JP6374724B2 - Cavity tube polishing equipment - Google Patents

Description

  The present invention relates to a polishing apparatus for electrolytic polishing an inner surface of a hollow tube, and more particularly to a polishing device for a hollow tube with less influence of bubbles.

  A linear collider is being built as a device that collides positrons and electrons to form a big bang state (ILC project). As shown in FIG. 8, the linear collider uses a niobium hollow tube 100 having flanges 101a and 101b at both ends and whose diameter periodically changes in the axial direction. One of the elements for obtaining a predetermined effect in this apparatus is whether or not the inner surface of the niobium hollow tube 100 is smooth.

  However, since the hollow tube 100 is subjected to excessive pressure and heat during molding, the structure of the inner surface thereof is unevenly distorted. If this surface state is left as it is, the electrical and magnetic characteristics are also non-uniform, and as a result, a predetermined speed cannot be given to electrons and protons. Therefore, a method of polishing the inner surface of the hollow tube to a predetermined thickness has been developed.

  Japanese Patent Laid-Open No. 11-350200 discloses a structure in which a rod-shaped electrode is inserted into a hollow tube and electropolishing is performed. However, since the electrode is not shaped along the inner surface of the hollow tube, uneven polishing can be caused by a portion. Become. Therefore, the applicant of the present invention is PCT JP 2013/068593, and the electrode shaft is provided with at least one single blade corresponding to the inner peripheral surface shape of the hollow tube, and the storage state in which the single blade is wound around the electrode shaft; We have proposed a polishing electrode capable of transitioning to an operating state in which a single blade is extended radially from an electrode shaft. As a result, the shape of the inner surface of the hollow tube matches the shape of the electrode, and the inner surface of the hollow tube can be uniformly polished.

JP-A-11-350200 PCT JP 2013/068593

  The polishing electrode disclosed in PCT JP 2013/068593 is extremely effective as an electrode for polishing the inner surface of a hollow tube, and is expected to be widely used in the future. When electrolytic polishing is performed using this electrode, a method is adopted in which a hollow tube is installed vertically, a polishing liquid is supplied from an opening below the hollow tube, and discharged from an upper opening. The intention is to expel bubbles generated when the inside of the hollow pipe is being polished upward by the flow of the polishing liquid from below.

  However, the target hollow tube has periodic irregularities inside, and a portion where the bubbles stay is generated in the flow of the simple polishing liquid from below as described above. When the bubbles stay, it is natural that the electrolytic surface of the portion deteriorates.

  The present application has been proposed in view of the above-described conventional circumstances, and an object thereof is to suppress the influence of bubbles generated during the polishing process.

  The present invention employs the following configuration in a polishing apparatus using an electrode for polishing a hollow tube whose inner diameter varies depending on the position.

First, the polishing electrode used in the present invention includes a blade electrode composed of at least one single blade corresponding to the inner peripheral surface shape of the hollow tube on the electrode shaft, and the blade electrode is wound around the electrode shaft. It is configured to be able to transition between a rotated storage state and an operation state in which the blade electrode is extended in the radial direction from the electrode shaft.

  This polishing electrode is inserted and installed in the cavity tube so that the electrode axis and the axis of the cavity tube coincide.

  In the present invention, a pipe is used for the electrode shaft, and a liquid supply hole penetrating from the inside to the outside of the electrode shaft is provided at a position corresponding to each bulge of the hollow tube of the electrode shaft. The polishing liquid supplied from the polishing liquid tank is supplied to the electrode shaft that is the pipe through a liquid inlet provided at one end of the electrode shaft. Further, the hollow tube is filled with the polishing liquid through the liquid supply hole provided in the electrode shaft. A liquid passing part is provided between the hollow pipe and the pipe, and the polishing liquid supplied through the liquid supply hole is collected at the liquid discharge port through the liquid passing part, and is returned from here to the polishing liquid tank. It is configured.

  Bubbles generated in the polishing liquid during electropolishing try to stay in the bulges forming the hollow tube, but the polishing liquid supplied from the liquid supply hole becomes turbulent and does not stay in one place. In addition, it can act to expel each bulge quickly and improve the quality of polishing.

The side view which shows the use condition of the electrode of this invention. The top view which shows the accommodation state of the electrode of the unit of this invention. The top view which shows the operating state of the electrode of the unit of this invention. The perspective view which shows embodiment of the electrode of this invention. The disassembled perspective view of FIG. The perspective view which shows embodiment in the case where there are a plurality of blade electrodes. FIG. 7 is an exploded perspective view of FIG. 6. Front view of hollow tube

  FIG. 1 is a diagram showing a state in which electropolishing is performed using the hollow tube electrolysis apparatus according to the present invention, and FIGS. 4 and 5 show one unit of an electrode used in the present invention (one of the hollow tubes). In the following, the unit electrode will be described first.

  4 is a perspective view showing an electrode used in the present invention, and FIG. 5 is an exploded perspective view of FIG. 4, both showing a state in which a hollow tube is omitted. FIG. 2 is a plan view of FIG. 4 showing the storage state, and FIG. 3 is a plan view of FIG. 4 showing the operating state. The storage state and the operation state will be described below.

  The electrode shaft 21 has a base end with a predetermined width in the axial direction and an outer peripheral end corresponding to the shape of the inner surface of the bulge portion of the hollow tube 100 to be polished, and at least the outer peripheral end is made of metal. A single blade or a plurality of thin blades 22a, 22b,... (Four in the drawing) are arranged at equal intervals in the circumferential direction to form the blade electrode 22.

  Each of the single blades 22a, 22b,... Constituting the blade electrode 22 has flexibility and has a minimum diameter when wound on the electrode shaft 21, and in this state, is concentric with the electrode shaft 21. It is accommodated in the arranged storage cylinder 29. A slit group 23 (23a, 23b,...) In the axial direction is provided at a position corresponding to the tip of each single blade 22a, 22b,. .. Are inserted through the slits 23a, 23b,... To such a degree that the tip portions of the single blades 22a, 22b,. Thus, by rotating the electrode shaft 21 and the storage cylinder 29 relatively, the tips of the single blades 22a, 22b,... Can be inserted and removed in the radial direction, and the tips of the single blades 22a, 22b,. The diameter can be adjusted (diameter adjusting means: electrode shaft 21 + blade electrode 22 + housing cylinder 29 + slit group 23).

In addition, as a configuration in which the storage cylinder 29 is concentrically disposed on the electrode shaft 21, for example,
It can be considered that a spacer 30 having a diameter larger than that of the electrode shaft 21 and matching the diameter of the storage cylinder 29 is fitted to the electrode shaft 21.

  As described above, the blade electrode 22 takes two modes, that is, a storage state and an operation state.

That is, as shown in FIG. 2 in plan view, the state where the tips of the single blades 22a, 22b,... Slightly protrude from the slits 23a, 23b,. As shown in FIG. 3, the electrode shaft 21 and the housing cylinder 29 are relatively rotated, and the outer peripheral ends of the single blades 22 a, 22 b... Are pushed out near the inner peripheral surface of the cavity tube 100 ( The distance between the outer peripheral ends of the single blades 22a, 22b,... And the inner peripheral surface of the hollow tube 100 is, for example, about 1 cm).

  Although the unit electrode 20 is configured as described above, the number of bulges on the inner peripheral surface of the hollow tube 100 is not one, but there are a plurality of periodic swells in the axial direction as shown in FIG. Therefore, as shown in FIGS. 6 and 7, the actual electrode 20 has the length of the electrode shaft 21 corresponding to the length of the shaft of the hollow tube 100, and the number of blade electrodes 22 is the number of the inner surface of the hollow tube 100. It is provided corresponding to the number of bulges. Further, as shown in FIGS. 6 and 7, the storage cylinder 29 is also substantially the same length as the electrode shaft 21, and is provided with a set of slit groups 23 (23a, 23b,...). Common to a plurality of single wings in the direction.

  A pipe is used as the electrode shaft 21 so that the polishing liquid can pass therethrough. Further, at least one liquid supply hole 211 corresponding to each bulge is provided through the inside and outside of the electrode shaft 21. Thus, as will be described later, the polishing liquid is supplied corresponding to each bulge, and the turbulent flow of the polishing liquid in the bulge occurs, so that the influence of bubbles can be suppressed.

  FIG. 1 is a side view showing an apparatus for polishing the inner surface of a hollow tube using the electrode configured as described above.

  A base 11 is provided on the base 10, and a liquid introduction port 14 is provided below the center of the base 11. A polishing liquid from a polishing liquid tank 15 is supplied to the liquid introduction port 14 via a pump 16. Are being supplied. Further, as described below, the polishing liquid can be introduced into the hollow tube 100 placed on the gantry 11 via the electrode shaft 21.

  On the upper side of the gantry 11, a hollow tube 100 as an object to be polished is fixed using one flange 101a. In this state, the accommodated electrode 20 is inserted from the upper end of the cavity tube 100. At this time, the electrode shaft 21 of the electrode 20 is rotatably passed through the liquid introduction port 14, and the lower end thereof is opened to the liquid introduction port 14.

  Further to the electrode shaft 21. A lead shaft 213 is rotatably led to the lower side of the liquid inlet 14 at the shaft core, and power is supplied from the power source via the terminal 17.

  With the electrode 20 inserted through the hollow tube 100 as described above, the operator rotates the electrode shaft 21 while holding the upper end of the storage cylinder 29 by hand, and extends the diameter of each single blade 22a, 22b,. Then, the operating state is formed.

  Next, the liquid outlet 19 is fixed on the other flange 101 b of the hollow tube 100. At this time, the electrode shaft 21 protrudes in a liquid-tight and rotatable manner on the upper end of the liquid outlet port 19.

  A liquid outlet 19 is provided on the upper side of the hollow pipe 100 so as to receive the polishing liquid overflowing the upper side of the hollow pipe 100 through each bulge and return it to the polishing liquid tank 15 as described below.

  That is, the narrow-diameter portion (where the electrode 20 is inserted) that connects the bulges of the hollow tube 100 has a margin through which the polishing liquid can pass and becomes the liquid passage portion 212. The polishing liquid supplied to each bulge from the liquid supply hole 211 is discharged to the liquid outlet 19 through the liquid passage 212 and returned to the polishing liquid tank 15.

  In addition, in order to ensure the stability on the gantry 11, the support frame 18 which fixes the cavity pipe | tube 100 is supported by the support | pillar which is not illustrated.

  Since the mounting structure of the hollow tube 100 and the installation structure of the electrode 20 can be variously considered in addition to the above, further explanation is omitted here, but the electrode 20 (electrode shaft 21 and blade electrode 22 inserted as described above) is omitted here. The storage cylinder 29) is configured to be able to rotate with respect to the hollow tube 100 when a rotational force is applied to the electrode shaft 21, and when the electrode shaft 21 rotates, each single blade 22a, 22b. Will rotate inside. The rotational force may be applied from the driving unit 120.

  With the above configuration, the polishing liquid is introduced from the polishing liquid tank 15 into the liquid inlet 14 by the liquid supply pump 16. The polishing liquid guided to the liquid inlet 14 is filled from the opening at the lower end of the electrode shaft 21 into the bulge of the hollow tube 100 at a predetermined flow rate through the liquid supply hole 211 at a position corresponding to each bulge. Further, the liquid is collected in the liquid outlet 19 via the liquid passage part 212 and returned to the polishing liquid tank 15.

  When the electrode shaft 21 is slowly rotated by applying a voltage necessary for polishing between the electrode shaft 21 and the cavity tube 100 while circulating the polishing liquid as described above, the inner surface of the cavity tube 100 is polished. However, at this time, a large number of bubbles are generated, and when the bubbles are accumulated, the electrolytic quality of the portion is lowered. In the present invention, the liquid passage hole 211 is provided as described above, and the polishing liquid is supplied to each bulge from here, so that the turbulent flow of the polishing liquid is generated in each bulge and the bubbles are in one place. It is pushed out to the liquid discharge port 19 through the liquid passage part 212 so as not to stay. Therefore, a good quality electrolytic treatment can be obtained.

  When polishing is completed as described above, the polishing liquid is discharged (for example, from a drain (not shown) provided in the liquid inlet 14), and cleaning water is sent from the liquid supply pump 16 to the cavity tube 100 for cleaning. . Thereafter, the electrode 20 is placed in the retracted state, and the work is completed by removing the electrode 20 from the hollow tube 100.

  As described above, the present invention is effective even when the inner surface of a hollow tube whose inner diameter varies depending on the portion is polished with an electrode having a configuration in which a blade electrode having a single blade matching the inner diameter is expanded. The inner surface can be uniformly polished. It can be applied to products that require higher accuracy, such as high-speed accelerators. Of course, it can be applied not only to electropolishing but also to electroplating.

DESCRIPTION OF SYMBOLS 10 Base 11 Base 14 Liquid inlet 17 Liquid outlet 21 Electrode shaft 20 Electrode 21 Electrode shaft 22 Blade electrode 22a, 22b .. Single blade 23 Slit group 23a, 23b .. 212 fluid passage

Claims (1)

The electrode axis, with at least one extension wings electrode composed of a single blade corresponding to the inner peripheral shape of the cavity tube, and accommodated state wound with the blade electrode to the electrode axis, the electrode axis the blade electrode In the hollow tube polishing apparatus, the polishing electrode capable of transitioning from the radially extending operation state to the working state is mounted on the hollow tube with the electrode axis and the axial center of the hollow tube aligned.
The electrode shaft using a pipe;
A liquid inlet for supplying a polishing liquid from one end of the electrode shaft;
Supplying a polishing liquid at a position corresponding to the blade electrode with respect to the cavity tube, and a liquid supply hole provided in the pipe,
A polishing apparatus for a hollow pipe, comprising: a liquid passing part provided between the hollow pipe and the pipe; and a liquid discharge port for returning the polishing liquid discharged from the liquid passing part to a polishing liquid tank.

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