JP6417802B2 - Illumination device, projection device, and light source device - Google Patents

Description

  The present invention relates to an illumination device including an optical element and an irradiation device that irradiates light to the optical element so as to scan the optical element. Moreover, this invention relates to the projection apparatus which has this illuminating device. Furthermore, the present invention relates to a scanning device and an optical module that change the optical path of incident light.

  For example, as disclosed in Patent Document 1, an illumination device using an optical element including a lens array or a hologram is known. In the illumination device disclosed in Patent Document 1, an irradiation device including a light source device that emits light and a scanning device that periodically changes an optical path of light from the light source device is provided. This irradiation apparatus irradiates the optical element with light so as to scan the optical element. Light incident on each area of the optical element is shaped by the optical element to illuminate a predetermined area. According to this illuminating device, it is possible to illuminate the predetermined area from different directions over time, and to illuminate the predetermined area more uniformly. Further, in Patent Document 1, speckles on an area illuminated by illumination light and illumination of a rough surface, for example, screen light, due to illumination of a predetermined area from different directions over time. It has been reported that speckle caused by diffusion can be suppressed.

JP 2012-123381 A

  In recent years, a high-power type light source device using a plurality of laser light sources has been studied. However, if such a high-power light source device is applied to an illumination device including the above-described scanning device, the reflection surface of the scanning device is likely to be damaged. As a result, the traveling direction of light emitted from the high-output light source device cannot be stably controlled. Further, if the durability of the scanning device is to be improved, another problem such as complication or enlargement of the device may occur.

  The present invention has been made in consideration of the above points, and an illumination device capable of stably and accurately controlling the traveling direction of high-output light from a light source device, and a projection device including the illumination device And it aims at providing the light source device suitable for this illuminating device.

The lighting device according to the present invention comprises:
An optical element;
An irradiation device for irradiating the optical element with light so as to scan on the optical element,
The irradiation device includes:
A light source device for emitting light;
A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
The light source device
Multiple light sources;
A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
A plurality of collimating lenses which are provided corresponding to the respective optical fibers and adjust the optical path of light emitted from the corresponding optical fibers.

  In the illumination device according to the present invention, a region on the reflection surface of the scanning device irradiated with light emitted from one of the plurality of collimating lenses is at least partially in the plurality of collimating lenses. May be shifted from the region on the reflection surface of the scanning device irradiated with light emitted from a collimating lens other than the one collimating lens.

  In the illumination device according to the present invention, each region on the reflection surface of the scanning device to which the light emitted from each of the plurality of collimating lenses is irradiated is one virtual circumference located on the reflection surface or It may be located on the circumference of the ellipse.

In the lighting device according to the present invention,
The region on the reflection surface of the scanning device irradiated with light emitted from one collimator lens among the plurality of collimator lenses is one virtual circumference or ellipse located on the reflection surface. Located in the circumference, and
Each region on the reflection surface of the scanning device to which light emitted from each of the collimating lenses other than the one collimating lens among the plurality of collimating lenses is irradiated is the one virtual circumference. Alternatively, it may be located on the circumference of the ellipse.

  In the illumination device according to the present invention, the region on the reflection surface irradiated with the light emitted from the certain one collimating lens is irradiated with the light emitted from each of the collimating lenses other than the certain one collimating lens. It may be larger than each region on the reflecting surface.

  In the illumination device according to the present invention, the plurality of collimating lenses may be located on one virtual circumference or elliptic circumference.

In the lighting device according to the present invention,
One collimating lens among the plurality of collimating lenses is located within one virtual circumference or ellipse circumference, and
A collimating lens other than the certain one collimating lens among the plurality of collimating lenses may be located on the one virtual circumference or ellipse circumference.

  In the illumination apparatus according to the present invention, the certain one collimating lens may be larger than each collimating lens other than the certain one collimating lens.

  In the illumination device according to the present invention, the emission ends of the plurality of optical fibers may be located on one virtual circumference or elliptic circumference.

In the lighting device according to the present invention,
The exit end of one optical fiber of the plurality of optical fibers is located within one virtual circumference or elliptic circumference, and
Outgoing ends of optical fibers other than the one optical fiber among the plurality of optical fibers may be located on the one virtual circumference or elliptic circumference.

The light source device according to the present invention comprises:
Multiple light sources;
A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers.

  In the light source device according to the present invention, the plurality of collimating lenses may be located on one virtual circumference or elliptic circumference.

In the light source device according to the present invention,
One collimating lens among the plurality of collimating lenses is located within one virtual circumference or ellipse circumference, and
A collimating lens other than the certain one collimating lens among the plurality of collimating lenses may be located on the one virtual circumference or ellipse circumference.

  In the light source device according to the present invention, the certain collimating lens may be larger than each collimating lens other than the certain one collimating lens.

  In the light source device according to the present invention, the emission ends of the plurality of optical fibers may be located on one virtual circumference or elliptic circumference.

In the light source device according to the present invention,
The exit end of one optical fiber of the plurality of optical fibers is located within one virtual circumference or elliptic circumference, and
Outgoing ends of optical fibers other than the one optical fiber among the plurality of optical fibers may be located on the one virtual circumference or elliptic circumference.

The projection apparatus according to the present invention
Any of the lighting devices according to the invention described above;
A spatial light modulator illuminated by light from the illumination device.

The projection device according to the present invention further comprises a relay optical system that relays light from the illumination device to the spatial light modulator,
The relay optical system may map an intermediate image formed by the illumination device onto a spatial light modulator.

  ADVANTAGE OF THE INVENTION According to this invention, the advancing direction of the high output light from a light source device can be controlled with high precision.

FIG. 1 is a diagram for explaining an embodiment of the present invention, and is a diagram showing a schematic configuration of an illumination device, a projection device, and a projection display device. FIG. 2 is a diagram illustrating an example of a positional relationship between the emission end of the optical fiber and the collimating lens in the light source device of the irradiation device included in the illumination device. FIG. 3 is a diagram illustrating another example of the positional relationship between the emission end of the optical fiber and the collimating lens in the light source device. FIG. 4 is a plan view showing a collimating lens array of the light source device. FIG. 5 is a perspective view showing a scanning device of the irradiation device. FIG. 6 is a plan view showing a reflection surface of the scanning device. FIG. 7 is a side view schematically showing the illumination device. FIG. 8 is a side view showing an example of the optical element of the illumination device. FIG. 9 is a side view showing another example of the optical element of the illumination device. FIG. 10 is a diagram corresponding to FIG. 4 and showing a modification of the light source device. FIG. 11 is a diagram corresponding to FIG. 6, and is a plan view showing a reflection surface of a scanning device used in combination with the light source device of FIG. 10. FIG. 12 is a diagram corresponding to FIG. 1 and showing a modification of the scanning device. FIG. 13 corresponds to FIG. 5 and is a perspective view showing the scanning device of FIG. FIG. 14 is a flowchart for explaining a control method of the scanning device of FIGS. 12 and 13. FIG. 15 is a side view showing a modification of the optical element. FIG. 16 is a diagram illustrating a modification of the projection device. FIG. 17 is a diagram illustrating another modification of the projection device. FIG. 18 is a diagram illustrating a reference example of the light source device.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale, the vertical / horizontal dimension ratio, and the like are appropriately changed and exaggerated from those of the actual product.

  In addition, as used in this specification, the shape and geometric conditions and the degree thereof are specified, for example, terms such as “parallel”, “orthogonal”, “identical”, length and angle values, etc. are strictly Without being bound by meaning, it should be interpreted including the extent to which similar functions can be expected.

  A projection video display device 10 shown in FIG. 1 includes a screen 15 and a projection device 20 that projects video light. The projection device 20 includes an illumination device 40 that illuminates an illuminated area LZ located on a virtual plane, a spatial light modulator 30 that is disposed at a position overlapping the illuminated area LZ, and is illuminated by the illumination device 40, and spatial light modulation. And a projection optical system 25 that projects the coherent light from the device 30 onto the screen 15. In the illustrated example, the projection optical system 25 includes a field lens 26 and a projection lens 27 in this order along the optical path. That is, in one embodiment described here, the illumination device 40 is incorporated in the projection device 20 as an illumination device for illuminating the spatial light modulator 30. In particular, in the present embodiment, the illumination device 40 illuminates the illuminated area LZ with coherent light, and the illumination device 40 is devised to make speckles inconspicuous.

  First, the illumination device 40 will be described. As shown in FIG. 1, the illuminating device 40 includes an optical element 50 that directs the traveling direction of light toward the illuminated region LZ, and an irradiation device 60 that irradiates the optical element 50 with light, particularly coherent light in this example. ,have. In the example shown in FIG. 1, the irradiation device 60 irradiates the optical element 50 with coherent light so that the coherent light scans over the optical element 50. Accordingly, at a certain moment, the region on the optical element 50 that is irradiated with the coherent light by the irradiation device 60 becomes a part of the surface of the optical element 50.

  The irradiation device 60 includes a light source device 61 that emits coherent light in a specific wavelength band, and a scanning device 70 that directs the traveling direction of light from the light source device 61 toward the optical element 50. Note that the optical module 45 is formed by the scanning device 70 and the optical element 50. The light source device 61 is formed as a high-output light source. The light source device 61 includes a plurality of light sources 62a to 62g, a plurality of optical fibers 64a to 64g provided corresponding to the respective light sources, and a plurality of collimating lenses 67a to 67g provided corresponding to the respective optical fibers. And.

  Each of the light sources 62a to 62g includes a laser light source that generates coherent light. The light source device 61 enables high output by using a plurality of laser light sources that generate laser light in the same wavelength band. The optical fibers 64a to 64g are members for carrying the light generated by the light sources 62a to 62g. Therefore, the light sources 62a to 62g can be arranged at positions separated from the illuminated area LZ illuminated by the illumination device 40. That is, by using the optical fibers 64a to 64g, it is possible to effectively cope with noise and heat generation of the light sources 62a to 62g, installation of cooling facilities for the light sources 62a to 62g, and the like. The collimating lenses 67a to 67g are members that adjust the optical path of the light emitted from the optical fibers 64a to 64g.

  In the illustrated example, one optical fiber 64a to 64g and one collimator lens 67a to 67g are provided for each of the light sources 62a to 62g. That is, the incident ends 64ax to 64gx of the optical fibers 64a to 64g are connected to the light sources 62a to 62g corresponding to the optical fibers 64a to 64g. Further, collimating lenses 67a to 67g corresponding to the optical fibers 64a to 64g are provided at positions facing the emission ends 64ay to 64gy of the optical fibers 64a to 64g, respectively. In the illustrated embodiment, first to seventh light sources 62a to 62g are provided, and correspondingly, first to seventh optical fibers 64a to 64g and first to seventh collimating lenses 67a to 67g are provided. It has been. Also in the illustrated example. The seven collimating lenses 67 a to 67 g are integrally held by a holding member 68 to form a collimating lens array 66.

  As shown in FIG. 1, in the present embodiment, the collimating lenses 67 a to 67 g parallelize the traveling direction of light emitted from the optical fibers 64 a to 64 g. In particular, the light generated by the different light sources 62 a to 62 g travels parallel to each other and travels toward the scanning device 70. For this reason, the optical fibers 64a to 64g are aligned in the direction of the emission ends 64ay to 64gy so that the light emission directions coincide with each other. Further, the collimating lenses 67a to 67g are arranged so that the optical axes are parallel to each other.

  2 and 3 exemplify the positional relationship between the emission ends 64ay to 64gy of the optical fibers 64a to 64g and the collimating lenses 67a to 67g. In the example shown in FIGS. 2 and 3, the sizes of the collimating lenses 67a to 67g are not constant among the plurality of collimating lenses 67a to 67g. For this reason, in the example shown in FIG. 2, the numerical aperture NA (Numerical Aperture) of light emitted from the optical fibers 64a to 64g is set to a different value from each other, while the emission ends 64ay to 64a of the optical fibers 64a to 64g are set. The distance between 64 gy and the collimating lenses 67a to 67g is kept constant. On the other hand, in the example shown in FIG. 3, since the NAs of the light emitted from the optical fibers 64a to 64g are the same, the distance between the emission ends 64ay to 64gy of the optical fibers 64a to 64g and the collimating lenses 67a to 67g is They are different from each other.

  Further, in both examples shown in FIGS. 2 and 3, the plurality of collimating lenses 67a to 67g are all arranged on the first virtual plane vfp1. The emission ends 64ay to 64gy of the optical fibers 64a to 64g are arranged on the second virtual plane vfp2 parallel to the first virtual plane vfp1 in the example shown in FIG. 2, but are shown in FIG. In the example, they are not arranged on a certain virtual plane. Moreover, although illustration is abbreviate | omitted, as a modification of the form shown by FIG. 3, the output ends 64ay-64gy of the optical fibers 64a-64g are arrange | positioned on the 2nd virtual plane vfp2, on the other hand, several collimate The lenses 67a to 67g may not be arranged on a certain virtual plane.

  FIG. 4 shows a state where the collimating lens array 66 is observed along the optical axis direction of the collimating lenses 67a to 67g. In the example shown in FIG. 4, one collimating lens 67a among the plurality of collimating lenses 67a to 67g is located inside one virtual circumference or elliptic circumference c1 located on the first virtual plane vfp1. The collimating lenses 67b to 67g other than one collimating lens 67a among the plurality of collimating lenses 67a to 67g are positioned on one virtual circumference or elliptical circumference c1. More specifically, in the example shown in FIG. 4, only the first collimating lens 67a among the first to seventh collimating lenses 67a to 67g is one virtual circle located on the first virtual plane vfp1. The second to seventh collimating lenses 67b to 67g are located inside the circumference or elliptical circumference c1 and are crossed by one virtual circumference or elliptical circumference c1. According to such an arrangement of the collimating lenses 67a to 67g, a plurality of collimating lenses can be arranged with high density. Further, from the viewpoint of arranging a plurality of collimating lenses at high density, the second to seventh collimating lenses 67b to 67g are arranged at equal intervals on one virtual circumference or elliptical circumference c1. Is preferred. In the example shown in FIG. 2, the second to seventh collimating lenses 67b to 67g have the same planar shape and are arranged at equal intervals on the circumference c1.

  FIG. 4 also shows the positions of the emission ends 64ay to 64gy of the optical fibers 64a to 64g corresponding to the collimating lenses 67a to 67g together with the collimating lenses 67a to 67g. In the example shown in FIG. 4, the optical fibers 64a to 64g corresponding to the collimator lenses 67a to 67g are located at positions overlapping with the optical axes of the collimator lenses 67a to 67g in the observation from the optical axis direction of the collimator lenses 67a to 67g. The emission ends 64ay to 64gy are arranged. That is, the emission end 64ay of one optical fiber 64a among the plurality of optical fibers 64a to 64g is located inside one virtual circumference or elliptic circumference c2 located on the virtual plane vfp2, and Outgoing ends 64by to 64gy of optical fibers 64b to 64g other than one optical fiber 64a among the plurality of optical fibers 64a to 64g are located on one virtual circumference or elliptic circumference c2. More specifically, the output end 64ay of the first optical fiber 64a among the plurality of optical fibers 64a to 64g is located inside one virtual circumference or elliptic circumference c2 on the second virtual plane vfp2. In addition, the emission ends 64by to 64gy of the second to seventh optical fibers 64b to 64g other than the first optical fiber 64a are located on one virtual circumference or elliptic circumference c2. In the example shown in FIG. 2, the emission ends 64by to 64gy of the second to seventh optical fibers 64b to 64g are arranged at equal intervals on the circumference c2.

  In particular, in the example shown in FIG. 4, one certain collimating lens 67a is larger than each collimating lens 67b-67g other than one certain collimating lens 67a. That is, the projected area of the first collimating lens 67a in the optical axis direction is larger than the projected areas of the second to seventh collimating lenses 67b to 67g in the optical axis direction. According to such a form, as described later, speckle can be effectively made inconspicuous even in a low output state in which only the first light source 62a is used.

  According to the light source device 61 having the above-described configuration, it is possible to emit a large amount of parallel light flux dispersed in a wide area, in other words, a large amount of light parallel light flux having a large spot diameter toward the scanning device 70. The light emitted from the light source device 61 can be converted into a parallel light beam with high accuracy for the reason described later.

  Next, the scanning device 70 will be described. As a specific example illustrated, the scanning device 70 includes a reflection device 75 having a reflection surface 79 a that reflects light from the light source 62, and a controller 72 connected to the reflection device 75. The direction of the reflective surface 79a of the reflective device 75 can be repeatedly varied within a predetermined movable range. When the direction of the reflecting surface 79a is repeatedly changed, the light emitted from the light source device 61 scans on the optical element 50.

  In the illustrated example, the reflection device 75 includes a reflection member 79 having a reflection surface 79a and a driving device 76 that rotationally drives the reflection member 79. As shown in FIGS. 1 and 5, the drive device 76 is configured as a motor as an example, and includes a casing 77 that functions as a stator and a shaft member 78 that functions as a rotor. The reflection member 79 is attached to the shaft member 78 and is rotatable around the first rotation axis Ra1 together with the shaft member 78. However, the reflecting surface 79a is not orthogonal to the rotation axis Ra1. In other words, the normal direction nd1 (see FIG. 3) of the reflecting surface 79a is not parallel to the rotation axis Ra1 and is inclined with respect to the rotation axis Ra1. Therefore, when the reflecting member 79 rotates about the rotation axis Ra1, the reflecting surface 79a changes its direction. At this time, if the rotation of the reflecting member 79 is constant, the reflecting surface 79a periodically changes its direction around the first virtual orthogonal surface Vp1 orthogonal to the rotation axis Ra1.

  By the way, in the combination with the light source device 61 described above, the reflection surface 79a of the reflection device 75 is preferably circular or elliptical in the observation from the normal direction nd to the reflection surface 79a. The light emitted from the light source device 61 described above can efficiently enter the circular or elliptical reflecting surface 79a. That is, the light from the light source device 61 can be used with excellent utilization efficiency without unnecessarily increasing the reflecting member 79 driven at a high speed by the driving device 76.

  Here, FIG. 6 shows an example of a planar shape of the reflecting surface 79a when observed from the normal direction nd. In FIG. 6, the regions on the reflection surface 79 a where the light emitted from each of the first to seventh light sources 62 a to 62 g of the light source device 61 can enter are first to seventh incident regions, respectively. It is shown as ie1 to ie7. As shown in FIG. 6, at any moment, the region on the reflecting surface 79a of the scanning device 70 irradiated with light emitted from one of the plurality of collimating lenses 67a to 67g is at least partially. In addition, the area on the reflecting surface 79a of the scanning device 70 irradiated with light emitted from a collimating lens other than the one collimating lens among the plurality of collimating lenses is not covered. In particular, in the illustrated example, the plurality of collimating lenses 67a to 67g are arranged apart from each other on the first virtual plane vfp1, and the traveling directions of the light from the corresponding optical fibers 64a to 64g are set to each other. Parallelize in the same direction. Therefore, as shown in FIG. 6, none of the first to seventh incident areas ie1 to ie7 overlap. That is, the light generated by the different light sources 62a to 62g is incident on different regions on the reflection surface 79a at an arbitrary moment. That is, the reflecting surface 79a can be dispersed and used effectively.

  Further, corresponding to the arrangement of the emission ends 64ay to 64gy and the collimating lenses 67a to 67g of the optical fibers 64a to 64g described above, a certain collimating lens 67a among the plurality of collimating lenses 67a to 67g at an arbitrary moment. A region ie1 on the reflection surface 79a of the scanning device 70 irradiated with the light emitted from is located within one virtual circumference or ellipse circumference c3 located on the reflection surface 79a, and includes a plurality of regions Each region ie2 to ie7 on the reflecting surface 79a of the scanning device 70 irradiated with light emitted from each of the collimating lenses 67b to 67g other than the certain one of the collimating lenses 67a to 67g is one. One virtual circumference or elliptical circumference c3. More specifically, the first incident region ie1 on the reflective surface 79a irradiated with the light emitted from the first collimating lens 67a is one virtual circumference or elliptical circumference c3 located on the reflective surface 79a. The second to seventh incident regions ie2 to ee7 on the reflection surface 79a of the scanning device 70 that are located inside and irradiated with the light emitted from each of the second to seventh collimator lenses 67b to 69g are One virtual circumference or elliptical circumference c3. When the first virtual plane vfp1 in which the collimating lenses 67a to 67g are arranged is not parallel to the reflecting surface 79a, the centers of the second to seventh collimating lenses 67b to 69g are positioned on the circumference. If so, the second to seventh incident areas ie2 to ie7 are located on the circumference of the ellipse.

  In particular, in the illustrated embodiment, the region ie1 on the reflection surface 79a irradiated with light emitted from a certain collimating lens 67a at any moment is a collimating lens other than the certain collimating lens 67a. It is larger than the areas ie2 to ee7 on the reflective surface 79a irradiated with the light emitted from each of 67b to 67g. More specifically, at an arbitrary moment, the area of the first incident region ie1 on the reflection surface 79a irradiated with the light emitted from the first collimating lens 67a is the second to seventh collimating lenses 67b to 67g. The area is larger than the area of each region ie2 to ie7 on the reflection surface 79a irradiated with the light emitted from each. According to such a form, as described later, speckle can be effectively made inconspicuous even in a low output state in which only the first light source 62a is used.

  Next, the optical element 50 will be described. The optical element 50 has an optical path control function that directs incident light to each region in a specific direction according to the position of the region. The optical element 50 described here corrects the traveling direction of the incident light to each region and directs it to a predetermined region LZ. This area is the illuminated area LZ. That is, the light from the irradiation device 60 irradiated to each region obtained by dividing the incident surface of the optical element 50 into a plane illuminates at least a part of the overlapping region after passing through the optical element 50.

  As an example, in the example shown in FIGS. 1 and 8, the optical element 50 may include a lens array 51 formed corresponding to the incident direction of light from the irradiation device 60. Here, the “lens array” is a collection of small lenses, also called unit lenses, and functions as an element that deflects the traveling direction of light by refraction or reflection. In the illustrated example, the optical element 50 diffuses the light incident on each region corresponding to each unit lens 51a so as to be incident on at least the entire illuminated region LZ. In other words, the optical element 50 illuminates the same illuminated area LZ by diffusing light incident from the irradiation device 60 into each area.

  In one specific example shown in FIG. 8, the optical element 50 includes a lens array 51 configured as a fly-eye lens in which unit lenses 51 a each including a convex lens are spread, and a condenser lens disposed to face the lens array 51. 52 or a field lens. In the optical element 50 of FIG. 8, the lens array 51 is disposed on the most incident light side of the optical element 50 and receives light from the irradiation device 60. Each unit lens 51a constituting the lens array 51 can converge incident light so as to follow an optical path of a light beam forming a predetermined divergent light beam. The condenser lens 52 is disposed on the surface defined by the convergence point of each unit lens 51a, and directs the light from each convex lens to the illuminated region LZ. In particular, according to the condenser lens 52, the light from each convex lens can be directed only to the same illuminated area LZ, and the illumination light from each direction is superimposed on the illuminated area LZ. In order to control the divergence angle of the diverging light emitted from the irradiating device 60, an adjusting means such as a collimator lens may be provided on the optical path before the lens array 51 is incident.

  Further, in another specific example shown in FIG. 9, the optical element 50 further includes a second lens array 53 disposed therebetween in addition to the lens array 51 and the condenser lens 52 shown in FIG. 8. Have. In the example shown in FIG. 9, the second lens array 53 is also configured as a fly-eye lens formed so as to cover unit lenses 53 a made of convex lenses, like the lens array 51. The second lens array 53 is arranged such that each unit lens 53 a is positioned on a convergence point of each unit lens 51 a of the lens array 51. In the optical element 50 of FIG. 9, each unit lens 53 a of the second lens array 53 diverges the light from the lens array 51. The divergent light from each unit lens 53 a of the second lens array 53 is superimposed on the illuminated area LZ by the condenser lens 52.

  Next, the spatial light modulator 30 will be described. The spatial light modulator 30 is disposed so as to overlap the illuminated area LZ. The spatial light modulator 30 is illuminated by the illumination device 40 to form a modulated image. The light from the illumination device 40 illuminates only the entire illuminated area LZ as described above. Therefore, it is preferable that the incident surface of the spatial light modulator 30 has the same shape and size as the illuminated region LZ irradiated with light by the illumination device 40. In this case, it is because the light from the illuminating device 40 can be utilized with high utilization efficiency for the formation of a modulated image.

  The spatial light modulator 30 is not particularly limited, and various known spatial light modulators can be used. For example, a spatial light modulator that forms a modulated image without using polarized light, such as a digital micromirror device (DMD), a transmissive liquid crystal microdisplay that forms a modulated image using polarized light, or a reflective LCOS ( Liquid Crystal On Silicon) can be used as the spatial light modulator 30.

  As in the example shown in FIG. 1, when the spatial light modulator 30 is a transmissive liquid crystal microdisplay, the spatial light modulator 30 illuminated in a planar shape by the illumination device 40 is coherent light for each pixel. By selecting and transmitting, a modulated image is formed on the screen of the display forming the spatial light modulator 30. The modulated image thus obtained is finally projected onto the screen 15 by the projection optical system 25 at the same magnification or scaled. Thereby, the observer can observe the image projected on the screen 15. The screen 15 may be configured as a transmissive screen or may be configured as a reflective screen.

  Next, the operation of the illumination device 40, the projection device 20, and the projection display device 10 having the above-described configuration will be described.

  First, the irradiation device 60 irradiates the optical element 50 with coherent light so as to scan the optical element 50. Specifically, coherent light in a specific wavelength band is generated by each of the light sources 62 a to 62 g of the light source device 61. The light generated by each of the light sources 62a to 62g propagates through the optical fibers 64a to 64g corresponding to the light sources 62a to 62g, and is emitted from the emission ends 64ay to 64gy of the optical fibers 64a to 64g. Light emitted from the optical fibers 64a to 64g is converted into a parallel beam by collimating lenses 67a to 67g disposed at positions facing the emission ends 64ay to 64gy. Then, as described above, the irradiation device 60 irradiates the scanning device 70 with a large amount of parallel light flux.

  As described above, in the present embodiment, the generated light is divided into the light sources 62a to 62g, and the generated light is conveyed and shaped into a parallel light beam. According to the present embodiment as described above, the light irradiated from the light source device 61 to the scanning device 70 can be converted into a parallel light beam with high accuracy for the following reason.

  When a large amount of light emitted from a large number of light sources is combined and conveyed by the optical fiber 99, the area of the emission end 99y of the optical fiber 99 needs to be increased as shown in FIG. In this case, the traveling direction of the emitted light from the optical fiber 99 is directed within a specific angle range corresponding to the configuration of the optical fiber 99. However, the outgoing light from the optical fiber 99 exits from each position of the outgoing end 99y so as to follow the optical path of the divergent light beam that diverges in the direction within this specific angular range. In other words, the light emitted from the optical fiber 99 is strictly divergent planar light. In this case, it is possible to adjust the optical axis of the light emitted from the optical fiber 99 by the collimating lens 98 disposed so as to face the emission end 99y of the optical fiber 99, but the optical path of all the light is increased. It cannot be paralleled with accuracy. On the other hand, according to the light source device 61 according to the present embodiment shown in FIG. 2 and FIG. 3, the separate optical fibers 64a to 64g are used for the respective light sources 62a to 62g. It is not necessary to make the 64 g emission ends 64ay to 64gy have a large aperture. For this reason, the light emitted from the light source device 61 can be converted into a parallel light beam with high accuracy.

  Next, the coherent light traveling from the light source device 61 to the scanning device 70 is reflected by the reflecting surface 79a of the reflecting device 75 in the scanning device 70 and the traveling direction thereof is changed. The direction of the reflecting surface 79a changes periodically. As a result, as can be understood from FIGS. 5 and 7, the incident position of the coherent light on the optical element 50 also changes periodically.

  The coherent light incident on each area of the optical element 50 is superimposed on the illuminated area LZ by the optical path adjustment function of the optical element 50. That is, the coherent light incident on each region of the optical element 50 from the irradiation device 60 is diffused or expanded by the optical element 50 and enters the entire illuminated region LZ. In this way, the irradiation device 60 can illuminate the illuminated region LZ with coherent light.

  As shown in FIG. 1, in the projection device 20, the spatial light modulator 30 is arranged at a position overlapping the illuminated area LZ of the illumination device 40. For this reason, the spatial light modulator 30 is illuminated in a planar shape by the illumination device 40, and forms an image by selecting and transmitting the coherent light for each pixel. This image is projected onto the screen 15 by the projection optical system 25. The coherent light projected on the screen 15 is diffused and recognized as an image by the observer.

  By the way, the coherent light projected on the screen interferes by diffusion and causes speckle. On the other hand, according to the illuminating device 40 described here, speckles can be made extremely inconspicuous as described below.

  In order to make speckles inconspicuous, it is effective to multiplex parameters such as polarization, phase, angle, and time and increase the mode. The mode here refers to speckle patterns that are uncorrelated with each other. For example, when coherent light is projected from different directions onto the same screen from a plurality of laser light sources, there are as many modes as the number of laser light sources. In addition, when coherent light from the same laser light source is projected onto the screen from different directions at different times, the mode will be the same as the number of times the incident direction of the coherent light has changed during a time that cannot be resolved by the human eye. Will exist. When there are a large number of these modes, the interference patterns of light are uncorrelated and averaged, and as a result, speckles observed by the observer's eyes are considered inconspicuous.

  In the illuminating device 40 described above, the coherent light is applied to the optical element 50 so as to scan the optical element 50. Further, the coherent light incident on each region of the optical element 50 from the irradiation device 60 illuminates the entire illuminated area LZ with the coherent light, but the illumination direction of the coherent light that illuminates the illuminated area LZ Are different from each other. And since the area | region on the optical element 50 in which coherent light injects changes with time, the incident direction of the coherent light to the to-be-illuminated area | region LZ also changes with time.

  Considering the illuminated area LZ as a reference, coherent light constantly enters each area in the illuminated area LZ, but the direction of incidence always changes as shown by an arrow A1 in FIG. It will be. As a result, the light forming each pixel of the image formed by the light transmitted through the spatial light modulator 30 is projected to a specific position on the screen 15 while changing the optical path over time as indicated by an arrow A2 in FIG. Will come to be.

  From the above, according to the illumination device 40 described above, the incident direction of the coherent light changes temporally at each position on the screen 15 displaying the image, and this change is This is a speed that cannot be resolved by the human eye. As a result, a non-correlated coherent light scattering pattern is multiplexed and observed in the human eye. Therefore, speckles generated corresponding to each scattering pattern are overlapped and averaged and observed by an observer. Thereby, speckles can be made very inconspicuous for an observer who observes the image displayed on the screen 15.

  Note that conventional speckles observed by humans include not only speckles on the screen caused by scattering of coherent light on the screen 15, but also scattering of coherent light before being projected on the screen. Speckle on the projection device side can also occur. The speckle pattern generated on the projection device side is projected onto the screen 15 via the spatial light modulator 30 so that it can be recognized by the observer. However, according to the present embodiment, the coherent light continuously scans on the optical element 50, and the coherent light incident on each region of the optical element 50 is covered with the spatial light modulator 30. The entire illumination area LZ is illuminated. That is, the optical element 50 forms a new wavefront that is separate from the wavefront used to form the speckle pattern, and is complex and uniform through the illuminated region LZ and further through the spatial light modulator 30. The screen 15 is illuminated. By forming a new wavefront in such an optical element 50, the speckle pattern generated on the projection device side is invisible.

  Incidentally, the scanning device 70 that changes the optical path of the light from the light source device 61 includes a reflection device 75 including a reflection member 79 that reflects the light from the light source device 61. The reflecting member 79 of the reflecting device 80 rotates around a rotation axis Ra1 that is not parallel to the normal direction nd1 of the reflecting surface 79a. Therefore, when the reflecting member 79 rotates, the direction of the reflecting surface 79a changes with time, and the change in the direction of the reflecting surface 79a has periodicity. For this reason, the traveling direction of the light reflected by the reflecting surface 79a changes with time, and the change in the traveling direction of the reflected light has periodicity. In particular, according to such a reflection device 75, the optical path can be greatly changed by a compact configuration and simple control. In addition, the reflective device 75 does not greatly change the occupied space with the change in the direction of the reflective surface 79a. Therefore, according to the present embodiment, it is possible to scan incident light over a wide area on the optical element 50 while saving space.

  Further, as can be understood from FIG. 5, when the illustrated scanning device 70 is used, the scanning path on the optical element 50 of the light incident on the optical element 50 from the irradiation device 60 is indicated by an arrow ARx. Moreover, it becomes a circular shape. That is, while using the scanning device 70 having a simple configuration, the incident positions of light on the optical element 50 can be distributed over a wide range, in other words, greatly expanded. Thereby, the incident angle range of the illumination light toward each position of the illuminated area LZ can be greatly expanded by effectively using the size of the optical element 50. As a result, speckle can be made inconspicuous.

  And according to this Embodiment, in combination with the scanning apparatus 70 which rotates the said reflective surface 79a centering | focusing on rotation-axis line Ra1 inclined with respect to the normal line direction nd1 of the reflective surface 79a, the light source device 61 has two or more. Light sources 62a-62g, a plurality of optical fibers 64a-64g provided corresponding to each of the light sources 62a-62g and transmitting light emitted from the corresponding light sources, and provided corresponding to the respective optical fibers 64a-64g. And a plurality of collimating lenses 67a to 67g for adjusting the optical path of the light emitted from the corresponding optical fiber. According to this embodiment, on the reflection surface 79a of the scanning device 70 irradiated with light emitted from any one of the plurality of collimating lenses 67a to 67g at any moment. The region may be at least partially not overlapped with the region on the reflecting surface 79a irradiated with light emitted from a collimating lens other than the one collimating lens among the plurality of collimating lenses 67a to 67g. it can. That is, light from the light source device 61 can be dispersed and applied to a wide area of the reflection surface 79a. Therefore, the power density of the light received by the reflecting surface 79a can be reduced, and thereby the deterioration of the reflecting surface 79a can be effectively prevented. Further, since the reflective surface 79a can be effectively used, the reflective surface 79a can be reduced in size. As a result, the high-power lighting device 40 can be effectively downsized.

  Further, according to the present embodiment, light emitted from the plurality of light sources 62a to 62g is dispersed from each of the emission ends 64ay to 64gy of the plurality of optical fibers 64a to 64g, instead of being combined. Can be injected. Therefore, compared with the case where synthetic light is used, the opening areas of the emission ends 64ay to 64gy of the optical fibers 64a to 64g are reduced, in other words, light emitted from the emission ends 64ay to 64gy of the optical fibers 64a to 64g. The spot diameter can be reduced. For this reason, it becomes possible to parallelize the traveling direction of the light emitted from the optical fibers 64a to 64g with higher accuracy using the collimating lenses 67a to 67g. As a result, the traveling direction of light can be controlled with higher accuracy, and the illuminated area can be illuminated with higher efficiency.

  That is, according to the present embodiment as described above, the traveling direction of the high-output light from the light source device 61 is highly accurate while suppressing deterioration of the reflecting surface 79a by the scanning device 70 that is sufficiently downsized. Can be controlled. As a result, it is possible to illuminate the desired region LZ brightly from the desired direction with high accuracy by the illumination device 40.

  Further, according to the present embodiment, as shown in FIG. 4, the emission end 64ay of one optical fiber 64a among the plurality of optical fibers 64a to 64g is located on the second virtual plane vfp2. The output ends 64by to 64gy of the optical fibers 64b to 64g other than the certain one optical fiber 64a among the plurality of optical fibers 64a to 64g, which are located within one virtual circumference or elliptical circumference c2, It is located on the one virtual circumference or ellipse circumference c2. With the configuration of the optical fibers 64a to 64g, one certain first collimating lens 67a among the plurality of collimating lenses 67a to 67g is one virtual circumference or ellipse located on the first virtual plane vfp1. Collimating lenses 67b to 67g other than the certain one collimating lens 67a among the plurality of collimating lenses 67a to 67g are positioned on the one virtual circle or ellipse c1. doing. Further, with the configuration of the light source device 61 described above, as shown in FIG. 6, light emitted from the certain collimator lens 67a among the plurality of collimator lenses 67a to 67g is irradiated at an arbitrary moment. The incident area ie1 on the reflection surface 79a of the scanning device 70 is located within one virtual circumference or ellipse circumference c3 located on the reflection surface 79a, and among the plurality of collimating lenses 67a to 67g. Each of the incident areas ie2 to ie7 on the reflection surface 79a of the scanning device 70 irradiated with light emitted from each of the collimating lenses 67b to 67g other than the certain one collimating lens 67a is the one virtual circle. It is located on the circumference or elliptical circumference c3. In this embodiment, the light from the light source device 61 is further uniformly distributed and irradiated on the reflecting surface 79a. Therefore, deterioration of the reflecting surface 79a can be avoided more efficiently, and more effective use of the reflecting surface 79a can be realized.

  Further, according to the present embodiment, as shown in FIG. 4, the certain one collimating lens 67a is larger than the respective collimating lenses 67b to 67g other than the certain one collimating lens 67a. Accordingly, as shown in FIG. 6, at any moment, the incident area ie1 on the reflection surface 69a irradiated with the light emitted from the certain collimating lens 67a becomes the certain collimating. It is larger than the areas ie2 to ee7 on the reflecting surface 69a irradiated with the light emitted from each of the collimating lenses 67b to 67g other than the lens 67a. According to this embodiment as described above, it is possible to irradiate light from the light source device 61 by uniformly dispersing the reflection surface 79a having a limited size.

  Further, according to the present embodiment, the light source device 61 includes a plurality of light sources 62a to 62g, and optical fibers 64a to 64g and collimating lenses 67a to 67g provided corresponding to the light sources 62a to 62g, respectively. doing. When such a light source device 61 is used, the output of the light source device 61 as a whole can be adjusted by turning on and off the outputs of the light sources 62a to 62g. According to the present embodiment, the certain collimating lens 67a is larger than the other collimating lenses 67b to 67g, and accordingly, the light passing through the certain collimating lens 67a is irradiated. The incident area ie1 on the reflecting surface 79a is larger than the incident areas ie2 to ie7 on the reflecting surface 79a irradiated with light having passed through each of the other collimating lenses 67b to 67g. According to such an embodiment, the scanning range on the optical element 50 scanned by the light passing through the certain collimating lens 67a is the optical element scanned by the light passing through each of the other collimating lenses 67b to 67g. It becomes larger than the scanning range above 50. In FIG. 7, the scanning range se1 on the optical element 50 scanned by the light passing through the first collimating lens 67a is the scanning range se2 on the optical element 50 scanned by the light passing through the second and third collimating lenses 67b and 67c. , Se3. Therefore, even when only one light source 62a among the plurality of light sources 62a to 62g is used, light scans within a large area on the optical element 50. That is, according to the present embodiment, even when only one light source 62a among the plurality of light sources 62a to 62g is used, light is incident on a relatively wide area located at the center on the reflecting surface 79a. Therefore, even in such use, light enters the wide region se1 of the optical element 50. Accordingly, the speckle reduction function is sufficiently exhibited regardless of the number of light sources 62a to 62g to be used, in other words, without depending on the magnitude of the output.

  As described above, according to the present embodiment, the traveling direction of the high-output light from the light source device 61 is increased while the deterioration of the reflecting surface 79a is suppressed by the scanning device 70 that is sufficiently downsized. The accuracy can be controlled. As a result, the desired region LZ can be illuminated with high accuracy from the desired direction by the illumination device 40.

  Various modifications can be made to the above-described embodiment. Hereinafter, an example of modification will be described with reference to the drawings. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts in the above embodiment are used for the parts that can be configured in the same manner as in the above embodiment. A duplicate description is omitted.

  The arrangement of the optical fibers 64a to 64g, the arrangement of the collimating lenses 67a to 67g, and the arrangement of the incident areas ee1 to ee7 on the reflection surface 79a of the light from each of the light sources 62a to 62g described in the above-described embodiment are illustrative. Not too much. As an example, various changes are possible as shown in FIG. 10 and FIG. 11 from the viewpoint of making light more uniformly incident on each region on the reflecting surface 79a.

  FIG. 10 is a diagram corresponding to FIG. 4 and shows a state in which a modification of the collimating lens array 66 is observed along the optical axis direction of the collimating lenses 67a to 67g. In the example shown in FIG. 10, the plurality of collimating lenses 67a to 67f are located on one virtual circumference or elliptic circumference c1 located on the first virtual plane vfp1. In particular, in the example shown in FIG. 10, the first to sixth collimating lenses 67a to 67f have the same planar shape and are arranged at equal intervals on the circumference c1. FIG. 10 also shows the positions of the emission ends 64ay to 64fy of the first to sixth optical fibers 64a to 64f corresponding to the collimating lenses 67a to 67f, along with the collimating lenses 67a to 67f. In the example shown in FIG. 10, the optical fibers 64a to 64f corresponding to the collimator lenses 67a to 67f are located at positions overlapping the optical axes of the collimator lenses 67a to 67f in the observation from the optical axis direction of the collimator lenses 67a to 67g. The emission ends 64ay to 64fy are arranged. That is, the emission ends 64ay to 64fy of the plurality of optical fibers 64a to 64f are located on one virtual circumference or elliptic circumference c2 located on the virtual plane vfp2. In particular, in the example shown in FIG. 10, the emission ends 64ay to 64fy of the first to sixth optical fibers 64b to 64f are arranged at equal intervals on the circumference c2.

  FIG. 11 also shows first to sixth incident areas ie1 to ie6 on the reflective surface 79a on which light having passed through the collimating lenses 67a to 67g shown in FIG. 10 can enter. Also in the example shown in FIG. 11, the region on the reflection surface 79 a of the scanning device 70 irradiated with light emitted from one of the plurality of collimating lenses 67 a to 67 f at an arbitrary moment is as follows. At least partially, it does not overlap with a region on the reflecting surface 79a of the scanning device 70 irradiated with light emitted from a collimating lens other than the one collimating lens among the plurality of collimating lenses 67a to 67f. Yes. Further, in the example shown in FIG. 10, the first to sixth collimating lenses 67a to 67f are arranged apart from each other on the first virtual plane vfp1 and corresponding to the first to sixth optical fibers 64a. ˜64f are converted into parallel luminous fluxes in the same direction. Therefore, as shown in FIG. 11, none of the first to sixth incident areas ie1 to ie6 overlap. In the example shown in FIG. 11, the incident areas ee <b> 1 to ee <b> 6 on the reflection surface 79 a of the scanning device 70 irradiated with the light emitted from each of the plurality of collimator lenses 67 a to 67 f at an arbitrary moment are as follows. It is located on one virtual circumference or elliptical circumference c3 located on the reflection surface 79a.

  Also in the examples shown in FIGS. 10 and 11, similarly to the above-described embodiment, the light generated by the different light sources 62a to 62g is different from each other in the regions ie1 to ee6 on the reflection surface 79a at an arbitrary moment. Is incident. That is, light can be dispersed and incident on a wide range of the reflecting surface 79a, and the same effects as those of the above-described embodiment can be achieved by effectively using the reflecting surface 79a.

  As yet another modification, in the above-described embodiment, the scanning device 70 has one reflective device 75. However, the present invention is not limited to this. As an example, as will be described below mainly with reference to FIGS. 12 to 14, the scanning device 70 reflects the light from the reflection surface 79 a of the reflection device 75 in addition to the reflection device 75 described above. You may make it further have the 2nd reflective device 80 containing the surface 84a.

  In the example shown in FIGS. 12 to 14, the second reflective device 80 can be configured in the same manner as the reflective device 75 described above. That is, the second reflection device 80 includes a second reflection member 84 having a second reflection surface 84a and a second driving device 81 that rotationally drives the second reflection member 84. The second drive device 81 includes a casing 82 and a shaft member 83 that is rotatably held by the casing 82. The shaft member 83 is rotatable around a second rotation axis Ra2 that coincides with the axial direction. The second reflecting member 84 is attached to the shaft member 83 and is rotatable around the second rotation axis Ra <b> 2 together with the shaft member 83. However, the second reflecting surface 84a is not orthogonal to the rotation axis Ra2. In other words, the normal direction nd2 of the second reflecting surface 84a is not parallel to the rotation axis Ra2 and is inclined with respect to the rotation axis Ra2. Accordingly, when the second reflecting member 84 rotates about the rotation axis Ra2, the second reflecting surface 84a changes its direction. At this time, if the second reflecting member 84 rotates at a constant speed, the second reflecting surface 84a periodically changes its direction around the second virtual orthogonal surface Vp2 orthogonal to the rotation axis Ra2. .

  Here, the change in the direction of the reflection surface 79a of the reflection device 75 and the change in the direction of the second reflection surface 84a of the second reflection device 80 may be synchronized. That is, one of the orientation of the reflecting surface 79a and the orientation of the second reflecting surface 84a may be directed in a predetermined direction according to the other orientation. In particular, the reflecting surface 79a and the second reflecting surface 84a may be operated so that the direction of the reflecting surface 79a and the direction of the second reflecting surface 84a are parallel to each other.

  In the example shown in FIGS. 12 and 13, the rotation axis Ra1 of the reflection surface 79a and the rotation axis Ra2 of the second reflection surface 84a are parallel to each other. The direction of rotation about the rotation axis Ra1 of the reflecting surface 79a and the direction of rotation about the rotation axis Ra2 of the second reflecting surface 84a are the same. And the rotation period of the reflective surface 79a and the rotation period of the 2nd reflective surface 84a are the same. As a result, the reflecting surface 79a and the second reflecting surface 84a are maintained in a state parallel to each other. The rotation direction of the reflection surface 79a around the rotation axis Ra1 is the rotation direction of the reflection surface 79a when the reflection surface 79a is observed from one side to the other side along the rotation axis Ra1 (FIG. 13). The direction of rotation about the rotation axis Ra2 of the second reflecting surface 84a is second reflected from the one side to the other side along the rotation axis Ra2 parallel to the rotation axis Ra1. This is the direction of rotation of the second reflecting surface 84a when the surface 84a is observed (arrow AR2 in FIG. 13).

  FIG. 14 shows an example of a method for controlling the orientation of the reflecting surface 79a and the second reflecting surface 84a by the controller 72. In the example shown in FIG. 14, when the operation of the scanning device 70 is started, first, the phase of the driving device 76 that rotationally drives the reflecting surface 79a is detected. At the same time, the phase of the second driving device 81 that rotationally drives the second reflecting surface 84a is detected. Then, the controller 72 specifies the phase shift amount of the driving device 76 and the phase of the second driving device 81. The controller 72 adjusts the driving device 76 and the second driving device 81 so that the phase of the driving device 76 and the phase of the second driving device 81 are the same based on the specified phase shift amount. Thereby, the reflective surface 79a of the reflective device 75 and the second reflective surface 84a of the second reflective device 80 are held in parallel and are rotationally driven by the corresponding driving devices 76 and 81, respectively.

  In the control method shown in FIG. 14, the phase of the driving device 76 and the phase of the second driving device 81 are confirmed until the operation of the scanning device 70 ends, for example, continuously or at a constant interval. . If there is a phase shift between the drive devices 76, 81, the shift is eliminated and the phase of the drive device 76 and the phase of the second drive device 81 are matched. In this way, the reflecting surface 79a and the second reflecting surface 84a can be maintained in a state parallel to each other while being driven to rotate.

  As described above, when the reflecting surface 79a and the second reflecting surface 84a are maintained in parallel, the traveling direction of the light traveling from the second reflecting surface 84a is parallel to the traveling direction of the light incident on the reflecting surface 79a. . On the other hand, the collimating lens array 66 of the light source device 61 is fixed, and the light emitted from the light source device 61 always travels from a certain direction to the reflection device 75. That is, the traveling direction of the light from the light source device 61 incident on the reflecting surface 79a is always constant. Therefore, the light reflected by the second reflecting surface 84a of the second reflecting device 80 always travels in a certain direction. In the illustrated example, light always enters from the irradiation device 60 toward the optical element 50 from a certain direction. That is, the light from the irradiation device 60 enters the optical element 50 so as to follow the optical path of the light beam forming the parallel light flux.

  Thus, when the emitted light from the irradiation device 60 is in a certain direction, handling of the emitted light, for example, conveyance becomes very easy. Further, unlike the case of divergent light flux, the optical path width through which the emitted light from the irradiation device 60 passes is constant, and the optical path width does not vary. Therefore, it can avoid effectively that the illuminating device 40 enlarges. Further, the optical element 50 irradiated with light from the irradiation device 60 guides the incident light to the illuminated region LZ as illumination light by bending the incident light to each region in different directions. And if the incident direction to the optical element 50 is constant, the design and manufacture of the optical element 50 can be simplified.

  From the viewpoint of avoiding an increase in the size of the apparatus, the reflecting surfaces 79a and 84a that can rotate around the axes Ra1 and Ra2 inclined with respect to the normal directions nd1 and nd2 correspond to the scanning path, It preferably has a circular outline. According to this example, it is possible to avoid an increase in the size of the scanning device 70 while effectively using the reflection surfaces 79a and 84a of the scanning devices 75 and 80. In addition, it is preferable that the second reflection surface 84 a of the second scanning device 80 is larger than the reflection surface 79 a of the scanning device 75. According to this example, the light whose optical path is expanded by the scanning device 75 can be effectively reflected by the second scanning device 80. That is, the scanning device 70 can avoid the enlargement of the scanning device 70 while enabling the above-described useful optical path control.

  As yet another modification, in the above-described embodiment, the light source device 61 includes a plurality of light sources 62a to 62g that emit light of the same wavelength band. However, the present invention is not limited to this, and the light source device 61 A plurality of light sources that emit light of different wavelength bands may be included. In this case, the illuminated area LZ can be illuminated with light of a color that cannot be reproduced with a single light source. In addition, the light source device 61 may include a plurality of light sources that emit light in wavelength bands corresponding to the three primary colors. In this example, the synthesized light applied to the illuminated region is subdivided for each wavelength band and incident on another spatial light modulator 30 for each wavelength band, or light in different wavelength bands is time-divisionally divided. The projection device 20 can project a color image by being emitted and the spatial light modulator 30 forming an image in a time division manner according to the wavelength band of the incident light.

  Further, in the above-described embodiment, the example in which the optical element 50 includes the lens array 51 is shown, but the present invention is not limited to this. As shown in FIG. 15, the optical element 50 may include a hologram recording medium 57. In the example shown in FIG. 15, the light irradiated from the irradiation device 60 and scanned on the hologram recording medium 57 enters each region on the hologram recording medium 57 so as to satisfy the diffraction condition of the hologram recording medium 57. It is incident at an angle. The light incident on each area of the hologram recording medium 57 from the irradiation device 60 is diffracted by the hologram recording medium 57 and illuminates areas overlapping each other at least partially. In the example shown in FIG. 15, light incident on each area of the hologram recording medium 57 from the irradiation device 60 is diffracted by the hologram recording medium 57 to illuminate the same illuminated area LZ. . For example, the light incident on each region of the hologram recording medium 57 from the irradiation device 60 may be superimposed on the illuminated region LZ to reproduce the image of the scattering plate.

  Furthermore, in the embodiment described above, the spatial light modulator 30 is arranged in the illuminated area LZ illuminated by the illumination device 40, but the present invention is not limited to this example. As an example, in the example shown in FIGS. 16 and 17, the incident surface 37a of the homogenizing optical system 37 is disposed in the illuminated region LZ. That is, the light from the illumination device 40 enters the homogenizing optical system 37. The light incident on the homogenizing optical system 37 propagates through the homogenizing optical system 37 while repeating total reflection, and is emitted from the homogenizing optical system 37. The illuminance at each position on the emission surface 37b of the homogenizing optical system 37 is made uniform. As the homogenizing optical system 37, for example, an integrator rod can be used.

  In the example shown in FIG. 16, the spatial light modulator 30 is disposed so as to face the exit surface 37b of the uniformizing optical system 37, and the spatial light modulator 30 is illuminated with a uniform light amount. ing. On the other hand, in the example shown in FIG. 17, the relay optical system 35 is disposed between the homogenizing optical system 37 and the spatial light modulator 30. In this example, the relay optical system 35 includes a first lens 35a and a second lens 35b in this order along the optical path. The position where the spatial light modulator 30 is arranged by the relay optical system 35 is a surface conjugate with the emission surface 37 b of the homogenizing optical system 37. For this reason, also in the example shown in FIG. 17, the spatial light modulator 30 is illuminated with a uniform light amount. Further, an intermediate image is formed in the illuminated area LZ by the illumination device 40 without using the uniformizing optical system 37, and the position of the intermediate image is a position corresponding to the exit surface 37b of the integrator rod 37 in FIG. The optical system 35 may be configured to map this intermediate image onto the spatial light modulator 30.

  Further, in the above-described embodiment, the motor having the shaft member 78 is exemplified as the driving device 76 of the reflection device 75 of the scanning device 70. However, the present invention is not limited to this example, and various devices, mechanisms, components, members, and the like to which the reflecting member 79 can be connected can be used as the driving device 76. For example, an outer rotor motor, a shaftless motor, a frameless motor, or the like can be used as the driving device 76 that drives the reflecting member 79.

  Further, in the above-described embodiment, the example in which the illumination device 40 is incorporated in the projection device 20 and the projection type image display device 10 is shown. However, the present invention is not limited to this, and the illumination device 40 is used for various applications such as an illumination device for a scanner. Can be applied.

  In addition, although the some modification with respect to embodiment mentioned above was demonstrated above, naturally, it is also possible to apply combining several modifications suitably.

DESCRIPTION OF SYMBOLS 10 Projection type display apparatus 15 Screen 20 Projection apparatus 25 Projection optical system 26 Field lens 27 Projection lens 30 Spatial light modulator 35 Relay optical system 37 Uniform optical system 40 Illumination apparatus 45 Optical module 50 Optical element 51 Lens array 51a Unit lens 52 Condenser lens 53 Second lens array 53a Unit lens 57 Hologram recording medium 60 Irradiation device 61 Light source devices 62a to 62g Light sources 64a to 64g Optical fibers 64ax to 64gx Incident end 64ay to 64gy Ejection end 66 Collimating lens arrays 67a to 67g Collimating lens 68 Holding Member 70 Scanning device 72 Controller 75 Reflecting device 76 Driving device 77 Casing 78 Shaft member 79 Reflecting member 79a Reflecting surface 80 Second reflecting device 81 Second driving device 82 Casing 83 Shaft Material 84 Second reflecting member 84a Second reflecting surface 98 Collimating lens 99 Optical fiber 99y Output end Ra1, Ra2 Rotating axis nd1, nd2 Normal direction Vp1, Vp2 Virtual plane LZ Illuminated area ie1-IE7 Incident area vfp1, vfp2 Virtual plane c1, c2, c3 circumference or ellipse circumference se1-se3 scanning region

Claims (17)

An optical element;
An irradiation device for irradiating the optical element with light so as to scan on the optical element,
The irradiation device includes:
A light source device for emitting light;
A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
The light source device
Multiple light sources;
A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
Said provided corresponding to each of the optical fibers, possess a plurality of collimating lenses for adjusting an optical path of light emitted from the corresponding optical fiber, and
The region on the reflection surface of the scanning device irradiated with light emitted from one collimating lens among the plurality of collimating lenses is at least partially in the one collimating lens among the plurality of collimating lenses. An illumination device that deviates from a region on the reflection surface of the scanning device irradiated with light emitted from a collimating lens other than the lens.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  Each region on the reflection surface of the scanning device to which light emitted from each of the plurality of collimating lenses is irradiated is located on one virtual circumference or ellipse circumference located on the reflection surface. The lighting device.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  The region on the reflection surface of the scanning device irradiated with light emitted from one collimator lens among the plurality of collimator lenses is one virtual circumference or ellipse located on the reflection surface. Located in the circumference, and
  Each region on the reflection surface of the scanning device to which light emitted from each of the collimating lenses other than the one collimating lens among the plurality of collimating lenses is irradiated is the one virtual circumference. Or the illuminating device located on the ellipse circumference.   The region on the reflection surface irradiated with light emitted from the one collimating lens is on the reflection surface irradiated with light emitted from each of the collimating lenses other than the one collimating lens. The lighting device according to claim 3, which is larger than each of the regions.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  The illuminating device, wherein the plurality of collimating lenses are located on one virtual circumference or ellipse circumference.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  One collimating lens among the plurality of collimating lenses is located within one virtual circumference or ellipse circumference, and
  A collimating lens other than the certain one collimating lens among the plurality of collimating lenses is located on the one virtual circumference or ellipse circumference.   The lighting device according to claim 6, wherein the certain one collimating lens is larger than each collimating lens other than the certain one collimating lens.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  The output end of each of the plurality of optical fibers is an illuminating device located on one virtual circumference or ellipse circumference.   An optical element;
  An irradiation device for irradiating the optical element with light so as to scan on the optical element,
  The irradiation device includes:
  A light source device for emitting light;
  A scanning device having a reflecting member including a reflecting surface for reflecting light from the light source device,
  The reflecting member is rotatable around a rotation axis inclined with respect to the normal direction of the reflecting surface,
  The light source device is
  Multiple light sources;
  A plurality of optical fibers provided corresponding to each light source, through which light emitted from the corresponding light source propagates;
  A plurality of collimating lenses that are provided corresponding to the respective optical fibers and adjust the optical path of the light emitted from the corresponding optical fibers,
  The exit end of one optical fiber of the plurality of optical fibers is located within one virtual circumference or elliptic circumference, and
  Each illumination end of optical fibers other than the certain one optical fiber among the plurality of optical fibers is located on the one virtual circumference or ellipse circumference.   Each region on the reflection surface of the scanning device to which light emitted from each of the plurality of collimating lenses is irradiated is located on one virtual circumference or ellipse circumference located on the reflection surface. The lighting device according to claim 1, 5 or 8.   The region on the reflection surface of the scanning device irradiated with light emitted from one collimator lens among the plurality of collimator lenses is one virtual circumference or ellipse located on the reflection surface. Located in the circumference, and
  Each region on the reflecting surface of the scanning device to which light emitted from each of the collimating lenses other than the one collimating lens among the plurality of collimating lenses is irradiated is the one virtual circumference. Or the illuminating device of Claim 1, 6, 7 or 9 located on an ellipse periphery.   The illuminating device according to claim 1, 2, or 8, wherein the plurality of collimating lenses are positioned on one virtual circumference or ellipse circumference.   One collimating lens among the plurality of collimating lenses is located within one virtual circumference or ellipse circumference, and
  The collimating lens other than the certain one collimating lens among the plurality of collimating lenses is located on the one virtual circumference or ellipse circumference, according to claim 1, 3, 4, or 9. Lighting device.   The illumination device according to claim 1, 2 or 5, wherein an emission end of each of the plurality of optical fibers is located on one virtual circumference or elliptic circumference.   The exit end of one optical fiber of the plurality of optical fibers is located within one virtual circumference or elliptic circumference, and
  Outgoing ends of optical fibers other than the one optical fiber among the plurality of optical fibers are located on the one virtual circumference or ellipse circumference, The illumination device according to 6 or 7.   The lighting device according to any one of claims 1 to 15,
  And a spatial light modulator illuminated by light from the illumination device.   A relay optical system that relays light from the illumination device to the spatial light modulator;
  The projection apparatus according to claim 16, wherein the relay optical system maps an intermediate image formed by the illumination device onto a spatial light modulator.

Images