed through may be detected by the built-in PD of the light 90 ° hybrid element 32a.

  Subsequently, as shown in FIG. 16, a lid 2 c that closes the package 2 is attached by a seam seal, and the inside of the package 2 is hermetically sealed. Then, as shown in FIG. 17, the test port is replaced with the original signal light input port 11 and the local light input port 13, and the signal light input port 11 and the local light input port 13 are aligned and fixed. Specifically, simulated signal light is introduced from the signal light input port 11, and the intensity of the signal light is detected by the built-in PD of the light 90 ° hybrid element 32a. Then, the position of the signal light input port 11 is slightly changed while referring to the intensity of the detected signal light, and the position where the light reception intensity at the built-in PD is maximized is determined. Similarly, local light is actually introduced into the local light input port 13, and the intensity of the local light is detected by the built-in PD of the light 90 ° hybrid element 32b. Then, the position of the local light input port 13 is slightly changed while referring to the detected local light intensity, and the position where the received light intensity at the built-in PD is maximized is determined. After the determination, the signal light input port 11 and the local light input port 13 are fixed to the package 2.

  The effects obtained by the method for manufacturing the optical module 1A according to the present embodiment described above will be described. In the manufacturing method of this embodiment, a standard mirror 104 that simulates one end surface 2b of the package 2 to which the signal light input port 11 and the local light input port 13 are fixed is prepared, and the autocollimator 102 is arranged in the optical axis direction of the standard mirror 104. A step of aligning the optical axis direction of the optical component, a step of replacing the standard mirror 104 with the package 2, adjusting the optical axis direction of the optical component using the optical axis of the autocollimator 102, and a step of fixing the optical component to the package 2. including. The positions of the standard mirror 104 and the package 2 can be matched with high accuracy on the alignment table 103, for example. Therefore, by adjusting the optical axis direction of the autocollimator 102 in advance using the standard mirror 104 in this way, the angle (optical axis direction) of each optical component with respect to the package 2 can be accurately adjusted. In addition, by using the optical axis of the autocollimator 102, the optical axis direction of each optical component can be easily adjusted.

  Further, as in the present embodiment, the optical module 1A has the PD in the package 2 (in the present embodiment, the optical 90 ° hybrid elements 32a and 32b), and this manufacturing method is a test that outputs test light. Aligning the optical axis direction of the ports 50a and 50b with the optical axis direction of the standard mirror 104, replacing the standard mirror 104 with the package 2, and adjusting the test ports 50a and 50b while referring to the intensity of the test light detected in the PD And a step of performing a wick. Thereby, since the position and angle of the test ports 50a and 50b can be adjusted with high accuracy, the position and angle of the optical component using the test light can be adjusted with high accuracy in the subsequent process.

  Further, in the manufacturing method of the present embodiment, after the test ports 50a and 50b are aligned, the optical component is placed between the test ports 50a and 50b and the PD (in this embodiment, the optical 90 ° hybrid elements 32a and 32b). And aligning the optical component while referring to the intensity of the test light detected by the PD, and fixing the optical component to the package 2 may be included. As a result, the position and angle can be adjusted with high accuracy even for an optical component having a small optical coupling tolerance.

  In the manufacturing method according to the present embodiment, the test ports 50a and 50b are replaced with the signal light input port 11 and the local light input port 13, and the signal light input port 11 and the local light input are referred to while referring to the light intensity detected in the PD. A step of aligning the ports 13 and fixing the ports 11 and 13 to the package 2 may be included. Thereby, the position and angle of the ports 11 and 13 can be adjusted with high accuracy.

  Further, as in the present embodiment, the optical axis of the autocollimator 102 may pass through the upper space of the package 2. Thereby, even after the package 2 is fixed on the alignment table 103, the angle (optical axis direction) of the optical component can be easily adjusted using the autocollimator 102.

  The optical module manufacturing method according to the present invention is not limited to the above-described embodiment, and various other modifications are possible. For example, in the above embodiment, both the test ports 50a and 50b are adjusted in the optical axis direction before the BS 22 is mounted. However, the test port 50a is adjusted in the optical axis direction before the BS 22 is mounted, and the test port 50b is adjusted. The adjustment in the optical axis direction may be performed before the second mirror 37 is mounted. Further, the adjustment of the test ports 50a and 50b in the optical axis direction may be performed a plurality of times. For example, the test port 50a is adjusted before the BS 22 is mounted, before the first mirror 30 is mounted, and before the first lens system 28 and the second lens system 31 are mounted, and the test port 50b is adjusted when the second mirror 37 is mounted. By performing before and before mounting the third lens system 36 and the fourth lens system 38, it is possible to improve the alignment accuracy of each optical component.

  In the above-described embodiment, the visible laser light L1 from the autocollimator 102 is provided in the upper space of the package 2 even in the alignment process using the test ports 50a and 50b, and the optical component ( The angle of the BS 22, the first mirror 30, the second mirror 37, etc.) is roughly adjusted. In that case, the package 2 is replaced with the standard mirror 104 again before adjusting the angles of these optical components, and the optical axis of the autocollimator 102 is adjusted, and then the angles of these optical components are adjusted in that state. Good. In that case, after determining the angles of these optical components, the standard mirror 104 is again replaced with the package 2 while holding these optical components, and after adjusting the optical axis direction and position of each test port 50a, 50b, These optical components may be arranged at predetermined positions of the package 2. By such a method, the number of steps is increased, but the alignment accuracy is improved.

  In the above embodiment, the optical module 1A includes only the optical input port (the signal light input port 11 and the local light input port 13), but the manufacturing method according to the present invention includes only the optical output port (or Even when an optical component is mounted on an optical module (having both an optical input port and an optical output port), the same effects as in the above embodiment can be obtained. In that case, the test ports 50a and 50b of the above embodiment may be installed in place of the optical output ports.

  DESCRIPTION OF SYMBOLS 1A ... Optical module, 2 ... Package, 2a ... Bottom surface, 2b ... One end surface, 2c ... Cover, 3 ... Terminal, 10 ... Single mode fiber (SMF), 11 ... Signal light input port, 12 ... Polarization maintaining fiber (PMF) ), 13 ... Local light input port, 20 ... VOA carrier, 21 ... Base, 22 ... Beam splitter (BS), 23 ... Variable optical attenuator (VOA), 24 ... PD for monitoring, 25 ... Collimate lens, 26 ... Polarized light Beam splitter (PBS), 27 ... Skew adjusting element, 28 ... First lens system, 28a, 28b ... Condensing lens, 29 ... λ / 2 plate, 30 ... First mirror, 31 ... Second lens system, 31a, 31b ... Condensing lens, 32a, 32b ... Light 90 ° hybrid element, 33 ... Polarizer, 34 ... Beam splitter (BS), 35 ... Skew adjustment element, 36 ... Third lens system 36a, 36b ... condensing lens, 37 ... second mirror, 38 ... fourth lens system, 38a, 38b ... condensing lens, 39a, 39b ... amplifier, 40 ... carrier, 41 ... MMI carrier, 43 ... wiring board, 50a, 50b, 50c ... test port, 101 ... support base, 102 ... autocollimator, 103 ... alignment table, 104 ... standard mirror, 111 ... bias power source, 112 ... light source, 113 ... polarization control element, 114 ... optical coupler, DESCRIPTION OF SYMBOLS 115 ... Power meter, 116-118 ... Connector, 119 ... Power meter, 120 ... Bias power supply, 121 ... Voltage monitor, L1 ... Visible laser beam.

Claims (9)

A method of manufacturing an optical module having at least one of an optical input port and an optical output port, and having an optical component in a housing,
Preparing a standard mirror for simulating one end surface of the housing to which the at least one optical port is fixed, and aligning the optical axis direction of the autocollimator with the optical axis direction of the standard mirror;
Replacing the standard mirror with the case, and using the optical axis of the autocollimator to adjust the optical axis direction of the optical component;
Fixing the optical component to the housing;
A method for manufacturing an optical module. The optical module has a light detection element in the housing,
Aligning the optical axis direction of the test port for outputting the test light with the optical axis direction of the standard mirror;
Replacing the standard mirror with the case, and aligning the test port while referring to the intensity of the test light detected by the light detection element;
The method for manufacturing an optical module according to claim 1, further comprising:   The method of manufacturing an optical module according to claim 2, wherein the photodetecting element is a photodiode integrated in an optical 90 ° hybrid element. After the step of aligning the test port, an optical component different from the optical component is disposed on the optical path between the test port and the light detection element, and the test detected by the light detection element Aligning the other optical component with reference to the intensity of light; and
Fixing the another optical component to the housing;
The method for manufacturing an optical module according to claim 2, further comprising: After the step of fixing the other optical component, the test port is replaced with the at least one optical port, and the at least one optical port is aligned while referring to the light intensity detected by the light detection element. Process,
Fixing the at least one optical port to the housing;
The method for manufacturing an optical module according to claim 4, further comprising:   The optical module manufacturing method according to claim 4, wherein an optical coupling tolerance of the another optical component is smaller than an optical coupling tolerance of the optical component. The optical component is at least one of a beam splitter, a polarizing beam splitter, a wave plate, and a polarizer,
The method of manufacturing an optical module according to claim 4, wherein the another optical component is at least one of a cubic mirror and a lens. The optical module
Two light 90 ° hybrid elements,
A signal light input port and a local light input port as the light input port;
A polarizing beam splitter as the optical component having a light incident surface optically coupled to the signal light input port;
A beam splitter as the optical component having a light incident surface optically coupled to the local light input port;
A polarizer as the optical component disposed on an optical path between the local light input port and the beam splitter;
A first lens system as the other optical component disposed on an optical path between one light output surface of the polarization beam splitter and a signal light input end of one light 90 ° hybrid element;
A λ / 2 plate and a first mirror as the optical component disposed on the optical path between the other light output surface of the polarizing beam splitter and the signal light input end of the other light 90 ° hybrid element; A second lens system as another optical component;
A third lens system as the other optical component disposed on the optical path between one light output surface of the beam splitter and the local light input end of the other light 90 ° hybrid element;
The second mirror as the optical component and the other optical component arranged on the optical path between the other light output surface of the beam splitter and the local light input end of the one light 90 ° hybrid element A fourth lens system;
The manufacturing method of the optical module of Claim 7 provided with these.   The optical module manufacturing method according to claim 1, wherein an optical axis of the autocollimator passes through an upper space of the housing.

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