JP6457251B2 - Method for operating charged particle beam generator and charged particle beam generator - Google Patents

Description

  The present invention relates to a method for operating a charged particle beam generator used in a charged particle beam therapy system and a charged particle beam generator.

  A linear accelerator is used for a charged particle beam generator used in a particle beam therapy system. This linear accelerator is an apparatus that accelerates an ion beam generated by an ion source inside the linear accelerator to a predetermined energy and makes it incident on a subsequent circular accelerator.

  Here, the ion beam generated from the ion source inside the linear accelerator may give a thermal load to the device downstream of the ion source and may be activated.

  Therefore, Patent Document 1 discloses a technique for generating a beam only during operation of the charged particle beam therapy system and controlling the beam so as not to be generated in a standby state.

JP 2007-42659 A

  By the way, in order to stabilize the ion beam generated in the linear accelerator, the plasma is generated at a constant period inside the ion source even when the circular accelerator is not operated.

  When the circular accelerator is not operating, plasma is generated inside the ion source, and the ion beam is emitted downstream by the extraction voltage between the ion source and the extraction electrode. It is the structure which does not inject into.

  For this reason, even when the circular accelerator is not operated, an ion beam is generated, and the ion source, the extraction electrode downstream of the ion source, the electrostatic lens, and the chopper are soiled by the ion beam.

  For this reason, periodic inspections are performed on the ion source and the electrostatic lens, chopper, etc. downstream of the ion source. This periodic inspection must be performed with the linear accelerator released from the vacuum to the atmosphere. It is complicated.

  As a solution to the above problem, an operation method in which plasma is not generated at times other than the time of ion beam emission is considered. However, as described above, in order to supply a stable ion beam to the synchrotron, The plasma must be generated at a constant period.

  For this reason, there is a demand for a technique that can stably supply an ion beam, reduce contamination inside the linear accelerator due to the ion beam, and reduce the complexity of work during periodic inspection.

  The technique described in Patent Document 1 described above is to generate a beam only when the charged particle beam therapy system is operating. However, there is no description about the contamination inside the linear accelerator caused by the ion beam, and there is no description about the technique for reducing the contamination. No proposal has been made.

  An object of the present invention is to provide a charged particle beam generator operating method and a charged particle beam generator capable of stably supplying an ion beam, reducing contamination inside the linear accelerator caused by the ion beam, and reducing complicated periodic inspection items. Is to realize.

  In order to achieve the above object, the present invention is configured as follows.

An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator In a method of operating a charged particle beam generator having a beam utilization device for irradiating a target with an ion beam, the extraction power source is turned on between the start of operation of the circular accelerator and the completion of initialization, and the circular accelerator The extraction power supply is turned off according to the operation state.
An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and the circular accelerator In an operation method of a charged particle beam generator having a beam utilization device that irradiates a target with an emitted ion beam, the extraction power source is turned on according to the operation state of the circular accelerator, and the extraction power source is It is turned off at the end of the operation of the circular accelerator.
Further, an ion source for generating plasma, a linear accelerator having an extraction electrode and an extraction power source for emitting an ion beam from the ion source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and the circular accelerator In an operation method of a charged particle beam generator having a beam utilization device for irradiating an object with an ion beam emitted from the object, the extraction power source is turned on in accordance with the operation state of the circular accelerator, and the circular accelerator is accelerated. The extraction power supply is turned off at a timing after the start of the process .
Further, an ion source for generating plasma, a linear accelerator having an extraction electrode and an extraction power source for emitting an ion beam from the ion source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and the circular accelerator In the operation method of the charged particle beam generator having a beam utilization device for irradiating the target with the ion beam emitted from the object, the linear accelerator includes an electrostatic lens through which the ion beam emitted from the ion source passes, An electrostatic lens power supply, and the power supply of the electrostatic lens is turned on / off in synchronization with the on / off operation of the extraction power supply.

In a charged particle beam generator, a linear accelerator having an ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and an extraction power source, and a circular accelerator for accelerating the ion beam emitted from the linear accelerator, Based on a beam utilization device that irradiates an object with an ion beam emitted from the circular accelerator, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device , An accelerator device control unit that controls the operation of the circular accelerator and the linear accelerator, and the extraction power source between the start of operation of the circular accelerator and the completion of initialization based on a command signal from the accelerator device control unit. An injector control device that controls on and off of the extraction power source according to the operation state of the circular accelerator is provided.
An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and the circular accelerator A beam utilization device that irradiates an object with an emitted ion beam; a beam utilization system control device that controls the operation of the beam utilization device; and the circular accelerator based on a command signal from the beam utilization system control device; An accelerator device control unit that controls the operation of the linear accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the charged particle beam generator, the injector controller controls the extraction power source of the linear accelerator to operate the circular accelerator. And off at the end.
An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and the circular accelerator A beam utilization device that irradiates an object with an emitted ion beam; a beam utilization system control device that controls the operation of the beam utilization device; and the circular accelerator based on a command signal from the beam utilization system control device; An accelerator device control unit that controls the operation of the linear accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the charged particle beam generator, the injector control device may be configured at a timing after the start of the acceleration process of the circular accelerator. To turn off the extraction power supply of the linear accelerator.

An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator A beam utilization device that irradiates a target with an ion beam, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device; Charged particles comprising an accelerator device control unit that controls the operation of the accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the beam generator, the linear accelerator includes an electrostatic lens through which an ion beam emitted from the ion source passes. When, and a lenses power, said injector control device, wherein in synchronization with off operation of the extraction power supply, turning on and off the lens power.

  According to the present invention, there is provided a charged particle beam generator operating method and a charged particle beam generator capable of stably supplying an ion beam, reducing contamination inside the linear accelerator due to the ion beam, and reducing complicated periodic inspection items. Can be realized.

It is a schematic block diagram of the linear accelerator in the charged particle beam therapy apparatus with which the Example of this invention is applied. It is an operation | movement timing chart of the charged particle beam therapy apparatus in Example 1 of this invention. It is a control block diagram in the charged particle beam therapy system to which the embodiment of the present invention is applied. It is an operation | movement timing chart of the charged particle beam therapy apparatus in Example 2 of this invention. It is an operation | movement timing chart of the charged particle beam therapy apparatus in Example 3 of this invention. It is an operation pattern of the circular accelerator in the charged particle beam therapy system of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

Example 1
FIG. 1 is a schematic configuration diagram of a linear accelerator in a charged particle beam therapy system to which an embodiment of the present invention is applied.

  In FIG. 1, an ion beam emitted from a linear accelerator 100 is incident on a synchrotron (circular accelerator) 10, accelerated, and then transmitted to a patient (object) by a beam utilization device 20 via a beam transport system 30. Irradiated. When there are a plurality of beam utilization devices 20, the beam transport system 30 is branched toward a plurality of irradiation chambers, and the beam is transported to each treatment room.

  The linear accelerator 100 includes an ion source 1, an extraction power source 2, an extraction electrode 3, an electrostatic lens 4, a lens power source 5, a chopper 6, a chopper power source 7, a high frequency accelerator 8, and a high frequency power source 9. .

  When an extraction voltage is applied from the extraction power source 2 to the ion source 1, plasma is extracted from the ion source 1. The extracted plasma is incident on the chopper 6 via the extraction electrode 3 and the electrostatic lens 4.

  The chopper 6 allows the ion beam incident on the chopper 6 to pass when the off signal to the chopper power supply 7 is on, and operates the chopper 6 when the off signal to the chopper power supply 7 is off. Then, the ion beam incident on the chopper 6 is blocked. As for the blocking method, for example, when the chopper 6 operates, an electric field is formed in the plasma passage path, and the ion beam is prevented from reaching the high-frequency accelerator 8.

  When the off signal for the chopper power supply 7 is on, the ion beam incident on the chopper 6 enters the high-frequency accelerator 8 and enters the circular accelerator 10.

  FIG. 2 is an operation timing chart of the charged particle beam therapy system according to the first embodiment of the present invention. FIG. 3 is a control block diagram of the charged particle beam therapy system to which the embodiment of the present invention is applied.

  First, the control block will be described with reference to FIG.

  In FIG. 3, the beam utilization system control device 21 is a device that controls the operation of the beam utilization device 20, and requests the accelerator device control unit 22 to shift the beam extraction request signal and the operation pattern of the synchrotron (circular accelerator) 10. The next pattern switching request signal, the energy switching request signal for changing the energy emitted from the synchrotron 10, and the like are supplied.

  The accelerator device control unit 22 controls the operation of the synchrotron 10 according to a signal from the beam utilization system control device 21 and supplies a control command signal to the injector control device 23. The injector control device 23 includes a high-frequency power control unit 23a, an extraction power control unit 23b, a lens power control unit 23c, and a chopper power control unit 23d.

  The high frequency power supply control unit 23 a controls the operation of the high frequency power supply 9 in accordance with a command signal from the accelerator device control unit 22. The drawing power supply control unit 23 b controls the operation of the drawing power supply 2 in accordance with a command signal from the accelerator device control unit 22. The lens power supply control unit 23 c controls the operation of the lens power supply 5 in accordance with a command signal from the accelerator device control unit 22. The chopper power supply control unit 23 d controls the operation of the chopper power supply 7 in accordance with a command signal from the accelerator device control unit 22.

  Next, the operation of the linear accelerator 100 will be described with reference to FIG.

  When the operation start of the synchrotron 10 is instructed from the beam utilization system control device 21, the synchrotron is initialized from the start of operation to time t1. When the irradiation for one person is finished, the operation of the synchrotron is finished.

  When the start of operation of the synchrotron 10 is instructed, the extraction power source control unit 23b turns on the extraction power source 2, turns on the extraction voltage to reach a certain level, and when the end of the synchrotron operation is instructed, the extraction power source 2 Is turned off, the extraction voltage is turned off and becomes 0 level.

  During the period when the extraction power supply 2 is on, an ion beam is emitted from the ion source 1.

  A beam extraction request signal is output from the beam utilization system controller 21 at times t1, t2, t3, t4, and t5. In response to this, the chopper power supply control unit 23d responds at times t1, t2, t3, t4, and t5. Turn on the chopper off signal.

  As a result, the ion beam passes through the chopper 6 and is supplied to the synchrotron 10 via the high-frequency accelerator 8.

  The plasma is generated at a constant cycle regardless of the operation state or standby state of the synchrotron 10.

  Note that plasma may also be extracted from the ion source 1 by applying a high voltage to the electrostatic lens 4 from the lens power supply 5.

  Therefore, the control of the lens power supply 5 of the lens power supply control unit 23c is performed in synchronization with the control of the extraction power supply 2 of the extraction power supply control unit 23b. In other words, the lens power supply 5 is turned on only during the period from the start of operation of the synchrotron 10 and the lens power supply 5 is turned off during other periods so that the ion beam is not drawn out from the ion source 1.

  Here, the treatment time by the charged particle beam treatment apparatus is about 15 minutes per person, but the use time of the synchrotron 10 is about 3 minutes. For this reason, if the ion beam is emitted from the ion source 1 even during the 12 minutes of the standby period of the synchrotron 10, the inside of the linear accelerator 100 is contaminated by the ion beam that is not used in the synchrotron 10.

  For this reason, in Example 1 of the present application, the extraction power source 2 is turned on in synchronization with the start of operation of the synchrotron 10, the extraction power source 2 is turned off when the synchrotron 10 is not operating, and the ion source 1 when the synchrotron is not operating. The ion beam is controlled so as not to be extracted from the surface. With the charged particle beam generator of this embodiment, the contamination inside the linear accelerator due to the ion beam can be suppressed. Further, power consumption can be reduced by reducing the on-time of the extraction power supply.

  On the other hand, it is considered that impurities adhere to the surfaces of the ion source 1, the extraction electrode 3, the electrostatic lens 4, the chopper 6, etc. for a while after the extraction voltage is turned off. If this impurity is present, when a voltage is applied to each electrode during beam extraction (these are referred to as a beam optical system), the voltage will deviate from the set value, and as a result, the beam optical system inside the linear accelerator 100 may be disturbed. It is done.

  Therefore, it is preferable that the extraction voltage is turned on in order to remove impurities adhering to the inside of the linear accelerator 100 and to discharge inside the ion source at that time, and to set each electrode of the beam optical system to a predetermined voltage. In consideration of the time to reach, it may be controlled so that the extraction voltage is turned on before the beam is emitted and the plasma is extracted several times. As a result, the beam optical system inside the linear accelerator 100 is improved at the time of beam extraction, and the discharge inside the linear accelerator 100 is also reduced, so that a stable beam can be supplied and the ion source 1 and the ion source 1 downstream can be extracted. The contamination of the electrode 3, the electrostatic lens 4, and the chopper 6 can be reduced.

  In the first embodiment, since the extraction voltage is turned on at the timing of synchrotron activation, the time required to remove impurities attached to the surfaces of the ion source 1, extraction electrode 3, electrostatic lens 4, chopper 6, etc., and linear accelerator Since sufficient time until the discharge inside 100 is reduced can be ensured, impurities can be more reliably removed. Thereby, a more stable ion beam can be supplied.

  Further, when the beam utilization system is a particle beam treatment nozzle for cancer tumors or the like, it is particularly important to obtain a stable ion beam. On the other hand, if the extraction electrode is always turned on in order to keep the ion source in an optimum state, the downstream devices such as the electrostatic lens 4 and the chopper 6 are easily damaged, and maintenance is performed when the period in which the device needs to be replaced is accelerated. As a result, the availability of the particle beam therapy facility may be reduced. By using the control of the present embodiment, it is possible to realize an optimum charged particle beam generator that can supply both stable ion beams and maintain the operation rate of the particle beam therapy facility.

  As described above, it is possible to realize a charged particle beam generating apparatus operating method and a charged particle beam generating apparatus capable of reducing internal contamination of the linear accelerator 100 by an ion beam and reducing complicated periodic inspection items.

  The charged particle beam generator described in the present application includes a linear accelerator (LINAC) that generates an ion beam used in the particle beam therapy system, and a circular accelerator that accelerates the ion beam generated by the linear accelerator to a predetermined energy. including.

(Example 2)
FIG. 4 is an operation timing chart of the charged particle beam therapy system according to Embodiment 2 of the present invention. Since the schematic configuration and control block of the linear accelerator 100 in the charged particle beam therapy system are the same as those in the first embodiment, illustration and detailed description thereof are omitted.

  In the second embodiment of the present invention, the timing of turning on the extraction power supply 2 is not the same as the start of the operation of the synchrotron 10, but after the start of the initialization of the synchrotron 10 and before the end of the initialization. Power supply 2 is turned on. Since the time required for the initialization of the synchrotron 10 is determined in advance, the time is measured after the operation of the synchrotron 10 is started, and the extraction power source 2 is turned on at a predetermined time before the end of the initialization. be able to. The timing for turning on the extraction power supply 2 can be set according to the state of the device.

  Other control operations are the same as those in the first embodiment.

  According to the second embodiment of the present invention, the period during which the ion beam is emitted from the ion source 1 can be further shortened. Therefore, the contamination inside the linear accelerator 100 due to the ion beam is further reduced as compared with the first embodiment, which is complicated. Therefore, it is possible to realize a charged particle beam generating apparatus operating method and a charged particle beam generating apparatus that can be further reduced as compared with the first embodiment.

  Further, in the second embodiment, the synchrotron 10 has sufficient time for removing impurities adhering to the surfaces of the ion source 1, the electrostatic lens 4, the chopper 6, and the like and sufficient time until the discharge inside the linear accelerator 100 is reduced. Since the extraction voltage is turned on at the time of initialization, a stable ion beam can be supplied.

  In the above-described example, the extraction power source 2 is turned on, and the timing of emitting the ion beam from the ion source 1 is synchronized with the operation start of the synchrotron 10 or after the operation of the synchrotron 10 is started. Although it was before the end of the initialization period, the extraction power supply 2 may be turned on in synchronization with the end of the initialization.

  In the above-described example, the lens power supply 5 is controlled in the same manner as the control of the extraction power supply 2 of the extraction power supply control unit 23b. However, the lens power supply 5 is not related to the control of the extraction power supply 2. Even if it is controlled to always be on during the treatment operation, the present invention is established.

(Example 3)
FIG. 5 is an operation timing chart of the charged particle beam therapy system according to the third embodiment of the present invention. Since the schematic configuration and control block of the linear accelerator 100 in the charged particle beam therapy system are the same as those in the first embodiment and the second embodiment, detailed description of overlapping portions will be omitted.

  FIG. 5A shows an excitation pattern of a deflecting electromagnet as a representative electromagnet excitation pattern which is an operation pattern of the synchrotron 4. FIG. 5B shows a beam extraction request signal generated from the beam utilization system 20. FIG. 5C shows the operation of the ion source 1, and plasma is generated at a constant period. FIG. 5 (d) shows the operation of the high frequency accelerator 8 as an RF signal. FIG. 5 (e) shows the timing when the power source of the chopper located between the electrostatic lens 4 and the high frequency accelerator 8 is turned off, and FIG. 5 (f) shows the timing when the extraction power source 2 is turned on.

  In the third embodiment of the present invention, the extraction power source 2 is turned on at the time of the beam extraction request in order to reduce the internal contamination of the linear accelerator 100 by the ion beam extracted from the time other than the time of the beam extraction request during the treatment as much as possible. And an operation method in which the extraction power source 2 is turned off after the ion beam is extracted from the linear accelerator 100.

  Here, with reference to FIG. 6, the control method in Example 3 is demonstrated.

  FIG. 6 shows an operation pattern of the circular accelerator 10. The operation pattern of the circular accelerator 10 includes an incident process, an acceleration process, an extraction process, and a deceleration process. The incident process refers to a period during which the ion beam from the linear accelerator 100 is incident on the synchrotron 10. The ion beam incident on the synchrotron 10 in the incident process is accelerated to a predetermined energy used for treatment in the acceleration process, and then emitted to the patient in the extraction process. When irradiation is completed, the synchrotron 10 goes through a deceleration process and is in a standby state until the next beam extraction request signal is received.

  In the third embodiment of the present invention, in order to reduce the contamination of the inside of the linear accelerator 100 by the ion beam extracted from the ion source 1 other than when the beam extraction is required, it is extracted more than the first and second embodiments. The operation method further limits the time during which the voltage is applied to the ion source 1.

  Therefore, in the third embodiment, the extraction voltage is applied to the ion source 1 at the timing when the accelerator device control unit 22 receives the beam extraction request signal, and the extraction voltage is turned off at the timing after the start of the acceleration process of the synchrotron 10. And

  According to the third embodiment of the present invention, the ion beam extracted from a time other than the time when the beam extraction is requested during the treatment can be reduced most in the first and second embodiments. Therefore, the contamination inside the linear accelerator 100 is also reduced. It can be reduced most.

  Further, also in Example 3, the time required for removing impurities adhering to the surfaces of the ion source 1, the electrostatic lens 4, the chopper 6, and the like and the time required for the discharge inside the linear accelerator 100 to decrease are secured. The voltage can also be turned on. For example, the time for this is a period from the beam extraction request signal to the end of the incident process. As a result, a stable ion beam can be supplied to the beam utilization device.

  In the first to third embodiments, as a mechanism for applying a voltage to the ion source 1, the electrostatic lens 4, and the chopper 6, a normal extraction power source capable of voltage control in the order of milliseconds is adopted as the power source. May be realized by using different pulse power sources or using a circuit capable of high-speed switching between the ion source 1, the electrostatic lens 4, the chopper 6 and each power source.

  DESCRIPTION OF SYMBOLS 1 ... Ion source, 2 ... Extraction power supply, 3 ... Extraction electrode, 4 ... Electrostatic lens, 5 ... Lens power supply, 6 ... Chopper, 7 ... Chopper power supply, 8 ... High-frequency accelerator, 9 ... High-frequency power supply, 10 ... Synchrotron (circular accelerator), 20 ... Beam utilization equipment, 21 ... Beam utilization system controller, 22 ... Accelerator equipment control unit , 23... Injector control device, 23 a... High frequency power control unit, 23 b... Extraction power control unit, 23 c... Lens power control unit, 23 d. Transport system, 100 ... Linear accelerator

Claims (14)

A linear accelerator having an ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and an extraction power source;
A circular accelerator for accelerating the ion beam emitted from the linear accelerator;
In a method of operating a charged particle beam generator having a beam utilization device for irradiating an object with an ion beam emitted from the circular accelerator,
The extraction power source is turned on between the start of operation of the circular accelerator and the completion of initialization,
A method for operating a charged particle beam generator, wherein the extraction power source is turned off according to an operating state of the circular accelerator. A linear accelerator having an ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and an extraction power source;
A circular accelerator for accelerating the ion beam emitted from the linear accelerator;
In a method of operating a charged particle beam generator having a beam utilization device for irradiating an object with an ion beam emitted from the circular accelerator,
Depending on the operating state of the circular accelerator, turn on the extraction power supply,
A method for operating a charged particle beam generator, wherein the extraction power source is turned off at the end of the operation of the circular accelerator. A linear accelerator having an ion source for generating plasma, an extraction electrode for extracting an ion beam from the ion source, and an extraction power source;
A circular accelerator for accelerating the ion beam emitted from the linear accelerator;
In a method of operating a charged particle beam generator having a beam utilization device for irradiating an object with an ion beam emitted from the circular accelerator,
Depending on the operating state of the circular accelerator, turn on the extraction power supply,
The operation method of the charged particle beam generator characterized by turning off the said extraction power supply at the timing after the acceleration process start of the said circular accelerator. In the operation method of the charged particle beam generator according to claim 1,
The linear accelerator includes an electrostatic lens and a chopper,
Plasma is extracted from the ion source to remove impurities attached to the ion source, the extraction electrode, the electrostatic lens, and the chopper,
Operation of a charged particle beam generator, wherein a voltage applied to the extraction electrode, the electrostatic lens, and the chopper is controlled to be a predetermined voltage before the ion beam is emitted from the linear accelerator. Method.   The operation method of the charged particle beam generator according to claim 2 or 3, wherein the circular accelerator is started, from the start of the operation of the circular accelerator to the end of initialization, and at the end of initialization of the circular accelerator. A method for operating a charged particle beam generator, wherein the extraction power source of the linear accelerator is turned on at any one of the timings.   4. The charged particle beam generator operating method according to claim 2, wherein the beam utilization system controller turns on the extraction power source of the linear accelerator when outputting a beam extraction request signal. How to operate the device. A linear accelerator having an ion source for generating plasma, an extraction electrode for extracting an ion beam from the ion source, and an extraction power source;
A circular accelerator for accelerating the ion beam emitted from the linear accelerator;
In a method of operating a charged particle beam generator having a beam utilization device for irradiating an object with an ion beam emitted from the circular accelerator, the linear accelerator is an electrostatic device through which the ion beam emitted from the ion source passes. A charged particle beam generator operating method comprising: a lens; and an electrostatic lens power source, wherein the electrostatic lens power source is turned on / off in synchronization with an on / off operation of the extraction power source. An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator A beam utilization device that irradiates a target with an ion beam, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device; An accelerator device control unit for controlling the operation of the accelerator; and on the basis of a command signal from the accelerator device control unit, turning on the extraction power source from the start of operation of the circular accelerator to the completion of initialization; the charged particle beam generator, characterized in that it comprises a injector control unit for controlling and off the extraction power supply according to the operating conditions An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator A beam utilization device that irradiates a target with an ion beam, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device; Charged particles comprising an accelerator device control unit that controls the operation of the accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the beam generator,
The charged particle beam generator according to claim 1, wherein the injector control device turns off the extraction power source of the linear accelerator at the end of the operation of the circular accelerator. An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator A beam utilization device that irradiates a target with an ion beam, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device; Charged particles comprising an accelerator device control unit that controls the operation of the accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the beam generator,
The charged particle beam generator according to claim 1, wherein the injector control device turns off the extraction power source of the linear accelerator at a timing after the start of the acceleration process of the circular accelerator. The charged particle beam generator according to any one of claims 8 to 10,
The linear accelerator includes an electrostatic lens and a chopper,
Plasma is extracted from the ion source to remove impurities attached to the extraction electrode, the electrostatic lens, and the chopper, and the extraction electrode, the electrostatic lens, and the A charged particle beam generator which controls so that a voltage applied to a chopper becomes a predetermined voltage.   The charged particle beam generator according to claim 9 or 10, wherein the injector control device initializes the circular accelerator at the start of operation of the circular accelerator, from the start of operation of the circular accelerator to the end of initialization. The charged particle beam generator according to claim 1, wherein the extraction power source of the linear accelerator is turned on at any timing at the time of termination.   11. The charged particle beam generator according to claim 9, wherein when the beam utilization system control device outputs a beam extraction request signal, the injector control device turns on the extraction power source of the linear accelerator. Charged particle beam generator. An ion source for generating plasma, an extraction electrode for emitting an ion beam from the ion source, and a linear accelerator having an extraction power source, a circular accelerator for accelerating the ion beam emitted from the linear accelerator, and an electron beam emitted from the circular accelerator A beam utilization device that irradiates a target with an ion beam, a beam utilization system control device that controls the operation of the beam utilization device, and a command signal from the beam utilization system control device; Charged particles comprising an accelerator device control unit that controls the operation of the accelerator, and an injector control device that controls on / off of the extraction power source according to the operation status of the circular accelerator based on a command signal from the accelerator device control unit In the beam generator, the linear accelerator includes an electrostatic lens through which an ion beam emitted from the ion source passes. When, and a lenses power, said injector control device, wherein in synchronization with off operation of the extraction power supply, the charged particle beam generator, wherein the turning on and off the lens power.

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