JP6444717B2 - Cutting apparatus and cutting method - Google Patents

Description

  The present invention relates to a cutting apparatus and a cutting method for manufacturing a plurality of products obtained by cutting an object to be cut.

  A substrate composed of a printed circuit board, a lead frame, etc. is virtually divided into a plurality of grid-like areas, and chip-like elements (for example, semiconductor chips) are attached to the respective areas, and then the entire board is sealed with resin. This is called a sealed substrate. A product obtained by cutting a sealed substrate by a cutting mechanism using a rotary blade or the like and dividing it into individual region units becomes a product.

  Conventionally, a predetermined region of a sealed substrate is cut by a cutting means such as a rotary blade using a cutting mechanism in a cutting apparatus. First, the sealed substrate is placed on the cutting table and sucked. Next, the sealed substrate is aligned (positioned). By aligning, the position of a virtual cutting line that divides a plurality of regions is set. Next, the cutting table that adsorbs the sealed substrate and the cutting mechanism are relatively moved. The cutting water is sprayed onto the cut portion of the sealed substrate, and the sealed substrate is cut along the cutting line set on the sealed substrate by the cutting mechanism. An individualized product is manufactured by cutting the sealed substrate.

  In the cutting mechanism, the rotary blade and the drive mechanism are connected via a rotating shaft. The cutting mechanism cuts the sealed substrate by rotating the rotating shaft at a high speed by a driving mechanism. When the rotating shaft rotates at a high speed, the rotating shaft generates heat, expands thermally, and extends in a direction along the center line of the rotating shaft (rotating shaft direction). When the rotating shaft extends, the rotating blade attached to the tip of the rotating shaft also extends in the direction of the rotating shaft. Therefore, in order to suppress thermal expansion of the rotating shaft, cooling water is supplied around the rotating shaft. In order to suppress the elongation amount of the rotating shaft as much as possible, a large amount of cooling water is supplied to the cutting mechanism assuming that the rated current always flows in the drive mechanism. However, there are many cases where the current does not actually flow up to the rated current in an idling state or the like, and supplying a large amount of cooling water to the cutting mechanism has a great economic burden and generates waste.

  If the flow rate of the cooling water supplied to the cutting mechanism is reduced, the amount of elongation of the rotating shaft increases. Further, when the flow rate of the cooling water supplied to the cutting mechanism is changed, the amount of elongation of the rotating shaft changes. Therefore, when the flow rate of the cooling water is changed during operation of the cutting device, the amount of displacement of the rotary blade attached to the tip of the rotary shaft changes. Therefore, if the flow rate of the cooling water is changed, it becomes difficult to correct the amount of deviation of the rotary blade corresponding to the amount of extension of the rotary shaft. Therefore, although it is useless, at present, a large amount of cooling water is constantly supplied to the cutting mechanism.

  As a processing device that economically uses fluids such as water and air, “(substantially) a spindle unit composed of a rotating spindle and a spindle housing that rotatably supports the rotating spindle, and when cutting a workpiece. A processing device comprising at least a fluid to be used or generated, wherein a flow rate adjusting means for adjusting a flow rate of the fluid is disposed in a fluid flow path, and the fluid is synchronized with the operation and stop of the rotary spindle. Has been proposed (see, for example, paragraph [0010] of Patent Document 1 and FIGS. 3 to 5).

JP 2001-259961 A

  However, the processing apparatus disclosed in Patent Document 1 has the following problems. As shown in FIG. 4 of Patent Document 1, the rotating spindle 22 rotates so that the dicing blade 18 is not displaced by heat generation and expansion in the Y-axis direction (rotating axis direction). During this time, the cooling water is circulated through the cooling water supply path 30. During this time, the cooling water is supplied from the cooling water generating means 32 and flows into the cooling water supply path 30 via the first control valve 31 which is instructed by the first control means 33 to be in the open state. After being circulated through 23, it is discharged to the drain.

  In such an apparatus, a constant amount of cooling water is circulated while the rotary spindle 22 is rotating. However, the size, thickness, material to be cut, and the like vary depending on the workpiece to be cut. Therefore, the cutting load at the time of cutting differs depending on the workpiece to be cut. As the cutting load increases, the load current for rotating the rotary spindle 22 increases and the amount of heat generation increases. Further, when the dicing blade 18 is worn out or the abrasive grains of the dicing blade 18 are lost, the cutting of the dicing blade 18 is worsened and the cutting load is increased. In such a case, the amount of expansion of the rotary spindle 22 due to thermal expansion becomes large, so a large amount of cooling water must be supplied. While the rotary spindle 22 is rotating, for example, a large amount of cooling water is supplied in the same manner even when the load current is small without cutting. Therefore, the cooling water is excessively supplied and waste is generated, so that the operating cost of the cutting device cannot be reduced.

  The present invention solves the above problems, and provides a cutting device and a cutting method capable of adjusting the flow rate of cooling water supplied to the cutting mechanism at all times while the rotating shaft rotates in the cutting device. With the goal.

In order to solve the above problems, a cutting apparatus according to the present invention includes a table on which a workpiece is placed, a cutting mechanism that cuts the workpiece, and a movement that relatively moves the table and the cutting mechanism. A cutting device for use in manufacturing a plurality of products by cutting a workpiece along a cutting line, and a rotary shaft provided in the cutting mechanism and a cutting mechanism. A spindle body that rotatably supports the rotation shaft, a drive mechanism that is provided in the cutting mechanism and rotates the rotation shaft, a cooling water passage that is provided in the cutting mechanism and is formed around the rotation shaft, and a tip portion of the rotation shaft A pair of fixtures that fix the rotary blade between the rotary blades at the tip, a current supply mechanism that supplies current to the drive mechanism, and a measurement means that measures a physical quantity related to the cutting mechanism, Connected to the cooling water passage A flow rate adjusting means for adjusting the flow rate of the cooling water supplied to the reject water passage; a cooling water delivery mechanism for sending the cooling water to the flow rate adjusting means; and a control means connected to at least the flow rate adjusting means, The physical quantity measured by the measuring means is compared with the physical quantity stored in advance, the flow rate of the cooling water supplied to the cooling water passage is changed based on the comparison result, and the measuring means is supplied to the drive mechanism. and current measuring means for current measuring a that is located at the tip of the rotary blade side of the spindle body portion, and a distance measuring means for measuring the distance between the fixture, the physical quantity is measured by the current measuring means a current and wherein the distance, the control means is connected to the current measuring means and the distance measuring means, the control means, based on the current measured by the current measuring means so as to correspond to a plurality of rotary operating state after idling There set the flow rate of the cooling water, characterized by increasing or decreasing the flow rate of the cooling water in response to an increase or a decrease of more distance.
In order to solve the above-described problems, a cutting device according to the present invention is a cutting device that cuts an object to be cut placed on a table into a plurality of products, and rotatably supports the rotating shaft and the rotating shaft. A cutting mechanism including a spindle main body, a driving mechanism for rotating the rotating shaft, a cooling water passage provided in the cutting mechanism and formed around the rotating shaft, and a rotating blade attached to the tip of the rotating shaft; A fixing device that fixes the rotating blade in between, a measuring unit that measures a physical quantity related to the cutting mechanism, a flow rate adjusting unit that is connected to the cooling water passage and adjusts a flow rate of the cooling water supplied to the cooling water passage, and at least a flow rate Control means connected to the adjusting means, the control means compares the physical quantity measured by the measuring means with the physical quantity stored in advance, and the cooling water supplied to the cooling water passage based on the comparison result Flow rate Changed, the measuring means includes a current measuring means for measuring the current supplied to the drive mechanism, is located at the tip of the rotary blade side of the spindle body portion, and a distance measuring means for measuring the distance between the fixtures wherein the physical quantity comprises a current and the distance measured by the current measuring means, the control means is connected to the current measuring means and the distance measuring means, the current as control means, corresponding to a plurality of rotary operating state after idling A cutting device characterized in that the flow rate of cooling water is set based on the current measured by the measuring means, and further the flow rate of cooling water is increased or decreased in accordance with the increase or decrease in distance.
Further, in the cutting device according to the present invention, in the above-described cutting device, the control unit obtains a difference between the pre-stored distance between the cutting mechanism and the fixture and the measured distance, and rotates based on the difference. The position of the blade is matched with the position of the cutting line of the workpiece to be used for cutting.
The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the distance measuring means includes at least an eddy current displacement sensor or an optical displacement sensor.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a sealed substrate.

  The cutting apparatus according to the present invention is characterized in that, in the above-described cutting apparatus, the object to be cut is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

In order to solve the above problems, a cutting method according to the present invention includes a step of placing an object to be cut on a table, a step of relatively moving the table and the cutting mechanism, and a relative relationship between the table and the cutting mechanism. Cutting the workpiece along the cutting line using the cutting mechanism by moving the cutting mechanism, and supplying a current to a drive mechanism provided in the cutting mechanism; A step of rotating a rotating shaft rotatably supported by the spindle body by a drive mechanism, and a rotating blade sandwiched and fixed between a pair of fixtures at the tip of the rotating shaft; A step of sending the cooling water from the mechanism to the flow rate adjusting means, a step of supplying the cooling water from the flow rate adjusting means to the cooling water passage formed around the rotating shaft, and a step of measuring a physical quantity related to the cutting mechanism. Physical When comprising the step of comparing the pre-stored physical quantity, and a step of changing the flow rate of the cooling water supplied to the cooling water passage on the basis of a result of comparison in the step of comparing the physical quantity is a current, the spindle body In the step of changing the flow rate , based on the current so as to correspond to a plurality of rotational operation states after idling , the distance to the fixture measured by the distance measuring means arranged at the tip of the rotary blade of the part The flow rate of the cooling water is set, and the flow rate of the cooling water is further increased or decreased according to the increase or decrease of the distance.
In order to solve the above problems, a cutting method according to the present invention is a cutting method for cutting an object to be cut placed on a table into a plurality of products using a cutting mechanism, and is provided in the cutting mechanism. Rotating a rotating shaft rotatably supported by the spindle body by the drive mechanism and a rotating blade sandwiched and fixed between a pair of fixtures at the tip of the rotating shaft, and a cutting mechanism A step of supplying cooling water to a cooling water passage formed around the rotating shaft, a step of measuring a physical quantity related to the cutting mechanism, a step of comparing the measured physical quantity with a pre-stored physical quantity, And a step of changing the flow rate of the cooling water supplied to the cooling water passage based on the comparison result in the comparing step, wherein the physical quantity is a current and a distance measuring means arranged at the tip of the rotary blade of the spindle body. In Ri and a distance between the measured fixture, in the step of changing the flow rate, set the flow rate of the cooling water on the basis of the current so as to correspond to a plurality of rotary operating state after idling, the increase or decrease of the further distance A cutting method characterized by increasing or decreasing the flow rate of the cooling water accordingly.
Further, the cutting method according to the present invention includes the step of measuring the distance between the cutting mechanism and the fixture using the distance measuring means arranged in the cutting mechanism in the above cutting method, and the cutting mechanism and the fixing. A step of obtaining a difference between a distance memorized in advance and a measured distance from the tool, and a step of aligning the position of the rotary blade with the position of the cutting line of the workpiece to be used for cutting based on the difference It is characterized by providing.
The cutting method according to the present invention is characterized in that, in the above-described cutting method, the distance measuring means includes at least an eddy current displacement sensor or an optical displacement sensor.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a sealed substrate.

  The cutting method according to the present invention is characterized in that, in the above-described cutting method, the object to be cut is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to a plurality of products.

  According to the present invention, the cutting apparatus includes a table on which a workpiece is placed, a cutting mechanism that cuts the workpiece, and a moving mechanism that relatively moves the table and the cutting mechanism. The cutting mechanism is provided with a rotating shaft, a driving mechanism for rotating the rotating shaft, a cooling water passage formed around the rotating shaft, and a rotary blade attached to the tip of the rotating shaft. A current supply mechanism for supplying current to the drive mechanism; a measuring means for measuring a physical quantity related to the cutting mechanism; a cooling water delivery mechanism for delivering cooling water; a flow rate adjusting means for adjusting the flow rate of cooling water; and a flow rate adjusting means. And a control means connected to. The control means compares the physical quantity measured by the measuring means with the physical quantity stored in advance, and changes the flow rate of the cooling water supplied to the cooling water passage based on the comparison result. Therefore, since the flow rate of the cooling water can be changed in accordance with the measured physical quantity, the usage amount of the cooling water can be reduced and the operation cost can be reduced.

In Example 1 of the cutting device which concerns on this invention, it is the schematic which shows the structure of a spindle. 2 is a flowchart showing a process of adjusting the flow rate of cooling water supplied to the spindle in accordance with the current value of the spindle motor in the spindle shown in FIG. 3A and 3B are schematic views showing the displacement of the spindle shown in FIG. 1, FIG. 3A is a schematic view showing a state in which the rotary blade is in an initial state, and FIG. 3B is a schematic view showing a state in which the rotary blade is displaced in the rotation axis direction. . In Example 2 of the cutting device which concerns on this invention, it is a top view which shows the outline | summary of a cutting device.

  As shown in FIG. 1, in the cutting apparatus, a spindle 1 is provided with a spindle motor 3, a rotary shaft 4 connected to the spindle motor 3, and a rotary blade 8 attached to the tip of the rotary shaft 4. In the spindle main body 2, a displacement sensor 10 is provided at a position facing the cooling water passage 7 for circulating the cooling water around the rotating shaft 4 and the flange 9. The spindle motor 3 is connected with current measuring means 12 for measuring a current for driving the rotary shaft 4. A flow rate adjusting means 15 for adjusting the flow rate of the cooling water is connected to the cooling water passage 7. The current value I (t) measured by the current measuring means 12 is compared with the current value I0 stored in advance. When the current value I (t) is larger than the current value I 0, the cooling water having the initially set flow rate is supplied from the flow rate adjusting means 15 to the spindle 1. When the current value I (t) is less than or equal to the current value I0, the flow rate is reduced and cooling water is supplied from the flow rate adjusting means 15 to the spindle 1. Accordingly, the flow rate of the cooling water supplied to the spindle 1 can be adjusted in accordance with the magnitude of the load current of the spindle motor 3. As a result, a cutting load when cutting the sealed substrate, in other words, cooling water having an appropriate flow rate corresponding to the load current of the spindle motor 3 can be supplied to the spindle 1.

  Embodiment 1 of a cutting device according to the present invention will be described with reference to FIGS. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1, a spindle 1 that is a cutting mechanism includes a spindle body 2, a spindle motor 3 that is a drive mechanism, and a rotating shaft 4 that is connected to the spindle motor 3. The rotary shaft 4 is rotatably supported on the spindle body 2 in a non-contact state by air (air) blown out from the radial air bearing 5 and the axial air bearing 6. In order to suppress thermal expansion due to heat generation of the rotating shaft 4 that rotates at high speed, a cooling water passage 7 is provided around the rotating shaft 4 to flow cooling water. The cooling water passage 7 is preferably formed in a spiral shape so as to surround the periphery of the rotating shaft 4. A rotary blade 8 for cutting the sealed substrate is attached to the tip of the rotary shaft 4. The rotary blade 8 is sandwiched on both sides by a pair of flanges 9 and fixed to the rotary shaft 4. The rotary blade 8 is detachable and can be replaced. The flange 9 is made of, for example, a metal having conductivity such as stainless steel or chrome steel.

  A displacement sensor 10 is provided at the tip of the spindle body 2 as means for measuring the distance from the tip of the spindle body 2 to the center line of the rotary blade 8. The displacement sensor 10 is provided on the spindle main body 2 so as to face a flange 9 (one surface thereof) provided on the side close to the spindle main body 2. The displacement sensor 10 measures the distance from the distal end portion of the displacement sensor 10 to the flange 9. As the displacement sensor 10, it is preferable to use, for example, an eddy current type displacement sensor using a change in eddy current, an optical displacement sensor using laser reflection, or the like.

  In order to drive the spindle motor 3, a power supply mechanism 11 that supplies high-frequency power is connected to the spindle motor 3. A servo motor is preferably used as the spindle motor 3. By using the servo motor, the drive current can be controlled by the servo driver so as to maintain a constant rotational speed even when the rotational speed of the rotary blade 8 changes in the cutting state. A current measuring means 12 for measuring a current when the spindle motor 3 is driven is connected to the spindle motor 3.

  A flow rate adjusting means 13 for adjusting the flow rate of the cooling water supplied to the cooling water passage 7 provided in the spindle 1 is connected to the cooling water supply port 14 provided in the spindle body 2. A cooling water delivery mechanism 15 that delivers cooling water with a predetermined flow rate is connected to the flow rate adjusting means 13. In the spindle body 2, the cooling water supply port 14, the cooling water passage 7, and the cooling water discharge port 16 are connected. The cooling water is discharged from the cooling water discharge port 16 via the cooling water passage 7 from the cooling water supply port 14. As the cooling water flows around the rotating shaft 4, the thermal expansion of the rotating shaft 4 is suppressed. The cooling water discharge port 16 is connected to the cooling water circulation mechanism 17. The cooling water discharged from the cooling water discharge port 16 is sent again to the cooling water delivery mechanism 15 by the cooling water circulation mechanism 17 and reused.

  The displacement measured by the displacement sensor 10 is linearized (linearized) to the relationship between the output voltage and the distance by the converter 18. The horizontal axis indicates the distance and the vertical axis indicates the output voltage, and an output voltage proportional to the distance is obtained. Thus, the distance from the distal end portion of the displacement sensor 10 to the flange 9 is obtained. By obtaining the distance from the tip of the displacement sensor 10 to the flange 9, the amount of elongation of the rotating shaft 4 can always be accurately measured.

  The control mechanism 19 is a control mechanism that sets and controls all the operations and conditions of the cutting device and the spindle 1. The control mechanism 19 includes a memory unit that collects and stores various types of data, a data processing unit that processes and analyzes various types of data, and an input / output unit that exchanges signals with each component of the cutting device. (Both not shown). Therefore, all the components constituting the spindle 1 such as the power supply mechanism 11, the current measuring means 12, the flow rate adjusting means 13, the cooling water delivery mechanism 15, and the converter 18 are independently connected to the control mechanism 19. Note that FIG. 1 shows a case where the memory unit, data processing unit, input / output unit, etc. are all included in the control mechanism 19. However, the present invention is not limited thereto, and the memory unit and the data processing unit may be provided outside the control mechanism 19.

The operation of adjusting the flow rate of the cooling water supplied to the spindle 1 will be described with reference to FIGS. First, the cutting device is made operable. Next, the cooling water is sent from the cooling water delivery mechanism 15 to the flow rate adjusting means 13. The cooling water delivery mechanism 15 is supplied with cooling water at a maximum of 15 L / min from a factory water supply mechanism (not shown). For example, in the normal operation state of the cutting device, first, the flow rate of the cooling water supplied from the factory by the cooling water delivery mechanism 15 is changed from 15 L / min to 5 L / min. Next, 5 L / min of cooling water is sent from the cooling water delivery mechanism 15 to the flow rate adjusting means 13. The flow rate adjusting means 13 further adjusts the cooling water supplied from the cooling water delivery mechanism 15 to a necessary flow rate. For example, the flow rate of the cooling water supplied from the cooling water delivery mechanism 15 is adjusted from 5 L / min to 3 L / min, and the cooling water is supplied from the flow rate adjusting means 13 to the spindle 1. In the spindle 1, the rotating shaft 4 is cooled by flowing cooling water from the cooling water supply port 14 to the cooling water passage 7. Thereby, the thermal expansion of the rotating shaft 4 can be suppressed.

  Next, idling for accustoming the spindle 1 is performed. A predetermined power is supplied from the power supply mechanism 11 to drive the spindle motor 3. When the spindle motor 3 is driven, the rotary shaft 4 and the rotary blade 8 rotate at high speed. In the idling state, the rotational shaft 4 is rotated under the actual rotational speed or a condition that is less than the actual rotational speed, so that the rotational shaft 4 and the cooling water are adjusted.

  Next, the current value I (t) when the spindle motor 3 is driven is measured using the current measuring means 12. Here, t is a variable representing time. The current value I (t) measured by the current measuring means 12 is stored as data in a memory unit provided in the control mechanism 19. The data processing unit provided in the control mechanism 19 compares the measured current value I (t) with a preset current value I0. A current value I0 which is a preset threshold value is stored in the data processing unit. In this case, for example, I0 = 5A is stored in advance as a threshold value.

  In the data processing unit, the measured current value I (t) is compared with the current value I0 stored in advance. When I (t) is larger than 5A, the cooling water is continuously supplied from the flow rate adjusting means 13 to the spindle 1 at a flow rate of 3 L / min. When I (t) is 5 A or less, for example, the flow rate of the cooling water is reduced from 3 L / min to 1 L / min, and the cooling water is supplied from the flow rate adjusting means 13 to the spindle 1. Thus, the flow rate of the cooling water supplied from the flow rate adjusting means 13 to the spindle 1 can be adjusted in accordance with the magnitude of the load current applied to the spindle motor 3. Therefore, when the cutting load is large, that is, when the load current is large, a large amount of cooling water is supplied to the spindle 1 to suppress the thermal expansion of the rotating shaft 4. On the contrary, when the cutting load is small (load current is small), the cooling water is supplied from the flow rate adjusting means 13 to the spindle 1 by reducing the flow rate of the cooling water. Since the flow rate of the cooling water is adjusted in accordance with the cutting load applied to the rotary blade 8 of the spindle 1, in other words, the load current of the spindle motor 3, the usage amount of the cooling water can be adjusted and reduced.

  In the operating state of the cutting device, various states are assumed as the state where the rotating shaft 4 is rotating. For example, there are a state where the sealed substrate is cut, an idling state, a cutting condition and a correction value of the rotary blade 8 are set, and a state where the rotary blade 8 is dressed. While the rotary shaft 4 is rotated, the current value I (t) for driving the spindle motor 3 is constantly measured by the current measuring means 12. The flow rate of the cooling water supplied from the flow rate adjusting means 13 to the spindle 1 is adjusted by comparing the measured current value I (t) with the current value I0 which is a threshold value. Corresponding to the rotational state of the rotating shaft 4, an appropriate flow rate of cooling water can be supplied to the spindle 1. Therefore, in any state while the cutting device is operating, it is possible to supply cooling water with an appropriate flow rate to the spindle 1 in accordance with the state. Since the amount of cooling water used can be reduced, the operating cost of the cutting device can be reduced.

  Examples of objects to be cut using a cutting device include various objects such as a sealed substrate and a semiconductor wafer. All these objects have different structures, constituent materials, thicknesses, and the like. Therefore, all the cutting loads for cutting are also different. In the present embodiment, since the cooling water with an appropriate flow rate is supplied to the spindle 1 in accordance with the size of the cutting load, the cooling water with an appropriate flow rate can be supplied for any object to be cut. .

  Further, as the cutting is continued, the rotary blade 8 is gradually worn, and in some cases, the abrasive grains of the rotary blade 8 may be lost. In such a state, the cutting load increases as compared to the initial (new) state. Even in such a state, an appropriate flow rate of cooling water is always supplied to the spindle 1 in accordance with the cutting load, so an appropriate flow rate of cooling water is supplied regardless of the state of the rotary blade 8. can do.

  The flow rate of the cooling water supplied to the spindle 1 is adjusted according to the magnitude of the current value I (t) measured by the current measuring means 12. As a result, the amount of elongation of the rotating shaft 4 in the direction of the rotating shaft changes depending on the flow rate of the cooling water. Even if the amount by which the rotation shaft 4 extends in the direction of the rotation axis varies depending on the flow rate of the cooling water, the extension amount of the rotation shaft 4 can be constantly measured using the displacement sensor 10. Therefore, the amount of elongation of the rotary shaft 4 can be accurately corrected, and the cutting position of the rotary blade 8 can be correctly aligned with the position of the cutting line of the sealed substrate.

  With reference to FIG. 3, the operation | movement which correct | amends the elongation amount of the rotating shaft 4, and cut | disconnects is demonstrated. In the spindle 1, an eddy current displacement sensor or an optical displacement sensor is used as the displacement sensor 10 to measure the distance from the tip of the displacement sensor 10 to the flange 9. For example, as shown in FIG. 3A, in the state immediately before starting the cutting of the sealed substrate, the measurement distance from the tip of the displacement sensor 10 to the flange 9 is d0, and from the tip of the spindle body 2 The distance to the center line of the rotary blade 8 is L0. In an initial state, the relationship is L0 = d0 + α, and the value of α can be obtained in advance from the dimensions of the displacement sensor 10, the thickness of the flange 9, the thickness of the rotary blade 8, and the like. The value of α is expressed as a fixed value that is hardly affected by heat. Therefore, when the rotating shaft 4 extends in the direction of the rotating shaft due to thermal expansion after starting the cutting of the sealed substrate, the spindle main body 2 is measured by measuring the distance from the tip of the displacement sensor 10 to the flange 9. The distance from the tip of the blade to the center line of the rotary blade 8 can be measured.

  The sealed substrate is cut by driving the spindle motor 3 (see FIG. 1) to rotate the rotary blade 8 at a high speed. As shown in FIG. 3B, when cutting of the sealed substrate is continued, the rotating shaft 4 rotating at high speed generates heat and gradually expands in the rotating shaft direction (+ X direction in the drawing) due to thermal expansion. To grow. Since the rotary shaft 4 extends in the + X direction, the rotary blade 8 also moves in the + X direction by the amount that the rotary shaft 4 extends. Assuming that the measurement distance from the tip of the displacement sensor 10 to the flange 9 is dX at a certain time after starting the cutting of the sealed substrate, the distance from the tip of the spindle body 2 to the center line of the rotary blade 8 is as follows. The distance LX is LX = dX + α. As the rotating shaft 4 thermally expands, the rotating shaft 4 extends in the X direction by (dX−d0). Therefore, when the sealed substrate is cut, the position of the rotary blade 8 is corrected by the difference in distance corresponding to the extension of the rotary shaft 4, that is, the displacement amount (dX-d0). Specifically, the position of the center line of the rotary blade 8 is moved in the −X direction by (dX−d0). Thereby, the position of the center line of the rotary blade 8 is correctly aligned with the position of the cutting line of the sealed substrate, and the sealed substrate can be cut.

  According to this embodiment, in the cutting device, the spindle 1 is provided with the spindle motor 3, the rotary shaft 4 connected to the spindle motor 3, and the rotary blade 8 attached to the tip of the rotary shaft 4. In the spindle body 2, a cooling water passage 7 that circulates cooling water around the rotating shaft 4 and a displacement sensor 10 are provided at a position facing the flange 9. The spindle motor 3 is connected with current measuring means 12 for measuring a current for driving the rotary shaft 4. A flow rate adjusting means 13 for adjusting the flow rate of the cooling water is connected to the cooling water passage 7 provided in the spindle 1. The current value I (t) measured by the current measuring means 12 is compared with a current value I0 which is a threshold value stored in advance. When the current value I (t) is larger than the current value I 0, 3 L / min of the initially set flow rate is supplied from the flow rate adjusting means 13 to the spindle 1. When the current value I (t) is equal to or less than the current value I0, the flow rate is reduced from 3 L / min to 1 L / min, and the cooling water is supplied from the flow rate adjusting means 13 to the spindle 1. Accordingly, the flow rate of the cooling water supplied to the spindle 1 can be adjusted in accordance with the magnitude of the load current of the spindle motor 3. Accordingly, it is possible to supply the spindle 1 with a cooling flow having an appropriate flow rate corresponding to the load load of the spindle motor 3 when the sealed substrate is cut.

  Further, according to the present embodiment, the flow rate adjusting means 13 supplies cooling water with an appropriate flow rate corresponding to the magnitude of the cutting load applied to the rotary blade 8 of the spindle 1, in other words, the magnitude of the load current of the spindle motor 3. To the spindle 1. Therefore, as long as the rotating shaft 4 is rotating, such as a state in which the sealed substrate is cut, a state in which the rotating shaft 4 is rotated to stand by, and a state in which dressing is performed, any The cooling water with an appropriate flow rate can be supplied to the spindle 1 in accordance with the state. Accordingly, it is possible to supply the spindle 1 with an appropriate flow rate of cooling water corresponding to the load that the rotating shaft 4 receives, so that the operating cost of the cutting device can be reduced.

  Further, according to the present embodiment, cooling water having an appropriate flow rate is supplied to the spindle 1 in accordance with the magnitude of the cutting load applied to the rotary blade 8 of the spindle 1, in other words, the magnitude of the load current of the spindle motor 3. can do. Accordingly, the cooling water having an appropriate flow rate is supplied to the spindle 1 in response to a cutting load when cutting an object made of various objects such as a sealed substrate or a semiconductor wafer as an object to be cut. Can do.

  Further, according to the present embodiment, cooling water having an appropriate flow rate is supplied to the spindle 1 in accordance with the magnitude of the cutting load applied to the rotary blade 8 of the spindle 1, in other words, the magnitude of the load current of the spindle motor 3. can do. Therefore, even if the rotary blade 8 is worn or missing abrasive grains, it is possible to supply cooling water with an appropriate flow rate to the spindle 1 in accordance with the state.

  Further, according to the present embodiment, the flow rate of the cooling water is adjusted in accordance with the magnitude of the current value I (t) measured by the current measuring unit 12. As a result, the amount of extension of the rotating shaft 4 in the direction of the rotating shaft changes depending on the flow rate of the cooling water. Even if the amount by which the rotating shaft 4 extends in the direction of the rotating shaft changes, the amount of extension of the rotating shaft 4 can be accurately measured using the displacement sensor 10. Therefore, even if the flow rate of the cooling water supplied to the spindle 1 is reduced, the extension amount of the rotating shaft 4 can be accurately measured. The displacement amount of the rotating shaft 4 expanded and contracted by thermal expansion is corrected, and the position of the center line of the rotary blade 4 can be properly aligned with the position of the cutting line of the sealed substrate for cutting. Therefore, it is possible to prevent cutting in a state where the position of the center line of the rotary blade 4 is deviated from the cutting line of the sealed substrate, thereby improving yield and quality.

  A second embodiment of the cutting device according to the present invention will be described with reference to FIG. As shown in FIG. 4, the cutting device 20 is a device that separates an object to be cut into a plurality of products. The cutting device 20 includes a substrate supply unit A, a substrate cutting unit B, and an inspection unit C as components. Each component (each unit A to C) is detachable and replaceable with respect to other components.

  A substrate supply mechanism 21 is provided in the substrate supply unit A. The sealed substrate 22 corresponding to the object to be cut is carried out from the substrate supply mechanism 21 and transferred to the substrate cutting unit B by a transfer mechanism (not shown). The substrate supply unit A is provided with a control mechanism 19 that controls the operation of the cutting device 20 and the spindle 1, the flow rate of cooling water, and the like.

  The cutting device 20 shown in FIG. 4 is a single-cut table type cutting device. Therefore, the substrate cutting unit B is provided with one cutting table 23. The cutting table 23 can be moved in the Y direction in the figure by the moving mechanism 24, and can be rotated in the θ direction by the rotating mechanism 25. On the cutting table 23, the sealed substrate 22 is placed and sucked.

  The substrate cutting unit B is provided with a spindle 1 as a cutting mechanism. The cutting device 20 is a cutting device having a single spindle configuration in which one spindle 1 is provided. The spindle 1 can move independently in the X direction and the Z direction. A rotary blade 8 is attached to the spindle 1. A displacement sensor 10 is disposed on the spindle 1 so as to face the flange 9 (see FIG. 1). The sealed substrate 22 is cut by relatively moving the cutting table 24 and the spindle 1. The rotary blade 8 cuts the sealed substrate 22 by rotating in a plane including the Y direction and the Z direction.

  The inspection unit C is provided with an inspection table 26. On the inspection table 26, an assembly made up of a plurality of products P cut into pieces by cutting the sealed substrate 22, that is, a cut substrate 27 is placed. The plurality of products P are inspected by a camera for inspection (not shown) and sorted into non-defective products and defective products. Non-defective products are stored in the tray 28.

  In the present embodiment, the single-cut table type cutting apparatus 20 having a single spindle configuration has been described. The present invention is not limited to this, and the spindle 1 of the present invention can also be applied to a single-cut table type cutting apparatus having a twin spindle configuration or a twin-cut table type cutting apparatus having a twin spindle configuration.

  In each embodiment, by comparing the current value I (t) measured by the current measuring unit 12 with the current value I0 stored in advance, the flow rate of the cooling water supplied from the flow rate adjusting unit 13 to the spindle 1 is 2. Adjusted to the stage. Not limited to this, the measured current value I (t) can be compared with a plurality of current values stored in advance. In this case, the flow rate of the cooling water can be adjusted in multiple stages corresponding to a plurality of current values, and the cooling water having an appropriate flow rate can be supplied from the flow rate adjusting means 13 to the spindle 1. Therefore, the flow rate of the cooling water supplied to the spindle 1 can be adjusted more precisely according to the magnitude of the cutting load, in other words, the magnitude of the drive current.

  In the above description, the flow rate of the cooling water supplied from the flow rate adjusting unit 13 to the spindle 1 is adjusted based on the magnitude of the current value I (t) measured by the current measuring unit 12. Instead, the cooling supplied from the flow rate adjusting means 13 to the spindle 1 based on the magnitude of the displacement measured by the displacement sensor 10 (the amount of change in the distance between the tip of the spindle body 2 and the flange 9). The flow rate of water can also be adjusted. In this case, when the amount of displacement increases and exceeds a predetermined threshold value, the flow rate of the cooling water supplied from the flow rate adjusting means 13 is increased.

  Based on both the magnitude of the current value I (t) measured by the current measuring means 12 and the magnitude of the displacement measured by the displacement sensor 10, the flow rate of the cooling water supplied from the flow rate adjusting means 13 to the spindle 1 is determined. It can also be adjusted. In this case, for example, the magnitude of the current value is compared with the threshold value of the current amount, and the magnitude of the displacement amount is compared with the threshold value of the displacement amount. The flow rate of the cooling water supplied from the flow rate adjusting means 13 to the spindle 1 is adjusted by the logical sum of the two results compared. Specifically, the flow rate of the cooling water is reduced when at least one of the magnitude of the current value and the magnitude of the displacement amount is below a threshold value.

  In the description so far, the case where the flow rate of the cooling water is reduced based on at least one of the magnitude of the current value and the magnitude of the displacement as the measured physical quantity has been described. Not limited to this, when the second threshold value corresponding to the case where the physical quantity is large is set, and the magnitude of the current value or the magnitude of the displacement amount exceeds the second threshold value, You may increase the flow volume of a cooling water in order to strengthen a cooling effect. For example, when the flow rate of the cooling water in the steady state is 5 L / min and at least one of the magnitude of the current value and the magnitude of the displacement exceeds the second threshold value, the cooling effect is enhanced. As a cooling water for strengthening, the flow rate of the cooling water is increased from 5 L / min to 7 L / min. As a result, the effect of cooling the spindle 1 is improved, so that the current value or displacement can be reduced.

  The current measuring means 12 for measuring the magnitude of the current value and the displacement sensor 10 for measuring the magnitude of the displacement amount of the distance between the tip of the spindle body 2 and the flange 9 serve as measuring means for measuring the physical quantity. Function. The control means 19 may display the current value and the displacement amount based on the physical quantities respectively measured by the current measuring means 12 and the displacement sensor 10. Therefore, the combination of the current measurement unit 12 and the control unit 19 and the combination of the displacement sensor 10 and the control unit 19 correspond to measurement units in a broad sense, respectively.

  When the third threshold value corresponding to the abnormality is set and the magnitude of the current value or the displacement amount exceeds the third threshold value, the flow rate is larger than the flow rate of the cooling water for strengthening. A flow rate of cooling water may be supplied as abnormal cooling water. For example, when the flow rate of the cooling water for strengthening is 7 L / min, the flow rate of the cooling water for abnormality is set to 10 L / min. As a result, damage such as burning of the spindle motor 3 can be prevented when the spindle motor 3 operates abnormally. In this case, it is preferable to perform operations such as retracting the spindle 1 to the standby position, stopping the spindle motor 3, turning on the warning lamp, and generating a warning sound in the cutting device. The control mechanism 16 compares the measured physical quantity with the threshold value, sets the flow rate of the cooling water sent from the cooling water feed mechanism 15, and sets the flow rate of the cooling water supplied to the spindle 1 from the flow rate adjusting means 13. Done.

  The magnitude of the current value or the amount of displacement, which is a physical quantity serving as a reference for determining the flow rate of the cooling water, may be either an absolute value or a change rate. For example, a value of D μm / min is set as the threshold value of the change rate of the distance LX from the tip of the spindle body 2 to the center line of the rotary blade 8. If the rate of change of the distance LX measured continuously exceeds D μm / min, the flow rate of the cooling water for strengthening (or the flow rate of the cooling water for abnormality) can be supplied from the flow rate of normal cooling water.

  In the spindle main body 2, a displacement sensor 10 is provided at a position facing the flange 9. Not only this but the displacement sensor 10 can be provided in various positions using the attachment board of a suitable shape (for example, shape of alphabet "L"). For example, the portion corresponding to the vertical bar of the mounting plate described above is attached to the end surface of the spindle body 2 (the right side surface in FIG. 1), and the displacement sensor 10 is attached to the portion corresponding to the horizontal bar of the mounting plate. The displacement sensor 10 composed of an eddy current displacement sensor measures a change in eddy current with respect to the ridgeline portion of the flange 9 (lower left corner in FIG. 1). Thereby, the distance between the right end of the spindle body 2 and the ridge line portion of the flange 9 can be measured using the displacement sensor 10. Similarly, the displacement sensor 10 can be used to change the eddy current in the ridge line portion (lower right corner in FIG. 1) of the right flange (which may be another fastening element such as a nut, not indicated in FIG. 1). You may provide in the position to measure. The displacement sensor 10 may be provided at a position facing the top surface of the right flange (the right side surface in FIG. 1) using a mounting plate having an appropriate shape.

  In each Example, the case where the washer type rotary blade which has a donut shape (toroidal shape) was used as the rotary blade 8 was shown. However, the present invention is not limited thereto, and a hub-type rotary blade having a blade edge portion mounted on a base may be used.

  Moreover, in each Example, the case where the sealed board | substrate 22 containing a chip-shaped element as a to-be-cut | disconnected object was shown was shown. However, the present invention is not limited to this, and the present invention can be applied to the case where the next object to be cut is cut into pieces as the object to be cut other than the sealed substrate 22. First, a semiconductor wafer made of silicon and a compound semiconductor and having functional elements such as circuit elements and MEMS (Micro Electro Mechanical Systems) is separated. Second, products such as chip resistors, chip capacitors, chip-type sensors, surface acoustic wave devices, etc. by dividing individual ceramic substrates on which functional elements such as resistors, capacitors, sensors, and surface acoustic wave devices are built. Is the case of manufacturing. In these two cases, a semiconductor wafer, a ceramic substrate, or the like corresponds to a substrate on which functional elements corresponding to a plurality of regions are formed. Third, the resin molded product is singulated to produce optical components such as lenses, optical modules, and light guide plates. Fourth, it is a case where a general molded product is manufactured by dividing a resin molded product into individual pieces. The contents described so far can be applied to various cases including the above four cases.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

1 Spindle (cutting mechanism)
2 Spindle body 3 Spindle motor (drive mechanism)
4 Rotating shaft 4 Rotating blade 5 Radial air bearing 6 Axial air bearing 7 Cooling water passage 8 Rotating blade 9 Flange (first fixing tool, second fixing tool)
10 Displacement sensor (measuring means, distance measuring means)
11 Power supply mechanism (current supply mechanism)
12 Current measuring means (measuring means)
DESCRIPTION OF SYMBOLS 13 Flow volume adjustment means 14 Cooling water supply port 15 Cooling water delivery mechanism 16 Cooling water discharge port 17 Cooling water circulation mechanism 18 Converter 19 Control means 20 Cutting device 21 Substrate supply mechanism 22 Sealed substrate (to-be-cut object)
23 Cutting table (table)
24 moving mechanism 25 rotating mechanism 26 inspection table 27 cut substrate 28 tray I (t) measured current value I0 pre-stored current value d0, dX distance from the tip of the displacement sensor to the flange L0, LX spindle body Distance from tip of head to center line of rotary blade α Fixed value A Substrate supply unit B Substrate cutting unit C Inspection unit P Product

Claims (12)

A table on which the workpiece is placed; a cutting mechanism that cuts the workpiece; and a moving mechanism that moves the table and the cutting mechanism relative to each other, the workpiece along the cutting line. A cutting device used in manufacturing a plurality of products by cutting,
A rotating shaft provided in the cutting mechanism;
A spindle main body provided in the cutting mechanism and rotatably supporting the rotating shaft;
A drive mechanism that is provided in the cutting mechanism and rotates the rotating shaft;
A cooling water passage provided in the cutting mechanism and formed around the rotating shaft;
A rotary blade attached to the tip of the rotary shaft;
A pair of fixtures for fixing the rotary blade between the tip portions;
A current supply mechanism for supplying current to the drive mechanism;
Measuring means for measuring a physical quantity related to the cutting mechanism;
A flow rate adjusting means for adjusting a flow rate of cooling water connected to the cooling water passage and supplied to the cooling water passage;
A cooling water delivery mechanism for delivering the cooling water to the flow rate adjusting means;
Control means connected to at least the flow rate adjusting means,
The control means compares the physical quantity measured by the measuring means with a physical quantity stored in advance, and changes the flow rate of the cooling water supplied to the cooling water passage based on the comparison result,
The measuring means is a current measuring means for measuring a current supplied to the drive mechanism, and a distance measuring means for measuring a distance between the spindle main body portion and a tip of the spindle body portion on the rotary blade side. including the door,
The physical quantity comprises the measured current and the distance by the current measuring means,
Said control means being connected to said distance measuring means and said current measuring means,
The control means sets the flow rate of the cooling water based on the current measured by the current measurement means so as to correspond to a plurality of rotational operation states after idling, and further according to the increase or decrease of the distance A cutting device characterized by increasing or decreasing the flow rate. A cutting device for cutting an object to be cut placed on a table into a plurality of products,
A rotating shaft; a spindle body that rotatably supports the rotating shaft; a driving mechanism that rotates the rotating shaft; a cooling water passage that is provided in the cutting mechanism and formed around the rotating shaft; and a tip of the rotating shaft A cutting mechanism including a rotary blade mounted on the part;
A pair of fixtures for fixing the rotary blade between the tip portions;
Measuring means for measuring a physical quantity related to the cutting mechanism;
A flow rate adjusting means for adjusting a flow rate of cooling water connected to the cooling water passage and supplied to the cooling water passage;
Control means connected to at least the flow rate adjusting means,
The control means compares the physical quantity measured by the measuring means with a physical quantity stored in advance, and changes the flow rate of the cooling water supplied to the cooling water passage based on the comparison result,
The measuring means is a current measuring means for measuring a current supplied to the drive mechanism, and a distance measuring means for measuring a distance between the spindle main body portion and a tip of the spindle body portion on the rotary blade side. including the door,
The physical quantity comprises the measured current and the distance by the current measuring means,
Said control means being connected to said distance measuring means and said current measuring means,
The control means sets the flow rate of the cooling water based on the current measured by the current measurement means so as to correspond to a plurality of rotational operation states after idling, and further according to the increase or decrease of the distance A cutting device characterized by increasing or decreasing the flow rate. The cutting device according to claim 1 or 2,
The control means obtains a difference between the distance stored in advance between the distance measuring means and the fixture and the measured distance, and based on the difference, determines the position of the rotary blade when cutting. A cutting apparatus according to claim 1, wherein the cutting apparatus is adapted to a position of a cutting line of the workpiece to be used. In the cutting device according to any one of claims 1 to 3,
The distance measuring means includes at least an eddy current displacement sensor or an optical displacement sensor. In the cutting device according to any one of claims 1 to 4,
The cutting apparatus, wherein the object to be cut is a sealed substrate . In the cutting device according to any one of claims 1 to 5,
The cutting object is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to the plurality of products . Placing the workpiece on the table, moving the table and the cutting mechanism relative to each other, and moving the table and the cutting mechanism relative to each other to use the cutting mechanism A cutting method comprising a step of cutting a workpiece along a cutting line,
Supplying a current to a drive mechanism provided in the cutting mechanism;
Rotating the rotary shaft rotatably supported by the spindle body by the drive mechanism, and a rotary blade fixed between a pair of fixtures at the tip of the rotary shaft;
A step of sending cooling water from the cooling water delivery mechanism to the flow rate adjusting means;
Supplying the cooling water from the flow rate adjusting means to a cooling water passage formed around the rotating shaft;
Measuring a physical quantity related to the cutting mechanism;
Comparing the measured physical quantity with a pre-stored physical quantity;
Changing the flow rate of the cooling water supplied to the cooling water passage based on the result of comparison in the comparing step,
The physical quantity includes the current and a distance from the fixture measured by a distance measuring unit disposed at a tip of the rotary blade of the spindle body.
In the step of changing the flow rate, the flow rate of the cooling water is set based on the current so as to correspond to a plurality of rotational operation states after idling, and the flow rate of the cooling water is increased or decreased according to the increase or decrease of the distance. A cutting method characterized by: A cutting method for cutting a workpiece placed on a table using a cutting mechanism into a plurality of products,
The drive mechanism provided in the cutting mechanism rotates the rotary shaft that is rotatably supported by the spindle body and the rotary blade that is sandwiched and fixed between a pair of fixtures at the tip of the rotary shaft. A process of
Supplying cooling water to a cooling water passage provided in the cutting mechanism and formed around the rotating shaft;
Measuring a physical quantity related to the cutting mechanism;
Comparing the measured physical quantity with a pre-stored physical quantity;
Changing the flow rate of the cooling water supplied to the cooling water passage based on the result of comparison in the comparing step,
The physical quantity includes the current and a distance from the fixture measured by a distance measuring unit disposed at a tip of the rotary blade of the spindle body.
In the step of changing the flow rate, the flow rate of the cooling water is set based on the current so as to correspond to a plurality of rotational operation states after idling, and the flow rate of the cooling water is increased or decreased according to the increase or decrease of the distance. A cutting method characterized by: The cutting method according to claim 7 or 8,
Obtaining a difference between a pre-stored distance between the distance measuring means and the fixture and the measured distance;
And a step of aligning the position of the rotary blade with the position of the cutting line of the workpiece to be used for cutting based on the difference . In the cutting method according to any one of claims 7 to 9,
The distance measuring means includes at least an eddy current displacement sensor or an optical displacement sensor . In the cutting method described in any one of Claims 7-10 ,
The cutting method, wherein the object to be cut is a sealed substrate . In cutting method according to any one of claims 7-10,
The cutting method is characterized in that the object to be cut is a substrate in which functional elements are formed in a plurality of regions respectively corresponding to the plurality of products .

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