JP6426818B2 - Actuator device - Google Patents

Description

  The present invention relates to an actuator device and a mirror drive device.

  As the actuator device, a support portion, a movable portion in which a coil is disposed, a magnetic field generation portion that causes a magnetic field to act on the coil, and a wire connected to the coil are disposed, and the movable portion is swingably coupled to the support portion One including a torsion bar portion is known (see, for example, Patent Document 1). The torsion bar portion extends in a first direction along the swing axis of the torsion bar portion, and includes a plurality of straight portions juxtaposed in a second direction intersecting the first direction, and both ends of the plurality of straight portions It has a serpentine shape having a plurality of folded portions alternately connected.

JP, 2012-088487, A

  An object of the present invention is to provide an actuator device and a mirror drive device capable of suppressing the inhibition of the swing of the movable portion while reducing the resistance of the wire.

  The present inventors have newly found the following facts as a result of research.

  In the case where the torsion bar portion has a meandering shape as described above, the wiring disposed in the torsion bar portion is connected to the wiring portion disposed in each folded portion, and connected to the wiring portion and to each straight portion. And a wiring portion to be disposed. The wiring portion disposed in the folded portion has a higher resistance than the wiring portion disposed in the straight portion due to its shape, so the resistance in the entire wiring is high. When the resistance of the wire is high, the wire generates heat and it is difficult to secure a sufficient amount of current supplied to the coil. If the amount of current to the coil can not be secured sufficiently, the swing range of the movable portion becomes narrow.

  By adopting a configuration in which the wiring is a damascene wiring made of Cu, it is possible to significantly reduce the resistance of the entire wiring disposed in the torsion bar portion. However, in the case where the wiring is a damascene wiring made of Cu, there is a possibility that the wiring may inhibit the swing of the movable portion.

  In the torsion bar portion exhibiting a serpentine shape as described above, when the movable portion swings around the swing axis of the torsion bar portion, the straight portion extending in the first direction along the swing axis of the torsion bar portion is large Stress acts. Therefore, for example, when the movable portion swings in one direction around the swing axis of the torsion bar portion, a large stress acts on the damascene wire made of Cu located in the straight portion, and the damascene wire made of Cu itself Is plastically deformed. In the state where the wiring (damascene wiring) is plastically deformed, the movable part does not return to the initial position, or when the movable part swings in the direction opposite to the one direction around the swing axis of the torsion bar There is a fear that some resistance will occur.

  The inventors of the present invention conducted intensive studies on a configuration that can suppress the inhibition of the swing of the movable portion while reducing the resistance of the wire.

  As a result, the inventors of the present invention have a configuration in which the wiring portion disposed in the straight portion to which a large stress acts is not a damascene wiring made of Cu but a wiring made of a metal material which is less likely to cause plastic deformation than Cu. It has been conceived that adoption can suppress plastic deformation of the wiring portion located in the straight portion. On the other hand, the present inventors pay attention to the fact that the stress acting on the folded portion is lower than that of the straight portion, and by adopting a configuration in which the wiring portion disposed in the folded portion is a damascene wiring made of Cu. It came to think that it could aim at low resistance-ization of wiring. In particular, as described above, since the resistance is relatively high due to the shape of the wiring portion disposed in the folded portion, adoption of a configuration in which the wiring portion disposed in the folded portion is a damascene wiring made of Cu Thus, the resistance of the wiring can be reduced.

  That is, in the actuator device according to the present invention, a support portion, a movable portion in which a conductor is disposed, a wire connected to the conductor, and a torsion bar portion pivotally connecting the movable portion to the support portion; The torsion bar portion extends in a first direction along the swing axis of the torsion bar portion, and includes a plurality of straight portions juxtaposed in a second direction intersecting the first direction, and both ends of the plurality of straight portions The wire has a meandering shape having a plurality of folded portions alternately connecting the first and second wiring portions disposed in the respective folded portions and is connected to the first wiring portion and in each of the straight portions. A second wiring portion to be disposed, wherein the first wiring portion is disposed to be embedded in a groove formed in the folded portion, and a damascene wiring portion formed of a first metal material made of Cu is Including the second wiring portion Disposed on Jo portion, characterized in that it is constituted by a second metallic material difficult to plastically deform than the first metallic material.

  In the actuator device according to the present invention, since the first wiring portion disposed in the folded portion includes the damascene wiring portion made of the first metal material made of Cu, the resistance reduction of the wiring disposed in the torsion bar portion Can be Since the second wiring portion disposed in the straight portion is made of the second metal material which is less likely to be plastically deformed than the first metal material, even when a large stress acts on the straight portion, the second wiring portion Plastic deformation is suppressed. Therefore, it is possible to suppress that the wiring disposed in the torsion bar part inhibits the swing of the movable part.

  The first wiring portion may further include a portion which is disposed on the damascene wiring portion so as to cover the opening of the groove and which is made of the second metal material. In this case, the resistance of the first wiring portion can be further lowered.

  In the damascene wiring portion, the corner edge positioned on the surface side of the folded portion may be locally reduced due to the process in the manufacturing process, and the cross-sectional area may be reduced. As the cross-sectional area of the damascene wiring portion decreases, the resistance of the first wiring portion increases. However, since the first wiring portion further includes a portion disposed on the damascene wiring portion so as to cover the opening of the groove, the resistance of the first wiring portion is high even when the damascene wiring portion is reduced. Can be prevented.

  The connection portion between the torsion bar portion and the support portion and the connection portion between the torsion bar portion and the movable portion may be located on a virtual line extending in the first direction through the central portion in the second direction of the torsion bar portion .

  The resonant frequency of the torsion bar portion is determined by the width of the torsion bar portion and the length in the first direction of the torsion bar portion. By the way, it is conceivable to increase the number of straight portions as a configuration to reduce the stress acting on the straight portions. Since the straight portion is juxtaposed not in the first direction but in the second direction, the length in the first direction of the torsion bar does not change even when the number in the straight direction is increased. Therefore, the design of the torsion bar portion for setting the resonance frequency of the torsion bar portion to a desired value is facilitated.

  The torsion bar portion has a first connection portion connecting one of the plurality of straight portions located on the outermost side in the second direction with the support portion and a second connection portion of the plurality of straight portions. The semiconductor device further includes a second connection portion connecting the other outermost straight portion and the movable portion, and the wiring is connected to the first wiring portion and disposed in the first and second connection portions, respectively. It may further have a third wiring portion.

  The third wiring portion may include a damascene wiring portion which is disposed so as to be embedded in grooves respectively formed in the first and second connection portions, and is made of a first metal material. In this case, even when the wiring has the third wiring portion, it is possible to suppress the resistance of the wiring reliably by suppressing the increase in the resistance of the wiring.

  The second metal material may be made of Al or an alloy containing Al. In this case, plastic deformation of the second wiring portion can be extremely satisfactorily suppressed.

  The movable portion has a first portion to which the torsion bar portion is connected, and a second portion supported on the first portion so as to be pivotable about a pivot axis extending in a direction perpendicular to the pivot axis of the torsion bar portion. It may be done. In this case, the second part of the movable part can be rocked around two orthogonal axes.

  The movable portion may be provided with a coil as a conductor, and may further include a magnetic field generation unit that causes a magnetic field to act on the coil. In this case, the movable portion can be rocked by supplying a current to the coil on which the magnetic field is acting.

  A mirror drive device according to the present invention is characterized by comprising the above-described actuator device and a mirror disposed on a movable portion.

  In the mirror drive device according to the present invention, as described above, the resistance of the wiring disposed in the torsion bar can be reduced, and the wiring disposed in the torsion bar inhibits the swing of the movable portion. Can be suppressed.

  According to the present invention, it is possible to provide an actuator device and a mirror drive device capable of suppressing the inhibition of the swing of the movable portion while reducing the resistance of the wire.

It is a perspective view which shows the mirror drive device which concerns on this embodiment. It is a top view of the mirror drive device shown in FIG. It is a figure for demonstrating the circuit in the mirror drive device shown in FIG. It is a figure for demonstrating the structure of a torsion bar part. It is a figure for demonstrating the cross-sectional structure along the VV line | wire of FIG. It is a figure for demonstrating the cross-sectional structure along the VI-VI line of FIG. It is a figure for demonstrating the cross-sectional structure along the VII-VII line of FIG. It is a figure for demonstrating the cross-sectional structure along the VIII-VIII line of FIG. It is a figure for demonstrating the cross-sectional structure along the IX-IX line of FIG. It is a figure for demonstrating the cross-sectional structure along XX of FIG. It is a figure for demonstrating the state of the stress which arises in a torsion bar part. It is a figure for demonstrating the modification of the structure of wiring. It is a figure for demonstrating the modification of the structure of wiring.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description, the same elements or elements having the same function will be denoted by the same reference symbols, without redundant description.

  The configuration of the mirror drive device 1 according to the present embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a perspective view showing a mirror drive device according to the present embodiment. FIG. 2 is a top view of the mirror drive device shown in FIG. FIG. 3 is a diagram for explaining a circuit in the mirror driving device shown in FIG.

  As shown in FIGS. 1 to 3, the mirror drive device 1 includes an actuator device 2 and a mirror 3. The actuator device 2 includes a magnetic field generation unit 4, a support unit 6, a movable unit 8, and a pair of torsion bar units 10.

  The mirror 3 is a light reflecting film made of a metal thin film. The mirror 3 has a circular shape in plan view. The metal material used for the mirror 3 includes, for example, aluminum (Al), gold (Au), or silver (Ag).

  The magnetic field generator 4 is a flat plate having a rectangular shape. The magnetic field generation unit 4 has a pair of main surfaces 4a and 4b (not shown). The magnetic field generator 4 applies a magnetic field to the movable portion 8. The arrangement of the magnetic poles in the magnetic field generation unit 4 is a Halbach arrangement. The magnetic field generation unit 4 is configured of, for example, a permanent magnet.

  The support portion 6 is a frame whose outer contour has a rectangular shape. The supporting portion 6 is disposed on the magnetic field generating portion 4 so as to face the main surface 4 a. The support portion 6 supports the movable portion 8 via the pair of torsion bar portions 10. The movable portion 8 is located inside the support portion 6. The movable portion 8 includes a first movable portion 81, a second movable portion 82, and a mirror placement portion 83. In the present embodiment, the support portion 6, the movable portion 8 and the torsion bar portion 10 are integrally formed, and are made of, for example, Si.

  The first movable portion 81 is a flat frame that is located inside the support portion 6 and has a rectangular outer contour. The first movable portion 81 is connected to the torsion bar portion 10 and is disposed apart from the support portion 6. The first movable portion 81 is swingably supported by the support portion 6 via the pair of torsion bar portions 10. That is, each torsion bar portion 10 swingably connects the first movable portion 81 to the support portion 6. The first movable portion 81 has a main surface facing the magnetic field generation unit 4 and a main surface 81 a which is a back surface of the main surface. Each torsion bar portion 10 has a serpentine shape as described later.

  The second movable portion 82 is a flat plate-like frame located inside the first movable portion 81 and having a rectangular outer contour. The second movable portion 82 is disposed apart from the first movable portion 81. The second movable portion 82 is swingably supported by the first movable portion 81 via the pair of torsion bar portions 14. That is, each torsion bar portion 14 swingably connects the second movable portion 82 to the first movable portion 81. Similarly to the first movable portion 81, the second movable portion 82 also has a main surface facing the magnetic field generation unit 4 and a main surface 82a that is the back surface of the main surface. Each torsion bar portion 14 is straight and located in the same straight line. In the present embodiment, the torsion bar portion 14 is also integrally formed with the support portion 6, the movable portion 8, and the torsion bar portion 10, and is made of Si.

  The swinging axis of the torsion bar portion 10 intersects with the swinging axis of the torsion bar portion 14. In the present embodiment, the swinging axis of the torsion bar portion 10 is orthogonal to the swinging axis of the torsion bar portion 14. That is, the second movable portion 82 is supported by the first movable portion 81 so as to be swingable around a swing axis extending in a direction perpendicular to the swing axis of the torsion bar portion 10.

  The mirror placement portion 83 is located inside the second movable portion 82 and has a circular shape. The mirror placement portion 83 is integrated with the second movable portion 82 and pivots integrally with the second movable portion 82. The mirror placement portion 83 has a main surface facing the magnetic field generation unit 4 and a main surface 83 a which is the back surface of the main surface. The mirror 3 is disposed on the major surface 83 a of the mirror placement portion 83.

  The actuator device 2 (mirror drive device 1) includes a coil 16 disposed in the first movable portion 81 and a coil 18 disposed in the second movable portion 82, as also shown in FIG. . The coil 16 is disposed on the main surface 81 a side of the first movable portion 81. The coil 18 is disposed on the main surface 82 a side of the second movable portion 82. In the present embodiment, the coil 16 is used as a conductor disposed in the first movable portion 81, and the coil 18 is used as a conductor disposed in the second movable portion 82.

  The coil 16 is wound in a plurality of turns in a spiral shape as viewed from the direction orthogonal to the major surface 81 a. One end of the coil 16 is located outside the coil 16, and the other end of the coil 16 is located inside the coil 16. One end of the lead conductor 16 a is electrically connected to the outer end of the coil 16. One end of the lead conductor 16 b is electrically connected to the inner end of the coil 16.

  The lead conductors 16 a and 16 b are mainly disposed on one of the torsion bar portions 10 and extend from the first movable portion 81 to the support portion 6. The other ends of the lead conductors 16 a and 16 b are electrically connected to the electrodes 17 a and 17 b disposed on the surface of the support portion 6. The electrodes 17a and 17b are electrically connected to a control circuit (not shown) and the like. The lead conductor 16 a three-dimensionally intersects the coil 16 so as to pass above the coil 16.

  The coil 18 is wound in multiple turns in a spiral shape as viewed from the direction orthogonal to the major surface 82a. One end of the coil 18 is located outside the coil 18, and the other end of the coil 18 is located inside the coil 18. One end of the lead conductor 18 a is electrically connected to the outer end of the coil 18. One end of the lead conductor 18 b is electrically connected to the inner end of the coil 18.

  The lead conductors 18a and 18b are mainly disposed on the torsion bar portion 14, the first movable portion 81, and one of the torsion bar portions 10, and extend from the second movable portion 82 to the other torsion bar portion 10. The other ends of the lead conductors 18 a and 18 b are electrically connected to the electrodes 19 a and 19 b disposed on the surface of the support portion 6. The electrodes 19a and 19b are electrically connected to the control circuit (not shown) and the like. The lead conductors 18 a and 18 b three-dimensionally intersect the coil 16 so as to pass above the coil 16.

  Here, the configuration of each torsion bar portion 10 will be described with reference to FIG. FIG. 4 is a view for explaining the configuration of the torsion bar portion.

As shown in FIG. 4, each torsion bar portion 10 includes a plurality of straight portions 10 a (in this embodiment, nine straight portions 10 a _{1 to} 10 a _{9 in the} present embodiment) and a plurality of folded portions 10 b (in the present embodiment eight). One of the folded portions _10b 1 _{~10b 8),} has a pair of connecting portions 10c, the 10d. Jikajo portion 10a ₁ 10 A ₉ extends in a first direction along the swing axis L of the torsion bar portions 10 are juxtaposed in a second direction crossing the first direction. Folded portions 10 b _{1 to} 10 b ₈ are provided to extend in the second direction. In the present embodiment, the first direction and the second direction are orthogonal to each other.

Back portion _10b 1 _{~10b 8,} among the Jikajo portion _10a 1 10 A _9, are connected to end between the second two adjacent in the direction straight portion _10a 1 _{~10a 9.} For example, Jikajo portion _10a 1, 10a ₂ each one end is connected to the folded portion 10b _1. Thus, the folded portions _10b 1 _{~10b 8} is coupled to the alternating opposite ends of Jikajo portion _10a 2 _{~10a 8.} In the present embodiment, the folded portions _{10b 1, 10b 2, 10b 7} , 10b 8 is straight, back portion _10b 3 _{~10b 6} is curved.

The other end of Jikajo portion 10a ₁ is connected to one end of the connecting portion 10d. Jikajo portion 10a ₁ is one straight portion of the outermost in a second direction in the Jikajo portion _10a 1 _{~10a 9.} The other end of the connection portion 10d is connected to the movable portion 8 at the connection point 11b. That is, the connection portion 10 d connects the straight portion 10 a ₁ and the movable portion 8.

One end of the straight portion 10a ₉ is connected to one end of the connection portion 10c. Jikajo portion 10a ₉ is the other of the straight portion located on the outermost side in the second direction in the Jikajo portion _10a 1 _{~10a 9.} The other end of the connection portion 10d is connected to the support 6 at the connection point 11a. That is, the connection portion 10 c connects the straight portion 10 a ₉ and the support portion 6.

Jikajo portion _10a 1 _{~10a 9,} folded-back portion _10b 1 _{~10b 8,} and the connecting portion 10c, the 10d, the torsion bar portion 10 is of a meander shape. The connection points 11 a and 11 b are located on an imaginary line extending in the direction along the swing axis L. The imaginary line passes through the central portion of the torsion bar portion 10 in the second direction.

  Next, with reference to FIGS. 5 to 10, the wiring 20 disposed in the torsion bar portion 10 will be described. FIG. 5 is a diagram for explaining a cross-sectional configuration along the line V-V in FIG. 4. FIG. 6 is a diagram for explaining a cross-sectional configuration along the line VI-VI in FIG. 4. FIG. 7 is a diagram for explaining a cross-sectional configuration along the line VII-VII in FIG. FIG. 8 is a diagram for explaining a cross-sectional configuration along line VIII-VIII in FIG. 4. FIG. 9 is a diagram for illustrating a cross-sectional configuration along the line IX-IX in FIG. 4. FIG. 10 is a view for explaining a cross-sectional configuration along the line XX in FIG.

The wiring 20 constitutes a portion of the lead conductors 16a, 16b, 18a, 18b disposed in the corresponding torsion bar portion 10. That is, the lead conductors 16 a, 16 b, 18 a, 18 b include the wiring 20. The wiring 20 includes a wiring portion 21, a wiring portion 22, and a wiring portion 23. The wiring part 21 is disposed on the folded portion _{10b (10b} 1 _{~10b 8).} Wiring portion 22 is predominantly located in Jikajo portion _{10a (10a} 1 _{~10a 9).} The wiring portion 23 is disposed at the connection portions 10c and 10d. The wiring portion 23 disposed in the connection portion 10c is configured in the same manner as the wiring portion 23 disposed in the connection portion 10d. For this reason, the cross-sectional configuration of the wiring portion 23 is illustrated only in the wiring portion 23 disposed in the connection portion 10 d, and the cross-sectional configuration of the wiring portion 23 disposed in the connection portion 10 c is omitted.

  The wiring portion 21 is disposed so as to be embedded in the groove 25a formed in the folded portion 10b, as also shown in FIGS. The wiring portion 21 is made of a first metal material made of Cu, and is formed by a damascene method. That is, the wiring portion 21 includes a damascene wiring portion. The groove 25a is formed by etching the folded portion 10b. The thickness of the torsion bar portion 10 can be set to, for example, about 20 μm to 60 μm, and the depth of the groove 25 a can be set to, for example, about 5 μm to 15 μm.

The wiring portion 22 is disposed on the straight portion 10a as shown in FIG. 5 and FIG. Specifically, it is disposed in the insulating layer 26 disposed on one main surface of the torsion bar portion 10. The insulating layer 26 is configured to cover a part of the wiring portion 22. The insulating layer 26 is a thermal oxide film obtained by thermally oxidizing the torsion bar portion 10. The insulating layer 26 is made of, for example, SiO ₂ . The thickness of the insulating layer can be set to, for example, about 0.5 μm.

  The wiring portion 22 is made of a metal material which is less susceptible to plastic deformation than Cu which is the first metal material. The metal material constituting the wiring portion 22 is a metal material which is less likely to plastically deform than Cu, and is, for example, Al or an alloy containing Al. As an alloy containing Al, an Al-Si alloy, an Al-Cu alloy, and an Al-Si-Cu alloy are mentioned. The composition ratio of the Al-Si alloy can be, for example, 99% of Al and 1% of Si. The composition ratio of the Al-Cu alloy can be, for example, 99% of Al and 1% of Cu. The composition ratio of the Al-Si-Cu alloy can be, for example, 98% of Al, 1% of Si, and 1% of Cu. By employing the above-described metal material as the metal material constituting the wiring portion 22, plastic deformation of the wiring portion 22 can be extremely satisfactorily suppressed.

  The wiring portion 22 includes a portion 22 a located on the wiring portion 21 as shown in FIGS. 7 to 9. The portion 22 a of the wiring portion 22 is disposed on the wiring portion 21 so as to cover the opening of the groove 25 a and is connected to the wiring portion 21.

As shown in FIG. 7, the wiring portion 21 disposed in the folded portion 10 b is connected to the portion 22 a of the wiring portion 22, and the wiring portion 23 disposed in the connecting portion 10 d is connected to the portion 22 b of the wiring portion 22. ing. As shown in FIG. 8, in the wiring portion 22 disposed in the straight portion 10 a ₁ , the portion 22 a of the wiring portion 22 is connected to the wiring portion 21. The wiring portion 21 is a wiring formed by a damascene method, and the wiring portion 22 is, for example, Al or an alloy containing Al. In FIG. 7 and FIG. 8, in the wiring 20, a portion where the wiring portion 22 disposed in the straight portion 10a and the wiring portion 21 disposed in the folded portion 10b are switched is shown.

  The wiring portion 23 is disposed so as to be embedded in the groove 25b formed in the connection portion 10d (10c), as also shown in FIG. The wiring portion 23 is made of a first metal material made of Cu and is formed by a damascene method. That is, the wiring portion 23 also includes the damascene wiring portion. The groove 25b is formed by etching the connection portion 10d (10c). The depth of the groove 25b can be set to, for example, about 5 μm to 15 μm.

  The wiring portion 22 includes a portion 22b located on the wiring portion 23, as shown in FIG. The portion 22 b of the wiring portion 22 is disposed on the wiring portion 23 so as to cover the opening of the groove 25 b and is connected to the wiring portion 23.

  In the present embodiment, when a current flows in the coil 16, a Lorentz force is generated in a predetermined direction on electrons flowing in the coil 16 due to the magnetic field generated by the magnetic field generation unit 4. Therefore, the coil 16 receives a force in the predetermined direction. . For this reason, the first movable portion 81 swings around the swing axis of the torsion bar portion 10 by controlling the direction and the magnitude of the current flowing through the coil 16. When a current flows in the coil 18, a Lorentz force is generated in a predetermined direction on electrons flowing in the coil 18 due to the magnetic field generated by the magnetic field generation unit 4, and the coil 18 receives a force in the predetermined direction. Therefore, the second movable portion 82 swings around the swing axis of the torsion bar portion 14 by controlling the direction and the magnitude of the current flowing through the coil 18. Therefore, by controlling the direction and magnitude of the current of the coil 16 and the coil 18, respectively, the mirror placement portion 83 (mirror 3) can be rocked around two orthogonal rocking axes.

  By the way, as shown in FIG. 11, in the torsion bar portion 10, when the movable portion 8 (first movable portion 81) swings around the swinging axis of the torsion bar portion 10, the swinging axis of the torsion bar portion 10 A large stress acts on the straight portion 10a extending in the direction along the FIG. 11 is a view for explaining the state of stress generated in the torsion bar portion 10. FIG. 11 shows the result of simulating the stress applied to the torsion bar 10 with the support 6 having a substantially rectangular parallelepiped shape and the movable portion 8 (the first movable portion 81) having a substantially rectangular flat plate shape. It has become clear that a large stress is acting on the portion shown in black on the straight portion 10a extending in the direction along the swing axis of the torsion bar portion 10.

  In the present embodiment, the wiring portion 22 disposed in the straight portion 10a is made of Al or an alloy containing Al. Therefore, even when a large stress acts on the straight portion 10a, plastic deformation of the wiring portion 22 is suppressed. Therefore, it can be suppressed that the wiring 20 disposed in the torsion bar portion 10 inhibits the swing of the movable portion 8 (the first movable portion 81).

  In the present embodiment, the wiring portion 21 disposed in the folded portion 10 b is a damascene wiring portion made of Cu. Therefore, resistance reduction of the wiring 20 arrange | positioned at the torsion bar part 10 can be achieved.

  In the present embodiment, not only the wiring portion 21 but also the wiring portions 23 disposed in the connection portions 10c and 10d are also damascene wiring portions made of Cu. For this reason, even when the wiring 20 has the wiring portion 23, it is possible to suppress the resistance of the wiring 20 reliably by suppressing the increase in the resistance of the wiring. As shown in FIG. 11, large stress hardly acts on the connection portions 10c and 10d. Therefore, even when the wiring portion 23 disposed in the connection portions 10c and 10d is a damascene wiring portion made of Cu, the possibility of inhibiting the swing of the movable portion 8 (first movable portion 81) is extremely low.

  Since the wiring portions 21 and 23 are damascene wiring portions as described above, the corner edges located on the surface side of the folded portion 10b and the connecting portions 10c and 10d are locally generated due to the process in the manufacturing process thereof. There is a fear that the cross-sectional area will be reduced. As the cross-sectional areas of the wiring portions 21 and 23 decrease, the resistance of the entire wiring 20 increases. However, since the wiring portion 22 includes the portions 22a and 22b disposed on the wiring portions 21 and 23, even when the wiring portions 21 and 23 are reduced in thickness, the resistance of the wiring 20 is prevented from being high. be able to.

  In the present embodiment, the above-described portions 22a and 22b are arranged to cover the openings of the grooves 25a and 25b. For this reason, Cu of the wiring portions 21 and 23 hardly diffuses to the insulating layer 26, and generation of a short between metal materials (Cu in the present embodiment) constituting the wiring portions 21 and 23 is suppressed. .

  In the present embodiment, the connection points 11a and 11b are located on an imaginary line extending in the first direction and passing through the central portion of the torsion bar portion 10 in the second direction. The resonant frequency of the torsion bar portion 10 is determined by the width of the torsion bar portion 10 and the length in the first direction of the torsion bar portion 10. By the way, it is conceivable to increase the number of the straight portions 10a as a configuration to reduce the stress acting on the straight portions 10a. Since the straight portions 10a are juxtaposed not in the first direction along the rocking axis L but in the second direction intersecting the first direction, even when the number of the straight directions is increased, The length in the first direction of the bar portion 10 does not change. For this reason, design of the torsion bar portion 10 for setting the resonance frequency of the torsion bar portion 10 to a desired value is facilitated.

  In the present embodiment, the resistance value of the folded portion 10b is higher than the resistance value of the straight portion 10a due to its shape. Therefore, by arranging the wiring portion 21 formed by the damascene method in the folded portion 10b and arranging the wiring portion 22 in the straight portion 10a, it is possible to suppress an increase in the overall resistance of the torsion bar portion 10. it can.

In the present embodiment, the wiring portion 22 disposed in the straight portion 10 a (the straight portions 10 a _{1 to} 10 a ₉ ) is made of Al or an alloy containing Al, but is not limited thereto. For example, as shown in FIGS. 12 and 13, the wiring portions 22 may not be disposed in all the straight portions 10 a. FIG. 12 is a diagram for describing a modification of the wiring configuration, and corresponds to the cross-sectional configuration along the line V-V in FIG. 4. FIG. 13 is a diagram for explaining a modification of the wiring configuration, and corresponds to the cross-sectional configuration along the line VI-VI in FIG. 4.

12 and as shown in FIG. 13, the Jikajo portion 10a _1, 10a ₉ of the outermost in a second direction in the Jikajo portion 10a, are arranged wiring portion 21 formed by a damascene method It is also good. As shown in FIG. 11, the straight portions 10a ₁ and 10a ₉ exert smaller stress than the other straight portions (10a _{2 to} 10a ₈ ). Thus, even when arranging the wire portion 21 in Jikajo portion _10a 1, 10a _9, Jikajo portion _10a 1, 10a ₉ to be the wiring portion 21 plastically deformed hardly occurs arrangement. By Jikajo portion _10a 1, 10a ₉ to the wiring portion 21 is arranged, it is possible to further reduce the resistance of the wiring 20.

The wiring portion 21 may be disposed also on the straight portions 10a ₂ and 10a ₈ . As shown in FIG. 11, the straight portions 10 a ₁ , 10 a ₂ , 10 a ₈ and 10 a ₉ located outside in the second direction of the straight portion 10 a are straight portions 10 a ₃ to 10 near the swing axis L. compared to 10a _7, a small stress acts. Therefore, even when the wiring portion 21 is disposed in the straight portions 10a ₁ , 10a ₂ , 10a ₈ , and 10a ₉ , the wiring portions disposed in the straight portions 10a ₁ , 10a ₂ , 10a ₈ , and 10a ₉ 21 plastic deformation is unlikely to occur. By Jikajo portion _{10a 1, 10a 2, 10a 8} , 10a 9 to the wiring portion 21 is arranged, it is possible to further reduce the resistance of the wiring 20.

  As mentioned above, although the embodiment of the present invention has been described, the present invention is not necessarily limited to the embodiment described above, and can be modified.

In the above embodiment, the folded portions _{10b 1, 10b 2, 10b 7} , 10b 8 is straight, although the folded portions _10b 3 _{~10b 6} was curved shape is not limited thereto. The folded portion 10b may be all straight or all may be curved. The folded portion 10b may be appropriately combined with a straight shape and a curved shape, or may be different shapes.

In the above embodiment, the torsion bar portion 10, which had exhibited a serpentine shape by a straight portion _10a of nine (10a 1 ~10a ₉₎ and eight folded portion _{10b (10b} 1 _{~10b 8),} straight The number of the portions 10a and the folded portions 10b is not limited to this.

  In the embodiment described above, the case where the mirror 3 and the mirror arrangement portion 83 have a circular shape has been described as an example, but the shape of the mirror 3 and the mirror arrangement portion 83 may be, for example, a polygonal shape or an elliptical shape.

  The actuator device 2 may be an actuator device that drives members other than the mirror 3.

  In the embodiment described above, only the torsion bar portion 10 has a meandering shape, and the wiring 20 is disposed on the torsion bar portion 10, but the present invention is not limited to this. For example, the torsion bars 10 and 14 may have a serpentine shape, and the wires 20 may be disposed. Only the torsion bar portion 14 may have a serpentine shape, and the wire 20 may be disposed in the torsion bar portion 14.

  More preferably, the torsion bar portion 10 has a meandering shape, and the wiring 20 is disposed on the torsion bar portion 10. The stress applied to the torsion bar portion 14 is a stress applied when the second movable portion 82 swings. The stress applied to the torsion bar portion 10 is a stress applied when the first movable portion 81 and the second movable portion 82 swing. That is, the stress applied to the torsion bar portion 14 is smaller than the stress applied to the torsion bar portion 10. For this reason, the torsion bar portion 14 is less likely to cause a problem due to stress than the torsion bar portion 10. Therefore, the structure of the torsion bar portion 14 can be simplified, and the yield in manufacturing the actuator device 2 can be improved.

  In the present embodiment, the movable portion 8 is configured to be driven in two axial directions by the rocking shaft of the torsion bar portion 10 and the rocking shaft of the torsion bar portion 14, but the present invention is not limited thereto. For example, the actuator device 2 may be configured to be driven by one coil disposed in the movable portion. Preferably, in the pair of torsion bar portions, the lead conductor may be disposed in each of the one torsion bar portion and the other torsion bar portion. Since the lead conductor is disposed on the torsion bar portion, the damage of the torsion bar portion can be known from the presence or absence of the current flowing in the lead conductor. Furthermore, a configuration may be adopted in which the operation of the actuator device is interrupted when breakage is detected.

  Compared with the case where the lead conductor is arranged only in one torsion bar portion, when the lead conductor is arranged in each of the one torsion bar portion and the other torsion bar portion, the grooves formed in the torsion bar portion are reduced. Therefore, the stress applied to the torsion bar can be reduced. Furthermore, since two to one wiring is disposed in the torsion bar portion, a short circuit between the wirings can be prevented.

  In the present embodiment, the swinging (driving) of the movable portion 8 is performed by an electromagnetic force, but is not limited to this. For example, the swing (drive) of the movable portion 8 may be performed by a piezoelectric element. In this case, the wiring 20 is used as a wiring for applying a voltage to the piezoelectric element.

DESCRIPTION OF SYMBOLS 1 ... mirror drive device, 2 ... actuator device, 3 ... mirror, 4 ... magnetic field generation part, 6 ... support part, 8 ... movable part, 10, 14 ... torsion bar part, 10a (10a _{1 to} 10a ₉ ) ... linear _{moiety, 10b (10b 1 ~10b 8)} ... folded portion, 10c, 10d ... connecting portion, 16, 18 ... coil, 20 ... wiring, 21, 22, 23 ... wiring portion, L ... pivot shaft.

Claims (13)

A support,
A movable part in which a conductor is disposed,
A wire connected to the conductor is disposed, and a first torsion bar portion swingably connecting the movable portion to the support portion;
The first torsion bar portion extends in a first direction along the swing axis of the first torsion bar portion and corresponds to a plurality of straight portions juxtaposed in a second direction intersecting the first direction. A meandering shape having a folded portion connecting the ends of the straight portions;
The wiring viewed contains an arrangement has been that the wiring portion so as to be embedded in the first torsion bar portion which is formed in the groove,
In the folded portion, the groove is formed and the wiring portion is provided.
The actuator device wherein the folded portion is curved . The actuator device according to claim 1 , wherein the wiring portion is provided in a straight portion positioned outermost in the second direction among the plurality of straight portions. The wiring portion, the plurality of provided in the Jikajo portion is adjacent to the Jikajo portion located outermost in the second direction of the straight portion, the actuator device according to claim 1 or 2 . The first torsion bar portion is
A first connection portion connecting one of the plurality of straight portions located outermost in the second direction among the plurality of straight portions and the support portion;
And a second connection portion connecting the other of the plurality of straight portions located on the outermost side in the second direction with the movable portion.
The actuator device according to any one of claims 1 to 3 , wherein the wiring portion is provided in the first connection portion and the second connection portion. The actuator device according to claim 4 , wherein the first connection portion and the second connection portion are curved at a position facing the folded portion. It further comprises a second torsion bar portion,
The movable portion is
A first movable portion to which the first torsion bar portion is connected and which is pivotally supported by the support portion via the first torsion bar portion;
A second movable portion connected to the second torsion bar portion, the second movable portion pivotally supported by the first movable portion via the second torsion bar portion; The actuator device according to any one of to 5 . The actuator device according to claim 6 , wherein the second torsion bar portion and the second movable portion are connected in a curvilinear shape. The movable portion further includes a mirror arrangement portion,
The actuator device according to claim 6 , wherein the mirror arrangement portion is connected to the second movable portion at a position located in a direction orthogonal to the swing axis of the second torsion bar portion. The actuator device according to any one of claims 6 to 8 , wherein the conductor is arranged on the first movable part. The first torsion bar portion is provided in a pair,
The pair of first torsion bar portions are disposed to face each other with the movable portion interposed therebetween,
The wire disposed in one of the first torsion bar portions is electrically connected to one end of the conductor,
The actuator device according to any one of claims 1 to 9 , wherein the wire disposed in the other first torsion bar portion is electrically connected to the other end of the conductor. The actuator device according to any one of claims 1 to 10 , wherein the conductor and a conductor connecting the conductor and the wiring intersect in a three-dimensional manner. The actuator device according to any one of claims 1 to 11 , wherein the support portion is provided with a recess in which the first torsion bar portion is disposed. The first torsion bar portion further includes another folded portion connecting ends of the corresponding straight portions,
The other folded portion is straight,
The actuator device according to any one of claims 1 to 12, wherein the bent back portion is closer to the swinging axis than the other bent back portion which is straight.