JP6446959B2 - Fine structure manufacturing mold, fine structure manufacturing mold manufacturing method, and fine structure manufacturing method - Google Patents

Description

  The present invention relates to a fine structure such as a film material having a fine structure formed by repetition with a repetition period of 500 nm or less.

  In recent years, utilization of a fine structure having a repetition period of a wavelength in the visible light region has been proposed in Patent Documents 1 and 2 and the like. That is, Patent Document 1 proposes a device for preventing reflection in the visible light region by producing such a fine structure by repeating minute protrusions with a repetition pitch equal to or shorter than the shortest wavelength in the visible light region. Further, such a fine structure has hydrophilicity, anti-fogging property, and self-cleaning property, and Patent Document 2 discloses a configuration using such characteristics.

  By the way, it is thought that it is convenient if the range of use can be expanded in various ways for a fine structure having such a fine structure. For this purpose, it is required to ensure higher productivity than in the past.

Japanese Patent No. 4632589 Japanese Patent No. 5426100

  The present invention has been made in view of such circumstances, and aims to ensure high productivity with respect to this type of microstructure and to expand the range of use with respect to this type of microstructure. .

  The present inventor has conducted extensive research to solve the above-mentioned problems, patterned a portion provided with a fine structure to produce a fine structure, and selectively provided an area for shaping related to the fine structure. It came to the idea of constituting a plate for shaping, and the present invention was completed.

    Specifically, the present invention provides the following.

(1) A microstructure having a microstructure with a repetition period of 500 nm or less,
A surface resin layer is provided on the substrate,
By the shaping process, the microstructure is selectively formed on the surface of the surface resin layer,
A fine structure in which a surface of the surface resin layer is patterned in a region where the fine structure is produced and a region where the fine structure is not produced.

  According to (1), the region in which the fine structure is produced becomes a relatively hydrophilic or water-repellent region, and the region in which the fine structure is not produced becomes a relatively hydrophilic or low water-repellent region. Thus, a fine structure formed by patterning a region having high hydrophilicity or water repellency can be produced by a shaping treatment, and thus can be obtained with high productivity.

(2) In (1), the surface of the region where the microstructure is not produced is hydrophilic,
A fine structure in which a liquid selectively adheres to a region where the fine structure is produced.

  According to (2), this patterning can be made visible for a fine structure formed by patterning a highly hydrophilic region.

(3) In (1), the surface of the region where the microstructure is not produced is water repellent,
A fine structure in which a liquid selectively adheres to a region where the fine structure is not manufactured.

  According to (3), this patterning can be made visible for a fine structure formed by patterning a region having high water repellency.

(4) In any one of (1), (2), and (3), the microstructure is
A fine structure formed by arranging columnar bodies in a matrix.

  According to (4), more specifically, a fine structure obtained by patterning a region having high hydrophilicity or high water repellency can be obtained with high productivity, rather than arranging the concave portions in a matrix.

(5) In any one of (1), (2), and (3), the microstructure is
A fine structure formed by repeating concave grooves.

  According to (5), a fine structure obtained by patterning a region having high hydrophilicity or water repellency can be obtained with high productivity by a more specific configuration by repeating the concave grooves.

(6) In any one of (1), (2), and (3), the microstructure is
A fine structure formed by close arrangement of minute protrusions.

  According to (6), a fine structure formed by patterning a region having high hydrophilicity or high water repellency can be obtained with high productivity by a more specific configuration by closely arranging the fine protrusions.

(7) In a method for manufacturing a microstructure having a microstructure with a repetition period of 500 nm or less,
On the surface of the base material of the manufacturing mold, a fine uneven shape manufacturing process for forming a fine uneven shape corresponding to the fine structure,
Patterning for selectively backfilling the fine uneven shape on the surface of the base material and patterning the surface of the base material into a region where the fine uneven shape appears on the surface and a region where the fine uneven shape does not appear on the surface And the process of
The fine structure is selectively formed on the surface of the substrate of the fine structure by a forming process using the manufacturing die in which the base material surface is patterned by the patterning step, and the fine structure is formed. A manufacturing method of a fine structure provided with a forming treatment step of patterning the surface of the base material in a produced region and a region where the fine structure is not produced.

  According to (7), the region in which the microstructure is manufactured becomes a relatively hydrophilic or highly water-repellent region, and the region in which the microstructure is not manufactured becomes a relatively hydrophilic or water-repellent region, As a result, a fine structure formed by patterning a region having high hydrophilicity or water repellency can be produced by a shaping treatment, and thus can be obtained with high productivity.

(8) In (7), the surface of the region where the microstructure is not produced is hydrophilic,
The manufacturing method of the microstructure which further comprises the application | coating process which apply | coats the liquid to the said base-material surface, and adheres the said liquid selectively to the area | region which produced the said microstructure.

  According to (8), this patterning can be made visible for a fine structure formed by patterning a highly hydrophilic region.

(9) In (7), the surface of the region where the microstructure is not produced is water repellent,
The manufacturing method of the microstructure which further comprises the application | coating process which apply | coats the liquid to the said base-material surface, and adheres the said liquid selectively to the area | region which produced the said microstructure.

  According to (9), this patterning can be made visible for a fine structure formed by patterning a region having high water repellency.

(10) A mold for manufacturing a fine structure used for manufacturing a fine structure having a fine structure with a repetition period of 500 nm or less,
A fine uneven shape corresponding to the fine structure of the fine structure is formed on the surface of the base material,
The surface of the base material is patterned into a region where the fine uneven shape on the surface of the base material is selectively backfilled and the fine uneven shape appears on the surface, and a region where the fine uneven shape does not appear on the surface. Mold for manufacturing a fine structure.

  According to (10), the region corresponding to the region where the fine concavo-convex shape is produced becomes a relatively hydrophilic or highly water-repellent region, and the region corresponding to the region where the fine concavo-convex shape is not produced is relatively A fine structure formed by patterning a hydrophilic or high water repellency region by forming a hydrophilic or low water repellency region can be produced by a shaping process, and thus can be obtained with high productivity. .

(11) In (10), the fine uneven shape is
A mold for manufacturing a fine structure formed by arranging columnar bodies in a matrix.

  According to (11), with a more specific configuration in which the columnar bodies are arranged in a matrix, a microstructure formed by patterning a hydrophilic or highly water-repellent region can be obtained with high productivity.

(12) In (10), the fine uneven shape is
A mold for manufacturing a fine structure formed by repeating concave grooves.

  According to (12), a fine structure formed by patterning a region having high hydrophilicity or high water repellency can be obtained with high productivity by a more specific configuration by repeating the concave grooves.

(13) In (10), the fine uneven shape is
A mold for manufacturing a fine structure formed by close arrangement of tapered fine holes.

  According to (13), a fine structure formed by patterning a region having high hydrophilicity or water repellency can be obtained with high productivity by a more specific configuration by close arrangement of minute protrusions corresponding to fine holes. .

(14) A method for manufacturing a microstructure manufacturing mold for manufacturing a microstructure having a microstructure with a repetition period of 500 nm or less by a shaping process,
On the surface of the base material, a fine concavo-convex shape production process for producing a fine concavo-convex shape corresponding to the fine structure,
Patterning for selectively backfilling the fine uneven shape on the surface of the base material and patterning the surface of the base material into a region where the fine uneven shape appears on the surface and a region where the fine uneven shape does not appear on the surface The manufacturing method of the metal mold | die for microstructure manufacturing provided with these processes.

  According to (14), the region corresponding to the region where the fine concavo-convex shape is produced becomes a relatively hydrophilic or highly water-repellent region, and the region corresponding to the region where the fine concavo-convex shape is not produced is relatively In this way, a fine structure obtained by patterning a hydrophilic or water-repellent region can be produced by a forming process, thereby obtaining high productivity. it can.

  According to the present invention, a fine structure formed by patterning a highly hydrophilic region or a highly water-repellent region with a fine structure obtained by patterning a portion provided with a fine structure is provided with high productivity. And the range of use of this type of microstructure can be expanded. In addition, by selectively providing a mold forming area related to the microstructure, the mold plate is configured so that a microstructure formed by patterning the portion provided with the microstructure can be provided and used with high productivity. The range can be expanded.

It is a figure which shows the microstructure based on 1st Embodiment of this invention. It is a figure which expands and shows the fine structure film which concerns on the fine structure of FIG. 1 partially. It is a figure which shows the manufacturing process of this. It is a figure where it uses for description of the manufacturing process of the fine structure film which concerns on the fine structure of FIG. It is a figure which shows the roll plate which concerns on the manufacturing process of FIG. It is a flowchart which shows the manufacturing process of the roll plate of FIG. It is a figure where it uses for description of the manufacturing process of FIG. It is a figure where it uses for description of a 1st cutting process. It is a figure where it uses for description of a 2nd cutting process. It is a figure where it uses for description of a microgroove. It is a figure which shows the other example of a cutting process. It is a figure which shows the other example of the cutting process different from FIG. It is a figure which shows the other example of the cutting process different from FIG. 10, FIG. It is a figure which shows the microstructure based on 2nd Embodiment of this invention. It is a figure which shows the microstructure based on 4th Embodiment of this invention.

[First Embodiment]
FIG. 1 is a diagram (conceptual perspective view) showing a microstructure according to the first embodiment of the present invention. The fine structure 1 (FIG. 1A) according to this embodiment has a fine structure by attaching, for example, water-soluble ink to the surface of the fine structure film 2 (FIG. 1B) and drying it. A patterned ink layer 3 is produced and formed on the surface of the body film 2.

Here, the microstructure film 2 is patterned into a region AA having a high hydrophilicity and a region BB having a relatively low hydrophilicity as compared with the region AA to produce a surface. Here, hydrophilicity refers to a case where the contact angle θ of water is 0 degree or more and less than 90 degrees. High hydrophilicity is when the contact angle θ is small, and low hydrophilicity is when the contact angle θ is large. Accordingly, the contact angles θ _AA and θ _BB of the regions AA and BB are θ _AA <θ _BB .

  By patterning the areas AA and BB, the fine structure 1 can be made to adhere ink selectively to the highly hydrophilic area AA by avoiding the low hydrophilic area BB by applying ink to the fine structure film 2. The region A where the ink is attached is formed in the region AA having high hydrophilicity, and the region B where the ink is not attached is formed in the region BB having low hydrophilicity. Thereby, the fine structure 1 is configured so that the area setting (AA and BB) produced on the surface of the fine structure film 2 can be visually confirmed. For example, a water mark by this area setting, a code such as a product number, It is configured so that it can be used to check letters, numbers, etc. As a result, the wettability of the ink is adjusted by, for example, addition of an additive such as ethyl alcohol so that the ink selectively adheres to the area AA. Instead of ink, various liquids such as water and various solvents may be applied.

  The fine structure film 2 has a surface resin layer 5 formed on the entire surface of one surface of the base material 4 so that the overall shape is a film shape. As shown in FIG. 2, the repetition periods Px and Py are in the visible light range. A fine structure having a wavelength of about 5 nm is formed on the surface of the surface resin layer 5 to produce a highly hydrophilic area AA. Further, such a fine structure is not produced, and the surface of the surface resin layer 5 is produced by a substantially flat surface to form a region BB having low hydrophilicity. The fine structure film 2 is produced with the repetition periods Px and Py of 500 nm or less.

  When such a fine concavo-convex structure is provided, when a hydrophilic material having a contact angle θ of less than 90 degrees is applied to the surface resin layer 5, the contact angle of the portion provided with the fine concavo-convex structure is further reduced. It becomes a so-called superhydrophilic region or a region close to superhydrophilic. On the other hand, when a water-repellent material having a contact angle θ of 90 degrees or more is applied to the surface resin layer 5, the contact angle of the portion provided with the fine concavo-convex structure further increases, so-called super It becomes a water repellent region or a region close to super water repellent.

  By effectively utilizing this feature, in this embodiment, a hydrophilic material is applied to the surface resin layer 5 to produce a highly hydrophilic region A and a low hydrophilic region B. Here, in order to express such a super-hydrophilic property or a region close to super-hydrophilic property, it is desired that the repetition periods Px and Py related to this fine structure are made to be 500 nm or less. 3 is set so that the ink layer 3 can be reliably patterned corresponding to the areas AA and BB. Note that a surface treatment for ensuring hydrophilicity may be executed instead of or in addition to the application of the hydrophilic material. Further, by making the repetition periods Px and Py different, anisotropy may be provided for hydrophilicity and water repellency, and hydrophilicity and water repellency can be strengthened by shortening the repetition period.

  Here, the base material 4 is, for example, a cellulose resin such as TAC (Triacetylcellulose), an acrylic resin such as PMMA (polymethyl methacrylate), a polyester resin such as PET (Polyethylene terephthalate), or PP (polypropylene). For example, polyolefin resins such as PVC, vinyl resins such as PVC (polyvinyl chloride), and various resin films such as PC (polycarbonate) can be applied. In this embodiment, although the fine structure 1 is produced in the form of a film by producing the ink layer 3 on the fine structure film 2 and producing the fine structure 1, the fine structure 1 is a sheet shape, a flat plate Depending on the form of the microstructure 1, the base material 4 may be produced in addition to these materials, for example, glass such as soda glass, potash glass, lead glass, ceramics such as PLZT, Various transparent inorganic materials such as quartz and meteorite can be applied.

  The fine structure 1 is formed by forming an uncured resin layer (hereinafter, appropriately referred to as a receiving layer) to be a receiving layer having a fine concavo-convex structure on the base material 4 and then curing the receiving layer by molding. As a result, the surface resin layer 5 is produced on the surface of the base material 4, and the fine irregularities are selectively produced on the surface of the surface resin layer to produce the regions AA and BB. In this embodiment, an acrylate-based ultraviolet curable resin that is one of the resins for shaping used for the shaping treatment and is a hydrophilic resin is applied to the surface resin layer 5. In the surface resin layer 5, various resin materials applicable to the shaping process can be widely applied.

  Further, in this embodiment, the minute unevenness formed on the surface resin layer 5 is produced by arranging the minute recesses 6 in a matrix. The minute recess 6 is a columnar recess whose shape when the surface of the microstructure film 2 is viewed from the vertical direction is a square shape, and is repeatedly created in the extending direction of two orthogonal sides of the square shape, It is provided in a matrix on the surface of the fine structure film 2. The fine structure 1 is set so that the repetition pitches Px and Py in the extending directions of the two sides are each 500 nm or less.

  The minute recess 6 is produced with a depth of 50 nm or more, preferably with a depth of 100 nm or more, more preferably with a depth of 200 nm or more, so that a sufficiently high hydrophilicity can be ensured. In consideration of the yield and the like, the depth is set to be not more than the repeated pitches Px and Py.

  Further, the minute recesses 6 have widths Wx and Wy in the repetitive direction that are 1/3 or more and 2/3 or less of the corresponding repetitive pitches Px and Py. It is configured so that it can be reliably produced, and is configured to ensure high productivity.

[Manufacturing process]
FIG. 3 is a diagram illustrating a manufacturing process of the microstructure film 2. In the manufacturing process 10, in the resin supply process, an uncured and liquid ultraviolet curable resin relating to the surface resin layer 5 is applied to the surface of the base film 4 in the form of a strip film by the die 12. In addition, about application | coating of an ultraviolet curable resin, not only the case by the die | dye 12 but various methods are applicable. Subsequently, in this manufacturing process 10, the substrate 4 is pressed and pressed against the peripheral side surface of the roll plate 13 which is a mold for molding the fine structure film 2 by the pressing roller 14, and thereby the liquid is obtained in an uncured state. The ultraviolet curable resin is brought into close contact with the peripheral side surface of the roll plate 13, and the fine concavo-convex recesses formed on the peripheral side surface of the roll plate 13 are sufficiently filled with the ultraviolet curable resin. In this state, in this manufacturing process, the ultraviolet curable resin is cured by irradiating with ultraviolet rays, thereby producing a group of minute recesses on the surface of the substrate 4. In this manufacturing process, the substrate 4 is peeled off from the roll plate 13 through the peeling roller 15 together with the cured ultraviolet curable resin. Thereby, this manufacturing process 10 produces the fine structure film 2 by a long film shape.

  In the manufacturing process of the fine structure 1, after the ink is applied to the fine structure film 2 having the long film shape thus prepared and dried, the fine structure 1 is cut to a desired size. To do. As a result, the fine structure 1 and the fine structure film 2 are formed by sequentially forming the fine irregularities formed on the peripheral side surface of the roll plate 13 which is a shaping mold on the long base 4 made of a roll material. Efficient mass production.

  FIG. 4 is a perspective view showing the configuration of the roll plate 13. The roll plate 13 has fine irregularities corresponding to the fine irregular structure of the fine structure film 2 as shown by a partially enlarged arrow A on the peripheral side surface of the base material 22 which is a cylindrical or columnar metal material. The shape is selectively produced corresponding to the setting of the areas AA and BB of the fine structure film 2. In FIG. 4, regions corresponding to the regions AA and BB of the fine structure film 2 are denoted by reference numerals ARA and ARB. Here, although the base material 22 has a sufficient strength for this type of forming process, and can easily apply various metal materials in a columnar shape or a cylindrical shape that can easily produce a fine uneven shape by a cutting process, In form, copper pipe material is applied. In the roll plate 13, minute convex portions 23 that are columnar bodies corresponding to the minute concave portions 6 are repeatedly formed on the peripheral side surface of the base material 22 in the direction along the pipe axis of the pipe material and in the circumferential direction. . In addition, the repetition pitches Px and Py, which are the creation periods of the minute projections 23, are produced with a pitch corresponding to the minute recesses 6 of the microstructure film 2, and the width Wx related to the minute recesses 6 of the microstructure film 2, The minute projections 23 are produced with the width and height corresponding to Wy and depth.

  FIG. 5 is a flowchart showing a manufacturing process of the roll plate 13. FIG. 6 is a diagram for explaining each process in comparison with FIG. In the smoothing step (SP1), the manufacturing process is performed by smoothing the peripheral side surface of the base material 22 by cutting the base material peripheral side surface using a cutting tool, and then combining the electrolytic elution action and the rubbing action by the abrasive grains. The peripheral side surface of the base material 22 is made into a super mirror surface by an electrolytic composite polishing method (SP2). Thereby, this manufacturing process smoothes the peripheral side surface of the base material 22 by the smoothness corresponding to the surface shape of the fine structure film 2 (FIG. 5A).

  Subsequently, as shown in FIG. 7, in this manufacturing process, in the primary cutting process (SP 3), after the base material 22 is mounted on the cutting device, the tip of the cutting tool 24 is pressed against the peripheral side surface of the base material 22. While rotating the base material 22 as indicated by the arrow B, the bite 24 is moved in the direction along the tube axis of the base material 22 as indicated by the arrow C, so that the peripheral side surface of the base material 22 is spiraled. A fine groove 25 is formed on the peripheral side surface of the base material 22 by cutting and forming a concave groove having a rectangular cross section extending in the circumferential direction (FIG. 6B). Note that the tip of the cutting tool 24 is formed in a comb-teeth shape so that a plurality of fine grooves 25 can be formed simultaneously in parallel. Accordingly, in this process, a plurality of fine grooves extending in the circumferential direction of the base material 22 are formed. Grooves are created simultaneously in parallel to reduce the time required for the cutting process. Thus, in this manufacturing process, the fine groove 25 is formed with the pitch Py.

  Subsequently, in this manufacturing process, in the backfilling process (SP4), the fine grooves 25 created in the primary cutting process are backfilled with the backfilling material, the peripheral side surface of the base material 22 is made substantially flat, and the state before the primary cutting process. Return the peripheral side surface of the base material 22 (FIG. 6C). More specifically, in this embodiment, an ultraviolet curable resin is applied to the backfill material, and after the ultraviolet curable resin 26 is applied to the peripheral side surface of the base material 22, the ultraviolet curable resin is irradiated with ultraviolet rays. The resin 26 is cured, thereby filling the fine grooves 25 back. In the backfilling material, various materials can be widely applied on condition that the fine groove 25 can be sufficiently backfilled.

  Subsequently, in this manufacturing process, the fine groove 28 having a rectangular cross section intersecting with the fine groove 25 produced by the primary cutting process is produced by the cutting in the secondary cutting process (SP5) (FIG. 6D). More specifically, in this step, as shown in FIG. 8, the base material 22 is rotated in the direction along the central axis of the base material 22 by the cutting tool 24 as indicated by an arrow D while the base material 22 is rotated intermittently. Thus, the fine groove 28 whose extension direction is orthogonal to the fine groove 25 is produced.

  Therefore, when the fine groove 28 intersecting the fine groove 25 is produced by cutting without refilling the fine groove 25, the cutting edge of the cutting tool 24 collides with the wall surface of the fine groove 25 every time it crosses the fine groove 25. Thus, a sudden and large stress is applied during the collision. On the other hand, the cutting edge of the cutting tool 24 needs to be manufactured with a very fine shape. As a result, in the cutting tool 24, the cutting edge is damaged in a short time, and the roll plate cannot be secondarily cut stably and in a short time. However, when the fine groove 25 is backfilled and subjected to secondary cutting as in this embodiment, damage to the cutting edge due to the collision of the fine groove 25 with the wall surface can be effectively avoided and stable and short. The base material 22 can be secondary processed in time. In addition, as for the ultraviolet curable resin to be used for backfilling, it is desirable that the metal material constituting the base material 22 is close in hardness and softness.

  In addition, in the case of producing a roll plate by a cutting process using a bite in this way, the pitch of the fine groove by the primary cutting process and the pitch of the fine groove by the secondary cutting process can be varied. As a result, the repetition pitches Px and Py of the recesses 6 in the fine structure 1 can be varied in the orthogonal direction. In addition, the widths Wx and Wy of the minute recesses 6 in the repeated direction and the sectional shape of the minute grooves can be made different by changing the cutting tool used for cutting. In the fine structure, by making the pitches Px and Py, the widths Wx and Wy, etc. different, anisotropy is provided in the hydrophilicity and water repellency, and the characteristics in the two orthogonal directions are made different. be able to.

  Subsequently, in this manufacturing process, after removing the ultraviolet curable resin (backfill material) remaining in the fine grooves 25 in the removing process (SP6), the manufacturing process is performed. Here, in this removal step, various methods can be widely applied depending on the backfilling material, but in this embodiment, the adhesive tape is attached to the peripheral side surface of the roll plate and peeled off to remain. Remove backfill material. Alternatively, it may be removed by dissolution using an organic solvent, or the backfill material may be decomposed and removed by heating.

  Subsequently, in the patterning step (SP7), the step selectively selects the concave grooves 25 and 28 formed on the peripheral side surface of the roll plate 13 so as to correspond to the settings of the areas AA and BB of the fine structure film 2. Refilling, on the peripheral side surface of the roll plate 13, an area ARA in which the minute projections 23 are produced corresponding to the area AA, and a flat area in which the minute projections 23 are not produced corresponding to the area BB An ARB is produced, and the peripheral side surface of the roll plate 13 is patterned. In this backfill material, for example, the backfill material according to step SP4 can be applied.

  It should be noted that the present invention is not limited to the case where the fine groove by the primary cutting process and the fine groove by the secondary cutting process are produced by the rectangular cross section, and various shapes can be widely applied. Specifically, as shown in FIG. 9 (A), a fine groove may be formed so as to be in contact with an adjacent fine groove due to a triangular cross-sectional shape, and both wall surfaces are tapered as shown in FIG. 9 (B). The fine groove may be formed as provided, or as shown in FIG. 9C, the fine groove may be formed in a triangular shape with a rounded apex. Further, as shown in FIG. 9D, the shape of the wall surface related to the cross-section may be made different on both sides of the fine groove, so that anisotropy may be further provided to the hydrophilic property.

  Further, the cross-sectional shape is not limited to the case where the cross-sectional shapes of the fine grooves are made equal in two orthogonal directions, and the cross-sectional shapes may be different. In addition, the cutting is not limited to the case of linear cutting in two orthogonal directions, and cutting is performed with a meandering locus as indicated by the signs L1 and L2 in FIG. Alternatively, as shown in FIG. 11, cutting may be performed so that the trajectories L1 and L2 of the cutting tool tip in the primary cutting process and the secondary cutting process intersect obliquely.

  Further, not only when the mold is created by the first cutting process and the second cutting process by the secondary cutting process, but as shown in FIG. 12, the first cutting process (the trajectory of the tool tip is indicated by reference symbol L1), the secondary cutting process. After the cutting process (the trajectory of the tool tip is indicated by a symbol L2), the third cutting process may be performed so as to intersect the trajectories L1 and L2 by the two cutting processes. Further, by cutting three or more times in this way, for example, a convex portion having a rectangular shape and a convex portion having a triangular prism shape may be mixed, so that convex portions having different shapes may be mixed.

  According to this embodiment, a fine structure is produced by patterning a portion provided with a fine structure having a repetition period of 500 nm or less, and an ink layer is produced by attaching a liquid to the surface of the fine structure. As a result, it is possible to produce a microstructure having high productivity by effectively utilizing the function related to the hydrophilicity of the microstructure.

  In addition, by creating a mold-making plate by selectively creating a mold-forming region related to the fine structure by backfilling, the microstructure is produced with high productivity using this mold-making plate. be able to. Further, in such a plate for shaping, the resin material subjected to backfilling as necessary is removed in the same manner as described above for step SP6, and then re-patterned to obtain regions A and B. Such patterning can be changed, whereby the roll plate can be flexibly changed in response to a change in a product to be produced.

  Moreover, in this embodiment, a fine groove is produced so as to intersect by cutting, and this mold is produced, thereby efficiently producing the mold, and further using this mold, a large area The microstructure can be mass-produced efficiently. Also, at this time, by making the fine grooves intersecting by filling back the fine grooves once created, it is possible to effectively avoid the damage of the cutting tool used by the cutting process, and thereby make the mold more efficient. A mold having a large shape can be produced well, and a fine structure can be mass-produced more efficiently.

  In addition, since this die is a roll plate, the micro groove extending in the circumferential direction of the roll plate can be efficiently obtained by moving the cutting tool in a spiral shape while rotating the base material related to this die. It is possible to create well, and it is possible to easily and efficiently create a roll plate having a large width. Therefore, a large area fine structure can be efficiently mass-produced using this roll plate.

[Second Embodiment]
FIG. 13 is a diagram showing the fine structure of the region AA related to the fine structure film 42 according to the second embodiment in comparison with FIG. This embodiment has the same configuration as that of the first embodiment except that the configuration related to the fine structure is different.

  Here, the fine structure film 42 has a fine structure formed by repeating the minute concave grooves 46 instead of repeating the minute concave portions 6 having a rectangular shape when viewed from the front. Therefore, a roll plate is produced on the microstructure film 42 by omitting the backfilling step (SP4), the secondary cutting step (SP5), and the removing step (SP6) described above with reference to FIG. It is produced by the used shaping process.

  As in this embodiment, the same effect as that of the first embodiment can be obtained even if the fine structure is formed by the minute groove 46 instead of the minute recess having the rectangular shape in front view. Further, by forming a fine structure by the minute grooves in this way, it is possible to provide anisotropy in hydrophilicity in the repeating direction of the grooves and the direction orthogonal thereto.

[Third Embodiment]
In this embodiment, the microstructure related to the microstructure film is formed by the close arrangement of the microprojections. This embodiment has the same configuration as that of the first embodiment or the second embodiment except that the configuration related to the fine structure is different.

  That is, in this embodiment, the minute protrusion is formed by a so-called tapered shape in which the cross-sectional area gradually decreases toward the tip, and the minute protrusion is randomly arranged closely to form a fine structure. In addition, the fine structure formed by the close arrangement of the microprotrusions is formed by a mixture of single-peak microprotrusions having only one apex and microprotrusions having a plurality of apexes, thereby improving the scratch resistance. The This fine structure is set so that the distance between adjacent minute protrusions is 500 nm or less. Note that the distance between adjacent minute protrusions is defined by an average value by arranging the minute protrusions closely in such a random arrangement.

  Corresponding to the close arrangement of the microprotrusions, the roll plate is provided with a high-purity aluminum layer on the peripheral side surface of the base material such as a hollow stainless steel pipe, directly or via various intermediate layers, and anodized. By alternately repeating the treatment and the etching treatment, a fine hole (which is a reversal shape of the minute protrusion) tapered in the depth direction is formed in close contact with the aluminum layer.

  Similar to the first embodiment, the same effect as that of the first embodiment can be obtained even when the fine structure is formed by closely arranging the fine protrusions instead of the minute concave portion having the rectangular shape in front view.

[Fourth Embodiment]
In this embodiment, the surface resin layer is prepared so that the surface of the surface resin layer on which no microstructure is formed exhibits water repellency. This embodiment is configured in the same way as the first embodiment, the second embodiment, or the third embodiment except that the configuration relating to the surface resin layer is different.

  Here, when the surface resin layer that has not been prepared in this way is set to exhibit water repellency, in the region in which the microstructure is prepared, a state of super water repellency or near super water repellency is formed. Thus, the fine structure film and the fine structure are produced by patterning with a water-repellent region instead of patterning with a hydrophilic region. Here, the water repellency is when the water contact angle θ is 90 degrees or more.

  Accordingly, as shown in FIG. 14, in the fine structure 41 according to this embodiment, the region B where the fine structure is not manufactured is set as a region having low water repellency, and the ink of the ink layer 3 is adhered and held. In contrast, the region A in which the fine structure is manufactured is set as a region having high water repellency so that the ink related to the ink layer 3 does not adhere.

  In this setting of water repellency, various methods can be applied. In this embodiment, the surface of the fine structure is subjected to water repellency treatment by vapor phase treatment. In addition, various methods can be applied to such a water-repellent treatment by vapor phase treatment, but in this embodiment, it can be performed by fluorinating the surface of the microstructure.

[Fifth Embodiment]
In this embodiment, the fine structure film is affixed to various members, products, etc. without providing an ink layer, so that the product number or the like is not easily found using the fine structure film. Codes, letters, numbers, etc. are set for pasting. Further, for example, by repeatedly creating a fine concavo-convex structure with a band-shaped region, anisotropy can be provided in the wettability between the extending direction of the band-shaped region and the repeating direction of the band-shaped region. Moisture condensed in the direction of extension of the belt-like region can be effectively drained. Thereby, for example, it affixes on various members (for example, window glass) which dew condensation, and drains the water drop by dew condensation efficiently.

  As in this embodiment, a fine structure is formed without providing an ink layer so that high productivity can be secured for this kind of fine structure, and the range of use for this kind of fine structure can be expanded. Can be achieved.

[Other Embodiments]
The specific configuration suitable for the implementation of the present invention has been described in detail above. However, the present invention is not limited to the scope of the present invention, and various combinations of the above-described embodiments, and further the configuration of the above-described embodiments. Can be variously changed.

  That is, in the above-described embodiment, the case of producing a fine structure film by forming a long film material using a roll plate mold is described, but the present invention is not limited thereto, and a flat plate mold is used. The present invention can be widely applied to the case of manufacturing by processing the used single wafer.

DESCRIPTION OF SYMBOLS 1,41 Microstructure 2,42 Microstructure film 3 Ink layer 4 Base material 5 Surface resin layer 6 Concave part 10 Manufacturing process 12 Die 13 Roll plate 14, 15 Roller 22 Base material 23 Micro convex part 24 Byte 25, 28, 46 Groove 26 UV curable resin

Claims (8)

In a method for manufacturing a fine structure having a fine structure with a repetition period of 500 nm or less,
On the surface of the base material of the manufacturing mold, a fine uneven shape manufacturing process for forming a fine uneven shape corresponding to the fine structure,
The fine uneven shape on the surface of the base material is selectively backfilled, and the surface of the base material is patterned into a region where the fine uneven shape appears on the surface and a region where the fine uneven shape does not appear on the surface. Patterning process;
The fine structure is selectively formed on the surface of the substrate of the fine structure by a forming process using the manufacturing die in which the base material surface is patterned by the patterning step, and the fine structure is formed. The manufacturing method of a microstructure provided with the shaping process process of patterning the said base-material surface in the produced area | region and the area | region which has not produced the said microstructure. The surface of the region where the microstructure is not fabricated is hydrophilic,
The manufacturing method of the fine structure according to claim 1 , further comprising an application step of applying a liquid to the surface of the base material and selectively attaching the liquid to a region where the fine structure is produced. The surface of the region where the microstructure is not fabricated is water-repellent,
By applying a liquid to the substrate surface, in a region where the not produce a microstructure, method for manufacturing a microstructure according to claim 1, further comprising a coating step of selectively depositing the liquid. A mold for producing a fine structure used for producing a fine structure having a fine structure with a repetition period of 500 nm or less,
A fine uneven shape corresponding to the fine structure of the fine structure is formed on the surface of the base material,
The surface of the base material is patterned into a region where the fine uneven shape on the surface of the base material is selectively backfilled and the fine uneven shape appears on the surface, and a region where the fine uneven shape does not appear on the surface. Mold for manufacturing a fine structure. The fine uneven shape is
The mold for manufacturing a fine structure according to claim 4 , wherein the mold is formed by arranging columnar bodies in a matrix. The fine uneven shape is
The mold for manufacturing a fine structure according to claim 4 , wherein the mold is formed by repeating the concave groove. The fine uneven shape is
The mold for manufacturing a fine structure according to claim 4 , which is formed by close arrangement of tapered fine holes. A method for manufacturing a microstructure manufacturing mold for manufacturing a microstructure having a microstructure with a repetition period of 500 nm or less by a molding process,
On the surface of the base material, a fine concavo-convex shape production process for producing a fine concavo-convex shape corresponding to the fine structure,
Patterning for selectively backfilling the fine uneven shape on the surface of the base material and patterning the surface of the base material into a region where the fine uneven shape appears on the surface and a region where the fine uneven shape does not appear on the surface The manufacturing method of the metal mold | die for microstructure manufacturing provided with these processes.

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