JP6389412B2

JP6389412B2 - Robot system and control method of robot system

Info

Publication number: JP6389412B2
Application number: JP2014209216A
Authority: JP
Inventors: 保栗林
Original assignee: Nidec Sankyo Corp
Current assignee: Nidec Sankyo Corp
Priority date: 2014-10-10
Filing date: 2014-10-10
Publication date: 2018-09-12
Anticipated expiration: 2034-10-10
Also published as: JP2016081968A

Description

本発明は、円板状に形成されるワークを搬送するロボットと、ワークの位置および向きを補正するためのアライナとを備えるロボットシステムに関する。また、本発明は、かかるロボットシステムの制御方法に関する。 The present invention relates to a robot system including a robot that transports a workpiece formed in a disc shape and an aligner for correcting the position and orientation of the workpiece. The present invention also relates to a method for controlling such a robot system.

従来、ウエハ等の円板状のワーク（加工物）を搬送するロボットと、ロボットによって搬送されるワークの向きを補正する２個のアライナとを備えるウエハソータが知られている（たとえば、特許文献１参照）。特許文献１に記載のウエハソータでは、ロボットは、ワークが搭載される２個のハンドと、２個のハンドが先端側に回動可能に連結されるアームと、アームの基端側が回動可能に連結されるとともにアームおよびハンドを昇降させる本体部とを備えている。アライナは、ワークが搭載されるとともにワークを回転させるチャックと、ワークに形成されるノッチの位置およびワークの半径方向の振れを検知するためのセンサとを備えている。 2. Description of the Related Art Conventionally, a wafer sorter is known that includes a robot that conveys a disk-shaped workpiece (workpiece) such as a wafer and two aligners that correct the orientation of the workpiece conveyed by the robot (for example, Patent Document 1). reference). In the wafer sorter described in Patent Document 1, the robot is capable of rotating two hands on which a workpiece is mounted, an arm in which the two hands are rotatably connected to the distal end side, and a base end side of the arm. And a main body part that is connected and moves up and down the arm and the hand. The aligner includes a chuck on which the workpiece is mounted and rotates the workpiece, and a sensor for detecting the position of the notch formed in the workpiece and the deflection in the radial direction of the workpiece.

特許文献１に記載のウエハソータは、２個のアライナのチャックのそれぞれに搭載されるワークのノッチ位置および振れが検知されると、２個のチャックのうちの一方のチャックに搭載されるワークが２個のハンドのうちの一方のハンドに正しい位置および向きで搭載されるように、一方のチャックを回転させてワークの向きを調整するとともにアームおよび一方のハンドの位置を調整した後に、一方のチャックに搭載されるワークを一方のハンドに搭載する。また、このウエハソータは、その後、２個のチャックのうちの他方のチャックに搭載されるワークが２個のハンドのうちの他方のハンドに正しい位置および向きで搭載されるように、他方のチャックを回転させてワークの向きを調整するとともにアームおよび他方のハンドの位置を調整した後に、他方のチャックに搭載されるワークを他方のハンドに搭載する。 In the wafer sorter described in Patent Document 1, when the notch position and the swing of the workpiece mounted on each of the chucks of the two aligners are detected, the workpiece mounted on one of the two chucks is 2 pieces. Rotate one chuck to adjust the orientation of the workpiece and adjust the position of the arm and one hand so that it is mounted on one of the hands at the correct position and orientation, and then adjust the position of the arm and one hand. The work to be mounted on is mounted on one hand. Further, the wafer sorter then moves the other chuck so that the workpiece mounted on the other chuck of the two chucks is mounted on the other hand of the two hands in the correct position and orientation. After rotating and adjusting the direction of the workpiece and adjusting the positions of the arm and the other hand, the workpiece mounted on the other chuck is mounted on the other hand.

特表２００３−５３１４７９号公報Special table 2003-53479 gazette

特許文献１に記載のウエハソータは、ロボットおよび２個のアライナを用いて、ハンドに搭載されるワークの位置および向きを補正する際に、まず、一方のチャックに搭載されるワークが一方のハンドに正しい位置および向きで搭載されるように、一方のチャックを回転させてワークの向きを調整するとともにアームおよび一方のハンドの位置を調整した後に、一方のチャックに搭載されるワークを一方のハンドに搭載し、その後、他方のチャックに搭載されるワークが他方のハンドに正しい位置および向きで搭載されるように、一方のハンドにワークが搭載されている状態で、他方のチャックを回転させてワークの向きを調整するとともにアームおよび他方のハンドの位置を調整した後に、他方のチャックに搭載されるワークを他方のハンドに搭載している。 The wafer sorter described in Patent Document 1 uses a robot and two aligners to correct the position and orientation of a workpiece mounted on the hand. First, the workpiece mounted on one chuck is placed on one hand. Rotate one chuck to adjust the orientation of the workpiece and adjust the position of the arm and one hand so that the workpiece is loaded in the correct position and orientation. After that, rotate the other chuck while the workpiece is mounted on one hand so that the workpiece mounted on the other chuck is mounted at the correct position and orientation on the other hand. After adjusting the direction of the arm and the position of the arm and the other hand, the workpiece mounted on the other chuck is moved to the other hand. It is mounted to.

すなわち、特許文献１に記載のウエハソータは、ハンドに搭載されるワークの位置および向きを補正する際に、アームおよび一方のハンドの位置を調整してワークを一方のハンドに搭載した後に、再び、アームおよび他方のハンドの位置を調整してワークを他方のハンドに搭載している。そのため、このウエハソータでは、ハンドに搭載されるワークの位置および向きの補正に時間がかかる。 That is, when correcting the position and orientation of the workpiece mounted on the hand, the wafer sorter described in Patent Document 1 adjusts the position of the arm and one hand and loads the workpiece on one hand, The position of the arm and the other hand is adjusted and the work is mounted on the other hand. Therefore, in this wafer sorter, it takes time to correct the position and orientation of the workpiece mounted on the hand.

そこで、本発明の課題は、２枚のワークのそれぞれが２個のハンドのそれぞれに搭載されるロボットシステムにおいて、ハンドに搭載されるワークの位置および向きを補正する際の補正時間を短縮することが可能なロボットシステムを提供することにある。また、本発明の課題は、２枚のワークのそれぞれが２個のハンドのそれぞれに搭載されるロボットシステムの制御方法において、ハンドに搭載されるワークの位置および向きを補正する際の補正時間を短縮することが可能となるロボットシステムの制御方法を提供することにある。 Accordingly, an object of the present invention is to shorten the correction time when correcting the position and orientation of the workpiece mounted on the hand in the robot system in which each of the two workpieces is mounted on each of the two hands. It is to provide a robot system capable of performing the above. Another object of the present invention is to provide a correction time for correcting the position and orientation of the workpiece mounted on the hand in the control method of the robot system in which each of the two workpieces is mounted on each of the two hands. It is an object of the present invention to provide a robot system control method that can be shortened.

上記の課題を解決するため、本発明のロボットシステムは、円板状に形成されるワークを搬送するロボットと、ワークの位置および向きを補正するための第１アライナおよび第２アライナと、ロボット、第１アライナおよび第２アライナを制御する制御部とを備え、ロボットは、ワークとしての第１ワークが搭載される第１ハンドと、ワークとしての第２ワークが搭載される第２ハンドと、第１ハンドおよび第２ハンドがその先端側に回動可能に連結されるアームと、アームの基端側が連結されるとともにアームを昇降させる本体部とを備え、第１ワークには、第１ワークの円周方向の向きを検知するための第１検知用マークが設けられ、第２ワークには、第２ワークの円周方向の向きを検知するための第２検知用マークが設けられ、第１アライナは、第１ワークが搭載されるとともに上下方向を回動の軸方向として第１ワークを回動させる第１回動部と、第１ワークの中心および第１検知用マークを検知するための第１センサとを備え、第２アライナは、第２ワークが搭載されるとともに上下方向を回動の軸方向として第２ワークを回動させる第２回動部と、第２ワークの中心および第２検知用マークを検知するための第２センサとを備え、上下方向から見たときに、アームに対する第１ハンドの回動中心と、アームに対する第２ハンドの回動中心とが一致しており、上下方向から見たときのアームに対する第１ハンドの回動中心および第２ハンドの回動中心をハンド回動中心とすると、上下方向から見たときに、第１ハンドの第１基準点と第１ワークの中心とが一致し、かつ、第１基準点と第１検知用マークとを結んだ線分と、第１基準点とハンド回動中心とを結んだ線分とがなす角度が所定の第１角度となっているときに、第１ワークが正しい位置および向きで第１ハンドに搭載されており、上下方向から見たときに、第２ハンドの第２基準点と第２ワークの中心とが一致し、かつ、第２基準点と第２検知用マークとを結んだ線分と、第２基準点とハンド回動中心とを結んだ線分とがなす角度が所定の第２角度となっているときに、第２ワークが正しい位置および向きで第２ハンドに搭載されており、制御部は、第１回動部に搭載されている第１ワークの中心の位置および第１検知用マークの位置を、第１回動部で第１ワークを回動させたときの第１センサの出力信号に基づいて検知し、第２回動部に搭載されている第２ワークの中心の位置および第２検知用マークの位置を、第２回動部で第２ワークを回動させたときの第２センサの出力信号に基づいて検知するとともに、上下方向から見たときに、検知された第１ワークの中心と第１検知用マークとを結んだ線分に対して第１角度傾くとともに第１ワークの中心を通過する仮想線上の、第１ワークの中心よりも本体部側の点であって、第１基準点とハンド回動中心との距離と同じ距離だけ第１ワークの中心から離れた点を、上下方向を回転の軸方向として第１回動部の回動中心を中心に回転させたときの仮想円を第１仮想円とし、上下方向から見たときに、検知された第２ワークの中心と第２検知用マークとを結んだ線分に対して第２角度傾くとともに第２ワークの中心を通過する仮想線上の、第２ワークの中心よりも本体部側の点であって、第２基準点とハンド回動中心との距離と同じ距離だけ第２ワークの中心から離れた点を、上下方向を回転の軸方向として第２回動部の回動中心を中心に回転させたときの仮想円を第２仮想円とし、上下方向から見たときの第１仮想円と第２仮想円との交点であって、第１ワークの中心および第２ワークの中心よりも本体部側の交点を仮想円交点とすると、上下方向から見たときにハンド回動中心と仮想円交点とが一致するようにアームを動かすとともに、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第１基準点とを結んだ線分と第１基準点と第１検知用マークとを結んだ線分とのなす角度が第１角度となるように第１ハンドおよび第１回動部を回動させ、かつ、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第２基準点とを結んだ線分と第２基準点と第２検知用マークとを結んだ線分とのなす角度が第２角度となるように第２ハンドおよび第２回動部を回動させてから、第１回動部に搭載された第１ワークを第１ハンドに搭載し、第２回動部に搭載された第２ワークを第２ハンドに搭載することを特徴とする。 In order to solve the above problems, a robot system of the present invention includes a robot that transports a workpiece formed in a disk shape, a first aligner and a second aligner for correcting the position and orientation of the workpiece, a robot, A control unit that controls the first aligner and the second aligner, and the robot includes a first hand on which a first work as a work is mounted, a second hand on which a second work as a work is mounted, The first hand and the second hand are provided with an arm that is rotatably connected to the distal end side thereof, and a main body part that is connected to the base end side of the arm and moves the arm up and down. A first detection mark for detecting the circumferential direction is provided, and the second workpiece is provided with a second detection mark for detecting the circumferential direction of the second workpiece. A The inner is configured to detect a first rotating portion that mounts the first workpiece and rotates the first workpiece with the vertical direction as the axis direction of rotation, the center of the first workpiece, and the first detection mark. The second aligner includes a second rotation unit that mounts the second workpiece and rotates the second workpiece with the vertical direction as the axis direction of rotation, and the center of the second workpiece and the second aligner. 2 and a second sensor for detecting the detection mark. When viewed from above and below, the center of rotation of the first hand relative to the arm coincides with the center of rotation of the second hand relative to the arm. When the center of rotation of the first hand and the center of rotation of the second hand relative to the arm when viewed from the vertical direction are the center of rotation of the hand, the first reference point of the first hand when viewed from the vertical direction The center of the first workpiece matches, and When an angle formed by a line segment connecting one reference point and the first detection mark and a line segment connecting the first reference point and the hand rotation center is a predetermined first angle, The first work is mounted on the first hand at the correct position and orientation, and when viewed from above and below, the second reference point of the second hand matches the center of the second work, and the second reference point When the angle formed by the line segment connecting the second detection mark and the line segment connecting the second reference point and the hand rotation center is the predetermined second angle, the second workpiece is The control unit is mounted on the second hand with the correct position and orientation, and the control unit determines the position of the center of the first workpiece and the position of the first detection mark mounted on the first rotation unit. Is detected based on the output signal of the first sensor when the first workpiece is rotated, and is mounted on the second rotating portion. The center position of the second workpiece and the position of the second detection mark are detected based on the output signal of the second sensor when the second workpiece is rotated by the second rotating portion, and viewed from the vertical direction. From the center of the first workpiece on a virtual line that is inclined at the first angle with respect to the line segment connecting the detected center of the first workpiece and the first detection mark and passes through the center of the first workpiece. Is a point on the main body side, and a point separated from the center of the first workpiece by the same distance as the distance between the first reference point and the hand rotation center is defined as the first rotation unit with the vertical direction as the axis direction of rotation. The virtual circle when rotated about the rotation center of the first is the first virtual circle, and when viewed from the vertical direction, the line segment connecting the center of the detected second workpiece and the second detection mark A second workpiece on an imaginary line that is inclined at a second angle with respect to the center and passes through the center of the second workpiece. A point on the side of the main body from the center of the second part, and a point separated from the center of the second workpiece by the same distance as the distance between the second reference point and the center of hand rotation, is defined as the second axial direction. A virtual circle when rotated about the rotation center of the rotation unit is defined as a second virtual circle, which is an intersection of the first virtual circle and the second virtual circle when viewed from above and below, Assuming that the intersection on the main body side with respect to the center of the second workpiece and the center of the second workpiece is a virtual circle intersection, the arm is moved so that the center of the hand rotation coincides with the virtual circle intersection when viewed from the vertical direction, and the vertical direction The angle formed by the line segment connecting the hand rotation center that coincides with the virtual circle intersection when viewed from the first reference point and the line segment connecting the first reference point and the first detection mark is The first hand and the first rotating part are rotated so that the first angle is obtained, and the first hand and the first rotating unit are viewed from above and below. The angle formed by the line segment connecting the hand rotation center that coincides with the virtual circle intersection and the second reference point and the line segment connecting the second reference point and the second detection mark is the second angle. The second hand and the second rotating part are rotated so that the first work is mounted on the first hand, and the first hand mounted on the second rotating part is mounted. Two works are mounted on the second hand.

また、上記の課題を解決するため、本発明のロボットシステムの制御方法は、円板状に形成されるワークを搬送するロボットと、ワークの位置および向きを補正するための第１アライナおよび第２アライナとを備え、ロボットは、ワークとしての第１ワークが搭載される第１ハンドと、ワークとしての第２ワークが搭載される第２ハンドと、第１ハンドおよび第２ハンドがその先端側に回動可能に連結されるアームと、アームの基端側が連結されるとともにアームを昇降させる本体部とを備え、第１ワークには、第１ワークの円周方向の向きを検知するための第１検知用マークが設けられ、第２ワークには、第２ワークの円周方向の向きを検知するための第２検知用マークが設けられ、第１アライナは、第１ワークが搭載されるとともに上下方向を回動の軸方向として第１ワークを回動させる第１回動部と、第１ワークの中心および第１検知用マークを検知するための第１センサとを備え、第２アライナは、第２ワークが搭載されるとともに上下方向を回動の軸方向として第２ワークを回動させる第２回動部と、第２ワークの中心および第２検知用マークを検知するための第２センサとを備え、上下方向から見たときに、アームに対する第１ハンドの回動中心と、アームに対する第２ハンドの回動中心とが一致しており、上下方向から見たときのアームに対する第１ハンドの回動中心および第２ハンドの回動中心をハンド回動中心とすると、上下方向から見たときに、第１ハンドの第１基準点と第１ワークの中心とが一致し、かつ、第１基準点と第１検知用マークとを結んだ線分と、第１基準点とハンド回動中心とを結んだ線分とがなす角度が所定の第１角度となっているときに、第１ワークが正しい位置および向きで第１ハンドに搭載されており、上下方向から見たときに、第２ハンドの第２基準点と第２ワークの中心とが一致し、かつ、第２基準点と第２検知用マークとを結んだ線分と、第２基準点とハンド回動中心とを結んだ線分とがなす角度が所定の第２角度となっているときに、第２ワークが正しい位置および向きで第２ハンドに搭載されているロボットシステムの制御方法であって、第１回動部に搭載されている第１ワークの中心の位置および第１検知用マークの位置を、第１回動部で第１ワークを回動させたときの第１センサの出力信号に基づいて検知し、第２回動部に搭載されている第２ワークの中心の位置および第２検知用マークの位置を、第２回動部で第２ワークを回動させたときの第２センサの出力信号に基づいて検知するとともに、上下方向から見たときに、検知された第１ワークの中心と第１検知用マークとを結んだ線分に対して第１角度傾くとともに第１ワークの中心を通過する仮想線上の、第１ワークの中心よりも本体部側の点であって、第１基準点とハンド回動中心との距離と同じ距離だけ第１ワークの中心から離れた点を、上下方向を回転の軸方向として第１回動部の回動中心を中心に回転させたときの仮想円を第１仮想円とし、上下方向から見たときに、検知された第２ワークの中心と第２検知用マークとを結んだ線分に対して第２角度傾くとともに第２ワークの中心を通過する仮想線上の、第２ワークの中心よりも本体部側の点であって、第２基準点とハンド回動中心との距離と同じ距離だけ第２ワークの中心から離れた点を、上下方向を回転の軸方向として第２回動部の回動中心を中心に回転させたときの仮想円を第２仮想円とし、上下方向から見たときの第１仮想円と第２仮想円との交点であって、第１ワークの中心および第２ワークの中心よりも本体部側の交点を仮想円交点とすると、上下方向から見たときにハンド回動中心と仮想円交点とが一致するようにアームを動かすとともに、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第１基準点とを結んだ線分と第１基準点と第１検知用マークとを結んだ線分とのなす角度が第１角度となるように第１ハンドおよび第１回動部を回動させ、かつ、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第２基準点とを結んだ線分と第２基準点と第２検知用マークとを結んだ線分とのなす角度が第２角度となるように第２ハンドおよび第２回動部を回動させてから、第１回動部に搭載された第１ワークを第１ハンドに搭載し、第２回動部に搭載された第２ワークを第２ハンドに搭載することを特徴とする。 In order to solve the above problems, a control method for a robot system according to the present invention includes a robot that transports a workpiece formed in a disc shape, a first aligner and a second aligner for correcting the position and orientation of the workpiece. The robot includes an aligner, and the robot has a first hand on which a first work as a work is mounted, a second hand on which a second work as a work is mounted, and a first hand and a second hand on the tip side. An arm connected to be rotatable, and a main body part to which the base end side of the arm is connected and to raise and lower the arm are provided, and the first work is provided with a first for detecting the circumferential direction of the first work. 1 detection mark is provided, the second workpiece is provided with a second detection mark for detecting the circumferential direction of the second workpiece, and the first aligner is mounted with the first workpiece. Up and down A first rotation unit that rotates the first workpiece with the direction as the axis direction of rotation, and a first sensor for detecting the center of the first workpiece and the first detection mark, and the second aligner includes: A second rotation unit for mounting the second workpiece and rotating the second workpiece with the vertical direction as the axial direction of rotation, and a second sensor for detecting the center of the second workpiece and the second detection mark The center of rotation of the first hand relative to the arm coincides with the center of rotation of the second hand relative to the arm when viewed from above and below, and the first relative to the arm when viewed from above and below. When the center of rotation of the hand and the center of rotation of the second hand are the center of rotation of the hand, the first reference point of the first hand coincides with the center of the first work when viewed from above and below, and A line segment connecting the first reference point and the first detection mark; When the angle formed by the line segment connecting the first reference point and the hand rotation center is the predetermined first angle, the first work is mounted on the first hand in the correct position and orientation; The second reference point of the second hand and the center of the second workpiece when viewed from above and below, and a line segment connecting the second reference point and the second detection mark; Control of the robot system in which the second workpiece is mounted on the second hand at the correct position and orientation when the angle formed by the line connecting the point and the center of rotation of the hand is a predetermined second angle. The first position when the first work is turned by the first turning part is the method of the center position of the first work mounted on the first turning part and the position of the first detection mark. The position of the center of the second workpiece mounted on the second rotating part is detected based on the output signal of the sensor. And the position of the second detection mark are detected based on the output signal of the second sensor when the second workpiece is rotated by the second rotating unit, and when detected from the vertical direction. A point closer to the main body than the center of the first workpiece on a virtual line that is inclined by the first angle with respect to the line segment connecting the center of the first workpiece and the first detection mark and passes through the center of the first workpiece. A point that is separated from the center of the first workpiece by the same distance as the distance between the first reference point and the hand rotation center is centered on the rotation center of the first rotation unit with the vertical direction as the axis direction of rotation. The virtual circle when rotated to the first direction is the first virtual circle, and when viewed from above and below, the second circle is inclined with respect to the line segment connecting the detected center of the second workpiece and the second detection mark. In addition, on the imaginary line passing through the center of the second workpiece, the main body portion is located at the center of the second workpiece And the center of rotation of the second rotating portion with the vertical direction as the axis direction of rotation, with the point separated from the center of the second workpiece by the same distance as the distance between the second reference point and the center of hand rotation. The virtual circle when rotated about the center is defined as the second virtual circle, and is the intersection of the first virtual circle and the second virtual circle when viewed from above and below, and the center of the first workpiece and the second workpiece If the intersection on the main unit side of the center is a virtual circle intersection, the arm is moved so that the center of the hand rotation and the virtual circle intersection coincide with each other when viewed from the vertical direction, and the virtual circle when viewed from the vertical direction. The angle formed by the line segment connecting the center of hand rotation that coincides with the intersection and the first reference point and the line segment connecting the first reference point and the first detection mark is the first angle. When the first hand and the first rotating part are rotated and viewed from the vertical direction, the virtual circle intersection point and The second hand so that the angle formed by the line connecting the hand rotation center and the second reference point and the line connecting the second reference point and the second detection mark becomes the second angle. And after rotating the second rotating part, the first work mounted on the first rotating part is mounted on the first hand, and the second work mounted on the second rotating part is set on the second hand. It is mounted.

本発明では、上下方向から見たときにハンド回動中心と仮想円交点とが一致するようにアームを動かすとともに、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第１基準点とを結んだ線分と第１基準点と第１検知用マークとを結んだ線分とのなす角度が第１角度となるように第１ハンドおよび第１回動部を回動させ、かつ、上下方向から見たときに仮想円交点と一致しているハンド回動中心と第２基準点とを結んだ線分と第２基準点と第２検知用マークとを結んだ線分とのなす角度が第２角度となるように第２ハンドおよび第２回動部を回動させてから、第１回動部に搭載された第１ワークを第１ハンドに搭載し、第２回動部に搭載された第２ワークを第２ハンドに搭載している。 In the present invention, the arm is moved so that the hand rotation center coincides with the virtual circle intersection when viewed from the vertical direction, and the hand rotation center coincides with the virtual circle intersection when viewed from the vertical direction. The first hand and the first rotating unit are rotated so that the angle formed by the line segment connecting the first reference point and the line segment connecting the first reference point and the first detection mark becomes the first angle. The line segment connecting the second reference point and the second reference point connected to the center of hand rotation that coincides with the virtual circle intersection when viewed from above and below, and the second detection mark are connected. After turning the second hand and the second rotating part so that the angle formed with the line segment becomes the second angle, the first work mounted on the first rotating part is mounted on the first hand, The second workpiece mounted on the second rotating unit is mounted on the second hand.

そのため、本発明では、第１ハンドに第１ワークを搭載する前および第２ハンドに第２ワークを搭載する前の調整動作（すなわち、２個のハンドのそれぞれに２枚のワークのそれぞれを搭載する前の調整動作）を一度に行うことが可能になる。したがって、本発明では、特許文献１に記載のウエハソータのように２個のハンドのそれぞれに２枚のワークのそれぞれを搭載する前に調整動作が２回、個別に行われる場合と比較して、２個のハンドのそれぞれに２枚のワークのそれぞれを搭載する前の調整時間を短くすることが可能になる。その結果、本発明では、２枚のワークのそれぞれが２個のハンドのそれぞれに搭載される場合であっても、ハンドに搭載されるワークの位置および向きを補正する際の補正時間を短縮することが可能になる。 Therefore, in the present invention, the adjustment operation before mounting the first work on the first hand and before mounting the second work on the second hand (that is, mounting each of the two works on each of the two hands) It is possible to perform the adjustment operation before the operation at once. Therefore, in the present invention, as compared with the case where the adjustment operation is performed twice before mounting each of the two workpieces on each of the two hands like the wafer sorter described in Patent Document 1, It becomes possible to shorten the adjustment time before mounting each of the two workpieces on each of the two hands. As a result, in the present invention, even when each of the two workpieces is mounted on each of the two hands, the correction time for correcting the position and orientation of the workpiece mounted on the hands is shortened. It becomes possible.

以上のように、本発明では、２枚のワークのそれぞれが２個のハンドのそれぞれに搭載される場合であっても、ハンドに搭載されるワークの位置および向きを補正する際の補正時間を短縮することが可能になる。 As described above, in the present invention, even when each of the two workpieces is mounted on each of the two hands, the correction time for correcting the position and orientation of the workpiece mounted on the hands is reduced. It becomes possible to shorten.

本発明の実施の形態にかかるロボットシステムのブロック図である。1 is a block diagram of a robot system according to an embodiment of the present invention. 図１に示すロボットシステムが使用される半導体製造システムの概略平面図である。FIG. 2 is a schematic plan view of a semiconductor manufacturing system in which the robot system shown in FIG. 1 is used. 図２に示すハンドにウエハが正しい位置および向きで搭載されているときの状態を説明するための平面図である。FIG. 3 is a plan view for explaining a state when a wafer is mounted on the hand shown in FIG. 2 at a correct position and orientation. 図２に示すアライナからハンドに搭載されるウエハの位置および向きの調整方法を説明するための図である。FIG. 3 is a diagram for explaining a method for adjusting the position and orientation of a wafer mounted on the hand from the aligner shown in FIG. 2. 図２に示すアライナからハンドに搭載されるウエハの位置および向きの調整方法を説明するための図である。FIG. 3 is a diagram for explaining a method for adjusting the position and orientation of a wafer mounted on the hand from the aligner shown in FIG. 2.

以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

（ロボットシステムの構成）
図１は、本発明の実施の形態にかかるロボットシステム１のブロック図である。図２は、図１に示すロボットシステム１が使用される半導体製造システム７の概略平面図である。 (Robot system configuration)
FIG. 1 is a block diagram of a robot system 1 according to an embodiment of the present invention. FIG. 2 is a schematic plan view of a semiconductor manufacturing system 7 in which the robot system 1 shown in FIG. 1 is used.

本形態のロボットシステム１は、ワーク２を搬送するロボット３と、ワーク２の位置および向きを補正するための２個のアライナ４、５と、ロボット３およびアライナ４、５を制御する制御部（コントローラ）６とを備えている。本形態のワーク２は、薄い円板状に形成されるウエハである。したがって、以下の説明では、ワーク２を「ウエハ２」と表記する。ウエハ２には、ウエハ２の円周方向の向きを検知するための検知用マーク２ａ（図３参照）が設けられている。検知用マーク２ａは、たとえば、ノッチ（切欠き）であり、ウエハ２の外周端部分（径方向の外側端部分）の１箇所に形成されている。なお、以下の説明では、上下方向に直交する図２等のＸ方向を「左右方向」とし、上下方向と左右方向とに直交するＹ方向を「前後方向」とするとともに、Ｘ１方向側を「右」側、Ｘ２方向側を「左」側、Ｙ１方向側を「前」側、Ｙ２方向側を「後（後ろ）」側とする。 The robot system 1 according to this embodiment includes a robot 3 that transports a workpiece 2, two aligners 4 and 5 for correcting the position and orientation of the workpiece 2, and a control unit that controls the robot 3 and the aligners 4 and 5 ( Controller) 6. The workpiece 2 of this embodiment is a wafer formed in a thin disk shape. Therefore, in the following description, the workpiece 2 is expressed as “wafer 2”. The wafer 2 is provided with a detection mark 2a (see FIG. 3) for detecting the circumferential direction of the wafer 2. The detection mark 2 a is, for example, a notch (notch), and is formed at one place on the outer peripheral end portion (outer end portion in the radial direction) of the wafer 2. In the following description, the X direction in FIG. 2 orthogonal to the vertical direction is referred to as “left-right direction”, the Y direction orthogonal to the vertical direction and the horizontal direction is referred to as “front-rear direction”, and the X1 direction side is referred to as “ The “right” side, the X2 direction side is the “left” side, the Y1 direction side is the “front” side, and the Y2 direction side is the “rear (back)” side.

ロボットシステム１は、半導体製造システム７に組み込まれて使用される。半導体製造システム７は、図２に示すように、ＥＦＥＭ（ＥｑｕｉｐｍｅｎｔＦｒｏｎｔＥｎｄＭｏｄｕｌｅ）１０と、ウエハ２に対して所定の処理を行うウエハ処理装置１１とを備えている。ＥＦＥＭ１０は、ウエハ処理装置１１の前側に配置されている。ロボットシステム１は、ＥＦＥＭ１０の一部を構成している。また、ＥＦＥＭ１０は、ＦＯＵＰ（ＦｒｏｎｔＯｐｅｎＵｎｉｆｉｅｄＰｏｄ）１２を開閉する複数のロードポート１３と、ロボット３およびアライナ４、５が収容される筺体１４とを備えている。 The robot system 1 is used by being incorporated in a semiconductor manufacturing system 7. As shown in FIG. 2, the semiconductor manufacturing system 7 includes an EFEM (Equipment Front End Module) 10 and a wafer processing apparatus 11 that performs predetermined processing on the wafer 2. The EFEM 10 is disposed on the front side of the wafer processing apparatus 11. The robot system 1 constitutes a part of the EFEM 10. The EFEM 10 includes a plurality of load ports 13 for opening and closing a FOUP (Front Open Unified Pod) 12 and a housing 14 in which the robot 3 and aligners 4 and 5 are accommodated.

筺体１４の内部は、清浄空間となっており、筺体１４の内部では所定のクリーン度が確保されている。ロードポート１３は、筺体１４の前側に配置されている。アライナ４、５は、筺体１４の内部の右端側に配置されている。ロボット３は、アライナ４、５とＦＯＵＰ１２との間、アライナ４、５とウエハ処理装置１１との間、および、ＦＯＵＰ１２とウエハ処理装置１１との間でウエハ２を搬送する。 The inside of the housing 14 is a clean space, and a predetermined cleanliness is secured inside the housing 14. The load port 13 is disposed on the front side of the housing 14. The aligners 4 and 5 are arranged on the right end side inside the housing 14. The robot 3 transfers the wafer 2 between the aligners 4 and 5 and the FOUP 12, between the aligners 4 and 5 and the wafer processing apparatus 11, and between the FOUP 12 and the wafer processing apparatus 11.

ロボット３は、水平多関節ロボットであり、ウエハ２が搭載される２個のハンド１６、１７と、ハンド１６、１７がその先端側に回動可能に連結されるとともに水平方向に動作するアーム１８と、アーム１８の基端側が連結される本体部１９とを備えている。アーム１８は、その基端側が本体部１９に回動可能に連結される第１アーム部２０と、第１アーム部２０の先端側にその基端側が回動可能に連結される第２アーム部２１と、第２アーム部２１の先端側にその基端側が回動可能に連結される第３アーム部２２とから構成されている。本体部１９は、アーム１８を昇降させる昇降機構（図示省略）を備えている。 The robot 3 is a horizontal articulated robot, and includes two hands 16 and 17 on which the wafer 2 is mounted, and an arm 18 that is pivotally connected to the distal end side of the hands 16 and 17 and moves in the horizontal direction. And a main body 19 to which the base end side of the arm 18 is connected. The arm 18 has a first arm portion 20 whose base end side is rotatably connected to the main body portion 19, and a second arm portion whose base end side is rotatably connected to the distal end side of the first arm portion 20. 21 and a third arm portion 22 whose base end side is rotatably connected to the distal end side of the second arm portion 21. The main body 19 includes an elevating mechanism (not shown) that raises and lowers the arm 18.

また、ロボット１は、第１アーム部２０および第２アーム部２１を回動させて第１アーム部２０と第２アーム部２１とからなるアーム１８の一部を伸縮させるアーム部駆動機構と、第３アーム部２２を回転駆動する第３アーム駆動機構と、ハンド１６を回転駆動する第１ハンド駆動機構と、ハンド１７を回転駆動する第２ハンド駆動機構とを備えている。これらの駆動機構は、駆動源となるモータやモータの動力を減速して伝達する減速機等を備えている。 In addition, the robot 1 rotates the first arm unit 20 and the second arm unit 21 to extend and contract a part of the arm 18 composed of the first arm unit 20 and the second arm unit 21; A third arm drive mechanism that rotationally drives the third arm portion 22, a first hand drive mechanism that rotationally drives the hand 16, and a second hand drive mechanism that rotationally drives the hand 17 are provided. These drive mechanisms include a motor serving as a drive source, a speed reducer that decelerates and transmits the power of the motor.

ハンド１６、１７は、上下方向から見たときの形状が略Ｙ形状となるように形成されている。また、ハンド１６とハンド１７とは、上下方向から見たときの形状が同じ形状となるように形成されている。このハンド１６、１７は、第３アーム部２２に連結される連結部２４と、ウエハ２が搭載されるウエハ搭載部２５とから構成されている。ハンド１６、１７は、上下方向で重なるように配置されている。具体的には、ハンド１６が上側に配置され、ハンド１７が下側に配置されている。また、ハンド１６、１７は、第３アーム部２２よりも上側に配置されている。また、上下方向から見たときに、アーム１８に対するハンド１６の回動中心とアーム１８に対するハンド１７の回動中心とは一致している。以下では、上下方向から見たときのアーム１８に対するハンド１６の回動中心およびハンド１７の回動中心をハンド回動中心Ｃ１とする。 The hands 16 and 17 are formed so that the shape when viewed in the vertical direction is substantially Y-shaped. Further, the hand 16 and the hand 17 are formed so as to have the same shape when viewed from above and below. The hands 16 and 17 include a connecting portion 24 connected to the third arm portion 22 and a wafer mounting portion 25 on which the wafer 2 is mounted. The hands 16 and 17 are arranged so as to overlap in the vertical direction. Specifically, the hand 16 is disposed on the upper side and the hand 17 is disposed on the lower side. The hands 16 and 17 are disposed above the third arm portion 22. Further, when viewed from above and below, the center of rotation of the hand 16 relative to the arm 18 and the center of rotation of the hand 17 relative to the arm 18 coincide. Hereinafter, the rotation center of the hand 16 with respect to the arm 18 and the rotation center of the hand 17 when viewed from above and below are referred to as a hand rotation center C1.

なお、本形態のハンド１６は第１ハンドであり、ハンド１７は第２ハンドである。また、本形態では、ハンド１６に搭載されるウエハ２は第１ワークであり、ハンド１７に搭載されるウエハ２は第２ワークである。以下の説明では、ハンド１６に搭載されるウエハ２とハンド１７に搭載されるウエハ２とを区別して表わす場合には、ハンド１６に搭載されるウエハ２を「ウエハ２Ａ」とし、ハンド１７に搭載されるウエハ２を「ウエハ２Ｂ」とする。また、以下の説明では、ウエハ２Ａの検知用マーク２ａを「第１検知用マーク２ａ」とし、ウエハ２Ｂの検知用マーク２ａを「第２検知用マーク２ａ」とする。 In addition, the hand 16 of this embodiment is a first hand, and the hand 17 is a second hand. In the present embodiment, the wafer 2 mounted on the hand 16 is a first workpiece, and the wafer 2 mounted on the hand 17 is a second workpiece. In the following description, when the wafer 2 mounted on the hand 16 and the wafer 2 mounted on the hand 17 are distinguished from each other, the wafer 2 mounted on the hand 16 is referred to as “wafer 2A” and mounted on the hand 17. The wafer 2 to be processed is referred to as “wafer 2B”. In the following description, the detection mark 2a on the wafer 2A is referred to as a “first detection mark 2a”, and the detection mark 2a on the wafer 2B is referred to as a “second detection mark 2a”.

アライナ４は、ウエハ２Ａが搭載されるとともに上下方向を回動の軸方向としてウエハ２Ａを回動させる回動部２８と、ウエハ２Ａの中心Ｃ２（図３参照）および第１検知用マーク２ａを検知するためのセンサ２９とを備えている。アライナ５は、ウエハ２Ｂが搭載されるとともに上下方向を回動の軸方向としてウエハ２Ｂを回動させる回動部３０と、ウエハ２Ｂの中心Ｃ３（図３参照）および第２検知用マーク２ａを検知するためのセンサ３１とを備えている。アライナ４は、アライナ５よりも上側に配置されている。回動部２８、３０には、モータ等の駆動源が連結されている。 The aligner 4 includes a rotation unit 28 for mounting the wafer 2A and rotating the wafer 2A with the vertical direction as the rotation axis direction, the center C2 (see FIG. 3) of the wafer 2A, and the first detection mark 2a. And a sensor 29 for detection. The aligner 5 is provided with a rotation unit 30 for mounting the wafer 2B and rotating the wafer 2B with the vertical direction as the rotation axis direction, the center C3 (see FIG. 3) of the wafer 2B, and the second detection mark 2a. And a sensor 31 for detection. The aligner 4 is disposed above the aligner 5. A driving source such as a motor is connected to the rotating units 28 and 30.

センサ２９、３１は、互いに対向配置される複数の発光素子と受光素子とを備える透過型のラインセンサであり、複数の発光素子と受光素子との間を、ウエハ２の外周端部分が通過するように配置されている。また、センサ２９、３１は、制御部６に接続されており、センサ２９、３１の出力信号は、制御部６に入力される。制御部６は、回動部２８に搭載されているウエハ２Ａの中心Ｃ２の位置および第１検知用マーク２ａの位置を、回動部２８でウエハ２Ａを回動させたときのセンサ２９の出力信号に基づいて検知する。同様に、制御部６は、回動部３０に搭載されているウエハ２Ｂの中心Ｃ３の位置および第２検知用マーク２ａの位置を、回動部３０でウエハ２Ｂを回動させたときのセンサ３１の出力信号に基づいて検知する。 The sensors 29 and 31 are transmissive line sensors each having a plurality of light emitting elements and light receiving elements arranged to face each other, and an outer peripheral end portion of the wafer 2 passes between the plurality of light emitting elements and the light receiving elements. Are arranged as follows. The sensors 29 and 31 are connected to the control unit 6, and output signals from the sensors 29 and 31 are input to the control unit 6. The control unit 6 outputs the sensor 29 when the rotation unit 28 rotates the wafer 2A with respect to the position of the center C2 of the wafer 2A mounted on the rotation unit 28 and the position of the first detection mark 2a. Detect based on signal. Similarly, the control unit 6 detects the position of the center C3 of the wafer 2B mounted on the rotation unit 30 and the position of the second detection mark 2a when the rotation unit 30 rotates the wafer 2B. Detection is based on 31 output signals.

なお、ウエハ２Ａの中心Ｃ２の位置は、回動部２８でウエハ２Ａを回動させたときにセンサ２９で検知されるウエハ２Ａの振れ量に基づいて検知され、ウエハ２Ｂの中心Ｃ３の位置は、回動部３０でウエハ２Ｂを回動させたときにセンサ３１で検知されるウエハ２Ｂの振れ量に基づいて検知される。また、本形態のアライナ４は第１アライナであり、アライナ５は第２アライナである。また、回動部２８は第１回動部であり、回動部２９は第２回動部であり、センサ２９は第１センサであり、センサ３１は第２センサである。 The position of the center C2 of the wafer 2A is detected based on the shake amount of the wafer 2A detected by the sensor 29 when the wafer 2A is rotated by the rotation unit 28, and the position of the center C3 of the wafer 2B is This is detected based on the shake amount of the wafer 2B detected by the sensor 31 when the wafer 2B is rotated by the rotation unit 30. Moreover, the aligner 4 of this form is a 1st aligner, and the aligner 5 is a 2nd aligner. Moreover, the rotation part 28 is a 1st rotation part, the rotation part 29 is a 2nd rotation part, the sensor 29 is a 1st sensor, and the sensor 31 is a 2nd sensor.

（ウエハの位置および向きを補正する際のロボットシステムの制御方法）
図３は、図２に示すハンド１６、１７にウエハ２Ａ、２Ｂが正しい位置および向きで搭載されているときの状態を説明するための平面図である。図４、図５は、図２に示すアライナ４、５からハンド１６、１７に搭載されるウエハ２Ａ、２Ｂの位置および向きの調整方法を説明するための図である。 (Robot system control method for correcting wafer position and orientation)
FIG. 3 is a plan view for explaining a state when the wafers 2A and 2B are mounted on the hands 16 and 17 shown in FIG. 2 at the correct positions and orientations. 4 and 5 are diagrams for explaining a method of adjusting the position and orientation of the wafers 2A and 2B mounted on the hands 16 and 17 from the aligners 4 and 5 shown in FIG.

ウエハ処理装置１１においてウエハ２に対する適切な処理を行うためには、ウエハ２の円周方向において正しい方向を向いているウエハ２を、ウエハ処理装置１１の中の所定の位置へ搬入する必要がある。ウエハ２の円周方向において正しい方向を向いているウエハ２を、ウエハ処理装置１１の中の所定の位置へ搬入するためには、ウエハ処理装置１１に搬入されるウエハ２が、ハンド１６、１７の正しい位置にかつ正しい向きで搭載されていなければならない。 In order to perform an appropriate process on the wafer 2 in the wafer processing apparatus 11, it is necessary to carry the wafer 2 facing in the correct direction in the circumferential direction of the wafer 2 to a predetermined position in the wafer processing apparatus 11. . In order to load the wafer 2 facing in the correct direction in the circumferential direction of the wafer 2 to a predetermined position in the wafer processing apparatus 11, the wafer 2 loaded into the wafer processing apparatus 11 is loaded with the hands 16, 17. Must be mounted in the correct position and in the correct orientation.

ウエハ２Ａがハンド１６の正しい位置に搭載されている場合に、上下方向から見たときのウエハ２Ａの中心Ｃ２と一致するハンド１６側の基準点を第１基準点ＤＰ１とすると、本形態では、図３に示すように、上下方向から見たときに、ハンド１６の第１基準点ＤＰ１とウエハ２Ａの中心Ｃ２とが一致し、かつ、第１基準点ＤＰ１と第１検知用マーク２ａとを結んだ線分Ｌ１と、第１基準点ＤＰ１とハンド回動中心Ｃ１とを結んだ線分Ｌ２とがなす角度が所定の第１角度θ１となっているときに、ウエハ２Ａが正しい位置および向きでハンド１６に搭載されている。 If the reference point on the hand 16 side that coincides with the center C2 of the wafer 2A when viewed from above and below when the wafer 2A is mounted at the correct position of the hand 16 is the first reference point DP1, in this embodiment, As shown in FIG. 3, when viewed from above and below, the first reference point DP1 of the hand 16 and the center C2 of the wafer 2A coincide, and the first reference point DP1 and the first detection mark 2a are When the angle formed by the connected line segment L1 and the line segment L2 connecting the first reference point DP1 and the hand rotation center C1 is a predetermined first angle θ1, the wafer 2A is in the correct position and orientation. It is mounted on the hand 16.

同様に、ウエハ２Ｂがハンド１７の正しい位置に搭載されている場合に、上下方向から見たときのウエハ２Ｂの中心Ｃ３と一致するハンド１７側の基準点を第２基準点ＤＰ２とすると、本形態では、図３に示すように、上下方向から見たときに、ハンド１７の第２基準点ＤＰ２とウエハ２Ｂの中心Ｃ３とが一致し、かつ、第２基準点ＤＰ２と第２検知用マーク２ａとを結んだ線分Ｌ３と、第２基準点ＤＰ２とハンド回動中心Ｃ１とを結んだ線分Ｌ４とがなす角度が所定の第２角度θ２となっているときに、ウエハ２Ｂが正しい位置および向きでハンド１７に搭載されている。なお、本形態では、第１角度θ１と第２角度θ２とが等しくなっている。また、本形態では、第１角度θ１および第２角度θ２は、９０°であるが、第１角度θ１および第２角度θ２は、９０°以外の角度であっても良い。 Similarly, when the wafer 2B is mounted at the correct position of the hand 17, if the reference point on the hand 17 side that coincides with the center C3 of the wafer 2B when viewed from above and below is the second reference point DP2, In the embodiment, as shown in FIG. 3, the second reference point DP2 of the hand 17 coincides with the center C3 of the wafer 2B when viewed from above and below, and the second reference point DP2 and the second detection mark are aligned. The wafer 2B is correct when the angle formed by the line segment L3 connecting 2a and the line segment L4 connecting the second reference point DP2 and the hand rotation center C1 is the predetermined second angle θ2. It is mounted on the hand 17 in position and orientation. In the present embodiment, the first angle θ1 and the second angle θ2 are equal. In the present embodiment, the first angle θ1 and the second angle θ2 are 90 °, but the first angle θ1 and the second angle θ2 may be angles other than 90 °.

本形態では、ウエハ処理装置１１に搬入されるウエハ２Ａ、２Ｂを、ハンド１６、１７に正しい位置および向きで搭載するために、ロボット３およびアライナ４、５を用いて、以下のように、ハンド１６、１７に搭載されるウエハ２の位置および向きを補正する。以下では、ロボット３によってＦＯＵＰ１２から搬出されたウエハ２Ａ、２Ｂが、図４に示す状態でアライナ４、５の回動部２８、３０に搭載される場合を例に、ハンド１６、１７に搭載されるウエハ２の位置および向きの補正方法を説明する。 In this embodiment, in order to mount the wafers 2A and 2B loaded into the wafer processing apparatus 11 on the hands 16 and 17 in the correct positions and orientations, the robot 3 and aligners 4 and 5 are used as follows. The position and orientation of the wafer 2 mounted on 16 and 17 are corrected. Below, the wafers 2A and 2B unloaded from the FOUP 12 by the robot 3 are mounted on the hands 16 and 17 by taking as an example a case where the wafers 2A and 2B are mounted on the rotating portions 28 and 30 of the aligners 4 and 5 in the state shown in FIG. A method for correcting the position and orientation of the wafer 2 will be described.

ロボット３によってＦＯＵＰ１２から搬出されたウエハ２Ａ、２Ｂがアライナ４、５の回動部２８、３０に搭載されると、上述のように、まず、制御部６は、回動部２８に搭載されているウエハ２Ａの中心Ｃ２の位置および第１検知用マーク２ａの位置を、回動部２８でウエハ２Ａを回動させたときのセンサ２９の出力信号に基づいて検知し、回動部３０に搭載されているウエハ２Ｂの中心Ｃ３の位置および第２検知用マーク２ａの位置を、回動部３０でウエハ２Ｂを回動させたときのセンサ３１の出力信号に基づいて検知する。 When the wafers 2A and 2B unloaded from the FOUP 12 by the robot 3 are mounted on the rotating units 28 and 30 of the aligners 4 and 5, the control unit 6 is first mounted on the rotating unit 28 as described above. The position of the center C2 of the wafer 2A and the position of the first detection mark 2a are detected on the basis of the output signal of the sensor 29 when the wafer 2A is rotated by the rotation unit 28 and mounted on the rotation unit 30. The position of the center C3 of the wafer 2B and the position of the second detection mark 2a are detected based on the output signal of the sensor 31 when the wafer 2B is rotated by the rotation unit 30.

ここで、図４に示すように、上下方向から見たときに、検知されたウエハ２Ａの中心Ｃ２と第１検知用マーク２ａとを結んだ線分Ｌ５に対して第１角度θ１だけ傾くとともにウエハ２Ａの中心Ｃ２を通過する仮想線ＩＬ１上の、ウエハ２Ａの中心Ｃ２よりも左側（すなわち、ロボット３の本体部１９側）の点であって、第１基準点ＤＰ１とハンド回動中心Ｃ１との距離Ｄ１（図３参照）と同じ距離だけウエハ２Ａの中心Ｃ２から離れた点を点Ｐ１とし、この点Ｐ１を、上下方向を回転の軸方向として回動部２８の回動中心Ｃ４を中心に回転させたときの仮想円を第１仮想円ＩＣ１とする。 Here, as shown in FIG. 4, when viewed from above and below, it is inclined by a first angle θ1 with respect to a line segment L5 connecting the detected center C2 of the wafer 2A and the first detection mark 2a. A point on the left side of the center C2 of the wafer 2A (that is, the main body 19 side of the robot 3) on the imaginary line IL1 passing through the center C2 of the wafer 2A, that is, the first reference point DP1 and the hand rotation center C1 A point P1 is a point away from the center C2 of the wafer 2A by the same distance as the distance D1 (see FIG. 3), and the rotation center C4 of the rotation unit 28 is defined as the point P1 with the vertical direction as the axis direction of rotation. A virtual circle when rotated to the center is defined as a first virtual circle IC1.

また、図４に示すように、上下方向から見たときに、検知されたウエハ２Ｂの中心Ｃ３と第２検知用マーク２ａとを結んだ線分Ｌ６に対して第２角度θ２だけ傾くとともにウエハ２Ｂの中心Ｃ３を通過する仮想線ＩＬ２上の、ウエハ２Ｂの中心Ｃ３よりも左側の点であって、第２基準点ＤＰ２とハンド回動中心Ｃ１との距離Ｄ２（図３参照）と同じ距離だけウエハ２Ｂの中心Ｃ３から離れた点を点Ｐ２とし、この点Ｐ２を、上下方向を回転の軸方向として回動部３０の回動中心Ｃ５を中心に回転させたときの仮想円を第２仮想円ＩＣ２とする。また、上下方向から見たときの第１仮想円ＩＣ１と第２仮想円ＩＣ２との交点であって、ウエハ２Ａの中心Ｃ２およびウエハ２Ｂの中心Ｃ３よりも左側の交点を仮想円交点Ｃ１０とする。 As shown in FIG. 4, when viewed from above and below, the wafer is inclined by a second angle θ2 with respect to a line segment L6 connecting the detected center C3 of the wafer 2B and the second detection mark 2a, and the wafer. The point on the left side of the center C3 of the wafer 2B on the imaginary line IL2 passing through the center C3 of 2B and the same distance D2 (see FIG. 3) between the second reference point DP2 and the hand rotation center C1 A point that is far from the center C3 of the wafer 2B is a point P2, and a virtual circle when the point P2 is rotated about the rotation center C5 of the rotation unit 30 with the vertical direction as the axis direction of rotation is the second. This is assumed to be a virtual circle IC2. Further, an intersection point between the first virtual circle IC1 and the second virtual circle IC2 when viewed from above and below and to the left of the center C2 of the wafer 2A and the center C3 of the wafer 2B is defined as a virtual circle intersection point C10. .

制御部６は、ウエハ２Ａの中心Ｃ２の位置、ウエハ２Ｂの中心Ｃ３の位置、第１検知用マーク２ａの位置および第２検知用マーク２ａの位置を検知すると、図５に示すように、上下方向から見たときにハンド回動中心Ｃ１と仮想円交点Ｃ１０とが一致するようにアーム１８を動かす。また、制御部６は、上下方向から見たときに仮想円交点Ｃ１０と一致しているハンド回動中心Ｃ１と第１基準点ＤＰ１とを結んだ線分Ｌ２と第１基準点ＤＰ１と第１検知用マーク２ａとを結んだ線分Ｌ１とのなす角度が第１角度θ１となるようにハンド１６および回動部２８を回動させ、かつ、上下方向から見たときに仮想円交点Ｃ１０と一致しているハンド回動中心Ｃ１と第２基準点ＤＰ２とを結んだ線分Ｌ４と第２基準点ＤＰ２と第２検知用マーク２ａとを結んだ線分Ｌ３とのなす角度が第２角度θ２となるようにハンド１７および回動部３０を回動させる。このときには、ウエハ２Ａは、回動部２８によって回転させられて、図５の二点鎖線で示す位置から実線で示す位置に移動し、ウエハ２Ｂは、回動部３０によって回転させられて、図５の二点鎖線で示す位置から実線で示す位置に移動する。 When the controller 6 detects the position of the center C2 of the wafer 2A, the position of the center C3 of the wafer 2B, the position of the first detection mark 2a and the position of the second detection mark 2a, as shown in FIG. When viewed from the direction, the arm 18 is moved so that the hand rotation center C1 coincides with the virtual circle intersection C10. The control unit 6 also includes a line segment L2 connecting the hand rotation center C1 that coincides with the virtual circle intersection C10 and the first reference point DP1 when viewed from the vertical direction, the first reference point DP1, and the first reference point DP1. The hand 16 and the rotation unit 28 are rotated so that the angle formed by the line segment L1 connecting the detection mark 2a becomes the first angle θ1, and when viewed from the vertical direction, the virtual circle intersection C10 and The angle formed by the line segment L4 connecting the coincident hand rotation center C1 and the second reference point DP2 and the line segment L3 connecting the second reference point DP2 and the second detection mark 2a is the second angle. The hand 17 and the rotation unit 30 are rotated so as to be θ2. At this time, the wafer 2A is rotated by the rotating unit 28 and moved from the position indicated by the two-dot chain line in FIG. 5 to the position indicated by the solid line, and the wafer 2B is rotated by the rotating unit 30 to be 5 moves from the position indicated by the two-dot chain line to the position indicated by the solid line.

これらの動作は、制御部６での演算結果に基づいて実行される。また、これらの動作によって、上下方向から見たときに、ウエハ２Ａの中心Ｃ２と第１基準点ＤＰ１とが一致し、ウエハ２Ｂの中心Ｃ３と第２基準点ＤＰ２とが一致する。また、これらの動作の後に、制御部６は、回動部２８に搭載されたウエハ２Ａをハンド１６に搭載し、回動部３０に搭載されたウエハ２Ｂをハンド１７に搭載する。この動作が終了すると、ハンド１６、１７に搭載されウエハ処理装置１１に搬入されるウエハ２Ａ、２Ｂの位置および向きの補正が完了する。 These operations are executed based on the calculation result in the control unit 6. Also, by these operations, the center C2 of the wafer 2A coincides with the first reference point DP1 and the center C3 of the wafer 2B coincides with the second reference point DP2 when viewed from above and below. Further, after these operations, the control unit 6 mounts the wafer 2 </ b> A mounted on the rotation unit 28 on the hand 16 and mounts the wafer 2 </ b> B mounted on the rotation unit 30 on the hand 17. When this operation is completed, the correction of the position and orientation of the wafers 2A and 2B mounted on the hands 16 and 17 and carried into the wafer processing apparatus 11 is completed.

（本形態の主な効果）
以上説明したように、本形態では、上下方向から見たときにハンド回動中心Ｃ１と仮想円交点Ｃ１０とが一致するようにアーム１８を動かすとともに、上下方向から見たときに仮想円交点Ｃ１０と一致しているハンド回動中心Ｃ１と第１基準点ＤＰ１とを結んだ線分Ｌ２と第１基準点ＤＰ１と第１検知用マーク２ａとを結んだ線分Ｌ１とのなす角度が第１角度θ１となるようにハンド１６および回動部２８を回動させ、かつ、上下方向から見たときに仮想円交点Ｃ１０と一致しているハンド回動中心Ｃ１と第２基準点ＤＰ２とを結んだ線分Ｌ４と第２基準点ＤＰ２と第２検知用マーク２ａとを結んだ線分Ｌ３とのなす角度が第２角度θ２となるようにハンド１７および回動部３０を回動させてから、回動部２８に搭載されたウエハ２Ａをハンド１６に搭載し、回動部３０に搭載されたウエハ２Ｂをハンド１７に搭載している。 (Main effects of this form)
As described above, in this embodiment, the arm 18 is moved so that the hand rotation center C1 coincides with the virtual circle intersection C10 when viewed from the vertical direction, and the virtual circle intersection C10 when viewed from the vertical direction. The angle formed by the line segment L2 connecting the hand rotation center C1 that coincides with the first reference point DP1 and the line segment L1 connecting the first reference point DP1 and the first detection mark 2a is first. The hand 16 and the rotation unit 28 are rotated so as to have an angle θ1, and the hand rotation center C1 that coincides with the virtual circle intersection C10 when viewed from the vertical direction is connected to the second reference point DP2. After rotating the hand 17 and the rotation unit 30 so that the angle formed by the line segment L4, the second reference point DP2, and the line segment L3 connecting the second detection mark 2a becomes the second angle θ2. , Hand the wafer 2A mounted on the rotating unit 28 The wafer 2 </ b> B mounted on the rotating unit 30 is mounted on the hand 17.

そのため、本形態では、ハンド１６にウエハ２Ａを搭載する前およびハンド１７にウエハ２Ｂを搭載する前の調整動作（すなわち、２個のハンド１６、１７のそれぞれに２枚のウエハ２Ａ、２Ｂのそれぞれを搭載する前の調整動作）を一度に行うことが可能になる。したがって、本形態では、特許文献１に記載のウエハソータのように２個のハンド１６、１７のそれぞれに２枚のウエハ２Ａ、２Ｂのそれぞれを搭載する前に調整動作が２回、個別に行われる場合と比較して、２個のハンド１６、１７のそれぞれに２枚のウエハ２Ａ、２Ｂのそれぞれを搭載する前の調整時間を短くすることが可能になる。その結果、本形態では、２枚のウエハ２Ａ、２Ｂのそれぞれが２個のハンド１６、１７のそれぞれに搭載される場合であっても、ハンド１６、１７に搭載されるウエハ２Ａ、２Ｂの位置および向きを補正する際の補正時間を短縮することが可能になる。 Therefore, in this embodiment, the adjustment operation before mounting the wafer 2A on the hand 16 and before mounting the wafer 2B on the hand 17 (that is, each of the two wafers 2A and 2B on each of the two hands 16 and 17). Adjustment operation before mounting) can be performed at once. Therefore, in this embodiment, like the wafer sorter described in Patent Document 1, the adjustment operation is performed twice before each of the two wafers 2A and 2B is mounted on the two hands 16 and 17, respectively. Compared with the case, the adjustment time before mounting the two wafers 2A and 2B on the two hands 16 and 17 can be shortened. As a result, in this embodiment, even when each of the two wafers 2A and 2B is mounted on each of the two hands 16 and 17, the position of the wafers 2A and 2B mounted on the hands 16 and 17 is determined. In addition, the correction time for correcting the orientation can be shortened.

（他の実施の形態）
上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.

上述した形態では、アーム１８は、第１アーム部２０、第２アーム部２１および第３アーム部２２の３個のアーム部によって構成されている。この他にもたとえば、アーム１８は、２個のアーム部によって構成されても良いし、４個以上のアーム部によって構成されても良い。また、上述した形態では、ロボットシステム１で取り扱われるワーク２は、ウエハであるが、ロボットシステム１で取り扱われるワーク２は、ウエハ以外の円板状のものであっても良い。 In the embodiment described above, the arm 18 is constituted by three arm portions, that is, the first arm portion 20, the second arm portion 21, and the third arm portion 22. In addition to this, for example, the arm 18 may be constituted by two arm portions or may be constituted by four or more arm portions. In the above-described embodiment, the workpiece 2 handled by the robot system 1 is a wafer. However, the workpiece 2 handled by the robot system 1 may be a disk-like one other than the wafer.

１ロボットシステム
２ウエハ（ワーク）
２Ａウエハ（ワーク、第１ワーク）
２Ｂウエハ（ワーク、第２ワーク）
２ａ検知用マーク（第１検知用マーク、第２検知用マーク）
３ロボット
４アライナ（第１アライナ）
５アライナ（第２アライナ）
６制御部
１６ハンド（第１ハンド）
１７ハンド（第２ハンド）
１８アーム
１９本体部
２８回動部（第１回動部）
２９センサ（第１センサ）
３０回動部（第２回動部）
３１センサ（第２センサ）
Ｃ１ハンド回動中心
Ｃ２ウエハの中心（第１ワークの中心）
Ｃ３ウエハの中心（第２ワークの中心）
Ｃ４回動部の回動中心（第１回動部の回動中心）
Ｃ５回動部の回動中心（第２回動部の回動中心）
Ｃ１０仮想円交点
Ｄ１第１基準点とハンド回動中心との距離
Ｄ２第２基準点とハンド回動中心との距離
ＤＰ１第１基準点
ＤＰ２第２基準点
ＩＣ１第１仮想円
ＩＣ２第２仮想円
ＩＬ１、ＩＬ２仮想線
Ｌ１第１基準点と第１検知用マークとを結んだ線分
Ｌ２第１基準点とハンド回動中心とを結んだ線分
Ｌ３第２基準点と第２検知用マークとを結んだ線分
Ｌ４第２基準点とハンド回動中心とを結んだ線分
Ｌ５第１ワークの中心と第１検知用マークとを結んだ線分
Ｌ６第２ワークの中心と第２検知用マークとを結んだ線分
θ１第１角度
θ２第２角度 1 Robot system 2 Wafer (work)
2A wafer (work, first work)
2B wafer (work, second work)
2a Detection mark (first detection mark, second detection mark)
3 Robot 4 Aligner (First Aligner)
5 aligner (second aligner)
6 Control unit 16 Hand (first hand)
17 hands (second hand)
18 Arm 19 Body 28 Rotating part (first rotating part)
29 Sensor (first sensor)
30 Rotating part (second rotating part)
31 sensor (second sensor)
C1 Hand rotation center C2 Wafer center (center of the first workpiece)
C3 Wafer center (center of the second workpiece)
C4 Rotation center of the rotation part (Rotation center of the first rotation part)
C5 Rotation center of the rotation part (Rotation center of the second rotation part)
C10 Virtual circle intersection D1 Distance between first reference point and hand rotation center D2 Distance between second reference point and hand rotation center DP1 First reference point DP2 Second reference point IC1 First virtual circle IC2 Second virtual circle IL1, IL2 Virtual line L1 Line segment connecting the first reference point and the first detection mark L2 Line segment connecting the first reference point and the hand rotation center L3 The second reference point and the second detection mark L4 Line segment connecting the second reference point and the center of hand rotation L5 Line segment connecting the center of the first workpiece and the first detection mark L6 Center of the second workpiece and the second detection Line connecting the mark θ1 First angle θ2 Second angle

Claims

A robot for conveying a workpiece formed in a disk shape, a first aligner and a second aligner for correcting the position and orientation of the workpiece, and a control for controlling the robot, the first aligner and the second aligner With
The robot includes a first hand on which a first work as the work is mounted, a second hand on which a second work as the work is mounted, and the first hand and the second hand on the tip side. An arm that is rotatably connected, and a main body part that is connected to a base end side of the arm and raises and lowers the arm;
The first workpiece is provided with a first detection mark for detecting the circumferential direction of the first workpiece,
The second workpiece is provided with a second detection mark for detecting the circumferential direction of the second workpiece,
The first aligner includes a first rotation unit that mounts the first workpiece and rotates the first workpiece with the vertical direction as an axial direction of rotation, the center of the first workpiece, and the first detection. A first sensor for detecting the mark for use,
The second aligner is mounted with the second work and rotates the second work with the vertical direction as the axial direction of rotation, the center of the second work and the second detection. A second sensor for detecting the mark for use,
When viewed from above and below, the center of rotation of the first hand relative to the arm coincides with the center of rotation of the second hand relative to the arm,
When the center of rotation of the first hand and the center of rotation of the second hand relative to the arm when viewed from above and below are the center of rotation of the hand,
A line segment in which the first reference point of the first hand coincides with the center of the first work and the first reference point and the first detection mark are connected when viewed from above and below. When the angle formed by the line segment connecting the first reference point and the center of rotation of the hand is a predetermined first angle, the first work is placed on the first hand in the correct position and orientation. Installed,
A line segment in which the second reference point of the second hand coincides with the center of the second workpiece when viewed from above and below, and the second reference point and the second detection mark are connected. When the angle formed by the line connecting the second reference point and the center of rotation of the hand is a predetermined second angle, the second workpiece is placed on the second hand in the correct position and orientation. Installed,
The controller is
The position of the center of the first work and the position of the first detection mark mounted on the first turning part are the first when the first work is turned by the first turning part. And detecting the position of the center of the second workpiece and the position of the second detection mark mounted on the second rotating part by the second rotating part. 2 based on the output signal of the second sensor when the work is rotated,
When viewed from above and below, on an imaginary line that is inclined by the first angle with respect to a line segment that connects the detected center of the first workpiece and the first detection mark and passes through the center of the first workpiece. A point closer to the main body than the center of the first work, and a point separated from the center of the first work by the same distance as the distance between the first reference point and the hand rotation center, The virtual circle when rotated about the rotation center of the first rotation unit with the vertical direction as the axis direction of rotation is the first virtual circle, and the second workpiece detected when viewed from the vertical direction On the imaginary line that passes through the center of the second workpiece and tilts the second angle with respect to a line segment connecting the center of the second workpiece and the second detection mark and is closer to the main body than the center of the second workpiece. A distance between the second reference point and the hand rotation center A virtual circle when a point separated from the center of the second workpiece by the same distance is rotated around the rotation center of the second rotation unit with the vertical direction as the axis direction of rotation is defined as a second virtual circle, An intersection of the first imaginary circle and the second imaginary circle when viewed from above and below, and an intersection on the main body side with respect to the center of the first workpiece and the center of the second workpiece is a virtual circle intersection Then,
The hand rotation center coincides with the virtual circle intersection point when viewed from the vertical direction while moving the arm so that the hand rotation center coincides with the virtual circle intersection point when viewed from the vertical direction. And the first hand and the first hand so that an angle formed by a line segment connecting the first reference point and a line segment connecting the first reference point and the first detection mark becomes the first angle. A line segment connecting the second reference point and the second reference point that rotates the first rotating part and is coincident with the virtual circle intersection when viewed from the vertical direction, and the second reference. The first rotation is performed after the second hand and the second rotating unit are rotated so that an angle formed by a line connecting a point and the second detection mark becomes the second angle. The first work mounted on the part is mounted on the first hand and mounted on the second rotating part. Robot system characterized by onboard the second workpiece to the second hand.

A robot for conveying a workpiece formed in a disc shape, and a first aligner and a second aligner for correcting the position and orientation of the workpiece,
The robot includes a first hand on which a first work as the work is mounted, a second hand on which a second work as the work is mounted, and the first hand and the second hand on the tip side. An arm that is rotatably connected, and a main body part that is connected to a base end side of the arm and raises and lowers the arm;
The first workpiece is provided with a first detection mark for detecting the circumferential direction of the first workpiece,
The second workpiece is provided with a second detection mark for detecting the circumferential direction of the second workpiece,
The first aligner includes a first rotation unit that mounts the first workpiece and rotates the first workpiece with the vertical direction as an axial direction of rotation, the center of the first workpiece, and the first detection. A first sensor for detecting the mark for use,
The second aligner is mounted with the second work and rotates the second work with the vertical direction as the axial direction of rotation, the center of the second work and the second detection. A second sensor for detecting the mark for use,
When viewed from above and below, the center of rotation of the first hand relative to the arm coincides with the center of rotation of the second hand relative to the arm,
When the center of rotation of the first hand and the center of rotation of the second hand relative to the arm when viewed from above and below are the center of rotation of the hand,
A line segment in which the first reference point of the first hand coincides with the center of the first work and the first reference point and the first detection mark are connected when viewed from above and below. When the angle formed by the line segment connecting the first reference point and the center of rotation of the hand is a predetermined first angle, the first work is placed on the first hand in the correct position and orientation. Installed,
A line segment in which the second reference point of the second hand coincides with the center of the second workpiece when viewed from above and below, and the second reference point and the second detection mark are connected. When the angle formed by the line connecting the second reference point and the center of rotation of the hand is a predetermined second angle, the second workpiece is placed on the second hand in the correct position and orientation. A method of controlling a mounted robot system,
The position of the center of the first work and the position of the first detection mark mounted on the first turning part are the first when the first work is turned by the first turning part. And detecting the position of the center of the second workpiece and the position of the second detection mark mounted on the second rotating part by the second rotating part. 2 based on the output signal of the second sensor when the work is rotated,
When viewed from above and below, on an imaginary line that is inclined by the first angle with respect to a line segment that connects the detected center of the first workpiece and the first detection mark and passes through the center of the first workpiece. A point closer to the main body than the center of the first work, and a point separated from the center of the first work by the same distance as the distance between the first reference point and the hand rotation center, The virtual circle when rotated about the rotation center of the first rotation unit with the vertical direction as the axis direction of rotation is the first virtual circle, and the second workpiece detected when viewed from the vertical direction On the imaginary line that passes through the center of the second workpiece and tilts the second angle with respect to a line segment connecting the center of the second workpiece and the second detection mark and is closer to the main body than the center of the second workpiece. A distance between the second reference point and the hand rotation center A virtual circle when a point separated from the center of the second workpiece by the same distance is rotated around the rotation center of the second rotation unit with the vertical direction as the axis direction of rotation is defined as a second virtual circle, An intersection of the first imaginary circle and the second imaginary circle when viewed from above and below, and an intersection on the main body side with respect to the center of the first workpiece and the center of the second workpiece is a virtual circle intersection Then,
The hand rotation center coincides with the virtual circle intersection point when viewed from the vertical direction while moving the arm so that the hand rotation center coincides with the virtual circle intersection point when viewed from the vertical direction. And the first hand and the first hand so that an angle formed by a line segment connecting the first reference point and a line segment connecting the first reference point and the first detection mark becomes the first angle. A line segment connecting the second reference point and the second reference point that rotates the first rotating part and is coincident with the virtual circle intersection when viewed from the vertical direction, and the second reference. The first rotation is performed after the second hand and the second rotating unit are rotated so that an angle formed by a line connecting a point and the second detection mark becomes the second angle. The first work mounted on the part is mounted on the first hand and mounted on the second rotating part. Control method for a robot system, characterized in that the onboard the second workpiece to the second hand.