JP6450634B2 - Tape peeling device - Google Patents

Description

  The present invention relates to a tape peeling device that peels off a protective tape attached to a plate-like workpiece.

  In a grinding apparatus that grinds a plate-shaped workpiece, for example, the surface of the plate-shaped workpiece formed with vinyl chloride or the like is formed on the upper surface of the plate-shaped workpiece in which a circuit such as IC or LSI is formed in an area partitioned by the division line. A protective tape that protects the upper surface is attached, and the plate-like workpiece with the protective tape attached is held by a holding table, and then the lower surface of the plate-like workpiece is ground by a rotating grinding wheel. It has become. After that, the thin plate work is supported by the ring frame via the dicing tape by attaching the dicing tape to the lower surface of the plate work and further attaching the outer periphery of the dicing tape to the ring frame. It becomes a state. Then, the plate-like workpiece is divided into individual chips by peeling the protective tape from the upper surface of the plate-like workpiece and cutting it with a cutting device along the planned division line while detecting the division line on the upper surface.

  Therefore, it is necessary to replace the tape after grinding and thinning the plate workpiece and before cutting with the cutting device. The protective tape peeled off from the thin plate workpiece by the tape peeling device at this time And collected in a collection box provided in the tape peeling device, and then discarded (for example, see Patent Document 1).

JP2013-168488A

  Here, in order to notify that the inside of the collection box is filled with the protective tape, for example, a transmissive photoelectric sensor is provided on the upper part of the inner peripheral surface of the collection box. That is, in the transmissive photoelectric sensor, the collected protective tape is piled up inside the collection box to reach a certain height, and the protective tape blocks the light between the projector and the light receiver included in the transmissive photoelectric sensor, and the received light amount is reduced. It detects that it has fallen, notifies that the protective tape is filled in the collection box, and stops the operation of the tape peeling device.

  However, when the protective tape is accommodated in the collection box, the protective tape may be attached to the inner peripheral surface of the collection box. Here, as for the protective tape stuck on the lower surface of the plate-shaped workpiece, UV curing paste that is cured by UV (ultraviolet) irradiation and decreases in adhesiveness is used for the adhesive surface of the protective tape, and UV. Adhesive glue that does not decrease adhesiveness even when irradiated is used, but in particular, a protective tape using an adhesive paste that does not cure even when irradiated with UV and does not decrease adhesiveness was used. In such a case, there is a high possibility that the protective tape will be attached to the inner peripheral surface of the collection box. For this reason, although the protective tape is not deposited so much in the collection box, the protective tape attached to the inner peripheral surface reduces the amount of light received by the transmissive photoelectric sensor. In some cases, it is determined that the tape is filled with the protective tape, and the tape peeling device stops. Therefore, when collecting protective tape using adhesive glue in the collection box provided in the tape peeling device, prevent the protective tape from sticking to the inner peripheral surface of the collection box, and secure the protective tape in the collection box. There is a problem of making it accumulate.

  The present invention for solving the above problems includes a holding table for holding the lower surface of the plate-like workpiece, a peeling means for peeling the protective tape attached to the upper surface of the plate-like workpiece held by the holding table, And a recovery box for recovering the protective tape peeled off by the peeling means, wherein the recovery box is recovered from the side wall provided with the adhesion reducing means on the inner peripheral surface and from the inner peripheral surface. Air jetting means for jetting air toward the center of the box, and the protective tape peeled off by the peeling means is prevented from being stuck to the inner peripheral surface of the recovery box, It is a tape peeling device.

  The tape peeling apparatus according to the present invention comprises a recovery box provided in the tape peeling apparatus, a side wall provided with an adhesive reduction means on the inner peripheral surface, and an air jetting means for jetting air from the inner peripheral surface toward the center. By providing it, the protective tape peeled off by the peeling means can be prevented from sticking to the inner peripheral surface of the collection box, and the protective tape can be deposited reliably in the collection box It becomes.

It is a principal part end view of a tape peeling apparatus. It is a perspective view of a recovery box and air ejection means. FIG. 3A is a perspective view of a cylindrical wire mesh. FIG. 3B is a perspective view of a cylindrical punching plate. In a tape peeling apparatus, it is an end elevation which shows the state by which the tape for peeling was affixed on the protective tape. It is an end elevation which shows the state by which the protective tape is peeled from the plate-shaped workpiece by the peeling means. It is an end view which shows the state in which the protective tape peeled by the peeling means is conveyed to the collection box. It is an end view which shows the state by which the peeled protection tape is collect | recovered in the collection box. It is a perspective view of a collection box provided with a side wall which is hollow inside, and air ejection.

  The plate-like workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having a circular outer shape. A large number of devices (not shown) are formed on the upper surface Wa of the plate-like workpiece W, and a protective tape T1 for protecting the device is attached. It is worn. The protective tape T1 is, for example, a disk-shaped film having an outer diameter equivalent to that of the plate-like workpiece W, and includes an exposed surface T1a made of a base material and an adhesive surface T1b made of an adhesive pressure-sensitive adhesive layer. And the sticking surface of the dicing tape T2 is stuck on the lower surface Wb of the plate-like workpiece W, and the outer periphery of the sticking surface of the dicing tape T2 is stuck on the ring frame F, so that the plate-like workpiece W is It will be in the state supported by the ring frame F via the dicing tape T2. The shapes and types of the plate-like workpiece W and the protective tape T1 are not particularly limited.

  The tape peeling apparatus 1 shown in FIG. 1 peels the holding table 30 that holds the lower surface Wb of the plate-like workpiece W and the protective tape T1 that is attached to the upper surface Wa of the plate-like workpiece W held by the holding table 30. The peeling means 4 and the collection | recovery box 5 which collect | recovers the protective tape T1 which the peeling means 4 peeled are provided.

  The holding table 30 has, for example, a circular outer shape, and includes a suction unit 300 that sucks the plate-like workpiece W and a frame body 301 that supports the suction unit 300. The suction unit 300 communicates with a suction source (not shown), and sucks and holds the lower surface Wb of the plate-like workpiece with a holding surface 300a that is an exposed surface of the suction unit 300 and is flush with the upper surface of the frame 301. The holding table 30 can be rotated by being driven by a rotating means 31 connected to the bottom surface of the holding table 30, and can be driven by a table moving means 32 disposed under the holding table 30 in the horizontal direction (X-axis). Direction).

  The peeling means 4 shown in FIG. 1 includes a gripping clamp 40 constituted by two cross-sectional L-shaped members that can approach and separate from each other, and an angle of the gripping clamp 40 having a gripping clamp 40 at the lower end. And at least an arm portion 41 that can be adjusted. The arm portion 41 can be moved in the vertical direction (Z-axis direction) and the horizontal direction (X-axis direction) by a moving means (not shown).

  The cylindrical collection box 5 shown in FIG. 1 includes, for example, a bottom plate 50 whose outer shape is a disk shape and an annular side wall 51 that rises in the + Z direction from the outer periphery of the bottom plate 50, and is surrounded by the bottom plate 50 and the side wall 51. The protective tape T1 peeled off by the peeling means 4 can be accommodated in the remaining space. The inner peripheral surface 51a of the side wall 51 is provided with an adhesive reduction means so that the protective tape T1 is not easily stuck. For example, a projector 520 and a light receiver are provided on the upper portion of the inner peripheral surface 51a. A transmissive photoelectric sensor 52 provided with 521 is disposed. In the transmissive photoelectric sensor 52, the protective tape T1 is stacked up to a predetermined height in the collection box 5, and the collection box 5 is filled with the protective tape T1, so that the light between the projector 520 and the light receiver 521 is protected. Is detected and transmitted to a control unit (not shown) provided in the tape peeling apparatus 1. The shape of the collection box 5 is not limited to a cylindrical shape, and may be a rectangular parallelepiped shape.

  As shown in FIG. 2, the collection box 5 includes air ejection means 6 that ejects air from the inner peripheral surface 51 a toward the center of the collection box 5. The air ejection means 6 includes, for example, four air distributors 60 disposed so as to surround the outer peripheral surface 51 b of the side wall 51, and one air supply source 61 that sends air to the air distributor 60. And each air distributor 60 communicate with each other via a blow pipe 62 connected to the air distributor 60. A plurality of pipes 63 connected to the side wall 51 are disposed on the side surface of the air distributor 60.

  As shown in FIG. 1, for example, a plurality of air ejection holes 51 c are formed in the side wall 51 so as to penetrate from the outer peripheral surface 51 b toward the inner peripheral surface 51 a in the thickness direction of the side wall 51. Communicating with The air ejection holes 51c are formed, for example, at intervals of about 90 degrees in the circumferential direction of the side wall 51 and at equal intervals in the Z-axis direction.

  The air discharged from the air supply source 61 is sent to each air distributor 60 through each blower pipe 62, and is distributed from the air distributor 60 to each air ejection hole 51c via the pipe 63, and each air ejection hole. It ejects toward the center of the collection box 5 from 51c.

  As an adhesive reduction means provided on the inner peripheral surface 51a, for example, there is one that shapes the surface of the inner peripheral surface 51a so as to have irregularities. In FIG. 2, the surface shape of the inner peripheral surface 51a is omitted, but the convex portions 51d forming the unevenness shown in FIG. 1 have, for example, a quadrangular pyramid shape, and are formed on most or the entire surface of the inner peripheral surface 51a. Is formed. The convex portions 51d are not limited to a quadrangular pyramid shape, and the arrangement of the convex portions is not limited to the example of FIG. For example, a plurality of convex portions extending in the Z-axis direction are formed at intervals along the circumferential direction of the inner peripheral surface 51a to represent a vertical stripe shape as a whole, or a triangular pyramid-shaped convex portion is the inner circumference It may be arranged vertically and horizontally along the circumferential direction of the surface 51a and the Z-axis direction.

  In addition, without forming the convex part 51d which forms an unevenness | corrugation directly in the internal peripheral surface 51a, for example, the cylindrical metal-mesh 54 shown to FIG. Thus, the inner peripheral surface 51a may be provided with an adhesion reduction means so that the protective tape is difficult to stick. For example, the cylindrical wire mesh 54 is open at the top and bottom, and has a diameter that fits on the inner peripheral side of the collection box 5, and the length in the longitudinal direction is the length of the collection box 5 in the longitudinal direction. It is the same length as the length. Further, instead of the cylindrical wire mesh 54, a cylindrical punching plate 55 having the same size as the cylindrical wire mesh 54 shown in FIG. 3B may be used. The shape of the holes formed in the punching plate 55 is not particularly limited.

  As a means for reducing adhesion to be provided on the inner peripheral surface 51a, for example, there is one that increases non-adhesiveness by applying a coating with a fluororesin to the inner peripheral surface 51a on which the convex portions 51d are formed. In the present embodiment, for example, PTFE (polytetrafluoroethylene) is applied to the inner peripheral surface 51a that has been subjected to the blast treatment, and the coating is performed by drying and sintering. Note that the inner peripheral surface 51a that is flat without forming the convex portions 51d may be coated with a fluororesin, and the coating may be not only one coat but two coats. Further, the fluororesin is not limited to PTFE, and may be PFA (perfluoroalkoxy fluororesin) or the like. Furthermore, the inner peripheral surface side of the cylindrical wire mesh 54 shown in FIG. 3 (A) or the cylindrical punching plate 55 shown in FIG. 3 (B) may be coated with a fluororesin. The inner peripheral surface 51a may be coated with Teflon (registered trademark) as a means for reducing adhesion.

  The operation of the tape peeling device 1 when the tape peeling device 1 peels the protective tape T1 attached to the upper surface Wa of the plate-like workpiece W shown in FIG. 4 will be described below with reference to FIGS. .

  First, as shown in FIG. 4, the plate-like workpiece W having the protective tape T1 adhered to the upper surface Wa is conveyed to the holding table 30 while being supported by the ring frame F via the dicing tape T2, and the holding surface 300a. On the top, the dicing tape T2 side adhered to the lower surface Wb of the plate-like workpiece is placed. Then, the suction force generated by a suction source (not shown) is transmitted to the holding surface 300a, whereby the dicing tape T2 is sucked by the holding surface 300a, and the plate-like work W adhered to the dicing tape T2 is held by the holding table 30. Suction-held on top. In the case where the protective tape T1 is a UV curable tape, the adhesive strength of the UV curable glue has already been reduced by UV irradiation.

  Next, for example, the peeling tape T3 is attached to the outer peripheral portion of the protective tape T1 by a roller or the like (not shown). The peeling tape T3 includes an exposed surface T3a made of a base material and, for example, an adhesive surface T3b having a stronger adhesive strength than the adhesive surface T1b of the protective tape T1, and the adhesive surface T3b is attached to the exposed surface T1a of the protective tape T1. Is done. A part of the peeling tape T3 is pasted so as to protrude from the outer peripheral side of the protective tape T1, so that a protruding portion T3c is formed.

  Next, the arm portion 41 is moved by a moving means (not shown) so that the gripping clamp 40 comes above the protruding portion T3c, and the gripping clamp 40 and the protruding portion T3c are aligned. The alignment may be performed by moving the holding table 30 below the gripping clamp 40 in the horizontal direction by the table moving means 32. After the positioning of the gripping clamp 40 and the protruding portion T3c, the end of the protruding portion T3c is sandwiched by the gripping clamp 40, and as shown in FIG. By pulling upward, the protective tape T1 is peeled off from the plate-like workpiece W.

  After raising the gripping clamp 40 to a predetermined height, the gripping clamp 40 is moved in the −X direction by a moving means (not shown), and the protective tape T1 is peeled off in the −X direction. Then, the protective tape T1 is completely peeled from the plate-like workpiece W.

  Further, as shown in FIG. 6, the air supply source 61 is driven to discharge the air G from the air supply source 61. The air G discharged from the air supply source 61 is sent to each air distributor 60 through each blower pipe 62, distributed to each air ejection hole 51 c by the air distributor 60, and each air ejection hole via the pipe 63. It ejects toward the center of the collection box 5 from 51c.

  After the protective tape T1 is completely peeled from the plate-like workpiece W, the arm portion 41 is moved in the X-axis direction by a moving means (not shown) so that the gripping clamp 40 comes above the collection box 5 as shown in FIG. Move further. After the grip clamp 40 is positioned above the collection box 5, the grip clamp 40 is opened as shown in FIG. 7 and the protective tape T <b> 1 is dropped into the collection box 5.

  When the protective tape T1 to which the peeling tape T3 is attached is in contact with the inner peripheral surface 51a while falling in the collection box 5, the protective tape is formed by the convex portions 51d formed on the surface of the inner peripheral surface 51a. Since the adhesive surface T1a of T1 and the inner peripheral surface 51a are in point contact, the adhesive force of the adhesive surface T1a is hardly exhibited, and the protective tape T1 is guided to the center of the collection box 5 by the air G. T1 does not stick to the inner peripheral surface 51a. Furthermore, for example, even if the protective tape T1 to which the peeling tape T3 is adhered is in contact with the inner peripheral surface 51a while falling in the collection box 5, the inner peripheral surface 51a is coated with PTFE. Since the non-adhesiveness of the inner peripheral surface 51a is enhanced, the protective tape T1 does not stick to the inner peripheral surface 51a. Therefore, it is possible to reliably deposit the protective tape T1 in the collection box 5. Accordingly, it is possible to prevent the transmission type photoelectric sensor 52 from determining that the protective tape T is filled with the protective tape T despite the small amount of the protective tape T accommodated in the collection box 5.

  The present invention is not limited to the above embodiment. For example, as shown in FIG. 8, an annular side wall rising vertically from the outer periphery of the bottom plate 50 of the collection box 5 in the + Z direction is used as a side wall 56 having a hollow inside, and the side wall 56 extends from the inner peripheral surface 56 a in the thickness direction. A plurality of air ejection holes 56e formed so as to penetrate to the hollow portion 56 are formed in an annular shape. In addition, one air supply port 56f formed so as to penetrate from the outer peripheral surface 56b to the hollow portion of the side wall 56 is formed above the outer peripheral surface 56b of the side wall 56. Then, one end of the pipe 63 is connected to the air supply port 56 f, and the other end of the pipe 63 is connected to the blower pipe 62 communicating with the air supply source 61. Then, the air supply source 61 is driven to send air from the air supply source 61. The air sent from the air supply source 61 passes through the blower pipe 62 and the pipe 63 and reaches the air supply port 56f. And it is good also as what spreads air to the whole hollow part of the side wall 56 from the air supply port 56f, and ejects it toward the center of the collection | recovery box 5 from the air ejection hole 56e.

1: Tape peeling device 30: Holding table 300: Suction part 300a: Holding surface 301: Frame
31: Rotating means 32: Table moving means 4: Peeling means 40: Grasping clamp 41: Arm part
5: Collection box 50: Bottom plate
51: Side wall 51a: Inner peripheral surface 51b: Outer peripheral surface 51c: Air ejection hole 51d: Convex portion
52: Transmission type photoelectric sensor 520: Light projector 521: Light receiver
54: Wire mesh 55: Punching plate 56: Side wall 56a: Inner peripheral surface 56b: Outer peripheral surface 56e: Air ejection hole
56f: Air supply port 6: Air ejection means 60: Air distributor 61: Air supply source 62: Air supply pipe 63: Pipe W: Plate-shaped workpiece Wa: Upper surface of the plate-shaped workpiece Wb: Lower surface of the plate-shaped workpiece T1: Protective tape T1a: Exposed surface of the protective tape T1b: Adhesive surface of the protective tape T2: Dicing tape F: Ring frame T3: Release tape T3a: Exposed surface of the release tape T3b: Adhesive surface of the release tape T3c: Overhang portion G: Air

Claims (1)

A holding table for holding the lower surface of the plate-like workpiece, a peeling means for peeling the protective tape attached to the upper surface of the plate-like workpiece held by the holding table, and collecting the protective tape peeled off by the peeling means A tape peeling device comprising a collection box,
The recovery box includes a side wall provided with an adhesive reduction means on the inner peripheral surface, and an air ejection unit that ejects air from the inner peripheral surface toward the center of the recovery box,
A tape peeling apparatus characterized in that the protective tape peeled off by the peeling means is prevented from sticking to the inner peripheral surface of the recovery box.

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