JP6413533B2 - Article quality discrimination method, article quality discrimination system, and article manufacturing method - Google Patents

Description

  The present invention relates to an article quality discriminating method and an article quality discriminating system for discriminating the quality of an article manufactured by performing imprint processing continuously. Furthermore, the present invention relates to an article manufacturing method using the article quality discrimination method.

  In imprint technology, a pattern formed on a resin material is brought into contact with a substrate such as a wafer coated with a molding material (transfer material) by a mold (mold) having a fine uneven pattern formed on the surface by electron beam lithography or the like. It is a technology to transcribe. As such an imprint technique, for example, a technique called SFIL (Step and Flash Imprint Lithography), which performs optical imprint processing continuously on a plurality of sections set on one substrate, or a mold is used. There is known a technique for imprinting a long molded object or a molded object formed on a long substrate. Conventionally, a template manufactured by an electron beam lithography method is handled as a master (master template), a replica template is manufactured from the master template by an imprint method, and a substrate to be manufactured from the replica template by an imprint method A method of manufacturing such an article is also known.

  However, various types of undesired defects may occur due to the imprint process, and it is a challenge to set the defects to 0 (zero), but it is difficult to set them to 0 in practice.

  As a technique for detecting a defect in imprint processing, there are a technique using an image (Patent Documents 1 and 2) and a technique using a release force (Patent Documents 3 and 4). Although it is practically desirable to inspect all products for defects and the like, Patent Documents 1 to 4 do not assume that product inspection is easily performed at a mass production site.

JP-T-2006-514428 JP 2011-003616 A JP 2011-146447 A JP 2012-135987 A

  The present invention has been made in order to solve the above-mentioned problems, and the object thereof is an article quality discrimination method capable of easily detecting defects due to imprint processing, particularly in a mass production site, An object is to provide an article quality discrimination system and an article manufacturing method.

  An article quality discriminating method according to an embodiment of the present invention is an article quality discriminating method for discriminating the quality of an article manufactured by performing imprint processing continuously, and an image related to imprint processing. While acquiring data, an imprint processing process for performing one or more continuous imprint processes, an abnormality detection process for detecting an abnormality related to the imprint process, and an abnormality detection when an abnormality is detected in the abnormality detection process By detecting retroactively the image data acquired during the imprint process prior to the time, the presence or absence of an image abnormality is detected, and the time point when the image analysis process determines that there is no image abnormality. A pass / fail judgment step for judging pass / fail of the article using the critical point of the pass / fail judgment of the article.

  In the method for determining the quality of an article according to an embodiment of the present invention, the image analysis step includes: n-th (n is an integer equal to or larger than 2) imprint processing; and the n-th imprint process. There may be included an operation of performing a difference comparison with the image data at the nnth imprint process (m being smaller than n and an integer of 1 or more) before the print process.

  In the article quality determination method according to an embodiment of the present invention, a plurality of pieces of image data acquired in the imprint processing step are stored, and the plurality of pieces of image data stored in the image analysis step are stored. At least a part of the image data may be read out.

  In the article quality determination method according to the embodiment of the present invention, image data of the imprint process of the time when an image abnormality is detected may be left in the image analysis step.

  In the method for determining the quality of an article according to an embodiment of the present invention, a predetermined number of times including a time point at which an abnormality is detected in the abnormality detection step, or image data before a predetermined time including a time point at which an abnormality is detected. May be left.

  In the quality determination method for an article according to an embodiment of the present invention, a plurality of stored image data is a predetermined number of times until an abnormality is detected in the abnormality detection step, or until an abnormality is detected. The image data may be erased sequentially from the previous image data so that image data for a predetermined time remains.

  An article manufacturing method according to an embodiment of the present invention includes a quality discrimination step by the quality discrimination method.

  An article quality discriminating system according to an embodiment of the present invention is an article quality discriminating system that discriminates the quality of an article manufactured by performing imprint processing continuously, and is a plurality of consecutive inprints. An imprint processing device that performs print processing, an image acquisition device that is provided around the imprint processing device and acquires image data related to the imprint processing, and acquires various data for detecting an abnormality related to the imprint processing An abnormality detection device that is connected to at least the image acquisition device and the abnormality detection device, and when abnormality is detected by various data from the abnormality detection device, acquired at the time of imprint processing before the time when the abnormality was detected An image analysis device for detecting the presence or absence of an image abnormality by retroactively referring to the processed image data. The time when it is determined that there is no abnormality image by the device is used as the critical point of the quality determination of the article, determining the acceptability of the article.

According to the present invention, it is possible to easily detect a defect due to imprint processing, particularly in a mass production site.

FIG. 1 is a schematic diagram showing an article quality discrimination system according to an embodiment of the present invention. FIG. 2 is a flowchart showing an article quality discrimination method according to an embodiment of the present invention. FIG. 3 is a diagram illustrating an embodiment of a method for storing image data in a storage unit. FIG. 4 is a diagram showing an embodiment of a method for detecting an image abnormality in the image analysis process. FIG. 5 is a flowchart showing a modification of the article quality determination method. FIG. 6 is a flowchart showing a modification of the article quality determination method. FIG. 7 is a diagram illustrating a modification of the method for saving image data in the storage unit. FIG. 8 is a diagram illustrating a modification of the method for saving image data in the storage unit.

  Embodiments of the present invention will be described below with reference to the drawings. Drawing is an illustration and may exaggerate a characteristic part for explanation, and may differ from an actual thing. In addition, the present invention can be implemented with appropriate modifications without departing from the technical idea. Note that, in the following drawings, the same portions are denoted by the same reference numerals, and some detailed description may be omitted.

  First, the configuration of an article quality discrimination system according to an embodiment of the present invention will be described. FIG. 1 is a schematic diagram showing an article quality discrimination system according to the present embodiment.

  An article quality discrimination system 10 shown in FIG. 1 discriminates whether or not the quality of an article 60 manufactured by continuously performing imprint processing is good, and includes an imprint processing apparatus 20, an image acquisition apparatus 30, and an abnormality. A detection device 40 and an image analysis device 50 are provided.

  Among these, the imprint processing apparatus 20 performs imprint processing a plurality of times in succession. The imprint processing apparatus 20 holds a substrate 61 such as a wafer and positions the substrate 61 at a predetermined position, and above the substrate 61. And a chuck 23 for supporting the mold 22. Further, a dispenser head 24 for supplying a molding material 62 such as a liquid photocurable resin to the substrate 61 is provided above the substrate 61. Further, a light source 25 that irradiates light such as ultraviolet rays to the substrate 61 held on the stage 21 is disposed above the mold 22.

  The stage 21 moves the substrate 61 to a predetermined position by horizontally moving the substrate 61. The mold 22 has a fine concavo-convex pattern 22 a formed on the surface facing the substrate 61. The chuck 23 moves the mold 22 in the vertical direction to bring it into contact, thereby transferring the concave / convex pattern 22a of the mold 22 to the molding material 62 on the substrate 61, and a plurality of concave / convex patterns 22a on the molding material 62 on the substrate 61. Is shaped. The positioning of the stage 21 and the mold 22 may be performed based on the relative positional relationship between them. For example, the mold 22 may move horizontally, or both the stage 21 and the mold 22 move horizontally. May be. Similarly, in the contact between the mold 22 and the substrate 61, the stage 21 may be moved in the vertical direction while the mold 22 is fixed.

  In this case, the imprint processing apparatus 20 mainly executes the following steps (a) to (d). That is, the imprint processing apparatus 20 (a) supplies the molding material 62 from the dispenser head 24 onto the substrate 61 supported by the stage 21, and (b) brings the molding material 62 and the mold 22 into contact with each other. (C) The concave / convex pattern 22a of the mold 22 is transferred to the molding material 62, and (d) the molding material 62 and the mold 22 are separated.

  In the present embodiment, the article 60 to be subjected to quality discrimination is composed of a substrate 61 and a molding material 62 formed on the substrate 61.

  In the present embodiment, the imprint processing apparatus 20 performs a plurality of times of imprint processing continuously, and sequentially performs the imprint processing for a plurality of sections set on one substrate 61. It is an AND-repeat type device. However, the present invention is not limited to this, and a roll-to-roll method or a roll-to-sheet method may be used in which a long-shaped molded body or a molded body formed as a long-sized base material is imprinted with a mold. Moreover, the system which imprints continuously with respect to several separate board | substrates may be used. Therefore, the term “continuous” refers to a state in which the processing is continuously performed as a whole, including a case where the processing is performed without a break and a case where the processing is performed intermittently. As the imprint processing apparatus 20, a conventionally known imprint apparatus can be typically used.

  The image acquisition device 30 is provided, for example, around the imprint processing device 20 (above the chuck 23 in FIG. 1), and data of an image (still image or moving image) related to the imprint processing using the imprint processing device 20. Is something to get. The image acquisition device 30 may acquire, for example, an image related to any one or a plurality of states of steps (a) to (d) described above as the image data related to the imprint process. As the image acquisition device 30, for example, an imaging unit such as a camera, a light scattering detector, an optical interferometer, or the like may be used.

  When acquiring the image data related to the state of step (a), for example, the image acquisition device 30 that is a camera may capture an image related to the supply state of the molding material 62.

  Moreover, when acquiring the image data which concerns on the state of step (b), the image acquisition apparatus 30 which is a camera may image the state in which the to-be-molded material 62 spreads on the board | substrate 61, for example.

  Further, when acquiring the image data according to the state of step (c), for example, the image acquisition device 30 that is a camera generates bubbles in the molding material 62 that spreads between the mold 22 and the uneven pattern 22a. An image related to the property may be taken. Alternatively, for example, when the image acquisition device 30 that is a light scattering detector measures light scattering or the like, the properties of bubbles generated inside the molding material 62 that spreads between the mold 22 and the concave / convex pattern 22a are measured. You may get it.

  Moreover, when acquiring the image data which concerns on the state of step (d), even if the image acquisition apparatus 30 which is an optical interferometer acquires the image which concerns on the shape of the to-be-molded material 62 after shaping | molding by optical interference, for example good. Alternatively, the image acquisition device 30 that is a camera may capture an image of the separation between the mold 22 and the molding material 62 to which the plurality of concave and convex patterns 22a are transferred.

  Note that the image acquisition operation in steps (a) to (d) may be performed alone, or two or more operations may be performed in appropriate combination. The image data acquired in this way may be sent from the image acquisition device 30 to the image analysis device 50 and may be appropriately stored in the storage unit 51 of the image analysis device 50, for example.

  The abnormality detection device 40 is a device that acquires various data (information) for detecting an abnormality related to the imprint process. An anomaly detected by various data from the anomaly detection device 40 is an event that is different from a normal event that is observed in successive imprint processing steps.

  As such an abnormality, for example, when the mold release force (various data) when the concave / convex pattern 22a of the mold 22 is released from the molding material 62 exceeds a predetermined threshold, or the concave / convex pattern 22a of the mold 22 is covered. A case where the mold release speed (various data) when releasing from the molding material 62 exceeds a predetermined threshold can be mentioned. In this case, the abnormality detection device 40 may be a release force measuring device or a release speed measuring device.

  Further, the abnormality detection device 40 may be linked to another image acquisition device (or the image acquisition device 30). In this case, the detected abnormality is a case where a foreign object or a defect of the molding material 62 is found in image data (various data) captured by another image acquisition device (or image acquisition device 30). Also good. Furthermore, the abnormality detected by the various data from the abnormality detection device 40 can be detected when the value of the release force or the release speed being monitored exceeds a threshold value due to disturbance such as an earthquake, or other image acquisition device (or For example, the image captured by the image acquisition device 30) may be disturbed.

  The image analysis device 50 is connected to at least the image acquisition device 30 and the abnormality detection device 40. When the image analysis device 50 detects an abnormality from various data sent from the abnormality detection device 40, the image analysis device 50 refers to or analyzes the image data acquired at the time of the imprint process before the time when the abnormality is detected. Thus, the presence or absence of an image abnormality (abnormality recognized in the image data acquired by the image acquisition device 30) can be detected.

  In this case, the image analysis device 50 may be a storage calculation processing device such as a computer, and includes a storage unit 51, a calculation unit 52, and a display unit 53.

  Among these, the storage unit 51 stores and saves image data acquired by the image acquisition device 30 and various data acquired by the abnormality detection device 40. As the storage unit 51, for example, a known storage medium such as a hard disk (HD), a floppy disk (registered trademark) (FD), a compact disk (CD), a magnetic optical disk (MO), or a memory card may be used. Note that the storage unit 51 does not necessarily have to be provided inside the image analysis device 50, and data may be transmitted from the image analysis device 50 to the external storage unit 51.

  The calculation unit 52 performs various analyzes and calculations using image data or various data sent from the image acquisition device 30 or the abnormality detection device 40 and stored in the storage unit 51 as necessary. For example, the threshold value of various data acquired by the abnormality detection device 40 and various preset data is compared, or the image data acquired by the image acquisition device 30 is analyzed to determine whether there is an image abnormality. Etc. to perform various processes.

  Further, the display unit 53 displays the image data sent from the image acquisition device 30 or various data sent from the abnormality detection device 40 to visually transmit the information to the operator.

  Next, with reference to FIG. 1 and FIG. 2, the operation (article quality determination method) of the present embodiment having such a configuration will be described.

  First, while the image acquisition device 30 shown in FIG. 1 acquires image data related to imprint processing, the imprint processing device 20 performs imprint processing a plurality of times in succession (imprint processing step, FIG. 2). Step S101).

  In the meantime, in the imprint processing apparatus 20, the stage 21 moves the substrate 61 in the horizontal direction, thereby moving the position on the substrate 61 where the imprint process is performed below the dispenser head 24. Subsequently, the dispenser head 24 drops the molding material 62 onto a target location on the substrate 61. The stage 21 moves the substrate 61 in the horizontal direction so that the part on which the molding material 62 on the substrate 61 is dropped comes to a position facing the concave / convex pattern 22 a of the mold 22. Thereafter, the chuck 23 lowers the mold 22 to a predetermined position. At this time, the mold 22 is pressed against the molding material 62, and the molding material 62 is shaped by the uneven pattern 22 a of the mold 22. Next, light such as ultraviolet rays is irradiated by the light source 25, and this light passes through the mold 22 and reaches the substrate 61. Thereby, the to-be-molded material 62 of the location where the uneven | corrugated pattern 22a of the mold 22 was pressed is hardened | cured. Thereafter, the mold 22 is raised by the chuck 23, and the mold 22 is separated from the cured molding material 62 on the substrate 61. By sequentially repeating such an imprint process for one substrate 61, a plurality of uneven patterns (patterns obtained by transferring the uneven pattern 22a) having the same shape are formed on the molding material 62 on the substrate 61. .

  Thus, while the imprint processing apparatus 20 performs the imprint process, the image acquisition apparatus 30 acquires image data related to the imprint process for each shot, for example. As described above, the image data acquired by the image acquisition device 30 may be image data according to any one or more of the steps (a) to (d). The image data obtained in this way is sent from the image acquisition device 30 to the image analysis device 50 as image data for each shot, for example.

The plurality of image data acquired by the image acquisition device 30 is stored in the storage unit 51 of the image analysis device 50, for example. In this case, all of the plurality of image data acquired in the imprint processing step may be stored in the storage unit 51 (see FIG. 3). In FIG. 3, t = t _x indicates the x-th shot, and t = t ₁ indicates the first shot.

  During the imprint process, the abnormality detection device 40 acquires various data for detecting an abnormality related to the imprint process. As described above, the various data may be, for example, a release force or a release speed when the concave / convex pattern 22a of the mold 22 is released from the molding material 62, and other image acquisition devices (or image acquisition devices). It may be image data captured by the device 30). The abnormality detection device 40 may acquire various data for each shot, or may acquire it continuously regardless of the shot. Various data acquired in this way is sent from the abnormality detection device 40 to the image analysis device 50.

  The calculation unit 52 of the image analysis device 50 monitors the various data sent from the abnormality detection device 40 in this way, and uses the various data and the threshold value input in advance and stored in the storage unit 51 for each shot, for example. Are sequentially compared (step S102 in FIG. 2).

  The image analysis apparatus 50 detects that an abnormality relating to the imprint process has occurred by comparing various data with a threshold (an abnormality detection step, step S103 in FIG. 2).

  When no abnormality is detected in this abnormality detection process, that is, when various data does not exceed the threshold, the image analysis device 50 stores the image data of the shot sent from the image acquisition device 30 in the image analysis device 50. The image is stored in the unit 51, and the process proceeds to the next shot (step S104 in FIG. 2).

  On the other hand, when an abnormality is detected in the abnormality detection process, that is, when various data exceeds a threshold value, the image analysis apparatus 50 inputs the time before the time (shot) when the abnormality is detected (for example, the previous shot). The presence or absence of an image abnormality is detected by sequentially referring back to the image data acquired during the print process (image analysis step, step S105 in FIG. 2). In this case, the image analysis device 50 sequentially reads all or part of the plurality of image data stored in the storage unit 51 and detects the presence or absence of an image abnormality.

  Hereinafter, this image analysis process will be further described.

  First, the calculation unit 52 of the image analysis device 50 analyzes image data relating to a shot (hereinafter also referred to as an abnormal shot) when an abnormality is detected in the abnormality detection step (step S106 in FIG. 2). Subsequently, it is determined whether there is an image abnormality in the image data at the time of the abnormal shot (step S107 in FIG. 2). In this case, the determination as to whether or not there is an image abnormality in the image data may be automatically performed by the calculation unit 52 of the image analysis device 50 based on a predetermined standard, or by referring to the display unit 53, for example. The operator may perform the inspection visually.

  If no image abnormality is detected in the image data at the time of abnormal shot in step S107, the image analysis device 50 stores the image data at the time of abnormal shot sent from the image acquisition device 30 in the storage unit 51 of the image analysis device 50. Then, the image analysis process ends (step S108 in FIG. 2).

  On the other hand, if an image abnormality is detected in the image data at the time of an abnormal shot in step S107, the image analysis device 50 uses the new image data used for the next analysis (for example, image data relating to the shot immediately before the abnormal shot). Is read (step S109 in FIG. 2). Further, the image analysis device 50 stores image data at the time of an abnormal shot in which an image abnormality is detected in the storage unit 51 of the image analysis device 50 (step S110 in FIG. 2).

  Next, the calculation unit 52 of the image analysis device 50 analyzes the new image data (for example, image data related to the shot immediately before the abnormal shot) (step S111 in FIG. 2). Subsequently, it is determined whether or not there is an image abnormality in the new image data (step S112 in FIG. 2).

  If an image abnormality is detected in the new image data in step S112, the process returns to step S109 in FIG. 2, and the image analysis apparatus 50 again uses the new image data (for example, two before the abnormal shot) used for the next analysis. Image data related to the shot). Thus, as long as an image abnormality is detected in the image data in step S112, the process returns to step S109, and the image data is read in order and the analysis is continued.

  On the other hand, if no image abnormality is detected in the new image data in step S112, the image analysis process ends.

  After the image analysis process is finished, the quality (goodness) of the article 60 is determined using the time point (for example, a shot) at which the image analysis process (step S103 in FIG. 2) determines that there is no image abnormality as a critical point for the quality judgment of the article 60. (A pass / fail judgment step, step S113 in FIG. 2). For example, depending on a predetermined defect tolerance, a part or all of a plurality of shots up to a shot that is determined to have no image abnormality retroactively from a shot when an abnormality is detected in the abnormality detection process is regarded as a defective product. Determine. On the other hand, before the shot in which it is determined that there is no image abnormality, there is no abnormality in the molding material 62 that can be detected from the image data, so these shots are determined as non-defective products.

  Thereafter, it is determined whether or not to continue the imprint process by the imprint processing apparatus 20 (step S114 in FIG. 2). As a result, when it is determined that it is difficult to continue the imprint process, such as when it is necessary to adjust the imprint processing apparatus 20, the imprint process is stopped. On the other hand, when it is determined that the imprint process can be continued, for example, when there is no image abnormality in the image data in step S107 of FIG. 2, the imprint process is continued.

  Next, a method for detecting an image abnormality in the image analysis step (step S104 in FIG. 2) will be described more specifically with reference to FIGS. 4A to 4F are schematic views showing image data at the time of each shot.

  For example, it is assumed that an abnormality is detected in the abnormality detection step at the nth shot (n is an integer of 2 or more). In this case, as shown in FIG. 4A, when the image data acquired by the image acquisition device 30 at the n-th shot is referred to, the material to be molded 62 is greatly damaged (FIG. 4A). . 4A to 4F, the hatched portion indicates a defect generated in the molding material 62.

  Next, referring to the image data acquired by the image acquisition device 30 at the (n−1) -th shot immediately before the n-th shot, the abbreviated case of the n-th shot of the molding material 62. It is confirmed that a large breakage has occurred at the same position (FIG. 4B).

  In this manner, the shot numbers are sequentially traced back in the past, and it is confirmed whether or not a large breakage has occurred in the same position as above in the material to be molded 62 (FIGS. 4C and 4D).

  When the image data acquired by the image acquisition device 30 at the time of the (n−m + 1) th shot (m is smaller than n and is an integer of 1 or more) is referred to, damage to the molding material 62 is extremely small (FIG. 4 ( e)), the breakage of the molding material 62 cannot be observed in the (n−m) th shot (FIG. 4F). At this time, it can be understood that the material to be molded 62 is not damaged in a large amount during the (n−m + 1) -th to n-th shots.

  In this case, in the pass / fail determination step, some or all of the (n−m + 1) th to nth shots are determined to be defective according to the defect tolerance determined by the practitioner. On the other hand, before the (n−m) th shot, since there is no damage to the molding material 62 that can be detected from the image data acquired by the image acquisition device 30, these are determined as non-defective products.

  As described above, the image data at the n-th imprint process (shot) (n is an integer equal to or larger than 2) and the (n−m) th before the n-th imprint process (shot). (M is smaller than n and is an integer equal to or greater than 1) By sequentially performing the difference comparison with the image data at the time of the first imprint process, defects caused by the imprint process can be easily performed, particularly in mass production sites. And it can detect with high precision.

  As described above, according to the present embodiment, when an abnormality is detected in the abnormality detection step, by referring back to the image data acquired during the imprint process before the time when the abnormality was detected, Detect the presence or absence. Further, the quality of the article 60 is determined using the time point when it is determined that there is no image abnormality as the critical point for determining the quality of the article 60. Thereby, it is possible to easily detect a defect due to the imprint process particularly in a mass production site. In other words, the quality inspection of the article 60 can be performed more efficiently at the mass production site than in the case where it is determined whether the image abnormality has occurred for all of the image data acquired by the image acquisition device 30.

  Furthermore, according to the present embodiment, it is possible to provide an article manufacturing method that can efficiently manufacture an article 60 with stable quality by performing quality inspection of the article 60 efficiently at a mass production site. Can do. The article 60 includes a mold, an optical element, a magnetic recording medium, a semiconductor device, and the like.

Next, a modification of the present embodiment will be described with reference to FIGS. 5 to 8, the same parts as those in the embodiment shown in FIGS. 1 to 4 are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 5 shows a modification of the article quality discrimination method. In FIG. 5, a step (step S121 in FIG. 5) as to whether or not to evaluate various data acquired by the abnormality detection device 40 is interposed between step S101 (imprint processing step) and step S102. For example, the abnormality detection device 40 evaluates various data every predetermined number of shots, and determines whether or not the various data has exceeded a threshold at the time of a shot for evaluating the various data (abnormality detection step, FIG. 5). Step S103). On the other hand, at the time of a shot in which various data are not evaluated (ignored), the image data of the shot is stored in the storage unit 51 of the image analysis device 50, and the process proceeds to the next shot (step S122 in FIG. 5). The other processes are substantially the same as those shown in FIG. In this case, the quality inspection of the article 60 can be performed more efficiently compared to the case where all the various data acquired by the abnormality detection device 40 is evaluated.

  FIG. 6 shows a modification of the image analysis step (step S105) in the article quality determination method. In FIG. 6, when no image abnormality is detected in the image data at the time of shot in step S107 or step S112, the step of selecting the image data to be erased from the image data stored in the storage unit 51 (step S131). ) And a step of erasing the selected image data (step S132). The other processes are substantially the same as those shown in FIG.

FIG. 7 shows a modification relating to the image data storage method. In FIG. 7, the image data of all times (section in which the image abnormality is detected) is detected in the image analysis step (step S105), and all the previous image data is deleted. In FIG. 7, t = t _{m + 1} to t = t _n indicate shots in which an image abnormality is detected. In this case, all the image data from t = t _{m + 1} to t = t _n are stored in the storage unit 51. And all the image data before t = t _m are erased.

  Further, for example, the image data to be erased is determined in advance including a predetermined number of times (number of shots) including a time point (shot) when an abnormality is detected in the abnormality detection step (step S103) or a time point when an abnormality is detected. It is also possible to leave all image data before a certain time and erase all previous image data. The predetermined number of times and the predetermined time including the time point when the abnormality is detected are typically determined as follows. It was empirically composed of various mold information such as the density of the uneven pattern, the area of the uneven pattern, the liquid contact angle, and the rigidity, and the information of various molding materials such as the liquid contact angle, the rigidity, and the presence or absence of the adhesive material. A predetermined number of times and a predetermined time including a time point when the abnormality is detected are set so as to satisfy the image abnormality occurrence range.

Alternatively, for example, as shown in FIG. 8, a plurality of stored image data is detected in a predetermined number of times (number of shots) until an abnormality is detected in the abnormality detection step (step S103), or an abnormality is detected. The image data may be erased sequentially from the previous image data so that image data for a predetermined time until the remaining image data remains. In FIG. 8, image data from t = t _x to t = t _{x + 2} is stored in the storage unit 51, and image data from t = t _x−1 is deleted from the storage unit 51.

  As described above, by erasing a part of the image data stored in the storage unit 51, the storage capacity of the storage unit 51 can be used effectively.

  It is also possible to appropriately combine a plurality of constituent elements disclosed in the embodiment and the modification examples as necessary. Or you may delete a some component from all the components shown by the said embodiment and modification.

DESCRIPTION OF SYMBOLS 10 Article quality discrimination system 20 Imprint processing apparatus 21 Stage 22 Mold 22a Concavity and convexity pattern 23 Chuck 24 Dispenser head 25 Light source 30 Image acquisition apparatus 40 Abnormality detection apparatus 50 Image analysis apparatus 51 Storage part 52 Calculation part 53 Display part 60 Article 61 Substrate 62 Molding material

Claims (8)

A method for determining the quality of an article, wherein the quality of an article manufactured by continuously performing imprint processing is determined.
An imprint process step of performing one or more continuous imprint processes while acquiring image data related to the imprint process;
An abnormality detection process for detecting an abnormality related to imprint processing;
When an abnormality is detected in the abnormality detection step, by referring back to the image data acquired during the imprint process prior to the time when the abnormality was detected, the presence or absence of an image abnormality is detected, and an image analysis step,
Using the time point when it is determined that there is no image abnormality in the image analysis step as a critical point for determining the quality of the article, and determining the quality of the article, and a quality determination step ,
In the quality determination step, a part or all of an article before the critical point is determined as a defective product, and an article after the critical point is determined as a good product .   The image analysis step includes image data at the n-th (n is an integer greater than or equal to 2) imprint process, and n−m (m is n) before the n-th imprint process. The method for determining the quality of an article according to claim 1, further comprising an operation of performing a difference comparison with image data at the time of the first imprint process (which is smaller and is an integer of 1 or more). A plurality of image data acquired in the imprint processing step is stored,
The article quality determination method according to claim 1, wherein in the image analysis step, at least a part of the plurality of stored image data is read out.   4. The method of determining the quality of an article according to claim 3, wherein, in the image analysis step, image data of imprint processing at the time when an image abnormality is detected is left.   The article quality determination method according to claim 3, wherein image data of a predetermined number of times including a time point at which an abnormality is detected in the abnormality detection step or a predetermined time before the time point at which the abnormality is detected is left.   A plurality of stored image data are stored in the most recent time so that image data of a predetermined number of times until an abnormality is detected in the abnormality detection step or a predetermined time until an abnormality is detected remains. 4. The method for discriminating article quality according to claim 3, wherein the article is sequentially erased from image data.   A method for manufacturing an article, comprising a quality discrimination step by the quality discrimination method according to any one of claims 1 to 6. An article quality discrimination system for discriminating the quality of an article manufactured by performing imprint processing continuously,
An imprint processing apparatus that performs imprint processing multiple times in succession;
An image acquisition device provided around the imprint processing device for acquiring image data related to the imprint processing;
An anomaly detection device that acquires various data for detecting an anomaly related to imprint processing;
At least when connected to the image acquisition device and the abnormality detection device and an abnormality is detected by various data from the abnormality detection device, the image data acquired at the time of the imprint process before the time when the abnormality was detected is traced back. An image analysis device that detects presence or absence of an image abnormality by referring to, and
The point in time when the image analysis apparatus determines that there is no image abnormality is used as a critical point for determining the quality of the article, and a part or all of the article before the critical point is determined as a defective product, and after the critical point. The quality determination system of an article which judges the quality of an article by discriminating the article as non-defective .

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