JP5611434B2 - Vibrating device, driving device having the vibrating device, dust removing device, and optical apparatus - Google Patents

Description

  The present invention relates to a vibration device. In particular, the present invention relates to a vibration device used in a dust removing device of an optical device such as a camera, a facsimile, a scanner, a projector, a copying machine, a laser beam printer, an ink jet printer, a lens, binoculars, and an image display device, and a vibration device that drives an object by vibration. .

In recent imaging apparatuses, dust attached to an optical system during use has an effect on a captured image as the resolution of an optical sensor is improved.
In particular, since the resolution of the image sensor of the video camera and still camera is remarkably improved, if dust adheres to the optical element disposed near the image sensor, an image defect occurs.
For example, if dust from the outside or wear powder generated on the internal mechanical friction surface adheres to an infrared cut filter, optical low-pass filter, etc., the image on the image sensor surface will be less blurred, resulting in a captured image. Dust reflection occurs.
On the other hand, an image pickup unit such as a copy, a facsimile, or a scanner reads a flat original by scanning a line sensor or scanning an original close to the line sensor.
Here, if dust adheres to the light incident portion on the line sensor, it will appear in the scanned image.
In particular, in a so-called non-scanning method in which a document from a scanning device, a facsimile reading unit, or an automatic document feeder of a copier is read while being conveyed, a line in which a single dust continues in the document feeding direction. Appears as an image.
This causes a problem that the quality of the image is greatly impaired.
The image quality is restored by wiping these dusts manually, but the dust attached during use can only be checked after shooting.
In the meantime, an image of dust that is taken and scanned is reflected in the image, so that correction by software is necessary, and in the copying machine, it is simultaneously output to a medium such as paper, so that a lot of labor is required for correction.

Conventionally, image reading apparatuses that move dust from an image reading unit by applying vibration have been proposed (see Patent Documents 1 and 2).
FIG. 8A is a diagram illustrating a configuration of a conventional dustproof element disclosed in Patent Document 1. In FIG.
This dust-proof element part has the glass plate 27 which is an optical element. The light beam passes through an imaging light beam passage range 27a inside the glass plate 27 and forms an image on an image sensor (not shown).
In addition, a piezoelectric body 271, a piezoelectric body 272, a piezoelectric body 273, and a piezoelectric body 274 are fixed to the glass plate 27.
Between each piezoelectric body and the glass plate 27, an electrical terminal 275 for grounding is provided.
Each piezoelectric body has sections having different polarization directions in the longitudinal direction (indicated by “+” and “−” in the figure). The piezoelectric body 271 and the piezoelectric body 273 have the same polarization arrangement in the longitudinal direction.
The piezoelectric body 272 and the piezoelectric body 274 have the same polarization arrangement in the longitudinal direction. When the section length between “−” and “+” is λ, the polarization arrangement of the piezoelectric body 272 and the piezoelectric body 274 is a position shifted in the longitudinal direction by λ / 4 with respect to the piezoelectric body 271 and the piezoelectric body 273, respectively. It has become.
The piezoelectric body 271 and the piezoelectric body 273 are applied with voltages having the same time phase in the same cycle from the transmitter.
On the other hand, the piezoelectric body 272 and the piezoelectric body 274 have the same period from the transmitter as the piezoelectric bodies 271 and 2.
73 is applied a voltage whose time phase is changed by a 90 ° phase shifter.
FIG. 8B is a diagram showing the traveling wave when the traveling wave is generated on the surface of the glass plate 27 viewed from the h direction in FIG.
The traveling wave travels to the right side (arrow i direction) in the figure. When a traveling wave is generated on the surface of the glass plate 27, a counterclockwise elliptical motion occurs on the paper surface of FIG. 8B at any mass point on the surface of the glass plate 27.
Thereby, the dust adhering to the surface of the glass plate 27 moves to the left side in the figure and is removed from the imaging light beam passage range 27a.

FIG. 9A is a diagram illustrating a configuration of a vibration device of a conventional dust removing device disclosed in Patent Document 2. FIG.
The vibration device 300 is provided in an image sensor 301 that converts a received subject image into an electrical signal and creates image data.
The vibration device 300 and the imaging element 301 seal the space on the front surface of the imaging element 301.
The vibration device 300 includes an optical element 302 having a rectangular plate shape and a pair of piezoelectric elements 303a and 303b which are electromechanical energy conversion elements fixed to both ends thereof by adhesion.
An alternating voltage A is applied to the piezoelectric element 303a, and an alternating voltage B is applied to the piezoelectric element 303b.
In FIG. 9B, A represents the displacement distribution of the primary out-of-plane bending vibration, and B represents the displacement distribution of the secondary out-of-plane bending vibration.
The vertical axis is the displacement in the out-of-plane direction of the surface opposite to the side where the image pickup device 301 of the vibration device 300 is disposed, and the image pickup device 301 side is negative. The horizontal axis corresponds to the position in the longitudinal direction of the vibration device 300 as shown.
The alternating voltage A and the alternating voltage B are both alternating voltages having a response to the resonance phenomenon of the primary out-of-plane bending vibration and the secondary out-of-plane bending vibration. Have different temporal phases.
As a result, the vibration device 300 is excited by a combination of two vibrations of a primary out-of-plane bending vibration and a secondary out-of-plane bending vibration having different time phases.

10, 11, 12, and 13 show the first-order out-of-plane bending vibration, the second-order out-of-plane bending vibration when the temporal phase difference between the two vibrations is 90 °, and the amplitude is 1: 1, and It is a graph which shows the displacement of the vibrating body on which these vibrations were piled up for every time phase.
In the figure, a waveform C indicates the displacement of the primary out-of-plane bending vibration. Waveform D shows the displacement of the secondary out-of-plane bending vibration.
A waveform E indicates the displacement of the vibration device 300 in which these two vibrations are superimposed.
A waveform G shows the displacement of the vibration device 300 before the time phase 30 ° of the waveform E.
A waveform F indicates the normalized displacement speed in the Y direction in the vibration device 300. When the dust removing device is operated, the dust adhering to the surface of the optical element 302 is detected when the optical element 302 pushes the dust out of the plane (positive direction in the Y direction in FIG. 8A). It moves so as to be repelled by receiving the force in the normal direction of the surface of 302. That is, in each time phase, when the waveform F indicating the displacement speed in the Y direction is a positive value, dust is pushed out of the plane, and the normal direction of the waveform E indicating the displacement of the vibration device 300 in this time phase is detected. Receive power. Then, even if the dust is once detached from the initial attachment position and reattached to the optical element, it moves while repeating transfer to a position (moved position) different from the original attachment portion.
The arrow h in FIGS. 10 to 13 indicates the direction in which the dust moves.
From FIG. 10 to FIG. 13, at positions 60 to 300 of the optical element 301, the dust is more positive in the positive direction than the amount of vibration that moves the dust in the negative direction in the X direction during one period of vibration. The amount of vibration that moves is much greater.
Therefore, the dust can be moved in the positive direction of the X direction.
When the effective part of the optical element 302 with respect to the imaging element 301 is in the range from the position 60 to the position 300, dust can be removed from the effective part.

JP 2002-204379 A JP 2008-207170 A

However, the above-described vibration device has the following problems. In the vibration device according to Patent Document 1, there are both ends of the glass plate 27 in the traveling direction of the traveling wave. The traveling wave is reflected at both ends, and the incident wave and the reflected wave are overlapped to become a standing wave that does not travel.
If it becomes a standing wave, it will not be elliptical motion, and it will be difficult to move dust in one direction.
In addition, it is difficult for the means for eliminating the reflected wave to utilize the resonance phenomenon that occurs due to the overlap of the incident wave and the reflected wave.
As a result, a large amplitude cannot be obtained and the speed of the elliptical vibration is reduced, the speed of moving the dust is reduced, and the efficiency is lowered.

In addition, although the vibration device according to Patent Document 2 can obtain a large response amplitude due to the resonance phenomenon, since the vibration device 300 has a large number of resonance modes, unnecessary vibrations are mixed in addition to two desired vibrations.
Due to the mixture of unnecessary vibrations, there are places where the in-plane direction is reversed when the object on the surface of the optical element 302 is knocked out of the plane, and where the in-plane direction component is small. Depending on the location, the in-plane moving directions face each other, making it impossible for the dust to move, or the moving force with respect to the adhesion force of the dust becomes small, and the efficiency of moving the dust becomes low.

  In view of the above problems, the present invention provides a vibration device capable of efficiently moving an object including dust in a predetermined direction by vibration, a drive device having the vibration device, a dust removing device, and an optical apparatus. It is intended to do.

The present invention provides a vibration device configured as follows, a drive device having the vibration device, a dust removing device, and an optical apparatus.
The vibration device of the present invention includes a vibrating body having a plurality of electromechanical energy conversion elements,
A vibration device that generates vibration in the vibrating body by overlapping a first standing wave and a second standing wave of different orders arranged in a first direction with a predetermined time phase difference. Because
At least one of the plurality of electromechanical energy conversion elements has an electrode divided into a plurality of electrodes in the first direction;
The plurality of electrodes are divided between a node line of the first standing wave and a node line of the second standing wave.
In addition, a drive device according to the present invention includes the above-described vibration device.
Moreover, the dust removal apparatus of this invention has the above-mentioned vibration apparatus, It is characterized by the above-mentioned.
In addition, an optical apparatus according to the present invention includes the above-described dust removing device.

According to the present invention, it is possible to realize a vibration device, a drive device including the vibration device, a dust removal device, and an optical apparatus that can efficiently move an object including dust by a vibration in a predetermined direction. it can.

It is a perspective view of the vibration apparatus in the 1st Embodiment of this invention. It is a figure which shows the relationship between the frequency of the exciting force of the conventional vibration apparatus, and the magnitude | size of a vibration response. It is a figure which shows the displacement distribution of the out-of-plane 10th-order bending vibration and the out-of-plane 11th-order bending vibration of the vibrating body, and the arrangement of the piezoelectric elements. It is a perspective view of the vibration apparatus in the 2nd Embodiment of this invention. It is a perspective view of the vibration apparatus in the 3rd Embodiment of this invention. It is a figure which shows arrangement | positioning of the electrode of the piezoelectric element in the 4th Embodiment of this invention. It is a perspective view of the vibration device of other embodiments of the present invention. FIG. 8A is a diagram showing a configuration of a conventional vibration device, and FIG. 8B is a traveling wave when a traveling wave is generated on the surface of the glass plate viewed from the h direction in FIG. 8A. FIG. FIG. 9A is a diagram showing the configuration of a conventional vibration device, and FIG. 9B shows the displacement distribution of the out-of-plane primary bending vibration and the out-of-plane secondary bending vibration of the vibration body of the conventional vibration device and the piezoelectricity. It is a figure which shows arrangement | positioning of an element. In the conventional vibration device, when the temporal phase difference between two vibrations is 90 °, the out-of-plane primary bending vibration, the out-of-plane secondary bending vibration, and the displacement of the vibrating body in which these vibrations are superimposed are expressed as time. It is a graph shown for every phase. In the conventional vibration device, when the temporal phase difference between two vibrations is 90 °, the out-of-plane primary bending vibration, the out-of-plane secondary bending vibration, and the displacement of the vibrating body in which these vibrations are superimposed are expressed as time. It is a graph shown for every phase. In the conventional vibration device, when the temporal phase difference between two vibrations is 90 °, the out-of-plane primary bending vibration, the out-of-plane secondary bending vibration, and the displacement of the vibrating body in which these vibrations are superimposed are expressed as time. It is a graph shown for every phase. In the conventional vibration device, when the temporal phase difference between two vibrations is 90 °, the out-of-plane primary bending vibration, the out-of-plane secondary bending vibration, and the displacement of the vibrating body in which these vibrations are superimposed are expressed as time. It is a graph shown for every phase.

Hereinafter, embodiments of the present invention will be described.
[First Embodiment]
A configuration example of the vibration device provided in the camera according to the first embodiment will be described with reference to FIG.
The vibration device of this embodiment functions as a dust removing device that moves and removes dust.
In FIG. 1, reference numeral 1 denotes an optical element, and four piezoelectric elements 2 (2a, 2b, 2c, 2d), which are electromechanical energy conversion elements, are fixed to the same side as the imaging element 4 by adhesion.
The two piezoelectric elements 2 (2a, 2b) are long in the vertical direction and are disposed at both ends of the optical element 1 in the horizontal direction.
The two piezoelectric elements 2 (2c, 2d) are long in the left-right direction, and are disposed on the inner side of both ends in the vertical direction of the optical element 1.
The control circuit 100 sets the frequency, voltage value, and time phase of the alternating voltage generated by the power supply 101.
The power source 101 is electrically connected to the piezoelectric elements 2a, 2b, 2c, and 2d.
The optical element 1 and the piezoelectric element 2 constitute a vibrating body 3.
The vibrating body 3 is attached to the imaging element 4 so that the space on the surface of the imaging element 4 that is a light receiving element is sealed.
Light from the subject passes through the optical element 1 and enters the image sensor 4. The range in which the light incident on the image sensor at this time passes through the optical element 1 is the optical effective portion 5.

Also in this embodiment, similarly to Patent Document 2, two out-of-plane bending vibrations having different orders in which nodal lines are arranged in the same direction are excited with a time phase difference.
For this reason, in the present embodiment, the control circuit 100 determines the frequency of the alternating voltage generated by the power supply 101 as the out-of-plane 10th-order bending vibration (first standing wave) in which the nodal lines are arranged in the left-right direction on the paper and the orders are different. The frequency is responsive to both the out-of-plane eleventh bending vibration (second standing wave).
Here, the nodal line in the present invention means a node of a standing wave when a standing wave is generated on the surface of the vibrating object by applying vibration to a predetermined surface of the vibrating object (for example, an optical element). The line that is formed when connecting the parts. The direction in which the nodal lines are arranged means the direction in which the nodal lines are arranged (a direction intersecting with the nodal lines) when a plurality of nodal lines exist.
In addition, the control circuit 100 sets time phases of four alternating voltages generated by the power source 101.
Accordingly, the out-of-plane 10th order bending vibration (first standing wave) and the out-of-plane 11th order bending vibration (second standing wave) are generated in the vibrating body 3 at different time phases.
In these synthesized vibrations, the orientation in the in-plane direction when the object is knocked out of the plane is the same in almost the entire region of the surface of the optical element 1.
Accordingly, it is possible to apply a unidirectional force to all objects that are moved by vibration including dust, and realize a unidirectional movement.

Here, the problem in the above-described conventional technique (Patent Document 2) will be described in more detail.
FIG. 2 is a graph showing the frequency of the excitation force and the magnitude of the response of each vibration when the piezoelectric element 2 is provided only at both ends in the left-right direction as in the prior art (Patent Document 2).
Two vibrations A and B having different bending orders in which the nodal lines are arranged in the left-right direction are vibrations that contribute to the movement of the object in one direction. The vibration with the lower resonance frequency of the two vibrations is defined as vibration A.
As other unnecessary vibrations, vibration C, vibration D, and vibration E are shown.
Unnecessary vibration C is vibration in which the bending order in the left-right direction is the same as vibration A and the primary bending deformation in the vertical direction occurs simultaneously. This vibration has the same frequency as vibration A and a resonance frequency close to the resonance frequency of vibration A.
When this vibration is large, in the vertical displacement distribution, unevenness occurs and there are places where the dust cannot move and places where the moving force is small, and the efficiency of moving the dust becomes low.
Similarly, unnecessary vibration D is vibration in which the bending order in the left-right direction is the same as vibration B, and primary bending deformation in the vertical direction occurs simultaneously.
This vibration has the same frequency as vibration B and a resonance frequency close to the resonance frequency of vibration B.
When this vibration is large, in the vertical displacement distribution, unevenness occurs and there are places where the dust cannot move and places where the moving force is small, and the efficiency of moving the dust becomes low.
If the frequency f in the figure, where a large response is obtained by both vibration A and vibration B, is used as the drive frequency, the resonance frequency and drive frequency of the unnecessary vibration C and unnecessary vibration D are close to each other, and the response increases.
For this reason, the unnecessary vibration C and the unnecessary vibration D tend to hinder the movement of the object in one direction.
Unnecessary vibration E is vibration that differs in bending order in the left-right direction from vibrations A and B and causes bending deformation in the vertical direction. If the response of the unnecessary vibration E is large, the horizontal displacement distribution of the composite vibration is disturbed, and the in-plane direction when the object on the surface of the optical element 1 is knocked out of the plane is reversed. There are places where the dust cannot move in one direction. As a result, a location where the dust cannot be moved or a location where the moving force is small is generated, and the efficiency of moving the dust is lowered.

Next, the correspondence between the vibration displacement of the vibrating body 3 of the present embodiment, the arrangement of the piezoelectric elements 2 and the electrode pattern will be described with reference to FIG.
In addition, effects on the problems of the conventional technique (Patent Document 2) will be described.
Plot 7 shows the displacement distribution of out-of-plane 10th-order bending vibration (A in the figure) and the displacement distribution of out-of-plane 11th-order bending vibration (B in the figure) that are lined up in the left-right direction to be excited in the vibrating body 3. ing.
The vertical axis is the displacement in the out-of-plane direction of the optical element 1, and the side opposite to the side where the imaging element 4 is disposed is positive.
The horizontal axis corresponds to the horizontal position of the optical element 1 in the figure.
In the present embodiment, the neutral plane of bending of these two vibrations is inside the optical element 1.
The piezoelectric element 2 arranged at the positive position of the displacement undergoes expansion and contraction in the left-right direction, and the piezoelectric element 2 arranged at the negative position of the displacement has left and right phases that are opposite in phase (180 °). Directional expansion and contraction occurs.
By exciting these two vibrations with a time phase difference, dust can be moved in one direction and removed from the optically effective portion 5 as in the conventional technique (Patent Document 2).
Plot 8 shows the vertical displacement distribution of the vibration in which the horizontal bending deformation and the vertical bending deformation occur simultaneously.
The vertical axis corresponds to the vertical position of the optical element 1 in the figure. The horizontal axis is the displacement in the out-of-plane direction of the optical element 1, and the side opposite to the side where the imaging element 4 is disposed is positive.
When this vibration is large, in the vertical displacement distribution, unevenness occurs and there are places where the dust cannot move and places where the moving force is small, and the efficiency of moving the dust becomes low.

The piezoelectric elements 2a and 2b at the left and right ends have a rectangular plate shape, and are arranged up to both ends of the optical element 1 in the vertical direction, and are arranged from the end of the optical element 1 to the optical effective range 5 in the horizontal direction.
The piezoelectric elements 2a and 2b have a uniform electrode on the entire back surface coupled to the optical element 1, and a plurality of divided electrodes (hereinafter, divided electrodes 9) are provided on the opposite surface. Have.
As shown by the broken lines in the figure, the divided portions of the divided electrode 9 are separated from the node portions where the displacement of the displacement distribution of the out-of-plane 10th-order bending vibration is substantially 0 and the out-of-plane 11th-order bending vibration. The displacement of the displacement distribution coincides with the middle position of the node where the displacement is substantially zero. Here, the displacement of the displacement distribution is substantially zero, not only when there is no displacement distribution at all, but also has a displacement such that the influence of the displacement of the displacement distribution on the vibration state of the vibration part can be ignored. Including cases.
At the time of polarization, the electrode on the back surface is set to the ground potential, and potentials of different polarities are applied to the adjacent electrodes as shown by + and − in the drawing on the divided electrode 9 on the surface. The divided electrode of the left piezoelectric element 2a is given +++ polarity from the left end, and the right piezoelectric element 2b is given +++ polarity from the right end.
After the polarization, the conductive paint 6 having conductivity is applied so as to straddle the divided electrodes 9, and when a voltage is applied to any part of the divided electrodes 9, all of the divided electrodes 9 become the same potential. ing.
The piezoelectric element 2 has a characteristic that an extension force is generated when a polarity of the same potential as the polarity of the potential at the time of polarization is applied, and contracts when a polarity of a potential different from the potential at the time of polarization is applied.
When an alternating voltage is applied, a periodic stretching force that coincides with the period of the alternating voltage is generated.
In the alternating voltage, the time phase (0 ° or 180 °) of the stretching force with respect to the alternating voltage is determined by the polarity at the time of polarization.

An alternating voltage V1 = A1 × COS (2πft) is applied to the left piezoelectric element 2a. A1 is a voltage amplitude value, f is a frequency, and t is time.
An alternating voltage V2 = A2 × COS (2πft + φ) having a time phase different by φ is applied to the right piezoelectric element 2b. A2 is a voltage amplitude value.
At this time, the voltage which mainly contributes to the out-of-plane 10th-order bending deformation in which the piezoelectric elements 2a and 2b are bent in the opposite phase in time phase is V (difference) of the difference component between the alternating voltages V1 and V2. (Difference) = V1−V2.
On the other hand, the voltage that mainly contributes to the out-of-plane eleventh bending deformation in which the piezoelectric elements 2a and 2b are bent in phase with the same phase is V (sum) of the sum component of the alternating voltages V1 and V2, and V ( Sum) = V1 + V2.

Here, regarding the time phase of the stretching force generated in the piezoelectric element 2 due to V (difference), V (difference) will be described with reference to the time phase.
The distribution of the temporal phase of the stretching force of the left piezoelectric element 2a is 0 °, 180 °, 0 °, and 180 ° from the left end corresponding to the divided electrode 9. In the right piezoelectric element 2b, they are 180 °, 0 °, 180 °, and 0 ° from the right end.
The distribution of the time phase of the expansion / contraction force substantially coincides with the distribution of the time phase of the deformation of the expansion / contraction of the piezoelectric element 2 due to the displacement distribution (A in the figure) of the out-of-plane 10th bending vibration.
For this reason, it is possible to obtain a large response of out-of-plane tenth bending vibration.
On the other hand, the temporal phase distribution of the deformation of the expansion and contraction of the piezoelectric element 2 due to the displacement distribution (B in the figure) of the out-of-plane eleventh bending vibration is reversed between the left piezoelectric element 2a and the right piezoelectric element 2b. Looking at the out-of-plane eleventh-order bending vibration due to V (difference), the vibration excited by the left piezoelectric element 2a and the vibration excited by the right piezoelectric element 2b have the same magnitude and the opposite time phase. Therefore, the response of the out-of-plane eleventh bending vibration does not occur.
Further, even with respect to the out-of-plane tenth bending vibration and the unnecessary vibration having a different number of nodes in the left-right direction, the time phase distribution of the stretching force and the time phase distribution of the deformation are different, and the response can be reduced by the effect of canceling the vibration.

Next, the time phase of the stretching force generated in the piezoelectric element 2 by V (sum) will be described using V (sum) as a reference for the time phase.
The distribution of the temporal phase of the stretching force of the left piezoelectric element 2a is 0 °, 180 °, 0 °, and 180 ° from the left end corresponding to the divided electrode 9.
In the right piezoelectric element 2b, they are 0 °, 180 °, 0 °, and 180 ° from the right end.
The distribution of the time phase of the expansion / contraction force substantially matches the distribution of the time phase of the deformation of the expansion / contraction of the piezoelectric element 2 due to the displacement distribution (B in the figure) of the out-of-plane eleventh bending vibration. For this reason, it is possible to obtain a large response of out-of-plane eleventh bending vibration.
Looking at the out-of-plane 10th-order bending vibration due to the stretching force of V (sum), the vibration excited by the left piezoelectric element 2a and the vibration excited by the right piezoelectric element 2b are equal in magnitude and time phase. Since they cancel out in opposite phases, no out-of-plane 10th-order bending vibration response occurs.
In addition, even with respect to unwanted vibrations having a different number of nodes in the left-right direction from the out-of-plane eleventh bending vibration, the time phase distribution of the stretching force and the time phase distribution of the deformation are different, and the response can be reduced by the effect of canceling the vibration .

In the present embodiment, the piezoelectric elements 2c and 2d are further arranged in the direction in which the nodal lines of the out-of-plane 10th order bending vibration and the out-of-plane 11th order bending vibration are arranged.
The piezoelectric element 2 c is disposed on the upper portion of the optically effective portion 5, and the piezoelectric element 2 d is disposed on the lower portion of the optically effective portion 5.
The range of the vertical arrangement of the piezoelectric elements 2c and 2d is arranged so as to straddle the nodes of the vibration displacement distribution (see 8 in FIG. 3) in which the horizontal bending deformation and the vertical bending deformation occur simultaneously. Has been.
Similarly to the piezoelectric elements 2a and 2b, the piezoelectric elements 2c and 2d also have uniform electrodes on the entire surface on the back surface coupled to the optical element 1.
Further, on the surface of the opposite surface, there are a node portion where the displacement of the displacement distribution of the out-of-plane 10th-order bending vibration is substantially zero and a node portion where the displacement of the displacement distribution of the out-of-plane 11th-order bending vibration is substantially zero. A divided electrode 9 is provided that is divided into a plurality of portions at a position that coincides with the intermediate position.
At the time of polarization, the back surface coupled with the optical element 1 is set to the ground potential, and the split electrodes 9 on the front surface are applied with different polar potentials to the adjacent electrodes.
In both the piezoelectric elements 2c and 2d, the divided electrode 9 is given a polarity of-++-++ from the left end, and is continuous with the polarity order of the piezoelectric elements 2a and 2b. No electrode is arranged at the central location where the order of the polarities from the piezoelectric element 2a and the order of the polarities from the piezoelectric element 2b conflict.
Further, after polarization, half of the divided electrodes 9 in the left-right direction in the drawing are electrically connected by the conductive paint 6 having conductivity, and when a voltage is applied to any part, these divided electrodes 9 are connected. Become the same potential.

At the time of driving, an alternating voltage having the same time phase as V1 applied to the previous piezoelectric element 2a is applied to both the left part of the piezoelectric element 2c in the figure and the left part of the piezoelectric element 2d in the figure, and the previous piezoelectric element 2b. An alternating voltage having the same time phase as V2 applied to is applied to both the right portion of the piezoelectric element 2c in the drawing and the right portion of the piezoelectric element 2d in the drawing.
Thereby, the vibration excited by the piezoelectric elements 2a and 2b and the vibration excited by the piezoelectric elements 2a and 2b can be excited at the same time phase with respect to the out-of-plane 10th bending vibration and the out-of-plane 11th bending vibration. . By superimposing these vibrations, an even greater response of out-of-plane 10th order bending vibration and out-of-plane 11th order bending vibration can be obtained.
In addition, with respect to vibrations in which left and right bending deformations and vertical primary bending deformations that are unnecessary vibrations occur at the same time, the piezoelectric elements 2c and 2d straddle the nodes of the vertical displacement distribution (graph 8). It includes a region where the time phase of deformation of expansion and contraction is reversed.
On the other hand, at the position in the vertical direction of the divided electrode 9, it has the same polarity during polarization and the same potential during driving, and the distribution of the temporal phase of the stretching force and the distribution of the temporal phase of the deformation are different. . For this reason, it is possible to relatively reduce the response of unwanted vibrations because it does not increase the excitation force to the vibrations in which the left and right bending deformations, which are unnecessary vibrations, and the primary bending deformation in the vertical direction occur simultaneously. It has become.

As described above, in the present embodiment, in the vibration device that moves the object in one direction by providing a time phase difference between two vibrations having different bending orders in the left-right direction,
In addition to arranging the piezoelectric elements 2 (2a, 2b) in the same direction as the nodal lines, the piezoelectric elements 2 (2c, 2d) are also arranged in the direction in which the nodal lines are arranged.
By adopting this configuration, it is possible to increase the response of vibration that contributes to the movement of the object, and there is an effect of increasing the efficiency of movement of the object.
In addition, increasing the response of the vibration that contributes to the movement of the object also causes a relatively small response of the unnecessary vibration that hinders the movement of the object. This has the effect of increasing the efficiency of moving objects.
Further, the piezoelectric elements 2c and 2d are arranged so that the vertical positions of the piezoelectric elements 2c and 2d straddle the vertical nodes of the vibration in which the horizontal bending deformation and the vertical primary bending deformation occur simultaneously. There is an effect of further reducing the response of unnecessary vibrations that hinder the movement of.

[Second Embodiment]
A configuration example of the vibration device according to the second embodiment of the present invention will be described with reference to FIG. The second embodiment is different from the first embodiment in that the piezoelectric elements 2 arranged above and below are one of the piezoelectric elements 2d.
Other configurations are the same as those of the first embodiment. Also in the second embodiment, as in the first embodiment, the response of out-of-plane 10th order bending vibration and out-of-plane 11th order bending vibration in which nodal lines are arranged in the left-right direction contributing to the movement of the object can be increased.
Further, unnecessary vibration response can be reduced. This makes it possible to move the object efficiently.
The second embodiment has one fewer component than the first embodiment, and the manufacturing cost is low. Also, the occupied volume is reduced.

[Third Embodiment]
A configuration example of the vibration device according to the third embodiment of the present invention will be described with reference to FIG. The difference between the third embodiment and the second embodiment will be described.
The piezoelectric elements 2 arranged on the left and right are one of the piezoelectric elements 2a. The dimension in the left-right direction of the piezoelectric element 2a is from the end of the out-of-plane eleventh bending vibration to the position of the first node, and the surface electrode is a uniform electrode.
As for the dimension in the left-right direction of the piezoelectric element 2d, one end is in the vicinity of the end of the piezoelectric element 2a.
In addition, the shape of the piezoelectric element 2 d is symmetrical with respect to the center of the optical element 1. Other configurations are the same as those of the second embodiment.
The distribution of the time phase of the stretching force generated by the piezoelectric elements 2a and 2d and the distribution of the time phase of the deformation of the out-of-plane 10th order bending vibration and the out-of-plane 11th order bending vibration are substantially the same.
Also in the third embodiment, as in the first and second embodiments, the response of out-of-plane 10th order bending vibration and out-of-plane 11th order bending vibration in which the nodal lines are arranged in the left-right direction contributing to the movement of the object. Can be increased.
Further, unnecessary vibration response can be reduced. This makes it possible to move the object efficiently.
The third embodiment has one component less than the second embodiment, and the manufacturing cost is low. Also, the occupied volume is reduced.

[Fourth Embodiment]
A configuration example of the vibration device according to the fourth embodiment of the present invention will be described with reference to FIG.
FIG. 6 shows the arrangement of the electrodes of the piezoelectric element 2a of this embodiment.
The vibration device of the present embodiment has a configuration in which the arrangement of the electrodes of the piezoelectric element 2a in the third embodiment is different.
The electrode on the back surface coupled to the optical element 1 of the piezoelectric element 2a is a uniform electrode as in the third embodiment.
The surface electrode is divided into four parts, an upper electrode 10, a ground electrode 11, a sensor phase electrode 12, and a lower electrode 13, and an out-of-plane 10th order bending vibration that contributes to the movement of the object and an out-of-plane 11th order bending. The electrode is divided in a direction perpendicular to the vibration nodal line.
An ion plating film 14 containing gold is formed by ion plating so as to straddle the ground electrode 11, the piezoelectric element 2a, and the electrode on the back surface.
As a result, the back electrode and the ground electrode 11 are electrically connected.
During polarization, a DC electric field in the same direction is applied between the ground electrode 11 and the upper electrode 10, the sensor phase electrode 12, and the lower electrode 13, so that the polarization direction is the same direction. During driving, a power source that generates an alternating voltage (not shown) is electrically connected to the ground electrode and the upper electrode 10 and the lower electrode 13.
At the time of driving, an alternating electric field acts on the location of the upper electrode 10 and the location of the lower electrode 13 to generate a stretching force in the piezoelectric element 2a, thereby exciting out-of-plane 10th-order bending vibration and out-of-plane 11th-order bending vibration.
The sensor phase electrode 12 is connected to a control circuit (not shown). During driving, an alternating potential is generated between the sensor phase electrode 12 and the ground electrode 11 by the piezoelectric effect.
By calculating this alternating potential using a control circuit, it is possible to detect the vibration state (the magnitude of response and the time phase) of the vibration device.
Reference numeral 15 in the drawing indicates a distribution of strain generated in the piezoelectric element 2a in vibrations (unnecessary vibrations C and D) in which the out-of-plane bending deformation in the horizontal direction and the primary bending deformation in the vertical direction occur simultaneously.
The vertical axis is the vertical position, and the horizontal axis is the amount of distortion. The range in which the upper electrode 10 is disposed is a range in which the spatial integration value of the amount of distortion is substantially zero. The excitation force generated by the piezoelectric element that excites a certain vibration is proportional to the spatial integration value of the product of the amount of distortion of the piezoelectric element due to the vibration, the electric field value, and the positive / negative polarity of the polarization direction.
For unnecessary vibrations C and D, the spatial integration value of the amount of distortion at the location where the upper electrode 10 is disposed is substantially zero, the electric field value is constant, and the polarity of the polarization is positive or negative. Is uniform.
At this time, the spatial integral value of the product of the distortion amount of the piezoelectric element, the electric field value, and the positive / negative polarization direction is substantially zero, and the excitation force at the location where the upper electrode 10 is disposed for unnecessary vibrations C and D Is almost zero.
The range in which the lower electrode 13 is disposed is also a range in which the spatial integrated value of the amount of distortion of unnecessary vibrations C and D is substantially zero.
Similarly, the excitation force at the location where the upper electrode 10 is disposed for unnecessary vibrations C and D is substantially zero.
As a result, the exciting force with respect to the unnecessary vibrations C and D is substantially zero, so that the magnitude of the response of the unnecessary vibrations C and D can be made extremely small.

In the present embodiment, the vertical center position of the portion (non-driving range 16) that does not act on the driving of the piezoelectric element 2a is matched with the vertical center position of the piezoelectric element 2a. This effect will be described.
The amount of distortion of the piezoelectric element 2a due to the out-of-plane 10th-order bending vibration and the out-of-plane 11th-order bending vibration that contributes to the movement of the object is substantially constant in the vertical direction. It is approximately proportional to the area of the drive range 17 excluded. In order to obtain a greater excitation force of out-of-plane 10th-order bending vibration and out-of-plane 11th-order bending vibration, the smaller the non-driving range 16 is better.
For this reason, in order to further reduce the influence of unnecessary vibrations C and D on the out-of-plane 10th-order bending vibration and the out-of-plane 11th-order bending vibration, the smaller non-driving range 16 can reduce the amount of distortion of the piezoelectric element 2a. It is preferable that the integral value is substantially zero.
The amount of distortion of the piezoelectric element 2a due to unnecessary vibrations C and D is positive at the left side of the page, and has a positive region at the center in the vertical direction as indicated by 15 in the figure, and negative at both ends. There are areas.
The integral value in the positive region is larger than the integral value in the negative region. For this reason, it is preferable that the non-driving range 16 is not provided at both ends in the up-down direction, which is a negative region, and a part of the central portion, which is a positive region, is the non-driving range 16. As an example different from this, when the non-driving range 16 is provided in the negative region and the positive region, in order to make the spatial integration value of the distortion in the driving range 17 substantially zero, the non-driving range in the positive region Both the non-driving range of the negative region becomes large, and the combined non-driving range 16 also becomes large.
Furthermore, the amount of distortion of the piezoelectric element 2a decreases as the distance from the center becomes the maximum positive value at the center in the vertical direction. In view of this, in order to further reduce the non-driving range 16 while the spatial integrated value of the distortion of the driving range 17 is substantially zero, the vertical center position of the non-driving range 16 is set to the vertical direction of the piezoelectric element 2a. It is more preferable to match with the center position of.
As described above, in the present embodiment, the vertical center position of the portion that does not act on the driving of the piezoelectric element 2a (non-driving range 16) matches the vertical center position of the piezoelectric element 2a, so The influence of unnecessary vibrations C and D on the 10th-order bending vibration and the out-of-plane 11th-order bending vibration can be further reduced.
Further, as another configuration of the present embodiment, even if the polarization direction of a part of the driving range 17 is reversed or the magnitude or polarity of the electric field value is changed, the excitation force for the unnecessary vibrations C and D is reduced. It is possible to make it.
Alternatively, the piezoelectric elements 2a and 2d may be integrally formed as shown in FIG.
Similarly to the first and second embodiments, the two piezoelectric elements 2a and 2b arranged in the direction of the nodal line are divided in the direction perpendicular to the nodal line as in the present embodiment. Even if the electrode 9 is provided, it is possible to reduce the excitation force to the unnecessary vibrations C and D.

The vibration device described in each of the above embodiments can be applied to a drive device to constitute a drive device that drives an object in a predetermined direction.
In addition, the present invention can be applied to a dust removing device, and a dust removing device that moves and removes dust in a predetermined direction can be configured.
Furthermore, an optical device that removes dust on the optical path by applying such a dust removing device can be configured.
Specifically, the present invention can be applied to optical devices such as cameras, facsimile machines, scanners, projectors, copying machines, laser beam printers, ink jet printers, lenses, binoculars, and image display devices.

1: Optical element 2, 2a, 2b, 2c, 2d: Piezoelectric element 3: Vibrating body 4: Imaging element 5: Optical effective range (optical effective part)
6: Conductive paint 7: Displacement distribution of out-of-plane 11th-order bending vibration as well as displacement distribution of out-of-plane 10th-order bending vibration with nodal lines 8: Vibration in which bending deformation in the left-right direction and primary bending deformation in the vertical direction occur simultaneously Displacement distribution 9 in the vertical direction: divided electrode 100: control circuit 101: power supply

Claims (12)

Comprising a vibrator having a plurality of electromechanical energy conversion elements;
A vibration device that generates vibration in the vibrating body by overlapping a first standing wave and a second standing wave of different orders arranged in a first direction with a predetermined time phase difference. Because
At least one of the plurality of electromechanical energy conversion elements has an electrode divided into a plurality of electrodes in the first direction;
The plurality of electrodes are divided between a node line of the first standing wave and a node line of the second standing wave.   2. The vibration device according to claim 1, wherein an electrode of the at least one electromechanical energy conversion element of the plurality of electromechanical energy conversion elements is divided in a direction orthogonal to a nodal line.   3. The vibration device according to claim 1, wherein at least one other electromechanical energy conversion element of the plurality of electromechanical energy conversion elements is arranged in the first direction.   The electrode of the at least one other electromechanical energy conversion element of the plurality of electromechanical energy conversion elements has a position substantially coincident with the position of any one of the plurality of nodal lines or the first constant. The vibration device according to claim 3, wherein the vibration device is divided at a position between adjacent nodes of the standing wave and the second standing wave.   The electrode of the at least one electromechanical energy conversion element of the plurality of electromechanical energy conversion elements is divided between the node line of the first standing wave and the node line of the second standing wave. The vibration device according to claim 1, wherein the vibration device is a vibration device. In the first direction, a distance from an end portion of one electrode of the plurality of electrodes to a node line adjacent to the one electrode among the plurality of node lines is from a center of the one electrode. Smaller than the distance to the nodal line adjacent to the one electrode;
Wherein the joint line adjacent to the one electrode, Ri nearest nodal lines der the center of the one electrode of the plurality of nodal lines,
Wherein A the end of the one electrode, of the end portion of the one electrode, in any one of claims 1 to 4, characterized in end closest der Rukoto the adjacent joint line The vibration device described.   The vibration device according to any one of claims 1 to 6, further comprising a control circuit that controls an alternating voltage applied to the plurality of electromechanical energy conversion elements.   The vibration device according to claim 7, wherein the control circuit sets the frequency of the alternating voltage to a frequency that is responsive to both the first standing wave and the second standing wave.   The vibration device according to any one of claims 1 to 8, wherein the vibration in which the first standing wave and the second standing wave are superimposed is a traveling wave.   A drive device comprising the vibration device according to claim 1, wherein an object is driven in a predetermined direction by the vibration device.   A dust removing device comprising the vibration device according to claim 1, wherein the dust is moved and removed in a predetermined direction by the vibration device.   An optical apparatus comprising the dust removing device according to claim 11, wherein dust on the optical path is removed by the dust removing device.

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