JP6472687B2 - 4-probe measurement probe zero adjustment correction jig - Google Patents

Description

  The present invention relates to a zero adjustment correction jig for a four-probe measurement probe in which four probes for four-terminal measurement are implanted (penetrated) in a pin board.

  As shown in FIG. 2, the resistance measuring apparatus based on the four-terminal measurement method has, as a basic configuration, a constant current source 100 that supplies a measurement current to the resistor Rx to be measured, and the resistor Rx to be measured by the measurement current. A voltage measuring means (voltmeter) 200 for measuring the voltage drop that occurs and an arithmetic control unit (CPU) 300 are provided. The arithmetic control unit 300 is I for the measurement current supplied from the constant current source 100, and the voltage measuring means. Assuming that the voltage measured at 200 is V, the resistivity R of the measured resistor Rx is obtained by R = F × V / I (F is a predetermined correction coefficient).

  For this resistance measurement, the current supply side terminals 101 and 102 connected to the positive electrode (Hi) and the negative electrode (Lo) of the constant current source 100 and the positive electrode (Hi) and the negative electrode (Lo) of the voltage measuring means 200 are used. A total of four terminals of the voltage detection terminals 201 and 202 to be connected are used.

  Prior to measurement, various corrections (adjustments) are performed, and one of them is zero adjustment correction (also referred to as short correction). In the zero adjustment correction, measurement is performed with 0Ω between the voltage detection terminals 201 and 202, and the zero point is adjusted by subtracting the offset displayed on the voltage measurement means (voltmeter) 200 at that time.

  If each terminal 101,102: 201,202 is a crocodile clip, for example, as shown in FIGS. 12 (a) and 12 (b) of Patent Document 1, the voltage detection terminals 201, 202 are in direct contact with each other. In addition, if a pair of alligator clips are engaged, zero adjustment correction can be performed.

  On the other hand, when each of the terminals 101, 102: 201, 202 is composed of a single probe pin (referred to as “probe” in this specification), a four-probe measurement probe is shown in FIG. As described above, between the positive current probe 101 and the negative current probe 102 connected to the constant current source 100, the positive voltage probe 201 and the negative voltage probe 202 connected to the voltage detection means 200. Are arranged along an imaginary straight line connecting the current probes 101, 102, and the four probes 101, 102: 201, 202 are implanted in the electrically insulating pin board PB. ) Will be.

  In this integrated four-probe measuring probe, when zero-adjustment correction is performed, the voltage probes 201 and 202 cannot be brought into direct contact with each other. Therefore, conventionally, a correction jig 1 as shown in FIG. 4 is used. .

  The correction jig 1 includes a conductor 3 formed on one surface of a substrate 2 made of an electrical insulating material so as to have an area capable of simultaneously contacting the four probes 101, 102: 201, 202. In this case, the conductor 3 is usually a conductor in which gold is plated on the surface of a relatively thick conductor base layer having a low resistivity.

  According to this, the four probes 101, 102: 201, 202 are simultaneously brought into contact with the conductor 3, and the measurement current is applied from the constant current source 100 toward the negative current probe 102 from the positive current probe 101. By measuring the voltage between the positive electrode side voltage probe 201 and the negative electrode side voltage probe 202 with the voltage measuring means 200 in the flowing state, zero adjustment correction can be performed using the measured voltage value as an offset value.

JP 2012-255739 A

  However, in the correction jig 1 described above, since the surface of the relatively thick conductor base layer is plated as the conductor 3, it is not preferable in terms of cost. Further, since the gold plating is easily peeled off by repeated contact of the probe, durability is applied.

  Furthermore, although the resistance value is small due to gold plating, since there is a resistance value between the voltage probes 201 and 202, it cannot be said to be an accurate zero adjustment correction.

  Accordingly, an object of the present invention is to perform an accurate zero adjustment correction (short correction) for a four-probe measurement probe in which four probes for four-terminal measurement are implanted (penetrated) in a pin board. It is to provide a zero adjustment correction jig.

In order to solve the above problems, the present invention provides a positive voltage probe connected to a voltage detection means and a negative voltage between a positive current probe connected to a constant current source and a negative current probe. In the state where the probes are arranged along a virtual straight line connecting the current probes, the zero of the four-probe measurement probe in which the four probes are implanted on the electrically insulating pin board. In the adjustment correction jig,
A conductive film formed on one side of a substrate made of an electrical insulating material with an area where the four probes can simultaneously contact each other, and the positive voltage probe and the negative voltage probe among the conductive films. The measurement current that flows from the positive current probe toward the negative current probe from the constant current source does not flow between the voltage probes around the voltage probe contact area where Therefore, a current barrier is formed.

  According to a preferred aspect of the present invention, the current barrier is not a ring surrounding the entire circumference of the voltage probe contact area, but a current probe in contact with the voltage probe contact area and each of the current probes existing outside the voltage probe contact area. The needle contact area is conducting.

  According to the present invention, the positive electrode from the constant current source is provided around the voltage detection region where the positive electrode side voltage probe and the negative electrode side voltage probe are in contact with each other in the conductor film formed on one side of the substrate made of the electrical insulating material. Measured current flows between the current probes by forming a current barrier to prevent the measured current flowing from the side current probe toward the negative current probe from flowing between the voltage probes. However, since no voltage is generated between the voltage probes, the display value (reading value) of the voltage measuring means (voltmeter) at 0 V can be obtained as an offset value.

  In addition, the current barrier is not an annular shape that surrounds the entire circumference of the voltage probe contact area, but the voltage probe contact area is electrically connected to the current probe contact area that is in contact with each of the current probes existing outside the voltage probe contact area. In the aspect, when the resistance measuring device based on the four-terminal method has a disconnection detection function (a function for detecting a state in which the probe is not in contact with the resistor to be measured), zero adjustment correction is performed without using the disconnection detection function. It can be carried out.

The top view which shows the zero adjustment correction jig | tool which concerns on embodiment of this invention. The schematic diagram which shows roughly the structure of the resistance measuring apparatus by a four terminal method. The typical front view which shows the structure of 4 probe measuring probes. The top view which shows the conventional zero adjustment correction jig.

  Next, an embodiment of the present invention will be described with reference to FIG. 1, but the present invention is not limited to this. The zero-adjustment correction jig of the present invention has the four-probe measurement probe (four probes 101, 102: 201, 202, linearly arranged in FIG. Applicable to (penetrating) measurement probe).

  As shown in FIG. 1, a zero adjustment correction jig 10 according to this embodiment includes a substrate 11 made of an electrical insulating material and a conductor film 12 formed on one surface of the substrate 11. As the zero adjustment correction jig 10, a copper-clad laminated board for a printed circuit board may be used.

  The conductor film 12 has an area where the four probes 101, 102: 201, 202 included in the four-probe measurement probe shown in FIG.

  Among these, around the voltage probe contact region 12 a where the positive electrode side voltage probe 201 and the negative electrode side voltage probe 202 are in contact, the constant current source 100 moves from the positive electrode side current probe 101 to the negative electrode side current probe 102. A current barrier 13 is formed to prevent the measurement current flowing toward the voltage probe contact region 12a from flowing into the current barrier 13.

  The current barrier 13 is an electrically insulating region in which no current flows. When a copper-clad laminated substrate is used for the zero adjustment correction jig 10, for example, the current barrier 13 can be formed by removing the copper foil by etching or the like.

  If the current barrier 13 is annular, the voltage probe contact region 12a and the current probe contact region 12b where the positive current probe 101 and the negative current probe 102 are in contact with each other are electrically separated. Even if a measurement current is passed between 101 and 102, the voltage probes 201 and 202 can be reliably brought into a 0V state, and an accurate offset value for zero adjustment correction can be obtained.

  However, when the current barrier 13 is annular, the current probes 101 and 102 and the voltage terminals 201 and 202 are electrically disconnected. This is because the probe is not in contact with the resistor to be measured in actual measurement. When the resistance measurement device has a disconnection detection function, the measured value is not displayed (for example, a resistance measurement device using a four-terminal measurement method having a disconnection detection function is No. 2005-69786).

  Therefore, in order to prevent the disconnection detection function from working, the current barrier 13 is not annular, and when the current barrier 13 is formed, a part 12c of the conductor film 12 is left in a part of the current barrier 13 as shown in FIG. The voltage probe contact region 12a and the current probe contact region 12b are brought into a conductive state.

  According to this, when the four probes 101, 102: 201, 202 are simultaneously brought into contact with the zero adjustment correction jig 10, the positive current probe 101 and the positive voltage probe 201 are electrically connected, and the negative electrode Since the side current probe 102 and the negative voltage probe 202 become conductive and enter the measurement state of FIG. 2, the disconnection detection function does not work.

  The current barrier 13 is not limited to the C shape shown in FIG. 1, and the measurement current does not flow between the voltage probes 201 and 202, and the voltage probe contact region 12a and the current probe Any shape may be used as long as it is electrically connected to the contact region 12b.

DESCRIPTION OF SYMBOLS 10 Zero adjustment correction | amendment jig | tool 11 Electrical insulating material board | substrate 12 Conductor film 12a Voltage probe contact area 12b Current probe contact area 13 Current barrier 100 Constant current source 101,102 Current probe 200 Voltage measuring means (voltmeter)
201, 202 Voltage probe

Claims (2)

Between the positive electrode side current probe and the negative electrode side current probe connected to the constant current source, the positive electrode side voltage probe and the negative electrode side voltage probe connected to the voltage detection means connect each of the current probes. In a zero-adjustment correction jig of a four-probe measurement probe in which the four probes are arranged on an electrically insulating pin board in a state of being arranged along an imaginary straight line,
A conductive film formed on one side of a substrate made of an electrical insulating material with an area where the four probes can simultaneously contact each other, and the positive voltage probe and the negative voltage probe among the conductive films. The measurement current that flows from the positive current probe toward the negative current probe from the constant current source does not flow between the voltage probes around the voltage probe contact area where A zero adjustment correction jig characterized in that a current barrier is formed.   The current barrier is not an annular shape that surrounds the entire circumference of the voltage probe contact area, but the voltage probe contact area is electrically connected to the current probe contact area that is in contact with each of the current probes present outside the voltage probe contact area. The zero adjustment correction jig according to claim 1, wherein the zero adjustment correction jig is provided.

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