JP6469927B1 - Inspection master - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection master capable of measuring five axes in addition to the measurement of three axes of X, Y and Z, and the measurement in the rotation axis and / or swivel axis direction. An upper surface oblique reference portion having an oblique upper opening is provided on an upper surface of a hollow master body. On the upper surface, both the upper surface oblique reference portion and the upper surface vertical reference portion of the vertical opening are provided. A circumferential lateral reference portion having a lateral opening is provided on the circumferential surface of the master body. The peripheral surface was provided with both a peripheral lateral reference portion and a peripheral oblique reference portion having an oblique upper opening. In either case, a reference sphere capable of obtaining the tilt angle of the master body to be tilted at the time of 5-axis measurement is provided at the center of the upper surface of the master body. [Selection] Figure 1

Description

  The present invention relates to an inspection master capable of performing an accuracy inspection of a contact type three-dimensional measuring machine and an accuracy measurement of a 5-axis machining apparatus.

  For machining machine parts such as automobile engines and transmission cases, 3-axis and 5-axis machines are used. An example of a 5-axis machine is a 5-axis machining center. The five axes are usually a total of five axes in which two axes of a rotation axis and a turning axis are added to the three axes of left and right (X axis), front and rear (Y axis), and upper and lower (Z axis).

  A contact-type three-dimensional measuring machine is used for measuring the dimensions of machine parts that have been triaxially processed. The contact type three-dimensional measuring machine is provided with a spherical probe (contactor), and the probe is brought into contact with the measurement object set on the measurement table to measure the dimension, smoothness, etc. of the measurement object. It can be carried out.

  In order to maintain the measurement accuracy, the contact type three-dimensional measuring machine regularly inspects the measurement accuracy using an inspection master finished with high accuracy. The present applicant has also developed and proposed an inspection master (Patent Documents 1 and 2).

  As shown in FIG. 18, the inspection master A previously developed by the applicant of the present application is provided with four measuring parts (bushing bushes) D <b> 1 serving as a measurement reference on the upper surface C of the hollow cylindrical master main body B. On the surface E, four bushed bushes D2 are provided in each row. At the center of the flanged bush D1 on the upper surface C is a reference hole (vertical hole) F that opens vertically, and at the center of the flanged bush D2 of the peripheral surface E is a reference hole (horizontal hole) G that opens horizontally. is there.

  One type of contact type three-dimensional measuring machine is called a portal type. As shown in FIG. 19, there are a gate-type movable frame H that can be slid back and forth in the Y direction (front-rear direction), and a head I that is supported by the gate-type movable frame H and can be slid back and forth in the X direction (left-right direction). , An elevating shaft J supported so as to be movable up and down in the Z direction (vertical direction) with respect to the head portion I, and a probe K at the tip thereof. The tip of the probe K is made of a hard and wear-resistant material such as artificial ruby or ceramics and is formed into a highly accurate spherical shape.

  When the inspection master A of FIG. 18 is used to inspect the measurement accuracy of the gate-type contact-type three-dimensional measuring machine of FIG. 19 and to collect data necessary for calibration of the measurement error, as shown in FIG. An inspection master A is set on a holder M attached to a measurement table L of a contact type three-dimensional measuring machine. The probe K of the contact type three-dimensional measuring machine is brought into contact with the inner peripheral surfaces of the bushes D1 and D2 and the measurement reference plane N of the inspection master A for the evaluation of the smoothness of the contact point and the contact type three-dimensional measuring machine. Measure various necessary items. The measured value (actual value) is compared with the reference value for which the measurement traceability is confirmed to check the error between the actual value and the reference value, the straightness of each axis in which the probe K moves, the distance between the axes The contact-type three-dimensional measuring machine itself is inspected by checking the perpendicularity, errors in each axial direction, and the like.

JP 2001-31618 A JP 2002-195820 A

  Since the vertical hole F of the flanged bush D1 on the upper surface C of the inspection master A in FIG. 18 opens perpendicularly to the upper surface C, and the lateral hole G of the peripheral surface E opens horizontally to the peripheral surface E, these Measurement by inserting the probe K into the vertical hole F and the horizontal hole G, or by bringing the probe K of the contact type three-dimensional measuring machine into contact with the measurement reference plane N of the bushing bushes D1 and D2, and the smoothness of the measurement reference plane N However, the measurement in the oblique axis direction was not possible. In recent years, five-axis machining machines with two axes of rotation or rotation added to the three axes of X, Y, and Z have been widely used. However, an inspection master suitable for inspecting the accuracy of 5-axis machines is also available. not exist.

  An object of the present invention is to provide an inspection master capable of performing accuracy inspection and inspection of a 5-axis machining apparatus and also performing accuracy inspection and inspection of a contact type three-dimensional measuring machine.

  The inspection master according to the present invention is such that an upper surface oblique reference portion having an oblique upper opening is provided on the upper surface of a hollow master body. Both the upper surface oblique reference portion and the upper surface vertical reference portion of the longitudinal opening can be provided on the upper surface. Two or more upper surface oblique reference portions and upper surface vertical reference portions can be provided on the upper surface. A circumferential lateral reference portion having a lateral opening may be provided on the circumferential surface of the master body. The circumferential surface lateral reference portion can be provided in several rows in the circumferential direction of the circumferential surface, and two or more can be provided in each row. A peripheral surface oblique reference portion may be provided on the peripheral surface. A reference sphere may be provided on the upper surface. The reference sphere can also be provided at the center of the upper surface. The reference sphere is used to determine the tilt angle of the master body that is tilted during 5-axis measurement. The tilt angle of the master body tilted during the 5-axis measurement can be obtained from the difference between the center coordinates of the reference sphere when the master body is tilted and the center coordinates of the reference sphere when the master body is vertical.

The inspection master of the present invention has the following effects.
(1) Since there is a peripheral horizontal reference portion on the peripheral surface of the master body, the peripheral horizontal reference portion is used, and the X-axis, Y-axis, Z-axis three-axis measurement is possible, and the measurement accuracy of a contact type three-dimensional measuring machine can be inspected.
(2) Since the upper surface of the master body has an oblique reference section on the upper surface, the holder on which the inspection master is set can be rotated or / and swiveled, and the rotation or / and swivel direction can be measured (a total of 5 axes can be measured). Become. For this reason, 5-axis precision measurement of a 5-axis processing machine can also be performed. In the case where the peripheral surface oblique reference portion is provided on the peripheral surface of the master body, it is possible to measure the 5-axis accuracy of the 5-axis processing machine using the peripheral surface oblique reference portion.
(3) Since there is a reference sphere at the center of the upper surface of the master body, the rotation inclination angle or the rotation inclination angle of the inspection master rotated or rotated with reference to the reference sphere can be confirmed. Can be measured accurately.

(A) is a perspective view of the first example of the inspection master of the present invention, (b) is an explanatory diagram when the reference sphere is directly attached, (c) is an explanatory diagram when the reference sphere is attached on the shaft. . The top view of FIG. 1A is a cross-sectional view taken along the line cc of FIG. 1A, FIG. 1B is an explanatory view of the O portion of FIG. 1A before inserting a bushing bush into the peripheral surface mounting hole, and FIG. Explanatory drawing after inserting a bushing bush into a mounting hole. (A) is dd sectional drawing of Fig.1 (a), (b) is sectional drawing which shows the other example of a master main body bottom face. The perspective view of the 2nd example of the inspection master of the present invention. FIG. 6 is a plan view of FIG. 5. Cc sectional drawing of FIG. Dd sectional drawing of FIG. The perspective view of the 3rd example of the inspection master of the present invention. The top view of FIG. Cc sectional drawing of FIG. Dd sectional drawing of FIG. The perspective view of the 4th example of the inspection master of the present invention. FIG. 14 is a plan view of FIG. 13. Cc sectional drawing of FIG. Dd sectional drawing of FIG. (A) is a perspective explanatory view of the center coordinate measuring method of the reference sphere, (b) is a side explanatory view of the measuring method, (c) is a plan explanatory view of the measuring method. Explanatory drawing of the inspection master developed previously by the applicant. Explanatory drawing in the case of measuring with a portal type contact-type three-dimensional measuring machine using the inspection master of FIG.

  Various embodiments and usage examples of the inspection master 1 of the present invention will be described below with reference to the drawings.

(Embodiment 1 of inspection master)
As a first example of the inspection master 1 of the present invention, those shown in FIGS. 1 (a), 2, 3, and 4 (a) are obliquely opened at four locations on the upper surface 3 of a hollow cylindrical master body 2. FIG. There are four oblique reference portions 30 on the top surface, and there are four rows of circumferential reference surfaces 6 on the side surface (circumferential surface) 5 of the master body 2 in the circumferential direction. There is a reference sphere 20. The number of the upper surface oblique reference portions 30 is an arbitrary number of one or more, the number of rows of the circumferential surface horizontal reference portions 6 is an arbitrary number of two or more rows, and the number of the circumferential surface horizontal reference portions 6 in each row is an arbitrary number of one or more. Can do. Although the four rows of circumferential surface lateral reference portions 6 are provided at intervals of 90 degrees in the circumferential direction of the circumferential surface 5 of the master body 2, the intervals may be other than that.

(Embodiment 2 of inspection master)
The second example of the inspection master 1 according to the present invention shown in FIGS. 5 to 8 includes four upper surface oblique reference portions 30 with oblique openings at four locations on the upper surface 3 of the hollow cylindrical master body 2. There are four upper surface vertical reference parts 4 with vertical openings between the upper surface oblique reference parts 30, and four rows of peripheral surface horizontal reference parts 6 with lateral openings at four positions in the circumferential direction of the side surface (circumferential surface) 5 of the master body 2. There is a reference sphere 20 at the center of the upper surface 3 of the master body 2. The number of the upper surface oblique reference portions 30 and the upper surface vertical reference portions 4 is an arbitrary number of one or more, the circumferential surface horizontal reference portion 6 is an arbitrary number of two or more rows, and the number of the circumferential surface horizontal reference portions 6 in each row is an arbitrary number of one or more Can be a number.

(Embodiment 3 of inspection master)
The third example of the inspection master 1 of the present invention shown in FIGS. 9 to 12 has four upper surface oblique reference portions 30 on the upper surface 3 of the hollow cylindrical master body 2, and the side surface ( There are 4 rows of circumferential lateral reference portions 6 of lateral openings in the circumferential direction of the circumferential surface 5, and there are 4 rows of circumferential oblique reference portions 7 of obliquely upward openings between the 4 rows of circumferential lateral reference portions 6. There is a reference sphere 20 at the center of the upper surface 3 of the master body 2. Although there are two peripheral surface lateral reference portions 6 and two peripheral surface oblique reference portions 7 in each row, the number thereof may be other than that.

(Embodiment 4 of inspection master)
The fourth example of the inspection master 1 of the present invention shown in FIGS. 13 to 16 has four upper surface oblique reference portions 30 on the upper surface 3 of the hollow cylindrical master body 2, and these upper surface oblique reference portions 30. There are four upper surface vertical reference portions 4 with vertical openings, and there are four rows of peripheral surface horizontal reference portions 6 with lateral openings in the circumferential direction of the side surface (circumferential surface) 5 of the master body 2. There are four rows of oblique reference portions 7 with obliquely upward openings between the lateral reference portions 6, and a reference sphere 20 is located at the center of the upper surface 3 of the master body 2. Although there are two circumferential surface lateral reference portions 6 and circumferential surface oblique reference portions 7 in each row, the number thereof may be other than that.

[Master body]
Each of the master bodies 2 of the first to fourth embodiments has an upper surface 3 and side surfaces (circumferential surfaces) 5 as shown in FIG. 1, and a bottom surface 31 is opened as shown in FIGS. 3 and 4 (a). It has a hollow cylindrical shape (hollow box shape) with a hollow inside. The bottom surface 31 may be closed as shown in FIG. 4B, and a stop hole 32 may be opened at the center. The master body 2 is suitably made of a material having a small thermal expansion and excellent dimensional stability. For example, ceramics, quartz, quartz, low thermal expansion cast iron, SK steel, and other materials are suitable. It can be made by cutting from a single block (block) of these materials, or it can be made by pasting together plates made of these materials.

[Mounting hole]
A mounting hole for inserting and fixing the flanged bush 17 (FIG. 3B) is opened in the master body 2 of FIGS. 1A, 2, 3, and 4A. An upper surface oblique mounting hole 33 (FIG. 4 (a)) is opened obliquely outward on the upper surface 3, and a circumferential surface mounting hole 9 (FIGS. 3 (a) (b)) is opened laterally on the peripheral surface 5. The bush 17 (FIG. 3B) has a flange 17b at the tip of the cylindrical insertion portion 17a.

  In the master body 2 of FIGS. 5 to 8, the upper surface oblique mounting hole 33 (FIG. 8) is obliquely outwardly inclined and the upper surface mounting hole 8 (FIG. 7) is vertically oriented on the upper surface 3. The attachment hole 9 (FIG. 7) is opened sideways.

  In the master body 2 of FIGS. 9 to 12, an upper surface oblique mounting hole 33 (FIG. 12) is obliquely opened outward on the upper surface 3, and a circumferential surface mounting hole 9 (FIG. 11) is laterally disposed on the circumferential surface 5. The oblique mounting hole 10 (FIG. 12) is opened obliquely outward.

  In the master body 2 of FIGS. 13 to 16, the upper surface oblique mounting hole 33 (FIG. 16) is obliquely opened outward and the upper surface mounting hole 8 (FIG. 15) is longitudinally opened on the upper surface 3. 5, the peripheral surface mounting hole 9 (FIG. 15) is opened sideways, and the peripheral surface oblique mounting hole 10 (FIG. 16) is opened obliquely outward.

[Top oblique reference section]
The upper oblique reference portion 30 of the master body 2 has the same shape, and the hooked bush 17 (FIG. 3B) is inserted into the upper face oblique mounting hole 33 of the master body 2 and fixed. The through hole 17c is an oblique reference hole 34 (FIG. 4), and the surface of the flange 17b (FIG. 3B) of the flanged bush 17 is an oblique measurement reference surface 35 (FIG. 4). The oblique reference hole 34 opens in a direction (diagonally upward) that intersects the central axis WW (FIG. 4A) of the master body 2 at an angle of 45 degrees. Both the inner peripheral surface of the oblique reference hole 34 and the surface of the oblique measurement reference surface 35 are finished smoothly. The crossing angle between the oblique reference hole 34 and the central axis WW (FIG. 4A) of the master main body 2 can also be an arbitrary angle, for example, 30 degrees or 60 degrees.

[Top vertical reference section]
The four upper surface vertical reference portions 4 of the upper surface 3 of the master main body 2 have the same shape, and are arranged and fixed around the center of the upper surface 3 of the master main body 2 at intervals of 90 degrees. Each upper surface vertical reference portion 4 is fixed by inserting a flanged bush 17 into the upper surface mounting hole 8 (FIG. 7) of the master body 2, and the through hole 17 c (FIG. 3 (b)) of the flanged bush 17 is the vertical reference. The surface of the flange 17b ((FIG. 3B)) of the flanged bush 17 is the upper measurement reference plane 13. The vertical reference hole 12 is parallel to the central axis WW (FIG. 7) of the master body 2. The inner peripheral surface of the vertical reference hole 12 and the surface of the upper measurement reference surface 13 are finished smoothly, and the number and interval of the upper vertical reference portions 4 can be arbitrarily designed.

[Surrounding side reference part]
Four rows of the circumferential surface 5 of the master body 2 and two circumferential surface lateral reference portions 6 (FIG. 3A) in each row have the same shape, and the bushing bush 17 is provided in the circumferential surface mounting hole 9 of the master body 2. (FIG. 3 (b)) is inserted and fixed, and the through hole 17c (FIG. 3 (b)) of the bushing bush 17 is used as the horizontal reference hole 15, and the flange 17b (FIG. 3 (b)) of the bushing bush 17 is formed. The surface is a lateral measurement reference plane 16. The horizontal reference hole 15 is opened in a direction (true lateral direction) orthogonal to the central axis WW (FIG. 4A) of the master body 2. Both the inner peripheral surface of the horizontal reference hole 15 and the surface of the horizontal measurement reference surface 16 are finished smoothly. The circumferential surface horizontal reference portion 6 of each row is provided in 4 rows, and two rows are provided at intervals (FIG. 1 (a), FIG. 2). The number and the interval between each column can be designed arbitrarily.

[Surround reference]
There are four rows of the circumferential surface 5 of the master body 2, and two circumferential surface oblique reference portions 7 (FIG. 9) in each row. These circumferentially inclined reference portions 7 have the same shape, and a flanged bush 17 (FIG. 3B) is inserted into the circumferentially inclined mounting hole 10 (FIG. 12) of the master main body 2 and fixed. The through hole 17c (FIG. 3B) is an oblique reference hole 18, and the surface of the flange 17b of the flanged bush 17 is an oblique measurement reference surface 19. The oblique reference hole 18 opens in a direction (diagonally upward) intersecting the central axis WW (FIG. 12) of the master body 2 at an angle of 45 degrees. Both the inner peripheral surface of the oblique reference hole 18 and the surface of the oblique measurement reference surface 19 are finished smoothly. There are four rows and two rows of the oblique reference portions 7 on the circumference of each row (FIGS. 9 and 10), but the number of rows, the number of rows, and the interval between rows can be designed arbitrarily. it can. The crossing angle between the oblique reference hole 18 and the central axis WW (FIG. 12) of the master main body 2 can also be an arbitrary angle, for example, 30 degrees or 60 degrees.

[Bush with bush]
As the flange bush 17, either an existing flange bush or a new flange bush can be used. The bushed bushing 17 is preferably made of a material having a small thermal expansion coefficient, such as low thermal expansion cast iron, and the surface of the flange and the inner peripheral surface of the hole are finished with high precision. These finishing processes can be performed before or after fixing the individual bushing bushes 17 to the master body 2, but if they are performed after fixing, the accuracy of the mounting angle and mounting position on the master body 2 can be improved. it can.

[Fixing of bush with bushing]
The brazing bush 17 can be fixed to each attachment hole by any means, but can be adhered and fixed with Loctite or other adhesive. If necessary, caulking, screws, or other fixing means can be used.

  In the illustrated embodiment, the master main body 2 and the flanged bush 17 are formed separately, and the flanged bush 17 is divided into the upper surface mounting hole 8, the peripheral surface mounting hole 9, the peripheral surface oblique mounting hole 10, and the upper surface oblique mounting hole 33. Although it is inserted and fixed in the mounting hole, the master body 2 and the flanged bush 17 may be integrated if possible.

[Reference sphere]
The reference sphere 20 at the center of the upper surface 3 of the master main body 2 can be directly attached to the upper surface 3 of the master main body 2 as shown in FIG. 1 (b). It can also be attached by protruding upward from the upper surface 3. When the reference sphere 20 uses the inspection master 1 of the present invention to measure a 5-axis machine with a 5-axis machine, as will be described later, the inspection master 1 is placed on a table and the table is rotated or turned as shown in FIG. ). The reference sphere 20 serves as a reference for confirming the inclination angle of the inspection master 1 at that time.

[Usage example 1]
When the inspection master of the present invention is used to inspect a contact-type three-dimensional measuring machine, the inspection master of the present invention is set on the table of the measuring machine, as in the conventional three-dimensional measurement. The probe of the measuring machine is moved in the three axial directions of X, Y, and Z and is brought into contact with the upper surface vertical reference portion 4 and the circumferential surface horizontal reference portion 6 of the inspection master.

[Usage example 2]
When performing a 5-axis measurement of a 5-axis machine using the inspection master of the present invention, for example, a measurement head and a spherical measurement probe 21 (FIG. 17A) are used instead of the processing tool of the 5-axis machine. The inspection master 1 of the present invention is set on a table that can be rotated, swiveled, rotated, or swiveled. In this state, the measurement probe 21 is moved in the three axis directions of X, Y, and Z to perform three-dimensional measurement. Further, the inspection master 1 set on the table is tilted with respect to the measurement probe 21 by rotating or turning the table, or rotating and turning (FIG. 17A).

  In the inclined state, the inner peripheral surface of the oblique reference hole 18 (34) of either the peripheral surface oblique reference portion 7 or the upper surface oblique reference portion 30 of the inspection master 1 of the present invention or the oblique measurement reference surface 19 (35). The measurement probe 21 is brought into contact, and necessary items such as the smoothness and the inclination angle of the contact portions are measured (a total of five axes measurement in combination with the three-axis measurement). By comparing these measured values (actually measured values) with reference values for which the measurement traceability is confirmed, the error between the actually measured values and the reference values is investigated, the straightness in the direction of each axis along which the measuring probe 21 moves, and the distance between the axes. The measuring machine itself can be evaluated by confirming the perpendicularity, display error in each axial direction, distance between holes, and the like. If there is an error, the measuring machine and the processing machine can be adjusted so that the error is eliminated.

  In the 5-axis measurement, since the inspection master 1 is inclined, it is necessary to confirm the inclination angle. In this case, the reference sphere 20 can be used for confirmation. As an example of the confirmation method, as shown in FIGS. 17A to 17C, the outer peripheral surface (top) of the spherical measurement probe 21 is set to the top of four locations on the front, rear, left and right of the outer peripheral surface of the reference sphere 20 and the upper side. The center coordinates of the reference sphere 20 are obtained by contacting a total of five locations on the top. This coordinate value is compared with the reference coordinate value, and the inclination of the inspection master 1 is obtained from the difference between the two coordinates. The reference coordinate value can be the center coordinate of the reference sphere 20 when the upper surface of the inspection master 1 placed on the table is leveled. Also in the case of obtaining the reference coordinate value, the outer peripheral surface (top) of the spherical measurement probe 21 is set to four points on the front and rear, left and right of the outer peripheral surface of the reference sphere 20 and the upper top in the same manner as described above. To obtain the center coordinates of the reference sphere 20. When the inclination angle of the peripheral surface oblique reference portion 7 is 45 degrees, for example, it is confirmed whether or not the inspection master is accurately inclined at 45 degrees, and the table is rotated or turned to accurately inspect the inspection master 1 at 45 degrees. The angle can be adjusted. In the present invention, after adjusting the inclination of the inspection master 1 to be a predetermined angle, the spherical measurement probe 21 is brought into contact with the oblique reference hole 18 or the oblique measurement reference surface 19 of the circumferential oblique reference portion 7, By measuring the smoothness, the inter-axis angle, and the like at these measurement locations, accurate 5-axis measurement can be performed. Accurate 5-axis measurement can also be performed by contacting the oblique reference hole 34 or the oblique measurement reference surface 35 of the upper oblique reference portion 30 and measuring the smoothness, the inter-axis angle, and the like at these measurement locations. Another method may be used for obtaining the inclination angle. The measurement probe may be an articulated arm type probe or a probe having another configuration.

(Other embodiments)
The embodiment is an example of the inspection master of the present invention. The inspection master of the present invention is not limited to the embodiment, and may have other configurations and other materials as long as the problems of the present invention can be solved.

  The number of installations, installation locations, and the like of the upper surface vertical reference portion 4, the upper surface oblique reference portion 30, the circumferential surface lateral reference portion 6, and the circumferential surface oblique reference portion 7 can be arbitrarily designed. For example, if measurement is possible, the upper-surface oblique reference portion 30 may be inclined inwardly toward the center side of the master body 2 instead of outwardly facing toward the outer peripheral direction of the master body 2. The master body 2 is not cylindrical, but may be rectangular, polygonal box, or other shapes.

DESCRIPTION OF SYMBOLS 1 Inspection master 2 Master main body 3 Upper surface (master main body) 4 Upper surface vertical reference part 5 Peripheral surface 6 (master main body) Peripheral surface horizontal reference part 7 Peripheral surface oblique reference part 8 Upper surface mounting hole 9 Peripheral surface mounting hole 10 Oblique mounting hole 12 Vertical reference hole 13 Upper measurement reference plane
15 Lateral reference hole 16 Lateral measurement reference plane 17 Bushing bush 17a (Bushing bush) insertion part 17b (Bushing bush) １７ 17c (Bushing bush) through hole 18 Oblique reference hole 19 Oblique measurement reference surface 20 Reference Sphere 21 Measuring probe 22 Axis 30 Upper surface oblique reference portion 31 Bottom surface 32 Stopping hole 33 Upper surface oblique mounting hole 34 Oblique reference hole 35 Oblique measurement reference surface A Inspection master B Master main body C (master main body) upper surface D1 Barbed bush D2 Bush E (Master body) F Surface F Reference hole (Vertical hole)
G Reference hole (horizontal hole)
H Gate type movable frame I Head part J Elevating axis K Probe L Measurement table M Holder N Measurement reference plane

Claims (8)

In the inspection master having a peripheral surface lateral reference portion of a lateral opening on the peripheral surface of the hollow master body having a peripheral surface and an upper surface,
On the upper surface of the master body, there is an upper surface oblique reference portion of an oblique upper opening.
Inspection master characterized by that. In the inspection master according to claim 1,
There are two or more upper reference surfaces on the upper surface of the master body.
Inspection master characterized by that. In the inspection master according to claim 1 or claim 2,
On the upper surface of the master body, there are both an upper surface oblique reference portion and an upper surface vertical reference portion with a vertical opening.
Inspection master characterized by that. In the inspection master according to any one of claims 1 to 3,
On the circumferential surface of the master body, there are both a circumferential reference portion of the oblique upper opening and a circumferential reference portion of the lateral opening,
Inspection master characterized by that. In the inspection master according to any one of claims 1 to 4,
There are two or more rows on the circumferential surface of the master body on the circumferential surface of the master body, with two or more rows in each row, with two or more in each row.
Inspection master characterized by that. In the inspection master according to any one of claims 1 to 5,
The upper surface oblique reference portion is formed by inserting and fixing a bushing bush in an obliquely upward upper surface oblique mounting hole opened on the upper surface of the master body.
The upper surface vertical reference portion is a member having a flanged bush inserted and fixed to a vertical upper surface mounting hole opened in the upper surface,
The circumferential surface lateral reference portion is the one in which a bushing bush is inserted and fixed in a laterally facing circumferential surface mounting hole opened in the circumferential surface of the master body.
The circumferential surface oblique reference portion is a flanged bush inserted and fixed in a diagonally upward circumferential surface mounting hole opened in the circumferential surface,
The inner peripheral surface of the bushing bush and the surface of the flange are smooth measurement reference surfaces.
Inspection master characterized by that. In the inspection master according to any one of claims 1 to 6,
On the upper surface of the master body, a reference sphere is provided directly or away from the upper surface, and the reference sphere can determine the tilt angle of the master body to be tilted when measuring five axes.
Inspection master characterized by that. In the inspection master according to claim 7,
A reference sphere is provided at the center of the upper surface of the master body.
Inspection master characterized by that.

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