JP6436800B2 - Method for manufacturing elastic body used in vibration type driving device, vibration type driving device, robot and imaging device - Google Patents

Description

  The present invention relates to a vibration-type driving device in which a vibrating body and a driven body are brought into pressure contact, and the vibrating body and the driven body are relatively moved by vibration excited by the vibrating body, and in particular, the vibration-type driving device. The present invention relates to a method for producing an elastic body.

  By bringing a driven body into pressure contact with a vibrating body formed by joining an electro-mechanical energy conversion element to an elastic body, and applying an AC signal to the electro-mechanical energy conversion element to excite a predetermined vibration in the vibrating body. A vibration type driving device that relatively moves a vibrating body and a driven body is known. The vibration-type driving device has been put into practical use as a lens driving motor for performing autofocusing with a single-lens reflex camera, for example, by utilizing such a feature that a large torque can be generated at a low speed.

  In recent years, there has been a strong demand for improved productivity and low cost for vibration-type drive devices, and in response to such demands, a technology that uses plate pressing to manufacture elastic bodies of vibration bodies has been proposed. (See Patent Documents 1 and 2).

JP 2011-234608 A Japanese Patent No. 4350208

  However, even with the techniques described in Patent Documents 1 and 2, improvement in productivity and cost reduction cannot be said to be sufficient, and further improvement is demanded.

  It is an object of the present invention to provide a technique that enables significant improvement in productivity and low cost regarding a method for manufacturing an elastic body used in a vibration type driving apparatus.

  One aspect of the present invention is a method of manufacturing an elastic body that is used in a vibration-type driving device and is formed by joining a base member and a protruding member, and the manufacturing process of the protruding member and the protruding member as the base member The protrusion member is manufactured by a step of forming a plurality of protrusions on the plate material by press working and between the adjacent protrusion portions of the plate material on which the protrusion portions are formed. Forming a low-rigidity portion, and a step of bending the plate material on which the protrusion and the low-rigidity portion are formed in a plane of the plate material.

  According to the present invention, in the elastic body manufacturing method in which the base member and the protruding member are joined, the mold used when manufacturing the protruding member by press working can be made common regardless of the shape of the base member. This can significantly improve productivity and reduce costs.

It is sectional drawing which shows schematic structure of the vibration type drive device which concerns on embodiment of this invention. FIG. 2 is a plan view, a cross-sectional view, and a partially enlarged view showing a schematic structure of a vibrating body that constitutes the vibration type driving device of FIG. 1. It is a figure which shows typically the manufacturing method of the elastic body which comprises the vibrating body of FIG. It is a figure which shows typically the manufacturing method of the elastic body which concerns on the 1st modification of the elastic body which comprises the vibrating body of FIG. It is a top view which shows schematic structure of the elastic body which concerns on the 2nd modification of the elastic body which comprises the vibrating body of FIG. FIG. 6 is a top view illustrating a schematic structure of a vibrating body according to a modification of the vibrating body used in the vibration type driving device of FIG. 1. It is a figure which shows typically the manufacturing method of the elastic body which the vibrating body of FIG. 6 has. It is a top view which shows the general | schematic structure of the elastic body by which a several projection member is joined to the base member which has a sector shape. It is a perspective view showing a schematic structure of a robot carrying a vibration type drive device concerning an embodiment of the present invention. 1 is a side sectional view showing an internal configuration of a color image forming apparatus equipped with a vibration type driving device according to an embodiment of the present invention. FIG. 11 is a perspective view showing a schematic configuration when a vibration type driving device is used as a photosensitive drum driving motor and a conveying belt driving motor constituting the color image forming apparatus of FIG. 10. 1 is a perspective view showing a schematic structure of a digital camera that is an example of an imaging device equipped with a vibration type driving device according to an embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a cross-sectional view showing a schematic structure of a vibration type driving apparatus 10 according to an embodiment of the present invention. FIG. 2A is a plan view (top view) illustrating a schematic structure of the vibrating body 20 included in the vibration type driving device 10. FIG. 2B is a cross-sectional view taken along the line AA shown in FIG. FIG. 2C is a partially enlarged view of FIG.

  The vibration type driving device 10 includes, for example, a driven body 15, a vibrating body 20, a pressurizing mechanism 30, a shaft 40, a base member 42, a fixed screw 44, and a bearing 45. The vibrating body 20 includes an elastic body 21, a piezoelectric element 22 that is an electro-mechanical energy conversion element, and a flexible printed board (not shown) that supplies power to the piezoelectric element 22. The elastic body 21 includes a base member 24 and a plurality (four in this case) of protrusion members 25 bonded to the surface of the base member 24 on the driven body 15 side. A portion 27 is formed. The piezoelectric element 22 is bonded to the surface of the base member 24 opposite to the surface to which the protruding member 25 is bonded using an adhesive. The elastic body 21 is fixed to a base member 42 having a bearing 45 using a fixing screw 44.

  The pressurizing mechanism 30 is configured in an annular shape, and includes a damping rubber 31, a pressurizing spring receiving member 32, a pressurizing spring 33, and a pressurizing spring fixing member 34, and the driven body 15 is used as the vibrating body 20. The rotation of the driven body 15 is transmitted to the shaft 40 by making pressure contact. The driven body 15 receives a pressing force from the pressurizing mechanism 30 and is in frictional contact with the protrusion 27 of the vibrating body 20.

  The base member 24 is a member made of metal such as stainless steel manufactured in an annular shape by cutting or forging. The projecting member 25 is a member made of a metal plate material such as stainless steel, and has a fan-shaped (bow-shaped) shape. The protrusion 27 is formed in a hollow shape by pressing a metal plate material. A low-rigidity portion 28 having a short length (narrow width) in the radial direction of the base member 24 (a direction orthogonal to a straight line connecting the adjacent protruding portions 27) is provided between the adjacent protruding portions 27 in the protruding member 25. Is formed.

  In the vibration type driving device 10, the vibrating body 20 and the driven body 15 are brought into pressure contact with each other, and the vibrating body 20 and the driven body 15 are relatively moved by the vibration excited by the vibrating body 20. That is, in the vibration type driving device 10, an alternating voltage is applied to the piezoelectric element 22 via the flexible printed circuit board, and bending vibration of the order m (m is an integer of 1 or more) set in advance on the vibrating body 20 is used as driving vibration. Excited. In this way, a circular motion or an elliptical motion is generated at the tip of the projection 27 serving as a contact surface with the driven body 15, and the driven body 15 is frictionally driven. At this time, the bending vibration of the order m is predominantly deformed by the vibration mode of the base member 24, and the projecting member 25 is configured to deform following the deformation of the base member 24. In addition, a contact spring structure is formed on the contact surface of the protrusion 27 with the driven body 15, thereby making the contact between the vibrating body 20 and the driven body 15 smooth and the vibration type driving device 10. Driving can be stabilized. Furthermore, the protrusion 27 plays a role of increasing the vibration displacement of the base member 24 and speeding up the driven body 15.

  Next, a method for manufacturing the elastic body 21 included in the vibration type driving device 10 will be described. FIG. 3 is a diagram schematically illustrating a method for manufacturing the elastic body 21. The first step is a protrusion forming step using press working. A predetermined number (in a row along the longitudinal direction of the plate material 60, using one or both of drawing and ironing, which is a kind of press processing, on a metal plate material 60 such as stainless steel having a rectangular shape. Here, six protrusions 27 are integrally formed on the plate member 60.

  The second step is a low rigidity portion forming step. This is a region in which the width in the short direction is shortened by forming the concave portion 29 so as not to divide the plate material 60 at a position on both long sides of the plate material 60 and between the adjacent protrusions 27. The low rigidity portion 28 is formed. In addition, in the formation process of the low-rigidity part 28, it is not restricted to the punching process which is press work, You may use other methods, such as a laser processing.

  The third step is a bending step. The plate material 60 on which the low-rigidity portion 28 is formed is subjected to bending processing such as press processing within the surface of the plate material 60 so as to have a curvature that matches the shape of the base member 24. At this time, since the concave portion 29 is formed, the bending process for deforming the low-rigidity portion 28 can be easily performed. By the bending process, the concave portion 29 located on the inner peripheral side is narrowed and the concave portion 29 located on the outer peripheral side is widened, and each is deformed into a fan shape. Thus, the protruding member 25 having a curvature that matches the shape of the base member 24 can be obtained.

  The fourth step is a step of joining the protruding member 25 and the base member 24. A plurality (four in this embodiment) of the projecting members 25 are joined to the base member 24 by a method such as adhesion, welding, or brazing so that each projecting member 25 has an annular shape on the base member 24.

  The first step (projection portion forming step) and the second step (low rigidity portion forming step) may be a single step. The order of the first step (projection portion forming step) and the second step (low rigidity portion forming step) may be interchanged. That is, a predetermined region of the plate material 60 is removed by pressing or laser processing to form the recess 29 to form the low-rigidity portion 28, and then the protrusion 27 is formed so as to sandwich the low-rigidity portion 28. It may be.

  Furthermore, it is preferable to include a step of improving the flatness of the joint surface of the protruding member 25 with the base member 24 before the fourth step (joining step). This process includes, for example, a pressing process for correcting the degree of deformation of the protruding member 25 so that the flatness is increased, and a polishing process for the bonding surface. Thereby, the protrusion member 25 and the base member 24 can be firmly joined. When the polishing step is provided, it is preferably provided between the bending step and the joining step, so that the flatness can be corrected even if the flatness of the joining surface of the protruding member 25 is reduced by the bending step. .

  According to the manufacturing method of the elastic body 21 described above, by changing the curvature in the third step (bending step) with respect to the plate member 60 on which the low-rigidity portion 28 is formed, the protrusion that can be adapted to the base member 24 having various shapes. The member 25 can be manufactured. Therefore, the protrusion forming process and the low-rigidity forming process of the protruding member 25 used for the vibrating body 20 (elastic body 21) of various shapes can be made common, and the mold used for press working can be made common. . Further, by adopting a method of joining a plurality of projecting members 25 to the base member 24, the projecting members 25 can be reduced in size and rigidity can be increased, so that the projecting members 25 can be easily handled in the manufacturing process. . With these effects, the productivity of the elastic body 21 can be improved and the cost can be reduced.

  By the way, in this embodiment, the low-rigidity part 28 was formed by forming the recessed part 29 of two places which opposes in the transversal direction of the protruding member 25 in the protruding member 25 as a pair. However, the method for forming the low-rigidity portion 28 is not limited to this. Therefore, with reference to FIG. 4, an elastic body 51 according to a first modification of the elastic body 21 will be described below.

  FIG. 4 is a diagram schematically illustrating a method of manufacturing the elastic body 51 according to the first modification of the elastic body 21. The elastic body 51 includes the base member 24 and the protruding member 55. The first step of manufacturing the elastic body 51 is the same as the first step described with reference to FIG. 3, and a predetermined number of protrusions 27 are formed on a metal plate 60 such as stainless steel having a rectangular shape by pressing. This is a protrusion forming step. The second step is a low rigidity portion forming step. With respect to the plate material 60 on which the projections 27 are formed by the projection formation process, from one long side to the other long side so as not to divide the plate material 60, it is at an intermediate position between the adjacent projections 27. The cut groove 29a is formed by punching or laser processing.

  The long side region (that is, the region on the tip side of the cut groove 29a) that faces the cut groove 29a and does not have the cut groove 29a is the low rigidity portion. Here, the order of the first step and the second step may be reversed. That is, the cut grooves 29a are formed at predetermined intervals so as not to divide the plate material 60 at predetermined positions of the plate material 60, and then the protrusions 27 are formed so as to sandwich the cut grooves 29a. Good. By forming the low rigidity portion after forming the protrusion 27, the low rigidity portion can be formed in accordance with the arrangement of the protrusion 27a, and the uniformity of the characteristics of the vibrator can be improved. On the other hand, by forming the protruding portion 27 after forming the low-rigidity portion, deformation of the protruding portion due to the load or heat in the low-rigidity portion forming step can be suppressed. As a result, the dimensional accuracy of the protrusion that greatly affects the performance of the vibration type driving device can be improved.

  Moreover, you may make it perform a 1st process and a 2nd process by one process. By carrying out simultaneously, since a process can be reduced, productivity can be improved and costs can be reduced.

  The third step is a bending step of the plate material 60. The notch groove 29a formed in the low-rigidity portion forming step is formed on the outer peripheral side where the curvature is reduced (the curvature radius is increased), and the low-rigid portion is formed on the inner peripheral side, so that the plate material 60 is bent to a curvature that matches the shape of the base member 24. Processing is performed to open the cut groove 29a. Thereby, the protruding member 55 in which a triangular recess is formed on one long side is obtained. The fourth step is the same as the fourth step described with reference to FIG. 3 and is a joining step for joining the protruding member 55 and the base member 24. Even in the manufacturing method of the elastic body 51 using such a protruding member 55, the same effect as the manufacturing method of the elastic body 21 can be obtained.

  In the present embodiment, the elastic body 21 or the elastic body 51 in which the four protruding members 25 or the protruding members 55 having the protruding portions 27 formed at six locations are joined to the base member 24 as the protruding members 25 will be described. did. However, the number of the protruding members 25 or the protruding members 55 included in the elastic body 21 or the elastic body 51 and the number of the protruding portions 27 formed on the protruding members 25 or the protruding members 55 are not limited. For example, an elastic body 61 according to a second modification of the elastic body 21 will be described below with reference to FIG.

  FIG. 5 is a top view showing a schematic structure of an elastic body 61 according to a second modification of the elastic body 21. The elastic body 61 includes the base member 24 and the protruding member 65. The elastic body 61 has a structure in which one protrusion member 65 having protrusions 27 formed at 24 locations is joined to the base member 24. The manufacturing method of the elastic body 61 is based on the manufacturing method of the elastic body 21 described with reference to FIG. 3, and the protruding member joined to the base member 24 is a single protruding member 65. This manufacturing method is effective when the protrusion member 65 has a large rigidity and can be sufficiently handled in the manufacturing process without being divided into a plurality of parts. Since only one protrusion member 65 needs to be joined to the base member 24, it is not necessary to handle many parts in the manufacturing process, and the manufacturing process can be simplified.

  In the above description, the elastic body 21 is configured by joining the projecting member 25, the projecting member 55, or the projecting member 65 to the annular base member 24. However, the base member is not limited to the annular base member. That is, the plate member 60 after the second step (low-rigidity portion forming step) described with reference to FIGS. 3 and 4 is not limited to the arc shape as long as it is not broken by processing. Can be bent into various shapes. Therefore, even if the base member has a curved shape such as a fan (bow) shape or a meandering shape, the shape of the plate member 60 after the second step (low rigidity portion forming step) is adapted to the shape of the base member. By deforming into various shapes, various elastic bodies can be easily manufactured. In addition, when meandering the board | plate material 60 in which the notch groove 29a was formed, the area | region which forms the notch groove 29a toward the other long side side from the one long side side of the board | plate material 60, and one side from the other long side side It may be necessary to divide it into regions that are formed toward the longer side. That is, the cut groove 29a is formed so that the cut groove 29a is positioned on the outer peripheral side when the plate member 60 is bent.

Second Embodiment
FIG. 6 is a top view illustrating a schematic structure of a vibrating body 70 according to a modification of the vibrating body 20 used in the vibration type driving device 10. The vibrating body 70 is used in place of the vibrating body 20, and the other components of the vibration type driving device 10 are not changed.

  The vibrating body 70 includes an elastic body 71, a piezoelectric element (not shown), and a flexible printed board (not shown) that supplies power to the piezoelectric element. The elastic body 71 has twelve protruding members 75 bonded to the base member 24. Has been configured. The base member 24 is the same as that used for the elastic body 21 described in the first embodiment. The protruding member 75 has a structure in which one or a plurality of (in this case, two) protruding portions 27 are formed by pressing on a rectangular metal plate made of stainless steel or the like. The protrusion 27 is the same as that formed on the protrusion member 25 described in the first embodiment.

  FIG. 7 is a view schematically showing a method for manufacturing the elastic body 71. The first step is a projection forming step by press working, and a plurality of projections 27 are formed on one or both of the drawing and ironing methods on a metal plate 60 such as stainless steel having a rectangular shape. Form. The second step is a step of cutting the plate material 60 on which the protrusions 27 are formed. The plate member 60 on which the protrusions 27 are formed is cut by press processing, laser processing, or the like, and the protrusion members 75 on which the protrusions 27 are formed at two locations are manufactured. The third step is a step of joining the protruding member 75 and the base member 24. A plurality of (in this embodiment, 12) projecting members 75 are joined to the base member 24 by a method such as adhesion, welding, or brazing so that each projecting member 75 is generally annular on the base member 24.

  In addition, in a projection part formation process, a cutting process can be skipped by using the rectangular board material cut | disconnected small previously. Further, in order to facilitate the cutting of the plate material 60 in the cutting process, a notch or a hole may be formed in a part of the cutting position of the plate material 60. Furthermore, it is also preferable to provide a step of improving the flatness of the bonding surface of the protruding member 75 with the base member 24 before the bonding step. Specifically, a pressing process for correcting the deformation of the protruding member 75 by pressing or the like, and a polishing process can be considered. Thereby, it becomes possible to join the projection member 75 and the base member 24 firmly.

  In the present embodiment, the configuration in which the annular base member 24 is joined to the twelve projecting members 75 in which the projecting portions 27 are formed in two places is shown, but the number of the projecting members 75 joined to the base member 24 is shown. Is not limited to this. Further, the number of protrusions 27 provided on one protrusion member 75 is not limited to two, and the shape of the base member is not limited to an annular shape.

  FIG. 8 is a top view showing a schematic structure of an elastic body 81 in which a plurality (seven in this case) of protruding members 75 are joined to a base member 84 having a sector shape. Even a fan-shaped base member 84 or a base member having a meandering shape (not shown) can obtain a desired elastic body by arranging and joining a predetermined number of protruding members 75 side by side.

  In the manufacturing method of the elastic body 71, the two steps of the low-rigidity portion forming process and the bending process in the manufacturing method of the elastic body 21 described with reference to FIG. The cost can be reduced. Further, the protruding member 75 can be adapted to various shapes of base members. Therefore, it is possible to share the protrusion forming process of the protruding member used for the vibrating body of various shapes, and to share the mold used for press working. Further, since the protruding member 75 on which the small number of protruding portions 27 are formed has high rigidity, the protruding member 75 can be easily handled in the manufacturing process. Thus, the productivity of the elastic body 71 can be improved and the cost can be reduced.

<Third Embodiment>
In the third to fifth embodiments, an example of an apparatus using the above-described vibration type driving apparatus 10 will be described. FIG. 9 is a perspective view illustrating a schematic structure of the robot 100 on which the vibration type driving device 10 is mounted. Here, a horizontal articulated robot which is a kind of industrial robot is illustrated. The vibration type driving device 10 is built in the arm joint portion 111 and the hand portion 112 in the robot 100. The arm joint unit 111 connects the two arms so that the angle at which the two arms 120 intersect can be changed. The hand unit 112 includes an arm 120, a grip part 121 attached to one end of the arm 120, and a hand joint part 122 that connects the arm 120 and the grip part 121. The vibration type driving apparatus 10 is used for an arm joint part 111 that changes the angle between the arms 120 and a hand joint part 122 that rotates the grip part 121 by a predetermined angle.

<Fourth embodiment>
FIG. 10 is a side sectional view showing an internal configuration of the color image forming apparatus 200 equipped with the vibration type driving device. The color image forming apparatus 200 includes four image forming units Pa, Pb, Pc, and Pd, but the number of image forming units is not limited to four.

  Each of the image forming units Pa to Pd has substantially the same configuration, and includes photosensitive drums 201a, 201b, 201c, and 201d, which are rotationally driven image carriers. Chargers 202a, 202b, 202c, and 202d for uniformly charging the photosensitive drums 201a to 201d are disposed around the photosensitive drums 201a to 201d, respectively. Further, developing devices 203a, 203b, 203c, and 203d that develop the electrostatic latent images formed on the drum surfaces of the photosensitive drums 201a to 201d are developed around the photosensitive drums 201a to 201d, respectively. Transfer chargers 204a, 204b, 204c, 204d for transferring the visible image to the transfer material 230, and cleaning devices 205a, 205b, 205c, 205d for removing the toner remaining on the photosensitive drums 201a-201d are the photosensitive drums. They are sequentially arranged in the rotation direction of 201a to 201d. Further, exposure devices 206a, 206b, 206c, and 206d are disposed above the photosensitive drums 201a to 201d, respectively.

  A conveyor belt 225 disposed so as to come into contact with the photosensitive drums 201a to 201d carries the transfer material 230 fed through the feeding unit 210 and is driven in the direction of arrow A shown in FIG. . The conveyance belt 225 and the drive roller 223 constitute a conveyance unit that sequentially conveys the transfer material 230 to the image forming units Pa to Pd. The vibration type driving device 10 and the like are used as a driving motor for rotating the photosensitive drums 201a to 201d and as a driving motor for rotating the driving roller 223 for driving the conveying belt 225.

  FIG. 11A is a perspective view showing a schematic configuration when the vibration type driving device 10 is mounted as a photosensitive drum driving motor. For example, the vibration type driving device 10 can be directly connected to the driving shaft 255 of the photosensitive drum 250 (corresponding to the photosensitive drums 201a to 201d). Accordingly, it is not necessary to use a speed reduction means such as a gear that has been necessary in the prior art, so that color misregistration can be reduced and printing quality can be improved.

  FIG. 11B is a perspective view showing a schematic configuration when the vibration type driving device 10 is mounted as a conveyor belt driving motor. In FIG. 11B, for example, the vibration type driving device 10 can be directly connected to the drive shaft 255 of the drive roller 260 (corresponding to the drive roller 223) of the transport belt 265 (corresponding to the transport belt 225). . By driving the transport belt 265 in this way, the same effects as those obtained when the photosensitive drum is driven by the vibration type driving device 10 can be obtained.

<Fifth Embodiment>
FIG. 12 is a perspective view showing a schematic structure of a digital camera 400 which is an example of an imaging apparatus, and shows a part thereof in a transparent state.

  A lens barrel 410 is attached to the front surface of the digital camera 400. Inside the lens barrel 410, a plurality of lenses (not shown) including a focus lens 407 and a camera shake correction optical system (not shown) are provided. Has been placed. The image stabilization optical system can vibrate in the vertical direction (Y direction) and the horizontal direction (X direction) by transmitting the rotation of a biaxial coreless motor (not shown).

  On the main body side of the digital camera 400, a microcomputer (MPU) 409 that controls the overall operation of the digital camera 400 and an image sensor 408 are arranged. The image sensor 408 is a photoelectric conversion device such as a CMOS sensor or a CCD sensor, and converts an optical image formed by the light passing through the lens barrel 410 into an analog electric signal. An analog electric signal output from the image sensor 408 is converted into a digital signal by an A / D converter (not shown), and then subjected to image processing by an image processing circuit (not shown) to be shown as image data (video data). Are stored in a storage medium such as a semiconductor memory.

  Also, on the main body side of the digital camera 400, as an internal device, a gyro sensor 401 that detects the amount of shake (vibration) in the vertical direction (pitching) and a gyro sensor that detects the amount of shake (vibration) in the left-right direction (yawing). 402 is arranged. A coreless motor (not shown) is driven in the opposite direction of the vibration detected by the gyro sensors 401 and 402 to vibrate the optical axis of the camera shake correction optical system. As a result, the vibration of the optical axis due to camera shake is canceled out, and a good photograph in which camera shake is corrected can be taken. Although an example in which camera shake correction is performed using an optical system is shown here, camera shake may be corrected by moving the image sensor 408.

  The vibration type driving device 10 is used as a driving unit 300 that drives a focus lens 407 disposed in a lens barrel 410 via a gear train (not shown) in the optical axis direction. However, the present invention is not limited to this, and the vibration type driving device 10 can be used for driving an arbitrary lens such as a zoom lens (not shown).

<Other embodiments>
Although the present invention has been described in detail based on preferred embodiments thereof, the present invention is not limited to these specific embodiments, and various forms within the scope of the present invention are also included in the present invention. included. Furthermore, each embodiment mentioned above shows only one embodiment of this invention, and it is also possible to combine each embodiment suitably.

  For example, the protruding member 25 is manufactured by forming a plurality of protruding portions 27 in a row at a predetermined interval on a plate member 60 having a rectangular shape. However, the plate member is not limited to one having a rectangular shape. For example, a protrusion is formed in a plurality of rows and a plurality of rows on a square plate material, and then a hole that becomes a recess 29 when formed later is formed. For example, if the plate material is cut so that the six protrusions 27 are arranged in a line, the protrusion member 25 can be obtained. Here, the hole portion can be formed first, and then the protrusion 27 can be formed.

  Further, in the above embodiment, a plurality of protrusions 27 are formed in a row at a predetermined interval on a plate member 60 having a rectangular shape, and the protrusion member 75 is formed by cutting the plate member 60 at every two protrusions 27. Manufactured. However, the present invention is not limited to this, and, for example, using a rectangular plate material that is wider (long in the short direction) than the plate material 60, the protrusions 27 are formed in two columns and multiple rows (two rows and multiple columns). The protruding member 75 may be manufactured by cutting a plate material in the longitudinal direction for each protruding portion 27.

DESCRIPTION OF SYMBOLS 10 Vibration type drive device 15 Driven body 20 Vibrating body 21 Elastic body 22 Piezoelectric element 24 Base member 28 Low-rigidity part 29 Recessed part 29a Cut groove 30 Pressure mechanism 100 Robot 111 Arm joint part 112 Hand part 200 Color image forming apparatus 201a- 201d Photosensitive drum 223 Drive roller 300 Drive unit 400 Digital camera

Claims (13)

A method for producing an elastic body, which is used in a vibration type driving device and is formed by joining a base member and a protruding member,
A manufacturing process of the protruding member;
Joining the projecting member to the base member,
The manufacturing process of the protruding member is as follows:
A first step of forming a plurality of protrusions by pressing on a plate material;
A second step of forming a low-rigidity portion between the adjacent protrusions of the plate member on which the protrusions are formed;
And a third step of bending the plate material on which the protrusion and the low-rigidity portion are formed within the surface of the plate material. A method for producing an elastic body, which is used in a vibration type driving device and is formed by joining a base member and a protruding member,
A manufacturing process of the protruding member;
Joining the projecting member to the base member,
The manufacturing process of the protruding member is as follows:
A first step of forming a low-rigidity portion on the plate material;
A second step of forming a plurality of protrusions on the plate member at intervals by pressing so as to sandwich the low rigidity portion;
And a third step of bending the plate member on which the low-rigidity part and the plurality of protrusions are formed in a plane of the plate member. A method for producing an elastic body, which is used in a vibration type driving device and is formed by joining a base member and a protruding member,
A manufacturing process of the protruding member;
Joining the projecting member to the base member,
The manufacturing process of the protruding member is as follows:
A first step of forming a plurality of protrusions , each of which is hollow and has a contact spring structure, by pressing the plate material;
And a second step of cutting the plate member on which the protrusions are formed into a plurality of protrusion members having a predetermined number of the protrusions. The method for manufacturing an elastic body according to claim 3, wherein each of the plurality of projecting members includes a plurality of the projecting portions. The plate has a rectangular shape,
5. The method for manufacturing an elastic body according to claim 3, wherein, in the first step, the plurality of protrusions are formed in a row along a longitudinal direction of the plate member. The elasticity according to any one of claims 1 to 5 , wherein a pressing step or a polishing step for increasing the flatness of the bonding surface of the protruding member with the base member is performed before the bonding step. Body manufacturing method. A vibrating body in which an electromechanical energy conversion element is attached to an elastic body;
It includes a pressurizing means for pressurizing contact with the vibrator driven body, and
A vibration type driving apparatus that relatively moves the vibrating body and the driven body by vibration excited in the vibrating body,
The elastic body is
A base member;
The bonded to the base member, have a, a protruding member that are integrally disposed in a plurality of protrusions plate in contact with the driven body,
Wherein the plurality of each of the projections, the vibration type driving apparatus which is characterized in that have a contact spring structure with a hollow. The vibration type driving device according to claim 7 , wherein a plurality of the protruding members are joined to the base member. The plate has a rectangular shape,
Wherein the plurality of projections are arranged in a row along the longitudinal direction of the plate,
The said plate material, the vibration type driving apparatus according to claim 7 or 8, characterized in that the concave portion is formed between the plurality of protrusions. It said projection member is vibration type driving apparatus according to any one of claims 7 to 9, characterized in that it has a shape that the line connecting the plurality of projections is curved. At least two arms;
A robot comprising a joint for connecting the two arms,
The joint unit includes the vibration type driving device according to any one of claims 7 to 10 , and the angle at which the two arms intersect is changed by rotation of the vibration type driving device. robot. Arm,
A gripping portion provided at one end of the arm;
A robot provided with a joint part connecting the arm and the gripping part,
The robot having the vibration type driving device according to any one of claims 7 to 10 , wherein the joint portion rotates the gripping portion by a predetermined angle by rotation of the vibration type driving device. . A vibration type driving device according to any one of claims 7 to 10 ,
A lens driven in the optical axis direction by a driven body of the vibration type driving device;
An image pickup device comprising: an image pickup device provided at a position where light passing through the lens forms an image.

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