JP6472309B2 - Measuring device adjustment method, adjusting device, and measuring device - Google Patents

Description

  The present invention relates to an adjustment method, an adjustment device, and a measuring instrument for a measuring instrument including a measuring element that is movably provided in a measuring instrument main body.

  Conventionally, a linear displacement measuring instrument in which a spindle (measuring element) is provided on a measuring instrument main body so as to be linearly movable is known as a measuring instrument (for example, see Patent Document 1). The linear displacement measuring instrument described in this document is composed of a frame (measuring instrument body) and a measuring element made of a material (aluminum) whose linear expansion coefficients are close to each other. The relative position with respect to the probe becomes difficult to change, and the occurrence of measurement error (temperature drift) due to temperature is suppressed.

  However, in the conventional measuring instrument, the displacement detector that is installed inside the measuring instrument body and detects the movement of the measuring element and its associated circuit generate heat, and the thermal expansion of each measuring element and scale causes the linear expansion coefficient. Since it expands according to the distance from the heat source, etc., it is difficult to control the deformation of each member due to heat, and measurement errors cannot be eliminated.

  Therefore, it is possible to reduce the influence of heat on the probe and scale by providing heat dissipation means that releases the heat generated inside the measuring instrument to the outside, and bringing the measuring instrument's internal temperature close to the surrounding environmental temperature. It is done. In this case, the heat dissipating means has a temperature sensor for measuring the internal temperature and the environmental temperature, a setting means for setting the heat dissipation amount based on the temperature difference between these temperature sensors, and a heat dissipation amount set by the setting means. A configuration including a control unit that drives and controls the operation of the heat radiating unit is conceivable.

JP 9-287903 A

  However, if it is intended to provide the heat dissipation means as described above with respect to the conventional measuring instrument, a plurality of devices such as a temperature sensor, its associated circuit, setting means, and control means are required, and the structure of the measuring instrument becomes complicated. There is a problem of increasing the size.

  An object of the present invention is to provide a measuring device adjustment method, an adjusting device, and a measuring device that can reduce the measurement error due to internal heat generation while simplifying the structure of the measuring device.

  The measuring instrument adjustment method of the present invention includes a measuring instrument main body, a measuring element provided movably on the measuring instrument main body, and a measurement value provided on the measuring instrument main body to detect a movement amount of the measuring probe. A measuring device adjustment method comprising: a measuring means for outputting as: a heat dissipating means for dissipating heat from the measuring instrument main body; and a heat dissipating amount setting means for setting a heat dissipating amount by the heat dissipating means, A setting step for setting the measurement point to a reference position and zero-setting the measurement value; a movement holding step for moving the measurement point from the reference position by a predetermined amount and holding the measurement point for a predetermined time; and returning the measurement point to the reference position A measured value reading step for reading the measured value after that, an error determination step for determining an error of the measured value read in the measured value reading step, and a set value of the heat dissipation amount of the heat dissipation amount setting means based on the error Heat dissipation setting When, wherein the setting step, the measurement value reading step, the error determination step, and, the heat radiation amount setting step the error and executes repeatedly until convergence.

  According to the present invention, for a measuring instrument including a measuring instrument main body, a measuring element, a measuring means, a heat radiating means, and a heat radiating amount setting means, a setting process, a movement holding process, and a measurement value reading. By repeatedly executing the process, the error determination process, and the heat radiation amount setting process until the error due to the thermal expansion of the probe converges, the set value of the heat radiation amount setting means can be set to a certain value. Therefore, after setting the set value of the heat dissipation amount setting means to a constant value, that is, after setting to a constant value that balances the amount of heat generated from the measuring means etc. and the amount of heat released from the heat dissipation means, the heat dissipation amount by the heat dissipation amount setting means is set. Since there is no need to change, it is not necessary to provide a control unit for changing the amount of heat dissipation, a temperature sensor for detecting the internal temperature of the measuring instrument body and the ambient temperature, etc., simplifying the structure of the measuring instrument And can be downsized.

  In addition, by radiating the heat generated from the measuring means or the like from the heat radiating means, the influence of heat on the probe can be eliminated, and the measurement accuracy can be minimized and the measurement accuracy can be increased. Further, in the moving and holding step, by holding the measuring element for a predetermined time in a state where the measuring element is moved by a predetermined amount, the influence of heat on the measuring element in a state where the measuring element is moved by a predetermined amount is reflected, and an error due to the influence of the heat By executing the error determination step and the heat radiation amount setting step on the measured value including the heat radiation amount, it is possible to set the heat radiation amount setting value with high accuracy.

  In the present invention, the heat dissipating means includes a thermoelectric element that converts electric energy into heat energy, and the heat dissipating amount setting means defines a set value of the heat dissipating amount according to the amount of electric energy applied to the thermoelectric element. Is preferred.

  According to such a configuration, the heat radiation amount can be set with high accuracy by setting the heat radiation amount according to the magnitude of the electric energy applied to the thermoelectric element. Here, as a thermoelectric element, a Peltier element can be exemplified, but since this Peltier element determines the amount of heat (heat dissipation) to be moved from the high temperature side to the low temperature side according to the applied current value, its current value (electric energy) The amount of heat radiation can be easily set by setting the size of the) and the setting accuracy can be improved.

  The measuring device adjusting device of the present invention is a measuring device adjusting device that adjusts the measuring device by any one of the measuring device adjusting methods, wherein the setting step, the movement holding step, the measured value reading step, Control means for executing an error determination step and the heat dissipation amount setting step is provided.

  According to the present invention as described above, the setting of the heat radiation amount can be performed quickly and highly by executing the setting step, the movement holding step, the measurement value reading step, the error determination step, and the heat radiation amount setting step by the control means. Can be implemented with accuracy. Therefore, in the adjustment process before shipment in the manufacturing process of the measuring instrument, the setting value of the heat dissipation amount is set using the adjusting device, thereby efficiently adjusting the measuring instrument while reducing labor and time by manpower. be able to.

  The measuring instrument of the present invention is a measuring instrument main body, a measuring element movably provided in the measuring instrument main body, and a movement amount of the measuring instrument provided in the measuring instrument main body to detect and output as a measured value. A measuring instrument comprising: a measuring means; a heat radiating means for radiating heat from the measuring instrument main body to the outside; and a heat radiating amount setting means for setting a heat radiating amount by the heat radiating means. It is adjusted by an adjustment method, and the heat radiation amount from the heat radiation means is set to a constant value by the heat radiation amount setting means.

  According to the present invention, since it is not necessary to change the setting value of the heat dissipation amount by the heat dissipation amount setting means as described above, the control unit for changing the heat dissipation amount, the inside and outside of the measuring instrument main body It is not necessary to provide a temperature sensor or the like for detecting the temperature, and the structure of the measuring instrument can be simplified. In addition, it is possible to provide a measuring device that can eliminate the influence of heat on the probe and reduce the measurement error as much as possible to increase the measurement accuracy.

1 is a schematic configuration diagram of a measuring instrument according to an embodiment of the present invention. Flow chart showing the adjustment method of the measuring instrument

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram of a linear gauge as a measuring instrument according to an embodiment of the present invention.
As shown in FIG. 1, the linear gauge 1 includes a measuring instrument main body 2, a spindle 3 as a measuring element movably provided on the measuring instrument main body 2, and a spindle 3 provided inside the measuring instrument main body 2. Measuring means 4 for detecting the amount of movement and outputting as a measured value, heat radiating means 5 for radiating heat from the measuring instrument body 2, and a counting unit 6 for controlling the measuring means 4 and the heat radiating means 5.

  The measuring device main body 2 includes a case body 21 in which the measuring means 4 is built, and a spindle guide portion 22 that supports the spindle 3 so as to protrude and retract from the case body 21. The case body 21 is formed in an overall box shape, and the measuring means 4 is provided in the internal space thereof, and the heat radiating means 5 is provided on the outside opposite to the spindle guide portion 22. The spindle guide portion 22 includes a spring (not shown) that supports the spindle 3 so as to move in a projecting and retracting direction (vertical direction in FIG. 1) from the case body 21 and urges the spindle 3 in the protruding direction. It is configured.

  The spindle 3 is formed in a cylindrical shape from an appropriate metal material such as stainless steel, and is provided inside the measuring instrument main body 2 and a tip end portion 31 that is exposed to the outside from the measuring instrument main body 2 and comes into contact with a measurement object (workpiece). And a scale portion 32 facing the measuring means 4. The spindle 3 comes into contact with the workpiece and is pushed into the measuring device main body 2 so that the scale portion 32 moves relative to the measuring means 4. The amount of movement is measured by the measuring means 4. Is detected, the amount of movement of the spindle 3 becomes a measured value.

The measuring unit 4 includes a detection unit 41 provided to face the scale unit 32 of the spindle 3 and a measurement circuit unit 42 for driving the detection unit 41. For example, the detection unit 41 can use an optical sensor that detects relative movement with the scale unit 32 by irradiating light toward the scale unit 32 and receiving reflected light reflected from the scale unit 32. . Measuring circuit 42, drives the detection unit 41 based on the drive current I _G supplied from the counting unit 6, and outputs a detection signal detected by the detection unit 41 to the counting unit 6.

The heat dissipation means 5 includes a Peltier element 51 attached to the case body 21 and a heat sink 52 attached to the outside of the Peltier element 51. Peltier element 51, the electrical energy to a thermoelectric element that converts thermal energy, which functions as a heat radiating portion for radiating to the outside from the instrument body 2 in accordance with the magnitude of the driving current I _P supplied from the counting unit 6 . Here, the driving current I _P to be supplied to the Peltier element 51, the heat quantity Q _IP moved by the Peltier element 51 _(heat radiation amount), is known to have a proportional relationship. The heat sink 52 is formed of a metal having a low specific heat such as an aluminum alloy, and releases the heat moved by the Peltier element 51 to the outside.

Counting unit 6 includes a measurement drive control unit 61 supplies a driving current I _G to the measuring circuit portion 42 of the measuring means 4, and the heat radiating drive control unit 62 supplies a drive current I _P to the Peltier element 51 of the heat radiating unit 5, A measurement value display unit 63 configured to display a measurement value based on a detection signal from the measurement circuit unit 42 of the measurement unit 4. Further, the counting unit 6, measuring the output of the drive current I _G from the drive control unit 61, a switch for switching the stop, setting operation unit for setting the magnitude of the drive current I _P from the heat radiating drive control unit 62 And are provided. That is, the heat dissipation drive control unit 62 functions as a heat radiation amount setting means for the magnitude of the drive current I _P to set the amount of heat radiated from the Peltier element 51.

In the linear gauge 1 as described above, the drive current I _P to be supplied to the Peltier element 51 from the radiating drive control unit 62 is set to a constant value. That is, by the Peltier element 51 is supplied a constant driving current I _P, a certain amount of heat Q _IP from the measuring device main body 2 by the Peltier element 51 is moved, so as to be radiated from the heat sink 52 to the outside Yes. The magnitude of the drive current I _P in the radiator drive control unit 62 is set in the adjustment process in the manufacturing process of the linear gauge 1, after being set in this adjustment process, the drive current I _P is changed in the use state Rather, a constant drive current _IP is supplied.

The adjustment step of setting the magnitude of the driving current I _P, be described with reference to FIG. 2.
First, the measuring instrument main body 2 of the linear gauge 1 is supported, the tip 31 of the spindle 3 protruding from the measuring instrument main body 2 is brought into contact with the measurement reference plane, and the spindle 3 is positioned at the reference position (step ST1). Then ON the switch of the counting unit 6, output from the measuring drive control unit 61 of the driving current I _G to the measuring unit 4, performs break temperature by energizing the measuring unit 4 (step ST2). Further, the measurement value displayed on the measurement value display unit 63 is zero-set (step ST3). The set step is configured by the above steps ST1 to ST3.

  Next, the measuring device main body 2 and the spindle 3 are relatively moved by a predetermined amount, and the spindle 3 is immersed in the measuring device main body 2. The predetermined amount of movement of the spindle 3 is the maximum amount of movement of the spindle 3 and is the position at which the scale unit 32 moves to the highest point closest to the measurement circuit unit 42 while facing the detection unit 41. When the spindle 3 is thus moved by a predetermined amount, the spindle 3 is held at that position for a predetermined time (step ST4: movement holding step).

  After holding for a predetermined time in the moving and holding step, the measuring instrument body 2 and the spindle 3 are moved relative to each other in the direction in which the spindle 3 protrudes from the measuring instrument body 2, and the spindle 3 is returned to the reference position, and measurement is performed at this reference position. Execute (step ST5). And the measured value displayed on the measured value display part 63 is read (step ST6). The measurement value reading process is configured by the above steps ST5 and ST6.

  Next, an error between the read measurement value and a value at the reference position (zero value) is calculated, and the error is determined (step ST7: error determination step). If this error is less than or equal to the threshold (YES in step ST7), the adjustment process is terminated. If the error exceeds the threshold value (NO in step ST7), the next step ST8 is executed.

If exceeding the threshold error in the error decision process (step ST7), the setting operation of the heat radiating drive control unit 62 operates based on that error, increases or decreases the drive current I _P supplied to the Peltier element 51 (step ST8: Heat radiation amount setting step). Specifically, when the read measurement value is larger than the zero value and the error is “+”, the drive current _IP is increased, the read measurement value is smaller than the zero value, and the error is “− ", The drive current _IP is decreased. That is, it is considered that the spindle 3 is inflated under the influence of heat when the error is "+", increasing the heat discharge by increasing the drive current I _P to the Peltier element 51, the error is "-" it is considered that the heat radiation amount is too large in the case of, reduces the drive current I _P to the Peltier element 51.

After thus increasing or decreasing the drive current I _P, increases or decreases the drive current I _P again executes step ST2～ST7, until the error of the measurement value read is equal to or less than the threshold, the heat radiation amount setting step (step ST8) After that, ST2 to ST7 are repeatedly executed. Or by the adjustment process is completed, the drive current I _P as a fixed value is set. Such driving current I _P which is set in the are values and heat Q _IP for dissipating heat quantity Q _G and the radiating means (5) for heating the measuring means 4, etc. in the linear gauge 1 are balanced, the driving current I _By continuing to supply _P to the Peltier element 51, the influence of heat on the spindle 3 due to heat generated by the measuring means 4 or the like can be eliminated.

In addition, the above adjustment process may be performed by an operator's manual work and may be automatically performed by the adjustment apparatus. As this adjusting device, a holding part that holds the measuring instrument main body 2 of the linear gauge 1, a contact part that contacts the tip part 31 of the spindle 3, a moving part that relatively moves the holding part and the contact part, Based on the determined error, a driving unit that moves the moving unit by a predetermined movement amount, a reading unit that reads a measurement value, an error calculation unit that calculates an error of the read measurement value, an error determination unit that determines an error, and drive current and the current setting unit increasing or decreasing the I _P, more mobile part Te, the driving unit, a reading unit, the error calculation unit includes an error determining unit, and a control means for controlling a current setting unit, and the control means Any device that performs the setting process, the movement holding process, the measurement value reading process, the error determination process, and the heat radiation amount setting process may be used.

According to the present embodiment as described above, the following operations and effects can be achieved.
(1) the set value of the drive current I _P in the radiator drive control unit 62 is set to a constant value, since the driving current heat dissipation amount based on I _P (Q _IP) is not necessary to change the order to change the heat radiation amount It is not necessary to provide a control unit, a temperature sensor for detecting the internal temperature of the measuring instrument body 2 and the environmental temperature T, and the structure of the linear gauge 1 can be simplified and miniaturized.

(2) The heat quantity Q _G generated from the measuring means 4 etc. and the balanced heat radiation quantity Q _IP are radiated from the heat radiating means 5 so that the influence of heat on the spindle 3 can be eliminated and the measurement error is minimized. Thus, the measurement accuracy can be increased.

(3) In the moving and holding step, the spindle 3 moved by a predetermined amount is held for a predetermined time and then returned to the reference position, thereby reflecting the influence of heat on the spindle 3 and including an error due to the influence of the heat. By executing the error determination step (step ST7) and the heat release amount setting step (step ST8) on the measured value, the set value of the heat release amount can be set with high accuracy.

(4) heat dissipating means 5 comprises a Peltier element 51, by setting the heat radiation amount Q _IP by the value of the drive current I _P to be supplied to the Peltier element 51, it is possible to set the heat radiation amount accurately. In other words, the Peltier element 51, since the amount of heat to move to the cold side (heat radiation amount Q _IP) is determined from the high temperature side in accordance with the drive current I _P, easy heat discharge Q _IP by setting the value of the drive current I _P And the setting accuracy can be improved.

[Modification of Embodiment]
The present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the above-described embodiment, the linear gauge 1 is exemplified as the measuring instrument. However, the measuring instrument according to the present invention is not limited to the linear gauge, and is used for various measuring instruments in which a measuring element is movably supported on the measuring instrument body. Is possible.

In the above embodiment, the heat radiation means 5 comprises a Peltier element (thermoelectric elements) 51, the value of the drive current I _P to be supplied to the Peltier element 51 had been configured to set the heat radiation amount Q _IP, radiation means Is not limited to a thermoelectric element. For example, the heat dissipating means may be a water-cooled type that dissipates heat by circulating the refrigerant, and in this case, the heat dissipating amount may be set according to the amount of refrigerant to be circulated. The heat radiating means may be an air-cooled type equipped with a fan or the like for blowing air. In this case, the heat radiating means may be configured so that the heat radiation amount can be set depending on the operation speed of the fan or the like.

  As described above, the present invention can be suitably used for a measuring instrument adjustment method, an adjusting device, and a measuring instrument that require high measurement accuracy that is affected by a measurement error due to internal heat generation of the measuring instrument.

1 Linear gauge (measuring instrument)
2 Measuring instrument body 3 Spindle (measuring element)
4 Measuring means 5 Heat dissipation means 51 Peltier element (thermoelectric element)
62 Heat dissipation drive controller (heat dissipation amount setting means)

Claims (4)

A measuring instrument main body, a measuring element movably provided in the measuring instrument main body, a measuring means provided in the measuring instrument main body for detecting a movement amount of the measuring element and outputting it as a measurement value; and the measuring instrument A method for adjusting a measuring instrument comprising: a heat radiating means for radiating heat from the main body to the outside; and a heat radiation amount setting means for setting a heat radiation amount by the heat radiation means,
A set step of zero-setting a measurement value by positioning the probe at a reference position;
A movement holding step of moving the measuring element from the reference position by a predetermined amount and holding it for a predetermined time;
A measurement value reading step of reading the measurement value after returning the measuring element to a reference position;
An error determination step of determining an error of the measurement value read in the measurement value reading step;
A heat dissipation amount setting step of increasing or decreasing the set value of the heat dissipation amount of the heat dissipation amount setting means based on the error,
With
The measuring device adjustment method, wherein the setting step, the movement holding step, the measurement value reading step, the error determination step, and the heat release amount setting step are repeatedly executed until the error converges. The method for adjusting a measuring instrument according to claim 1,
The heat dissipating means includes a thermoelectric element that converts electric energy into heat energy, and the heat dissipating amount setting means defines a set value of the heat dissipating amount according to the amount of electric energy applied to the thermoelectric element. How to adjust the measuring instrument. A measuring device adjusting apparatus for adjusting a measuring device by the measuring device adjusting method according to claim 1,
An apparatus for adjusting a measuring instrument, comprising: control means for executing the setting step, the movement holding step, the measurement value reading step, the error determination step, and the heat dissipation amount setting step. A measuring instrument main body, a measuring element movably provided in the measuring instrument main body, a measuring means provided in the measuring instrument main body for detecting a movement amount of the measuring element and outputting it as a measurement value; and the measuring instrument A measuring instrument comprising a heat radiation means for radiating heat from the main body to the outside, and a heat radiation amount setting means for setting a heat radiation amount by the heat radiation means,
3. A measuring instrument which is adjusted by the measuring instrument adjusting method according to claim 1 or 2, wherein a heat radiation amount from the heat radiation means is set to a constant value by the heat radiation amount setting means.

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