JP6310876B2 - Specimen holder, stage device, and charged particle beam device using the same - Google Patents

Description

  The present invention relates to a sample holder, a stage apparatus, and a charged particle beam apparatus using the same.

  A charged particle beam device that accelerates charged particles at a voltage of 1 million volts or more, when processing or observing a fine structure of 1 nm or less into a sample, the processing speed decreases, the observation image becomes dark, and the image recording time increases. Sometimes. At this time, if there is a phenomenon in which the sample moves in a single direction (hereinafter referred to as drift), processing defects occur or fine structure recording cannot be performed. Drift occurs due to changes in temperature distribution over time and changes in stage deformation in a stage on which a sample is mounted and the irradiation position of a charged particle beam is positioned.

  Since the change of the temperature distribution decreases with time, the influence of drift can be reduced by performing sufficient warm-up operation when the apparatus is started. However, the deformation of the stage occurs every time the position where the charged particle beam is applied to the sample is adjusted, and the deformation differs depending on the position adjustment. Therefore, if the deformation of the stage is not reduced, fine processing and detailed structure are required. Cannot record.

  As the stage on which the sample is mounted, a side entry type stage is often used because of the wide observation range of the sample. This type of stage has a convex spherical surface on the stage side, and performs operations related to positioning of the sample by sliding with a concave spherical surface installed on the charged particle beam apparatus side. The deformation of the stage is generated by the frictional force generated by the friction and surface pressure of this sliding surface, and is balanced with the reaction force by the stage deformation (the stage is stationary). growing. If this surface pressure changes due to an external force and the frictional force generated on the sliding surface may be reduced, it will not be balanced with the reaction force due to the previous stage deformation, and the stage until the frictional force and the reaction force due to the stage deformation are balanced. The size of the deformation changes and the stage drifts.

  The external force is mainly caused by vibration propagated from the outside. When the period of this vibration is short, the time during which the frictional force of the sliding surface becomes smaller than the reaction force due to the stage deformation is shortened, and the amount of deformation of the stage is reduced. Change is also small (drift is small). In addition, when the frictional force on the sliding surface decreases, the force generated on the sliding surface decreases and the amount of deformation of the stage also decreases, so that the frictional force on the sliding surface is less than the reaction force due to stage deformation. In addition, the amount of change in the deformation of the stage is reduced, and the drift of the stage is also reduced. A technique for reducing this drift is disclosed in Patent Document 1, for example.

JP-A-4-129150

  In Patent Document 1, a spring is inserted for the purpose of making the pressing force of the spherical fulcrum (convex spherical surface) and the receiver (concave spherical surface) variable, and the friction force (= friction × pressing force) generated between them is reduced, and the sample is removed. I tried not to drift. However, according to this method, in order to adjust the position of the sample, when the stage is swung around the sphere as a fulcrum, the push spring generates a force in a direction perpendicular to the pushing direction. Since the spring is deformed by force, the stage may be deformed and the sample may be vibrated if the spring force changes in the expansion / contraction direction due to external vibration.

  The object of the present invention is to reduce the frictional force generated on the sliding surface of the spherical fulcrum (convex spherical surface) and its receiver (concave spherical surface) in order to solve the problem of drift of the sample mounted on the stage. An object of the present invention is to provide a sample holder, a stage apparatus, and a charged particle beam apparatus using the same, in which the stage is not deformed over time even when the head is swung (sample position adjustment).

As an embodiment for achieving the above object, a holding unit for holding a sample,
A spherical fulcrum that is arranged in close contact with the spherical receiver and allows the position of the sample to be adjusted by sliding;
The sliding surface of the spherical fulcrum has a metal region and a member region having a friction smaller than that of the metal.

Further, a holder provided with a tip portion for holding a sample and a main body portion for supporting the tip portion,
A stage provided with a spherical fulcrum disposed over the main body portion of the holder and disposed on the tip end side of the holder;
A spherical receiver that is arranged in close contact with the spherical fulcrum and allows the position of the sample to be adjusted by sliding;
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver has a metal region and a member region having a friction smaller than that of the metal.

A charged particle source, a stage device for placing the sample and adjusting the sample position, and a charged particle optical system that irradiates the sample with charged particles emitted from the charged particle source as charged particle beams. In particle beam equipment,
The stage apparatus is a side entry type, and has a spherical fulcrum and a spherical receiver that are arranged in close contact and can adjust the position of the sample,
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver has a metal region and a member region having a friction smaller than that of the metal.

  According to the present invention, even if the frictional force generated on the spherical fulcrum and its receiving sliding surface is reduced and the stage is swung (sample position adjustment), the stage does not deform over time. A holder, a stage device, and a charged particle beam device using the same can be provided.

1 is an overall schematic cross-sectional view of a charged particle beam apparatus according to a first embodiment of the present invention. It is sectional drawing of the stage apparatus which concerns on 1st Example of this invention. It is a cross-sectional perspective view of the spherical receiver in the stage apparatus which concerns on 1st Example of this invention. It is sectional drawing for demonstrating the structure of the spherical receiver shown in FIG. FIG. 5 is a cross-sectional view for explaining a manufacturing method of the spherical receiver shown in FIG. 4, wherein (a) is a state in which a concave member 141 having a smaller friction than metal is formed by covering a metal concave surface 143 formed by a cutting machine; ) Shows a state in which the surface of the concave member 141 is cut to a target height with a cutting machine, and (c) shows a state in which the concave member 141 on the metal concave surface 143 is cut to expose the metal concave surface 139. It is a section perspective view explaining other structures of a spherical receiver in a charged particle beam device concerning the 1st example of the present invention. It is a perspective view for demonstrating the stage apparatus based on the 2nd Example of this invention. It is a perspective view for demonstrating the structure of the spherical fulcrum of the stage apparatus which concerns on 2nd Example of this invention.

  The inventors first studied a method of using a highly rigid member (W, Mo, etc.) that is difficult to deform as a method for solving the problem that the sample mounted on the stage drifts. However, with this method, there was a concern about an increase in the weight of the stage. Then, next, it examined from the viewpoint of making the frictional force which generate | occur | produces on a spherical fulcrum and its receiving sliding surface small. In order to reduce the frictional force, the inventors decided to reduce the friction of the sliding surface between the spherical fulcrum and the spherical receiver without using the spring used in the prior art. That is, a configuration is provided in which regions having different friction are provided on the sliding surfaces of the spherical fulcrum and the spherical receiver. Further, the height of the sliding surface is made different so that the stress generated on each sliding surface is different, and the friction between the spherical fulcrum and the spherical receiver is reduced. Thereby, the drift of the sample is reduced, and the fine structure can be observed and processed. In addition, the vibration (vibration) of the sample does not increase, and the microstructure can be observed and processed.

  Examples will be described in detail below. Note that the present invention can be applied to an apparatus including a side entry type stage for observing and processing a fine structure using an electron beam or ion beam such as TEM, SEM, STEM, or FIB.

A first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an overall schematic cross-sectional view of the charged particle beam apparatus according to the present embodiment. The operation of the charged particle beam apparatus 101 will be described with reference to FIG. In FIG. 1, a charged particle beam apparatus 101 irradiates a charged particle 105 emitted from an electron gun 103 onto a sample (not shown) that is disposed between an objective lens 109 and held by a holder 111 by a focusing lens 107. To do. The charged particle 105 undergoes intensity modulation when passing through the sample, and its intensity distribution is enlarged by the magnetic coil 113 attached to the objective lens 109. Further, the intensity distribution of the charged particles 105 is sequentially enlarged by the intermediate lens 115 and the projection lens 117 having a magnetic coil, and the intensity distribution is converted into visible light by the fluorescent screen 119, so that the state of the sample can be observed. The sample held in the holder 111 is observed in a wide range of state distribution by changing the irradiation position of the charged particles 105 by the side entry type stage 121. The holder 111 includes a tip portion that holds the sample and a main body portion that supports the tip portion, and the main body portion of the holder 111 is disposed inside the stage 121.

  FIG. 2 is a cross-sectional view of the side entry type stage apparatus according to the embodiment. The operation of the holder 111 and the stage 121 will be described with reference to FIG. In FIG. 2, a sample (not shown) is held at the tip of the holder 111 and placed immediately below the objective lens 109. The position of the holder 111 in the axial direction (left-right direction: X direction) is adjusted by pulling the screw 123 and pushing the spring 125. The position in the direction perpendicular to the axial direction of the holder 111 (vertical direction: Z direction) is such that a spherical fulcrum 127, which is a part of the stage 121 that holds the holder 111, is installed in the charged particle beam apparatus 101 and is in contact therewith. The spherical center of 129 is adjusted by sliding by pushing the screw 131 and the spring 133 (swinging motion).

  The position of the stage 121 in the direction around the axis (rotation direction around the X axis) is adjusted by rotating the plate 135 by pushing a screw (not shown) and pushing a spring. In the position adjustment of the sample (not shown), when the spherical fulcrum 127 of the stage 121 slides with the spherical receiver 129, the friction and atmospheric pressure of the sliding surface are the surface pressure due to the force pressing the stage 121 and the holder 111, and the sliding A frictional force is generated along the moving surface. For example, if the O-ring 137 for vacuum sealing has an outer diameter of 30 millimeters, the pressing force due to atmospheric pressure is 71 N, and the friction between the spherical fulcrum 127 and the sliding surface of the spherical receiver 129 is 0.3. The frictional force is 21N. With this force, for example, if the material is phosphor bronze, the stage 121 is deformed by 42 μm at both ends to become a bow shape, and a strain of 28 microstrain is generated near the spherical fulcrum 127. At this time, if an external force is applied to the stage 121, the surface pressure of the sliding surface changes to reduce the frictional force generated on the sliding surface, and the deformation amount of the stage 121 deformed by this frictional force is reduced. Gradually get smaller. This change becomes a drift that changes the position of the sample mounted on the holder 111, and processing defects occur or fine structure recording becomes impossible. Since this drift is small when the deformation of the stage 121 is small, in this embodiment, the friction between the sliding surfaces of the spherical fulcrum 127 and the spherical receiver 129 is reduced to reduce the deformation of the stage 121. did.

  3 and 4 are views of a spherical receiver in the side entry type stage apparatus according to the present embodiment. The structure of the spherical receiver 129 will be described with reference to these drawings. In FIG. 3, the portion (sliding surface) of the spherical receiver 129 that is in contact with the spherical fulcrum 127 is compared with the region of the concave surface 143 that is the same material (metal) as the spherical receiver 129, and the friction is compared with the metal that forms the concave surface 143. And a concave surface 139 made of a small concave surface member 141. For example, if the radius of the spherical fulcrum 127 is 15 mm, the diameter of the concave surface 139 of the concave surface 139 of the concave surface member 141 while the radius of the concave surface 143 remains 15 mm (the distance between the concave surface center 145 and the concave surface 143 in FIG. 4). Is 14.7 mm (in FIG. 4, the distance between the concave center 145 and the concave surface 139), and the surface with small friction is made higher than the surface with large friction.

In order for the spherical fulcrum 127 to come into close contact with the spherical receiver 129, the spherical fulcrum 127 first contacts the concave surface 139 first, and contacts the concave surface 143 while compressing the concave member 141. For this reason, the spherical fulcrum 127 is reduced in surface pressure by reducing the force applied to the concave surface 143 by the reaction force from the concave member 141. For example, the friction of the concave surface 143 is 0.3, and the friction of the concave surface 139 is 0.15. Assuming that the pushing force of the stage 121 due to atmospheric pressure is 71 N, the reaction force of the concave surface 139 is 41 N, and the force applied to the concave surface 143 is 30 N, the frictional force generated on the sliding surfaces of the spherical fulcrum 127 and the spherical receiver 129 is 15 .15N, which is smaller than the frictional force received only by the concave surface 143, and the deformation of the stage 121 due to this force is reduced, and drift can be suppressed. At this time, the apparent friction is as small as 0.21. The reaction force F1 that the spherical fulcrum 127 receives from the concave surface 139 can be expressed as shown in Equation 1, where the area S1 of the concave surface 139, the step difference dH on both sides, the thickness H of the concave member 141, and the Young's modulus E1 of the concave member 141. it can.
F1 = E1 × S1 × (dH / H) (1)
For example, assuming that the area of the concave surface 139 is 12 square millimeters, the step between the concave surfaces 139 and 143 is 51 micrometers, the thickness of the concave member 141 is 5 millimeters, and the Young's modulus of the concave member 141 is 0.5 GPa, the reaction force is 61 N. If the concave surface member 141 is made of a fluororesin material, the friction coefficient is 0.05. Therefore, if 10 N is applied to the concave surface 143 (with a friction coefficient of 0.3), the friction force is reduced to 6 N (at this time, apparent ) And the deformation of the stage 121 is small and drift can be suppressed. The apparent friction can be reduced by making the area S1 of the concave surface 139 larger than the area of the concave surface 143.

  FIG. 5 is a cross-sectional view for explaining a method of manufacturing the spherical receiver shown in FIG. 4, and shows a procedure for forming the concave surface 139 on the concave surface 143 and the concave member 141 in the spherical receiver 129. First, the concave member 141 is formed so as to cover the concave surface 143 formed by processing the same material (metal) as that of the spherical receiver 129 with a cutting machine, and is processed to be higher than the target height with the cutting machine (FIG. 5A). ). Next, the surface of the concave member 141 is cut to a target height (broken line 147 in FIG. 5A) with a cutting machine (FIG. 5B). Subsequently, the concave member 141 on the concave surface 143 is cut to expose the concave surface 143 (FIG. 5C). The concave member 141 may be left on the concave surface 143 so as to be lower than the concave surface 139. Alternatively, a member having a smaller friction coefficient than metal can be formed on the concave surface 143 again. The thickness of the concave member 141 remaining on the concave surface 143 or the member formed on the concave surface 143 is preferably less than 30 micrometers. If it is thicker than this, the sample may vibrate due to the spring action of the member. A finite value of 1 micrometer or less is preferred.

  By this processing, the error of the reaction force of the concave surface 139 caused by the stress generated when the concave surface member is assembled to the spherical receiver 129 can be eliminated. In this embodiment, since the concave surface 139 and the concave surface 143 are installed on the atmosphere side via the O-ring 137 for vacuum sealing, dust caused by sliding between the spherical fulcrum 127 and the concave surface 139 does not enter the vacuum side. In other words, the charged particles 105 are not blocked. Further, even when the degree of vacuum increases, the friction between the spherical fulcrum 127 and the concave surface 143 on the atmosphere side does not change, and the charged particles 105 can be stably irradiated by processing or observing the sample. As shown in FIG. 5C, the concave member 141 is deformed by the force of atmospheric pressure when the spherical fulcrum 127 comes into contact with the concave surface 139 and continues to be deformed until the spherical fulcrum 127 comes into contact with the concave surface 143.

  FIG. 6 shows a configuration in the case where the concave surface 139 and the concave surface 143 which are sliding surfaces are installed on the vacuum side via the O-ring 149 for vacuum sealing in the spherical receiver 129. A concave surface 143 and a groove 153 into which the concave member 151 is inserted are processed in advance in the spherical receiver 129, and the concave member 151 is inserted into the groove 153 and fixed later. At this time, the stage 121 having the spherical fulcrum 127 is kept inserted in the spherical receiver 129, and a force corresponding to a pressing force by atmospheric pressure is applied in the direction in which the spherical fulcrum 127 pushes the concave surface 139 or the concave surface 143. The concave member 151 is pushed in until just before the stage 121 starts to move in the pushing direction of the concave member 151. By this adjustment, the force with which the spherical fulcrum 127 pushes the concave surface 143 is reduced, and the frictional force due to the friction of the concave surface 143 can be reduced. In a vacuum, when metal surfaces come into contact with each other, the friction may increase, but the spherical receiver 129 can reduce the frictional force. In addition, in order to reduce friction between metal surfaces in a vacuum, when a diamond-like carbon coating or nickel plating is applied to the surface of the concave surface 143, the coating or plating is destroyed if the pressing force of the spherical fulcrum 127 is strong. There is a fear. According to the spherical receiver 129 shown in FIG. 6, the force with which the spherical fulcrum 127 pushes the concave surface 143 can be reduced, so that breakage of these coatings and plating can be reduced / prevented. Further, the frictional force is reduced even in a vacuum, and the deformation of the stage 21 can be reduced, so that drift can be suppressed.

  The above embodiment shows an example for suppressing the drift, and is not limited to the configuration as described here. For example, it is automated using a motor in the turning operation of the screw 123 or 131. By doing so, the position of the sample can be adjusted without the vibration of the operator vibrating the sample.

  In addition, for example, if there are a pair of concave surfaces 139 and 143 on the surface where the spherical fulcrum 127 is in contact with the spherical receiver 129, drift can be suppressed by the effect of this embodiment, and if there are three or more pairs, the stage 121 is stationary. It is easy to stabilize and the vibration of the sample can be suppressed. Also, the assembly accuracy can be repeated with high accuracy by assembling the spherical fulcrum 127 and the spherical receiver 129.

  The side entry type stage apparatus shown in FIG. 2 having the spherical receiver shown in FIG. 3 or FIG. 6 can reduce and prevent deformation of the sample holder and the stage even if the sample position is adjusted by swinging motion. . Further, when the stage apparatus shown in FIG. 2 was mounted on the charged particle beam apparatus shown in FIG. 1, drift was suppressed and prevented, and a high-quality image could be obtained.

  As described above, according to the present embodiment, even if the frictional force generated on the spherical fulcrum and the sliding surface of the fulcrum is reduced and the stage is swung (sample position adjustment), the stage moves with time. A stage device that does not deform and a charged particle beam device using the same can be provided.

  A second embodiment of the present invention will be described with reference to FIGS. Note that the matters described in the first embodiment but not described in the present embodiment can be applied to the present embodiment as long as there is no particular circumstance.

  FIG. 7 shows an outline of a side-entry type stage apparatus that adjusts the position at which a charged particle beam is applied to a sample by the charged particle beam apparatus. The stage device 301 is fixed to a mirror body (not shown) of the charged particle beam device by a screw (not shown) through a screw hole 215 provided in the flange 213. Further, the spherical receiver 205 is fixed to a mirror body (not shown) of the charged particle beam apparatus with a screw (not shown) through a screw hole 211 provided in the flange 209. Reference numeral 207 denotes an O-ring.

  A holder 111 for placing the sample at the tip thereof is included in the stage 121, and the position of the sample is adjusted in the X direction indicated by an arrow 303 indicating the moving direction of the stage by turning a screw 123. The stage 121 is rotated in the Z direction (vertical direction with respect to the X axis) by turning the screw 131 about the center (not shown) of a spherical fulcrum installed inside the spherical receiver 205, and by turning the screw 201. The position of the sample is adjusted in the Y direction (left and right direction with respect to the X axis). By rotating the screw 203, the α direction (rotational direction around the X axis) is adjusted, and the incident angle of the charged particle beam to the sample is adjusted. If the operation of turning the screw 123 or 131 or screw 201 or 203 is automated by using a motor, the vibration of the operator does not vibrate the sample, and the position of the sample can be adjusted.

  FIG. 8 selectively shows a portion where the spherical fulcrum 127 on the stage 121 is in contact with the spherical receiver 129. The spherical fulcrum 127 includes a region of the convex surface 155 that is the same material (metal) as the spherical fulcrum 127 and a region of the convex surface 157 in which the friction is smaller than that of the convex surface 155 in the portion (sliding surface) in contact with the spherical receiver 129. Have For example, when the radius of the spherical fulcrum 127 is 15 mm, the radius of the convex surface of the convex surface 157 of the convex surface member 157 having a smaller friction than that of the metal remains 15.3 mm. However, the friction is higher on the small surface than on the large surface (configuration far from the center of the convex surface). Note that the holder 111 and the stage can also be fabricated as an integrated object.

  In order for the spherical fulcrum 127 to come into close contact with the spherical receiver 129, the spherical receiver 129 first contacts the convex surface 157 first, and contacts the convex surface 155 while compressing the convex member having a smaller friction than metal. Therefore, the spherical receiver 129 reduces the surface pressure by reducing the force applied to the convex surface 155 by the reaction force from the convex member having a smaller friction than metal. For example, the friction of the convex surface 155 is 0.3, and the friction of the convex surface 157 is 0.15. Assuming that the pushing force of the stage 121 due to atmospheric pressure is 71 N, the reaction force of the convex surface 157 is 41 N, and the force applied to the convex surface 155 is 30 N, the frictional force generated on the sliding surface of the spherical fulcrum 127 and the spherical receiver 129 is 15 .15N, which is smaller than the frictional force received only by the convex surface 155, and the deformation of the stage 121 due to this force is reduced, and drift can be suppressed. At this time, the apparent friction is as small as 0.21.

The reaction force F2 received by the spherical fulcrum 127 from the convex surface 157 is expressed by the following equation (2), assuming that the area S2 of the convex surface 157, the step dH on both surfaces, the thickness of the convex member with less friction than metal, and the Young's modulus are H and E2, respectively. Can be expressed as
F2 = E2 × S2 × (dH / H) (2)
For example, assuming that the area of the convex surface 157 is 12 square millimeters, the step between the convex surfaces 155 and 157 is 51 micrometers, the thickness of the convex member with less friction than metal, and Young's modulus are 5 millimeters and 0.5 GPa, respectively, the reaction force of 61 N It becomes. If the convex surface member with a smaller friction than metal is made of a fluororesin material, the friction coefficient is 0.05. Therefore, if 10N is applied to the convex surface 155 (with a friction coefficient of 0.3), the friction force will be reduced to 6N. (At this time, the apparent friction is as small as 0.08), the deformation of the stage 121 is small and the drift can be suppressed.

  As described in the above embodiment, this embodiment has the effect of suppressing drift. However, in the case of the configuration of this embodiment, the stage 121 has a spherical support 129 whose spherical fulcrum 127 is the same material (metal). And the concave surface 143 or the convex surface 155 are in direct contact with each other, and the support rigidity of the spherical fulcrum 127 is higher than that of the concave surface member 151 or the convex surface member that has less friction than this member. There is an effect that it is possible to suppress the occurrence of vibration with a large amplitude as described below.

  The above embodiment shows an example for suppressing drift, and is not limited to this description. For example, the convex surface 155 and the convex surface 157 are paired with the surface where the spherical fulcrum 127 is in contact with the spherical receiver 129. If it exists, drift can be suppressed by the effect of this embodiment, and if there are three or more pairs, the stationary state of the stage 121 can be easily stabilized and vibration of the sample can be suppressed. Also, the assembly accuracy can be repeated with high accuracy by assembling the spherical fulcrum 127 and the spherical receiver 129.

  In the sample holder having the spherical fulcrum shown in FIG. 8 or the side entry type stage device shown in FIG. 7 having the same, the deformation of the sample holder and the stage is reduced / prevented even if the sample position is adjusted by swinging motion. We were able to. Moreover, when the stage apparatus shown in FIG. 7 was mounted on the charged particle beam apparatus shown in FIG. 1, a high-quality image without drift could be obtained.

As described above, according to the present embodiment, even when the frictional force generated on the spherical fulcrum and its receiving sliding surface is reduced and the stage is swung (sample position adjustment), the stage is deformed over time. A sample holder, a stage device, and a charged particle beam device using the sample holder can be provided.
In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Also, a part of the configuration of a certain embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of a certain embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

DESCRIPTION OF SYMBOLS 101 ... Charged particle beam apparatus, 103 ... Electron gun, 105 ... Charged particle, 107 ... Condensing lens, 109 ... Objective lens, 111 ... Holder, 113 ... Magnetic coil, 115 ... Intermediate lens, 117 ... Projection lens, 119 ... Fluorescent plate, 121 ... Stage, 123 ... Screw, 125 ... Spring, 127 ... Spherical fulcrum, 129 ... Spherical support, 131 ... Screw, 133 ... Spring, 135 ... Plate, 137 ... O-ring, 139 ... Concave surface, 141 ... Concave member, 143 ... Concave surface, 145 ... center of concave surface, 147 ... broken line, 149 ... O-ring, 151 ... concave member, 153 ... groove, 155 ... convex surface, 157 ... convex surface, 201 ... screw, 203 ... screw, 205 ... spherical receiver, 207 ... O Ring, 209 ... flange, 211 ... screw hole, 213 ... flange, 215 ... screw hole, 301 ... stage device, 303 ... stage moving direction The arrow shown.

Claims (13)

A charged particle source, a stage device for placing the sample and adjusting the sample position, and the charged particle source
A charged particle optical system for irradiating the sample with the discharged charged particles as a charged particle beam
In the particle beam device,
The stage device is a side-entry type, and is placed in close contact so that the position of the sample can be adjusted.
A spherical fulcrum and a spherical receiver
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver is larger than the metal region and the metal.
A region of a member with low friction,
The charged particle beam apparatus according to claim 1, wherein in a state in which the spherical fulcrum and the spherical receiver that are in close contact with each other are separated from each other, the region of the member having a smaller friction than the metal is higher than the region of the metal. A charged particle source, a stage device for placing the sample and adjusting the sample position, and the charged particle source
A charged particle optical system for irradiating the sample with the discharged charged particles as a charged particle beam
In the particle beam device,
The stage device is a side-entry type, and is placed in close contact so that the position of the sample can be adjusted.
A spherical fulcrum and a spherical receiver
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver is larger than the metal region and the metal.
A region of a member with low friction,
The charged particle beam device according to claim 1, wherein the region of the member having a smaller friction than the metal has a larger area than the region of the metal. A charged particle source, a stage device for placing the sample and adjusting the sample position, and the charged particle source
A charged particle optical system for irradiating the sample with the discharged charged particles as a charged particle beam
In the particle beam device,
The stage device is a side-entry type, and is placed in close contact so that the position of the sample can be adjusted.
A spherical fulcrum and a spherical receiver
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver is larger than the metal region and the metal.
A region of a member with low friction,
A charged particle beam apparatus characterized in that there are three or more pairs of a region of a member having a smaller friction than the metal and a region of the metal. In the charged particle beam device according to any one of claims 1 to 3 ,
The charged particle beam device, wherein the member having a smaller friction than the metal is a fluororesin. In the charged particle beam device according to any one of claims 1 to 3 ,
The charged particle beam apparatus, wherein the metal region is covered with a member having a smaller coefficient of friction than the metal having a thickness of less than 30 micrometers. The charged particle beam device according to claim 5 , wherein
The charged particle beam apparatus, wherein the member covering the metal region is a diamond-like carbon film or nickel plating. In the charged particle beam device according to any one of claims 1 to 3 ,
The charged particle beam apparatus according to claim 1, wherein the spherical fulcrum and the sliding surface of the spherical receiver are arranged in a vacuum. In the charged particle beam device according to any one of claims 1 to 3 ,
The charged particle beam apparatus according to claim 1, wherein the spherical fulcrum and the sliding surface of the spherical receiver are arranged in an atmospheric pressure. A holder having a tip portion for holding a sample and a main body portion for supporting the tip portion;
A sphere disposed over the main body of the holder and disposed on the tip side of the holder
A stage with a fulcrum,
A spherical receiver that is arranged in close contact with the spherical fulcrum and allows the position of the sample to be adjusted by sliding.
And having
The sliding surface of the spherical fulcrum or the sliding surface of the spherical receiver is made of a metal region and the metal.
And a region of a member having a small friction,
In the state where the spherical fulcrum and the spherical receiver that are in close contact with each other are separated from each other, the region of the member having a smaller friction than the metal is higher than the region of the metal. The stage apparatus according to claim 9 , wherein
The stage apparatus characterized in that the member having a smaller friction than the metal is a fluororesin. The stage apparatus according to claim 9 , wherein
The stage apparatus characterized in that the metal region is covered with a member having a smaller friction coefficient than the metal having a thickness of less than 30 micrometers. A holding unit for holding the sample;
A spherical fulcrum that is arranged in close contact with the spherical receiver and allows the position of the sample to be adjusted by sliding;
The sliding surface of the spherical fulcrum has a metal region and a region of a member having a friction smaller than that of the metal. The sample holder according to claim 12 ,
In the state where the spherical fulcrum and the spherical receiver are separated from each other, the region of the member having a smaller friction than the metal is higher in height than the region of the metal.

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