JP6358392B2 - Integrated linear movement mechanism - Google Patents

Description

  The present invention relates to a linear movement mechanism that utilizes the elasticity of a spring.

  With increasing market demand for precision technology, high-precision linear movement actuators for machines that require precise displacement, such as multi-degree-of-freedom displacement mechanisms and micromanipulators, have become important. Most of the time, such small linear motion actuators use a reduction gear mechanism, which not only requires multiple parts, such as different gears, but also adjusts the gear backlash during assembly, etc. Alignment is required.

  In order to eliminate the need for alignment such as backlash adjustment, a simple linear movement mechanism that enables a minute linear displacement using a combination of elastic plates has been proposed (see Patent Document 1). That is, two elastic plates are fixed to the fixed block at one end and to the movable block at the other end. These two elastic plates arranged in parallel are connected to a substantially H-shaped curved elastic plate. The movable block is supported by an elastic plate orthogonal to the plane formed by the H-shaped elastic plate. The curved elastic plate is connected to the slider of the micrometer at the center. Thus, the movable elastic block is linearly moved in the backward or forward direction by pushing and pulling the parallel elastic plate in the expanding or narrowing direction by the forward and backward movement of the slider.

JP2003-075752A

  However, the linear movement actuator using the above-described reduction gear mechanism requires a plurality of parts, a complicated assembly process, and a complicated adjustment operation. Further, in the linear movement mechanism using the elasticity by the combination of the above elastic plates, since a plurality of elastic plates are spatially arranged, the structural strength becomes weak and it is difficult to realize a precise displacement. Therefore, the above-described existing technology cannot realize a highly accurate linear movement mechanism that is lightweight, fine, and easy to manufacture.

  An object of the present invention is a novel linear movement mechanism that performs precision linear movement, and is structurally robust, can be easily reduced in weight and size, is simple to manufacture, and is easy to operate. It is to be.

According to the first aspect of the present invention , the linear moving mechanism deforms the elastic ellipse ring in the direction of the short axis of the elastic ellipse ring, the elastic ellipse ring having one end of the long axis fixed and the other end movable. An operation member arranged in such a manner, a movable member fixed to the other end of the elastic elliptical ring, and an elastic support member arranged to elastically support the movable member.
According to the second aspect of the present invention , the linear moving mechanism includes a fixed portion and a first moving portion provided in the opposite direction along a linear movement direction line passing through the fixed portion with the fixed portion serving as a common fixed point . A linear movement part and a second linear movement part, and each of the first and second linear movement parts has a shape symmetrical with respect to the linear movement direction line, and the fixed part An elastic device having one end fixed and converting an input direction and an input displacement orthogonal to the linear movement direction line into an output direction and an output displacement along the linear movement direction line; and the elastic device in the input direction as the input An operation member arranged to be deformed only by a displacement, a movable member fixed to the other end of the elastic device on the linear movement direction line, and moved by the output displacement in the output direction by deformation of the elastic device; The first and Each of the movable member 2 of the linear movement portion is independently and can be moved linearly in opposite directions.
According to the third aspect of the present invention, the linear moving mechanism includes a fixed portion, a first linear moving portion provided in an opposite direction to the fixed portion, and the first fixed portion serving as a common fixed point. Each of the first and second linear moving parts, an elastic elliptical ring in which one end of a long axis is fixed to the fixed part and the other end is movable, and the elastic elliptical ring An operation member arranged to deform the elastic elliptical ring in the direction of the minor axis, a movable member fixed to the other end of the major axis of the elastic elliptical ring, and elastically supporting the movable member And an elastic support member disposed.

FIG. 1 is a perspective view illustrating a linear movement mechanism according to the first embodiment of the invention. FIG. 2 is a plan view illustrating the linear movement mechanism shown in FIG. FIG. 3 is a diagram showing the operation of the linear movement mechanism shown in FIG. FIG. 4 is a schematic diagram showing an example of a manufacturing process of the linear movement mechanism shown in FIG. FIG. 5 is a perspective view illustrating a linear movement mechanism according to the second embodiment of the invention. FIG. 6 is a plan view illustrating the linear movement mechanism shown in FIG. FIG. 7 is a diagram showing the operation of the linear movement mechanism shown in FIG. FIG. 8 is a perspective view illustrating a first application example of the linear movement mechanism according to the second embodiment of the invention. FIG. 9 is a perspective view of the bipod used in the first application example shown in FIG. FIG. 10 is a side view of the bipod shown in FIG. FIG. 11 is a plan view of the bipod shown in FIG. 12 is an enlarged side view of the limited displacement flexible joint of the bipod shown in FIG. FIG. 13 is an enlarged side view of the limited displacement flexible joint shown in FIG. 12 when bent in one direction. FIG. 14 is an enlarged side view of the limited displacement flexible joint shown in FIG. 12 when bent in the other direction. FIG. 15 is a side view of the first application example shown in FIG. FIG. 16A is a schematic side structural view of the first application example shown in FIG. 8 for describing the operation of the first application example. FIG. 16B is a schematic side structural view of the first application example shown in FIG. 8 for describing the operation of the first application example. FIG. 16C is a schematic side view structure diagram of the first application example shown in FIG. 8 for describing the operation of the first application example. FIG. 16D is a schematic side structure diagram of the first application example shown in FIG. 8 for describing the operation of the first application example. FIG. 17 is a side view illustrating a hexapod mechanism that is a second application example of the linear movement mechanism according to the second embodiment of the invention. FIG. 18 is a perspective view illustrating the second application example shown in FIG. FIG. 19 is a plan view illustrating the second application example shown in FIG. FIG. 20 is a plan view illustrating the second application example shown in FIG. 17 with the mounting table removed. FIG. 21 is a plan view illustrating the second application example shown in FIG. 17 in a state where the mounting table and all the bipods are removed. FIG. 22 is a diagram illustrating the mechanical and electronic structure of a micromanipulator that is a third application example of the linear movement mechanism according to the first embodiment of the invention.

  The linear moving mechanism is configured to convert the input direction and the input displacement into an output direction orthogonal to the input direction and an output displacement smaller than the input displacement. The linear movement mechanism has a two-dimensional structure in which the input direction and the output direction are on one plane. The ratio between the output displacement and the input displacement may be determined by the spring constant of the elastic member constituting the linear movement mechanism.

  More specifically, the linear movement mechanism may include an elliptical ring portion, an operation portion, a movable portion, and a support portion that are integrally formed of an elastic material. The elliptical ring portion has a function of converting the operation direction to an orthogonal direction in a state where one end of the major axis is fixed and the other end of the major axis is movable. The operation part is arranged so as to press the elliptical ring part in the direction of the minor axis. Therefore, when the operating part presses or pulls the elliptical ring part, the elliptical ring part is elastically deformed and linearly moves the movable part along the long axis of the elliptical ring part.

  It is preferable to ensure the linear movement of the movable part along the long axis of the elliptical ring part by providing elastic support parts on both sides of the movable part. The elastic support part may be composed of a plurality of leaf springs that connect the movable part to the fixed part on both sides. The elliptical ring part, the operating part and the elastic support part may have different spring constants so as to provide various reduction ratios. In order to obtain a desired reduction ratio, the operating portion and the elastic support portion may each have a small spring constant (soft spring (soft spring)) and a large spring constant (hard spring (hard spring)). Various embodiments of the present invention will be described below with reference to the drawings.

1. 1. First Embodiment 1.1) Structure Referring to FIGS. 1 and 2, a linear moving mechanism 10 according to a first embodiment is a movable point connected to a fixed point 102 and a movable unit 105 connected to a fixed unit 103. It has an elliptical ring 101 with points 104. The fixed point 102 and the movable point 104 are both ends of the long axis of the elliptical ring 101.

  The elliptical ring 101 has soft spring portions 106 a and 106 b that are respectively fixed to both sides of the elliptical ring 101 in the short axis direction. As a result, the elliptical ring 101 is sandwiched between the soft spring portions 106a and 106b. The soft spring portions 106a and 106b are provided with operation plates 107a and 107b at respective ends. The soft spring portions 106a and 106b preferably have the same spring constant so as to press or pull the elliptical ring 101 equally. In FIG. 1, the soft spring portions 106a and 106b are bellows-like springs, but this is merely an example.

  Each of the soft spring portions 106a and 106b is preferably composed of two soft springs arranged in parallel to each other. More specifically, as shown in FIG. 2, the soft spring portion 106a is composed of two soft springs 106a1 and 106a2, which are arranged in parallel and may be symmetric with respect to the short axis of the elliptical ring 101. . The soft spring portion 106b includes two soft springs 106b1 and 106b2 arranged in the same manner as the soft spring portion 106a. This two parallel spring arrangement realizes a self-alignment function that eliminates the effect of misalignment, and does not require the operation plates 107a and 107b to be pressed or pulled perpendicularly to the respective surfaces without intention of the movable part 105. It is possible to move straight along the street.

  The movable portion 105 is supported by the first and second elastic support portions on both sides thereof, thereby ensuring the linear movement along the long axis of the elliptical ring 101. One side of the movable part 105 is connected to the first elastic support part. More specifically, the movable part 105 is connected to the movable part 110a via two leaf springs 108a and 109a. Movable portion 110a is further connected to fixed portions 113a and 114a via leaf springs 111a and 112a, respectively. In other words, the one side of the movable portion 105 is connected to the fixed portions 113a and 114a via the first pair of leaf springs 108a and 109a and the second pair of leaf springs 111a and 112a. Similarly, the other side of the movable part 105 is connected to the second elastic support part. Accordingly, the movable portion 105 is connected to the fixed portions 113b and 114b via the first pair of leaf springs 108b and 109b, the movable portion 110b and the second pair of leaf springs 111b and 112b.

  Thus, both sides of the movable part 105 are supported by the first and second elastic support parts, respectively, so that the movable part 105 moves stably along the major axis of the elliptical ring 101 without swinging. To do.

  Further, two corners on the one side of the movable portion 105 are cut off, and the fixed portions 113a and 114a are partially accommodated in the cut portions. Similarly, two corners on the other side of the movable portion 105 are cut off, and the fixed portions 113b and 114b are partially accommodated in the cut portions. Therefore, the movable portion 105 is movably held between the fixed portions 113a and 113b and between the fixed portions 114a and 114b, so that the movement of the movable portion 105 is excessively swung left and right or the elliptical ring 101 is moved. Since excessive displacement in the direction of the long axis is prevented, the movement of the movable portion 105 is limited within a predetermined range.

  As already described, the spring constants of the pair of soft spring portions 106a and 106b and the two pairs of leaf springs 108a and 109a and the leaf springs 111a and 112a can be appropriately selected to obtain a desired reduction ratio. . Next, the operation of the linear movement mechanism 10 will be described.

1.2) Operation Referring to FIG. 3, when the soft spring portions 106a and 106b are pressed or pulled in the opposite input directions 201a and 201b, the elliptical ring 101 becomes as indicated by arrows 202a, 202b and 203. By deforming, the length of the short axis decreases or increases, and the length of the long axis increases or decreases. Since the movement of the fixed point 102 is hindered, the movable portion 104 moves slightly in the output direction 205 when the movable point 104 moves in the direction 203, while the movable portions 110a and 110b also move in the same direction 204a and Each moves slightly to 204b.

  In this way, when the soft spring portions 106 a and 106 b press or pull the elliptical ring 101, the elliptical ring 101 is elastically deformed, and the movable portion 105 is linearly moved along the long axis of the elliptical ring 101. The input direction of pressing / pulling is orthogonal to the output direction of linear movement of the movable part 105. When the spring constants of the soft spring portions 106a and 106b are smaller than the spring constants of the elliptical ring 101 and the leaf springs 108a, 109a, 111a, 112a, 108b, 109b, 111b and 112b, the amount of input displacement applied to the soft spring portions 106a and 106b. Can be converted into a desired amount of linear movement of the movable portion 105.

  As described above, since the linear movement mechanism 10 can operate on the same plane, the miniaturization and the structural strength are improved and the operation is facilitated.

1.3) Manufacture As illustrated in FIG. 4, all portions 101 to 114 of the linear moving mechanism 10 are integrally formed by cutting a planar structural shape from a single elastic plate 120 made of a homogeneous material having a predetermined thickness. May be. Thereby, since the linear moving mechanism 10 has a two-dimensional structure in which all the portions 101 to 114 have the same thickness, it is easy to reduce the weight and size, and the manufacturing is simplified. Other techniques such as injection molding, a three-dimensional printer, or MEMS (Microelectromechanical Systems) may be used to manufacture the linear movement mechanism 10.

1.4) Effect According to the first embodiment of the present invention, a large input displacement of the soft spring portion is converted into a small linear movement of the movable portion according to the spring constant ratio. Thereby, even if the input displacement is applied to the soft spring portion with low accuracy, the linear movement mechanism can provide high-precision linear movement. When the spring constant ratio is known, the displacement amount of the movable portion can be calculated with high accuracy by accurately measuring the input displacement of the soft spring without accurately measuring the displacement of the movable portion. Therefore, the first embodiment of the present invention can achieve the nano-resolution movement of the movable part.

Further, as described above, each part of the linear moving mechanism 10 moves according to the law of motion by the monocoque design of the homogeneous material and does not require a transition by the sliding mechanism. Therefore, there is no possibility of motion loss. Achieved.
i. Certainly predictable and repeatable movement.
ii. Accurate movement without complicated position sensors and closed-loop servo control allows open-loop control.
iii. Complete operation over a wide temperature range from cryogenic temperatures to over 400 ° C.
iv. A semi-permanent lifetime that does not require consideration of the press / pull mechanism (input mechanism).
v. No particle contamination or cross contamination.
vi. High resistance to corrosive conditions such as in corrosive gases and liquids.

2. Second Embodiment 2.1) Structure As shown in FIGS. 5 and 6, the linear movement mechanism 20 according to the second embodiment is based on a combination of a first linear movement unit 300 and a second linear movement unit 400. It is formed. Each linear movement part has the functional structure substantially the same as the linear movement mechanism 10 shown in FIG. 1 and FIG. The first linear moving unit 300 and the second linear moving unit 400 are arranged so that the major axes of the elliptical rings 301 and 401 coincide with each other. The 1st linear movement part 300 and the 2nd linear movement part 400 have the common fixing | fixed part 303/403 corresponding to the fixing | fixed part 103 of 1st Embodiment. Accordingly, the linear movement mechanism 20 includes movable portions 305 and 405 on both sides thereof.

  More specifically, the first linear moving unit 300 includes an elliptical ring 301 having a fixed point 302 connected to the fixed unit 303 and a movable point 304 connected to the movable unit 305. The fixed point 302 and the movable point 304 are both ends of the long axis of the elliptical ring 301.

  The elliptical ring 301 has soft spring portions 306a and 306b connected to both sides of the elliptical ring 301 in the short axis direction, respectively. The soft spring portions 306a and 306b are provided with operation plates 307a and 307b at respective ends. The soft spring portions 306a and 306b preferably have the same spring constant so as to press or pull the elliptical ring 301 equally. In FIG. 5, the soft spring portions 306a and 306b are bellows springs, but this is merely an example. Each of the soft spring portions 306a and 306b has a 2-parallel spring arrangement similar to the soft spring portions 106a and 106b of the first embodiment.

The movable part 305 is supported by elastic support parts on both sides thereof, thereby ensuring a linear movement along the long axis of the elliptical ring 301. Since the elastic support portion is the same as the first and second elastic support portions of the first embodiment, detailed description thereof is omitted. Since both sides of the movable portion 305 are supported by the elastic support portions, the movable portion 305 moves stably along the long axis of the elliptical ring 301 without swinging.

  As described above, the spring constants of the pair of soft spring portions 306a and 306b and the elastic support portion can be appropriately selected so as to obtain a desired reduction ratio.

  The structure of the second linear moving unit 400 is the same as that of the first linear moving unit 300. In short, the second linear moving unit 400 includes an elliptical ring 401 having a fixed point 402 connected to the fixed unit 403 and a movable point 404 connected to the movable unit 405. The fixed point 402 and the movable point 404 are both ends of the long axis of the elliptical ring 401. The elliptical ring 401 has soft spring portions 406a and 406b connected to both sides of the elliptical ring 401 in the short axis direction, respectively. The soft spring portions 406a and 406b are provided with operation plates 407a and 407b at respective ends. The movable portion 405 is supported by elastic support portions on both sides thereof, thereby ensuring a linear movement along the long axis of the elliptical ring 401.

2.2) Operation Referring to FIG. 7, when the operation plates 307a and 307b are operated in the opposite directions, the soft springs 306a and 306b are simultaneously pressed or pulled as described in the first embodiment. Similarly, operation plates 407a and 407b operate in the same manner as operation plates 307a and 307b, but independently of operation plates 307a and 307b. As a result, when the soft spring portions 306a and 306b and the soft spring portions 406a and 406b are pressed or pulled, the elliptical rings 301 and 401 are deformed, thereby moving the movable portions 305 and 405 in the directions 309 and 409, respectively. To do.

  In this way, the operation plates 307a and 307b and the operation plates 407a and 407b elastically deform the elliptical rings 301 and 401, respectively, so that the movable portions 305 and 405 move linearly along the major axis of the elliptical rings 301 and 401. .

  The direction in which the soft spring portion is pressed / pulled is orthogonal to the direction of linear movement of the movable portions 305 and 405. When the spring constants of the soft spring portions 306a, 306b, 406a, and 406b are smaller than the spring constants of the elliptical rings 301 and 401 and the elastic support portions, the input displacement amount applied to the soft springs 306a, 306b, 406a, and 406b is changed to the movable portion 305. And the desired linear movement amount of 405. Thereby, the linear movement mechanism 20 can achieve the effect similar to 1st Embodiment.

2.3) Manufacturing Similar to the first embodiment shown in FIG. 4, all the parts of the linear movement mechanism 20 are also integrally formed by cutting a planar structure shape from a single elastic plate having a predetermined thickness, for example. May be. As a result, the linear movement mechanism 20 having a two-dimensional structure in which all parts have the same thickness can be manufactured, so that the weight and size can be easily reduced, and the manufacturing is simplified. Other techniques such as injection molding, a three-dimensional printer, or MEMS may be used to manufacture the linear movement mechanism 20 .

3. Application Example 3.1) Adjustable Support Assembly 3.1.1) Structure Referring to FIG. 8, the support assembly includes a bipod 600 and the linear movement mechanism 20 described in the second embodiment. Consists of The bipod 600 has two support rods 601 and 602, one end of which is connected on the upper side, and a mounting portion 603 is provided thereon to form an inverted V-shaped bipod. The other ends of the support rods 601 and 602 are fixed to the movable unit 305 of the first linear moving unit 300 and the movable unit 405 of the second linear moving unit 400, respectively. Support rods 601 and 602 have the same structure. Hereinafter, the structure of the support rod 601 shown in FIGS. 9 to 11 will be described as an example.

3.1.2) Bipod Referring to FIGS. 9 to 11, the support rod 601 includes a fixed portion 610, two limited displacement flexible joints 611 and 612, a rod 613 having relative rigidity, and two pieces. And have a leg-like shape including a limited displacement flexible joint 614 and 615. Each of the limited displacement flexible joints 611, 612, 614 and 615 provides limited flexibility with alternating flexible directions D 1 and D 2 orthogonal to the longitudinal axis of the support rod 601. The flexible direction D1 is a direction orthogonal to the support rod 601 in a plane formed by the support rods 601 and 602, and is generally illustrated in FIG. The flexible direction D2 is a direction orthogonal to the plane formed by the support rods 601 and 602, and is generally illustrated in FIG. In this example, the limited displacement flexible joints 611 and 614 can bend in the direction D2, while the limited displacement flexible joints 612 and 615 can be bent in the direction D1. Thereby, the support rod 601 can be freely bent in the directions D1 and D2. Similarly, the support rod 602 includes a fixed portion 620, two limiting displacement flexible joints 621 and 622, a rigid rod 623 having relative rigidity, and two limiting displacement flexible joints 624 and 625. It has a shape like a leg including, and can be freely bent in flexible directions D1 and D2 perpendicular to the longitudinal axis of the support rod 602.

  However, each of the limited displacement flexible joints 611, 612, 614, 615, 621, 622, 624 and 625 is designed to limit the angle of bending to prevent joint breakage. The detailed structure of the limited displacement flexible joint will be described with reference to FIGS.

  Referring to FIG. 12, the limited displacement flexible joint includes a flexible blade 630 and a pair of bending limit portions 640L1 and 640L2 provided in parallel on both sides of the flexible blade 630. Form a joint. The flexible blade 630 provides flexibility as described above. Each of the bending limiting portions 640L1 and 640L2 is configured by two separate parts engaged with a gap therebetween, and thus rotates around an axis perpendicular to the paper surface (indicated by D). More specifically, one of the parts of the bending limiting portion 640L1 (upper part) includes a pair of outer stopper L11 and inner stopper L12 protruding from the upper part, and a cylindrical convex part L13 provided at the edge of the upper part. It consists of. The other part (lower part) of the bending limiting portion 640L1 is configured by a cylindrical concave portion L14 that is rotatably engaged with the cylindrical convex portion L13. The bending restriction part 640L2 has the same structure as the bending restriction part 640L1. More specifically, one of the parts of the bending limiting portion 640L2 (upper part) includes a pair of an outer stopper L21 and an inner stopper L22 protruding from the upper part, and a cylindrical convex portion L23 provided at the edge of the upper part. It consists of. The other part (lower part) of the parts of the bending restriction part 640L2 includes a cylindrical concave part L24 that is rotatably engaged with the cylindrical convex part L23.

  As shown in FIG. 13, when the support rod is bent in the direction 650, the blade 630 is also bent in the same direction 650, causing the upper parts of the bending restriction portions 640L1 and 640L2 to rotate with respect to the lower parts, respectively. With each rotation, the stoppers L11 and L22 come into contact with the upper edge of one of the cylindrical recesses L14 and L24, as indicated by reference numerals 651 and 652. This firmly stops the rotation of the upper part in the direction 650 and prevents the blade 630 from breaking.

  As shown in FIG. 14, when the support rod is bent in the reverse direction 660, the blade 630 is also bent in the same direction 660, and the upper parts of the bending limiting portions 640L1 and 640L2 are rotated with respect to the lower part, respectively. By the respective rotations, the stoppers L12 and L21 come into contact with the other upper edges of the cylindrical recesses L14 and L24, as indicated by reference numerals 661 and 662. Thereby, the rotation of the upper part in the direction 660 is also stopped firmly, and the blade 630 is prevented from breaking.

3.1.3) Operation Referring to FIG. 15, the support assembly is assembled from bipod 600 and linear movement mechanism 20. The support rods 601 and 602 are fixed to the movable unit 305 of the first linear moving unit 300 and the movable unit 405 of the second linear moving unit 400, respectively. Accordingly, the placement unit 603 of the bipod 600 can be arbitrarily set within a limited range on the plane formed by the support rods 601 and 602 according to the respective directions and displacements of the linear movements of the movable units 305 and 405. Can move to a position.

  As shown in FIG. 16A, the operation plates 307a and 307b and the operation plates 407a and 407b press the elliptical rings 301 and 401, respectively, so that the linear movement mechanism 20 increases the distance between the movable portions 305 and 405. When the movable parts 305 and 405 are moved in the opposite direction by the same displacement, the height of the bipod 600 with respect to the main surface of the linear movement mechanism 20 is as shown by a displacement 605 perpendicular to the main surface of the linear movement mechanism 20. Decrease according to the displacement of 305 and 405.

  As shown in FIG. 16B, the operation plates 307a and 307b and the operation plates 407a and 407b pull the elliptical rings 301 and 401, respectively, so that the linear movement mechanism 20 reduces the distance between the movable portions 305 and 405. When the movable parts 305 and 405 are moved in the opposite direction by the same displacement, the height of the bipod 600 with respect to the main surface of the linear moving mechanism 20 is as shown by a displacement 605 perpendicular to the surface of the linear moving mechanism 20. And increase with the displacement of 405.

  As shown in FIGS. 16C and 16D, the operation plates 307a and 307b press / pull the elliptical ring 301, the operation plates 407a and 407b pull / push the elliptical ring 401, and the linear moving mechanism 20 When 405 is moved in the same direction by the same displacement, the bipod 600 is moved in the same direction by the same displacement as shown by a displacement 604 parallel to the main surface of the linear movement mechanism 20.

3.1.4) Manufacturing The bipod 600 having the above-described structure is made of an elastic material having sufficient strength, and may be integrally formed using any technique such as injection molding, a three-dimensional printer, or MEMS.

3.2) Hexapod Configuration 3.2.1) Structure Referring to FIGS. 17-21, a hexapod configuration with six degrees of freedom includes a bottom plate 701, a top plate 702 and three support assemblies A. , B and C. Each of the support assemblies A, B, and C includes a bipod (600A, 600B, 600C) and a linear movement mechanism (20A, 20B, 20C) as shown in FIG. The support assemblies A, B and C are generally fixedly arranged on the bottom plate 701 in an equilateral triangle configuration as shown in FIG. Upper plate 702 is fixed to the placement portion of bipods 600A, 600B, and 600C. As a result, the upper plate 702 is supported by three position-adjustable points.

  As an example, the bottom plate 701 is circular and the top plate 702 is star-shaped. The upper plate 702 may be formed of three legs 702A, 702B, and 702C, and may be joined at a central point so that the angle between two adjacent legs is 120 degrees. The three legs 702A, 702B, and 702C are generally supported by support assemblies A, B, and C, respectively, as shown in FIG. Needless to say, the upper plate 702 may be circular. Further, the upper plate 702 may be a mounted object that requires precise adjustment, such as an optical system (for example, a mirror, a prism, or a lens).

As described above, the linear movement mechanism 20A includes the first and second linear movement units 300A and 400A, which can move the movable units 305A and 405A, respectively. Accordingly, as shown in FIGS. 16A to 16D, the placement unit 603A of the bipod 600A fixed to the linear movement mechanism 20A can change the bipod according to the respective directions and displacements of the linear movement of the movable units 305A and 405A. It can be moved to any position within a limited range on the plane formed by the 600A support rods 601A and 602A. The same applies to the linear movement mechanisms 20B and 20C.

3.2.2) Operation Since the upper plate 702 is supported by the support assemblies A, B, and C, the position and / or inclination of the upper plate 702 is determined by at least one straight line of the linear movement mechanisms 20A, 20B, and 20C. It can be varied by independently controlling the expansion, reduction or translation of the movement. Hereinafter, a general operation of the hexapod will be described with reference to FIGS. 16A to 16D and FIG. 18 as an example.

  As shown in FIG. 16A, when the operation plates 307a and 307b and the operation plates 407a and 407b press the elliptical rings 301 and 401, respectively, and the linear movement mechanism 20 moves the movable portions 305 and 405 in the enlargement direction, Height decreases. As shown in FIG. 16B, when the operation plates 307a and 307b and the operation plates 407a and 407b pull the elliptical rings 301 and 401, respectively, and the linear movement mechanism 20 moves the movable portions 305 and 405 in the contraction direction, The height increases. As shown in FIGS. 16C and 16D, the operation plates 307a and 307b press / pull the elliptical ring 301, the operation plates 407a and 407b pull / push the elliptical ring 401, and the linear moving mechanism 20 When the 405 is moved in the same direction by the same displacement, the bipod 600 moves in parallel. Thereby, the upper plate 702 can freely move in six directions by the combination of the direction of movement and the displacement provided by the respective linear movement mechanisms 20A, 20B and 20C.

  It is assumed that the linear movement mechanisms 20B and 20C are not operated, and only the linear movement mechanism 20A moves the movable parts 305A and 405A by the same displacement in the opposite directions so as to increase the distance between the movable parts 305A and 405A. In this case, the height of the bipod 600A with respect to the main surface of the linear movement mechanism 20A decreases, and the upper plate 702 tilts toward the leg portion 702A. Conversely, when only the linear movement mechanism 20A moves the movable parts 305A and 405A by the same displacement in the opposite directions so as to reduce the distance between the movable parts 305A and 405A, the bipod 600A with respect to the main surface of the linear movement mechanism 20A And the upper plate 702 tilts toward the center line between the legs 702B and 702C.

  When only the linear movement mechanism 20C is operated, the linear movement mechanisms 20A and 20B are operated so as to move the corresponding movable parts in the opposite directions by the same displacement so as to increase the distance between the corresponding movable parts. Assume. In this case, the heights of the bipods 600A and 600B are both reduced, and the upper plate 702 is inclined toward the center line between the legs 702A and 702B. Conversely, when the linear movement mechanisms 20A and 20B are operated to move the corresponding movable parts in the opposite directions by the same displacement so as to reduce the distance between the corresponding movable parts, the heights of the bipods 600A and 600B are increased. Both the heights are increased, and the upper plate 702 is inclined toward the leg portion 702C.

  It is assumed that not only the linear movement mechanism 20C is operated, but the linear movement mechanisms 20A and 20B are operated so as to move the corresponding movable parts by the same displacement in the same direction. In this case, the upper plate 702 moves and tilts toward the center line between the leg portions 702A and 702B.

  Assuming that all the linear moving mechanisms 20A, 20B and 20C operate to move the corresponding movable parts in the same direction by the same displacement, the bipods 600A, 600B and 600C rotate and the upper plate 702 is the same by the same displacement. Rotate in the direction.

  In the hexapod arrangement, precise adjustment of the upper plate 702 other than the above-described operation can be performed by independently controlling the linear movement mechanisms 20A, 20B and 20C.

3.2.3) Effects As already described, according to the linear movement mechanism according to the first or second embodiment, a large input displacement of the soft spring portion is changed to a small linear movement of the movable portion according to the spring constant ratio. Converted. Thereby, even if the input displacement is applied to the soft spring portion with low accuracy, the hexapod system using the linear movement mechanism can move the upper plate with high accuracy. When the spring constant ratio is known, the displacement amount of the upper plate can be calculated with high accuracy by accurately measuring the input displacement without accurately measuring the displacement of the upper plate.

3.3) Micromanipulator The linear movement mechanism according to the first or second embodiment can be easily miniaturized using the MEMS technology. Such a miniaturized linear movement mechanism is preferable because it can be used as a movement reduction mechanism for a micromanipulator for manipulating a cell-sized object under a microscope.

  As illustrated in FIG. 22, the micromanipulator uses a pair of miniaturized linear movement mechanisms 10A and 10B according to the first embodiment. The movable parts 105 of the linear movement mechanisms 10A and 10B include micro tools 801 and 802, respectively, which are used to hold, cut or manipulate a cell-sized sample under a microscope.

  The soft springs 104a and 104b of the linear movement mechanisms 10A and 10B are driven by driving units, respectively. The manipulator control unit controls the microscope and the driving unit according to a user instruction through the monitor and the operation panel.

  According to the linear movement mechanism according to the first or second embodiment, a large drive input displacement of the soft spring is converted into a small linear movement of the movable portion according to the spring constant ratio. Thereby, even if the drive input displacement is applied to the soft spring portion with low accuracy, the micromanipulator using the linear movement mechanism can move the microtool with high accuracy.

4). Other Application Examples The present invention can be applied to a high-precision measurement device such as a six-degree-of-freedom adjustment device that can be exposed to various harsh environments such as aircraft and spacecraft.

The present invention may be embodied in other specific forms without departing from the technical concept and essential characteristics thereof. Accordingly, the foregoing embodiments and specific examples are to be considered in all respects as illustrative and not restrictive, and the scope of the invention is indicated by the appended claims rather than by the foregoing specification. It is. Accordingly, all changes that come within the meaning and range of equivalency of the claims are to be embraced within their scope. Hereinafter, Claims 1 to 19 of the claims at the time of filing are described as Appendices 1 to 19.
(Appendix 1)
An elastic device arranged to convert an input direction and an input displacement into an output direction and an output displacement orthogonal to the input direction;
An operating member arranged to deform the elastic device by the input displacement in the input direction;
A movable member fixed to the elastic device and moving in the output direction by the output displacement;
A linear movement mechanism with
(Appendix 2)
The linear movement mechanism according to claim 1, wherein a ratio between the input displacement and the output displacement is determined by a combination of a spring constant of the elastic device and the operation member.
(Appendix 3)
The linear movement mechanism according to appendix 1 or 2, wherein the linear movement mechanism has a two-dimensional structure formed integrally.
(Appendix 4)
An elastic elliptical ring in which one end of the long axis is fixed and the other end is movable;
An operating member arranged to deform the elastic elliptical ring in the direction of the short axis of the elastic elliptical ring;
A movable member fixed to the other end of the elastic elliptical ring;
An elastic support member arranged to elastically support the movable member;
A linear movement mechanism with
(Appendix 5)
The linear movement mechanism according to appendix 4, wherein the elastic support member limits movement of the movable member to linear movement along the direction of the long axis.
(Appendix 6)
The linear movement according to appendix 4 or 5, wherein a ratio of the pressing displacement of the operation member and the linear movement displacement of the movable member is determined by a combination of spring constants of the elastic elliptic ring, the operation member, and the elastic support member. mechanism.
(Appendix 7)
The linear movement mechanism according to appendix 6, wherein the spring constant of the operation member is smaller than the spring constant of the elastic support member.
(Appendix 8)
The linear movement mechanism according to any one of appendices 4 to 7, wherein the operation member includes a pair of spring portions that sandwich the elastic elliptical ring in the direction of the short axis.
(Appendix 9)
The linear movement mechanism according to any one of appendices 4 to 8, wherein the elastic support member has a pair of support portions that sandwich the movable member via a plurality of leaf springs.
(Appendix 10)
The linear movement mechanism according to any one of appendices 4 to 9, wherein the linear movement mechanism has a two-dimensional structure formed integrally.
(Appendix 11)
A first linear moving unit;
A second linear moving part fixed to the first linear moving part at a common fixed point;
Have
Each of the first and second linear movement units is
An elastic device arranged to convert an input direction and an input displacement into an output direction and an output displacement orthogonal to the input direction;
An operating member arranged to deform the elastic device by the input displacement in the input direction;
A movable member fixed to the elastic device and moving in the output direction by the output displacement;
A linear movement mechanism with
(Appendix 12)
The linear movement mechanism according to claim 11, wherein the movable members of the first and second linear movement units move independently in the output direction of the corresponding linear movement unit.
(Appendix 13)
The linear movement mechanism according to appendix 11 or 12, wherein a ratio between the input displacement and the output displacement is determined by a combination of a spring constant of the elastic device and the operation member.
(Appendix 14)
14. The linear movement mechanism according to any one of appendices 11 to 13, wherein the linear movement mechanism has a two-dimensional structure formed integrally.
(Appendix 15)
Deform the elastic device by the input displacement in the input direction,
Converting the input direction and the input displacement into an output direction and an output displacement orthogonal to the input direction;
Moving the movable member fixed to the elastic device by the output displacement in the output direction;
Linear movement method.
(Appendix 16)
The linear movement method according to supplementary note 15, wherein a ratio between the input displacement and the output displacement is determined by a combination of a spring constant of the elastic device and the operation member.
(Appendix 17)
A manufacturing method of the linear movement mechanism according to any one of appendices 1 to 3,
Prepare an elastic plate with a predetermined thickness,
Cutting off the linear movement mechanism from the elastic plate;
Manufacturing method of linear movement mechanism.
(Appendix 18)
A manufacturing method of the linear movement mechanism according to any one of appendices 4 to 10,
Prepare an elastic plate with a predetermined thickness,
Cutting off the linear movement mechanism from the elastic plate;
Manufacturing method of linear movement mechanism.
(Appendix 19)
A method for manufacturing the linear movement mechanism according to any one of appendices 11 to 14,
Prepare an elastic plate with a predetermined thickness,
Cutting off the linear movement mechanism from the elastic plate;
Manufacturing method of linear movement mechanism.

Claims (10)

An elastic elliptical ring in which one end of the long axis is fixed and the other end is movable;
An operating member arranged to deform the elastic elliptical ring in the direction of the short axis of the elastic elliptical ring;
A movable member fixed to the other end of the elastic elliptical ring;
An elastic support member arranged to elastically support the movable member;
A linear movement mechanism with The linear movement mechanism according to claim 1 , wherein the elastic support member limits movement of the movable member to linear movement along the direction of the long axis. The ratio of the linear movement displacement of the pressing or tensile displacement and the movable member of the operating member, the elastic elliptical ring, the operating member and the elastic claim is determined by the combination of the respective spring constants of the support 1 or 2 The linear movement mechanism described in 1. The linear movement mechanism according to claim 3 , wherein a spring constant of the operation member is smaller than a spring constant of the elastic support member. The operating member, linear movement mechanism according to any one of claims 1 to 4 having a spring portion of a pair of sandwiching the elastic elliptical ring in the direction of the short axis. The linear movement mechanism according to any one of claims 1 to 5 , wherein the elastic support member has a pair of support portions that sandwich the movable member via a plurality of leaf springs. The elastic elliptical ring, said operating member, said movable member and said elastic support member, the linear movement mechanism according to any one of claims 1 to 6 having the two-dimensional structure that is integrally formed. A fixed portion, and a first linear moving portion and a second linear moving portion provided in opposite directions along a linear movement direction line passing through the fixed portion with the fixed portion as a common fixed point ,
Each of the first and second linear movement units is
The linear movement direction line has a line-symmetric shape, one end is fixed to the fixing portion, and an input direction and an input displacement orthogonal to the linear movement direction line are output directions along the linear movement direction line. And an elastic device for converting into output displacement,
An operating member arranged to deform the elastic device by the input displacement in the input direction;
A movable member fixed to the other end of the elastic device on the linear movement direction line and moving by the output displacement in the output direction by deformation of the elastic device;
A linear movement mechanism in which each movable member of the first and second linear movement units is capable of linear movement independently and in the opposite direction .   A fixed portion, and a first linear moving portion and a second linear moving portion provided in opposite directions with respect to the fixed portion, with the fixed portion serving as a common fixed point,
  Each of the first and second linear movement units is
  An elastic elliptical ring in which one end of the long axis is fixed to the fixed part and the other end is movable;
  An operating member arranged to deform the elastic elliptical ring in the direction of the short axis of the elastic elliptical ring;
  A movable member fixed to the other end of the major axis of the elastic elliptical ring;
  An elastic support member arranged to elastically support the movable member;
  A linear movement mechanism with It is a manufacturing method of the linear movement mechanism according to claim 8 or 9 ,
Prepare an elastic plate with a predetermined thickness,
Cutting off the linear movement mechanism from the elastic plate;
Manufacturing method of linear movement mechanism.

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