JP6391087B2 - Adsorption device and analyzer - Google Patents

Description

  Embodiments described herein relate generally to an adsorption device and an analysis device.

  Currently, research is underway to clarify metabolic reactions and biochemical pathological mechanisms from the concentration of volatile substances contained in exhaled breath and their fluctuations.

For example, ethane, pentane and hydrogen peroxide (H ₂ O ₂ ) in exhaled breath have a high correlation with oxidative stress. When these concentrations in exhalation increase, symptoms of lipid oxidation, asthma or bronchitis appear.

Nitric oxide (NO), carbon monoxide (CO), and H ₂ O ₂ in exhaled breath have a high correlation with lung diseases. As these concentrations in expired air increase, symptoms of asthma or chronic obstructive pneumonia are seen.

Exhaled hydrogen (H ₂ ) and carbon isotopes are highly correlated with gastrointestinal diseases. Higher concentrations of these in exhaled breath can cause symptoms of dyspepsia, gastritis or duodenal ulcers.

  In addition, acetone in exhaled breath has a high correlation with metabolic abnormalities. As the acetone concentration in the exhalation increases, symptoms of diabetes are seen. On the other hand, people with lower acetone concentrations in breath compared to healthy people tend to have metabolic syndrome.

  The above-described relationship is expected to be applied to simple early bed diagnosis without pain. However, the concentration of volatile substances contained in exhaled breath ranges from ppm (parts by million) to ppb (parts by billion). Therefore, in order to quantitatively analyze the exhalation component, an analyzer having a high resolution is required.

  As this analyzer, a gas analyzer that separates components in exhaled breath using a column and detects the separated components with a photoionization detector or the like is generally known. This analyzer has a sufficient resolution. However, since this analyzer is large in size and expensive, it is difficult to introduce it in a small private hospital. This is the reason why breath analysis is not widespread.

  As another analysis technique, a technique using a property that a metal complex selectively adsorbs a specific molecule is known. For example, certain manganese phthalocyanines have a high adsorption capacity for acetone. When the surface of a conductive substrate made of carbon nanotubes is modified with manganese phthalocyanine, the electrical conductivity changes according to the amount of acetone adsorbed by manganese phthalocyanine. Therefore, the sensor provided with the conductive substrate surface-modified with manganese phthalocyanine can be used for measuring the acetone concentration in the breath.

  However, metal complexes show approximately equal adsorption capacity for molecules with similar chemical structures. If the surface of the conductive substrate is not flat, it is difficult to uniformly modify the surface with a metal complex. Non-uniform surface modification makes accurate measurement difficult.

JP 2010-107310 A

  The problem to be solved by the present invention is to make it possible to realize an analyzer that is small in size and capable of analyzing with high accuracy.

According to the embodiment, a base material made of silicon , a plurality of carbon nanotube bundles extending from the base material and positioned away from each other, and glass not containing alkali ions, directly bonded to the base material, A sealing member that forms a hollow structure containing a plurality of bundles of carbon nanotubes together with the base material, and includes first and second through holes that communicate the internal space and the external space of the hollow structure, respectively. An adsorbing device provided with a sealing base member is provided.

According to another embodiment , the adsorbing device , a support that supports the adsorbing device, a fluid is guided to the adsorbing device supported by the support, and the one or more substances contained in the fluid are A first flow path for adsorbing to the plurality of carbon nanotube bundles; a desorption device for desorbing the one or more substances to the plurality of carbon nanotube bundles; and determining the one or more substances desorbed from the plurality of carbon nanotube bundles. There is provided an analyzer comprising: a measuring device for performing the measurement; and a second flow path for guiding the one or more substances desorbed from the plurality of carbon nanotube bundles from the adsorption device to the measuring device.

The figure which shows schematically the analyzer which concerns on embodiment. The top view of the adsorption | suction apparatus which the analyzer of FIG. 1 contains. Sectional drawing along the III-III line of the adsorption | suction apparatus of FIG. The disassembled perspective view of the adsorption | suction apparatus of FIG.2 and FIG.3. FIG. 5 is a perspective view schematically showing a carbon nanotube bundle included in the ball chuck device of FIGS. 2 to 4. The top view which shows roughly an example of the relationship between arrangement | positioning of a carbon nanotube bundle | flux, and the flow of expiration.

  Hereinafter, embodiments will be described in detail with reference to the drawings. In addition, the same referential mark is attached | subjected to the component which exhibits the same or similar function through all the drawings, and the overlapping description is abbreviate | omitted.

  An analysis apparatus 1 shown in FIG. 1 is an apparatus for analyzing the concentration of a specific component contained in exhaled breath, for example, a volatile organic compound. Here, the specimen is typically human exhalation, but may be exhalation of animals other than humans. The volatile organic compound is, for example, ethane, pentane or acetone.

  The analysis device 1 includes an adsorption device 2, a support 3, a desorption device 4, conduits 5 a and 5 b, and a measurement device 6.

  The adsorption device 2 has a hollow structure that accommodates a plurality of carbon nanotube bundles. These carbon nanotube bundles physically adsorb one or more substances in the breath, that is, the above components. The adsorption device 2 is provided with a pair of through holes that communicate the internal space with the external space. The detailed structure of the adsorption device 2 will be described later.

  The support 3 supports the adsorption device 2. The support 3 may support the adsorption device 2 so as to be detachable, or may support it so as not to be detachable.

  The desorption device 4 causes desorption of the substance from the carbon nanotube bundle. The desorption device 4 is, for example, heating, vibration or light irradiation to the carbon nanotube bundle or the adsorption device 2, decompression to the space in which the carbon nanotube bundle is accommodated, or circulation of fluid such as gas and liquid, or two or more of them The combination causes desorption of the material from the carbon nanotube bundle. Here, as an example, the desorption device 4 is assumed to be a resistance heater.

  One end of the conduit 5 a is connected to one through hole of the adsorption device 2. The conduit 5a constitutes a first flow path that guides exhalation from the mouth of the subject to the adsorption device 2 and adsorbs the one or more substances contained in the exhalation to the carbon nanotube bundle.

  One end of the conduit 5 b is connected to the other through hole of the adsorption device 2. The other end of the conduit 5b is connected to the measuring device 6. The conduit 5b constitutes a second flow path that guides the one or more substances desorbed from the carbon nanotube bundle from the adsorption device 2 to the measurement device 6.

  The measuring device quantifies the one or more substances desorbed from the carbon nanotube bundle. The measuring device is, for example, a gas chromatograph.

  In the analysis by the analyzer 1, first, exhaled air is supplied to the internal space of the adsorption device 2 through the conduit 5a, and exhaled air is discharged from the internal space of the adsorption device 2 through the conduit 5b. When exhaled air flows through the internal space of the adsorption device 2, the carbon nanotube bundle adsorbs a part of the substance contained in the exhaled air. After the carbon nanotube bundle has adsorbed a sufficient amount of substance, the supply of exhalation to the internal space of the adsorption device 2 and the discharge of exhalation from the internal space of the adsorption device 2 are stopped.

  Next, the desorption device 4 is operated. The carbon nanotube bundle does not chemically adsorb the above substances but only physically adsorbs them. Therefore, when the desorption device 4 is operated, the carbon nanotube bundle desorbs almost all of the adsorbed substance. When this desorption occurs, the concentration of the substance in the gas in the internal space of the adsorption device 2 becomes higher than the concentration of the substance in exhaled breath.

  Thereafter, the gas in the internal space of the adsorption device 2 is supplied to the measurement device 6 through the conduit 5b. For example, an inert gas is supplied to the internal space of the adsorption device 2 through the conduit 5a, and the gas containing the substance at a high concentration is transferred from the internal space of the adsorption device 2 to the measurement device 6 through the conduit 5b. Send it out. The measuring device 6 quantifies the substance contained in the gas.

  Many of the components contained in exhaled breath are nitrogen, oxygen, carbon dioxide and water vapor. The concentration of volatile organic compounds in exhaled breath is only 1% or less. Therefore, even if the breath is used as it is for analysis using a gas chromatograph, quantitative analysis cannot be performed with high accuracy.

  On the other hand, in the analyzer 1, a gas with an increased concentration of the substance is supplied to the measuring device 6. Therefore, for example, even if the analysis accuracy of the measuring device 6 is low, quantitative analysis can be performed with sufficiently high accuracy. Moreover, since the measurement apparatus 6 may have low accuracy, it is possible to use an inexpensive apparatus having a small size.

  In addition, the carbon nanotube bundle does not chemically adsorb the above substance, but only physically adsorbs it. Therefore, the adsorption device 2 can be used repeatedly. The adsorption device 2 may be replaced with a new one for each analysis.

  Furthermore, since the adsorption device 2 uses physical adsorption by a carbon nanotube bundle rather than chemical adsorption by a metal complex or the like, nonuniformity due to surface modification by a metal complex does not occur. Therefore, analysis accuracy is not affected by this non-uniformity.

Next, the adsorption device 2 will be described in detail.
As shown in FIGS. 2 to 4, the suction device 2 includes a suction device body 21 and a sealing member 22.

  As shown in FIG. 5, the adsorption device main body 21 includes a base material 211 and a plurality of carbon nanotube bundles 212a to 212d.

  The base material 211 has a thin plate shape, for example. The substrate 211 may be hard or flexible. As a material of the base material 211, for example, silicon, glass, magnesium oxide, sapphire, or aluminum oxide can be used. Here, as an example, the base material 211 is assumed to be a silicon substrate. In the case where a silicon substrate is used as the base material 211, for example, the technology and apparatus used in the semiconductor process can be used for manufacturing the adsorption device body 21.

  The carbon nanotube bundles 212 a to 212 d extend from one main surface of the base material 211. Here, the carbon nanotube bundles 212 a to 212 d extend in a direction substantially perpendicular to one main surface of the base material 211. Each of the carbon nanotube bundles 212a to 212d may extend straight or bend.

  Each of the carbon nanotube bundles 212a to 212d is composed of a large number of carbon nanotubes each extending in the length direction thereof. The carbon nanotube is, for example, a single wall tube. The carbon nanotube may be any of an armchair tube, a zigzag tube, and a chiral tube.

  The length of the carbon nanotube is, for example, in the range of 50 μm to 100 μm. The diameter of the carbon nanotube is, for example, in the range of 10 nm to 100 nm. In each of the carbon nanotube bundles 212a to 212d, the distance between the carbon nanotubes is in the range of 10 nm to 100 nm, for example.

  The diameter of each of the carbon nanotube bundles 212a to 212d is, for example, in the range of 1 μm to 100 μm. The height of the carbon nanotube bundles 212a to 212d is, for example, in the range of 50 μm to 100 μm.

  The carbon nanotube bundles 212a to 212d are located away from each other. The distance between the carbon nanotube bundles 212a to 212d is, for example, in the range of 1 μm to 100 μm.

  The carbon nanotube bundles 212 a to 212 d extend from a plurality of unit regions on the base material 211. Each of these unit areas is composed of a plurality of sub-areas arranged radially. Specifically, each unit region is composed of a plurality of sub-regions, and typically has rotational symmetry. Each sub-region has a shape extending outward from the rotation axis.

  Here, as shown in FIG. 6, each of the unit regions 2110 is composed of a plurality of sub-regions 2110a to 2110d arranged radially. Each of the sub-regions 2110a to 2110d has a shape extending outward from the center of the unit region 2110. Specifically, the center region end of the unit region 2110 has a smaller radius of curvature than the opposite end. It has a droplet shape. The length direction Da of the sub-region 2210a is parallel to the length direction Dc of the sub-region 2110c. The length direction Db of the sub-region 2210b is parallel to the length direction Dd of the sub-region 2110d. The directions Da and Dc are perpendicular to the directions Db and Dd.

  The directions Da to Dd are inclined with respect to the straight line L when viewed from a direction perpendicular to the sub-regions 2110a to 2110d. In this case, the angle θa formed by the direction Da with respect to the straight line L is, for example, in a range greater than 0 ° and less than 90 °. In this case, the angle θb formed by the direction Db with respect to the straight line L is, for example, in a range greater than 90 ° and less than 180 °. Further, in this case, an angle θc formed by the direction Dc with respect to the straight line L is set to be, for example, in a range larger than 180 ° and smaller than 270 °. In this case, the angle θd formed by the direction Dd with respect to the straight line L is, for example, in a range greater than 270 ° and less than 360 °. Here, the angles θa, θb, θc, and θd are 45 °, 135 °, 225 °, and 315 °, respectively.

  The straight line L is a straight line passing through the center of the opening located on the inner space side of the suction device 2 among the openings of the through holes TH1 and TH2 shown in FIGS. The directions Da to Dd do not have to be inclined with respect to the straight line L when viewed from a direction perpendicular to the sub-regions 2110a to 2110d. Further, the sub regions 2110a to 2110d do not have to have a shape extending outward from the center of the unit region 2110.

  The carbon nanotube bundles 212a to 212d have substantially the same cross-sectional shape perpendicular to the height direction as the sub-regions 2110a to 2110d over their entire height. The unit regions 2110 shown in FIG. 6 are arranged vertically and horizontally on the base material 211. As shown in FIGS. 2 to 4, the unit structures 212 each composed of the carbon nanotube bundles 212 a to 212 d are also arranged vertically and horizontally on the base material 211 corresponding to the arrangement of the unit regions 2110.

  Here, each of the unit regions 2110 is composed of four sub-regions 2110a to 2110d, but each of the unit regions 2110 may be composed of two, three, or five or more sub-regions. Alternatively, each unit region 2110 may be one continuous region.

  A base layer 213 shown in FIG. 5 is interposed between the unit region 2110 and the unit structure 212. The underlayer 213 includes a barrier layer 213a and a catalyst layer 213b.

  The barrier layer 213a suppresses the material constituting the catalyst layer 213b from diffusing into the base material 211. The barrier layer 213a is made of, for example, alumina, silicon dioxide, tantalum pentoxide, or hafnium oxide. The barrier layer 213 a exists only between the unit region 2110 and the unit structure 212, but may be provided so as to cover the entire main surface of the base material 211. The barrier layer 213a can be omitted.

  The catalyst layer 213b serves as a seed for generating carbon nanotubes and a catalyst for promoting the growth thereof. The catalyst layer 213b exists only between the unit region 2110 and the unit structure 212. The catalyst layer 213b is made of a metal such as iron, for example.

  The sealing member 22 has a thin plate shape, for example. The sealing member 22 may be hard or flexible. Here, as an example, it is assumed that the sealing member 22 is a glass plate. When a glass plate is used as the sealing member 22, it is easy to form recesses and through-holes described later. Moreover, when a silicon substrate is used as the base material 21 and a glass plate is used as the sealing member 22, they can be joined without an adhesive.

  As shown in FIG. 4, the sealing member 22 has recesses RS1 to RS3 and grooves GR1 and GR2 on one main surface thereof. The recess RS3 is located between the recess RS1 and the recess RS2. The groove GR1 communicates the recess RS1 and the recess RS3. The groove GR2 connects the recess RS1 and the recess RS2.

  Here, the recesses RS1 and the recesses RS3 are connected by the two grooves GR1, but the number of the grooves GR1 that connect the recesses RS1 and the recesses RS3 may be 1 or 3 or more. . In addition, here, the recesses RS2 and RS3 are connected by the two grooves GR2, but the number of the grooves GR2 connecting the recesses RS2 and RS3 may be 1 or 3 or more. Also good.

  The sealing member 22 is joined to the base material 21 so that the bottom surface of the recess RS3 faces the unit structure 212. As shown in FIG. 3, the sealing member 22 forms a hollow structure together with the base material 21. Specifically, in this hollow structure, the recesses RS1 to RS3 shown in FIG. 4 form the chambers CH1 to CH3 shown in FIGS. 2 and 3, respectively. As shown in FIG. 2, the grooves GR1 and GR2 shown in FIG. 4 constitute a flow path FP1 that connects the chambers CH1 and CH3 and a flow path FP2 that connects the chambers CH2 and CH3, respectively. The unit structure 212 is located in the chamber CH3.

  As shown in FIG. 4, the sealing member 22 has a first through hole TH1 and a second through hole TH2 at positions corresponding to the bottoms of the recesses RS1 and RS2. The through hole TH1 communicates the chamber CH1 with the external space of the adsorption device 2. The through hole TH2 communicates the chamber CH2 with the external space of the adsorption device 2. The number of through holes TH1 may be two or more. Also, the number of through holes TH2 may be two or more.

  The sealing member 22 may not be provided with the recesses RS1 to RS3 and the grooves GR1 and GR2. That is, the surface of the sealing member 22 that faces the base material 211 may be flat. In this case, for example, the recesses RS1 to RS3 and the grooves GR1 and GR2 are provided on the surface of the substrate 211 that faces the sealing member 22. The carbon nanotube bundles 212a to 212d are arranged on the bottom surface of the recess RS3.

  The sealing member 22 can be omitted. For example, when the analyzer 1 shown in FIG. 1 includes a container that houses the adsorption device main body 21 and has the same function as the hollow structure described above for the adsorption device 2, the sealing member 22 is omitted. May be. Alternatively, the analysis apparatus 1 shown in FIG. 1 is a member having the same function as the sealing member 22, that is, a member that forms a hollow structure that accommodates the carbon nanotube bundles 212 a to 212 d by being combined with the base material 211. The sealing member 22 may be omitted.

This adsorption device 2 is manufactured by the following method, for example.
First, the suction device main body 21 shown in FIGS. 3 to 5 is prepared. That is, the barrier layer 213a and the catalyst layer 213b shown in FIG. Each of the barrier layer 213a and the catalyst layer 213b is formed by, for example, a sputtering method using a mask. Next, carbon nanotubes are generated and grown, for example, by chemical vapor deposition (CVD). Due to the presence of the catalyst layer 213b, the generation and growth of carbon nanotubes occurs selectively at the position of the catalyst layer 213b. As a result, carbon tube bundles 212a to 212d are obtained.

Next, the adsorption device main body 21 thus obtained and the separately prepared sealing member 22 are joined as shown in FIG. When the base material 211 is made of silicon and the sealing member 22 is made of glass not containing alkali ions such as sodium ions, the adsorption device main body 21 and the sealing member 22 can be joined by, for example, surface active joining. . An adhesive may be used for joining the adsorption device main body 21 and the sealing member 22, but when they are joined directly, components contained in the adhesive do not affect the measurement.
As described above, the adsorption device 2 shown in FIGS. 2 to 4 is obtained.

Next, the flow of exhalation and the like in the adsorption device 2 will be described.
At the time of adsorption, exhaled air is supplied to the internal space of the adsorption device 2 through the through hole TH1 shown in FIG.

  The exhaled air that has passed through the through hole TH1 first reaches the chamber CH1. Since the chamber CH1 and the chamber CH3 are connected by a plurality of flow paths FP1, the flow of exhalation is divided into a plurality of flows by the flow path FP1. Since exhaled air is supplied to the chamber CH3 from a plurality of locations, there is no great variation in the flow rate in the region near the chamber CH1 in the chamber CH3.

  These flows merge in the chamber CH3. In the process of exhalation passing through the chamber CH3, the carbon nanotube bundles constituting the unit structure 212 adsorb one or more substances contained in exhalation.

  Thereafter, the flow of the exhalation is divided into a plurality of flows by the flow path FP2, and merges in the chamber CH2. Since the exhaled air is discharged from a plurality of locations from the chamber CH3, there is no great variation in the flow velocity in the region near the chamber CH2 in the chamber CH3.

  Exhaled air that has reached the chamber CH2 is discharged to the outside of the adsorption device 2 through the through hole TH2.

  At the time of desorption, the desorption device 4 shown in FIG. 1 is operated. Since the carbon nanotube bundles 212a to 212d shown in FIG. 5 only physically adsorb the above-mentioned substance instead of chemical adsorption, when the desorption device 4 shown in FIG. 1 is operated, the carbon nanotube bundle 212a shown in FIG. To 212d desorb almost all of the adsorbed material. When this desorption occurs, the concentration of the substance in the gas in the internal space of the adsorption device 2 shown in FIGS. 2 and 3 becomes higher than the concentration of the substance in the exhaled breath.

  Thereafter, for example, by supplying an inert gas to the internal space of the adsorption device 2 through the through hole TH1, the gas containing the substance at a high concentration is transferred to the outside of the adsorption device 2 through the through hole TH2. Discharge. As in the case of adsorption, the flow rate does not vary greatly in the chamber CH3. Therefore, the gas containing the substance at a high concentration can be discharged only by circulating a relatively small amount of inert gas.

  As described above, each of the carbon nanotube bundles 212a to 212d shown in FIG. 5 includes a large number of carbon nanotubes. In each of the carbon nanotube bundles 212a to 212d, there is a gap between the carbon nanotubes. Therefore, part of the exhalation passes through any one of the carbon nanotube bundles 212a to 212d when passing through the chamber CH3. Accordingly, each of the carbon nanotube bundles 212a to 212d adsorbs one or more substances in exhaled air not only on the surface but also inside. In each of the carbon nanotube bundles 212a to 212d, desorption of the adsorbed substance is unlikely to occur compared to the surface thereof. Accordingly, each of the carbon nanotube bundles 212a to 212d exhibits high adsorption efficiency.

  The carbon nanotube bundles 212a to 212d are positioned away from each other. That is, a gap is provided between the carbon nanotube bundles 212a to 212d. Therefore, the carbon nanotube bundles 212a to 212d do not excessively block the flow of exhalation.

  In addition, as described above, the carbon nanotube bundles 212a to 212d have substantially the same cross-sectional shapes as those of the sub-regions 2110a to 2110d shown in FIG. The directions Da to Dd in FIG. 6 are inclined with respect to the straight line L when viewed from a direction perpendicular to the sub-regions 2110a to 2110d. The direction of the average flow of exhalation in the chamber CH3 in FIG. 2 is parallel to the straight line L in FIG. By adopting such a structure, the flow of exhalation is optimized and high adsorption efficiency can be achieved.

  As described above, the carbon nanotube bundles 212a to 212d only physically adsorb the substance, not chemical adsorption. Therefore, it is easy to desorb almost the entire amount of the substances adsorbed by them.

  Therefore, when this adsorption device 2 is used, a gas having a sufficiently high concentration of the substance can be obtained. Therefore, for example, even if the analysis accuracy of the measuring device is low, quantitative analysis can be performed with sufficiently high accuracy. In addition, since the measurement apparatus may be low in accuracy, it can be used with a small size and a low price.

  As described above, the analysis device 1 and the adsorption device 2 have been described as being used for analysis of exhalation. However, the analysis device 1 and the adsorption device 2 can also be used for analysis of gases other than exhalation. For example, the analysis device 1 and the adsorption device 2 can also be used for analysis of exhaust gas from a combustion device.

  The analysis device 1 and the adsorption device 2 can also be used for liquid analysis. It can also be used for analysis of water such as clean water and sewage.

  The adsorption device 2 can also be used for purposes other than analysis. For example, the adsorption device 2 can be used for an air purifier to adsorb dirt having a size of 100 μm or less such as PM2.5 or floating mold existing in the air.

Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.
The invention described in the original claims is appended below.
[1]
A substrate;
A plurality of carbon nanotube bundles extending from the substrate and positioned away from each other;
An adsorption device comprising:
[2]
A sealing member that is bonded to the base material and that forms a hollow structure containing the plurality of carbon nanotube bundles together with the base material; The adsorbing device according to [1], wherein first and second through holes that communicate with each other are provided.
[3]
The plurality of carbon nanotube bundles are a plurality of unit regions on the substrate, and extend from a plurality of unit regions each of which is composed of a plurality of radially arranged sub-regions [1] or [2] The adsorption device described.
[4]
The plurality of carbon nanotube bundles are a plurality of unit regions on the base material, each extending from a plurality of unit regions each consisting of a plurality of sub-regions arranged radially,
The length direction of each of the plurality of sub-regions, when viewed from a direction perpendicular to the sub-region, is the center of the opening on the inner space side of the first through-hole and the second through-hole. The adsorption device according to [2], which is inclined with respect to a straight line passing through the center of the opening on the internal space side.
[5]
A support that supports the adsorption device according to any one of [1] to [4];
A first flow path for guiding a fluid to the adsorption device supported by the support, and for adsorbing one or more substances contained in the fluid to the plurality of carbon nanotube bundles;
A desorption device for desorbing the one or more substances from the plurality of carbon nanotube bundles;
A measuring device for quantifying the one or more substances desorbed from the plurality of carbon nanotube bundles;
A second flow path for guiding the one or more substances desorbed from the plurality of carbon nanotube bundles from the adsorption device to the measurement device;
Analyzing device equipped with.

  DESCRIPTION OF SYMBOLS 1 ... Analysis apparatus, 2 ... Adsorption apparatus, 3 ... Support body, 4 ... Desorption apparatus, 5a ... Conduit, 5b ... Conduit, 6 ... Measuring apparatus, 21 ... Adsorption apparatus main body, 22 ... Sealing member, 211 ... Base material, 212 ... Unit structure, 212a ... Carbon nanotube bundle, 212b ... Carbon nanotube bundle, 212c ... Carbon nanotube bundle, 212d ... Carbon nanotube bundle, 213 ... Underlayer, 213a ... Barrier layer, 213b ... Catalyst layer, 2110 ... Unit region, 2110a ... sub-region, 2110b ... sub-region, 2110c ... sub-region, 2110d ... sub-region, CH1 ... chamber, CH2 ... chamber, CH3 ... chamber, Da ... length direction, Db ... length direction, Dc ... length direction, Dd ... length direction, FP1 ... flow path, FP2 ... flow path, GR1 ... groove, GR2 ... groove, L ... straight line, RS1 ... concave part, RS2 ... concave part, S3 ... recess, TH1 ... through hole, TH2 ... through hole, .theta.a ... angle, .theta.b ... angle, .theta.c ... angle, [theta] d ... angle.

Claims (4)

A base material made of silicon ;
A plurality of carbon nanotube bundles extending from the substrate and positioned away from each other ;
A sealing member made of glass not containing alkali ions, directly bonded to the base material, and forming a hollow structure containing the plurality of carbon nanotube bundles together with the base material, the internal space of the hollow structure An adsorbing device comprising: a sealing substrate provided with first and second through holes that communicate with each other and the external space . 2. The adsorption device according to claim 1 , wherein the plurality of carbon nanotube bundles are a plurality of unit regions on the base material and extend from a plurality of unit regions, each of which is composed of a plurality of subregions arranged radially. . The plurality of carbon nanotube bundles are a plurality of unit regions on the base material, each extending from a plurality of unit regions each consisting of a plurality of sub-regions arranged radially,
The length direction of each of the plurality of sub-regions, when viewed from a direction perpendicular to the sub-region, is the center of the opening on the inner space side of the first through-hole and the second through-hole. The adsorption device according to claim 1 , wherein the adsorption device is inclined with respect to a straight line passing through the center of the opening on the inner space side. The adsorption device according to any one of claims 1 to 3 ,
A support for supporting the adsorption device ;
A first flow path for guiding a fluid to the adsorption device supported by the support, and for adsorbing one or more substances contained in the fluid to the plurality of carbon nanotube bundles;
A desorption device for desorbing the one or more substances from the plurality of carbon nanotube bundles;
A measuring device for quantifying the one or more substances desorbed from the plurality of carbon nanotube bundles;
An analyzer comprising: a second flow path for guiding the one or more substances desorbed from the plurality of carbon nanotube bundles from the adsorption device to the measurement device.

Images