JP6402058B2 - Substrate processing apparatus, semiconductor device manufacturing method, and program - Google Patents

Description

  The present invention relates to a substrate processing apparatus, a semiconductor device manufacturing method, and a program.

  Conventionally, in a structure of a semiconductor device manufacturing apparatus having a raw material supply nozzle in a substrate processing chamber, when processing a patterned wafer having a trench or the like, an increase in gas consumption due to an increase in specific surface area, or unevenness due to generated by-products Film formation (loading effect) occurs.

  In addition, according to recent highly integrated semiconductor device manufacturing technology, the film thickness difference within the processing substrate surface, which has been allowed up to now, has a large effect on product yield and device performance. There is a need for technology to improve performance.

  From such a background, Patent Document 1 provides a processing gas introduction nozzle 22a that introduces a processing gas a with a large supply amount into the inner tube 2 and a processing gas introduction nozzle 22b that introduces a processing gas b with a small supply amount. A configuration is disclosed in which the horizontal angle of the processing gas introduction nozzle 22b is fixed toward the vicinity of the center of the substrate by synchronizing the horizontal angle of the processing gas introduction nozzle 22a with the rotation operation of the boat on which a plurality of substrates are mounted. . However, there is still a problem that the film thickness uniformity in the processing substrate surface is deteriorated.

JP 2011-029441 A

  An object of this invention is to provide the structure which improves the in-plane film thickness uniformity of a board | substrate.

According to one aspect of the present invention, a gas supply system having at least a plurality of gas supply pipes for supplying a gas containing a raw material gas into a processing chamber, and a gas pipe for supplying the raw material gas to the gas supply pipe; A gas supply control system having at least a flow rate controller that controls the flow rate of the source gas provided in the gas pipe, and controls the flow rate controller, respectively, and is supplied from the gas supply pipe to the processing chamber. that controls the flow rate of the raw material gas, while adjusting the flow rate of the gas containing at least said raw material gas supplied into the processing chamber to each of the gas supply pipe, out of the plurality of gas supply pipes, the processing chamber the gas supply pipe toward the outer peripheral portion of the substrate the flow rate and flow rate of the gas containing the raw material gas supplied, are disposed in the processing chamber from the gas supply pipe toward a center of the substrate disposed Configuration including a control unit for controlling so as to be larger than the flow rate and flow rate of the gas containing the raw material gas to be al supply, is provided.

  According to the present invention, the in-plane film thickness uniformity of the substrate can be improved.

It is a perspective view of the substrate processing apparatus used suitably by embodiment of this invention. It is a schematic block diagram of the processing furnace of the substrate processing apparatus used suitably by embodiment of this invention, and is a figure which shows a processing furnace part with a longitudinal cross-sectional view. FIG. 3 is a cross-sectional view taken along line AA in FIG. 2 and is a diagram illustrating an example of gas supply in the embodiment of the present invention. It is a block diagram which shows the structure of the controller used suitably with the substrate processing apparatus shown in FIG. It is a figure which shows the example of gas supply in the 2nd Embodiment of this invention. It is a figure which shows the example of gas supply in the 3rd Embodiment of this invention. It is a figure which shows the example of gas supply in the 4th Embodiment of this invention. It is a schematic block diagram of the processing furnace of the substrate processing apparatus used suitably by other embodiment of this invention, and is a figure which shows a processing furnace part with a longitudinal cross-sectional view.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<Configuration of substrate processing apparatus>
In the mode for carrying out the present invention, a configuration example of a substrate processing apparatus that performs a substrate processing step as one step of a manufacturing process of a semiconductor device (IC) will be described with reference to FIG. In the following description, a case where the substrate processing apparatus is applied to a vertical substrate processing apparatus that performs film formation processing will be described, but the present invention can also be applied to a vertical substrate processing apparatus that performs oxidation, diffusion processing, and the like.

  FIG. 1 is a perspective view of a substrate processing apparatus to which the present invention is applied. As shown in FIG. 1, a substrate processing apparatus 101 according to an embodiment of the present invention includes a housing 111 and a wafer carrier for transporting a wafer 200, which is a substrate made of silicon or the like, into and out of the housing 111. The cassette 110 is used as the (substrate container).

  A cassette stage (substrate container delivery table) 114 is installed on the front front side of the housing 111. The cassette 110 is configured to be loaded and placed on the cassette stage 114 by an in-process transfer device (not shown) outside the casing 111, and to be unloaded from the cassette stage 114 to the outside of the casing 111. ing.

  A cassette shelf (substrate container mounting shelf) 105 is installed at a substantially central portion in the front-rear direction in the casing 111. The cassette shelf 105 is configured to store a plurality of cassettes 110 in a plurality of rows and a plurality of rows. A transfer shelf 123 is provided as a part of the cassette shelf 105, and a cassette 110 to be transferred by a wafer transfer mechanism 125 described later is stored in the transfer shelf 123.

  A cassette carrying device (substrate container carrying device) 118 is installed between the cassette stage 114 and the cassette shelf 105. The cassette transport device 118 includes a cassette elevator (substrate container lifting mechanism) 118a that can be moved up and down while holding the cassette 110, and a cassette horizontal transport mechanism (substrate container horizontal transport mechanism) that can operate horizontally while holding the cassette 110. 118b. The cassette transport device 118 can transport the cassette 110 between the cassette stage 114, the cassette shelf 105, and the transfer shelf 123 by the linkage operation of the cassette elevator 118 a and the cassette horizontal transport mechanism 118 b.

  A wafer transfer mechanism (substrate transfer mechanism) 125 is installed behind the cassette shelf 105. The wafer transfer mechanism 125 includes a wafer transfer device (substrate transfer device) 125a capable of rotating or linearly moving the wafer 200 in the horizontal direction, and a wafer transfer device elevator (substrate transfer device) for raising and lowering the wafer transfer device 125a. Mounting device lifting mechanism) 125b. Further, the wafer transfer device 125a includes a tweezer (substrate transfer holder) 125c that holds the wafer 200 in a horizontal posture. The wafer 200 is picked up from the cassette 110 on the transfer shelf 123 by the linked operation of the wafer transfer device 125a and the wafer transfer device elevator 125b, and is loaded into the boat (substrate holder) 217 described later (charging). Or the wafer 200 can be detached from the boat 217 (discharged) and stored in the cassette 110 on the transfer shelf 123.

  A processing furnace 202 is provided on the upper rear side of the casing 111. The lower end of the processing furnace 202 is configured to be opened and closed by a furnace port shutter (furnace port opening / closing mechanism) 147. The configuration of the processing furnace 202 will be described later.

  Below the processing furnace 202, a boat elevator (substrate holder lifting mechanism) 115 is installed as a mechanism for moving the boat 217 up and down and transporting it into and out of the processing furnace 202. The boat elevator 115 is provided with an arm 128 as a lifting platform. A seal cap 219 is installed on the arm 128 in a horizontal posture. The seal cap 219 functions as a lid that supports the boat 217 vertically and that hermetically closes the lower end of the processing furnace 202 when the boat 217 is raised by the boat elevator 115.

  The boat 217 includes a plurality of wafer holding members 212, and aligns a plurality of (for example, about 50 to 150) wafers 200 in a horizontal posture in the vertical direction with the centers thereof aligned. Thus, it is configured to be stacked and held in multiple stages. The detailed configuration of the boat 217 will be described later.

<Outline of operation of substrate processing apparatus>
Next, an outline of the operation of the substrate processing apparatus 101 according to the present invention will be described with reference to FIG.
The substrate processing apparatus 101 is controlled by a controller 280 described later. First, the cassette 110 is placed on the cassette stage 114 by an in-process transfer device (not shown).

  The cassette 110 on the cassette stage 114 is automatically transported to a designated position on the cassette shelf 105 by the cassette transport device 118, delivered, temporarily stored, and then again stored by the cassette transport device 118. It is transported from the storage position of the cassette shelf 105 to the transfer shelf 123. Alternatively, the cassette 110 on the cassette stage 114 is directly transferred to the transfer shelf 123 by the cassette transfer device 118.

  When the cassette 110 is transferred to the transfer shelf 123, the wafer 200 is picked up from the wafer loading / unloading port of the cassette 110 by the tweezer 125c of the wafer transfer device 125a, and the wafer transfer device 125a, the wafer transfer device elevator 125b, and the like. The boat 217 is loaded (charged) by the linkage operation. The wafer transfer device 125a that delivered the wafer 200 to the boat 217 returns to the cassette 110 side, picks up the next wafer 200 from the cassette 110, and loads it into the boat 217.

  When a predetermined number of wafers 200 are loaded into the boat 217, the furnace port shutter 147 that has closed the lower end of the processing furnace 202 is opened, and the lower end of the processing furnace 202 is opened. Subsequently, the seal cap 219 on which the boat 217 is placed is raised by the boat elevator 115, whereby the boat 217 holding the processing target wafer 200 group is loaded into the processing furnace 202 (boat loading). After boat loading, the lower end opening of the processing furnace 202 is closed by the seal cap 219, and arbitrary processing is performed on the wafer 200 in the processing furnace 202. Such processing will be described later.

  After the processing, the wafer 200 and the cassette 110 are paid out to the outside of the casing 111 by a procedure reverse to the procedure described above. That is, the seal cap 219 on which the boat 217 is placed is lowered by the boat elevator 115, and the wafer 200 on the boat 217 is picked up by the wafer transfer mechanism 125 and transferred to the cassette 110 on the transfer shelf 123. The cassette 110 on the transfer shelf 123 is temporarily stored in the cassette shelf 105 by the cassette transport device 118 and then transported to the cassette stage 114 or directly by the cassette transport device 118. It is conveyed to. The cassette 110 on the cassette stage 114 is paid out to the outside of the housing 111 by the in-process transfer device.

<Processing furnace configuration>
Next, the configuration of the processing furnace 202 according to the present embodiment will be described with reference to FIGS.

(Reaction tube)
The processing furnace 202 includes a vertical reaction tube 203 inside thereof. The reaction tube 203 has a substantially cylindrical shape in which the upper end is closed and the lower end is opened. The reaction tube 203 is arranged vertically so that the opened lower end faces downward and the center line in the cylinder direction is vertical. And fixedly supported by the casing 111. In this example, the reaction tube 203 is integrally formed in a substantially cylindrical shape with a material having high heat resistance such as quartz (SiO ₂ ) or silicon carbide (SiC).
In the reaction tube 203, a processing chamber 201 is formed which is stacked in multiple stages in a horizontal posture by a boat 217 as a substrate holder and accommodates and processes a plurality of wafers 200. The inner diameter of the reaction tube 203 is set to be larger than the maximum outer diameter of the boat 217 that holds the wafer 200 group.
The lower end portion of the reaction tube 203 is hermetically sealed by a furnace port portion 209 whose horizontal cross section is a substantially circular ring shape. The reaction tube 203 is detachably attached to the furnace port portion 209 for maintenance and inspection work and cleaning work. Since the furnace port portion 209 is supported by the casing 111, the reaction tube 203 is installed vertically to the casing 111.

(Exhaust line)
An exhaust pipe 231 serving as an exhaust line for exhausting the atmosphere in the processing chamber 201 is connected to a part of the side wall of the furnace port portion 209. An exhaust port 205 for exhausting the atmosphere in the processing chamber 201 is formed at a connection portion between the furnace port unit 209 and the exhaust pipe 231. In the exhaust pipe 231, a pressure sensor 245, an APC (Auto Pressure Controller) valve 243 as a pressure adjustment valve, and a vacuum pump 246 as a vacuum exhaust device are provided in order from the upstream. The vacuum pump 246 is configured to be evacuated so that the pressure in the processing chamber 201 becomes a predetermined pressure (degree of vacuum). The APC valve 243, the pressure sensor 245, and the vacuum pump 246 are electrically connected to the controller 280 to constitute a pressure control system.

(Substrate holder)
A seal cap 219 that closes the lower end opening of the furnace port 209 is brought into contact with the furnace port 209 from the lower side in the vertical direction. The seal cap 219 is formed in a disk shape having an outer diameter equal to or greater than the outer diameter of the reaction tube 203, and the disk shape is maintained in a horizontal posture by the boat elevator 115 installed vertically outside the reaction tube 203. In such a state, it is configured to be raised and lowered in the vertical direction.
On the seal cap 219, a boat 217 as a substrate holder for holding the wafer 200 is vertically supported. The boat 217 includes a pair of upper and lower end plates 210 and 211, and a plurality of, in this example, four wafer holding members 212 provided vertically between the both end plates 210 and 211. The end plates 210 and 211 and the wafer holding member 212 are made of a material having high heat resistance such as quartz (SiO ₂ ) or silicon carbide (SiC).
Each wafer holding member 212 is provided with a plurality of holding grooves carved in the horizontal direction at equal intervals in the longitudinal direction. The peripheral edges of the wafers 200 are respectively inserted into the holding grooves at the same step in the plurality of wafer holding members 212, so that the plurality of wafers 200 are in a horizontal posture and in a state where the centers of the wafers are aligned with each other. It is configured to be stacked and held in multiple stages.

In addition, between the boat 217 and the seal cap 219, for example, a plurality of disk-shaped heat insulating plates 218 made of a heat-resistant material such as quartz (SiO ₂ ) or silicon carbide (SiC) are arranged in a horizontal posture in a multistage manner. It is comprised so that it may be laminated | stacked and hold | maintained. The heat insulating plate 218 prevents heat from the heater 207 described later from being transmitted to the furnace port portion 209 side.

A boat rotation mechanism 267 that rotates the boat 217 is provided below the seal cap 219 (on the side opposite to the processing chamber 201). The boat rotation shaft 255 of the boat rotation mechanism 267 passes through the seal cap 219 and supports the boat 217 from below. By rotating the boat rotation shaft 255, the wafer 200 can be rotated in the processing chamber 201. The seal cap 219 is configured to be lifted and lowered in the vertical direction by the boat elevator 115 described above, and thereby, the boat 217 can be transported into and out of the processing chamber 201.
The boat rotation mechanism 267 and the boat elevator 115 are electrically connected to the controller 280 to constitute a drive control system.

(heater)
Outside the reaction tube 203, a heater 207 as a heating mechanism for heating the inside of the reaction tube 203 uniformly or with a predetermined temperature distribution is provided so as to surround the reaction tube 203. The heater 207 is vertically installed by being supported by the casing 111 of the substrate processing apparatus 101, and is configured by a resistance heater such as a carbon heater, for example.
A temperature sensor 263 is installed in the reaction tube 203 as a temperature detector. The heater 207 and the temperature sensor 263 are electrically connected to the controller 280 to constitute a temperature control system.

(Gas supply system)
In the processing chamber 201, a nozzle 410 (first gas supply pipe), a nozzle 420 (second gas supply pipe), and a nozzle 430 (purge gas supply pipe) as gas supply pipes penetrate the side wall of the furnace port portion 209. Is provided. Gas pipes 310 and 320 for supplying source gas are connected to the nozzles 410 and 420, respectively. The nozzle 430 is connected to a gas pipe 330 for supplying an inert gas as a purge gas, for example. As described above, the reaction tube 203 is provided with the three nozzles 410, 420, 430 and the three gas pipes 310, 320, 330.

  Gas supply holes 410a, 420a, and 430a for supplying (spouting) gas are provided on the side surfaces of the nozzles 410, 420, and 430, respectively. The gas supply holes 410 a and 430 a are opened to face the center of the reaction tube 203. The gas supply hole 420a is opened to face the outer periphery of the reaction tube 203. A plurality of the gas supply holes 410a, 420a, 430a are provided from the lower part to the upper part of the reaction tube 203, have the same opening area, and are provided at the same opening pitch.

  The gas pipes 310, 320, and 330 have mass flow controllers (MFCs) 312, 322, and 332 that are flow rate controllers (flow rate control units) that sequentially control flow rates from the upstream side, and valves 314, 324, and 334 that are on-off valves, respectively. Is provided. Nozzles 410, 420, and 430 are connected to the distal ends of the gas pipes 310, 320, and 330, respectively. The nozzles 410, 420, and 430 are configured as L-shaped long nozzles, and the horizontal portion thereof is provided so as to penetrate the side wall of the furnace port portion 209. The vertical portions of the nozzles 410, 420, and 430 are in an annular space formed between the inner wall of the reaction tube 203 and the wafer 200, and upward (upward in the stacking direction of the wafer 200) along the inner wall of the reaction tube 203. It is provided so as to rise upward (that is, so as to rise from one end side to the other end side of the wafer arrangement region). That is, the nozzles 410, 420, and 430 are provided along the wafer arrangement region in a region that horizontally surrounds the wafer arrangement region on the side of the wafer arrangement region where the wafers 200 are arranged.

  As described above, the gas supply method according to the present embodiment is an annular vertically long space defined by the inner wall of the reaction tube 203 and the ends of the stacked wafers 200, that is, a cylindrical shape. Gas is transferred via nozzles 410, 420, and 430 arranged in the space, and is first in the reaction tube 203 from the gas supply holes 410 a, 420 a, and 430 a opened in the nozzles 410, 420, and 430 in the vicinity of the wafer 200. The main flow of gas in the reaction tube 203 is in a direction parallel to the surface of the wafer 200, that is, in the horizontal direction. With such a configuration, there is an effect that the gas can be supplied uniformly to each wafer 200 and the thickness of the thin film formed on each wafer 200 can be made uniform. A gas flowing on the surface of each wafer 200, that is, a gas remaining after the reaction (residual gas) flows toward an exhaust port, that is, an exhaust pipe 231 to be described later. The direction is appropriately specified depending on the position of the exhaust port, and is not limited to the vertical direction.

  Further, for example, inert gas pipes 510 and 520 for supplying an inert gas as a carrier gas are connected to the gas pipes 310 and 320, respectively. Inert gas pipes 510 and 520 are respectively provided with MFCs 512 and 522 and valves 514 and 524 in order from the upstream side.

As an example of the above configuration, a raw material gas is supplied from the gas pipe 310 into the processing chamber 201 through the MFC 312, the valve 314 and the nozzle 410 as the processing gas. Further, the same raw material gas as the processing gas supplied from the gas piping 310 is supplied from the gas pipe 320 into the processing chamber 201 through the MFC 322, the valve 324 and the nozzle 420. As the source gas, a Si-containing gas such as dichlorosilane (SiH ₂ Cl ₂ , abbreviated as DCS) gas or hexachlorodisilane (Si ₂ Cl ₆ , abbreviated as HCDS) gas is used. In the present embodiment, the source gas supplied from the gas pipes 310 and 320 will be described as the same raw material, but it is needless to say that the raw material gas is not limited to the same raw material and may be the same type of raw material.

From the gas pipe 330, for example, an inert gas as a purge gas is supplied into the processing chamber 201 through the MFC 332, the valve 334, and the nozzle 430. As the inert gas, nitrogen (N ₂ ), helium (He), neon (Ne), argon (Ar), krypton (Kr), xenon (Xe) gas, or the like can be used.

From the inert gas pipes 510 and 520, an inert gas as a carrier gas is supplied into the processing chamber 201 via the MFCs 512 and 522, valves 514 and 524, and nozzles 410 and 420, respectively. As the inert gas, N ₂ , He, Ne, Ar, Kr, Xe gas, or the like can be used.

  When the processing gas as described above is supplied from the gas pipes 310, 320, 330, 510, and 520, the gas pipes 310, 320, 330, 510, and 520, the MFCs 312, 322, 332, 512, and 522, the valve 314 are mainly used. A processing gas supply system is configured by 324, 334, 514, and 524. The nozzles 410, 420, and 430 may be included in the processing gas supply system. The processing gas supply system can be simply referred to as a gas supply system. Further, the flow rate of the gas including the processing gas supplied from the nozzles 410, 420, and 430 is controlled by adjusting the pressure in the furnace by the pressure sensor 245, the APC valve 243, and the vacuum pump 246, so the pressure sensor 245 and the APC valve 243 are controlled. The vacuum pump 246 may be included in the processing gas supply system (gas supply system).

  When the above-described raw material gas flows from the gas pipes 310 and 320, the raw material gas supply system is mainly configured by the gas pipes 310 and 320, the MFCs 312 and 322, and the valves 314 and 324. Further, the inert gas pipes 510 and 520, the MFCs 512 and 522, the valves 514 and 524 may be included, and the nozzles 410 and 420 may be included in the raw material gas supply system.

  In addition, an inert gas supply system is configured by the gas pipe 330, the MFC 332, and the valve 334. The nozzle 430 may be included in the inert gas supply system. Since this inert gas also acts as a purge gas, the inert gas supply system can also be referred to as a purge gas supply system.

  The MFCs 312, 322, 332, 512, and 522 and the valves 314, 324, 334, 514, and 524 are electrically connected to the controller 280 to constitute a processing gas supply control system (gas supply control system). Further, the pressure sensor 245, the APC valve 243, and the vacuum pump 246 may be included in the processing gas supply control system (gas supply control system).

(Control system)
As shown in FIG. 4, a controller 280 as a control unit (control means) is configured as a computer including a CPU (Central Processing Unit) 280a, a RAM (Random Access Memory) 280b, a storage device 280c, and an I / O port 280d. Has been. The RAM 280b, the storage device 280c, and the I / O port 280d are configured to exchange data with the CPU 280a via the internal bus 280e. For example, an input / output device 282 configured as a touch panel or the like is connected to the controller 280.

  The storage device 280c is configured by, for example, a flash memory, an HDD (Hard Disk Drive), or the like. In the storage device 280c, a control program that controls the operation of the substrate processing apparatus, a process recipe that describes the procedure and conditions of the substrate processing described later, and the like are stored in a readable manner. The process recipe is a combination of functions so that a predetermined result can be obtained by causing the controller 280 to execute each procedure in the substrate processing process described later, and functions as a program. Hereinafter, the process recipe, the control program, and the like are collectively referred to as simply a program. When the term “program” is used in this specification, it may include only a process recipe alone, only a control program alone, or both. The RAM 280b is configured as a memory area (work area) in which a program, data, and the like read by the CPU 280a are temporarily stored.

  The I / O port 280d includes the above-described MFC 312, 322, 332, 512, 522, valve 314, 324, 334, 514, 524, APC valve 243, pressure sensor 245, vacuum pump 246, heater 207, temperature sensor 263, rotation It is connected to the mechanism 267, the boat elevator 115 and the like.

  The CPU 280a is configured to read and execute a control program from the storage device 280c and to read a process recipe from the storage device 280c in response to an operation command input from the input / output device 282 or the like. In accordance with the read process recipe, the CPU 280a adjusts the flow rates of various gases by the MFCs 312, 322, 332, 512, and 522, opens and closes the valves 314, 324, 334, 514, and 524, opens and closes the APC valve 243, and the APC valve 243. The pressure adjustment operation based on the pressure sensor 245 by the motor, the temperature adjustment operation of the heater 207 based on the temperature sensor 263, the start and stop of the vacuum pump 246, the rotation and rotation speed adjustment operation of the boat 217 by the rotation mechanism 267, the boat 217 by the boat elevator 115 It is comprised so that the raising / lowering operation | movement etc. of this may be controlled.

  The controller 280 is stored in an external storage device 283 (for example, a magnetic disk, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or DVD, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory or a memory card). The above-mentioned program can be configured by installing it in a computer. The storage device 280c and the external storage device 283 are configured as computer-readable recording media. Hereinafter, these are collectively referred to simply as a recording medium. When the term “recording medium” is used in this specification, it may include only the storage device 280c, only the external storage device 283, or both. The provision of the program to the computer may be performed using communication means such as the Internet or a dedicated line without using the external storage device 283.

<Semiconductor device manufacturing method>
Next, an example of a method for forming a film on a substrate as one step of a semiconductor device (device) manufacturing process using the above-described processing furnace 202 of the substrate processing apparatus will be described. In the following description, the operation of each part constituting the substrate processing apparatus is controlled by the controller 280.

  Here, when the term “wafer” is used in this specification, it means “wafer itself” or “a laminated body (aggregate) of a wafer and a predetermined layer or film formed on the surface thereof”. ) ", That is, a predetermined layer or film formed on the surface may be referred to as a wafer. In addition, when the term “wafer surface” is used in this specification, it means “the surface of the wafer itself (exposed surface)” or “the surface of a predetermined layer or film formed on the wafer”. That is, it may mean “the outermost surface of the wafer as a laminated body”.

  Therefore, in the present specification, the phrase “supplying a predetermined gas to the wafer” means “supplying a predetermined gas to the surface (exposed surface) of the wafer itself”, It may mean that “a predetermined gas is supplied to a layer, a film, or the like formed on the wafer, that is, to the outermost surface of the wafer as a laminated body”. Further, in this specification, when “describe a predetermined layer (or film) on the wafer” is described, “determine a predetermined layer (or film) on the surface (exposed surface) of the wafer itself”. , Or "to form a predetermined layer (or film) on the layer or film formed on the wafer, that is, on the outermost surface of the wafer as a laminate" There is.

  In this specification, the term “substrate” is also synonymous with the term “wafer”.

<First Embodiment of the Present Invention>
When a plurality of wafers 200 are loaded into the boat 217 (wafer charge), the boat 217 supporting the plurality of wafers 200 is lifted by the boat elevator 115 and loaded into the processing chamber 201 (boat loading). In this state, the seal cap 219 closes the lower end opening of the reaction tube 203 via the O-ring 220.

  The pressure is adjusted by the pressure sensor 245, the APC valve 243, and the vacuum pump 246 so that the inside of the processing chamber 201 has a desired pressure (degree of vacuum). Further, heating and temperature adjustment are performed by the temperature sensor 263 and the heater 207 so that the inside of the processing chamber 201 has a desired temperature.

(Deposition process)
While the vacuum pump 246 is operated, the same raw material gas is supplied from the nozzles 410 and 420.
In FIG. 3, the length of the arrow indicates the flow rate of the source gas supplied from the gas supply holes 410a and 420a, and the thickness of the arrow indicates the flow rate of the source gas supplied from the gas supply holes 410a and 420a. ing. The longer the arrow, the greater the flow rate of the source gas, and the thicker the arrow, the greater the flow rate of the source gas.

  First, the valve 314 is opened and the raw material gas is caused to flow into the gas pipe 310. The flow rate of the raw material gas flowing in the gas pipe 310 is adjusted by the MFC 312, supplied from the gas supply hole 410 a of the nozzle 410 toward the center of the wafer 200 in the processing chamber 201, and exhausted from the exhaust pipe 231. At the same time, the valve 514 is opened, and an inert gas is caused to flow into the inert gas pipe 510. The flow rate of the inert gas that has flowed through the inert gas pipe 510 is adjusted by the MFC 512, is supplied into the processing chamber 201 together with the source gas, and is exhausted from the exhaust pipe 231.

  At the same time, the valve 324 is opened and the raw material gas is caused to flow into the gas pipe 320. The flow rate of the raw material gas that has flowed through the gas pipe 320 is adjusted by the MFC 322, and a small flow rate of the raw material gas in the processing chamber 201 is obtained from the gas supply hole 420 a of the nozzle 420 compared to the raw material gas supplied from the gas supply hole 410 a. It is supplied toward the outer periphery of the wafer 200 and is exhausted from the exhaust pipe 231. At the same time, the valve 524 is opened and an inert gas is caused to flow into the inert gas pipe 520. The flow rate of the inert gas that has flowed through the inert gas supply pipe 520 is adjusted by the MFC 522, is supplied into the processing chamber 201 together with the raw material gas, and is exhausted from the exhaust pipe 231.

  Here, the pressure in the furnace is adjusted by the pressure sensor 245, the APC valve 243 and the vacuum pump 246, and the flow rate of the source gas supplied from the gas supply hole 410a and the flow rate of the source gas supplied from the gas supply hole 420a are as follows. The flow rate is controlled by the MFC 312 and MFC 322, and the flow rate is fast at a large flow rate, and the flow rate is slow at a small flow rate. When it is desired to control the flow rate without changing the flow rate of the raw material gas, the valve 514 is opened at the same time and the inert gas is allowed to flow into the inert gas pipe 510. The flow rate of the inert gas flowing through the inert gas pipe 510 is adjusted by the MFC 512 and is supplied into the processing chamber 201 together with the raw material gas. In this case, the flow rate is controlled by the total flow rate of the source gas and the inert gas. Similarly, the valve 524 is opened and an inert gas is caused to flow into the inert gas pipe 520. The flow rate of the inert gas flowing through the inert gas pipe 520 may be adjusted by the MFC 522 and supplied to the processing chamber 201 together with the raw material gas. Either of these may be performed or may be performed simultaneously.

  At this time, the valve 334 is opened at the same time, an inert gas is caused to flow into the gas pipe 330, and the flow rate of the inert gas flowing through the gas pipe 330 is adjusted by the MFC 332, and the gas supply hole 430 a of the nozzle 430 enters the processing chamber 201. Supplied and exhausted from the exhaust pipe 231.

That is, a gas containing a large flow rate of source gas is supplied from the nozzle 410 toward the center of the wafer 200 at a high flow rate, and contributes to film formation at the center of the wafer 200. Further, a gas containing a small flow rate of source gas is supplied from the nozzle 420 toward the outer peripheral portion of the wafer 200 at a slow flow rate, and contributes to film formation on the outer peripheral portion of the wafer 200. Here, the gas containing the source gas is a source gas or a mixed gas of the source gas and the inert gas.
As described above, the supply of the raw material gas to the central portion of the wafer 200 and the outer peripheral portion of the wafer 200 is performed by a plurality of nozzles, whereby a uniform gas supply to the surface of the wafer 200 is realized.

  In addition, although the example which makes the flow rate of the raw material gas supplied from each nozzle and the flow velocity of the gas containing the raw material gas supplied from each nozzle different has been described, this is not restrictive, and inertness supplied from each nozzle The gas flow rate and flow rate may be different. Specifically, the flow rate and flow rate of the inert gas supplied from the two nozzles 410 and 420 may be controlled by controlling the MFCs 512 and 522, respectively. Even if the flow rate and flow rate of the inert gas are controlled to be different, the concentration of the source gas and the flow rate of the source gas can be adjusted. In addition, it is not limited to the same source gas (gas which has the same composition formula), What is necessary is just the same kind of source gas.

  For example, after a silicon (Si) -containing film is formed on the surface of the wafer 200, the supply of the source gas is stopped by closing the valves 314 and 324. At this time, the APC valve 243 of the exhaust pipe 231 is kept open, the inside of the processing chamber 201 is evacuated by the vacuum pump 246, and the remaining source gas is removed from the processing chamber 201.

Then, an inert gas such as N ₂ gas is exhausted while being supplied into the processing chamber 201 from the nozzles 410, 420, and 430, whereby the inside of the processing chamber 201 is purged with the inert gas (gas purge). Thereafter, the atmosphere in the processing chamber 201 is replaced with an inert gas (inert gas replacement), and the pressure in the processing chamber 201 is returned to normal pressure (return to atmospheric pressure).

  Thereafter, the seal cap 219 is lowered by the boat elevator 115 to open the lower end of the furnace port portion 209, and the processed wafer 200 is supported by the boat 217 from the lower end of the furnace port portion 209 to the reaction tube 203. Carried out (boat unload). Thereafter, the processed wafer 200 is taken out from the boat 217 (wafer discharge).

  Hereinafter, in the second to fourth embodiments, detailed description of the same parts as those in the above-described embodiment will be omitted, and parts different from those in the above-described embodiment will be described.

<Second Embodiment of the Present Invention>
In the present embodiment, as shown in FIG. 5, a nozzle 410 that supplies a large flow rate of source gas and a nozzle 420 that supplies a small flow rate of source gas are provided apart from each other.
A nozzle 410 for supplying a large flow rate of raw material gas toward the center of the wafer 200 at a high flow rate and a nozzle 420 for supplying a small flow rate of raw material gas toward the outer periphery of the wafer 200 at a low flow rate are provided apart from each other. As a result, the source gas supplied from the nozzle 420 is less likely to be caught in the flow of the source gas having a large flow rate supplied from the nozzle 410, and the source supply to the outer periphery of the wafer 200 can be performed efficiently.
In addition, each of the nozzles 410 and 420 is connected to an inert gas pipe, and an MFC and a valve are provided in each of the inert gas pipes. The MFC provided in each inert gas pipe is controlled to control the flow rate of the inert gas supplied from the nozzles 410 and 420 so that the concentration of the source gas and the flow rate of the source gas are adjusted. Has been. Thereby, since the source gas that contributes to the film formation uniformly is supplied to the wafer 200, the film thickness uniformity in the surface of the wafer 200 can be improved.

<Third Embodiment of the Present Invention>
In this embodiment, as shown in FIG. 6, five nozzles for supplying the same source gas are provided. From these five nozzles, raw material gases having different flow rates are supplied.
Specifically, nozzles 440, 450, 460 are provided in the processing chamber 201 in addition to the nozzles 410, 420, 430 of the above-described embodiment. Gas pipes 340, 350, and 360 for supplying the same raw material gas as the nozzles 410 and 420 into the processing chamber 201 are connected to the nozzles 440, 450, and 460, respectively. The gas pipes 340, 350, and 360 are provided with MFCs and valves (not shown) from the upstream side, respectively. That is, the flow rate of the gas containing the raw material gas supplied from the nozzles 410, 420, 440, 450, and 460 is controlled by the MFC control. The pressure in the furnace is adjusted by a pressure sensor 245, an APC valve 243, and a vacuum pump 246, and the flow rate of the raw material gas supplied from the nozzles 410, 420, 440, 450, 460 is controlled.
In the present embodiment, the raw material gas is supplied from the nozzle 410 at a high flow rate and at a high flow rate, and the raw material gas is supplied at a low flow rate at a low flow rate as the distance from the nozzle 410 is increased. You may change arbitrarily according to. Further, the nozzles may be installed at arbitrary positions in the processing chamber 201 without being adjacent to each other. Note that the number of nozzles and the configuration of the nozzles may be arbitrarily changed according to the application.
Further, inert gas pipes are connected to the nozzles 410, 420, 440, 450, and 460, respectively, and an MFC and a valve are provided in each of the inert gas pipes. The MFC provided in each inert gas pipe is controlled to control the flow rate of the inert gas supplied from the five nozzles 410, 420, 440, 450, 460, and the concentration of the source gas and the source gas The flow rate is configured to be adjusted. Thereby, since the source gas that contributes to the film formation uniformly is supplied to the wafer 200, the film thickness uniformity in the surface of the wafer 200 can be improved.

<Fourth Embodiment of the Present Invention>
In the present embodiment, as shown in FIG. 7, the raw material gas is supplied using a plurality of nozzles having different inner diameters.
Specifically, a nozzle 470 having a small inner diameter and a nozzle 480 having a large inner diameter are used. Gas pipes 370 and 380 for supplying the same source gas are connected to the nozzles 470 and 480, respectively. The gas pipes 370 and 380 are respectively provided with MFCs and valves (not shown) from the upstream side. In addition, inert gas pipes are connected to the nozzles 470 and 480, respectively, and an MFC and a valve are provided in each of the inert gas pipes.
In this embodiment, by using two nozzles having different inner diameters, the flow rate of the source gas and the flow rate of the gas containing the source gas supplied from the nozzles 470 and 480 are made different. The pressure in the furnace is adjusted by a pressure sensor 245, an APC valve 243 and a vacuum pump 246.
From the nozzle 470, a small flow rate of the source gas is supplied toward the center of the wafer 200 at a high flow rate. A large amount of source gas is supplied from the nozzle 480 toward the outer periphery of the wafer 200 at a slow flow rate.
The MFC and valves provided in the respective inert gas pipes are controlled to control the flow rate of the inert gas supplied from the nozzles 470 and 480 so that the concentration of the source gas and the flow rate of the source gas are adjusted. It is configured. Thereby, since the source gas that contributes to the film formation uniformly is supplied to the wafer 200, the film thickness uniformity in the surface of the wafer 200 can be improved.

  In the above-described embodiment, the configuration in which the raw material gas is supplied using two nozzles having different inner diameters has been described. However, the present invention is not limited to this, and a plurality of nozzles may be used, and the second embodiment described above. Similarly, the nozzles 470 and 480 may be provided separately.

  As in each embodiment, a plurality of nozzles that supply the same raw material are provided, and the in-plane film thickness uniformity of the substrate is improved by changing the flow rate and flow rate of the gas supplied from each nozzle. be able to. Further, by dividing the supply of the source gas to the center and the outer periphery of the substrate by a plurality of nozzles, efficient gas supply into the substrate surface is realized.

  In other words, by supplying or purging a raw material to a specific position within the wafer surface, the material supply is optimized, and by effectively removing the factors that obstruct film formation such as by-products, processing is performed. It is possible to improve the uniformity of deposited films on a plurality of processing substrates installed in a room, and to improve the performance and yield of highly integrated semiconductor devices.

<Other Embodiments of the Present Invention>
The configuration different from the first embodiment is only the configuration regarding the inert gas pipe 330, the MFC 332, and the valve 334. As shown in FIG. 8, the difference in the configuration of the gas supply system from FIG. 2 is that the inert gas supply system of the inert gas pipe 330, MFC 332, and valve 334 is replaced with a reactive gas pipe 390, MFC 392, A reactive gas supply system of the valve 394 is connected, and an inert gas pipe 530, an MFC 532, and a valve 534 connected to the reactive gas pipe 390 are added.

  Hereinafter, a semiconductor device manufacturing method in this configuration difference will be described. However, in the other embodiments, detailed description of the same parts as those in the above-described embodiments is omitted, and parts different from those in the above-described embodiments. explain.

Specifically, an example will be described in which a film is formed on the wafer 200 by alternately supplying a source gas and a reactive gas to the wafer 200 as a substrate. In this embodiment, hexachlorodisilane (Si ₂ Cl ₆ , abbreviation: HCDS) gas is used as a source gas, ammonia (NH ₃ ) gas is used as a reaction gas, and a silicon nitride film (Si ₃ N ₄ film, Hereinafter, an example of forming a SiN film) will be described.

Here, in the film forming process in the present embodiment, a process of supplying HCDS gas to the wafer 200 in the process chamber 201, a process of removing HCDS gas (residual gas) from the process chamber 201, and the process chamber 201 By performing a predetermined number of times (one or more times) of performing the process of supplying NH ₃ gas to the inner wafer 200 and the process of removing NH ₃ gas (residual gas) from the processing chamber 201 at the same time. Then, an SiN film is formed on the wafer 200.

  In this specification, this film forming sequence may be indicated as follows for convenience. Note that the same notation is used in the description of the following modified examples and other embodiments.

(HCDS → NH ₃ ) × n ⇒ SiN

  In the following description, the operation of each unit constituting the substrate processing apparatus 101 is controlled by the controller 280 as in the above-described embodiments. First, the preparation process up to the film forming process is the same as in each of the above-described embodiments.

(Deposition process)
When the temperature in the processing chamber 201 is stabilized at a preset processing temperature, the following two steps, that is, steps 1 to 2 are sequentially executed.

[Step 1]
In this step, HCDS gas is supplied to the wafer 200 in the processing chamber 201.

The valves 314 and 324 are opened and HCDS gas is allowed to flow into the processing chamber 201. Specifically, the flow rate of the HCDS gas is adjusted by the MFCs 312 and 322, supplied into the processing chamber 201 through the nozzles 410 and 420, and exhausted from the exhaust pipe 231. At this time, the HCDS gas is supplied to the wafer 200. At this time, the valves 514 and 524 are simultaneously opened to flow N ₂ gas into the processing chamber 201. The flow rate of the N ₂ gas is adjusted by the MFCs 512 and 522, supplied into the processing chamber 201 together with the HCDS gas, and exhausted from the exhaust pipe 231. By supplying HCDS gas to the wafer 200, a silicon (Si) -containing layer having a thickness of, for example, less than one atomic layer to several atomic layers is formed as the first layer on the outermost surface of the wafer 200. .

After the first layer is formed, the valves 314 and 324 are closed and the supply of HCDS gas is stopped. At this time, the APC valve 243 is kept open, the processing chamber 201 is evacuated by the vacuum pump 246, and the HCDS gas remaining in the processing chamber 201 or contributing to the formation of the first layer is processed. The inside of the chamber 201 is discharged. At this time, the valves 514 and 524 are kept open, and the supply of N ₂ gas into the processing chamber 201 is maintained. The N ₂ gas acts as a purge gas, whereby the effect of exhausting the gas remaining in the processing chamber 201 from the processing chamber 201 can be enhanced.

At this time, the gas remaining in the processing chamber 201 may not be completely discharged, and the processing chamber 201 may not be completely purged. If the amount of gas remaining in the processing chamber 201 is very small, there will be no adverse effect in the subsequent step 2. The flow rate of the N ₂ gas supplied into the processing chamber 201 does not need to be a large flow rate. For example, by supplying an amount of N ₂ gas equivalent to the volume of the reaction tube 203 (processing chamber 201), step 2 is performed. Purging can be performed to such an extent that no adverse effect is caused. Thus, by not completely purging the inside of the processing chamber 201, the purge time can be shortened and the throughput can be improved. The consumption of N ₂ gas can be minimized.

[Step 2]
After step 1 is completed, NH ₃ gas is supplied to the wafer 200 in the processing chamber 201, that is, the first layer formed on the wafer 200. The NH ₃ gas is activated by heat and supplied to the wafer 200.

In this step, the opening / closing control of the valve 394 is performed in the same procedure as the opening / closing control of the valves 314, 324 in step 1. The flow rate of the NH ₃ gas is adjusted by the MFC 392, supplied into the processing chamber 201 through the nozzle 430, and exhausted from the exhaust pipe 231. At this time, NH ₃ gas is supplied to the wafer 200. The NH ₃ gas supplied to the wafer 200 reacts with at least a part of the first layer formed on the wafer 200 in Step 1, that is, the Si-containing layer. Thus, the first layer is thermally nitrided by non-plasma and is changed (modified) into a second layer containing Si and N, that is, a silicon nitride layer (SiN layer). At this time, the plasma-excited NH ₃ gas is supplied to the wafer 200, and the first layer is plasma-nitrided to change the first layer to the second layer (SiN layer). May be.

After the second layer is formed, the valve 394 is closed and the supply of NH ₃ gas is stopped. Then, the NH ₃ gas and the reaction by-products remaining in the processing chamber 201 or contributed to the formation of the second layer are discharged from the processing chamber 201 by the same processing procedure as in Step 1. At this time, it is the same as in step 1 that the gas remaining in the processing chamber 201 does not have to be completely discharged.

(Performed times)
An SiN film having a predetermined composition and a predetermined film thickness can be formed on the wafer 200 by performing the above-described two steps non-simultaneously, that is, by performing a predetermined number of cycles (n times) without synchronizing them. The above cycle is preferably repeated a plurality of times. That is, it is formed by stacking the second layer (SiN layer) by making the thickness of the second layer (SiN layer) formed when the above cycle is performed once smaller than a predetermined thickness. The above cycle is preferably repeated a plurality of times until the thickness of the SiN film reaches a predetermined thickness.

  After the film formation process is completed, for example, purge and atmospheric pressure return are performed in the same manner as in the first embodiment, and then a boat unload and wafer discharge process are performed.

  Also in the other embodiments described above, by providing a plurality of nozzles that supply the same raw material and by making the flow rate and flow rate of the gas supplied from each nozzle different, the in-plane film thickness uniformity of the substrate can be improved. Can be improved.

  As described above, according to the present invention, at least one or more of the following effects (a) to (e) are achieved.

  (a) According to the embodiment of the present invention, the gas supply system includes a nozzle that supplies a gas containing a processing gas into the processing chamber, a gas pipe that is connected to the nozzle and supplies the processing gas, and is connected to the nozzle. In addition, since it is configured with an inert gas pipe for supplying an inert gas, the flow rate of the gas supplied from the nozzle can be controlled by the respective flow rates of the processing gas and the inert gas. As a result, the flow rate and flow rate of the processing gas supplied from the plurality of nozzles into the processing chamber can be controlled.

  (b) According to the embodiment of the present invention, the flow rate of the process gas supplied from at least one nozzle out of the nozzles supplying the process gas into the process chamber is higher than the flow rate of the process gas supplied from the other nozzles. Can be high. By utilizing this, for example, the supply of the raw material gas to the central portion of the substrate and the outer peripheral portion of the substrate is divided by a plurality of nozzles, thereby realizing efficient gas supply into the substrate surface. Accordingly, the processing gas can be supplied uniformly to the surface of the substrate.

  (c) According to the embodiment of the present invention, the flow rates of the processing gases supplied from the plurality of nozzles into the processing chamber can be varied. By utilizing this, the processing gas can be supplied uniformly to the surface of the substrate.

  (d) According to the embodiment of the present invention, since the flow rate and / or flow velocity of the same processing gas supplied into the processing chamber from a plurality of nozzles can be varied, the position of the nozzle, the number of nozzles, and the nozzle The flow rate of the processing gas supplied and the flow rate of the gas containing the processing gas supplied from the nozzle can be controlled, and the flow of the processing gas contributing to the film formation on the substrate surface can be adjusted uniformly.

  (e) According to the embodiment of the present invention, it is possible to control the flow rate of the same kind of processing gas supplied from a plurality of nozzles into the processing chamber and / or the flow rate of the processing gas supplied from the nozzles, and By changing the position of the nozzle, the number of nozzles, and the type of nozzle, the flow of the processing gas contributing to the film formation can be supplied uniformly to the substrate surface.

  Each above-mentioned embodiment can be used in combination as appropriate. Furthermore, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention.

For example, in the above-described embodiment, an example in which HCDS gas is used as the source gas has been described. However, the present invention is not limited to such an embodiment. For example, as the source gas, in addition to HCDS gas, monochlorosilane (SiH ₃ Cl, abbreviation: MCS) gas, dichlorosilane (SiH ₂ Cl ₂ , abbreviation: DCS) gas, trichlorosilane (SiHCl ₃ , abbreviation: TCS) gas Inorganic halosilane source gases such as tetrachlorosilane, ie, silicon tetrachloride (SiCl ₄ , abbreviation: STC) gas, octachlorotrisilane (Si ₃ Cl ₈ , abbreviation: OCTS) gas, and trisdimethylaminosilane (Si [N (CH ₃ ) ₂ ] ₃ H, abbreviation: 3DMAS) gas, tetrakisdimethylaminosilane (Si [N (CH ₃ ) ₂ ] ₄ , abbreviation: 4DMAS) gas, bisdiethylaminosilane (Si [N (C ₂ H ₅ ) ₂ ] ₂ H _2, abbreviation: BDEAS) gas, Bicester fischeri butylamino silane (SiH ₂ [NH C ₄ H _{9)] 2,} abbreviated: BTBAS) may be used halogen group-free amino based such as a gas (amine) silane source gas. In addition, as the source gas, halogen group-free such as monosilane (SiH ₄ , abbreviation: MS) gas, disilane (Si ₂ H ₆ , abbreviation: DS) gas, trisilane (Si ₃ H ₈ , abbreviation: TS) gas, etc. An inorganic silane source gas can be used.

For example, in the above-described embodiment, an example in which NH ₃ gas is used as the reaction gas has been described. However, the present invention is not limited to such an embodiment. For example, as a reaction gas, in addition to NH ₃ gas, a hydrogen nitride-based gas such as diazene (N ₂ H ₂ ) gas, hydrazine (N ₂ H ₄ ) gas, N ₃ H ₈ gas, or a gas containing these compounds is used. Etc. can be used. Further, as a reaction gas, triethylamine ((C ₂ H ₅ ) ₃ N, abbreviation: TEA) gas, diethylamine ((C ₂ H ₅ ) ₂ NH, abbreviation: DEA) gas, monoethylamine (C ₂ H ₅ NH ₂₎ , Abbreviation: MEA) gas such as ethylamine gas, trimethylamine ((CH ₃ ) ₃ N, abbreviation: TMA) gas, dimethylamine ((CH ₃ ) ₂ NH, abbreviation: DMA) gas, monomethylamine (CH ₃ NH) ₂ , abbreviation: MMA) gas such as a methylamine-based gas can be used. As the reaction gas, an organic hydrazine-based gas such as trimethylhydrazine ((CH ₃ ) ₂ N ₂ (CH ₃ ) H, abbreviated as TMH) gas can be used.

Further, for example, in the above-described embodiment, the example in which the SiN film is formed by using the HCDS gas as the source gas and the nitrogen (N) -containing gas (nitriding gas) such as the NH ₃ gas as the reaction gas has been described. However, the present invention is not limited to such an embodiment. For example, in addition to these, in addition to these, oxygen (O) containing gas (oxidation gas) such as oxygen (O ₂ ) gas, carbon (C) containing gas such as propylene (C ₃ H ₆ ) gas, trichloride Using boron (B) -containing gas such as boron (BCl ₃ ) gas, etc., for example, by the following film forming sequence, SiO film, SiON film, SiOCN film, SiOC film, SiCN film, SiBN film, SiBCN film, etc. Can be formed. In addition, the order which flows each gas can be changed suitably. Even in the case where these films are formed, the films can be formed under the same processing conditions as in the above-described embodiment, and the same effects as in the above-described embodiment can be obtained.

(3DMAS → O ₃ ) × n ⇒ SiO
(HCDS → NH ₃ → O ₂ ) × n ⇒ SiON
(HCDS → C ₃ H ₆ → O ₂ → NH ₃ ) × n ⇒ SiOCN
(HCDS → TEA → O ₂ ) × n ⇒ SiOC
(HCDS → C ₃ H ₆ → NH ₃ ) × n ⇒ SiCN
(HCDS → BCl ₃ → NH ₃ ) × n ⇒ SiBN
(HCDS → C ₃ H ₆ → BCl ₃ → NH ₃ ) × n ⇒ SiBCN

  For example, in the above-described embodiment, an example in which a silicon-based insulating film such as a SiN film is formed has been described. However, the present invention is not limited to such an embodiment. For example, in the present invention, titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), tungsten (W) is formed on the wafer 200. Even when a film containing a metal element such as a metal film is formed, the present invention can be suitably applied.

  For example, in the present invention, a TiN film, a TiO film, a TiON film, a TiOCN film, a TiOC film, a TiCN film, a TiBN film, a TiBCN film, a ZrN film, a ZrO film, a ZrON film, a ZrOCN film, a ZrOC film, ZrCN film, ZrBN film, ZrBCN film, HfN film, HfO film, HfON film, HfOCN film, HfOC film, HfCN film, HfBN film, HfBCN film, TaN film, TaO film, TaON film, TaOCN film, TaOC film, TaCN film , TaBN film, TaBCN film, NbN film, NbO film, NbON film, NbOCN film, NbOC film, NbCN film, NbBN film, NbBCN film, AlN film, AlO film, AlON film, AlOCN film, AlOC film, AlCN film, AlBN Film, AlBCN film, MoN film, MoO film, MoON film, MoOCN film, MoOC , MOCN film, MoBN film, MoBCN film, WN film, WO film, WON film, WOCN film, WOC film, WCN film, WBN film, even in the case of forming the WBCN film or the like is suitably applicable. In addition to these, a film in which any of these elements is doped (added) with other elements, for example, a TiAlN film, a TaAlN film, a TiAlC film, a TaAlC film, a TiSiN film, a TiSiC film, etc. is also suitably applied. Is possible.

In the case of forming a metal-based film, as a raw material gas, for example, titanium tetrachloride (TiCl ₄ ) gas, titanium tetrafluoride (TiF ₄ ) gas, zirconium tetrachloride (ZrCl ₄ ) gas, zirconium tetrafluoride (ZrF ₄ ) Gas, hafnium tetrachloride (HfCl ₄ ) gas, hafnium tetrafluoride (HfF ₄ ) gas, tantalum pentachloride (TaCl ₅ ) gas, tantalum pentafluoride (TaF ₅ ) gas, niobium pentachloride (NbCl ₅ ) gas, niobium pentafluoride (NbF ₅₎ gas, aluminum trichloride (AlCl ₃₎ gas, aluminum trifluoride (AlF ₃₎ gas, molybdenum pentachloride (MoCl ₅₎ gas, molybdenum penta full Ride (MoF ₅₎ can be used gas, the tungsten hexachloride (WCl ₆₎ gas, a tungsten hexafluoride (WF ₆₎ inorganic metal source gas containing a metal element and a halogen element such as a gas. Further, as the source gas, for example, an organic metal source gas containing a metal element such as trimethylaluminum (Al (CH ₃ ) ₃ , abbreviation: TMA) gas and carbon can be used. As the reaction gas, the same gas as that in the above-described embodiment can be used.

  For example, a TiN film, a TiO film, a TiON film, a TiCN film, a TiAlC film, a TiAlN film, a TiSiN film, or the like can be formed on the wafer 200 by the following film forming sequence.

(TiCl ₄ → NH ₃ ) × n ⇒ TiN
(TiCl ₄ → O ₂ ) × n ⇒ TiO
(TiCl ₄ → NH ₃ → O ₂ ) × n ⇒ TiON
(TiCl ₄ → C ₃ H ₆ → NH ₃ ) × n ⇒ TiCN
(TiCl ₄ → TMA) × n ⇒ TiAlC
(TiCl ₄ → TMA → NH ₃ ) × n ⇒ TiAlN
(TiCl ₄ → HCDS → NH ₃ ) × n ⇒ TiSiN

  In addition, the order which flows each gas can be changed suitably. Even in the case where these films are formed, the film formation can be performed under the same processing conditions as in the above-described embodiment, and the same effect as in the above-described embodiment can be obtained.

  That is, the present invention can be suitably applied when forming a film containing a predetermined element such as a semiconductor element or a metal element.

  In the above-described embodiment, an example in which a film is deposited on the wafer 200 has been described. However, the present invention is not limited to such an embodiment. For example, the present invention can be suitably applied to the case where the wafer 200 or a film formed on the wafer 200 is subjected to processing such as oxidation processing, diffusion processing, annealing processing, and etching processing.

  Further, the above-described embodiments and modifications can be used in appropriate combination. The processing conditions at this time can be set to the same processing conditions as in the above-described embodiment or modification, for example.

In the above-described embodiment, an example in which N ₂ gas is used as the inert gas has been described. However, the present invention is not limited thereto, and a rare gas such as Ar gas, He gas, Ne gas, Kr gas, or Xe gas is used. It may be used. Due to the difference in mass number, for example, by using Ar having a mass number larger than that of N ₂ , it is possible to realize a more straight gas flow and to obtain a different purging effect in the wafer plane. Moreover, an inert gas may combine not only 1 type but multiple types. By using multiple types in combination, the range of the effect can be expanded.

In the above-described embodiment, the substrate processing apparatus is a batch-type vertical apparatus that processes a plurality of substrates at a time, and an example in which a nozzle for supplying a processing gas is erected in one reaction tube. However, the present invention is not limited to this, and the present invention is not limited to this, and has two reaction tubes (the outer reaction tube is referred to as an outer tube, and the inner reaction tube is referred to as an inner tube), and is also applicable to a case where a nozzle stands in the inner tube. Is possible. The same kind of gas (for example, silane-based gas (nozzle 410 is SiH ₄ gas, nozzle 420 is Si ₂ H ₆ gas, etc.), etc. And halosilane-based gas (nozzle 410 is HCDS gas, nozzle 420 is SiH ₂ Cl ₂ gas, etc.), and may be arbitrarily changed depending on the application.

  The process recipes (programs describing processing procedures and processing conditions) used to form these various thin films are the contents of the substrate processing (film type, composition ratio, film quality, film thickness, processing procedure, processing of the thin film to be formed) It is preferable to prepare individually (multiple preparations) according to the conditions. And when starting a substrate processing, it is preferable to select a suitable process recipe suitably from several process recipes according to the content of a substrate processing. Specifically, the substrate processing apparatus includes a plurality of process recipes individually prepared according to the contents of the substrate processing via an electric communication line or a recording medium (external storage device 283) on which the process recipe is recorded. It is preferable to store (install) in advance in the storage device 280c. When starting the substrate processing, the CPU 280a included in the substrate processing apparatus appropriately selects an appropriate process recipe from a plurality of process recipes stored in the storage device 280c according to the content of the substrate processing. Is preferred. With this configuration, thin films with various film types, composition ratios, film qualities, and film thicknesses can be formed for general use with good reproducibility using a single substrate processing apparatus. In addition, it is possible to reduce the operation burden on the operator (such as an input burden on the processing procedure and processing conditions), and to quickly start the substrate processing while avoiding an operation error.

  The present invention can also be realized by changing a process recipe of an existing substrate processing apparatus, for example. When changing a process recipe, the process recipe according to the present invention is installed in an existing substrate processing apparatus via a telecommunication line or a recording medium recording the process recipe, or input / output of the existing substrate processing apparatus It is also possible to operate the apparatus and change the process recipe itself to the process recipe according to the present invention.

<Preferred embodiment of the present invention>
Hereinafter, preferred embodiments of the present invention will be additionally described.

[Appendix 1]
According to one aspect of the present invention, a gas supply having at least a plurality of gas supply pipes that supply a gas containing a raw material gas into a processing chamber and a gas pipe that supplies the gas containing the raw material gas to the gas supply pipe. A gas supply control system that includes at least a system, and a flow rate controller that controls the flow rate of the source gas, and controls the flow rate controller, and controls the flow rate controller from the gas supply pipe to the processing chamber. A flow rate of the source gas supplied to the processing chamber, a flow rate of a gas containing at least the source gas supplied into the processing chamber is adjusted for each gas supply pipe, and at least one of the plurality of gas supply pipes is adjusted. A control unit for controlling the flow rate of the gas containing the source gas supplied from one gas supply pipe to be larger than the flow rate of the gas containing the source gas supplied from the other gas supply pipe; Example was the substrate processing apparatus is provided.

[Appendix 2]
The substrate processing apparatus according to appendix 1, further preferably, the gas supply system (raw material supply system) is configured to adjust a flow rate of the raw material gas to each of the gas supply pipes (raw material supply nozzles). Is done.

[Appendix 3]
The substrate processing apparatus according to appendix 1 or appendix 2, wherein the gas supply system (raw material supply system) preferably includes a raw material as a carrier gas in addition to the gas supply pipe (raw material supply nozzle) and the raw material gas. An inert gas is supplied as a dilution gas for diluting the gas and as a purge gas for purging the processing chamber.

[Appendix 4]
The substrate processing apparatus according to appendix 1 or appendix 2, wherein the gas supply system (raw material supply system) is preferably configured such that the gas supply pipe (raw material supply nozzle) and a gas containing a raw material gas are supplied to the gas supply pipe. And an inert gas pipe for introducing an inert gas into the gas supply pipe.

[Appendix 5]
The substrate processing apparatus according to appendix 1, wherein the plurality of gas supply pipes (raw material supply nozzles) are preferably provided adjacent to each other.

[Appendix 6]
The substrate processing apparatus according to appendix 1, wherein the plurality of gas supply pipes (raw material supply nozzles) are preferably provided separately from each other.

[Appendix 7]
The substrate processing apparatus according to appendix 1, preferably configured such that two or more gas supply pipes (raw material supply nozzles) are provided.

[Appendix 8]
The substrate processing apparatus according to appendix 7, preferably configured to vary the flow rates of the gases supplied from the plurality of gas supply pipes (raw material supply nozzles).

[Appendix 9]
The substrate processing apparatus according to appendix 1, wherein the gas supply system (raw material supply system) preferably introduces an inert gas from each of the plurality of gas supply pipes (raw material supply nozzles) during purging. The gas flow rate is changed in the same manner as when the source gas is supplied.

[Appendix 10]
The substrate processing apparatus according to appendix 9, wherein the inert gas preferably includes at least one selected from the group consisting of N ₂ , He, Ne, Ar, Kr, and Xe, or in combination. Used.

[Appendix 11]
The substrate processing apparatus according to appendix 1, wherein the gas supply control system is preferably supplied from one gas supply pipe (raw material supply nozzle) among at least the plurality of gas supply pipes (raw material supply nozzles). The flow rate of the raw material gas is smaller than the flow rate of the raw material gas supplied from another gas supply pipe (raw material supply nozzle), and the gas containing the raw material gas is configured to have a large flow rate.

[Appendix 12]
According to another aspect of the present invention, the method includes at least a step of carrying a substrate into a processing chamber, and a step of supplying the source gas from a plurality of gas supply pipes that supply the source gas into the processing chamber, In the step of supplying the source gas, the flow rate of the source gas supplied from the gas supply pipe to the processing chamber is controlled, and the flow rate of the gas containing the source gas supplied from each of the gas supply pipes is adjusted. And a semiconductor configured to make the flow rate of the gas containing the source gas supplied from one gas supply pipe out of at least the plurality of gas supply pipes larger than the flow rate of the gas containing the source gas supplied from the other gas supply pipe A method of manufacturing a device is provided.

[Appendix 13]
According to still another aspect of the present invention, a gas supply pipe having a plurality of holes for supplying a raw material gas into a processing chamber, the gas containing the raw material gas supplied from one gas supply pipe. A gas supply pipe configured to make the flow rate larger than the flow rate of the gas containing the source gas supplied from another gas supply pipe is provided.

[Appendix 14]
According to still another aspect of the present invention, the method includes a procedure for carrying a substrate into a processing chamber, and a procedure for supplying the source gas from a plurality of gas supply pipes for supplying the source gas into the processing chamber, In the procedure of supplying the source gas, the procedure of controlling the flow rate of the source gas supplied from the gas supply pipe to the processing chamber, and the flow rate of the gas containing the source gas supplied from each of the gas supply pipes are set. And adjusting the flow rate of the gas containing the source gas supplied from at least one gas supply pipe among the plurality of gas supply pipes to be larger than the flow rate of the gas containing the source gas supplied from the other gas supply pipe A program for causing a computer to execute the procedure to be performed, or a computer-readable recording medium storing the program is provided.

  The present invention can be used for, for example, a method for manufacturing a semiconductor device, a substrate processing apparatus for processing a substrate such as a semiconductor wafer or a glass substrate, and the like.

DESCRIPTION OF SYMBOLS 101 ... Substrate processing apparatus 200 ... Wafer 201 ... Processing chamber 202 ... Processing furnace 203 ... Reaction tube 207 ... Heater 231 ... Exhaust pipe 243 ... APC valve 245 ... -Pressure sensor 246 ... Vacuum pump 280 ... Controller 310, 320, 330, 390 ... Gas piping 510, 520, 530 ...... Inert gas piping 312, 322, 332, 392, 512, 522 , 532 ... Mass flow controller (MFC)
410, 420, 430 ... Nozzle (gas supply pipe)
410a, 420a, 430a ... gas supply holes

Claims (8)

A gas supply system having at least a plurality of gas supply pipes for supplying a gas containing a raw material gas into the processing chamber, and a gas pipe for supplying the raw material gas to the gas supply pipe;
A gas supply control system having at least a flow rate controller that is provided in the gas pipe and controls a flow rate of the source gas;
Each of the flow rate controllers is controlled to control the flow rate of the source gas supplied from the gas supply pipe to the process chamber, and the flow rate of the gas including at least the source gas supplied into the process chamber is set to while adjusting each gas supply pipe, out of the plurality of gas supply pipes, the flow rate and flow velocity of the gas containing the raw material gas supplied from the gas supply pipe toward a center of the substrate disposed in the processing chamber A control unit for controlling the flow rate to be larger than the flow rate and flow rate of the gas including the source gas supplied from the gas supply pipe toward the outer peripheral portion of the substrate disposed in the processing chamber ;
A substrate processing apparatus comprising: In addition to the source gas, the gas supply system is configured to supply an inert gas as a carrier gas for transporting the source gas, as a dilution gas for diluting the source gas, and as a purge gas for purging the processing chamber. The substrate processing apparatus according to claim 1. The substrate processing apparatus according to claim 1, wherein the gas supply system further includes an inert gas pipe that introduces an inert gas into the gas supply pipe. The substrate processing apparatus according to claim 1, wherein the plurality of gas supply pipes are provided adjacent to each other. The substrate processing apparatus according to claim 1, wherein the plurality of gas supply pipes are provided separately from each other. The substrate processing apparatus according to claim 1, wherein the flow rate of the gas supplied from the plurality of gas supply pipes is varied. Carrying a substrate into the processing chamber;
Supplying the source gas from a plurality of gas supply pipes for supplying the source gas into the processing chamber,
In the step of supplying the source gas, the flow rate of the source gas supplied from the gas supply pipe to the processing chamber is controlled, and the flow rate of the gas including the source gas supplied from each of the gas supply pipes is controlled. while adjusting, among the plurality of gas supply pipes, the flow rate and flow velocity of the gas containing the raw material gas supplied from the gas supply pipe toward a center of the substrate disposed in the processing chamber, into the processing chamber A method for manufacturing a semiconductor device, wherein a flow rate and a flow rate of a gas including the source gas supplied from the gas supply pipe toward an outer peripheral portion of a substrate to be arranged are larger than a flow rate. A procedure for carrying the substrate into the processing chamber of the substrate processing apparatus ;
Supplying the source gas from a plurality of gas supply pipes for supplying the source gas into the processing chamber,
In the procedure of supplying the source gas, the procedure of controlling the flow rate of the source gas supplied from the gas supply pipe to the processing chamber, and the flow rate of the gas containing the source gas supplied from each of the gas supply pipes while adjusting the among the plurality of gas supply pipes, the flow rate and flow velocity of the gas containing the raw material gas supplied from the gas supply pipe toward a center of the substrate disposed in the processing chamber, the processing chamber program to be executed by Thus the substrate processing apparatus the procedure computers greater than the flow rate and flow rate of the gas containing the raw material gas supplied from the gas supply pipe toward the outer peripheral portion of the substrate disposed.

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