JP6364467B2 - Bonding device and bonding jig applied to the bonding device - Google Patents

Description

  The present invention relates to a bonding apparatus for bonding a pair of workpieces such as a liquid crystal panel and a touch panel, and a bonding jig applied to the bonding apparatus.

  The present applicant has previously proposed a bonding apparatus for bonding a display panel to a bonding target (Patent Document 1). There, a vacuum chamber unit is constituted by a chamber body and a chamber lid, a fixed bonding base is provided in the chamber body, and a movable bonding base is provided in the chamber lid. In the fixed bonding table at the time of bonding, a display panel (liquid crystal panel) and a dam jig surrounding three sides of the panel are arranged, and a bonding object (touch panel) is arranged on the movable bonding table. Yes. In this bonding device, after applying an adhesive to the display panel surrounded by the dam jig, the alignment structure positions the display panel to be bonded, closes the chamber lid and draws air in the vacuum chamber unit. After evacuating and then bonding the object to be bonded to the display panel, the entire vacuum chamber unit is placed in an inclined posture, and the unsealed part not surrounded by the dam jig is positioned at the upper end of the inclination, and bonding is performed. Air bubbles generated on the surface are degassed from the unsealed portion. The adhesive is made of a silicon-based thermosetting adhesive, and a heater for accelerating the hardening of the adhesive is disposed inside the dam jig.

Japanese Patent Laying-Open No. 2006-151646 (paragraph number 0040, FIG. 1)

  According to the bonding apparatus of Patent Document 1, in order to perform the deaeration process in a vacuum environment, the volatile gas and air bubbles generated after the bonding are caused to flow upward along the adhesive layer that has not yet been cured. And it can discharge | release from an unsealed part and can eliminate the bonding defect which a bubble remains in a bonding part. However, since the vacuum chamber unit cannot be opened until the adhesive is completely cured, the cycle time required for a series of bonding processes is inevitably increased, and there is a limit in improving the productivity of the bonding work. It was. For example, when the time required from the start of the preparatory work to the physical bonding of the object to be bonded and the display panel is 2 minutes and 30 seconds, the time required for the adhesive to completely cure is from 10 minutes. It took 18 minutes.

  The purpose of the present invention is to fix and hold the workpieces in a bonding posture so that they can be handled as a bonding blank, and by curing the adhesive outside the vacuum chamber, a bonding operation required for a series of bonding processes. It is providing the bonding apparatus which shortened the cycle time of this, and was able to improve productivity, and the bonding jig applied to this bonding apparatus.

  The present invention includes a chamber body 10, a chamber lid 11 configured to be displaceable between a sealing posture for sealing the opening of the chamber body 10 and an opening posture for opening the opening, and the chamber body 10 and the chamber A vacuum source 2 for exhausting the air in the vacuum chamber C partitioned by the lid 11 is provided, and the upper workpiece 23 and the lower workpiece 15 are placed under a vacuum environment in which the vacuum chamber C is evacuated by the vacuum source 2. A bonding apparatus for bonding via the adhesive material D is targeted. The bonding apparatus is detachably mounted on the chamber body 10 and is detachably mounted on the lower base 13 that holds the lower work 15 and the upper base 20 fixed to the chamber lid 11. An upper frame 21 that holds the upper work 23, an upper clamp structure 44 that is provided on the upper base 20 and that detachably holds and fixes the upper frame 21 attached to the upper base 20, and a lower bonding table 13. And a lower clamp structure 43 that fixes and holds the upper frame 21 in a bonding posture that faces the lower bonding table 13. In this bonding apparatus, the upper frame 21 is held and fixed to the upper base 20 of the chamber lid 11 by the upper clamp structure 44, the upper work 23 is mounted on the upper frame 21, and the lower bonding is mounted on the chamber body 10. In a state where the lower work 15 is held on the table 13, the chamber lid 11 is in a closed posture, and the vacuum chamber C is made a vacuum environment by the vacuum source 2, so that the upper work 23 is moved to the lower work via the adhesive D. It is comprised so that it can paste to 15. Moreover, in this bonding apparatus, each including the lower bonding stand 13, the lower work 15, the upper work 23, and the upper frame 21 by holding and fixing the upper frame 21 in the bonding posture with the lower clamp structure 43. It is comprised so that the bonding blank B may be formed by integrating a member. And with the upper frame 21 held and fixed by the lower clamp structure 43, the upper base 20 is separated from the upper frame 21 by releasing the holding state of the upper frame 21 by the upper clamp structure 44, and a bonding blank A feature is that B can be taken out from the chamber body 10.

The lower clamp structure 43 includes a horizontal cylinder 45 fixed to a plurality of peripheral edges of the lower bonding table 13, and a frame carrier 46 that is disposed adjacent to the horizontal cylinder 45 and connected to the upper frame 21 that has been bonded. I have. Horizontal cylinder 45 is provided with a horizontal cylinder housing 47 which is fixed to the lower Hagodai 13, the lock piston 48 to retreat out the lateral cylinder housing 47. The frame carrier 46 includes a connecting shaft 52 that is supported by the horizontal cylinder housing 47 so as to be vertically slidable, and a supporting spring 53 that urges the connecting shaft 52 to move toward the upper frame 21. The lock piston 48 can reciprocate between a lock position that contacts the peripheral surface of the connecting shaft 52 and fixes and holds the coaxial shaft 52 so as not to slide up and down, and an unlock position that separates from the peripheral surface of the connecting shaft 52. In a state where the bonding of the lower work 15 and the upper work 23 is completed, the lock piston 48 of the horizontal cylinder 45 is moved to the lock position, and the connecting shaft 52 joined to the upper frame 21 is fixed by the horizontal cylinder 45, and the lower bonding is performed. It is comprised so that each member from the joint stand 13 to the upper frame 21 may be integrated as the bonding blank B.

The upper clamp structure 44 is fixed to the upper base 20 in a state corresponding to the clamp shaft body 61, and the clamp shaft body 61 is fixed to a plurality of locations on the peripheral side surface of the upper frame 21. A clamping cylinder 62 for clamping and fixing at the same time is provided. The sandwiching cylinder 62 includes a sandwiching cylinder housing 63 that is fixed to the upper base 20, and a capture piston 64 that is retracted from and retracted from the sandwiching cylinder housing 63. The capture piston 64 can reciprocate between a lock position where the clamp shaft body 61 is clamped and fixed and a lock release position where the clamp shaft body 61 is separated. In a state where the upper bonding table 22 and the upper frame 21 on which the upper work 23 is mounted are placed on the upper base 20, the capture piston 64 is moved to the lock position, and the upper frame 21 is moved by the upper clamp structure 44. 20 is fixedly held.

The horizontal cylinder 45 includes a lock spring 49 that biases the lock piston 48 toward the connecting shaft 52. A negative pressure is applied to the inside of the horizontal cylinder housing 47 so that the lock piston 48 is held in the unlocked position against the urging force of the lock spring 49.

  A pressure receiving portion 55 that receives the pressing force of the lock piston 48 is formed in the peripheral surface of the connecting shaft 52. In a state where the lock piston 48 is switched to the unlock position, the stepped portion 56 at the lower end of the pressure receiving portion 55 is received and supported by the lock piston 48 so that it cannot be removed.

  The connecting body 54 that connects the upper frame 21 and the connecting shaft 52 is formed of any one of an adhesive body and a magnetic attracting body. From the dam frame 14 in which the upper frame 21 and the connecting shaft 52 are separated and the integrated lower work 15 and upper work 23 are fixed to the lower bonding table 13 in the state where the curing process of the bonding blank B is completed. Remove.

The sandwiching cylinder 62 includes a sandwiching spring 65 that urges the capture piston 64 toward the clamp shaft body 61. A negative pressure is applied to the inside of the sandwiching cylinder housing 63 so that the capture piston 64 is held in the unlocked position against the urging force of the sandwiching spring 65.

  A positioning ball 68 is mounted on the protruding end of the clamp shaft body 61. A socket 69 for holding the positioning ball 68 is formed at the protruding end of the capture piston 64.

  The present invention also includes a chamber body 10, a chamber lid 11 configured to be displaceable between a sealing posture for sealing the opening of the chamber body 10 and an opening posture for opening the opening, and the chamber body 10. A vacuum source 2 for exhausting the air in the vacuum chamber C partitioned by the chamber lid 11, and the upper workpiece 23 and the lower workpiece 15 are in a vacuum environment in which the vacuum chamber C is evacuated by the vacuum source 2. The object is a bonding jig applied to a bonding apparatus that bonds the two through an adhesive D. This bonding jig is detachably mounted on the chamber body 10 and detachably mounted on the lower bonding table 13 holding the lower work 15 and the upper base 20 fixed to the chamber lid 11. In addition, when the upper work 23 is held and the chamber lid body 11 is in the sealing posture, the upper frame 21 and the lower bonding stand 13 that are in a bonding posture facing the lower bonding stand 13 are provided. And a lower clamp structure 43 for holding and fixing the upper frame 21 in the bonding posture. And in the state where upper work 23 was pasted to lower work 15 via adhesive D, lower pasting stand 13 by holding upper frame 21 in the pasting posture with lower clamp structure 43, The members including the lower work 15, the upper work 23, and the upper frame 21 are integrated to form a bonding blank B that can be taken out from the chamber body 10.

  In the bonding apparatus according to the present invention, with the upper frame 21 held and fixed by the lower clamp structure 43, the upper base 20 is held by the upper frame 21 by releasing the holding state of the upper frame 21 by the upper clamp structure 44. The upper workpiece 23 and the lower workpiece 15 were configured to be taken out from the chamber body 10 as the bonding blank B. According to the bonding apparatus which consists of the above structures, when the bonding work in the vacuum environment in the vacuum chamber C is completed, the upper work 23 and the lower work 15 are taken out from the chamber body 10 as the bonding blank B, It becomes possible to take out the hardening process of the adhesive D following such a bonding operation to the outside of the chamber body 10.

  As described above, according to the present invention, it is not necessary to keep the upper work 23 and the lower work 15 in the vacuum chamber C until the adhesive D is completely cured, and every time the bonding operation in the vacuum environment is completed. Since the bonding blank B can be taken out from the chamber body 10 and the curing work of the adhesive D can be advanced outside the chamber body 10, the cycle time of the bonding work required for a series of bonding processes is shortened. The productivity of the combined device can be significantly improved.

The lower clamp structure 43 is composed of a horizontal cylinder 45 provided on the lower bonding base 13 and a frame carrier 46 disposed adjacent to the horizontal cylinder 45. The horizontal cylinder 45 is a horizontal cylinder housing 47 and a lock that is operated to be retracted. A piston 48 is provided. Further, the frame carrier 46 includes a connecting shaft 52 that is supported by the horizontal cylinder housing 47 so as to be slidable up and down, and a supporting spring 53 that urges the connecting shaft 52 to move toward the upper frame 21. At the time of bonding, after the upper work 23 is bonded to the lower work 15, the connecting shaft 52 bonded to the upper frame 21 is fixed and held by the lock piston 48, and each of the intervals between the lower bonding table 13 and the upper frame 21 is fixed. The member was integrated as a bonding blank B. According to such a lower clamp structure 43, the lower clamp structure 43 can be constituted by the horizontal cylinder 45 and the frame carrier 46 having a simple structure. Therefore, the structure of the lower clamp structure 43 can be simplified and the cost thereof can be reduced. Moreover, since each member from the lower bonding stand 13 to the upper frame 21 can be integrated as the bonding blank B, the bonding blank B is taken out from the chamber body 10 after bonding, and the uncured adhesive D Can be cured, and the work after bonding can be easily and quickly handled.

The upper clamp structure 44 includes a clamp shaft body 61 fixed to the upper frame 21 and a sandwiching cylinder 62 that sandwiches and fixes the clamp shaft body 61, and the sandwiching cylinder 62 is operated to and from the sandwiching cylinder housing 63. A capture piston 64 is provided. According to such an upper clamp structure 44, since the upper clamp structure 44 can be constituted by the clamp shaft body 61 and the sandwiching cylinder 62 having a simple structure, the structure of the upper clamp structure 44 can be simplified and its cost can be reduced. Further, by clamping and fixing the clamp shaft body 61 with the capture piston 64, the upper frame 21 is integrated with the upper base 20, and the upper work 23 mounted on the upper bonding base 22 is bonded until the bonding process is completed. Can be held with accuracy. Further, after holding and fixing the upper frame 21 after the bonding by the lower clamp structure 43, the capture lid 64 is moved to the unlocking position to open the chamber lid 11, and the upper base 20 is moved to the upper frame. 21 can be separated. Therefore, the bonding blank B can be automatically configured only by alternately operating the upper clamp structure 44 and the lower clamp structure 43 according to a certain procedure between the preparation work and the bonding work.

The horizontal cylinder 45 is provided with a lock spring 49 for urging and energizing the lock piston 48, and when a negative pressure is applied to the inside of the horizontal cylinder housing 47, the lock piston 48 is unlocked against the urging force of the lock spring 49. The position is held at the position. According to such a lower clamp structure 43, the lock piston 46 can be switched to the locked posture by the spring force of the lock spring 49 by releasing the negative pressure state in the horizontal cylinder housing 47. That is, when the connecting shaft 52 is locked by the lock piston 48, the inside of the horizontal cylinder housing 47 is not in a negative pressure state or a pressurized state. Accordingly, there is no room for a part of the working air to leak into the vacuum chamber C, and the vacuum environment is prevented from being destroyed with the operation of the lower clamp structure 43, and the bonding of the workpieces in the vacuum environment is stabilized. You can do it.

  If the pressure receiving portion 55 for receiving the pressing force of the lock piston 48 is formed in the peripheral surface of the connecting shaft 52, the connecting shaft 52 can be locked and held in a non-slidable state with the lock piston 48 in surface contact with the pressure receiving portion 55. . Accordingly, the bonding blank B is taken out from the chamber body 10 and the connection shaft 52 is reliably prevented from moving until the curing process is completed, and the pair of workpieces 15 and 23 are held in an appropriate bonding state. Can continue. In addition, when the lock piston 48 is switched to the unlocked position and the stepped portion 56 at the lower end of the pressure receiving portion 55 is received and supported by the lock piston 48 so as not to be removed, the connecting shaft 52 is pushed out by the support spring 53. Therefore, it is not necessary to separately provide a structure for preventing this, and accordingly, the structure of the lower clamp structure 43 can be simplified.

  If the connecting body 54 that connects the upper frame 21 and the connecting shaft 52 is formed of any one of an adhesive body and a magnetic attracting body, the connection can be achieved simply by pressing the upper frame 21 against the connecting body 54 at the time of bonding. The shaft 52 can be joined to the upper frame 21. Therefore, for example, the structure of the lower clamp structure 43 can be remarkably simplified and the cost can be reduced as compared with the case where the connection shaft 52 is connected to the upper frame 21 through a mechanical connection structure. Moreover, in the state which the hardening process of the bonding blank B was complete | finished, since the upper frame 21 can be isolate | separated from the connection axis | shaft 52 only by peeling off the upper frame 21 from the connection body 54, the integrated lower work 15 and upper work 23 can be easily taken out.

A clamping spring 65 for advancing and energizing the capture piston 64 is provided in the clamping cylinder 62, and when a negative pressure is applied to the inside of the clamping cylinder housing 63, the capture piston 64 is unlocked against the urging force of the clamping spring 65. The position is held at the position. According to such an upper clamp structure 44, the capture piston 64 can be switched to the locked posture by the spring force of the clamping spring 65 by releasing the negative pressure state in the clamping cylinder housing 63. That is, in the state where the clamp shaft body 61 is clamped by the capture piston 64, the inside of the clamping cylinder housing 63 is not in a negative pressure state or a pressurized state. Therefore, there is no room for a part of the working air to leak into the vacuum chamber C, and the vacuum environment can be prevented from being destroyed by the operation of the upper clamp structure 44.

  When the positioning ball 68 is mounted on the protruding end of the clamp shaft 61 and the socket 69 is formed on the protruding end of the capture piston 64, the position shift of the upper frame 21 is automatically performed when the socket 69 is joined to the positioning ball 68. The upper frame 21 can be fixed to the upper base 20 while correcting. Accordingly, it is not necessary to attach the upper frame 21 to the upper base 20 with the upper frame 21 accurately positioned, and it is only necessary to attach the upper frame 21 to the upper base 20 in a roughly positioned state. Can be shortened.

  According to the bonding jig which concerns on this invention, after bonding is complete | finished, the bonding blank B can be taken out from the chamber main body 10, and the hardening process of the adhesive material D of an unhardened state can be performed. Moreover, it is not necessary to keep the upper workpiece 23 and the lower workpiece 15 in the bonding posture in the vacuum chamber C until the adhesive material D is completely cured, and the bonding blank B is used every time the bonding operation is completed. The adhesive D can be hardened by taking out from the chamber body. Therefore, the cycle time of the bonding work required for a series of bonding processes can be shortened, and the productivity of the bonding process can be significantly improved. Moreover, since the bonding jig can be repeatedly used after the integrated upper work 23 and lower work 15 are taken out from the bonding jig, there is an advantage that the cost required for the bonding process can be reduced.

It is sectional drawing which shows the bonding apparatus which concerns on this invention, and the bonding jig | tool. In the bonding apparatus which concerns on this invention, it is a top view which shows the state which open | released the chamber cover body. In the bonding apparatus which concerns on this invention, it is a vertical front view which shows the state which open | released the chamber cover body. In the bonding apparatus which concerns on this invention, it is a top view which shows the state which mounted | wore the lower work and the upper work. In the bonding apparatus which concerns on this invention, it is a vertical side view which shows the related structure of a chamber cover body and an alignment apparatus. It is a vertical front view of the lower clamp structure which constitutes the pasting device concerning the present invention. It is sectional drawing which shows the operation state of a lower clamp structure. It is a vertical front view of the upper clamp structure which constitutes the pasting device concerning the present invention. It is sectional drawing which shows the operation state of an upper clamp structure. In the bonding apparatus which concerns on this invention, it is a vertical front view which shows the state which closed the chamber cover body. It is explanatory drawing which shows the bonding procedure of the bonding apparatus which concerns on this invention. In the bonding apparatus which concerns on this invention, it is a vertical front view which shows the state which opened the chamber cover body just after bonding.

(Example) In FIG. 1 thru | or FIG. 12, the Example of the bonding apparatus which concerns on this invention, and the bonding jig | tool is shown. In the present invention, “front / rear”, “left / right”, and “upper / lower” refer to the cross arrows shown in FIG. 2 and FIG. 2 to 4, the bonding apparatus includes a vacuum chamber unit 1, a vacuum source 2 that exhausts air in the vacuum chamber C, a dispenser 3 that supplies an adhesive D to a cover glass 15 described later, and an alignment apparatus 4. (See FIG. 5) and a CCD camera 5 for alignment. The dispenser 3 is disposed above the chamber body 10, and the CCD camera 5 is disposed above the chamber body 10 and the chamber lid 11.

  The vacuum chamber unit 1 includes a hollow box-shaped chamber body 10 that opens upward, and a chamber lid 11 that opens and closes the upper opening of the chamber body 10. Four L-shaped positioning tools 12 are fixed inside the chamber body 10, and a lower bonding table 13 is detachably attached to the positioning tools 12. A rectangular dam frame 14 is fixed to the upper surface of the lower bonding table 13, and the cover glass 15 is positioned by the dam frame 14 by fitting the cover glass (lower work) 15 into the dam frame 14. . In this embodiment, the upper surface of the lower bonding table 13 surrounded by the dam frame 14 is curved in a downward projecting shape, and the cover glass 15 curved in the lower projecting shape is supported and positioned in a stable state. Yes. The dam frame 14 is provided in order to define the application region of the adhesive D supplied to the upper surface of the cover glass 15. Reference numeral 16 denotes a seal body arranged on the opening peripheral wall of the chamber body 10.

  The dispenser 3 is supported by three rodless cylinders 3a to 3c that are driven to reciprocate in the X-axis, Y-axis, and Z-axis directions, and is bonded to the cover glass 15 attached to the dam frame 14 in an arbitrary pattern. D can be applied. The adhesive D is a silicon-based two-component thermosetting adhesive. As shown in FIG. 4, the dam frame 14 surrounds the periphery of the cover glass 15, and a heater that promotes the effect of the adhesive D is disposed therein. As shown in FIG. 6, the dam frame 14 is formed such that the upper end of the dam frame 14 protrudes slightly upward from the application surface of the adhesive D.

  The chamber lid 11 is connected to the chamber body 10 via a swing shaft 18 so as to be swingable and openable. A motor 19 for rotating the coaxial 18 is disposed at the shaft end of the swing shaft 18. ing. An upper base 20 is disposed on the inner lid surface of the chamber lid body 11 (the side facing the lower laminating table 13 when the chamber lid body 11 is closed). The upper frame 21 and the upper laminating platform 22 are disposed on the upper base 20. Is detachably mounted. The upper base 20 is supported by a bonding unit 34 described later.

  The upper frame 21 is detachably held and fixed to the upper base 20 by an upper clamp structure 44 described later. The upper bonding base 22 is fixed to an upper frame 21 assembled in a rectangular shape, and is composed of a liquid crystal display panel on the bonding surface facing the lower bonding base 13 in a state where the chamber lid 11 is closed. A flat display panel (upper workpiece) 23 is fixed with an adhesive 24 (see FIG. 5). The pressure-sensitive adhesive body 24 is formed of a double-sided tape or a peelable pressure-sensitive adhesive layer, and is roughly positioned in a state where the display panel 23 is mounted on the upper bonding table 22 with the pressure-sensitive adhesive body 24. In order to perform precise positioning, the alignment device 4 is disposed below the outer lid surface of the opened chamber lid body 11 (the lower surface side when the chamber lid body 11 is opened) (see FIG. 5).

  As shown in FIGS. 2 and 10, a pair of front and rear lid support frames 27 are fixed to the swing shaft 18, and a positioning structure 28 is provided on these lid support frames 27, and an alignment table 29 of the positioning structure 28. A chamber lid 11 is fixed to the chamber. The alignment table 29 is supported by the positioning structure 28 so as to be slidable back and forth and right and left. The alignment device 4 captures an image output from the CCD camera 5 and identifies the position of the cover glass 15, and confirms the position of the display panel 23 with reference to the position of the cover glass 15 as a position reference. The direction in which the table 29 should be adjusted and the amount of movement are determined. Further, as indicated by an imaginary line in FIG. 5, the drive shaft 30 protruding from the upper surface of the alignment apparatus 4 is connected to the passive shaft 31 of the alignment table 29, the alignment table 29 is adjusted and moved, and the position of the chamber lid 11 That is, the position of the display panel 23 is adjusted. The adjusted alignment table 29 is restricted so as not to move by a brake provided in the positioning structure 28. The confirmation of the position shift state and the adjustment movement of the alignment table 29 are performed a plurality of times, but this position adjustment is completed in a few seconds.

  A bonding unit 34 that presses the upper base 20 toward the lower bonding table 13 is provided on the outer cover surface of the chamber cover body 11. The bonding unit 34 includes a guide frame 35 fixed to the chamber lid 11, a pair of sliders 36 guided and supported by the guide frame 35 so as to be movable up and down, and a drive mechanism (not shown) for slidingly driving the sliders 36. And a bonding shaft 37 that reciprocally slides along with the vertical movement of the slider 36. The bonding shafts 37 are arranged at four locations and penetrate the chamber lid 11 in and out, and the lower ends thereof are connected to a support frame 38 fixed to the upper base 20 by a connecting rod 39. 5 is simply connected to the support frame 38 with a connecting rod 39, but the left bonding shaft 37 is connected to the support frame 38 with a connecting rod 39. And are connected through a long hole 40. This is because the display panel 23 mounted on the upper bonding table 22 is bonded to the cover glass 15 in an inclined state.

  In order to fix and hold the display panel 23 and the cover glass 15 in the bonding posture and handle them as the bonding blank B, a lower clamp structure 43 is provided on the lower bonding table 13 and an upper clamp structure is formed on the upper base 20. 44 is provided. The lower bonding stand 13, the upper frame 21, and the lower clamp structure 43 constitute a bonding jig for forming the bonding blank B.

In FIG. 6, the lower clamp structure 43 includes a horizontal cylinder 45 fixed to the four peripheral edges of the lower bonding table 13, and a frame carrier that is disposed adjacent to the horizontal cylinder 45 and connected to the upper frame 21 that has been bonded. A body 46 is provided. The horizontal cylinder 45 is a cylinder housing ( horizontal cylinder housing ) 47 that is fixed to the lower bonding table 13, a lock piston 48 that is retracted from the housing 47, and the lock piston 48 is advanced toward the frame carrier 46. A lock spring 49 for biasing is provided. The frame carrier 46 includes a connecting shaft 52 that is slidably supported by the cylinder housing 47 and a support spring 53 that moves and urges the connecting shaft 52 toward the upper frame 21. A connecting body 54 made of a sheet-like adhesive body is attached to the upper end of 52. A flat pressure receiving portion 55 that receives the pressing force of the lock piston 48 is formed in a concave shape on the peripheral surface of the connecting shaft 52. The coupling body 54 can be formed of a magnetic adsorption body (magnet) instead of the sheet-like adhesive body.

  The lock piston 48 comes into contact with the pressure receiving portion 55 of the connecting shaft 52 to lock and hold the coaxial shaft 52 so as not to slide up and down (state shown in FIG. 6), and a lock release position (see FIG. 7) separated from the pressure receiving portion 55. (A state shown in (a)). The lock piston 48 maintains the unlocking posture against the spring force of the lock spring 49 in a state where a negative pressure is acting on the inside of the cylinder housing 47. In this state, the stepped portion 56 at the lower end of the pressure receiving portion 55 is received and supported by the protruding end of the lock piston 48 so that it cannot be removed, so that the connecting shaft 52 is not pushed out from the cylinder housing 47 by the support spring 53 any more. Absent. Further, by releasing the negative pressure state in the cylinder housing 47 with the display panel 23 being bonded to the cover glass 15, the spring force of the lock spring 49 is received as shown in FIG. The tip contacts the pressure receiving portion 55. Reference numeral 57 is a negative pressure passage for supplying negative pressure, and 58 is a seal body of the lock piston 48.

  As described above, in the lower clamp structure 43, when a negative pressure is applied to the inside of the cylinder housing 47, the lock piston 48 is held at the unlocked position against the urging force of the lock spring 49. did. According to the lower clamp structure 43, the lock piston 48 can be switched to the locked posture by the spring force of the lock spring 49 by releasing the negative pressure state in the cylinder housing 47. That is, when the connecting shaft 52 is locked by the lock piston 48, the inside of the cylinder housing 47 is not in a negative pressure state or a pressurized state. Accordingly, there is no room for a part of the working air to leak into the vacuum chamber C, and the vacuum environment is prevented from being destroyed with the operation of the lower clamp structure 43, and the bonding of the workpieces in the vacuum environment is stabilized. Can be done.

  Since the pressure receiving portion 55 for receiving the pressing force of the lock piston 48 is recessed on the peripheral surface of the connecting shaft 52, the connecting shaft 52 can be locked and held in a non-slidable state with the lock piston 48 in surface contact with the pressure receiving portion 55. . Accordingly, the bonding blank B is taken out from the chamber body 10 and the connection shaft 52 is reliably prevented from moving until the curing process is completed, and the pair of workpieces 15 and 23 are held in an appropriate bonding state. Can continue. Further, in a state where the lock piston 48 is switched to the unlock position, the stepped portion 56 at the lower end of the pressure receiving portion 55 can be received and supported by the lock piston 48 so that it cannot be removed, so that the connecting shaft 52 is pushed out by the support spring 53. Therefore, it is not necessary to provide a separate structure for preventing the lower clamp structure 43, which can contribute to the simplification of the structure of the lower clamp structure 43.

  Since the connecting body 54 is formed of an adhesive, the connecting shaft 52 can be joined to the upper frame 21 simply by pressing the upper frame 21 against the connecting body 54 at the time of bonding. Therefore, for example, the structure of the lower clamp structure 43 can be remarkably simplified and the cost can be reduced as compared with the case where the connection shaft 52 is connected to the upper frame 21 through a mechanical connection structure. Moreover, in the state which the hardening process of the bonding blank B was complete | finished, since the upper frame 21 can be isolate | separated from the connection axis | shaft 52 only by peeling off the upper frame 21 from the connection body 54, the integrated lower work 15 and upper work 23 can be easily taken out.

In FIG. 8, the upper clamp structure 44 includes a clamp shaft body 61 fixed at four locations on the peripheral side of the upper frame 21 and four clamping cylinders 62 fixed to the upper base 20 in a state corresponding to the clamp shaft body 61. I have. The clamping cylinder 62 includes a cylinder housing (clamping cylinder housing) 63 that is fixed to the upper base 20, a capture piston 64 that is retracted from and retracted from the housing 63, and an energizing force of the capture piston 64 toward the clamp shaft body 61. A clamping spring 65 is provided. The clamp shaft body 61 is formed of a screw shaft whose position can be adjusted. The clamp shaft body 61 is screwed into a screw bracket 66 fixed to the upper frame 21 and fixed by a lock nut 67. A positioning ball 68 made of a steel ball is mounted on the outer end of the clamp shaft 61, and a socket 69 that holds the positioning ball 68 is formed in a conical shape in a conical shape on the protruding end of the capture piston 64.

  The capture piston 64 can reciprocate between a lock position (a state shown in FIG. 8) for clamping and fixing the clamp shaft body 61 and a lock release position (a state shown in FIG. 9A) separated from the clamp shaft body 61. . In the state where the upper bonding table 22 and the upper frame 21 on which the display panel 23 is mounted are placed on the upper base 20, the capture piston 64 is advanced to clamp the four clamp shaft bodies 61, thereby 21 is fixedly held on the upper base 20 by the upper clamp structure 44. The capture piston 64 maintains the unlocked posture against the spring force of the clamping spring 65 in a state where negative pressure is acting on the inside of the cylinder housing 63. In addition, when the display panel 23 is bonded to the cover glass 15 and the negative pressure state in the cylinder housing 63 is released, the capture piston 64 receives the spring force of the holding spring 65 and switches to the locked position. The socket 69 at the tip end sandwiches the positioning ball 68. Reference numeral 70 is a negative pressure passage for supplying negative pressure, and 71 is a seal body of the capture piston 64. The negative pressure passages 57 and 70 can be attached to and detached from the negative pressure source via a coupler provided in the vacuum chamber C.

  The clamping cylinder 62 is provided with a clamping spring 65 for advancing and biasing the capture piston 64, and when a negative pressure is applied to the inside of the cylinder housing 63, the capture piston 64 resists the biasing force of the clamp spring 65 and is unlocked. The position was kept. According to such an upper clamp structure 44, the capture piston 64 can be switched to the locked posture by the spring force of the clamping spring 65 by releasing the negative pressure state in the cylinder housing 63. That is, in the state where the clamp shaft body 61 is sandwiched by the capture piston 64, the inside of the cylinder housing 63 is not in a negative pressure state or a pressurized state. Therefore, there is no room for a part of the working air to leak into the vacuum chamber C, and the vacuum environment can be prevented from being destroyed by the operation of the upper clamp structure 44.

  The bonding apparatus comprised as mentioned above performs a preparatory process, a bonding process, and a workpiece removal process, and produces the bonding body with which the cover glass 15 and the display panel 23 were integrated. In the preparation process, the lower bonding table 13 provided with the dam frame 14 is attached to the chamber body 10, and the upper frame 21 provided with the upper bonding table 22 is further attached to the upper base 20 of the chamber lid 11, The upper frame 21 is captured and fixed by the upper clamp structure 44. At this time, the socket 69 at the protruding end of the catching piston 64 is joined to the positioning ball 68, so that the upper frame 21 can be fixed to the upper base 20 while automatically correcting the overall position shift of the upper frame 21. Accordingly, it is not necessary to attach the upper frame 21 to the upper base 20 with the upper frame 21 accurately positioned, and it is only necessary to attach the upper frame 21 to the upper base 20 in a roughly positioned state. Can be shortened.

  In parallel with fixing the upper frame 21 to the upper base 20, the cover glass 15 is attached to the dam frame 14, and the display panel 23 is attached to the upper bonding base 22 with the adhesive 24. Next, the rodless cylinders 3a to 3c and the dispenser 3 are operated to apply the adhesive D on the upper surface of the cover glass 15 in a predetermined pattern. In this state, the alignment device 4 is operated, and after positioning the display panel 23 with respect to the cover glass 15 based on the image information of the CCD camera 5, the chamber lid 11 is closed as shown in FIG. . In addition, you may perform attachment of the lower bonding stand 13, the upper frame 21, the cover glass 15, and the display panel 23 by any of an industrial robot and a human hand.

  In the pasting step, after closing the chamber lid 11, the lid 11 is locked and locked with the lock 74 provided on the chamber body 10, and the air in the vacuum chamber C is discharged to a vacuum state. To do. In this state, the bonding unit 34 is operated, the upper bonding table 22 is pressed against the lower bonding table 13, and the display panel 23 is bonded to the cover glass 15. Specifically, as shown in FIG. 11 (a), after the upper bonding table 22 is tilted in a state where the pair of right-hand bonding shafts 37 are at the inclined lower ends, four pieces as shown in FIG. 11 (b). The lower surface of the display panel 23 is pressed against the adhesive D in a state where the lower end of the display panel 23 is in contact with the dam frame 14. Furthermore, as shown in FIG. 11 (c), the pair of bonding shafts 37 on the upper end side of the upper bonding table 22 is gradually lowered, and the inclination angle of the upper bonding table 22 is gradually reduced while displaying. The entire lower surface of the panel 23 is pressed against the adhesive D to be brought into close contact therewith. According to such a bonding form, since the fine air contained in the adhesive material D can be bonded while being extruded toward the bonding end, it is possible to eliminate the trapping of bubbles on the bonding surface.

  As shown in FIG. 7A, the upper frame 21 before bonding opposes the connecting shaft 52 with a gap therebetween. However, as the laminating process proceeds, the upper frame 21 comes into close contact with the connecting body 54 as shown in FIG. 7B, and further pushes down the connecting shaft 52 against the urging force of the support spring 53. The display panel 23 is brought into close contact with the adhesive material D. In this way, when the display panel 23 is brought into close contact with the adhesive D while pushing the connecting shaft 52 against the biasing force of the support spring 53 at the time of bonding, the thickness of the cover glass 15 or the display panel 23 or the adhesive D Even if there is a slight variation in the coating amount, the variation can be absorbed by the difference in the lowered position of the connecting shaft 52. Therefore, the display panel 23 can be bonded to the cover glass 15 with a uniform pressing force.

  When the pasting is completed, the negative pressure state in the cylinder housing 47 is released, so that the lock piston 48 receives the spring force of the lock spring 49 as shown in FIG. The connection shaft 52 is fixedly held so as not to move up and down by coming into contact with the pressure receiving portion 55. In this way, when the negative pressure state in the cylinder housing 47 is released and the lock piston 48 is switched to the locked position by the spring force of the lock spring 49, there is no room for air leakage in the vacuum chamber C, and It is possible to eliminate the destruction of the vacuum environment with the operation of the clamp structure 43 and to perform the bonding of the workpieces in the vacuum environment in a stable state. This is because when the connecting shaft 52 is locked by the lock piston 48, the inside of the cylinder housing 47 is not in a negative pressure state or a pressurized state.

  The workpiece removal process is performed continuously after the bonding process. In the workpiece removal process, in the state where the upper frame 21 is clamped by the lower clamp structure 43, negative pressure is applied to the inside of the cylinder housing 63 of the upper clamp structure 44, and the capture piston 64 is resisted against the spring force of the clamping spring 65. Switch to the unlocked position. In the state where the capture piston 64 is unlocked, the socket 69 of the clamp shaft body 61 is separated from the positioning ball 68. Therefore, after the inside of the vacuum chamber C is set to atmospheric pressure, the chamber lid body 11 is opened as shown in FIG. Thus, the upper base 20 can be separated from the upper frame 21. In this state, since each member from the lower bonding stand 13 to the upper frame 21 can be integrated as the bonding blank B, the bonding blank B can be taken out from the chamber body 10 as shown in FIG. . In addition, taking out of the bonding blank B may be performed by either an industrial robot or a human hand.

  Thereafter, the bonding blank B is transferred to the curing process to completely cure the adhesive D, and then the upper frame 21 is separated from the connecting shaft 52, and the display panel 23 and the cover glass 15 are further bonded to the lower bonding table. Separated from 13 to obtain an integrated bonded body. In the curing process, the time required for the curing process can be shortened by increasing the temperature of the adhesive D to promote the curing. On the side of the bonding apparatus, after the bonding blank B is taken out from the chamber body 10, the preparation process is started again to bond the next cover glass 15 and the display panel 23. Thereafter, by repeating the above, a bonded body in which the display panel 23 and the cover glass 15 are integrated can be continuously produced.

  According to the bonding apparatus of the said structure, it is not necessary to hold | maintain the cover glass 15 and the display panel 23 in the bonding attitude | position in the vacuum chamber C until the adhesive material D hardens | cures completely, and bonding work is complete | finished. What is necessary is just to take out the bonding blank B from a chamber main body, and to harden the adhesive material D whenever it does. Therefore, the cycle time of the bonding work required for a series of bonding processes can be shortened, and the productivity of the bonding apparatus can be significantly improved. By the way, after the preparatory work is started, the pasting process is completed, and the time required to take out the pasting blank B from the chamber body 10 varies depending on the difference in the coating area and thickness of the adhesive D, etc. About 60 seconds at the latest, about 4 to 5 minutes at the latest. Moreover, the bonding blank B taken out from the chamber body 10 completely cured the adhesive D over about 10 to 20 minutes.

  Since the lower clamp structure 43 can be constituted by a horizontal cylinder 45 and a frame carrier 46 having a simple structure, the structure of the structure 43 can be simplified and its cost can be reduced. Furthermore, since each member from the lower bonding stand 13 to the upper frame 21 can be integrated as the bonding blank B, the bonding blank B is taken out from the chamber body 10 after bonding, and the uncured adhesive D Can be cured, and the work after the bonding can be handled easily and quickly.

  Similarly, since the upper clamp structure 44 can be constituted by the clamp shaft body 61 and the sandwiching cylinder 62 having a simple structure, the structure of the upper clamp structure 44 can be simplified and its cost can be reduced. Further, by clamping and fixing the clamp shaft body 61 with the capture piston 64, the upper frame 21 is integrated with the upper base 20, and the upper work 23 mounted on the upper bonding base 22 is bonded until the bonding process is completed. Can be held with accuracy. Further, after holding and fixing the upper frame 21 after the bonding by the lower clamp structure 43, the capture lid 64 is moved to the unlocking position to open the chamber lid 11, and the upper base 20 is moved to the upper frame. 21 can be separated. Therefore, the bonding blank B can be automatically configured only by alternately operating the upper clamp structure 44 and the lower clamp structure 43 according to a certain procedure between the preparation work and the bonding work.

  In the above embodiment, the case where the lower work 15 is a cover glass and the upper work 23 is a display panel has been described. However, the lower work 15 and the upper work 23 are a touch panel, a liquid crystal panel, a cover glass, a deflection panel, and the like. There may be. In addition, when the lower workpiece | work 15 is a flat panel, the upper surface of the lower bonding stand 13 should just be formed flat. Further, the lower work 15 may be a three-dimensional curved plane other than the two-dimensional curved plane. The lower workpiece 15 or the upper workpiece 23 may be a workpiece integrated by bonding a plurality of workpieces.

  The lower clamp structure 43 and the upper clamp structure 44 may be configured to drive and operate the lock piston 48 and the capture piston 64 using pressurized air as a drive source. However, if the pressurized air leaks from the cylinder housings 47 and 63, the vacuum environment is destroyed. Therefore, it is necessary to strengthen the seal structure. The lower clamp structure 43 and the upper clamp structure 44 may be configured to drive the lock piston 48 and the capture piston 64 using a solenoid as a drive source.

DESCRIPTION OF SYMBOLS 1 Vacuum chamber unit 2 Vacuum source 3 Dispenser 4 Alignment apparatus 5 CCD camera 10 Chamber main body 11 Chamber cover body 12 Positioning tool 13 Lower bonding stand 14 Dam frame 15 Lower work (cover glass)
20 Upper base 21 Upper frame 22 Upper bonding table 23 Upper work (display panel)
43 Lower clamp structure 44 Upper clamp structure 45 Horizontal cylinder 46 Frame carrier
47 Horizontal cylinder housing (cylinder housing)
52 Connection shaft 61 Clamp shaft body 62 Clamping cylinder
63 Clamping cylinder housing (cylinder housing)
B Bonding blank C Vacuum chamber D Adhesive

Claims (9)

A chamber body (10), and a sealing position for sealing the opening of the chamber body (10), and displaceably configured chamber lid (11) and an open position to open the opening, the chamber body (10) and said vacuum source for evacuating air in the vacuum chamber (C) which is defined out with the chamber lid (11) provided with a (2), said vacuum chamber (C) is by the vacuum source (2) In a vacuum environment made a vacuum, it is a bonding device for bonding the upper work (23) and the lower work (15) through an adhesive (D),
Capable with mounted removably to said chamber body (10), a lower Hagodai (13) for holding the lower workpiece (15),
Capable with mounted detachably on the base (20) on which is fixed to said chamber lid (11), a frame (21) on holding the work (23) above,
Provided on said base (20), an upper clamping structure the upper frame mounted on the upper base (20) to (21) detachably held and fixed (44),
Provided in the lower Hagodai (13), provided with a lower clamp structures (43) for fixing and holding the upper frame (21) to the bonding position to confront the under Hagodai (13),
Wherein the holding and fixing to a base (20) of the on the chamber lid and the upper frame (21) by a clamp structure (44) (11), wherein the workpiece (23) mounted on said frame (21) in addition the chamber body while holding the lower workpiece (15) to the lower Hagodai mounted on (10) (13), and a closed position of said chamber lid (11), said vacuum source (2 said vacuum chamber (C) by the vacuum environment), via said adhesive material (D), is composed the upper workpiece (23) so as to be laminated on the lower workpiece (15) ,
The upper frame (21), by holding the fixed remains lamination position by the lower clamping structures (43), said lower Hagodai (13), said lower works (15), wherein the workpiece (23), And each member containing the said upper frame (21) is integrated, and it is comprised so that the said bonding blank (B) may be formed,
In a state where the upper frame (21) is held fixed in the lower clamp structure (43), by releasing the holding state of the upper frame by the upper clamping structure (44) (21), the upper base (20 ) separated from the upper frame (21) and bonding apparatus characterized by being configured such that the bonding blank (B) wherein can be removed from the chamber body (10). Wherein said lower clamp structures (43), the horizontal cylinder (45) fixed to the periphery a plurality of locations of the lower Hagodai (13) disposed adjacent to said horizontal cylinder (45), bonding is completed A frame carrier (46) connected to the upper frame (21);
The transverse cylinder (45) includes a horizontal cylinder housing (47) fixed to the lower Hagodai (13) comprises a locking piston (48) to retreat out against lateral cylinder housing (47) ,
The frame carrier (46), the horizontal cylinder housing (47) in vertically slidably supported by the connecting shaft (52), said connecting shaft (52) moves urged toward the upper frame (21) a A supporting spring (53)
It said locking piston (48) has a locking position for fixing and holding the coaxial (52) so as not to vertically slide in brought into contact with the peripheral surface of the connecting shaft (52) is separated from the circumferential surface of the connecting shaft (52) Can reciprocate between unlocked positions,
In a state where bonding is completed in the lower workpiece (15) wherein the workpiece (23), said lateral said lock piston cylinder (45) and (48) is moved to the locked position, on said frame (21) joining the said connecting shaft (52) fixed with the horizontal cylinder (45), said lower Hagodai (13), said lower works (15), wherein the workpiece (23), and the upper frame (21) The bonding apparatus of Claim 1 comprised so that each member may be integrated as said bonding blank (B). The upper clamping structure (44), said upper frame (21) of fixed at a plurality of circumferential side clamps shaft body (61), the upper base (20 in a state corresponding to the clamp shaft member (61) ) to be fixed provided with at the same time the clamping cylinder for clamping the fixed (62) a plurality of said clamp shaft body (61),
It said clamping cylinder (62) includes a clamping cylinder housing (63) fixed on said base (20) comprises a left and a retraction capturing piston (64) relative to 該挟lifting cylinder housing (63),
It said capture piston (64) has a locked position for clamping the fixed the clamp shaft body (61) is reciprocally movable between the unlocked position to separate from the clamp shaft body (61),
In a state where the upper frame of the upper workpiece (23) is mounted (21) is placed on said base (20), and movement operation the captured piston (64) to the locked position, the upper frame (21 ) are laminating apparatus according to claim 1 or 2, and is fixed on said base (20) in the upper clamping structure (44). The transverse cylinder (45) is provided with a locking spring (49) which biases advancing toward said locking piston (48) to said connecting shaft (52),
Inside by the action of negative pressure of the transverse cylinder housing (47), in claim 2, wherein the locking piston (48) is held in place in the lock release position against the biasing force of the locking spring (49) The bonding apparatus as described. Wherein said lock piston catch receiving portion pressing force (48) (55) are dents formed on the peripheral surface of the connecting shaft (52),
In a state in which the locking piston (48) is switched to the unlocked position, wherein the stepped portion of the lower end of the pressure receiving portion (55) (56) is supported caught so as not to be抜外by the locking piston (48) Claim | item 2 or the bonding apparatus of 4 . Connecting member for connecting the upper frame (21) and said connecting shaft (52) (54), and the adhesive member are formed by any one of the magnetic attraction member,
Wherein in a state where the curing process is completed lamination blanks (B), wherein the separating frame (21) and said connecting shaft (52), wherein the workpiece and integrated the lower workpiece (15) (23 ) a bonding apparatus according to claim 2, 4 or 5 removed from the lower Hagodai (fixed dam frame 13) (14). Said clamping cylinder (62) is provided with a clamping spring (65) to advance urged toward the capturing piston (64) the clamping shaft body to (61),
Wherein by applying a negative pressure to the interior of the clamping cylinder housing (63), in claim 3, wherein the capture piston (64) is held in place in the lock release position against the biasing force of the clamping spring (65) The bonding apparatus as described. Wherein and positioning ball (68) is mounted at the tip of the clamp shaft body (61), claim the socket for clamping said positioning ball (68) at the tip of the capture piston (64) (69) is formed The bonding apparatus according to 3 or 7 . A chamber body (10), and a sealing position for sealing the opening of the chamber body (10), and displaceably configured chamber lid (11) and an open position to open the opening, the chamber body (10) and said vacuum source for evacuating air in the vacuum chamber (C) which is defined out with the chamber lid (11) provided with a (2), said vacuum chamber (C) is by the vacuum source (2) In a vacuum environment made a vacuum, it is a bonding jig applied to a bonding apparatus for bonding an upper work (23) and a lower work (15) via an adhesive (D),
Capable while being positioned attached removably to said chamber body (10), a lower Hagodai (13) for holding the lower workpiece (15),
Together it is detachably attached to the base (20) on which is fixed to said chamber lid (11), the upper holding the workpiece (23), when said chamber lid (11) becomes the sealing posture , the lower Hagodai (13) and the upper frame to be opposed to laminating position (21),
Provided in the lower Hagodai (13) comprises a lower clamp structures (43) for fixedly holding the upper frame (21) to the lamination position,
In a state where the upper workpiece (23) is stuck through the adhesive (D) relative to the lower workpiece (15), bonding position the upper frame (21) in the lower clamp structure (43) the by holding fixed, said lower Hagodai (13), said lower works (15), wherein the workpiece (23), and by integrating the members including the upper frame (21), said chamber body ( It is comprised so that the bonding blank (B) which can be taken out from 10) is formed, The bonding jig characterized by the above-mentioned.

Images