JP6348751B2 - Laser processing apparatus and processing condition setting program thereof - Google Patents

Description

  The present invention relates to a technique for setting processing conditions of a laser processing apparatus.

  2. Description of the Related Art Conventionally, there is a laser processing apparatus that allows a user to set processing conditions such as a processing speed and laser intensity, and performs processing by irradiating a processing object with laser light based on the set processing conditions (Patent Document 1). reference). In this laser processing apparatus, when setting the processing conditions, the display unit displays a setting screen in which the options for the degree of change for each processing condition are displayed in an ambiguous expression such as “more strongly” or “a little stronger”. The user selects and changes the processing conditions as appropriate by selecting one of the options for the ambiguous expression.

JP-A-10-109185

  However, in the conventional laser processing apparatus, even if the processing conditions are appropriately changed, in order to grasp the finished state when the processing is performed under the changed processing conditions, the processing target is actually processed based on the processing conditions. There is a problem that must be done.

  In the present specification, a technique capable of grasping a finished state corresponding to a processing condition without actually processing an object to be processed is disclosed.

  The laser processing apparatus disclosed by the present specification includes a laser irradiation unit that processes a processing target by irradiating a processing target with laser light, a display unit, a reception unit, and a control unit based on processing conditions, The control unit is configured to set a processing condition, an image display process for displaying a finished image indicating a finished state when the processing is performed under the processing condition set in the setting process, and the reception unit. An image for changing to a change acceptance process for accepting a change instruction for changing the machining condition and an image showing a finished state when the finished image to be displayed on the display unit is machined under the machining condition after the change according to the change instruction. The change process is executed.

  According to this laser processing apparatus, when the processing conditions are changed, the finished image displayed on the display unit is changed to an image showing a finished state when the processing is performed under the changed processing conditions. Thus, a technique capable of grasping a finished state corresponding to a machining condition without actually machining a workpiece is disclosed.

  In the laser processing apparatus, the processing condition includes at least a processing speed, and the control unit determines a processing time required to process the processing object under the processing condition based on the processing speed at least. You may perform the time display process displayed on a display part.

  According to this laser processing apparatus, the user can set and change the processing conditions with reference to the processing time.

  In the laser processing apparatus, the processing conditions include at least processing speed and processing strength, and the control unit causes the reception unit to receive a maintenance instruction to maintain a finished state, and the maintenance If the change instruction is an instruction to change one of the condition elements of the processing speed and the processing intensity on the condition that the instruction is accepted, the finished state is maintained before and after the change of the one condition element. As described above, an interlocking change process for changing the other condition element may be executed. According to this laser processing apparatus, the finished state can be maintained by instructing maintenance even if the processing conditions are changed.

  In the laser processing apparatus, the processing conditions include at least processing speed and processing strength, and the control unit causes the reception unit to receive a time instruction for specifying a processing time, and the time instruction And a prohibition process for prohibiting the change of the machining speed on the condition that the process is accepted. According to this laser processing apparatus, it is possible to prevent the processing speed from being changed regardless of the processing time being specified.

  The laser processing apparatus includes a memory, and the control unit executes a storage process of storing the changed processing conditions in the memory. In the image display process, the processing conditions stored in the memory are set as initial conditions. Then, an image showing a finished state when processed under the initial conditions may be initially displayed on the display unit.

  According to this laser processing apparatus, the processing conditions stored in the memory are set as the initial conditions, and the finished image corresponding to the initial conditions is displayed on the display unit, so that the labor for setting the processing conditions can be reduced. .

  The present invention is realized in various modes such as a laser processing apparatus, a processing condition setting method, a computer program for realizing the functions of these methods or apparatuses, and a non-volatile recording medium storing the computer program. be able to.

  According to the invention disclosed in this specification, it is possible to grasp the finished state corresponding to the processing conditions without actually processing the object to be processed.

The block diagram which shows the structure of the laser processing system which concerns on one Embodiment. Flow chart showing control processing Figure showing the setting screen Diagram showing correspondence table of materials / uses and processing conditions

<One Embodiment>
A laser processing system 1 according to an embodiment will be described with reference to FIGS. The laser processing system 1 includes a communication terminal 2 and a laser processing device 3.

(Configuration of communication terminal)
The communication terminal 2 is, for example, a notebook computer, a tablet computer, or a PDA. The communication terminal 2 includes a central processing unit (hereinafter referred to as CPU) 21, a memory 22, a communication unit 23, a display unit 24, and an operation unit 25. The memory 22 stores various programs and a correspondence table to be described later. The various programs control, for example, a program for executing a control process to be described later and operations of each unit of the communication terminal 2. A program is included.

  The CPU 21 is an example of a control unit, and controls each unit of the communication terminal 2 according to a program read from the memory 22. The communication unit 23 can communicate with the laser processing apparatus 3 by a wireless communication method or a wired communication method. Examples of the wireless communication method are Wi-Fi, Bluetooth (registered trademark), NFC (Near Field Communication), and infrared communication. The display unit 24 includes a liquid crystal display, a lamp, and the like, and can display various setting screens and operation states of the apparatus. The operation unit 25 is an example of a reception unit, has a plurality of buttons, and can receive various input instructions from the user. The operation unit 25 may be an operation panel provided separately from the display unit 24 or a touch panel provided on the display screen of the display unit 24.

(Configuration of laser processing equipment)
The laser processing device 3 includes a CPU 31, a memory 32, a laser light source 33, a galvano scanner 34, a communication unit 35, a display unit 36, and an operation unit 37. The memory 32 stores various programs and a correspondence table to be described later. Examples of the various programs include a program for executing a control process to be described later and operations of each unit of the laser processing apparatus 3. A program for controlling is included.

  The CPU 31 is an example of a control unit, and the CPU 31 controls each unit of the laser processing apparatus 3 according to a program read from the memory 32. Further, the CPU 31 controls the laser light source 33 and the galvano scanner 34 based on the processing data generated based on the processing conditions, changes the direction of the laser light L emitted from the laser light source 33 by the galvano scanner 34, and performs processing. Processing is performed by scanning W with laser light L. The galvano scanner 34 is an example of a laser irradiation unit.

  The communication unit 35 can communicate with the communication terminal 2 by a wireless communication method or a wired communication method. The display unit 36 includes a liquid crystal display, a lamp, and the like, and can display various setting screens and operation states of the apparatus. The operation unit 37 is an example of a reception unit, has a plurality of buttons, and can receive various input instructions from the user. The operation unit 37 may be an operation panel provided separately from the display unit 36 or may be a touch panel provided on the display screen of the display unit 36.

(Control content)
The control contents executed by the CPU 31 of the laser processing apparatus 3 will be described with reference to FIGS.

(1) Control processing For example, when the user performs an operation of starting a control processing program by the operation unit 37, the CPU 31 of the laser processing apparatus 3 executes the control processing shown in FIG. The control process is a process for setting and changing the processing conditions. Hereinafter, description will be made by taking, as an example, the processing speed that is the scanning speed of the laser light L by the galvano scanner 34 and the processing intensity that is the intensity of the laser light L emitted from the laser light source 33 as the condition elements of the processing conditions. Note that the CPU 21 of the communication terminal 2 can execute the control process shown in FIG. 2 when the user performs an operation for starting the control process program by the operation unit 25, for example, but the description is omitted.

(1-1) Setting Screen First, the CPU 31 displays the setting screen shown in FIG. 3 on the display unit 36 (S1), and enters a state where processing conditions and the like can be received. On this setting screen, the following setting items and buttons are displayed.
The material usage display section 41 is a column in which materials and usages are displayed, and options are displayed in a pull-down manner.

The setting reflection button 42 is a button for confirming the set machining conditions.
The close button 43 is a button for closing the setting screen.
In the target product image column 44, an image of a product to be processed is displayed.
In the finished image column 45, a finished image G indicating the finished state when processed under the processing conditions set as described later is displayed. Therefore, the process of S1 is an example of an image display process.

The finish priority button 46 is a button that is pressed when it is desired to maintain the finished state even if the machining conditions are changed. The pressing operation of the finish priority button 46 is an example of a maintenance instruction, and the process of the CPU 31 at this time is an example of a maintenance acceptance process.
The processing time priority button 47 is a button that is pressed when it is desired to fix the processing time required to process the workpiece W even if the processing conditions are changed. The pressing operation of the processing time priority button 47 is an example of a time instruction, and the process of the CPU 31 at this time is an example of a time reception process.

  The machining time display unit 48 is a column for displaying the machining time, and the CPU 31 calculates the machining time based on the currently set machining speed and causes the machining time display unit 48 to display the calculated time. Thereby, the user can set and change the machining conditions with reference to the machining time. The process of the CPU 31 at this time is an example of a time display process. When the processing time priority button 47 is pressed, an arbitrary time can be input to the processing time display unit 48.

  The processing speed adjustment unit 49 is a column for adjusting the processing speed, and when the pointer 49A is moved to the left, the processing speed is reduced, and the visibility of the processing result is increased accordingly. When the pointer 49A is moved to the right, the processing speed increases, and accordingly, the visibility of the processing result decreases.

  The processing strength adjusting unit 50 is a column for adjusting the processing strength. When the pointer 50A is moved to the left, the processing strength becomes weaker and the processing depth becomes shallow accordingly. When the pointer 50A is moved to the right, the processing strength increases, and the processing depth increases accordingly. Note that the process of accepting a change instruction for changing the machining speed and the machining intensity via the operation unit 37 is an example of the change acceptance process.

  Further, the CPU 31 displays the contents corresponding to the initial conditions on each of the above parts of the setting screen (S1). The memory 32 stores a correspondence table shown in FIG. This correspondence table is a table showing the correspondence between materials / uses, processing conditions, and finished images. Examples of the material are resin, metal and the like, and examples of applications are processing of the substrate where the resist remains, processing of the substrate where the pattern is exposed, discrete, and the like. The CPU 31 reads a set of materials / uses, processing conditions, and finished images from the correspondence table and sets them as initial conditions. The process of S1 is an example of a setting process. Note that the CPU 31 may set the machining conditions by causing the user to input the machining conditions using the operation units 25 and 37 in the process of S1.

  Next, the CPU 31 determines whether or not the material / use has been changed (S2). When the user performs an operation for changing the material / use displayed on the material / use display section 41 on the operation section 37, the CPU 31 determines that the material / use is changed (S2: YES), and refers to the correspondence table. Then, the processing conditions and finished images corresponding to the changed materials and applications are read out, the display contents of the setting screen are changed based on the read processing conditions and finished images (S3), and the process proceeds to S4. If the CPU 31 determines that the material / use is not changed (S2: NO), the CPU 31 proceeds to S4 without performing the process of S3.

(1-2) Finishing priority mode In S4, the CPU 31 determines whether finishing priority is designated. When the user performs an operation of pressing down the finish priority button 46 on the operation unit 37, the CPU 31 determines that finish priority is designated (S4: YES), and the operation unit 37 issues a change instruction to change the machining speed. It is determined whether it has been accepted (S5).

  When the user performs an operation to move the pointer 49A of the processing speed adjustment unit 49 on the operation unit 37, the CPU 31 determines that an instruction to change the processing speed has been received (S5: YES), and finishes before and after the change of the processing speed. The processing strength is changed so that the state is maintained (S6), and the process proceeds to S7. Specifically, the CPU 31 increases the processing strength as the processing speed increases, and decreases the processing strength as the processing speed decreases.

  When it is determined in S5 that the machining speed change instruction has not been received (S5: NO), the CPU 31 determines whether or not a change instruction to change the machining intensity has been received (S8). When the user performs an operation to move the pointer 50A of the machining strength adjusting unit 50 on the operation unit 37, the CPU 31 determines that a machining strength change instruction has been received (S8: YES), and finishes before and after the machining strength change. The machining speed is changed so that the state is maintained (S9), and the process proceeds to S7.

  Specifically, the CPU 31 increases the processing speed when the processing strength increases, and decreases the processing speed when the processing strength decreases. Thereby, if the user designates finishing priority, the user can change the processing conditions while maintaining the finished state. The processes of S6 and S9 are an example of the interlock change process. At this time, the finished image G does not change before and after the change of the processing speed and the processing strength. If the CPU 31 determines in S8 that it has not received a machining strength change instruction (S8: NO), it proceeds to S7 without performing the process of S9.

(1-3) Time priority mode When CPU 31 determines that finish priority is not specified (S4: NO), CPU 31 determines whether time priority is specified (S10). When the user performs an operation of pressing down the processing time priority button 47 on the operation unit 37, the CPU 31 determines that time priority is designated (S10: YES), and sets the processing time input to the processing time display unit 48. The pointer 49A of the processing speed adjusting unit 49 is moved to the corresponding processing speed, fixed at that position, and the change of the processing speed is prohibited (S11). The process of S11 is an example of a prohibition process. Thereby, it is possible to prevent the machining speed from being changed regardless of the designated machining time.

  Next, the CPU 31 determines whether or not the operation unit 37 has received a machining strength change instruction (S12). If the CPU 31 determines that a machining strength change instruction has been received (S12: YES), the machining intensity is changed. Accordingly, the finished image G is changed (S13), and the process proceeds to S7. Specifically, the CPU 31 changes the finished image G to an image with a deeper processing depth as the processing strength is higher, and changes the finished image G to an image with a lower processing depth as the processing strength is lower. As described above, when the processing conditions are changed, the finished image G displayed on the display unit 36 is changed to an image showing a finished state when the processing is performed under the changed processing conditions. Thereby, even if it does not actually process the processing target object W, the finished state corresponding to the processing conditions can be grasped. The process of S13 is an example of an image change process.

  In S10, the CPU 31 determines that time priority is not specified (S10: NO), determines whether or not a change instruction for at least one of the processing speed and the processing strength is received (S14), and receives the change instruction. If it is determined (S14: YES), the finished image G is changed according to the contents of the change instruction (S15), and the process proceeds to S7. The process of S15 is an example of an image change process. If the CPU 31 determines in S14 that a change instruction has not been received (S14: NO), the process proceeds to S7 without changing the machining conditions.

  In S7, the CPU 31 determines whether or not the processing conditions are confirmed. When the user performs an operation of depressing the setting reflection button 42 on the operation unit 37, the CPU 31 determines that the machining conditions have been confirmed (S7: YES), and the confirmed machining conditions are currently displayed on the material usage display unit 41. Is stored in the correspondence table in association with the material / use displayed in (S16), and this control process is terminated. As a result, when the control process is executed next time, it is possible to initially display the setting screen with the contents corresponding to the machining conditions determined this time. Thereby, the trouble of setting a processing condition can be reduced. The process of S16 is an example of a storage process. If the CPU 31 determines in S7 that the processing conditions have been confirmed (S7: NO), the CPU 31 returns to S2.

<Other embodiments>
The technology disclosed in the present specification is not limited to the embodiments described with reference to the above description and drawings, and includes, for example, the following various aspects.

  The control unit is configured to execute each process of FIG. 2 by one CPU 21, 31. However, the present invention is not limited to this, and the control unit has a configuration in which each process in FIG. 2 is executed by a plurality of CPUs, a configuration in which each process in FIG. 2 is executed only by a dedicated hardware circuit such as an ASIC (Application Specific Integrated Circuit). The CPU and the hardware circuit may cooperate to execute each process in FIG.

  The processing conditions are not limited to the processing speed and processing strength, but may be a line width, a filling density, or the like.

  2: Communication terminal 3: Laser processing device 21, 31: CPU 22, 32: Memory 25, 37: Operation unit 34: Galvano scanner G: Finished image L: Laser light W: Processing object

Claims (5)

Based on the processing conditions, a laser irradiation unit for processing by irradiating the processing target with laser light;
A display unit;
A reception department;
A control unit,
The controller is
Setting process to set machining conditions,
An image display process for displaying on the display unit a finished image indicating a finished state when processed under the processing conditions set in the setting process;
A change reception process for causing the reception unit to receive a change instruction to change the processing condition;
An image change process for changing the finished image to be displayed on the display unit to an image indicating a finished state when the finish image is processed under the processing conditions after the change instruction, and a laser processing apparatus,
The processing conditions include at least processing speed and processing strength,
The controller is
A maintenance reception process for causing the reception unit to receive a maintenance instruction to maintain a finished state;
If the change instruction is an instruction to change one of the condition elements of the machining speed and the machining intensity on the condition that the maintenance instruction is received, the finished state is maintained before and after the change of the one condition element. A laser processing apparatus that executes an interlocking change process for changing the other condition element. The laser processing apparatus according to claim 1 ,
Before Symbol control unit,
The laser processing apparatus which performs the time display process which displays on the said display part the process time required to process a process target object on the said process conditions based on the said process speed. The laser processing apparatus according to claim 1 or 2 ,
Before Symbol control unit,
A time reception process for causing the reception unit to receive a time instruction for specifying a processing time;
And a prohibiting process for prohibiting the change of the processing speed on condition that the time instruction is received . The laser processing apparatus according to any one of claims 1 to 3,
With memory,
The controller is
A storage process for storing the changed machining conditions in the memory;
In the image display process, a laser processing apparatus that uses a processing condition stored in the memory as an initial condition and displays an image indicating a finished state when the processing is performed under the initial condition on the display unit . Based on the processing conditions, connected to a laser processing apparatus for processing by irradiating the processing target with laser light, and connected to a communication terminal having a display unit and a receiving unit,
Setting process to set machining conditions,
An image display process for displaying on the display unit a finished image indicating a finished state when processed under the processing conditions set in the setting process;
A change reception process for causing the reception unit to receive a change instruction to change the processing condition;
A processing condition setting program for executing an image change process for changing the finished image to be displayed on the display unit to an image indicating a finished state when the finishing image is processed under the processing conditions after the change instruction .
The processing conditions include at least processing speed and processing strength,
Maintenance acceptance processing for accepting a maintenance instruction for maintaining the finished state from the acceptance unit;
If the change instruction is an instruction to change one of the condition elements of the machining speed and the machining intensity on the condition that the maintenance instruction is received, the finished state is maintained before and after the change of the one condition element. Linked change processing for changing the other condition element.
Line is to, processing condition setting program.

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